Automated gas supply system including mobile robotic devices

The automated gas supply system uses a mobile robotic device with cooperative robots and a three-dimensional vision camera to address alignment challenges, enabling efficient and compact gas supply system operations.

JP7850382B2Active Publication Date: 2026-04-23KC LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
KC LTD
Filing Date
2024-12-05
Publication Date
2026-04-23

AI Technical Summary

Technical Problem

Existing gas supply systems for processes like semiconductor manufacturing face challenges in aligning gas containers with gas supply devices due to the high weight of the containers, requiring large cabinets to accommodate actuators for positional adjustment, and manual alignment is difficult.

Method used

An automated gas supply system using a mobile robotic device with cooperative robots and a three-dimensional vision camera to align and fasten connectors to gas containers, enabling external power supply and reducing the size of the gas supply system.

Benefits of technology

The system efficiently aligns gas supply devices with gas containers via three-dimensional mapping, reducing the need for large cabinets and facilitating automated alignment and connection processes.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

To provide a gas supply system including a cabinet and a fastening device capable of being fastened to a valve of a gas vessel while being aligned to the gas vessel, and to provide a mobile robot device connected to the fastening device so as to be separable and moving and operating the fastening device.SOLUTION: A mobile robot device includes: a body; a first cooperation robot disposed in the body; a second cooperation robot disposed in the body; a three-dimensional vision camera for collecting images; and a controller for controlling motions of the first cooperation robot and the second cooperation robot on the basis of the collected images.SELECTED DRAWING: Figure 3A
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Description

Technical Field

[0001] The following embodiments relate to an automated gas supply system including a mobile robot device.

Background Art

[0002] Generally, in a process that uses gas, for example, in a process where precise work is performed such as a semiconductor manufacturing process, it is required that a gas of a type suitable for the purpose of each process be supplied while satisfying a certain concentration and pressure.

[0003] In order to efficiently supply gas during the process, various types of gases are stored in gas containers in a high-pressure state, and gas containers storing gases containing components harmful to the human body are stored in an unmanned state under strict management.

[0004] The gas container is connected to the gas supply device to discharge the gas stored inside. When all the gas inside the gas container is consumed, after separating the gas supply device from the valve of the gas container, the gas container is removed, and a series of replacement processes of fastening a new gas container to the gas supply device are performed.

[0005] On the other hand, in order to connect the gas supply device to the gas container, the valve of the gas container and the gas supply device must be aligned. However, due to the high weight characteristic of the gas container, it is difficult to align the position, and the gas supply device operates so as to be positionally aligned with the valve of the gas container. Therefore, since the gas supply device includes an actuator for receiving power supply for position adjustment and operation, the size of the cabinet where gas is supplied is required to be formed to a size that can accommodate the gas supply device.

[0006] The background art described above is what the inventor retained or acquired in the process of deriving the disclosure content of this specification, and it cannot necessarily be said that it is publicly known technology that was publicly disclosed to the general public before this application.

Summary of the Invention

Problems to be Solved by the Invention

[0007] One objective of this embodiment is to provide an automated gas supply system in which the power supply source is located externally, thereby enabling a reduction in the size of the gas supply system.

[0008] One embodiment aims to provide an automated gas supply system that can align the gas supply device with respect to a gas container via three-dimensional mapping through a mobile robotic device. [Means for solving the problem]

[0009] A gas supply system according to one embodiment may include a cabinet in which a gas container is placed, a connector that can be fastened to a valve of the gas container and supplies process gas from inside the gas container to a supply pipe when fastened to the valve, and a mobile robot device located outside the cabinet that automatically fastens the connector to the valve. The mobile robot device may include a body that is movable outside the cabinet, a first cooperative robot located on the body and including a first articulated arm having multiple degrees of freedom of movement, which operates to fasten the connector to the valve, a second cooperative robot located on the body and including a second articulated arm having multiple degrees of freedom of movement, which operates to support the gas container, a three-dimensional vision camera for collecting images, and a control unit that controls the operation of the first and second cooperative robots based on the images collected by the three-dimensional vision camera.

[0010] The first cooperative robot may further include a first grip module provided at the end of the first articulated arm for gripping the connector, and the first cooperative robot may be configured to fasten the connector to the valve while the first grip module is gripping the connector.

[0011] The control unit determines the operation information of the first cooperative robot according to a set algorithm, the set algorithm generates a 3D model of the valve and connector in real time from the collected images, compares the generated 3D model with a set reference model to determine the image similarity, and can operate the first cooperative robot so that the connector is positioned at a predicted position where the image similarity is equal to or greater than a set value.

[0012] The control unit can determine a valve fastening position aligned so that the connector can be fastened to the valve, based on the image collected by the 3D vision camera, and can control the operation of the first cooperative robot so that the connector is positioned at the valve fastening position.

[0013] The second collaborative robot may further include a second gripping module provided at the end of the second articulated arm for grasping objects.

[0014] The second cooperative robot may be configured such that, in the process of the first cooperative robot operating to fasten the connector to the valve, the second grip module grasps and supports the gas container.

[0015] The control unit can determine a gripping position for the second grip module to grasp the gas container based on the image collected by the 3D vision camera, and can operate the second collaborative robot to grasp the gas container after it has moved to the gripping position.

[0016] The second collaborative robot is configured to grip the gasket via the second grip module, and the control unit can operate the second grip module to separate and attach the gasket to the connector or valve based on images collected by the 3D vision camera.

[0017] The cabinet is provided with a support chain for surrounding the gas container, and the first or second cooperative robot may be configured to adjust the position of the support chain within the cabinet.

[0018] The three-dimensional vision camera is provided in one or more locations and can be positioned on at least one of the first articulated arm or the second articulated arm.

[0019] A gas supply system according to one embodiment may include a cabinet in which a gas container is placed, a fastening device for fastening a connector to the valve while aligned with the valve of the gas container, and a mobile robot device for automatically aligning the fastening device to the gas container. The mobile robot device may include a body that can move along the ground, a first cooperative robot positioned on the body and including a first articulated arm, and a second cooperative robot positioned on the body and including a second articulated arm.

[0020] The system may include a three-dimensional vision camera for collecting images and a control unit that controls the operation of the first and second collaborative robots based on the images collected by the three-dimensional vision camera. The first collaborative robot may be detachably connected to the fastening device and configured to move the fastening device.

[0021] The first cooperative robot further includes a docking module provided at the end of the first articulated arm, which is docked to the fastening device while aligned with the fastening device, and the docking module is capable of supplying power to the fastening device while docked to the fastening device.

[0022] The control unit can determine a docking position aligned so that the docking module can be fastened to the fastening device, based on the image collected by the 3D vision camera, and can control the operation of the first cooperative robot so that the docking module is positioned at the docking position.

[0023] The docking module includes a docking plate formed with one or more docking members, and a power motor that supplies power to the fastening device while being docked to the fastening device. The fastening device can include one or more fixed clamps detachably coupled to the docking member, and a power transmission unit to which the power motor is connected and supplied with the power of the power motor.

[0024] The docking position is determined by a set algorithm. The set algorithm generates a three-dimensional model for a virtual space in real time via the three-dimensional vision camera, discriminates an image similarity by comparing the generated three-dimensional model with a set reference model, and can be set to determine the predicted position of the docking module where the image similarity is greater than or equal to a set value as the docking position.

[0025] The fastening device further includes an end cap separation unit for removing an end cap from a valve of the gas container. The end cap separation unit is rotatable about a first rotation axis, and an insertion groove formed in a form corresponding to the end cap is formed in the end cap separation unit so that the end cap can be inserted along the first rotation axis. In a state where the fastening device is aligned with a first position, the first rotation axis can coincide with a central axis of the valve.

[0026] The connector can rotate about a second Rotation axis and can translate along the second Rotation axis In a state where the fastening device is aligned with a second position, the second Rotation axis can coincide with the central axis of the valve.

[0027] A gas supply system according to an embodiment may include a cabinet in which a gas container is disposed, a fastening device movably provided inside the cabinet and fastened to the valve of the gas container via a connector in a state aligned with the valve of the gas container, and a mobile robot device disposed outside the cabinet for automatically aligning the fastening device with the gas container. The fastening device may include a docking portion for receiving power supply from the outside. The mobile robot device may include a body movable along the ground, a first collaborative robot disposed on the body and including a first multi-joint arm, a second collaborative robot disposed on the body and including a second multi-joint arm, a three-dimensional vision camera for collecting images, and a control unit for controlling the operations of the first collaborative robot and the second collaborative robot based on the images collected by the three-dimensional vision camera. The first collaborative robot may include a docking module provided at an end of the first multi-joint arm and connected to the fastening device in a state aligned with the fastening device for operating the fastening device. The second collaborative robot may include a gasket gripper provided at an end of the second multi-joint arm for gripping a gasket.

[0028] The mobile robot device may further include a gasket storage portion disposed on the body for storing gaskets.

[0029] Based on the images collected by the three-dimensional vision camera, the control unit may determine a gasket replacement position for replacing the gasket and control the operation of the second collaborative robot so that the gasket gripper moves to the determined gasket replacement position.

Advantages of the Invention

[0030] According to the present invention, an automated gas supply system including a mobile robot device can be provided.

[0031] The effects of the gas supply system according to one embodiment are not limited to those mentioned above, and other effects not mentioned can be clearly understood by those skilled in the art from the following description. [Brief explanation of the drawing]

[0032] [Figure 1] This is a partial perspective view of a gas container according to one embodiment. [Figure 2A] This is a perspective view of a gas supply system according to one embodiment. [Figure 2B] This is a front view of a gas supply system according to one embodiment. [Figure 2C] A perspective view showing a fastening device and alignment module according to one embodiment. [Figure 2D] This diagram schematically shows the position adjustment process of a fastening device according to one embodiment. [Figure 2E] This is a perspective view of a mobile robot device according to one embodiment. [Figure 2F] This figure shows a docking module according to one embodiment. [Figure 2G] This diagram shows the process by which a docking module is connected to a fastening device according to one embodiment. [Figure 3A] This is a perspective view of a gas supply system according to one embodiment. [Figure 3B] This is a perspective view of a mobile robot device according to one embodiment. [Figure 3C] This figure shows a docking module according to one embodiment. [Figure 3D] This is an operational diagram showing the process of aligning a first collaborative robot and a second collaborative robot via a 3D vision camera in a gas supply system according to one embodiment. [Figure 3E] This figure shows the process by which a mobile robot device according to one embodiment is fastened to a fastening device. [Figure 4A] This is a perspective view of a gas supply system according to one embodiment. [Figure 4B]This figure shows a gas supply system according to one embodiment, with a gas container placed on a cabinet. [Figure 4C] This is a perspective view of a mobile robot device according to one embodiment. [Figure 4D] This is an operation diagram showing the operation of a mobile robot device according to one embodiment in which it fastens a support chain. [Figure 4E] This is an operational diagram showing the process by which a mobile robot device according to one embodiment aligns a connector with the valve of a gas container via a 3D vision camera. [Figure 5] This is a perspective view of a mobile robot device according to one embodiment. [Figure 6] This is a flowchart of a gas supply method according to one embodiment. [Modes for carrying out the invention]

[0033] Embodiments will be described in detail below with reference to the attached drawings. However, the specific structural or functional descriptions disclosed herein are merely illustrative for the purpose of illustrating the embodiments, and the embodiments can be carried out in various different forms, and the present invention is not limited to the embodiments described herein. All modifications, equivalents, or substitutions to the embodiments should be understood to be included within the scope of the rights.

[0034] The terms used in the embodiments are for illustrative purposes only and should not be construed as limiting. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this specification, terms such as “includes” or “having” indicate the presence of features, figures, steps, actions, components, parts, or combinations thereof described in the specification, and should not be understood as preemptively excluding the possibility of the presence or addition of one or more other features, figures, steps, actions, components, parts, or combinations thereof.

[0035] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as those generally understood by a person of ordinary skill in the art to which this embodiment belongs. Commonly used, predefined terms should be interpreted as having the meaning consistent with their meaning in the context of the relevant art, and not as ideal or overly formal unless expressly defined herein.

[0036] Furthermore, when explaining with reference to the attached drawings, the same components will be assigned the same reference numerals regardless of the reference numerals used in the drawings, and redundant explanations will be omitted. In the description of embodiments, if a specific explanation of related prior art is deemed to unnecessarily obscure the gist of the embodiment, such detailed explanation will be omitted.

[0037] Furthermore, terms such as 1st, 2nd, A, B, (a), (b), etc., may be used in the description of the components of the embodiments. Such terms are merely for distinguishing a component from other components, and do not limit the nature, order, or sequence of the component in question. When it is stated that any component is “connected,” “joined,” or “connected” to another component, that component may be directly connected to or linked to that different component, but it should be understood that further components may be “connected,” “joined,” or “connected” between each component.

[0038] Components included in any one embodiment and components with common functions will be described using the same names in the other embodiments. Unless otherwise stated, the descriptions in any one embodiment will also apply to the other embodiments, and specific descriptions will be omitted to the extent of overlap.

[0039] Figure 1 is a partial perspective view of a gas container according to one embodiment.

[0040] Referring to Figure 1, the gas container G stores process gas inside. A valve assembly V may be mounted on the top of the gas container G. The valve assembly V can be used to discharge the gas stored inside the gas container G to the outside or to inject gas into the gas container G. The valve assembly V provides a gas flow path between the inside and outside of the gas container G and can selectively restrict the gas flow through the valve assembly V. In one embodiment, the valve assembly V may include a valve C with an open outlet through which the gas flows. The valve C may be formed, for example, to protrude from the side of the valve assembly V. In one embodiment, the valve C is fastened to a connector of a fastening device described later and supplies the gas stored inside the gas container G to the outside. In one embodiment, the valve assembly V includes a valve shutter (not shown) for restricting the gas flow through the valve, and the valve shutter can restrict the gas flow through the valve C by the rotational movement of a valve handle H located on the top of the valve assembly V.

[0041] In one embodiment, an end cap can be fitted to the outer circumferential surface of the valve C of the gas container G to cover the outlet and prevent gas leakage. The end cap E may be fitted to the valve C so as to surround the outer circumferential surface of the valve C. In one embodiment, the end cap E is screw-connected along the outer circumferential surface of the valve C and may be fitted to or removed from the valve C. For process gas to be discharged from inside the gas container G, the process of removing the end cap fitted to the valve must be performed first. Once the series of processes of supplying gas from the gas container G is completed, the end cap can be fitted again to the valve C of the gas container G to close the outlet.

[0042] The structure of the gas container G described with reference to Figure 1 is illustrative, and various forms and structures of gas container G may be used in the gas supply system 1 described later. For the sake of explanation, the gas supply system will be described below using the gas container G shown in Figure 1 as a reference.

[0043] Figure 2A is a perspective view of a gas supply system according to one embodiment. Figure 2B is a front view of the gas supply system according to one embodiment. Figure 2C is a perspective view showing a fastening device and alignment module according to one embodiment. Figure 2D is a schematic diagram showing the position adjustment process of the fastening device according to one embodiment. Figure 2E is a perspective view of a mobile robot device according to one embodiment. Figure 2F is a diagram showing a docking module according to one embodiment. Figure 2G is a diagram showing the process of connecting the docking module to the fastening device according to one embodiment.

[0044] Referring to Figures 2A to 2G, in one embodiment, the gas supply system 1 can be automatically fastened to the gas container G which is placed on the cabinet 100. In one embodiment, the gas supply system 1 may automatically disconnect or fasten the end cap E attached to the valve C of the gas container G. The gas supply system 1 can be fastened to the valve C of the gas container G and supply the gas inside the gas container G to the gas piping 150.

[0045] In one embodiment, the gas supply system 1 may include a cabinet 100, a fastening device 110, a position adjustment module 120, and a mobile robot device 130 located outside the cabinet 100.

[0046] In one embodiment, the cabinet 100 can house a gas container G inside. The cabinet 100 forms an internal space in which the gas container G is placed. The cabinet 100 may include a door (not shown) that opens and closes the internal space, allowing the gas container G to enter the internal space and used gas container G to exit the internal space. In the drawings, the internal space of the cabinet 100 is shown as open (for example, in the +Y direction of the cabinet 100 in Figure 2), but this is for the sake of explanation, and it should be noted that the internal space of the cabinet 100 can be opened and closed by a door that is not shown. The door seals the internal space of the cabinet 100 during the process in which gas is supplied from the gas container G located inside the cabinet 100 through the gas piping 150, thereby reducing or preventing the gas stored inside the gas container G from leaking out of the cabinet 100.

[0047] In one embodiment, one or more gas containers G can be arranged inside the cabinet 100. For example, as shown in Figure 2, two gas containers G and two fastening devices 110 that fasten to each of the two gas containers G may be arranged inside the cabinet 100. However, it should be noted that this is just one example, and the number of gas containers G and their corresponding fastening devices 110 is not limited and can be changed according to the design. Below, the configuration of the gas supply system 1 will be described focusing on one gas container G and one corresponding fastening device 110 arranged inside the cabinet 100.

[0048] In one embodiment, a support clamp 140 is positioned inside the cabinet 100, which operates to support the outer surface of the placed gas container G. The support clamp 140 may selectively grip the outer surface of the gas container G or move away from the outer surface of the gas container G.

[0049] In one embodiment, the position adjustment module 120 can movably connect the fastening device 110 to the cabinet 100. In one embodiment, the position adjustment module 120 includes a fixing plate 121, a first movable member 123, a second movable member 124, and a third movable member 122.

[0050] In one embodiment, the fixing plate 121 may be fixed to the internal space of the cabinet 100. For example, the fixing plate 121 may be fixed to the upper surface of the internal space. The first moving member 123 connects the fixing plate 121 and the fastening device 110 and may move in a first direction D1 parallel to the ground relative to the fixing plate 121. The second moving member 124 connects the fixing plate 121 and the fastening device 110 and may move in a second direction D2 parallel to the ground relative to the fixing plate 121 and perpendicular to the first direction D1. The third moving member 122 connects the fixing plate 121 and the fastening device 110 and may move in a third direction D3 perpendicular to the ground relative to the fixing plate 121, for example, a third direction D3 perpendicular to the first direction D1 and the second direction D2. In one embodiment, the first movable member 123, the second movable member 124, and the third movable member 122 are sequentially connected to the fastening device 110 from the fixed plate 121, and the relative connection order of each movable member is not restricted. For example, as shown in Figure 3B, the first movable member 123 is connected to the fixed plate 121 so as to be movable in the first direction D1, the third movable member 122 is connected to the first movable member 123 so as to be movable in the third direction D3, and the second movable member 124 is connected to the third movable member 122 so as to be movable in the second direction D2, but it should be noted that the above-mentioned connection order is not restricted.

[0051] In one embodiment, the position adjustment module 120 can adjust the three-dimensional coordinates of the fastening device 110 relative to the fixed plate 121 via the movement of each movable member 123, 124, and 122. Therefore, when the mobile robot device 130, described later, is connected to the fastening device 110 and an external force is applied by the mobile robot device 130 to move the fastening device 110, the position adjustment module 120 operates in response to the external force applied to the fastening device 110, adjusting the relative position of the fastening device 110 with respect to the fixed plate 121, and changing the position of the fastening device 110 in the internal space of the cabinet 100. Through such operation, the position of the fastening device 110 can be aligned with respect to the valve C of the gas container G.

[0052] In one embodiment, the position adjustment module 120 can rotate the fastening device 110 within the internal space of the cabinet 100. For example, the position adjustment module 120 may include a structure that enables three-degree-of-freedom rotational movement of the fastening device 110. For example, the position adjustment module 120 may include a plurality of rotating members (not shown) that connect the fixed plate 121 and the fastening device 110, enabling the fastening device 110 to move in three degrees of freedom: yaw, pitch, and roll relative to the fixed plate 121. With such a structure, the fastening device 110 can change its 3D position and angle within the cabinet 100 because the position adjustment module 120 enables three degrees of translational movement and three degrees of rotational movement relative to the fixed plate 121.

[0053] In one embodiment, the fastening device 110 can be movably installed within the internal space of the cabinet 100. As described above, the fastening device 110 is connected to the inside of the cabinet 100 via a position adjustment module 120, and its position and angle within the cabinet 100 can be adjusted by operating the position adjustment module 120.

[0054] In one embodiment, the fastening device 110 operates to separate the end cap (end cap E in Figure 1) from the valve C of the gas container G, or to fasten it to the valve C of the gas container G so that gas can be supplied. The fastening device 110 is configured to separate / attach the end cap E while it is aligned relative to the valve C of the gas container G, or to fasten it to the valve C.

[0055] In one embodiment, the fastening device 110 includes an end cap separation section 111 for removing or attaching an end cap to the valve C of the gas container G, a valve connector 112 that is detachably fastened to the valve C of the gas container G, and a docking section 113 for connecting to a mobile robot device 130 to transmit power.

[0056] In one embodiment, the end cap separation portion 111 may separate and remove the end cap E attached to the valve C, or reattach the end cap to the valve C of the used gas container G. In one embodiment, the end cap separation portion 111 may have an insertion groove into which at least a portion of the end cap is inserted. The insertion groove may be formed in a shape corresponding to the cross-section of the end cap. For example, if the end cap is formed to have a hexagonal cross-sectional shape as shown in Figure 1, the insertion groove formed in the end cap separation portion 111 may be formed in a hexagonal cross-sectional shape corresponding to the cross-sectional shape of the end cap so that the end cap can be inserted. In one embodiment, the end cap separation portion 111 rotates around a first rotation axis A1. The first rotation axis A1 may be positioned to pass through the center of the insertion groove. In one embodiment, when the fastening device 110 is aligned to a first position relative to the valve C, the first rotation axis A1 of the end cap separation portion 111 coincides with the central axis of the end cap.

[0057] In one embodiment, since the end cap is separated from and fastened to the valve C by a screw mechanism, the end cap separation part 111 rotates via the first rotation axis while gripping the outer surface of the end cap through the insertion groove, thereby releasing the screw of the end cap from the valve C or screwing the end cap onto the valve C.

[0058] In one embodiment, with the fastening device 110 aligned to a first position relative to the valve C of the gas container G, the end cap separation portion 111 may be positioned in a way that allows for the separation of the end cap from the valve C or the attachment of the end cap. For example, with the fastening device 110 aligned to a first position relative to the valve C of the gas container G, the end cap separation portion 111 may be positioned facing the valve C such that its first rotation axis A1 coincides with the central axis of the valve C, i.e., the rotation center of the end cap attached to the valve C.

[0059] In one embodiment, for the end cap to be inserted into the insertion groove of the end cap separation section 111, the rotation angle of the end cap must be aligned so that the shapes of the insertion groove and the end cap are compatible with each other, while the first rotation axis A1 and the central axis of the valve C are aligned. In one embodiment, the end cap separation section 111 can be aligned relative to the end cap by rotating around the first rotation axis A1 with power transmitted from a mobile robot device 130, which will be described later. For example, the alignment of the first rotation axis A1 of the end cap separation section 111 and the central axis of the end cap can be achieved through position adjustment of the fastening device 110, and the rotation angle of the end cap separation section 111 can be achieved by rotational movement of the end cap separation section 111 around the first rotation axis A1.

[0060] In one embodiment, once the axis alignment and rotational angle alignment of the end cap separation part 111 with respect to the end cap are completed, the end cap separation part 111 can be accommodated in the insertion groove by advancing toward the end cap along the first rotation axis A1. With the end cap inserted in the insertion groove, the end cap separation part 111 can be removed from the valve C by rotating around the first rotation axis A1 and translating along the first rotation axis A1. Reattaching the end cap to the valve C is performed in the reverse of the end cap separation operation described above.

[0061] In one embodiment, the connector 112 is connected to a gas pipe 150 and fastened to a valve C of a gas container G from which the end cap has been removed, thereby supplying gas from the gas container G. In one embodiment, the connector 112 may operate to fasten to the valve C when the fastening device 110 is aligned to a second position relative to the valve C of the gas container G. With the fastening device 110 aligned to the second position relative to the valve C of the gas container G, the connector 112 may be positioned to face the valve C. The connector 112 may be fastened to the valve C by screw connection via threads formed on the outer circumferential surface of the valve C.

[0062] In one embodiment, the connector 112 is second Rotation axis It can rotate along A2. In one embodiment, the connector 112 is second Rotation axis The second of the connector 112 may be translated in the front-rear direction along A2. Rotation axis In A2, the fastening device 110 is aligned to the second position relative to the valve C of the gas container G, and substantially coincides with the central axis of the valve C. In this case, the connector 112 is the second Rotation axis It may be fastened to valve C by advancing along A2 toward valve C. In one embodiment, the rotation and forward movement of connector 112 is performed by power transmitted from mobile robot device 130.

[0063] In one embodiment, the second connector 112 Rotation axis A2 may be positioned parallel to the first rotation axis A1 of the end cap separation portion 111 on substantially the same plane. With such a structure, when the fastening device 110 is aligned to a first position relative to the valve C of the gas container G, for example, when the first rotation axis A1 of the end cap separation portion 111 coincides with the central axis of the end cap, if the fastening device 110 is translated in one direction (for example, the second direction D2 shown in Figure 3C), the fastening device 110 will be aligned to a second position relative to the valve C of the gas container G. In this case, the connector 112 is positioned alongside the end cap separation portion 111.

[0064] As a different example not shown in the figure, the connector 112 and the end cap separation portion 111 are second Rotation axis The fastening device 110 may be formed such that A2 and the first rotation axis A1 coincide. For example, the connector 112 may be located inside the insertion groove of the end cap separation portion 111 and may be formed to rotate about the same rotation axis as the end cap separation portion 111. In this case, when the fastening device 110 is aligned to a first position relative to the valve C of the gas container G, for example, when the first rotation axis A1 of the end cap separation portion 111 coincides with the central axis of the end cap, the fastening device 110 is moved along the first rotation axis A1 to align to a second position relative to the valve C of the gas container G.

[0065] On the other hand, it should be noted that the position and angle of the fastening device 110 in the first position, where it is aligned to separate / attach the end cap from the valve C, and the position and angle of the fastening device 110 in the second position, where it is aligned to fasten to the valve C, may change relative to the valve position and angle of the gas container C located in the cabinet 100.

[0066] In one embodiment, the docking portion 113 may be positioned so as to be exposed on the outer surface of the fastening device 110. For example, the docking portion 113 may be positioned on the side of the fastening device 110 facing the open portion of the cabinet 100 (for example, the side of the fastening device 110 facing the +Y axis in Figure 3A). In one embodiment, a mobile robot device 130 may be detachably connected to the docking portion 113. For example, a docking module 135 of the mobile robot device 130, described later, may be fastened to the docking portion 113.

[0067] In one embodiment, with the mobile robot device 130 connected to the docking portion 113, the fastening device 110 can change its position within the internal space of the cabinet 100 due to the mobile robot device 130. In one embodiment, with the mobile robot device 130 connected to the docking portion 113, the fastening device 110 can receive power supplied by the mobile robot device 130 via the docking portion 113, and operate the end cap separation portion 111 and the connector 112.

[0068] In one embodiment, the docking section 113 includes a docking clamp 1132 for fastening the docking module 135 of the mobile robot device 130, and a power transmission section 1131 to which the rotating shaft 1361 of the power motor of the mobile robot device 130 is connected. In one embodiment, the docking clamp 1132 may either fix the fastened state of the docking module 135 to the docking section 113, or release the fastened state so that the docking module 135 can be separated. A detailed description of the docking section 113 will be given later.

[0069] In one embodiment, the mobile robot device 130 may move outside the cabinet 100. The mobile robot device 130 is detachably connected to the fastening device 110 and can move the fastening device 110 or supply power to the fastening device 110 while connected to it. In one embodiment, the mobile robot device 130 includes a body 131, a travel unit 133, a first cooperative robot 132A, a three-dimensional vision camera 134, and a control unit.

[0070] In one embodiment, the body 131 forms the body portion of the mobile robot device 130. Various components for operating the mobile robot device 130 (e.g., actuators, control units, communication devices, etc.) may be located inside the body 131. The body 131 moves along the ground.

[0071] In one embodiment, the running unit 133 may be positioned below the body 131. The running unit 133 can move the body 131 along the ground. The running unit 133 may include, for example, a guide member that moves along a guide rail provided on the ground, or a rolling member that is movable on the ground. In one embodiment, the running unit 133 is operated to move the mobile robot device 130 in response to a command from the control unit.

[0072] In one embodiment, the first cooperative robot 132A is mounted on the body 131. In one embodiment, the first cooperative robot 132A may be positioned on top of the body 131. In one embodiment, the first cooperative robot 132A may include a first articulated arm 1321A that enables multi-degree-of-freedom motion, for example, six-degree-of-freedom motion. For example, the first cooperative robot 132A can achieve three-dimensional motion relative to the ground (e.g., translational motion in the X, Y, and Z axis directions) and three-directional angular motion (e.g., roll, yaw, and pitch motion) through the operation of the first articulated arm 1321A.

[0073] In one embodiment, the first cooperative robot 132A includes a docking module 135 positioned at the end of the first articulated arm 1321A. In one embodiment, the docking module 135 may be detachably fastened to a docking portion 113 of the fastening device 110 via the operation of the first articulated arm 1321A. The docking module 135 can be fastened to the docking portion 113 and move the fastening device 110 by the operation of the first articulated arm 1321A, and can provide power to the fastening device 110 while fastened to the fastening device 110.

[0074] In one embodiment, the docking module 135 includes a docking plate 1351, a docking member 1353, and a power motor 136.

[0075] In one embodiment, the docking plate 1351 may be positioned at the end of the first cooperative robot 132A. In one embodiment, the docking plate 1351 may include a docking surface (for example, the surface of the docking plate 1351 shown in Figure 4B) facing the surface of the docking portion 113 (for example, the surface facing the +Y axis in Figure 3b).

[0076] In one embodiment, the docking member 1353 may be positioned on the docking surface of the docking plate 1351. For example, the docking member 1353 may protrude from the docking surface. In one embodiment, the docking member 1353 may be selectively fastened to the docking clamp 1132 of the docking portion 113. For example, the docking member 1353 may be inserted and fastened to the docking clamp 1132. In one embodiment, if a plurality of docking clamps 1132 are positioned on the surface of the docking portion 113, a plurality of docking members 1353 are formed on the docking surface of the docking plate 1351, each positioned to correspond to one of the plurality of docking clamps 1132.

[0077] In one embodiment, the power motor 136 may be provided at the end of the first cooperative robot 132A. The rotation shaft 1361 of the power motor 136 may pass through the docking plate 1351 and protrude from the docking surface of the docking plate 1351. In one embodiment, when the docking module 135 is fastened to the docking portion 113, for example, when the docking member 1353 is fastened to the docking clamp 1132, the rotation shaft 1361 of the power motor 136 may be inserted into a power transmission portion 1131 formed in the docking portion 113. The power motor 136 transmits power to the fastening device 110 via the power transmission portion 1131. The power transmitted by the power motor 136 to the fastening device 110 is transmitted to the end cap separation portion 111 and the connector 112 of the fastening device 110.

[0078] In one embodiment, for the docking module 135 to be fastened to the docking portion 113 of the fastening device 110, the docking module 135 needs to be aligned to a docking position that allows fastening to the docking portion 113. In one embodiment, as shown in Figure 2G, the docking module 135 may be aligned to allow fastening to the docking portion 113, and the docking member 1353 of the docking module 135 and the rotating shaft 1361 of the power motor may be positioned to correspond to the docking clamp 1132 and power transmission portion 1131 of the docking portion 113, respectively. It should be noted that the docking position at which the docking module 135 can be fastened to the docking portion 113 of the fastening device 110 may change relatively depending on the position and angle of the fastening device 110 inside the cabinet 100.

[0079] In one embodiment, since the docking module 135 and the fastening device 110 move together while the docking module 135 is fastened to the docking portion 113 of the fastening device 110, the position of the fastening device 110 may be adjusted by the first cooperative robot 132A within the internal space of the cabinet 100. For example, the position of the fastening device 110 relative to the valve C of the gas container G may be adjusted by the first cooperative robot 132A.

[0080] In one embodiment, the 3D vision camera 134 can collect images of the gas supply system 1. For example, the 3D vision camera 134 may collect a 3D image of the gas supply system 1 including the docking module 135, the fastening device 110, and the valve C of the gas container G. In one embodiment, the 3D vision camera 134 may be positioned at the end of the first cooperative robot 132A, for example, on top of the docking plate 1351. The 3D vision camera 134 may be positioned on the first cooperative robot 132A to collect a forward image of the docking module 135 toward the docking section 113, for example, an image toward the docking surface of the docking plate 1351.

[0081] In one embodiment, the image acquisition position of the 3D vision camera 134 is not limited to the examples described above, and may be configured to acquire images in various directions depending on the setting conditions. For example, the 3D vision camera 134 may be positioned on the first robot arm 132A to acquire a downward image of the docking module 135, for example, an image of the docking plate 1351 toward the ground.

[0082] In one embodiment, the control unit controls the operation of the mobile robot device 130. In one embodiment, the control unit can move the mobile robot device 130 closer to or further away from the cabinet 100.

[0083] In one embodiment, during the process of connecting the mobile robot device 130 to the fastening device 110, the control unit can operate the first cooperative robot 132A so that the docking module 135 is fastened to the docking portion 113 of the fastening device 110, based on the three-dimensional image collected by the three-dimensional vision camera 134.

[0084] In one embodiment, with the mobile robot device 130 connected to the fastening device 110, the control unit can align the fastening device 110 with respect to the valve C of the gas container G by operating the first cooperative robot 132A based on images collected by the 3D vision camera 134. For example, the control unit can adjust the position and angle of the fastening device 135 by moving and adjusting the docking module 135 so that the fastening device 110 is aligned with the valve C in a first state where the end cap can be separated / attached, or in a second state where the fastening device 110 is fastened to the valve C.

[0085] In one embodiment, the control unit determines one or more alignment positions for the docking module 135 using a set algorithm and controls the operation of the first robot arm 132A so that the docking module 135 is positioned at the determined alignment position. The alignment position of the docking module 135 may include three-dimensional coordinates and a three-dimensional rotation angle inside the cabinet 100.

[0086] In one embodiment, the alignment position of the docking module 135 is determined according to the purpose of operation by the process sequence of the gas supply system 1. In one embodiment, during the process of fastening the mobile robot device 130 to the fastening device 110, the alignment position of the docking module 135 may be a first alignment position in which the docking module 135 is aligned relative to the fastening device 110 so that it can be fastened, that is, the docking module 135 is aligned so that it can be fastened in accordance with the position and angle of the docking portion 113.

[0087] In one embodiment, when the mobile robot device 130 is fastened to the fastening device 110, that is, when the docking module 135 is fastened to the docking portion 113, the alignment position of the docking module 135 may be a second alignment position of the docking module 135 that brings the fastening device 110 to a first state relative to the valve C of the gas container G. For example, the second alignment position of the docking module 135 means the position and angle of the docking module 135 in which the end cap separation portion 111 of the fastening device 110 coincides with the first rotation axis A1 of the valve C, corresponding to the position and angle of the valve of the gas container G.

[0088] In one embodiment, when the mobile robot device 130 is fastened to the fastening device 110, that is, when the docking module 135 is fastened to the docking portion 113, the alignment position of the docking module 135 may be a third alignment position of the docking module 135 that brings the fastening device 110 to a second state relative to the valve C of the gas container G. For example, the third alignment position of the docking module 135 corresponds to the second position of the connector 112 of the fastening device 110, corresponding to the position and angle of the valve of the gas container G. Rotation axis A2 represents the position and angle of the docking module 135, which coincides with the central axis of valve C.

[0089] In one embodiment, the control unit determines the alignment position of the docking module 135 using a set algorithm. For example, the set algorithm may be configured to generate a 3D model of the virtual space in real time, for example, a 3D model of the docking module 135, the gas container G, and the fastening device 110, via images acquired by the 3D vision camera 134. In one embodiment, the 3D model may change based on the real-time images acquired by the vision camera 134. In one embodiment, the set algorithm determines the similarity of the generated 3D image by comparing it with a set reference model. For example, the set reference model may be a 3D model of the docking position where the docking module 135 is aligned to fasten to the docking section 113. For example, the set reference model may be a 3D model of the state where the fastening device 110 connected to the docking module 135 is aligned to a first position relative to the gas container G valve C. For example, the set reference model may be a 3D model of the state where the fastening device 110 connected to the docking module 135 is aligned to a second position relative to the gas container G valve C. In one embodiment, the configured algorithm can be set to determine the need for positional adjustment of the docking module 135 by determining the image similarity between the generated 3D image and the configured reference model.

[0090] In one embodiment, if the image similarity is greater than or equal to a set value, the configured algorithm is set to generate an instruction to perform an action determined by the reference model. For example, if the reference model is a three-dimensional model of a docking position where the docking module 135 is aligned to fasten to the docking section 113, the configured algorithm may be set to generate an instruction to fasten the docking module 135 to the docking section 113 when the image similarity is greater than or equal to a set value. For example, if the reference model is a three-dimensional model of a state where the fastening device 110 is aligned to a first position relative to the valve C, the configured algorithm may be set to generate an instruction for the end cap separation section 111 to remove the end cap from the valve C when the image similarity is greater than or equal to a set value. For example, if the configured reference model is a three-dimensional model of a state where the fastening device 110 is aligned to a second position relative to the gas container G valve C, the configured algorithm may be set to generate an instruction for the connector 112 to fasten to the valve C when the image similarity is greater than or equal to a set value.

[0091] In one embodiment, if the image similarity is greater than or equal to a set value, the configured algorithm may be set to predict the expected position of the docking module 135 that will enable the 3D model to have an image similarity of greater than or equal to the set value with the reference model, and to determine the predicted position as the alignment position of the docking module 135.

[0092] In one embodiment, once the set algorithm determines the alignment position of the docking module 135, the control unit can control the first cooperative robot 132A to adjust the three-dimensional coordinates and three-dimensional rotation angle of the docking module 135 so that the position of the docking module 135 is the determined alignment position.

[0093] In one embodiment, the control unit can align the position of the fastening device 110 connected to the docking module 135 by moving the docking module 135 via the operation of the first cooperative robot 132A while the docking module 135 is fastened to the docking section 113. In one embodiment, the control unit can control the operation of the first cooperative robot 132A so that the fastening device 110 is in a first position relative to the valve C of the gas container G, based on images collected by the 3D vision camera 134. In one embodiment, once the fastening device 110 is aligned to the first position relative to the valve C of the gas container G, the control unit can control the power motor 136 to transmit power to the power transmission section 1131, thereby operating the end cap separation section 111. In one embodiment, the control unit can control the operation of the first cooperative robot 132A so that the fastening device 110 is in a second position relative to the valve C of the gas container G, based on images collected by the 3D vision camera 134. In one embodiment, when the fastening device 110 is aligned to the second position relative to the valve C of the gas container G, the control unit controls the power motor to transmit power to the power transmission unit 1131, thereby activating the connector 112.

[0094] In one embodiment, the gas supply system 1 transmits power to the outside of the fastening device 110 via a mobile robot device 130, aligning the position of the fastening device 110, thereby eliminating the need for additional components (such as actuators) for the operation of the fastening device 110. Consequently, the structure of the fastening device 110 is simplified, improving ease of maintenance. Furthermore, the gas supply system 1 can reduce the space constraints required for the installation of the gas supply system 1 by reducing the space occupied by the fastening device 110 inside the cabinet 100.

[0095] Figure 3A is a perspective view of a gas supply system according to one embodiment. Figure 3B is a perspective view of a mobile robot device according to one embodiment. Figure 3C is a diagram showing a docking module according to one embodiment. Figure 3D is an operation diagram showing the process of aligning the first cooperative robot and the second cooperative robot via a 3D vision camera in a gas supply system according to one embodiment. Figure 3E is a diagram showing the process of fastening the mobile robot device according to one embodiment to a fastening device.

[0096] In the explanations of Figures 3A to 3E, unless otherwise specified, terms identical to those described above may be understood as being identical or similar.

[0097] Referring to Figures 3A to 3E, a gas supply system 2 according to one embodiment includes a cabinet 200 in which a gas container C is located, a fastening device 210 to which a connector 212 is attached, and a mobile robot device 230 that moves the fastening device 210 to fasten the connector 212 to the valve C of the gas container C.

[0098] In one embodiment, one or more gas containers C may be placed on the cabinet 200. The cabinet 200 may be provided with a support base for supporting the gas containers C, and may also be provided with a support frame or support clamp for supporting the outer surface of the gas containers C placed on the support base.

[0099] In one embodiment, the fastening device 210 can separate and connect the end cap E from the valve C of the gas container C, or fasten to the valve C of the gas container C to supply process gas from the gas container C. In one embodiment, the number of fastening devices 210 is provided in a number corresponding to the number of gas containers C that can be placed inside the cabinet 200. For example, as shown in Figure 3A, if two gas containers C are placed inside the cabinet 200, the gas supply system 2 may include two fastening devices 210. However, it should be noted that this is just one example, and the number of fastening devices 210 may be changed depending on the design.

[0100] In one embodiment, the fastening device 210 can be movably mounted inside the cabinet 200. For example, the fastening device 210 is connected to the cabinet 200 via a position adjustment module (not shown), and its position and rotation angle inside the cabinet 200 are adjusted by the operation of the position adjustment module. For example, the fastening device 210 may be connected to the cabinet 200 so as to have movement in the x, y, z axes and six degrees of freedom: yaw, pitch, and roll. In one embodiment, the position adjustment module can support the fastening device 210 so as to be movable inside the cabinet 200 in response to the movement of the fastening device 210.

[0101] In one embodiment, the fastening device 210 includes an end cap separation unit 211 for removing or separating the end cap E from the valve C of the gas container C, a connector 212 for fastening to the valve C of the gas container C to supply process gas, and a docking unit 213 for fastening to a mobile robot device 230, which will be described later.

[0102] In one embodiment, the end cap separation unit 211 grips the end cap E attached to the valve C of the gas container C. The end cap separation unit 211 separates and grips the end cap E from the valve C, and after the gas container C is used, it reattaches the gripped end cap E to the valve C. In one embodiment, the end cap separation unit 211 includes an insertion groove into which the end cap E is inserted. In this case, the insertion groove has a shape corresponding to the cross-section of the end cap E. The end cap separation unit 211 rotates about a first axis of rotation. When the end cap separation unit 211 is aligned to separate the end cap E from the valve C, the first axis of rotation of the end cap separation unit 211 is positioned in an axially aligned state that coincides with the center of the valve C.

[0103] In one embodiment, the end cap separation portion 211 is axially aligned such that the first rotation axis passes through the center of the valve C, and the angles of the insertion groove and the end cap E are aligned so that they match each other. In this case, the end cap separation portion 211 rotates around the first rotation axis, thereby aligning its rotation angle with respect to the end cap E attached to the valve C.

[0104] Once the end cap separation unit 211 is axially and angularly aligned with respect to the end cap E, the end cap separation unit 211 advances toward the end cap E along the first rotation axis, thereby accommodating the end cap E in the insertion groove. With the end cap E inserted in the insertion groove, the end cap separation unit 211 rotates around the first rotation axis, separating the insertion groove from the valve C of the gas container C. Since the end cap E is attached to the outer surface of the valve C of the gas container C by screwing, the end cap E can be separated from the valve C of the gas container C by rotating the end cap separation unit 211. Reattaching the end cap E to the valve C is done by reversing the end cap E separation operation described above.

[0105] In one embodiment, the connector 212 is connected to the gas piping, and the end cap E is fastened to the valve C of the separated gas container C, and gas is supplied from the gas container C to the gas piping. In one embodiment, the connector 212 is second Rotation axis It rotates around the second. Connector 212 is second relative to fastening device 210. Rotation axis It moves in the forward and backward direction along the second of connector 212. Rotation axis With the connector 212 aligned so as to substantially coincide with the center of valve C of gas container C, the second Rotation axis It can be advanced along the line and fastened to valve C.

[0106] In one embodiment, the operation of the end cap separation portion 211 and connector 212 of the fastening device 210 is performed by power transmitted from a mobile robot device 230, which will be described later.

[0107] On the other hand, for the sake of explanation, the drawing shows that the end cap separation portion 211 and connector 212 of the fastening device 210 are on different first and second axes of rotation. Rotation axis The embodiment shown involves rotational operation around a central axis, but the fastening device 210 may be formed in various structures. For example, the end cap separator 211 and the connector 212 in the fastening device 210 may be formed in a structure that rotates around a single axis of rotation. For example, the connector 212 may be formed within the insertion groove of the end cap separator 211, so that the connector 212 and the end cap separator 211 are formed in a single structure. In this case, the fastening device 210 is placed in a state where it can be fastened to the valve C of the gas container C by aligning the axes of rotation of the connector 212 and the end cap separator 211 with the center of the valve C of the gas container C.

[0108] In one embodiment, the docking portion 213 can be formed on one side of the fastening device 210. For example, the docking portion 213 may be formed on the side of the fastening device 210 facing the door of the cabinet 200 (for example, the side of the fastening device 210 facing the +Y axis as shown in Figure 2). In one embodiment, a mobile robot device 230 may be detachably connected to the docking portion 213. For example, a docking module 235, which is attached to the first cooperative robot 232A described later, may be attached to the docking portion 213. In one embodiment, with the mobile robot device 230 connected to the docking portion 213, the position of the fastening device 210 in the internal space of the cabinet 200 is changed by the mobile robot device 230. In one embodiment, the docking portion 213 is connected to the mobile robot device 230 and supplies power from the mobile robot device 230 to the fastening device 210. For example, when a mobile robot device 230 is connected to the docking section 213, the fastening device 210 can receive power supplied by the mobile robot device 230 via the docking section 213 and operate the end cap separation section 211 and the connector 212. In one embodiment, the docking section 213 includes one or more docking clamps 2132 for fixing a docking module 235 (described later) to it, and a power transmission section 2131 to which the power motor 236 of the docking module 235 is connected.

[0109] In one embodiment, the mobile robot device 230 can be detachably connected to the fastening device 210. The mobile robot device 230 can move and operate the fastening device 210 while connected to it. In one embodiment, the mobile robot device 230 may be located outside the cabinet 200. In one embodiment, the mobile robot device 230 may include a body 231, a travel unit 233, a first cooperative robot 232A, a second cooperative robot 232B, a three-dimensional vision camera 234, and a control unit (not shown).

[0110] In one embodiment, the body 231 forms the exterior of the mobile robot device 230. Various components for the operation of the mobile robot device 230 are arranged inside the body 231.

[0111] In one embodiment, the running unit 233 may be positioned below the body 231. The running unit 233 can move the body 231 along the ground. The running unit 233 may be provided in the form of a guide member that moves along a guide rail provided on the ground, or in the form of a wheel that can move on the ground. In one embodiment, the running unit 233 operates to move the mobile robot device 230 in response to commands from the control unit.

[0112] In one embodiment, the first cooperative robot 232A and the second cooperative robot 232B are arranged on the body 231 and can operate independently. In one embodiment, the first cooperative robot 232A is fastened to the fastening device 210 and operates the fastening device 210. In one embodiment, the second cooperative robot 232B grips the gas container C and assists the fastening operation of the fastening device 210 to the gas container C while the first cooperative robot 232A connects the fastening device 210 to the valve C of the gas container C. In one embodiment, the second cooperative robot 232B may install a gasket on the valve C of the gas container C or separate used waste gaskets.

[0113] In one embodiment, the first cooperative robot 232A includes a first articulated arm 2321A having multiple degrees of freedom and a docking module 235 attached to the end of the first articulated arm 2321A.

[0114] The docking module 235 aligns with the fastening device 210 by the movement of the first articulated arm 2321A, and in this aligned state, it is connected to the docking portion 213 of the fastening device 210. In this document, the position in which the docking module 235 is aligned to fasten to the fastening device 210 is referred to as the "docking position". In one embodiment, the docking module 235 is connected to the docking portion 213 and provides power to operate the fastening device 210. In one embodiment, the docking module 235 includes a docking plate 2351, a docking member 2353, and a power motor 236.

[0115] In one embodiment, the docking plate 2351 may be positioned at the end of the first cooperative robot 232A. The docking plate 2351 contacts the surface of the docking portion 213 of the fastening device 210 through the docking surface.

[0116] In one embodiment, the docking member 2353 may be positioned on the docking plate 2351. The docking member 2353 is fastened to the docking clamp 2132 of the docking portion 213 to connect the docking module 235 to the fastening device 210. For example, the docking member 2353 may be fastened in a manner that it protrudes from the surface of the docking plate 2351 and is inserted into the docking clamp 2132. If a plurality of docking clamps 2132 are formed on the docking portion 213, the docking member 2353 may be positioned on the docking plate 2351 in a manner and arrangement that corresponds to the plurality of docking clamps 2132.

[0117] The power motor 236 is provided at the end of the first articulated arm 2321A. The power motor 236 is positioned so that its rotating shaft passes through the docking plate 2351 and protrudes from the docking surface of the docking plate 2351. With the docking module 235 fastened to the docking section 213, the rotating shaft 2361 of the power motor 236 can be inserted into the power transmission section 2131 formed in the docking section 213 to transmit power. The power transmitted by the power motor 236 is used to operate the end cap separation section 211 and the connector 212 of the fastening device 210.

[0118] In one embodiment, in order for the docking module 235 to be fastened to the docking portion 213 of the fastening device 210, the docking module 235 needs to be positioned in a docking position that allows fastening to the fastening device 210. In one embodiment, the mobile robot device 230 determines the docking position via a control unit and controls the first cooperative robot 232A to position the docking module 235 in the docking position.

[0119] In one embodiment, with the docking module 235 fastened to the docking portion 213 of the fastening device 210, the fastening device 210 can adjust its relative position to the cabinet 200 in accordance with the movement of the docking module 235, for example, the movement of the first articulated arm 2321A. For example, the relative position and angle of the fastening device 210 with respect to the valve C of the gas container C can be adjusted by the first collaborative robot 232A.

[0120] In one embodiment, the second cooperative robot 232B includes a second articulated arm 2321B having multiple degrees of freedom and a grip module 237 (e.g., a second grip module 237). In one embodiment, the grip module 237 operates to grasp an object. For example, the grip module 237 may grasp a valve assembly V of a gas container C, or an object such as a gasket attached to the outer surface of the valve C of the gas container C. In one embodiment, the second cooperative robot 232B assists the operation of the first cooperative robot 232A via the grip module 237. For example, in the process of the first cooperative robot 232A fastening the fastening device 210 to the valve C of the gas container C, the second cooperative robot 232B can reduce or prevent distortion of the position of the valve C during the fastening process by gripping the gas container C, for example, the valve C assembly of the gas container C, via the grip module 237. The mobile robot device 230 can determine a gripping position aligned so that the grip module 237 can grip the gas container C via the control unit, and can control the second cooperative robot 232B so that the grip module 237 is positioned in the gripping position.

[0121] In one embodiment, the 3D vision camera 234 collects images. The 3D vision camera 234 collects three-dimensional images including, for example, the docking module 235, the fastening device 210, the grip module 237, and the valve C of the gas container C. In one embodiment, the 3D vision camera 234 may be located on the top of the body 231. There may be more than one 3D vision camera 234. In one embodiment, the 3D vision camera 234 may be located on at least one of the first cooperative robot 232A or the second cooperative robot 232B.

[0122] In one embodiment, the control unit controls the operation of the mobile robot device 230. In another embodiment, the control unit controls the operation of the first cooperative robot 232A and the second cooperative robot 232B based on images collected by the 3D vision camera 234.

[0123] Referring to Figure 3D, the control unit can operate the first cooperative robot 232A so that the docking module 235 is docked to the docking portion 213 of the fastening device 210, based on the images collected by the 3D vision camera 234. Based on the images collected by the 3D vision camera 234, the control unit can determine a docking position aligned so that the docking module 235 can be fastened to the fastening device 210, and can move the first cooperative robot 232A, i.e., the first articulated arm 2321A, to change the position and angle of the docking module 235 so that the docking module 235 is aligned to the docking position.

[0124] Referring to Figure 3E, the control unit can activate the second cooperative robot 232B so that the grip module 237 can grasp the gas container C, based on the images collected by the 3D vision camera 234. The control unit determines an aligned gripping position so that the grip module 237 can grasp the gas container C, based on the images collected by the 3D vision camera 234, and controls the second cooperative robot 232B so that the grip module 237 is placed in a second aligned state. The second aligned state is a state in which the grip module 237 can grasp the valve assembly C of the gas container C.

[0125] In one embodiment, the control unit determines each alignment state via a set algorithm. The set algorithm is configured to generate a 3D model in virtual space in real time, for example, a 3D model of the docking module 235, the gas container C, and the fastening device 210, via images acquired by the 3D vision camera 234. In one embodiment, the 3D model may change based on the real-time images acquired by the vision camera 234. In one embodiment, the set algorithm can determine the similarity of the generated 3D image by comparing it with a set reference model. For example, the set reference model may be a 3D model of the docking module 235 aligned so that it can be fastened to the docking unit 213.

[0126] For example, the set reference model may be a three-dimensional model of the fastening device 210 aligned so as to be fastened to the valve C of the gas container C. For example, the set reference model may be a three-dimensional model of the docking module 235 aligned so as to be fastened to the docking portion 213 of the fastening device 210. In one embodiment, the set algorithm can be configured to determine the image similarity between the generated three-dimensional image and the set reference model, and to determine the need for positional adjustment of the docking module 235.

[0127] In one embodiment, if the image similarity is greater than or equal to a set value, the configured algorithm may be set to generate an instruction to perform an action determined by the reference model. For example, if the reference model is a three-dimensional model aligned so that a docking module 235 can be fastened to a docking section 213, the configured algorithm may be set to generate an instruction to fasten the docking module 235 to the docking section 213 when the image similarity is greater than or equal to a set value. For example, if the reference model is a three-dimensional model in which the end cap separation section 211 of the fastening device 210 is aligned so that its axis and angle match those of the valve C, the configured algorithm may be set to generate an instruction to remove the end cap E from the end cap separation section 211 valve C when the image similarity is greater than or equal to a set value. For example, if the configured reference model is a three-dimensional model in which the rotation axis of the connector 212 valve C of the fastening device 210 is aligned so that it matches those of the valve C, the configured algorithm may be set to generate an instruction to fasten the connector 212 to the valve C when the image similarity is greater than or equal to a set value.

[0128] In one embodiment, if the image similarity is greater than or equal to a set value, the configured algorithm can be set to predict the predicted position of the docking module 235 so that the 3D model has an image similarity of greater than or equal to the set value with respect to the reference model, and to determine the predicted position as the docking position of the docking module 235.

[0129] In one embodiment, once the set algorithm determines the docking position of the docking module 235, the control unit controls the first cooperative robot 232A so that the position and angle of the docking module 235 align with the docking position, and can adjust the three-dimensional coordinates and three-dimensional rotation angle of the docking module 235. Subsequently, the control unit connects the first cooperative robot 232A to the fastening device 210 by fastening the docking module 235 to the docking section 213.

[0130] In one embodiment, the control unit can align the position of the fastening device 210 via the operation of the first cooperative robot 232A while the docking module 235 is fastened to the docking section 213. For example, the control unit may control the operation of the first cooperative robot 232A based on images collected by the three-dimensional vision camera 234 so that the fastening device 210 is ready to fasten to the valve C of the gas container C. In one embodiment, the control unit controls the first articulated arm 2321A so that the end cap separation section 211 of the fastening device 210 is aligned axially and angularly with the valve C of the gas container C, and once the end cap separation section 211 is aligned with the valve C of the gas container C, the control unit can operate the end cap separation section 211 by controlling the power motor 236 to transmit power to the fastening device 210. In one embodiment, the control unit controls the first articulated arm 2321A so that the connector 212 valve C of the fastening device 210 aligns with the valve C of the gas container C. Once the connector 212 valve C is aligned to be fastened to the valve C of the gas container C, the control unit controls the power motor 236 to transmit power to the fastening device 210, thereby operating the connector 212 valve C.

[0131] In one embodiment, the control unit controls the operation of the second cooperative robot 232B to assist the operation of the first cooperative robot 232A in the process of fastening the fastening device 210 to the valve C of the gas container C. For example, the control unit may control the operation of the second cooperative robot 232B based on images collected by the three-dimensional vision camera 234 so that the grip module 237 is in a second alignment state in which it can grip the gas container C, for example, the connector 212. The control unit can control the operation of the second cooperative robot 232B so that the grip module 237 grips the valve C assembly and the position of the valve C is not distorted in the process of fastening the fastening device 210 to the valve C of the gas container C by the first cooperative robot 232A.

[0132] In one embodiment, the control unit can control the operation of the second cooperative robot 232B to replace the gasket before the fastening device 210 is fastened to the valve C of the gas container C. For example, the control unit controls the operation of the second cooperative robot 232B to have the grip module 237 replace the gasket between the connector 212 and the valve C of the gas container C, based on images collected by the 3D vision camera 234. Once the gasket removal operation through the grip module 237 is complete, the control unit controls the second cooperative robot 232B to assist in the fastening operation of the fastening device 210 to the gas container C.

[0133] Figure 4A is a perspective view of a gas supply system according to one embodiment. Figure 4B is a diagram showing the gas supply system according to one embodiment with a gas container placed on a cabinet. Figure 4C is a perspective view of a mobile robot device according to one embodiment. Figure 4D is an operation diagram showing the operation of the mobile robot device according to one embodiment in fastening a support chain. Figure 4E is an operation diagram showing the process of the mobile robot device according to one embodiment aligning a connector with the valve of the gas container via a 3D vision camera.

[0134] Referring to Figures 4A to 4E, a gas supply system 3 according to one embodiment can automatically perform a series of processes for receiving process gas stored inside a gas container G. For example, the gas supply system 3 automatically detaches the end cap E attached to the valve C of the gas container G, and connects the gas container G and the gas piping by fastening a connector 360 to the valve C of the gas container G from which the end cap E has been detached.

[0135] In one embodiment, the gas supply system 3 includes a cabinet 300 in which a gas container G is placed, a connector 360 for which gas is supplied by being fastened to a valve C of the gas container G, and a mobile robot device 330 configured to automatically fasten the connector 360 to the valve C of the gas container G.

[0136] In one embodiment, the cabinet 300 can form an internal space in which a gas supply is carried out. One or more gas containers G may be placed in the cabinet 300. The internal space of the cabinet 300 may be sealed while process gas is supplied from the gas containers G. The cabinet 300 may include a door (not shown) that is selectively opened and closed to allow gas containers G to be drawn in and used gas containers G to be pulled out. The door can reduce or prevent leakage of process gas to the outside of the cabinet 300 by closing the internal space of the cabinet 300 while the process of supplying gas from the gas containers G is carried out.

[0137] In one embodiment, a support base 342 is provided inside the cabinet 300 to support the lower section of the gas container G placed inside. The support base 342 supports the gas container G and can also align the position of the valve C of the gas container G by rotating around an axis perpendicular to the ground. For example, since the valve C of the gas container G faces the side of the gas container G, the rotational movement of the support base 342 positions the valve C of the gas container G in a direction that makes it easier to fasten to the connector 360.

[0138] In one embodiment, a support frame 340 may be provided inside the cabinet 300 to support the outer surface of the gas container G placed inside the cabinet 300 and to prevent the gas container G from tipping over or detaching from its set position inside the cabinet 300. In one embodiment, the cabinet 300 is provided with a support chain 341 for surrounding the gas container G placed inside the cabinet 300. The support chain 341 may be selectively fastened inside the cabinet 300 to selectively surround the gas container G. For example, the support chain 341 may be connected at both ends to the support frame 340 to surround the outer surface of the gas container G. The support chain 341 may be selectively fastened at both ends to the support frame 340. For example, the support chain 341 may be released from the support frame 340, allowing the gas container G to be pulled in or out of the support frame 340, and once the gas container G is placed inside the support frame 340, it may be fastened to the support frame 340 to surround the outer surface of the gas container G and prevent it from tipping over. It should be noted that the form of the support chain 341 shown in the drawing is illustrative, and the support chain 341 can be connected to the support frame 340 in various forms, such as a belt or buckle.

[0139] In one embodiment, the support chain 341 can be selectively fastened to the support frame 340 by a mobile robot device 330, which will be described later. Details of this will be described later.

[0140] On the other hand, although not shown in the drawings, it should be noted that instead of the support frame 340, support clamps are also provided to surround and support the outer surface of the gas container G.

[0141] In one embodiment, a supply pipe 350 connected to the outside of the cabinet 300 can be provided in the internal space of the cabinet 300. The supply pipe 350 is connected to a valve C of a gas container G via a connector 360, and process gas is supplied from the gas container G. The process gas flowing into the supply pipe 350 flows through an extension pipe extending to the outside of the cabinet 300 and is supplied to the location where the process is performed. In one embodiment, the extension pipe is formed from a flexible material so that its shape can change. Therefore, when the connector 360 attached to the end is fastened to the valve C of the gas container G, the degree of freedom of position of the connector 360 inside the cabinet 300 can be ensured through the deformation of the extension pipe's shape.

[0142] In one embodiment, a connector 360 is attached to the end of a supply pipe 350 located inside a cabinet 300. The connector 360 may be fastened to the valve C of the gas container G while aligned with the valve C. After the connector 360 is fastened to the valve C, when the valve C is opened, process gas from inside the gas container G is supplied to the supply pipe 350 via the connector 360.

[0143] In one embodiment, the connector 360 includes a pipe gland communicating with the supply pipe 350 and a connector 360 housing that surrounds the pipe gland. For example, the connector 360 housing may be formed in a nut shape with an open front and threads formed on its inner surface. The threads formed on the inner surface of the connector 360 housing may be formed to engage with threads formed on the outer surface of the valve C. In this case, the connector 360 can be coupled to the outer surface of the valve C in a manner that it rotates around a central axis with the valve C inserted inside the connector housing. A gasket may be interchangeably fitted inside the connector housing. The gasket functions to reduce or prevent leakage of process gas through the gap between the valve C and the connector 360 housing when the valve C and the connector 360 are fastened together.

[0144] In one embodiment, one or more supply pipes 350 and one or more connectors 360 connected to the end of each supply pipe 350 are arranged inside the cabinet 300. The number of connectors 360 and supply pipes 350 provided inside the cabinet 300 corresponds to the number of gas containers G that can be placed inside the cabinet 300. For example, as shown in Figure 2B, if the cabinet 300 is formed to accommodate up to two gas containers G inside, two connectors 360 and supply pipes 350 may be provided inside the cabinet 300. However, it should be noted that this is just one example for the sake of explanation, and the number of connectors 360 may be changed depending on the design of the cabinet 300.

[0145] In one embodiment, the mobile robot device 330 can automatically fasten the connector 360 to the valve C of the gas container G. In one embodiment, the mobile robot device 330 may be located outside the cabinet 300. By fastening the connector 360 to the valve C outside the cabinet 300, the mobile robot device 330 can minimize the space it occupies inside the cabinet 300. In one embodiment, the mobile robot device 330 includes a body 331, a travel unit 333, a first cooperative robot 332A, a second cooperative robot 332B, a three-dimensional vision camera 334, and a control unit (not shown).

[0146] In one embodiment, the body 331 forms the exterior of the mobile robot device 330. Various components for the operation of the mobile robot device 330 (e.g., battery, processor, communication device, etc.) may be located inside the body 331. The body 331 is movable outside the cabinet 300.

[0147] In one embodiment, the travel unit 333 may be positioned below the body 331. The travel unit 333 can move the body 331 along the ground. For example, the travel unit 333 may be provided in the form of a guide member that moves along a guide rail provided on the ground, or in the form of a wheel that can move on the ground. In one embodiment, the travel unit 333 operates in response to a command from the control unit to move the mobile robot device 330, for example, to move the body 331 relative to a cabinet 300.

[0148] In one embodiment, the first cooperative robot 332A and the second cooperative robot 332B may be arranged on the body 331 and operate independently of each other. In one embodiment, the first cooperative robot 332A and the second cooperative robot 332B can be separated by automatically fastening the connector 360 to the valve C of the gas container G placed inside the cabinet 300.

[0149] In one embodiment, the first cooperative robot 332A may separate and connect the end cap E attached to the valve C of the gas container G, or directly fasten the connector 360 to the valve C of the gas container G. In one embodiment, the second cooperative robot 332B can assist the operation of the first cooperative robot 332A by gripping the gas container G and supporting it to prevent it from moving during the process in which the first cooperative robot 332A connects or disconnects the connector 360 or the end cap E to the valve C of the gas container G. In one embodiment, the second cooperative robot 332B can attach a gasket to the connector 360 or the valve C and separate the used waste gasket.

[0150] In one embodiment, the first cooperative robot 332A or the second cooperative robot 332B can assist in the process of drawing in and drawing out the gas container G from the cabinet 300. For example, the first cooperative robot 332A or the second cooperative robot 332B may apply an external force to the outer surface of the gas container G while it is being drawn in inside the cabinet 300, moving the gas container G to align with its mounting position on the cabinet 300. In one embodiment, the first cooperative robot 332A and the second cooperative robot 332B may adjust the position of the support chain 341 within the cabinet 300 so that the support chain 341 surrounds or releases the gas container G that is mounted inside the cabinet 300. For example, the first cooperative robot 332A and the second cooperative robot 332B may separate the support chain 341 from the support frame 340 during the process of drawing the gas container G into the cabinet 300. When the first cooperative robot 332A or the second cooperative robot 332B positions the gas container so that it aligns with its mounting position inside the cabinet 300, it fastens the support chain 341 to the support frame 340 so that the support chain 341 surrounds the gas container G.

[0151] In one embodiment, the first cooperative robot 332A includes a first articulated arm 3321A having multiple degrees of freedom. The first articulated arm 3321A may be positioned on top of the body 331. The first articulated arm 3321A can achieve six degrees of freedom of motion, such as three-dimensional translational motion relative to the ground (e.g., motion along the X, Y, and Z axes) and three-dimensional rotational motion (e.g., roll, yaw, and pitch).

[0152] In one embodiment, the first cooperative robot 332A includes a first grip module 336 mounted on the end of a first articulated arm 3321A. The first grip module 336 includes a gripper that operates to grasp an object. The first grip module 336 can rotate the object. For example, an end cap E or a connector 360 may be grasped through the first grip module 336. In one embodiment, the first grip module 336 may be morphologically modified to selectively grasp the end cap E or the connector 360. For example, the first grip module 336 may include a gripper with varying spacing to selectively contact both sides of the target object (e.g., the connector 360, the end cap E). However, it should be noted that this is an example for the sake of explanation, and the manner in which the first grip module 336 grasps an object is not limited thereto. For example, the first grip module 336 may be formed as a structure having a plurality of fingers, each supporting different parts of the outer surface of an object.

[0153] In one embodiment, for the first grip module 336 to grasp a target object (e.g., a connector 360, an end cap E), it needs to be positioned in an aligned state with respect to the connector 360 or the end cap E so that the first grip module 336 can grasp the connector 360 or the end cap E. The mobile robot device 330 acquires information regarding the alignment state of the first grip module 336 via the control unit and controls the movement of the first articulated arm 3321A of the first cooperative robot 332A so that the first grip module 336 is positioned in a first aligned state with respect to the target object (e.g., a connector 360, an end cap E) based on the acquired information. Subsequently, with the first grip module 336 positioned in an aligned state with respect to the target object (e.g., a connector 360, an end cap E), the first grip module 336 operates to grasp the target object. In one embodiment, with the first grip module 336 grasping the target object, the first cooperative robot 332A operates so that the target object is positioned at a set position and angle.

[0154] In one embodiment, the first cooperative robot 332A can separate an end cap E attached to a valve C via a first grip module 336, or attach an end cap E to the valve C of a used gas container G. For example, with the first grip module 336 gripping the outer surface of the end cap E attached to the valve C, the first cooperative robot 332A can rotate the end cap E via the first grip module 336 to release the screw engagement of the end cap E with respect to the valve C, thereby separating the end cap E from the valve C. Conversely, the first cooperative robot 332A can attach the end cap E to the valve C by the opposite operation.

[0155] In one embodiment, the first cooperative robot 332A can fasten the connector 360 to the valve C from which the end cap E has been removed via the first grip module 336. For example, if the first grip module 336 is gripping the outer surface of the connector 360, the first cooperative robot 332A can move the connector 360 and align it to a position and angle that allows it to be fastened to the valve C. In this document, the position of the connector 360 when it is aligned to a position and angle that allows it to be fastened to the valve C is referred to as the "valve C fastening position". The first cooperative robot 332A can position the connector 360 to the valve C fastening position by adjusting the position of the connector 360 within the cabinet 300 through the movement of the first articulated arm 3321A. The valve C fastening position may be determined relatively according to the placement of the gas container G within the cabinet 300, i.e., the position of the valve C inside the cabinet 300. In one embodiment, the first cooperative robot 332A can rotate the connector 360 relative to the valve C and fasten it to the valve C while the connector 360 is in the fastening position on the valve C. The first cooperative robot 332A can then disengage the connector 360 from the valve C by the opposite operation.

[0156] In one embodiment, the second cooperative robot 332B includes a second articulated arm 3321B having multiple degrees of freedom. The second articulated arm 3321B, like the first articulated arm 3321A, can achieve six degrees of freedom. The second articulated arm 3321B may be positioned on top of the body 331.

[0157] In one embodiment, the second cooperative robot 332B includes a second grip module 337 attached to the end of the second articulated arm 3321B for grasping objects. For example, the grip module may grasp an assembly of a valve C of a gas container G, or an object such as a gasket attached to the outer surface of the valve C of a gas container G. The second grip module 337 is formed in a structure similar to, but not limited to, the first grip module 336. It should be noted that the forms of the first grip module 336 and the second grip module 337 shown in the drawings are illustrative, and the second grip module 337 may be formed in various structures and sizes capable of grasping a gas container G or a gasket.

[0158] In one embodiment, the second cooperative robot 332B assists the operation of the first cooperative robot 332A via the second grip module 337. The second cooperative robot 332B can grip and support a gas container G, such as the valve C assembly, via the second grip module 337 during the process in which the first cooperative robot 332A separates / fastens the end cap E or the connector 360 to the valve C. When the second grip module 337 supports the gas container G, it can reduce or prevent the gas container G from moving and distorting the position of the valve C when the first cooperative robot 332A separates / fastens the end cap E or the connector 360 to the valve C. In one embodiment, in order for the second cooperative robot 332B to grip the gas container G via the second grip module 337, the second grip module 337 needs to be aligned in position and angle so that it can grip the gas container G. In this document, the position in which the second grip module 337 is aligned to grip the gas container G, for example, the position in which it is aligned to grip the valve C assembly, is referred to as the "gripping position". In one embodiment, the mobile robot device 330 can acquire information regarding the gripping position via the control unit and control the operation of the second cooperative robot, for example, the second articulated arm 3321B, to position the second grip module 337 in the gripping position relative to the gas container G.

[0159] In one embodiment, the first cooperative robot 332A and the second cooperative robot 332B selectively fasten a support chain 341 to a frame 340 provided on the cabinet 300. For example, the first cooperative robot 332A or the second cooperative robot 332B can grasp the support chain 341 via the first grip module 336 and the second grip module 337, respectively, and move the support chain 341 to selectively fasten or detach it from the support frame 340. In one embodiment, if one of the cooperative robots (e.g., the first cooperative robot 332A) grasps the support chain 341 and fastens or detaches it from the support frame 340, the other cooperative robot (e.g., the second cooperative robot 332B) grasps the gas container G and supports it so that it does not move. Of course, the reverse is also possible.

[0160] In one embodiment, the 3D vision camera 334 may collect images. The 3D vision camera 334 may collect a 3D image including, for example, a first grip module 336, an end cap E, a connector 360, a second grip module 337, and a valve C of the gas container G.

[0161] In one embodiment, the 3D vision camera 334 may be positioned on the upper part of the body 331. There may be one or more 3D vision cameras 334. In one embodiment, the 3D vision camera 334 may be positioned on at least one of the first cooperative robot 332A or the second cooperative robot 332B. For example, the 3D vision camera 334 is positioned at the end of the second articulated arm 3321B as shown in Figure 3A, but it may also be positioned at the end of the first articulated arm 3321A. Furthermore, multiple 3D vision cameras 334 may be provided and positioned at the ends of the first articulated arm 3321A and the second articulated arm 3321B, respectively.

[0162] In one embodiment, when the 3D vision camera 334 is positioned at the end of the second articulated arm 3321B, the mobile robot device 330 controls the second cooperative robot 332B to collect 3D images of the first grip module 336, the end cap E, the connector 360, and the valve C of the gas container G. With this configuration, the 3D vision camera 334 can collect images of each component of the gas supply system 3 at an independent position, regardless of the operation of the first cooperative robot 332A. On the other hand, when the 3D vision camera 334 is positioned at the end of the first articulated arm 3321A, the 3D vision camera 334 can collect an intuitive image for aligning the first grip module 336 by collecting a forward image of the first grip module 336. In one embodiment, if multiple 3D vision cameras 334 are provided and positioned at the ends of the first cooperative robot 332A and the second cooperative robot 332B, respectively, the mobile robot device 330 can collect 3D images at various angles via the two 3D vision cameras 334, thereby generating a more accurately corrected 3D model through the collected images. For convenience of explanation, an embodiment will be described below as an example in which the 3D vision cameras 334 are positioned on the second cooperative robot 332B.

[0163] In one embodiment, the control unit controls the operation of the mobile robot device 330. In another embodiment, the control unit controls the operation of the first cooperative robot 332A and the second cooperative robot 332B based on images collected by the 3D vision camera 334.

[0164] In one embodiment, the control unit can operate the first cooperative robot 332A so that the first grip module 336 can grasp the end cap E or connector 360 based on the image collected by the 3D vision camera 334. The control unit can determine the alignment state for the position and angle at which the first grip module 336 can grasp the end cap E or connector 360 based on the collected image, and operate the first cooperative robot 332A so that the first grip module 336 is placed in the determined alignment state. For example, the alignment state means that the first grip module 336 is placed in a position and angle at which it can grasp the end cap E or connector 360.

[0165] The control unit can operate the first cooperative robot 332A so that when the first grip module 336 is in an aligned position, the end cap E or connector 360 is gripped via the first grip module 336.

[0166] In one embodiment, the control unit can control the first cooperative robot 332A and the second cooperative robot 332B so that the separation and fastening operations on the valve C are performed while the first grip module 336 is gripping the end cap E or connector 360.

[0167] In one embodiment, the control unit can operate the second cooperative robot 332B to assist the operation of the first cooperative robot 332A in the process of fastening / disconnecting the connector 360 or end cap E to the valve C. For example, as shown in Figure 3B, with the first grip module 336 gripping the connector 360, the control unit positions the second grip module 337 to a gripping position that can grasp the gas container G so that the position of the gas container G is fixed, and then controls the operation of the second cooperative robot 332B so that the second grip module 337 grips and supports the outer surface of the gas container G. Based on the collected images, the control unit can determine information regarding the gripping position in which the second grip module 337 can grasp the gas container G.

[0168] In one embodiment, the control unit operates the second cooperative robot 332B so that the second grip module 337 can swap the gasket between the valve C and the connector 360. Based on the image collected by the 3D vision camera 334, the control unit determines the position and operating state in which the second grip module 337 can swap the gasket attached to the valve C or connector 360, and controls the operation of the second cooperative robot 332B so that the second grip module 337 can grasp the gasket and attach / detach it from the valve C or connector 360 according to the determined state.

[0169] In one embodiment, the control unit can operate the first cooperative robot 332A and the second cooperative robot 332B to assist in the placement of the gas container G onto the cabinet 300 based on information collected by the 3D vision camera 334. For example, the control unit can collect the position of the gas container G inside the cabinet 300 via the 3D vision camera 334, and based on the collected information, the first grip module 336 or the second grip module 337 can grip or push the gas container G and move it to an aligned position on the cabinet 300. For example, the control unit can collect information on the position of the gas container G and the support chain 341 via the 3D vision camera 334, and based on the collected information, the first grip module 336 or the second grip module 337 can grip the support chain 341 and separate or fasten it to the support frame 340. In one embodiment, the control unit can determine the operation information of the first cooperative robot 332A and the second cooperative robot 332B via a set algorithm. For example, the operational information of the first cooperative robot 332A and the second cooperative robot 332B refers to information regarding the position and movement of the first grip module 336 and the second grip module 337.

[0170] In one embodiment, the configured algorithm is set to generate a 3D model in virtual space in real time, for example, a 3D model of the first grip module 336, gas container G, end cap E, and connector 360, via images acquired by the 3D vision camera 334. In one embodiment, the 3D model changes based on the real-time images acquired by the vision camera 334. In one embodiment, the configured algorithm can determine the similarity of the generated 3D image to a configured reference model.

[0171] In one embodiment, the configured reference model may be a three-dimensional model aligned so that the first grip module 336 can grip the end cap E or connector 360. For example, the configured reference model may be a three-dimensional model in which the end cap E or connector 360 is aligned so that it can be fastened to the valve C of the gas container G. In one embodiment, the configured algorithm may be configured to determine the image similarity between the generated three-dimensional image and the configured reference model and to determine the need for positional adjustment of the first grip module 336.

[0172] In one embodiment, if the image similarity is greater than or equal to a set value, the configured algorithm may be configured to generate an instruction to perform an action determined by the reference model. For example, if the reference model is a three-dimensional model aligned so that the first grip module 336 can grip the end cap E or connector 360, the configured algorithm may be configured to generate an instruction for the first grip module 336 to grip the end cap E or connector 360 when the image similarity is greater than or equal to a set value. For example, if the configured reference model is a three-dimensional model aligned so that the axis of rotation of the connector 360 gripped by the first grip module 336 coincides with the valve C, the configured algorithm may be configured to generate an instruction for the connector 360 to fasten or detach from the valve C when the image similarity is greater than or equal to a set value. For example, if the reference model is a three-dimensional model aligned so that the axis and angle coincide with the end cap E gripped by the first grip module 336, the configured algorithm may be configured to generate an instruction for the end cap E to fasten or detach when the image similarity is greater than or equal to a set value.

[0173] In one embodiment, if the image similarity is greater than or equal to a set value, the configured algorithm may be set to predict the predicted position of the first grip module 336 so that the 3D model has an image similarity of greater than or equal to the set value with respect to the reference model, and to determine the predicted position as the alignment position of the first grip module 336.

[0174] In one embodiment, once the set algorithm determines the alignment position of the first grip module 336, the control unit controls the first cooperative robot 332A to adjust the three-dimensional coordinates and three-dimensional rotation angle of the first grip module 336 so that the position of the first grip module 336 is the determined alignment position. For example, once a first alignment state is determined in which the first grip module 336 can grip the end cap E or connector 360, the control unit controls the first cooperative robot 332A so that the first grip module 336 is placed in the first alignment state.

[0175] In one embodiment, the control unit can align the positions of the end cap E and connector 360 via the operation of the first cooperative robot 332A while the first grip module 336 is gripping the end cap E and connector 360. For example, the control unit may control the operation of the first cooperative robot 332A so that the end cap E and connector 360 are in a state where they can be fastened to or detached from the valve C of the gas container G, based on images collected by the 3D vision camera 334. In one embodiment, the control unit may determine an expected position where the end cap E or connector 360 is axially and angularly aligned with the valve C of the gas container G, and control the first articulated arm 3321A so that the end cap E or connector 360 is positioned at the determined expected position. In one embodiment, once the end cap E or connector 360 is aligned with the valve C of the gas container G, the control unit may control the first articulated arm 3321A so that the first grip module 336 rotates to fasten to or detach the end cap E and connector 360 from the valve C of the gas container G.

[0176] In one embodiment, the control unit controls the operation of the second collaborative robot 332B to assist the operation of the first collaborative robot 332A in the process of fastening the end cap E or connector 360 to the valve C of the gas container G. For example, the control unit may control the operation of the second collaborative robot 332B based on images collected by the 3D vision camera 334 so that the grip module is in a second alignment state in which it can grip the gas container G, for example, the valve C. The control unit can control the operation of the second collaborative robot 332B so that the grip module grips the valve C assembly and the position of the valve C does not shift in the process of fastening the fastening device to the valve C of the gas container G by the first collaborative robot 332A.

[0177] In one embodiment, the control unit controls the operation of the second cooperative robot 332B to replace the gasket before the connector 360 is fastened to the valve C of the gas container G. For example, the control unit may control the operation of the second cooperative robot 332B so that the second grip module 337 is in a third alignment state where the gasket can be replaced between the connector 360 and the valve C of the gas container G, based on an image collected by the 3D vision camera 334. The control unit controls the second grip module 337 to grasp and remove the gasket and install a new gasket on the valve C of the gas container G. Once the gasket removal operation through the second grip module 337 is complete, the control unit controls the second cooperative robot 332B to assist in fastening the connector 360 to the gas container G.

[0178] The example shown in Figure 4B illustrates an exemplary operating mechanism in which the mobile robot device 330 provides a support chain 341 around the periphery of the gas container G. For example, the mobile robot device 330 collects positional information of the gas container G via a three-dimensional vision camera 334 and determines, based on the collected information, whether the gas container G is aligned to its mounting position in the cabinet 300. If the gas container G is not correctly positioned in its mounting position, the mobile robot device 330 can move the gas container G to the mounting position via the first cooperative robot 332A or the second cooperative robot 332B. In one embodiment, once the gas container G is placed in its mounting position in the cabinet 300, the mobile robot device 330 collects positional information of the support chain 341 via the three-dimensional vision camera 334. The mobile robot device 330 can, based on the collected information, cause the first grip module 336 (or the second grip module 337) to grasp the support chain 341 and activate the first cooperative robot 332A (or the second cooperative robot 332B) to fasten the grasped chain 341 to the support frame 334.

[0179] The example shown in Figure 4C illustrates an exemplary operation in which a mobile robotic device 330 fastens a connector 360 to a valve C of a gas container G. For example, the mobile robotic device 330 can collect positional information of the connector 360 via a three-dimensional vision camera 334 and, based on the collected information, can actuate the first cooperative robot 332A so that the first grip module 336 grasps the connector 360. Subsequently, based on the positional information of the valve C and connector 360 collected via the three-dimensional vision camera 334, the mobile robotic device 330 can actuate the first cooperative robot 332A so that the connector 360, held by the first grip module 336, is aligned to a fastening position for fastening to the valve C. With the connector 360 aligned to the fastening position, the first cooperative robot 332A operates to fasten the connector 360 to the valve E. In the process of the first cooperative robot 332A fastening the connector 360 to the valve E, the second cooperative robot 332B may operate so that the second grip module 337 grips the gas container G, for example, the valve assembly V, and supports the gas container G. In one embodiment, the gas supply system 3 transmits power to the outside via the mobile robot device 330 and aligns the position of the connector 360, thereby eliminating the need for a separate configuration (e.g., an actuator) for operating the connector 360. This simplifies the structure of the gas cabinet 300 and improves ease of maintenance. Furthermore, the gas supply system 3 reduces the space occupied by the automated device inside the cabinet 300, thereby reducing the spatial constraints required for the installation of the gas supply system 3.

[0180] Figure 5 is a perspective view of a mobile robot device according to one embodiment.

[0181] Referring to Figure 5, a gas supply system 4 according to one embodiment includes a cabinet 400, a position adjustment module, a fastening device (for example, the fastening device 110 in Figure 2A), and a mobile robot device 430.

[0182] In one embodiment, the cabinet 400 may form an internal space in which a gas container is placed. In one embodiment, a support clamp 440 may be located inside the cabinet 400, which operates to support the outer surface of the placed gas container. In one embodiment, a support base (not shown) for supporting the gas container may be located at the bottom of the internal space of the cabinet 400. In one embodiment, a position adjustment module (e.g., the position adjustment module 120 in Figure 2) movably connects the fastening device to the cabinet 400.

[0183] In one embodiment, the fastening device is movably mounted in the internal space of the cabinet 400 and fastens to the valve of the gas container in an aligned position to supply gas. In one embodiment, the fastening device includes an end cap separator (e.g., end cap separator 111 in Figure 3B) for removing an end cap fitted to the valve in a first position aligned to the valve, and a valve connector (e.g., valve connector 112 in Figure 3B) for fitting to the valve in a second position aligned to the valve to supply gas. In one embodiment, the fastening device is connected to an externally located mobile robot device 430 and includes a docking unit (e.g., docking unit 113 in Figure 3B) for power supply from the mobile robot device 430.

[0184] In one embodiment, the mobile robot device 430 may move outside the cabinet 400. The mobile robot device 430 can be connected to a fastening device to move the fastening device, or it can supply power to the fastening device to operate it. In one embodiment, the mobile robot device 430 includes a body 431, a first cooperative robot 432A, a second cooperative robot 432B, a docking module 435, a three-dimensional vision camera 434, a gasket gripper 437, a gasket storage unit 438, and a control unit.

[0185] In one embodiment, the body 431 may form the body portion of the mobile robot device 430. In one embodiment, the body 431 may move along the ground.

[0186] In one embodiment, the first cooperative robot 432A may be positioned on top of the body 431. In one embodiment, the first robot arm 432A includes a first articulated arm 4321A that enables multi-degree-of-freedom motion, for example, six-degree-of-freedom motion.

[0187] In one embodiment, the first cooperative robot 432A includes a docking module 435 located at the end of the first articulated arm 4321A. In one embodiment, the docking module 435 may be connected to the docking portion of a fastening device via the operation of the first articulated arm 4321A.

[0188] In one embodiment, the second cooperative robot 432B may be positioned on top of the body 431. In one embodiment, the second cooperative robot 432B includes a second articulated arm 4321B that enables multi-degree-of-freedom motion, for example, six-degree-of-freedom motion.

[0189] In one embodiment, a 3D vision camera 434 is positioned on at least one of the first cooperative robot 432A or the second cooperative robot 432B, respectively, to collect a 3D image including the docking module 435, the fastening device, and the valve of the gas container.

[0190] In one embodiment, the gasket gripper 437 is provided on the second cooperative robot 432B. For example, the gasket gripper 437 may be provided on the end of the second articulated arm 4321B. In one embodiment, the gasket gripper 437 can be moved and operated by the second cooperative robot 432B to replace the gasket installed between the valve and the valve connector. For example, the gasket gripper 437 may move between a gasket replacement position set by the second articulated arm 4321B and a gasket storage unit 438. For example, the gasket gripper 437 can grip a used waste gasket at the gasket replacement position or grip a new gasket and move to the gasket replacement position.

[0191] In one embodiment, the control unit may determine a gasket replacement position for replacing the gasket based on the image collected by the 3D vision camera 434, and control the operation of the second robot arm 432B so that the gasket gripper 437 moves to the determined gasket replacement position.

[0192] In one embodiment, the gasket storage section 438 may be located on the upper part of the body 431. In one embodiment, the gasket storage section 438 includes a waste gasket storage box containing waste gaskets removed from the valve via the gasket gripper 437, and a new gasket storage box for storing new gaskets to be gripped by the gasket gripper 437.

[0193] Figure 6 is a flowchart of a gas supply method according to one embodiment.

[0194] At least one of the operations in the gas supply method shown in Figure 6 may be omitted. The order of the operations in the gas supply method may be changed from one another or performed simultaneously, unless otherwise specified. At least one of the operations in the gas supply method may be repeated.

[0195] A gas supply method according to one embodiment is performed by a gas supply system (for example, the gas supply system in Figure 2A) having a fastening device and a mobile robot device including a docking module selectively connected to the fastening device and supplying power to the fastening device. In one embodiment, the fastening device includes a valve connector or an end cap separator for fastening to a valve of a gas container to supply gas. In one embodiment, the mobile robot device includes a docking module selectively connected to the docking portion of the fastening device and supplying power to the fastening device. In one embodiment, the gas supply method may be performed by a control unit.

[0196] In one embodiment, the gas supply method includes an operation 510 to confirm the placement of the gas container. Operation 510 can confirm whether the gas container has been placed at the gas supply position, for example, whether the gas container has been placed in the placement space inside the cabinet.

[0197] In one embodiment, the gas supply method includes an operation 520 for generating a three-dimensional model of the gas supply system. Operation 520 can generate a three-dimensional model of a virtual space based on the relative positions of the gas container, the fastening device, and the docking module, thereby aligning the position of the docking module.

[0198] In one embodiment, operation 520 includes operations to collect a three-dimensional image via a three-dimensional vision camera, to generate a three-dimensional model for a virtual space based on the collected image, to determine the image similarity by comparing the generated three-dimensional model with a set reference model, and, if the image similarity is less than a set value, to determine the expected position of the docking module so that the image similarity is equal to or greater than the set value.

[0199] In one embodiment, the operation of generating a 3D model may vary depending on the real-time 3D image acquired by the vision camera.

[0200] In one embodiment, the operation to determine image similarity can determine the similarity between the generated 3D image and a set reference model. For example, the set reference model may be a 3D model of the fastening device aligned to a first position relative to the gas container valve. For example, the set reference model may be a 3D model of the fastening device aligned to a second position relative to the gas container valve. In one embodiment, the operation to determine image similarity can determine the need for docking module position adjustment by determining the image similarity between the generated 3D image and the set reference model.

[0201] In one embodiment, the operation to determine image similarity determines a subsequent operation determined by the reference model if the image similarity is equal to or greater than a set value. For example, if the reference model is a three-dimensional model aligned so that a docking module can be fastened to a docking part, the corresponding subsequent operation when the image similarity is equal to or greater than a set value may be the operation in which the docking module is fastened to the docking part. For example, if the reference model is a three-dimensional model in which the fastening device is aligned to a first position relative to the valve, the corresponding subsequent operation when the image similarity is equal to or greater than a set value may be the operation in which the end cap separation part removes the end cap from the valve. For example, if the reference model is a three-dimensional model in which the fastening device is aligned to a second position relative to the gas container valve, the corresponding subsequent operation when the image similarity is equal to or greater than a set value may be the operation in which the valve connector is fastened to the valve.

[0202] In one embodiment, if the image similarity is less than a set value, the operation to determine the expected position of the docking module to make the image similarity equal to or greater than the set value includes the operation of predicting the expected position of the docking module so that the 3D model has an image similarity equal to or greater than the set value of the reference model, and the operation of determining the expected position as the alignment position of the docking module.

[0203] In one embodiment, the gas supply method includes an operation 530 for docking the docking module to a fastening device. Operation 530 is performed when it is determined that the image similarity between the reference model and the generated 3D model for the state in which the docking module can be fastened to the fastening device is equal to or greater than a set value.

[0204] In one embodiment, the gas supply method includes an operation 540 in which the mobile robot device is operated so that the fastening device is aligned with the gas container valve after the docking module has been docked with the fastening device.

[0205] In one embodiment, operation 540 is performed by determining the alignment position of the docking module by determining the similarity between a reference model in which the fastening device is aligned to a first position relative to the valve and the generated three-dimensional image. Operation 540 can align the position of the fastening device integrally connected to the docking module to the first position by operating a mobile robot device to move the docking module to the determined alignment position of the docking module.

[0206] In one embodiment, operation 540 is performed by determining the alignment position of the docking module by determining the similarity between a reference model in which the fastening device is aligned to a second position relative to the valve and the generated three-dimensional image. Operation 540 can align the position of the fastening device integrally connected to the docking module to the second position by operating a mobile robot device to move the docking module to the determined alignment position of the docking module.

[0207] In one embodiment, the gas supply method includes an operation 550 that supplies power to the fastening device via a docking module. In one embodiment, the operation 550 may be performed with the fastening device aligned to a first or second position relative to the valve.

[0208] In one embodiment, the gas supply method includes an operation 560 to separate the docking module from the fastening device.

[0209] Although embodiments of the present invention have been described in detail above with reference to the drawings, the present invention is not limited to the embodiments described above, and a person with ordinary skill in the art can apply various technical modifications and variations based on the above. For example, the described techniques may be performed in a different order than described, and / or the described systems, structures, devices, circuits, and other components may be combined or assembled in a different manner than described, or substituted or replaced by other components or equivalents, and still achieve appropriate results.

[0210] Therefore, the scope of the present invention is not limited to the disclosed embodiments, but is defined by equivalents to the claims, etc. [Explanation of symbols]

[0211] 1: Gas supply system 100: Cabinet 130: Mobile robotic device 134: 3D Vision Camera

Claims

1. A cabinet in which gas containers are placed, A supply pipe provided inside the cabinet and connected to the outside of the cabinet, A connector that is attached to the end of the supply piping, can be fastened to the valve of the gas container, and supplies process gas from inside the gas container to the supply piping when fastened to the valve, A mobile robot device positioned outside the cabinet and automatically fastening the connector to the valve, Includes, The aforementioned mobile robot device is A body that is movable outside the aforementioned cabinet, A first cooperative robot includes a first articulated arm positioned on the body and having multiple degrees of freedom of movement, which operates to fasten the connector to the valve, A second cooperative robot, which includes a second articulated arm positioned on the body and having multiple degrees of freedom of movement, and which operates to support the gas container, A 3D vision camera that collects images, A control unit that controls the operation of the first and second cooperative robots based on the images collected by the three-dimensional vision camera, A gas supply system, including a gas supply system.

2. The aforementioned first collaborative robot, The first articulated arm is provided at the end of the first articulated arm and further includes a first grip module for gripping the connector, The gas supply system according to claim 1, wherein the first collaborative robot is configured to fasten the connector to the valve while the first grip module is gripping the connector.

3. The control unit determines the operation information of the first cooperative robot according to the set algorithm, The aforementioned algorithm is The gas supply system according to claim 1, comprising generating a three-dimensional model of the valve and connector in real time via the collected images, determining the image similarity by comparing the generated three-dimensional model with a set reference model, and operating the first cooperative robot so that the connector is positioned at a predicted position for the connector that results in an image similarity equal to or greater than a set value.

4. The control unit, Based on the images collected by the three-dimensional vision camera, the valve fastening position is determined so that the connector can be fastened to the valve. The gas supply system according to claim 1, wherein the operation of the first cooperative robot is controlled so that the connector is positioned at the valve fastening position.

5. The gas supply system according to claim 1, wherein the second collaborative robot further includes a second grip module provided at the end of the second articulated arm for grasping an object.

6. The gas supply system according to claim 5, wherein the second cooperative robot is configured to grip and support the gas container in the process of the first cooperative robot operating to fasten the connector to the valve.

7. The control unit, Based on the images collected by the three-dimensional vision camera, the second grip module determines a gripping position for gripping the gas container. The gas supply system according to claim 6, wherein the second cooperative robot is operated to grasp the gas container after it has moved to the grasping position.

8. The second cooperative robot is configured to grasp the gasket via the second grip module, The gas supply system according to claim 5, wherein the control unit causes the second grip module to separate and attach a gasket to the connector or valve based on an image collected by the three-dimensional vision camera.

9. The cabinet is equipped with a support chain for surrounding the gas container. The gas supply system according to claim 1, wherein the first cooperative robot or the second cooperative robot is configured to adjust the position of the support chain within the cabinet.

10. The aforementioned 3D vision camera is provided with one or more units. The gas supply system according to claim 1, wherein the gas supply system is located on at least one of the first articulated arm or the second articulated arm.

11. A cabinet in which gas containers are placed, A supply pipe is provided inside the cabinet and connected to the outside of the cabinet, A connector attached to the end of the supply pipe, A fastening device for fastening the connector to the valve while it is aligned with the valve of the gas container, A mobile robot device that automatically aligns the fastening device with the gas container, Includes, The aforementioned mobile robot device is A body that can move along the ground, The first cooperative robot, which includes a first articulated arm, is positioned on the aforementioned body. The body is arranged to include a second cooperative robot, which includes a second articulated arm, A 3D vision camera that collects images, A control unit that controls the operation of the first and second cooperative robots based on the images collected by the three-dimensional vision camera, Includes, The first cooperative robot is detachably connected to the fastening device and configured to move the fastening device, and is part of a gas supply system.

12. The first collaborative robot is, The invention further includes a docking module provided at the end of the first articulated arm, which is aligned with the fastening device and docked to the fastening device, The gas supply system according to claim 11, wherein the docking module supplies power to the fastening device while it is docked to the fastening device.

13. The control unit, Based on the images collected by the three-dimensional vision camera, the docking position is determined such that the docking module can be fastened to the fastening device. The gas supply system according to claim 12, wherein the operation of the first cooperative robot is controlled so that the docking module is positioned in the docking position.

14. The docking module is, A docking plate on which one or more docking members are formed, A power motor that supplies power to the fastening device while docked to the fastening device, Includes, The fastening device is One or more fixing clamps detachably coupled to the docking member, The power motor is connected to a power transmission unit that is supplied with power from the power motor, The gas supply system according to claim 12, including the gas supply system according to claim 12.

15. The docking position is determined by a set algorithm. The aforementioned algorithm is The gas supply system according to claim 13, wherein a three-dimensional model of a virtual space is generated in real time via the three-dimensional vision camera, the generated three-dimensional model is compared with a set reference model to determine the image similarity, and the predicted position of the docking module that makes the image similarity equal to or greater than a set value is determined as the docking position.

16. The fastening device further includes an end cap separation section for removing the end cap from the valve of the gas container, The end cap separation portion is rotatable around the first rotation axis, The end cap separation portion is formed with an insertion groove that corresponds to the end cap so that the end cap can be inserted along the first rotation axis. The gas supply system according to claim 11, wherein, when the fastening device is aligned to the first position, the first rotation axis coincides with the central axis of the valve.

17. The connector is capable of rotating around a second rotation axis or translating along the second rotation axis. The gas supply system according to claim 11, wherein, with the fastening device aligned to the second position, the second rotation axis coincides with the central axis of the valve.

18. The gas supply system according to claim 11, wherein the second cooperative robot further includes a gasket gripper provided at the end of the second articulated arm for gripping a gasket.

19. The gas supply system according to claim 18, wherein the mobile robot device further includes a gasket storage section arranged in the body and storing gaskets.

20. The gas supply system according to claim 18, wherein the control unit determines a gasket replacement position for replacing the gasket based on an image collected by the three-dimensional vision camera, and controls the operation of the second cooperative robot so that the gasket gripper moves to the determined gasket replacement position.

Citation Information

Patent Citations

  • Robot for transporting gas cylinder and system for supplying gas

    KR1020200107529A

  • Gas cabinet apparatus

    KR1020200107795A

  • Gas supply automatic system

    KR1020210014059A

  • Apparatus for storing gas cylinders

    KR1020220013838A

  • Gas cylinder transfer apparatus and gas cylinder logistics system including the same

    KR1020220013840A