Vacuum pump system and control method

Abstract

To suitably set a prescribed threshold for determining the number of abnormality occurrences for which an alarm is issued.SOLUTION: A vacuum pump system 100 includes a storing section 61, a pump control section 62, and a setting section 102. The storing section 61 stores a first threshold TH1 for determining the number of abnormality occurrences for which an alarm is output. The pump control section 62 counts the number of abnormality occurrences occurring in a vacuum pump 1, determines whether or not the number of abnormality occurrences is equal to or larger than the first threshold TH1, and outputs the alarm when the number of abnormality occurrences is equal to or larger than the first threshold. The setting section 102 sets or changes the first threshold TH1 on the basis of an operation state of the vacuum pump 1.SELECTED DRAWING: Figure 6

Description

Technical Field

[0001] The present invention relates to a vacuum pump system and a method for controlling a vacuum pump.

Background Art

[0002] Some vacuum pumps rotate a rotor by a motor to exhaust gas. In the vacuum pump described in Patent Document 1, it is described that the axial displacement of the rotor shaft is detected, the detected number of times is integrated, and an alarm is issued when the integrated number of times exceeds a predetermined number of times or when the integrated number of times exceeds a predetermined number of times within a predetermined time.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In conventional vacuum pumps such as the vacuum pump described in Patent Document 1, the above-mentioned predetermined number of times (threshold value) is a fixed value determined based on experience such as at what number of times the integrated number of abnormal occurrences increases the risk of damage to the vacuum pump.

[0005] However, in the case of a vacuum pump with little actual performance on how many times of abnormal occurrences it is necessary to issue an alarm, it is difficult to set a threshold value for issuing an alarm based on experience or the like. Also, when the threshold value is a fixed value, for example, in a vacuum pump where the number of abnormal occurrences is less than expected, an alarm may not be issued even when the operating time of the vacuum pump reaches the time when maintenance is required. That is, when the threshold value is a fixed value, an alarm may not be issued at an appropriate time.

[0006] The present invention was made to solve the above-mentioned conventional problems, and its purpose is to appropriately set the predetermined threshold in a vacuum pump that determines whether the number of abnormal occurrences exceeds a predetermined threshold, according to the characteristics of the vacuum pump. [Means for solving the problem]

[0007] A vacuum pump system according to one aspect of the present invention is a system that includes a vacuum pump that exhausts gas by rotating a rotor with a motor. The vacuum pump system comprises a storage unit, a control unit, and a setting unit. The storage unit stores a first threshold value that determines the number of occurrences of an abnormality that triggers an alarm. The control unit counts the number of abnormalities that occur in the vacuum pump, determines whether the number of abnormalities is equal to or greater than the first threshold value, and outputs an alarm if the number of abnormalities is equal to or greater than the first threshold value. The setting unit sets or changes the first threshold value based on the operating state of the vacuum pump. [Effects of the Invention]

[0008] In the vacuum pump system described above, which outputs an alarm when the number of abnormal occurrences exceeds a first threshold, the setting unit sets or changes the first threshold based on the actual operating state of the vacuum pump. Therefore, by referring to the actual operating state of the vacuum pump, it is possible to set a first threshold suitable for each individual vacuum pump, thereby enabling the output of an alarm at the appropriate time. [Brief explanation of the drawing]

[0009] [Figure 1] A diagram showing the configuration of a vacuum pump system. [Figure 2] This is a diagram showing the configuration of a vacuum pump. [Figure 3] A diagram showing the configuration of the pump control device. [Figure 4] This diagram shows the configuration of the setting device. [Figure 5] This is a flowchart showing the alarm activation process. [Figure 6] Flowchart showing example operation 1 for setting the first threshold. [Figure 7] This is a flowchart illustrating example 2 of setting the first threshold. [Figure 8] The first setup operation is shown in a flowchart. [Figure 9] This is a flowchart showing the second setting operation. [Modes for carrying out the invention]

[0010] <Vacuum pump system> The vacuum pump system 100 will be explained using Figure 1. Figure 1 is a diagram showing the configuration of the vacuum pump system 100. The vacuum pump system 100 is installed, for example, in a semiconductor factory that manufactures semiconductor devices and the like by performing various processes in a process chamber (not shown). The vacuum pump system 100 comprises a plurality of vacuum pumps 1 and a setting device 10.

[0011] Multiple vacuum pumps 1 perform vacuum evacuation of a target to be evacuated, such as a process chamber. In the vacuum pump system 100, one target to be evacuated may be evacuated by one vacuum pump 1, or one target to be evacuated may be evacuated by several of the multiple vacuum pumps 1. When an abnormality occurs in a vacuum pump 1, the vacuum pump 1 outputs an alarm when the number of occurrences exceeds a first threshold. Alarm output is a general term for processes such as issuing an alarm, storing the alarm in a memory device, and / or stopping the operation of the vacuum pump. In the following, the case of issuing an alarm will be explained as an example of alarm output. When an alarm is issued, the user can, for example, overhaul the vacuum pump that issued the alarm for maintenance and replace parts of the vacuum pump as needed.

[0012] The setting device 10 is connected to multiple vacuum pumps 1 via a network N and performs various settings for the multiple vacuum pumps 1. The setting device 10 can refer to various information stored in the vacuum pumps 1 and perform setting operations based on the referred information.

[0013] The setting device 10 is a computer system composed of various interfaces such as a CPU, a storage device (RAM, ROM, HDD, SSD, etc.), and a communication interface. The setting device 10 is, for example, a personal computer, a tablet terminal, or a mobile terminal. Additionally, the setting device 10 may be, for example, a server such as a cloud server. The network N is, for example, a network line such as a wireless LAN, a wired LAN, or a WAN, or a unique communication line provided in the vacuum pump 1.

[0014] Here, the "abnormality" generated in the vacuum pump 1 means that the measured value of the sensor provided in the vacuum pump 1 deviates from the normal value.

[0015] <Vacuum pump> The vacuum pump 1 provided in the vacuum pump system 100 will be described with reference to FIG. 2. FIG. 2 is a diagram showing the configuration of the vacuum pump 1. The vacuum pump 1 includes a housing 2, a base 3, a rotor 4, a stator 5, and a pump control device 6.

[0016] The housing 2 includes a first end portion 11, a second end portion 12, and a first internal space SP1. An intake port 13 is provided in the first end portion 11. The first end portion 11 is attached to an exhaust target (not shown). The first internal space SP1 communicates with the intake port 13. The second end portion 12 is located opposite to the first end portion 11 in the extension direction of the axis A1 of the rotor 4. The second end portion 12 is connected to the base 3. The base 3 includes a base end portion 14. The base end portion 14 is connected to the second end portion 12 of the housing 2.

[0017] The rotor 4 is connected to the shaft 21. The shaft 21 extends in the extending direction of the axis A1. The shaft 21 is rotatably accommodated in the base 3. The rotor 4 includes a plurality of stages of rotor blades 22 and a rotor cylindrical portion 23. The plurality of stages of rotor blades 22 are respectively connected to the shaft 21. The plurality of rotor blades 22 are arranged at intervals in the extending direction of the axis A1. Although not shown, the plurality of stages of rotor blades 22 extend radially around the shaft 21. In the drawings, only one of the plurality of stages of rotor blades 22 is labeled, and the labels of the other rotor blades 22 are omitted. The rotor cylindrical portion 23 is disposed below the plurality of stages of rotor blades 22. The rotor cylindrical portion 23 extends in the extending direction of the axis A1.

[0018] The stator 5 includes a plurality of stages of stator blades 31 and a stator cylindrical portion 32. The plurality of stages of stator blades 31 are connected to the inner surface of the housing 2. The plurality of stages of stator blades 31 are arranged at intervals in the extending direction of the axis A1. The plurality of stages of stator blades 31 are respectively disposed between the plurality of stages of rotor blades 22. Although not shown, the plurality of stages of stator blades 31 extend radially around the shaft 21. In the drawings, only two of the plurality of stages of stator blades 31 are labeled, and the labels of the other stator blades 31 are omitted. The stator cylindrical portion 32 is fixed in a state of being in thermal contact with the base 3. The stator cylindrical portion 32 is disposed facing the rotor cylindrical portion 23 with a slight gap in the radial direction of the rotor cylindrical portion 23. A spiral groove is provided on the inner peripheral surface of the stator cylindrical portion 32.

[0019] As shown in FIG. 2, a second internal space SP2 is formed further downstream of the exhaust downstream ends of the rotor cylindrical portion 23 and the stator cylindrical portion 32. The gas exhausted from the attachment object is exhausted into the second internal space SP2. The second internal space SP2 communicates with the exhaust port 16. The exhaust port 16 is provided in the base 3. Another vacuum pump (not shown) is connected to the exhaust port 16.

[0020] The pump control device 6 is housed inside a housing 33 located at the bottom of the base 3 and controls the vacuum pump 1. The pump control device 6 also issues an alarm or warning to notify that an abnormality has occurred in the vacuum pump 1 if the floating position of the shaft 21, measured by displacement sensors 44A to 44C (described later), the current value supplied to the motor 42, measured by a current value measuring device, or the rotational speed of the rotor 4, measured by a rotational speed sensor 43, is outside the normal range. The pump control device 6 is a computer system equipped with a CPU, memory devices such as ROM, and various interfaces.

[0021] The vacuum pump 1 includes a plurality of bearings 41A to 41E, a motor 42, and a rotation speed sensor 43. The plurality of bearings 41A to 41E are mounted in a position that houses the shaft 21 of the base 3. The plurality of bearings 41A to 41E rotatably support the rotor 4. Bearings 41A and 41E are, for example, ball bearings. On the other hand, the other bearings 41B to 41D are magnetic bearings. Each of the magnetic bearings 41B to 41D is equipped with a bearing electromagnet and displacement sensors 44A to 44C (Figure 3), and the displacement sensors 44A to 44C detect the floating position of the shaft 21, etc.

[0022] Motor 42 rotates the rotor 4. Motor 42 includes a motor rotor 42A and a motor stator 42B. Motor rotor 42A is mounted on shaft 21. Motor stator 42B is mounted on base 3. Motor stator 42B is positioned opposite motor rotor 42A. Motor 42 is connected to a motor current measuring device 45 (Figure 3) which measures the current supplied to motor 42. A rotation speed sensor 43 measures the rotation speed of shaft 21 (i.e., rotor 4).

[0023] The outer wall of the base 3 is provided with a heater 51 and cooling water piping (not shown) for controlling the temperature of the base 3. The temperature of the base 3 is detected by a temperature sensor 52. Based on the temperature detected by the temperature sensor 52, the temperature of the base 3 is controlled by balancing heating of the base 3 by the heater 51 and cooling by the cooling water flowing through the cooling water piping. A heater current measuring device 53 (Figure 3) is also connected to the heater 51 to measure the current supplied to the heater 51.

[0024] In the vacuum pump 1, the multiple stages of rotor blades 22 and the multiple stages of stator blades 31 constitute the turbomolecular pump section. The rotor cylindrical section 23 and the stator cylindrical section 32 constitute the screw-groove pump section. In the vacuum pump 1, the rotor 4 is rotated by the motor 42, causing gas to flow from the intake port 13 into the first internal space SP1. The gas in the first internal space SP1 passes through the turbomolecular pump section and the screw-groove pump section and is exhausted into the second internal space SP2. The gas in the second internal space SP2 is exhausted from the exhaust port 16. As a result, the inside of the object to be attached to the intake port 13 becomes a high vacuum state.

[0025] <Configuration of the pump control device> The configuration of the pump control device 6 will be explained using Figure 3. Figure 3 is a diagram showing the configuration of the pump control device 6. The pump control device 6 has a storage unit 61 and a pump control unit 62. The storage unit 61 is part or all of the storage area provided in the storage device that constitutes the pump control device 6. The storage unit 61 stores various parameters related to the vacuum pump 1, a program for controlling the vacuum pump 1, etc. In detail, the storage unit 61 stores the abnormal occurrence history HIS, the abnormal alarm condition CON, the abnormal occurrence counter CNT, the operating time counter TIM, the first threshold TH1, and the sensor measurement value MEA.

[0026] The Anomaly Occurrence History (HIS) stores the history of anomalies that have occurred in vacuum pump 1. The Anomaly Occurrence History (HIS) stores the type of anomaly that occurred and the time at which that anomaly occurred, associating them together.

[0027] The abnormality alarm condition CON defines the conditions under which an abnormality occurring in vacuum pump 1 will trigger an alarm. Specifically, the abnormality alarm condition CON defines the following abnormalities that will trigger an alarm.

[0028] The abnormality alarm condition CON specifies that when the rotational speed of the rotor 4, as measured by the rotational speed sensor 43, falls below a predetermined rotational speed, an abnormality in the rotational speed of the rotor 4 will be reported. This abnormality in rotational speed is an abnormality related to the load on the vacuum pump 1, indicating that the vacuum pump 1 is in an overload state. An "overload state" means that the torque of the motor 42 required to rotate the rotor 4 to a predetermined rotational speed is excessively high compared to normal. An overload state of the vacuum pump 1 indicates, for example, that a large amount of material has accumulated inside the vacuum pump 1. If this condition persists for a long period of time, the accumulated material may come into contact with the rotor blades 22 of the vacuum pump 1, potentially causing damage to the rotor blades 22 and resulting in a malfunction.

[0029] The abnormality alarm condition CON specifies that an abnormality in the position of the shaft 21 (rotor 4) will be reported when the position of the shaft 21, as measured by displacement sensors 44A to 44C, fluctuates by more than a predetermined range, or when the position of the shaft 21 is deviated from the axis A1 within a predetermined range. An abnormality in the position of the shaft 21 is an abnormality related to the vibration of the vacuum pump 1, meaning that the vacuum pump 1 is vibrating. When vibration occurs in the vacuum pump 1, for example, the rotor blades 22 of the vacuum pump 1 may come into contact with other parts (for example, the stator blades 31). As a result, when vibration occurs in the vacuum pump 1, the rotor blades 22 (and stator blades 31) may be damaged.

[0030] The abnormality alarm condition CON specifies that when the current value of motor 42 measured by the motor current measuring device 45 exceeds a predetermined value, an abnormality in the motor 42's current will be reported. This abnormality in the motor 42's current indicates that motor 42 is operating under excessive torque. In other words, the abnormality in the motor 42's current is an abnormality related to the load on the vacuum pump 1, indicating that the vacuum pump 1 is in an overloaded state.

[0031] The abnormality alarm condition CON triggers an alarm regarding the temperature of the vacuum pump 1 when the temperature of the base 3, measured by the temperature sensor 52, is below a predetermined temperature, and / or the current value of the heater 51, measured by the heater current measuring device 53, is below a predetermined value. An abnormality regarding the temperature of the vacuum pump 1 indicates that the temperature control of the vacuum pump 1 is not being performed properly. If the temperature control of the vacuum pump 1 is not performed properly, products may accumulate inside the vacuum pump 1, and these products may come into contact with the rotor blades 22, potentially damaging the rotor blades 22. Temperature abnormalities are often caused by, for example, a broken wire in the heater 51, forgetting to connect the heater 51, or a malfunction of the temperature sensor 52.

[0032] The abnormality counter CNT contains information indicating the number of times an abnormality has occurred. Specifically, the abnormality counter CNT indicates the number of occurrences of abnormalities related to the load of the vacuum pump 1 (i.e., abnormalities related to the rotational speed of the rotor 4, abnormalities related to the current of the motor 42), abnormalities related to the vibration of the vacuum pump 1, and abnormalities related to the temperature of the vacuum pump 1. The operating time counter TIM records the elapsed time since the vacuum pump 1 first started operation.

[0033] The first threshold TH1 determines the number of occurrences of a specific abnormality that triggers an alarm in the vacuum pump 1. In other words, an alarm is triggered when the number of occurrences of a specific abnormality exceeds the first threshold TH1. The specific abnormalities mentioned above include, for example, abnormalities related to vibration of the vacuum pump 1, abnormalities related to the current of the motor 42, abnormalities related to the temperature of the vacuum pump 1, and / or abnormalities related to the rotational speed of the rotor 4.

[0034] The sensor measurement value MEA records the measurement values ​​from sensors installed on the vacuum pump 1. Specifically, the sensor measurement value MEA is the rotational speed of the rotor 4 measured by the rotational speed sensor 43, the position of the shaft 21 measured by the displacement sensors 44A to 44C, the current value of the motor 42 measured by the motor current measuring device 45, the temperature of the base 3 measured by the temperature sensor 52, and / or the current value of the heater 51 measured by the heater current measuring device 53.

[0035] The pump control unit 62 is a hardware component consisting of the CPU and various interfaces that make up the pump control device 6, and it performs control of the vacuum pump 1. The pump control unit 62 realizes the functions related to the control of the vacuum pump 1 by executing a program stored in the memory unit 61. In addition, some functions may be realized by hardware included in the pump control unit 62.

[0036] <Setting device> The configuration of the setting device 10 will be explained below using Figure 4. Figure 4 is a diagram showing the configuration of the setting device 10. The setting device 10 has a storage unit 101 and a setting unit 102. The storage unit 101 is part or all of the storage area provided in the storage device that constitutes the setting device 10. The storage unit 101 stores programs and the like for operating the setting unit 102. The storage unit 101 stores the second threshold value TH2.

[0037] The second threshold TH2 defines the sensor readings required to determine if there is a risk of damage to the vacuum pump 1. Specifically, if the reading from any sensor exceeds the second threshold TH2, it is determined that there is a risk of damage to the vacuum pump 1. The second threshold TH2 is determined, for example, based on the fluctuation in the position of the shaft 21 (i.e., the magnitude of the rotor 4 vibration) measured by displacement sensors 44A to 44C. In other words, if the magnitude of the rotor 4 vibration measured by displacement sensors 44A to 44C exceeds the second threshold TH2, it is determined that there is a risk of damage to the vacuum pump 1. Furthermore, the second threshold TH2 may also be determined based on readings from other sensors.

[0038] The setting unit 102 is a hardware component consisting of the CPU and various interfaces that make up the setting device 10, and it implements functions related to the setting of the vacuum pump 1. The setting unit 102 implements the functions related to the setting of the vacuum pump 1 by executing a program stored in the storage unit 101. In addition, some functions may be implemented by hardware included in the setting unit 102.

[0039] The setting unit 102 can refer to the abnormality occurrence history HIS, the counter value of the abnormality occurrence counter CNT, the operating time counter TIM, the sensor measurement value MEA, etc., stored in the storage unit 61 of the pump control device 6. The setting unit 102 can also output this referenced information to the output device of the setting device 10 (for example, a display, printer, etc.).

[0040] Thus, by providing the setting device 10 with the above functions separately from the pump control device 6 of the vacuum pump 1, it becomes easier to manage multiple vacuum pumps 1 and to consolidate the operating records of multiple vacuum pumps 1. As a result, the first threshold TH1 can be set or changed efficiently for each of the multiple vacuum pumps 1, and a more appropriate first threshold TH1 can be set or changed based on more operating records.

[0041] <Alarm activation action> The alarm activation operation of vacuum pump 1 will be explained below using Figure 5. Figure 5 is a flowchart of the alarm activation operation. This alarm activation operation is performed by the pump control device 6 of each vacuum pump 1 included in the vacuum pump system 100.

[0042] When the vacuum pump 1 is started, the pump control unit 62 acquires the rotational speed of the rotor 4 measured by the rotational speed sensor 43, the position of the shaft 21 measured by the displacement sensors 44A to 44C, the current value of the motor 42 measured by the motor current measuring device 45, the temperature of the base 3 measured by the temperature sensor 52, and the current value of the heater 51 measured by the heater current measuring device 53 (step S1).

[0043] Next, the pump control unit 62 compares the rotational speed of the rotor 4, the position of the shaft 21, the current value of the motor 42, the temperature of the base 3, and the current value of the heater 51 obtained in step S1 with each measured value that constitutes an abnormal alarm condition as indicated in abnormal alarm condition CON (step S2).

[0044] If, as a result of this comparison, the measured values ​​of all the above sensors do not match the measured values ​​that trigger an alarm as indicated in the abnormal alarm condition CON, and are also not within the range of measured values ​​that trigger an alarm ("No" in step S2), the alarm activation operation returns to step S1. In other words, the pump control unit 62 continues to operate the vacuum pump 1.

[0045] On the other hand, if the measurement value of any of the above sensors matches the measurement value that triggers an abnormal alarm as indicated in abnormal alarm condition CON, or if it falls within the range of measurement values ​​that trigger an abnormal alarm (Yes in step S2), the pump control unit 62 will issue an abnormality alert regarding the item that shows a measurement value that matches the abnormal alarm condition (rotation speed of rotor 4, vibration of shaft 21, current value of motor 42, temperature of base 3, current value of heater 51) (step S3). In other words, an abnormality alert is issued when the measurement value of any of the above sensors matches the abnormal alarm condition.

[0046] When an abnormality is detected, the pump control unit 62 stores the detected abnormality in the abnormality occurrence history HIS. More specifically, the pump control unit 62 stores the type of abnormality detected and the time the abnormality was detected in the abnormality occurrence history HIS, associating them together.

[0047] Furthermore, if an abnormality is detected, the pump control unit 62 may notify the pump control unit 6 of the abnormality by, for example, emitting a sound from the pump control device 6, illuminating an alarm light, or displaying a message indicating that an abnormality has been detected on the display of the pump control device 6. Alternatively, the occurrence of the abnormality may simply be stored without any actual alarm being issued.

[0048] Subsequently, the pump control unit 62 counts the number of abnormalities (step S4). Specifically, the pump control unit 62 increments the value of the abnormality occurrence counter CNT for the type of abnormality that was triggered in step S3 by 1.

[0049] After counting the number of abnormal occurrences, the pump control unit 62 determines whether the number of abnormal occurrences reported in step S3 is equal to or greater than the first threshold TH1 that triggers an alarm related to the abnormality (step S5). If the number of abnormal occurrences reported in step S3 is less than the first threshold TH1 ("No" in step S5), the alarm activation operation returns to step S1. In other words, the pump control unit 62 continues to operate the vacuum pump 1.

[0050] On the other hand, if the number of occurrences of the abnormality that was reported in step S3 is equal to or greater than the first threshold TH1 (Yes in step S5), the pump control unit 62 issues an alarm related to the abnormality that was reported in step S3 (step S6). In other words, the alarm is issued when the number of occurrences of an abnormality (when the sensor measurement value matches the condition for abnormality reporting) reaches the first threshold TH1. The pump control unit 62 can issue an alarm by, for example, emitting a sound from the pump control device 6, illuminating an alarm light, or displaying a message on the display of the pump control device 6 indicating that an alarm has been issued.

[0051] When an alarm is triggered, the pump control unit 62 may change the sound emitted from the pump control device 6 and the color of the alarm light that illuminates, depending on the type of abnormality the alarm is for. The display may also show which type of abnormality the alarm is for.

[0052] After an alarm is triggered, the pump control unit 62 may stop the vacuum pump 1 at the time the alarm was triggered, or after a predetermined time has elapsed since the alarm was triggered. Alternatively, the pump control unit 62 may stop the vacuum pump 1 at the user's discretion after the alarm is triggered. This allows for actions such as parts replacement, repair, or cleaning to be taken in response to any abnormalities in the vacuum pump 1 after the alarm is triggered. After taking some action in response to the alarm, the counter value of the abnormality occurrence counter CNT may be reset (for example, to 0).

[0053] By performing the above steps S1 to S6, the vacuum pump 1 will issue an alarm if there is an abnormality in the measurement value of the sensor installed in the vacuum pump 1, and if the number of abnormalities increases and exceeds the first threshold TH1, an alarm will be issued to notify the user that many abnormalities are occurring.

[0054] <Setting the first threshold operation> The following describes the operation of setting or changing the first threshold TH1 in the vacuum pump system 100. The operation of setting or changing the first threshold TH1 is mainly performed by the setting device 10 included in the vacuum pump system 100.

[0055] For example, in the case of a vacuum pump 1, such as a new product with limited operating history, there is little track record regarding the number of abnormal occurrences that should trigger an alarm. Therefore, it is difficult to determine the first threshold TH1 for vacuum pump 1 based on experience. Furthermore, if the first threshold TH1 is set to a fixed value based on the performance of other vacuum pumps, the alarm may not be triggered at the appropriate time. For example, in the case of vacuum pump 1, where the number of abnormal occurrences is lower than expected, the alarm may not be triggered even when the operating time of vacuum pump 1 reaches the time when maintenance (overhaul) is required. In other words, vacuum pump 1 may continue to operate even after the maintenance period has passed without being maintained.

[0056] To resolve this, the setting device 10 determines whether it is necessary to set or change the first threshold TH1 based on the operating state of the vacuum pump, and if it determines that it is necessary, it sets or changes the first threshold TH1. The operating state of the vacuum pump refers to the measured values ​​of any sensors or measuring devices installed on the vacuum pump, for example, the rotational speed of the rotor 4 measured by the rotational speed sensor 43, the position of the shaft 21 measured by the displacement sensors 44A to 44C, the current value of the motor 42 measured by the motor current measuring device 45, the temperature of the base 3 measured by the temperature sensor 52, and / or the current value of the heater 51 measured by the heater current measuring device 53. Specifically, the setting device 10 determines whether it is necessary to set or change the first threshold TH1 based on the history of abnormalities in the vacuum pump, and if it determines that it is necessary, it sets or changes the first threshold TH1. More specifically, the setting device 10 calculates a predicted number of abnormalities at the appropriate time for an alarm to be triggered (referred to as the predicted number of occurrences) from the actual number of abnormalities that occurred in the vacuum pump 1 before the appropriate time for an alarm to be triggered, and sets or changes the first threshold TH1 based on the calculated predicted number of occurrences.

[0057] The timing of the alarm can be determined based on the operating time of the vacuum pump 1. More specifically, the alarm can be triggered when the operating time of the vacuum pump 1 reaches the second hour or close to it. The second hour can be set to, for example, 40,000 hours, but is not limited to this, and can be set to any appropriate time depending on the vacuum pump 1.

[0058] On the other hand, the setting or modification of the first threshold TH1 is performed, for example, when the operating time of the vacuum pump 1 reaches a first time that is shorter than the second time mentioned above. In other words, the predicted number of occurrences is calculated based on the number of abnormalities that occur when the operating time of the vacuum pump 1 reaches the first time. The first time can be, for example, half the time of the second time.

[0059] The following describes some examples of setting or changing the first threshold TH1. These are merely illustrative examples, and based on the examples below, you can set or change the first threshold TH1 appropriately for various types of anomalies using conditions different from those described below.

[0060] <Example 1 of setting or changing the first threshold> An example of the setting operation of the first threshold TH1 will be explained using Figure 6. Figure 6 is a flowchart of Example 1 of setting or changing the first threshold. Example 1 of setting or changing the first threshold, which will be described below, can be used, for example, when setting the first threshold TH1 to trigger an alarm for an abnormality related to the load of the vacuum pump 1 (an abnormality related to the rotation speed of the rotor 4). Similar processing can be performed for alarms related to other abnormalities. Furthermore, Example 1 of setting or changing the first threshold is performed on one vacuum pump 1 included in the vacuum pump system 100.

[0061] The setting unit 102 of the setting device 10 first refers to the operating time counter TIM stored in the storage unit 61 of the pump control device 6 to check whether the current operating time of the vacuum pump 1, which is the target of setting the first threshold TH1, has reached the first hour (i.e., whether it is now the time to perform the setting operation for the first threshold TH1). If the operating time of the vacuum pump 1 has not reached the first hour, the setting unit 102 waits by performing other operations without performing the setting operation. On the other hand, if the operating time of the vacuum pump 1 has reached the first hour, the setting unit 102 starts the operation to set or change the first threshold TH1.

[0062] When the setting or modification operation is initiated, the setting unit 102 first calculates the number of occurrences of anomalies (for example, anomalies related to the load of the vacuum pump 1) when the operating time reaches the first hour (step S11). Specifically, the setting unit 102 refers to the anomaly occurrence history HIS stored in the storage unit 61 of the pump control device 6 and counts the number of occurrences of the anomaly for which the first threshold TH1 is to be set or modified, from the start of operation of the vacuum pump 1 to the present.

[0063] After calculating the number of abnormalities that occurred during the first hour of operation, the setting unit 102 predicts the number of abnormalities that will occur when the operation time reaches the second hour (i.e., when the alarm is triggered) based on the number of abnormalities that occurred during the first hour (step S12). More specifically, for example, the setting unit 102 can calculate the predicted number of abnormalities using the formula (number of abnormalities that occurred during the first hour) × (second hour / first hour). More specifically, for example, if the first hour is half the length of the second hour, the predicted number of abnormalities can be calculated by doubling the number of abnormalities that occurred during the first hour.

[0064] Next, the setting unit 102 sets or changes the first threshold TH1 based on the predicted number of occurrences calculated in step S12. Specifically, the setting unit 102 sets or changes the first threshold TH1 as follows: First, the setting unit 102 compares the predicted number of occurrences with the current first threshold TH1 stored in the storage unit 61 of the pump control device 6 to determine whether the predicted number of occurrences is smaller than the current first threshold TH1 (step S13). In other words, the setting unit 102 determines whether it is necessary to change the first threshold TH1.

[0065] If the predicted number of occurrences is less than the current first threshold TH1 (Yes in step S13), the setting unit 102 reduces the newly set first threshold TH1 from the current first threshold TH1 stored in the storage unit 61. More specifically, the setting unit 102 sets the predicted number of occurrences as the new first threshold TH1 (step S14). More specifically, the setting unit 102 transmits the predicted number of occurrences as the new first threshold TH1 to the pump control device 6. The pump control unit 62 of the pump control device 6, upon receiving the predicted number of occurrences, stores the received predicted number of occurrences as the new first threshold TH1 in the storage unit 61.

[0066] On the other hand, if the predicted number of occurrences is greater than or equal to the current first threshold TH1 (No in step S13), the setting unit 102 decides to maintain the current first threshold TH1 (step S15). In other words, it does not update the first threshold TH1 stored in the storage unit 61.

[0067] If the predicted number of abnormal occurrences when the operating time reaches the second hour (predicted number of occurrences) is smaller than the current first threshold TH1, it means that the frequency of abnormal occurrences is lower than expected, and that the number of abnormal occurrences may not reach the current first threshold TH1 even when it is decided to issue an alarm. Therefore, as described above, if the predicted number of abnormal occurrences (predicted number of occurrences) is smaller than the current first threshold TH1, the predicted number of occurrences (i.e., the number smaller than the current first threshold TH1) is set as the new first threshold TH1, so that the number of abnormal occurrences reaches the first threshold TH1 at the appropriate time when it is decided to issue an alarm (i.e., when the operating time reaches the second hour) or close to it. As a result, an alarm can be issued at the appropriate time to prompt the user to take appropriate action such as maintenance.

[0068] On the other hand, if the predicted number of occurrences is greater than or equal to the current first threshold TH1, it means that the frequency of anomalies is higher than expected, and the number of anomalies will reach the current first threshold TH1 before the time it is decided to issue an alarm, and therefore the alarm may be issued before the time it is decided to issue an alarm. Therefore, by not updating the current first threshold TH1 when the predicted number of anomalies (predicted number of occurrences) is greater than or equal to the current first threshold TH1, it is possible to issue an alarm before the time it is decided to issue an alarm, prompting the user to take action such as maintenance at an earlier stage.

[0069] <Example 2 of setting or changing the first threshold> Figure 7 illustrates another example of setting or changing the first threshold TH1. Figure 7 is a flowchart of Example 2 of setting or changing the first threshold TH1. Example 2 of setting or changing, described below, can be used, for example, when setting the first threshold TH1 to trigger an alarm for an abnormality related to vibration of the vacuum pump 1. Similar processing can be performed for alarms related to other abnormalities. Furthermore, Example 2 of setting can be performed for multiple vacuum pumps 1 included in the vacuum pump system 100.

[0070] In the setting or modification operation example 2, the setting unit 102 first determines whether there is a vacuum pump 1 among the multiple vacuum pumps 1 that are the target of setting the first threshold TH1 that is at risk of being damaged (step S21). Here, "a vacuum pump at risk of being damaged" refers to a vacuum pump 1 that is more likely to be damaged than the other vacuum pumps 1. Specifically, it refers to a vacuum pump 1 whose sensor measurement value is greater than the measurement value of the other vacuum pumps 1.

[0071] In detail, the setting unit 102 acquires the positional fluctuation values ​​of the shaft 21 measured by displacement sensors 44A to 44C from each of the multiple vacuum pumps 1, and determines that there is a risk of damage to vacuum pumps 1 whose positional fluctuation values ​​are greater than or equal to the second threshold TH2. A large positional fluctuation value of the shaft 21 means that the shaft 21 is vibrating significantly. When the shaft 21 vibrates significantly, for example, products accumulated on the rotor 4 are more likely to come into contact with other parts, thus increasing the risk of damage to the vacuum pump 1. Furthermore, when the vibration of the shaft 21 is large, the vibration of the entire vacuum pump 1 also increases, thus increasing the risk of damage.

[0072] If there is a vacuum pump 1 whose shaft 21 position fluctuation value is greater than or equal to the second threshold TH2, that is, if there is a vacuum pump 1 that is at risk of failure (Yes in step S21), the setting operation of the first threshold TH1 proceeds to step S22. In step S22, for a vacuum pump 1 whose shaft 21 position fluctuation value is greater than that of other vacuum pumps 1 and therefore at risk of failure, but whose average predicted number of occurrences is smaller than the current first threshold TH1 and whose number of abnormal occurrences is smaller than the average value, a first threshold TH1 smaller than that of the other vacuum pumps 1 is set. This setting operation of the first threshold TH1 is called the "first setting operation". The specific processing flow of the first setting operation will be explained in detail later.

[0073] On the other hand, if there is no vacuum pump 1 whose shaft 21 position fluctuation value is greater than or equal to the second threshold TH2 (No in step S21), that is, if there is no vacuum pump 1 that is at risk of failure, the setting operation of the first threshold TH1 proceeds to step S23. In step S23, for vacuum pump 1 whose average predicted number of occurrences is greater than or equal to the current first threshold TH1 and whose number of abnormal occurrences is greater than or equal to the average value, a first threshold TH1 greater than that of the other vacuum pumps 1 is set. This setting operation of the first threshold TH1 is called the "second setting operation". The specific processing flow of the second setting operation will be explained in detail later.

[0074] As described above, setting the first threshold TH1 based on the operating performance data obtained from multiple vacuum pumps 1 allows for the setting of a more appropriate first threshold TH1. This is because obtaining operating performance data from multiple vacuum pumps 1 means obtaining operating performance data that contains more information compared to obtaining operating performance data from a single vacuum pump 1. If operating performance data containing more information is obtained for each vacuum pump 1, it is possible to set an appropriate first threshold TH1 that reflects the characteristics of the vacuum pump 1 (for example, the tendency for abnormalities to occur).

[0075] Furthermore, by changing the method of setting the first threshold TH1 depending on whether or not there is a vacuum pump 1 that is at risk of being damaged, it is possible to set the first threshold TH1 in a way that allows the alarm to be triggered at a more appropriate time.

[0076] <First setting operation> The setting operation of the first threshold TH1 (first setting operation) when there is a vacuum pump 1 that is at risk of damage will be explained below using Figure 8. Figure 8 is a flowchart of the first setting operation.

[0077] The setting unit 102 calculates the average number of abnormal occurrences when the operating time reaches the first hour (step S31). Specifically, for each of the multiple vacuum pumps 1, the setting unit 102 refers to the abnormal occurrence history HIS stored in the storage unit 61 of the pump control device 6 and counts the number of abnormal occurrences of the target abnormality for which the first threshold TH1 is set, from the start of operation of the vacuum pump 1 to the present. Then, the setting unit 102 sums the number of occurrences of multiple abnormalities counted for the multiple vacuum pumps 1 and calculates the average number of abnormal occurrences by dividing the sum of the number of occurrences of multiple abnormalities by the number of vacuum pumps 1.

[0078] After calculating the average number of abnormal occurrences, the setting unit 102 predicts the average number of abnormal occurrences when the operating time reaches the second hour, based on the average number of abnormal occurrences counted in step S31, as the average predicted number of occurrences (step S32). Specifically, the setting unit 102 can calculate the average predicted number of occurrences from the formula (average number of abnormal occurrences up to the first hour) × (second hour / first hour).

[0079] Next, the setting unit 102 compares the average predicted number of occurrences for each of the multiple vacuum pumps 1 with the current first threshold TH1 stored in the storage unit 61 of the pump control device 6 for each vacuum pump 1, and determines whether the average predicted number of occurrences is smaller than the current first threshold TH1 (step S33).

[0080] If the average predicted number of occurrences for vacuum pump 1 is equal to or greater than the first threshold TH1 (No in step S33), the setting unit 102 decides to maintain the current first threshold TH1 for the vacuum pump 1 (step S34). In other words, it does not update the first threshold TH1 stored in the storage unit 61.

[0081] On the other hand, if the average predicted number of occurrences for vacuum pump 1 is less than the first threshold TH1 (Yes in step S33), the setting unit 102 sets the average predicted number of occurrences as the new first threshold TH1 for that vacuum pump 1 (step S35).

[0082] Subsequently, the setting unit 102 determines whether there is a vacuum pump 1 among those vacuum pumps 1 whose average predicted number of occurrences is less than the first threshold TH1 stored in the storage unit 61, whose fluctuation value of the position of the shaft 21 is greater than or equal to the second threshold TH2 (i.e., there is a risk of damage), and whose number of occurrences of abnormalities is less than the average value of the number of occurrences of abnormalities calculated in step S31 (step S36).

[0083] If there is a vacuum pump 1 that is at risk of damage and has a lower-than-average number of abnormal occurrences (Yes in step S36), the setting unit 102 sets the predicted number of occurrences calculated based on the number of abnormal occurrences of that vacuum pump 1 as a new first threshold TH1 (step S37).

[0084] On the other hand, if there is no vacuum pump 1 that poses a risk of damage and whose number of abnormal occurrences is less than the average number of abnormal occurrences calculated in step S31 (the answer is "No" in step S36), the setting unit 102 decides to maintain the first threshold TH1 set by executing steps S31 to S35 above.

[0085] As described above, for vacuum pump 1, which has a risk of damage and whose number of abnormal occurrences is lower than the average, an alarm can be triggered at an appropriate time by setting a new first threshold TH1 to the predicted number of occurrences calculated based on the number of abnormal occurrences of vacuum pump 1 (i.e., a predicted number of occurrences that is lower than the current first threshold TH1 and lower than the average predicted number of occurrences).

[0086] For example, if we were to set the average predicted number of abnormal occurrences as the new first threshold TH1 for vacuum pump 1, which has a lower-than-average number of abnormal occurrences, the number of abnormal occurrences might not reach the first threshold TH1 even when it's time for an alarm to be triggered, despite the risk of damage. As a result, vacuum pump 1 might continue to operate without appropriate maintenance or other corrective actions being taken at the appropriate time.

[0087] On the other hand, for vacuum pump 1, where the number of abnormal occurrences is lower than the average, a new first threshold TH1 is set to a threshold lower than the average predicted number of occurrences, so that the number of abnormal occurrences reaches the first threshold TH1 at an appropriate time for alarm activation. As a result, for vacuum pump 1, an alarm is activated at an appropriate time, and appropriate measures such as maintenance can be taken at an appropriate time.

[0088] <Second setting operation> The setting or modification operation (second setting operation) of the first threshold TH1 when there is no risk of damage to the vacuum pump 1 will be explained below using Figure 9. Figure 9 is a flowchart of the second setting operation. The setting unit 102 first calculates the average number of abnormal occurrences when the operating time reaches the first hour (step S41), and then predicts the average number of abnormal occurrences when the operating time reaches the second hour as the average predicted number of occurrences based on the calculated average number of abnormal occurrences (step S42). The operation of steps S41 to S42 is the same as steps S31 to S32 described above, so a detailed explanation of the processing content of steps S41 to S42 will be omitted.

[0089] After predicting the average number of occurrences, the setting unit 102 compares the average number of occurrences with the current first threshold TH1 stored in the storage unit 61 of the pump control device 6 of each vacuum pump 1 to determine whether the average number of occurrences is greater than the current first threshold TH1 (step S43).

[0090] If the average predicted number of occurrences for vacuum pump 1 is less than or equal to the first threshold TH1 (No in step S43), the setting unit 102 decides to maintain the current first threshold TH1 for the vacuum pump 1 (step S44). In other words, the first threshold TH1 stored in the storage unit 61 is not updated.

[0091] On the other hand, if the average predicted number of occurrences for vacuum pump 1 is greater than the first threshold TH1 (Yes in step S43), the setting unit 102 sets the average predicted number of occurrences as the new first threshold TH1 for that vacuum pump 1 (step S45).

[0092] After performing step S45 above, the setting unit 102 determines whether there is a vacuum pump 1 among the vacuum pumps 1 whose average predicted number of occurrences is greater than the first threshold TH1 stored in the storage unit 61, that has a number of abnormal occurrences greater than the average value (step S46).

[0093] If there is a vacuum pump 1 whose number of abnormal occurrences is greater than the average value (Yes in step S46), the setting unit 102 sets the predicted number of occurrences calculated based on the number of abnormal occurrences of that vacuum pump 1 as the new first threshold TH1 (i.e., a predicted number of occurrences that is greater than or equal to the current first threshold TH1 and greater than the average predicted number of occurrences) (step S47).

[0094] On the other hand, if there is no vacuum pump 1 with a greater number of abnormal occurrences than the average value (No in step S46), the setting unit 102 decides to maintain the first threshold TH1 set by executing steps S41 to S45 above.

[0095] As described above, for vacuum pump 1, which has no risk of damage and whose number of abnormal occurrences is greater than the average, an alarm can be triggered at an appropriate time by setting the predicted number of occurrences calculated based on the number of abnormal occurrences of vacuum pump 1 as a new first threshold TH1. This is because the predicted number of occurrences calculated based on the number of abnormal occurrences of vacuum pump 1 is greater than the average predicted number of occurrences.

[0096] For example, if we assume that a vacuum pump 1 with a higher-than-average number of abnormal occurrences is set to the above-mentioned average predicted number of occurrences as a new first threshold TH1, the number of abnormal occurrences will reach the first threshold TH1 before the appropriate time for alarm activation arrives, even though there is no risk of damage. As a result, an alarm may be triggered before the appropriate time. In other words, an alarm may be triggered even though no maintenance or other action is required for the vacuum pump 1.

[0097] On the other hand, for vacuum pump 1, where the number of abnormal occurrences is greater than the average, the predicted number of occurrences calculated based on the number of abnormal occurrences of vacuum pump 1 (which is greater than the average predicted number of occurrences) is set as a new first threshold TH1. This ensures that the number of abnormal occurrences reaches the first threshold TH1 at an appropriate time for alarm activation. As a result, an alarm is activated for vacuum pump 1 at an appropriate time, allowing for appropriate maintenance and other actions to be taken.

[0098] Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications are possible without departing from the spirit of the invention.

[0099] In the above example of setting operation, a predetermined first threshold TH1 exists, and the setting of the first threshold TH1 is performed by changing this first threshold TH1 as needed through the setting operation. However, the setting unit 102 may learn the tendency for abnormalities to occur, the tendency for increases or decreases in measured values ​​from sensors provided on the vacuum pump 1, etc., and perform the setting of the first threshold TH1 based on these learned results.

[0100] For example, the setting unit 102 can predict the number of abnormal occurrences when the operating time reaches the second hour, based on the trend of abnormal occurrences, the trend of increases and decreases in sensor values, etc., and set this predicted number of occurrences as the first threshold TH1.

[0101] In the above example of setting operation, the setting operation for the first threshold TH1 was performed only once before the operating time of the vacuum pump 1 reached the second hour. That is, the first hour was set to one type of time (for example, half the time of the second hour). However, it is not limited to this, and the setting operation for the first threshold TH1 may be performed multiple times before the operating time of the vacuum pump 1 reaches the second hour. That is, the first hour may be set to multiple types of time. For example, if the tendency of abnormal occurrences (for example, frequency of occurrence) changes after the setting operation for the first threshold TH1 has been performed, the setting operation for the first threshold TH1 can be performed again.

[0102] The above configuration example 1 can be applied to multiple vacuum pumps 1. Similarly, the above configuration example 2 can be applied to a single vacuum pump 1.

[0103] The above setting operation example 1 can also be performed for abnormalities other than those related to the load of vacuum pump 1 (such as abnormalities related to the vibration of vacuum pump 1 or abnormalities related to the temperature of vacuum pump 1). Similarly, setting operation example 2 can also be performed for abnormalities other than those related to the vibration of vacuum pump 1 (such as abnormalities related to the load of vacuum pump 1 or abnormalities related to the temperature of vacuum pump 1).

[0104] The functions of the setting device 10 described above may also be implemented in the pump control device 6 of each vacuum pump 1. In this case, the setting device 10 may not be necessary.

[0105] In the vacuum pump 1 according to the above embodiment, the turbomolecular pump section may be omitted. That is, the vacuum pump 1 may be a screw-groove pump.

[0106] Those skilled in the art will understand that the above-described exemplary embodiments are specific examples of the following embodiments.

[0107] (First Embodiment) The vacuum pump system is a system that includes a vacuum pump that exhausts gas by rotating a rotor with a motor. The vacuum pump system comprises a memory unit, a control unit, and a setting unit. The memory unit stores a first threshold value that determines the number of occurrences of an abnormality that triggers an alarm. The control unit counts the number of abnormalities that occur in the vacuum pump, determines whether the number of abnormalities is equal to or greater than the first threshold value, and outputs an alarm if the number of abnormalities is equal to or greater than the first threshold value. The setting unit sets or changes the first threshold value based on the operating state of the vacuum pump.

[0108] In the vacuum pump according to the first embodiment, an alarm is output when the number of abnormal occurrences exceeds a first threshold. In the vacuum pump according to the first embodiment, the first threshold can be set to one that is appropriate for each individual vacuum pump by referring to the actual operating state of the vacuum pump, so that an alarm can be output at an appropriate time.

[0109] (Second Embodiment) In the vacuum pump system according to the first embodiment, the setting unit may set or change the first threshold based on the history of abnormal occurrences. In this case, by referring to the actual history of abnormal occurrences of the vacuum pump, the first threshold can be set to one that is appropriate for each vacuum pump, so that an alarm can be output at an appropriate time.

[0110] (Third Embodiment) In the vacuum pump system according to the first or second embodiment, the setting unit may predict the number of abnormalities that will occur when the operating time of the vacuum pump reaches a second hour, which is longer than the first hour, based on the number of abnormalities that will occur when the operating time of the vacuum pump reaches a first hour. The setting unit may also set or change the first threshold based on the above predicted number of occurrences. In this case, the setting unit predicts the number of abnormalities that will occur in the second hour, which is after the first hour, based on the number of abnormalities that will occur when the operating time of the vacuum pump reaches a first hour, and sets the first threshold based on this predicted value. The predicted number of occurrences is predicted based on the actual number of abnormalities that have occurred in the vacuum pump. For this reason, the predicted number of occurrences is predicted to be close to the actual number of abnormalities that have occurred when the operating time reaches a second hour. Accordingly, by setting the first threshold based on the predicted number of occurrences, an alarm can be output at an appropriate time.

[0111] (Fourth Embodiment) In the vacuum pump system according to the third embodiment, if the predicted number of occurrences is smaller than the first threshold stored in the memory unit, the setting unit may set the predicted number of occurrences as the new first threshold. In the vacuum pump system according to the fourth embodiment, even if the frequency of abnormalities in the vacuum pump is lower than expected, an alarm can be output at an appropriate time.

[0112] (Fifth Embodiment) In the vacuum pump system according to the third embodiment, if the predicted number of occurrences is equal to or greater than a first threshold stored in the memory unit, the setting unit may decide to maintain the first threshold stored in the memory unit. In the vacuum pump system according to the fifth embodiment, for vacuum pumps 1 with a high frequency of abnormalities, an alarm can be issued at an earlier stage, prompting the user to take action such as maintenance at an earlier stage.

[0113] (Sixth Embodiment) In the vacuum pump system according to the third embodiment, the vacuum pump may have a measuring unit for measuring the operating state of the vacuum pump. In this case, the setting unit may determine whether there is a risk of damage to the vacuum pump based on whether the magnitude of the measurement value detected by the measuring unit is greater than or equal to a second threshold, and set a first threshold based on the predicted number of occurrences and whether there is a risk of damage to the vacuum pump. In the vacuum pump system according to the sixth embodiment, the first threshold can be set so that an alarm can be output at a more appropriate time.

[0114] (7th embodiment) In the vacuum pump system according to the 6th embodiment, if the setting unit determines that the magnitude of the measured value is smaller than the 2nd threshold and there is no risk of damage to the vacuum pump, and the predicted number of occurrences is greater than the 1st threshold stored in the memory unit, it may set the predicted number of occurrences as a new 1st threshold. In the vacuum pump system according to the 7th embodiment, an alarm can be output at an appropriate time for vacuum pumps that have a high frequency of abnormalities but no risk of damage.

[0115] (Eighth aspect) In the vacuum pump system according to the sixth or seventh aspect, if the setting unit determines that the magnitude of the measured value is greater than or equal to the second threshold and there is a risk of damage to the vacuum pump, and that the predicted number of occurrences is less than the first threshold stored in the memory unit, it may set the predicted number of occurrences as a new first threshold. In the vacuum pump system according to the eighth aspect, an alarm can be output at an appropriate time for vacuum pumps that have a risk of damage but have a low frequency of abnormalities.

[0116] (9th aspect) In a vacuum pump system according to any of the 1st to 8th aspects, the abnormality may be at least one selected from abnormalities related to vibration of the vacuum pump and abnormalities related to the load of the vacuum pump. In the vacuum pump system according to the 9th aspect, an appropriate first threshold can be set for abnormalities that are likely to lead to damage to the vacuum pump.

[0117] (Tenth Embodiment) The control method according to the tenth embodiment is a control method for controlling a vacuum pump that exhausts gas by rotating a rotor with a motor. The control method comprises the steps of counting the number of times an abnormality has occurred in the vacuum pump, setting a first threshold that determines the number of times an abnormality occurs that an alarm will be output based on the operating state of the vacuum pump, and outputting an alarm if the number of times an abnormality has occurred is equal to or greater than the first threshold.

[0118] In the control method according to the 10th embodiment, a first threshold suitable for each vacuum pump can be set by referring to the actual operating state of the vacuum pump, so that an alarm can be output at an appropriate time.

[0119] Although various embodiments and modifications have been described above, the present invention is not limited to these. Furthermore, each embodiment and modification may be applied individually or in combination. Other embodiments conceivable within the scope of the technical idea of ​​the present invention are also included within the scope of the present invention. [Explanation of Symbols]

[0120] 100: Vacuum pump system 1: Vacuum pump 2: Housing 3: Bass 4: Rotor 5: Status 6: Pump control device 61: Storage section CNT: Anomaly Occurrence Counter CON: Abnormality reporting conditions HIS: Anomaly Occurrence History TIM: Operating Time Counter MEA: Sensor measurement value 62: Pump Control Unit 11:First end 12:Second end 13: Air intake 14: Base end 16: Exhaust vent 21: Shaft 22: Rotor blades 23: Rotor cylindrical section 31: Stator Wing 32: Stator cylindrical section 33: Cabinet 41A~41E: Bearings 42: Motor 42A: Motor Rotor 42B: Motor stator 43: Rotation speed sensor 44A~44C: Displacement sensor 45: Motor current measuring device 51: Heater 52: Temperature sensor 53: Heater current measuring device SP1: 1st internal space SP2: 2nd internal space A1: Axis line N: Network 10: Setting device 101: Storage section 102: Settings Section TH1: First threshold TH2: Second threshold

Claims

1. A vacuum pump system including a vacuum pump that exhausts gas by rotating a rotor with a motor, A storage unit that stores a first threshold value that determines the number of times an anomaly occurs that triggers an alarm, A control unit that counts the number of times an abnormality has occurred in the vacuum pump, determines whether the number of abnormalities is equal to or greater than the first threshold, and outputs an alarm if the number of abnormalities is equal to or greater than the first threshold, A setting unit predicts the number of occurrences of the abnormality when the operating time of the vacuum pump reaches a second time, which is longer than the first time, based on the number of occurrences of the abnormality when the operating time of the vacuum pump reaches a first time, and sets or changes the first threshold based on the predicted number of occurrences. A vacuum pump system equipped with the following features.

2. The vacuum pump system according to claim 1, wherein the setting unit sets or changes the first threshold based on the history of the occurrence of the abnormality.

3. The vacuum pump system according to claim 1, wherein if the predicted number of occurrences is smaller than a first threshold stored in the memory unit, the setting unit sets the predicted number of occurrences as a new first threshold.

4. The vacuum pump system according to claim 1, wherein if the predicted number of occurrences is equal to or greater than a first threshold stored in the storage unit, the setting unit decides to maintain the first threshold stored in the storage unit.

5. The vacuum pump has a measuring unit for measuring the operating state of the vacuum pump, The aforementioned setting unit is, Based on whether the magnitude of the measurement value detected by the measurement unit is equal to or greater than the second threshold, it is determined whether there is a risk of damage to the vacuum pump. The first threshold is set or changed based on the predicted number of occurrences and whether or not there is a risk of damage to the vacuum pump. The vacuum pump system according to claim 1.

6. The aforementioned setting unit is, The vacuum pump system according to claim 5, wherein if the magnitude of the measured value is smaller than the second threshold and there is no risk of damage to the vacuum pump, and the predicted number of occurrences is determined to be greater than the first threshold stored in the memory unit, the predicted number of occurrences is set as a new first threshold.

7. The aforementioned setting unit is, The vacuum pump system according to claim 5, wherein if the magnitude of the measured value is greater than or equal to a second threshold and there is a risk of damage to the vacuum pump, and the predicted number of occurrences is determined to be less than the first threshold stored in the memory unit, the predicted number of occurrences is set as a new first threshold.

8. The vacuum pump system according to claim 1, wherein the abnormality is at least one selected from an abnormality relating to vibration of the vacuum pump and an abnormality relating to the load of the vacuum pump.

9. A control method for controlling a vacuum pump that exhausts gas by rotating a rotor with a motor, The steps include counting the number of times an abnormality occurred in the vacuum pump, The steps include: predicting the number of occurrences of the abnormality when the operating time of the vacuum pump reaches a second time, which is longer than the first time, based on the number of occurrences of the abnormality when the operating time of the vacuum pump reaches a first time; The steps include setting or changing a first threshold that determines the number of occurrences of an anomaly that triggers an alarm, based on the predicted number of occurrences, If the number of occurrences of the abnormality is equal to or greater than the first threshold, the step of outputting an alarm, A control method comprising:

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