Inspection equipment

Abstract

To provide an inspection device preventing dew condensation on an inspection object.SOLUTION: An inspection device includes: a chamber; a retainer that is positioned in the chamber and holds an inspection object; a measuring instrument that is positioned in the chamber and measures electrical characteristics of an inspection object held by the retainer; and a dry air introduction section for introducing dry air into the chamber. A vertical downward direction is defined as a lower direction, an opening that connects the inside of the chamber and the outside of the inspection device and allows an inspection object to enter and exit is provided in the chamber, the dry air flows into the chamber from the dry air introduction section, the dry air introduction section is positioned below the opening, and the retainer is positioned below the opening.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to an inspection apparatus for inspecting an inspection object.

Background Art

[0002] Patent Document 1 describes an electronic component test apparatus for testing an IC chip. The electronic component test apparatus includes a socket, a chamber, a heat exchange device, a temperature control device, and a main test device. The socket is located within the chamber. The IC chip is disposed in the socket. The heat exchange device raises or lowers the temperature within the chamber. The temperature control device controls the heat exchange device. The main test device tests whether the IC chip operates normally in a low temperature state or a high temperature state.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the field of the electronic component test apparatus described in Patent Document 1, it is desired that dew condensation hardly occurs on the inspection object.

[0005] An object of the present invention is to provide an inspection apparatus in which dew condensation hardly occurs on the inspection object.

Means for Solving the Problems

[0006] An inspection apparatus according to an embodiment of the present invention includes a chamber, a holder located within the chamber and holding an inspection object, a measuring instrument located within the chamber and measuring electrical characteristics of the inspection object held by the holder, A dry air introduction unit for introducing dry air into the chamber, An inspection device equipped with, We define the vertically downward direction as the downward direction. The chamber is provided with an opening that connects the inside of the chamber to the outside of the inspection device, through which the object to be inspected can enter and exit. The dry air flows into the chamber from the dry air inlet. The dry air introduction section is located below the opening, The retainer is located below the opening.

[0007] The positional relationships of the components in this specification are defined below. The first to third components constitute the inspection device. The positioning of the first component below the second component means the following: At least a portion of the first component is located directly below the second component. Therefore, when viewed downwards, the first component overlaps with the second component. This definition also applies to directions other than downwards.

[0008] In this specification, when a first member is positioned below a second member, it means that the upper end of the first member is positioned below the lower end of the second member. This includes cases where at least a portion of the first member is located directly below the second member, and cases where the first member is not located directly below the second member but is located diagonally below the second member. In this case, the first member does not need to overlap with the second member when viewed in the vertical direction. Diagonally below means, for example, the lower left or the lower right. This definition also applies to directions other than vertical.

[0009] In this specification, unless otherwise specified, each part of the first member is defined as follows: The front end of the first member means the end of the first member in the forward direction. The rear end of the first member means the end of the first member in the rear direction. The left end of the first member means the end of the first member in the left direction. The right end of the first member means the end of the first member in the right direction. The upper end of the first member means the end of the first member in the upward direction. The lower end of the first member means the end of the first member in the downward direction. The front end of the first member means the front end of the first member and its vicinity. The rear end of the first member means the rear end of the first member and its vicinity. The left end of the first member means the left end of the first member and its vicinity. The right end of the first member means the right end of the first member and its vicinity. The upper end of the first member means the upper end of the first member and its vicinity. The lower end of the first member means the lower end of the first member and its vicinity.

[0010] In this specification, "a first member is held by a second member" includes cases where the first member is attached to the second member in a way that it cannot move relative to the second member (i.e., it is fixed), but does not include cases where the first member is attached to the second member in a way that it can move relative to the second member. Furthermore, "a first member is held by a second member" includes both cases where the first member is directly attached to the second member and cases where the first member is attached to the second member via a third member. [Effects of the Invention]

[0011] According to the inspection device of one embodiment of the present invention, condensation is less likely to occur on the object being inspected. [Brief explanation of the drawing]

[0012] [Figure 1] Figure 1 is a perspective view showing the inspection apparatus 1 according to the first embodiment. [Figure 2] Figure 2 is a view of the inspection device 1 from the rear. [Figure 3] Figure 3 is a view of the dry air inlet 601 from the rear. [Figure 4]Figure 4 shows the dry air inlet 601a provided in the inspection device 1a according to the modified example 1. [Modes for carrying out the invention]

[0013] [First Embodiment] The inspection apparatus 1 according to the first embodiment will be described below with reference to the drawings. Figure 1 is a perspective view showing the inspection apparatus 1 according to the first embodiment. In Figure 1, the description of the inside of the chamber 10 is omitted. Also in Figure 1, the description of the conveyor 20 and the object to be inspected OB is omitted. Figure 2 is a view of the inspection apparatus 1 from the rear. In Figure 2, the inside of the chamber 10 is seen through. In the example shown in Figure 2, only the cooling hose among the components of the cooler 70 is shown. In Figure 2, the description of the left end of the dry air controller 60 is omitted. In Figure 2, the description of the left end of the cooler 70 is omitted. Figure 3 is a view of the dry air introduction section 601 from the rear.

[0014] In this embodiment, directions are defined as follows: The vertically downward direction is defined as the downward direction. The vertically downward direction coincides with the direction of gravity acting on the inspection device 1. Also, as shown in Figure 1, the downward direction is the direction in which the retainer 30 and the temperature controller 50 are arranged in that order. The opposite direction of the downward direction is defined as the upward direction. The upward direction is the direction in which the temperature controller 50 and the retainer 30 are arranged in that order. The axis perpendicular to the vertical axis is defined as the left-right axis. The direction perpendicular to the vertical axis and the left-right axis is defined as the front-back axis.

[0015] The inspection device 1 inspects whether the object OB operates normally by measuring its electrical characteristics. The object OB is specifically an electronic component. Electronic components include multilayer ceramic capacitors, inductors, thermistors, module boards, etc. Electrical characteristics include, for example, the resistance and withstand voltage of the object OB. The inspection device 1 measures the electrical characteristics of the object OB in a low-temperature state. Low temperature is, for example, between -100°C and +10°C.

[0016] As shown in FIGS. 1 and 2, the inspection apparatus 1 includes a chamber 10, a transporter 20, a holder 30, a measuring device 40, a temperature controller 50, a dry air controller 60, a cooler 70, and a dew point thermometer 80.

[0017] As shown in FIG. 1, the chamber 10 has a rectangular parallelepiped shape having two sides extending along the left - right axis, two sides extending along the up - down axis, and two sides extending along the front - back axis. As an example, the length of each of the two sides of the chamber 10 in the up - down direction is 50 to 500 mm, and the length of each of the two sides of the chamber 10 in the left - right direction is 50 to 500 mm, and the length of each of the two sides of the chamber 10 in the front - back direction is 50 to 500 mm. The chamber 10 includes an upper surface UpS and a lower surface DpS arranged in this order downward. The chamber 10 includes four side surfaces connecting the upper surface UpS and the lower surface DpS. As shown in FIG. 2, a space SP exists inside the chamber 10. The material of such a chamber 10 is metal, resin, rubber, etc.

[0018] The chamber 10 is provided with an opening HL connecting the inside of the chamber 10 and the outside of the chamber 10, through which the inspection object OB can enter and exit. In the present embodiment, the outside of the chamber 10 is the outside of the inspection apparatus 1. That is, in the present embodiment, the opening HL connects the inside of the chamber 10 and the outside of the inspection apparatus 1. In the example shown in FIGS. 1 and 2, the opening HL is provided in the upper surface UpS. More specifically, the opening HL is provided at the center and in the vicinity of the upper surface UpS. The shape of the opening HL is, for example, rectangular when viewed in the up - down direction. The size of the opening HL is smaller than the size of the upper surface UpS. The size of the opening HL is larger than the size of the inspection object OB. As an example, the length of the opening HL in the front - back direction and the length of the opening HL in the left - right direction are each 30 to 200 mm.

[0019] As shown in Figure 2, the conveyor 20 transports the object to be inspected OB into the chamber 10 through the opening HL. The conveyor 20 includes, for example, a suction nozzle. The suction nozzle picks up the object to be inspected OB. The suction nozzle transports the picked-up object to be inspected OB into the chamber 10 through the opening HL.

[0020] The retainer 30 is located inside the chamber 10, as shown in Figure 2. The retainer 30 is located below the opening HL. In the example shown in Figure 2, the retainer 30 is located near the center of the chamber 10 in the vertical direction, near the center of the chamber 10 in the horizontal direction, and near the center of the chamber 10 in the front-back direction. The retainer 30 is not in contact with the chamber 10. The retainer 30 holds the object to be inspected OB. Specifically, the retainer 30 holds the object to be inspected OB that has been transported into the chamber 10 by the conveyor 20. The retainer 30 has, for example, a positioning component for positioning the object to be inspected OB. Such a retainer 30 is a component having a cavity, a parallel chuck, a four-jaw chuck, etc.

[0021] The measuring instrument 40 is located inside the chamber 10, as shown in Figure 2. In the example shown in Figure 2, the measuring instrument 40 is located near the center of the chamber 10 when viewed in the vertical direction. In the example shown in Figure 2, the measuring instrument 40 is in contact with the holder 30. The measuring instrument 40 is not in contact with the chamber 10. The measuring instrument 40 measures the electrical characteristics of the object to be inspected OB held by the holder 30. The measuring instrument 40 is, for example, a component having a measuring substrate that includes measuring terminals. For example, the measuring instrument 40 measures the electrical characteristics of the object to be inspected OB by bringing the measuring terminals into contact with electrodes provided on the surface of the object to be inspected OB. The object to be inspected OB, whose electrical characteristics have been measured by the measuring instrument 40, is transported out of the chamber 10 through the opening HL by the transporter 20.

[0022] The temperature controller 50 is located inside the chamber 10, as shown in Figure 2. In the example shown in Figure 2, the temperature controller 50 is located below the retainer 30 and the measuring instrument 40. The temperature controller 50 lowers the temperature inside the chamber 10. The temperature controller 50 lowers the temperature of the retainer 30. For example, the temperature controller 50 lowers the temperature of the retainer 30 to a temperature between -100°C and +10°C. Such a temperature controller 50 is, for example, a Peltier module.

[0023] The dry air controller 60 controls the flow rate of dry air FL. The dry air controller 60 includes a dry air supply unit 600 and a dry air introduction unit 601. In this embodiment, the dry air controller 60 provided in the inspection device 1 includes the dry air introduction unit 601. Therefore, the inspection device 1 is equipped with a dry air introduction unit 601.

[0024] The dry air supply unit 600 generates dry air FL. As shown in Figure 2, the dry air FL generated by the dry air supply unit 600 flows into the chamber 10. For example, the dry air supply unit 600 includes an air dryer, a hose, a throttle valve, a flow meter, and a fitting. The air dryer generates dry air FL by dehumidifying compressed air obtained by compressing air. The hose connects the air dryer to the fitting. The throttle valve adjusts the flow rate of the dry air FL passing through the hose. The flow meter measures the flow rate of the dry air FL. The dry air FL, whose flow rate has been adjusted by the throttle valve, etc., reaches the dry air inlet 601 by passing through the hose and fitting.

[0025] As shown in Figure 2, the dry air inlet 601 is connected to the dry air supply unit 600. The dry air inlet 601 is located inside the chamber 10. As shown in Figure 2, the dry air inlet 601 is located below the opening HL. In this embodiment, the dry air inlet 601 is located below the retainer 30. More specifically, the dry air inlet 601 is located at the lower end of the space SP. The dry air inlet 601 is provided with one or more dry air inlets Ex1.

[0026] The dry air inlet 601 introduces dry air FL into the chamber 10. Specifically, the dry air FL generated by the dry air supply unit 600 flows toward the dry air inlet 601. The dry air FL flows into the chamber 10 from one or more dry air inlets Ex1. As a result, the dry air FL flows into the chamber 10 from the dry air inlet 601. In the example shown in Figure 2, since the dry air inlet 601 is located at the lower end of the space SP, the dry air FL introduced from the dry air inlet 601 reaches the lower end of the space SP.

[0027] In this embodiment, the dry air inlet 601 reduces the flow rate of the dry air FL. Specifically, in this embodiment, the dry air inlet 601 is a reduction unit 6010. The reduction unit 6010 reduces the flow rate of the dry air FL. The reduction unit 6010 is located inside the chamber 10. The dry air FL flows into the chamber 10 after passing through the reduction unit 6010. At this time, the wind speed of the dry air FL after passing through the reduction unit 6010 is smaller than the wind speed of the dry air FL before passing through the reduction unit 6010.

[0028] For example, as shown in Figure 3, the deceleration unit 6010 is provided with an inlet Et, one or more flow paths (not shown), and one or more outlets Ex2. In this embodiment, the dry air introduction unit 601 is the deceleration unit 6010. Therefore, as shown in Figure 3, the one or more outlets Ex2 in the deceleration unit 6010 correspond to one or more dry air inlets Ex1. Each of the one or more flow paths connects the inlet Et to one or more outlets Ex2. The one or more flow paths are formed within the deceleration unit 6010. Dry air FL flows into the deceleration unit 6010 via the inlet Et. Specifically, dry air FL flows into each of the one or more flow paths via the inlet Et. Dry air FL reaches each of the one or more outlets Ex2 via the one or more flow paths. Dry air FL flows out of the deceleration unit 6010 via the one or more outlets Ex2.

[0029] In this case, the sum of the areas of each of the one or more outlets Ex2 is greater than the area of ​​the inlet Et. As a result, the wind velocity of the dry air FL flowing out from each of the one or more outlets Ex2 is less than the wind velocity of the dry air FL flowing into the inlet Et. For example, in an inspection device without a reduction gear 6010, the wind velocity of the dry air FL flowing into the chamber 10 is approximately 0.22 m / s. On the other hand, in inspection device 1, the wind velocity of the dry air FL flowing into the chamber 10 via the reduction gear 6010 is approximately 0.13 m / s. The reduction gear 6010 as described above is formed from, for example, a porous material. For example, the reduction gear 6010, which is a porous material, is formed by sintering a material such as ceramic.

[0030] The cooler 70 cools the temperature controller 50. The cooler 70 includes, for example, a cooling water circulator and a cooling hose. The cooling water circulator is located outside the chamber 10. The cooling hose connects the cooling water circulator to the temperature controller 50. The cooling water cooled in the cooling water circulator reaches the temperature controller 50 via the cooling hose. The cooling water that has cooled the temperature controller 50 returns from the temperature controller 50 to the cooling water circulator via the cooling hose.

[0031] The dew point thermometer 80 measures the dew point temperature inside the chamber 10. The dew point temperature is the temperature at which condensation occurs when a gas is cooled. In the example shown in Figure 2, the dew point thermometer 80 is installed on the side of the chamber 10. The dew point thermometer 80 is installed on the side of the chamber 10 at the left end. The dew point thermometer 80 is installed at the upper end of the side of the chamber 10.

[0032] In this embodiment, dry air FL is a gas that is drier than the outside air (hereinafter simply referred to as outside air) present outside the chamber 10. In other words, the amount of moisture per unit volume contained in dry air FL is less than the amount of moisture per unit volume contained in outside air. In other words, the absolute humidity of dry air FL is lower than the absolute humidity of outside air.

[0033] In this case, the specific gravity of dry air FL is greater than that of ambient air. In other words, dry air FL is heavier than ambient air. Specifically, the mass of water molecules is lighter than the total mass of gas molecules contained in ambient air. The mass of one mole of water molecules is 18 g, while the total mass of one mole of gas molecules contained in ambient air is approximately 28.8 g. The amount of water molecules contained in dry air FL is less than the amount of water molecules contained in ambient air. Dry air FL, with a low water molecule content, is heavier than ambient air, which has a high water molecule content. For example, the specific gravity of dry air FL is more than 1.1 times that of ambient air.

[0034] In this case, the dew point temperature of dry air FL is lower than the dew point temperature of the outside air. Specifically, the dew point temperature is determined by temperature and humidity. When humidity decreases, the dew point temperature decreases. In other words, the dew point temperature of dry air FL, which has a low water molecule content, will be lower than the dew point temperature of the outside air, which has a high water molecule content. As an example, the dew point temperature of dry air FL is 20 degrees lower than the dew point temperature of the outside air. Dry air FL as described above is a mixture of nitrogen (N2), oxygen (O2), carbon dioxide (CO2), helium (He), argon (Ar), etc.

[0035] (effect) According to the inspection device 1, condensation is less likely to occur on the object OB being inspected. More specifically, the inspection device 1 comprises a chamber 10 and a dry air inlet 601. The chamber 10 is provided with an opening HL. The dry air inlet 601 is located below the opening HL. Therefore, dry air FL is introduced into the chamber 10 below the opening HL. Here, the absolute humidity of the dry air FL is lower than the absolute humidity of the outside air. Such dry air FL is heavier than the outside air. The dry air FL, which is heavier than the outside air, moves to the lower end of the space SP inside the chamber 10. Specifically, outside air is present inside the chamber 10 before the dry air FL flows in. The dry air FL that has flowed into the chamber 10 is heavier than the outside air present inside the chamber 10. Therefore, the dry air FL moves inside the chamber 10 so that it is located below the outside air. At this time, the outside air present in the chamber 10 moves upward within the chamber 10 due to the dry air FL that accumulates at the lower end of the chamber 10. An opening HL is provided at the upper end of the chamber 10. Therefore, the outside air moving upward within the chamber 10 easily flows out of the chamber 10 through the opening HL. As a result, the inside of the chamber 10 is more easily filled with dry air FL. Consequently, when the object to be inspected OB is located inside the chamber 10, condensation on the object to be inspected OB is less likely to occur.

[0036] According to the inspection device 1, condensation is less likely to occur on the object under inspection OB. Specifically, the dry air inlet 601 is located below the opening HL. This makes it easier for the chamber 10 to be filled with dry air FL. Here, the retainer 30 is located below the opening HL. In this case, the area around the retainer 30 is more easily filled with dry air FL. In other words, the area around the object under inspection OB, which is held by the retainer 30, is more easily filled with dry air FL. As a result, condensation is less likely to occur on the object under inspection OB.

[0037] The specific gravity of dry air FL is greater than that of outside air. Therefore, the outside air present in chamber 10 moves within chamber 10 so that it is positioned above the dry air FL. Consequently, the outside air present in chamber 10 is more likely to flow out of chamber 10 through the opening HL located at the upper end of chamber 10.

[0038] The dry air controller 60 controls the flow rate of the dry air FL. Therefore, the dry air controller 60 can reduce the airflow velocity of the dry air FL flowing through the chamber 10. Consequently, the dry air FL is less likely to circulate within the chamber 10. This reduces the likelihood of the dry air FL flowing out of the chamber 10 through the opening HL. Therefore, the chamber 10 is more easily filled with dry air FL. As a result, condensation is less likely to occur on the object under inspection OB.

[0039] The reduction unit 6010 reduces the airflow velocity of the dry air FL. In other words, the airflow velocity of the dry air FL introduced into the chamber 10 is reduced. Consequently, the dry air FL is less likely to circulate within the chamber 10. This makes it less likely for the dry air FL to flow out of the chamber 10 through the opening HL due to its circulation within the chamber 10. Consequently, the chamber 10 is more likely to be filled with dry air FL. As a result, condensation is less likely to occur on the object under inspection OB.

[0040] The inspection device 1 is equipped with a reduction unit 6010 that reduces the air velocity of the dry air FL. In this case, the inspection device 1 can reduce the air velocity of the dry air FL with a simpler configuration compared to the case where the dry air supply unit 600 is equipped with a configuration that reduces the air velocity of the dry air FL.

[0041] In the inspection device 1, the gas present in the chamber 10 flows out through the opening HL, making it easier for the chamber 10 to be filled with dry air FL. In other words, even if the opening HL is not closed, the chamber 10 is easily filled with dry air FL. Therefore, in the inspection device 1, it is not necessary to close the opening HL in order to fill the chamber 10 with dry air FL. As a result, the time from when the object to be inspected OB is brought in by the conveyor 20 until it is brought out can be shortened.

[0042] The reduction unit 6010 reduces the airflow velocity of the dry air FL. This reduces the airflow velocity of the dry air FL flowing through the chamber 10. As a result, a strong flow of dry air FL is less likely to occur near the temperature controller 50. Consequently, the temperature control in the temperature controller 50 is less likely to be hindered by the dry air FL flowing through the chamber 10.

[0043] In the inspection device 1, the chamber 10 can be filled with dry air FL. Therefore, the inspection device 1 has the effect of being able to perform not only electrical characteristic testing of the object OB under inspection, but also durability testing of the object OB under inspection in a dry air environment. In this case, the temperature controller 50 does not necessarily have to lower the temperature of the retainer 30. In this case, the object OB under inspection is made of a material that dries easily, such as rubber or resin.

[0044] [Example 1] The inspection device 1a according to Modification 1 will be described below with reference to Figure 4. Figure 4 is a diagram showing the dry air inlet 601a provided in the inspection device 1a according to Modification 1.

[0045] As shown in Figure 4, inspection device 1a differs from inspection device 1 in that it has a dry air inlet 601a instead of a dry air inlet 601. In the dry air inlet 601a, a portion of one or more dry air inlets Ex1 is provided at the lower end of the dry air inlet 601a.

[0046] In this modified example, the dry air inlet 601a is a different deceleration unit 6010a from the deceleration unit 6010. Therefore, each of the one or more outlets Ex2 provided in the deceleration unit 6010a corresponds to one or more dry air inlets Ex1 provided in the dry air inlet 601a. ​​Dry air FL flows into the chamber 10 from the deceleration unit 6010a. In the example shown in Figure 4, a portion of the one or more outlets Ex2 is provided at the lower end of the deceleration unit 6010a. Such a deceleration unit 6010a is formed, for example, from a porous material, similar to the deceleration unit 6010.

[0047] (effect) In the inspection device 1a, one or more dry air inlets Ex1 are located at the lower end of the dry air inlet section 601a. ​​Therefore, a portion of the dry air FL flows downward from the dry air inlets Ex1 located at the lower end of the dry air inlet section 601a. ​​This makes it easier for the dry air FL to flow towards the lower end of the chamber 10. Consequently, the dry air FL tends to accumulate at the lower end of the space SP inside the chamber 10. This makes it easier for outside air that was inside the chamber 10 to flow out of the chamber 10 through the opening HL. As a result, the dry air FL tends to accumulate efficiently inside the chamber 10.

[0048] [Other variations] The inspection apparatus according to the present invention is not limited to inspection apparatus 1,1a, but can be modified within the scope of its gist. The configurations of inspection apparatus 1,1a may be combined in any way.

[0049] Note that the vertical, horizontal, and left-right directions are defined for illustrative purposes only. Therefore, the vertical, horizontal, and left-right directions during actual use of the inspection device 1 do not necessarily have to coincide with the vertical, horizontal, and left-right directions in each embodiment and each modified example.

[0050] Furthermore, the object to be inspected OB may be a component other than multilayer ceramic capacitors, inductors, thermistors, or module substrates. The object to be inspected OB may be, for example, a chip-shaped semiconductor element or a wafer-shaped semiconductor element. Furthermore, the object to be inspected OB may be a semi-finished product in the process of being manufactured.

[0051] The chamber 10 does not necessarily have to be a rectangular parallelepiped. The chamber 10 may have a cylindrical shape, a cone shape, a frustoconical shape, a sphere shape, or the like.

[0052] Furthermore, it is preferable that there are no protrusions or other features on the inner surface of the chamber 10 that extend from the inner surface toward the vicinity of the center of the chamber 10. This makes it less likely for the filling of dry air FL into the chamber 10 to be hindered.

[0053] Furthermore, if there is an opening in the chamber 10 through which gas does not substantially pass (hereinafter referred to as the first opening), the first opening does not correspond to opening HL. For example, if there is a minute hole in the chamber 10, the minute hole does not correspond to opening HL. However, if there is an opening HL in the chamber 10, the hole may also be present in the chamber 10 in addition to opening HL. Similarly, if there is an opening in the chamber 10 that is covered by a member or the like (hereinafter referred to as the second opening), the second opening does not correspond to opening HL. However, if there is an opening HL in the chamber 10, the second opening may also be present in the chamber 10 in addition to opening HL.

[0054] The chamber 10 may also be provided with an opening (hereinafter referred to as the third opening) through which a gas can substantially pass, but through which the object to be inspected OB cannot enter or exit. In this case, it is preferable that the third opening be located above the dry air introduction section 601. It is also preferable that the third opening be located above the retainer 30. The reasons why the object to be inspected OB cannot enter or exit the third opening are, for example, as follows: The size of the third opening is smaller than the size of the object to be inspected OB. The shape of the third opening does not match the shape of the object to be inspected OB. An obstacle is present in or near the third opening.

[0055] The opening HL does not necessarily have to be located on the upper surface UpS of the chamber 10. For example, the opening HL may be located on any of the four sides of the chamber 10. In this case, the dry air inlet 601 and the retainer 30 are located below the opening HL located on any of the four sides of the chamber 10.

[0056] Furthermore, the material of chamber 10 does not necessarily have to be metal, resin, or rubber.

[0057] Furthermore, the opening HL does not necessarily have to be rectangular when viewed in the vertical direction. For example, the opening HL may be polygonal, circular, or other shapes when viewed in the vertical direction.

[0058] Furthermore, the length of the opening HL in the front-to-back direction does not necessarily have to be between 30 and 200 mm. Similarly, the length of the opening HL in the left-to-right direction does not necessarily have to be between 30 and 200 mm.

[0059] Note that the measuring instrument 40 does not necessarily have to be a measuring board that includes measuring terminals.

[0060] Furthermore, the measuring instrument 40 does not necessarily have to be a contact-type measuring instrument that brings its measuring terminals into contact with electrodes provided on the surface of the object OB being inspected. The measuring instrument 40 may be a non-contact type measuring instrument. For example, the measuring instrument 40 may be a non-contact type measuring instrument that measures the electrical characteristics of the object OB being inspected by means of electromagnetic waves, capacitive coupling, etc.

[0061] The inspection device 1 may be equipped with multiple dry air inlet sections 601. In this case, at least one of the multiple dry air inlet sections 601 must be located below the opening HL.

[0062] The inspection device 1 may also be equipped with multiple retainers 30. In this case, all of the retainers 30 must be located below the opening HL.

[0063] The chamber 10 may be provided with multiple openings HL. In this case, the dry air introduction section 601 and the retainer 30 are each located below the multiple openings HL.

[0064] The inspection device 1 may be equipped with multiple dry air inlets 601, and the chamber 10 may be provided with multiple openings HL. In this case, it is sufficient that at least one of the multiple dry air inlets 601 is located below all of the multiple openings HL.

[0065] The inspection device 1 may be equipped with multiple retainers 30, and the chamber 10 may be provided with multiple openings HL. In this case, it is sufficient that all of the retainers 30 are located below all of the multiple openings HL.

[0066] Furthermore, the dew point temperature of dry air FL can be any temperature as long as it is lower than the dew point temperature of the outside air. Therefore, the dew point temperature of dry air FL does not necessarily have to be 20 degrees lower than the dew point temperature of the outside air.

[0067] Furthermore, the specific gravity of dry air FL can be anything as long as it is greater than the specific gravity of the ambient air. Therefore, the specific gravity of dry air FL does not necessarily have to be 1.1 times or more the specific gravity of the ambient air.

[0068] More specifically, the outside air is the gas present around chamber 10.

[0069] In the first embodiment, the opening HL connects the inside of the chamber 10 to the outside of the inspection device 1.

[0070] In the first embodiment, the outside air is located outside the inspection device 1. Therefore, the absolute humidity of the dry air FL is lower than the absolute humidity of the outside air located outside the inspection device 1. The specific gravity of the dry air FL is lower than the specific gravity of the outside air located outside the inspection device 1. The dew point temperature of the dry air FL is lower than the dew point temperature of the outside air located outside the inspection device 1.

[0071] Note that the temperature controller 50 does not necessarily have to be a Peltier module. The temperature controller 50 may be a water-cooled heat sink, a liquid nitrogen chamber, or the like.

[0072] Note that the reduction gears 6010 and 6010a do not necessarily have to be porous materials. The reduction gears 6010 and 6010a may be, for example, silencers for pneumatic equipment. A silencer is a device that reduces the exhaust noise of the dry air FL introduced into the chamber 10 from the silencer. The air velocity of the dry air FL after passing through the silencer is slower than the air velocity of the dry air FL before passing through the silencer. Therefore, condensation is less likely to occur on the object OB being inspected.

[0073] The inspection device 1 may also be equipped with a deceleration unit different from the deceleration unit 6010 (hereinafter referred to as the deceleration unit according to Modified Example 2) instead of the deceleration unit 6010. For example, the deceleration unit according to Modified Example 2 includes an obstacle. Furthermore, a flow path for dry air FL is formed in the deceleration unit according to Modified Example 2. The obstacle is provided in the flow path of the deceleration unit according to Modified Example 2. In this case, the dry air FL flowing through the flow path collides with the obstacle. The direction in which the dry air FL flows changes due to the collision with the obstacle. At this time, the air velocity of the dry air FL tends to decrease. Therefore, the chamber 10 is more likely to be filled with dry air FL.

[0074] The inspection device 1 may also be equipped with a different reduction unit than the reduction unit 6010 (hereinafter referred to as the reduction unit according to Modified Example 3). For example, each of the one or more flow paths in the reduction unit according to Modified Example 3 is non-linear in shape. As a result, when the dry air FL passes through each of the one or more flow paths, the direction in which the dry air FL flows changes. At this time, the air velocity of the dry air FL tends to decrease. Therefore, the chamber 10 is more likely to be filled with dry air FL.

[0075] The inspection device 1 may be the inspection device shown below (hereinafter referred to as the inspection device according to modified example 2). The inspection device according to modified example 2 is equipped with a reduction unit 6010 or a reduction unit 6010a. In this case, the reduction unit 6010 or the reduction unit 6010a does not necessarily have to be located below the opening HL, and the retainer 30 does not necessarily have to be located below the opening HL.

[0076] Furthermore, the inspection device 1 includes both the inside of the chamber 10 and the area inside the inspection device 1 that is outside the chamber 10.

[0077] Furthermore, the inspection device 1 does not necessarily have to be equipped with a reduction unit 6010. Therefore, the inspection device 1 does not necessarily have to reduce the flow rate of dry air FL by the reduction unit 6010.

[0078] The deceleration unit 6010 may be located in a part of the flow path provided in the dry air controller 60.

[0079] The dry air controller 60 does not necessarily have to include a dry air inlet 601. In the inspection apparatus 1, components other than the dry air controller 60 may include a dry air inlet. For example, the chamber 10 may include a dry air inlet 601. For example, a dry air inlet into which dry air FL is introduced may be provided in a part of the lower surface DpS of the chamber 10. In this case, a part of the lower surface DpS of the chamber 10 corresponds to the dry air inlet 601.

[0080] The flow rate of the dry air FL flowing near the dry air inlet 601 in the inspection device 1 is, for example, 5 to 100 L / min.

[0081] The flow rate of dry air FL flowing near the opening HL in the inspection device 1 is, for example, 50 L / min.

[0082] Furthermore, the distance between the upper end of the dry air introduction section 601 and the lower end of the opening HL in the vertical direction is shorter than the length of the inspection device 1 in the vertical direction.

[0083] Furthermore, the distance between the upper end of the retainer 30 and the lower end of the opening HL in the vertical direction is shorter than the length of the inspection device 1 in the vertical direction.

[0084] Furthermore, the dry air inlet 601 does not necessarily have to be located below the retainer 30. The retainer 30 may be located below the dry air inlet 601.

[0085] Note that the reduction gears 6010 and 6010a may include only one outlet Ex2.

[0086] The dry air introduction section 601 may be provided on the lower surface DpS of the chamber 10.

[0087] When the measuring instrument 40 measures the object OB to be inspected, the opening HL is closed.

[0088] Note that the inspection device 1,1a does not necessarily have to be equipped with a cooler 70.

[0089] Note that the inspection device 1,1a does not necessarily have to be equipped with a dew point thermometer 80. [Explanation of symbols]

[0090] 1,1a: Inspection device 10: Chamber 20: Conveyor 30: Retainer 40: Measuring instrument 50: Temperature controller 60: Dry air controller 600: Dry air supply unit 601, 601a: Dry air inlet 6010,6010a: Reduction section FL: Dry air HL:Aperture OB: Object to be inspected

Claims

1. Chamber and, A holder located within the chamber and holding the object to be inspected, A measuring instrument located within the chamber and holding the object to be inspected, which measures the electrical characteristics of the object to be inspected, A dry air introduction unit for introducing dry air into the chamber, An inspection device equipped with, We define the vertically downward direction as the downward direction. The chamber is provided with an opening that connects the inside of the chamber to the outside of the inspection device, through which the object to be inspected can enter and exit. The dry air flows into the chamber from the dry air inlet. The dry air introduction section is located below the opening, The retainer is located below the opening and is supported by the inner surface of the chamber. When the dry air flows into the chamber, any gas that was present in the chamber before the dry air flowed in flows out of the chamber through the opening. Inspection device.

2. The absolute humidity of the dry air is lower than the absolute humidity of the outside air present outside the inspection device. The inspection apparatus according to claim 1.

3. The specific gravity of the dry air is greater than the specific gravity of the outside air present outside the inspection device. A space exists beneath the aforementioned retainer. The inspection apparatus according to claim 1.

4. The inspection device further includes a temperature controller, The temperature controller lowers the temperature of the holder. The inspection apparatus according to any one of claims 1 to 3.

5. The dew point temperature of the dry air is lower than the dew point temperature of the outside air present outside the inspection device. The inspection apparatus according to claim 4.

6. The inspection device further includes a dry air controller. The dry air controller controls the flow rate of the dry air, The dry air controller includes the dry air introduction section. The inspection apparatus according to any one of claims 1 to 3.

7. The aforementioned dry air introduction section is a deceleration section, The dry air flows into the chamber after passing through the deceleration unit. The wind speed of the dry air after passing through the deceleration section is less than the wind speed of the dry air before passing through the deceleration section. The inspection apparatus according to any one of claims 1 to 3.

8. The deceleration unit is provided with an inlet and one or more outlets. The dry air flows into the deceleration section through the inlet. The dry air flows out of the deceleration section through the one or more outlets. The sum of the areas of each of the one or more outlets is greater than the area of ​​the inlet. The inspection apparatus according to claim 7.

9. The deceleration section is formed of a porous material. The inspection apparatus according to claim 8.

10. The aforementioned dry air introduction section is provided with one or more dry air inlets. The dry air is introduced into the chamber from one or more dry air inlets. A portion of the one or more dry air inlets is provided at the lower end of the dry air inlet section. The dry air introduction section is supported by the inner surface of the chamber. The inspection apparatus according to any one of claims 1 to 3.

11. The inspection device further includes a conveyor, The dry air introduction section is supported by the same inner surface as the inner surface of the chamber on which the retainer is supported. The conveyor transports the object to be inspected into the chamber through the opening. The inspection apparatus according to any one of claims 1 to 3.

12. The number of the aforementioned openings is multiple, The dry air introduction section is located below the multiple openings, The retainer is located below the plurality of openings. The inspection apparatus according to any one of claims 1 to 3.

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