High-power generator and method for supplying high-power pulses

Abstract

A high power (HP) generator (10) and a method for delivering pulsed high power at high voltage and / or current values ​​to a capacitive load, in particular a plasma process, comprising: - several low power (LP) generators (14, 16, 18), each including an energy storage component (C1, L1), wherein, during use, the energy storage component (C1, L1) is charged to a predetermined value associated with the energy storage component; Each provides, when in use, at its output an LP generator value that corresponds to the value of the energy storage components (C1, C2, Cn, L1, L2, Ln) incorporated in the respective LP generator (14, 16, 18) Several LP generators (14, 16, 18) and - a coupling (20), the LP generators (14, 16, 18) being electrically connected such that a coupling value at an output of the coupling (20) can be obtained which corresponds to an output value of the HP generator (10) and which is higher than the LP generator value at the output of one of the LP generators (14, 16, 18) during use, at least in some states of the HP generator (10); - a control unit (22) configured to select the contribution of the LP generators (14, 16, 18) to the output value of the HP generator (10) during the power delivery of the HP generator (10) in order to produce a rise and / or a decay of a pulse at the output of the coupling (20); Including, The control unit (22) may further be configured to sequentially select the contributions of the LP generators (14, 16, 18) through the LP generators (14, 16, 18), in particular each pulse sequence may start with a different LP generator (14, 16, 18).

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