Photonic band imaging apparatus, photonic band imaging method, and program

Abstract

To provide a photonic band imaging device, a photonic band imaging method and a program, capable of acquiring an image reflecting information derived from a fine structure to be observed.SOLUTION: A photonic band imaging device 1 includes an irradiation optical system that irradiates a local region to be observed with wide-band light, an infrared light imaging optical system 5 and a visible light imaging optical system 6 having a camera that images a Fourier plane for each wave-length of scattered light reflected from the local region to be observed, a mapping unit 53 that acquires a Fourier image of the Fourier plane imaged by the camera for each wave-length and maps the Fourier image acquired for each wave-length across the region to observed, and a specific light information extraction unit 54 that specifies a predetermined value to a wave number and an energy axis on the basis of a mapping image mapped by the mapping unit 53 to output an image obtained by extracting information on specific light.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a photonic band imaging device, a photonic band imaging method, and a program.

Background Art

[0002] Multi-spectral (MS) or hyperspectral imaging used for multi-bandpass sensing decomposes a color image captured using a multi-color camera into red, green, and blue (RGB) channels. Also, hyperspectral imaging performs simultaneous imaging for multi-spectral imaging using various beam splitter configurations so that each spectral region can be imaged in its own respective camera system. In this case, limited hand-held MS imagers are used only to perform imaging in very limited spectral bands such as the visible and near-infrared (NIR) spectral ranges.

[0003] Patent Document 1 describes a sample analysis method in which a sample is exposed to electromagnetic (EM) radiation of various wavelengths and the response to the EM radiation that interacts with the sample is analyzed for analysis.

[0004] Also, as a method for grasping the chemical structure of organic substances, there are spectroscopic methods such as microscopic Raman spectroscopy and microscopic Fourier transform infrared spectroscopy (microscopic FTIR). Micro-Raman spectroscopy is a micro-Raman spectroscopy system that combines an optical microscope and a laser Raman spectrometer. In micro-Raman spectroscopy, monochromatic light (laser light) is introduced into the microscope, the laser light is focused onto a minute sample placed under the microscope, the scattered light from the minute sample is collected by the microscope, and this is introduced into the Raman spectrometer to obtain a Raman spectrum. By detecting and spectrally analyzing the Raman scattered light generated when the sample is irradiated with laser light, information about the chemical bonding and crystalline state of the sample can be obtained, enabling chemical analysis of various compounds with high spatial resolution. Furthermore, by comparing the measured Raman spectrum of the sample with a database of spectra of known substances, the name of the substance in the sample can be identified.

[0005] Patent Document 2 describes a method for analyzing foreign matter embedded in a laminate, comprising: a foreign matter region identification step of observing the surface of the laminate and identifying the location of a foreign matter region that occurs on the surface due to the inclusion of foreign matter; a cutting step of cutting the laminate so as to divide the foreign matter region and exposing the foreign matter on the cut surface; and an analysis step of analyzing the foreign matter exposed on the cut surface. The analysis step comprises: a first acquisition step of irradiating the foreign matter with X-rays to obtain an EDX spectrum; a confirmation step of irradiating the resin layer surrounding the foreign matter with laser light at a predetermined laser light intensity to check for carbonization of the resin layer; and a second acquisition step of irradiating the foreign matter with laser light at a laser light intensity at which carbonization was not confirmed in the confirmation step to obtain a Raman spectrum. The method analyzes the foreign matter based on the EDX spectrum and the Raman spectrum. [Prior art documents] [Patent Documents]

[0006] [Patent Document 1] Japanese Patent Publication No. 2022-59596 [Patent Document 2] Japanese Patent Publication No. 2021-128160 [Overview of the Initiative] [Problems that the invention aims to solve]

[0007] However, with commercially available imaging devices such as visible hyperspectral imaging, microscopic FTIR, and Raman imaging, it has been difficult to obtain images that reflect information originating from the fine structure of the observed object.

[0008] This invention has been made in view of these circumstances, and aims to provide a photonic band imaging apparatus, a photonic band imaging method, and a program that can acquire images that reflect information originating from the fine structure of the observed object. [Means for solving the problem]

[0009] To solve the aforementioned problems, the photonic band imaging apparatus according to the present invention is characterized by comprising: an illumination optical system that irradiates a local region of an object to be observed with broadband light; an imaging optical system having a camera that images the Fourier surface of scattered light reflected from the local region of the object to be observed for each wavelength; a mapping unit that acquires Fourier images of the Fourier surface captured by the camera for each wavelength and maps the Fourier images acquired for each wavelength over the entire area of ​​the object to be observed; and an output unit that outputs an image in which specific light information is extracted by specifying predetermined values ​​for the wavenumber and energy axes based on the mapping image mapped by the mapping unit. [Effects of the Invention]

[0010] According to the present invention, it is possible to provide a photonic band imaging apparatus, a photonic band imaging method, and a program that can acquire images that reflect information originating from the fine structure of the observed object. [Brief explanation of the drawing]

[0011] [Figure 1] This figure shows the structure of a photonic band imaging device according to an embodiment of the present invention. [Figure 2]This figure shows a simplified optical path from the DUT of a photonic band imaging apparatus according to an embodiment of the present invention to the imaging surface of an infrared camera. [Figure 3] This figure shows an observed image illustrating the origin of the microstructure of a photonic band imaging apparatus according to an embodiment of the present invention. [Figure 4] This figure illustrates the origin of the microstructure of a photonic band imaging apparatus according to an embodiment of the present invention. [Figure 5A] This is a diagram illustrating the principle of the present invention. [Figure 5B] This is a diagram illustrating the principle of the present invention. [Figure 6] This figure shows an observed image for acquiring a hyperspectral Fourier image of a local region using a photonic band imaging apparatus according to an embodiment of the present invention. [Figure 7] This figure shows hyperspectral Fourier images of the wavenumber axis and energy axis in a local region of a photonic band imaging apparatus according to an embodiment of the present invention. [Figure 8] This figure shows hyperspectral Fourier images of the wavenumber axis and energy axis for each wavelength of scattered light from a photonic band imaging apparatus according to an embodiment of the present invention. [Figure 9] This figure illustrates a photonic band imaging method using a photonic band imaging apparatus according to an embodiment of the present invention. [Figure 10] This is a flowchart showing the photonic band imaging process of a photonic band imaging apparatus according to an embodiment of the present invention. [Figure 11] This figure illustrates the result of applying PBI of a photonic band imaging apparatus according to an embodiment of the present invention to an image of a swallowtail butterfly (Papilio memnon) in Figure 3 <Observation Example 1>. [Figure 12] This figure shows photonic band imaging originating from various structures at different wavenumbers and energies, obtained by PBI according to an embodiment of the present invention. [Figure 13]It is a diagram showing photonic band imaging derived from each structure at various wave numbers and energies obtained by PBI of a photonic band imaging device according to an embodiment of the present invention. [Figure 14] It is a hardware configuration diagram showing an example of a computer that realizes the functions of a photonic band imaging device according to an embodiment of the present invention. [Embodiments of the Invention]

[0012] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram showing the structure of a photonic band imaging device according to an embodiment of the present invention. The present invention is a device, method, and program for photonic band imaging (PBI: Photonic band imaging) based on hyperspectral near-infrared Fourier image spectroscopy (NIRFIS). PBI was named by the present inventors. The present invention enables the acquisition of a mapping image that reflects information derived from a structure determined by specified parameters within a photonic band.

[0013] The photonic band imaging device 1 visualizes information derived from the fine structure of an observation target. The photonic band imaging device 1 is photonic band imaging based on hyperspectral near-infrared Fourier image spectroscopy. The photonic band imaging device 1 can acquire a mapping image that reflects information derived from a structure determined by specified parameters within a photonic band. [Device Configuration] As shown in FIG. 1, the photonic band imaging device 1 includes a device under test (DUT) 10, an XY stage 2 that moves a mounting table (not shown) on which the DUT 10 is placed in the XY direction (horizontal direction), and an irradiation optical system 3 that irradiates the DUT 10 with broadband light.

[0014] <Irradiation optical system 3> The illumination optical system 3 includes a broadband source 11 and a collimator lens 12 that brings the illumination light entering from the broadband source 11 closer to perfectly parallel rays. The light emitted from the collimating lens 12 is reflected by the first beam splitter (BS) 21 and illuminated by the objective lens 4 onto the DUT 10 placed on the mounting stage. The first beam splitter (BS) 21 and the objective lens 4 are shared by the illumination optical system 3 and the infrared light imaging optical system 5, visible light imaging optical system 6, and control optical system 7, which will be described later.

[0015] The photonic band imaging apparatus 1 includes an infrared light imaging optical system 5 having an infrared camera 27 that images the hyperspectral Fourier surface (hereinafter referred to as the Fourier surface) of scattered light reflected from a local region of the DUT 10 to be measured, and A visible light imaging optical system 6 having an optical camera (Visible camera) 31 that images the Fourier plane of the scattered light as visible light, The control optical system 7 has an optical camera 33 that captures the Fourier plane of the scattered light in visible light, and acquires an image for performing mapping control. The system includes a control unit 50 that performs photonic band imaging control from the Fourier plane image captured by the imaging surface 27a (imaging surface) (Figure 2) of the infrared camera 27 and / or optical camera 31, and also performs mapping control from the Fourier plane image captured by the optical camera 33.

[0016] <Infrared imaging optical system 5> The optical path of the infrared light imaging optical system 5 for imaging includes a first fluorite lens (L1) 22 that incidents the spectrally separated light of scattered light reflected from the local region of the DUT 10 to be measured, transmitted through a first beam splitter (BS) 21; a variable aperture (Iris) 23 that adjusts the aperture of the reflected light that has passed through the first fluorite lens (L1) 22; a dichroic mirror (DM) 24; a second fluorite lens (L2) 25 into which the transmitted light from the dichroic mirror (DM) 24 is incident; and an infrared tunable filter 26.

[0017] The dichroic mirror (DM) 24 utilizes the interference of light through thin films (a multilayer film in which thin films of a predetermined thickness with high and low refractive indices are alternately layered on the reflective surface) to transmit light in a specific wavelength range and reflect the remaining wavelength range. This allows for the irradiation of an object with useful wavelengths while allowing unwanted wavelengths to escape to the rear. The infrared wavelength tunable filter 26 modulates the reflected light captured by the infrared camera 27 by sweeping, allowing reflected light of a desired wavelength to pass through. The infrared camera 27 is equipped with a sensor, such as an InGaAs sensor, which has high sensitivity in the near-infrared wavelength region of 950nm to 1700nm.

[0018] The scattered light reflected from the local region of DUT10 to be measured is spectrally separated by the dichroic mirror (DM)24 of the infrared imaging optical system 5 and input to the visible light imaging optical system 6 and the control optical system 7.

[0019] <Visible light imaging optical system 6> The visible light imaging optical system 6 includes a second fluorite lens (L2) 28 into which the spectral signals from a dichroic mirror (DM) 24 are incident, a visible tunable filter 30 into which the spectral signals from a second beam splitter (BS) 29 are incident, and an optical camera 31 that images the hyperspectral Fourier surface of the scattered light reflected from the local region of the DUT 10 to be measured.

[0020] Thus, the photonic band imaging device 1 includes an infrared imaging optical system 5 that observes the hyperspectral Fourier surface of infrared light scattered from the local region of the DUT 10 to be measured, and a visible light imaging optical system 6 that is separated by a dichroic mirror (DM) 24 and observes the hyperspectral Fourier surface of visible light, thereby observing two Fourier surfaces. By observing two Fourier surfaces, it is possible to obtain a broadband Fourier surface from visible to infrared light.

[0021] <Control Optical System 7> The control optical system 7 includes a third fluorite lens (L3) 32 into which transmitted light from the dichroic mirror (DM) 24 enters, and an optical camera (Visible camera) 33, and acquires images for performing mapping control.

[0022] <Control Unit 50> The XY stage 2, infrared tunable filter 26, infrared camera 27, visible tunable filter 30, optical camera 31, and optical camera 33 are connected to the control unit 50.

[0023] The control unit 50 performs photonic band imaging control on the infrared camera 27 and the optical camera 31 (see dashed line in Figure 1). Specifically, the control unit 50 controls the infrared camera 27 of the infrared light imaging optical system 5 to project hyperspectral Fourier images of each wavelength onto the imaging surface 27a of the infrared camera 27. At this time, the control unit 50 changes the infrared tunable filter 26 placed in front of the infrared camera 27 to allow reflected light of the desired wavelength to pass through. The control unit 50 performs photonic band imaging control to project hyperspectral Fourier images of each wavelength onto the imaging surface 27a (the observation point which is the Fourier plane) of the infrared camera 27.

[0024] Similarly, the control unit 50 performs photonic band imaging control on the optical camera 31 and visible wavelength tunable filter 30 of the visible light imaging optical system 6 in the same way as in the infrared light imaging optical system 5, and captures an image of the visible light range spectrally separated from the infrared light imaging optical system 5 by the dichroic mirror (DM) 24. In this way, the same DUT10 that is being imaged with infrared light by the infrared light imaging optical system 5 can be observed in the visible light range using the visible light imaging optical system 6.

[0025] Meanwhile, the control unit 50 performs photonic band imaging control from the Fourier plane image captured by the imaging surface 27a of the infrared camera 27 and / or the optical camera 31, and performs mapping control from the Fourier plane image captured by the optical camera 33. The control unit 50 then displays the actual image of the DUT 10 along with the Fourier plane image on the monitor 60, which serves as a real image display unit.

[0026] Furthermore, the control unit 50 performs mapping control on the optical camera 33 of the control optical system 7 (see dashed line in Figure 1), and the second beam splitter (BS) 29 captures an image of the visible light range transmitted from the infrared light imaging optical system 5. In this way, the same DUT10 being imaged by the visible light imaging optical system 6 can be acquired in the visible light range using the control optical system 7. Therefore, the positional relationship between the DUT10 and the objective lens 4 can be easily adjusted using the XY stage 2 (see dashed line in Figure 1) to perform mapping control.

[0027] The control unit 50 includes an image generation unit 51, a hyperspectral imaging acquisition unit 52, a mapping unit 53, and a specific light information extraction unit 54. The image generation unit 51 moves the XY stage 2 or objective lens 4 to a position suitable for shooting. The hyperspectral imaging unit 52 and the mapping unit 53 acquire Fourier images of the Fourier plane captured by the camera for each wavelength, and map the Fourier images acquired for each wavelength over the entire area of ​​the observation target. The specific light information extraction unit 54 outputs an image in which specific light information has been extracted, based on the mapping image mapped by the mapping unit 53, by specifying predetermined values ​​for the wavenumber and energy axes.

[0028] Figure 2 is a simplified diagram showing the optical path from DUT10 to the imaging surface 27a of the infrared camera 27. The optical system from the infrared tunable filter 26 to the imaging surface 27a of the infrared camera 27 is a tencentric optical system.

[0029] [Derived from microstructure] Let's explain the origins of the microstructure. Figure 3 shows images of the observed subject to explain the origin of the microstructure. The right image in Figure 3 is an image of the observed swallowtail butterfly (Papilio memnon), and the left image in Figure 3 is an optical microscope image of a part of the butterfly's wing observed with an optical microscope. As shown in the left image in Figure 3, the scales of the wing have a micro / nano periodic structure, and information derived from this structure is revealed.

[0030] Colors produced by the scattering and reflection of light of specific wavelengths through micro / nano structures are called structural colors. Distinguishing between pigment-derived and structural-derived information using conventional optical microscopes is difficult, necessitating destructive evaluation using scanning electron microscopy or other methods.

[0031] Figure 4 is a diagram illustrating the origin of the microstructure. The photonic band imaging device 1 observes microstructures that have micro / nano periodic structures, and the information it provides is derived from these structures. As shown in the upper part of Figure 4, when light 81 of different energies is shone vertically from above onto a structure 70 having a micro / nano periodic structure 70a, scattered light 82 with a scattering direction different depending on the micro / nano periodic structure 70a is emitted. Similarly, as shown in the lower part of Figure 4, when light 81 of different energies is shone vertically from above onto a structure 71 having a micro / nano periodic structure 71a, scattered light 82 with a scattering direction different from that shown in the upper part of Figure 4 is emitted, depending on the micro / nano periodic structure 71a. The scattering direction of the scattered light 82 differs depending on the micro / nano periodic structure. This invention visualizes information originating from microstructure by mapping scattered light of different energies.

[0032] Figures 5A-B are diagrams illustrating the principle of the present invention. The upper part of Figure 5A shows the input image, and the lower part of Figure 5A shows the magnitude spectrum obtained by performing a Fast Fourier Transform (FFT) on the input image. Figure 5B (top) is a power distribution diagram that schematically represents the magnitude spectrum shown in Figure 5A (bottom). Figure 5B (bottom) is an illustrative diagram showing point A (● point) on the power distribution diagram in Figure 5B (top) and points BD (〇 points) on the vertical and horizontal frequency axes. Point A (● point) in the upper part of Figure 5B plots the power distribution of the wave components propagating in direction A. Summing up the intensities of all these mapped waves results in the upper part of Figure 5B. While conventional methods involve performing a Fourier transform on the entire image, this invention focuses on the Fourier plane, generating a Fourier plane in a local region to measure the extent to which the light components influenced by the micro / nano periodic structure are affected in that local region (photonic band imaging). Then, by mapping the Fourier plane image of the entire image (mapping control), an image reflecting information originating from the fine structure of the observed object is obtained.

[0033] [Hyperspectral Fourier image of a localized area] Figure 6 shows the target image for obtaining a hyperspectral Fourier image of a local region. As shown in Figure 6, a grid for specifying the region is added to the target image 90. Here, a hyperspectral Fourier image of a local region (see symbol p in Figure 6) of a part of a swallowtail butterfly's wing is obtained.

[0034] Figure 7 shows the hyperspectral Fourier image 100 of the wavenumber axis and energy axis (Energy (Wavelength)) in the local region of Figure 6. By observing with the imaging surface 27a (the observation point which is the Fourier plane) of the infrared camera 27 in Figure 1, the hyperspectral Fourier image 100 shown in Figure 7 is acquired. In the hyperspectral Fourier image 100, the 3D Brillouin zone information as a function of light energy is expressed in reciprocal lattice space (K-Γ-M). Reciprocal lattice space (K-Γ-M) is a space constructed by reciprocal lattice vectors and reflects the periodicity of real space. In Figure 7, the PBI parameters (kx, ky, hν) are (1 / 10k x , 1 / 10k y This shows that, as shown in Figure 7, there is a bias in the power distribution in reciprocal lattice space (K-Γ-M). As will be described later, the intensity of any point in the hyperspectral Fourier image 100 contains information derived from the fine structure of the sample in question.

[0035] Figure 8 shows the hyperspectral Fourier images 1001-1005 of the local region in Figure 6, with wavenumber and energy axes for each wavelength of scattered light. As shown in Figure 7, the power distribution of hyperspectral Fourier images 1001-1005 has characteristics specific to each wavelength of scattered light.

[0036] In the photonic band structure shown in Figure 8, a mapping image of the observed object can be obtained from intensity information at specified wavenumbers and energies (kx, ky, hν). This makes it possible to create an image that reflects information obtained from structures interacting with light of a specific wavenumber and energy.

[0037] [Mapping of the entire observation area] Figure 9 illustrates the photonic band imaging method of the photonic band imaging apparatus 1. First, as shown in the upper left of Figure 9, hyperspectral Fourier images 1001 to 1003 of the local region (see symbol p in Figure 9) are acquired for each wavelength. An infrared tunable filter 26 is provided in front of the infrared camera 27. The image generation unit 51 in Figure 1 (see Figure 1) controls the infrared tunable filter 26 to change the wavelength transmitted by the tunable filter 26. Hyperspectral Fourier images 1001 to 1003, generated for each wavelength, are captured on the imaging surface 27a of the infrared camera 27 in Figure 1.

[0038] Next, as shown in the right-hand figure of Figure 9, the hyperspectral Fourier images 1001-1003 for each wavelength are acquired and mapped across the entire observation area. Specifically, DUT10 is moved pixel by pixel using XY stage 2 (see symbol a in Figure 9) to map across the entire observation area.

[0039] Next, based on the hyperspectral Fourier image 100 mapped across the entire observation area, values ​​are specified for the wavenumber axis and energy axis to obtain an image 200 in which only the information of specific light is extracted (see Figure 9, lower left). The light emitted from the collimating lens 12 is reflected by the first beam splitter (BS) 21 and illuminated by the objective lens 4 onto the DUT 10 placed on the mounting stage. The first beam splitter (BS) 21 and the objective lens 4 are shared by the illumination optical system 3 and the infrared light imaging optical system 5 and control optical system 7, which will be described later.

[0040] Furthermore, the photonic band imaging apparatus 1 includes an infrared light imaging optical system 5 having an infrared camera 27 that images the hyperspectral Fourier plane of scattered light reflected from the DUT 10, a mapping unit (hyperspectral imaging acquisition unit 52, mapping unit 53) that acquires Fourier images of the hyperspectral Fourier plane captured by the imaging surface 27a (imaging surface) (Figure 2) of the infrared camera 27 for each wavelength and maps the Fourier images acquired for each wavelength over the entire area of ​​the observation target, and an output unit (specific light information extraction unit 54) that outputs an image in which specific light information is extracted by specifying predetermined values ​​for the wavenumber and energy axes based on the mapping image mapped by the mapping unit 53.

[0041] The optical path of the infrared light imaging optical system 5 includes a first fluorite lens (L1) 22 that incidents the spectrally separated light that has passed through the first beam splitter (BS) 21 of scattered light reflected from the local region of the DUT 10 to be measured, a variable aperture (Iris) 23 that adjusts the aperture of the light that has passed through the first fluorite lens (L1) 22, a dichroic mirror (DM) 24, a second fluorite lens (L2) 25 into which the transmitted light from the dichroic mirror (DM) 24 is incident, and an infrared tunable filter 26.

[0042] The operation of the photonic band imaging apparatus 1, configured as described above, will be explained below. [Operation overview] As shown in Figure 1, broadband light from the broadband light source 11 is reflected by the first beam splitter (BS) 21 and incident on a specific point on the DUT 10 (sample) through the objective lens 4. Light scattered from DUT10 (sample) is observed on the imaging surface 27a (the Fourier plane observation point) of the infrared camera 27 through the infrared imaging optical system 5. At this time, the infrared tunable filter 26, placed in front of the infrared camera 27, is adjusted to allow reflected light of the desired wavelength to pass through. The Fourier image of the light scattered from DUT10 (sample) is observed using the infrared camera 27 at any wavelength in the range of, for example, 850 nm to 1800 nm.<Photonic band imaging> ).

[0043] Then, as shown in Figure 8, the photonic band structure at the observation point is obtained by superimposing the obtained Fourier images in the energy axis direction (i.e., the wavelength direction).

[0044] The above operations are performed across the entire sample area while moving the observation point.<Mapping control> (See below). To achieve high speed and versatility, configure the software to automatically execute the above series of operations.

[0045] <Mapping control> This allows us to obtain a mapping image of the observed object from intensity information at a specified wavenumber and energy (kx, ky, hν). This makes it possible to create an image that reflects information obtained from structures interacting with light of a specific wavenumber and energy.

[0046] [flowchart] Figure 10 is a flowchart showing the photonic band imaging process of the photonic band imaging apparatus 1. In step S1, the image generation unit 51 specifies the wavenumber and energy. For example, (0.5Γ-M, 0.8eV) is selected.

[0047] In step S2, the hyperspectral imaging unit 52 acquires hyperspectral Fourier images 1001 to 1003 of a local region (see symbol p in Figure 9) for each wavelength. The image generation unit 51 (see Figure 1) controls the infrared tunable filter 26 to change the wavelength transmitted by the tunable filter 26. The hyperspectral Fourier images 1001 to 1003, generated for each wavelength, are captured on the imaging surface 27a of the infrared camera 27 in Figure 1.

[0048] In step S3, the mapping unit 53 measures the intensity of the relevant location (for example, the k of K-Γ-M). x ,ky k The third measurement is performed sequentially, and hyperspectral Fourier images 100 for each wavelength are acquired and mapped over the entire area of ​​the observation target. Specifically, the image generation unit 51 moves the DUT 10 pixel by pixel using the XY stage 2 (see symbol a in Figure 9) to map over the entire area of ​​the observation target.

[0049] In step S4, the specific light information extraction unit 54 obtains an image 200 in which only the information of specific light is extracted by specifying values ​​for the wavenumber axis and energy axis based on the hyperspectral Fourier image 100 mapped over the entire observation area (see Figure 9, lower left).

[0050] [Examples of application] The following describes observation examples with reference to the diagrams. <Observation Example 1> Figure 11 illustrates the result of applying PBI to the image of the swallowtail butterfly in Figure 3 <Observation Example 1>. The upper part of Figure 11 is an example of displaying an optical microscope image 90 of the observed object (part of the wing of the swallowtail butterfly), and the lower part of Figure 11 is an example of displaying an image 200 of the same region obtained by specifying parameters (kx, ky, hν) with PBI at the same observation point. Image 90, shown in the upper part of Figure 11, optically displays the spots on the scales of a swallowtail butterfly's wing (see symbol x in the upper part of Figure 11).

[0051] Image 200, shown in the lower part of Figure 11, displays features derived from pigment (features derived from pigment) and features derived from the structure (features derived from the structure) (see symbol y in the upper part of Figure 11), which were revealed for the first time in this PBI. The image indicated by symbol y in the upper part of Figure 11 is "an image that reflects information derived from the fine structure of the observed object." Here, images obtained with an optical microscope contain all information, both from the dye and the structure, whereas images obtained using PBI primarily show information derived from the structure of the observed object.

[0052] <Observation Example 2> Figure 12 shows photonic band imaging from various structures at different wavenumbers and energies obtained by PBI. Figure 12 illustrates the results of applying the method to an image of a swallowtail butterfly wing <Observation Example 2>. The lower panel of Figure 12 shows an image of the same region measured by a near-infrared microscope spectrometer. Note that this represents a localized area (scale bar: 1 mm) of the wing image in Figure 12. The portion indicated by the symbol x in Figure 12 shows features derived from pigment, while the portion indicated by the symbol y in Figure 12 shows features derived from the structure obtained by PBI ("images that reflect information derived from the fine structure of the observed object").

[0053] The PBI conditions used in the measurement for <Observation Example 2> are as follows: Pixel size: 50 × 50 μm Total number of pixels:l160 ×160pixels Energy(wavelength) range: 0.75 ~1.46 eV (1650 ~ 850 nm) Filter resolution: 100 nm (Maximum filter resolution is 5 nm.) Measurement points (kx, ky):30(The maximum number of points depends on the pixel size of the infrared camera.) Measurement time:~ 20 min / image

[0054] The measurement time is determined by the resolution in the energy direction. In this measurement, with a filter resolution of 100 nm, it was approximately 20 minutes per image. Here, in the case of ((3 / 5)kx, 0, 1.31 eV), the image obtained by PBI was similar to the image obtained by the microscope spectrometer, indicating that the structural components were dominant. On the other hand, in the case of ((1 / 10)kx, (1 / 10)ky, 1.08 eV), a clear difference was observed between the image obtained by PBI and the image obtained by the microscope spectrometer, indicating information derived from the dye. The information derived from the structure was successfully separated. As a result, this method, when combined with other mapping methods (such as FTIR imaging, hyperspectral imaging, and Raman imaging), is highly effective for non-destructively analyzing the unique structure and function of observed objects.

[0055] <Observation Example 3> Figure 13 shows photonic band imaging from various structures at different wavenumbers and energies obtained by PBI. Figure 13 illustrates the results of applying the method to images of swallowtail butterfly wings <Observation Example 2>. The lower panel of Figure 13 shows images of the same region measured by a near-infrared microscope spectrometer.

[0056] Wavenumber: 3 / 5 Γ-K or 1 / 10 Γ-M Wavelength (energy): 950 nm - 1650 nm In the case of ((3 / 5)kx, 0, 1.31 eV) shown in the upper panel of Figure 13, the image obtained by PBI is similar to the image obtained by the microscope spectrometer, indicating that structural components are dominant. On the other hand, in the case of ((1 / 10)kx, (1 / 10)ky, 1.08 eV), a clear difference was observed between the image obtained by PBI and the image obtained by the microscope spectrometer.

[0057] [Hardware configuration] In the photonic band imaging apparatus 1 according to this embodiment, photonic band imaging processing is realized by a computer 900, which is a physical device with a configuration such as that shown in Figure 14. Figure 14 is a hardware configuration diagram showing an example of a computer that implements the functions of a photonic band imaging device. Computer 900 has a CPU 901, ROM (Read Only Memory) 902, RAM 903, HDD (Hard Disk Drive) 904, input / output I / F (Interface) 905, communication I / F 906, and media I / F 907.

[0058] The CPU 901 operates based on programs stored in the ROM 902 or HDD 904, and controls the various processing units of the photonic band imaging apparatus 1 shown in Figure 1. The ROM 902 stores boot programs executed by the CPU 901 when the computer 900 starts up, as well as programs related to the computer 900's hardware.

[0059] The CPU901 has the functions of a mapping unit that acquires Fourier images of the Fourier surface captured by the camera for each wavelength and maps the Fourier images acquired for each wavelength over the entire area of ​​observation, and an output unit that outputs an image in which specific light information is extracted by specifying predetermined values ​​for the wavenumber and energy axes based on the mapping image mapped by the mapping unit.

[0060] The CPU 901 controls input devices 910, such as a mouse or keyboard, and output devices 911, such as a display, via the input / output interface 905. The CPU 901 acquires data from the input devices 910 via the input / output interface 905 and outputs the measured and analyzed data to the output devices 911.

[0061] HDD904 stores programs executed by CPU901 and data used by those programs. Communication I / F906 receives data from other devices via a communication network (e.g., NW(Network)920) and outputs it to CPU901, and also transmits data generated by CPU901 to other devices via the communication network.

[0062] The media interface 907 reads a program or data stored in the recording medium 912 and outputs it to the CPU 901 via the RAM 903. The CPU 901 loads the program related to the desired processing from the recording medium 912 onto the RAM 903 via the media interface 907 and executes the loaded program. The recording medium 912 can be an optical recording medium such as a DVD (Digital Versatile Disc) or PD (Phase Change Rewritable Disk), a magneto-optical recording medium such as an MO (Magneto Optical Disk), a magnetic recording medium, a conductive memory tape medium, or a semiconductor memory.

[0063] For example, when the computer 900 functions as a photonic band imaging apparatus according to the first and second embodiments, the CPU 901 of the computer 900 realizes the functions of the photonic band imaging apparatus by executing a program loaded on the RAM 903. The HDD 904 stores the data from the RAM 903. The CPU 901 reads and executes a program related to the desired processing from the recording medium 912. Alternatively, the CPU 901 may read a program related to the desired processing from another device via a communication network (NW 920).

[0064] [effect] As described above, the photonic band imaging apparatus 1 according to this embodiment includes an illumination optical system that irradiates a local region of the object to be observed with broadband light, an imaging optical system (infrared light imaging optical system 5, visible light imaging optical system 6) having a camera that images the Fourier surface of scattered light reflected from the local region of the object to be observed for each wavelength, a mapping unit (hyperspectral imaging acquisition unit 52, mapping unit 53) that acquires Fourier images of the Fourier surface captured by the camera for each wavelength and maps the Fourier images acquired for each wavelength over the entire area of ​​the object to be observed, and an output unit (specific light information extraction unit 54) that outputs an image in which specific light information is extracted by specifying predetermined values ​​for the wavenumber and energy axis based on the mapping image mapped by the mapping unit 53.

[0065] This makes it possible to acquire images that reflect information derived from the fine structure of the observed object. The photonic band imaging instrument 1 becomes capable of acquiring mapping images that reflect structure-derived information determined by specified parameters within the photonic band.

[0066] The present invention is not limited to the embodiments described above, and includes other modifications and applications, as long as they do not depart from the spirit of the invention as described in the claims.

[0067] Furthermore, the embodiments and modifications described above are explained in detail for the purpose of clearly illustrating the present invention, and are not necessarily limited to those having all the configurations described. It is also possible to replace parts of the configuration of one embodiment with those of another embodiment, and to add configurations from other embodiments to the configuration of one embodiment. Additionally, it is possible to add, delete, or replace parts of the configuration of each embodiment with those of other embodiments.

[0068] Furthermore, although the above embodiments used the names "photonic band imaging apparatus" and "photonic band imaging method," this is for the sake of explanation, and the name of the apparatus invention may be "sample analysis apparatus," "sample measurement apparatus," etc. Similarly, the name of the method invention may be "sample measurement method," etc. [Explanation of symbols]

[0069] 1. Photonic band imaging system 3 Irradiation optical system 4. Objective lens 5. Infrared light imaging optical system (imaging optical system) 6. Visible light imaging optical system (imaging optical system) 7 Control Optical System 10 DUT (Observation Target) 26. Infrared wavelength tunable filter 27 Infrared Camera 27a Imaging surface (observation point which is the Fourier surface) 30. Visible wavelength tunable filter 31,33 Optical Camera 50 Control Unit 51 Image generation unit 52 Hyperspectral imaging acquisition unit (mapping unit) 53 Mapping section 54 Specific optical information extraction section (output section)

Claims

1. An illumination optical system that irradiates a local region of the target of observation with broadband light, An imaging optical system having a camera that images the Fourier plane of scattered light for each wavelength reflected from the local region of the object to be observed, A mapping unit acquires Fourier images of the Fourier surface captured by the camera for each wavelength, and maps the Fourier images acquired for each wavelength over the entire area of ​​the observation target. The system includes an output unit that outputs an image in which specific light information is extracted by specifying predetermined values ​​for the wavenumber and energy axes based on the mapping image mapped by the mapping unit. A photonic band imaging apparatus characterized by the following features.

2. The observed object is of microstructure origin, indicating that nanostructures with a predetermined period are aligned in a predetermined direction to constitute the observed object. The photonic band imaging apparatus according to claim 1.

3. The aforementioned energy axis includes at least the visible to infrared range. The photonic band imaging apparatus according to claim 1.

4. Steps include irradiating a local region of the object to be observed with broadband light, The steps include: imaging the Fourier plane of each wavelength of scattered light reflected from the local region of the object to be observed; The steps include acquiring a Fourier image of the captured Fourier surface for each wavelength, and mapping the Fourier images acquired for each wavelength over the entire area of ​​the observation target, Based on the mapped image, the steps include specifying predetermined values ​​for the wavenumber and energy axes to output an image in which information about a specific light is extracted, and executing A photonic band imaging method characterized by the following features.

5. A program for causing a computer to function as a photonic band imaging apparatus according to any one of claims 1 to 3.

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