Bottom brush, brush unit, and substrate cleaning device

The innovative bottom brush design with arc-shaped cleaning sections and rotational drive system addresses inefficiencies in substrate cleaning by ensuring uniform contact and thorough contamination removal across the substrate's underside, enhancing cleaning efficiency.

JP7870135B2Active Publication Date: 2026-06-04SCREEN HOLDINGS CO LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
SCREEN HOLDINGS CO LTD
Filing Date
2022-09-21
Publication Date
2026-06-04

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Abstract

To provide a lower surface brush, a brush unit, and a substrate cleaning device that can efficiently clean a lower surface of a substrate.SOLUTION: A lower surface brush 100 is used to clean a lower surface of a substrate, and includes a base portion 110, a first cleaning portion 120, and a second cleaning portion 130. The base portion 110 has an upper surface and is configured to be rotatable about a predetermined center point. The first cleaning portion 120 projects upward from the upper surface of the base portion 110 and extends in one direction. The second cleaning portion 130 protrudes upward from the upper surface of the base portion 110 and is arranged on a path connecting one end of the first cleaning portion 120 and the center point of the base portion 110 in one direction in plan view.SELECTED DRAWING: Figure 1
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