Manufacturing method for window material for endpoint detection
JP7874947B2Active Publication Date: 2026-06-17FUJIBO HLDG
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- FUJIBO HLDG
- Filing Date
- 2021-09-30
- Publication Date
- 2026-06-17
AI Technical Summary
Benefits of technology
【0012】 本発明によれば、均一な物性を有する終点検出用窓材をより簡便に得ることのできる製造方法を提供することができる。
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Abstract
To provide a method for manufacturing a polishing pad provided with an endpoint detection window that is simple in terms of production work and has stable physical properties, and an endpoint detection window material for the polishing pad with the endpoint detection window.SOLUTION: A manufacturing method of a transparent endpoint detection window material for an endpoint detection window 12 in a polishing pad with an endpoint detection window includes a first mixing step of mixing polyisocyanate, polyol and a portion of a curing agent to form a first reaction mixture, a second mixing step of mixing a first reaction mixture with the remainder of the curing agent to form a second reaction mixture, and a curing step of curing the second reaction mixture to obtain an endpoint detection window material, and the curing agent has 3 or more functional groups.SELECTED DRAWING: Figure 2
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