Inspection device, method for manufacturing a template, and method for inspecting a template

JP7877080B2Active Publication Date: 2026-06-22KIOXIA CORP
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
KIOXIA CORP
Filing Date
2022-06-21
Publication Date
2026-06-22

AI Technical Summary

Technical Problem

Defect inspection of semiconductor templates with varying heights is challenging due to focus issues, leading to reduced inspection accuracy.

Method used

An inspection apparatus and method that adjusts focal positions based on height information to capture multiple images, synthesizes these images to correct for brightness and positional deviations, and determines defects in a composite image.

Benefits of technology

Enables high-accuracy defect inspection of semiconductor templates with varying heights by ensuring all patterns are in focus and aligned, improving inspection precision.

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Abstract

To perform a defect inspection of a plurality of patterns having a different height with high accuracy.SOLUTION: An inspection device of an embodiment, is an inspection device that performs a defect inspection of a sample having a plurality of patterns of which a height from a reference surface is different, and comprises: an imaging part that images the plurality of patterns; a focal point determination part that determines a plurality of focal positions for focusing a focal point of the imaging part in a height direction of the plurality of patterns; an image acquisition part that causes the imaging part to image a plurality of images obtained by imaging the plurality of patterns from the height direction, the plurality of images of which the focal point being focused in each of the plurality of focal positions; an image composition part that generates a composition image by extracting a region containing a pattern of which the focal point of the plurality of patterns is focused from each of the plurality of images; and a defect determination part that performs an inspection of a defect of the sample from the composite image.SELECTED DRAWING: Figure 1
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Citation Information

Patent Citations

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