Three-dimensional additive manufacturing apparatus and three-dimensional additive manufacturing method

Abstract

A three-dimensional additive manufacturing device and a three-dimensional additive manufacturing method are provided that can improve the quality of a three-dimensional structure to be manufactured. [Solution] A beam emission unit of a three-dimensional additive manufacturing device emits a beam toward a powder layer spread on a stage. A beam deflection unit deflects the beam emitted from the beam emission unit. A control unit controls the beam deflection unit. A point on the powder layer to be next irradiated with the beam is designated as a next irradiation point, and a point that has already been irradiated with the beam and solidified is designated as a solidification point. The control unit controls the beam deflection unit to irradiate the beam onto at least one solidification point adjacent to the next irradiation point and then irradiate the next irradiation point with the beam, or to irradiate the beam onto at least one solidification point adjacent to the next irradiation point after irradiating the next irradiation point with the beam and before the next irradiation point solidifies.

Description

Technical Field

[0001] The present invention relates to a three-dimensional layer manufacturing apparatus and a three-dimensional layer manufacturing method.

Background Art

[0002] In recent years, a three-dimensional layer manufacturing apparatus that forms a three-dimensional object by stacking layers of solidified powder material is known. The three-dimensional layer manufacturing apparatus irradiates a beam onto the powder material spread on a stage to melt and solidify the powder material.

[0003] Patent Document 1 describes a three-dimensional layer manufacturing apparatus. The three-dimensional layer manufacturing apparatus described in Patent Document 1 divides the modeling region of the powder material into a plurality of lines, sequentially scans each line with a beam, and melts the powder material line by line. Further, a dummy scan is performed in which the beam is scanned in a state where the powder material is not melted between the end of the beam scan of the M-th (M is a natural number) line and the start of the beam scan of the M + 1-th line.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] By the way, it is desired to improve the quality of the three-dimensional structure to be manufactured by the three-dimensional layer manufacturing apparatus.

[0006] An object of the present invention is to provide a three-dimensional layer manufacturing apparatus and a three-dimensional layer manufacturing method capable of improving the quality of the three-dimensional structure to be manufactured in consideration of the above problems.

Means for Solving the Problems

[0007] To solve the above problems and achieve the objectives of the present invention, a three-dimensional additive manufacturing apparatus reflecting one aspect of the present invention comprises a stage, a beam emission unit, a beam deflection unit, and a control unit. A powder layer made of powder material is laid out on the stage. The beam emission unit emits a beam toward the powder layer laid out on the stage. The beam deflection unit deflects the beam emitted from the beam emission unit. The control unit controls the beam deflection unit. The point in the powder layer to be irradiated with the beam next is defined as the next irradiation point, and the point that has been irradiated with the beam and solidified is defined as the solidification point. The control unit controls the beam deflection unit to irradiate the beam to at least one solidification point adjacent to the next irradiation point before irradiating the next irradiation point, or to irradiate the beam to at least one solidification point adjacent to the next irradiation point before the next irradiation point solidifies after irradiating the next irradiation point with the beam.

[0008] A three-dimensional additive manufacturing method reflecting one aspect of the present invention includes an activation step and a main irradiation step. The point in the powder layer spread on the stage to be irradiated with the beam next is defined as the next irradiation point, and the point that has been irradiated with the beam and solidified is defined as the solidification point. In the activation step, the control unit controls the beam deflection unit to irradiate the beam to at least one solidification point adjacent to the next irradiation point. In the main irradiation step, the control unit controls the beam deflection unit to irradiate the next irradiation point with the beam. The activation step is performed at least one before or after the main irradiation step. [Effects of the Invention]

[0009] According to the three-dimensional additive manufacturing apparatus and method with the above configuration, the quality of the three-dimensional structures to be manufactured can be improved. [Brief explanation of the drawing]

[0010] [Figure 1] This is a schematic diagram showing a three-dimensional additive manufacturing apparatus according to one embodiment. [Figure 2] This is a block diagram showing the functional configuration of the beam position control unit of a three-dimensional additive manufacturing apparatus according to one embodiment. [Figure 3]This figure illustrates a first irradiation pattern, showing a first example of the beam irradiation procedure for a three-dimensional additive manufacturing apparatus according to one embodiment. [Figure 4] This figure illustrates a second irradiation pattern, showing a second example of the beam irradiation procedure for a three-dimensional additive manufacturing apparatus according to one embodiment. [Figure 5] This figure illustrates a third irradiation pattern, showing a third example of the beam irradiation procedure for a three-dimensional additive manufacturing apparatus according to one embodiment. [Figure 6] This figure illustrates a fourth irradiation pattern, showing a fourth example of the beam irradiation procedure for a three-dimensional additive manufacturing apparatus according to one embodiment. [Figure 7] This figure illustrates a fifth irradiation pattern, showing a fifth example of the beam irradiation procedure for a three-dimensional additive manufacturing apparatus according to one embodiment. [Figure 8] This figure illustrates a sixth irradiation pattern, showing a sixth example of the beam irradiation procedure for a three-dimensional additive manufacturing apparatus according to one embodiment. [Figure 9] This figure illustrates a seventh irradiation pattern, showing a seventh example of the beam irradiation procedure for a three-dimensional additive manufacturing apparatus according to one embodiment. [Figure 10] This figure illustrates an eighth irradiation pattern, showing an eighth example of the beam irradiation procedure for a three-dimensional additive manufacturing apparatus according to one embodiment. [Modes for carrying out the invention]

[0011] Hereinafter, an embodiment of the three-dimensional additive manufacturing apparatus and three-dimensional additive manufacturing method of the present invention will be described with reference to Figures 1 to 10. In each figure, common components are denoted by the same reference numerals.

[0012] [Three-dimensional additive manufacturing equipment] First, the configuration of a three-dimensional additive manufacturing apparatus according to one embodiment will be described with reference to Figure 1. Figure 1 is a schematic diagram illustrating a three-dimensional additive manufacturing apparatus according to one embodiment.

[0013] The three-dimensional laminating manufacturing apparatus 1 shown in FIG. 1 is an apparatus that irradiates a powder material with an electron beam to melt the powder material and stacks images formed by the solidification of this powder material to manufacture a three-dimensional object. As shown in FIG. 1, the three-dimensional laminating manufacturing apparatus 1 includes an electron gun 2 that emits an electron beam L1, a lens 4, a powder material storage 5, a stage 6, a powder laminating arm 7, and a beam deflection unit 10. The electron gun 2 corresponds to the beam emitting unit according to the present invention.

[0014] The electron gun 2, the deflection amplifier 3, the lens 4, the powder material storage 5, the stage 6, and the powder laminating arm 7 are arranged in a manufacturing chamber (not shown). A vacuum pump is connected to the manufacturing chamber. The vacuum pump removes the gas inside the manufacturing chamber. Thereby, the internal space of the manufacturing chamber is evacuated.

[0015] The electron gun 2 includes an emitter 21, an extraction electrode 22, and an acceleration electrode 23. The emitter 21 and the acceleration electrode 23 are connected to an acceleration power supply 24. Also, the extraction electrode 22 is connected to an extraction potential generation unit (not shown). The extraction potential generation unit applies an extraction potential to the extraction electrode 22. When an extraction potential is applied to the extraction electrode 22, the extraction electrode 22 extracts electrons from the emitter 21.

[0016] The acceleration electrode 23 accelerates the electrons extracted from the emitter 21 by the acceleration potential applied by the acceleration power supply 24 to generate an electron beam L1. The acceleration electrode 23 directs the generated electron beam L1 toward the lens 4 and the deflection amplifier 3.

[0017] A deflection amplifier 3, which will be described later in the beam deflection unit 10, is arranged between the electron gun 2 and the stage 6. The detailed configuration of the beam deflection unit 10 will be described later with reference to FIG. 2.

[0018] The lens 4 is arranged between the deflection amplifier 3 and the electron gun 2. The lens 4 focuses the electron beam L1 irradiated from the electron gun 2 by an electromagnetic action. Then, the lens 4 forms an image of the focus of the electron beam L1 on the stage 6.

[0019] Stage 6 is formed in a substantially flat shape. Stage 6 is supported so as to be movable along the vertical direction by a drive device (not shown). Powder material M1 is supplied to one side of Stage 6 from the powder material storage container 5. Examples of powder material M1 include solid materials such as metals such as titanium, aluminum, and iron, ceramics, and organic resins.

[0020] Furthermore, a powder lamination arm 7 is positioned near the stage 6. The powder lamination arm 7 is supported by a moving mechanism (not shown) so as to be able to move horizontally on one surface of the stage 6. As the powder lamination arm 7 moves horizontally on one surface of the stage 6, the powder material M1 is spread on that surface of the stage 6 to a predetermined height (for example, the diameter of one particle of powder material M1).

[0021] By irradiating the layer of powder material M1 (powder layer) spread on stage 6 with an electron beam L1, the powder material M1 melts and then solidifies. After the powder material M1 has melted and solidified, stage 6 is lowered vertically by one layer by a drive device (not shown). Then, the powder material storage unit 5 supplies new powder material M1, and the powder stacking arm 7 spreads the powder material M1 to a predetermined height.

[0022] [Beam deflection unit] Next, the configuration of the beam deflection unit 10 will be explained with reference to Figure 2. Figure 2 is a block diagram showing the functional configuration of the beam deflection unit 10.

[0023] As shown in Figure 2, the beam deflection unit 10 includes a deflection amplifier 3 and a coordinate transformation correction circuit 8. The deflection amplifier 3 is positioned between the electron gun 2 and the stage 6. The deflection amplifier 3 deflects the electron beam L1 irradiated from the electron gun 2 to a predetermined position on the stage 6.

[0024] The coordinate transformation correction circuit 8 controls the operation of the deflection amplifier 3. The coordinate transformation correction circuit 8 is connected to the control device 30. For example, a PC (personal computer) can be used as the control device 30. The control device 30 transmits a position command signal and an irradiation time command signal to the coordinate transformation correction circuit 8. The position command signal is a signal indicating the coordinate position that indicates the irradiation position of the electron beam L1. The irradiation time command signal is a signal indicating the irradiation time of the electron beam L1.

[0025] The coordinate transformation correction circuit 8 generates an amplifier control signal corresponding to the commanded coordinate position and irradiation time based on the received position command signal and irradiation time command signal. Based on the generated amplifier control signal, the coordinate transformation correction circuit 8 operates the deflection amplifier 3. As a result, the deflection amplifier 3 deflects the electron beam L1 irradiated from the electron gun 2 to the commanded coordinate position on the stage 6.

[0026] [First irradiation pattern] Next, a first irradiation pattern, which shows a first example of the beam irradiation procedure performed by the control device 30, will be described with reference to Figure 3. Figure 3 illustrates the first irradiation pattern, which shows the beam irradiation procedure.

[0027] The points irradiated by the electron beam L1 shown in Figure 3 are aligned in a first direction X parallel to the horizontal and a second direction Y parallel to the horizontal and approximately perpendicular to the first direction X. In Figure 3, the first direction X is the left-right direction, and the second direction Y is the up-down direction. Note that the points irradiated by the electron beam L1 are not limited to being aligned along two directions that intersect approximately perpendicularly; for example, they may be aligned along two directions that intersect at any angle.

[0028] Hereafter, points before irradiation with electron beam L1 will be referred to as "unirradiated points." The first irradiation pattern involves irradiating the unirradiated points, which are aligned along the first direction X, from left to right with electron beam L1. As shown in Figure 3, above and below the row of unirradiated points irradiated with electron beam L1, there are unirradiated points aligned along the first direction X.

[0029] The control device 30 controls the beam deflection unit 10 to irradiate the electron beam L1 to positions corresponding to the first irradiation pattern. The first irradiation pattern irradiates the unirradiated points aligned along the first direction X with the electron beam L1 in order from left to right.

[0030] In the first irradiation pattern, the beam deflection unit 10 first irradiates an arbitrary unirradiated point 1 with the electron beam L1 (Procedure 1). Hereafter, the point irradiated with the electron beam L1 will be referred to as the "irradiation point." The unirradiated point that is scheduled to be irradiated with the electron beam L1 next will be referred to as the "next irradiation point." Irradiation point 1 melts and becomes liquefied as a result of being irradiated with the electron beam L1.

[0031] Next, the beam deflection unit 10 irradiates an unirradiated point n (not shown) that is at least not adjacent to the irradiation point 1 with the electron beam L1 (procedure 2). Irradiated point n melts and becomes liquefied due to the irradiation with the electron beam L1. On the other hand, irradiation point 1 solidifies and becomes solid. Hereafter, the point in the solidified state will be referred to as the "solidification point".

[0032] The reason the beam deflection unit 10 irradiates point n with the electron beam L1 is to allow time to pass for the irradiation point 1 to solidify to point 1. Therefore, the beam deflection unit 10 may irradiate multiple points that are at least not adjacent to the irradiation point 1 with the electron beam L1 before the irradiation point 1 solidifies to point 1. In this case, the multiple points are set to positions that are not adjacent to each other.

[0033] In the first irradiation pattern, the unirradiated point located to the right of solidification point 1 is designated as the next irradiation point 2. Next, before irradiating the next irradiation point 2 with the electron beam L1, the beam deflection unit 10 irradiates the solidification point 1 adjacent to the next irradiation point 2 with the electron beam L1 (step 3). As a result, solidification point 1 becomes activated. Hereafter, the point in the activated state will be referred to as the "activated point". Furthermore, the step of irradiating the solidification point with an electron beam to activate it corresponds to the activation step according to the present invention.

[0034] The activated state is a state in which a solidified material is heated by the electron beam L1. The material in the activated state may be in a molten, liquefied state, or it may remain in a solidified state. By making the solidified point 1 adjacent to the irradiation point 2 the activated point 1, the irradiation point 2 irradiated by the electron beam L1 becomes easier to heat.

[0035] Next, the beam deflection unit 10 irradiates the next irradiation point 2 with the electron beam L1 (procedure 4). Irradiation point 2 melts and becomes liquefied due to the irradiation of the electron beam L1. At this time, the active point 1, which is in an active state, does not inhibit the melting of irradiation point 2. This allows irradiation point 2 to be melted appropriately. In addition, the bond between active point 1 and irradiation point 2 becomes stronger than that between solidification point 1 and active point 1. As a result, the quality of the fabricated three-dimensional structure can be improved.

[0036] Next, the beam deflection unit 10 irradiates an unirradiated point m (not shown) located at a distance from the irradiation point 2, at least not adjacent to it, with the electron beam L1 (step 5). Irradiated point m melts and becomes liquefied due to the irradiation with the electron beam L1. Meanwhile, the active point 1 and irradiation point 2 solidify into solidification point 1 and solidification point 2.

[0037] Next, the beam deflection unit 10 irradiates the solidification point 2 adjacent to the next irradiation point 3, which is located to the right of the solidification point 2, with the electron beam L1 (step 6). As a result, the solidification point 2 becomes activated.

[0038] Subsequently, the beam deflection unit 10 irradiates the next irradiation point 3 with the electron beam L1. In this way, from step 5 onward, the next irradiation point is moved one position to the right each time, and the irradiation with the electron beam L1 is repeated in the same manner as in steps 2 to 4.

[0039] [Second irradiation pattern] Next, a second irradiation pattern, which shows a second example of the beam irradiation procedure performed by the control device 30, will be described with reference to Figure 4. Figure 4 illustrates a second irradiation pattern, showing a second example of the beam irradiation procedure.

[0040] The points irradiated with the electron beam L1 shown in Figure 4 are aligned in the first direction X and the second direction Y. The control device 30 controls the beam deflection unit 10 to irradiate the electron beam L1 to positions corresponding to the second irradiation pattern. The second irradiation pattern irradiates the unirradiated points aligned along the first direction X with the electron beam L1 from left to right. As shown in Figure 4, below the row of unirradiated points irradiated with the electron beam L1, there are unirradiated points aligned along the first direction X. Above the row of unirradiated points irradiated with the electron beam L1, there are solidification points aligned along the first direction X.

[0041] In the second irradiation pattern, the beam deflection unit 10 first irradiates an arbitrary unirradiated point 1 with the electron beam L1 (Procedure 1). The top row of points adjacent to the unirradiated point 1 are solidification points. Irradiated point 1 melts and becomes liquefied due to irradiation with the electron beam L1.

[0042] Next, the beam deflection unit 10 irradiates an unirradiated point n (not shown) that is at least not adjacent to the irradiation point 1 with the electron beam L1 (step 2). Irradiated point n melts and becomes liquefied due to the irradiation with the electron beam L1. On the other hand, irradiation point 1 solidifies and becomes solidification point 1.

[0043] In the second irradiation pattern, the unirradiated point located to the right of solidification point 1 is designated as the next irradiation point 3. Next, before irradiating the next irradiation point 3 with electron beam L1, the beam deflection unit 10 irradiates solidification point 2, which is adjacent to and above the next irradiation point 3, with electron beam L1. Furthermore, the beam deflection unit 10 irradiates solidification point 1, which is adjacent to and to the left of the next irradiation point 3, with electron beam L1 (step 3). As a result, solidification point 1 and solidification point 2 become active point 1 and active point 2.

[0044] Solidification point 2 solidified earlier than solidification point 1. In the second irradiation pattern, electron beam L1 is irradiated sequentially, starting with the solidification points that solidified the oldest. This shortens the time required to activate multiple solidification points, allowing for efficient formation of active points.

[0045] Next, the beam deflection unit 10 irradiates the next irradiation point 3 with the electron beam L1 (procedure 4). Irradiation point 3 melts and becomes liquefied due to the irradiation of the electron beam L1. At this time, active points 1 and 2, which are in an active state, do not inhibit the melting of irradiation point 3. This allows irradiation point 3 to be melted appropriately. In addition, the bonding state between active points 1 and 2 and irradiation point 3 becomes stronger than that between solidified points 1 and 2. As a result, the quality of the fabricated three-dimensional structure can be improved.

[0046] Next, the beam deflection unit 10 irradiates an unirradiated point m (not shown) located at a distance from the irradiation point 3, at least not adjacent to it, with the electron beam L1 (step 5). Irradiated point m melts and becomes liquefied due to the irradiation with the electron beam L1. On the other hand, active point 1, active point 2 and irradiation point 3 solidify and become solidification point 1, solidification point 2, and solidification point 3.

[0047] In the second irradiation pattern, the unirradiated point located to the right of solidification point 3 is designated as the next irradiation point 5. Next, before irradiating the next irradiation point 5 with electron beam L1, the beam deflection unit 10 irradiates solidification point 4, which is adjacent to and above the next irradiation point 5, with electron beam L1. The beam deflection unit 10 also irradiates solidification point 3, which is adjacent to and to the left of the next irradiation point 5, with electron beam L1 (procedure 6). As a result, solidification points 3 and 4 become active points 3 and 4.

[0048] Subsequently, the beam deflection unit 10 irradiates the next irradiation point 5 with the electron beam L1. In this way, from step 5 onward, the next irradiation point is shifted one position to the right each time, and the irradiation with the electron beam L1 is repeated in the same manner as in steps 2 to 4.

[0049] In addition, in step 1 of the second irradiation pattern, the beam deflection unit 10 may irradiate the solidification point located above the unirradiated point 1 with the electron beam L1 before irradiating the unirradiated point 1 with the electron beam L1. In this case, the solidification point located above the unirradiated point 1 becomes the active point and does not inhibit the melting of the irradiated point 1. As a result, the irradiated point 1 can be properly melted.

[0050] [Third irradiation pattern] Next, a third irradiation pattern, which shows a third example of the beam irradiation procedure performed by the control device 30, will be described with reference to Figure 5. Figure 5 illustrates a third irradiation pattern, showing a third example of the beam irradiation procedure.

[0051] The points irradiated with the electron beam L1 shown in Figure 5 are aligned in the first direction X and the second direction Y. The control device 30 controls the beam deflection unit 10 to irradiate the electron beam L1 to positions corresponding to the third irradiation pattern. The third irradiation pattern irradiates the unirradiated points aligned along the first direction X with the electron beam L1 from left to right. As shown in Figure 5, solidification points are aligned along the first direction X above and below the row of unirradiated points irradiated with the electron beam L1.

[0052] In the third irradiation pattern, the beam deflection unit 10 first irradiates an arbitrary unirradiated point 1 with the electron beam L1 (procedure 1). The upper and lower rows of points adjacent to the unirradiated point 1 are solidification points. Irradiated point 1 melts and becomes liquefied due to irradiation with the electron beam L1.

[0053] Next, the beam deflection unit 10 irradiates an unirradiated point n (not shown) that is at least not adjacent to the irradiation point 1 with the electron beam L1 (step 2). Irradiated point n melts and becomes liquefied due to the irradiation with the electron beam L1. On the other hand, irradiation point 1 solidifies and becomes solidification point 1.

[0054] In the third irradiation pattern, the unirradiated point located to the right of solidification point 1 is designated as the next irradiation point 4. Next, before irradiating the next irradiation point 4 with electron beam L1, the beam deflection unit 10 irradiates solidification point 2, which is adjacent to and above the next irradiation point 4, with electron beam L1. The beam deflection unit 10 also irradiates solidification point 3, which is adjacent to and below the next irradiation point 4, with electron beam L1. Furthermore, the beam deflection unit 10 irradiates solidification point 1, which is adjacent to and to the left of the next irradiation point 4, with electron beam L1 (step 3). As a result, solidification points 1 to 3 become active points 1 to 3.

[0055] Solidification point 2 solidified earlier than solidification points 1 and 3. Also, solidification point 3 solidified earlier than solidification point 1. In the third irradiation pattern, electron beam L1 is irradiated sequentially to the solidification points in the order they solidified, starting with the oldest solidification points. This shortens the time required to activate multiple solidification points, allowing for efficient formation of active points.

[0056] Next, the beam deflection unit 10 irradiates the next irradiation point 4 with the electron beam L1 (procedure 4). Irradiation point 4 melts and becomes liquefied due to the irradiation with the electron beam L1. At this time, the active points 1-3, which are in an active state, do not inhibit the melting of irradiation point 4. This allows irradiation point 4 to be melted appropriately. In addition, the bond between active points 1-3 and irradiation point 4 becomes stronger than that between solidified points 1-3. As a result, the quality of the fabricated three-dimensional structure can be improved.

[0057] Next, the beam deflection unit 10 irradiates an unirradiated point m (not shown) located at a distance from the irradiation point 4, at least not adjacent to it, with the electron beam L1 (step 5). Irradiated point m melts and becomes liquefied due to the irradiation with the electron beam L1. On the other hand, active points 1-3 and irradiation point 4 solidify and become solidified points 1-4.

[0058] In the third irradiation pattern, the unirradiated point located to the right of solidification point 4 is designated as the next irradiation point 7. Next, before irradiating the next irradiation point 7 with electron beam L1, the beam deflection unit 10 irradiates solidification point 5, which is adjacent to and above the next irradiation point 7, with electron beam L1. The beam deflection unit 10 also irradiates solidification point 6, which is adjacent to and below the next irradiation point 7, with electron beam L1. Furthermore, the beam deflection unit 10 irradiates solidification point 4, which is adjacent to and to the left of the next irradiation point 7, with electron beam L1 (step 6). As a result, solidification points 4-6 become active points 4-6.

[0059] Subsequently, the beam deflection unit 10 irradiates the next irradiation point 7 with the electron beam L1. In this way, from step 5 onward, the next irradiation point is shifted one position to the right each time, and the irradiation with the electron beam L1 is repeated in the same manner as in steps 2 through 4.

[0060] In addition, in step 1 of the third irradiation pattern, the beam deflection unit 10 may irradiate the solidification point located above and below the unirradiated point 1 with the electron beam L1 before irradiating the unirradiated point 1 with the electron beam L1. In this case, the two solidification points located above and below the unirradiated point 1 become the active points of 2 and do not hinder the melting of the irradiated point 1. As a result, the irradiated point 1 can be properly melted.

[0061] [Fourth irradiation pattern] Next, a fourth irradiation pattern, which shows a fourth example of the beam irradiation procedure performed by the control device 30, will be described with reference to Figure 6. Figure 6 illustrates the fourth irradiation pattern, which shows a fourth example of the beam irradiation procedure.

[0062] The points irradiated with the electron beam L1 shown in Figure 6 are aligned in the first direction X and the second direction Y. The control device 30 controls the beam deflection unit 10 to irradiate the electron beam L1 to positions corresponding to the fourth irradiation pattern. The fourth irradiation pattern irradiates the unirradiated points aligned along the first direction X with the electron beam L1 from left to right. As shown in Figure 6, below the row of unirradiated points irradiated with the electron beam L1, there are unirradiated points aligned along the first direction X. Above the row of unirradiated points irradiated with the electron beam L1, there are solidification points aligned along the first direction X.

[0063] In the fourth irradiation pattern, the beam deflection unit 10 first irradiates an arbitrary unirradiated point 1 with the electron beam L1 (procedure 1). The top row of points adjacent to the unirradiated point 1 are solidification points. Irradiated point 1 melts and becomes liquefied due to irradiation with the electron beam L1.

[0064] Next, the beam deflection unit 10 irradiates an unirradiated point n (not shown) that is at least not adjacent to the irradiation point 1 with the electron beam L1 (step 2). Irradiated point n melts and becomes liquefied due to the irradiation with the electron beam L1. On the other hand, irradiation point 1 solidifies and becomes solidification point 1.

[0065] In the fourth irradiation pattern, the unirradiated point located to the right of solidification point 1 is designated as the next irradiation point 3. Next, before irradiating the next irradiation point 3 with electron beam L1, the beam deflection unit 10 irradiates solidification point 2, which is adjacent to and above the next irradiation point 3, with electron beam L1 (procedure 3). As a result, solidification point 2 becomes active point 2.

[0066] Next, the beam deflection unit 10 irradiates the next irradiation point 3 with the electron beam L1 (procedure 4). Irradiation point 3 melts and becomes liquefied due to the irradiation with the electron beam L1. At this time, the active point 2, which is in an active state, does not inhibit the melting of irradiation point 3. This allows irradiation point 3 to be melted appropriately. In addition, the bond between active point 2 and irradiation point 3 becomes stronger than that between solidification point 2. As a result, the quality of the fabricated three-dimensional structure can be improved.

[0067] Next, the beam deflection unit 10 irradiates an unirradiated point m (not shown) located at a distance from the irradiation point 3, at least not adjacent to it, with the electron beam L1 (step 5). The irradiation point m melts and becomes liquefied due to the irradiation with the electron beam L1. Meanwhile, the active point 2 and the irradiation point 3 solidify into solidification points 2 and 3.

[0068] In the fourth irradiation pattern, the unirradiated point located to the right of solidification point 3 is designated as the next irradiation point 5. Next, before irradiating the next irradiation point 5 with electron beam L1, the beam deflection unit 10 irradiates solidification point 4, which is adjacent to and above the next irradiation point 5, with electron beam L1 (procedure 6). As a result, solidification point 4 becomes active point 4.

[0069] Subsequently, the beam deflection unit 10 irradiates the next irradiation point 5 with the electron beam L1. In this way, from step 5 onward, the next irradiation point is moved one position to the right each time, and the irradiation with the electron beam L1 is repeated in the same manner as in steps 2 to 4.

[0070] In addition, in step 1 of the fourth irradiation pattern, the beam deflection unit 10 may irradiate the solidification point located above the unirradiated point 1 with the electron beam L1 before irradiating the unirradiated point 1 with the electron beam L1. In this case, the solidification point located above the unirradiated point 1 becomes the active point and does not inhibit the melting of the irradiated point 1. As a result, the irradiated point 1 can be properly melted.

[0071] [Fifth irradiation pattern] Next, a fifth irradiation pattern, which shows a fifth example of the beam irradiation procedure performed by the control device 30, will be described with reference to Figure 7. Figure 7 illustrates the fifth irradiation pattern, which shows a fifth example of the beam irradiation procedure.

[0072] The points irradiated with the electron beam L1 shown in Figure 7 are aligned in the first direction X and the second direction Y. The control device 30 controls the beam deflection unit 10 to irradiate the electron beam L1 to positions corresponding to the fifth irradiation pattern. The fifth irradiation pattern irradiates the unirradiated points aligned along the first direction X with the electron beam L1 from left to right. As shown in Figure 7, solidification points are aligned along the first direction X above and below the row of unirradiated points irradiated with the electron beam L1.

[0073] In the fifth irradiation pattern, the beam deflection unit 10 first irradiates an arbitrary unirradiated point 1 with the electron beam L1 (procedure 1). The upper and lower rows of points adjacent to the unirradiated point 1 are solidification points. Irradiated point 1 melts and becomes liquefied due to irradiation with the electron beam L1.

[0074] Next, the beam deflection unit 10 irradiates an unirradiated point n (not shown) that is at least not adjacent to the irradiation point 1 with the electron beam L1 (step 2). Irradiated point n melts and becomes liquefied due to the irradiation with the electron beam L1. On the other hand, irradiation point 1 solidifies and becomes solidification point 1.

[0075] In the fifth irradiation pattern, the unirradiated point located to the right of solidification point 1 is designated as the next irradiation point 4. Next, before irradiating the next irradiation point 4 with the electron beam L1, the beam deflection unit 10 irradiates solidification point 2, which is adjacent to and above the next irradiation point 4, with the electron beam L1. Furthermore, the beam deflection unit 10 irradiates solidification point 3, which is adjacent to and below the next irradiation point 4, with the electron beam L1 (step 3). As a result, solidification points 2 and 3 become active points 2 and 3.

[0076] Solidification point 2 solidified earlier than solidification point 3. In the fifth irradiation pattern, electron beam L1 is irradiated sequentially, starting with the solidification points that solidified the oldest. This shortens the time required to activate multiple solidification points, allowing for efficient formation of active points.

[0077] Next, the beam deflection unit 10 irradiates the next irradiation point 4 with the electron beam L1 (procedure 4). Irradiation point 4 melts and becomes liquefied due to the irradiation with the electron beam L1. At this time, the active points 2 and 3, which are in an active state, do not inhibit the melting of irradiation point 4. Furthermore, the bond between active points 2 and 3 and irradiation point 4 becomes stronger than that between solidified points 2 and 3. This allows irradiation point 4 to be properly melted. As a result, the quality of the fabricated three-dimensional structure can be improved.

[0078] Next, the beam deflection unit 10 irradiates an unirradiated point m (not shown) located at a distance from the irradiation point 4, at least not adjacent to it, with the electron beam L1 (step 5). Irradiated point m melts and becomes liquefied due to the irradiation with the electron beam L1. On the other hand, active points 2-3 and irradiation point 4 solidify and become solidification points 2-4.

[0079] In the fifth irradiation pattern, the unirradiated point located to the right of solidification point 4 is designated as the next irradiation point 7. Next, before irradiating the next irradiation point 7 with electron beam L1, the beam deflection unit 10 irradiates solidification point 5, which is adjacent to and above the next irradiation point 7, with electron beam L1. Furthermore, the beam deflection unit 10 irradiates solidification point 6, which is adjacent to and below the next irradiation point 7, with electron beam L1 (procedure 6). As a result, solidification points 5-6 become active points 5-6.

[0080] Subsequently, the beam deflection unit 10 irradiates the next irradiation point 7 with the electron beam L1. In this way, from step 5 onward, the next irradiation point is shifted one position to the right each time, and the irradiation with the electron beam L1 is repeated in the same manner as in steps 2 through 4.

[0081] In addition, in step 1 of the fifth irradiation pattern, the beam deflection unit 10 may irradiate the solidification point located above and below the unirradiated point 1 with the electron beam L1 before irradiating the unirradiated point 1 with the electron beam L1. In this case, the two solidification points located above and below the unirradiated point 1 become the two active points and do not hinder the melting of the irradiated point 1. As a result, the irradiated point 1 can be properly melted.

[0082] [6th irradiation pattern] Next, a sixth irradiation pattern, which shows a sixth example of the beam irradiation procedure performed by the control device 30, will be described with reference to Figure 8. Figure 8 illustrates the sixth irradiation pattern, which shows a sixth example of the beam irradiation procedure.

[0083] The points irradiated by the electron beam L1 shown in Figure 8 are aligned in the first direction X and the second direction Y. The control device 30 controls the beam deflection unit 10 to irradiate the electron beam L1 to positions corresponding to the sixth irradiation pattern. The sixth irradiation pattern irradiates multiple unirradiated points, which make up two adjacent rows in the second direction Y, with the electron beam L1 from left to right. The multiple unirradiated points in each row are aligned along the first direction X.

[0084] In the sixth irradiation pattern, the beam deflection unit 10 first irradiates an arbitrary unirradiated point 1 with the electron beam L1 (procedure 1). The irradiated point 1 melts and becomes liquefied due to the irradiation with the electron beam L1.

[0085] Next, the beam deflection unit 10 irradiates an unirradiated point n (not shown) that is at least not adjacent to the irradiation point 1 with the electron beam L1 (step 2). Irradiated point n melts and becomes liquefied due to the irradiation with the electron beam L1. Meanwhile, irradiation point 1 becomes solidified point 1.

[0086] Next, the beam deflection unit 10 irradiates the unirradiated point 2 adjacent to the solidification point 1 with the electron beam L1. The unirradiated point 2 is located to the right of the unirradiated point above the solidification point 1. That is, the unirradiated point 2 is adjacent to the solidification point 1 in an oblique direction. The irradiated point 2 melts and becomes liquefied when irradiated with the electron beam L1. Subsequently, the beam deflection unit 10 irradiates the solidification point 1 with the electron beam L1 (step 3). As a result, the solidification point 1 becomes the active point 1.

[0087] Next, the beam deflection unit 10 irradiates the unirradiated point 3 adjacent to the liquefied irradiation point 2 and the active point 1 with the electron beam L1 (step 4). That is, before irradiating the next irradiation point 3 with the electron beam L1, the beam deflection unit 10 irradiates the solidified point 1 adjacent to the next irradiation point 3 and located to the left of the next irradiation point 3 with the electron beam L1.

[0088] Irradiation point 3 melts and becomes liquefied when irradiated with electron beam L1. At this time, active point 1, which is in an active state, and irradiation point 2, which is in a liquefied state, do not inhibit the melting of irradiation point 3. This allows irradiation point 3 to be properly melted. In addition, the bond between active point 1 and irradiation point 3 becomes stronger than that between solidified point 1 and irradiation point 3. As a result, the quality of the fabricated three-dimensional structure can be improved.

[0089] Next, the beam deflection unit 10 irradiates an unirradiated point m (not shown) located at a distance from the irradiation point 3, at least not adjacent to it, with the electron beam L1 (step 5). Irradiated point m melts and becomes liquefied due to the irradiation with the electron beam L1. Meanwhile, active point 1, irradiation point 2, and irradiation point 3 solidify and become solidified points 1 to 3.

[0090] Next, the beam deflection unit 10 irradiates the unirradiated point 4, located to the right of the solidification point 2, with the electron beam L1. Irradiated point 4 melts and becomes liquefied due to the irradiation with the electron beam L1. Subsequently, the beam deflection unit 10 irradiates the solidification point 3 with the electron beam L1 (step 6). As a result, the solidification point 3 becomes the active point 3.

[0091] Subsequently, the beam deflection unit 10 irradiates the unirradiated point 5, located to the right of the active point 3, with the electron beam L1. In this way, from step 5 onward, the irradiation point is moved alternately between the upper and lower rows, and one position to the right at a time, and the irradiation with the electron beam L1 is repeated in the same manner as in steps 2 to 4.

[0092] [7th irradiation pattern] Next, a seventh irradiation pattern, which shows a seventh example of the beam irradiation procedure performed by the control device 30, will be described with reference to Figure 9. Figure 9 illustrates the seventh irradiation pattern, which shows a seventh example of the beam irradiation procedure.

[0093] The points irradiated by the electron beam L1 shown in Figure 9 are aligned in the first direction X and the second direction Y. The control device 30 controls the beam deflection unit 10 to irradiate the electron beam L1 to positions corresponding to the seventh irradiation pattern. The seventh irradiation pattern irradiates multiple unirradiated points, which make up three columns aligned in the second direction Y, from left to right. The multiple unirradiated points in each column are aligned along the first direction X.

[0094] In the seventh irradiation pattern, the beam deflection unit 10 first irradiates an arbitrary unirradiated point 1 with the electron beam L1 (procedure 1). The unirradiated point 1 is located in the middle of the three rows of unirradiated points. Irradiated point 1 melts and becomes liquefied due to the irradiation with the electron beam L1.

[0095] Next, the beam deflection unit 10 irradiates an unirradiated point n (not shown) that is at least not adjacent to the irradiation point 1 with the electron beam L1 (step 2). Irradiated point n melts and becomes liquefied due to the irradiation with the electron beam L1. Meanwhile, irradiation point 1 becomes solidified point 1.

[0096] Next, the beam deflection unit 10 irradiates the unirradiated point 2 adjacent to the solidification point 1 with the electron beam L1. The unirradiated point 2 is located to the right of the unirradiated point above the solidification point 1. That is, the unirradiated point 2 is adjacent to the solidification point 1 in an oblique direction. The irradiated point 2 melts and becomes liquefied when irradiated with the electron beam L1.

[0097] Next, the beam deflection unit 10 irradiates the unirradiated point 3 adjacent to the solidification point 1 with the electron beam L1. The unirradiated point 2 is located to the right of the unirradiated point below the solidification point 1. That is, the unirradiated point 3 is adjacent to the solidification point 1 in an oblique direction. The irradiated point 3 melts and becomes liquefied when irradiated with the electron beam L1. Furthermore, the beam deflection unit 10 irradiates the solidification point 1 with the electron beam L1 (step 3). As a result, the solidification point 1 becomes the active point 1.

[0098] Next, the beam deflection unit 10 irradiates the unirradiated point 4 adjacent to the liquefied irradiation points 2 and 3 and the active point 1 with the electron beam L1 (procedure 4). That is, before irradiating the next irradiation point 4 with the electron beam L1, the beam deflection unit 10 irradiates the solidified point 1 adjacent to the next irradiation point 4 and located to the left of the next irradiation point 4 with the electron beam L1.

[0099] Irradiation point 4 melts and becomes liquefied when irradiated with electron beam L1. At this time, active point 1, which is in an active state, and irradiation points 2 and 3, which are in a liquefied state, do not inhibit the melting of irradiation point 4. This allows irradiation point 4 to be properly melted. In addition, the bond between active point 1 and irradiation point 3 becomes stronger than that between active point 1 and solidified point 1. As a result, the quality of the fabricated three-dimensional structure can be improved.

[0100] Next, the beam deflection unit 10 irradiates an unirradiated point m (not shown) located at a distance from the irradiation point 4, at least not adjacent to it, with the electron beam L1 (step 5). Irradiated point m melts and becomes liquefied due to the irradiation with the electron beam L1. Meanwhile, the active point 1 and irradiation points 2-4 solidify and become solidified points 1-4.

[0101] Next, the beam deflection unit 10 irradiates the unirradiated point 5, located to the right of the solidification point 2, with the electron beam L1. Irradiated point 5 melts and becomes liquefied due to the irradiation with the electron beam L1. The beam deflection unit 10 also irradiates the unirradiated point 6, located to the right of the solidification point 3, with the electron beam L1. Irradiated point 6 melts and becomes liquefied due to the irradiation with the electron beam L1. Furthermore, the beam deflection unit 10 irradiates the solidification point 4 with the electron beam L1 (step 6). As a result, the solidification point 4 becomes the active point 4.

[0102] Subsequently, the beam deflection unit 10 irradiates the unirradiated point 7, located to the right of the active point 4, with the electron beam L1. In this way, from step 5 onward, the next irradiation point is moved alternately through the rows in the order of top, bottom, and middle, and one by one to the right, and the irradiation with the electron beam L1 is repeated in the same manner as in steps 2 to 4.

[0103] [Irradiation Pattern 8] Next, an eighth irradiation pattern, which shows an eighth example of the beam irradiation procedure performed by the control device 30, will be described with reference to Figure 10. Figure 10 illustrates the eighth irradiation pattern, which shows an eighth example of the beam irradiation procedure.

[0104] The points irradiated by the electron beam L1 shown in Figure 10 are aligned in the first direction X and the second direction Y. The control device 30 controls the beam deflection unit 10 to irradiate the electron beam L1 to positions corresponding to the eighth irradiation pattern. The eighth irradiation pattern irradiates the electron beam L1 sequentially from the top row of multiple rows aligned in the second direction Y. The multiple rows aligned in the second direction Y are, from top to bottom, the first horizontal row, the second horizontal row, the third horizontal row, and the fourth horizontal row. Multiple unirradiated points in each horizontal row are aligned along the first direction X.

[0105] In the eighth irradiation pattern, the beam deflection unit 10 first irradiates an unirradiated point 1 located at the left end of the first row with the electron beam L1. Next, the beam deflection unit 10 irradiates an unirradiated point 2 located at a distance from the irradiated point 1. There are seven unirradiated points lined up between unirradiated point 2 and unirradiated point 1. Next, the beam deflection unit 10 irradiates an unirradiated point 3 located at a distance from the irradiated point 2. There are seven unirradiated points lined up between unirradiated point 3 and unirradiated point 2.

[0106] The beam deflection unit 10 irradiates the unirradiated points with the electron beam L1 in the order of the numbers shown in Figure 10. The irradiated points are gradually cooled and become solidified. For example, when the electron beam L1 is irradiated onto the unirradiated point 30, the irradiated point 21 is at solidified point 1. On the other hand, irradiated points 22 to 29 are in the process of changing from a liquefied state to a solidified state.

[0107] The beam deflection unit 10, for example, irradiates the solidification point 10 adjacent to the unirradiated point 30 (next irradiation point 30) with the electron beam L1 before irradiating the unirradiated point 30 with the electron beam L1. As a result, the solidification point 10 becomes an active point 10. Subsequently, the beam deflection unit 10 irradiates the unirradiated point 30 with the electron beam L1. At this time, the active point 10 and the liquefied irradiation point 27 do not hinder the melting of the irradiation point 30. This allows the irradiation point 30 to be properly melted. In addition, the bond between the active point 10 and the irradiation point 30 becomes stronger than that between the solidification point 10 and the irradiation point 30. As a result, the quality of the fabricated three-dimensional structure can be improved.

[0108] The beam deflection unit 10, for example, irradiates the solidification points 19 and 22 with the electron beam L1 before irradiating the unirradiated point 39 (the next irradiation point 39). As a result, the solidification points 19 and 22 become active points 19 and 22. Subsequently, the beam deflection unit 10 irradiates the unirradiated point 39 with the electron beam L1. At this time, the active points 19 and 22 and the liquefied irradiation point 37 do not hinder the melting of the irradiation point 39. This allows the irradiation point 39 to be properly melted. In addition, the bond between the active points 19 and 22 and the irradiation point 39 becomes stronger than that between the solidification points 19 and 22. As a result, the quality of the fabricated three-dimensional structure can be improved.

[0109] Embodiments of the present invention have been described above. However, the present invention is not limited to the embodiments described above, and various modifications can be made without departing from the gist of the invention as described in the claims. For example, the embodiments described above are intended to explain the present invention in an easy-to-understand and detailed manner, and the present invention is not necessarily limited to having all the configurations described. Furthermore, it is possible to replace a part of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add the configuration of another embodiment to the configuration of one embodiment. In addition, it is possible to add, delete, or replace parts of the configuration of each embodiment with other configurations.

[0110] In the first to eighth irradiation patterns according to the embodiments described above, before irradiating the next irradiation point with the electron beam L1, at least one solidification point adjacent to the next irradiation point is irradiated with the electron beam L1 to activate the solidification point. However, in the electron beam irradiation pattern according to the present invention, the electron beam may be irradiated to the next irradiation point, and before that irradiation point becomes solidified, at least one solidification point adjacent to that irradiation point may be irradiated with the electron beam L1. In this case, since the solidification point irradiated with the electron beam L1 becomes active, the bonding state of the material can be made stronger than when the solidification point is not irradiated with the electron beam L1. As a result, the quality of the fabricated three-dimensional structure can be improved.

[0111] Furthermore, the electron beam irradiation pattern according to the present invention may involve irradiating a portion of the solidification points adjacent to the next irradiation point (for example, the first solidification point) with the electron beam, then irradiating the next irradiation point with the electron beam, and then irradiating another solidification point adjacent to the next irradiation point (for example, the second solidification point) with the electron beam. In this case as well, the next irradiation point can be appropriately melted, and the quality of the fabricated three-dimensional structure can be improved.

[0112] The first to eighth irradiation patterns according to the embodiments described above were explained using as an example points adjacent to the next irradiation point in the first direction X and the second direction Y. However, according to the present invention, points adjacent to the next irradiation point may also include points adjacent in directions inclined with respect to the first direction X and the second direction Y.

[0113] In the first to eighth irradiation patterns described above, the electron beam L1 is irradiated sequentially along a first direction X to unirradiated points. However, in the irradiation pattern according to the present invention, the electron beam L1 may be irradiated sequentially along a second direction Y to unirradiated points.

[0114] Furthermore, although the above-described embodiment described an example in which an electron gun 2 that emits an electron beam L1 is used as the beam emission unit, the invention is not limited to this. For example, an irradiation gun that emits a laser beam may be used as the beam emission unit according to the present invention. In this case, the laser beam may be irradiated onto the unirradiated points of the powder material M1 to melt and solidify them. [Explanation of symbols]

[0115] 1…Three-dimensional additive manufacturing apparatus, 2…Electron gun (beam emitter), 3…Deflection amplifier, 4…Lens, 5…Powder material storage, 6…Stage, 7…Powder layering arm, 8…Coordinate transformation correction circuit, 10…Beam deflection unit, 21…Emitter, 22…Extraction electrode, 23…Accelerating electrode, 24…Accelerating power supply, 30…Control unit, L1…Electron beam, M1…Powder material

Claims

1. A stage on which a powder layer made of powdered material is laid, A beam emission unit that emits a beam toward the powder layer spread on the stage, A beam deflection unit that deflects the beam emitted from the beam emission unit, The system includes a control unit for controlling the beam deflection section, When the point in the powder layer to be irradiated with the beam next is designated as the next irradiation point, and the point that has been irradiated with the beam and solidified is designated as the solidification point, the control unit controls the beam deflection unit to irradiate the beam to at least one of the solidification points adjacent to the next irradiation point before irradiating the next irradiation point, or to irradiate the beam to at least one of the solidification points adjacent to the next irradiation point before the next irradiation point solidifies after being irradiated with the beam. Three-dimensional additive manufacturing device.

2. The control unit, when there are two or more solidification points, causes the beam to irradiate all solidification points except the most recent one. The three-dimensional additive manufacturing apparatus according to claim 1.

3. The control unit causes the beam to irradiate the two solidification points that sandwich the next irradiation point. The three-dimensional additive manufacturing apparatus according to claim 1.

4. When the control unit irradiates two or more solidification points with the beam, it irradiates them in the order of the oldest solidification. The three-dimensional additive manufacturing apparatus according to claim 1.

5. When the control unit designates a point adjacent to the irradiation point (the point in the powder layer that has been irradiated with the beam) as the next irradiation point, it causes the beam to irradiate at least points that are not adjacent to the irradiation point during the waiting time until that irradiation point becomes the solidification point. The three-dimensional additive manufacturing apparatus according to claim 1.

6. The control unit irradiates the beam onto a first solidification point adjacent to the next irradiation point, then irradiates the beam onto the next irradiation point, and before the next irradiation point solidifies, irradiates the beam onto a second solidification point adjacent to the next irradiation point but different from the first solidification point. The three-dimensional additive manufacturing apparatus according to claim 1.

7. When the point on the powder layer spread on the stage to be irradiated with the beam next is defined as the next irradiation point, and the point where the beam has been irradiated and solidified is defined as the solidification point, An activation step in which the control unit controls the beam deflection unit to irradiate the beam to at least one solidification point adjacent to the next irradiation point, The process includes the control unit controlling the beam deflection unit to irradiate the beam onto the next irradiation point, The activation step is performed at least once before or after the irradiation step. Three-dimensional additive manufacturing method.

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