Vacuum liquid injection device and method for transferring a workpiece using this vacuum liquid injection device

Abstract

To provide a decompressed liquid injection device and a transfer method of a workpiece which efficiently perform liquid injection work to a workpiece under reduced pressure in a short time.SOLUTION: There is provided a decompressed liquid injection device which includes a decompression mechanism that can decompress the inside and discharge nozzle 6, 7 that can discharge liquid to a workpiece, in which the workpiece is arranged in one of a pair of chambers 1, 2 arranged in parallel with each other, which decompresses the inside of the one chamber by the decompression mechanism, performs the liquid injection work to the workpiece from the discharge nozzles 6, 7 in the one chamber that is decompressed, and performs the transfer work to the workpiece into the other chamber and the discharge work of the workpiece to the outside from the other chamber.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The first and second inventions of the present application relate to a vacuum liquid injection device for filling a workpiece with a relatively highly viscous liquid, and a workpiece transfer method using this vacuum liquid injection device.

Background Art

[0002] When filling a workpiece with a relatively highly viscous liquid such as an adhesive, a paint, or a semiconductor encapsulant, air is likely to be mixed into the fine gaps inside the workpiece. Therefore, when filling such a highly viscous liquid into a workpiece, a method of performing the filling inside a chamber whose interior is depressurized as shown in Patent Document 1 is known for the purpose of preventing air from being mixed into the liquid.

[0003]

Patent Document 1

Disclosure of the Invention

Problems to be Solved by the Invention

[0004] However, when using a conventional chamber as described above, it is necessary to set the interior of the chamber to normal pressure when transferring the workpiece into the chamber. And after installing the workpiece in the chamber at normal pressure, it is necessary to depressurize the interior of the chamber before performing the liquid discharge operation on the workpiece. Therefore, after completing the transfer of the workpiece, a depressurization operation must be performed.

[0005] Furthermore, after the liquid discharge operation on the workpiece is completed, in order to take out the workpiece from the chamber, an operation of returning the chamber from the depressurized state to normal pressure is required. Therefore, in a single liquid injection operation on a workpiece, a lot of time is spent on operations of changing the interior of the chamber from a depressurized state to a normal pressure state or from a normal pressure state to a depressurized state as described above. Thus, it takes a long time to complete the liquid injection operation on all workpieces, resulting in poor efficiency.

[0006] Therefore, the present invention aims to solve the above-mentioned problems and to perform liquid injection work into a workpiece under reduced pressure in a short amount of time and efficiently. [Means for solving the problem]

[0007] The first invention of this application is a depressurizing liquid injection device used for a pressure adjustment method in a depressurizing chamber of the second invention of this application, comprising a pair of end shutters that can airtightly seal a pair of openings provided at both ends and a depressurizing mechanism that can reduce the pressure inside, and comprising first and second chambers arranged in parallel with each other, first and second discharge nozzles that are assembled to the first and second chambers respectively and can discharge liquid to workpieces placed in the first and second chambers, a liquid supply device that can alternately supply liquid to the first and second discharge nozzles via first and second connecting pipes, and first and second transfer paths that penetrate the first and second chambers respectively and can transfer workpieces to and from the inside and outside of the first and second chambers.

[0008] Furthermore, the second invention of this application is a method for transferring a workpiece using the vacuum liquid injection device of the first invention, comprising a vacuum mechanism that can reduce the internal pressure and a discharge nozzle that can discharge liquid to the workpiece, and a pair of chambers arranged in parallel to each other, wherein the workpiece is placed in one of the chambers, the vacuum mechanism reduces the pressure in that chamber, and in the vacuum-reduced chamber, the liquid injection operation is performed from the discharge nozzle to the workpiece, while at the same time, the workpiece is transferred to the other chamber and / or discharged from the other chamber to the outside.

[0009] Furthermore, the first and second discharge nozzles may be equipped with a first valve and a second valve, respectively, for discharging and stopping the discharge of liquid from the first and second discharge nozzles.

[0010] Furthermore, the transfer of workpieces to and from the chambers of one or the other, and the discharge of workpieces, may be carried out using conveyors provided in the first and second transfer paths.

[0011] Furthermore, the first or second transport path may be configured such that a pair of sliding rails are installed between the first and second transport paths at the outer positions of both ends of the first and second chambers, and the workpiece is placed on the sliding rails, thereby allowing the workpiece to be selectively placed in either the first or second transport path. [Effects of the Invention]

[0012] As described above, the first and second inventions of this application provide first and second chambers, each of which is assembled with first and second discharge nozzles and first and second transfer paths, respectively, enabling the alternating transfer and discharge of workpieces to and from the first or second chamber, and the injection of liquid within the first or second chamber.

[0013] In other words, the first and second inventions of this application enable the alternating and repeated operation of transferring and discharging a workpiece in one of the first or second chambers while simultaneously injecting a liquid in the other chamber, and after the above series of operations are completed in both chambers, simultaneously injecting a liquid in one chamber while transferring and discharging a workpiece to and from the other chamber.

[0014] By performing this series of liquid injection operations, it is possible to inject liquid into the workpiece alternately and continuously without any time gap between chambers, thus eliminating the wasted time required for depressurization and depressurization operations within the chambers. Therefore, efficient liquid injection operations into the workpiece can be performed with a simple configuration. [Brief explanation of the drawing]

[0015] [Figure 1]A plan view showing Embodiment 1 of the first and second inventions of this application. [Figure 2] Side view of Example 1. [Figure 3] A conceptual diagram showing the state in which trays are placed on the third conveyor in Example 1. [Figure 4] A conceptual diagram showing the relationship between the liquid supply device of Example 1 and the first and second discharge nozzles. [Figure 5] A conceptual diagram showing the state in which the tray is placed on the sliding body in Example 1. [Example 1]

[0016] The first and second embodiments of the present invention, Embodiment 1, will be described below. First, as shown in Figure 1, (1) and (2) are a pair of roughly rectangular parallelepiped-shaped first and second chambers, and the first chamber (1) and the second chamber (2) are arranged in parallel to each other on a horizontally elongated mounting base (3) shown in Figure 2.

[0017] As shown in Figure 3, the first chamber (1) and the second chamber (2) are each equipped with a pair of openings (4) at both ends of the first chamber (1) and the second chamber (2) body, and a pair of end shutters (5) that allow the openings (4) to be airtightly sealed. The first chamber (1) and the second chamber (2) are also equipped with a depressurization mechanism (not shown) that allows the inside of the first chamber (1) and the second chamber (2) to be depressurized.

[0018] Furthermore, the first chamber (1) and the second chamber (2) are equipped with a first discharge nozzle (6) and a second discharge nozzle (7), respectively, for discharging liquid onto the workpiece (8), as shown in Figures 1 and 2. Inside the first discharge nozzle (6) and the second discharge nozzle (7) are a first valve and a second valve (not shown), respectively, for discharging and stopping the liquid from the first discharge nozzle (6) and the second discharge nozzle (7).

[0019] Further, the tip ends of the first discharge nozzle (6) and the second discharge nozzle (7) are arranged so as to face inward of the first chamber (1) and the second chamber (2) from the top plates of the first chamber (1) and the second chamber (2).

[0020] Further, when discharging liquid onto the work (8), the first discharge nozzle (6) and the second discharge nozzle (7) are respectively movably assembled to the first discharge body (11) and the second discharge body (12) provided in the first chamber (1) and the second chamber (2) so that liquid can be discharged onto a desired work (8) among the plurality of works (8) placed on the tray (10). Therefore, the first discharge nozzle (6) and the second discharge nozzle (7) can be appropriately moved in the horizontal direction and the vertical direction as required.

[0021] Further, as shown in FIG. 4, the first discharge nozzle (6) and the second discharge nozzle (7) can be communicated with a liquid supply device (15) through a first communication pipe (13) and a second communication pipe (14). As shown in FIGS. 1 and 2, this liquid supply device (15) is pivotally supported horizontally above the first chamber (1) and the second chamber (2) with a shaft support portion (16) as a fulcrum on a mounting table (3). Then, the liquid stored in the liquid supply device (15) can be alternately supplied to the first discharge nozzle (6) and the second discharge nozzle (7) through the first communication pipe (13) and the second communication pipe (14).

[0022] Also, as shown in FIG. 1, first transfer paths (17) and second transfer paths (18) that enable transfer of the work (8) into and out of the first chamber (1) and the second chamber (2) are laid through the first chamber (1) and the second chamber (2) respectively.

[0023] As shown in Fig. 1, the first transfer path (17) and the second transfer path (18) are composed of the first conveyor (20) which is the transfer source of the workpiece (8), a pair of second conveyors (21) provided between the first conveyor (20) and the first and second chambers (1) and (2), a pair of third conveyors (22) arranged in the first and second chambers (1) and (2), and a fourth conveyor (23) which is adjacent to the third conveyor (22) and arranged outside the first and second chambers (1) and (2).

[0024] And the first to fourth conveyors (20), (21), (22), and (23) are each composed of a pair of first conveyor rails (24), second conveyor rails (25), third conveyor rails (26), and fourth conveyor rails (27) arranged in parallel with intervals therebetween as shown in Fig. 1. And as shown in Fig. 1, slide rails (28) are respectively arranged in the central portion in the width direction between the pair of second conveyor rails (25) and third conveyor rails (26) in parallel with the second and third conveyor rails (25) and (26).

[0025] Also, as shown in Fig. 2, this slide rail (28) is arranged horizontally at a position lower than the height of the conveyor rail. And a sliding body (30) slidable along the slide rail (28) is engaged and arranged on this slide rail (28). This sliding body (30) is provided with a flat support plate (31) at its upper end, and this support plate (31) is made slidable in the vertical direction as appropriate by a drive mechanism (not shown).

[0026] As shown in Figure 1, a pair of sliding rails (32) are installed between the first transport path (17) and the second transport path (18) at the positions of the first conveyor (20) and the fourth conveyor (23), extending perpendicularly to the first transport path (17) and the second transport path (18). The first conveyor (20) is mounted on the first sliding rail (36) of this pair of sliding rails (32), and the fourth conveyor (23) is mounted on the second sliding rail (37), so as to be slidable along the first sliding rail (36) and the second sliding rail (37), respectively.

[0027] As a result, after placing the workpiece (8) on the first conveyor (20), the first conveyor (20) is slid along the first sliding rail (36), allowing the workpiece (8) to be selectively positioned at either the first transport path (17) or the second transport path (18). Furthermore, the workpiece (8) that has been transported on either the first transport path (17) or the second transport path (18) can be appropriately transported and positioned on the fourth conveyor (23) by sliding the fourth conveyor (23) along the second sliding rail (37).

[0028] The method for transporting workpieces (8) and the liquid injection operation into workpieces (8) using the vacuum liquid injection device configured as described above will be explained below. First, as shown in Figure 1, a tray (10) carrying multiple workpieces (8) is placed on the first conveyor (20) located in the second transport path (18). Then, the first conveyor (20) is transported along the first sliding rail (36) to the first transport path (17).

[0029] Subsequently, the first conveyor (20) and the second conveyor (21) on the first transfer path (17) are activated to move the tray (10) on the first conveyor (20) to the second conveyor (21). Then, one of the pair of end shutters (5) of the first chamber (1), the shutter (34) on the second conveyor (21) side, is opened. Then, the third conveyor (22) is activated to transfer and position the tray (10) onto the third conveyor (22) inside the first chamber (1) as shown in Figure 3. This completes the transfer of the workpiece (8) into the first chamber (1).

[0030] Next, the liquid injection operation into the workpiece (8) is performed. First, the pair of end shutters (5) of the first chamber (1) are closed, and the pressure inside the first chamber (1) is reduced to 1500 Pa using the pressure reduction mechanism. When discharging the liquid into the workpiece (8) within the working chamber, the pressure inside the working chamber is kept within the range of 1000 Pa to 3000 Pa.

[0031] Subsequently, the first discharge nozzle (6) shown in Figure 3 is moved downward, and the support plate (31) of the sliding body (30) located below the tray (10) is slid upward above the third conveyor (22). As a result, the tray (10) is positioned above the third conveyor (22), as shown in Figure 5. The liquid supply device (15) is also rotated and positioned above the first chamber (1), as shown by the dashed line in Figures 1 and 2. Then, the first valve of the first discharge nozzle (6) is opened, and the liquid is injected from the first discharge nozzle (6) to the workpiece (8).

[0032] Here, by sliding the sliding body (30) along the slide rail (28) by a drive mechanism (not shown) over a desired distance, the workpiece (8) to be discharged can be precisely positioned at the first discharge nozzle (6). Therefore, liquid injection operations can be performed sequentially into each workpiece (8) corresponding to each workpiece (8) on the tray (10).

[0033] In this way, by performing the liquid injection operation onto the workpiece (8) with the tray (10) supported by the support plate (31) of the sliding body (30), the movement of the tray (10) can be finely adjusted, making it less likely for misalignment to occur between the first discharge nozzle (6) and the workpiece (8) into which the liquid is injected, and enabling accurate discharge of liquid onto the workpiece (8) by the first discharge nozzle (6).

[0034] After the liquid injection operation into all the workpieces (8) on the tray (10) is completed, the first valve of the first discharge nozzle (6) is closed and the first discharge nozzle (6) is returned to its original position. The support plate (31) of the sliding body (30) is also returned to its original position and the tray (10) is placed on the third conveyor (22). Subsequently, the reduced pressure in the first chamber (1) is released and the pressure is returned to normal, thereby completing the liquid injection operation of the present invention.

[0035] Furthermore, while performing the liquid injection operation in the first chamber (1) as described above, the workpiece (8) is transferred in the second chamber (2) as follows. First, a tray (10) with multiple workpieces (8) is placed on the first conveyor (20). Then, the first conveyor (20), which has been moved to the first transfer path (17) as described above, is slid along the first sliding rail (36) to the second transfer path (18).

[0036] Subsequently, the first conveyor (20) and the second conveyor (21) on the second transfer path (18) are activated to move the tray (10) on the first conveyor (20) to the position of the second conveyor (21). Then, the shutter (34) at one end of the second chamber (2) on the second conveyor (21) side is opened, and the third conveyor (22) is activated to transfer and position the tray (10) onto the third conveyor (22) inside the second chamber (2) as shown in Figure 3. This completes the transfer of the workpiece (8) to the second chamber (2). After that, a liquid injection operation similar to the liquid injection operation in the first chamber (1) is performed inside the second chamber (2).

[0037] When the transfer of the workpiece (8) in the second chamber (2) is completed, the liquid injection operation in the first chamber (1) is also completed. Therefore, it is possible to immediately switch the transfer of liquid from the liquid supply device (15) to the first discharge nozzle (6) to the second discharge nozzle (7). This switch makes it possible to quickly start the liquid injection operation in the second chamber (2) as described above.

[0038] Furthermore, as described above, while the liquid injection operation in the second chamber (2) is performed, the workpiece (8) whose liquid injection operation has been completed in the first chamber (1) is discharged as described above. First, the fourth conveyor (23) is positioned along the second sliding rail (37) on the first transfer path (17) side.

[0039] Subsequently, the shutter (35) at the other end of the first chamber (1) on the fourth conveyor (23) side is slid upward to open the opening (4), and then the third conveyor (22) and the fourth conveyor (23) are activated. As a result, the tray (10) on the third conveyor (22) moves through the opening (4) to the fourth conveyor (23) and is discharged to the outside of the first chamber (1), completing the discharge of the workpiece (8) from the first chamber (1).

[0040] Furthermore, simultaneously with the discharge of the workpiece (8), the transfer of the next workpiece (8) into the first chamber (1) is performed in the same manner as the transfer of the workpiece (8) into the first chamber (1). As described above, in this embodiment, the transfer and discharge of workpieces (8) into and out of the first chamber (1) and the second chamber (2), and the liquid injection operations in the first chamber (1) and the second chamber (2) can be performed alternately and continuously.

[0041] In other words, the transfer and discharge of the workpiece (8) in the first chamber (1) is performed simultaneously with the liquid injection operation in the second chamber (2). After the above series of operations are completed in both chambers, the liquid injection operation in the first chamber (1) is performed simultaneously with the transfer and discharge of the workpiece (8) into and out of the second chamber (2). This simultaneous operation can be repeated alternately in the first chamber (1) and the second chamber (2).

[0042] By performing this series of operations, liquid injection into the workpiece (8) can be carried out alternately and continuously in the first chamber (1) and the second chamber (2) without requiring any waiting time for depressurization or release. Therefore, it is possible to eliminate the wasted time required for depressurization and release operations in the first chamber (1) and the second chamber (2), and efficient liquid injection into the workpiece (8) can be performed with a simple configuration. [Explanation of Symbols]

[0043] 1. First Chamber 2. Second Chamber 4 openings 5 End shutter 6. First discharge nozzle 7. Second discharge nozzle 8 Work 13 First communication pipe 14 Second communication pipe 17 First transfer route 18 Second transfer route 20 First Conveyor 21 Second Conveyor 22 Third Conveyor 23 Fourth Conveyor 32 Sliding rail

Claims

1. A vacuum liquid injection device comprising a pair of end shutters that can airtightly seal a pair of openings provided at both ends, a vacuum mechanism that can reduce the pressure inside, first and second chambers arranged in parallel with each other, first and second discharge nozzles that are assembled to the first and second chambers respectively and can discharge liquid to workpieces placed in the first and second chambers, a liquid supply device that can alternately supply liquid to the first and second discharge nozzles via first and second connecting pipes, and first and second transfer paths that penetrate the first and second chambers respectively and can transfer workpieces to and from the inside and outside of the first and second chambers.

2. A method for transferring a workpiece, comprising a pair of chambers arranged in parallel, each having a pressure reducing mechanism for reducing internal pressure and a discharge nozzle for discharging liquid onto a workpiece, wherein a workpiece is placed in one of the chambers, the pressure is reduced in that chamber by the pressure reducing mechanism, and while liquid is being injected into the workpiece from the discharge nozzle in the reduced-pressure chamber, the workpiece is being transferred to the other chamber and / or discharged from the other chamber to the outside.

3. The vacuum liquid injection device according to claim 1, characterized in that the first and second discharge nozzles are each provided with a first valve and a second valve for discharging and stopping the discharge of liquid from the first and second discharge nozzles, respectively.

4. The vacuum liquid injection device according to claim 1, characterized in that a pair of sliding rails are installed between the first and second transport paths at the outer positions of both ends of the first and second chambers, and the workpiece can be selectively placed in either the first or second transport path by placing the workpiece on the sliding rails.

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