Time-of-flight mass spectrometer assembly with secondary flange

Abstract

The time-of-flight mass spectrometer assembly comprises a flange having a vacuum chamber-facing surface and an environmental-facing surface. The flange defines an opening extending between the vacuum chamber-facing surface and the environmental-facing surface. A plurality of stacked components are supported by the vacuum chamber-facing surface of the flange. A secondary flange is removably secured within the flange opening. The secondary flange comprises a vacuum chamber-facing surface and an environmental-facing surface. A supporting spectrometer component is supported by the vacuum chamber-facing surface of the secondary flange such that removal of the secondary flange from the flange functions to remove the supporting component from the plurality of stacked components supported by the vacuum chamber-facing surface of the flange.

Description

Technical Field

[0001] (Cross - Reference to Related Applications) This application claims the benefit and priority of U.S. Provisional Patent Application No. 63 / 187,054, filed on May 11, 2021, entitled "TIME - OF - FLIGHT MASS SPECTROMETER DETECTOR", which is hereby incorporated by reference in its entirety.

[0002] The foregoing disclosure relates to an improved time - of - flight (TOF) mass spectrometer, and more specifically, to a smaller TOF mass spectrometer having at least one spectrometer component that can be easily removed and replaced using a secondary flange.

Background Art

[0003] Time - of - flight mass spectrometry is a mass spectrometry method that uses the flight time of ions to determine the mass - to - charge ratio. Time - of - flight mass spectrometry uses a TOF mass spectrometer that includes components, particularly a detector and an ion source. The components of the TOF mass spectrometer are arranged along a skeletal structure having a detector surrounded by other components of the TOF mass spectrometer. The skeleton provides secure attachment points for the TOF mass spectrometer components, but this makes the TOF mass spectrometer very long. Further, components such as the detector that may need to be removed and replaced are difficult to access without disassembling most of the TOF mass spectrometer. Such disassembly is time - consuming, causes significant downtime, and further increases the possibility of damaging other components during disassembly and reassembly.

[0004] These are some of the drawbacks of currently used TOF mass spectrometers.

Summary of the Invention

[0005] The disclosed TOF mass spectrometer assembly comprises multiple components assembled on a main flange coupled to a vacuum chamber. The main flange further defines an opening to receive a secondary flange supporting at least one of the components of the TOF mass spectrometer. In this way, at least one support component can be removed from the vacuum chamber without requiring the removal of the entire TOF mass spectrometer assembly by detaching the main flange from the vacuum chamber. This makes the removal and replacement of at least one support component easy and quick, resulting in reduced downtime for the TOF mass spectrometer assembly. This also allows the rest of the TOF mass spectrometer to remain protected from contaminants (e.g., dust) and accidental damage within the vacuum chamber. Furthermore, the secondary flange allows for precise positioning of the support component relative to the other components of the TOF mass spectrometer assembly remaining within the vacuum chamber.

[0006] One embodiment of a time-of-flight mass spectrometer assembly for installation in a vacuum chamber comprises a flange configured to be fixed to the opening of the vacuum chamber. The flange has a vacuum chamber-facing surface and an environment-facing surface. The flange also defines a cutout portion extending between the vacuum chamber-facing surface and the environment-facing surface. Multiple components are assembled on the vacuum chamber-facing surface of the flange and configured to be supported and positioned within the vacuum chamber. A secondary flange is configured to be removably fixed to the flange to close the cutout portion of the flange. The secondary flange has a vacuum chamber-facing surface and an environment-facing surface. Support components are coupled to the vacuum chamber-facing surface of the secondary flange. Thus, removal of the secondary flange from the flange functions to remove the support components from the vacuum chamber while leaving the flange fixed to the opening of the vacuum chamber.

[0007] In one embodiment, the support component is a detector. In one embodiment, the vacuum chamber-facing surface of the flange extends along a plane above the vacuum chamber-facing surface of the secondary flange, if the secondary flange is removably fixed to the flange so as to close the cutout portion of the flange. In one embodiment, the secondary flange is fixed to the flange using a plurality of fasteners arranged around the secondary flange. In one embodiment, at least one of the plurality of components comprises an ion source. In one embodiment, a seal is positioned between the flange and the secondary flange. In a further embodiment, the seal is made of metal. In another embodiment, the secondary flange defines one or more through-connectors for connecting the support component to a controller.

[0008] Further embodiments of the time-of-flight mass spectrometer include a flange having a vacuum chamber-facing surface and an environment-facing surface. The flange defines an opening extending between the vacuum chamber-facing surface and the environment-facing surface. Multiple stacked components are supported by the vacuum chamber-facing surface of the flange. A secondary flange is removably fixed within the opening of the flange and includes a vacuum chamber-facing surface and an environment-facing surface. The support components are configured to be supported by the vacuum chamber-facing surface of the secondary flange so that the removal of the secondary flange from the flange functions to remove the support components from the multiple stacked components supported by the vacuum chamber-facing surface of the flange.

[0009] An embodiment of a method for manufacturing a time-of-flight mass spectrometer is provided. The method includes the step of structuring a flange comprising a vacuum chamber-facing surface and an environment-facing surface, defining an opening extending between the vacuum chamber-facing surface and the environment-facing surface, and supporting a plurality of stacked components on the vacuum chamber-facing surface of the flange. The method further includes the step of structuring a secondary flange comprising a vacuum chamber-facing surface and an environment-facing surface, and being removably fixed to the flange to close the opening of the flange. The support components are structured so as to be supported by the vacuum chamber-facing surface of the secondary flange, such that the removal of the secondary flange from the flange functions to remove the support components from the plurality of stacked components supported by the vacuum chamber-facing surface of the flange.

[0010] An embodiment of a flange for a time-of-flight mass spectrometer assembly comprises a body configured to couple with a vacuum chamber. The body comprises a vacuum chamber-facing surface and an environment-facing surface. An opening defined in the body extends between the vacuum chamber-facing surface and the environment-facing surface and defines an inner lip. Multiple openings are arranged around the body, each of which is sized to receive a fastener for coupling the body to the vacuum chamber. A secondary flange is sized to at least partially fit into the openings in the flange body, with a seal positioned between the secondary flange and the flange body. [Brief explanation of the drawing]

[0011] A more specific description of the present invention, which has been briefly summarized above, can be obtained by referring in part to embodiments shown in the accompanying drawings. However, it should be noted that the accompanying drawings illustrate only typical embodiments of the present invention and should not be considered limiting in scope, as the present invention may permit other equally effective embodiments. Therefore, the following detailed description can be read and referred to in conjunction with the drawings for a further understanding of the nature and purpose of the present invention.

[0012] [Figure 1] A perspective side view of one embodiment of a component of a time-of-flight mass spectrometer assembly stacked on a flange is shown. [Figure 2] The image shows a top view of the flange. [Figure 3] A schematic cross-sectional view of the embodiment shown in Figure 2 along line AA is provided.

[0013] The attached drawings are for illustrative purposes only and are not necessarily to scale. [Modes for carrying out the invention]

[0014] The following description relates to various embodiments of a time-of-flight mass spectrometer assembly with a secondary flange. It will be understood that the versions described herein are examples embodying the specific inventive concepts detailed herein. For this purpose, other variations and modifications will be readily apparent to those skilled in the art. Furthermore, certain terms are used throughout this description to provide a proper frame of reference with respect to the accompanying drawings. Terms such as “upstream,” “downstream,” “upper,” “lower,” “front,” “rear,” “internal,” “external,” “front,” “rear,” “up,” “down,” “inside,” “outside,” “first,” and “second” are not intended to limit these concepts unless so specifically indicated. The terms “about” or “approximately” as used herein may refer to a range of 80% to 125% of the claimed or disclosed values. With respect to the drawings, their purpose is to depict the notable features of the time-of-flight mass spectrometer assembly with a secondary flange and are not provided in particular to scale.

[0015] Referring to Figure 1, one embodiment of a TOF mass spectrometer assembly 100 assembled on a flange 110 having a flange body 111 is shown. Specifically, several analyzer components 120, 140, and 150 are assembled on the vacuum chamber-facing surface 112 of the flange body 111. The several analyzer components 120, 140, and 150 of the TOF mass spectrometer assembly 100 are stacked on the vacuum chamber-facing surface 112 of the flange 110, thereby making the entire TOF mass spectrometer assembly 100 smaller and allowing it to be fully inserted into and removed from the vacuum chamber 50 (see Figure 3) as a single unit. As shown in Figure 1, one or more of the several analyzer components 120, 140, and 150 may be coupled to each other and then coupled to one or more supports 180 which are coupled to the flange body 111. In the example shown, components 150 and 120 are coupled to component 140, and component 140 is then attached to the flange 110 by the support 180. In this way, a structurally stable and compact TOF mass spectrometer assembly 100 can be constructed. The analyzer components 120, 130, 140, and 150 are generally known in the art and will not be described individually in detail, nor will the overall operation of the disclosed TOF mass spectrometer assembly 100 be described in detail. In one embodiment, the analyzer components may comprise an ion source 120, a transfer optical system, a grid, an accelerating electrode, and a drift tube (each included as part of 140), as well as an ion mirror 150.

[0016] One or more connection points 160 are configured to connect multiple analyzer components 120, 140, and 150 to through connection points 170 in the body 111 of the flange 110. The through connection points 170 extend from the vacuum chamber-facing surface 112 to the environment-facing surface 114 of the flange 110 so that one or more of the connection points 160 can be coupled to an external component 400 (see Figure 3). The external component 400 may include a power supply, a controller, or any other source or means for controlling the corresponding components 120, 140, and 150 of the TOF mass spectrometer assembly 100 via the through connection points 170 (see Figures 2 and 3).

[0017] Figure 2 shows the vacuum chamber-facing surface 112 of the body 111 of the flange 110. The flange 110 is coupled to the vacuum chamber 50 using a plurality of fasteners 119 arranged around the body 111 of the flange 110. A plurality of through-connectors 170 are shown positioned inward or radially inward from the plurality of fasteners 119. As can be seen in Figure 2, the through-connectors 170 may be of various sizes depending on the type of connection. Another type of through-connector 172 that can be coupled to a controller and / or data acquisition device (not shown) is shown.

[0018] Referring to Figure 3, the body 111 of the flange 110 defines a cutout portion 117 or opening extending between the vacuum chamber-facing surface 112 and the environment-facing surface 114. The cutout portion 117 is radially inward from a plurality of fasteners 119 and is configured to receive the secondary flange 200. As shown in Figure 2, the secondary flange 200 has a polygonal shape, although this may not be the case in other embodiments of the secondary flange 200. Referring back to Figure 3, the secondary flange 200 has a vacuum chamber-facing surface 212 and an environment-facing surface 214. A lip 216 is defined around the secondary flange 200 and is coupled to the flange 110 by a plurality of secondary flange fasteners 219 positioned through the lip 216 of the secondary flange 200.

[0019] Referring to Figure 3, the vacuum chamber-facing surface 212 of the secondary flange 200 is configured to support a component 130 of the TOF mass spectrometer assembly 100. In one embodiment, the support component 130 is an ion detector, but in other embodiments, the support component may be another component of the TOF mass spectrometer assembly 100. The support component 130 may be directly coupled to the secondary flange 200 using one or more couplers 220. The flange 110, secondary flange 200, and support component 130 are configured such that the support component 130 is positioned precisely in close proximity to the rest of the analyzer components so that the TOF mass spectrometer assembly 100 functions properly upon installation of the secondary flange 200. A seal 300 is positioned between the inner surface 118 of the flange 110 and the lip surface 218 of the secondary flange 200 (and around the multiple secondary flange fasteners 219). The seal 300 can be any suitable material that forms an airtight seal between the inner surface 118 of the flange 110 and the lip surface 218 of the secondary flange 200 while being resistant to the harsh conditions and chemicals present in the vacuum chamber 50. In one embodiment, the seal 300 is made of a metal, more particularly copper.

[0020] The secondary flange 200 allows the support component 130 to be removed from the vacuum chamber 50, so that the support component 130 can be fixed or replaced without having to remove the flange 110 from the vacuum chamber 50. Once the support component 130 is fixed or replaced, a new seal 300 is applied to the lip surface 218 (or the inner surface 118 of the flange 110), the secondary flange 200 is reinstalled in the cutout portion 117, and secured to the flange 110 by multiple secondary flange fasteners 219. In this way, only the support component 130 is removed from the vacuum chamber 50 without having to remove the flange 110 from the vacuum chamber 50 and the entire TOF mass spectrometer assembly 100. This makes the removal and replacement of the support component 130 easy and quick, resulting in reduced downtime for the TOF mass spectrometer assembly 100. This also allows the rest of the TOF mass spectrometer assembly 100 to remain protected from contamination (e.g., dust) and accidental damage within the chamber.

[0021] As shown in Figure 3, the vacuum chamber-facing surface 212 of the secondary flange 200 extends along plane P, and the vacuum chamber-facing surface 112 of the flange 110 extends along plane Q. As shown, plane P does not extend along plane Q. However, in other embodiments, the vacuum chamber-facing surface 212 of the secondary flange 200 and the vacuum chamber-facing surface 112 of the flange 110 extend along the same plane. In this way, support components 130 of various sizes can be fitted. In one embodiment, the secondary flange 200 may be manufactured to include a connection portion 222 (if necessary) and a corresponding through portion 221 of the support component 130. In the above embodiment, replacement of the support component 130 requires only removing the secondary flange 200 attached to the support component and then replacing it with a different secondary flange 200 coupled to a different support component. In each embodiment, the new seal 300 is installed before the secondary flange 200 is attached to the flange 110. In some embodiments, the seal 300 may be pre-attached to the lip surface 218 of the secondary flange 200 to further improve the ease and speed of removing the support component 130 from the TOF mass spectrometer 100 assembly and returning it to the TOF mass spectrometer 100 assembly for replacement.

[0022] In other embodiments, additional flanges may be included to allow removal of other specific components of the TOF mass spectrometer assembly 100 and / or access to specific areas of the TOF mass spectrometer assembly 100.

[0023] The present invention includes combinations of the embodiments described herein. References such as “embodiments” refer to features present in at least one embodiment of the present invention. Individual references such as “one embodiment” or “a particular embodiment” do not necessarily refer to the same embodiment (including multiple embodiments). However, such embodiments are not mutually exclusive unless otherwise indicated or readily apparent to those skilled in the art. The word “or” is used in a non-exclusive sense in this disclosure unless otherwise explicitly stated.

[0024] While the present invention is described in detail with particular reference to certain preferred embodiments, those skilled in the art will understand that modifications, combinations, and alterations can be made within the spirit and scope of the invention.

Claims

1. A time-of-flight mass spectrometer assembly for installation in a vacuum chamber, wherein the time-of-flight mass spectrometer assembly is A flange configured to be fixed to the opening of the vacuum chamber, wherein the flange comprises a body including a vacuum chamber-facing surface and an environment-facing surface, and the body further defines a cutout portion extending between the vacuum chamber-facing surface and the environment-facing surface. A plurality of stacked analyzer components are supported by the vacuum chamber-facing surface of the flange and configured to be positioned within the vacuum chamber, A secondary flange configured to be removably fixed within the cutout portion to close the cutout portion, wherein the secondary flange has a vacuum chamber facing surface and an environment facing surface, A support component configured to be coupled to the vacuum chamber-facing surface of the secondary flange and Equipped with, A time-of-flight mass spectrometer assembly in which the removal of the secondary flange from the flange functions to remove the support component from the vacuum chamber while the flange remains fixed in the opening of the vacuum chamber.

2. The time-of-flight mass spectrometer assembly according to claim 1, wherein the support component is a detector.

3. The time-of-flight mass spectrometer assembly according to claim 1, wherein the support component is an ion source.

4. The time-of-flight mass spectrometer assembly according to claim 1, wherein the vacuum chamber-facing surface of the flange extends along a first plane, the vacuum chamber-facing surface of the secondary flange extends along a second plane, and the secondary flange is coupled to the body of the flange, the first plane is different from the second plane.

5. The time-of-flight mass spectrometer assembly according to claim 1, wherein the secondary flange is fixed to the flange using a plurality of fasteners arranged around the secondary flange.

6. The time-of-flight mass spectrometer assembly according to claim 1, wherein at least one of the plurality of stacked analyzer components comprises an ion source.

7. The time-of-flight mass spectrometer assembly according to claim 1, further comprising an airtight seal disposed between the flange and the secondary flange.

8. The time-of-flight mass spectrometer assembly according to claim 7, wherein the airtight seal is made of metal.

9. The time-of-flight mass spectrometer assembly according to claim 1, wherein the secondary flange defines one or more through-connections for connecting the support component to the controller.

10. A flange comprising a vacuum chamber-facing surface configured to be positioned inside a vacuum chamber and an environment-facing surface configured to be positioned outside the vacuum chamber, wherein the flange defines an opening extending between the vacuum chamber-facing surface and the environment-facing surface, A plurality of stacked components supported by the vacuum chamber-facing surface of the flange, A secondary flange that is removably fixed to the flange and configured to block the opening, wherein the secondary flange has a vacuum chamber facing surface and an environment facing surface, A support component configured to be supported by the vacuum chamber-facing surface of the secondary flange A time-of-flight mass spectrometer assembly comprising, A time-of-flight mass spectrometer assembly in which the removal of the secondary flange from the flange functions to remove the support component from the vacuum chamber while the flange remains fixed to the vacuum chamber.

11. The time-of-flight mass spectrometer assembly according to claim 10, wherein the support component is a detector.

12. The time-of-flight mass spectrometer assembly according to claim 10, wherein the support component is an ion source.

13. The time-of-flight mass spectrometer assembly according to claim 10, wherein the vacuum chamber-facing surface of the flange extends along a first plane, the vacuum chamber-facing surface of the secondary flange extends along a second plane, and the secondary flange is removably fixed within the opening of the flange, the first plane is different from the second plane.

14. The time-of-flight mass spectrometer assembly according to claim 10, wherein the secondary flange is fixed to the flange using a plurality of fasteners arranged around the secondary flange.

15. The time-of-flight mass spectrometer assembly according to claim 10, wherein at least one of the plurality of stacked components comprises an ion source.

16. The time-of-flight mass spectrometer assembly according to claim 10, further comprising a seal disposed between the flange and the secondary flange.

17. The time-of-flight mass spectrometer assembly according to claim 16, wherein the seal is made of metal.

18. The time-of-flight mass spectrometer assembly according to claim 10, wherein the secondary flange defines one or more through-connectors configured to connect the support component to an external component.

19. A method for manufacturing a time-of-flight mass spectrometer assembly, wherein the method is A step in structuring the flange, It comprises a vacuum chamber-facing surface configured to be positioned inside the vacuum chamber and an environment-facing surface configured to be positioned outside the vacuum chamber, An opening is defined that extends between the vacuum chamber-facing surface and the environment-facing surface. A plurality of stacked components are supported on the surface of the flange facing the vacuum chamber. Thus, the steps include structuring the flange, A step of structuring the secondary flange, Equipped with a vacuum chamber facing surface and an environment facing surface, To block the aforementioned opening, it is removably fixed to the flange, Thus, the steps include structuring the secondary flange, A step of structuring the support components, Supported by the vacuum chamber-facing surface of the secondary flange, which is in close proximity to the plurality of stacked components, By removing the secondary flange from the flange, the flange is removed from the vacuum chamber while remaining fixed to the vacuum chamber. Thus, the steps include structuring the support component and Methods that include...

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