Substrate processing apparatus, method for replacing processing tools, and replacement tools

Abstract

The present disclosure describes a substrate processing device, a processing tool replacement method, and a replacement tool with which it is possible to efficiently replace a processing tool with a simple configuration.　This substrate processing device comprises a holding unit, a rotating unit configured to rotate the holding unit, a processing tool configured to process a surface of a substrate held by the holding unit, a replacement tool configured to be detachably attached to the holding unit, a holding conveyance unit configured to hold and convey the processing tool, and a control unit. The replacement tool includes a body part configured to be capable of engaging with an engagement part of the processing tool, and a flange part protruding from a peripheral surface of the body part for attachment and detachment to and from the holding part. The control unit is configured to execute a first process in which, in a state in which the replacement tool is attached to the holding unit via the flange part and the engagement part of the processing tool is engaged with the body part of the replacement tool, the rotating unit is controlled to rotate the holding unit to thereby cause the processing tool to be attached to and detached from the holding conveyance unit.

Description

Technical Field

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[0004] , , ,

[0001] The present disclosure relates to a substrate processing apparatus, a method for replacing a processing tool used for substrate processing, and a replacement tool for replacing a processing tool used for substrate processing.

Background Art

[0002] Patent Document 1 discloses a substrate processing apparatus. The substrate processing apparatus includes a holding unit configured to rotatably hold a substrate, and a supply unit configured to supply a processing liquid to the surface of the substrate held by the holding unit through a nozzle. 。

Prior Art Documents

Patent Documents

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The present disclosure describes a substrate processing apparatus, a method for replacing a processing tool, and a replacement tool that can efficiently replace a processing tool with a simple configuration.

Means for Solving the Problems

[0005] An example of a substrate processing apparatus includes a holding unit configured to hold a substrate, a rotating unit configured to rotate the holding unit, a processing tool configured to process the surface of the substrate held by the holding unit, a replacement tool configured to be detachably attached to the holding unit, a holding and transporting unit configured to hold and transport the processing tool, and a control unit. The replacement tool includes a main body configured to be engaged with an engaging portion of the processing tool, and a flange portion extending from the circumferential surface of the main body for attachment and detachment to and from the holding unit. The processing tool includes another fastening portion configured to be tightened to a fastening portion provided on the holding and transporting unit. The control unit is configured to perform a first process of attaching and detaching the processing tool to and from the holding and transporting unit by controlling the rotating unit to rotate the holding unit while the replacement tool is attached to the holding unit via the flange portion and the engaging portion of the processing tool is engaged with the main body of the replacement tool. In this document, "attaching and detaching" means at least one of attaching and removing. [Effects of the Invention]

[0006] The substrate processing apparatus described herein makes it possible to efficiently replace processing tools with a simple configuration. [Brief explanation of the drawing]

[0007] [Figure 1] Figure 1 is a schematic top view showing an example of a substrate processing system. [Figure 2] Figure 2 is a schematic side view showing an example of a substrate processing system. [Figure 3] Figure 3 is a schematic side view showing an example of a thin-film processing apparatus. [Figure 4] Figure 4 is a schematic top view showing an example of a holding part. [Figure 5] Figure 5 is a schematic cross-sectional view showing an example of a processing tool unit. [Figure 6] Figure 6 is a schematic perspective view showing an example of a processing device. [Figure 7] Figure 7 is a schematic perspective view showing an example of a retaining part and a replacement tool. [Figure 8] Figure 8 is a schematic cross-sectional view showing an example of a retaining part and a replacement tool. [Figure 9] Figure 9 is a perspective view showing a partially cutaway example of a retainer. [Figure 10] Figure 10 is a block diagram showing an example of the main components of a substrate processing system. [Figure 11] Figure 11 is a schematic diagram showing an example of the controller's hardware configuration. [Figure 12] Figure 12 is a diagram illustrating the procedure for removing the processing tool from the processing tool unit using a replacement tool. [Figure 13] Figure 13 is a diagram illustrating the procedure for removing the processing tool from the processing tool unit using a replacement tool. [Figure 14] Figure 14 is a diagram illustrating the procedure for removing the processing tool from the processing tool unit using a replacement tool. [Figure 15] Figure 15 is a diagram illustrating the procedure for attaching the processing tool to the processing tool unit using a replacement tool. [Figure 16] Figure 16 is a diagram illustrating the procedure for attaching the processing tool to the processing tool unit using a replacement tool. [Figure 17] Figure 17 is a schematic cross-sectional view showing another example of a processing device. [Figure 18] Figure 18(a) is a schematic cross-sectional view showing another example of the processing device, and Figure 18(b) is a schematic cross-sectional view showing another example of the processing device. [Figure 19] Figure 19 is a schematic perspective view showing another example of a replacement device. [Figure 20] Figure 20 is a schematic perspective view showing another example of a retaining part. [Figure 21] Figure 21(a) is a schematic side view showing the state in which the gripping piece of the retaining part in Figure 20 has released the replacement tool in Figure 19, and Figure 21(b) is a schematic side view showing the state in which the gripping piece of the retaining part in Figure 20 is gripping the replacement tool in Figure 19. [Figure 22] Figure 22 is a schematic perspective view showing another example of a replacement device. [Figure 23] FIG. 23 is a top view showing the main body of the exchanger in FIG. 22. [Figure 24] FIG. 24 is a diagram for explaining how a processing tool is attached to the exchanger in FIG. 23. [Figure 25] FIG. 25 is a top view schematically showing another example of the exchanger. [Figure 26] FIG. 26 is a cross-sectional view schematically showing the holding part and the exchanger in FIG. 22.

MODE FOR CARRYING OUT THE INVENTION

[0008] In the following description, the same reference numerals are used for the same elements or elements having the same function, and redundant descriptions are omitted. In this specification, when referring to up, down, right, and left in the drawings, the directions of the reference numerals in the drawings are used as the reference. In some of the drawings, a rectangular coordinate system defined by the X-axis, Y-axis, and Z-axis is shown. In this specification, the X-axis and Y-axis correspond to the horizontal direction, and the Z-axis corresponds to the vertical direction.

[0009] [Substrate Processing System] First, referring to FIGS. 1 and 2, a substrate processing system 1 (substrate processing apparatus) configured to process a substrate W will be described. The substrate processing system 1 may be configured to perform, for example, photolithography processing on the substrate W. The photolithography processing may include, for example, a process of forming a photosensitive thin film (e.g., a resist film, etc.) on the surface of the substrate W, a process of developing the photosensitive thin film after exposure, and the like.

[0010] The substrate W may be disc-shaped, or it may be a plate shape other than circular, such as a polygon. The substrate W may have a notch in which a part is cut out. The notch may be, for example, a notch (groove such as U-shaped or V-shaped), or a straight section extending in a straight line (a so-called orientation flat). The substrate W may be, for example, a semiconductor substrate (silicon wafer), a glass substrate, a mask substrate, an FPD (Flat Panel Display) substrate, or various other types of substrates. The diameter of the substrate W may be, for example, about 200 mm to 450 mm.

[0011] The substrate processing system 1 comprises an input / output station 2, at least one processing station 3, an interface station 4, and a controller Ctr (control unit). The input / output station 2, at least one processing station 3, and the interface station 4 may be arranged in a line in this order along the Y direction, for example. As illustrated in Figures 1 and 2, the at least one processing station 3 may include two or more processing stations 3 positioned between the input / output station 2 and the interface station 4.

[0012] The loading / unloading station 2 includes a plurality of mounting tables 2a and substrate transport devices 2b and 2c. The plurality of mounting tables 2a may be arranged, for example, along the X direction (the width direction of the substrate processing system 1). Each of the plurality of mounting tables 2a is configured to be able to accommodate one carrier 5. The carrier 5 is configured to contain at least one substrate W in a sealed state.

[0013] The substrate transport devices 2b and 2c are configured to be movable in the following directions, for example, the X direction (horizontal), Y direction (horizontal), Z direction (up and down), and around the vertical axis (θ direction). Each of the substrate transport devices 2b and 2c may include a drive mechanism for movement in each of these directions. The substrate transport devices 2b and 2c are configured to transfer substrates W between the carrier 5 and the processing station 3. The transfer of substrates W to and from the processing station 3 by the substrate transport devices 2b and 2c may include the transfer of substrates W to and from block G3. Block G3 may be located within the loading / unloading station 2 so as to be near the substrate transport space 3b (described later) within the processing station 3. Block G3 may include a plurality of transfer devices (not shown) arranged in the vertical direction. Each transfer device may be configured to be accessible by both the substrate transport devices 2b and 2c and the substrate transport device 3c (described later) of the processing station 3. Block G3 may be located within the processing station 3 instead of within the loading / unloading station 2.

[0014] The processing station 3 is configured to perform various photolithography processes on the substrate W. The processing station 3 may include a plurality of modules 3a stacked vertically, as illustrated in Figure 2. As illustrated in Figures 1 and 2, each module 3a may include, for example, blocks G1 and G2 and a substrate transport space 3b extending along the Y direction. Blocks G1 and G2 may be aligned in the X direction so as to face each other with the substrate transport space 3b in between.

[0015] Block G1 includes at least one thin-film processing apparatus U1. The thin-film processing apparatus U1 may be an apparatus that supplies a processing solution to a substrate W to perform film processing, or an apparatus that supplies a predetermined gas to a substrate W to perform film processing. The thin-film processing apparatus U1 may include, for example, a thin-film forming apparatus, a developing apparatus, etc. The thin-film forming apparatus may include, for example, a photosensitive thin-film forming apparatus, an anti-reflective film forming apparatus, etc. Thin-film processing may include forming a thin film and performing a developing process. In the example in Figure 1, multiple thin-film processing apparatuses U1 are arranged in a line along the Y direction, but the number, arrangement, and type of thin-film processing apparatuses U1 can be arbitrarily selected.

[0016] Block G2 includes a plurality of heat treatment devices U2, a hydrophobic treatment device (not shown), and a peripheral exposure device U3. The plurality of heat treatment devices U2 are configured to perform heat treatment (e.g., heating, cooling) on ​​the substrate W. The plurality of heat treatment devices U2 may be arranged in a vertical and horizontal direction within Block G2. The hydrophobic treatment device is configured to hydrophobize the surface of the substrate W in order to improve the adhesion between the treatment solution, which will become a photosensitive thin film, and the substrate W. The peripheral exposure device U3 is configured to expose the peripheral portion of the photosensitive thin film formed on the surface of the substrate W. The hydrophobic treatment device and the peripheral exposure device U3 may be arranged in a vertical and horizontal direction within Block G2. The number and arrangement of the heat treatment devices U2, hydrophobic treatment device and peripheral exposure device U3 can be arbitrarily selected. The peripheral exposure device U3 may be located in the interface station 4 instead of the processing station 3 (block G2), or in addition to the processing station 3 (block G2).

[0017] A substrate transport device 3c is positioned within the substrate transport space 3b. The substrate transport device 3c is configured to be movable in the Y direction (horizontal direction), the Z direction (up and down direction), and around the vertical axis (θ direction). The substrate transport device 3c may include a drive mechanism for movement in each of these directions. The substrate transport device 3c is configured to move within the substrate transport space 3b and to transfer substrates W between blocks G1 to G5.

[0018] In the example in Figure 1, block G4 is located in the substrate transport space 3b at the boundary between the two processing stations 3. Block G4 may include a plurality of transfer devices (not shown) arranged vertically. Each transfer device may be configured to be accessible from both the substrate transport device 3c of one of the two processing stations 3 and the substrate transport device 3c of the other processing station 3.

[0019] Block G5 may be located within the interface station 4 so as to be located near the substrate transport space 3b within the processing station 3 in the example shown in Figure 1. Block G5 may include a plurality of transfer devices (not shown) arranged vertically. Each transfer device may be configured to be accessible to the substrate transport device 3c and the substrate transport devices 4a and 4b (described later) of the interface station 4.

[0020] Interface station 4 connects processing station 3 and exposure apparatus (not shown) to facilitate the transfer of substrate W between them. The exposure apparatus may be located adjacent to interface station 4, for example, on the opposite side of interface station 4 from processing station 3.

[0021] The interface station 4 includes substrate transport devices 4a and 4b. Each of the substrate transport devices 4a and 4b is configured to be movable in, for example, the X direction (horizontal), Y direction (horizontal), Z direction (vertical), and around the vertical axis (θ direction). Each of the substrate transport devices 4a and 4b may include a drive mechanism for movement in each of these directions. The substrate transport devices 4a and 4b are configured to transfer substrates W between the processing station 3, the interface station 4, and the exposure apparatus. The transfer of substrates W to and from the processing station 3 by the substrate transport devices 4a and 4b may include the transfer of substrates W to and from block G5. Block G5 may be located within the interface station 4 so as to be near the substrate transport space 3b within the processing station 3. Block G5 may include a plurality of transfer devices (not shown) arranged vertically. Each transfer device may be configured to be accessible to both the substrate transport devices 4a and 4b and the substrate transport device 3c of the processing station 3. Block G5 may be located in the processing station 3 instead of the interface station 4.

[0022] The controller Ctr is configured to partially or entirely control the substrate processing system 1.

[0023] [Details of the thin-film processing equipment] Next, the thin-film processing apparatus U1 will be explained in detail with reference to Figures 3 to 6. . Thin The membrane processing apparatus U1 includes a chamber 10, a holding unit 20, a suction unit 30, a rotating unit 40, a supply unit 50, a cup member 60, an imaging unit 70, and a washing cup 80.

[0024] Chamber 10 is a housing configured to allow substrates W to be loaded into and unloaded from its interior. An loading / unloading port (not shown) is formed in the side wall of Chamber 10. The substrates W are transported into and out of Chamber 10 by a substrate transport device 3c through this loading / unloading port.

[0025] The holding portion 20 operates based on a control signal from the controller Ctr and is configured to hold the substrate W. As illustrated in Figure 4, the holding portion 20 includes a circular upper surface 21 extending substantially horizontally, a suction hole 22, and a plurality of protrusions 23-27. The suction hole 22 is provided on the upper surface 21 so as to substantially coincide with the central axis Ax1, which is the rotation center of the holding portion 20. Therefore, the suction hole 22 includes an opening formed on the upper surface 21 and opening upward.

[0026] Multiple protrusions 23-27 are provided on the upper surface 21 so as to protrude upward from the upper surface 21. The multiple protrusions 23-27 are configured to support the substrate W placed on the holding portion 20 at their tips.

[0027] Each of the multiple protrusions 23 is arc-shaped (for example, circular arc-shaped). The multiple protrusions 23 are arranged near the suction hole 22 so as to surround the suction hole 22 and form an annular shape as a whole. Therefore, the ends of adjacent protrusions 23 are spaced apart. Each of the multiple protrusions 24 is arc-shaped (for example, circular arc-shaped). The multiple protrusions 24 are arranged outside the protrusions 23 so as to surround the protrusions 23 and form an annular shape as a whole. Therefore, the ends of adjacent protrusions 24 are spaced apart.

[0028] Each of the multiple protrusions 25 is arc-shaped (for example, circular arc-shaped). The multiple protrusions 25 are arranged outside of the protrusion 24 so as to surround the protrusion 24 and form an annular shape as a whole. Therefore, the ends of adjacent protrusions 25 are spaced apart. Each of the multiple protrusions 26 is arc-shaped (for example, circular arc-shaped). The multiple protrusions 26 are arranged outside of the protrusion 25 so as to surround the protrusion 25 and form an annular shape as a whole. Therefore, the ends of adjacent protrusions 26 are spaced apart.

[0029] The protrusion 27 (the first protrusion) is annular (for example, circular). The protrusion 27 is positioned outside of the protrusion 26 so as to surround it. The protrusion 27 may also be positioned along the vicinity of the outer edge of the upper surface 21. Therefore, in the radial direction of the central axis Ax1, the multiple protrusions 23-26 are arranged on the upper surface 21 inside the protrusion 27.

[0030] The suction unit 30 is connected to the suction hole 22. The suction unit 30 operates based on a control signal from the controller Ctr and is configured to suck the atmosphere near the suction hole 22 through the suction hole 22. Therefore, when the suction unit 30 operates while the substrate W is supported by the multiple protrusions 23-27, the atmosphere in the space between the substrate W and the upper surface 21 of the holding unit 20 is sucked through the suction hole 22, creating a negative pressure in that space. As a result, the substrate W is attracted to the holding unit 20 while the substrate W is in a nearly horizontal position. In other words, the holding unit 20 and the suction unit 30 constitute a so-called vacuum chuck.

[0031] The rotating part 40 includes a drive unit 41 and a shaft 42, as illustrated in Figure 3. The drive unit 41 operates based on an operation signal from the controller Ctr and is configured to rotate the shaft 42. The drive unit 41 may be a power source such as an electric motor. The shaft 42 connects the drive unit 41 and the holding part 20 and extends along the vertical direction. Therefore, the substrate W held by the holding part 20 rotates around a vertical central axis Ax1 in a substantially horizontal position. In other words, the holding part 20 and the rotating part 40 constitute a so-called spin chuck.

[0032] The supply unit 50 is configured to supply multiple different types of processing liquids to the surface Wa of the substrate W held by the holding unit 20 from a nozzle 100 (processing tool). The supply unit 50 includes a liquid source 51, piping 52, a holding base 53 (holding and transporting unit), a drive unit 54 (holding and transporting unit), and at least one nozzle N.

[0033] The liquid source 51 may be configured as a source for supplying the processing liquid. The processing liquid may be, for example, an acid-based processing liquid or an alkaline-based processing liquid. The piping 52 connects the liquid source 51 to at least one nozzle 100. The piping 52 is provided with a valve (not shown). The valve is configured to open and close based on an operating signal from the controller Ctr.

[0034] The retaining base 53 is configured to hold at least one nozzle 100. The retaining base 53 includes at least one recess 53a, as illustrated in Figure 5. The retaining base 53 may include a number of recesses 53a corresponding to the number of nozzles 100.

[0035] The recess 53a includes a bottom surface 53b and a main portion 53c. The bottom surface 53b is provided with a flow path 53e connected to the piping 52. The main portion 53c houses the base end portion 101 (described later) of the nozzle 100. The inner circumferential surface of the main portion 53c may be, for example, a substantially cylindrical surface. The inner circumferential surface of the main portion 53c is provided with a female thread 53f (fastening portion).

[0036] The drive unit 54 is connected to the holding base 53. The drive unit 54 operates based on an operation signal from the controller Ctr and is configured to move the holding base 53 horizontally or vertically. Therefore, at least one nozzle N is configured to move horizontally or vertically above the holding unit 20. In other words, the holding base 53 and the drive unit 54 constitute a holding and transport unit for holding and transporting at least one nozzle 100.

[0037] At least one nozzle 100 is configured to supply processing liquid from the liquid source 51 to the surface Wa of the substrate W when it is located above the substrate W held by the holding part 20. Therefore, a flow path 100a is provided inside the nozzle 100, extending along the direction in which the nozzle 100 extends. At least one nozzle 100 may include two or more nozzles 100.

[0038] As illustrated in Figures 5 and 6, the nozzle 100 includes a base portion 101, a tip portion 102, and a modified portion 103 (engaging portion).

[0039] The base end 101 has an outer shape that corresponds to the inner circumferential surface of the main part 53c. A male screw 101a (another fastening part) is provided on the outer circumferential surface of the base end 101. The nozzle 100 is attached to the retaining base 53 by tightening the male screw 101a against the female screw 53f. Conversely, the nozzle 100 is removed from the retaining base 53 by loosening the male screw 101a from the female screw 53f. In other words, the nozzle 100 includes a male screw 101a configured to be tightened against the female screw 53f provided on the main part 53c of the retaining base 53.

[0040] The tip portion 102 has a tapered shape that decreases in diameter towards the tip. The irregular shape portion 103 is located between the base portion 101 and the tip portion 102. The outer circumferential surface of the irregular shape portion 103 has an irregular shape that is not circular (a shape other than a perfect circle). The overall outer diameter of the irregular shape portion 103 may be larger than the inner diameter of the main portion 53c. As illustrated in Figures 5 and 6, the outer circumferential surface of the irregular shape portion 103 may have a generally hexagonal shape. As illustrated in Figures 5 and 6, the outer circumferential surface of the irregular shape portion 103 may have a shape in which the center of each side of the generally hexagon is indented inward in an arc shape.

[0041] The outer diameter of the irregularly shaped portion 103 may be larger than the outer diameter of the base end portion 101 (male thread 101a). Therefore, the upper end of the irregularly shaped portion 103 includes a shoulder portion 103a that protrudes radially outward from the base end portion 101. When the nozzle 100 is attached to the recess 53a, the upper surface of the shoulder portion 103a abuts against the lower surface of the retaining base 53, and the end face of the base end portion 101 abuts against the bottom surface of the recess 53a. This prevents leakage of the processing liquid from the gap between the recess 53a and the nozzle 100. The base end portion 101 may be configured to be elastically deformable. In this case, when the male thread 101a is tightened against the female thread 53f to attach the nozzle 100 to the recess 53a, the end face of the base end portion 101 first abuts against the bottom surface of the recess 53a. Subsequently, the base end 101 is compressed as the male screw 101a is further tightened into the female screw 53f until the upper surface of the shoulder portion 103a comes into contact with the lower surface of the retaining base 53.

[0042] The cup member 60 is provided so as to surround the holding portion 20, as illustrated in Figure 3. The cup member 60 is configured to collect the processing liquid that splashes out from the outer edge of the substrate W as the substrate W is held and rotated by the holding portion 20 and the rotating portion 40. A drain port 61 and an exhaust port 62 are provided at the bottom of the cup member 60.

[0043] The drain port 61 is configured to discharge the processing liquid collected by the cup member 60 to the outside of the thin-film processing apparatus U1. The exhaust port 62 is configured to discharge the downward flow formed around the substrate W by a blower (not shown) to the outside of the thin-film processing apparatus U1. This downward flow is accompanied by gas generated around the substrate W as the substrate W is processed by the processing liquid.

[0044] The imaging unit 70 is positioned above the holding unit 20. The imaging unit 70 operates based on control signals from the controller Ctr and is configured to image the rotation center of the holding unit 20 and its surroundings. The imaging unit 70 is configured to transmit the captured images to the controller Ctr. The imaging unit 70 is, for example, a CCD camera. CMOSA camera or similar device may also be used. The location of the imaging unit 70 is not particularly limited, as long as it can capture images of the rotation center of the holding unit 20 and its surrounding area.

[0045] The cleaning cup 80 is configured to clean the tip portion 102 of the nozzle 100 with the cleaning liquid after the processing liquid has been supplied to the surface Wa of the substrate W. The cleaning cup 80 is located outside the cup member 60 and is separated from the cup member 60. The cleaning cup 80 has a bottomed cylindrical shape with an upward opening so that it can store the cleaning liquid. The cleaning liquid stored in the cleaning cup 80 may be, for example, a solvent.

[0046] [Configuration of the replacement device] By the way, if the substrate W is not held in the holding part 20, the nozzle 100 can be attached to and detached from the holding base 53 by attaching the replacement tool 200 to the holding part 20. In other words, the replacement tool 200 is configured to be detachably attached to the holding part 20. Therefore, the replacement tool 200 will be described in detail with reference to Figures 7 to 9.

[0047] The replacement tool 200 includes a main body portion 210, a flange portion 220, and an annular elastic member 230 (for example, an O-ring), as illustrated in Figures 7 to 9.

[0048] The main body 210 is cylindrical in shape overall and extends along a predetermined direction. The main body 210 includes a base portion 211 (transmission portion), an outer cylinder portion 212 (transmission portion), a sliding portion 213, a biasing portion 214, and at least one projection portion 215 (transmission portion).

[0049] The base portion 211 has a bottomed cylindrical shape and is configured to accommodate the tip portion 102 of the nozzle 100 when the nozzle 100 is attached to the replacement tool 200. The base portion 211 includes an upper portion 211a and a lower portion 211b, as illustrated in Figures 8 and 9.

[0050] The outer circumferential surface of the upper part 211a has an irregular shape that is not circular (a shape other than a perfect circle). The outer circumferential surface of the upper part 211a may, for example, be substantially hexagonal in shape as a whole. The peripheral wall of the upper part 211a may be provided with a number of housing parts 211c (transmission parts) corresponding to the number of projections 215. The housing parts 211c may be through holes penetrating the peripheral wall of the upper part 211a, or they may be recessed grooves that are recessed inward from the outer circumferential surface of the upper part 211a. The housing parts 211c may extend in the extending direction of the main body part 210. A cylindrical part 211d is provided near the inner peripheral edge of the upper end of the upper part 211a. The cylindrical part 211d extends upward along the extending direction of the replacement tool 200. With the outer cylinder portion 212 attached to the base portion 211, the outer circumferential surface of the cylindrical portion 211d is separated from the inner circumferential surface of the outer cylinder portion 212.

[0051] The lower part 211b extends downward from the lower end of the upper part 211a. The lower part 211b is inserted into the suction hole 22 of the holding part 20 when the replacement tool 200 is attached to the holding part 20. In this case, the central axis Ax1 of the holding part 20 and the central axis Ax2 of the replacement tool 200 coincide approximately. Therefore, when the holding part 20 and the replacement tool 200 rotate, the holding part 20 and the replacement tool 200 rotate around a nearly common central axis Ax1, Ax2.

[0052] The lower part 211b may be integrally formed with the upper part 211a. A notch 211e may be partially provided on the outer circumferential surface of the lower part 211b. As a result, as illustrated in Figure 8, when the replacement tool 200 is held by the holding part 20, a space V1 is formed between the outer circumferential surface of the notch 211e and the inner circumferential surface of the suction hole 22. The notch 211e may be, for example, a recessed groove (U-shaped, V-shaped, etc.) extending in the extending direction of the main body part 210. The notch 211e may also be, for example, a flat portion (a so-called D-cut) extending in the extending direction of the main body part 210.

[0053] The outer cylinder portion 212 is positioned outside the base portion 211 and is configured to be slidable relative to the base portion 211. The outer cylinder portion 212 includes a lower portion 212a and an upper portion 212b.

[0054] The inner circumferential surface of the lower part 212a has a shape corresponding to the outer circumferential surface of the upper part 211a of the base part 211. That is, the inner circumferential surface of the lower part 212a has a non-circular shape (a shape other than a perfect circle). For example, the inner circumferential surface of the lower part 212a may have a generally hexagonal shape. The inner shape of the lower part 212a may be configured to be slightly larger than the outer shape of the upper part 211a. Therefore, when the upper part 211a is inserted into the lower part 212a, the lower part 212a and the upper part 211a fit together. Consequently, when the base part 211 rotates around the central axis Ax2 of the replacement tool 200, the outer cylinder part 212 rotates together with the base part 211 without free-spinning. That is, the inner circumferential surface of the lower part 212a and the outer circumferential surface of the upper part 211a constitute a transmission part that transmits rotational force between the base part 211 and the outer cylinder part 212. The peripheral wall of the lower part 212a may be provided with a number of through holes 212c corresponding to the number of projections 215. Female threads may be formed on the inner circumferential surface of the through holes 212c.

[0055] The inner circumferential surface of the upper part 212b (the inner circumferential surface of the opening OP of the main body part 210) has a shape that corresponds to the outer circumferential surface of the irregularly shaped portion 103 of the nozzle 100. That is, the inner circumferential surface of the upper part 212b has an irregular shape that is not circular (a shape other than a perfect circle). For example, the inner circumferential surface of the upper part 212b may have a generally hexagonal shape. The inner shape of the upper part 212b may be configured to be larger than the inner shape of the lower part 212a. Therefore, when the irregularly shaped portion 103 of the nozzle 100 is inserted into the upper part 212b, the outer cylinder part 212 (replacement tool 200) and the nozzle 100 fit together (engage), and the tip part 102 and the irregularly shaped portion 103 of the nozzle 100 are housed inside the main body part 210. Therefore, when the replacement tool 200 rotates around its central axis Ax2, the nozzle 100 rotates together with the replacement tool 200 via the irregularly shaped portion 103 without slipping. That is, the inner circumferential surface of the upper part 212b and the outer circumferential surface of the irregularly shaped portion 103 constitute a transmission portion that transmits rotational force between the nozzle 100 and the replacement tool 200. The upper end of the upper part 212b (near the entrance of the opening OP) may have a shape that widens towards the top so that the irregularly shaped portion 103 can be smoothly inserted into the upper part 212b. The upper part 212b may be integrally formed with the lower part 212a.

[0056] The slide portion 213 is located inside the lower portion 212a. The slide portion 213 is configured to slide in the extending direction of the replacement tool 200 between the base portion 211 and the outer cylinder portion 212. The slide portion 213 includes a cylindrical portion 213a and a flange portion 213b. The cylindrical portion 213a extends along the extending direction of the replacement tool 200. The cylindrical portion 213a is configured to accommodate the tip portion 102 of the nozzle 100 when the nozzle 100 is attached to the replacement tool 200. When the slide portion 213 is located inside the outer cylinder portion 212, the outer circumferential surface of the cylindrical portion 213a is separated from the inner circumferential surface of the outer cylinder portion 212.

[0057] The flange portion 213b extends (protrudes) radially outward from near the upper end of the cylindrical portion 213a along the central axis Ax2. The flange portion 213b may be an annular plate-like body. The outer shape of the flange portion 213b is smaller than the inner shape of the lower portion 212a, but larger than the inner shape of the upper portion 212b. Therefore, the upper portion 212b functions as a stopper that restricts the upward movement of the flange portion 213b. Thus, the flange portion 213b is prevented from coming out of the opening OP of the upper portion 212b (replacement tool 200). The flange portion 213b may be integrally formed with the cylindrical portion 213a.

[0058] The biasing portion 214 is configured to apply a biasing force to the outer cylinder portion 212 in the direction in which the replacement tool 200 extends and in a direction that separates the base portion 211 from the outer cylinder portion 212. The biasing portion 214 may be, for example, a compression coil spring.

[0059] The biasing portion 214 is located inside the lower portion 212a. The upper end of the biasing portion 214 is located between the outer circumferential surface of the cylindrical portion 213a and the inner circumferential surface of the lower portion 212a, and is in contact with the lower surface of the flange portion 213b. The lower end of the biasing portion 214 is located between the outer circumferential surface of the cylindrical portion 211d and the inner circumferential surface of the lower portion 212a, and is in contact with the upper surface of the upper portion 211a. Therefore, in the examples of Figures 8 and 9, the biasing portion 214 is configured to apply a biasing force to the outer cylindrical portion 212 via the sliding portion 213.

[0060] At least one projection 215 is configured to be attachable to a corresponding through hole 212c. The projection 215 may be, for example, a male thread and may be configured to be fastened to a female thread of the corresponding through hole 212c. At least one projection 215 may include two or more projections 215.

[0061] The tip of the projection 215 protrudes from the inner circumferential surface of the outer cylinder 212 toward the base 211 when attached to the through hole 212c. The tip of the projection 215 is housed within the housing portion 211c of the base 211 when the outer cylinder 212 is attached to the base 211. Therefore, when the outer cylinder 212 is biased upward by the biasing portion 214, the tip of the projection 215 contacts the upper end of the housing portion 211c, preventing the outer cylinder 212 from moving any further upward. In other words, the projection 215 and the housing portion 211c function as stoppers that restrict the upward movement of the outer cylinder 212. Furthermore, when the base 211 rotates around the central axis Ax2 of the replacement tool 200, the tip of the projection 215 contacts the side wall of the housing portion 211c. Therefore, the outer cylinder portion 212 rotates together with the base portion 211 without free-spinning. In other words, the tip of the projection portion 215 and the side wall of the housing portion 211c constitute a transmission portion that transmits rotational force between the base portion 211 and the outer cylinder portion 212.

[0062] The flange portion 220 extends (protrudes) radially outward from near the upper end of the lower part 211b along the central axis Ax2. 220 It may be an annular plate-like body. The flange portion 220 may be integrally formed with the base portion 211.

[0063] The flange portion 220 may include a ridge 221 (a second ridge) projecting downward (towards the lower part 211b from the flange portion 220). The ridge 221 is annular (for example, circular). The ridge 221 is positioned outside the lower part 211b so as to surround the lower part 211b. The ridge 221 may be positioned along the vicinity of the outer peripheral edge of the lower surface of the flange portion 220.

[0064] The outer shape of the flange portion 220 may be configured to be smaller than the outer shape of the substrate W. That is, when the replacement tool 200 is held in the holding portion 20, the protrusion 221 may be located inside the protrusion 27. In the example of Figure 7, the outer shape of the flange portion 220 is configured to be smaller than the virtual ring shape (virtual circle) formed by the multiple protrusions 23. In this case, when the replacement tool 200 is held in the holding portion 20, the lower end of the protrusion 221 contacts the area inside the multiple protrusions 23 on the upper surface 21 of the holding portion 20. The outer shape of the flange portion 220 may be such that, when the replacement tool 200 is held in the holding portion 20, the protrusion 221 is located between adjacent protrusions 23 to 27 in the radial direction of the central axis Ax2.

[0065] When the replacement tool 200 is held by the retaining part 20, the flange portion 220 is slightly separated from the upper surface 21 of the retaining part 20 due to the presence of the protrusion 221. That is, as illustrated in Figure 8, when the replacement tool 200 is held by the retaining part 20, a space V2 is formed surrounded by the lower surface of the flange portion 220, the protrusion 221, and the upper surface 21 of the retaining part 20. Space V2 is in communication with space V1. Therefore, when the suction part 30 operates, the atmosphere in space V2 is sucked in through the suction hole 22 and space V1, and space V2 becomes a negative pressure. As a result, the flange portion 220 is attracted to the retaining part 20.

[0066] As illustrated in Figures 7 to 9, the elastic member 230 is attached to the outer circumferential surface (end face) of the flange portion 220. When the replacement tool 200 is held by the holding portion 20, the suction portion 30 operates and the flange portion 220 is attracted to the holding portion 20, causing the elastic member 230 to be pressed downward. This prevents gas leakage from the gap between the lower end of the protrusion 221 and the upper surface 21 of the holding portion 20.

[0067] [Controller Details] The controller Ctr is configured to partially or entirely control the substrate processing system 1. As illustrated in Figure 10, the controller Ctr consists of a reading unit M1, a storage unit M2, a processing unit M3, and an instruction unit M4 as functional modules. and These functional modules are merely a convenient division of the controller Ctr's functions into multiple modules, and do not necessarily mean that the hardware constituting the controller Ctr is divided into such modules. Each functional module is not limited to being implemented by program execution, but may also be implemented by a dedicated electrical circuit (e.g., a logic circuit) or an integrated circuit (ASIC: Application Specific Integrated Circuit) that integrates these.

[0068] The reading unit M1 is configured to read a program from a computer-readable recording medium RM. The recording medium RM stores a program for operating each part of the substrate processing system 1. The recording medium RM may be, for example, a semiconductor memory, an optical recording disk, a magnetic recording disk, or a magneto-optical recording disk. In the following, each part of the substrate processing system 1 may include the holding unit 20, the suction unit 30, the drive units 41, 54, and the imaging unit 70.

[0069] The storage unit M2 is configured to store various types of data. For example, the storage unit M2 may store programs read from the recording medium RM by the reading unit M1, setting data input from the operator via an external input device (not shown), etc. The storage unit M2 may also store data of processing conditions (processing recipes) for processing the substrate W. For example, the storage unit M2 may store data of images captured by the imaging unit 70.

[0070] The processing unit M3 is configured to process various types of data. For example, the processing unit M3 may generate control signals to operate each part of the substrate processing system 1 based on the various types of data stored in the storage unit M2.

[0071] The processing unit M3 may, for example, control the rotating unit 40 to rotate the holding unit 20 while the replacement tool 200 is attached to the holding unit 20 via the flange portion 220 and the irregularly shaped portion 103 of the nozzle 100 is engaged with the upper portion 212b of the replacement tool 200 (first processing). This tightens or loosens the male thread 101a of the nozzle 100 against the female thread 53f of the holding base 53, so that the nozzle 100 can be attached to or detached from the holding base 53.

[0072] The processing unit M3 may, for example, operate the suction unit 30 before the first processing described above to cause the flange unit 220 to adhere to the holding unit 20 (second processing). In this case, the processing unit M3 may, for example, operate the suction unit 30 with the lower part 211b of the main body unit 210 inserted into the suction hole 22 to create negative pressure in the space V2, thereby causing the flange unit 220 to adhere to the holding unit 20.

[0073] The processing unit M3 may, for example, control the drive unit 54 to apply pressure to the slide unit 213 via the nozzle 100 by the holding base 53 until the biasing unit 214 is retracted by a predetermined amount, before the first processing described above (third processing). This third processing may be performed with the irregularly shaped portion 103 of the nozzle 100 inserted into the outer cylindrical portion 212 (upper part 212b) of the replacement tool 200 attached to the holding unit 20, and with the irregularly shaped portion 103 of the nozzle 100 supported by the slide unit 213.

[0074] The processing unit M3 may, for example, determine the state of the replacement tool 200 and / or nozzle 100 based on the data of the image captured by the imaging unit 70. This determination of the state may include, for example, whether the replacement tool 200 is present in the holding unit 20, whether the nozzle 100 is present in the replacement tool 200, whether the installation state of the replacement tool 200 on the holding unit 20 is appropriate, and whether the installation state of the nozzle 100 on the replacement tool 200 is appropriate. This determination of the appropriateness of the installation state may include, for example, whether the replacement tool 200 is tilted relative to the holding unit 20, whether the flange portion 220 and elastic member 230 of the replacement tool 200 are in contact with the upper surface 21 of the holding unit 20, whether the nozzle 100 is tilted relative to the replacement tool 200, and whether the irregularly shaped portion 103 of the nozzle 100 is inserted into the opening OP of the main body portion 210. The processing unit M3 may determine the presence or absence of the nozzle by, for example, comparing a reference image with the captured image (so-called pattern matching), or it may determine the presence or absence of the nozzle in the current captured image using results obtained from machine learning of past captured images. When removing the nozzle 100 from the holding base 53, the processing unit M3 may issue an alarm from a notification unit (not shown) if the replacement tool 200 is not held in the holding part 20 or if another nozzle 100 is already attached to the replacement tool 200. Similarly, when attaching the nozzle 100 to the holding base 53, the processing unit M3 may issue an alarm from a notification unit (not shown) if the replacement tool 200 is not held in the holding part 20 or if the nozzle 100 to be attached is not present on the replacement tool 200. The alarm by the notification unit may be, for example, displayed on a display (not shown) as an alarm (e.g., text, graphics, etc.), or emitted as an alarm sound or alarm guidance from a speaker (not shown).

[0075] For example, if the retaining base 53 includes a plurality of recesses 53a (i.e., the retaining base 53 can hold a plurality of nozzles 100), the processing unit M3 may attach and detach a nozzle 100 to one of the plurality of recesses 53a designated by the operator. In this case, the processing unit M3 may adjust the position of the retaining base 53 by the drive unit 54 so that, for example, the recess 53a designated by the operator is located directly above the replacement tool 200 held by the retaining unit 20.

[0076] The instruction unit M4 is configured to transmit the control signals generated in the processing unit M3 to each part of the board processing system 1.

[0077] The hardware of the controller Ctr may consist of, for example, one or more control computers. The controller Ctr may include a circuit C1 as a hardware configuration, as illustrated in Figure 11. The circuit C1 may consist of electrical circuit elements. The circuit C1 may include, for example, a processor C2, memory C3, storage C4, a driver C5, and input / output ports C6.

[0078] The processor C2 may be configured to implement each of the above-described functional modules by executing a program in cooperation with at least one of the memory C3 and storage C4 and performing signal input and output via the input / output port C6. The memory C3 and storage C4 may function as a storage unit M2. The driver C5 may be a circuit configured to drive each part of the board processing system 1. The input / output port C6 may be configured to mediate signal input and output between the driver C5 and each part of the board processing system 1.

[0079] The board processing system 1 may have one controller Ctr, or it may have a controller group (control unit) composed of multiple controllers Ctr. If the board processing system 1 has a controller group, each of the above functional modules may be realized by one controller Ctr, or by a combination of two or more controllers Ctr. If the controller Ctr is composed of multiple computers (circuit C1), each of the above functional modules may be realized by one computer (circuit C1), or by a combination of two or more computers (circuit C1). The controller Ctr may have multiple processors C2. In this case, each of the above functional modules may be realized by one processor C2, or by a combination of two or more processors C2.

[0080] [How to replace the nozzle using a replacement tool] Next, with reference to Figures 12 to 14, a method for removing the nozzle 100 from the retaining base 53 using the replacement tool 200 will be described. Before removing the nozzle 100 from the retaining base 53, the flange portion 220 is attached to the retaining portion 20 by instruction from the controller Ctr to the suction portion 30. Also, the retaining portion 20 is rotated clockwise when viewed from above by instruction from the controller Ctr to the rotation portion 40. The rotation speed of the retaining portion 20 may be, for example, about 30 rpm. As a result, the replacement tool 200 rotates together with the retaining portion 20. Note that the timing of rotating the retaining portion 20 may be before the retaining base 53 is lowered.

[0081] First, as illustrated in Figure 12(a), the controller Ctr instructs the drive unit 54 to position the recess 53a, to which the nozzle 100 to be replaced is attached, directly above the replacement tool 200. The controller Ctr also instructs the drive unit 54 to lower the holding base 53, inserting the tip 102 of the nozzle 100 into the main body 210 of the replacement tool 200. The lowering speed of the holding base 53 may be, for example, about 1 mm / sec.

[0082] As the replacement tool 200 rotates and the nozzle 100 descends together with the holding base 53, the irregularly shaped portion 103 of the nozzle 100 may not enter the opening OP of the main body portion 210 (upper part 212b) when it reaches it. That is, as illustrated in Figure 12(b), the irregularly shaped portion 103 may push the outer cylinder portion 212 and the slide portion 213 downward against the biasing force of the biasing portion 214. In this case, when the replacement tool 200 rotates until the outer shape of the irregularly shaped portion 103 and the inner shape of the opening OP substantially coincide when viewed from above, the biasing force of the biasing portion 214 pushes the outer cylinder portion 212 and the slide portion 213 upward. As a result, the irregularly shaped portion 103 is inserted into the main body portion 210 (upper part 212b), as illustrated in Figure 13(a).

[0083] When the irregularly shaped portion 103 is inserted into the main body portion 210 (upper part 212b), the controller Ctr instructs the drive unit 54 to stop the descent of the retaining base 53. At this time, since the replacement tool 200 continues to rotate, the male screw 101a of the base end portion 101 is loosened from the female screw 53f of the recess 53a, as illustrated in Figure 13(b). At this time, while the lower end of the irregularly shaped portion 103 is supported by the slide portion 213, the irregularly shaped portion 103 pushes the outer cylinder portion 212 and the slide portion 213 downward against the biasing force of the biasing portion 214.

[0084] When the male thread 101a of the base end 101 is completely detached from the female thread 53f of the recess 53a, the retaining base 53 is raised by an instruction from the controller Ctr to the drive unit 54, as illustrated in Figure 14. The rotation of the retaining unit 20 is also stopped by an instruction from the controller Ctr to the rotating unit 40. With these steps completed, the process of removing the nozzle 100 from the retaining base 53 is finished.

[0085] Before removing the nozzle 100 from the holding base 53, the imaging unit 70 may image the suction hole 22 of the holding unit 20 and its surroundings. The controller Ctr may determine the state of the replacement tool 200 and / or the nozzle 100 based on the image. If the determination detects the absence of the replacement tool 200, the presence of another nozzle 100 on the replacement tool 200, or an improper installation of the replacement tool 200 and / or the nozzle 100, the controller Ctr may issue an alarm from the notification unit, as the situation is not suitable for removing the nozzle 100. On the other hand, if the determination does not detect the absence of the replacement tool 200 or the presence of another nozzle 100 on the replacement tool 200, the controller Ctr may proceed with the process of removing the nozzle 100 from the holding base 53.

[0086] Furthermore, after the process of removing the nozzle 100 from the retaining base 53, the imaging unit 70 may image the suction hole 22 of the retaining unit 20 and its surroundings. The controller Ctr may determine whether the nozzle 100 is present in the replacement device 200 based on the image captured. If, as a result of this determination, the presence of the nozzle 100 in the replacement device 200 is not detected, the removal of the nozzle 100 from the retaining base 53 has failed, and the controller Ctr may issue an alarm from the notification unit. On the other hand, if, as a result of this determination, the presence of the nozzle 100 in the replacement device 200 is detected, the controller Ctr may perform the process of attaching a new nozzle 100 to the recess 53a of the retaining base 53 that has become empty after the nozzle 100 was removed. Alternatively, the controller Ctr may perform the process of removing the nozzle 100 from another recess 53a. Alternatively, the controller Ctr may terminate the process.

[0087] Next, with reference to Figures 15 and 16, a method for attaching the nozzle 100 to the holding base 53 using the replacement tool 200 will be described. Before attaching the nozzle 100 to the holding base 53, the flange portion 220 is attached to the holding portion 20 by instruction from the controller Ctr to the suction portion 30. Also, a new nozzle 100 is attached to the replacement tool 200 so that the irregularly shaped portion 103 is inserted into the main body portion 210 (upper part 212b). Furthermore, the holding portion 20 is rotated counterclockwise when viewed from above by instruction from the controller Ctr to the rotation portion 40. The rotation speed of the holding portion 20 may be, for example, about 30 rpm. As a result, the replacement tool 200 rotates together with the holding portion 20. Note that the timing of rotating the holding portion 20 may be before the holding base 53 is lowered.

[0088] First, as illustrated in Figure 15(a), the controller Ctr instructs the drive unit 54 to position the empty recess 53a directly above the replacement tool 200 that holds the nozzle 100. The controller Ctr also instructs the drive unit 54 to lower the holding base 53, inserting the base end 101 of the nozzle 100 into the recess 53a of the holding base 53. The lowering speed of the holding base 53 may be, for example, about 1 mm / sec.

[0089] As the replacement tool 200 and nozzle 100 rotate and the retaining base 53 descends, the male thread 101a of the base end 101 of the nozzle 100 may not enter the female thread 53f when it reaches the female thread 53f of the main part 53c of the retaining base 53. In this case, the controller Ctr continues to descend the retaining base 53. In this case, as illustrated in Figure 15(b), the irregular part 103 pushes the slide part 213 downward by a predetermined amount against the biasing force of the biasing part 214. That is, pressure is applied to the slide part 213 via the nozzle 100 until the biasing part 214 shrinks by a predetermined amount. As a result, the restoring force of the biasing part 214 causes the slide part 213 to engage with the male thread 101a of the base end 101 and the female thread 53f of the main part 53c. of They press against each other. During this time, the replacement tool 200 and nozzle 100 continue to rotate, so the tip of the thread of the male screw 101a is naturally guided to the entrance of the thread groove of the female screw 53f. As a result, the male screw 101a of the base end 101 is tightened against the female screw 53f of the recess 53a.

[0090] Subsequently, the controller Ctr determines whether a predetermined torque has been reached in the rotating part 40 that is rotating the holding part 20. If the controller Ctr determines that the predetermined torque has not been reached, it continues to rotate the holding part 20. On the other hand, if the controller Ctr determines that the predetermined torque has been reached, it instructs the rotating part 40 and the drive unit 54 to stop the rotation of the holding part 20 and the descent of the holding base 53. This completes the tightening of the male screw 101a into the female screw 53f, as illustrated in Figure 16(a).

[0091] Once the male screw 101a is tightened into the female screw 53f, the retaining base 53 is raised by an instruction from the controller Ctr to the drive unit 54, as illustrated in Figure 16(b). This completes the process of attaching the nozzle 100 to the retaining base 53.

[0092] Before attaching the nozzle 100 to the holding base 53, the imaging unit 70 may image the suction hole 22 of the holding unit 20 and its surroundings. The controller Ctr may determine the status of the replacement device 200 and / or the nozzle 100 based on the image. If the determination detects the absence of the replacement device 200, the absence of the nozzle 100 on the replacement device 200, or an improper installation of the replacement device 200 and / or the nozzle 100, the controller Ctr may issue an alarm from the notification unit, as the situation is unsuitable for attaching the nozzle 100. On the other hand, if the determination does not detect the absence of the replacement device 200 or the absence of the nozzle 100 on the replacement device 200, the controller Ctr may proceed with the process of attaching the nozzle 100 to the holding base 53.

[0093] Furthermore, after the process of attaching the nozzle 100 to the holding base 53, the imaging unit 70 may image the suction hole 22 of the holding unit 20 and its surroundings. The controller Ctr may determine, based on the image, whether the nozzle 100 remains in the replacement device 200. If, as a result of this determination, the remaining nozzle 100 in the replacement device 200 is detected, the attachment of the nozzle 100 to the holding base 53 has failed, and the controller Ctr may issue an alarm from the notification unit. On the other hand, if, as a result of this determination, the remaining nozzle 100 in the replacement device 200 is not detected, the controller Ctr may perform the process of attaching a new nozzle 100 to another recess 53a. Alternatively, the controller Ctr may perform the process of removing the nozzle 100 attached to another recess 53a. Alternatively, the controller Ctr may terminate the process.

[0094] [Effect] By the way, when the processing liquid is repeatedly supplied from the nozzle 100 to the substrate W, it is necessary to replace the nozzle 100 with a new one for maintenance. This nozzle 100 replacement work was usually done manually by an operator. However, in recent years, thin-film processing equipment U1 has become more compact, and it can be difficult for an operator to reach inside the thin-film processing equipment U1. In addition, in thin-film processing equipment U1, considering the maintenance of the drive unit 54, the drive unit 54 is sometimes located on the inlet side of the thin-film processing equipment U1, and the holding base 53 that holds the nozzle 100 is sometimes located on the back side of the thin-film processing equipment U1. In this case, it becomes even more difficult for an operator to reach inside the thin-film processing equipment U1.

[0095] However, in the above example, the rotational force of the holding part 20 by the rotating part 40 acts on the replacement tool 200 attached to the holding part 20 via the flange part 220, causing the replacement tool 200 to rotate. This rotation of the replacement tool 200 then allows the nozzle 100 to be attached to and detached from the holding base 53. In other words, in the above example, the holding part 20 and the rotating part 40, which are used to hold and rotate the substrate W, are also used to hold and rotate the replacement tool 200. Therefore, it is possible to efficiently replace the nozzle 100 without manual labor with an extremely simple configuration of adding the replacement tool 200 to the equipment for substrate processing (holding part 20, rotating part 40, holding base 53, and drive part 54).

[0096] According to the above example, the replacement tool 200 can be detachably attached to a portion of the retaining portion 20 that substantially coincides with the center of rotation. In this case, the center of rotation of the replacement tool 200 and the retaining portion 20 Since the rotation center of the nozzle 100 is approximately coincided with the rotation center of the nozzle 100, the rotation of the replacement tool 200 via the holding part 20 can easily act on the nozzle 100. Therefore, it becomes possible to replace the nozzle 100 more efficiently.

[0097] In the above example, the suction part 30 can suck the atmosphere in the space V2 through the suction hole 22, thereby causing the flange part 220 to adhere to the holding part 20. In this case, the flange part 220 of the replacement tool 200 can be attached more firmly to the holding part 20.

[0098] In the above example, by operating the suction unit 30 with the lower part 211b of the main body 210 inserted into the suction hole 22, a negative pressure is created in the space V2, thereby causing the flange portion 220 to be attracted to the holding portion 20. In this case, by inserting the lower part 211b of the main body 210 into the suction hole 22, it becomes possible to accurately position the replacement tool 200 relative to the holding portion 20.

[0099] According to the above example, the main body portion 210 (lower part 211b) may include a notch 211e extending in the direction of extension of the replacement tool 200. In this case, when the suction part 30 is operated with the lower part 211b inserted into the suction hole 22, the presence of the notch 211e allows the suction hole 22 and the main body portion 210 to interact. lower 211b A relatively large flow path (space V1) is formed between the two. As a result, suction by the suction part 30 is performed through space V1, making it easier for the flange part 220 to adhere to the holding part 20. Therefore, it becomes possible to attach the flange part 220 of the replacement tool 200 more firmly to the holding part 20.

[0100] In the above example, the flange portion 220 includes a ridge 221 that protrudes downward, and when the replacement tool 200 is attached to the holding portion 20, the ridge 221 may be located inside the ridge 27 of the holding portion 20. In this case, when the replacement tool 200 is placed on the holding portion 20, a space V2 is created surrounded by the ridge 221, the upper surface 21 of the holding portion 20, and the flange portion 220. Therefore, by reducing the pressure inside the space V2 through the suction hole 22, the flange portion 220 of the replacement tool 200 can be attached more firmly to the holding portion 20. Also, in this case, the ridge 221 is located inside the ridge 27 and does not interfere with the ridge 27. Therefore, it is possible to perform the function of supporting the substrate W with the ridge 27 while also performing the function of attracting the flange portion 220 to the holding portion 20. Furthermore, in this case, since the ridge 221 is located inside the ridge 27, the size of the flange portion 220 can be made smaller than the size of the substrate W. Therefore, it becomes possible to make the replacement tool 200 more compact.

[0101] As shown in the above example, the outer circumferential surface of the irregularly shaped portion 103 of the nozzle 100 may have a non-circular irregular shape. The main body portion 210 (upper part 212b) of the replacement tool 200 may have a cylindrical shape capable of accommodating the irregularly shaped portion 103 of the nozzle 100. The inner circumferential surface of the opening OP of the main body portion 210 of the replacement tool 200 may have a shape corresponding to the outer circumferential surface of the irregularly shaped portion 103 of the nozzle 100. In this case, the rotation of the replacement tool 200 is transmitted to the nozzle 100 simply by inserting the irregularly shaped portion 103 of the nozzle 100 into the opening OP of the main body portion 210 of the replacement tool 200. Therefore, there is no need to use other members to prevent slippage between the replacement tool 200 and the nozzle 100. Thus, the replacement tool 200 and the nozzle 100 can be made into a simple configuration.

[0102] According to the above example, the biasing part 214 may be configured to apply a biasing force to the outer cylinder part 212 in the direction in which the replacement tool 200 extends and in a direction that separates the base part 211 from the outer cylinder part 212. In this case, even if the nozzle 100 continues to descend without the irregularly shaped part 103 of the nozzle 100 entering the opening OP of the main body part 210, the outer cylinder part 212 is pushed by the nozzle 100 (irregularly shaped part 103), and the outer cylinder part 212 descends together with the nozzle 100 against the biasing force of the biasing part 214. Then, when the irregularly shaped part 103 enters the opening OP while the replacement tool 200 is rotating, the biasing force of the biasing part 214 returns the outer cylinder part 212 to its original position, and the irregularly shaped part 103 engages with the opening OP. In this way, the nozzle 100 can continue to descend until the irregularly shaped part 103 enters the opening OP. Therefore, it becomes possible to replace the nozzle 100 more efficiently.

[0103] In the above example, with the irregularly shaped part 103 inserted into the main body part 210 (upper part 212b) and the irregularly shaped part 103 supported by the slide part 213, pressure can be applied to the slide part 213 via the nozzle 100 by the holding base 53 until the biasing part 214 is retracted by a predetermined amount. In this case, as pressure is applied to the slide part 213 via the nozzle 100 by the holding base 53, the biasing part 214 is retracted by a predetermined amount, and the restoring force of the biasing part 214 acts on the nozzle 100 via the slide part 213. As a result, the holding base 53 and the nozzle 100 press against each other. Therefore, when the tip of the male thread 101a of the base end 101 reaches the entrance of the screw groove of the female thread 53f of the main part 53c, the tip naturally enters the entrance. Thus, fastening of the male thread 101a and the female thread 53f can be performed very smoothly.

[0104] According to the above example, the outer circumferential surface of the base portion 211 (upper part 211a) may have a non-circular, irregular shape. The inner circumferential surface of the outer cylinder portion 212 (lower part 212a) may have a shape corresponding to the outer circumferential surface of the base portion 211 (upper part 211a). The inner circumferential surface of the upper part 212b and the outer circumferential surface of the irregular shape portion 103 may constitute a transmission section that transmits rotational force between the nozzle 100 and the replacement tool 200. In this case, there is no need to use any other components to prevent slippage between the outer cylinder portion 212 and the base portion 211. Therefore, the replacement tool 200 can be made with a simpler configuration.

[0105] In the above example, the main body portion 210 may include a projection 215 that protrudes from the outer cylinder portion 212 toward the base portion 211. The base portion 211 may include a housing portion 211c that accommodates the projection 215. In this case, the simple configuration of the projection 215 and the housing portion 211c makes it possible to prevent free rotation between the outer cylinder portion 212 and the base portion 211, and to prevent the outer cylinder portion 212, which is biased by the biasing portion 214, from coming out of the base portion 211.

[0106] In the above example, the housing portion 211c may extend along the extending direction of the replacement tool 200. In this case, the movement of the outer cylinder portion 212 relative to the base portion 211 in the extending direction of the replacement tool 200 is limited according to the length of the housing portion 211c. Therefore, the stroke length of the outer cylinder portion 212 can be adjusted by the length of the housing portion 211c.

[0107] As shown in the above example, the status of the replacement tool 200 and / or nozzle 100 can be automatically determined based on the image captured by the imaging unit 70. In this case, visual inspection by an operator is not required when replacing the nozzle 100. Therefore, it becomes possible to replace the nozzle 100 more efficiently.

[0108] [Differentiation] The disclosures herein should be considered in all respects to be illustrative and not restrictive. Various omissions, substitutions, and modifications may be made to the above examples without departing from the claims and the gist thereof.

[0109] (1) In the above example, a male screw 101a was directly provided on the outer surface of the nozzle 100 (base end 101). However, as illustrated in Figure 17, the nozzle 100A (processing tool) may not have a screw, and the nozzle 100A may be attached to the retaining base 53 via a nut 120 (processing tool, another fastening part, engaging part).

[0110] In the example shown in Figure 17, the retaining base 53 includes a connecting portion 55 that protrudes downward. Inside the connecting portion 55 is a flow path 53e that connects to the piping 52. The connecting portion 55 includes a base end 55a, a tip end 55b, and an intermediate portion 55c. The base end 55a may be integrally connected to the retaining base 53. The tip end 55b has a shape corresponding to the base end 101 of the nozzle 100A and is configured to be housed in a recess 101b provided in the base end 101. The intermediate portion 55c is located between the base end 55a and the tip end 55b and connects them. A male screw 55d (fastening portion) is provided on the outer circumferential surface of the intermediate portion 55c.

[0111] The nozzle 100A includes a base portion 101 and a tip portion 102. The outer shape of the base portion 101 is configured to be larger than the outer shape of the tip portion 102.

[0112] The nut 120 includes a cylindrical portion 121 (engaging portion) and a flange portion 122. The inner shape of the cylindrical portion 121 is configured to be approximately the same as or larger than the outer shape of the base portion 101, and also approximately the same as the outer shape of the intermediate portion 55c. A female thread 120a is provided on the inner circumferential surface of the cylindrical portion 121. The nut 120 is attached to the retaining base 53 (connecting portion 55) by tightening the female thread 120a against the male thread 55d. Conversely, the nut 120 is removed from the retaining base 53 (connecting portion 55) by loosening the female thread 120a from the male thread 55d.

[0113] The outer circumferential surface of the cylindrical portion 121 has a shape that corresponds to the inner circumferential surface of the upper portion 212b (the inner circumferential surface of the opening OP of the main body portion 210). In other words, the outer circumferential surface of the cylindrical portion 121 has a non-circular shape (a shape other than a perfect circle). Therefore, when replacing the nozzle 100A with the replacement tool 200, the cylindrical portion 121 is inserted into the upper portion 212b, and the outer cylindrical portion 212 (replacement tool 200) and the nut 120 are fitted together (engaged).

[0114] The flange portion 122 extends radially inward from near the lower end of the cylindrical portion 121 toward the nut 120. The flange portion 122 may be an annular plate-like body. That is, a through hole 122a may be provided in the center of the flange portion 122. The inner shape of the through hole 122a is configured to be larger than the outer shape of the tip portion 102 and smaller than the outer shape of the base portion 101. Therefore, the tip portion 102 can pass through the through hole 122a, but the base portion 101 cannot. For this reason, the flange portion 122 is configured to clamp the base portion 101 between itself and the tip portion 55b when the nut 120 is attached to the intermediate portion 55c. Thus, when the nut 120 is attached to the intermediate portion 55c, the nozzle 100A is prevented from coming off the nut 120. The flange portion 122 may be integrally formed with the cylindrical portion 121.

[0115] In the example shown in Figure 17, the same effects and benefits as in the example above can be obtained.

[0116] (2) In the above example, the nozzle 100 was replaced using the replacement tool 200, but as illustrated in Figure 18(a), the brush 100B (processing tool) may also be replaced using the replacement tool 200. In the example in Figure 18(a), the retaining base 53 includes a recessed portion 56 (fastening portion) that is recessed inward. The inner circumferential surface of the recessed portion 56 is provided with female threads.

[0117] The brush 100B may be configured, for example, to scrub and clean the surface Wa of the substrate W. The brush 100B may include a base portion 131, a brush portion 132 provided on the lower surface of the base portion 131, and a connecting portion 133 provided on the upper surface of the base portion 131.

[0118] The outer circumferential surface of the base portion 131 has a shape that corresponds to the inner circumferential surface of the upper portion 212b (the inner circumferential surface of the opening OP of the main body portion 210). In other words, the outer circumferential surface of the base portion 131 has a non-circular shape (a shape other than a perfect circle). Therefore, when replacing the brush 100B with the replacement tool 200, the base portion 131 is inserted into the upper portion 212b, and the outer cylinder portion 212 (replacement tool 200) and the base portion 131 are fitted together (engaged).

[0119] A male screw is provided on the outer surface of the connecting portion 133. The brush 100B is attached to the retaining base 53 by tightening the male screw of the connecting portion 133 against the female screw of the recess 56. Conversely, the brush 100B is removed from the retaining base 53 by loosening the male screw of the connecting portion 133 from the female screw of the recess 56.

[0120] In the example shown in Figure 18(a), the same effects and benefits as in the example above can be obtained.

[0121] (3) As illustrated in Figure 18(b), the nozzle 100 may be attached to the retaining base 53 by a screw 140 instead of the male screw 101a at the base end 101 of the nozzle 100. In the example in Figure 18(b), the retaining base 53 includes a plurality of recesses 57 (fastening parts) that are recessed inward. Female screws are provided on the inner circumferential surface of the recesses 57.

[0122] The nozzle 100 may be provided with a flange portion 105 (another flange portion). The flange portion 105 extends (protrudes) radially outward from the outer circumferential surface of the nozzle 100. The flange portion 105 may be an annular plate-like body. The flange portion 105 may be integrally formed with the nozzle 100. The flange portion 105 is provided with a plurality of through holes 105a. The number of through holes 105a may be the same as the number of recesses 57. The positions of the multiple through holes 105a correspond to the positions of the multiple recesses 57. Female threads may be provided on the inner circumferential surface of the multiple through holes 105a.

[0123] The screw 140 includes a main body 141 (another fastening part) and a head 142 (engaging part). The outer circumferential surface of the main body 141 is provided with male threads. The outer shape of the main body 141 may be substantially the same as the inner shape of the recess 57 and the inner shape of the through hole 105a. The head 142 is integrally connected to the base end of the main body 141. The outer shape of the head 142 is configured to be larger than the outer shape of the main body 141. The outer circumferential surface of the head 142 has an irregular shape that is not circular (a shape other than a perfect circle). Therefore, by the replacement tool 200 Nozzle 100 When replacing the part, the head 142 is inserted into the upper part 212b, and the outer cylinder part 212 (replacement tool 200) and the head 142 are fitted together (engaged).

[0124] The nozzle 100 is attached to the retaining base 53 by tightening the male thread of the main body 141 against the female thread of the recess 57 and the through hole 105a. On the other hand, when the male thread of the main body 141 is loosened from the female thread of the recess 57 and the through hole 105a, Nozzle 100 The nozzle 100 is removed from the retaining base 53. That is, when replacing the nozzle 100, the position of the retaining base 53 may be adjusted by the drive unit 54 so that the recess 57 is positioned directly above the replacement tool 200.

[0125] In the example shown in Figure 18(b), the same effects and benefits as in the example above can be obtained.

[0126] (4) As illustrated in Figure 19, the outer shape of the flange portion 220 may be configured to be approximately the same size as the outer shape of the substrate W. In this case, the lower surface of the flange portion 220 is supported by the protrusions 23 to 27, and the flange portion 220 is attracted to the holding portion 20. Note that the replacement tool 200 illustrated in Figure 19 does not necessarily include the elastic member 230.

[0127] (5) In the above example, the replacement tool 200 was attached to the holding part 20 by suction of the flange portion 220 to the holding part 20 using the suction part 30. However, the replacement tool 200 may also be attached to the holding part 20A by physically gripping the outer edge of the flange portion 220 using the holding part 20A illustrated in Figures 20 and 21. The holding part 20A may also be applied to holding a replacement tool 200 in which the flange portion 220 is enlarged, as illustrated in Figure 19.

[0128] As illustrated in Figure 20, the holding portion 20A includes a rotating plate 28 and a plurality of support portions 29. The rotating plate 28 is substantially disc-shaped and connected to the rotating portion 40. The plurality of support portions 29 are provided on the outer edge of the rotating plate 28 so as to be arranged at substantially equal intervals along the outer edge of the rotating plate 28.

[0129] The support portion 29 includes a gripping portion 29a and support bars 29b positioned on both sides of the gripping portion 29a. The gripping portion 29a includes a gripping piece 29c, a lever member 29d, and a biasing portion 29e, as illustrated in Figure 21. The gripping piece 29c is configured to physically grip the substrate W or the flange portion 220 by contacting the outer edge of the substrate W or the outer edge of the flange portion 220. The lower end of the gripping piece 29c is connected to one end of the lever member 29d. The lever member 29d is connected to the gripping piece 29c at a predetermined angle (for example, about 120°) with respect to the gripping piece 29c. The gripping piece 29c and the lever member 29d are attached to the rotating plate 28 via a rotating shaft 29f. Therefore, the gripping piece 29c is configured to be rotatable between a first position (see Figure 21(a)) away from the outer edge of the substrate W or the outer edge of the flange portion 220, and a second position (see Figure 21(b)) in contact with the outer edge of the substrate W or the outer edge of the flange portion 220.

[0130] The biasing portion 29e is provided to connect the lower surface of the rotating plate 28 and the lever member 29d, and is configured to apply a biasing force to the lever member 29d. The biasing portion 29e may be, for example, a compression coil spring. Therefore, when the rod ARa provided on the arm AR rises together with the arm AR, the lever member 29d also rises due to the rod ARa, and the biasing portion 29e is compressed. As a result, the gripping piece 29c rotates around the rotation axis 29f and moves to a first position (see Figure 21(a)). On the other hand, when the rod ARa provided on the arm AR descends together with the arm AR, the lever member 29d is pushed downward by the restoring force of the biasing portion 29e. As a result, the gripping piece 29c rotates around the rotation axis 29f and moves to a second position (see Figure 21(b)). At this time, the biasing force of the biasing portion 29e acts on the gripping piece 29c via the lever member 29d. Therefore, the gripping piece 29c presses against the outer edge of the substrate W or the outer edge of the flange portion 220. As a result, the gripping piece 29c grips the substrate W or the flange portion 220. The arm AR may be configured to move up and down by a drive unit (not shown).

[0131] The support bar 29b includes an inclined surface S, as illustrated in Figure 20. The inclined surface S is provided on the inner peripheral edge side of the support bar 29b. The inclined surface S slopes downward as it extends radially inward. Therefore, when the outer peripheral edge of the substrate W or the outer peripheral edge of the flange portion 220 comes into contact with the inclined surface S, the substrate W or the flange portion 220 is guided by sliding along the inclined surface S and positioned relative to the holding portion 20A.

[0132] (6) As illustrated in Figures 22 and 23, the upper part 212b of the replacement tool 200 (opening OP of the main body 210) may be provided with at least two replacement tool projections 240. The replacement tool projections 240 may protrude radially inward from the opening OP. That is, the replacement tool projections 240 may protrude so as to extend toward the central axis Ax2. The replacement tool projections 240 may also be ridges that extend in the direction of extension of the main body 210 (central axis Ax2).

[0133] In the examples shown in Figures 22 and 23, the opening OP is provided with two interchangeable tool projections 240 (241, 242). The interchangeable tool projection 241 (first interchangeable tool projection) and the interchangeable tool projection 242 (second interchangeable tool projection) may be positioned opposite each other across the center of the opening OP (central axis Ax2). Here, "opposing each other" means that, with the position of one interchangeable tool projection 241 on the inner circumferential surface of the opening OP as the base point (0°), the other interchangeable tool projection 242 is located within a range of 90° to 270° on the inner circumferential surface of the opening OP. That is, the interchangeable tool projections 241 and 242 may be separated in the radial direction of the opening OP in the range of 90° to 270°, 120° to 240°, 150° to 210°, or positioned 180° opposite each other. Similarly, if the opening OP is provided with three or more interchangeable tool protrusions 240, at least two of the three or more interchangeable tool protrusions 240 may be positioned facing each other across the center of the opening OP (central axis Ax2). The three or more interchangeable tool protrusions 240 are located in the opening OP Zhou They may be arranged at approximately equal intervals in the direction, or at different intervals.

[0134] As illustrated by the dashed line in Figure 23, the irregular portion 103 of the nozzle 100 may include a plurality of processing tool protrusions 106 that project radially outward from the nozzle 100 (irregular portion 103). In the example in Figure 23, the irregular portion 103 includes six processing tool protrusions 106, but it may include two or more processing tool protrusions 106. Between two adjacent processing tool protrusions 106 in the circumferential direction of the irregular portion 103, processing tool recesses 107 are formed.

[0135] The outer circumferential surface of the replacement tool projection 240 may have a shape corresponding to the outer circumferential surface of the processing tool recess 107. As illustrated in Figure 23, when viewed from the extending direction of the main body portion 210 (central axis Ax2), the outer circumferential surface of the replacement tool projection 240 may be a curved surface exhibiting an arc shape, and the outer circumferential surface of the processing tool recess 107 may be a concave surface exhibiting an arc shape corresponding to the said curved surface. However, the shapes of the outer circumferential surfaces of the replacement tool projection 240 and the processing tool recess 107 are not particularly limited, as long as the replacement tool projection 240 and the processing tool recess 107 can come into contact when the replacement tool 200 rotates while the irregularly shaped portion 103 of the nozzle 100 is housed in the opening OP. That is, the replacement tool projection 240 and the processing tool projection 106 each only need to be configured to be able to engage with the other when the irregularly shaped portion 103 of the nozzle 100 is housed in the opening OP. Therefore, the irregularly shaped portion 103 may, as a whole, be polygonal (for example, triangular, square, hexagonal, octagonal, etc.). The replacement tool projection 240 and the processing tool projection 106 may each be plate-shaped, semi-cylindrical, or polygonal prism-shaped (for example, triangular prism, square prism, hexagonal prism, octagonal prism, etc.).

[0136] Incidentally, when the irregularly shaped portion 103 (processing tool projection 106) of the nozzle 100 is inserted into the opening OP of the main body portion 210 of the replacement tool 200, the processing tool projection 106 may ride up on the replacement tool projection 240, or a misalignment may occur between the center of the replacement tool 200 (central axis Ax2) and the center of the nozzle 100 (see Figure 24(a)). However, in the case of the replacement tool 200 illustrated in Figures 22 and 23, the number of replacement tool projections 240 is the same as or less than the number of processing tool projections 106. Therefore, the replacement tool projections 240 are smoothly inserted into the processing tool recess 107 by the rotation of the replacement tool 200 (see Figures 24(b) to 24(d)). Also, in the case of the replacement tool 200 illustrated in Figures 22 and 23, the replacement tool projections 241 and 242 are positioned facing each other with the center of the opening OP (central axis Ax2) in between. Therefore, even if there is a misalignment between the center of the replacement tool 200 and the center of the nozzle 100, the replacement tool projection 240 remains in the processing tool recess 107 after the irregularly shaped portion 103 of the nozzle 100 is inserted into the opening OP (see Figure 24(d)). Consequently, when the replacement tool 200 rotates, the engagement between the replacement tool projection 240 and the processing tool projection 106 is more reliable. As a result, it becomes possible to more reliably insert the irregularly shaped portion 103 of the nozzle 100 into the opening OP, and to more reliably transmit the rotation of the replacement tool 200 to the nozzle 100.

[0137] In the case of the replacement tool 200 illustrated in Figures 22 and 23, the opening OP may have a substantially circular shape. Therefore, since the processing tool projection 106 does not engage with anything other than the replacement tool projection 240 within the opening OP, it becomes possible to transmit the rotation of the replacement tool 200 to the nozzle 100 more reliably.

[0138] In the case of the replacement tool 200 illustrated in Figures 22 and 23, the outer circumferential surface of the replacement tool projection 240 may have a shape corresponding to the outer circumferential surface of the processing tool recess 107. Therefore, after the irregularly shaped portion 103 of the nozzle 100 is inserted into the opening OP, the replacement tool projection 240 and the processing tool projection 106 can engage more closely. As a result, the rotation of the replacement tool 200 can be transmitted to the nozzle 100 more reliably.

[0139] In the case of the replacement tool 200 illustrated in Figures 22 and 23, the replacement tool projection 240 may be a ridge extending in the direction of extension of the main body 210 (central axis Ax2). Therefore, when the irregularly shaped portion 103 of the nozzle 100 is inserted into the opening OP, the nozzle 100 moves smoothly along the replacement tool projection 240. As a result, the irregularly shaped portion 103 of the nozzle 100 can be inserted into the opening OP more reliably.

[0140] (7) When there are two replacement tool protrusions 240 and two processing tool protrusions 106, the two replacement tool protrusions 241 and 242 may be positioned so as to be 180° opposite to each other, as illustrated in Figure 25, or the two processing tool protrusions 106 may be positioned so as to be 180° opposite to each other. In the example of Figure 25(a), the width of the processing tool protrusion 106 is about the same as the width of the replacement tool protrusions 241 and 242, and the processing tool protrusions 106 are approximately in the circumferential direction of the irregular shape 103. 180 They are separated by approximately 1°. That is, since the two processing tool protrusions 106 occupy a portion of the opening OP, when the replacement tool 200 rotates, it may take a predetermined amount of time for the replacement tool protrusion 240 to come into contact with the processing tool protrusion 106. On the other hand, in the example of Figure 25(b), the width of the processing tool protrusion 106 is approximately the same as the distance between the replacement tool protrusions 241 and 242 in the circumferential direction of the irregular shape 103, and is approximately the same as the width of the processing tool recess 107. That is, since the two processing tool protrusions 106 occupy almost the entire opening OP, when the replacement tool 200 rotates, the replacement tool protrusion 240 can come into contact with the processing tool protrusion 106 immediately.

[0141] (8) As illustrated in Figures 22 and 26, the flange portion 220 of the replacement tool 200 may be enlarged in the radial direction of the central axis Ax2. Specifically, the flange portion 220 may have a substantially circular shape when viewed from the extending direction of the central axis Ax2, and may have a larger area than the area of ​​the upper surface 21 of the retaining portion 20. When the replacement tool 200 is attached to the retaining portion 20 via the flange portion 220, the flange portion 220 may be configured to cover the entire upper surface 21 of the retaining portion 20.

[0142] In this case, when the nozzle 100 is replaced, even if any material (for example, droplets of processing liquid (chemical solution, resist solution, etc.)) falls from the nozzle 100 as it moves above the holding part 20, this material will fall onto the flange part 220. Therefore, the presence of the flange part 220 prevents the material from adhering to the upper surface 21 of the holding part 20. Consequently, when the substrate W is held in the holding part 20 after the nozzle 100 has been replaced, contamination of the substrate W by material present on the upper surface 21 of the holding part 20 transferring to the substrate W can be prevented.

[0143] In the examples shown in Figures 22 and 26, the flange portion 220 may include a plurality of protrusions 222 to 227 projecting downward from the lower surface S1 of the flange portion 220. The protrusions 222 to 227 may be annular (for example, circular) in shape, or they may be arranged concentrically around a central axis Ax2. Protrusion 222 may be higher than the other protrusions 223 to 227. Therefore, when the replacement tool 200 is attached to the retaining portion 20 via the flange portion 220, the tip of protrusion 222 may contact the upper surface 21 of the retaining portion 20, while the other protrusions 223 to 227 may not contact the upper surface 21 of the retaining portion 20 or the protrusions 23 to 26. In this case, when the suction unit 30 operates with the replacement tool 200 attached to the holding unit 20 via the flange portion 220, the atmosphere in the space surrounded by the lower surface S1 of the flange portion 220, the upper surface 21 of the holding unit 20, and the protrusions 222 is sucked in through the suction hole 22, creating negative pressure in the space. In this way, by ensuring that the protrusion 222 closest to the central axis Ax2 among the multiple protrusions 222 to 227 contacts the upper surface 21 of the holding unit 20, when the space becomes negative pressure and the flange portion 220 is attracted to the holding unit 20, downward sagging of the flange portion 220 is suppressed. Therefore, the flange portion 220 is less likely to come into contact with the protrusions 23 to 26, making it possible to suppress contamination of the protrusions 23 to 26 that the substrate W comes into contact with when the holding unit 20 holds the substrate W.

[0144] [Other examples] Example 1. An example of a substrate processing apparatus comprises a holding unit configured to hold a substrate, a rotating unit configured to rotate the holding unit, a processing tool configured to process the surface of the substrate held by the holding unit, a replacement tool configured to be detachably attached to the holding unit, a holding and transporting unit configured to hold and transport the processing tool, and a control unit. The replacement tool includes a main body configured to be engaged with an engaging portion of the processing tool, and a flange portion extending from the circumferential surface of the main body for attachment and detachment to and from the holding unit. The processing tool includes another fastening portion configured to be tightened to a fastening portion provided on the holding and transporting unit. The control unit is configured to perform a first process of attaching and detaching the processing tool to and from the holding and transporting unit by controlling the rotating unit to rotate the holding unit while the replacement tool is attached to the holding unit via the flange portion and the engaging portion of the processing tool is engaged with the main body of the replacement tool. In this case, the rotational force of the holding unit by the rotating unit acts on the replacement tool attached to the holding unit via the flange portion, causing the replacement tool to rotate. This rotation of the replacement tool then causes the processing tool to be attached to and detached from the holding and transporting unit. In other words, according to the apparatus of Example 1, the holding and rotating parts for holding and rotating the substrate are also used for holding and rotating the replacement tool. Therefore, it is possible to efficiently replace the processing tool with an extremely simple configuration, which involves adding the replacement tool to the equipment for substrate processing (holding part, rotating part, and holding and transporting part).

[0145] Example 2. In the apparatus of Example 1, the replacement tool may be detachably attached to a part that substantially coincides with the rotation center of the holding part. In this case, since the rotation center of the replacement tool and the rotation center of the holding part substantially coincide, the rotation of the replacement tool via the holding part is more easily acted upon the processing tool. Therefore, it becomes possible to replace the processing tool more efficiently.

[0146] Example 3. The apparatus of Example 1 or Example 2 further comprises a suction unit configured to attract a substrate to a holding unit, the holding unit including a suction hole that is open upward and connected to the suction unit, and the control unit may be configured to perform a second process before the first process, which involves operating the suction unit to attract the flange unit to the holding unit. In this case, the flange unit of the replacement tool can be attached more firmly to the holding unit.

[0147] Example 4. In the apparatus of Example 3, the second process may include, before the first process, operating the suction unit with the lower part of the main body inserted into the suction hole to create a negative pressure between the flange and the upper surface of the retaining unit, thereby causing the flange to adhere to the retaining unit. In this case, inserting the lower part of the main body into the suction hole makes it possible to accurately position the replacement tool relative to the retaining unit.

[0148] Example 5. In the apparatus of Example 4, the main body may include a notch that is partially cut out on the outer circumferential surface of its lower part, extending in the direction of extension of the replacement tool. In this case, when the suction unit is operated with the lower part of the main body inserted into the suction hole, the presence of the notch creates a relatively large flow path between the suction hole and the lower part of the main body. As a result, suction is performed by the suction unit through this flow path, making it easier for the flange to adhere to the retaining part. Therefore, it becomes possible to attach the flange of the replacement tool more firmly to the retaining part.

[0149] Example 6. In any of the devices in Examples 3 to 5, the retaining portion includes a first annular projection provided on the upper surface of the retaining portion to support the substrate, the first projection is annular, and the flange portion includes a second annular projection that protrudes toward the lower side of the main body, and when the replacement device is attached to the retaining portion, the second projection may be located inside the first projection. In this case, when the replacement device is placed on the retaining portion, a space is created enclosed by the second projection, the upper surface of the retaining portion, and the flange portion. Therefore, by reducing the pressure in this space through the suction hole, the flange portion of the replacement device can be attached more firmly to the retaining portion. Also, Example6 In this case, the second protrusion is located inside the first protrusion and does not interfere with the first protrusion. Therefore, it is possible to perform the function of supporting the substrate with the first protrusion while also performing the function of adhering the flange portion to the holding portion. Furthermore, for example 6 In this case, since the second protrusion is located inside the first protrusion, the size of the flange can be made smaller than the size of the substrate. Therefore, it becomes possible to make the replacement tool more compact.

[0150] Example 7. In any of the devices in Examples 1 to 6, the outer circumferential surface of the engagement portion of the processing tool has a non-circular, irregular shape, the main body of the replacement tool has a cylindrical shape capable of accommodating the engagement portion of the processing tool, and the inner circumferential surface of the opening of the main body of the replacement tool may have a shape corresponding to the outer circumferential surface of the engagement portion of the processing tool. In this case, the rotation of the replacement tool is transmitted to the processing tool simply by inserting the engagement portion of the processing tool into the opening of the main body of the replacement tool. Therefore, there is no need to use other members to prevent slippage between the replacement tool and the processing tool. Thus, the replacement tool and the processing tool can be made into a simpler configuration.

[0151] Example 8. In any of the devices in Examples 1 to 7, the main body of the replacement tool includes a cylindrical base portion, a cylindrical outer cylinder portion located outside the base portion, a transmission portion configured to transmit rotational force from the holding portion between the base portion and the outer cylinder portion, and a biasing portion, wherein the outer cylinder portion is configured to slide relative to the base portion in the extending direction of the replacement tool, and the biasing portion may be configured to apply a biasing force to the outer cylinder portion in the extending direction of the replacement tool and in a direction that separates the base portion and the outer cylinder portion. However, when removing the processing tool from the holding and transporting portion, if the processing tool is lowered toward the replacement tool while the replacement tool is rotated, the engaging portion of the processing tool may be blocked by the edge of the opening of the main body portion when it reaches the replacement tool, and the engaging portion may not enter the exit. 8According to this, even if the engagement portion does not enter the opening and the processing tool continues to descend, the outer cylinder portion is pushed by the processing tool, and together with the processing tool, the outer cylinder portion descends against the biasing force of the biasing portion. Then, when the engagement portion enters the opening during the rotation of the replacement tool, the biasing force of the biasing portion returns the outer cylinder portion to its original position, and the engagement portion engages with the opening. 8 According to this, the processing tool can continue to descend until the engaging portion enters the opening. Therefore, it becomes possible to replace the processing tool more efficiently.

[0152] Example 9. In the apparatus of Example 8, the main body of the replacement tool further includes a slide portion configured to slide inside the outer cylinder portion between the base portion and the outer cylinder portion in the extending direction of the replacement tool, and the biasing portion is configured to apply a biasing force to the outer cylinder portion via the slide portion, and the control unit may further perform a third process before the first process, which controls the holding and transporting unit to apply pressure to the slide portion via the processing tool by the holding and transporting unit until the biasing portion is compressed by a predetermined amount, with the engaging portion of the processing tool inserted into the outer cylinder portion of the replacement tool attached to the holding unit via the flange portion and the processing tool supported by the slide portion. However, when attaching the processing tool to the holding and transporting unit, if the replacement tool is rotated and the holding and transporting unit is lowered toward the processing tool, it is possible that the screw grooves of another fastening portion of the processing tool may not engage when it reaches the fastening portion of the holding and transporting unit. That is, it is possible that the processing tool may spin freely relative to the holding and transporting unit without the fastening portion of the other fastening portion being tightened. However, Example 9 According to this, pressure is applied to the sliding part via the processing tool by the holding and conveying part, causing the biasing part to contract by a predetermined amount, and the restoring force of the biasing part acts on the processing tool via the sliding part. As a result, the holding and conveying part and the processing tool press against each other, so when the tip of the thread of one fastening part and the other fastening part reach the entrance of the other screw groove, the tip naturally enters the entrance. Therefore, fastening between the fastening part and the other fastening part becomes extremely smooth.

[0153] Example 10. In the device of Example 8 or Example 9, the outer circumferential surface of the base portion has a non-circular, irregular shape, the inner circumferential surface of the outer cylinder portion has a shape corresponding to the outer circumferential surface of the base portion, and the transmission portion may be composed of the outer circumferential surface of the base portion and the inner circumferential surface of the outer cylinder portion. In this case, it becomes unnecessary to use other members to prevent slippage between the outer cylinder portion and the base portion. Therefore, the replacement tool can be made simpler in configuration.

[0154] Example 11. In any of the devices in Examples 8 to 10, the main body may include a projection that extends from the outer cylinder toward the base, and the base may include a housing that accommodates the projection. In this case, the simple configuration of the projection and housing makes it possible to prevent free rotation between the outer cylinder and the base, and to prevent the outer cylinder, which is biased by the biasing part, from coming out of the base.

[0155] Example 12. In the apparatus of Example 11, the housing portion may extend along the extending direction of the replacement tool. In this case, the movement of the outer cylinder portion relative to the base portion in the extending direction of the replacement tool is limited according to the length of the housing portion. Therefore, the stroke length of the outer cylinder portion can be adjusted by the length of the housing portion.

[0156] Example 13. In any of the apparatuses in Examples 1 to 12, the processing tool may include a nozzle for supplying processing liquid to the surface of the substrate.

[0157] Example 14. In any of the apparatuses of Examples 1 to 12, the processing device includes a plurality of nozzles for supplying a processing liquid to the surface of a substrate, and the control unit may perform the first processing on one of the plurality of nozzles that is designated.

[0158] Example 15. In any of the apparatuses in Examples 1 to 12, the processing tool may include a brush for scrubbing the surface of the substrate.

[0159] Example 16. In any of the devices in Examples 1 to 12, the processing tool may include another flange portion protruding from the circumferential surface of the processing tool, and the other fastening portion may be configured to be tightened to the fastening portion of the holding and conveying section via the other flange portion.

[0160] Example 17. In the apparatus of Example 1 or Example 2, the holding part is configured to be able to physically grip the peripheral edge of the substrate, and the replacement tool may be attached to the holding part by the holding part gripping the peripheral edge of the flange part. In this case, the flange part of the replacement tool can be attached to the holding part more firmly.

[0161] Example 18. Any device from Examples 1 to 17 may further include an imaging unit configured to image the holding unit, and the control unit may be configured to perform a fourth process that determines the state of the replacement tool and / or processing tool based on the image captured by the imaging unit. In this case, the presence or absence of a replacement tool in the holding unit and the presence or absence of a processing tool in the replacement tool are automatically determined based on the image, so visual confirmation by an operator is not required when replacing the processing tool. Therefore, it becomes possible to replace the processing tool more efficiently.

[0162] Example 19. In any of the devices in Examples 1 to 18, the engagement portion of the processing tool is provided with a plurality of processing tool protrusions projecting radially outward from the engagement portion, the main body of the replacement tool is cylindrical in shape capable of accommodating the engagement portion of the processing tool, and the opening of the main body of the replacement tool is provided with a first replacement tool protrusion and a second replacement tool protrusion, which project radially inward from the opening and are configured to engage with any of the plurality of processing tool protrusions when the engagement portion of the processing tool is housed in the opening, and the first replacement tool protrusion and the second replacement tool protrusion may be positioned facing each other with the center of the opening in between. However, when the engagement portion of the processing tool is inserted into the opening of the main body of the replacement tool, the processing tool protrusions may ride up on the replacement tool protrusions, or a misalignment may occur between the center of the replacement tool and the center of the processing tool. However, in the case of Example 19, the number of replacement tool protrusions is the same as or less than the number of processing tool protrusions. Therefore, as the replacement tool rotates, the first and second replacement tool protrusions are smoothly inserted into the recesses of the processing tool, which are formed between two adjacent processing tool protrusions in the circumferential direction of the engagement portion among the multiple processing tool protrusions. In addition, in Example 19, the first and second replacement tool protrusions are positioned facing each other with the center of the opening in between. Therefore, even if there is a misalignment between the center of the replacement tool and the center of the processing tool, the first and second replacement tool protrusions remain in the recesses of the processing tool after the engagement portion of the processing tool is inserted into the opening of the main body of the replacement tool. Thus, engagement between the replacement tool protrusions and the processing tool protrusions is more reliable when the replacement tool rotates. As a result, it becomes possible to more reliably insert the engagement portion of the processing tool into the opening of the main body of the replacement tool, and to more reliably transmit the rotation of the replacement tool to the processing tool.

[0163] Example 19a. In the apparatus of Example 19, the opening may be substantially circular in shape. In this case, since the processing tool projection does not engage with anything other than the replacement tool projection within the opening of the main body of the replacement tool, the rotation of the replacement tool can be transmitted to the processing tool more reliably.

[0164] Example 19b. In the apparatus of Example 19 or Example 19a, the outer circumferential surfaces of the first and second replacement tool protrusions may have a shape corresponding to the outer circumferential surface of a processing tool recess formed between two adjacent processing tool protrusions in the circumferential direction of the engagement portion among the plurality of processing tool protrusions. In this case, after the engagement portion of the processing tool is inserted into the opening of the main body of the replacement tool, the replacement tool protrusion and the processing tool protrusion become more closely engaged. Therefore, the rotation of the replacement tool can be transmitted to the processing tool more reliably.

[0165] Example 19c. In any of the devices of Example 19, Example 19a, and Example 19b, the first and second replacement tool projections may be ridges extending in the direction of extension of the main body. In this case, when the engaging portion of the processing tool is inserted into the opening of the main body of the replacement tool, the processing tool moves smoothly along the replacement tool projection. This makes it possible to insert the engaging portion of the processing tool into the opening of the main body of the replacement tool more reliably.

[0166] Example 20. In any of the devices in Examples 1 to 19 and Examples 19a to 19c, the flange portion of the replacement tool may have a larger surface area than the surface area of ​​the holding portion, and may be configured to cover the entire surface of the holding portion when the replacement tool is attached to the holding portion via the flange portion. In this case, when the processing tool is replaced, even if falling material (e.g., liquid droplets) is generated from the processing tool as it moves over the holding portion, the falling material will fall onto the flange portion. Therefore, the presence of the flange portion prevents the falling material from adhering to the surface of the holding portion. Consequently, when the substrate is held in the holding portion after the processing tool has been replaced, contamination of the substrate by the transfer of falling material present on the surface of the holding portion to the substrate can be prevented.

[0167] Example 21. An example of a method for replacing a processing tool includes a first step of attaching a replacement tool to a holding part configured to hold a substrate, wherein the replacement tool includes a main body and a flange portion extending from the circumferential surface of the main body for attachment and detachment between the holding part and the holding part; a second step of engaging an engaging portion of a processing tool configured to process the surface of a substrate held by the holding part with the main body, wherein the processing tool is configured to be transportable while being held by a holding and transporting part; and a third step of attaching and detaching the processing tool to the holding and transporting part by rotating the holding part. In this case, the same effects and advantages as the apparatus in Example 1 can be obtained.

[0168] Example 22. An example of a replacement tool is a replacement tool for replacing a processing tool configured to process the surface of a substrate held in a holding part. The example of a replacement tool includes a main body configured to engage with the engaging part of the processing tool, and a flange portion that protrudes from the circumferential surface of the main body for attachment and detachment between the main body and the holding part. In this case, the same effects and advantages as the apparatus in Example 1 can be obtained.

[0169] Example 23. In the replacement device of Example 22, the main body is cylindrical in shape and capable of accommodating the engagement portion of the processing tool. The opening of the main body is provided with a first replacement tool projection and a second replacement tool projection that protrude radially inward from the opening. The first and second replacement tool projections are positioned opposite each other with the center of the opening in between. When the engagement portion of the processing tool is housed within the opening, the device may be configured to engage with any of the multiple processing tool projections provided on the engagement portion of the processing tool and protruding radially outward from the engagement portion. In this case, the same effects and advantages as the device of Example 19 can be obtained.

[0170] Example 24. In the replacement device of Example 23, the opening may be substantially circular in shape. In this case, the same effects and advantages as the device of Example 19a can be obtained.

[0171] Example 25. In the replacement tool of Example 23 or Example 24, the outer circumferential surfaces of the first and second replacement tool protrusions may have a shape corresponding to the outer circumferential surface of the processing tool recess formed between two adjacent processing tool protrusions in the circumferential direction of the engagement portion among the plurality of processing tool protrusions. In this case, the same effects as the device of Example 19b can be obtained.

[0172] Example 26. In any of the replacement devices in Examples 23 to 25, the first and second replacement device protrusions may be ridges extending in the direction of extension of the main body. In this case, the same effects and advantages as the device in Example 19c can be obtained.

[0173] Example 27. In any of the replacement devices in Examples 22 to 26, the flange portion may have a larger surface area than the surface area of ​​the retaining portion, and may be configured to cover the entire surface of the retaining portion when the replacement device is attached to the retaining portion via the flange portion. In this case, the same effects and advantages as the device in Example 20 can be obtained. [Explanation of Symbols]

[0174] 1...Substrate processing system (substrate processing device), 20, 20A...Holding part, 22...Suction hole, 27...Protrusion (first protrusion), 30...Suction part, 40...Rotating part, 50...Supply part, 53...Holding base (holding and transporting part), 53f...Female screw (fastening part), 54...Drive part (holding and transporting part), 56...Recess (fastening part), 57...Recess (fastening part), 55...Connecting part, 55d...Male screw (fastening part), 70...Imaging part, 100, 100A...Nozzle (processing tool), 100B...Brush (processing tool), 101a...Male screw (another fastening part), 103...Irregular shape part (engaging part), 105...Flange part (another flange part), 106...Processing tool protrusion, 107...Processing tool recess, 120...Nut (processing tool, another 121...Cylindrical part (engaging part), 140...Screw, 141...Main body (another fastening part), 142...Head (engaging part), 200...Replacement tool, 210...Main body, 211...Base part (transmission part), 211b...Lower part, 211c...Housing part (transmission part), 211e...Notch, 212...Outer cylinder part (transmission part), 213...Slide part, 214...Biasing part, 215...Protrusion (transmission part), 220...Flange part, 221...Protrusion (second protrusion), 240...Replacement tool projection, 241...Replacement tool projection (first replacement tool projection), 242...Replacement tool projection (second replacement tool projection), Ctr...Controller (control unit), OP...Opening, U1...Thin film processing device, W...Substrate, Wa...Surface.

Claims

1. A holding part configured to hold the substrate, A rotating part configured to rotate the holding part, A processing tool configured to process the surface of the substrate held in the holding portion, A replacement tool configured to be detachably attached to the aforementioned holding portion, A holding and conveying unit configured to hold and convey the aforementioned processing tool, It includes a control unit, The processing tool includes another fastening part configured to be tightened to the fastening part provided in the holding and conveying section, The aforementioned replacement device is The main body portion is configured to be engageable with the engagement portion of the processing tool, It includes a flange portion that protrudes from the circumferential surface of the main body portion for attachment and detachment to the retaining portion, A substrate processing apparatus, wherein the control unit is configured to perform a first process of attaching and detaching the processing tool to and from the holding and transporting unit by controlling the rotating unit to rotate the holding unit while the replacement tool is attached to the holding unit via the flange and the engaging portion of the processing tool is engaged with the main body portion of the replacement tool.

2. The apparatus according to claim 1, wherein the replacement tool is detachably attached to a portion substantially coinciding with the rotation center of the holding portion.

3. The system further comprises a suction part configured to adsorb the substrate to the holding part, The holding portion includes a suction hole that is open upward and connected to the suction portion. The apparatus according to claim 1, wherein the control unit is configured to perform a second process before the first process, which involves operating the suction unit to cause the flange unit to adhere to the holding unit.

4. The apparatus according to claim 3, wherein the second process includes, before the first process, operating the suction unit with the lower part of the main body inserted into the suction hole to generate a negative pressure between the flange unit and the upper surface of the holding unit, thereby causing the flange unit to be attracted to the holding unit.

5. The apparatus according to claim 4, wherein the main body portion includes a notch that is partially cut out so as to extend in the direction of extension of the replacement tool on the lower outer circumferential surface thereof.

6. The holding portion includes a first annular projection provided on the upper surface of the holding portion to support the substrate, The first ridge is annular in shape, The flange portion includes a second projection that protrudes toward the lower side of the main body and has an annular shape. The apparatus according to claim 3, wherein, when the replacement tool is attached to the holding portion, the second protrusion is located inside the first protrusion.

7. The outer circumferential surface of the engagement portion of the processing tool has a non-circular, irregular shape. The main body of the replacement tool has a cylindrical shape capable of accommodating the engaging portion of the processing tool. The apparatus according to claim 1, wherein the inner circumferential surface of the opening of the main body of the replacement tool has a shape corresponding to the outer circumferential surface of the engaging portion of the processing tool.

8. The main body of the aforementioned replacement device is A cylindrical base portion, An outer cylinder portion having a cylindrical shape and positioned outside the base portion, A transmission unit configured to transmit rotational force from the holding unit between the base portion and the outer cylinder portion, Including a biasing part, The outer cylindrical portion is configured to be slidable relative to the base portion in the extending direction of the replacement tool. The apparatus according to any one of claims 1 to 7, wherein the biasing portion is configured to apply a biasing force to the outer cylinder portion in the direction in which the replacement tool extends and in a direction that separates the base portion from the outer cylinder portion.

9. The main body of the replacement tool further includes a sliding portion configured to slide within the outer cylinder portion and in the extending direction of the replacement tool between the base portion and the outer cylinder portion, The biasing portion is configured to apply a biasing force to the outer cylinder portion via the sliding portion. The apparatus according to claim 8, wherein the control unit is configured to perform a third process, before the first process, to control the holding and transporting unit so that, with the engaging portion of the processing tool inserted into the outer cylindrical portion of the replacement tool attached to the holding unit via the flange portion and the processing tool supported on the slide portion, pressure is applied to the slide portion via the processing tool by the holding and transporting unit until the biasing portion is reduced by a predetermined amount.

10. The outer surface of the base portion has a non-circular, irregular shape. The inner circumferential surface of the outer cylinder portion has a shape corresponding to the outer circumferential surface of the base portion. The apparatus according to claim 8, wherein the transmission portion is composed of the outer circumferential surface of the base portion and the inner circumferential surface of the outer cylinder portion.

11. The main body portion includes a projection that protrudes from the outer cylinder portion toward the base portion, The apparatus according to claim 8, wherein the base portion includes a housing portion for housing the projection portion.

12. The apparatus according to claim 11, wherein the housing portion extends along the direction of extension of the replacement tool.

13. The apparatus according to claim 1, wherein the processing tool includes a nozzle for supplying a processing liquid to the surface of the substrate.

14. The processing device includes a plurality of nozzles for supplying a processing liquid to the surface of the substrate, The apparatus according to claim 1, wherein the control unit performs the first process on one of the plurality of nozzles that is specified.

15. The apparatus according to claim 1, wherein the processing tool includes a brush for scrubbing the surface of the substrate.

16. The processing tool includes another flange portion that protrudes from the circumferential surface of the processing tool, The apparatus according to claim 1, wherein the other fastening portion is configured to be fastened to the fastening portion of the holding and conveying portion via the other flange portion.

17. The holding portion is configured to be able to physically grip the peripheral edge of the substrate, The apparatus according to claim 1, wherein the replacement tool is attached to the retaining portion by the retaining portion, the peripheral edge of the flange portion being gripped by the retaining portion.

18. The holding portion is further provided with an imaging portion configured to capture images, The apparatus according to claim 1, wherein the control unit is configured to perform a fourth process of determining the state of the replacement tool and / or the processing tool based on the image captured by the imaging unit.

19. The engagement portion of the processing tool is provided with a plurality of processing tool protrusions that project radially outward from the engagement portion. The main body of the replacement tool has a cylindrical shape capable of accommodating the engaging portion of the processing tool. The opening of the main body of the replacement tool is provided with a first replacement tool projection and a second replacement tool projection, which protrude radially inward from the opening and are configured to engage with any of the plurality of processing tool projections when the engaging portion of the processing tool is housed within the opening. The apparatus according to claim 1, wherein the first replacement part projection and the second replacement part projection are positioned facing each other with the center of the opening in between.

20. The apparatus according to claim 1, wherein the flange portion of the replacement tool has a larger surface area than the surface area of ​​the retaining portion, and is configured to cover the entire surface of the retaining portion when the replacement tool is attached to the retaining portion via the flange portion.

21. A first step of attaching a replacement device to a retaining portion configured to hold a substrate, wherein the replacement device includes a main body portion and a flange portion extending from the circumferential surface of the main body portion for attachment and detachment between the retaining portion and the retaining portion, A second step of engaging an engaging portion of a processing tool configured to process the surface of the substrate held in the holding portion with the main body portion, wherein the processing tool is configured to be transportable while being held by the holding and transporting portion, A method for replacing a processing tool, comprising a third step of rotating the holding part to attach and detach the processing tool from the holding and transporting part.

22. A replacement tool for replacing a processing tool configured to process the surface of a substrate held in a holding part, The main body portion is configured to be engageable with the engagement portion of the processing tool, A replacement tool including a flange portion that protrudes from the circumferential surface of the main body portion for attachment and detachment to the retaining portion.

23. The main body has a cylindrical shape capable of accommodating the engagement portion of the processing tool. The opening of the main body is provided with a first replacement tool projection and a second replacement tool projection that protrude radially inward from the opening. The first replacement tool projection and the second replacement tool projection are, They are positioned facing each other with the center of the aforementioned opening in between, The replacement tool according to claim 22, wherein, when the engaging portion of the processing tool is housed within the opening, it is configured to engage with any of a plurality of processing tool projections provided on the engaging portion of the processing tool and projecting radially outward from the engaging portion.

24. The replacement device according to claim 23, wherein the opening is substantially circular in shape.

25. The replacement tool according to claim 23, wherein the outer circumferential surfaces of the first and second replacement tool protrusions have a shape corresponding to the outer circumferential surface of a processing tool recess formed between two processing tool protrusions that are adjacent to each other in the circumferential direction of the engagement portion among the plurality of processing tool protrusions.

26. The replacement device according to claim 23, wherein the first and second replacement device protrusions are ridges extending in the extending direction of the main body.

27. The replacement tool according to any one of claims 22 to 26, wherein the flange portion has a larger surface area than the surface area of ​​the retaining portion, and is configured to cover the entire surface of the retaining portion when the replacement tool is attached to the retaining portion via the flange portion.

Images