Probe head

Abstract

Provided is a probe head comprising a probe and an insulating support in which a tapered hole for supporting a plurality of portions of the probe is provided.

Description

probe head

[0001] The present invention relates to a probe head.

[0002] In order to test a test object such as an integrated circuit, the test object may be electrically connected to a test board via a probe head. For example, as described in Patent Document 1, a probe head includes a probe and an insulating support having a through-hole through which the probe is inserted. The probe includes a first plunger that contacts a first electrode of the test object, a second plunger that contacts a second electrode of the test board, and a spring. In testing the test object, the second plunger is brought into contact with the second electrode of the test board, and the first plunger is then biased upward by the spring, and then the first plunger is brought into contact with the first electrode of the test object.

[0003] Japanese Patent Application Laid-Open No. 2006-308486

[0004] To allow the probe to slide within the through-hole of the insulating support, a gap is provided between the outer surface of the probe and the inner surface of the through-hole. During testing of the test object, after the second plunger is brought into contact with the second electrode of the test board, the first plunger may be urged upward with the tip of the first plunger in an open state. With the tip of the first plunger in an open state, no external force is applied to the tip of the first plunger in a direction from the tip of the first plunger toward the base end opposite the tip of the first plunger. However, in this case, the first plunger may tilt, which may deteriorate the positional accuracy of the tip of the first plunger.

[0005] One object of the present invention is to improve the positional accuracy of the tip of a probe. Other objects of the present invention will become apparent from the description of this specification.

[0006] One aspect of the present invention is a probe head comprising: a probe; and an insulating support member having a tapered hole for supporting a plurality of portions of the probe.

[0007] According to the above aspect of the present invention, the positional accuracy of the tip of the probe can be improved.

[0008] Fig. 1 is a cross-sectional view of a probe head according to an embodiment; Fig. 2 is a diagram for explaining a state in which the tip of a first plunger is released and urged upward in the probe head according to the embodiment; Fig. 3 is a diagram for explaining a state in which the tip of a first plunger is released and urged upward in the probe head according to a comparative example; Fig. 4 is a graph showing a box plot of the results of repeated measurements of the deviation Δ of the position of the tip of the first plunger from the design position in the embodiment, and a box plot of the results of repeated measurements of the deviation Δ of the position of the tip of the first plunger from the design position in the comparative example.

[0009] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, similar components are designated by similar reference numerals, and the description thereof will be omitted as appropriate.

[0010] In this specification, ordinal numbers such as "first," "second," and "third" are used merely to distinguish between similarly named configurations, unless otherwise specified, and do not imply any particular characteristics (e.g., order or importance) of the configurations.

[0011] FIG. 1 is a cross-sectional view of a probe head 10 according to an embodiment.

[0012] In Figure 1, arrows marked with "+Z" indicate the vertically upward direction, and arrows marked with "-Z" indicate the vertically downward direction. Hereinafter, where necessary, the direction perpendicular to the vertical direction will be referred to as the horizontal direction. This also applies to Figure 2 and subsequent figures.

[0013] The probe head 10 is positioned vertically between the test object 20 and the test board 30. The test object 20 is positioned above the probe head 10. The test board 30 is positioned below the probe head 10. The test object 20 is, for example, an integrated circuit.

[0014] The probe head 10 includes a conductive probe 100 and an insulating support 200. A first electrode 22 provided on the lower surface of the test object 20 and a second electrode 32 provided on the upper surface of the test substrate 30 are electrically connected to each other via the probe 100. In this embodiment, the first electrode 22 is a bump, and the second electrode 32 is a pad. The probe 100 includes a tube 110, a spring 112, a first plunger 120, and a second plunger 130. The first plunger 120 includes a flange 122, a tapered portion 124, a first pillar portion 126, and a first contact portion 128. The second plunger 130 includes a second pillar portion 136 and a second contact portion 138. The insulating support 200 includes a first insulating support 210 and a second insulating support 220.

[0015] The tube 110 extends parallel to the vertical direction. A first plunger 120 is provided at the upper end of the tube 110. A second plunger 130 is provided at the lower end of the tube 110. A spring 112 is provided inside the tube 110. The spring 112 biases the first plunger 120 and the second plunger 130 in directions that move them away from each other in the vertical direction. In another example different from this embodiment, the tube 110 may not be provided, and the spring 112 may be provided between the first plunger 120 and the second plunger 130 in the vertical direction.

[0016] The flange 122 is located higher than the upper end of the tube 110. The horizontal diameter of the flange 122 is approximately equal to the horizontal outer diameter of the tube 110.

[0017] The tapered portion 124 is located above the upper end of the flange 122. The horizontal diameter of the tapered portion 124 decreases from bottom to top. The first taper angle α shown in FIG. 1 indicates the taper angle of the tapered portion 124. The first taper angle α is the sum of the angles formed by the outer surfaces of both horizontal sides of the tapered portion 124 with respect to an imaginary line IL that passes through the horizontal center of the tapered portion 124 and is parallel to the extension direction of the first plunger 120. The first taper angle α is also the angle formed by the tangents to the outer surfaces of both horizontal sides of the tapered portion 124.

[0018] The first columnar section 126 extends vertically upward from the upper end of the tapered section 124. The horizontal diameter of the first columnar section 126 is approximately equal to the horizontal diameter of the upper end of the tapered section 124. In addition, the horizontal diameter of the first columnar section 126 is smaller than the horizontal diameter of the flange 122.

[0019] The first contact portion 128 is provided at the tip of the first column portion 126. In the example shown in Fig. 1 , the tip of the first column portion 126 is the upper end of the first column portion 126. When inspecting the test object 20, the first contact portion 128 is in contact with the first electrode 22 while the tube 110 and the first plunger 120 are biased together by the spring 112 toward the test object 20.

[0020] The second pillar 136 extends in the vertical direction. The horizontal diameter of the second pillar 136 is smaller than the horizontal inner diameter of the tube 110. With at least a portion of the second pillar 136 inserted into a hole provided at the lower end of the tube 110, the second pillar 136 is attached to the tube 110 so as to be movable in the vertical direction.

[0021] The second contact portion 138 is provided at the tip of the second pillar portion 136. In the example shown in Fig. 1, the tip of the second pillar portion 136 is the lower end of the second pillar portion 136. When testing the test object 20, the second plunger 130 is biased by the spring 112 toward the test board 30, and the second contact portion 138 is in contact with the second electrode 32.

[0022] The first insulating support 210 and the second insulating support 220 are stacked vertically. The first insulating support 210 is located above the second insulating support 220. The second insulating support 220 is located below the first insulating support 210. The first insulating support 210 is, for example, a pin block, and the second insulating support 220 is, for example, a pin plate.

[0023] The insulating support 200 is provided with a through hole 230. The through hole 230 passes through the insulating support 200 in the vertical direction. The through hole 230 includes a first through hole 232, a second through hole 234, a third through hole 236, and a tapered hole 238. At least a portion of the probe 100 is inserted vertically through the through hole 230.

[0024] The first through hole 232 penetrates in the vertical direction through a portion of the first insulating support 210 located below the second through hole 234 and a portion of the second insulating support 220 located above the third through hole 236 via a tapered hole 238. In the example shown in FIG. 1 , the first through hole 232 penetrates in the vertical direction through the lower end of the first insulating support 210, the vertical center of the first insulating support 210, and the upper end of the second insulating support 220 via the tapered hole 238. The portion of the first through hole 232 that penetrates the lower end of the first insulating support 210 and the portion of the first through hole 232 that penetrates the upper end of the second insulating support 220 are vertically connected to each other. At least a portion of the tube 110 and at least a portion of the flange 122 are inserted vertically through the first through hole 232. The horizontal diameter of the first through hole 232 is larger than both the horizontal outer diameter of the tube 110 and the horizontal diameter of the flange 122. Therefore, a gap is provided between the outer surface of the tube 110 and the inner surface of the first through hole 232, and between the outer surface of the flange 122 and the inner surface of the first through hole 232. Therefore, the tube 110 and the flange 122 are able to slide vertically within the first through hole 232.

[0025] The second through hole 234 penetrates the upper end of the first insulating support 210 in the vertical direction. The lower end of the second through hole 234 is vertically connected to the upper end of the first through hole 232 via a tapered hole 238. At least a portion of the first columnar portion 126 is inserted vertically into the second through hole 234. The horizontal diameter of the second through hole 234 is less than the horizontal diameter of the first through hole 232. The horizontal diameter of the second through hole 234 is equal to or less than the horizontal outer diameter of the tube 110 and the horizontal diameter of the flange 122, but is greater than the horizontal diameter of the first columnar portion 126. Therefore, the tube 110 and the flange 122 are prevented from slipping upward through the second through hole 234. A gap is provided between the outer surface of the first columnar portion 126 and the inner surface of the second through hole 234. Therefore, the first pillar portion 126 is able to slide vertically within the second through-hole 234. Furthermore, the first pillar portion 126 is guided vertically by the second through-hole 234.

[0026] The third through hole 236 vertically penetrates the lower end of the second insulating support 220. The upper end of the third through hole 236 vertically communicates with the lower end of the first through hole 232. At least a portion of the second columnar portion 136 is inserted vertically into the third through hole 236. The horizontal diameter of the third through hole 236 is less than the horizontal diameter of the first through hole 232. The horizontal diameter of the third through hole 236 is equal to or less than the horizontal outer diameter of the tube 110 and is greater than the horizontal diameter of the second columnar portion 136. This prevents the tube 110 from slipping downward through the third through hole 236. A gap is provided between the outer surface of the second columnar portion 136 and the inner surface of the third through hole 236. This allows the second columnar portion 136 to slide vertically within the third through hole 236. Additionally, the second pillar portion 136 is guided in the vertical direction by the third through-hole 236 .

[0027] The tapered hole 238 is located vertically between the upper end of the first through hole 232 and the lower end of the second through hole 234. The depth direction of the tapered hole 238 is approximately parallel to the vertical direction. The horizontal diameter of the tapered hole 238 decreases from the upper end of the first through hole 232 to the lower end of the second through hole 234. The horizontal diameter of the lower end of the tapered hole 238 is approximately equal to the horizontal diameter of the upper end of the first through hole 232. The horizontal diameter of the upper end of the tapered hole 238 is approximately equal to the horizontal diameter of the lower end of the second through hole 234. The second taper angle β shown in FIG. 1 indicates the taper angle of the tapered hole 238. The second taper angle β is the sum of the angles formed by the inner surfaces on both horizontal sides of the tapered hole 238 with respect to an imaginary line IL that passes through the horizontal center of the through hole 230 parallel to the extension direction of the through hole 230. The second taper angle β is also the angle formed by the tangents to the inner surfaces on both sides of the tapered hole 238 in the horizontal direction.

[0028] FIG. 2 is a diagram illustrating a state in which the tip of the first plunger 120 is released and the first plunger 120 is biased upward in the probe head 10 according to the embodiment.

[0029] The embodiment shown in Fig. 2 will be described with reference to Fig. 1. Hereinafter, the upper end of the first contact portion 128 will be referred to as the tip of the first plunger 120 as necessary.

[0030] In the embodiment shown in Fig. 2, when the tip of the first plunger 120 is in an open state, the second contact portion 138 is in contact with the second electrode 32. In the open state of the tip of the first plunger 120, the tip of the first plunger 120 is not in contact with an object such as the first electrode 22, and no downward external force is applied to the tip of the first plunger 120. Also, in the embodiment shown in Fig. 2, the tube 110 and the first plunger 120 are urged upward together by the spring 112, and the first plunger 120 is pushed upward.

[0031] When the tip of the first plunger 120 is released and the first plunger 120 is biased upward, the tapered hole 238 supports a plurality of portions of the first plunger 120 that are positioned offset from one another in the vertical direction (at different positions from one another in the axial direction of the first plunger 120). In this embodiment, the tapered hole 238 supports two portions: the tapered portion 124 and the flange 122.

[0032] The support of the tapered portion 124 by the tapered hole 238 will now be described.

[0033] The first taper angle α is less than the second taper angle β. The horizontal diameter of the upper end of the tapered portion 124 is less than the horizontal diameter of the upper end of the tapered hole 238. The horizontal diameter of the lower end of the tapered portion 124 is equal to or greater than the horizontal diameter of the upper end of the tapered hole 238. Therefore, when the tip of the first plunger 120 is released and the first plunger 120 is biased upward, the outer surface of the tapered portion 124 can contact the corner between the upper end of the tapered hole 238 and the lower end of the second through hole 234. When the first plunger 120 is approximately parallel to the vertical direction, the outer surface of the tapered portion 124 contacts the corner between the upper end of the tapered hole 238 and the lower end of the second through hole 234, so that the tapered hole 238 can support the tapered portion 124 when the first plunger 120 is approximately parallel to the vertical direction.

[0034] 2 , the outer surface of the tapered portion 124 contacts the corner between the upper end of the tapered hole 238 and the lower end of the second through hole 234 over the entire circumference of the tapered portion 124 when viewed vertically. Therefore, for example, in the cross section shown in FIG. 2 , the outer surfaces of the tapered portion 124 on both horizontal sides contact the corner between the upper end of the tapered hole 238 and the lower end of the second through hole 234 on both horizontal sides of the tapered hole 238. However, when the first plunger 120 is tilted with respect to the vertical direction, the outer surface of the tapered portion 124 may contact the corner between the upper end of the tapered hole 238 and the lower end of the second through hole 234 over only a portion of the entire circumference of the tapered portion 124 when viewed vertically. For example, in the cross section shown in Figure 2, when the first plunger 120 is tilted relative to the vertical direction, the outer surface of only one of the horizontal sides of the tapered portion 124 may come into contact with the corner between the upper end of the tapered hole 238 and the lower end of the second through hole 234 on only one of the horizontal sides of the tapered hole 238.

[0035] The support of the flange 122 by the tapered hole 238 will now be described.

[0036] The horizontal diameter of the upper end of the flange 122 is larger than the horizontal diameter of the lower end of the tapered portion 124. In other words, the flange 122 has a wide portion that is wider in the horizontal direction than the lower end of the tapered portion 124. Therefore, a horizontal step is formed between the lower end of the tapered portion 124 and the upper end of the flange 122. Therefore, the corner between the upper surface and the outer surface of the flange 122 is located further outward from the lower end of the outer surface of the tapered portion 124 with respect to the horizontal center of the first plunger 120. Furthermore, the horizontal diameter of the upper end of the flange 122 is equal to or greater than the diameter of the upper end of the tapered hole 238 and less than the diameter of the lower end of the tapered hole 238. Therefore, when the tip of the first plunger 120 is released and the first plunger 120 is biased upward, the corner between the upper surface and the outer surface of the flange 122 can come into contact with the inner surface of the tapered hole 238. When the first plunger 120 is approximately parallel to the vertical direction, the angle between the upper surface and outer surface of the flange 122 contacts the inner surface of the tapered hole 238, so that the tapered hole 238 can support the flange 122 when the first plunger 120 is approximately parallel to the vertical direction.

[0037] The upper surface of the flange 122 has an expanded diameter region 122a. When viewed vertically, the expanded diameter region 122a is located between the lower end of the tapered portion 124 and the outer surface of the flange 122. In the expanded diameter region 122a, the horizontal diameter of the flange 122 expands from the lower end of the tapered portion 124 to the outer surface of the flange 122. At least a portion of the expanded diameter region 122a is located vertically below the upper end of the tapered hole 238 and above the lower end of the tapered hole 238. For example, in the cross section shown in FIG. 2 , at least a portion of the expanded diameter region 122a on both sides of the imaginary line IL is located vertically below the upper ends of the tapered holes 238 on both sides of the imaginary line IL and above the lower ends of the tapered holes 238 on both sides of the imaginary line IL.

[0038] In the example shown in FIG. 2 , the corners between the upper surface and outer surface of the flange 122 contact the inner surface of the tapered bore 238 over the entire circumference of the flange 122 when viewed vertically. Therefore, for example, in the cross section shown in FIG. 2 , the corners between the upper surface and outer surface of the flange 122 on both horizontal sides contact the inner surface of the tapered bore 238 on both horizontal sides of the tapered bore 238. However, if the first plunger 120 is tilted with respect to the vertical direction, the corners between the upper surface and outer surface of the flange 122 may contact the inner surface of the tapered bore 238 over only a portion of the entire circumference of the flange 122 when viewed vertically. For example, in the cross section shown in FIG. 2 , if the first plunger 120 is tilted with respect to the vertical direction, the corner between the upper surface and outer surface of only one of the horizontal sides of the flange 122 may contact the inner surface of the tapered bore 238 on only one of the horizontal sides of the tapered bore 238.

[0039] In the example shown in FIG. 2 , the horizontal peripheral portion of the lower end of the tapered portion 124 on the upper surface of the flange 122 is substantially parallel to the horizontal direction. In other words, the expanded diameter region 122a is substantially parallel to the horizontal direction. If the expanded diameter region 122a is inclined relative to the horizontal direction, the horizontal width of the expanded diameter region 122a is relatively narrow, which may result in a relatively large variation in the inclination of the expanded diameter region 122a. Furthermore, if the expanded diameter region 122a is inclined relative to the horizontal direction, the horizontal width of the expanded diameter region 122a is relatively narrow, which may result in a relatively large variation in the measurement of the first plunger 120. In contrast, if the expanded diameter region 122a is substantially parallel to the horizontal direction, the variation in the inclination and the variation in the measurement can be reduced compared to when the expanded diameter region 122a is inclined relative to the horizontal direction. Therefore, when the expanded diameter region 122a is substantially parallel to the horizontal direction, machining of the first plunger 120 is easier than when the expanded diameter region 122a is inclined relative to the horizontal direction. However, the shape of the horizontal peripheral portion of the lower end of the tapered portion 124 on the upper surface of the flange 122 is not limited to the example shown in FIG. 2. The horizontal peripheral portion of the lower end of the tapered portion 124 on the upper surface of the flange 122 may be tapered, for example. The horizontal diameter of this tapered shape decreases from bottom to top. Furthermore, the taper angle of this tapered shape is larger than the first taper angle α.

[0040] 3 is a diagram illustrating a state in which the tip of the first plunger 120K is released and the first plunger 120K is biased upward in the probe head 10K according to the comparative example. The probe head 10K according to the comparative example is similar to the probe head 10 according to the embodiment, except for the following points.

[0041] The horizontal diameter of the upper end of the flange 122K in the comparative example is approximately equal to the horizontal diameter of the lower end of the tapered portion 124K, so no horizontal step is formed between the lower end of the tapered portion 124K and the upper end of the flange 122K.

[0042] The tapered hole 238K according to the comparative example supports only one portion of the first plunger 120K in the vertical direction. Specifically, in the comparative example, the first taper angle αK of the tapered portion 124K is less than the second taper angle βK of the tapered hole 238K. The horizontal diameter of the upper end of the tapered portion 124K is less than the horizontal diameter of the upper end of the tapered hole 238K. The horizontal diameter of the lower end of the tapered portion 124K is equal to or greater than the horizontal diameter of the upper end of the tapered hole 238K. Therefore, when the tip of the first plunger 120K is released and the first plunger 120K is biased upward, the outer surface of the tapered portion 124K can contact the corner between the upper end of the tapered hole 238K and the lower end of the second through-hole 234K. The lower end of the second through-hole 234K is vertically connected to the upper end of the first through-hole 232K via a tapered hole 238K. A first columnar portion 126K extends vertically upward from the upper end of the tapered portion 124K.

[0043] 3, the outer surface of the tapered portion 124K contacts the corner between the upper end of the tapered hole 238K and the lower end of the second through hole 234K along the entire circumference of the tapered portion 124K when viewed vertically. Therefore, for example, in the cross section shown in FIG. 3, the outer surfaces on both horizontal sides of the tapered portion 124K contact the corner between the upper end of the tapered hole 238K and the lower end of the second through hole 234K on both horizontal sides of the tapered hole 238K. However, if the first plunger 120K is tilted with respect to the vertical direction, the outer surface of the tapered portion 124K may contact the corner between the upper end of the tapered hole 238K and the lower end of the second through hole 234K along only a portion of the entire circumference of the tapered portion 124K when viewed vertically. For example, in the cross section shown in Figure 3, when the first plunger 120K is tilted relative to the vertical direction, only one of the outer surfaces on both horizontal sides of the tapered portion 124K may come into contact with the corner between the upper end of the tapered hole 238K and the lower end of the second through hole 234K on only one of the horizontal sides of the tapered hole 238K.

[0044] 3, two portions of the outer surface of the tapered portion 124K on both horizontal sides are in contact with two portions of the corner between the upper end of the tapered hole 238K and the lower end of the second through hole 234K on both horizontal sides of the tapered hole 238K. However, as described above, in the example shown in FIG. 3, the outer surface of the tapered portion 124K is in contact with the corner between the upper end of the tapered hole 238K and the lower end of the second through hole 234K over the entire circumference of the tapered portion 124K when viewed from the vertical direction. Therefore, there is only one portion supported by the tapered hole 238K of the first plunger 120K according to the comparative example, rather than multiple portions in the vertical direction.

[0045] The embodiment shown in FIG. 2 is compared with the comparative example shown in FIG.

[0046] In the comparative example shown in FIG. 3 , when the tip of the first plunger 120K is open and the first plunger 120K is biased upward, as described above, the tapered hole 238K supports only one portion of the first plunger 120K in the vertical direction. In contrast, in the embodiment shown in FIG. 2 , when the tip of the first plunger 120K is open and the first plunger 120 is biased upward, as described above, the tapered hole 238K supports multiple portions of the first plunger 120 in the vertical direction. Therefore, in the embodiment, compared to the comparative example, when the tip of the first plunger 120K is open and the first plunger 120 is biased upward, the first plunger 120 is less likely to tilt relative to the vertical direction. Therefore, in the embodiment, the positional accuracy of the tip of the first plunger 120 can be improved compared to the comparative example.

[0047] In addition, in the embodiment, the outer surface of the tapered portion 124 can contact the corner between the upper end of the tapered hole 238 and the lower end of the second through hole 234 over the entire circumference of the tapered portion 124 when viewed vertically. Furthermore, in the embodiment, the corner between the upper surface and outer surface of the flange 122 can contact the inner surface of the tapered hole 238 over at least a portion of the entire circumference of the flange 122 when viewed vertically. Therefore, the tapered hole 238 may contact only one of the outer surface of the tapered portion 124 and the corner between the upper surface and outer surface of the flange 122, or may contact both the outer surface of the tapered portion 124 and the corner between the upper surface and outer surface of the flange 122. In either of these cases, the embodiment can improve the positional accuracy of the tip of the first plunger 120 compared to the comparative example.

[0048] Furthermore, in the embodiment, when the vertical position of the contact portion between the tapered hole 238 and the tapered portion 124 and the vertical position of the contact portion between the tapered hole 238 and the flange 122 are relatively close in the vertical direction, the positional accuracy of the tip of the first plunger 120 tends to be relatively good. By appropriately designing the dimensions and shape of each portion of the first plunger 120 and the dimensions and shape of each portion of the through hole 230, the vertical position of the contact portion between the tapered hole 238 and the tapered portion 124 and the vertical position of the contact portion between the tapered hole 238 and the flange 122 can be made to be close in the vertical direction.

[0049] In the embodiment, the dimensions of each portion of the first plunger 120 and the dimensions of each portion of the through-hole 230 are not particularly limited.

[0050] The ratio of the first taper angle α to the second taper angle β may be, for example, 1 / 6 to 2 / 3. The first taper angle α may be, for example, 20° to 40°. The second taper angle β may be, for example, 60° to 120°.

[0051] 4 is a graph showing a box plot of the results of repeated measurements of the deviation Δ of the tip position of the first plunger 120 from the design position according to the embodiment, and a box plot of the results of repeated measurements of the deviation Δ of the tip position of the first plunger 120K from the design position according to the comparative example. In Fig. 4, the box plot on the left shows the results of repeated measurements of the deviation Δ of the tip position of the first plunger 120K from the design position in a state in which the tip of the first plunger 120K is released and biased upward in the probe head 10K according to the comparative example. In Fig. 4, the box plot on the right shows the results of repeated measurements of the deviation Δ of the tip position of the first plunger 120 from the design position in a state in which the tip of the first plunger 120 is released and biased upward in the probe head 10 according to the embodiment.

[0052] In FIG. 4 , a horizontal line drawn at the bottom of the whiskers extending downward from the bottom of each box plot indicates the minimum deviation Δ in the repeated tests of that box plot. The bottom of each box plot indicates the first quartile of the deviation Δ in the repeated tests of that box plot. A horizontal line drawn inside each box plot indicates the median deviation Δ in the repeated tests of that box plot. The top of each box plot indicates the third quartile of the deviation Δ in the repeated tests of that box plot. A horizontal line drawn at the top of the whiskers extending upward from the top of each box plot indicates the maximum deviation Δ in the repeated tests of that box plot. An “X” mark inside each box plot indicates the average deviation Δ in the repeated tests of that box plot.

[0053] The vertical axis of the graph shown in Fig. 4 represents the deviation Δ (unit: µm). The deviation Δ is determined by the following formula (1): Δ = {(Δx) ２ +(Δy) ２} １／２(1) In the embodiment, Δx represents a horizontal deviation of the position of the tip of the first plunger 120 from the design position when the tip of the first plunger 120 is released and biased upward. In the embodiment, Δy represents a vertical deviation of the position of the tip of the first plunger 120 from the design position when the tip of the first plunger 120 is released and biased upward. In the embodiment, the design position of the tip of the first plunger 120 is the position of the tip of the first plunger 120 when the tip of the first plunger 120 is parallel to the vertical direction when the tip of the first plunger 120 is released and biased upward. The same applies to the deviation Δ in the comparative example.

[0054] In the repeated measurements according to the embodiment, the first taper angle α was set to 30°, and the second taper angle β was set to 90°.

[0055] In the repeated measurements of the comparative example, the first taper angle αK was set to 60°, and the second taper angle βK was set to 90°.

[0056] In the repeated measurement according to the embodiment, the tip of the first plunger 120 is released in advance while the second contact portion 138 is in contact with the second electrode 32. Next, a force is applied to the tip of the first plunger 120 to push the first plunger 120 downward. Then, the force is released. As a result, the first plunger 120 is biased upward by the spring 112. The bias of the spring 112 causes the first plunger 120 to move upward. After the first plunger 120 moves, the horizontal deviation Δx of the position of the tip of the first plunger 120 from the design position and the vertical deviation Δy of the position of the tip of the first plunger 120 from the design position are measured. Next, the deviation Δ is calculated based on equation (1).

[0057] In the repeated measurements according to the embodiment, the deviation Δ was calculated five times using the above-described method for each of the 40 first plungers 120, and the average value of the deviation Δ was calculated. The box plot of the embodiment shown in FIG. 4 shows the average value of the deviation Δ for the 40 first plungers 120.

[0058] The repeated measurements in the comparative example were carried out in the same manner as the repeated measurements in the embodiment.

[0059] 4, the third quartile of the deviation Δ in the embodiment is smaller than the median of the deviation Δ in the comparative example. This result suggests that when the tapered hole 238 supports multiple portions of the first plunger 120, the positional accuracy of the tip of the first plunger 120 can be improved compared to when the tapered hole 238K supports only one portion of the first plunger 120K.

[0060] Although the embodiments of the present invention have been described above with reference to the drawings, these are merely examples of the present invention, and various other configurations can also be adopted.

[0061] For example, in the embodiment, when the tip of the first plunger 120 is released and the first plunger 120 is biased upward, the tapered hole 238 supports two portions of the first plunger 120 in the vertical direction. Specifically, the tapered hole 238 supports the tapered portion 124 and the flange 122. However, the portions of the first plunger 120 supported by the tapered hole 238 in the vertical direction are not limited to the two portions, the tapered portion 124 and the flange 122. The tapered hole 238 may support three or more portions of the first plunger 120 in the vertical direction. The vertical positions of these three or more portions are offset from one another in the vertical direction.

[0062] Furthermore, in the embodiment, when the tip of the first plunger 120 is released and the first plunger 120 is biased upward, the corner between the upper surface and outer surface of the flange 122 contacts the inner surface of the tapered hole 238. However, a wide portion different from the flange 122 and the tapered portion 124 may be provided between the upper surface of the flange 122 and the lower surface of the tapered portion 124. The horizontal diameter of this wide portion is larger than the horizontal diameter of the lower end of the tapered portion 124. When the tip of the first plunger 120 is released and the first plunger 120 is biased upward, this wide portion may contact the inner surface of the tapered hole 238. In this example, too, the wide portion contacts the tapered hole 238, allowing the tapered hole 238 to support this wide portion while the first plunger 120 is substantially parallel to the vertical direction.

[0063] Furthermore, in the embodiment, the tapered hole 238 located between the upper end of the first through hole 232 and the lower end of the second through hole 234 in the vertical direction supports multiple portions of the first plunger 120 located above the tube 110. However, the support of the first plunger 120 in the embodiment can also be applied to support the second plunger 130. That is, a tapered hole may be located between the lower end of the first through hole 232 and the upper end of the third through hole 236 in the vertical direction. The horizontal diameter of this tapered hole decreases from the lower end of the first through hole 232 toward the upper end of the third through hole 236. This tapered hole may support multiple portions of the second plunger 130 in the vertical direction.

[0064] The present specification provides the following aspects. (Aspect 1) Aspect 1 is a probe head comprising: a probe; and an insulating support provided with a tapered hole that supports multiple portions of the probe. According to Aspect 1, the probe can be made less likely to tilt relative to the depth direction of the tapered hole compared to when the tapered hole supports only one portion of the probe. Therefore, according to Aspect 1, the positional accuracy of the probe tip can be improved compared to when the tapered hole supports only one portion of the probe. (Aspect 2) Aspect 2 is the probe head according to Aspect 1, in which the multiple portions of the probe include tapered portions having a taper angle less than the taper angle of the tapered hole. According to Aspect 2, by contacting the tapered portion with the tapered hole, the tapered hole can support the tapered portion in a state in which the probe is approximately parallel to the depth direction of the tapered hole. (Aspect 3) Aspect 3 is the probe head according to Aspect 2, in which the multiple portions of the probe include a wide portion that is wider than the tapered portion. According to Aspect 3, by contacting the wide portion with the tapered hole, the tapered hole can support the wide portion with the probe substantially parallel to the depth direction of the tapered hole. (Aspect 4) The probe head according to Aspect 3, wherein the peripheral portion of the tapered portion of the wide portion is substantially parallel to the direction perpendicular to the extension direction of the probe. If the peripheral portion of the tapered portion of the wide portion is inclined with respect to the direction perpendicular to the extension direction of the probe, the variation in the inclination of the peripheral portion of the wide portion may be relatively large. Furthermore, if the peripheral portion of the tapered portion of the wide portion is inclined with respect to the direction perpendicular to the extension direction of the probe, the variation in the measurement of the probe may be relatively large. In contrast, according to Aspect 4, the variation in the inclination and the variation in the measurement can be reduced compared to when the peripheral portion of the tapered portion of the wide portion is inclined with respect to the direction perpendicular to the extension direction of the probe. Therefore, according to Aspect 4, the probe is easier to process compared to when the peripheral portion of the tapered portion of the wide portion is inclined with respect to the direction perpendicular to the extension direction of the probe.

[0065] This application claims priority based on Japanese Patent Application No. 2021-206915, filed on December 21, 2021, the disclosure of which is incorporated herein in its entirety.

[0066] 10, 10K Probe head, 20 Test object, 22 First electrode, 30 Test board, 32 Second electrode, 100 Probe, 110 Tube, 112 Spring, 120, 120K First plunger, 122, 122K Flange, 122a Expanded diameter region, 124, 124K Tapered portion, 126, 126K First pillar portion, 128 First contact portion, 130 Second plunger, 136 Second pillar portion, 138 Second contact portion, 200 Insulating support, 210 First insulating support, 220 Second insulating support, 230 Through hole, 232, 232K First through hole, 234, 234K Second through hole, 236 Third through hole, 238, 238K Tapered hole, IL Virtual line

Claims

1. A probe; an insulating support member having a tapered hole for supporting the probe; Equipped with The probe has a tapered portion whose diameter decreases from one end side toward the other end side, and a wide portion around the one end side of the tapered portion, the wide portion including a region that is approximately parallel to a direction perpendicular to the extension direction of the probe, and the wide portion having a diameter wider than the diameter of the one end side of the tapered portion, A probe head, wherein the tapered hole of the insulating support supports both a portion of the tapered portion and a portion of the wide portion.

2. A probe head as described in claim 1, wherein the ratio of the taper angle of the tapered portion of the probe to the taper angle of the tapered hole is greater than or equal to 1 / 6 and less than or equal to 2 / 3.

3. A probe head as described in claim 1, wherein the taper angle of the tapered portion of the probe is greater than or equal to 20° and less than or equal to 40°.

4. A probe head as described in claim 1, wherein the taper angle of the tapered hole is greater than or equal to 60° and less than or equal to 120°.