Inductor component

Abstract

Provided is an inductor component with which it is possible to obtain inductance with high efficiency. The inductor component comprises an element body having a first main surface and a second main surface opposite each other, a coil provided on the element body and wound spirally along an axis, and a first external electrode and a second external electrode that are provided on the element body and electrically connected to the coil. The axis of the coil is disposed parallel to the first main surface. The coil includes: a plurality of first coil wires provided on the first main surface-side with respect to the axis and arrayed along the axis on a plane parallel to the first main surface; a plurality of second coil wires provided on the second main surface-side with respect to the axis and arrayed along the axis on a plane parallel to the second main surface; a plurality of first through-wires extending from the first coil wires toward the second coil wires and arrayed along the axis; and a plurality of second through-wires extending from the first coil wires toward the second coil wires, provided on the opposite side from the first through-wires with respect to the axis, and arrayed along the axis. The first coil wires, the first through-wires, the second coil wires, and the second through-wires are connected in this order to form at least a part of the spiral. When viewed from a direction orthogonal to the first main surface, at least one of the plurality of first coil wires and the plurality of second coil wires is a bent wire having a first portion and a second portion with different angles to the axis.

Description

Inductor Components

[0001] The present disclosure relates to inductor components.

[0002] A conventional inductor component is described in Japanese Patent No. 6652280 (Patent Document 1). The inductor component has an element body, a coil provided within the element body and wound along the axial direction, and a first external electrode and a second external electrode provided on the element body and electrically connected to the coil.

[0003] The coil has multiple coil patterns stacked along the axis. Adjacent coil patterns in the axial direction are connected via conductive vias. The coil pattern has wiring portions extending in a direction perpendicular to the axis and pad portions provided at the ends of the wiring portions and connecting to the conductive vias. The width of the pad portions is wider than the width of the wiring portions to improve connectivity between the pad portions and the conductive vias.

[0004] Patent No. 6652280

[0005] However, in the conventional inductor components described above, the width of the pad portion is wider than the width of the wiring portion, so part of the pad portion is located radially inward of the wiring portion of the coil, which reduces the inner diameter of the coil and does not necessarily result in a high efficiency of obtaining inductance.

[0006] Therefore, an object of the present disclosure is to provide an inductor component that can increase the efficiency with which inductance can be obtained.

[0007] In order to solve the above problem, an inductor component according to one aspect of the present disclosure comprises: an element body including first and second main surfaces opposing each other; a coil provided on the element body and wound spirally along an axis; and first and second external electrodes provided on the element body and electrically connected to the coil, the axis of the coil being arranged parallel to the first main surface, the coil including: a plurality of first coil wirings provided on the first main surface side of the axis and arranged along the axis on a plane parallel to the first main surface; a plurality of second coil wirings provided on the second main surface side of the axis and arranged along the axis on a plane parallel to the second main surface; a plurality of first through wires extending from the first coil wiring towards the second coil wiring and arranged along the axis; and a plurality of second through wires extending from the first coil wiring towards the second coil wiring and arranged on the opposite side of the axis from the first through wires and arranged along the axis, The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a portion of the spiral, and when viewed from a direction perpendicular to the first main surface, at least one of the plurality of first coil wirings and the plurality of second coil wirings is a bent wiring having a first portion and a second portion that are at different angles relative to the axis.

[0008] Here, the angle of the first portion with respect to the axis refers to the angle between the center line (or an extension of the center line) of the first portion and the axis. For example, when the center line intersects with the axis, the angle between the center line and the axis refers to the smaller of the angles of intersection between the center line and the axis, and when the center line and the axis are parallel, the angle between the center line and the axis is 0°. The same applies to the second portion. "External electrodes are provided on the element body" specifically means that the external electrodes are provided on the outer surface of the element body. This includes, for example, cases where the external electrodes are provided directly on the outer surface of the element body, cases where the external electrodes are provided on the outside of the element body via a separate member on the element body, and cases where the external electrodes are provided on the outer surface of the external electrodes with part of the external electrodes embedded in the element body.

[0009] According to the above aspect, the coil includes a first coil wiring, a first through wiring, a second coil wiring, and a second through wiring, and the first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a part of a spiral shape, so that the inner diameter of the coil can be increased and the efficiency of obtaining inductance can be increased.Furthermore, by increasing the efficiency of obtaining inductance, the Q value can be increased.

[0010] Furthermore, at least one of the multiple first coil wirings and multiple second coil wirings is a bent wiring having a first part and a second part that are at different angles relative to the axis, so the length of the coil wiring can be changed without changing the size of the inductor component, and the inductance can be easily adjusted.

[0011] Preferably, in one embodiment of the inductor component, when viewed from a direction perpendicular to the first main surface, the first portion is a portion perpendicular to the axis or a portion parallel to the axis, and the second portion is a portion intersecting the axis at an acute angle.

[0012] According to the embodiment, the length of the bent wiring can be easily increased.

[0013] In one embodiment of the inductor component, the element body is preferably made of SiO ２ Includes:

[0014] According to the embodiment, the element body can be provided with insulation properties and rigidity.

[0015] Preferably, in one embodiment of the inductor component, in two of the bent wirings adjacent in the axial direction, when viewed from a direction perpendicular to the first main surface, the distance between the second portion of one of the bent wirings and the second portion of the other of the bent wirings is smaller than the distance between the first portion of one of the bent wirings and the first portion of the other of the bent wirings.

[0016] Here, the distance between the two second portions refers to the shortest distance between the two second portions when viewed in a direction perpendicular to the first main surface. The same applies to the first portions.

[0017] According to the embodiment, the distance between two axially adjacent second portions is short, so that leakage magnetic flux can be suppressed.

[0018] Preferably, in one embodiment of the inductor component, the bent wiring is provided on at least the first coil wiring, and when viewed from a direction perpendicular to the first main surface, at least one second coil wiring among the plurality of second coil wirings extends in a direction that connects the centers of the first through wiring and the second through wiring connected to the same second coil wiring in a straight line.

[0019] According to the embodiment, the length of the second coil wiring can be easily shortened.

[0020] Preferably, in one embodiment of the inductor component, the bent wiring is provided on at least the first coil wiring, and one of the plurality of first coil wirings has a first end connected to the first external electrode and a second end connected to the first through wiring, and when viewed from a direction perpendicular to the first main surface, the one first coil wiring extends in a direction connecting the first end and the second end in a straight line.

[0021] According to the above embodiment, the length of the first coil wiring that constitutes the outermost turn in the axial direction can be shortened, the DC resistance of the coil can be reduced, and the coil can be made smaller.

[0022] Preferably, in one embodiment of the inductor component, when viewed in a direction perpendicular to the first main surface, the first portion is a portion perpendicular to the axis, and when viewed in a direction perpendicular to the first main surface, the length of the first portion is smaller than half the width of the element body in a direction perpendicular to the axis.

[0023] According to the embodiment, the possibility of contact between two bent wirings adjacent to each other in the axial direction can be reduced.

[0024] Preferably, in one embodiment of the inductor component, when viewed in a direction perpendicular to the first main surface, the first portion is a portion perpendicular to the axis, and the second portion is a portion intersecting the axis at an acute angle, and when viewed in a direction perpendicular to the first main surface, the width of the second portion is 0.5 to 0.95 times the width of the first portion.

[0025] According to the embodiment, the width of the second portion is 0.95 times or less the width of the first portion, so that the width of the second portion can be narrowed, thereby enabling the length of the second portion to be increased and the inductance to be increased. Furthermore, the width of the second portion is 0.5 times or more the width of the first portion, so that the second portion can be prevented from being cut.

[0026] Preferably, in one embodiment of the inductor component, the shape of the coil has 180° rotational symmetry around a midpoint in the axial direction of the coil when viewed from a direction perpendicular to the first main surface.

[0027] According to the above embodiment, it is possible to eliminate the directionality of the inductor component.

[0028] Preferably, in one embodiment of the inductor component, when viewed from a direction perpendicular to the first main surface, the length of the bent wiring between the centers of the first through wiring and the second through wiring connected to the bent wiring is 4% or more longer than the length of a straight line connecting the centers of the first through wiring and the second through wiring connected to the same bent wiring.

[0029] According to the embodiment, the length of the bent wiring can be increased, so that the inductance can be increased.

[0030] Preferably, in one embodiment of the inductor component, when viewed in a direction perpendicular to the first main surface, the first portion is a portion that is perpendicular to the axis, and the second portion is a portion that intersects the axis at an acute angle, and when, when viewed in a direction perpendicular to the first main surface, the angle of the second portion with respect to the axis is defined as a first angle θ1, and the angle of a line connecting the centers of the first through wiring and the second through wiring connected to the bent wiring having the same second portion with respect to the axis is defined as a second angle θ2, the second angle θ2 is greater than the first angle θ1, the first angle θ1 is greater than 45° and less than 80°, and the difference between the second angle θ2 and the first angle θ1 is greater than 1° and less than 45°.

[0031] According to the embodiment, since the first angle θ1 is greater than 45°, the width of the second portion can be secured and the efficiency of obtaining inductance can be secured. Since the first angle θ1 is smaller than 80°, the length of the second portion can be increased and the inductance can be improved.

[0032] Since the difference between the second angle θ2 and the first angle θ1 is greater than 1°, the length of the second portion can be increased, improving inductance. Since the difference between the second angle θ2 and the first angle θ1 is less than 45°, the width of the second portion can be secured.

[0033] Preferably, in one embodiment of the inductor component, the bent wiring is provided on at least the first coil wiring, and the outermost first coil wiring among the plurality of first coil wirings that is located furthest out in the axial direction is not the bent wiring, and when viewed from a direction perpendicular to the first main surface, the maximum axial length of the outermost first coil wiring is greater than the maximum axial length of the first coil wiring adjacent to the outermost first coil wiring in the axial direction.

[0034] According to the above embodiment, the width of the first coil wiring at the outermost end can be increased to reduce the DC resistance of the coil. Also, the dead space in the outermost region of the element body in the axial direction of the coil can be effectively utilized to increase the width of the first coil wiring at the outermost end.

[0035] Preferably, in one embodiment of the inductor component, the inductor component comprises: an element body including a first main surface and a second main surface opposing each other; a coil provided on the element body and wound spirally along an axis; and a first external electrode and a second external electrode provided on the element body and electrically connected to the coil, the axis of the coil being arranged parallel to the first main surface, the coil including: a plurality of first coil wirings provided on the first main surface side of the axis and arranged along the axis on a plane parallel to the first main surface; a plurality of second coil wirings provided on the second main surface side of the axis and arranged along the axis on a plane parallel to the second main surface; a plurality of first through wires extending from the first coil wiring towards the second coil wiring and arranged along the axis; and a plurality of second through wires extending from the first coil wiring towards the second coil wiring and arranged on the opposite side of the axis to the first through wires and arranged along the axis, The first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a part of the spiral, and when viewed from a direction perpendicular to the first main surface, at least one of the plurality of first coil wirings and the plurality of second coil wirings is a bent wiring having a curved portion.

[0036] According to the embodiment, the coil includes a first coil wiring, a first through wiring, a second coil wiring, and a second through wiring, and the first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a part of a spiral shape, so that the inner diameter of the coil can be increased and the efficiency of obtaining inductance can be increased.Furthermore, by increasing the efficiency of obtaining inductance, the Q value can be increased.

[0037] Furthermore, since at least one of the multiple first coil wirings and the multiple second coil wirings is a bent wiring having a curved portion, the length of the coil wiring can be changed without changing the size of the inductor component, and the inductance can be easily adjusted.

[0038] Preferably, in one embodiment of the inductor component, there are a plurality of the bent wirings, and when viewed from a direction perpendicular to the first main surface, all of the curved portions are curved so as to protrude to one side in the axial direction.

[0039] According to the embodiment, all the curved portions are curved so as to protrude to one side in the axial direction, so that no magnetic field in the opposite direction is generated in any of the curved portions, and the efficiency of obtaining the inductance can be increased.

[0040] Preferably, in one embodiment of the inductor component, a side surface of the curved portion has a recess when viewed in a direction perpendicular to the first main surface.

[0041] According to the embodiment, the side surface of the curved portion has a recess, so that the width of the curved portion can be narrowed, and the possibility of contact between two bent wirings adjacent in the axial direction can be reduced.

[0042] Preferably, in one embodiment of the inductor component, the bent wiring is made up of only the curved portion.

[0043] According to the embodiment, the bent wiring does not include a straight portion, so the length of the coil can be made longer.

[0044] According to an inductor component according to one aspect of the present disclosure, it is possible to increase the efficiency with which inductance is obtained.

[0045] FIG. 2 is a schematic bottom view of the inductor component of the first embodiment, as viewed from the bottom side; FIG. 3 is a cross-sectional view taken along II-II in FIG. 1; FIG. 4 is a cross-sectional view taken along III-III in FIG. 1; FIG. 4 is a schematic bottom view of the bottom wiring as viewed from the bottom side; FIG. 5 is a schematic bottom view of the top wiring as viewed from the bottom side; FIG. 6 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component; FIG. 7 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component; FIG. 8 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component; FIG. 9 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component; FIG. 10 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component; FIG. 11 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component; FIG. 12 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component; FIG. 13 is a schematic cross-sectional view illustrating a method for manufacturing an inductor component; 9 is a schematic bottom view of the top surface wiring showing a fifth modified example of the inductor component, as viewed from the bottom surface side. FIG. 10 is a schematic bottom view of the inductor component of the second embodiment, as viewed from the bottom surface side. FIG. 11 is a cross-sectional view taken along line IX-IX of FIG. 8. FIG. 12 is a schematic bottom view of the top surface wiring, as viewed from the bottom surface side. FIG. 13 is a schematic cross-sectional view illustrating a method for manufacturing the inductor component. FIG. 14 is a schematic cross-sectional view illustrating a method for manufacturing the inductor component. FIG. 15 is a schematic cross-sectional view illustrating a method for manufacturing the inductor component. FIG. 16 is a schematic cross-sectional view illustrating a method for manufacturing the inductor component. FIG. 17 is a schematic cross-sectional view illustrating a method for manufacturing the inductor component. FIG. 18 is a cross-sectional view illustrating a first modified example of the inductor component. FIG. 19 is a cross-sectional view illustrating a second modified example of the inductor component. FIG. 19 is a cross-sectional view illustrating a third modified example of the inductor component. FIG. 19 is a schematic bottom view of the third embodiment of the inductor component, as viewed from the bottom surface side.FIG. 10 is a schematic bottom view showing the top wiring of the inductor component according to the fourth embodiment, viewed from the bottom side.

[0046] Hereinafter, an inductor component according to one aspect of the present disclosure will be described in detail with reference to the illustrated embodiments. Note that the drawings include some schematic views and may not reflect actual dimensions or proportions.

[0047] First Embodiment An inductor component 1 according to a first embodiment will be described below. FIG. 1 is a schematic bottom view of the inductor component 1 as viewed from the bottom side. FIG. 2 is a cross-sectional view taken along line II-II in FIG. 1. FIG. 3 is a cross-sectional view taken along line III-III in FIG. 1. For convenience, external electrodes are depicted by two-dot chain lines in FIG. 1. Furthermore, although the element body 10 is depicted as transparent in FIG. 1 to facilitate understanding of the structure, it may also be translucent or opaque.

[0048] 1. Overview of Configuration The overview of the inductor component 1 will be described. The inductor component 1 is a surface-mount type inductor component used, for example, in a high-frequency signal transmission circuit. As shown in Figures 1, 2, and 3, the inductor component 1 includes an element body 10, a coil 110 provided on the element body 10 and wound spirally along an axis AX, and a first external electrode 121 and a second external electrode 122 provided on the element body 10 and electrically connected to the coil 110.

[0049] The element body 10 has a length, width, and height. The element body 10 has a first end face 100e1 and a second end face 100e2 at both ends in the length direction, a first side face 100s1 and a second side face 100s2 at both ends in the width direction, and a bottom face 100b and a top face 100t at both ends in the height direction. In other words, the outer surface 100 of the element body 10 includes the first end face 100e1 and the second end face 100e2, the first side face 100s1 and the second side face 100s2, the bottom face 100b, and the top face 100t. The bottom face 100b is an example of a "first main surface" as defined in the claims, and the top face 100t is an example of a "second main surface" as defined in the claims.

[0050] As shown in the drawings, for the sake of convenience, the lengthwise direction (longitudinal direction) of the element body 10, that is, the direction from the first end face 100e1 to the second end face 100e2, is referred to as the X direction. The widthwise direction of the element body 10, that is, the direction from the first side face 100s1 to the second side face 100s2, is referred to as the Y direction. The heightwise direction of the element body 10, that is, the direction from the bottom face 100b to the top face 100t, is referred to as the Z direction. The X direction, Y direction, and Z direction are mutually orthogonal, and when arranged in the order X, Y, Z, they form a right-handed system.

[0051] In this specification, the "outer surface 100 of the element body 10," which includes the first end surface 100e1, the second end surface 100e2, the first side surface 100s1, the second side surface 100s2, the bottom surface 100b, and the top surface 100t of the element body 10, does not simply mean a surface facing the outer periphery of the element body 10, but rather a surface that forms the boundary between the outside and the inside of the element body 10. Furthermore, "above the outer surface 100 of the element body 10" does not refer to an absolute direction such as vertically upward, which is defined by the direction of gravity, but rather refers to a direction toward the outside of the outside and the inside, with the outer surface 100 as the boundary, based on the outer surface 100. Therefore, "above the outer surface 100" is a relative direction determined by the orientation of the outer surface 100. Furthermore, "above" with respect to a certain element includes not only an upper position away from the element, i.e., an upper position via another object on the element or an upper position with a gap therebetween, but also a position directly above the element (on).

[0052] The axis AX of the coil 110 is arranged parallel to the bottom surface 100b. The coil 110 includes a plurality of bottom surface wirings 11b provided on the bottom surface 100b side with respect to the axis AX and arranged along the axis AX on a plane parallel to the bottom surface 100b, a plurality of top surface wirings 11t provided on the top surface 100t side with respect to the axis AX and arranged along the axis AX on a plane parallel to the top surface 100t, a plurality of first through wirings 13 extending from the bottom surface wirings 11b toward the top surface wirings 11t and arranged along the axis AX, and a plurality of second through wirings 14 extending from the bottom surface wirings 11b toward the top surface wirings 11t and provided on the opposite side of the axis AX from the first through wirings 13 and arranged along the axis AX. The bottom surface wirings 11b, the first through wirings 13, the top surface wirings 11t, and the second through wirings 14 are connected in this order to form at least a portion of a spiral shape.

[0053] The bottom wiring 11b corresponds to an example of the "first coil wiring" set forth in the claims, and the top wiring 11t corresponds to an example of the "second coil wiring" set forth in the claims. The axis AX is the intersection of a first plane passing through the center between the bottom wiring 11b and the top wiring 11t and a second plane passing through the center between the first through wiring 13 and the second through wiring 14. In other words, the axis AX is a straight line passing through the center of the inner diameter portion of the coil 110. The axis AX of the coil 110 does not have a dimension in a direction perpendicular to the axis AX.

[0054] According to the above configuration, the coil 110 includes the bottom wiring 11b, the first through wiring 13, the top wiring 11t, and the second through wiring 14. The bottom wiring 11b, the first through wiring 13, the top wiring 11t, and the second through wiring 14 are connected in this order to form at least a part of a spiral, which allows the inner diameter of the coil 110 to be increased and the efficiency of obtaining inductance to be increased. Furthermore, by increasing the efficiency of obtaining inductance, the Q value can be increased.

[0055] Specifically, the pad portion of a conventional inductor component and the bottom wiring 11b and top wiring 11t of this embodiment are "receiving portions" for the wiring that penetrates the element body (the conductive vias of a conventional inductor component and the first through wiring 13 and second through wiring 14 of this embodiment), and therefore have a shape that extends perpendicular to the direction that penetrates the element body. Here, in the configuration of a conventional inductor component, the conductive vias extend in a direction parallel to the axis of the coil, and therefore the pad portion extends in a direction perpendicular to the axis of the coil, and is likely to have a structure that blocks magnetic flux generated in the axial direction of the coil.

[0056] In contrast, in this embodiment, the first through wiring 13 and the second through wiring 14 extend in a direction perpendicular to the axis AX of the coil 110, and therefore the bottom wiring 11b and the top wiring 11t extend in a direction parallel to the axis AX of the coil 110. Therefore, the bottom wiring 11b and the top wiring 11t are unlikely to have a structure that blocks magnetic flux generated in the direction of the axis AX. In other words, this embodiment can have a structure that is unlikely to block magnetic flux, thereby improving inductance acquisition efficiency and Q value.

[0057] 4A is a schematic bottom view of the bottom wiring 11b as viewed from the bottom side. For convenience, the first through wiring 13 and the second through wiring 14 are depicted by two-dot chain lines in FIG. 4A, and the via portion 121v of the first external electrode 121 connected to the bottom wiring 11b and the via portion 122v of the second external electrode 122 connected to the bottom wiring 11b are depicted by two-dot chain lines. The element body 10 is depicted as transparent.

[0058] As shown in FIG. 4A , when viewed from a direction perpendicular to the bottom surface 100b (Z direction), at least one of the bottom surface wirings 11b is a bent wiring 11b1 having a first portion 111 and a second portion 112 that are at different angles relative to the axis AX. The angle of the first portion 111 relative to the axis AX is the angle α between the axis AX and an extension line of a first center line C1 in the width direction of the first portion 111, when viewed from a direction perpendicular to the bottom surface 100b. The angle of the second portion 112 relative to the axis AX is the angle β between the axis AX and a second center line C2 in the width direction of the second portion 112, when viewed from a direction perpendicular to the bottom surface 100b. The first center line C1 coincides with the extension direction of the first portion 111, and the second center line C2 coincides with the extension direction of the second portion 112. The first center line C1 and the second center line C2 are indicated by thick dashed lines.

[0059] According to the above configuration, at least one of the multiple bottom wirings 11b is a bent wiring 11b1 having a first part 111 and a second part 112 that are at different angles relative to the axis AX, so that the length of the wiring of the coil 110 can be changed without changing the size of the inductor component 1, and the inductance can be easily adjusted.

[0060] Specifically, the length of the bent wiring 11b1 can be made longer than the straight wiring that connects the first through wiring 13 and the second through wiring 14 over the shortest distance. In this way, by adjusting the length of the wiring of the coil 110 without changing the size of the inductor component 1, the inductance can be adjusted without changing the number of turns or the pitch of the through wiring. For example, the inductor required for impedance matching can be easily obtained. The length of the bottom wiring 11b (including the bent wiring 11b1) is the dimension in the extension direction of the bottom wiring 11b when viewed from a direction perpendicular to the bottom surface 100b, and refers to the length of the center line of the bottom wiring 11b.

[0061] At least one of the plurality of top surface wirings 11t may be a bent wiring having a first portion and a second portion that are at different angles relative to the axis AX, which allows the length of the wiring of the coil 110 to be changed without changing the size of the inductor component 1, and makes it easy to adjust the inductance. In short, it is sufficient that at least one of the plurality of bottom surface wirings 11b and the plurality of top surface wirings 11t is a bent wiring.

[0062] 2. Configuration of each part (inductor component 1) The volume of inductor component 1 is 0.08 mm ３ The dimension of the long side of the inductor component 1 is 0.65 mm or less. The dimension of the long side of the inductor component 1 refers to the largest value among the length, width, and height of the inductor component 1, and in this embodiment, refers to the length in the X direction. With the above configuration, the volume of the inductor component 1 is small and the long side of the inductor component 1 is short, so the weight of the inductor component 1 is light. Therefore, even if the external electrodes 121 and 122 are small, the required mounting strength can be obtained. Furthermore, the thickness of the inductor component 1 is preferably 200 μm or less. This allows the inductor component 1 to be made thin.

[0063] Specifically, the size of the inductor component 1 (length (X direction) × width (Y direction) × height (Z direction)) is 0.6 mm × 0.3 mm × 0.3 mm, 0.4 mm × 0.2 mm × 0.2 mm, 0.25 mm × 0.125 mm × 0.120 mm, etc. Furthermore, the width and height do not have to be equal, and may be, for example, 0.4 mm × 0.2 mm × 0.3 mm.

[0064] (Element body 10) The element body 10 is made of SiO ２ This makes it possible to impart insulation and rigidity to the element body 10. The element body 10 is made of, for example, a sintered glass body. The sintered glass body may contain alumina, which can further increase the strength of the element body.

[0065] The glass sintered body is formed by stacking, for example, a plurality of insulating layers containing glass. The stacking direction of the plurality of insulating layers is the Z direction. That is, the insulating layers are in a layered form having main surfaces extending in the XY plane. Note that, in the element body 10, the interfaces between the plurality of insulating layers may not be clear due to firing or the like.

[0066] The element body 10 may be made of, for example, a glass substrate. The glass substrate may be a single-layer glass substrate, and since the majority of the element body is made of glass, losses such as eddy current losses at high frequencies can be suppressed.

[0067] (Coil 110) The coil 110 includes a plurality of bottom wirings 11b, a plurality of top wirings 11t, a plurality of first through wirings 13, and a plurality of second through wirings 14. The bottom wirings 11b, the first through wirings 13, the top wirings 11t, and the second through wirings 14 are connected in order to form at least a part of the coil 110 wound in the direction of the axis AX.

[0068] According to the above configuration, the coil 110 is a so-called helical-shaped coil 110, so that in a cross section perpendicular to the axis AX, the area in which the bottom wiring 11b, the top wiring 11t, the first through wiring 13, and the second through wiring 14 run parallel to the winding direction of the coil 110 can be reduced, thereby reducing the stray capacitance in the coil 110.

[0069] Here, a helical shape refers to a shape in which the number of turns in the entire coil is greater than one, but the number of turns in the coil in a cross section perpendicular to the axis is less than one. "One or more turns" refers to a state in which, in a cross section perpendicular to the axis, the coil wiring has portions that are adjacent in the radial direction when viewed from the axial direction and run parallel to the winding direction, and "less than one turn" refers to a state in which, in a cross section perpendicular to the axis, the coil wiring does not have portions that are adjacent in the radial direction when viewed from the axial direction and run parallel to the winding direction.

[0070] 4A, the plurality of bottom surface wirings 11b are arranged along the X direction. The plurality of bottom surface wirings 11b include bent wirings 11b1 and straight wirings 11b2. The straight wirings 11b2 are arranged at both ends in the AX direction. The bent wirings 11b1 are arranged between the straight wirings 11b2 at both ends.

[0071] One of the straight wirings 11b2 has a first end connected to the via portion 121v of the first external electrode 121 and a second end connected to the first through wiring 13. When viewed from a direction perpendicular to the bottom surface 100b, the one straight wiring 11b2 extends in a direction connecting the first end and the second end in a straight line. This allows the length of the bottom surface wiring 11b (straight wiring 11b2) that forms the outermost turn in the axial direction to be shortened, reducing the DC resistance of the coil 110 and enabling the coil 110 to be made smaller.

[0072] Similarly, the other straight wiring 11b2 of the two ends has a first end connected to the via portion 122v of the second external electrode 122 and a second end connected to the second through wiring 14. The other straight wiring 11b2 extends in a direction connecting the first end and the second end in a straight line when viewed from a direction perpendicular to the bottom surface 100b.

[0073] The bent wiring 11b1 has a first portion 111, a second portion 112, and a third portion 113. The first portion 111, the second portion 112, and the third portion 113 are connected in series in this order. For convenience, in Fig. 4A, the boundary between the first portion 111 and the second portion 112 and the boundary between the second portion 112 and the third portion 113 in one bent wiring 11b1 are indicated by dotted lines.

[0074] As seen from a direction perpendicular to the bottom surface 100b, the angle α of the first portion 111 relative to the axis AX is different from the angle β of the second portion 112 relative to the axis AX, as described above. As seen from a direction perpendicular to the bottom surface 100b, the angle γ of the third portion 113 relative to the axis AX is different from the angle β of the second portion 112 relative to the axis AX. The angle γ of the third portion 113 relative to the axis AX is the angle between the axis AX and an extension of a third centerline C3 in the width direction of the third portion 113. The third centerline C3 coincides with the extension direction of the third portion 113. The third centerline C3 is indicated by a thick dashed dotted line. The first portion 111 is a portion perpendicular to the axis AX, i.e., the angle α is 90°. The second portion 112 is a portion intersecting the axis AX at an acute angle, i.e., the angle β is an acute angle. The third portion 113 is a portion orthogonal to the axis AX, i.e., the angle γ is 90°. According to the above configuration, the length of the bent wiring 11b1 can be easily increased. It is only necessary that the angle α is different from the angle β, and the first portion 111 may be a portion parallel to the axis AX or a portion intersecting the axis AX at an acute angle. The third portion 113 may be a portion parallel to the axis AX or a portion intersecting the axis AX at an acute angle, or may not be provided at all. The bent wiring 11b1 may further include other portions in addition to the first portion 111 to the third portion 113.

[0075] Preferably, in two bent wirings 11b1 adjacent to each other in the direction of axis AX, the second distance d2 between the second portion 112 of one bent wiring 11b1 and the second portion 112 of the other bent wiring 11b1 is smaller than the first distance d1 between the first portion 111 of one bent wiring 11b1 and the first portion 111 of the other bent wiring 11b1 when viewed from a direction perpendicular to the bottom surface 100b. The second distance d2 refers to the shortest distance between the two second portions 112 when viewed from a direction perpendicular to the bottom surface 100b. The first distance d1 refers to the shortest distance between the two first portions 111 when viewed from a direction perpendicular to the bottom surface 100b. With the above configuration, the second distance d2 is short, thereby suppressing leakage magnetic flux. Similarly, the second distance d2 is preferably smaller than the third distance d3 between the third portion 113 of one bent wiring 11b1 and the third portion 113 of the other bent wiring 11b1.

[0076] Preferably, when viewed in a direction perpendicular to the bottom surface 100b, the length of the first portion 111 is smaller than half the width of the element body 10 in a direction perpendicular to the axis AX (Y direction). The length of the first portion 111 is the length of the first center line C1 of the first portion 111. This configuration reduces the possibility of contact between two bent wirings 11b1 adjacent to each other in the axis AX direction. Similarly, the length of the third portion 113 is preferably smaller than half the width of the element body 10 in a direction perpendicular to the axis AX.

[0077] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the width of the second portion 112 in a direction perpendicular to the second center line C2 is 0.5 to 0.95 times the width of the first portion 111 in a direction perpendicular to the first center line C1. According to the above configuration, the width of the second portion 112 is 0.95 times or less the width of the first portion 111, allowing the width of the second portion 112 to be narrowed, thereby increasing the length of the second portion 112 and increasing the inductance. Furthermore, the width of the second portion 112 is 0.5 times or more the width of the first portion 111, preventing the second portion 112 from being cut. Similarly, when viewed from a direction perpendicular to the bottom surface 100b, the width of the second portion 112 in a direction perpendicular to the second center line C2 is preferably 0.5 to 0.95 times the width of the third portion 113 in a direction perpendicular to the third center line C3.

[0078] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the first length L1 of the bent wiring 11b1 between the centers of the first through wiring 13 and the second through wiring 14 connected to the bent wiring 11b1 is 4% or more longer than the second length L2, which is a straight line connecting the centers of the first through wiring 13 and the second through wiring 14 connected to the same bent wiring 11b1. In FIG. 4A , the first length L1 is indicated by a dashed dotted line, and the second length L2 is indicated by a dashed two-dotted line. The first length L1 is the length between the centers of the first through wiring 13 and the second through wiring 14 within the length of the center line (first center line C1, second center line C2, and third center line C3) of the bent wiring 11b1. With the above configuration, the length of the bent wiring 11b1 can be increased, thereby increasing inductance.

[0079] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the angle β of the second portion 112 (second center line C2) with respect to the axis AX is defined as a first angle θ1, and the angle of a straight line N connecting the centers of the first through wiring 13 and the second through wiring 14 connected to the bent wiring 11b1 having the same second portion 112 with respect to the axis AX is defined as a second angle θ2. In this case, the second angle θ2 is greater than the first angle θ1. The first angle θ1 is greater than 45° and less than 80°. A third angle θ3, which is the difference between the second angle θ2 and the first angle θ1, is greater than 1° and less than 45°.

[0080] According to the above configuration, since the first angle θ1 is greater than 45°, the width of the second portion 112 can be secured, and the efficiency of obtaining inductance can be secured. On the other hand, since the first angle θ1 is smaller than 80°, the length of the second portion 112 can be increased, and the inductance can be improved.

[0081] On the other hand, when the first angle θ1 is smaller than 45°, the area of ​​the first portion 111 and the third portion 113 in the bent wiring 11b1 increases, and the width of the second portion 112 connecting the first portion 111 and the third portion 113 becomes extremely narrow, increasing the risk of disconnection of the second portion 112. Furthermore, the distance between adjacent first through wirings 13 in the axial AX direction and between adjacent second through wirings 14 in the axial AX direction increases, resulting in a long coil length and poor inductance acquisition efficiency. Furthermore, the distance between the first through wiring 13 and the second through wiring 14 decreases, resulting in a small coil diameter and poor inductance acquisition efficiency. On the other hand, when the first angle θ1 is larger than 80°, the first through wiring 13 and the second through wiring 14 are connected at a distance close to the shortest distance, making it impossible to increase the length of the bottom wiring 11b.

[0082] According to the above configuration, since the third angle θ3 is greater than 1°, the length of the second portion 112 can be increased, thereby improving the inductance. On the other hand, since the third angle θ3 is smaller than 45°, the width of the second portion 112 can be secured.

[0083] In contrast, when the third angle θ3 is 0°, that is, when the first through wiring 13 and the second through wiring 14 are connected over the shortest distance, the wiring becomes straight wiring 11b2 instead of bent wiring 11b1, and the length of the bottom wiring 11b cannot be increased. On the other hand, when the third angle θ3 is greater than 45°, this indicates that the second portion 112 is approaching parallel to the axis AX, and as in the case when the first angle θ1 is less than 45°, the line width of the second portion 112 becomes thinner, increasing the risk of disconnection.

[0084] 4B is a schematic bottom view of the top surface wiring 11t as viewed from the bottom side. For convenience, in FIG. 4B, the first through wiring 13 and the second through wiring 14 are depicted by two-dot chain lines, and the element body 10 is depicted as transparent.

[0085] As shown in Figure 4B, the top surface wiring 11t extends in only one direction. Specifically, the top surface wiring 11t extends in a direction that connects the centers of the first through wiring 13 and the second through wiring 14 connected to the same top surface wiring 11t with a straight line. In other words, the top surface wiring 11t has a shape that extends in the Y direction. No bent wiring is provided in the top surface wiring 11t. Therefore, the length of the top surface wiring 11t can be easily shortened.

[0086] All of the top surface wirings 11t are arranged in parallel along the X direction. According to the above configuration, the top surface wirings 11t extend in only one direction and are all arranged in parallel, so that by using, for example, modified illumination in the photolithography process, it is possible to form fine top surface wirings 11t and reduce the size of the inductor component 1. Note that at least one of all of the top surface wirings 11t may have a shape that extends in the Y direction.

[0087] The bottom wiring 11b and the top wiring 11t are made of a good conductor material such as copper, silver, gold, or an alloy thereof. The bottom wiring 11b and the top wiring 11t may be a metal film formed by plating, vapor deposition, sputtering, or the like, or may be a metal sintered body formed by applying and sintering a conductive paste. The bottom wiring 11b and the top wiring 11t may also have a multilayer structure in which multiple metal layers are stacked. The thickness of the bottom wiring 11b and the top wiring 11t is preferably 5 μm or more and 50 μm or less.

[0088] 1 , the first through wiring 13 is disposed on the first side surface 100s1 side with respect to the axis AX within the through hole V of the element body 10, and the second through wiring 14 is disposed on the second side surface 100s2 side with respect to the axis AX within the through hole V of the element body 10. The first through wiring 13 and the second through wiring 14 each extend in a direction perpendicular to the bottom surface 100b and the top surface 100t. This allows the lengths of the first through wiring 13 and the second through wiring 14 to be shortened, thereby suppressing the direct current resistance (Rdc). All of the first through wirings 13 and all of the second through wirings 14 are disposed parallel to each other along the X direction.

[0089] Preferably, the first through wiring 13 is made of SiO２ According to this, the element body 10 contains SiO ２ When the first through wiring 13 contains a material such as SiO, the linear expansion coefficient of the first through wiring 13 can be matched with the linear expansion coefficient of the element body 10, and cracks between the first through wiring 13 and the element body 10 can be suppressed. The first through wiring 13 is made of, for example, a conductive paste. The conductive material is Ag, Cu, or the like. Similarly, the second through wiring 14 is preferably made of SiO ２ Includes:

[0090] Preferably, at least one of the bottom surface wiring 11b, the top surface wiring 11t, the first through wiring 13, and the second through wiring 14 includes a void portion or a resin portion. This allows the void portion or the resin portion to absorb stress caused by the difference in linear expansion coefficient between the wiring and the element body 10, thereby alleviating the stress. As a method for forming the void portion, for example, a material that is burned away by sintering is used as the wiring material, and the void portion can be formed by sintering the wiring. As a method for forming the resin portion, for example, a conductive paste can be used as the wiring material to form the resin portion.

[0091] Preferably, at least one of the bottom surface wiring 11b and the top surface wiring 11t is made of SiO ２ According to this, the element body 10 contains SiO ２ When the wiring includes the element body 10, the linear expansion coefficient of the wiring can be matched to the linear expansion coefficient of the element body 10, and cracks between the wiring and the element body 10 can be suppressed.

[0092] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the shape of the coil 110 has 180° rotational symmetry about the midpoint of the axis AX of the coil 110. According to the above configuration, it is possible to eliminate the directionality of the inductor component 1.

[0093] 1 , the first external electrode 121 is connected to a first end of the coil 110, and the second external electrode 122 is connected to a second end of the coil 110. The first external electrode 121 is provided on the first end face 100e1 side of the center of the element body 10 in the X direction so as to be exposed from the outer surface 100 of the element body 10. The second external electrode 122 is provided on the second end face 100e2 side of the center of the element body 10 in the X direction so as to be exposed from the outer surface 100 of the element body 10.

[0094] When viewed from a direction perpendicular to the bottom surface 100b, the first external electrode 121 and the second external electrode 122 are located inside the outer surface 100 of the element body 10. In other words, the first external electrode 121 and the second external electrode 122 are located inside the first end surface 100e1, the second end surface 100e2, the first side surface 100s1, and the second side surface 100s2 of the element body 10.

[0095] According to the above configuration, the first external electrode 121 and the second external electrode 122 are not in contact with the outer surface 100 of the element body 10, and therefore, when the inductor component is singulated, the load on the first external electrode 121 and the second external electrode 122 can be reduced, and deformation and peeling of the first external electrode 121 and the second external electrode 122 can be suppressed. Therefore, even if the inductor component is made smaller, deformation and peeling of the first external electrode 121 and the second external electrode 122 can be prevented.

[0096] The first external electrode 121 may be provided continuously on the bottom surface 100b and the first end surface 100e1. In this case, since the first external electrode 121 is a so-called L-shaped electrode, a solder fillet can be formed on the first external electrode 121 when the inductor component 1 is mounted on a mounting board. Similarly, the second external electrode 122 may be provided continuously on the bottom surface 100b and the second end surface 100e2.

[0097] The first external electrode 121 has a bottom surface portion 121b provided on the bottom surface 100b and a via portion 121v embedded in the bottom surface 100b. The via portion 121v is connected to the bottom surface portion 121b. The via portion 121v is connected to an end of the bottom surface wiring 11b located on the first end surface 100e1 side in the direction of the axis AX.

[0098] The second external electrode 122 has a bottom surface portion 122b provided on the bottom surface 100b and a via portion 122v embedded in the bottom surface 100b. The via portion 122v is connected to the bottom surface portion 122b. The via portion 122v is connected to an end of the bottom surface wiring 11b located on the second end surface 100e2 side in the axis AX direction.

[0099] As shown in FIG. 3 , the first external electrode 121 has an underlayer 121e1 and a plating layer 121e2 covering the underlayer 121e1. The underlayer 121e1 includes a conductive material such as Ag or Cu. The plating layer 121e2 includes a conductive material such as Ni or Sn. A portion of the bottom surface portion 121b and the via portion 121v are formed from the underlayer 121e1. Another portion of the bottom surface portion 121b is formed from the plating layer 121e2. Similarly, the second external electrode 122 has an underlayer and a plating layer covering the underlayer. Note that the first external electrode 121 and the second external electrode 122 may be formed from a single layer of conductive material.

[0100] (Method of Manufacturing Inductor Component 1) Next, a method of manufacturing inductor component 1 will be described with reference to Figures 5A to 5M. Figures 5A to 5H, 5K, and 5L are views corresponding to the II-II cross section in Figure 1. Figures 5I, 5J, and 5M are views corresponding to the III-III cross section in Figure 1.

[0101] 5A, a first insulating layer 1011 is provided by printing on a base substrate 1000. The material of the base substrate 1000 is, for example, a glass substrate, a silicon substrate, an alumina substrate, or the like, and the material of the first insulating layer 1011 is, for example, a resin such as epoxy or polyimide, or an inorganic insulating film such as SiO or SiN.

[0102] 5B, a second insulating layer 1012 is provided on a first insulating layer 1011 by printing. A groove 1012a is provided in the second insulating layer 1012. At this time, the groove 1012a is formed by, for example, a photolithography process. Alternatively, the groove may be formed from the beginning as a printing pattern.

[0103] As shown in FIG. 5C , a top surface conductor layer 1011t is provided in the groove 1012a by printing. The material of the top surface conductor layer 1011t is, for example, Ag, Cu, Au, Al, an alloy containing at least one of these elements, solder paste, or the like. At this time, for example, the top surface conductor layer 1011t is formed as a print pattern so that it remains only in the groove 1012a. After printing the top surface conductor layer 1011t on the second insulating layer 1012, a photolithography process may be used to leave the top surface conductor layer 1011t only in the groove 1012a.

[0104] As shown in Fig. 5D, a third insulating layer 1013 is provided by printing on the second insulating layer 1012. A first groove 1013a and a second groove 1013b are provided in the third insulating layer 1013. The first groove 1013a and the second groove 1013b are formed in the same manner as in Fig. 5B.

[0105] As shown in Fig. 5E, a first through conductor layer 1131 of the first layer is provided in the first groove 1013a by printing, and a second through conductor layer 1141 of the first layer is provided in the second groove 1013b by printing. The first through conductor layer 1131 of the first layer and the second through conductor layer 1141 of the first layer are formed in the same manner as in Fig. 5C.

[0106] 5F , the above-described steps are repeated to provide a fourth insulating layer 1014 on the third insulating layer 1013, and a second-layer first penetrating conductor layer 1132 and a second-layer second penetrating conductor layer 1142 are provided in each of the two grooves provided in the fourth insulating layer 1014. Furthermore, a fifth insulating layer 1015 is provided on the fourth insulating layer 1014, and a third-layer first penetrating conductor layer 1133 and a third-layer second penetrating conductor layer 1143 are provided in each of the two grooves provided in the fifth insulating layer 1015.

[0107] As shown in Figure 5G, a sixth insulating layer 1016 is provided on the fifth insulating layer 1015, and a bottom conductor layer 1011b is provided in a groove provided in the sixth insulating layer 1016. The material of the bottom conductor layer 1011b is the same as the material of the top conductor layer 1011t. As shown in Figure 5H, a seventh insulating layer 1017 is provided on the sixth insulating layer 1016.

[0108] As shown in Fig. 5I, a groove 1017a is provided in seventh insulating layer 1017 so as to expose a portion of bottom conductor layer 1011b. As shown in Fig. 5J, an underlying conductor layer 1121e1 is provided on seventh insulating layer 1017 and in groove 1017a. The material of underlying conductor layer 1121e1 is, for example, a resin paste made of Ag, Cu, or the like.

[0109] As shown in FIG. 5K, the entire laminate is sintered in a high-temperature furnace (e.g., 500°C or higher). The first to seventh insulating layers 1011-1017 are sintered to form the element body 10, the top conductor layer 1011t is sintered to form the top wiring 11t, the bottom conductor layer 1011b is sintered to form the bottom wiring 11b, the first to third through conductor layers 1131-1133 are sintered to form the first through wiring 13, the first to third second through conductor layers 1141-1143 are sintered to form the second through wiring 14, and the base conductor layer 1121e1 is sintered to form the base layer 121e1. Therefore, sintering the insulating layers improves strength, and sintering the conductor layers volatilizes unnecessary resin components contained in the conductor layers and fuses the conductor materials contained in the conductor layers, thereby achieving high conductivity. The base substrate 1000 may be peeled off by decomposing the surface during sintering, or may be mechanically removed by grinding or the like before or after sintering, or may be chemically removed by etching or the like before or after sintering.

[0110] As shown in Fig. 5L, the substrate is separated into individual pieces along cut lines C. As shown in Fig. 5M, a plating layer 121e2 is formed by barrel plating so as to cover the base layer 121e1, thereby forming the first external electrode 121. In this way, the inductor component 1 is manufactured as shown in Fig. 2.

[0111] 6A is a view corresponding to the cross section II-II of FIG. 1 , showing a first modified example of an inductor component. As shown in FIG. 6A , in an inductor component 1A of the first modified example, the first through wiring 13 and the second through wiring 14 are not parallel to each other when viewed from a direction parallel to the axis AX of the coil 110. This allows the distance between the first through wiring 13 and the second through wiring 14 to be increased, allowing the inner diameter of the coil 110 to be increased, and the Q value to be improved.

[0112] Specifically, the first through wiring 13 and the second through wiring 14 are bent at the center so that the distance between them becomes wider toward the center in the Z direction. In other words, the first through wiring 13 and the second through wiring 14 each have a shape that widens outward in the radial direction of the coil 110 toward the center in the Z direction. Furthermore, the first through wiring 13 and the second through wiring 14 each have a stepped shape along the Z direction. According to the above configuration, when the first through wiring 13 and the second through wiring 14 are each formed by stacking multiple conductor layers, the first through wiring 13 and the second through wiring 14 can be easily formed in a stepped shape by stacking the conductor layers of each layer in a shifted manner.

[0113] 6B is a view showing a second modified inductor component corresponding to the cross section II-II of FIG. 1. As shown in FIG. 6B, in an inductor component 1B of the second modified example, the first through wiring 13 and the second through wiring 14 are not parallel when viewed from a direction parallel to the axis AX of the coil 110. This allows the distance between the first through wiring 13 and the second through wiring 14 to be increased, allowing the inner diameter of the coil 110 to be increased, and the Q value to be improved.

[0114] Specifically, the first through wiring 13 and the second through wiring 14 are inclined so that the distance between them becomes wider toward the top surface wiring 11t in the Z direction. In other words, the first through wiring 13 and the second through wiring 14 each have a shape that extends radially outward from the coil 110 as far as the top surface wiring 11t in the Z direction. In this way, the coil 110 has a trapezoidal shape when viewed from the axis AX direction. With the above configuration, the first through wiring 13 and the second through wiring 14 can be formed linearly and shortened, thereby reducing the DC resistance of the first through wiring 13 and the second through wiring 14.

[0115] (Third Modification) Fig. 6C is a view showing a third modification of an inductor component, corresponding to the cross section taken along line II-II in Fig. 1. As shown in Fig. 6C, an inductor component 1C of the third modification includes a first coil 110A and a second coil 110B, as compared to the inductor component 1A of the first modification shown in Fig. 6A.

[0116] In the first coil 110A, when viewed in a direction parallel to the axis AX, the first through wiring 13 and the second through wiring 14 are not parallel to each other. This allows the distance between the first through wiring 13 and the second through wiring 14 to be increased, the inner diameter of the coil 110A to be increased, and the Q value to be improved.

[0117] Specifically, the first through wiring 13 has the same configuration as the first through wiring 13 of the inductor component 1A of the first modified example. On the other hand, the second through wiring 14 has a linear shape parallel to the Z direction. In other words, the first through wiring 13 is bent at the center so that the distance between the first through wiring 13 and the second through wiring 14 becomes wider toward the center in the Z direction. The first through wiring 13 has a stepped shape along the Z direction. According to the above configuration, when the first through wiring 13 is formed by stacking multiple conductor layers, the first through wiring 13 can be easily formed in a stepped shape by stacking the conductor layers of each layer in a shifted manner.

[0118] In the second coil 110B, when viewed in a direction parallel to the axis AX, the first through wiring 13 and the second through wiring 14 are not parallel to each other. This allows the distance between the first through wiring 13 and the second through wiring 14 to be increased, the inner diameter of the coil 110B to be increased, and the Q value to be improved.

[0119] Specifically, the second through wiring 14 has the same configuration as the second through wiring 14 of the inductor component 1A of the first modified example. On the other hand, the first through wiring 13 has a linear shape parallel to the Z direction. In other words, the second through wiring 14 is bent at the center so that the distance between the first through wiring 13 and the second through wiring 14 becomes wider toward the center in the Z direction. The second through wiring 14 has a stepped shape along the Z direction. According to the above configuration, when the second through wiring 14 is formed by stacking multiple conductor layers, the second through wiring 14 can be easily formed in a stepped shape by stacking the conductor layers of each layer in a shifted manner.

[0120] (Fourth Modification) Fig. 6D is a view showing a fourth modification of an inductor component, corresponding to the cross section taken along line II-II in Fig. 1. As shown in Fig. 6D, an inductor component 1D of the fourth modification includes a first coil 110A and a second coil 110B, as compared to the inductor component 1B of the second modification shown in Fig. 6B.

[0121] In the first coil 110A, when viewed in a direction parallel to the axis AX, the first through wiring 13 and the second through wiring 14 are not parallel to each other. This allows the distance between the first through wiring 13 and the second through wiring 14 to be increased, the inner diameter of the coil 110A to be increased, and the Q value to be improved.

[0122] Specifically, the first through wiring 13 has a configuration similar to that of the first through wiring 13 of the inductor component 1B of the second modified example. On the other hand, the second through wiring 14 has a linear shape parallel to the Z direction. That is, the first through wiring 13 is inclined so that the distance between the first through wiring 13 and the second through wiring 14 becomes wider in the Z direction toward the top surface wiring 11t. With the above configuration, the first through wiring 13 and the second through wiring 14 can be formed linearly and shortened, thereby reducing the DC resistance of the first through wiring 13 and the second through wiring 14.

[0123] In the second coil 110B, when viewed in a direction parallel to the axis AX, the first through wiring 13 and the second through wiring 14 are not parallel to each other. This allows the distance between the first through wiring 13 and the second through wiring 14 to be increased, the inner diameter of the coil 110B to be increased, and the Q value to be improved.

[0124] Specifically, the second through wiring 14 has the same configuration as the second through wiring 14 of the inductor component 1B of the second modified example. On the other hand, the first through wiring 13 has a linear shape parallel to the Z direction. That is, the second through wiring 14 is inclined so that the distance between the first through wiring 13 and the second through wiring 14 becomes wider in the Z direction toward the top surface wiring 11t. With the above configuration, the first through wiring 13 and the second through wiring 14 can be formed linearly, and the electrical resistance of the first through wiring 13 and the second through wiring 14 can be reduced.

[0125] 7A is a schematic bottom view of the bottom wiring 11b of a fifth modified inductor component, as viewed from the bottom side. For convenience, the first through wiring 13 and the second through wiring 14 are depicted by two-dot chain lines in FIG. 7A, and the via portion 121v of the first external electrode 121 connected to the bottom wiring 11b and the via portion 122v of the second external electrode 122 connected to the bottom wiring 11b are depicted by two-dot chain lines. The element body 10 is depicted as transparent.

[0126] 7A , in the inductor component 1E of the fifth modification, the bottom surface wiring 11b at the outermost end in the direction of the axis AX among the plurality of bottom surface wirings 11b is not a bent wiring but a wide wiring 11b3. The bottom surface wiring 11b located between the wide wirings 11b3 at both ends is a bent wiring 11b1.

[0127] When viewed from a direction perpendicular to the bottom surface 100b, the maximum length M1 of the wide wiring 11b3 in the axis AX direction is greater than the maximum length M2 of the bottom surface wiring 11b (bent wiring 11b1) adjacent to the wide wiring 11b3 in the axis AX direction.

[0128] According to the above configuration, the width of the bottom wiring 11b at the outermost end can be increased to reduce the DC resistance of the coil. In addition, the dead space in the outermost region of the element body in the direction of the coil axis AX can be effectively utilized to increase the width of the bottom wiring 11b at the outermost end.

[0129] 7B is a schematic bottom view of the top wiring 11t of the inductor component according to the fifth modification, as viewed from the bottom side. For convenience, in FIG. 7B, the first through wiring 13 and the second through wiring 14 are depicted by dashed double-dashed lines, and the element body 10 is depicted as transparent.

[0130] 7B , the outermost top surface wiring 11t in the axial AX direction among the plurality of top surface wirings 11t is a wide wiring 11t3. The top surface wiring 11t located between the wide wirings 11t3 on both ends is a straight wiring 11t2.

[0131] When viewed from a direction perpendicular to the bottom surface 100b, the maximum length M3 of the wide wiring 11t3 in the axial direction AX is greater than the maximum length M4 of the top surface wiring 11t (straight wiring 11t2) adjacent to the wide wiring 11t3 in the axial direction AX.

[0132] According to the above configuration, the width of the outermost top surface wiring 11t can be increased to reduce the DC resistance of the coil. In addition, the width of the outermost top surface wiring 11t can be increased by effectively utilizing the dead space in the outermost region of the element body in the direction of the coil axis AX.

[0133] The bent wiring may be provided at least in the bottom wiring 11b, and may be provided in both the bottom wiring 11b and the top wiring 11t.

[0134] Second Embodiment Fig. 8 is a schematic bottom view showing a second embodiment of an inductor component, as viewed from the bottom side. Fig. 9 is a cross-sectional view taken along line IX-IX of Fig. 8. In Fig. 8, for convenience, the insulating layers are omitted, and the external electrodes are drawn with two-dot chain lines. Also, in Fig. 8, the element body 10 is drawn transparently to facilitate understanding of the structure. The second embodiment differs from the first embodiment mainly in the shape of the coil, the position of the coil axis, the material of the element body, and the presence of an insulating layer, and these differences will be mainly described below. The other configurations are the same as those of the first embodiment, and description thereof will be omitted.

[0135] 8 , in the inductor component 1F, the axis AX of the coil 110 is perpendicular to the X direction. Specifically, the axis AX is parallel to the Y direction and passes through the center of the element body 10 in the X direction. This reduces the interference of the magnetic flux of the coil 110 by the first external electrode 121 and the second external electrode 122, thereby improving the efficiency of obtaining inductance.

[0136] The length of the coil 110 in the axial AX direction is shorter than the inner diameter of the coil 110. The length of the coil 110 in the axial AX direction is also referred to as the coil length. This allows the coil length to be short and the coil inner diameter to be large, thereby improving the Q value. The inner diameter of the coil refers to the diameter of a circle equivalent to the minimum area of ​​the region surrounded by the coil 110 when viewed through from the axial AX direction.

[0137] (Element body 10) The element body 10 is an inorganic insulator. The material of the element body 10 is preferably glass, which has high insulating properties and can suppress eddy currents, thereby increasing the Q value. The element body 10 preferably contains silicon, which increases the thermal stability of the element body 10 and therefore suppresses fluctuations in the dimensions of the element body 10 due to heat, thereby reducing variations in electrical characteristics.

[0138] The element body 10 is preferably a single-layer glass plate. This ensures the strength of the element body 10. Furthermore, the single-layer glass plate has small dielectric loss, which allows for a high Q value at high frequencies. Furthermore, since there is no sintering process as in the case of sintered bodies, deformation of the element body 10 during sintering can be suppressed, thereby suppressing pattern misalignment and providing an inductor component with a small inductance tolerance.

[0139] As a material for the single-layer glass plate, from the viewpoint of the manufacturing method, a photosensitive glass plate, such as Foturan II (registered trademark of Schott AG), is preferred. In particular, the single-layer glass plate is preferably made of cerium oxide (ceria: CeO ２ In this case, cerium oxide acts as a sensitizer, making photolithographic processing easier.

[0140] However, the single-layer glass plate may be a glass plate that does not have photosensitivity, since it can be processed by mechanical processing such as drilling or sandblasting, dry / wet etching using a photoresist or metal mask, laser processing, etc. Furthermore, the single-layer glass plate may be one obtained by sintering a glass paste, or may be formed by a known method such as the float method.

[0141] 9 , the inductor component 1F has an insulator 22. The insulator 22 covers both the bottom surface 100b and the top surface 100t of the element body 10. The insulator 22 may be provided only on the bottom surface 100b out of the bottom surface 100b and the top surface 100t.

[0142] The insulator 22 is a component that covers the wiring (bottom wiring 11b, top wiring 11t) to protect the wiring from external forces, prevent damage to the wiring, and improve the insulation of the wiring. The insulator 22 is preferably an organic insulator. For example, the insulator 22 may be a resin film such as epoxy or polyimide, which is easy to form. In particular, the insulator 22 is preferably made of a material with a low dielectric constant, which can reduce the stray capacitance formed between the coil 110 and the external electrodes 121 and 122 when the insulator 22 is present between the coil 110 and the external electrodes 121 and 122. The insulator 22 can be formed, for example, by laminating a resin film such as ABF GX-92 (manufactured by Ajinomoto Fine-Techno Co., Ltd.) or by applying and thermally curing a paste-like resin. The insulator 22 may also be an inorganic film, such as an oxide, nitride, or oxynitride of silicon or hafnium, which has excellent insulating properties and can be thinned.

[0143] Preferably, when the element body 10 is an inorganic insulator and the insulator 22 is an organic insulator, the organic insulator is located inside the outer surface 100 of the inorganic insulator when viewed from a direction perpendicular to the bottom surface 100b. Since the organic insulator is included, the organic insulator is easily imparted with fluidity. When the wiring (bottom wiring 11b, top wiring 11t) is covered with the organic insulator, the organic insulator can be easily filled between adjacent wirings, improving insulation. Furthermore, since the organic insulator does not contact the outer surface of the inorganic insulator, the load on the organic insulator can be reduced when the element body 10 is singulated into individual inductor components, and deformation or peeling of the organic insulator can be suppressed.

[0144] (Coil 110) As shown in Figure 8, all bottom wirings 11b are arranged in parallel along the Y direction. The bottom wirings 11b extend in only one direction. That is, the bottom wirings 11b are shaped to extend in the X direction. Specifically, one of the bottom wirings 11b at both ends in the axial AX direction has a first end connected to the via portion 121v of the first external electrode 121 and a second end connected to the second through wiring 14. When viewed from a direction perpendicular to the bottom surface 100b, one bottom wiring 11b extends in a direction connecting the first end and the second end with a straight line.

[0145] The other bottom surface wiring 11b of the two ends in the axial AX direction has a first end connected to the via portion 122v of the second external electrode 122 and a second end connected to the first through wiring 13. The other bottom surface wiring 11b extends in a direction connecting the first end and the second end in a straight line when viewed from a direction perpendicular to the bottom surface 100b.

[0146] The other bottom surface wiring 11b has a first end connected to the first through wiring 13 and a second end connected to the second through wiring 14. The other bottom surface wiring 11b extends in a direction connecting the first end and the second end by a straight line when viewed from a direction perpendicular to the bottom surface 100b.

[0147] In this way, the bottom wiring 11b is a straight wiring, not a bent wiring, and therefore the length of the bottom wiring 11b can be easily shortened.

[0148] The first through wiring 13 is arranged on the first end face 100e1 side with respect to the axis AX within the through hole V of the element body 10, and the second through wiring 14 is arranged on the second end face 100e2 side with respect to the axis AX within the through hole V of the element body 10. The first through wiring 13 and the second through wiring 14 each extend in a direction perpendicular to the bottom surface 100b and the top surface 100t. The multiple first through wirings 13 and the multiple second through wirings 14 are each arranged in parallel along the Y direction.

[0149] 10 is a schematic bottom view of the top surface wiring 11t as viewed from the bottom side. For convenience, in FIG. 10, the first through wiring 13 and the second through wiring 14 are depicted by two-dot chain lines, and the element body 10 is depicted as transparent.

[0150] 10 , a plurality of top surface wirings 11t are arranged along the Y direction. The top surface wirings 11t are bent wirings 11t1. The bent wirings 11t1 have a first portion 111, a second portion 112, and a third portion 113. The first portion 111, the second portion 112, and the third portion 113 are connected in series in this order.

[0151] The bent wiring 11t1 (first portion 111, second portion 112, and third portion 113) of the top surface wiring 11t has the same configuration as the bent wiring 11b1 (first portion 111, second portion 112, and third portion 113) of the bottom surface wiring 11b described in the first embodiment, and has the same effect. The bent wiring 11t1 of the top surface wiring 11t will be described below, but since its detailed configuration (definition, etc.) is the same as that of the bent wiring 11b1 of the bottom surface wiring 11b described in the first embodiment, its description will be omitted.

[0152] When viewed from a direction perpendicular to the bottom surface 100b, the angle of the first portion 111 with respect to the axis AX is different from the angle β of the second portion 112 with respect to the axis AX. When viewed from a direction perpendicular to the bottom surface 100b, the angle γ of the third portion 113 with respect to the axis AX is different from the angle β of the second portion 112 with respect to the axis AX. With the above configuration, the length of the bent wiring 11t1 can be easily increased.

[0153] Preferably, in two adjacent bent wirings 11t1 in the axial direction AX, the second distance d2 between the second portion 112 of one bent wiring 11t1 and the second portion 112 of the other bent wiring 11t1 is smaller than the first distance d1 between the first portion 111 of one bent wiring 11t1 and the first portion 111 of the other bent wiring 11t1, as viewed in a direction perpendicular to the bottom surface 100b. According to the above configuration, the second distance d2 is short, thereby suppressing leakage magnetic flux. Similarly, the second distance d2 is preferably smaller than the third distance d3 between the third portion 113 of one bent wiring 11t1 and the third portion 113 of the other bent wiring 11t1.

[0154] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the length of the first portion 111 is smaller than half the width of the element body 10 in a direction perpendicular to the axis AX (X direction). The length of the first portion 111 is the length of the first center line C1 of the first portion 111. According to the above configuration, the possibility of contact between two bent wirings 11t1 adjacent to each other in the axis AX direction can be reduced. Similarly, the length of the third portion 113 is preferably smaller than half the width of the element body 10 in a direction perpendicular to the axis AX.

[0155] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the width of the second portion 112 in a direction perpendicular to the second center line C2 is 0.5 to 0.95 times the width of the first portion 111 in a direction perpendicular to the first center line C1. According to the above configuration, since the width of the second portion 112 is 0.95 times or less the width of the first portion 111, the width of the second portion 112 can be narrowed, thereby increasing the length of the second portion 112 and increasing the inductance. Meanwhile, since the width of the second portion 112 is 0.5 times or more the width of the first portion 111, cutting of the second portion 112 can be prevented. Similarly, when viewed from a direction perpendicular to the bottom surface 100b, the width of the second portion 112 in a direction perpendicular to the second center line C2 is preferably 0.5 to 0.95 times the width of the third portion 113 in a direction perpendicular to the third center line C3.

[0156] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, a first length of the bent wiring 11t1 between the centers of the first through wiring 13 and the second through wiring 14 connected to the bent wiring 11t1 is 4% or more longer than a second length formed by connecting the centers of the first through wiring 13 and the second through wiring 14 connected to the same bent wiring 11t1 with a straight line. The first length is the length between the centers of the first through wiring 13 and the second through wiring 14 out of the lengths of the center lines (first center line C1, second center line C2, and third center line C3) of the bent wiring 11t1. With the above configuration, the length of the bent wiring 11t1 can be increased, thereby increasing inductance.

[0157] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the angle of the second portion 112 (second center line C2) with respect to the axis AX is defined as a first angle, and the angle of a straight line connecting the centers of the first through wiring 13 and the second through wiring 14 connected to the bent wiring 11t1 having the same second portion 112 with respect to the axis AX is defined as a second angle. In this case, the second angle is larger than the first angle. The first angle is greater than 45° and smaller than 80°. A third angle, which is the difference between the second angle and the first angle, is greater than 1° and smaller than 45°.

[0158] According to the above configuration, since the first angle is greater than 45°, the width of the second portion 112 can be secured and the efficiency of obtaining inductance can be secured. Since the first angle is smaller than 80°, the length of the second portion 112 can be increased and the inductance can be improved. Since the third angle is greater than 1°, the length of the second portion 112 can be increased and the inductance can be improved. Since the third angle is smaller than 45°, the width of the second portion 112 can be secured.

[0159] 9 , the outer surface of the first external electrode 121 has a recess 121a. When viewed from a direction perpendicular to the bottom surface 100b, the recess 121a is provided at a position on the upper surface of the first external electrode 121 that overlaps with the via portion 121v. As a result, when the inductor component 1F is mounted on a substrate, solder fills the recess 121a of the first external electrode 121, improving the connection strength between the first external electrode 121 and the solder.

[0160] Similarly, the outer surface of the second external electrode 122 may have a recess. With this, when the inductor component 1F is mounted on a substrate, solder fills the recess of the second external electrode 122, improving the connection strength between the second external electrode 122 and the solder. The top surfaces of the first external electrode 121 and the second external electrode 122 may be formed flat.

[0161] (Method of Manufacturing Inductor Component 1F) Next, a method of manufacturing the inductor component 1F will be described with reference to Figures 11A to 11H, which are cross-sectional views taken along line IX-IX in Figure 8.

[0162] 11A, copper foil 2001 is provided by printing on a base substrate 2000. The material of the base substrate 2000 is the same as that of the base substrate 1000 of the first embodiment.

[0163] As shown in FIG. 11B , a glass substrate 2010, which will become the element body 10, is provided on a base substrate 2000. For example, the base substrate 2000 and the glass substrate 2010 are tightly attached to each other using a jig such as conductive tape, pins, or a frame. The glass substrate 2010 has a through-hole V. The glass substrate 2010 is, for example, a TGV (Through Glass Via) substrate. A TGV substrate is a substrate in which through-holes are formed in advance using a laser, photolithography, or the like. The glass substrate 2010 may be, for example, a TSV (Through Silicon Via) substrate, or may be something else. Furthermore, Ti / Cu or other necessary conductive materials may be deposited in advance as seeds on the surface of the glass substrate 2010 by sputtering or the like.

[0164] As shown in FIG. 11C , a first through conductor layer 2013, which will become the first through wiring 13, is formed in the through hole V of the glass substrate 2010. Although not shown, a second through conductor layer, which will become the second through wiring 14, is similarly formed in the through hole V. Specifically, by supplying power from the copper foil 2001 on the base substrate 2000, electrolytic plating is performed in the through hole V of the glass substrate 2010 to form the first through conductor layer 2013. Alternatively, a seed layer may be formed on the surface of the glass substrate 2010 or the inner surface of the through hole V by sputtering or the like, and the through conductor layer may be formed using known methods such as fill plating, conformal plating, or a printing and filling method of a conductive paste. If there is unnecessary plating growth on the surface of the glass substrate 2010, the unnecessary portions may be removed by polishing, CMP, wet etching (etch-back), or dry etching.

[0165] 11D, the base substrate 2000 is peeled off from the glass substrate 2010. At this time, the base substrate 2000 may be removed mechanically by grinding or the like, or may be removed chemically by etching or the like.

[0166] As shown in FIG. 11E , a bottom conductor layer 2011b that will become the bottom wiring 11b and a top conductor layer 2011t that will become the top wiring 11t are formed on a glass substrate 2010. Specifically, a seed layer (not shown) is provided on the entire surface of the glass substrate 2010, and a patterned photoresist is formed on the seed layer. A copper layer is formed by electrolytic plating on the seed layer in the openings of the photoresist. The photoresist and seed layer are then removed by wet etching or dry etching. This results in the formation of a bottom conductor layer 2011b and a top conductor layer 2011t that are patterned into any desired shape. At this time, the bottom conductor layer 2011b and the top conductor layer 2011t may be formed one at a time, or both may be formed simultaneously.

[0167] 11F , insulating layers 2022 that will become insulators 22 are provided on the top and bottom surfaces of glass substrate 2010 so as to cover the conductor layers. At this time, the bottom-side insulating layer 2022 and the top-side insulating layer 2022 may be formed one at a time, or both may be formed simultaneously. Then, holes 2022a are formed on bottom-side conductor layer 2011b of bottom-side insulating layer 2022 using photolithography or laser processing.

[0168] As shown in FIG. 11G , a first external electrode conductor layer 2121, which will become the first external electrode 121, is provided on the bottom insulating layer 2022. At this time, the first external electrode conductor layer 2121 is connected to the bottom conductor layer 2011b via the hole 2022a. Specifically, a Pd catalyst (not shown) is provided on the bottom insulating layer 2022, and a Ni and Au plating layer is formed by electroless plating. A patterned photoresist is formed on the plating layer. The plating layer in the openings of the photoresist is removed by wet etching or dry etching. This forms the first external electrode conductor layer 2121 patterned into a desired shape. Alternatively, a seed layer (not shown) is provided on the bottom insulating layer 2022, and a patterned photoresist is formed on the seed layer. Next, the seed layer in the openings of the photoresist is removed by wet etching or dry etching. A Ni and Au plating layer may be formed on the remaining seed layer by electroless plating. Although not shown, a second external electrode conductor layer that will become the second external electrode 122 is similarly provided on the insulating layer 2022 on the bottom surface side.

[0169] Here, since the first external electrode conductor layer 2121 is formed to conform to the shape of the upper surface of the insulating layer 2022 on the bottom side, the upper surface of the first external electrode conductor layer 2121 has a recessed portion in the area overlapping the hole 2022a.

[0170] 11H, the substrate is separated into individual pieces along the cut lines C. In this way, the inductor component 1F is manufactured as shown in FIG.

[0171] 12A is a view corresponding to the cross section IX-IX of FIG. 8 , illustrating a first modified example of an inductor component. As shown in FIG. 12A , in an inductor component 1G of the first modified example, first through wiring 13 extends in a direction perpendicular to bottom wiring 11 b, and the cross-sectional area of ​​each of end portions 13 e in the extension direction of first through wiring 13 is larger than the cross-sectional area of ​​a central portion 13 m in the extension direction of first through wiring 13. That is, in a cross section along the extension direction of first through wiring 13, the width in the direction perpendicular to the extension direction of first through wiring 13 continuously increases from central portion 13 m toward end portions 13 e.

[0172] This allows the cross-sectional area of ​​the end 13e of the first through wiring 13 to be increased, thereby improving the connectivity between the first through wiring 13 and at least one of the bottom wiring 11b and the top wiring 11t. Furthermore, when forming a through hole V as a hole portion in the element body 10 and filling the through hole V with a conductive material by filling plating or the like to form the first through wiring 13 in the through hole V, it is easy to fill the conductive material on the opening side of the through hole V. Furthermore, since the cross-sectional area of ​​the end 13e of the first through wiring 13 is large and the cross-sectional area of ​​the central portion 13m of the first through wiring 13 is small, the first through wiring 13 is easy to form.

[0173] It is sufficient that the cross-sectional area of ​​one end 13e of the first through wiring 13 is larger than the cross-sectional area of ​​the central portion 13m of the first through wiring 13. Similarly, the cross-sectional area of ​​at least one end of the second through wiring 14 may be larger than the cross-sectional area of ​​the central portion 13m of the first through wiring 13.

[0174] (Second Modification) Fig. 12B is a cross-sectional view corresponding to the IX-IX cross section of Fig. 8 , illustrating a second modification of an inductor component. As shown in Fig. 12B, in an inductor component 1H of the second modification, the first through wiring 13 has a conductive layer 13s located on the outer periphery when viewed from the direction in which the first through wiring 13 extends, and a non-conductive layer 13u located inside the conductive layer 13s. When used in a high frequency band, current flows mainly through the surface of the first through wiring 13 due to the skin effect, so providing the conductive layer 13s on the outer periphery does not reduce the Q value. Furthermore, providing the non-conductive layer 13u on the inner side can alleviate stress and reduce manufacturing costs by not using a conductor.

[0175] An example of a method for forming the conductive layer 13s and the non-conductive layer 13u will be described. A seed layer is provided on the inner surface of the through hole V of the element body 10 by sputtering or electroless plating. Then, a plating layer is formed on the seed layer by electrolytic plating. In this manner, multiple conductive layers 13s, such as Ti / Cu / electrolytic Cu or Pd / electroless Cu / electrolytic Cu, can be formed on the outer periphery of the first through wiring 13. The inside of the conductive layer 13s is then sealed with resin by printing, heat pressing, or the like, to form the non-conductive layer 13u made of resin. In this manner, current can flow through the surface (conductive layer 13s) of the first through wiring 13, while stress can be alleviated by the non-conductive layer 13u inside the first through wiring 13.

[0176] Similarly, the second through wiring 14 may have a conductive layer located on the outer periphery when viewed from the direction in which the second through wiring 14 extends, and a non-conductive layer located inside the conductive layer. Note that the cross-sectional area of ​​each of the two end portions in the extension direction of the first through wiring 13 is larger than the cross-sectional area of ​​the central portion in the extension direction of the first through wiring 13, but the cross-sectional area of ​​each of the two end portions in the extension direction of the first through wiring 13 may be the same as the cross-sectional area of ​​the central portion in the extension direction of the first through wiring 13.

[0177] (Third Modification) Fig. 12C is a view corresponding to the cross section IX-IX of Fig. 8 , showing a third modification of an inductor component. As shown in Fig. 12C , in an inductor component 1I of the third modification, the first external electrode 121 is connected to the first through-hole wiring 13 on the rightmost side in the figure, rather than to the bottom wiring 11b. That is, a first end of the first through-hole wiring 13 is connected to the first external electrode 121, and a second end of the first through-hole wiring 13 is connected to the top wiring 11t on the rightmost side in the figure. This makes it possible to easily connect the coil 110 to the first external electrode 121 even if the number of turns of the coil 110 is changed.

[0178] Similarly, although not shown, the second external electrode 122 is connected to the second through wiring 14 on the leftmost side in the drawing, rather than to the bottom wiring 11b. In other words, a first end of the second through wiring 14 is connected to the second external electrode 122, and a second end of the second through wiring 14 is connected to the top wiring 11t on the leftmost side in the drawing.

[0179] The number of bottom surface wirings 11b is less than the number of top surface wirings 11t, with the bottom surface wirings 11b being two and the top surface wirings 11t being three. The bottom surface wirings 11b are bent wirings, and the top surface wirings 11t are straight wirings.

[0180] <Third Embodiment> Fig. 13 is a schematic bottom view showing a third embodiment of an inductor component, as viewed from the bottom side. In Fig. 13, external electrodes are depicted by two-dot chain lines for convenience. Also, in Fig. 13, the element body 10 is depicted as transparent to facilitate understanding of the structure. The third embodiment differs from the first embodiment in the shapes of the bottom surface wiring and top surface wiring, and these differences will be described below. The other configurations are the same as those of the first embodiment, and description thereof will be omitted.

[0181] 13 , in the inductor component 1J of the third embodiment, when viewed from a direction perpendicular to the bottom surface 100b (Z direction), all bottom surface wirings 11b and all top surface wirings 11t are bent wirings having curved portions 115. Specifically, the bent wirings include curved portions 115 and straight portions. The straight portions are located at both ends of the bent wirings, and the curved portions 115 are located between the straight portions at both ends. The straight portions at both ends have different angles relative to the axis AX.

[0182] According to the above configuration, the bottom surface wiring 11b and the top surface wiring 11t are bent wirings, so that the length of the wiring of the coil 110 can be changed without changing the size of the inductor component 1J, and the inductance can be easily adjusted. Note that it is sufficient that at least one of the plurality of bottom surface wirings 11b and the plurality of top surface wirings 11t is a bent wiring having a curved portion 115.

[0183] Preferably, there are multiple bent wirings, and when viewed from a direction perpendicular to the bottom surface 100 b, the curved portions 115 of all the bent wirings are curved so as to protrude to one side in the axial direction. With this configuration, no magnetic field is generated in the reverse direction in all the curved portions 115, and the efficiency of obtaining an inductor can be increased.

[0184] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, the side of the curved portion 115 of the bottom surface wiring 11b has a recess 115a. The recess 115a is provided on the side of the protruding side of the curved portion 115. The recess 115a is provided at a position facing the first through wiring 13 connected to the bottom surface wiring 11b adjacent in the axial AX direction. According to the above configuration, since the side of the curved portion 115 has the recess 115a, the width of the curved portion 115 can be narrowed, and the possibility of contact between two bent wirings adjacent in the axial direction can be reduced. Note that the side of the curved portion 115 of the top surface wiring 11t may have the recess 115a.

[0185] Preferably, the bent wiring is made up of only curved portions 115. According to the above configuration, the bent wiring does not include any straight portions, and therefore the length of coil 110 can be increased. Note that at least one of the plurality of bent wirings may be made up of only curved portions 115.

[0186] The radii of curvature of all the curved portions 115 may be the same, or the radii of curvature of at least two curved portions 115 may be different from each other. Also, one curved portion 115 may have a plurality of different radii of curvature, and in this case, the radii of curvature may change continuously or in steps.

[0187] <Fourth embodiment> Fig. 14 is a schematic bottom view showing a fourth embodiment of an inductor component as viewed from the bottom side. Fig. 14 shows a view of the top surface wiring 11t as viewed from the bottom side, and for convenience, the first through wiring 13 and the second through wiring 14 are depicted by two-dot chain lines, and the element body 10 is depicted as transparent. The fourth embodiment differs from Fig. 10 of the second embodiment in the shape of the top surface wiring, and these differences will be described below. The other configurations are the same as those of the second embodiment, and their description will be omitted.

[0188] As shown in FIG. 14, in the inductor component 1K of the fourth embodiment, all the top surface wirings 11t are bent wirings having curved portions 115 when viewed from a direction (Z direction) perpendicular to the bottom surface 100b.

[0189] Specifically, the top surface wiring 11t on one side in the axial AX direction (the upper side in the drawing) includes a curved portion 115 and a straight portion. The straight portion is located at the end of the top surface wiring 11t on the first through wiring 13 side. The curved portion 115 is located at the end of the top surface wiring 11t on the second through wiring 14 side. The curved portion 115 is curved so as to protrude upward in the drawing.

[0190] The top surface wiring 11t on the other side in the axial AX direction (the lower side in the drawing) includes a curved portion 115 and a straight portion. The straight portion is located at the end of the top surface wiring 11t on the first through wiring 13 side and the end of the top surface wiring 11t on the second through wiring 14 side. The curved portion 115 is located between the straight portions at both ends. The curved portion 115 is curved in a serpentine shape.

[0191] According to the above configuration, the top surface wiring 11t is a bent wiring, so the length of the wiring of the coil 110 can be changed without changing the size of the inductor component 1K, and the inductance can be easily adjusted. Note that it is sufficient that at least one of the plurality of bottom surface wirings 11b and the plurality of top surface wirings 11t is a bent wiring having a curved portion 115.

[0192] Preferably, as in the third embodiment, there are multiple bent wirings, and when viewed from a direction perpendicular to the bottom surface 100 b, the curved portions 115 of all the bent wirings are curved so as to protrude to one side in the axial direction. With this configuration, no magnetic field in the reverse direction is generated in any of the curved portions 115, and the efficiency of obtaining an inductor can be increased.

[0193] Preferably, as in the third embodiment, the side surface of the curved portion 115 has a recess when viewed from a direction perpendicular to the bottom surface 100b. According to the above configuration, since the side surface of the curved portion 115 has a recess, the width of the curved portion 115 can be made narrower, and the possibility of contact between two bent wirings adjacent in the axial direction can be reduced.

[0194] As in the third embodiment, preferably, the bent wiring is made up of only the curved portion 115. According to the above configuration, the bent wiring does not include a straight portion, so the length of the coil 110 can be increased. Note that at least one of the plurality of bent wirings may be made up of only the curved portion 115.

[0195] The present disclosure is not limited to the above-described embodiments, and design modifications are possible within the scope of the present disclosure. For example, the features of the first to fourth embodiments may be combined in various ways. For example, two or more types of bent wirings of the first to fourth embodiments may be mixed.

[0196] The present disclosure includes the following aspects. <1> An element body including a first main surface and a second main surface opposing each other; a coil provided on the element body and wound spirally along an axis; and a first external electrode and a second external electrode provided on the element body and electrically connected to the coil, wherein the axis of the coil is arranged parallel to the first main surface, and the coil includes: a plurality of first coil wirings provided on the first main surface side of the axis and arranged along the axis on a plane parallel to the first main surface; a plurality of second coil wirings provided on the second main surface side of the axis and arranged along the axis on a plane parallel to the second main surface; a plurality of first through wires extending from the first coil wiring toward the second coil wiring and arranged along the axis; and a plurality of second through wires extending from the first coil wiring toward the second coil wiring and provided on the opposite side of the axis to the first through wires and arranged along the axis, and the first coil wiring, the first through wire, the second coil wiring, and the second through wire are connected in this order to form at least a part of the spiral shape, An inductor component, wherein, when viewed from a direction orthogonal to the first main surface, at least one of the plurality of first coil wirings and the plurality of second coil wirings is a bent wiring having a first portion and a second portion that are at different angles relative to the axis. <2> The inductor component according to <1>, wherein, when viewed from a direction orthogonal to the first main surface, the first portion is a portion that is orthogonal to the axis or a portion that is parallel to the axis, and the second portion is a portion that intersects the axis at an acute angle. <3> The element body is made of SiO ２<4> The inductor component according to <1> or <2>, including: <4> The inductor component according to any one of <1> to <3>, wherein, in two of the bent wirings adjacent in the axial direction, as viewed in a direction orthogonal to the first main surface, the distance between the second portion of one of the bent wirings and the second portion of the other of the bent wirings is smaller than the distance between the first portion of one of the bent wirings and the first portion of the other of the bent wirings. <5> The inductor component according to any one of <1> to <4>, wherein the bent wiring is provided on at least the first coil wiring, and as viewed in a direction orthogonal to the first main surface, at least one second coil wiring among the plurality of second coil wirings extends in a direction connecting the centers of the first through wirings and the second through wirings connected to the same second coil wiring by a straight line. <6> The inductor component according to any one of <1> to <5>, wherein the bent wiring is provided on at least the first coil wiring, one first coil wiring of the plurality of first coil wirings has a first end connected to the first external electrode and a second end connected to the first through wiring, and the one first coil wiring extends in a direction connecting the first end and the second end by a straight line as viewed in a direction orthogonal to the first main surface. <7> The inductor component according to any one of <1> to <6>, wherein the first portion is a portion orthogonal to the axis as viewed in the direction orthogonal to the first main surface, and the length of the first portion as viewed in the direction orthogonal to the first main surface is smaller than half the width of the element body in the direction orthogonal to the axis. <8> The inductor component according to any one of <1> to <7>, wherein, when viewed in a direction orthogonal to the first main surface, the first portion is a portion orthogonal to the axis and the second portion is a portion intersecting the axis at an acute angle, and when viewed in a direction orthogonal to the first main surface, the width of the second portion is 0.5 to 0.95 times the width of the first portion. <9> The inductor component according to any one of <1> to <8>, wherein, when viewed in a direction orthogonal to the first main surface, the shape of the coil has 180° rotational symmetry about a midpoint in the axial direction of the coil.<10> The inductor component according to any one of <1> to <9>, wherein, when viewed from a direction perpendicular to the first main surface, the length of the bent wiring between the centers of the first through wiring and the second through wiring connected to the bent wiring is 4% or more longer than the length of a straight line connecting the centers of the first through wiring and the second through wiring connected to the same bent wiring. <11> The inductor component according to any one of <1> to <10>, wherein, when viewed in a direction orthogonal to the first main surface, the first portion is a portion orthogonal to the axis, and the second portion is a portion intersecting the axis at an acute angle, when viewed in a direction orthogonal to the first main surface, an angle of the second portion with respect to the axis is defined as a first angle θ1, and an angle of a line connecting the centers of the first through wiring and the second through wiring connected to the bent wiring having the same second portion with respect to the axis is defined as a second angle θ2, the second angle θ2 is greater than the first angle θ1, the first angle θ1 is greater than 45° and less than 80°, and a difference between the second angle θ2 and the first angle θ1 is greater than 1° and less than 45°. <12> The inductor component according to any one of <1> to <11>, wherein the bent wiring is provided in at least the first coil wiring, and an outermost first coil wiring located furthest outward in the axial direction among the plurality of first coil wirings is not the bent wiring, and when viewed in a direction perpendicular to the first main surface, the maximum axial length of the outermost first coil wiring is greater than the maximum axial length of the first coil wiring adjacent in the axial direction to the outermost first coil wiring.<13> An element body including a first main surface and a second main surface opposing each other; a coil provided on the element body and wound spirally along an axis; and a first external electrode and a second external electrode provided on the element body and electrically connected to the coil, wherein the axis of the coil is arranged parallel to the first main surface, and the coil includes: a plurality of first coil wirings provided on the first main surface side of the axis and arranged along the axis on a plane parallel to the first main surface; a plurality of second coil wirings provided on the second main surface side of the axis and arranged along the axis on a plane parallel to the second main surface; a plurality of first through wires extending from the first coil wiring toward the second coil wiring and arranged along the axis; and a plurality of second through wires extending from the first coil wiring toward the second coil wiring and provided on the opposite side of the axis to the first through wires and arranged along the axis, and the first coil wiring, the first through wire, the second coil wiring, and the second through wire are connected in this order to form at least a part of the spiral shape, An inductor component, wherein at least one of the plurality of first coil wirings and the plurality of second coil wirings is a bent wiring having a curved portion when viewed from a direction orthogonal to the first main surface. <14> The inductor component according to <13>, wherein there are a plurality of the bent wirings, and when viewed from a direction orthogonal to the first main surface, all of the curved portions are curved so as to protrude to one side in the axial direction. <15> The inductor component according to <13> or <14>, wherein when viewed from a direction orthogonal to the first main surface, a side surface of the curved portion has a recess. <16> The inductor component according to any one of <13> to <15>, wherein the bent wiring consists only of the curved portion.

[0197] DESCRIPTION OF SYMBOLS 1, 1A-1K Inductor component 10 Body 11b Bottom wiring (first coil wiring) 11t Top wiring (second coil wiring) 11b1, 11t1 Bent wiring 11b2, 11t2 Straight wiring 11b3, 11t3 Wide wiring 13 First through wiring 13e End portion 13m Central portion 13s Conductive layer 13u Non-conductive layer 14 Second through wiring 22 Insulator 100b Bottom surface (first main surface) 100t Top surface (second main surface) 110, 110A, 110B Coil 111 First portion 112 Second portion 113 Third portion 115 Curved portion 115a Recess 121 First external electrode 121a Hollow portion 121b Bottom portion 121v Via portion 121e1 Underlayer 121e2 Plating layer 122 Second external electrode 122b Bottom portion 122v Via portion AX Axis α Angle between first portion and axis β Angle between second portion and axis γ Angle between third portion and axis θ1, θ2, θ3 First, second, third angles C1, C2, C3 First, second, third center lines d1, d2, d3 First, second, third distances L1, L2 First, second lengths M1, M2, M3, M4 Maximum length N Straight line

Claims

1. an element body including a first main surface and a second main surface opposed to each other; a coil provided on the element body and wound helically along an axis; a first external electrode and a second external electrode provided on the element body and electrically connected to the coil; Equipped with The axis of the coil is disposed parallel to the first major surface; The coil is a plurality of first coil wirings provided on the first main surface side with respect to the axis and arranged along the axis on a plane parallel to the first main surface; a plurality of second coil wirings provided on the second main surface side with respect to the axis and arranged along the axis on a plane parallel to the second main surface; a plurality of first through wires extending from the first coil wiring toward the second coil wiring and arranged along the axis; a plurality of second through wirings extending from the first coil wiring toward the second coil wiring, provided on an opposite side of the axis from the first through wirings, and arranged along the axis; Including, the first coil wiring, the first through wiring, the second coil wiring, and the second through wiring are connected in this order to form at least a part of the spiral shape; An inductor component, wherein when viewed from a direction perpendicular to the first main surface, at least one of the plurality of first coil wirings and the plurality of second coil wirings is a bent wiring having a curved portion, and when viewed from a direction perpendicular to the first main surface, a side of the curved portion has a recess.

2. The inductor component according to claim 1, wherein the base body comprises SiO 2 .

3. The bent wiring is present in a plurality of parts, 3 . The inductor component according to claim 1 , wherein all of the curved portions are curved so as to protrude to one side in a direction along the axis when viewed in a direction perpendicular to the first main surface.

4. 3. The inductor component according to claim 1, wherein the bent wiring comprises only the curved portion.