Laser equipment and laser processing machine

Abstract

A laser device includes a laser module that outputs multiple laser beams and a beam combining module that combines the multiple laser beams into a combined beam that is a laser beam with the same optical axis, wherein the laser module has multiple laser beam sources, multiple first transmission optical systems, and a first box. The multiple first transmission optical systems are provided corresponding to the multiple laser beam sources, respectively, and shape the laser beams output from the multiple laser beam sources into parallel or nearly parallel beams. The first box houses the multiple laser beam sources and the multiple first transmission optical systems, and has a sealed interior with a window that transmits the laser beams output from the multiple laser beam sources. The first box is detachable from the beam combining module. At least one of the first box and the beam combining module has a positioning member that positions the first box with the beam combining module.

Description

Technical Field

[0001] The present disclosure relates to a laser device that outputs a laser beam and a laser processing machine.

Background Art

[0002] Conventionally, a laser device that outputs a high-output laser beam has been proposed. Patent Document 1 discloses a laser device having a first housing having a laser module using a plurality of laser diodes and a second housing having a coupling optical system that couples laser beams from the plurality of laser modules. In the laser device described in Patent Document 1, for each laser module, a fast-axis collimator and a polarizing plate are provided in the first housing, and a slow-axis collimator is provided in the second housing. The first housing and the second housing are provided in contact with each other, and a communication port is provided for each laser module at a position through which the laser beam output from the laser module passes. Further, a window is provided in the communication port.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Incidentally, the higher the output of a laser diode, the more susceptible it becomes to the effects of the surrounding environment, such as dust. Therefore, measures are generally taken to seal the surrounding area to prevent contamination, especially the output end face of the laser diode. In particular, during component replacement, the surrounding environment is often poor, with dust floating around, and it is necessary to devise ways to minimize this effect. However, the conventional technology described above had the problem that the laser module configuration did not take into account the effects of the surrounding environment, such as dust. Furthermore, when the laser device is mounted on a laser processing machine, it is necessary to shorten the component replacement time in order to reduce machine downtime. In the conventional technology described above, the transmission optical system, including the fast-axis collimator, polarizer, and slow-axis collimator that transmits the laser beam output from the laser module to the coupled optical system of the second housing, was distributed and sealed in the first and second housings for each laser module. Therefore, when replacing the entire set of components in the first housing, it was necessary to adjust the optical components constituting the transmission optical system distributed in the first and second housings, respectively, which made the replacement work difficult and prevented the reduction of component replacement time.

[0005] This disclosure has been made in view of the above, and aims to provide a laser device that can suppress the influence of the surrounding environment on the laser module during component replacement and shorten the component replacement time compared to conventional devices. [Means for solving the problem]

[0006] To solve the above-mentioned problems and achieve the objective, this disclosure provides a laser device comprising a laser module that outputs multiple laser beams and a beam coupling module that couples the multiple laser beams into a combined beam which is a laser beam on the same optical axis, wherein the laser module has multiple laser beam sources, multiple first transmission optical systems, and a first enclosure. The multiple laser beam sources output laser beams. The multiple first transmission optical systems are provided corresponding to each of the multiple laser beam sources and shape the laser beams output from each of the multiple laser beam sources into a state of parallel light or near-parallel light. The first enclosure houses the multiple laser beam sources and the multiple first transmission optical systems and has a sealed interior with a window that transmits the laser beams output from the multiple laser beam sources. Each of the multiple laser beam sources includes a laser diode bar that outputs a laser beam, an adjustment member that fixes the laser diode bar, and a reference axis that fixes the adjustment member on a mounting base provided inside the first box and allows the adjustment member to rotate within the mounting surface of the mounting base around the exit end of the laser diode bar. Each of the multiple laser beam sources is oriented on the mounting base so as to output a laser beam in a predetermined direction. Each of the multiple first transmission optical systems includes a first optical component that collimates the fast axis direction component of the laser beam emitted from the corresponding laser beam source, and a second optical component that collimates the slow axis direction component of the laser beam. The multiple first transmission optical systems are fixed on the mounting base at a predetermined distance from the exit end face of the laser diode bar. The first box is detachable from the beam coupling module. At least one of the first box and the beam coupling module has a positioning member for positioning the first box relative to the beam coupling module. [Effects of the Invention]

[0007] The laser device described herein offers the advantage of suppressing the influence of the surrounding environment on the laser module during component replacement and shortening component replacement time compared to conventional devices. [Brief explanation of the drawing]

[0008] [Figure 1] A schematic diagram showing an example of the configuration of a laser device according to Embodiment 1. [Figure 2] A schematic diagram showing an example of the configuration of a laser device according to Embodiment 2. [Figure 3] This diagram schematically shows another example of the configuration of the laser device according to Embodiment 2. [Figure 4] A schematic diagram showing an example of the configuration of a laser processing machine according to Embodiment 3. [Modes for carrying out the invention]

[0009] The laser apparatus and laser processing machine according to the embodiments of this disclosure will be described in detail below with reference to the drawings.

[0010] Embodiment 1. Figure 1 is a schematic diagram showing an example of the configuration of a laser device according to Embodiment 1. The laser device 1 comprises a laser module 10 that outputs a plurality of laser beams L1, a beam coupling module 30 that couples the plurality of laser beams L1 output from the laser module 10 into a coupled beam L2 which is a laser beam on the same optical axis, a fiber coupling module 50 that couples the coupled beam L2 into a transmission fiber 70 which is an optical fiber, and a laser diode drive power supply 60 that drives the laser diode (LD) element of the laser module 10. In Embodiment 1, the laser module 10, the beam coupling module 30, and the fiber coupling module 50 each have an internally sealed structure. In addition, the laser module 10, the beam coupling module 30, and the fiber coupling module 50 are each detachable from the other modules.

[0011] The laser module 10 includes a housing 11, a plurality of LD packages 12-1, 12-2, ..., 12-n, a plurality of first transmission optical systems 13-1, 13-2, ..., 13-n, a power supply unit 14, wiring 15, a manifold 16, and piping 17. Hereinafter, the plurality of LD packages 12-1, 12-2, ..., 12-n will be referred to as LD package 12 unless individually distinguished. Similarly, the plurality of first transmission optical systems 13-1, 13-2, ..., 13-n will be referred to as first transmission optical system 13 unless individually distinguished.

[0012] The box 11 is a box-shaped component that houses multiple LD packages 12 and multiple first transmission optical systems 13. In this example, the box 11 is assumed to be a hollow rectangular parallelepiped. The box 11 has a structure that maintains internal airtightness. The box 11 has a mounting base 111 on which multiple LD packages 12 and multiple first transmission optical systems 13 are installed. The mounting base 111 has reference axis placement holes at the positions where the LD packages 12 are installed. The reference axis placement holes are holes into which a rod-shaped reference axis 124, described later, is inserted. The surface of the mounting base 111 on which the LD packages 12, first transmission optical systems 13, etc. are installed is called the mounting surface.

[0013] The enclosure 11 has an opening at a position for extracting laser beams L1 output from multiple LD packages 12 on the side that contacts the beam coupling module 30 to the outside. The enclosure 11 has a window 112 sealed at the opening. A sealing member (not shown) is provided between the edge of the opening of the enclosure 11 and the outer periphery of the window 112. In one example, by installing an O-ring, which is an example of a sealing member, on the outer periphery of the window 112 through which the laser beams L1 do not pass, the opening of the enclosure 11 is sealed. This suppresses the leakage or inflow of gas through the gap between the enclosure 11 and the window 112, and maintains the airtightness inside the enclosure 11. The window 112 is made of a material that can transmit the laser beams L1 output from the LD packages 12. The enclosure 11 (not shown) has an opening for passing wiring 15 at the position where the power supply unit 14 is provided, and an opening for passing piping 17 at the position where the manifold 16 is provided. The enclosure 11 corresponds to the first enclosure.

[0014] The LD package 12 is fixed to a mounting base 111 inside the box body 11 and is a package that outputs a laser beam L1 of a predetermined wavelength. Multiple LD packages 12 are arranged inside the laser module 10, but the wavelength of the laser beam L1 output by each of the multiple LD packages 12 is different. The LD package 12 is aligned on the mounting base 111 and fixed on the mounting base 111 by inserting the reference shaft 124 into both a reference shaft positioning hole provided in the mounting base 111 in advance and a reference shaft positioning hole provided on the back of the LD package 12.

[0015] The LD package 12 includes an adjustment member 121, a heat sink 122, an LD bar 123, and a reference axis 124.

[0016] The adjustment member 121 is a member on which the LD bar 123 is placed and fixed so that the laser beam L1 is emitted in a predetermined direction. The adjustment member 121 has a reference axis arrangement hole on its back surface into which a reference axis 124 is inserted in a direction perpendicular to the mounting surface of the adjustment member 121. The back surface of the adjustment member 121 is the surface that contacts the mounting surface of the mounting base 111. The adjustment member 121 is fixed to the mounting base 111 so that the reference axis 124 is inserted into both the reference axis arrangement hole of the adjustment member 121 and the reference axis arrangement hole of the mounting base 111. This fixes the adjustment member 121 in an aligned state on the mounting base 111. The reference axis arrangement hole of the adjustment member 121 is provided at the output end of the laser beam L1. Adjustment member 121 The adjustment member 121 is rotatable within the installation surface around the reference axis 124. In other words, by rotating the adjustment member 121 within the installation surface around the reference axis 124, it is possible to change the emission direction of the laser beam L1.

[0017] The heat sink 122 is a heat dissipation component for suppressing the temperature rise of the LD bar 123 and is fixed on the adjustment member 121. Inside the heat sink 122, there is a passage for flowing a cooling medium. In one example, the heat sink 122 has a pipe connection part 122a at the end opposite to the output side of the laser beam L1. The pipe connection part 122a is connected to a pipe 17 which is connected to the manifold 16.

[0018] The LD bar 123 is a structure having an LD element that outputs a laser beam L1, and a cathode electrode and an anode electrode that supply power to the LD element, and is fixed on the heat sink 122. The LD element is an edge-emitting laser that emits the laser beam L1 in the direction of the first transmission optical system 13. Among the side surfaces of the LD element, the side surface facing the window 112 of the box body 11 becomes the emission end surface from which the laser beam L1 is emitted. Also, the side surface opposite to the emission end surface becomes the reflection end surface that reflects the laser beam L1. In one example, an LD element using gallium arsenide (GaAs) for the substrate and indium gallium arsenide (InGaAs) for the active layer is used. The LD bar 123 is the same as a laser diode bar.

[0019] The reference axis 124 fixes the adjustment member 121 at a defined position on the installation base 111. In one example, the reference axis 124 is provided in accordance with the position of the emission end surface of the LD bar 123.

[0020] The LD package 12 fixed to the installation base 111 via the reference axis 124 adjusts the optical axis of the laser beam L1 output from the LD bar 123 by rotating the adjustment member 121 within the installation surface of the installation base 111 about the reference axis 124. That is, the LD package 12 has a structure that can be rotated about the emission end surface when the direction of the optical axis of the laser beam L1 emitted from the emission end surface is adjusted. Note that the LD package 12 having the LD bar 123 corresponds to a laser beam source that outputs a laser beam.

[0021] The first transmission optical system 13 is fixed to an installation table 111 inside the box body 11 at a distance determined from the emission end face of the LD bar 123, provided corresponding to each of the plurality of LD packages 12, and is an optical element for adjusting the optical axis of the laser beam L1 output from the LD package 12. In one example, the first transmission optical system 13 shapes the laser beam L1 output from the LD package 12 into a parallel light or a state close to parallel light. In one example, the first transmission optical system 13 includes a fast axis collimator (FAC) and a slow axis collimator (SAC). The FAC is an optical component that collimates the component in the fast axis direction of the laser beam L1 emitted from the LD bar 123 of the LD package 12. The SAC is an optical component that collimates the component in the slow axis direction of the laser beam L1. In addition, the first transmission optical system 13 may have other optical elements, for example, other optical elements such as a polarizing plate that hardly requires optical axis adjustment. The FAC corresponds to the first optical component, and the SAC corresponds to the second optical component.

[0022] In the conventional technology, the FAC and the SAC are arranged in separate box bodies. To adjust the optical axis of the LD bar when replacing the LD bar or the like, it was necessary to open each of the box body containing the FAC and the box body containing the SAC for operation. However, in the first embodiment, the FAC and the SAC are collectively arranged inside the box body 11 constituting the laser module 10. Thus, by collectively arranging the FAC and the SAC inside one box body 11, when adjusting the optical axis of the LD package 12 during the assembly of the laser module 10, the operation may be carried out within the same box body 11, so that the operation is facilitated compared with the prior art.

[0023] The power supply unit 14 is a component that relays the wiring 15 that supplies power from the LD drive power supply 60 to the LD bars 123 of the LD package 12. The power supply unit 14 is connected to the housing 11 via a sealing member 141 such as a gasket at the location of an opening (not shown). Hermetic components can be used for the power supply unit 14. This allows the LD drive power supply 60 to be connected to the LD bars 123 by wiring 61 and 15. When removing the laser module 10, the external wiring 61 can be disconnected from the power supply unit 14. Note that in Figure 1, only two power supply units 14 are shown for the sake of simplicity, but there are enough power supply units 14 to supply power from the LD drive power supply 60 to each LD bar 123 via wiring 61 and 15.

[0024] The wiring 15 electrically connects the power supply unit 14 and the LD bars 123 of each LD package 12 inside the enclosure 11. Power from the LD drive power supply 60, which will be described later, is supplied to the LD bars 123.

[0025] The manifold 16 is a relay member having a flow path for supplying a cooling medium to the heat sinks 122 of the LD packages 12. The manifold 16 is connected to the outside of the housing 11 via a sealing member 161 such as a gasket, and has a flow path that branches off to supply a cooling medium from a cooling device (not shown) to the heat sinks 122 of each LD package 12, and a flow path that merges to return the cooling medium returning from the heat sinks 122 of each LD package 12 to the cooling device. The manifold 16 has a plurality of pipe connection parts 162 on the side that connects to the housing 11, corresponding to the heat sinks 122 of each LD package 12. The pipe connection parts 162 are connected to the pipe connection parts 122a of each LD package 12 via pipes 17. An opening (not shown) is provided on the side of the housing 11 to which the manifold 16 is attached, so as to include all the pipe connection parts 162. The manifold 16 is connected via a sealing member 161 provided along the outer circumference of this opening. This seals the space between the manifold 16 and the housing 11. Furthermore, since the manifold 16 is provided to cover the opening via the sealing member 161, the manifold 16 can also be considered part of the component that seals the housing 11. The manifold 16 also has a pipe connection portion 163 that connects to a pipe 75 extending from the cooling device. To remove the laser module 10, the pipe 75 connected to the cooling device can be disconnected from the pipe connection portion 163.

[0026] The piping 17 connects the piping connection 162 of the manifold 16 and the piping connection 122a of the heat sink 122 of each LD package 12 inside the box 11, and serves as a flow path for the cooling medium. Since the position of the LD packages 12 can be adjusted around the reference axis 124, it is desirable that the piping 17 be a flexible structure such as a hose.

[0027] The beam coupling module 30 includes a box 31, a wavelength-dispersing element 33, and a partial reflector 35.

[0028] The box 31 is a box-shaped member that houses the wavelength-dispersive element 33 and the partial reflector 35. In this example, the box 31 is assumed to be a hollow rectangular parallelepiped. The box 31 has a structure that maintains internal airtightness. The box 31 has an opening on the side that is in contact with the box 11 of the laser module 10. The box 31 has a window 311 sealed in the opening. The position of the window 311 coincides with the position of the window 112 of the box 11 of the laser module 10. A sealing member (not shown) is provided between the edge of the opening of the box 31 and the window 311. The laser beam L1 output from the laser module 10 is input through the window 311. The window 311 is made of a material that can transmit the laser beam L1.

[0029] The box 31 has an opening on the side that is in contact with the fiber coupling module 50. The box 31 has a window 312 sealed in the opening. A sealing member (not shown) is provided between the edge of the opening of the box 31 and the window 312. The window 312 is made of a material that can transmit the coupling beam L2. The box 31 corresponds to the second box.

[0030] The wavelength-dispersing element 33 combines laser beams L1 of different wavelengths from multiple laser modules 10 into a single combined beam L2 with the same optical axis. Alternatively, the wavelength-dispersing element 33 separates the single combined beam L2 reflected by the partial reflector 35 into multiple laser beams L1 that travel to each laser module 10 with their optical axes oriented in different directions. Examples of wavelength-dispersing elements 33 include prisms and diffraction gratings.

[0031] The partial mirror 35 transmits a portion of the coupled beam L2, which is coupled by the wavelength-dispersive element 33, and reflects the remaining portion towards the laser module 10. The partial mirror 35 forms an external optical resonator between itself and the multiple LD bars 123 of the laser module 10. That is, an external optical resonator is formed between the reflective end face, which is the side of each LD bar 123 opposite to the output end face, and the partial mirror 35, and a portion of the coupled beam L2 amplified by this external optical resonator is output to the outside from the partial mirror 35. A resonator that oscillates a laser beam L1 in this configuration is called a wavelength beam combining (WBC) resonator.

[0032] In the example shown in Figure 1, the beam coupling module 30 includes a second transmission optical system 32, a third transmission optical system 34, and a fourth transmission optical system 36. The second transmission optical system 32, the third transmission optical system 34, and the fourth transmission optical system 36 are housed inside a box 31.

[0033] The second transmission optical system 32 is positioned between the laser module 10 and the wavelength-dispersive element 33 and has the function of aligning the laser beam L1 incident on the wavelength-dispersive element 33. In one example, the second transmission optical system 32 collimates the laser beam L1. An example of an element constituting the second transmission optical system 32 is a lens. A polarizer may be placed in the second transmission optical system 32 instead of the first transmission optical system 13. The second transmission optical system 32 is provided as needed.

[0034] The third transmission optical system 34 is positioned between the wavelength-dispersing element 33 and the partial reflector 35, and has the function of shaping the coupled beam L2 that exits the wavelength-dispersing element 33 and enters the partial reflector 35. In one example, the third transmission optical system 34 shapes the beam diameter and divergence angle of the coupled beam L2 to a suitable level. An example of the elements constituting the third transmission optical system 34 is one or more lens groups. The third transmission optical system 34 is provided as needed.

[0035] The fourth transmission optical system 36 is positioned after the partial reflector 35 and has the function of shaping the coupled beam L2 that is emitted from the partial reflector 35 and incident on the fiber coupling module 50. In one example, the fourth transmission optical system 36 shapes the beam diameter and divergence angle of the coupled beam L2 to a suitable size. Figure 1 shows an example in which one laser module 10 is connected to the beam coupling module 30, but there are also cases in which multiple laser modules 10 are connected to the beam coupling module 30. In such cases, the fourth transmission optical system 36 has the function of changing the position of the coupled beam L2 from each laser module 10 to a predetermined position. An example of changing the position of the coupled beam L2 is when the coupled beams L2 from multiple laser modules 10 are arranged at a predetermined distance in a plane perpendicular to the direction of propagation. Alternatively, in another example, multiple partial reflectors 35 are provided corresponding to multiple laser modules 10, and the coupled beams L2 from the multiple partial reflectors 35 are further coupled into a single coupled beam L2. An example of the elements constituting the fourth transmission optical system 36 is one or more lens groups. A fourth transmission optical system 36 is provided as needed.

[0036] The fiber coupling module 50 includes a housing 51 and a fifth transmission optical system 52.

[0037] The box 51 is a box-shaped member that houses the fifth transmission optical system 52. In this example, the box 51 is assumed to be a hollow rectangular parallelepiped. The box 51 has a structure that maintains internal airtightness. The box 51 has an opening on the side that is in contact with the beam coupling module 30. The box 51 has a window 511 sealed in the opening. The position of the window 511 coincides with the position of the window 312 of the box 31 of the beam coupling module 30. A sealing member (not shown) is provided between the edge of the opening of the box 51 and the window 511. The coupled beam L2 from the beam coupling module 30 is input through the window 511. The window 511 is made of a material that can transmit the coupled beam L2. The box 51 has a fiber junction 53 to which the transmission fiber 70 is connected.

[0038] The fifth transmission optical system 52 is positioned between the beam coupling module 30 and the transmission fiber 70, and is an optical system for injecting the coupled beam L2 emitted from the beam coupling module 30 into the core of the transmission fiber 70. An example of the elements constituting the fifth transmission optical system 52 is a group of one or more lenses.

[0039] The LD drive power supply 60 supplies power to each LD bar 123 of the laser module 10 to drive the LD bars 123. The LD drive power supply 60 is connected to the power supply unit 14 of the laser module 10 via wiring 61. At the power supply unit 14, the wiring 61 and the internal wiring 15 of the laser module 10 are electrically connected.

[0040] Here, the casing 11 of the laser module 10 and the casing 31 of the laser coupling module have positioning members that align them so that they can be installed in a predetermined position within the laser device 1. The positioning member is provided on at least one of the casings 11 and 31 and is a member that positions the casing 31 when it is joined to the beam coupling module 30. Figure 1 shows the case where the positioning member is a contact surface 21. When the positioning member is a contact surface 21, the contact surface 21 is a plate-shaped member provided at multiple positions around the contact surface where the casing 11 of the laser module 10 and the casing 31 of the beam coupling module 30 come into contact, so as to contact the two casings 11 and 31. By providing a contact surface 21, the two can be aligned when they are attached. Other positioning members include pins and keyways. When the positioning member is a pin, one or more pins are provided on the surface of one casing that comes into contact with the other casing, and holes are provided on the surface of the other casing at positions corresponding to the pins, thereby enabling the two to be aligned when they are attached. When the positioning member is a keyway, a projection called a key is provided on the surface of one box body that contacts the other box body, extending in one direction. A groove extending in one direction is also provided on the surface of the other box body at a position corresponding to the projection, into which the projection is inserted. This allows for alignment when attaching the two boxes together.

[0041] Furthermore, the casing 31 of the beam coupling module 30 and the casing 51 of the fiber coupling module 50 also have positioning members that align them so that they can be installed in predetermined positions within the laser device 1. The positioning members can be the same as the positioning members used between the laser module 10 and the beam coupling module 30 described above. In the example in Figure 1, the positioning member is shown to be a contact surface 41.

[0042] Next, an overview of the operation of the laser device 1 with this configuration will be described. This laser device 1 outputs laser light in an operation called an external resonator. First, the output of the laser beam L1 in one LD package 12 will be described. When the laser beam L1 output from the LD bar 123 of one LD package 12 is incident on the wavelength dispersion element 33 at a predetermined angle, the laser beam L1 is diffracted at a predetermined angle and heads towards the partial reflector 35. A portion of the laser beam L1 is reflected by the partial reflector 35. The reflected laser beam L1 is diffracted by the wavelength dispersion element 33 in the direction of the original LD ​​bar 123. This back-and-forth of the laser beam L1 between the reflective end face of the LD bar 123 and the partial reflector 35 is repeated. Then, only the laser beam L1 of the wavelength that has made multiple back-and-forth movements between the reflective end face of the LD bar 123 and the partial reflector 35, that is, only the laser beam L1 of the wavelength that has resonated optically, is output from the partial reflector 35.

[0043] Here, by arranging multiple LD bars 123 and combining laser beams L1 of different wavelengths, known as wavelength coupling, a high-power laser beam L1 can be created. In this case, the arrangement of each LD package 12 in the laser module 10 is adjusted so that the laser beam L1 output from each LD bar 123 becomes a coupled beam L2 on the same optical axis by the wavelength-dispersing element 33. In other words, the optical axis of the LD bar 123 is adjusted by the arrangement of the LD package 12. As a result, all the laser beam L1 from the LD bars 123 diffracted by the wavelength-dispersing element 33 becomes a coupled beam L2 on the same optical axis. Conversely, the coupled beam L2 reflected by the partial reflector 35 returns to the original LD ​​bar 123 by the wavelength-dispersing element 33.

[0044] In a laser device 1 having an LD package 12 equipped with multiple LD bars 123, the LD bars 123 constituting the LD package 12, which is the laser beam source, generally have a limited lifespan. Embodiment 1 proposes a structure that assumes the replacement of these LD bars 123.

[0045] It is known that the higher the output of the LD bar 123, the more susceptible it becomes to the effects of the surrounding environment, such as dust and dirt. Therefore, measures are generally taken to prevent contamination of the LD bar 123, especially the output end face, such as sealing the area around the output end face. Since the surrounding environment is often poor when replacing parts, measures are needed to minimize these effects.

[0046] In conventional laser systems, the replacement of the LD bar due to its lifespan is performed on-site where the laser system is installed. Specifically, after opening the enclosure and replacing the LD bar, the FAC and SAC corresponding to the replaced LD bar must be adjusted while observing the shape of the laser beam output from the transmission fiber. Furthermore, in conventional laser systems, the FAC and SAC are housed in separate enclosures, so adjustments are performed with each enclosure open. This adjustment process is generally time-consuming. As a result, in on-site work in poor environmental conditions, dust and other contaminants may adhere to the optical components, causing them to burn and potentially affecting the quality of the laser beam. Thus, in conventional laser systems, the replacement and adjustment of the LD bar are performed in a dusty, non-clean environment, which poses a problem in guaranteeing the quality of the laser beam. Embodiment 1 provides a laser system 1 that can replace the LD bar 123 in a shorter time than conventional systems while guaranteeing the quality of the laser beam L1, even in a non-clean environment.

[0047] Therefore, in Embodiment 1, as described above, when the LD bar 123 needs to be replaced due to its lifespan, the laser module 10 is made detachable from the beam coupling module 30 so that the entire laser module 10 is replaced instead of the LD bar 123.

[0048] Furthermore, the replacement of the LD bar 123 is usually performed at the installation site of the laser device 1, and the surrounding environment during replacement is not clean. A clean environment is defined as an environment where the density of impurities such as dust and dirt in the atmosphere is lower than a defined standard value. In Embodiment 1, as described above, the laser module 10 houses the LD package 12 including the LD bar 123, the first transmission optical system 13, etc., in a sealed box 11. The laser module 10 to be replaced and the new laser module 10 to be replaced are stored in a clean environment until they are replaced. This makes it possible to suppress dust and other particles from entering the inside of the box 11, and even in an unclean surrounding environment, the LD bar 123 is not affected by the surrounding environment.

[0049] Furthermore, the casing 11 of the laser module 10 houses an LD package 12 having an LD bar 123, and a first transmission optical system 13 having an FAC and SAC provided for each LD package 12. When assembling the laser module 10, the optical axis adjustment between the LD package 12 and the first transmission optical system 13 is completed. As a result, when replacing the laser module 10, on-site adjustment of the FAC and SAC is not required, and the laser module 10, including the LD bar 123, can be replaced in a shorter time than conventional methods.

[0050] Specifically, the laser module 10 is assembled in a clean environment where dust and other particles in the air are below a specified level. In this clean environment, with the lid of the box 11 open, the LD package 12, the first transmission optical system 13, and other components are installed inside the box 11, and then adjustments are made to the installation position and angle of each component. The adjustment process is carried out so that the desired laser characteristics are obtained when combined with the beam coupling module 30, and after the adjustment process, each component is fixed in place. In one example, the adjustment process is carried out by mounting the laser module 10 to be assembled onto a reference beam coupling module having the same configuration as the beam coupling module 30 shown in Figure 1, or by using a jig for laser beam adjustment.

[0051] When the laser module 10 is attached to the reference beam coupling module, the laser beam L1 is output from each LD bar 123 of the assembled laser module 10, and the optical axis adjustment is performed while observing the output and shape of the coupled beam L2 from the transmission fiber 70. The optical axis adjustment may be performed by rotating the LD package 12 around the reference axis 124 to adjust the angle at which the laser beam L1 is emitted from the LD bar 123, or it may be performed by adjusting the position of the first transmission optical system 13.

[0052] When using a jig for laser beam adjustment, the laser module 10 is placed in a designated position, and the optical axis is adjusted so that the laser beam L1 from each LD bar 123 is irradiated onto the laser beam adjustment jig, which is located at a position corresponding to the position of the wavelength dispersion element 33 of the beam coupling module 30. An example of a laser beam adjustment jig is a camera, hole, etc., located at a designated position.

[0053] After the optical axis adjustment is performed, the laser module 10 and the first transmission optical system 13 are fixed in place, and the lid of the box 11 is closed and sealed so that the inside is sealed. In other words, all LD packages 12 and the corresponding first transmission optical system 13 are optically adjusted so that when the laser module 10 is joined to the beam coupling module 30, the laser beam L1 is irradiated onto the wavelength dispersion element 33 of the beam coupling module 30. The assembled laser module 10 is stored in a clean environment until the replacement process is required. Then, this laser module 10 is transported to the location where the laser device 1 whose LD bar 123 has reached the end of its lifespan is installed, and the replacement process is performed on-site.

[0054] When replacing the laser module 10, the wiring 61 connected to the power supply unit 14 and the piping 75 connected to the manifold 16 of the laser module 10 to be replaced are removed from the laser device 1, and then the laser module 10 is removed from the beam coupling module 30. Next, the new laser module 10 manufactured as described above is joined to the beam coupling module 30. At this time, the joining is performed by aligning the positioning member provided on the housing 31 of the beam coupling module 30 with the positioning member provided on the housing 11 of the laser module 10. This ensures that the laser module 10 is joined to the beam coupling module 30 in an accurate mechanical position relative to the beam coupling module 30. After joining the new laser module 10 to the beam coupling module 30, the wiring 61 is connected to the power supply unit 14 and the piping 75 is connected to the manifold 16.

[0055] The LD bar 123 and the first transmission optical system 13 within the laser module 10 are already optically aligned during assembly, so optical alignment is usually not performed after replacing the laser module 10. However, replacing the laser module 10 necessitates adjusting the input position of the wavelength-coupled beam L2 output from the beam coupling module 30 to the transmission fiber 70. For this reason, the laser module 10 outputs a laser beam L1, and the position of the fifth transmission optical system 52 or the transmission fiber 70 is adjusted while observing the output of the coupled beam L2 from the transmission fiber 70. Alternatively, the position of the fifth transmission optical system 52 or the transmission fiber 70 is adjusted while measuring a state other than the state of the coupled beam L2 emitted from the transmission fiber 70, for example, the state of scattered light at the incident end of the transmission fiber 70. Once this adjustment is complete, the laser module 10 replacement process is finished.

[0056] When assembling the beam coupling module 30, the optical components placed inside the box 31 are also adjusted in a clean environment to obtain the desired laser characteristics, similar to the case of the laser module 10, and are fixed in place after the adjustment is complete. The assembled beam coupling module 30 is stored in a clean environment until replacement is required.

[0057] Furthermore, the beam coupling module 30 and the fiber coupling module 50 can each be replaced individually. In this case as well, replacing the beam coupling module 30 or the fiber coupling module 50 requires adjustment of the input position of the coupled beam L2 output from the beam coupling module 30 to the transmission fiber 70. However, the beam coupling module 30 and the fiber coupling module 50 are optically and mechanically designed and pre-assembled to such an extent that adjustment of the optical components within each module 30 and 50 is not required during replacement.

[0058] Furthermore, Figure 1 only shows the main components of the laser device 1 of Embodiment 1, and does not show components that are not directly related to the configuration of Embodiment 1. However, the laser module 10, beam coupling module 30, and fiber coupling module 50 are equipped not only with optical interfaces but also with electrical and cooling water interfaces. In one example, although not shown, each module 10, 30, and 50 is also equipped with cooling system piping necessary for cooling, electrical wiring for sensors, etc.

[0059] Furthermore, as described above, the beam coupling module 30 may not only have one laser module 10 bonded to it, but may also have two or more laser modules 10 bonded to it.

[0060] In the above description, windows 112, 311, 312, and 511 were provided at the transmission points of the laser beam L1 in the respective enclosures 11, 31, and 51 of the laser module 10, beam coupling module 30, and fiber coupling module 50. However, the windows 112 and 311 provided between the laser module 10 and the beam coupling module 30 may be shared by the two enclosures 11 and 31 to form a single window, or the windows 312 and 511 provided between the beam coupling module 30 and the fiber coupling module 50 may be shared by the two enclosures 31 and 51 to form a single window.

[0061] The laser device 1 according to Embodiment 1 includes a laser module 10 having an LD bar 123 and a plurality of LD packages 12 fixed to a mounting base 111 via a reference axis 124, and a first transmission optical system 13 provided for each LD package 12, with the LD packages 12 and the first transmission optical system 13 sealed and housed inside a box 11; a beam coupling module 30 that couples a plurality of laser beams L1 from the laser module 10 into a single coupled beam L2; and a fiber coupling module 50 that inputs the coupled beam L2 from the beam coupling module 30 into a transmission fiber 70. Each module 10, 30, and 50 is detachable, and each optical component is pre-assembled in a clean environment so that desired laser characteristics can be obtained when each module 10, 30, and 50 is combined, and furthermore, the boxes 11, 31, and 51 that house the optical components are sealed inside. Therefore, even if the surrounding environment in which the laser device 1 is installed is poor, the laser module 10, beam coupling module 30, and fiber coupling module 50 can be replaced without introducing dust or other debris into the laser beam path within the laser module 10. As a result, deterioration due to contamination of optical components is suppressed, and a highly reliable laser device 1 can be obtained for a long period of time.

[0062] Furthermore, the laser module 10 has its LD bar 123 and first transmission optical system 13 pre-adjusted and fixed in a clean environment so that the desired laser characteristics can be obtained when combined with the beam coupling module 30. Therefore, although it would normally be necessary to bring measuring instruments such as a beam profiler to the site where the laser device 1 is installed to adjust the optical components constituting the LD bar 123 and the first transmission optical system 13, in Embodiment 1, the laser module 10 can be replaced without bringing in measuring instruments. In addition, since the entire laser module 10 is replaced rather than each individual LD ​​bar 123, multiple LD bars 123 can be replaced in a short amount of time.

[0063] The beam coupling module 30 uses a WBC (Wave-Block Correction) method to combine multiple laser beams L1 from the laser module 10 into a single combined beam L2 for output. In other words, the beam coupling module 30 has a wavelength-dispersing element 33 such as a diffraction grating, and irradiates the WBC with the laser beams L1 output from the multiple LD bars 123 (direct diode lasers: DDL) of the laser module 10 to create a single laser beam L1. In the WBC method, the beam quality output from the LD bars 123 directly affects the beam quality of the laser oscillator, i.e., the laser device 1. However, in the first embodiment, the optical axis adjustment between the LD package 12 and the first transmission optical system 13 is performed during the assembly of the laser module 10, so a high-quality laser beam L1 can be output immediately even after replacing the laser module 10. In short, by using a beam coupling module 30 with a wavelength-dispersing element 33, a laser device 1 with good beam quality is achieved. Furthermore, conventionally, when replacing the LD bar 123, it is necessary to adjust multiple LD bars 123 at the installation position of the laser device 1. However, in Embodiment 1, high-beam-quality laser light can be output without fine adjustment of the optical axis of the optical components within the laser module 10. Thus, Embodiment 1 has superior effects compared to conventional technology.

[0064] As described above, according to Embodiment 1, the laser module 10, which is equipped with multiple LD bars 123 that constitute a laser beam source with a limited lifespan, can be easily replaced for long-term use of the laser device 1. Furthermore, by performing the assembly and adjustment of the laser module 10 in a clean environment, the risk of damage to optical components due to dust can be reduced. In addition, by storing the laser module 10 in a clean state, the replacement of the laser module 10 can be carried out without introducing dust or other contaminants, regardless of the installation environment of the laser device 1. As a result, the quality of the laser device 1 can be improved.

[0065] Furthermore, the beam coupling module 30 also has a structure in which optical components, including the wavelength dispersion element 33 and the partial reflector 35, are sealed inside the box-shaped body 31. This prevents dust and other particles from entering the beam coupling module 30 when the laser module 10, which has a limited lifespan, is replaced. As a result, the lifespan of the laser device 1 can be extended.

[0066] Embodiment 2. Figure 2 is a schematic diagram showing an example of the configuration of a laser device according to Embodiment 2. Components identical to those in Figure 1 are denoted by the same reference numerals, and their descriptions are omitted; only the differing parts are described. The laser device 1A according to Embodiment 2 further includes a clean air circulation device 80 that circulates purified air (clean air) inside the laser module 10, beam coupling module 30, and fiber coupling module 50, as well as air piping 95.

[0067] The clean air circulation device 80 includes a filter 81 and a circulation pump 82. The filter 81 includes a particle filter that can remove impurities, which are particles in the air, and an organic filter such as a desiccant or activated carbon that dehumidifies the air. Particles in the air include dust, dirt, and other particles in addition to impurities. An example of the circulation pump 82 is a blower. In other words, the clean air circulation device 80 is a device that circulates air that has had impurities removed and has been dehumidified between the laser module 10, the beam coupling module 30, and the fiber coupling module 50.

[0068] The air piping 95 is a pipe that serves as a flow path for air. The air piping 95 connects the clean air circulation device 80 to the housing 11 of the laser module 10, and to the clean air circulation device 80 to the housing 51 of the fiber coupling module 50. An example of the air piping 95 is a hose.

[0069] In the example shown in Figure 2, the laser module 10, beam coupling module 30, fiber coupling module 50, and clean air circulation device 80 are connected in series, and a configuration is shown in which air circulates sequentially.

[0070] The housing 11 of the laser module 10 has an opening 113 on the side to which the air piping 95 is connected, and an opening 114 on the side to which it is connected to the housing 31 of the beam coupling module 30. The housing 31 of the beam coupling module 30 has an opening 313 on the side to which it is connected to the housing 11 of the laser module 10, and an opening 314 on the side to which it is connected to the fiber coupling module 50. The housing 51 of the fiber coupling module 50 has an opening 512 on the side to which it is connected to the housing 31 of the beam coupling module 30, and an opening 513 on the side to which the air piping 95 is connected.

[0071] The opening 114 of the housing 11 of the laser module 10 is connected to the opening 313 of the housing 31 of the beam coupling module 30. The opening 314 of the housing 31 of the beam coupling module 30 is connected to the opening 512 of the housing 51 of the fiber coupling module 50. In one example, each of the openings 113, 114, 313, 314, 512, and 513 is composed of a joint.

[0072] When moving modules 10, 30, and 50 for replacement, the openings can be sealed with caps to keep the interiors airtight even when the modules are moved. To replace modules 10, 30, and 50, simply remove the caps from the openings and connect the openings together. If the openings are fittings, connect the fittings together.

[0073] Figure 2 shows an example in which the clean air circulation device 80 and each module 10, 30, and 50 are connected in series, but the clean air circulation device 80 and each module 10, 30, and 50 may be connected in parallel. Figure 3 is a schematic diagram showing another example of the configuration of the laser device according to Embodiment 2. The same reference numerals are used for components that are the same as those in Figures 1 and 2, and their descriptions are omitted, while the different parts are described. The laser device 1B shown in Figure 3 further includes a buffer device 90. The buffer device 90 is located between the clean air circulation device 80 and each module 10, 30, and 50, and has an internal flow path that branches the air from the clean air circulation device 80 to send to each module 10, 30, and 50, and merges the air from each module 10, 30, and 50 back to the clean air circulation device 80. In other words, the buffer device 90 has an outlet 91 for sending out air and an inlet 92 for air to flow in.

[0074] In Figure 3, the housing 11 of the laser module 10 has two openings 113 and 115 to which the air piping 95 is connected. The housing 31 of the beam coupling module 30 has two openings 315 and 316 to which the air piping 95 is connected. The housing 51 of the fiber coupling module 50 has two openings 513 and 514 to which the air piping 95 is connected. Each of the openings 113, 315, and 514 is connected to the outlet 91 of the buffer device 90, and each of the openings 115, 316, and 513 is connected to the inlet 92 of the buffer device 90. In addition, the clean air circulation device 80 and the buffer device 90 are connected by air piping 96.

[0075] In addition to the configurations shown in Figures 2 and 3, a combination of the series connection in Figure 2 and the parallel connection in Figure 3 may also be used.

[0076] In these laser devices 1A and 1B, clean, dry air, from which particles have been removed after passing through the filter 81 in the clean air circulation device 80, is discharged to each module 10, 30, and 50 by the circulation pump 82, and the air is circulated along the path shown in Figure 2 or Figure 3. The air that returns to the clean air circulation device 80 is then filtered again by the filter 81 to remove impurities such as dust and water vapor suspended in the air, becoming clean, dry air, and is then discharged again to each module 10, 30, and 50.

[0077] In the laser devices 1A and 1B of Embodiment 2, each module 10, 30, and 50 is connected to the clean air circulation device 80 via air pipes 95 and 96, and air is circulated between each module 10, 30, and 50 and the clean air circulation device 80. This makes it possible for the clean air circulation device 80 to remove impurities caused by outgassing from components used in the laser module 10, beam coupling module 30, and fiber coupling module 50. As a result, deterioration due to contamination of optical components is further suppressed, and a long-lasting and highly reliable laser device 1A or 1B can be obtained.

[0078] Embodiment 3. Embodiment 3 describes a laser processing machine equipped with laser devices 1, 1A, and 1B according to Embodiments 1 and 2. Figure 4 is a schematic diagram showing an example of the configuration of the laser processing machine according to Embodiment 3. The laser processing machine 200 processes the workpiece 208 by irradiating the workpiece 208 with a coupled beam L2. In Embodiment 3, the same reference numerals are used for components that are the same as in Embodiments 1 or 2, and their descriptions are omitted. The description will mainly focus on configurations that differ from Embodiments 1 or 2.

[0079] The laser processing machine 200 comprises a laser device 1 described in Embodiment 1 that emits a coupled beam L2, a transmission fiber 70 that transmits the coupled beam L2 output from the laser device 1, and a processing unit 201 that processes the workpiece 208 with the coupled beam L2. Note that the laser device 1 may be the laser devices 1A and 1B described in Embodiment 2. The transmission fiber 70 is connected between the laser device 1 and the processing unit 201 and transmits the coupled beam L2 output from the laser device 1. The processing unit 201 has a processing head 202 that emits the coupled beam L2 toward the workpiece 208, and a stage 203 that supports the workpiece 208. The beam adjustment optical system 204, mirror 205, and focusing lens 206 are provided inside the processing head 202. The laser processing machine 200 moves the coupled beam L2 and the workpiece 208 relative to each other and irradiates the workpiece 208 with the coupled beam L2. In one example, by irradiating the workpiece 208 with a combined beam L2, a fine machining hole 209 is formed at a specified location within the workpiece 208.

[0080] The workpiece 208 is, in one example, an electronic substrate such as a flexible substrate or a multilayer substrate. These substrates are composed of resin and copper foil. The wavelength of the coupled beam L2 is preferably a wavelength in the ultraviolet region that can be absorbed by the resin and copper, respectively. Note that the workpiece 208 is not limited to an electronic substrate, but can be anything that can be processed using the coupled beam L2. The processed hole 209 is, in one example, a blind hole or a through hole. The multiple processed holes 209 formed in the workpiece 208 may include processed holes 209 of different sizes. The laser processing machine 200 is not limited to forming processed holes 209, but may also perform processing such as marking.

[0081] The beam adjustment optical system 204 adjusts the beam diameter and beam profile of the coupled beam L2 emitted from the laser device 1 to a preset desired beam diameter and beam profile. The coupled beam L2, with its adjusted beam diameter and beam profile, is guided towards the focusing lens 206 by reflection from the mirror 205. The processing head 202 focuses the coupled beam L2 onto the workpiece 208 using the focusing lens 206.

[0082] The laser processing machine 200 moves the stage 203 in the X and Y directions, which are perpendicular to the centerline of the combined beam L2. The X and Y directions are perpendicular to each other. The white arrows shown in Figure 4 indicate the direction in which the stage 203 moves. The laser processing machine 200 shown in Figure 4 moves the combined beam L2 and the workpiece 208 relative to the processing head 202 by moving the stage 203.

[0083] The laser processing machine 200 may also move the coupled beam L2 and the workpiece 208 relative to each other without moving the stage 203. Alternatively, the laser processing machine 200 may fix the position of the stage 203 and control the incident position of the coupled beam L2 on the workpiece 208. In this case, a deflection means such as a galvanometer mirror or a polygon mirror may be used to change the incident position of the coupled beam L2. In this case, an Fθ lens may be used for the focusing lens 206.

[0084] According to Embodiment 3, the laser module 10, which is equipped with multiple LD bars 123 that constitute a laser beam source with a limited lifespan, can be easily replaced when using the laser devices 1, 1A, and 1B for a long period of time. Furthermore, by performing the assembly and adjustment of the laser module 10 in a clean environment, the risk of damage to optical components due to dust can be reduced. In addition, by storing the laser module 10 in a clean state, the replacement of the laser module 10 can be performed without introducing dust or other contaminants, regardless of the installation environment of the laser devices 1, 1A, and 1B. This makes it possible to improve the product quality of the laser processing machine 200 using such laser devices 1, 1A, and 1B.

[0085] The configurations shown in the above embodiments are examples only, and it is possible to combine them with other known technologies, combine different embodiments, and omit or modify parts of the configuration without departing from the gist of the invention. [Explanation of Symbols]

[0086] 1,1A,1B Laser device, 10 Laser module, 11,31,51 Enclosure, 12,12-1,12-2,···,12-n LD package, 13,13-1,13-2,···,13-n First transmission optical system, 14 Power supply unit, 15,61 Wiring, 16 Manifold, 17,75 Piping, 21,41 Contact surface, 30 Beam coupling module, 32 Second transmission optical system, 33 Wavelength dispersive element, 34 Third transmission optical system, 35 Partial reflector, 36 Fourth transmission optical system, 50 Fiber coupling module, 52 Fifth transmission optical system, 53 Fiber junction, 60 LD drive power supply, 70 Transmission fiber, 80 Clean air circulation device, 81 Filter, 82 Circulation pump, 90 Buffer device, 91 Outlet, 92 Inlet, 95,96 Air piping, 111 Mounting base, 112, 311, 312, 511 Window, 113, 114, 115, 313, 314, 315, 316, 512, 513, 514 Opening, 121 Adjustment member, 122 Heat sink, 122a, 162, 163 Pipe connection part, 123 LD bar, 124 Reference axis, 141, 161 Sealing member, 200 Laser processing machine, 201 Processing part, 202 Processing head, 203 Stage, 204 Beam adjustment optical system, 205 Mirror, 206 Focusing lens, 208 Workpiece, 209 Processing hole, L1 Laser beam, L2 Combined beam.

Claims

1. A laser device comprising: a laser module that outputs a plurality of laser beams; and a beam combining module that combines the plurality of laser beams into a combined beam that is a laser beam having a same optical axis, The laser module includes: A plurality of laser beam sources outputting the laser beams; a plurality of first transmission optical systems provided corresponding to the plurality of laser beam sources, each of which shapes the laser beam output from each of the plurality of laser beam sources into a parallel beam or a beam close to a parallel beam; a first box containing the plurality of laser beam sources and the plurality of first transmission optical systems, the first box having a window through which the laser beams output from the plurality of laser beam sources pass, and the first box is sealed inside; having Each of the plurality of laser beam sources comprises: a laser diode bar for outputting the laser beam; an adjustment member for fixing the laser diode bar; a reference axis for fixing the adjustment member on an installation stand provided inside the first box body and for allowing the adjustment member to rotate within an installation surface of the installation stand around an emission end of the laser diode bar; having each of the plurality of laser beam sources is oriented on the installation table so as to output the laser beam in a predetermined direction; Each of the plurality of first transmission optical systems includes a first optical component for collimating a fast axis component of the laser beam emitted from the corresponding laser beam source; A second optical component that collimates a slow axis component of the laser beam; and having the plurality of first transmission optical systems are fixed to the installation stand at a predetermined distance from an emission end face of the laser diode bar; The first box is detachable from the beam combining module, A laser device comprising: a positioning member provided on at least one of the first box and the beam combining module for positioning the first box with respect to the beam combining module.

2. The beam combining module includes: a wavelength dispersion element for converting the plurality of laser beams output from the laser module into the combined beam; a partially reflecting mirror that transmits a portion of the combined beam; a second box containing the wavelength dispersion element and the partial reflector, the second box having a sealed interior and a window at each of an input position of the laser beam from the laser module and an output position of the combined beam; 2. The laser device according to claim 1, further comprising:

3. 2. The laser apparatus according to claim 1, further comprising a clean air circulation device for removing impurities and circulating dehumidified air between the laser module and the beam combining module.

4. A laser device according to any one of claims 1 to 3; a processing unit that processes a workpiece by the combined beam; A laser processing machine comprising:

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