Production method for hydrogel structure, method for producing optical composite device, intermediate for hydrogel structure, and optical diffraction element

Abstract

In order to improve the positional accuracy of a contracted hydrogel on the surface of a substrate, a production method (M10) for a hydrogel structure comprises a contraction step (S14) for causing a swollen hydrogel to contract on the surface of a substrate. In the contraction step (S14), a partial region of the swollen hydrogel is joined to the surface.

Description

Method for manufacturing hydrogel structure, method for manufacturing optical composite device, intermediate product of hydrogel structure, and optical diffraction element

[0001] The present invention relates to a method for producing a hydrogel structure. The present invention also relates to a method for producing an optical composite device including the method for producing the hydrogel structure. The present invention also relates to an intermediate of the hydrogel structure and an optical diffraction element.

[0002] Patent Document 1 describes a technique for improving the resolution of the refractive index spatial distribution pattern by dehydrating and shrinking a swollen hydrogel that has been patterned to have a refractive index spatial distribution, compared to the resolution at the time of patterning. Patent Document 1 calls this technique Implosion Fabrication (ImpFab).

[0003] U.S. Pat. No. 1,214,661

[0004] In ImpFab, in the process of contracting the swollen hydrogel, the hydrogel is dehydrated while placed on the surface of a substrate (hereinafter referred to as the first substrate). During this process, the position of the hydrogel moves irregularly due to the uneven distribution of unintended interactions with the surface of the substrate. This means that when multiple hydrogel structures are manufactured, the position of the contracted hydrogel on the surface of the first substrate varies irregularly among the hydrogel structures, often shifting from the target position intended during design. As described above, it is difficult to improve the positional accuracy of the contracted hydrogel on the surface of the first substrate.

[0005] The dehydrated and shrunk hydrogel can modulate the spatial distribution of the phase of the transmitted signal light according to the spatial distribution of the refractive index. Therefore, when viewed along the direction of transmission of the signal light, the shrunk hydrogel functions as an optical computing device by (1) placing a light source that generates the signal light before the incident surface and (2) placing a photodetector that detects the signal light after the exit surface. The light source and the photodetector are examples of optical devices.

[0006] The light source is formed on the surface of a substrate (hereinafter referred to as the second substrate) different from the substrate on which the hydrogel is placed, and the photodetector is formed on the surface of a substrate (hereinafter referred to as the third substrate) different from the substrate on which the hydrogel is placed. The alignment of the stacked first substrate, second substrate, and third substrate is adjusted so that the optical axis of the light source, the optical axis of the hydrogel, and the optical axis of the photodetector are aligned, and the positions of the first substrate, second substrate, and third substrate are fixed, thereby making it possible to manufacture an optical computing device.

[0007] If the position of the hydrogel on the surface of the first substrate varies irregularly from a predetermined position, it becomes very difficult to adjust the alignment of the stacked first, second, and third substrates. Here, it is conceivable that multiple light sources, multiple contracted hydrogels, and multiple photodetectors are formed on each of the first, second, and third substrates. In this case, if the positions of the multiple contracted hydrogels vary irregularly, it becomes impossible to adjust the alignment of the stacked first, second, and third substrates.

[0008] One aspect of the present invention has been made in consideration of the above-mentioned problems, and its purpose is to improve the positional accuracy of a contracted hydrogel on a surface of a substrate when contracting a swollen hydrogel on the surface.

[0009] In order to solve the above problems, a method for manufacturing a hydrogel structure according to one aspect of the present invention includes a contraction step of contracting a swollen hydrogel on a surface of a substrate, and is characterized in that, during the contraction step, a partial region of the swollen hydrogel is bonded to the surface.

[0010] In order to solve the above-mentioned problems, a manufacturing method for an optical composite device according to one aspect of the present invention is a manufacturing method for an optical composite device comprising the manufacturing method for a hydrogel structure according to the above-mentioned aspect of the present invention and post-processing performed after the manufacturing method, wherein the substrate and the surface are referred to as a first substrate and a first surface, respectively, an optical device is placed on the second surface of the second substrate, and the position of the optical axis of the hydrogel shrunk by the shrinking process on the first surface corresponds to the position of the optical axis of the optical device on the second surface, and the post-processing includes a lamination process of stacking the first substrate and the second substrate, an alignment process of adjusting the alignment of the first substrate and the second substrate so that the optical axes of the hydrogel and the optical device coincide, and a bonding process of bonding the first substrate and the second substrate in a state where the optical axes of the hydrogel and the optical device coincide.

[0011] In order to solve the above problems, an intermediate of a hydrogel structure according to one embodiment of the present invention is an intermediate of a hydrogel structure comprising a substrate, a swollen hydrogel, and a sealing member that seals the substrate and the hydrogel together with water, and a configuration is adopted in which a portion of the swollen hydrogel is bonded to the surface of the substrate.

[0012] In order to solve the above problems, the optical diffraction element according to the first aspect of the present invention is an optical diffraction element comprising a substrate and a contracted hydrogel having an optically effective area in which at least one of the absorbance and the phase modulation amount has a spatial distribution, and a portion of the hydrogel is bonded to the surface of the substrate.

[0013] According to one aspect of the present invention, when a swollen hydrogel is contracted on the surface of a substrate, the positional accuracy of the contracted hydrogel on the surface can be improved.

[0014] FIG. 1 is a flowchart of a method for manufacturing an optical composite device according to a first embodiment of the present invention. FIG. 2 is a flowchart of a pre-treatment process included in the method for manufacturing the optical composite device shown in FIG. 1. FIG. 3 is a flowchart of a post-treatment process included in the method for manufacturing the optical composite device shown in FIG. 1. FIG. 4 is a perspective view and a plan view of a substrate at the start of the method for manufacturing the optical composite device shown in FIG. 1. FIG. 5 is a plan view of the substrate in each step included in the method for manufacturing the optical composite device shown in FIG. 1. FIG. 6 is a plan view of a hydrogel structure, a light source, and a photodetector included in an optical composite device according to one embodiment of the present invention. FIG. 7 is a side view of each substrate in each step included in the post-treatment process of the method for manufacturing the optical composite device shown in FIG. 1. FIG. 8 is a plan view and a cross-sectional view of an intermediate of a hydrogel structure according to a second embodiment of the present invention.

[0015] [Embodiment 1] <Method for manufacturing optical composite device> A method for manufacturing an optical composite device M10 according to embodiment 1 of the present invention will be described with reference to Figures 1 to 7. Note that, hereinafter, the method for manufacturing an optical composite device M10 will also be simply referred to as manufacturing method M10.

[0016] FIG. 1 is a flowchart of manufacturing method M10. FIG. 2 is a flowchart of pre-processing step S13 included in manufacturing method M10. FIG. 3 is a flowchart of post-processing step S15 included in manufacturing method M10. FIG. 4 is a perspective view (left) and a plan view (right) of a substrate 11 at the start of manufacturing method M10. FIG. 5 is a plan view of the substrate 11 in each step included in manufacturing method M10. FIG. 6 is a plan view of the hydrogel structure 10, light source module 20, and light detection module 30 included in an optical composite device 1 according to one embodiment of the present invention. FIG. 7 is a side view of each substrate in each step included in post-processing step S15 of manufacturing method M10.

[0017] 4, the normal direction to the main surfaces 111 and 112 of the substrate 11 is defined as the z-axis direction, and among the in-plane directions of the main surfaces 111 and 112, directions parallel to each side of the frame 12 are defined as the x-axis direction and the y-axis direction, respectively. The direction from the main surface 112 toward the main surface 111 is defined as the z-axis positive direction, and the x-axis positive direction and the y-axis positive direction are defined so as to form a left-handed Cartesian coordinate system together with the z-axis positive direction. This method of defining the Cartesian coordinate system is also common to the Cartesian coordinate systems shown in FIGS. 5 to 8.

[0018] 1 , manufacturing method M10 includes a method M11 for manufacturing a hydrogel structure and a post-treatment step S15. Hereinafter, manufacturing method M11 for manufacturing a hydrogel structure will also be referred to simply as manufacturing method M11. Manufacturing method M11 includes a substrate treatment step S11, a hydrogel formation step S12, a pre-treatment step S13, and a contraction step S14.

[0019] As shown in FIG. 2, the pretreatment step S13 includes a pigment dispersion step S131, a patterning step S132, a cleaning step S133, and a deposition step S134.

[0020] As shown in FIG. 3, the post-processing step S15 includes a laminating step S151, an alignment step S152, and a bonding step S153.

[0021] (Substrate) Fig. 4 shows the substrate 11 at the start of manufacturing method M10. Fig. 4 schematically shows the substrate 11 and the frame body 12 formed on the main surface 111 of the substrate 11. Therefore, the ratios of the dimensions of the substrate 11 and the frame body 12 in Fig. 4 do not necessarily match the ratios of the dimensions in the actual products.

[0022] As shown in Fig. 4, the substrate 11 is a plate-like member having a pair of main surfaces 111 and 112 that are parallel to each other. The shape of the substrate 11 is square when the main surface 111 is viewed in a plan view from the positive direction of the z-axis. The shape of the substrate 11 is not limited to a square, and may be a quadrangle such as a rectangle, or may be circular like a wafer. In the following, when referring to a plan view, it means the case where the main surface 111 is viewed in a plan view from the positive direction of the z-axis.

[0023] The material constituting the substrate 11 is not limited, but is preferably a material that transmits the wavelength of light used as signal light in the hydrogel structure 10 manufactured by manufacturing method M10 and the optical composite device 1 including the hydrogel structure 10. Examples of materials constituting the substrate 11 include glass materials such as quartz and semiconductor materials such as silicon. In this embodiment, silicon is used as the material for the substrate 11.

[0024] An annular frame body 12 is formed on the main surface 111. The shape of the outer edge of the frame body 12 is square in a plan view. Furthermore, the width of each of the four sides constituting the frame body 12 is uniform. Therefore, the shape of the recess 121 formed inside the frame body 12 is also square in a plan view. Note that the shape of the outer edge of the frame body 12 and the recess 121 when viewed in a plan view is not limited to a square, and may be a quadrangle such as a rectangle, a polygon other than a quadrangle, or a shape without corners such as a circle or an ellipse.

[0025] In this embodiment, resin is used as the material for forming the frame body 12. However, the material for the frame body 12 is not limited to this and may be a metal, an oxide, or the same hydrogel as the hydrogel that forms the hydrogel structure. Furthermore, in this embodiment, a photolithography method is used to pattern the frame body 12 after forming a resin film, but the method is not limited to this and a 3D printing method may also be used.

[0026] In this embodiment, the length of each side of the square that forms the inner edge of the frame 12 is 10 mm. However, the length of each side is not limited to this and can be appropriately designed depending on the purpose of the hydrogel structure, etc. The length of each side can be, for example, 1 mm or more and 100 mm or less.

[0027] In this embodiment, the height of the frame 12 is 1 mm. However, the height is not limited to this and can be appropriately designed depending on the content of the hydrogel formation step S12 described below. The height can be 50 μm or more and 5 mm or less.

[0028] Furthermore, alignment marks 113 are formed at the four corners of the main surface 111. In this embodiment, the shape of the alignment marks 113 is cross-shaped, but this shape is not limited thereto. In this embodiment, the alignment marks 113 are made of a thin metal film. However, the material is not limited thereto, and may be, for example, a resin such as a photoresist.

[0029] (Method for Manufacturing Hydrogel Structure) As described above, the method for manufacturing a hydrogel structure M11 includes a substrate treatment step S11, a hydrogel formation step S12, a pretreatment step S13, and a contraction step S14 (see FIG. 1). The manufacturing method M11 is one aspect of the present invention.

[0030] The substrate processing step S11 is performed before the contraction step S14. The substrate processing step S11 is a step of subjecting a partial region 114 of the main surface 111 of the substrate 11 to a hydrophilic treatment. In this embodiment, as shown in FIG. 5 , the partial region 114 is a region near one of the four vertices of the recess 121, which is square in plan view (the vertex having the smallest x- and y-coordinates). By performing the substrate processing step S11, the force generated between the partial region 114 and a partial region 131 of the swollen hydrogel 13, which will be described later, can be made greater than the force generated between the main surface 111 other than the partial region 114 and the region of the swollen hydrogel 13 other than the partial region 131.

[0031] In one aspect of manufacturing method M10, a sliding treatment may be performed in addition to substrate treatment step S11. The sliding treatment is a treatment that reduces the force generated between main surface 111 and swollen hydrogel 13 in an area of ​​main surface 111 included in recess 121 other than partial area 114. In other words, it is a treatment that improves sliding at the interface between main surface 111 and swollen hydrogel 13. Examples of the sliding treatment include hydrophobic treatment and water-repellent treatment. A specific example of the water-repellent treatment is film formation or coating with a fluorine-based resin.

[0032] In this embodiment, the partial region 114 has a square shape and each side has a length of 200 μm. However, the shape and dimensions of the partial region 114 are not limited to these and can be determined as appropriate.

[0033] In the substrate processing step S11, a photoresist film is formed as a mask on the main surface 111 except for a partial region 114. This mask can be formed appropriately using a microfabrication method such as photolithography or electron beam lithography.

[0034] Specific examples of hydrophilic treatment include acid treatment, plasma treatment, ozone treatment, etc. When these hydrophilic treatments are performed on the partial region 114, oxygen is exposed in a dense state in the partial region 114. Therefore, the partial region 114 can bond or bond a hydrogel (described later) to the main surface 111 by utilizing the force of hydrophilic interaction or hydrogen bonding.

[0035] As a modification of the substrate treatment step S11, a chemical treatment may be performed on the partial region 114. Here, the chemical treatment refers to a treatment in which a compound that bonds the substrate 11 with a swollen hydrogel (described later) is applied to the ends of silicon that constitute the surface of the partial region 114.

[0036] Examples of compounds used in this chemical treatment include various compounds called silane coupling agents. Preferably, the silane coupling agent contains at least one of a functional group capable of interacting with the hydrogel and a functional group capable of forming a covalent bond with the hydrogel.

[0037] Examples of silane coupling agents include chlorosilanes, alkoxysilanes, tetraethyl orthosilicate (TEOS), 3-aminopropyltriethoxysilane (APTS), and vinyltrimethoxysilane. The amino group contained in APTS can interact with the hydrogel. The methylene group contained in vinyltrimethoxysilane can form a covalent bond with the hydrogel by cleaving the double bond.

[0038] The hydrogel formation step S12 is a step of forming a swollen hydrogel 13 at least inside the recesses 121 of the main surface 111 (see FIG. 5 ). In this embodiment, in the hydrogel formation step S12, the recesses 121 are filled with monomers serving as raw materials for the swollen hydrogel 13, and the monomers are polymerized to obtain the swollen hydrogel 13. Therefore, the swollen hydrogel 13 formed by the hydrogel formation step S12 of this embodiment has a square shape. Furthermore, the length of each side of the swollen hydrogel 13 is 10 mm. Meanwhile, the length of each side of the partial region 114 is 200 μm, as described above. Therefore, when the main surface 111 is viewed in plan, the area ratio of the partial region 114 to the entire swollen hydrogel 13 is 0.04%. However, this area ratio is not limited to 0.04% and can be determined as appropriate. It is preferable that this area ratio be 10% or less.

[0039] In a modified example of the hydrogel formation step S12, a small piece of shrunk hydrogel that has been preformed to a predetermined shape and dimensions can be placed in the recess 121, and water can be supplied to the small piece to swell it, thereby obtaining a swollen hydrogel 13. The predetermined shape and dimensions of the shrunk hydrogel can be determined appropriately based on the shrinkage rate (or expansion rate) of the hydrogel.

[0040] The partial region 114 has been subjected to a hydrophilic treatment or a chemical treatment in the substrate processing step S11. Therefore, since the swollen hydrogel 13 is formed inside the recess 121, the partial region 131 on the bottom surface of the hydrogel 13, which is in contact with the partial region 114, is bonded to the partial region 114. In this embodiment, a state in which some force acts between the partial region 114 and the partial region 131, making the partial region 131 and the partial region 114 less likely to shift in the in-plane direction of the main surface 111, is referred to as a bonded state. Examples of the force bonding the partial region 131 and the partial region 114 include a force due to hydrophilic interaction and a force due to a bond such as a hydrogen bond or a covalent bond. In the covalent bond, a functional group in the partial region 131 and a functional group in the partial region 114 may directly form a covalent bond, or a compound may be present between the partial region 131 and the partial region 114. In the latter case, the functional group of the partial region 131 and the functional group of the partial region 114 each form a covalent bond with the compound.

[0041] The material constituting the hydrogel 13 is not limited as long as it swells upon absorbing moisture and shrinks upon releasing moisture. Examples of materials constituting the hydrogel 13 include (meth)acrylates having a carboxylic acid unit in the side chain, (meth)acrylamides having an amide group in the side chain, (meth)acrylates having an amino group in the side chain, and PEGs having a polyethylene glycol chain in the side chain or main chain (hereinafter referred to as "acrylates, etc."). Suitable materials for the hydrogel 13 include polymers and copolymers of acrylates, etc. Examples of materials constituting the hydrogel 13 include materials described in Patent Document 1 (e.g., FIG. 1A) and materials described in International Publication WO 2022 / 176376 (e.g., FIG. 2).

[0042] As described above, by performing the substrate processing step S11 and the hydrogel formation step S12, the following advantages can be obtained. That is, the position of the partial region 131 in the swollen hydrogel 13 and the position of the partial region 114 included in the main surface 111 of the substrate 11, which corresponds to the partial region 131, can both be provided at predetermined positions. Note that the partial region 114 is an example of the position on the main surface 111 where the partial region 131 is bonded.

[0043] The pretreatment step S13 is a pretreatment performed before the shrinkage step S14. As described above, the pretreatment step S13 includes the dye dispersion step S131, the patterning step S132, the cleaning step S133, and the deposition step S134 (see FIG. 2).

[0044] The pigment dispersion step S131 is a step of dispersing a pigment inside the swollen hydrogel 13.

[0045] The patterning step S132 is a step of patterning the hydrogel 13 by irradiating the swollen hydrogel 13 with light to bond the dye to the swollen hydrogel 13. In this embodiment, the dye is bonded to the hydrogel 13 using two-photon absorption. By performing the patterning step S132, when the main surface 111 is viewed in plan, the hydrogel 13 is formed with regions in which the content of the bound dye has a spatial distribution and regions in which the dye is not bound. In this embodiment, the regions in which the content of the bound dye has a spatial distribution are formed inside the swollen hydrogel 13. However, a portion of the regions in which the content of the bound dye has a spatial distribution may be exposed on the surface of the swollen hydrogel 13.

[0046] The washing step S133 is a step of washing away the pigment that has been dispersed inside the hydrogel 13 swollen in the pigment dispersion step S131 and that has not been bound to the swollen hydrogel 13.

[0047] The deposition step S134 is a step of further modifying the dye bonded to the inside of the swollen hydrogel 13 with functional particles or molecules. Examples of such functional particles include fine metal particles (e.g., nanoparticles), fluorescent particles, proteins, and DNA. In this embodiment, gold nanoparticles are modified with the dye.

[0048] The deposition step S134 may further include a step of further growing the modified particles, a step of reacting the modified molecules with an additional compound, etc. In this embodiment, the particle size of the metal particles is increased by depositing silver on the surface of the above-mentioned gold nanoparticles.

[0049] The metal particles contained in the hydrogel 13 change the refractive index of the hydrogel 13. Therefore, when signal light is incident on the hydrogel 13 and passes through the hydrogel 13, the amount of phase modulation of the signal light can be increased. This amount of phase modulation depends on the amount of metal particles contained in the hydrogel 13. Therefore, it can be said that this amount of phase modulation depends on the amount of dye contained in the hydrogel 13, and further, it can be said that it depends on the amount of light irradiated onto each region of the hydrogel 13 in the patterning step S132.

[0050] The patterned region (irradiated region) in the patterning step S132, where the dye has a spatial distribution, becomes an optically effective region 132 having a spatial distribution of phase modulation amount by performing the deposition step S134. In this embodiment, the optically effective region 132 is provided inside the swollen hydrogel 13. However, a portion of the optically effective region 132 may be exposed on the surface of the swollen hydrogel 13. On the other hand, the unpatterned region (unirradiated region) in the patterning step S132, where the dye is not bonded, becomes an optically ineffective region 133 having a constant phase modulation amount. The optically ineffective region 133 can also be considered a region other than the optically effective region 132. In this way, when the main surface 111 is viewed in plan, the swollen hydrogel 13 has an optically effective region 132 having a spatial distribution of phase modulation amount and an optically ineffective region 133 having a constant phase modulation amount. 5 , in the present embodiment, when the main surface 111 is viewed in plan, the partial region 131 and the partial region 114 do not overlap with the optically effective region 132. However, the partial region 131 and the partial region 114 may overlap with the optically effective region 132.

[0051] In the patterning step S132 of this embodiment, patterning is performed (light is irradiated) so that the optically ineffective region 133 surrounds the optically effective region 132 when the main surface 111 is viewed in plan. Therefore, the optically ineffective region 133 in this embodiment is an annular region that surrounds the optically effective region 132 over the entire periphery thereof, as shown in the plan view of the pre-processing step S13 in FIG. 5 . In this way, the optically effective region 132 is located at the center of gravity P Ｃ The optically ineffective region 133 is provided in a region outside the optically effective region 132 and including the outer edge of the swollen hydrogel 13. In other words, when viewed in plan, the optically effective region 132 and the optically ineffective region 133 are provided in regions inside and outside the swollen hydrogel 13, respectively.

[0052] However, in one aspect of the patterning step S132, the optically ineffective region 133 may be patterned as in the following (1) or (2) when viewed in plan view. That is, (1) patterning that surrounds a portion of the optically effective region 132 rather than the entire periphery of the optically effective region 132, or (2) patterning that does not surround a portion of the optically effective region 132 but follows a portion of the outer edge of the optically effective region 132. Here, examples of the case (1) include the following cases (1a) and (1b). In case (1a), the optically effective region 132 is provided along all four of the four sides constituting the square-shaped swollen hydrogel 13, but the optically effective region 132 is an open annular region rather than a closed annular region. In case (1b), the optically effective region 132 is provided along three sides. An example of the case (2) is (2a) a case where the optically effective area 132 is provided along part or all of two of the four sides. In this manner, in one aspect of the patterning step S132, part of the outer edge of the optically effective area 132 may be exposed to the outer edge of the swollen hydrogel 13.

[0053] In addition, by appropriately selecting particles, molecules, etc. to modify the dye in the deposition step S134, it is possible to impart a spatial distribution of absorptance to the optically effective region 132. In this way, the optically effective region 132 is a region in which at least one of the absorptance and the phase modulation amount has a spatial distribution, and the optically ineffective region 133 is a region in which the absorptance and the phase modulation amount are constant.

[0054] 5 , the partial region 114 and the partial region 131 are included in the optically ineffective region 133. In one aspect of the present invention, the partial region 114 and the partial region 131 may be included in the optically effective region 132, but are preferably included in the optically ineffective region 133.

[0055] In the plan view of the pretreatment step S13 in FIG. 5, the center of gravity P Ｃ and the center of gravity P of the hydrogel 13 after contraction ＣThe target position P Ｔ and are shown as open circles. Ｃ is the intersection of two diagonals of the square-shaped swollen hydrogel 13. Ｔ is a position calculated based on the contraction rate of the hydrogel 13. In this embodiment, the contraction rate of the hydrogel 13 is set to 1 / 2. Therefore, the target position P Ｔ is the vertex at which the partial region 114 is provided (the vertex having the smallest x-coordinate and y-coordinate) among the four vertices of the recess 121, and the center of gravity P Ｃ It is located at the midpoint between

[0056] The contraction step S14 is a step of contracting the swollen hydrogel 13 in a state where the partial region 131 of the swollen hydrogel 13 is bonded to the partial region 114 of the main surface 111 (see the plan view of the contraction step S14 in FIG. 5). As described above, the contraction rate of the hydrogel 13 is 1 / 2, so the center of gravity P Ｃ is the target position P Ｔ Matches.

[0057] According to the contraction step S14, the position of the partial region 131 of the hydrogel 13 bonded to the partial region 114 of the main surface 111 does not move, and the other region of the hydrogel 13 not bonded to the main surface 111 moves according to the degree of contraction of the hydrogel 13. As a result, the center of gravity P Ｃ moves closer to the partial region 114 depending on the degree of contraction of the hydrogel. The manufacturer of the hydrogel structure 10 can determine the contraction rate of the hydrogel 13 in the contraction step S14 in advance, thereby determining the center of gravity P Ｃ Therefore, in comparison with the technique described in Patent Document 1, the manufacturing method M10 can predict the position of the center of gravity P of the hydrogel 13 after contraction. Ｃ , the target position P Ｔ can be approached.

[0058] In the technique described in Patent Document 1, the hydrogel is not bonded to the surface of the substrate, so the direction in which the hydrogel moves as it contracts cannot be predicted. Therefore, when many hydrogels are contracted, the center of gravity P Ｃ is the target position P Ｔ However, after contracting a large number of hydrogels, the center of gravity P Ｃ and target position P Ｔ When the relationship between the center of gravity P of the hydrogel 13 after contraction is statistically processed, the manufacturing method M10 has the following advantages over the technique described in Patent Document 1. Ｃ , the target position P Ｔ In other words, in the manufacturing method M10, the center of gravity P Ｃ , the target position P Ｔ can be reliably approached.

[0059] Furthermore, in the patterning step S132 of this embodiment, as described above, patterning is performed so that the optically ineffective region 133 surrounds the optically effective region 132 when the main surface 111 is viewed in a plan view. Therefore, as shown in the plan view of the contraction step S14 in FIG. 5 , even in the contracted hydrogel 13, when the main surface 111 is viewed in a plan view, the optically ineffective region 133 is an annular region that surrounds the optically effective region 132 over the entire periphery of the optically effective region 132. However, in one aspect of the patterning step S132, when patterning is performed so that the optically ineffective region 133 follows part of the outer edge of the optically effective region 132, part of the outer edge of the optically effective region 132 is exposed at the outer edge of the contracted hydrogel 13. That is, even in the contracted hydrogel 13, the optically ineffective region 133 is provided along only part of the outer edge of the optically effective region 132.

[0060] As described above, the hydrogel structure 10 is produced by carrying out the manufacturing method M11 (see the plan view of the contraction step S14 in FIG. 5 ). The post-treatment step S15 shown in FIG. 5 will be described later with reference to FIGS. 6 and 7 .

[0061] (Post-processing) The post-processing step S15 is a post-processing performed after the manufacturing method M11. As described above, the post-processing step S15 includes the lamination step S151, the alignment step S152, and the bonding step S153 (see FIGS. 3 and 7).

[0062] As shown in FIG. 6, in the post-treatment step S15, the hydrogel structure 10 manufactured by the manufacturing method M11, the light source module 20, and the light detection module 30 are used.

[0063] As described above, the hydrogel structure 10 is manufactured by the manufacturing method M11. The substrate 11 and the main surface 111 are examples of a first substrate and a first surface, respectively. As shown in the plan view of the hydrogel structure 10 in FIG. 6 , the optical axis A of the hydrogel 13 in the hydrogel structure 10 is １ is set at the center of the optically effective area 132 of the hydrogel 13. In this embodiment, since the optically effective area 132 is square, the optical axis A １ is located at the intersection of two diagonals of the optically effective area 132. １ The position of the center of gravity P Ｃ Although it is close to the position, it does not match.

[0064] The light source module 20 is a light source that irradiates signal light to be incident on the hydrogel 13 of the hydrogel structure 10. The light source module 20 includes a substrate 21 and a light-emitting device 23 (see the plan view of the light source module 20 in FIG. 6 ). The light-emitting device 23 is provided on one of a pair of main surfaces 211 of the substrate 21. The light-emitting device 23, which is an example of an optical device, may be a light-emitting diode, a laser diode, or a liquid crystal panel. The substrate 21 and the main surface 211 are examples of a second substrate and a second surface, respectively.

[0065] In this embodiment, the shape and dimensions of the substrate 21 are the same as those of the substrate 11. Furthermore, alignment marks 213 are formed at the four corners of the main surface 211. The shape of the alignment marks 213 is the same as that of the alignment marks 113. Furthermore, the position of each alignment mark 213 on the main surface 211 corresponds to the position of each alignment mark 113 on the main surface 111. Therefore, by overlapping the substrates 11 and 21 so that the corresponding alignment marks 113 and each alignment mark 213 coincide with each other in a planar view, it is possible to adjust the alignment between the substrates 11 and 21. Note that when adjusting such alignment, an existing aligner may be used.

[0066] 6, the light source module 20 may further include an optical system provided downstream of the light-emitting device 23. This optical system can be used to collimate the signal light emitted by the light-emitting device 23, for example.

[0067] As shown in the plan view of the light source module 20 in FIG. 6, the optical axis A of the light emitting device 23 in the light source module 20 ２ is the optical axis A of the hydrogel 13 １ Therefore, by adjusting the alignment between the substrate 11 and the substrate 21 using the alignment marks 113 and 213 as described above, the optical axis A in plan view can be adjusted. １ and optical axis A ２ It fits perfectly.

[0068] The light detection module 30 is a photodetector that detects signal light emitted by the light emitting device 23 of the light source module 20 and transmitted through the hydrogel 13 of the hydrogel structure 10. The light detection module 30 includes a substrate 31 and a light receiving device 33 (see the plan view of the light detection module 30 in FIG. 6 ). The light receiving device 33 is provided on one main surface 311 of a pair of main surfaces of the substrate 31. The light receiving device 33 is an example of an optical device. A specific example of the light receiving device 33 is a photodiode. The substrate 31 and the main surface 311 are examples of a second substrate and a second surface, respectively.

[0069] In this embodiment, the shape and dimensions of the substrate 31 are the same as those of the substrate 11. Furthermore, alignment marks 313 are formed at the four corners of the main surface 311. The shape of the alignment marks 313 is the same as the shape of the alignment marks 113. Furthermore, the position of each alignment mark 313 on the main surface 311 corresponds to the position of each alignment mark 113 on the main surface 111. Therefore, by overlapping the substrates 11 and 31 so that the corresponding alignment marks 113 and the corresponding alignment marks 313 coincide with each other in a plan view, it is possible to adjust the alignment between the substrates 31 and 11.

[0070] As shown in the plan view of the light detection module 30 in FIG. 6, the optical axis A of the light receiving device 33 in the light detection module 30 ３ is the optical axis A of the hydrogel 13 １ Therefore, by adjusting the alignment between the substrate 11 and the substrate 31 using the alignment mark 113 and the alignment mark 313 as described above, the optical axis A １ and optical axis A ３ It fits perfectly.

[0071] Using the hydrogel structure 10, the light source module 20, and the light detection module 30 configured in this manner, the steps of the post-processing step S15 are carried out as follows.

[0072] The lamination step S151 is a step of stacking the hydrogel structure 10, the light source module 20, and the light detection module 30. In other words, it is a step of stacking the substrate 11, which is an example of a first substrate, and the substrates 21 and 31, which are examples of a second substrate, in the order of substrate 21, substrate 11, and substrate 31 (see FIG. 7 ).

[0073] 7 does not illustrate the frame 12 of the hydrogel structure 10. Also, in FIG. 7 , the alignment mark 113 of the hydrogel structure 10, the alignment mark 213 of the light source module 20, and the alignment mark 313 of the light detection module 30 are not illustrated.

[0074] Although not shown in FIG. 7, spacers may be interposed between the substrate 21 and the substrate 11, and between the substrate 11 and the substrate 31 to define the distance between the substrates.

[0075] At this stage, the substrates have only been stacked, and the alignment between the substrates has not yet been adjusted. ２ , the optical axis A of the hydrogel 13 １ , and the optical axis A of the light receiving device 33 ３ 7 is a side view, the optical axes A in the y-axis direction are not aligned. １ , A ２ , A ３ However, the deviation of each optical axis A in the x-axis direction is also expressed. １ , A ２ , A ３ is off.

[0076] The alignment step S152 aligns each optical axis A １ , A ２ , A ３ This is a step of adjusting the alignment of the substrates 21, 11, and 31 so that the alignments coincide with each other. As a method for adjusting the alignment, any existing adjustment method can be used as appropriate.

[0077] The joining step S153 is for joining each optical axis A １ , A ２ , A ３This is a process of bonding the substrate 21 and the substrate 11, and bonding the substrate 11 and the substrate 31, with the substrates 21 and 11 aligned. In this embodiment, the substrates are bonded using a resin adhesive 41. However, the bonding means for bonding the substrates is not limited to the adhesive 41 and can be selected appropriately. In this embodiment, the adhesive 41 is filled in the upper region (the region on the positive y-axis side) and the lower region (the region on the negative y-axis side) of each substrate. However, the adhesive may be filled so as to surround all four sides of the hydrogel 13, the light-emitting device 23, and the light-receiving device 33, or may be filled so as to embed the hydrogel 13, the light-emitting device 23, and the light-receiving device 33 without leaving any gaps.

[0078] As described above, the optical composite device 1 is manufactured by carrying out the manufacturing method M10 including the manufacturing method M11 and the post-processing step S15.

[0079] <Application Example of Hydrogel Structure 10> As described above, an optically effective region 132 in which at least one of the absorbance and the phase modulation amount has a spatial distribution is formed in the swollen hydrogel 13 included in the hydrogel structure 10. The optically effective region 132 configured in this manner can be made to function in the same manner as the optical diffraction element illustrated in Figure 10 of International Publication WO2022 / 176555.

[0080] Furthermore, in the patterning step S132 included in the pretreatment step S13 of the manufacturing method M11, the swollen hydrogel 13 is patterned using two-photon absorption, so that a multi-stage optical diffraction element can be formed inside one hydrogel 13. Therefore, the hydrogel 13 functions not only as a single-stage optical diffraction element, but also as an optical computing device equipped with a multi-stage optical diffraction element.

[0081] Furthermore, the optical composite device 1 includes a light source module 20 and a light detection module 30 in addition to the hydrogel structure 10 containing the contracted hydrogel 13. Therefore, the optical composite device 1 is an optical calculation system in which a light source that inputs signal light to an optical calculation device and a photodetector that detects the signal light output from the optical calculation device are compactly integrated. Furthermore, in the optical composite device 1, the alignment of each substrate in the hydrogel structure 10, the light source module 20, and the light detection module 30 can be easily adjusted, so that each optical axis A in the optical calculation system can be easily adjusted. １ , A ２ , A ３ can be easily matched.

[0082] As described above, one aspect of the present invention also includes an optical diffraction element comprising a substrate 11 and a contracted hydrogel 13 having an optically effective area 132 in which at least one of the absorbance and the phase modulation amount has a spatial distribution, wherein a partial area 131 of the hydrogel 13 is bonded to a partial area 114 of the main surface 111 of the substrate 11.

[0083] [Embodiment 2] <Intermediate of Hydrogel Structure> An intermediate 5 according to embodiment 2 of the present invention and its modified intermediate 6 will be described with reference to Fig. 8. Fig. 8 is a plan view of the intermediate 5 and the intermediate 6. Fig. 8 also shows a cross-sectional view of the intermediate 5. This cross-sectional view is obtained by viewing a cross section taken along line A-A' shown in the plan view of the intermediate 5. Both the intermediate 5 and the intermediate 6 are intermediates for producing a hydrogel structure such as the hydrogel structure 10.

[0084] The intermediate 5 includes a hydrogel structure 50, a sealing member 54, and water 55. The hydrogel structure 50 includes a substrate 51, a frame 52, and a swollen hydrogel 53.

[0085] The substrate 51 corresponds to the substrate 11 of the hydrogel structure 10 described in the first embodiment. However, in this embodiment, a silicon wafer is used as the substrate 51. In the hydrogel structure 10, the substrate 11 is configured so that one swollen hydrogel 13 is placed on the main surface 111 (see FIG. 5 ). In contrast, in the hydrogel structure 50, the substrate 51 is configured so that multiple swollen hydrogels 53 can be placed on one main surface.

[0086] Furthermore, four alignment marks 513 are formed on the main surface of the substrate 51. The alignment marks 513 correspond to the alignment marks 113 formed on the main surface 111 of the substrate 11.

[0087] A frame 52 is formed on the main surface of the substrate 51 so as to avoid the area where the four alignment marks 513 are formed. The frame 52 is made of resin, like the frame 12. However, unlike the frame 12, the frame 52 is required to define the positions of multiple swollen hydrogels 53. Therefore, as shown in the plan view of the intermediate 5 in FIG. 5 , the frame 52 has 48 recesses formed in a grid pattern so that 48 swollen hydrogels 53 can be placed thereon. Therefore, unlike the ring-shaped frame 12, the shape of the frame 52 is a lattice pattern. These 48 recesses all have the same shape and dimensions and are formed periodically in both the x-axis direction and the y-axis direction.

[0088] A swollen hydrogel 53 similar to the swollen hydrogel 13 is placed in each recess. That is, the hydrogel structure 50 includes 48 swollen hydrogels 53. As described above, the 48 recesses of the frame 52 are periodically formed, and therefore the 48 swollen hydrogels 53 contained in these recesses are also periodically arranged. Note that a reference point used to determine whether each of the swollen hydrogels 53 is periodically arranged can be appropriately determined. Examples of the reference point include the center of gravity of each hydrogel 53, a predetermined one of the four vertices of each hydrogel 53 (e.g., the vertex with the smallest x- and y-coordinates), etc.

[0089] Furthermore, a partial region 514 corresponding to the partial region 114 is provided on the main surface of the substrate 51. Therefore, the partial region 531 of the swollen hydrogel 53 is bonded to the partial region 514. Therefore, even when the hydrogel structure 50 is stored in water 55, the swollen hydrogel 53 can be prevented from separating from the substrate 51 and breaking apart.

[0090] The sealing member 54 seals the substrate 51 and the plurality of swollen hydrogels 53 together with water 55. In this embodiment, the sealing member 54 is composed of two resin sheets. Each sheet is rectangular in plan view and formed into a bag shape by fusing the area along its outer edge. By sealing the hydrogel structure 50 with the sealing member 54 in this manner, the hydrogel structure 50 can be stored without the swollen hydrogels 53 shrinking due to dehydration.

[0091] Note that the sealing member 54 is not limited to the bag-like member shown in Fig. 8 as long as it can seal the hydrogel structure 50 and the sealing member 54. The sealing member 54 may be shaped like a wafer tray that accommodates wafers one by one, or like a wafer case that accommodates multiple wafers together, for example.

[0092] The hydrogel structure 50 contained inside the sealing member 54 may be in a state before the pretreatment step S13 shown in Figures 1 and 2 is performed, or in a state after the pretreatment step S13 is performed.

[0093] <Modification of Intermediate Body of Hydrogel Structure> In the above-described hydrogel structure 50, the frame body 52 was used to define the positions of the multiple swollen hydrogels 53. However, in intermediate body 6, which is a modification of intermediate body 5, the frame body 52 can be omitted. In this modification, a configuration in which the frame body 52 is omitted will be described.

[0094] The intermediate 6 includes a hydrogel structure 60, a sealing member 64, and water 65. The sealing member 64 and the water 65 correspond to the sealing member 54 and the water 55, respectively, and therefore will not be described here.

[0095] The hydrogel structure 60 includes a substrate 61 and a swollen hydrogel 63. The substrate 61 and the alignment marks 613 formed on the main surface of the substrate 61 correspond to the substrate 51 and the alignment marks 513 formed on the main surface of the substrate 51, respectively, and therefore, a description thereof will be omitted here.

[0096] In the hydrogel structure 60, no frame is formed on the main surface of the substrate 61. Therefore, in the hydrogel formation step S12, a solid film of swollen hydrogel is formed over the entire main surface of the substrate 61. Furthermore, since the substrate treatment step S11 is also performed in the manufacturing method M11 for producing the hydrogel structure 60, a partial region 614 corresponding to the partial region 114 is provided on the main surface of the substrate 61. Therefore, the partial region 631 of the swollen hydrogel solid film is bonded to the partial region 614.

[0097] In addition, in manufacturing method M11 for producing the hydrogel structure 60, after the hydrogel formation step S12, a cutting step is carried out in which the solid swollen hydrogel is cut into swollen hydrogel pieces 63 having a predetermined shape. As shown in the plan view of the intermediate 6 in Fig. 8, a plurality of swollen hydrogel pieces 63 are obtained by making lattice-shaped cut lines 62 in the solid swollen hydrogel. The number of swollen hydrogel pieces 63 in the hydrogel structure 60 is 48, the same as the number of swollen hydrogel pieces 53 in the hydrogel structure 50.

[0098] [Summary] The method for manufacturing a hydrogel structure according to the first aspect of the present invention includes a contraction step of contracting a swollen hydrogel on the surface of a substrate, and is characterized in that, during the contraction step, a partial region of the swollen hydrogel is bonded to the surface.

[0099] According to the above configuration, during the contraction process, the position of a portion of the hydrogel bonded to the surface of the substrate does not move, while the other portion of the hydrogel not bonded to the surface of the substrate moves according to the degree of contraction of the hydrogel. As a result, the position of the hydrogel (e.g., the position of the center of gravity) moves closer to the portion of the hydrogel according to the degree of contraction of the hydrogel. By knowing the contraction rate of the hydrogel in the contraction process in advance, manufacturers of hydrogel structures can predict the position of the center of gravity of the contracted hydrogel. Therefore, when contracting a swollen hydrogel on the surface of a substrate, this manufacturing method can improve the positional accuracy of the contracted hydrogel on the surface compared to the technique described in Patent Document 1.

[0100] Furthermore, in the method for producing a hydrogel structure according to the second aspect of the present invention, in addition to the configuration of the method for producing a hydrogel structure according to the first aspect described above, a configuration is adopted in which the position of the partial region in the swollen hydrogel and the position on the surface where the partial region is joined are each predetermined positions.

[0101] According to the above configuration, the position of the partial region in the swollen hydrogel and the position on the surface where the partial region is bonded are both predetermined positions, thereby reliably improving the positional accuracy of the contracted hydrogel on the surface.

[0102] Furthermore, in the method for manufacturing a hydrogel structure according to the third aspect of the present invention, in addition to the configuration of the method for manufacturing a hydrogel structure according to the first or second aspect described above, an optically effective region in which at least one of the absorbance and the phase modulation amount has a spatial distribution is provided inside the swollen hydrogel, and when the surface is viewed in a plane, the partial region does not overlap with the optically effective region.

[0103] In the process of hydrogel contraction, the partial region of the hydrogel bonded to the surface of the substrate is subject to more limited contraction than the other regions of the hydrogel. Therefore, if the partial region is included in an optically effective region in which at least one of the absorptance and the phase modulation amount has a spatial distribution, the spatial distribution will be distorted as the hydrogel contracts. With the above configuration, the partial region does not overlap with the optically effective region in a planar view, thereby reducing the distortion that may occur in the spatial distribution as described above.

[0104] Furthermore, in the method for manufacturing a hydrogel structure according to the fourth aspect of the present invention, in addition to the configuration of the method for manufacturing a hydrogel structure according to the third aspect described above, a configuration is adopted in which the optically ineffective region, which is a region other than the optically effective region, is a region that surrounds the optically effective region when the surface is viewed in a plane.

[0105] The degree of contraction of the swollen hydrogel in the contraction process described above may vary between regions close to the outer edge of the swollen hydrogel and regions far from the outer edge. In other words, if the optically effective region is arranged to be in contact with the outer edge, the optically effective region in the contracted hydrogel may be affected by the outer edge. According to the above configuration, the optically ineffective region surrounds the optically effective region, preventing the optically effective region from contacting the outer edge, thereby suppressing the influence of the outer edge that the optically effective region may receive.

[0106] Furthermore, when a hydrogel structure containing contracted hydrogel is used as an optical diffraction element, signal light is incident so as to intersect (e.g., orthogonally) with the surface. In this case, scattering is likely to occur at the outer edge of the contracted hydrogel (i.e., the interface between the contracted hydrogel and air). With the above configuration, the optically effective area can be spaced away from the outer edge, thereby reducing the incidence of scattered light scattered by the outer edge into the optically effective area.

[0107] In one aspect of the present invention, when the principal surface is viewed in plan, the optically ineffective region may be patterned in such a way that (1) it does not surround the optically effective region 132 over the entire periphery of the optically effective region, but rather surrounds only a portion of the optically effective region, or (2) it does not surround a portion of the optically effective region, but follows a portion of the outer edge of the optically effective region. In other words, a portion of the outer edge of the optically effective region may be exposed to the outer edge of the hydrogel. Even with such a configuration, some of the effects achieved when the optically ineffective region surrounds the entire periphery of the optically effective region can be achieved.

[0108] Furthermore, the method for producing a hydrogel structure according to the fifth aspect of the present invention further includes, in addition to the configuration of the method for producing a hydrogel structure according to any one of the first to fourth aspects described above, a substrate treatment step carried out before the contraction step, in which a region of the surface to which the partial region is to be joined is subjected to a hydrophilic treatment, and a hydrogel formation step in which a swollen hydrogel is formed on the surface.

[0109] According to the above configuration, a partial region of the swollen hydrogel can be bonded to the surface of the substrate by utilizing the force of hydrophilic interaction.

[0110] Furthermore, the method for producing a hydrogel structure according to the sixth aspect of the present invention further includes, in addition to the configuration of the method for producing a hydrogel structure according to any one of the first to fourth aspects described above, a substrate treatment step carried out before the contraction step, in which a region of the surface to which the partial region is to be joined is treated with a compound that bonds the substrate and the swollen hydrogel, and a hydrogel formation step in which a swollen hydrogel is formed on the surface.

[0111] According to the above configuration, a partial region of the swollen hydrogel can be bonded to the surface of the substrate by utilizing the bonding force mediated by the compound.

[0112] Furthermore, the method for producing a hydrogel structure according to a seventh aspect of the present invention further includes, in addition to the configuration of the method for producing a hydrogel structure according to any one of the first to sixth aspects described above, a pretreatment carried out before the pinning step, the pretreatment including a pigment dispersion step of dispersing a pigment inside the swollen hydrogel, a patterning step of irradiating the swollen hydrogel with light to bond the pigment to the swollen hydrogel, and a washing step of washing away the pigment that has been dispersed inside the hydrogel by the pigment dispersion step and that has not bonded to the swollen hydrogel.

[0113] The method for producing a hydrogel structure according to one aspect of the present invention can be suitably applied to ImpFab.

[0114] Note that if the entire swollen hydrogel, rather than just the partial region, is bonded to the surface, the positional accuracy of the contracted hydrogel can be improved, but the effect of Implosion Fabrication (ImpFab) described in Patent Document 1, which increases the resolution of the spatial distribution pattern by performing a contraction step compared to patterning, cannot be obtained. Therefore, with the above configuration, the effect of ImpFab can be obtained while improving the positional accuracy of the contracted hydrogel on the surface.

[0115] Furthermore, in the method for producing a hydrogel structure according to the eighth aspect of the present invention, in addition to the configuration of the method for producing a hydrogel structure according to any one of the first to seventh aspects described above, a configuration is adopted in which, when the surface is viewed in a plane, the area ratio of the partial region to the entire swollen hydrogel is 10% or less.

[0116] According to the above configuration, the influence of the portion of the region that does not shrink during the shrinking process on the hydrogel can be sufficiently suppressed.

[0117] Furthermore, in the method for manufacturing a hydrogel structure according to the ninth aspect of the present invention, in addition to the configuration of the method for manufacturing a hydrogel structure according to any one of the first to eighth aspects described above, a configuration is adopted in which an alignment mark is formed on the surface.

[0118] When an optical composite device is produced by stacking the hydrogel structure produced by this production method on an optical device formed on the surface of another substrate, the alignment between the substrate on which the hydrogel structure is formed and the other substrate on which the optical device is formed is adjusted so that the optical axis of the hydrogel coincides with the optical axis of the optical device. With the above configuration, the alignment mark can be used during this alignment adjustment, making it easier to adjust the alignment.

[0119] Furthermore, in the method for producing a hydrogel structure according to the tenth aspect of the present invention, in addition to the configuration of the method for producing a hydrogel structure according to any one of the first to ninth aspects described above, a configuration is adopted in which a plurality of the hydrogels are placed on the surface, and the hydrogels shrunk by the shrinking process are arranged periodically when the surface is viewed in a plane.

[0120] The above configuration improves the production efficiency of hydrogel structures compared to when a single hydrogel is placed on the surface of a substrate. Furthermore, the periodic arrangement of hydrogels on the surface facilitates the process of cutting the substrate into individual hydrogel structures.

[0121] Furthermore, a manufacturing method for an optical composite device according to an eleventh aspect of the present invention is a manufacturing method for an optical composite device including the manufacturing method for a hydrogel structure according to the ninth or tenth aspect described above and post-processing performed after the manufacturing method, wherein the substrate and the surface are referred to as a first substrate and a first surface, respectively, an optical device is placed on the second surface of the second substrate, and the position of the optical axis of the hydrogel shrunk by the shrinking process on the first surface corresponds to the position of the optical axis of the optical device on the second surface, and the post-processing includes a lamination process of stacking the first substrate and the second substrate, an alignment process of adjusting the alignment of the first substrate and the second substrate so that the optical axes of the hydrogel and the optical device coincide, and a bonding process of bonding the first substrate and the second substrate in a state where the optical axes of the hydrogel and the optical device coincide.

[0122] According to the method for producing a hydrogel structure according to one aspect of the present invention, a portion of the swollen hydrogel is bonded to the surface of the substrate. Therefore, a portion of the contracted hydrogel obtained by performing the contraction step is also bonded to the surface of the substrate. This prevents the contracted hydrogel from shifting position on the surface, thereby reducing the effort and care required for post-processing. Thus, the method for producing a hydrogel structure according to one aspect of the present invention can be suitably used as part of a method for producing an optical composite device.

[0123] The intermediate of the hydrogel structure according to the twelfth aspect of the present invention is an intermediate of the hydrogel structure comprising a substrate, a swollen hydrogel, and a sealing member that seals the substrate and the hydrogel together with water, and is configured such that a portion of the swollen hydrogel is bonded to the surface of the substrate.

[0124] The optical diffraction element according to a thirteenth aspect of the present invention is an optical diffraction element comprising a substrate and a contracted hydrogel having an optically effective area in which at least one of the absorbance and the phase modulation amount has a spatial distribution, and a partial area of ​​the hydrogel is bonded to the surface of the substrate.

[0125] The intermediate product of the hydrogel structure and the optical diffraction element according to one aspect of the present invention have the same effects as the method for producing the hydrogel structure according to one aspect of the present invention.

[0126] [Summary 2] The method for producing a hydrogel structure according to the first aspect of the present invention comprises contracting one or more swollen hydrogels, some of which are bonded to the surface of a substrate, on the surface of the substrate.

[0127] The method for manufacturing a hydrogel structure according to a second aspect of the present invention is the method for manufacturing a hydrogel structure according to the first aspect, further comprising determining in advance the position of the partial region and the position on the surface where the partial region is joined.

[0128] A method for manufacturing a hydrogel structure according to a third aspect of the present invention is the method for manufacturing a hydrogel structure according to the first aspect, further comprising providing an optically effective region within the one or more swollen hydrogels, in which at least one of the absorbance and the phase modulation amount has a spatial distribution, and ensuring that the partial region does not overlap the optically effective region when the surface is viewed in a plane.

[0129] The method for manufacturing a hydrogel structure according to a fourth aspect of the present invention is the method for manufacturing a hydrogel structure according to the third aspect, further comprising providing an optically ineffective area other than the optically effective area that surrounds the optically effective area when viewed in a plane.

[0130] A method for producing a hydrogel structure according to a fifth aspect of the present invention is the method for producing a hydrogel structure according to the first aspect, further comprising: before contracting the one or more swollen hydrogels, performing a hydrophilic treatment on the area of ​​the surface to which the partial area is to be joined; and forming the one or more swollen hydrogels on the surface.

[0131] A method for producing a hydrogel structure according to a sixth aspect of the present invention is the method for producing a hydrogel structure according to the first aspect, further comprising the steps of modifying a region of the surface to which the partial region is to be joined with a compound that bonds the substrate and the swollen hydrogel or hydrogels, and forming the swollen hydrogel or hydrogels on the surface, before shrinking the swollen hydrogel or hydrogels.

[0132] A seventh aspect of the present invention relates to a method for producing a hydrogel structure, which is the same as the method for producing a hydrogel structure according to the first aspect, and further includes dispersing a dye inside the one or more swollen hydrogels before shrinking the one or more swollen hydrogels; irradiating the one or more swollen hydrogels with light to bind the dye to the one or more swollen hydrogels; and washing away any of the dye dispersed inside that is not bound to the one or more swollen hydrogels.

[0133] The method for producing a hydrogel structure according to an eighth aspect of the present invention is the method for producing a hydrogel structure according to the first aspect, wherein, when the surface is viewed in a plane, the area ratio of the partial region to the entire area of ​​the one or more swollen hydrogels is 10% or less.

[0134] A method for producing a hydrogel structure according to a ninth aspect of the present invention is the method for producing a hydrogel structure according to the first aspect, further comprising forming an alignment mark on the surface.

[0135] A tenth aspect of the present invention relates to a method for manufacturing a hydrogel structure, which is the same as the first aspect, and further includes placing the swollen hydrogels on the surface, and contracting the swollen hydrogels so that they are periodically arranged when the surface is viewed in a plane.

[0136] A method for manufacturing an optical composite device according to an eleventh aspect of the present invention comprises the method for manufacturing a hydrogel structure according to the ninth aspect and a post-treatment performed after the method for manufacturing a hydrogel structure according to the ninth aspect, wherein the post-treatment comprises laminating a first substrate and a second substrate, adjusting the alignment of the first substrate and the second substrate so that the optical axis of the swollen one or more hydrogels coincides with the optical axis of an optical device, and bonding the first substrate and the second substrate after adjusting the alignment, wherein the substrate according to the first aspect is the first substrate, the surface according to the first aspect is a first surface, the optical device is placed on the second surface of the second substrate, and the position of the optical axis of the shrunk, swollen one or more hydrogels on the first surface corresponds to the position of the optical axis of the optical device on the second surface.

[0137] The intermediate of the hydrogel structure according to the twelfth aspect of the present invention comprises a substrate, a swollen hydrogel, and a sealing member that seals the substrate and the swollen hydrogel together with water, and a portion of the swollen hydrogel is bonded to the surface of the substrate.

[0138] The optical diffraction element according to a thirteenth aspect of the present invention comprises a substrate and a contracted hydrogel having an optically effective area in which at least one of the absorptance and the phase modulation amount has a spatial distribution, and a portion of the contracted hydrogel is bonded to the surface of the substrate.

[0139] [Additional Notes] The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope of the claims. Embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in the technical scope of the present invention.

[0140] REFERENCE SIGNS LIST 1 Optical composite device 10 Hydrogel structure 11 Substrate 111, 112 Main surface 113 Alignment mark 114 Partial region 12 Frame 13 Hydrogel 131 Partial region

Claims

1. The process includes a shrinkage step that shrinks the swollen hydrogel on the surface of the substrate. In the shrinkage process, a portion of the swollen hydrogel is bonded to the surface. A method for producing a hydrogel structure characterized by the above.

2. The location of the portion of the swollen hydrogel and the location on the surface where the portion of the swollen hydrogel is joined are predetermined locations. A method for producing a hydrogel structure according to feature 1.

3. Within the swollen hydrogel, there is an optically effective region in which at least one of the absorption rate and the phase modulation amount has a spatial distribution. When the surface is viewed from above, the portion of the area does not overlap with the optically effective area. A method for producing a hydrogel structure according to claim 1 or 2, characterized by the above.

4. The optically ineffective region, which is a region other than the optically effective region, is the region surrounding the optically effective region when the surface is viewed from above. A method for producing a hydrogel structure according to feature 3.

5. A substrate processing step performed before the shrinkage step, comprising a substrate processing step in which a hydrophilic treatment is applied to the region of the surface in which the portion of the surface is joined, The process further includes a hydrogel forming step of forming a swollen hydrogel on the aforementioned surface, A method for producing a hydrogel structure according to claim 1 or 2, characterized by the above.

6. A substrate processing step performed before the shrinkage step, wherein the substrate processing step involves modifying the region of the surface to which the partial region is joined with a compound that bonds the substrate and the swollen hydrogel, The process further includes a hydrogel forming step of forming a swollen hydrogel on the aforementioned surface, A method for producing a hydrogel structure according to claim 1 or 2, characterized by the above.

7. A pretreatment performed before the shrinkage process, A dye dispersion step in which the dye is dispersed inside the swollen hydrogel, A patterning step in which the dye is bonded to the swollen hydrogel by irradiating the swollen hydrogel with light, The pretreatment further includes a washing step of washing away the pigments dispersed inside the swollen hydrogel by the pigment dispersion step that are not bound to the swollen hydrogel, A method for producing a hydrogel structure according to claim 1 or 2, characterized by the above.

8. When the surface is viewed from above, the area ratio of the partial region to the entire swollen hydrogel is 10% or less. A method for producing a hydrogel structure according to claim 1 or 2, characterized by the above.

9. Alignment marks are formed on the aforementioned surface. A method for producing a hydrogel structure according to claim 1 or 2, characterized by the above.

10. Multiple hydrogels are placed on the aforementioned surface. The hydrogel that has shrunk in the aforementioned shrinkage process is arranged periodically when viewed from above on its surface. A method for producing a hydrogel structure according to claim 1 or 2, characterized by the above.

11. A method for manufacturing an optical composite device, comprising a method for manufacturing a hydrogel structure according to claim 9, and a post-processing method performed after the manufacturing method, The substrate and the surface are respectively designated as the first substrate and the first surface. An optical device is mounted on the second surface of the second substrate. The position of the optical axis of the hydrogel that has shrunk by the shrinkage process on the first surface and the position of the optical axis of the optical device on the second surface correspond to each other. The post-processing is as follows: A lamination step of stacking the first substrate and the second substrate, An alignment step is performed to adjust the alignment of the first substrate and the second substrate so that the optical axes of the hydrogel and the optical device are aligned, The process includes a bonding step of joining the first substrate and the second substrate in a state in which the optical axes of the hydrogel and the optical device are aligned. A method for manufacturing an optical composite device characterized by the above.

12. An intermediate hydrogel structure comprising a substrate, a swollen hydrogel, and a sealing member that seals the substrate and the hydrogel together with water, A portion of the swollen hydrogel is bonded to the surface of the substrate. An intermediate for hydrogel structures characterized by the following features.

13. A photodiffracting element comprising a substrate and a shrunk hydrogel having an optically effective region in which at least one of the absorption rate and phase modulation amount has a spatial distribution, A portion of the hydrogel is bonded to the surface of the substrate. A photodiffractive element characterized by the following features.