Work scaffold and traveling vehicle system

Abstract

[Problem] To provide a work scaffold and a traveling vehicle system capable of efficiently performing maintenance or the like on a traveling vehicle or a ceiling track while reducing an influence on a layout in a manufacturing factory. [Solution] A work scaffold 100 includes a plurality of scaffold parts 10 that can be attached to and detached from a ceiling track R on which a traveling vehicle 200 travels. Each of the plurality of scaffold parts 10 has a passage 15 which a worker U can get on and pass through, and the passage 15 is continuous in the scaffold parts 10 adjacent to each other and mounted on the ceiling track R.

Description

Work scaffolding and vehicle systems

[0001] The present invention relates to a work scaffold and a traveling vehicle system.

[0002] In manufacturing factories such as semiconductor manufacturing factories, a traveling vehicle system is used in which a traveling vehicle traveling on an overhead track transports articles such as transport containers (FOUPs, reticle pods) that store semiconductor wafers or reticles. In this traveling vehicle system, when maintenance of the traveling vehicle or the overhead track is performed at a high altitude, it has been proposed to secure a passageway and a work area that workers can pass through by suspending a work scaffolding from the overhead track (see, for example, Patent Document 1).

[0003] Japanese Patent Application Laid-Open No. 2021-045334

[0004] The work scaffolding in Patent Document 1 is fixedly installed relative to the overhead track. Therefore, in order to perform work at various locations on the overhead track, the work scaffolding needs to be installed over a wide area. Installing the work scaffolding over a wide area increases the space it occupies, which may affect the layout of various devices within the manufacturing plant.

[0005] The present invention aims to provide a work scaffold and a traveling vehicle system that enable efficient maintenance of traveling vehicles or overhead tracks while reducing the impact on the layout within a manufacturing factory.

[0006] A work scaffolding according to one aspect of the present invention is a work scaffolding comprising a plurality of scaffolding sections that can be attached and detached to an overhead track on which a traveling vehicle travels, each of the plurality of scaffolding sections having a passageway along which workers can ride and pass, and the passageways are continuous between adjacent scaffolding sections that are attached to the overhead track.

[0007] A traveling vehicle system according to an aspect of the present invention includes an overhead track, a traveling vehicle that travels on the overhead track, and the work scaffolding according to the above aspect.

[0008] According to the work scaffolding of the above aspect, since the multiple scaffolding sections are each detachable from the ceiling track, the work scaffolding can be installed at the required position on the ceiling track and can be removed from the ceiling track when it is no longer needed. This eliminates the need to install the work scaffolding over a wide area, and reduces the impact on the layout of various devices within the manufacturing plant.

[0009] Furthermore, in the work scaffolding according to the above aspect, each of the multiple scaffolding sections may be equipped with a wheel unit including wheels that roll on a running surface on which the traveling vehicle travels on the overhead track, and the scaffolding sections may be attached to the ceiling track by the wheels resting on the running surface. With this configuration, the position of the scaffolding section can be easily adjusted by moving the scaffolding section along the ceiling track. Furthermore, in the work scaffolding according to the above aspect, the wheel unit may be movable between an advanced position in which the wheels are positioned above the running surface and a retracted position in which the wheels are retracted from above the running surface. With this configuration, the scaffolding sections can be easily attached to and detached from the ceiling track by moving the wheels between the advanced position and the retracted position.

[0010] Furthermore, in the work scaffolding according to the above aspect, the wheel unit may be movable between the extended position and the retracted position by sliding in a direction perpendicular to the extension direction of the overhead track. With this configuration, the wheel unit can be easily set to the extended position or the retracted position by sliding. Furthermore, in the work scaffolding according to the above aspect, the scaffolding section may be provided with a brake that restricts movement of the scaffolding section along the ceiling track. With this configuration, it is possible to prevent the scaffolding section from moving inadvertently along the ceiling track.

[0011] Furthermore, in the work scaffolding according to the above aspect, the scaffolding section may include a connecting section that connects to an adjacent scaffolding section attached to the ceiling track. This configuration prevents adjacent scaffolding sections attached to the ceiling track from separating, ensuring a continuous passageway. Furthermore, in the work scaffolding according to the above aspect, each of the multiple scaffolding sections may have a rectangular or approximately rectangular parallelepiped outer shape, and the multiple scaffolding sections may include a first-class scaffolding section that has fall prevention members on only three sides and a second-class scaffolding section that has fall prevention members on only two opposing sides. According to this configuration, by combining the first-class scaffolding section and the second-class scaffolding section, a work scaffolding that can prevent workers from falling can be formed.

[0012] In the work scaffold according to the above aspect, the fall prevention members may be multiple rod-shaped members spaced apart vertically and extending along the walkway. This configuration allows the worker to extend their arms outside the work scaffold while preventing them from falling. In the work scaffold according to the above aspect, the multiple scaffold sections may include a third-class scaffold section that has fall prevention members on only two opposing sides and an opening / closing section on the side without the fall prevention members, which switches between allowing and blocking the worker's entry into the walkway. This configuration allows the worker to enter the work scaffold by opening the opening / closing section, and restricts the worker's entry while preventing the worker from falling while inside the scaffold. In the work scaffold according to the above aspect, the third-class scaffold section may have a fixing section for fixing a ladder to the side having the opening / closing section. This configuration prevents the ladder from coming off the third-class scaffold section.

[0013] The traveling vehicle system according to the above aspect also includes an overhead track, a traveling vehicle that travels on the overhead track, and the above-mentioned work scaffolding. This configuration allows efficient maintenance of the traveling vehicle or the overhead track while reducing the impact on the layout of various devices within a manufacturing plant. In addition, in the traveling vehicle system according to the above aspect, the overhead track may be a lattice track extending in a first direction and a second direction perpendicular to the first direction, and the traveling vehicle may be able to move in the first direction or the second direction from one square of the lattice track. This configuration allows work scaffolding to be installed at various locations on the lattice track.

[0014] 1 is a side view showing an example of a work scaffolding according to an embodiment; FIG. 2 is a plan view showing an example of a work scaffolding according to an embodiment; FIG. 3 is a side view showing an example of a first-class scaffolding section; (A) is a side view and (B) is a front view; FIG. 4 is an example of a second-class scaffolding section; (A) is a side view and (B) is a front view; FIG. 5 is an example of a third-class scaffolding section; (A) is a side view and (B) is a front view; FIG. 6 is an example of a wheel unit in a retracted position; (A) is a front view and (B) is a plan view; FIG. 7 is an example of a wheel unit in an advanced position; (A) is a front view and (B) is a plan view; FIG. 8 is an example of a stopper operation; (A) is a front view and (B) is a plan view; FIG. 9 is an example of a brake operation; (A) is a front view when movement is permitted and (B) is a front view when movement is restricted; FIG. 10 is an example of a coupling section; (A) is a plan view in a released state and (B) is a plan view in a coupled state; FIG. 11 is a side view showing a state in which a ladder is attached to a third-class scaffolding section; and FIG. 12 is an enlarged front view of the attachment portion of the third-class scaffolding section and the ladder. 14A and 14B are diagrams showing the installation procedure for the work scaffolding. FIG. 14B are diagrams showing the installation procedure for the work scaffolding. FIG. 14B are diagrams showing the installation procedure for the work scaffolding. FIG. 14B are diagrams showing the installation procedure for the work scaffolding. FIG. 14C are diagrams showing the installation procedure for the work scaffolding. FIG. 14C are diagrams showing the installation procedure for the work scaffolding. FIG. 14D are diagrams showing the installation procedure for the work scaffolding. FIG. 14D are diagrams showing the installation procedure for the work scaffolding. FIG. 14E are diagrams showing the installation procedure for the work scaffolding. FIG. 14F ...

[0015] Hereinafter, embodiments will be described with reference to the drawings. However, the present invention is not limited to the content described below. In addition, in order to explain the embodiments, the drawings are depicted with appropriate scale changes, such as enlarging or emphasizing some parts, and the dimensions and shape may differ from those of the actual product. In each of the following figures, directions in the figures will be described using an XYZ coordinate system. In this XYZ coordinate system, a plane parallel to the horizontal plane is defined as the XY plane. One direction in this XY plane is referred to as the X direction, and the direction perpendicular to the X direction is referred to as the Y direction. Furthermore, the direction perpendicular to the XY plane is referred to as the Z direction. In the following description, the X direction, Y direction, and Z direction will be described assuming that the direction indicated by the arrow in the figure is the + direction, and the direction opposite to the arrow is the - direction.

[0016] FIG. 1 is a side view showing an example of a work scaffold 1 according to an embodiment. FIG. 2 is a plan view showing an example of a work scaffold 1 according to an embodiment. As shown in FIGS. 1 and 2, the work scaffold 1 is attached in a suspended state from a ceiling track R. This work scaffold 1 can be attached to any position on the ceiling track R, and can also be removed from the ceiling track R. In this embodiment, the ceiling track R extends along the X direction. The work scaffold 1 can support a worker U on the inside, and serves as a scaffold for the worker U to perform work. As shown in FIGS. 1 and 2, the work scaffold 1 comprises multiple scaffold sections 10.

[0017] Each of the multiple scaffolding sections 10 has an external shape that is rectangular or approximately rectangular, and is square or approximately square in plan view. The scaffolding section 10 has a floor section 11, pillar sections 12, an upper frame section 13, and fall prevention members 14. The scaffolding section 10 also has a passage 15 in the space surrounded by the floor section 11, pillar sections 12, upper frame section 13, and fall prevention members 14, through which a worker U can pass. The multiple scaffolding sections 10 are connected in the X direction along the ceiling track R, and the passage 15 is continuous in the X direction.

[0018] The floor 11 is disposed at the -Z side end of the scaffolding 10 and is fixed to the lower ends of the four pillars 12. The floor 11 is, for example, a rectangular plate-like body. The floor 11 is provided with rigidity that allows the worker U to stand on it and move around. The upper surface of the floor 11 may be provided with multiple irregularities or the like to provide anti-slip support for the worker U. Furthermore, instead of a plate-like body, the floor 11 may be made of, for example, a rigid mesh body, punched metal, or the like. The pillars 12 are disposed to extend upward (to the +Z side) from the four corners of the floor 11. The upper frame 13 is formed by connecting rod-like bodies in a square or approximately square shape and is fixed to the upper ends of the four pillars 12. The upper frame 13 connects the four pillars 12. In this way, the outer shape of the scaffolding section 10 is formed by the floor section 11, the four pillar sections 12, and the upper frame section 13.

[0019] The fall prevention members 14 are provided on opposing side surfaces of the scaffolding unit 10. That is, the fall prevention members 14 are provided on both side surfaces of the scaffolding unit 10, sandwiching the aisle 15. The fall prevention members 14 are two rod-shaped members extending along the aisle 15. The fall prevention members 14 are arranged at intervals, spaced apart vertically, on the side surfaces of the scaffolding unit 10. These fall prevention members 14 can prevent a worker U in the aisle 15 from falling to the side (Y direction) of the scaffolding unit 10. Furthermore, because there is a gap between the upper frame unit 13 and the fall prevention members 14 and between the two fall prevention members 14, the worker U can reach out from this gap to the outside of the side of the scaffolding unit 10. Note that instead of the two rod-shaped members, the fall prevention members 14 may be, for example, a plate-shaped member, a mesh-shaped member, or the like.

[0020] The multiple scaffolding sections 10 are composed of a first type scaffolding section 10A, a second type scaffolding section 10B, and a third type scaffolding section 10C. In the following description, the first type scaffolding section 10A, the second type scaffolding section 10B, and the third type scaffolding section 10C may be collectively referred to as the scaffolding section 10. Figure 3 shows an example of the first type scaffolding section 10A, where (A) is a side view and (B) is a front view. Figure 4 shows an example of the second type scaffolding section 10B, where (A) is a side view and (B) is a front view. Figure 5 shows an example of the third type scaffolding section 10C, where (A) is a side view and (B) is a front view.

[0021] As shown in Figures 3(A) and 3(B), the type 1 scaffolding unit 10A has fall prevention members 14 provided on only three sides. That is, in the type 1 scaffolding unit 10A, fall prevention members 14 are provided at two locations on the +Y side and -Y side, and one location on the +X side, across the aisle 15. The type 1 scaffolding unit 10A is located at the front part (+X side end) of the work scaffolding 1.

[0022] As shown in Figures 4(A) and 4(B), the type-2 scaffolding unit 10B has fall prevention members 14 provided on only two side surfaces. That is, in the type-2 scaffolding unit 10B, the fall prevention members 14 are provided at two locations, on the +Y side and the -Y side, across the aisle 15. The type-2 scaffolding unit 10B is used as a scaffolding unit 10 connected to the type-1 scaffolding unit 10A. As shown in Figures 5(A) and 5(B), the type-3 scaffolding unit 10C has fall prevention members 14 provided on only two side surfaces. That is, in the type-3 scaffolding unit 10C, the fall prevention members 14 are provided at two locations, on the +Y side and the -Y side, across the aisle 15, similar to the type-2 scaffolding unit 10B. The type-3 scaffolding unit 10C is located at the rear end (-X end) of the work scaffolding 1, opposite the type-1 scaffolding unit 10A.

[0023] Furthermore, the type 3 scaffolding section 10C has a frame section 12a, an opening / closing section 17, and a fixing section 18. The frame sections 12a are provided in two locations on the +Y and -Y sides of the -X side of the type 3 scaffolding section 10C. The frame sections 12a are used as handles when the worker U gets on to the work scaffolding 1. The opening / closing section 17 is provided on the side where the fall prevention member 14 is not arranged and on the -X side that is not connected to the type 2 scaffolding section 10B.

[0024] The opening / closing unit 17 can rotate around a vertical axis, with the hinge portion 17a as the axis, and switches between allowing and denying entry of the worker U into the passage 15. Opening the opening / closing unit 17 allows the worker U to enter the passage 15. Closing the opening / closing unit 17 restricts the worker U from entering the passage 15 and also prevents the worker U from falling off the passage 15. The closed state of the opening / closing unit 17 can be maintained by the lock portion 17b. By maintaining the opening / closing unit 17 with the lock portion 17b, it is possible to prevent the opening / closing unit 17 from opening accidentally.

[0025] The fixing portion 18 is provided on the floor portion 11 on the -X side where the opening / closing portion 17 is arranged. The fixing portion 18 secures the ladder 30. Details of the fixing portion 18 will be described later. Each of the first type scaffolding portion 10A, the second type scaffolding portion 10B, and the third type scaffolding portion 10C has a connecting portion 16. The connecting portion 16 connects adjacent scaffolding portions 10 attached to the ceiling track R. In the first type scaffolding portion 10A, the connecting portion 16 is provided on the -X side end of the floor portion 11. In the second type scaffolding portion 10B, the connecting portion 16 is provided on both the -X side end and the +X side end of the floor portion 11. In the third type scaffolding portion 10C, the connecting portion 16 is provided on the +X side end of the floor portion 11. Details of the connecting portion 16 will be described later.

[0026] In this embodiment, the work scaffolding 1 is shown in which one type 2 scaffolding section 10B is connected between the type 1 scaffolding section 10A and the type 3 scaffolding section 10C, but is not limited to this configuration. For example, the work scaffolding 1 may be configured in which two or more type 2 scaffolding sections 10B are connected between the type 1 scaffolding section 10A and the type 3 scaffolding section 10C. Alternatively, the work scaffolding 1 may be configured in which no type 2 scaffolding section 10B is connected between the type 1 scaffolding section 10A and the type 3 scaffolding section 10C (i.e., the work scaffolding 1 is configured in which the type 1 scaffolding section 10A and the type 3 scaffolding section 10C are connected).

[0027] The scaffolding section 10 is equipped with a wheel unit 20. A plurality of wheel units 20 are arranged for each scaffolding section 10 at a distance in the X direction. The wheel units 20 enable the scaffolding section 10 (i.e., the work scaffolding 1) to move along the ceiling track R on which the traveling vehicle 100 travels. Fig. 6 shows an example of a wheel unit 20 at the retracted position P1, with (A) being a front view and (B) being a plan view. Fig. 7 shows an example of a wheel unit 20 at the advanced position P2, with (A) being a front view and (B) being a plan view.

[0028] 6 and 7 , the wheel unit 20 can move between a retracted position P1 and an advanced position P2 by sliding in a direction (Y direction) perpendicular to the direction (X direction) in which the ceiling track R extends. The wheel unit 20 may be moved manually by a worker U, or may be moved by driving a drive source such as an electric motor or a hydraulic cylinder mounted on the scaffolding 10.

[0029] The wheel unit 20 has a base 21 (see FIG. 2 ), a movable part 22, wheels 23, and a stopper 24. The bases 21 are provided on the upper frame part 13 at two locations spaced apart in the X direction, extending in the Y direction. In other words, the two bases 21 are provided on the upper frame part 13 so as to span the Y direction. The movable part 22 is disposed on the base 21. The movable part 22 is slidable in the X direction along an X-direction guide part 21 a provided on the base 21.

[0030] The movable unit 22 is movable between a retracted position P1 in which the wheels 23 are retracted inward from above the running surface Ra of the overhead track R as shown in Fig. 6, and an advanced position P2 in which the wheels 23 are positioned above the running surface Ra of the overhead track R as shown in Fig. 7. In this embodiment, the movable unit 22 is slidable in the Y direction, but this is not limiting. For example, the movable unit 22 may be rotatable about a vertical axis or a horizontal axis and movable between the retracted position P1 and the advanced position P2.

[0031] 8 shows an example of the operation of the stopper 24, with (A) being a front view and (B) being a plan view. The stopper 24 restricts the wheel unit 20, which is located at the advanced position P2, from sliding in the X direction toward the retracted position P1. The stopper 24 is provided so as to be movable in the Y direction along a guide (not shown) provided on the base 21. The stopper 24 may be moved manually by the worker U, or may be moved by, for example, driving a drive source such as an electric motor or hydraulic cylinder mounted on the scaffolding unit 10.

[0032] The dimension of the stopper 24 in the Y direction is set to be equal to (or slightly shorter than) the distance between the two movable parts 22 at the advanced position P2. Therefore, when the movable parts 22 are at the advanced position P2, the stopper 24 is disposed between the two movable parts 22 to restrict the movable parts 22 from moving from the advanced position P2 to the retracted position P1. Note that the form of the stopper 24 is not limited to the above. For example, any configuration that restricts the movement of the movable parts 22 at the advanced position P2 can be applied.

[0033] The wheels 23 are provided at the upper end of the movable part 22. A plurality of wheels 23 (three in this embodiment) are provided on one movable part 22. Each of the plurality of wheels 23 is a driven wheel that is provided so as to be able to roll. Each wheel 23 is capable of rolling on the running surface Ra of the ceiling track R. The scaffolding part 10 is attached in a state in which it is suspended from the ceiling track R with the wheels 23 resting on the running surface Ra. Furthermore, when the worker U pushes the scaffolding part 10, the wheels 23 roll, and the scaffolding part 10 can be moved along the ceiling track R. Note that any of the plurality of wheels 23 may be a drive wheel that is rotationally driven by a drive source.

[0034] The scaffolding unit 10 also includes a brake 19 (see FIGS. 3, 4, and 5). The brake 19 restricts movement of the scaffolding unit 10 along the ceiling track R. FIG. 9 shows an example of the operation of the brake 19, with (A) being a front view when movement is permitted and (B) being a front view when movement is restricted. As shown in FIG. 9, the brake 19 is provided on the upper frame 13 of the scaffolding unit 10. The brake 19 has a lifting / lowering guide 19a, a lifting / lowering section 19b, and an insertion section 19c. The lifting / lowering guide 19a is provided to protrude upward from the top surface of the upper frame 13 of the scaffolding unit 10. The lifting / lowering section 19b is provided so as to be able to rise and fall along the lifting / lowering guide 19a. The lifting / lowering guide 19a is provided with a holding section (not shown) that holds the lifting / lowering section 19b in a raised state.

[0035] The insertion section 19c is provided on the upper surface of the lifting section 19b and protrudes upward. By raising the lifting section 19b from the state shown in Fig. 9(A), the insertion section 19c enters a gap S1 (see Fig. 17) provided in the ceiling track R, as shown in Fig. 9(B). The raised position of the insertion section 19c is held by a holding section (not shown). As a result, the movement of the scaffolding section 10 along the ceiling track R is restricted, and its position relative to the ceiling track R is held.

[0036] The lifting unit 19b is raised and lowered manually by the worker U. However, the lifting unit 19b may be raised and lowered using a drive source provided in the scaffolding unit 10. The brake 19 does not have to be provided in all of the scaffolding units 10. It may be provided in any one of the multiple scaffolding units 10 that make up the work scaffolding 1. Furthermore, the form of the brake 19 is not limited to the form described above. For example, any configuration can be applied, such as a configuration that restricts the free rotation of the wheels 23.

[0037] FIG. 10 shows an example of a connecting portion 16, where (A) is a plan view in a released state and (B) is a plan view in a connected state. The connecting portion 16 is provided on each of the multiple scaffolding sections 10. As shown in FIG. 10, the connecting portion 16 includes a hook 16a and a pin 16b. The hook 16a is provided rotatably around the axis of a vertical shaft portion 16x. The pin 16b is provided to protrude upward from the floor section 11. In FIG. 10(A), the connecting portion 16 is in a released state, so the adjacent scaffolding sections 10 can move apart. By rotating the hook 16a from the state shown in FIG. 10(A), the hook 16a engages with the pin 16b of the connecting portion 16 of the adjacent scaffolding section 10.

[0038] When the hooks 16a engage with the pins 16b, adjacent scaffolding sections 10 are connected to each other. Furthermore, as shown in FIG. 10(B), by inserting a plate-shaped plate 16c between the two hooks 16a, the hooks 16a can be prevented from coming off the pins 16b. In other words, by inserting the plate 16c between the two hooks 16a, adjacent scaffolding sections 10 can be prevented from separating from each other. The rotation of the hooks 16a and the insertion of the plate 16c are performed manually by the worker U. However, the rotation of the hooks 16a and the insertion of the plate 16c may also be performed using a drive source provided in the scaffolding section 10.

[0039] FIG. 11 is a side view showing the ladder 30 attached to the type 3 scaffolding unit 10C. FIG. 12 is an enlarged front view of the attachment portion of the type 3 scaffolding unit 10C and the ladder 30. As shown in FIGS. 11 and 12, the ladder 30 can be attached to the type 3 scaffolding unit 10C. The ladder 30 is hung from the floor F to the -X side of the type 3 scaffolding unit 10C. The ladder 30 is fixed to the type 3 scaffolding unit 10C by fixing parts 18. As shown in FIG. 12, the fixing parts 18 are provided at two locations spaced apart in the Y direction at the bottom of the type 3 scaffolding unit 10C. By attaching the ladder 30 to the type 3 scaffolding unit 10C, the worker U can easily enter from the floor F to the passage 15 of the work scaffolding 1.

[0040] FIG. 13 is a side view showing an example of the fixing portion 18. As shown in FIG. 13, the fixing portion 18 is provided on the -X side of the lower portion of the third-class scaffolding unit 10C. The fixing portion 18 includes a support portion 18a and a bar 18b. The support portion 18a protrudes from the floor portion 11 in the -X direction. The bar 18b is sandwiched between the two support portions 18a and extends in the Y direction. The bar 18b has a length and diameter that allows a hook 31 provided on the ladder 30 to be hung on the bar 18b. When attaching the ladder 30 to the third-class scaffolding unit 10C, the ladder 30 is attached to the third-class scaffolding unit 10C by hanging the hook 31 on the bar 18b. By securing the ladder 30 to the fixing portion 18, the worker U can safely ascend and descend the ladder 30.

[0041] Next, a method for setting up the work scaffolding 1 will be described. Figures 14 to 16 are diagrams showing the procedure for setting up the work scaffolding 1. First, as shown in Figure 14 (A), worker U1 waits near the ceiling track R on an aerial work platform 41. Worker U2 places the first-class scaffolding unit 10A on a lifter 42 and positions the lifter 42 directly below the ceiling track R. At this time, the wheel unit 20 of the first-class scaffolding unit 10A is positioned in the retracted position P1 (see Figure 6).

[0042] 14(B), worker U2 uses the lifter 42 to lift the first-class scaffolding unit 10A up to the vicinity of the ceiling track R. Because the wheel unit 20 is disposed in the retracted position P1, the first-class scaffolding unit 10A can be lifted without the wheels 23 of the wheel unit 20 interfering with the ceiling track R. Worker U2 lifts the first-class scaffolding unit 10A to a height where the wheels 23 are above the running surface Ra of the ceiling track R.

[0043] Next, worker U1 attaches the type 1 scaffolding unit 10A, which has been lifted up to the ceiling track R, to the ceiling track R. When attaching the type 1 scaffolding unit 10A to the ceiling track R, worker U1 moves the wheel unit 20 from the retracted position P1 to the advanced position P2 (see FIG. 7). Because the wheels 23 are located above the running surface Ra, they move to the advanced position P2 without interfering with the ceiling track R. In this state, the wheels 23 are positioned directly above the running surface Ra. Next, after the wheel unit 20 has moved to the advanced position P2, worker U2 uses the lifter 42 to lower the type 1 scaffolding unit 10A. This operation places the wheels 23 on the running surface Ra of the ceiling track R. With the wheels 23 on the running surface Ra, the type 1 scaffolding unit 10A is attached in a suspended state to the ceiling track R.

[0044] Next, as shown in Figure 15 (A), worker U1 moves the first-class scaffolding unit 10A attached to the ceiling track R in the -X direction by the dimension of the second-class scaffolding unit 10B to be attached next. Worker U2 places the second-class scaffolding unit 10B on the lifter 42 and positions it directly below the ceiling track R. At this time, the wheel unit 20 of the second-class scaffolding unit 10B is positioned in the retracted position P1 (see Figure 6).

[0045] Next, as shown in FIG. 15(B), worker U2 uses the lifter 42 to lift the second-class scaffolding unit 10B to the vicinity of the ceiling track R, similar to the first-class scaffolding unit 10A. Worker U1 then attaches the second-class scaffolding unit 10B, which has been lifted up to the ceiling track R, to the ceiling track R in the same manner as the first-class scaffolding unit 10A. Next, worker U1 operates the connecting part 16 to connect and integrate the previously attached first-class scaffolding unit 10A and the currently attached second-class scaffolding unit 10B (see FIG. 10). Next, although not shown, worker U1 moves the first-class scaffolding unit 10A and the second-class scaffolding unit 10B attached to the ceiling track R in the -X direction by the dimension of the next third-class scaffolding unit 10C to be attached. Note that when attaching multiple second-class scaffolding units 10B, the process shown in FIG. 15 is repeated.

[0046] Next, as shown in FIG. 16(A), worker U2 places the type-3 scaffolding unit 10C on the lifter 42 and, similar to the type-1 scaffolding unit 10A and type-2 scaffolding unit 10B, uses the lifter 42 to lift the type-3 scaffolding unit 10C to the vicinity of the ceiling track R. Note that, similar to the type-1 scaffolding unit 10A or type-2 scaffolding unit 10B described above, the wheel unit 20 of the type-3 scaffolding unit 10C is positioned in the retracted position P1. Worker U1 attaches the type-3 scaffolding unit 10C, which has been lifted up to the ceiling track R, to the ceiling track R in the same manner as the type-1 scaffolding unit 10A and type-2 scaffolding unit 10B. Next, worker U1 operates the connecting unit 16 to connect the previously attached type-2 scaffolding unit 10B and the currently attached type-3 scaffolding unit 10C together.

[0047] Through these steps, a work scaffold 1 is formed in which the first-class scaffolding section 10A, the second-class scaffolding section 10B, and the third-class scaffolding section 10C are integrated via the connecting section 16. However, this work scaffold 1 is movable on the ceiling track R. After the worker U1 moves the work scaffold 1 along the ceiling track R and adjusts the position of the work scaffold 1, he operates the brake 19 (see FIG. 9) to restrict the movement of the work scaffold 1 relative to the ceiling track R. As a result, the work scaffold 1 is held in the desired position on the ceiling track R. Next, as shown in FIG. 16(B), the workers U1 and U2 work together to fix the ladder 30 at a predetermined inclination to the fixing section 18 of the third-class scaffolding section 10C (see FIG. 13). The work scaffold 1 is completed by attaching the ladder 30 to the third-class scaffolding section 10C.

[0048] FIG. 17 is a plan view showing an example of a traveling vehicle system SYS according to an embodiment. The traveling vehicle system SYS is a system for transporting an item M by a traveling vehicle 100, for example, in a clean room of a semiconductor manufacturing factory. The item M is, for example, a FOUP that stores semiconductor wafers or a reticle pod that stores reticles. As shown in FIG. 17 , the traveling vehicle system SYS includes a lattice track RR as an overhead track R. The traveling vehicle 100 moves in a first direction D1 or a second direction D2 along the lattice track RR. The traveling vehicle 100 may also be referred to as an overhead traveling vehicle or an overhead transport vehicle. A plurality of traveling vehicles 100 may be used in the traveling vehicle system SYS.

[0049] The lattice track RR is installed on or near the ceiling of a building such as a clean room via hanging brackets (not shown). The lattice track RR has a plurality of first overhead tracks R1, a plurality of second overhead tracks R2, and a plurality of intersections R3. Each of the first overhead tracks R1 has a gap S1 extending in a first direction D1 (X direction). The plurality of first overhead tracks R1 are arranged along the first direction D1 at intervals. Each of the second overhead tracks R2 has a gap S1 extending in a second direction D2 (Y direction) perpendicular to the first direction D1. The plurality of second overhead tracks R2 are arranged along the second direction D2 at intervals. The first overhead tracks R1 and the second overhead tracks R2 intersect.

[0050] The intersection R3 is located at the intersection between the first overhead track R1 and the second overhead track R2. The intersection R3 is adjacent to the first overhead track R1 in the first direction D1 and adjacent to the second overhead track R2 in the second direction D2. The intersection R3 is a connecting track that connects the first overhead track R1 and the second overhead track R2, connects two first overhead track R1s together, and connects two second overhead track R2s together. The intersection R3 is a track that is used when the traveling vehicle 100 travels along the first overhead track R1, when the traveling vehicle 100 travels along the second overhead track R2, when the traveling vehicle 100 travels from the first overhead track R1 to the second overhead track R2, and when the traveling vehicle 100 travels from the second overhead track R2 to the first overhead track R1.

[0051] A gap S is provided between the first overhead track R1 and the intersection R3, and between the second overhead track R2 and the intersection R3. This gap S is set to a dimension that allows a connecting section 70 of the traveling vehicle 100, which will be described later, to pass through. The lattice track RR is formed in a lattice shape in a plan view by a plurality of first overhead tracks R1 and a plurality of second overhead tracks R2, and the first overhead track R1 and the second overhead track R2 form a plurality of grid cells C (grid cells, cells), and these grid cells C are adjacent to each other in the first direction D1 and the second direction D2.

[0052] As shown in Fig. 17, one square C is a portion surrounded by two adjacent first overhead tracks R1 in the second direction D2 and two adjacent second overhead tracks R2 in the first direction D1 in a plan view. Note that Fig. 17 shows only a portion of the lattice track RR, and the lattice track RR is formed with a similar configuration continuing from the illustrated configuration in the first direction D1 (X direction) and the second direction D2 (Y direction). The traveling vehicle 100 is formed to a size that fits into one square C in a plan view.

[0053] The first overhead track R1, the second overhead track R2, and the intersection R3 each have running surfaces R1a, R2a, and R3a on which running wheels 61 of the running vehicle 100 (described later) travel. One first overhead track R1 has two running surfaces R1a aligned along the first direction D1, arranged side by side in the second direction D2. One second overhead track R2 has two running surfaces R2a aligned along the second direction D2, arranged side by side in the first direction D1. When the running vehicle 100 travels in the first direction D1, the running wheels 61 travel on the running surfaces R1a of a pair of first overhead tracks R1 that are adjacent to each other in the second direction D2. When the running vehicle 100 travels in the second direction D2, the running wheels 61 travel on the running surfaces R2a of a pair of second overhead tracks R2 that are adjacent to each other in the first direction D1.

[0054] FIG. 18 is a perspective view showing an example of a traveling vehicle 100 used in the traveling vehicle system SYS. As shown in FIG. 18, the traveling vehicle 100 has a main body unit 50, a traveling unit 60, a connecting unit 70, and a control unit (not shown). The control unit comprehensively controls the operation of each unit of the traveling vehicle 100. The control unit is provided in the main body unit 50, but may be provided outside the main body unit 50. The main body unit 50 is placed below (on the -Z side of) the lattice track RR. The traveling vehicle 100 travels with the main body unit 50 hanging down from the lattice track RR.

[0055] The main body 50 is formed, for example, in a rectangular shape in plan view, and is sized to fit within one square C (see FIG. 17) in plan view. This prevents interference when passing other traveling vehicles 100 traveling on the adjacent first overhead track R1 or second overhead track R2. The main body 50 includes an upper unit 51 and a transfer device 52. The upper unit 51 is suspended from the running unit 60 via a connecting unit 70. A running unit 60 and a connecting unit 70 are provided at each of the four corners of the top surface 15a of the upper unit 51.

[0056] The transfer device 52 is provided below the upper unit 51. The transfer device 52 is rotatable around a vertical axis. The transfer device 52 has an article holding unit 53 that holds the article M, a lifting / lowering drive unit 54 that raises and lowers the article holding unit 53 in the vertical direction, and a lateral movement mechanism 55 that slides the lifting / lowering drive unit 54 in the horizontal direction. The article holding unit 53 is, for example, a chuck device that grips a portion of the article M and holds the article M by suspending it. The lifting / lowering drive unit 54 is, for example, a hoist that raises and lowers the article holding unit 53 by reeling out or retracting a belt (not shown).

[0057] The lateral delivery mechanism 55 has a plurality of movable plates arranged in a stacked manner in the Z direction, for example. The movable plates are relatively movable in the horizontal direction. A lifting / lowering drive unit 54 is attached to the lowest movable plate. The lateral delivery mechanism 55 moves the movable plates using a drive device (not shown), and can laterally deliver (slide) the lifting / lowering drive unit 54 and the article holding unit 53 attached to the lowest movable plate in the horizontal direction perpendicular to the traveling direction of the traveling vehicle 100, for example. Note that the lifting / lowering drive unit 54 may be rotatable around an axis vertical to the lateral delivery mechanism 55.

[0058] The running unit 60 has running wheels 61 and auxiliary wheels 62. The running wheels 61 are attached to axles provided on the connecting unit 70. Two auxiliary wheels 62 are arranged in front of and behind the running wheels 61 in the running direction. The running wheels 61 are driven to rotate by the driving force of a running drive unit 73, which will be described later. The running wheels 61 roll on the running surfaces R1a, R2a, and R3a of the first overhead track R1, the second overhead track R2, and the intersection R3, causing the running vehicle 100 to travel. The running wheels 61 are rotatable around a rotation axis AX, allowing the running direction of the running vehicle 100 to be changed.

[0059] The coupling part 70 couples the upper unit 51 of the main body part 50 to the running part 60. The coupling part 70 has a support member 71, a connecting member 72, a running drive part 73, and a direction changing mechanism 74. The support member 71 rotatably supports the rotation shaft of the running wheel 61 and the rotation shaft of the auxiliary wheel 62. The connecting member 72 extends downward from the support member 71 and is connected to the upper surface 57a of the upper unit 57. The connecting member 72 is provided so as to be rotatable about a pivot axis AX. By pivoting the connecting member 72, the running wheel 61 can be pivoted about the pivot axis AX.

[0060] The traveling drive unit 73 is attached to the connecting member 72. The traveling drive unit 73 is a drive source that drives the traveling wheels 61, and may be, for example, an electric motor. The direction changing mechanism 74 has a drive source 75, a pinion gear 76, and a rack 77. The drive source 75 may be, for example, an electric motor. The pinion gear 76 is driven to rotate by the drive source 75. The rack 77 is fixed to the upper surface 51a of the upper unit 51. The rack 77 is provided in an arc shape centered on the pivot axis AX. The rack 77 has a plurality of teeth that mesh with the teeth of the pinion gear 76. As the pinion gear 76 rotates, the pinion gear 76 moves along the outer periphery of the rack 77. This movement of the pinion gear 76 rotates the connecting member 72, causing the traveling wheels 61 to rotate around the pivot axis AX. As a result, the traveling direction of the traveling vehicle 100 can be switched between the first direction D1 and the second direction D2 on the lattice track RR.

[0061] The above-described work scaffolding 1 can also be installed on the lattice track RR. As shown by the dashed-dotted line in Figure 17, the scaffolding section 10 is formed to have dimensions that fit into one square C in plan view. Therefore, by arranging the first-class scaffolding section 10A, the second-class scaffolding section 10B, and the third-class scaffolding section 10C along the first overhead track R1 or the second overhead track R2, the work scaffolding 1 shown in Figure 1 can be installed on the lattice track RR.

[0062] Fig. 19(A) is a front view showing an example of a worker U working, and Fig. 19(B) is a front view showing another example of a worker U working. The work scaffolding 1 according to this embodiment can be installed at a required location on the lattice track RR, so that the work scaffolding 1 can be installed on the -Y side of the traveling vehicle 100, as shown in Fig. 19(A). By having the worker U stand on this work scaffolding 1, the worker U can easily perform maintenance, etc. on the traveling vehicle 100. In addition, the worker U standing on the work scaffolding 1 can easily perform maintenance, etc. on the lattice track RR and incidental equipment arranged on the lattice track RR, such as a power supply device.

[0063] Furthermore, since the lattice track RR has tracks on both sides of the traveling vehicle 100, the work scaffolding 1 can be installed on both tracks. That is, as shown in FIG. 19(B), the work scaffolding 1 can be installed on both the -Y side and the +Y side of the traveling vehicle 100. By having a worker U stand on each of the two work scaffoldings 1, maintenance of the traveling vehicle 100 can be performed more efficiently. The work scaffolding 1 is attached to the lattice track RR when maintenance of the traveling vehicle 100 becomes necessary, and is removed after the work is completed. Therefore, the traveling range of the traveling vehicle 100 is not limited by the work scaffolding 1 on the lattice track RR. In other words, a wide range of movement of the traveling vehicle 100 can be secured on the lattice track RR.

[0064] It should be noted that the work scaffolding 1 is not limited to being removed after the completion of work such as maintenance. For example, after the work is completed, the work scaffolding 1 may be moved along the first overhead track R1 or the second overhead track R2, and the work scaffolding 1 may be kept on standby in an area where the movement of the traveling vehicle 100 is not hindered.

[0065] FIG. 20 is a side view showing an example of a case where the overhead track R is equipped with a storage unit 80. FIG. 21 is a front view showing an example of a case where the overhead track R is equipped with a storage unit 80. In the example shown in FIGS. 20 and 21 , the storage unit 80 is provided on the overhead track R. The storage unit 80 includes a shelf 81 and a hanging bracket 82. The shelf 81 is attached to the lower end of the hanging bracket 82 hanging from the ceiling track R. The shelf 81 can hold one or more items M. The height of the shelf 81 is set so that, when an item M is placed on the shelf 81, the upper end of the item M does not interfere with the lower end of the traveling vehicle 100 or the lower end of the work scaffolding 1. The shelf 81 is positioned above various devices installed on the floor F (see FIG. 11 ) in the factory. Therefore, the storage unit 80 does not interfere with the layout of various devices in the factory.

[0066] As shown in Figure 21, when viewed from the X direction, the hanging fittings 82 are arranged at a distance greater than the Y direction dimensions of the traveling vehicle 100 and the work scaffolding 1. Therefore, the traveling vehicle 100 can move above the shelf 81, and the work scaffolding 1 can be attached. By attaching the work scaffolding 1 above the shelf 81, the worker U can perform maintenance on the storage unit 80. The same applies when installing the storage unit 80 on the above-mentioned lattice track RR.

[0067] In the above-described embodiment, the wheel unit 20 is used as an attachment portion of the scaffolding unit 10 to the ceiling track R (lattice track RR), but this is not limiting. Other configurations may be used instead of the wheel unit 20. Figure 22 shows another example of the scaffolding unit 10, where (A) is a front view in a state in which the hook 23A is retracted, and (B) is a front view in a state in which the hook 23A is advanced. The scaffolding unit 10 shown in Figure 22 includes a hook unit 20A instead of the wheel unit 20. The hook unit 20A includes a movable portion 22A and a hook 23A.

[0068] Like the movable part 22 described above, the movable part 22A is provided on the base 21 so as to be slidable in the Y direction. The hook 23A is fixed to the upper end of the movable part 22A in a state in which it protrudes outward. When the movable part 22A of the hook unit 20A is slid in the Y direction from the retracted position P1 shown in FIG. 22(A) to the advanced position P2 shown in FIG. 22(B), the hook 23A is positioned above the running surface Ra of the ceiling track R. When the scaffolding part 10 is lowered in this state, the hook 23A rests on the running surface Ra, and the scaffolding part 10 can be attached in a state in which it is suspended from the ceiling track R.

[0069] As described above, according to the work scaffolding 1 of this embodiment, the multiple scaffolding sections 10 are each detachable from the ceiling track R (lattice track RR), so the work scaffolding 1 can be installed at a required position on the ceiling track R and can be removed from the ceiling track R when it is no longer needed. This eliminates the need to install the work scaffolding 1 over a wide area, reducing the impact on the layout of various devices within a manufacturing plant. Furthermore, for example, by installing the work scaffolding 1 near the target location of the traveling vehicle 100 or the ceiling track R, the distance from the scaffolding to the target location of the traveling vehicle 100 or the ceiling track R can be shortened. As a result, the distance that workers must travel on the work scaffolding 1 is shortened, reducing the burden on the workers and allowing for efficient repairs, maintenance, etc. of the traveling vehicle 100 or the ceiling track R.

[0070] Although the embodiments of the present invention have been described above, the technical scope of the present invention is not limited to the above-described embodiments. It will be apparent to those skilled in the art that various modifications and improvements can be made to the above-described embodiments. Furthermore, forms incorporating such modifications or improvements are also within the technical scope of the present invention. One or more of the requirements described in the above-described embodiments may be omitted. Furthermore, the requirements described in the above-described embodiments may be combined as appropriate. Furthermore, the execution order of each operation shown in the embodiments can be implemented in any order as long as the results of a previous operation are not used in a subsequent operation. Furthermore, even if the operations in the above-described embodiments are described using terms such as "first," "next," and "subsequently" for convenience, this order is not required. Furthermore, to the extent permitted by law, the disclosures of Japanese Patent Application No. 2023-169156 and all documents cited in the above-described embodiments are incorporated herein by reference.

[0071] C: Grid D1: First direction D2: Second direction P1: Retreat position P2: Advance position R: Overhead track RR: Lattice track (overhead track) R1: First overhead track R2: Second overhead track R3: Intersection Ra, R1a, R2a, R3a: Running surface SYS: Traveling vehicle system U, U1, U2: Worker 1: Work scaffolding 10: Scaffolding section 10A: First type scaffolding section 10B: Second type scaffolding section 10C: Third type scaffolding section 14: Fall prevention member 15: Passageway 16: Connection section 17: Opening / closing section 18: Fixed section 19: Brake 20: Wheel unit 23: Wheel 30: Ladder 100: Traveling vehicle

Claims

1. A work platform comprising multiple detachable scaffolding sections on an overhead track over which a vehicle travels, Each of the aforementioned multiple scaffolding sections has a passageway that workers can walk on and pass through. A work scaffold in which the passageway is continuous in the scaffolding section that is attached to the ceiling track adjacent to the scaffolding section.

2. Each of the aforementioned plurality of scaffolding sections is equipped with a wheel unit that includes wheels that roll on the running surface on which the vehicle travels in the overhead track, The scaffolding portion is mounted on the ceiling track by the wheels riding on the running surface, as described in claim 1.

3. The work platform according to claim 2, wherein the wheel unit is movable between an extended position in which the wheels are positioned above the running surface and a retracted position in which the wheels are moved away from above the running surface.

4. The work scaffolding according to claim 3, wherein the wheel unit is movable between the extended position and the retracted position by sliding in a direction perpendicular to the direction in which the ceiling track extends.

5. The scaffolding portion is equipped with a brake that restricts the movement of the scaffolding portion along the ceiling track, as described in claim 2.

6. The work scaffolding according to claim 1, wherein the scaffolding section is provided with a connecting section that connects to an adjacent scaffolding section mounted on the ceiling track.

7. Each of the aforementioned multiple scaffolding sections has an external shape that is either a rectangular parallelepiped or substantially rectangular parallelepiped. The work scaffolding according to claim 1, wherein the plurality of scaffolding sections include a first type scaffolding section having fall prevention members on only three sides, and a second type scaffolding section having fall prevention members on only two opposing sides.

8. The work scaffolding according to claim 7, wherein the fall prevention member is a plurality of rod-shaped bodies that are spaced apart vertically and extend along the passage.

9. The work scaffolding according to claim 7, wherein the plurality of scaffolding sections include a third type scaffolding section which is provided with the fall prevention member on only two opposing sides and has an opening / closing section on the side without the fall prevention member to switch whether or not workers can enter the passage.

10. The work scaffold according to claim 9, wherein the third type of scaffold section is provided with a fixing section for fixing a ladder to the side surface having the opening and closing section.

11. Ceiling track and A vehicle that travels on the aforementioned overhead track, A vehicle system comprising a work platform according to any one of claims 1 to 10.

12. The ceiling track is a grid-like track extending in a first direction and in a second direction perpendicular to the first direction, The vehicle system according to claim 11, wherein the vehicle is movable from one of the squares of the grid-like track toward the first direction or the second direction.