Substrate support for a substrate processing chamber

Description

[0001] FIG. 1 is a top isometric view of a substrate support for a substrate processing chamber, showing our new design.

[0002] FIG. 2 is a top plan view thereof.

[0003] FIG. 3 is the top plan view thereof shown in FIG. 2, further showing section line 9-9.

[0004] FIG. 4 is a bottom plan view thereof.

[0005] FIG. 5 is a front elevation view thereof.

[0006] FIG. 6 is a back elevation view thereof.

[0007] FIG. 7 is a left elevation view thereof.

[0008] FIG. 8 is a right elevation view thereof; and,

[0009] FIG. 9 is an enlarged cross-sectional view taken along line 9-9 in FIG. 3.

[0010] The dashed lines in FIGS. 1-9 represent portions of the substrate support for a substrate processing chamber that form no part of the claimed design.

Claims

The ornamental design for a substrate support for a substrate processing chamber, as shown and described.

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