Component holding head and component supply device

Abstract

Provided are a component holding head and a component supply device with which it is possible to miniaturize a selector for selecting a component holding member, while increasing the number of selectable component holding members.　This component holding head comprises: a plurality of component holding members for holding a component; a slider drive source; a slide member that slides and moves in a predetermined direction on the basis of the driving of the slider drive source; a selector drive source; and a first selector and a second selector that are attached to the slide member and move in a predetermined direction together with the slide member, and that are rotatably attached to the slide member and rotate on the basis of the driving of the selector drive source. Depending on the rotational position of a first select part provided in the first selector and a second select part provided in the second selector, one component holding member among the plurality of component holding members is held by the first select part or the second select part.

Description

Component holding head and component supply device

[0001] The present disclosure relates to a component holding head including a plurality of component holding members for holding components, and a component supplying device.

[0002] Conventionally, technologies for selecting an arbitrary component holder from among multiple component holders have been proposed. For example, Patent Document 1 below describes a head lifting device that uses a lifting member to select one mounting head from multiple mounting heads (suction nozzles) that hold components. The lifting member of the head lifting device is provided with a lifting piece that rotates integrally. Each of the multiple mounting heads is provided with a pressure-receiving piece that is pressed by the lifting piece. The lifting member rotates based on the drive of a head selection motor, and by rotating the lifting piece, the pressure-receiving piece that is pressed is changed. The head lifting device also includes a Z-axis servo motor that raises and lowers the lifting member.

[0003] JP 2018-186150 A (FIG. 2, FIG. 11, paragraph 0099)

[0004] In the head lifting device of the above-mentioned Patent Document 1, in the configuration shown in Fig. 2, one lifting member is used to select one mounting head from four mounting heads arranged around the lifting member. Also, in the configuration using two lifting members shown in Fig. 11, two mounting heads located at the same rotational position are selected together from the four mounting heads arranged around each lifting member. In such a configuration, if it is desired to select one mounting head from multiple mounting heads, increasing the number of mounting heads available for selection poses a problem: it is necessary to increase the rotation radius of the lifting piece, increase the length of the circumference around which the lifting piece rotates, and ensure space for arranging the pressure-receiving piece.

[0005] The present disclosure has been made in consideration of such circumstances, and aims to provide a component holding head and a component supply device that can increase the number of selectable component holding members while miniaturizing the selector that selects the component holding member.

[0006] In order to solve the above-mentioned problems, this specification discloses a component holding head comprising: a plurality of component holding members for holding components; a slider drive source; a slide member that slides in a predetermined direction based on the drive of the slider drive source; a selector drive source; and a first selector and a second selector that are attached to the slide member and move in the predetermined direction together with the slide member, are rotatably attached to the slide member, and rotate based on the drive of the selector drive source, wherein one of the component holding members is held by the first selector or the second selector depending on the rotational positions of a first selector section provided on the first selector and a second selector section provided on the second selector.

[0007] Furthermore, the contents of the present disclosure are not limited to being implemented as a component holding head, but are also extremely effective when implemented as a component supply device equipped with a component holding head.

[0008] According to the present disclosure, the first and second selectors can be rotated by driving a selector drive source, thereby changing the rotational positions of the first and second selectors and changing the selector being held. Then, the slide drive source can move the slide member in a predetermined direction, thereby moving the first and second selectors in the predetermined direction and moving the component holders held by the selectors. This configuration allows selectable component holders to be allocated and arranged to each of the first and second selectors. This allows the component holders and the selectors to be arranged closer together than in a configuration in which a single selector is used to select a component holder. As a result, the first and second selectors can be made smaller, thereby enabling the overall size of the first and second selectors to be reduced.

[0009] 11 is a perspective view of a die supply device of a first embodiment. FIG. 12 is a block diagram of a die supply device. FIG. 13 is a perspective view of a flip mechanism, a transfer mechanism, and a nozzle station mechanism. FIG. 14 is a perspective view of a flip mechanism. FIG. 15 is a perspective view of a transfer mechanism, a shuttle mechanism, and a nozzle station mechanism. FIG. 16 is a perspective view of a transfer mechanism seen from below. FIG. 17 is a perspective view of a shuttle mechanism seen from above. FIG. 18 is a perspective view of a transfer head. FIG. 19 is a cross-sectional view taken along line A-A shown in FIG. 8. FIG. 19 is a top view of a transfer head. FIG. 20 is a cross-sectional view taken along line B-B shown in FIG. 21 is an enlarged view of FIG. 22, showing an example of the order of selected second nozzle mounting units. FIG. 23 is a view showing the arrangement of second nozzle mounting units in a second embodiment. FIG. 24 is a view showing the arrangement of second nozzle mounting units in a third embodiment.

[0010] A die supply device according to a first embodiment of the component supply device of the present disclosure will now be described with reference to the drawings. FIG. 1 shows a perspective view of a die supply device 10 according to this embodiment. FIG. 2 shows a block diagram of the die supply device 10. As shown in FIG. 1, the die supply device 10 includes a main body 11 and a wafer supply unit 12. Note that FIG. 1 illustrates the cover of the main body 11 with a dashed line, and does not illustrate the cover of the wafer supply unit 12. In the following description, the front-rear direction (or Y-axis direction), left-right direction (or X-axis direction), and up-down direction (or Z-axis direction) are used from the perspective of a user looking at the die supply device 10 from the front, as shown in FIG. 1. The front-rear direction and left-right direction are directions parallel to the plane of a substrate transported by a substrate transport unit 14, which will be described later.

[0011] The wafer supply unit 12 is detachably attached to the front end of the device body 11. When attached to the device body 11, the wafer supply unit 12 supplies dies (wafer components) 22 from a die assembly 21 under the control of a control device 19 (see FIG. 2 ) of the device body 11. The wafer supply unit 12 supplies dies 22 to the flip mechanism 15 and the transfer mechanism 16 of the device body 11 and includes a magazine 24 capable of storing multiple wafer frames 23. The wafer frame 23 is, for example, a member for fixing a dicing sheet to which a die assembly 21 is attached in a flat plate shape, and multiple wafer frames 23 are stored in the magazine 24. The die assembly 21 is formed, for example, by dicing a wafer to which a dicing sheet is attached. The manufacturing process for the die assembly 21 is not limited to the above-described method. For example, a dicing sheet may be attached to a wafer that has been diced (half-cut) in the thickness direction, and the back surface may be polished, after which the dicing sheet is removed and the die assembly 21 is separated using a laser or the like. That is, the die assembly 21 may be an assembly of dies 22 obtained by dicing a wafer, and the manufacturing process and supply method thereof are not limited. Also, the die assembly 21 may be peeled off from the dicing sheet when stored in the magazine 24, with multiple dies 22 arranged side by side.

[0012] The wafer supply unit 12 includes a wafer frame drawer mechanism 31 (see FIG. 2 ) that unloads a desired wafer frame 23 from the magazine 24. The wafer frame drawer mechanism 31 has, for example, an electromagnetic motor 31A (see FIG. 2 ) as a drive source. The electromagnetic motor 31A is driven under the control of the control device 19 to unload a desired wafer frame 23 from among the multiple wafer frames 23 stored in the magazine 24. The wafer frame drawer mechanism 31 moves the desired wafer frame 23 in the forward and backward directions, moving the wafer frame 23 between the storage position P1 and the die supply position P2. The drive source of the wafer frame drawer mechanism 31 is not limited to the electromagnetic motor 31A, but may be another motor such as a linear motor. Alternatively, the drive source may be a fluid pressure cylinder such as an air cylinder or a hydraulic cylinder. Therefore, the drive source is not limited to a motor. The same applies to the drive sources of other devices and mechanisms.

[0013] The storage position P1 is a position (position within the magazine 24) where the wafer frame 23 (die assembly 21) is stored in the magazine 24. The die supply position P2 is a position where the die 22 is sucked from the die assembly 21 by the first suction nozzle 43 (see FIG. 4 ) of the flip mechanism 15. The wafer frame pull-out mechanism 31 moves the wafer frame 23 placed at the die supply position P2 in the left-right direction to replace the die 22 placed below the first suction nozzle 43 of the flip mechanism 15. The wafer frame pull-out mechanism 31 also includes, for example, a push-up mechanism (not shown) that drives pins that push up from below the attached portion of the die 22 sucked by the first suction nozzle 43 of the die assembly 21, and a pot (not shown) that sucks the dicing sheet during the push-up, and peels the desired die 22 from the dicing sheet and supplies it to the first suction nozzle 43.

[0014] The die supply device 10 also includes a parts camera 29 that captures images of the dies 22 arranged in the die assembly 21 from above. The parts camera 29 outputs captured image data to the control device 19 (see FIG. 2). Based on the image data from the parts camera 29, the control device 19 confirms the positions of the dies 22 that are sucked by the flip mechanism 15 and the transfer mechanism 16, and corrects any positional errors.

[0015] The device main body 11 is also equipped with a substrate transport unit 14, a flip mechanism 15, a transfer mechanism 16, a shuttle mechanism 17, and a nozzle station mechanism 18. The substrate transport unit 14 is a device that transports a substrate (not shown) on which a die 22 is mounted. The substrate transport unit 14 has, for example, two lanes aligned in the front-to-rear direction, and transports substrates on each lane. The die supply device 10 is connected to an upstream device and a downstream device in the substrate production line, and can connect the lanes of the substrate transport unit 14. The substrate transport unit 14 transports substrates transported from the upstream device to the downstream device on each lane.

[0016] Fig. 3 shows a perspective view of the flip mechanism 15, the transfer mechanism 16, and the nozzle station mechanism 18. Fig. 4 shows an enlarged view of the flip mechanism 15. Fig. 3 and Fig. 5, which will be described later, show a state in which the wafer frame 23 has been removed from the wafer frame pull-out mechanism 31. Fig. 4 also shows a schematic diagram of the die 22 of the die assembly 21.

[0017] (Regarding the Flip Mechanism 15) As shown in FIGS. 2 to 4, the flip mechanism 15 is disposed above the die assembly 21 disposed at the die supply position P2 and the nozzle station mechanism 18. The flip mechanism 15 includes a Y-axis slide mechanism 33, a Z-axis slide mechanism 34, and a flip head 35. The Y-axis slide mechanism 33 includes a Y-axis slide rail 33A and a Y-axis slider 33B. The Y-axis slide rail 33A is provided on the left side of the Y-axis slide mechanism 33 and is a rail extending parallel to the front-rear direction. The Y-axis slider 33B is held by the Y-axis slide rail 33A so as to be slidable in the Y-axis direction (front-rear direction). The Y-axis slide mechanism 33 includes an electromagnetic motor 33C (see FIG. 2) and drives the electromagnetic motor 33C under the control of the control device 19 to move the Y-axis slider 33B to any position in the front-rear direction.

[0018] The Z-axis slide mechanism 34 has a Z-axis slide rail 34A and a Z-axis slider 34B. The Z-axis slide rail 34A is a rail provided on the left side surface of the Y-axis slider 33B and extends in a direction parallel to the vertical direction. The Z-axis slider 34B is held by the Z-axis slide rail 34A so that it can slide in the Z-axis direction (vertical direction). The Z-axis slide mechanism 34 has an electromagnetic motor 34C (see FIG. 2 ) and drives the electromagnetic motor 33C under the control of the control device 19 to move the Z-axis slider 34B to any position in the vertical direction.

[0019] A swing motor 38 that swings the flip head 35 is attached to the left side surface of the Z-axis slider 34B. The swing motor 38 is, for example, an electromagnetic motor, and is driven under the control of the control device 19 to rotate an output shaft 38A. The flip head 35 is attached to the tip of the output shaft 38A and rotates based on the drive of the swing motor 38. The swing motor 38 swings the flip head 35, for example, around an axis that is parallel to the front-to-rear direction (Y-axis direction) as its rotation axis.

[0020] The flip head 35 is provided with a pair of first nozzle mounting portions 41. One first suction nozzle 43 can be mounted to each of the pair of first nozzle mounting portions 41. Therefore, two first suction nozzles 43 can be mounted to the flip head 35. The number of first nozzle mounting portions 41 provided to the flip head 35 and the number of first suction nozzles 43 mountable to the flip head 35 are not limited to two, and may be one, three, or more. Furthermore, the first suction nozzle 43 is replaceable with a replacement first suction nozzle 43 housed in a nozzle station 61 of the nozzle station mechanism 18. Similarly, a second suction nozzle 56 of the transfer head 54 (described later) is replaceable with a second suction nozzle 56 housed in the nozzle station 61.

[0021] The die supply device 10 includes a pressure supply device 27 (see FIG. 2 ) that supplies air at a predetermined pressure to each device. Each of the pair of first nozzle mounting portions 41 is connected to the pressure supply device 27. The first suction nozzle 43, for example, receives negative pressure from the pressure supply device 27 via the first nozzle mounting portion 41 to suction the die 22, and receives positive pressure from the pressure supply device 27 to release the suctioned die 22. As described above, the flip head 35 is attached to the Z-axis slider 34B via the rotation motor 38. Therefore, the flip head 35 can be moved to any position in the front-to-back and up-to-down directions based on the drive of the Y-axis slide mechanism 33 and the Z-axis slide mechanism 34. Furthermore, as described above, the wafer frame pull-out mechanism 31 can move the wafer frame 23 positioned at the die supply position P2 in the left-to-right direction. This allows the flip head 35 to suction a desired die 22 from the die assembly 21 using the first suction nozzle 43.

[0022] The pair of first nozzle mounting parts 41 are provided at rotational positions offset by 180 degrees in the rotational direction (circumferential direction) of the flip head 35. When one of the pair of first nozzle mounting parts 41 faces upward, the other first nozzle mounting part 41 faces downward. The first nozzle mounting part 41 picks up the die 22 from the die assembly 21 with its tip facing downward. The die 22 picked up by the first nozzle mounting part 41 is reversed (flipped) by, for example, rotating the flip head 35 180 degrees, so that the non-mounting surface faces upward. The transfer mechanism 16 acquires the die 22 from the first nozzle mounting part 41 facing upward.

[0023] (Regarding the Transfer Mechanism 16) Next, the transfer mechanism 16 will be described. Fig. 5 shows a perspective view of the transfer mechanism 16, the shuttle mechanism 17, and the nozzle station mechanism 18. Fig. 6 shows a perspective view of the transfer mechanism 16 as seen from below. As shown in Figs. 3, 5, and 6, the transfer mechanism 16 is disposed behind the flip mechanism 15. The transfer mechanism 16 includes an X-axis slide mechanism 51, a Y-axis slide mechanism 52, a Z-axis slide mechanism 53, and a transfer head 54.

[0024] The Y-axis slide mechanism 52 includes a pair of Y-axis slide rails 52A and a Y-axis slider 52B. The pair of Y-axis slide rails 52A are respectively provided at the upper part of the device main body 11 in the left-right direction. The pair of Y-axis slide rails 52A are arranged parallel to each other with a predetermined gap between them in the left-right direction, and each extends in a direction parallel to the front-rear direction. The Y-axis slider 52B extends in the left-right direction, straddling both of the pair of Y-axis slide rails 52A. Each of the left-right ends of the Y-axis slider 52B is held by the pair of Y-axis slide rails 52A. Therefore, the Y-axis slider 52B is held by the pair of Y-axis slide rails 52A so that it can slide in the front-rear direction. The Y-axis slide mechanism 52 includes an electromagnetic motor 52C (see FIG. 2 ). The electromagnetic motor 52C is driven under the control of the control device 19 to move the Y-axis slider 52B to any position in the front-rear direction.

[0025] The X-axis slide mechanism 51 is attached to the Y-axis slider 52B and has an X-axis slide rail 51A and an X-axis slider 51B. The X-axis slide rail 51A is a rail provided on the front surface of the Y-axis slider 52B and extends in a direction parallel to the left-right direction. The X-axis slider 51B is held by the X-axis slide rail 51A so that it can slide in the X-axis direction (left-right direction). The X-axis slide mechanism 51 has an electromagnetic motor 51C (see FIG. 2 ) and drives the electromagnetic motor 51C under the control of the control device 19 to move the X-axis slider 51B to any position in the left-right direction.

[0026] Similarly, the Z-axis slide mechanism 53 has a Z-axis slide rail 53A and a Z-axis slider 53B. The Z-axis slide rail 53A is a rail provided on the front surface of the X-axis slider 51B and extends in a direction parallel to the vertical direction. The Z-axis slider 53B is held by the Z-axis slide rail 53A so as to be slidable in the Z-axis direction, and can be moved to any position in the vertical direction based on the drive of an electromagnetic motor 53C (see FIG. 2).

[0027] A transfer head 54 is attached to the front surface of the Z-axis slider 53B. Therefore, the transfer head 54 can be moved to any position in the front-rear, left-right, and up-down directions based on the driving of the X-axis slide mechanism 51, the Y-axis slide mechanism 52, and the Z-axis slide mechanism 53. The transfer head 54 is provided with multiple second nozzle mounting portions 55. In this embodiment, the transfer head 54 is provided with eight second nozzle mounting portions 55. The eight second nozzle mounting portions 55 are, for example, arranged in two rows of four second nozzle mounting portions 55 aligned in the left-right direction at a predetermined pitch. A second suction nozzle 56 is detachably attached to each of the eight second nozzle mounting portions 55. The transfer head 54 uses the eight second suction nozzles 56 to suction the die 22 inverted by the flip head 35 from the first suction nozzle 43. Alternatively, for dies 22 that are not flipped, the transfer and placement head 54 directly picks up the dies 22 from the die assembly 21 using the second suction nozzles 56. The transfer and placement head 54 supplies the dies 22 picked up by the second suction nozzles 56 to the shuttle mechanism 17. Note that the number of second nozzle mounting units 55 provided on the transfer and placement head 54, the arrangement of the second nozzle mounting units 55, and the number of second suction nozzles 56 that can be mounted on the transfer and placement head 54 are merely examples.

[0028] Each of the plurality of second nozzle mounting parts 55 is connected to the pressure supply device 27 (see FIG. 2). Like the first suction nozzle 43, the second suction nozzle 56 is supplied with negative pressure via the second nozzle mounting part 55 to suction the die 22, and is supplied with positive pressure to detach the suctioned die 22. The transfer head 54 is also provided with a nozzle switching mechanism (see FIGS. 8 and 9) that individually raises and lowers the plurality of second nozzle mounting parts 55. The nozzle switching mechanism will be described in detail later.

[0029] (Regarding the Shuttle Mechanism 17) As shown in Fig. 5, the shuttle mechanism 17 is disposed above the wafer frame pull-out mechanism 31 and below the transfer mechanism 16 in the vertical direction. As shown in Fig. 7, the shuttle mechanism 17 has an X-axis slide rail 17A and an X-axis slider 17B. The X-axis slide rail 17A is a rail that extends parallel to the left-right direction. The X-axis slider 17B is held by the X-axis slide rail 17A so that it can slide in the left-right direction. The shuttle mechanism 17 moves the X-axis slider 17B, for example, in the left-right direction based on the drive of an electromagnetic motor 17C, between a receiving position P5 and a delivery position P6.

[0030] The receiving position P5 is the left end of the X-axis slide rail 17A and is the position where the die 22 is received from the second suction nozzle 56 of the transfer head 54. The transfer position P6 is the right end of the X-axis slide rail 17A. As shown in FIG. 1 , the right end of the X-axis slide rail 17A protrudes rightward from an opening formed on the right side of the device main body 11 and is located outside the device main body 11. For example, a component mounting device (not shown) is located on the right side of the die supply device 10. This component mounting device loads a substrate from the substrate transport unit 14 of the die supply device 10, receives a die 22 supplied from the shuttle mechanism 17 of the die supply device 10 at the transfer position P6, and mounts the die 22 on the loaded substrate.

[0031] As shown in FIG. 7 , a shuttle 17D is attached to the upper surface of the X-axis slider 17B. The shuttle 17D is, for example, a metal plate, and is attached to the X-axis slider 17B with its flat surface facing upward. A plurality of intake ports 17E are formed in the shuttle 17D. The intake ports 17E are formed at positions corresponding to the positions of the eight second suction nozzles 56 of the transfer head 54, for a total of eight intake ports 17E. The eight intake ports 17E are arranged in two rows in the front-to-rear direction, with four intake ports 17E aligned in the left-to-right direction to match the positions of the eight second suction nozzles 56. Each of the eight intake ports 17E is connected to the pressure supply device 27 (see FIG. 2 ). When receiving a die 22 from the second suction nozzle 56, negative pressure is supplied from the pressure supply device 27 to suck the die 22.

[0032] (Regarding the Nozzle Station Mechanism 18) Next, the nozzle station mechanism 18 will be described. As shown in FIGS. 3 and 5, the nozzle station mechanism 18 has a nozzle station 61 attached to the upper end of a main body 18A. The main body 18A is provided with an elevator 18B (see FIG. 2). The elevator 18B includes, for example, an electromagnetic motor or a ball screw mechanism, and slides the nozzle station 61 in a direction parallel to the up-down direction under the control of the control device 19 to change the height of the nozzle station 61. The nozzle station 61 accommodates a replaceable first suction nozzle 43 and a replaceable second suction nozzle 56. The first and second suction nozzles 43, 56 may be interchangeable. That is, the second suction nozzle 56 may be attachable to the first nozzle attachment portion 41, and the first suction nozzle 43 may be attachable to the second nozzle attachment portion 55.

[0033] When replacing the first and second suction nozzles 43 and 56, the control device 19, for example, drives the wafer frame withdrawing mechanism 31 to move the die assembly 21 to the storage position P1 and store it in the magazine 24, and then drives the elevator 18B to raise the nozzle station 61. The control device 19 drives the flip mechanism 15 to replace the first suction nozzle 43, drives the transfer mechanism 16 to replace the second suction nozzle 56, and then drives the elevator 18B to lower the nozzle station 61. The control device 19 drives the wafer frame withdrawing mechanism 31 to place the desired die assembly 21 at the die supply position P2, and then starts supplying the die 22. Note that the nozzle station 61 may be located at a position other than below the die assembly 21 placed at the die supply position P2, for example, on the right or left side of the die assembly 21 placed at the die supply position P2. That is, the nozzle station 61 may be located at a position that does not interfere with the movement of the die assembly 21 by the wafer frame withdrawing mechanism 31. In this case, the die supply device 10 does not need to include the lifting unit 18B. Also, the die supply device 10 may not have the nozzle station mechanism 18 or the nozzle station 61. In other words, the first and second suction nozzles 43, 56 may not be interchangeable.

[0034] (Regarding the Transfer Head 54) Next, the transfer head 54 will be described. The transfer head 54 is equipped with a nozzle switching mechanism that individually changes the vertical positions of multiple second nozzle mounting units 55 to change the vertical position of any second suction nozzle 56 and switch the second suction nozzle 56 that picks up or removes the die 22. More specifically, FIG. 8 shows a perspective view of the transfer head 54. Note that FIG. 8 omits the illustration of some components, such as the cover 54A that covers the front of the transfer head 54 shown in FIG. 6. FIG. 9 shows a cross-sectional view taken along line A-A in FIG. 8. FIG. 10 shows a top view of the transfer head 54. As shown in FIGS. 8 to 10, the transfer head 54 includes a slider motor 63, a selector motor 64, a slide member 65, a first selector 66, and a second selector 67 in addition to the eight second nozzle mounting units 55.

[0035] The slider motor 63 and the selector motor 64 are, for example, servo motors, each attached to the right side of the transfer head 54, and controlled by the control device 19. The slide member 65 slides up and down based on the drive of the slider motor 63. The first and second selectors 66, 67 rotate based on the drive of the selector motor 64. Note that the drive source for sliding the slide member 65 (the slide drive source of the present disclosure) and the drive source for rotating the first and second selectors 66, 67 (the selector drive source of the present disclosure) are not limited to servo motors, and may be other types of motors such as stepping motors or linear motors. Alternatively, each drive source is not limited to a motor, and may be a drive source other than a motor, such as an air cylinder or a hydraulic cylinder.

[0036] The slider motor 63 is attached to the rear of the selector motor 64. The slider motor 63 is attached to the right side surface of the main body 69 of the transfer head 54 with its output shaft, a first output shaft 63A, protruding upward. The first output shaft 63A rotates around an axis of rotation that is parallel to the up-down direction. A pulley 63B is attached to the tip of the first output shaft 63A. The pulley 63B rotates together with the first output shaft 63A.

[0037] The transfer head 54 is also provided with a ball screw mechanism 71. The ball screw mechanism 71 converts the rotational motion of the slider motor 63 into linear motion of the slide member 65. The ball screw mechanism 71 includes a screw shaft 71A, a pulley 71B, and a nut 71C. The screw shaft 71A is, for example, a rod-shaped member made of metal, and has a screw groove (not shown) formed on its outer circumferential surface. The screw shaft 71A is located on the rear side, approximately in the center of the main body 69 in the left-right direction. The screw shaft 71A is rotatably held by a bearing member 73 attached to the main body 69, and rotates around an axis of rotation parallel to the up-down direction. The bearing member 73 is, for example, a ball bearing. Note that the bearing member 73 is not limited to a ball bearing, and may be another member capable of rotatably holding a shaft, such as a roller bearing. The same applies to the other bearing members described below.

[0038] The pulley 71B is attached to the upper end of the screw shaft 71A and rotates together with the screw shaft 71A. An endless belt 75 is looped between the two pulleys 63B, 71B. Therefore, the rotational driving force of the slider motor 63 is transmitted to the screw shaft 71A via the pulleys 63B, 71B and the endless belt 75, causing the screw shaft 71A to rotate. The nut 71C is threadedly engaged with the screw shaft 71A via a metal ball (not shown), and moves up and down depending on the direction of rotation of the screw shaft 71A.

[0039] The slide member 65 is a plate-shaped member having a predetermined thickness in the vertical direction and is housed within the main body 69. The screw shaft 71A is provided so as to penetrate the center of the slide member 65 in the left-right direction in the vertical direction. The nut 71C is attached to the center of the slide member 65 in the left-right direction and is threadedly engaged with the screw shaft 71A. Therefore, when the nut 71C moves up and down as the screw shaft 71A rotates, the slide member 65 slides up and down together with the nut 71C. A stopper 71D is attached to the lower end of the screw shaft 71A to prevent the slide member 65 from coming off.

[0040] The transfer head 54 also includes a first selector shaft 77 that rotates the first selector 66 and a second selector shaft 78 that rotates the second selector 67. The first and second selector shafts 77, 78 are, for example, cylindrical metal members and are positioned so as to sandwich the threaded shaft 71A between them in the left-right direction. The first selector shaft 77 is located to the left of the threaded shaft 71A and is rotatable relative to the main body 69 via a bearing member 81, rotating around an axis of rotation parallel to the up-down direction. The first selector shaft 77 is also attached to the slide member 65 via a bearing member 82 and is rotatable relative to the slide member 65. The bearing member 82 is attached to the slide member 65 to the left of the nut 71C.

[0041] The first selector 66 is, for example, a substantially cylindrical member having a small diameter portion 66A and a large diameter portion 66B. The small diameter portion 66A has a substantially cylindrical shape with an outer diameter shorter than that of the large diameter portion 66B, and is provided on top of the large diameter portion 66B. The first selector 66 is attached to the bearing member 82 with the small diameter portion 66A inserted. Therefore, the first selector 66 moves up and down together with the slide member 65 in a state in which it can rotate relative to the slide member 65. A first selector shaft 77 is inserted into the small diameter portion 66A.

[0042] The large-diameter portion 66B is connected to the lower end of the small-diameter portion 66A and has a generally cylindrical shape with a longer outer diameter than the small-diameter portion 66A. The first selector shaft 77 is inserted into the large-diameter portion 66B via a slide shaft 83 provided therein. The slide shaft 83 is, for example, a ball spline, which circulates a number of balls enclosed within a cylindrical member and transmits the rotational motion of the first selector shaft 77 to the large-diameter portion 66B (first selector 66), smoothly sliding the first selector 66 in the axial direction (up and down) relative to the first selector shaft 77. Therefore, the first selector 66 rotates together with the first selector shaft 77 and slides together with the slide member 65. In addition, a first selector portion 66C (see FIG. 8) is provided at the lower end of the large-diameter portion 66B. The first selector portion 66C is a member that holds the second nozzle mounting portion 55 and moves and rotates together with the first selector 66.

[0043] Next, the second selector shaft 78 will be described. The configuration of the second selector shaft 78 is the same as the configuration of the first selector shaft 77 described above, and therefore the description thereof will be omitted where appropriate. The second selector shaft 78 is provided to the right of the threaded shaft 71A, and is attached to the main body 69 via a bearing member 85, and is attached to the slide member 65 via a bearing member 86. The threaded shaft 71A is provided at a position that is the midpoint between the first and second selector shafts 77, 78 in the left-right direction.

[0044] The second selector 67 has the same shape as the first selector 66 and includes a small-diameter portion 67A and a large-diameter portion 67B. The first selector 66 is attached with the small-diameter portion 67A inserted into a bearing member 86 attached to the right side of the nut 71C. The second selector shaft 78 is inserted into the large-diameter portion 67B via a slide shaft 87 provided inside. Therefore, the second selector 67 rotates together with the second selector shaft 78 and also slides together with the slide member 65. A second selector portion 67C is provided at the lower end of the large-diameter portion 67B. The second selector portion 67C moves and rotates together with the second selector 67. Details of the first and second selector portions 66C, 67C will be described later.

[0045] The selector motor 64 is attached in front of the slider motor 63. The selector motor 64 is attached to the right side surface of the main body 69 with its output shaft, a second output shaft 64A, protruding upward. The second output shaft 64A rotates around an axis of rotation that is parallel to the vertical direction. A pulley 64B is attached to the tip of the second output shaft 64A. The pulley 64B is positioned below the pulley 63B of the slider motor 63 in the vertical direction.

[0046] A pulley 89 is attached to the upper end of the first selector shaft 77. A pulley 90 is attached to the upper end of the second selector shaft 78. Two pulleys 91 and 92 are provided on the upper surface of the main body 69. The pulleys 91 and 92 are rotatable around a rotation axis parallel to the vertical direction. An endless belt 93 is wound around the four pulleys 89-92 and the pulley 64B of the selector motor 64. Therefore, the first and second selector shafts 77 and 78 are rotated by the rotational driving force of the selector motor 64 transmitted via the pulley 64B and the endless belt 93. The pulleys 89 and 90 are disposed inside the endless belt 93 and have the same outer diameter. Therefore, the first and second selector shafts 77 and 78 rotate in the same direction at the same rotational speed, i.e., rotate synchronously. The first and second selector sections 66C and 67C also rotate synchronously. Furthermore, the first selector 66C and the second selector 67C rotate synchronously while maintaining the relationship (phase) between their rotational positions. In this embodiment, the first selector 66C is disposed at a rotational position that is shifted by 45 degrees relative to the second selector 67C in the rotational direction (see FIG. 11). Therefore, the first and second selector sections 66C, 67C rotate in the same rotational direction at the same rotational speed while maintaining the 45-degree shift in their rotational positions.

[0047] The pulley 91 is disposed in front of the first selector shaft 77 and to the left of the pulley 64B, and is in contact with the endless belt 93 from the inside. The pulley 92 is disposed between the screw shaft 71A and the second selector shaft 78 in the left-right direction. The pulley 92 is also disposed in front of the pulleys 71B, 89, and 90 in the front-rear direction, and behind the shaft 95A of the pulley 91 and the second output shaft 64A. The pulley 92 is in contact with the endless belt 93 from the outside (rear side). The endless belt 93 is disposed below the endless belt 75.

[0048] As shown in Figures 8 and 10, the endless belt 93 is routed around the pulleys 89-92 and 64A, avoiding the pulleys 71B, 63B, and the endless belt 75. The endless belt 93 is pulled out from the left side of the pulley 90 on the second selector shaft 78, turns around the pulley 92, which is forward of the pulley 71B, and then is routed around the pulley 89 on the first selector shaft 77, which is rearward. The screw shaft 71A and pulley 71B, which are arranged between the pulleys 89 and 90 aligned laterally, are positioned outside (rearward of) the annular endless belt 93. This eliminates the need to remove the endless belt 75 when removing the endless belt 93 from the pulley 64B, etc. This makes it easier to replace the endless belt 93. In a device that operates the second nozzle mounting unit 55, such as the transfer head 54, repeated supply of dies 22 causes the endless belts 75 and 93 to deteriorate and require replacement. The longer the replacement work takes, the longer the downtime of the production of boards will be, which may result in a decrease in production efficiency. Therefore, by making it easier to replace the endless belt 93 and shortening the work time, it is possible to improve production efficiency.

[0049] As described above, the first output shaft 63A protrudes above the second output shaft 64A. The endless belt 75 is disposed above the second selector shaft 78 and is wound around the first output shaft 63A and the screw shaft 71A. By disposing the endless belt 75, which is wound around only two shafts, above the endless belt 93, replacement becomes easier. This shortens the replacement time and improves production efficiency. The same effect can be achieved by attaching the slider motor 63 to the left side of the main body 69, disposing the first output shaft 63A to the left of the first selector shaft 77, and disposing the endless belt 75 above the first selector shaft 77. Alternatively, the endless belt 75 may be disposed in the front-rear direction, not above the first and second selector shafts 77 and 78. Alternatively, the endless belt 75 may be disposed below the endless belt 93.

[0050] Additionally, a mechanism for adjusting the tension of the endless belt 93 is provided on the top surface of the main body 69. The pulley 91 is rotatably held by a holding plate 95. The holding plate 95 is a plate-shaped member having a predetermined thickness in the vertical direction and is provided at the front end on the left side of the top surface of the main body 69. The pulley 91 is rotatably held by a shaft 95A protruding upward from the holding plate 95. Two elongated holes 95B are formed in the holding plate 95, aligned in the left-right direction. The elongated holes 95B are long holes extending in the left-right direction. A bolt 97 is inserted into each of the two elongated holes 95B of the holding plate 95. The two bolts 97 are threadedly engaged with the main body 69 to fix the position of the holding plate 95. Therefore, the holding plate 95 can be moved left-right by loosening the bolt 97.

[0051] A threaded member 98 is inserted into the front end of the holding plate 95 from the left side. The selector motor 64 is attached to the main body 69 by a mounting plate 99. The mounting plate 99 is a plate-shaped member having a predetermined thickness in the vertical direction. It is fixed to the right side of the upper surface of the main body 69 and holds the selector motor 64 in a suspended manner. The threaded member 98 is, for example, a hexagon socket head bolt, and has a thread groove (not shown) formed on its outer surface. A through hole for inserting the threaded member 98 is formed in the holding plate 95 along the left-right direction, and a nut 101 is fixed to the left opening of this through hole. The threaded member 98 is, for example, threadedly engaged with the nut 101 of the holding plate 95, penetrates the holding plate 95 in the left-right direction, and the tip of the penetrated portion is in contact with the left side of the mounting plate 99. As a result, by loosening the bolt 97 and rotating the screw member 98, the retaining plate 95 moves left and right in accordance with the rotation direction of the screw member 98, changing the left-right distance between the retaining plate 95 and the mounting plate 99. The distance between the pulley 91 and the pulley 64B is changed, and the tension of the endless belt 93 is changed. A user can loosen the bolt 97, turn the screw member 98, and move the retaining plate 95 to the right to loosen the tension of the endless belt 93 and remove the endless belt 93. After replacing the endless belt 93, a user can increase the tension of the endless belt 93 by turning the screw member 98 and moving the retaining plate 95 to the left, and then tighten the bolt 97 to fix the position of the pulley 91 and complete the installation of the endless belt 93.

[0052] A mechanism for adjusting the tension of the endless belt 75 is provided at the rear end of the upper surface of the main body 69. The mechanism for adjusting the tension of the endless belt 75 has the same configuration as the mechanism for adjusting the tension of the endless belt 93 described above. Therefore, descriptions of parts similar to those of the endless belt 93 will be omitted where appropriate. The slider motor 63 is attached to the main body 69 by a mounting plate 103 and is suspended from the mounting plate 103. The mounting plate 103 has two elongated holes 103A formed therein. The mounting plate 103 is attached to the rear end of the upper surface of the main body 69 by bolts 105 inserted into the two elongated holes 103A. Therefore, the mounting plate 103 can be moved left and right by loosening the bolts 105. An insertion portion 107 is provided at the center of the rear end of the upper surface of the main body 69. The insertion portion 107 is fixed, for example, in its left and right position relative to the main body 69. A through-hole for inserting a screw member 111 is formed in the insertion portion 107, and a nut 109 is fixed to the left opening of this through-hole. The screw member 111 is screwed onto the nut 109 from the left side and passes through the insertion portion 107 in the left-right direction, with the tip of the passed-through portion contacting the left side surface of the mounting plate 103. As a result, by loosening the bolt 105 and rotating the screw member 111, the mounting plate 103 moves in the left-right direction. The distance between the mounting plate 103 and the insertion portion 107 (main body portion 69) in the left-right direction is changed. The distance between the pulley 71B and the pulley 63B is changed, and the tension of the endless belt 75 is changed.

[0053] Eight second nozzle mounting portions 55 are provided on the lower portion of the main body portion 69. In this embodiment, of the eight second nozzle mounting portions 55, the four second nozzle mounting portions 55 on the left side are selected by the first selector portion 66C, and the four second nozzle mounting portions 55 on the right side are selected by the second selector portion 67C. For this reason, in the following description, when distinguishing between the second nozzle mounting portions 55 selected by each selector portion, the second nozzle mounting portion 55 selected by the first selector portion 66C will be referred to as the second nozzle mounting portion 55A, and the second nozzle mounting portion 55 selected by the second selector portion 67C will be referred to as the second nozzle mounting portion 55B. Furthermore, when the eight second nozzle mounting portions 55 are referred to collectively, they will be referred to as the second nozzle mounting portions 55 without adding an alphabet to the reference numeral.

[0054] A nozzle holding portion 69A that holds the second nozzle mounting portions 55 is provided at the bottom of the main body portion 69. A total of eight insertion holes 69B into which each of the eight second nozzle mounting portions 55 is inserted are formed in the nozzle holding portion 69A. The insertion holes 69B are holes that penetrate the nozzle holding portion 69A in the up-down direction and have a circular cross section. As described above, the eight second nozzle mounting portions 55 are arranged in two rows in the front-to-rear direction, with four second nozzle mounting portions 55 lined up in the left-to-right direction at a predetermined pitch. Similarly, the eight insertion holes 69B are arranged in two rows in the front-to-rear direction, with four insertion holes 69B lined up in the left-to-right direction at the same pitch as the second nozzle mounting portions 55.

[0055] The second nozzle mounting portion 55 includes a nozzle main body 112, a pressed portion 113, a mounted portion 114, and an elastic member 115. The nozzle main body 112 is attached below the nozzle holding portion 69A. The nozzle main body 112 is connected to the pressure supply device 27 via piping (not shown). The pressed portion 113 is a rod-shaped member that is inserted into the insertion hole 69B from above and protrudes upward. The pressed portion 113 is slidable up and down relative to the nozzle main body 112. The mounted portion 114 is provided at the lower end of the second nozzle mounting portion 55 and is configured to allow the second suction nozzle 56 to be mounted thereon. The mounted portion 114 is slidable up and down relative to the nozzle main body 112 and moves up and down integrally with the pressed portion 113.

[0056] The upper end (head) of the pressed portion 113 is formed with a larger outer diameter than the other portions, and has an annular groove 113A (see the enlarged view in FIG. 9 ). The groove 113A is formed in an annular shape along the outer periphery of the pressed portion 113. The elastic member 115 is, for example, a compression coil spring, and its upper end engages with the upper end of the pressed portion 113 and its lower end engages with the upper surface of the nozzle main body 112. The elastic member 115 contracts when the pressed portion 113 moves downward, urging the pressed portion 113 upward.

[0057] For example, the position of the pressed portion 113 shown in FIGS. 8 and 9 indicates the upper limit position of the movable range in the vertical direction. As shown in the enlarged view of FIG. 9 , the second selector 67C has a push-up portion 116 and an engaging portion 117 provided below the push-up portion 116. The push-up portion 116 and the engaging portion 117 protrude outward from the outer peripheral surface of the second selector 67 in the radial direction of the second selector 67. The length (protrusion amount) of the engaging portion 117 in the radial direction is shorter than the length of the push-up portion 116 in the radial direction. The push-up portion 116 is provided above the engaging portion 117 with a predetermined gap therebetween in the vertical direction. For example, FIGS. 8 and 9 show the initial position of the slide member 65 in the vertical direction. When the slide member 65 is positioned in this initial position, the push-up portion 116 is positioned slightly above the upper surface of the pressed portion 113, which is positioned at the upper limit position. Furthermore, when the slide member 65 is placed in the initial position, for example, the engaging portion 117 is placed in a position where it is inserted into the groove 113A of the pressed portion 113 placed in the upper limit position. In other words, the distance between the pressing portion 116 and the engaging portion 117 is large enough to allow the upper end of the pressed portion 113 to be inserted therein.

[0058] FIG. 11 shows a cross-sectional view taken along line B-B in FIG. 9 . As shown in FIG. 11 , four second nozzle mounting portions 55B (insertion holes 69B) are arranged around the second selector 67. The four second nozzle mounting portions 55B are arranged at 90-degree intervals in the rotational direction of the second selector 67, i.e., in the rotational direction of the second selector shaft 78. When the second selector 67 is rotated with the slide member 65 in the initial position, the second selector 67C changes the rotational positions of the push-down portion 116 and the engagement portion 117 in accordance with the rotation of the second selector 67. As the second selector 67 rotates, the second selector 67C switches between a state in which the push-down portion 116 is arranged above the pressed portion 113 of any of the second nozzle mounting portions 55B, and a state in which the push-down portion 116 and the pressed portion 113 do not face each other in the vertical direction. When the push-down portion 116 is positioned above any one of the pressed portions 113, the engaging portion 117 is inserted into the groove 113A. When the push-down portion 116 and the pressed portion 113 are not opposed to each other in the vertical direction, the engaging portion 117 is not inserted into the groove 113A. Hereinafter, the state in which the push-down portion 116 is positioned above the pressed portion 113 will be referred to as a state in which the second nozzle mounting portion 55 is selected, and the state in which the push-down portion 116 and the pressed portion 113 are not opposed to each other in the vertical direction will be referred to as a state in which the second nozzle mounting portion 55 is not selected.

[0059] A flat surface that is pressed by the push-down portion 116 is formed on the upper surface of the pressed portion 113. When the slide member 65 slides downward with the second selector 67 selecting the second nozzle mounting portion 55B, the push-down portion 116 pushes the pressed portion 113 downward. This causes the second nozzle mounting portion 55B to move the mounted portion 114 downward, and the second suction nozzle 56 downward. Furthermore, when the slide member 65 moves upward to move the push-down portion 116 upward, the pressed portion 113 is urged upward by the elastic member 115 and moves to the upper limit position.

[0060] Furthermore, when the second nozzle mounting portion 55B is selected, the engaging portion 117 is inserted into the groove 113A of the pressed portion 113. Therefore, even if the pressed portion 113 does not move upward due to the biasing force of the elastic member 115 due to some malfunction, the pressed portion 113 is pulled upward by the engaging portion 117 and moves as the second selector 67 moves upward. This makes it possible to more reliably return the second nozzle mounting portion 55B to its original state. The second selector 67 does not necessarily have to be provided with the engaging portion 117.

[0061] The first selector 66 has the same configuration as the second selector 67, and when a second nozzle mounting portion 55A is selected, the pressing portion 116 is disposed above the pressed portion 113 of the selected second nozzle mounting portion 55A, and the engaging portion 117 is disposed in the groove 113A of the pressed portion 113. As shown in FIG. 11 , four second nozzle mounting portions 55A are disposed around the first selector 66. The four second nozzle mounting portions 55A are disposed at 90-degree intervals in the rotation direction of the first selector 66. The first selector 66C of the first selector 66 is disposed at a rotational position shifted by 45 degrees from the second selector 67C of the second selector 67 in the rotation direction of the first selector 66 (second selector 67), and rotates in synchronization with the second selector 67C while maintaining its phase.

[0062] Therefore, by rotating the selector motor 64, the transfer head 54 of this embodiment selects any one of the eight second nozzle mounting portions 55. Specifically, FIG. 12 is an enlarged view of FIG. 11 , showing an example of the order in which the second nozzle mounting portions 55 are selected. The numbers shown on the pressed portions 113 in FIG. 12 indicate the order in which they are selected. For example, when the first and second selectors 66 and 67 are rotated clockwise in the state shown in FIG. 12 , the second nozzle mounting portions 55 are selected in the order of numbers 1 to 8 shown in FIG. 12 every time the first and second selectors 66 and 67 are rotated 45 degrees. The first and second selectors 66 and 67 select the second nozzle mounting portions 55 in clockwise order and alternate between selecting and not selecting a second nozzle mounting portion 55 every time the first and second selectors 66 and 67 are rotated 45 degrees. In this way, the first and second selectors 66, 67 of this embodiment rotate synchronously with shifted rotational positions, thereby allowing any one second nozzle mounting portion 55 to be selected from the eight second nozzle mounting portions 55.

[0063] (Configuration of the control device 19 and the supply operation of the die 22) FIG. 2 shows a block diagram of the control device 19. The control device 19 is a processing device mainly composed of a computer and includes a CPU 181 and a storage device 182. The storage device 182 is configured, for example, by combining RAM, ROM, a hard disk, and the like. A control program 183 for controlling the die supply device 10 is stored in the storage device 182. The control device 19 is connected to each device, such as the wafer supply unit 12, flip mechanism 15, transfer mechanism 16, shuttle mechanism 17, nozzle station mechanism 18, substrate transport unit 14, pressure supply device 27, and parts camera 29, via multiple drive circuits 184. The control device 19 executes the control program 183 using the CPU 181 and controls each device via the drive circuit 184 to control the operation of the die supply device 10. The drive circuit 184 is, for example, a motor driver circuit for driving a motor or an external interface for connecting an external device.

[0064] The control device 19 controls each device to supply the dies 22. In the following description, the devices controlled by the control device 19 may be simply described by their device names. For example, the description "the wafer frame drawer mechanism 31 unloads the desired wafer frame 23 from the magazine 24 to the die supply position P2" means that the control device 19 executes the control program 183 with the CPU 181, controls the wafer frame drawer mechanism 31 via the drive circuit 184, and unloads the desired wafer frame 23 from the magazine 24 to the die supply position P2.

[0065] First, before starting the supply of dies 22, the control device 19 controls the wafer supply unit 12 to place a wafer frame 23 corresponding to the type of die 22 to be supplied at the die supply position P2. The wafer frame drawer mechanism 31, under the control of the control device 19, transports the desired wafer frame 23 from the magazine 24 to the die supply position P2. The flip mechanism 15 drives the Y-axis slide mechanism 33 to move above the die assembly 21 and drives the Z-axis slide mechanism 34 to lower the first suction nozzle 43 to pick up the die 22. The control device 19 drives the wafer frame drawer mechanism 31 and the Y-axis slide mechanism 33 to move the flip head 35 above the next die 22 to be picked up. The flip mechanism 15 drives the rotation motor 38 to swap the positions of the pair of first suction nozzles 43, and the remaining first suction nozzle 43 picks up the die 22.

[0066] After the flip mechanism 15 has sucked the die 22 with both of the pair of first suction nozzles 43, the flip mechanism 15 moves to a position where it hands over the die 22 to the transfer head 54 of the transfer mechanism 16 (the position shown in FIG. 3 ). The transfer mechanism 16 drives the X-axis slide mechanism 51 and the Y-axis slide mechanism 52 to move the transfer head 54 to a position where it will receive the die 22 from the flip mechanism 15. The transfer mechanism 16 drives the Z-axis slide mechanism 34 to adjust the height of the transfer head 54. The transfer mechanism 16 drives the selector motor 64 to rotate the first and second selectors 66 and 67, thereby selecting a desired second nozzle mounting unit 55 from the eight second nozzle mounting units 55. The transfer mechanism 16 drives the slider motor 63 to lower the slide member 65, thereby lowering the second suction nozzle 56 of the selected second nozzle mounting unit 55, and the die 22 is sucked by the first suction nozzle 43 of the flip head 35.

[0067] When the suction of the die 22 is completed, the transfer mechanism 16, for example, raises the slide member 65 to the initial position. The pressed portion 113 of the selected second nozzle mounting portion 55 is raised to the upper limit position by the elastic member 115. The transfer mechanism 16 drives the selector motor 64 to select another second nozzle mounting portion 55. Meanwhile, the flip mechanism 15 rotates the flip head 35 to exchange the positions of the pair of first suction nozzles 43. As in the first suction operation described above, the transfer mechanism 16 lowers the slide member 65 and suctions the die 22 onto the second suction nozzle 56 selected from the other first suction nozzle 43. The flip mechanism 15 and the transfer mechanism 16 repeatedly perform the above-described operations until all eight second suction nozzles 56 suction the die 22.

[0068] When the suction of the eight dies 22 is completed, the transfer mechanism 16 drives the X-axis slide mechanism 51 and the Y-axis slide mechanism 52 to move the transfer head 54 above the X-axis slider 17B of the shuttle mechanism 17. The transfer mechanism 16 drives the Z-axis slide mechanism 53 to lower the transfer head 54, and collectively places the dies 22 suctioned by the eight second suction nozzles 56 on the shuttle 17D. At this time, the transfer mechanism 16, for example, drives the Z-axis slide mechanism 53 without driving the slider motor 63 and the selector motor 64 to collectively lower the eight second nozzle mounting units 55, and collectively places the eight dies 22 on the shuttle 17D. The shuttle mechanism 17 draws air through the intake port 17E to suction the dies 22 onto the shuttle 17D. With the die 22 adsorbed onto the shuttle 17D, the shuttle mechanism 17 drives the electromagnetic motor 17C to move the X-axis slider 17B from the receiving position P5 to the transfer position P6. The component mounting device located to the right of the die supply device 10 uses a mounting head (not shown) to adsorb the die 22 from the shuttle 17D located at the transfer position P6 and mount it on the substrate. When placing the die 22 on the shuttle 17D, the transfer mechanism 16 may drive the slider motor 63 and the selector motor 64 to lower the second nozzle mounting units 55 one by one to transfer the die 22.

[0069] Furthermore, in the above description, the control of the transfer mechanism 16 has been described for the case where the die 22 is transferred from the flip mechanism 15 to the transfer mechanism 16, but similar control can be applied to other cases. For example, when the transfer head 54 directly picks up the die 22 from the die assembly 21, i.e., when the die 22 is supplied without being inverted, the slider motor 63 and the selector motor 64 may be driven to lower the second nozzle mounting units 55 individually, and the die 22 may be picked up from the die assembly 21. Alternatively, when replacing the second suction nozzles 56 in the nozzle station 61, the transfer mechanism 16 may replace the eight second nozzle mounting units 55 collectively, or may replace them individually by driving the slider motor 63 and the selector motor 64.

[0070] As described above, the transfer head 54 rotates the first and second selectors 66 and 67 synchronously using the pulleys 64B, 89, and 90 and the endless belt 93, and rotates the first and second selectors 66C and 67C synchronously while maintaining different rotational positions in the rotational direction. This allows the synchronization mechanism using the endless belt 93 to rotate the first and second selectors 66C and 67C while maintaining their phases. One selector motor 64 can rotate the first and second selectors 66C and 67C, while selecting one second nozzle mounting unit 55. This reduces the number of selector motors 64 required.

[0071] Additionally, the second suction nozzles 56 (an example of a first component holder of the present disclosure) of the second nozzle mounting portion 55A are arranged at 90-degree intervals around the circumference of the rotating first selector 66C. Additionally, the second suction nozzles 56 (an example of a second component holder of the present disclosure) of the second nozzle mounting portion 55B are arranged at 90-degree intervals around the circumference of the rotating second selector 67C. This configuration simplifies control of positioning the selector at the desired second nozzle mounting portion 55, compared to a configuration in which the second nozzle mounting portions 55 selected by the first and second selectors 66C, 67C overlap, as shown in FIG. 13 (described later). Rotating the first and second selectors 66C, 67C by the same rotation angle (45 degrees in this embodiment) allows the second nozzle mounting portions 55A, 55B to be selected in sequence.

[0072] Furthermore, by arranging the second nozzle mounting portions 55A, 55B at the same rotation angle (90 degrees) from each other, it is possible to further simplify the selection control by the control device 19. When selecting either of the second nozzle mounting portions 55A, 55B, the control device 19 can make the selection by rotating the first and second select portions 66C, 67C by 45 degrees.

[0073] Furthermore, the screw shaft 71A is inserted into the slide member 65 at a position between the first and second selectors 66, 67 in the left-right direction. In this configuration, by arranging the screw shaft 71A that supports the slide member 65 at a position between the two selectors, the slide member 65 can be supported in a well-balanced manner by the screw shaft 71A. The slide member 65 can be moved smoothly in the up-down direction.

[0074] In the above embodiment, the die supply device 10 is an example of a component supply device. The die 22 is an example of a component. The X-axis slide mechanism 51, the Y-axis slide mechanism 52, and the Z-axis slide mechanism 53 are examples of head moving mechanisms. The second suction nozzle 56 is an example of a component holding member. The second suction nozzle 56 of the second nozzle mounting unit 55A is an example of a first component holding member. The second suction nozzle 56 of the second nozzle mounting unit 55B is an example of a second holding member. The transfer head 54 is an example of a component holding head. The slider motor 63 is an example of a slider drive source. The pulleys 64B, 89, and 90 are examples of a synchronization mechanism. The selector motor 64 is an example of a selector drive source. The up and down direction is an example of a predetermined direction. The endless belt 75 is an example of a first endless belt. The endless belt 93 is an example of a synchronization mechanism and a second endless belt.

[0075] As described above, the first embodiment provides the following advantages. In one aspect of this embodiment, the first and second selectors 66, 67 move vertically together with the slide member 65, are rotatably attached to the slide member 65, and rotate based on the drive of the selector motor 64. One of the multiple second suction nozzles 56 is selected by the first selector 66C or the second selector 67C depending on the rotational positions of the first selector 66C provided on the first selector 66 and the second selector 67C provided on the second selector 67. With this configuration, selectable second suction nozzles 56 (second nozzle mounting units 55) can be allocated and arranged to each of the first and second selectors 66, 67. This allows the second nozzle mounting units 55 and the selectors to be arranged closer together than in the prior art configuration in which a single selector selects a second suction nozzle 56. For example, the radial length of the first and second selector portions 66C, 67C can be shortened, and the circumferential length (size of the circle) on which the pressed portion 113 is disposed can be reduced. As a result, the first and second selector portions 66, 67 can be made smaller overall.

[0076] Second Embodiment In the first embodiment described above, the second nozzle mounting units 55 (second suction nozzles 56) selected by the first and second selectors 66, 67 were separate second nozzle mounting units 55, but this is not limited to this. FIG. 13 is a drawing corresponding to FIG. 12 and shows the arrangement of the second nozzle mounting units 55 in the second embodiment. Note that in the following description, the same components as those in the first embodiment are denoted by the same reference numerals, and their description will be omitted as appropriate. In the configuration shown in FIG. 13, the second nozzle mounting units 55 (second nozzle mounting units 55 numbered 2 and 5, and numbered 7 and 8) arranged between the first and second selectors 66, 67 in the left-right direction can be selected by both the first and second selectors 66, 67. That is, these second nozzle mounting units 55 are second nozzle mounting units 55A and second nozzle mounting units 55B. As in the case of FIG. 11 in the first embodiment, when the first and second selectors 66, 67 are rotated clockwise, the second nozzle mounting portions 55 can be selected in the order of numbers 1 to 8 shown in FIG. 13 . Accordingly, the second nozzle mounting portions 55 numbered 2 and 5, and numbered 7 and 8, can be selected more quickly because they can be selected using both selectors. For example, a frequently used second suction nozzle 56 can be mounted in this second nozzle mounting portion 55, allowing for quick selection and use. Furthermore, in the first embodiment, the screw shaft 71A is disposed between the first and second selectors 66, 67 in the left-right direction. However, as shown in FIG. 13 , the screw shaft 71A may be disposed, for example, to the right of the second selector 67.

[0077] Third Embodiment In the first embodiment described above, the timing of selection by the first and second selectors 66, 67 is shifted by shifting the rotational positions of the first and second selectors 66C, 67C, but this is not limited to this. FIG. 14 is a diagram corresponding to FIG. 12 and shows the arrangement of the second nozzle mounting unit 55 in a third embodiment. As shown in FIG. 14, the rotational positions of the first and second selectors 66C, 67C may be the same, while the positions at which the second nozzle mounting unit 55 (second suction nozzle 56) is positioned may be shifted. For example, as shown in FIG. 14, in the rotational direction of the first and second selectors 66, 67, the position at which the second nozzle mounting unit 55B selected by the second selector 67 is positioned may be shifted by 90 degrees from the position at which the second nozzle mounting unit 55A selected by the first selector 66 is positioned. In this case as well, for example, by rotating the first and second selectors 66, 67 clockwise, the second nozzle mounting parts 55 can be selected in the order of numbers 1 to 8 shown in Fig. 14. That is, as in the first embodiment, the eight second nozzle mounting parts 55 can be selected in order.

[0078] The present disclosure is not limited to the above-described embodiments and can be embodied in various forms with various modifications and improvements based on the knowledge of those skilled in the art. For example, in the above-described embodiments, the first nozzle mounting portion 41 and the second nozzle mounting portion 55 have the same structure, but they may have different structures. Also, in the above-described embodiments, both second nozzle mounting portions 55A and 55B are arranged at 90-degree intervals in the rotational direction of the first and second selectors 66 and 67, but this is not limited to this. For example, the second nozzle mounting portions 55A may be arranged at 90-degree intervals and the second nozzle mounting portions 55B may be arranged at 180-degree intervals. Alternatively, the second nozzle mounting portions 55A may be arranged at 30-degree intervals and the second nozzle mounting portions 55B may be arranged at 60-degree intervals.

[0079] Furthermore, in the above-described embodiments, the predetermined direction of the present disclosure is the vertical direction, but this is not limited thereto. The predetermined direction of the present disclosure may be a direction perpendicular to the vertical direction or a direction at a predetermined angle with the vertical direction. Furthermore, in the above-described embodiments, the second suction nozzle 56 is used as the component holder of the present disclosure, but this is not limited thereto. The component holder of the present disclosure may be another member capable of holding components, such as chuck jaws. Furthermore, in the above-described embodiments, the pulleys 64B, 89, and 90 and the endless belt 93 are used as the synchronization mechanism for synchronously rotating the first and second selectors 66 and 67, but this is not limited thereto. For example, the first and second selectors 66 and 67 may be rotated synchronously using gears or racks. Furthermore, the transfer head 54 does not need to include a synchronization mechanism. For example, an eccentric cam may be used to rotate the first and second selectors 66C and 67C at different rotational positions. Alternatively, a selector motor 64 for rotating the second selector 67 may be provided separately from the selector motor 64 for rotating the first selector 66. The first and second selectors 66, 67 may be rotated individually to select one second nozzle mounting unit 55. In addition, while the above embodiments employ dies 22 diced from a wafer as components of the present disclosure, this is not limited to this. Components of the present disclosure may also be, for example, components supplied from a tape feeder that tapes components. Alternatively, components arranged on a tray or randomly placed components may also be used. Furthermore, the component holding head of the present disclosure is not limited to the transfer head 54 that transports dies 22 from the die assembly 21 to the shuttle 17D. For example, the component holding head of the present disclosure may be a mounting head that mounts components on a substrate. Therefore, the component supply device of the present disclosure is not limited to a device that supplies dies 22 (components), but may also be a component mounting device that mounts components on a substrate.

[0080] The mechanism for sliding the slide member 65 is not limited to a ball screw mechanism, but may be, for example, a mechanism using a trapezoidal screw. The flip mechanism 15 may be provided with an X-axis slide mechanism and may be configured to move the flip head 35 in the left-right direction.

[0081] The contents of this disclosure are not limited to the dependent relationships described in the claims. For example, this specification also discloses the technical idea of ​​changing "the component holding head according to claim 1 or claim 2" in claim 5 to "the component holding head according to any one of claims 1 to 4." This specification also discloses the technical idea of ​​changing "the component supply device according to claim 1 or claim 2" in claim 8 to "the component supply device according to any one of claims 1 to 7."

[0082] 10 Die supply device (component supply device), 19 Control device, 22 Die (component), 51 X-axis slide mechanism (head moving mechanism), 52 Y-axis slide mechanism (head moving mechanism), 53 Z-axis slide mechanism (head moving mechanism), 54 Transfer head (component holding head), 56 Second suction nozzle (component holding member, first component holding member, second component holding member), 63 Slider motor (slider drive source), 63A First output shaft, 64 Selector motor (selector drive source), 64A Second output shaft, 64B, 89, 90 Pulley (synchronization mechanism), 65 Slide member, 66 First selector, 66C First selector section, 67 Second selector, 67C Second selector section, 71A Screw shaft, 75 Endless belt (first endless belt), 77 First selector shaft, 78 Second selector shaft, 93 Endless belt (synchronization mechanism, second endless belt).

Claims

1. A component holding head comprising: a plurality of component holding members for holding components; a slider drive source; a slide member that slides in a predetermined direction based on drive of the slider drive source; a selector drive source; and a first selector and a second selector that are attached to the slide member and move in the predetermined direction together with the slide member, are rotatably attached relative to the slide member, and rotate based on drive of the selector drive source, wherein one of the plurality of component holding members is held by the first selector section or the second selector section depending on the rotational positions of a first selector section provided on the first selector and a second selector section provided on the second selector.

2. A component holding head as described in claim 1, further comprising a synchronization mechanism that rotates the first selector and the second selector synchronously based on the drive of the selector drive source, wherein the first selector section and the second selector section rotate synchronously while maintaining different rotational positions from each other in the rotational direction when the first selector and the second selector are rotated based on the drive of the selector drive source.

3. A component holding head as described in claim 2, wherein the multiple component holding members include: a multiple first component holding members arranged at equal intervals on the circumference of the first select portion which rotates in the rotational direction; and a multiple second component holding members which are component holding members different from the first component holding members and arranged at equal intervals on the circumference of the second select portion which rotates in the rotational direction.

4. The component holding head according to claim 3, wherein the plurality of first component holding members and the plurality of second component holding members are arranged at equal rotation angles.

5. A component holding head as described in claim 1 or claim 2, further comprising a screw shaft that rotates based on the drive of the slider drive source to slide the slide member in the specified direction, the screw shaft being inserted into the slide member at a position between the first selector and the second selector.

6. The component holding head described in claim 5, wherein the slider driving source and the selector driving source are motors, and the component holding head further comprises: a first endless belt stretched between a first output shaft of the slider driving source and the screw shaft, a first selector shaft that rotates the first selector, a second selector shaft that rotates the second selector, and a second endless belt stretched between a second output shaft of the selector driving source, the first selector shaft, and the second selector shaft, and the screw shaft is positioned outside the annular second endless belt.

7. A component holding head as described in claim 6, wherein the specified direction is an up-down direction, the selector drive source is attached with the second output shaft protruding upward, the slider drive source is attached with the first output shaft protruding upward and the first output shaft protrudes to a position higher than the second output shaft, and the first endless belt is disposed above the first selector shaft or the second selector shaft and is stretched between the first output shaft and the screw shaft.

8. A component supply device comprising: the component holding head according to claim 1 or 2; a head moving mechanism for moving the component holding head; and a control device for controlling the head moving mechanism, moving the component holding head, and supplying the components.

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