Sealing material and sealing structure

Abstract

A sealing material (A100) comprises: an elastic member (1); and a contact member (2) that covers at least a portion of the elastic member (1). The material of the elastic member (1) exhibits more elastic deformation than the material of the contact member (2). The material of the contact member (2) is less likely to transmit gas than the material of the elastic member (1). The contact member (2) has a first section (21) positioned on a z1 side in a z direction and a second section (22) positioned on an z2 side, which is on the opposite side from the z1 side in the z direction. In a case where a first object (3) approaches from the z1 side in the z direction and a second object (4) approaches from the z2 side in the z direction, the first section (21) comes into contact with the first object (3) and the second section (22) comes into contact with the second object (4) in a state in which at least the elastic member (1) is elastically deformed. Due to this configuration, gas permeation can be suppressed while maintaining the sealing performance of the sealing material (A100).

Description

Seal material and seal structure

[0001] The present invention relates to a sealing material and a sealing structure.

[0002] Seal materials and seal structures using seal materials are widely used as members and structures that block the flow of fluids such as gases. Patent Document 1 discloses an example of a conventional seal material. The seal material disclosed in this document has a convex portion on its upper side. This convex portion is made of a relatively soft resin or the like and is flexible. When an object is pressed against the seal material from above, the convex portion selectively deforms and comes into contact with the object. This improves sealing performance.

[0003] Japanese Patent Application Laid-Open No. 2022-61342

[0004] The protrusions that come into contact with the object have sharp corners and are small in size in the direction in which the gas passes, which raises concerns that the gas may pass through the sealing material at the protrusions.

[0005] The present invention was conceived in light of the above circumstances, and an object of the present invention is to provide a sealing material and a seal structure that can suppress gas permeation while maintaining sealing properties.

[0006] A sealing material provided by a first aspect of the present invention comprises an elastic member and an abutting member covering at least a portion of the elastic member, wherein the material of the elastic member is more elastically deformable than the material of the abutting member, and the material of the abutting member is less permeable to gas than the material of the elastic member, and the abutting member has a first portion located on a first side in a first direction and a second portion located on a second side opposite the first side in the first direction, and when a first object approaches from the first side in the first direction and a second object approaches from the second side in the first direction, the first portion abuts against the first object and the second portion abuts against the second object, at least in a state in which the elastic member is elastically deformed.

[0007] In a preferred embodiment of the present invention, the elastic member has a first apex located on the first side in the first direction, and the first portion covers the first apex from the first side in the first direction.

[0008] In a preferred embodiment of the present invention, the elastic member has a first apex located on the first side in the first direction, and the first apex is located on the first side in the first direction than the first portion.

[0009] In a preferred embodiment of the present invention, the elastic member has a second apex located on the second side of the first direction, and the second part covers the second apex from the first side in a second direction perpendicular to the first direction.

[0010] In a preferred embodiment of the present invention, the elastic member has a third apex located on a second side opposite the first side relative to the second apex in the second direction, and the abutment member has a third part covering the third apex from the second side in the second direction.

[0011] In a preferred embodiment of the present invention, the second portion has a folded portion that is shaped to be positioned closer to the first side in the first direction as it approaches the first side in the second direction.

[0012] In a preferred embodiment of the present invention, the contact member has a bent portion located between the first portion and the second portion.

[0013] The sealing structure provided by the second aspect of the present invention comprises the sealing material provided by the first aspect of the present invention, the first object having a top surface facing the second side in the first direction, and the second object having a bottom surface facing the first side in the first direction and a pair of side surfaces extending from both ends of the bottom surface to the first side in the first direction, wherein the first part abuts the top surface and the second part abuts at least one of the bottom surface and the side surfaces, thereby sealing between the first object and the second object.

[0014] According to the present invention, gas permeation can be suppressed while maintaining the sealing properties of the sealing material.

[0015] Other features and advantages of the present invention will become more apparent from the following detailed description taken in conjunction with the accompanying drawings.

[0016] 1A to 1C are plan views showing examples of the overall shape of a sealing material according to a first embodiment of the present invention. These are cross-sectional views taken along line II-II in FIG. 1A, where (a) shows the sealing material before compression, and (b) shows a seal structure including the compressed sealing material. (a) shows the sealing material before compression, and (b) shows a modified example of the seal structure. (a) to (d) are cross-sectional views showing modified examples of the cross-sectional configuration of the sealing material according to the first embodiment of the present invention. (a) to (c) are cross-sectional views showing examples of the cross-sectional configuration of a sealing material according to a second embodiment of the present invention. (a) to (c) are cross-sectional views showing examples of the cross-sectional configuration of a sealing material according to a third embodiment of the present invention. (a) and (b) are cross-sectional views showing examples of the cross-sectional configuration of a sealing material according to a fourth embodiment of the present invention, and (c) is a cross-sectional view showing a seal structure according to the fourth embodiment of the present invention. (a) and (b) are plan views showing modified examples of the overall shape of a sealing material according to the fourth embodiment of the present invention.

[0017] Preferred embodiments of the present invention will now be described in detail with reference to the drawings.

[0018] The terms "first," "second," "third," etc. in the present invention are used merely for identification purposes and are not intended to assign any order to their objects.

[0019] 1 and 2 show a sealing material and a sealing structure according to a first embodiment of the present invention. A sealing material A100 of this embodiment includes an elastic member 1 and a contact member 2.

[0020] In these figures, the first direction of the present invention is defined as the z direction. The first side of the z direction is referred to as the z1 side, and the second side opposite the first side of the z direction is referred to as the z2 side. The second direction of the present invention that is perpendicular to the z direction is defined as the x direction. The first side of the x direction is referred to as the x1 side, and the second side opposite the x1 side is referred to as the x2 side. The direction perpendicular to the z direction and the x direction is defined as the y direction.

[0021] There are no limitations on the specific configuration or use of the seal material A100 and the seal structure B100. Examples of uses of the seal material A100 and the seal structure B100 include ensuring the airtightness of a predetermined chamber in semiconductor manufacturing processes such as film formation, etching, and heat treatment.

[0022] The shape and size of the sealing material A100 in a plan view (z-direction view) are not limited in any way. In the example shown in FIG. 1( a), the sealing material A100 is annular in a plan view. In the example shown in FIG. 1( b), the sealing material A100 is rectangular in a plan view. In addition, the sealing material A100 may be triangular, pentagonal or higher polygonal, etc., in a plan view. In the example shown in FIG. 1( c), the sealing material A100 is linear in a plan view. Furthermore, the sealing material A100 may be curved, bent, or the like, depending on the shape of the area to be sealed. The following description will focus on the case where the sealing material A100 is annular in a plan view. In FIG. 2, the x direction is the radial direction of the sealing material A100, the x1 side is the center side, and the x2 side is the outside, and this is also true for other figures.

[0023] The elastic member 1 is a member that ensures the sealing performance of the first object 3 and the second object 4 by generating sufficient elastic deformation when the sealing material A100 is sandwiched and pressed between the first object 3 and the second object 4 in the z direction. The material of the elastic member 1 is selected to be more elastically deformable than the material of the abutting member 2. "Highly elastically deformable" means, for example, that the Young's modulus of elasticity is smaller than that of the material of the abutting member 2 and that the elastic member deforms more when pressed under the same conditions. Examples of materials for the elastic member 1 include FFKM (perfluoroelastomer), FKM (fluororubber), FVMQ (fluorosilicone rubber), silicone rubber (VMQ), nitrile rubber (NBR), acrylic rubber (ACM), and ethylene propylene rubber (EPDM). The cross-sectional size of the elastic member 1 is not limited in any way. For example, when the outer diameter of the sealing material A100 in FIG. 1(a) is approximately 3 mm to 1000 mm, the size of the cross-section of the elastic member 1 in the z direction is approximately 1 mm to 10 mm, and the size in the x direction is approximately 1 mm to 10 mm.

[0024] The elastic member 1 of this embodiment has a first apex 11 , a second apex 12 and a third apex 13 .

[0025] The first apex 11 is a portion of the elastic member 1 that is located closest to the z1 side in the z direction. The specific shape of the first apex 11 is not limited in any way, and in the example shown, the first apex 11 is a sharp corner that protrudes toward the z1 side in the z direction, or a shaped portion with a slight curve at the tip of the corner.

[0026] The second apex 12 is located on the z2 side of the elastic member 1 in the z direction, and in the illustrated example, it is located closest to the z2 side. The second apex 12 is also located closest to the x1 side in the x direction. The specific shape of the second apex 12 is not limited in any way, and in the illustrated example, the second apex 12 is a sharp corner protruding toward the x1 side in the x direction, or a shaped portion with a slight curve at the tip of the corner. In the illustrated example, the angle of the second apex 12 is larger than the angle of the first apex 11.

[0027] The third apex 13 is located on the z2 side of the elastic member 1 in the z direction, and in the illustrated example, it is located closest to the z2 side together with the second apex 12. The third apex 13 is also located closest to the x2 side in the x direction. The specific shape of the third apex 13 is not limited in any way, and in the illustrated example, the third apex 13 is a sharp corner protruding toward the x2 side in the x direction, or a shaped portion with a slight curve at the tip of the corner. In the illustrated example, the angle of the third apex 13 is greater than the angle of the first apex 11 and equal to the angle of the second apex 12.

[0028] The cross-sectional shape of the elastic member 1 having these first vertex 11, second vertex 12, and third vertex 13 is not limited in any way, and in the example shown, it is triangular, for example, an isosceles triangle with the first vertex 11 as the vertex angle.

[0029] The abutting member 2 is a member that suppresses gas permeation by contacting the first object 3 and the second object 4 when the sealing material A100 is sandwiched and pressed between the first object 3 and the second object 4 in the z-direction. The material of the abutting member 2 is selected to be more gas-resistant than the material of the elastic member 1. When the sealing material A100 is used in the above-mentioned film formation process, for example, gases whose permeation is suppressed include air, nitrogen (N2), hydrogen (H2), oxygen (O2), ammonia gas (NH3), etc. Furthermore, the material of the abutting member 2 is preferably one that has a lower elastic deformation than the material of the elastic member 1 but still generates significant elastic deformation under the usage conditions described below. Examples of materials for the abutting member 2 include metals and resins. Examples of metals include aluminum, copper, iron, nickel, molybdenum, chromium, etc., or alloys of any of these, such as stainless steel, Inconel (registered trademark), and Hastelloy (registered trademark). Examples of resins include fluororesins such as polytetrafluoroethylene (PTFE), polyether ether ketone (PEEK), liquid crystal polymer (LCP), polyimide (PI), polyamide imide (PAI), etc. In this example, a case will be described in which the material of the contact member 2 is metal. There are no limitations on the thickness of the contact member 2, and it is, for example, about 0.05 mm to 0.5 mm.

[0030] There is no limitation on the relationship between the elastic member 1 and the contact member 2. The elastic member 1 and the contact member 2 may simply be in detachable contact with each other, or the elastic member 1 may be fitted into the contact member 2 in a compressed state, or they may be joined with an adhesive or the like, or the elastic member 1 may be formed on the inner surface of the contact member 2 by a method such as coating.

[0031] The contact member 2 of this embodiment has a first portion 21 , a second portion 22 and a third portion 23 .

[0032] The first portion 21 is a portion of the abutting member 2 that is located closest to the z1 side in the z direction. In the example shown, the first portion 21 is located on the z1 side of the first apex 11 in the z direction, and covers the first apex 11 from the z1 side in the z direction. The specific shape of the first portion 21 is not limited in any way, and in the example shown, it is a bent portion with an acute angle that corresponds to the shape of the first apex 11.

[0033] The second portion 22 is located on the z2 side of the abutting member 2 in the z direction, and in the illustrated example, is located closest to the z2 side. The second portion 22 is also the portion of the abutting member 2 located closest to the x1 side in the x direction. In the illustrated example, the second portion 22 covers the second apex 12 from the x1 side in the x direction. The specific shape of the second portion 22 is not limited in any way, and in the illustrated example, it is the end of an inclined portion along the surface of the second apex 12 on the x1 side in the x direction. The position of the second portion 22 in the z direction is the same as the position of the second apex 12 in the z direction.

[0034] The third portion 23 is located on the z2 side of the abutting member 2 in the z direction, and in the illustrated example, is located closest to the z2 side together with the second portion 22. The second portion 22 is also the portion of the abutting member 2 located closest to the x2 side in the x direction. In the illustrated example, the third portion 23 covers the third apex 13 from the x2 side in the x direction. The specific shape of the third portion 23 is not limited in any way, and in the illustrated example, it is the end of an inclined portion along the surface of the third apex 13 on the x2 side in the x direction. The position of the third portion 23 in the z direction is the same as the position of the third apex 13 in the z direction and the same as the position of the second portion 22 in the z direction.

[0035] There are no limitations on the cross-sectional shape of the contact member 2 having the first portion 21, the second portion 22, and the third portion 23. In the illustrated example, the contact member 2 has an inclined portion connecting the first portion 21 and the second portion 22, and an inclined portion connecting the first portion 21 and the third portion 23, and has a triangular mountain shape that follows the elastic member 1 as a whole.

[0036] Next, the configuration of a seal structure B100 using the seal material A100 will be described with reference to FIGS.

[0037] First, as shown in FIG. 2A, the sealing material A100 is loaded onto the second object 4. The specific configuration of the second object 4 is not limited in any way, and in this embodiment, the second object 4 has a bottom surface 41 and a pair of side surfaces 42. The bottom surface 41 is located on the z2 side in the z direction and faces the z1 side in the z direction. The pair of side surfaces 42 extend from both ends of the bottom surface 41 in the x direction toward the z1 side in the z direction and are parallel to the z direction. When the sealing material A100 has the overall shape shown in FIG. 1A, the bottom surface 41 and the pair of side surfaces 42 form a circular groove in a plan view, and the cross-sectional shape is a so-called groove. The sealing material A100 is loaded between the pair of side surfaces 42 so as to contact the bottom surface 41. In the illustrated example, the distance between the pair of side surfaces 42 is greater than the size of the sealing material A100 in the x direction, for example, approximately 1.01 to 2.0 times the size of the sealing material A100 in the x direction.

[0038] Next, as shown in FIG. 2B , the first object 3 approaches the sealing material A100 from the z1 side in the z direction, and the second object 4 approaches the sealing material A100 from the z2 side in the z direction. The specific shape of the first object 3 is not limited in any way, and in this embodiment, it has a top surface 31. The top surface 31 faces the z2 side in the z direction and is flat in the illustrated example. As the first object 3 and the second object 4 approach each other, the first portion 21 abuts against the top surface 31. Further bringing the first object 3 and the second object 4 closer together applies a pressing force that compresses the sealing material A100 in the z direction. This causes the elastic member 1 and the abutting member 2 of the sealing material A100 to elastically deform, for example, into the shape shown in the figure. The sealing material A100 as a whole shrinks in size in the z direction and expands in size in the x direction. As a result, a first contact portion Cp1, a second contact portion Cp2, and a third contact portion Cp3 are formed as contact portions between the sealing material A100 and the first object 3 and the second object 4.

[0039] The first contact portion Cp1 is a portion where the first portion 21 contacts the top surface 31. The second contact portion Cp2 is a portion where the second portion 22 contacts the second object 4, where the second portion 22 contacts at least one of the bottom surface 41 and the side surface 42. The third contact portion Cp3 is a portion where the third portion 23 contacts the second object 4, where the third portion 23 contacts at least one of the bottom surface 41 and the side surface 42.

[0040] Next, the functions of the sealing material A100 and the sealing structure B100 will be described.

[0041] 2, when the sealing material A100 is compressed in the z direction from the state shown in FIG. 2(a) to the state shown in FIG. 2(b), a first contact portion Cp1 and a second contact portion Cp2 are formed on both sides in the z direction. At the first contact portion Cp1 and the second contact portion Cp2, the abutting member 2 abuts against the first object 3 or the second object 4. The material of the abutting member 2 is less permeable to gas than the material of the elastic member 1. Therefore, gas permeation can be suppressed while maintaining sealing properties.

[0042] The sealing material A100 further includes a third portion 23. As a result, as shown in FIG. 2B, a second contact portion Cp2 and a third contact portion Cp3 are formed on both sides in the x direction, which further promotes the maintenance of sealing properties and the suppression of gas permeation.

[0043] A first contact portion Cp1 is formed by the abutment between the top surface 31 of the first object 3 and the first portion 21. The first portion 21 constitutes the tip of the abutting member 2 on the z1 side in the z direction, and in this embodiment is a bent portion at an acute angle. This causes the pressing force applied when the abutting member 2 abuts against the top surface 31 to be concentrated on the first portion 21, making it possible to more reliably achieve elastic deformation of the abutting member 2 as shown in FIG. 2( b).

[0044] The second object 4 has a bottom surface 41 and a pair of side surfaces 42. This allows the second contact portion Cp2 and the third contact portion Cp3 to abut in at least one of the x-direction and the z-direction, and is expected to abut in both the x-direction and the z-direction. This further enhances the maintenance of sealing properties and the suppression of gas permeation.

[0045] By using a metal material for the contact member 2, gas permeation can be more reliably suppressed. The contact member 2 can be formed by bending a relatively thin metal plate material, etc. This allows the contact member 2 to be designed and manufactured to be highly elastically deformable and not to undergo unintended plastic deformation when used with an expected amount of deformation.

[0046] Because the cross-sectional shape of the abutting member 2 is a triangular mountain shape that follows the elastic member 1, when compressed in the z direction, elastic deformation easily occurs such that the second portion 22 and the third portion 23 move apart in the x direction and the first portion 21 move closer to the second portion 22 and the third portion 23 in the z direction. This makes it possible to elastically deform the abutting member 2, and therefore the sealing material A100, with less pressing force, which is preferable for suppressing gas permeation while maintaining sealing properties.

[0047] 3 to 8 show modified examples and other embodiments of the present invention. In these figures, elements that are the same as or similar to those in the above-described embodiment are given the same reference numerals. Furthermore, the configurations of the various parts in each modified example and each embodiment can be combined with each other as appropriate within the scope of not causing technical contradictions.

[0048] First Embodiment (Modified Seal Structure) FIG. 3 shows a modified seal structure B100. In this modified example, the configuration of the second object 4 shown in FIG. 3( a) is different from the above-described example. In this example, the pair of side surfaces 42 are inclined with respect to the z direction. The distance between the pair of side surfaces 42 in the x direction decreases from the z2 side toward the z1 side in the z direction. Furthermore, in the illustrated example, the distance between the pair of side surfaces 42 in the x direction on the z1 side in the z direction may be smaller than the size of the seal material A100 in the x direction on the z2 side in the z direction. In such a case, to load the seal material A100 into the second object 4, for example, the seal material A100 may be inserted between the pair of side surfaces 42 while being compressed in the x direction.

[0049] 3B, the first object 3 and the second object 4 approach each other in the z direction, thereby applying a pressing force that compresses the sealing material A100 in the z direction. As a result, the sealing material A100 comes into contact with the first object 3 and the second object 4, forming a first contact portion Cp1, a second contact portion Cp2, and a third contact portion Cp3.

[0050] This example also makes it possible to suppress gas permeation while maintaining the sealing performance. Furthermore, this example makes it possible to suppress separation of the sealing material A100 from the second object 4 after the sealing material A100 has been loaded into the second object 4 as shown in FIG.

[0051] First Embodiment (Modified Sealing Material) FIG. 4 shows a modified example of the sealing material A100. In the sealing material A101 shown in FIG. 4( a), the abutting member 2 is made of resin. In the sealing material A102 shown in FIG. 4( b), the first portion 21, the second portion 22, and the third portion 23 of the abutting member 2 are made of metal, and the inclined portion connecting the first portion 21 and the second portion 22 and the inclined portion connecting the first portion 21 and the third portion 23 are made of resin. Even in this example, the resin portion of the abutting member 2 is less permeable to gas than the elastic member 1, thereby suppressing gas permeation. Furthermore, the inclusion of resin in the abutting member 2 allows for greater elastic deformation and suppresses unintended plastic deformation.

[0052] In the sealing material A103 shown in FIG. 4( c), the abutting member 2 has a coating layer 29. The coating layer 29 is provided on the outer surface of the main body of the abutting member 2, which is made of, for example, metal. The material of the coating layer 29 is not particularly limited, and examples thereof include a configuration that suppresses chemical changes such as oxidation of the abutting member 2, or a configuration that more reliably suppresses the formation of unintended gaps between the abutting member 2 and the first object 3 and the second object 4. Examples of materials for the coating layer 29 include various materials, such as resins such as fluororesin and polyimide (PI), and elastomers such as FFKM (perfluoroelastomer) and FKM (fluororubber).

[0053] In the sealing material A104 shown in FIG. 4( d ), the elastic member 1 has a recess 15. The recess 15 is a portion recessed from the surface of the elastic member 1 on the z2 side in the z direction toward the z1 side in the z direction, and has, for example, a triangular groove shape. According to this example, when the sealing material A104 is compressed in the z direction, the elastic member 1 shrinks in the z direction and can undergo greater elastic deformation, expanding in the x direction. Furthermore, as can be seen from this example, the cross-sectional shape of the elastic member 1 is not limited to a so-called solid shape, and may also have a shape having a void portion, such as the recess 15.

[0054] Second Embodiment Figure 5 shows a sealing material according to a second embodiment of the present invention. The sealing material A200 shown in Figure 5(a) differs from the above-described example in the configuration of the second portion 22 and the third portion 23 of the abutting member 2. In this example, the second portion 22 has a folded portion 221. The folded portion 221 is a shaped portion that is positioned closer to the z1 side in the z direction as it approaches the x1 side in the x direction. In the illustrated example, the folded portion 221 has an arc-shaped cross section.

[0055] The third portion 23 also has a third portion 231. The third portion 231 is a shaped portion that is positioned closer to the z1 side in the z direction as it approaches the x2 side in the x direction. In the illustrated example, the third portion 231 has an arc-shaped cross section.

[0056] When the sealing material A200 is loaded into the second object 4 shown in FIG. 2 or 3 to form a seal structure, the folded portion 221 (second portion 22) is likely to abut against both the bottom surface 41 and the side surface 42. This allows the second contact portion Cp2 to be configured to include two abutment points. Furthermore, the third portion 231 (third portion 23) is likely to abut against both the bottom surface 41 and the side surface 42. This allows the third contact portion Cp3 to be configured to include two abutment points. Therefore, gas permeation can be more reliably suppressed.

[0057] In the sealing material A201 shown in FIG. 5B, the abutting member 2 has two bent portions 25. The two bent portions 25 are provided between the first portion 21 and the second portion 22, and between the first portion 21 and the third portion 23, respectively. The bent portions 25 are bent so as to form a convex shape on the side opposite the elastic member 1 in the x direction. When the sealing material A201 is compressed in the z direction, the abutting member 2 is likely to bend elastically at the bent portions 25. This makes it possible to prevent unintended plastic deformation caused by distorted deformation of unintended portions of the abutting member 2.

[0058] The sealing material A202 shown in Figure 5(c) differs from the above-described example in the configuration of the folded portion 221 and the third portion 231. In this example, the folded portion 221 and the third portion 231 have a relatively sharp folded shape and a flat shape inclined with respect to the z direction. With this configuration, for example, in the second object 4 shown in Figure 2 or 3, when the distance in the x direction between a pair of side surfaces 42 is smaller than the size of the sealing material A202 in the x direction, the folded portion 221 and the third portion 231, which have flat and inclined portions, function as a so-called wedge, allowing the sealing material A202 to be inserted more smoothly between the pair of side surfaces 42.

[0059] Third Embodiment Fig. 6 shows a sealing material according to a third embodiment of the present invention. The sealing material A300 shown in Fig. 6(a) differs from the above-described examples in the configuration of the contact member 2. In this example, the contact member 2 has a first portion 21, a second portion 22, and a third portion 23 that are separated from one another. In other words, slits are formed between the first portion 21 and the second portion 22 and the third portion 23.

[0060] In this example, when the sealing material A300 is applied to the first object 3 and the second object 4 to form a seal structure, the first contact portion Cp1, the second contact portion Cp2, and the third contact portion Cp3 are formed, thereby suppressing gas permeation. Furthermore, because the first portion 21 is separated from the second portion 22 and the third portion 23, when the sealing material A300 is compressed in the z direction, the elastic member 1 can be elastically deformed to a greater extent even if the abutting member 2 does not undergo significant elastic deformation in the z direction. For example, elastic deformation such as outward bulging of the elastic member 1 is permitted through the slits between the first portion 21 and the second portion 22 and the third portion 23. Furthermore, the size of the elastic member 1 in the x direction between the first portion 21 and the second portion 22 and the third portion 23 is significantly larger than the size of the first top portion 11 in the x direction, for example. This maintains the effect of suppressing gas permeation.

[0061] In the sealing material A301 shown in FIG. 6B , the first portion 21 is separated from the second portion 22 and the third portion 23, similar to the sealing material A300. Meanwhile, the second portion 22 and the third portion 23 are connected on the z2 side in the z direction. The entire z2 side of the elastic member 1 in the z direction is covered by the abutting member 2. In this example, when the sealing material A301 is compressed in the z direction, the elastic member 1 can be sufficiently elastically deformed even if the abutting member 2 does not elastically deform so that the second portion 22 and the third portion 23 are separated in the x direction. Furthermore, in this example, the second contact portion Cp2 and the third contact portion Cp3 can be formed to include the entire area between the second portion 22 and the third portion 23 of the abutting member 2.

[0062] In the sealing material A302 shown in FIG. 6( c), the abutting member 2 has the first portion 21 and the second portion 22, but does not have the third portion 23. The portion of the abutting member 2 on the x2 side in the x direction, sandwiched between the first portion 21, is shorter than the portion on the x1 side in the x direction and does not reach the third peak 13. In this example, when the sealing material A302 is compressed in the z direction, the first contact portion Cp1 and the second contact portion Cp2 are formed. This allows gas permeation to be suppressed on the z1 side and the z2 side in the z direction. Furthermore, because the x2 side portion of the abutting member 2 in the x direction is significantly shorter, when the sealing material A302 is compressed in the z direction, elastic deformation is induced such that the entire abutting member 2 falls toward the x2 side in the x direction. Furthermore, elastic deformation of the elastic member 1 is permitted such that it protrudes from the abutting member 2 toward the x1 side in the x direction. Therefore, the entire sealing material A302 can be elastically deformed to a greater extent.

[0063] Fourth Embodiment Figure 7 shows a seal member and a seal structure according to a fourth embodiment of the present invention. In the seal material A400 shown in Figure 7(a), the first apex 11 is located on the z1 side of the first portion 21 in the z direction. The abutting member 2 has an opening 211. The opening 211 is provided on the z1 side of the abutting member 2 in the z direction and is a slit that penetrates in the z direction. The first apex 11 protrudes from the opening 211 to the z1 side in the z direction. In this example, the first portion 21 is divided into an x1 side and an x2 side in the x direction.

[0064] 7B, the elastic member 1 further includes a convex portion 16. The convex portion 16 is a portion that bulges out toward the z2 side in the z direction and protrudes further toward the z2 side in the z direction than the second portion 22 and the third portion 23.

[0065] 7C shows a seal structure B400 using the seal material A400 or A401. When the seal material A400 or A401 is loaded onto the second object 4 and the first object 3 and the second object 4 are brought close to each other, the top surface 31 first contacts the first apex 11. Furthermore, when the seal material A401 is used, the bottom surface 41 first contacts the convex portion 16. Furthermore, when the first object 3 and the second object 4 are brought close to each other, the first apex 11 is crushed due to elastic deformation of the elastic member 1, and the top surface 31 and the first portion 21 come into contact. Furthermore, when the seal material A401 is used, the convex portion 16 is crushed, and the second portion 22 and the third portion 23 come into contact with the bottom surface 41.

[0066] This embodiment also allows gas permeation to be suppressed while maintaining sealing properties. Furthermore, the first portion 21 only needs to be configured to abut against the top surface 31 with at least the elastic member 1 elastically deformed when the first object 3 approaches. Similarly, the second portion 22 and the third portion 23 only need to be configured to abut against the bottom surface 41 with at least the elastic member 1 elastically deformed when the second object 4 approaches.

[0067] 8A and 8B show modified examples of the planar shapes of the sealing materials A400 and A401 of the fourth embodiment. In the sealing material A410 of this modified example shown in Fig. 8A, the abutting member 2 is divided into a plurality of individual regions 2a. The plurality of individual regions 2a are arranged along the circumferential direction of the sealing material A410. A predetermined gap is provided between adjacent individual regions 2a.

[0068] Because the abutting member 2 is composed of multiple individual regions 2a, when the sealing material A410 is compressed by the first object 3 and the second object 4, it is possible to further reduce unevenness in the circumferential contact between the abutting member 2 and the first object 3 and the second object 4. Furthermore, in the sealing materials A400 and A401, the first apex 11 protrudes further toward the z1 side in the z direction than the first portion 21. As a result, in the gap between adjacent individual regions 2a, the abutting member 2 does not abut against the top surface 31 of the first object 3, but the first apex 11 abuts against the top surface 31. This makes it possible to maintain sealing performance even in the gap between adjacent individual regions 2a.

[0069] In a modified sealing material A411 shown in FIG. 8B , the contact member 2 is divided into a plurality of individual regions 2a and a plurality of individual regions 2b. The individual region 2a is, for example, the portion on the x2 side of the contact member 2 in the x direction in FIG. 7A . The individual region 2b is, for example, the portion on the x1 side of the contact member 2 in the x direction in FIG. 7A . As with the sealing material A410, the plurality of individual regions 2a are arranged along the circumferential direction, with a predetermined gap between adjacent individual regions 2a. Similarly, the plurality of individual regions 2b are arranged along the circumferential direction, with a predetermined gap between adjacent individual regions 2b. In this modified example, the gaps between the plurality of individual regions 2a and the gaps between the plurality of individual regions 2b are arranged at positions offset from each other in the circumferential direction.

[0070] According to this modification, at the contact portion between the sealing material 411 and the top surface 31, at least one of the first portion 21 of the individual region 2a and the first portion 21 of the individual region 2b contacts the top surface 31 over the entire circumferential direction. This makes it possible to more reliably suppress gas permeation than with the sealing material A410.

[0071] The sealing material and the sealing structure according to the present invention are not limited to the above-described embodiment, and the specific configurations of the components of the sealing material and the sealing structure according to the present invention can be freely designed in various ways.

Claims

1. A sealing material comprising: an elastic member; and an abutting member covering at least a portion of the elastic member, wherein the material of the elastic member is more elastically deformable than the material of the abutting member, and the material of the abutting member is less permeable to gas than the material of the elastic member, and the abutting member has a first portion located on a first side in a first direction, and a second portion located on a second side opposite the first side in the first direction, wherein when a first object approaches from the first side in the first direction and a second object approaches from the second side in the first direction, at least in a state in which the elastic member is elastically deformed, the first portion abuts against the first object and the second portion abuts against the second object.

2. The sealing material according to claim 1, wherein the elastic member has a first apex located on the first side in the first direction, and the first portion covers the first apex from the first side in the first direction.

3. The sealing material according to claim 1, wherein the elastic member has a first apex located on the first side in the first direction, and the first apex is located on the first side in the first direction relative to the first portion.

4. The sealing material according to claim 1, wherein the elastic member has a second apex located on the second side of the first direction, and the second portion covers the second apex from the first side in a second direction perpendicular to the first direction.

5. A sealing material as described in claim 4, wherein the elastic member has a third apex located on a second side opposite the first side with respect to the second apex in the second direction, and the abutting member has a third portion covering the third apex from the second side in the second direction.

6. A sealing material as described in claim 4, wherein the second portion has a folded portion that is shaped to be positioned closer to the first side in the first direction as it approaches the first side in the second direction.

7. The sealing material according to claim 4, wherein said abutment member has a bent portion located between said first portion and said second portion.

8. A sealing structure comprising: a sealing material as defined in any one of claims 1 to 7; a first object having a top surface facing the second side in the first direction; and a second object having a bottom surface facing the first side in the first direction and a pair of side surfaces extending from both ends of the bottom surface to the first side in the first direction, wherein the first part abuts against the top surface and the second part abuts against at least one of the bottom surface and the side surfaces, thereby forming a seal between the first object and the second object.

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