Jet structure and etching machine

Abstract

A jet structure, comprising: a jet head, provided with a circumferential air channel, wherein one end of the circumferential air channel is used for being connected to an air inlet pipe group (104), the other end of the circumferential air channel is used for facing the cavity wall of a reaction cavity (115), and the circumferential air channel is arc-shaped. The circumferential air channel of the jet structure is arc-shaped, and with respect to an air channel with a right-angle quarter, has the characteristics of small flow resistance, long jet distance and large momentum, thereby more easily changing the etching uniformity by adjusting the air flow. Additionally, jetting is carried out in a spiral jet mode, a jet direction is not perpendicular to the inner surface of the cavity, and a non-vertical inclination angle is present between the jet direction to the inner surface of the cavity and a tangent direction of the inner surface of the cavity, thereby more easily removing attachments on the surface of the cavity, and reducing the loss to the surface of the cavity. Further provided is an etching machine using the jet structure.

Description

A jet structure and etching machine

[0001] This application claims priority to the Chinese patent application filed with the China Patent Office on June 29, 2023, with application number 202310800855.1 and invention name “A jet structure and etcher”, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present invention relates to the technical field of etching machines, and in particular to an air jet structure and an etching machine. Background Art

[0003] Plasma etchers, also known as plasma planar etchers, plasma etchers, plasma surface treatment equipment, and plasma cleaning systems, are used in the semiconductor industry. Inductively coupled plasma etching is the result of a combination of chemical and physical processes. Its basic principle is that under vacuum and low pressure, the radio frequency generated by the ICP radio frequency power supply is output to a ring-shaped coupling coil. A certain proportion of mixed etching gas is coupled through glow discharge to produce a high-density plasma. Under the action of the RF radio frequency of the lower electrode, this plasma bombards the substrate surface, breaking the chemical bonds of the semiconductor in the substrate pattern area, generating volatile substances with the etching gas, which then detach from the substrate in the form of gas and are extracted from the vacuum line.

[0004] On etching equipment, it is necessary to spray air toward the wafer during the process. The jet component directly above the wafer generally has jet heads pointing downward and at a certain angle to spray toward different areas.

[0005] The existing nozzle is tilted at a certain angle, and the air passage connected to it has a right corner. Since the right corner is a dead corner, it is easy to generate vortex and lose airflow kinetic energy at this place, and also cause deposition.

[0006] Summary of the Invention

[0007] In view of this, the present invention provides an injection structure, which solves the technical problem of airway blind spots by setting a circumferential airway, and the circumferential airway is arc-shaped.

[0008] The present invention also provides an etching machine comprising the above-mentioned air jet structure.

[0009] To achieve the above object, the present invention provides the following technical solutions:

[0010] An air jet structure includes: an air jet head;

[0011] The nozzle is provided with a circumferential air channel, one end of which is used to connect to the air inlet pipe group, and the other end is used to face the cavity wall of the reaction chamber, and the circumferential air channel is arc-shaped.

[0012] Preferably, the nozzle comprises: a nozzle body and a nozzle covering sleeve, wherein the nozzle covering sleeve covers the nozzle body;

[0013] The circumferential air channel is formed between the nozzle body and the nozzle covering sleeve.

[0014] Preferably, a main air channel is formed on the outer peripheral wall of the nozzle body, and the main air channel and the inner peripheral wall of the nozzle covering sleeve form the circumferential air channel.

[0015] Preferably, the main body air channel is a spiral air channel, which is arranged around the central axis of the nozzle body.

[0016] Preferably, there are multiple main body air passages, and the spiral directions of the multiple main body air passages are the same and are evenly distributed along the circumference of the nozzle body.

[0017] Preferably, a covering sleeve air channel is opened on the inner wall of the nozzle covering sleeve, and the main body air channel and the covering sleeve air channel form the circumferential air channel.

[0018] Preferably, the air channel of the covering sleeve is a cylindrical surface coaxial with the main body of the nozzle.

[0019] Preferably, the air outlet end of the main body airway is provided with an airway outlet;

[0020] The inner wall of the nozzle covering sleeve is provided with a covering sleeve air hole penetrating the inner and outer peripheral walls. The air inlet side of the covering sleeve air hole is connected to the air duct outlet, and the air hole opening on the air outlet side of the covering sleeve air hole is connected to the reaction chamber.

[0021] Preferably, the air holes of the covering sleeve are straight pipes and are arranged along the tangent direction of the outer circle of the nozzle body.

[0022] Preferably, the air duct outlet is arranged along the tangent direction of the outer circle of the nozzle body.

[0023] Preferably, an air duct inlet is provided on the air inlet side outer end surface of the spray head body, one end of the air duct inlet is used to connect to the air inlet pipe group, and the other end is connected to the air inlet end of the main body air duct.

[0024] Preferably, the air duct inlet is arranged along the radial direction of the nozzle body and cooperates with the diffuser of the intake pipe group.

[0025] Preferably, a first positioning port is provided on the outer peripheral wall of the nozzle body, and a second positioning port is provided on the inner peripheral wall of the nozzle covering sleeve for circumferentially limiting cooperation with the first positioning port.

[0026] Preferably, the first positioning port is opened on the outer peripheral wall of the air inlet side end of the shower head body, and the second positioning port is opened on the inner peripheral wall of the air inlet side end of the shower head covering sleeve.

[0027] Preferably, the first positioning port is provided with an air inlet groove, one end of the air inlet groove is connected to the air inlet pipe group, and the other end of the air inlet groove is connected to the air inlet end of the circumferential air duct.

[0028] Preferably, the diameter of the air inlet end of the circumferential air channel is larger than the diameter of the air outlet end.

[0029] Preferably, the nozzle is further provided with an axial air passage; the air inlet end of the axial air passage is connected to the second air inlet pipe of the air inlet pipe group, and the air outlet end of the axial air passage is provided with a central air injection hole group.

[0030] Preferably, a sealing ring installation groove is provided on the outer peripheral wall of the nozzle covering sleeve.

[0031] Preferably, it further comprises: a fixing block; the jet head can be mounted on the dielectric window through the fixing block.

[0032] An etching machine includes: the above-mentioned air jet structure.

[0033] As can be seen from the above technical solutions, the jet structure provided by the present invention solves the problem of vortex generation, loss of airflow kinetic energy and deposition in the dead corners of the air channel by setting a circumferential air channel in an arc shape.

[0034] Compared with the air channels with right-angle corners, the circumferential air channel is arc-shaped, which has the characteristics of small flow resistance, long jet direction and large momentum, and it is easier to change the etching uniformity by adjusting the air flow rate;

[0035] The circumferential gas channel can be set to have a large inlet and a small outlet to further accelerate the gas flow. Due to the stronger jet force, the plasma can be suppressed from flowing back to the jet head.

[0036] The gas is ejected in a spiral jet manner, and the direction of the gas ejection is non-perpendicular to the inner surface of the cavity. The direction of the gas ejection to the inner surface of the cavity has a non-perpendicular inclination angle with the tangent direction of the inner surface of the cavity, which can make it easier to remove the attachments on the surface of the cavity and reduce the loss to the cavity surface.

[0037] The present invention also provides an etching machine, which has corresponding beneficial effects due to the adoption of the above-mentioned jet structure. For details, please refer to the above description, which will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0039] FIG1 is a schematic structural diagram of a main body of an etcher in which an air injection structure provided by an embodiment of the present invention is applied;

[0040] FIG2 is an overall schematic diagram of an air injection structure provided by an embodiment of the present invention;

[0041] FIG3 is a cross-sectional schematic diagram of an air injection structure provided by an embodiment of the present invention;

[0042] FIG4 is a partial enlarged schematic diagram of the cooperation between the nozzle body and the nozzle covering sleeve;

[0043] FIG5 is a schematic structural diagram of a nozzle covering sleeve of an air injection structure provided by an embodiment of the present invention;

[0044] FIG6 is a schematic structural diagram of a nozzle body of an injection structure provided by an embodiment of the present invention;

[0045] FIG7 is a perspective schematic diagram of the cooperation between the nozzle body and the nozzle covering sleeve provided by an embodiment of the present invention;

[0046] FIG8 is a schematic diagram of the cross-sectional structure of the jet structure provided by an embodiment of the present invention along line XX in FIG3 ;

[0047] FIG9 is a schematic diagram of the jet direction of the jet structure provided by an embodiment of the present invention.

[0048] Among them, 101-jet head body, 101a-airway inlet, 101b-central jet hole group, 101c-airway outlet, 101d-main airway, 101e-air inlet slot;

[0049] 102-jet head covering sleeve, 102b-covering sleeve air hole, 102c-air hole opening, 102d-covering sleeve air channel, 102e-second positioning port;

[0050] 103 - Ceramic dielectric window, 104 - Inlet pipe assembly, 104a - First inlet pipe, 104b - Second inlet pipe, 104c - Diffuser, 105 - Fixing block, 106 - Second sealing ring, 107 - Third sealing ring, 108 - First sealing ring, 109 - Central inlet shut-off valve, 110 - Central inlet pipe, 111 - Edge inlet pipe, 112 - Main inlet rear section pipe, 113 - Main inlet front section pipe, 114 - Connecting bolts, 115 -reaction chamber, 116-pressure control valve, 117-vacuum pump, 118-bias matching network, 119-bias RF power supply, 120-coupling coil, 121-excitation source matching network, 122-gas source, 123-shielding cover, 124-bias electrode, 151-excitation source RF power supply, 152-substrate sheet, 153-plasma, 154-edge gas inlet shut-off valve, 155-chamber inner surface, 156-jet direction of spiral jet head. DETAILED DESCRIPTION

[0051] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0052] The jet structure provided by the embodiment of the present invention includes: a jet head, the structure of which can be referred to as shown in Figures 1 to 8;

[0053] The nozzle is provided with a circumferential air channel, one end of which is used to connect to the air inlet pipe group 104 , and the other end of which is used to face the cavity wall of the reaction chamber 115 . The circumferential air channel is arc-shaped.

[0054] As can be seen from the above technical solution, the jet structure provided by the embodiment of the present invention has an arc-shaped circumferential air channel without dead corners. During the jetting process, there is no resistance from right-angle corners. Compared with the air channels of the prior art, this can solve the problems of vortex generation, loss of airflow kinetic energy, and deposition at dead corners. The arc-shaped circumferential air channel has the characteristics of low flow resistance, long jet direction, and large momentum compared to air channels with right-angle corners, making it easier to change the etching uniformity by adjusting the airflow rate.

[0055] Furthermore, the nozzle includes: a nozzle body 101 and a nozzle cover 102, and the nozzle cover 102 covers the nozzle body 101. The structure of the nozzle cover 102 can be referred to Figures 3, 4 and 7;

[0056] A circumferential air passage is formed between the shower head body 101 and the shower head cover 102 .

[0057] This technical solution forms a circumferential air passage by covering the nozzle body 101 with the nozzle covering sleeve 102 , thereby ensuring the airtightness of the circumferential air passage, having a compact structure and low cost; in addition, the nozzle covering sleeve 102 protects the nozzle body 101 .

[0058] Furthermore, the outer wall of the showerhead body 101 defines a main air passage 101d, the structure of which can be seen in Figures 3, 4, and 6. A circumferential air passage is formed between the main air passage 101d and the inner wall of the showerhead cover 102. Of course, the circumferential air passage can also be provided on the inner wall of the showerhead cover 102, or simultaneously provided at corresponding locations on the outer wall of the main air passage 101d and the inner wall of the showerhead cover 102.

[0059] Specifically, the main air channel 101 d is a spiral air channel, and its structure can be referred to FIG. 6 , and is arranged around the central axis of the nozzle main body 101 .

[0060] Furthermore, the main air passages 101d are multiple, as shown in Figure 6 . These multiple air passages 101d spiral in the same direction and are evenly distributed around the circumference of the air jet body 101. This design ensures sufficient airflow, allowing gas to be ejected simultaneously in different directions. Furthermore, even if some of the main air passages 101d become blocked, the air jet can still operate.

[0061] As shown in Figure 5 , the inner wall of the air jet cover 102 defines a cover air passage 102d, with the main air passage 101d and the cover air passage 102d forming the aforementioned circumferential air passage. Referring to Figures 5 and 6 , the upper portion of the air jet body 101 and the upper portion of the air jet cover 102 are positioned and assembled together, with the main air passage 101d located at the lower portion of the air jet body 101 and the cover air passage 102d located at the lower portion of the air jet cover 102.

[0062] Preferably, the covering sleeve air channel 102d is a cylindrical surface coaxial with the nozzle body 101, and its structure can be referred to as shown in Figures 5 and 6. The inner diameter of the covering sleeve air channel 102d is smaller than the inner diameter of the upper part of the nozzle covering sleeve 102, and an annular step surface is formed between the two for positioning and assembling the upper part of the nozzle body 101.

[0063] Furthermore, the air outlet end of the main air duct 101d is provided with an air outlet 101c, the structure of which can be referred to Figures 6 and 8;

[0064] The inner wall of the nozzle covering sleeve 102 is provided with a covering sleeve air hole 102b that penetrates the inner and outer peripheral walls. The air inlet side of the covering sleeve air hole 102b is connected to the air duct outlet 101c, and the air hole opening 102c on the air outlet side of the covering sleeve air hole 102b is connected to the reaction chamber 115. Its structure can be referred to Figures 4 and 8.

[0065] The scheme works as follows:

[0066] The gas is ejected from the gas outlet 101c of the main gas channel 101d, and is ejected from the gas hole 102c of the covering sleeve toward the reaction chamber 115.

[0067] Specifically, the sheath air channel 102d is a straight pipe and is arranged along a tangent line to the outer circumference of the nozzle body 101. It should be noted that this design allows the gas ejected from the sheath air channel 102d to be sprayed non-perpendicularly toward the inner surface of the cavity, making it easier to remove debris attached to the cavity surface and reducing damage to the cavity surface. The gas flow is shown in Figure 9.

[0068] Furthermore, the airway outlet 101c is arranged along a tangent to the outer circumference of the showerhead body 101. The structure of this arrangement can be seen in Figures 6 and 8. It should be noted that this design ensures that the airway outlet 101c and the sheath airway 102d are aligned in the same direction. The airway 102d on the showerhead sheath 102 is aligned with the airway outlet 101c on the showerhead body 101 and is arranged along a tangent to the outer circumference of the showerhead body 101.

[0069] Furthermore, the air inlet 101a is formed on the air inlet side of the main body 101. Its structure can be seen in Figure 6. One end of the air inlet 101a is connected to the air inlet pipe assembly 104, and the other end is connected to the air inlet end of the main body air duct 101d. This design ensures that the air inlet 101a serves as an air intake, is compact, and maintains a stable working principle.

[0070] Furthermore, the air inlet 101a is arranged along the radial direction of the nozzle body 101, and its structure can be referred to Figure 6, and cooperates with the diffuser 104c of the intake pipe group 104. Through such a design, the air inlet 101a is easy to take in air from the diffuser 104c.

[0071] Specifically, the outer peripheral wall of the nozzle body 101 is provided with a first positioning port, which is located on a cross-section of the nozzle body 101. The inner peripheral wall of the nozzle cover 102 is provided with a second positioning port 102e, which cooperates with the first positioning port in a circumferential direction. The second positioning port 102e is located on a cross-section of the nozzle cover 102. The structure of the second positioning port 102e can be seen in Figure 5. This design facilitates the limited cooperation between the nozzle body 101 and the nozzle cover 102.

[0072] Furthermore, the first positioning port is opened on the outer peripheral wall of the air inlet side of the nozzle body 101, and the second positioning port 102e is opened on the inner peripheral wall of the air inlet side of the nozzle cover 102. Such a design has a compact structure and takes into account the working principle.

[0073] Furthermore, the first positioning port defines an air inlet groove 101e, the structure of which can be seen in Figure 6. One end of the air inlet groove is connected to the air inlet pipe assembly, and the other end is connected to the air inlet end of the circumferential airway. This design allows the air inlet groove 101e to simultaneously provide a position limit and intake air, ensuring sufficient air flow.

[0074] Specifically, the diameter of the air inlet end of the circumferential air channel is larger than the diameter of the air outlet end. Such a design further accelerates the gas during the flow process.

[0075] Furthermore, the nozzle head is provided with an axial air channel; the air inlet end of the axial air channel is connected to the second air inlet pipe 104b of the air inlet pipe group 104, and the air outlet end of the axial air channel is provided with a central air injection hole group 101b. The structure of this axial air channel can be seen in Figure 3. It should be noted that the central air injection hole group 101b can ensure sufficient air flow, and the central air injection hole group 101b blows vertically toward the substrate sheet 152, ensuring vertical air injection.

[0076] Furthermore, a sealing ring installation groove is formed on the outer wall of the showerhead cover 102, and its structure can be referred to Figures 3 and 4. With this design, by installing the first sealing ring 108 in the sealing ring installation groove, the gas in the reaction chamber 115 is sealed and prevented from escaping, thereby ensuring the airtightness of the reaction chamber 115.

[0077] Specifically, it further includes a fixing block 105; the nozzle head can be mounted on the dielectric window 103 via the fixing block 105, and its structure can be seen in Figures 2 and 3. It should be noted that the fixing block 105 plays a role in fixing the nozzle head.

[0078] The present invention also provides an etching machine, comprising: the above-mentioned air jet structure. Since this solution adopts the above-mentioned air jet structure, it also has corresponding beneficial effects. For details, please refer to the above description and will not be repeated here.

[0079] The present invention will be further described below with reference to specific embodiments:

[0080] In order to solve the technical problem, a specific technical solution is provided: as shown in Figures 1, 2, 3, 4, 5, 6, 7 and 8. The present invention provides an air injection structure for controlling the air inlet outlet and adjusting the air inlet height, comprising a reaction chamber 115, a coupling coil 120, a ceramic dielectric window 103, an excitation source RF power supply 151, an excitation source matching network 121, a shielding cover 123, a gas source 122, a bias electrode 124, a bias RF power supply 119, a bias matching network 118, a pressure control valve 116, a vacuum pump 117, an air injection head body 101, an air inlet pipe group 104, a fixing block 105, and an air injection head covering sleeve 102. , a second sealing ring 106, a third sealing ring 107, a first sealing ring 108, a central air intake pipe 110, an edge air intake pipe 111, a total air intake rear section pipe 112, a total air intake front section pipe 113, a central air intake stop valve 109, an edge air intake stop valve 154, a central jet hole group 101b, a second positioning port 102e and an air intake groove 101e; in addition, the air intake pipe group 104 includes a first air intake pipe 104a and a second air intake pipe 104b, and also includes a diffuser 104c.

[0081] The central air intake stop valve 109 and the edge air intake stop valve 154 both function as stop valves to control the on and off of the air path.

[0082] The spiral air channel jet structure of the present invention is characterized by a jet head comprising a jet head body 101 and a jet head sheath 102. The jet head body 101 is provided with a main air channel 101d. The sheath 102 covers the spiral jet head. The sheath air channel 102d of the sheath 102 is aligned with the air channel outlet 101c of the jet head body 101 and is tangential to the outer circumference of the jet head body 101. Gas enters the air channel inlet 101a of the jet head body 101 through 104c of the air inlet pipe assembly 104, passes through the main air channel 101d of the jet head body 101, passes through 101c, and then through the sheath air holes 102b of the sheath 102, exiting through the air hole opening 102c.

[0083] As shown in FIG6 , a jet structure of a spiral airway of the present invention has an arc-shaped airway without corners, which is not easy to form sediment and can be easily removed.

[0084] As shown in FIG6 , the present invention shows a spiral air channel jet structure in which the air channel is arc-shaped. Compared with a right-angled air channel, the air channel has a small flow resistance, a long jet direction, and a large momentum, and it is easier to change the etching uniformity by adjusting the air flow.

[0085] In the jet structure of the spiral air channel of the present invention, the air channel can be configured to have a large inlet and a small outlet, thereby further accelerating the air flow.

[0086] The jet structure of the spiral air channel of the present invention has a stronger jet force, thereby suppressing the plasma from flowing back to the jet head.

[0087] As shown in Figure 9, a spiral airway jet structure of the present invention uses spiral jetting to eject gas in a non-vertical direction toward the inner surface of the cavity. The direction of the gas ejected toward the inner surface of the cavity has a non-vertical inclination angle with the tangent direction of the inner surface of the cavity, which can make it easier to remove attachments on the cavity surface and reduce damage to the cavity surface.

[0088] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0089] The above description of the disclosed embodiments is intended to enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A jet structure, characterized in that: include: Jet head; The nozzle is provided with a circumferential air passage, one end of which is used to connect to the air inlet pipe group (104), and the other end of which is used to face the cavity wall of the reaction chamber (115), and the circumferential air passage is arc-shaped.

2. The jet structure according to claim 1, characterized in that: The jet head comprises: a jet head body (101) and a jet head covering sleeve (102), wherein the jet head covering sleeve (102) covers the jet head body (101); The circumferential air passage is formed between the spray head body (101) and the spray head covering sleeve (102).

3. The jet structure according to claim 2, characterized in that: The outer peripheral wall of the nozzle body (101) is provided with a main air passage (101d), and the main air passage (101d) and the inner peripheral wall of the nozzle covering sleeve (102) form the circumferential air passage.

4. The jet structure according to claim 3, characterized in that: The main body air passage (101d) is a spiral air passage, and is arranged around the central axis of the spray head main body (101).

5. The jet structure according to claim 4, characterized in that: There are a plurality of main body air passages (101d), and the spiral directions of the plurality of main body air passages (101d) are the same and are evenly distributed along the circumference of the spray head body (101).

6. The jet structure according to any one of claims 3 to 5, characterized in that: The inner wall of the nozzle covering sleeve (102) is provided with a covering sleeve air channel (102d), and the main body air channel (101d) and the covering sleeve air channel (102d) form the circumferential air channel.

7. The jet structure according to claim 6, characterized in that: The sheath air passage (102d) is a cylindrical surface coaxial with the spray head body (101).

8. The jetting structure according to any one of claims 3 to 5, characterized in that: The air outlet end of the main airway (101d) is provided with an airway outlet (101c); The nozzle covering sleeve (102) is provided with a covering sleeve air hole (102b) penetrating the inner and outer peripheral walls; the air inlet side of the covering sleeve air hole (102b) is connected to the air duct outlet (101c); and the air hole opening (102c) on the air outlet side of the covering sleeve air hole (102b) is connected to the reaction chamber (115).

9. The jetting structure according to claim 8, characterized in that: The cladding sleeve air hole (102b) is a straight pipe and is arranged along the tangent direction of the outer circle of the nozzle body (101).

10. The jetting structure according to claim 9, characterized in that: The airway outlet (101c) is arranged along the tangent direction of the outer circle of the spray head body (101).

11. The jetting structure according to any one of claims 3 to 5, characterized in that: An air duct inlet (101a) is provided on the air inlet side outer end surface of the spray head body (101), one end of the air duct inlet (101a) is used to connect to the air inlet pipe group (104), and the other end is connected to the air inlet end of the main body air duct (101d).

12. The jetting structure according to claim 11, characterized in that: The air passage inlet (101a) is arranged along the radial direction of the nozzle body (101) and cooperates with the diffuser (104c) of the air intake pipe group (104).

13. The jetting structure according to claim 2, characterized in that: The outer peripheral wall of the nozzle body (101) is provided with a first positioning port, and the inner peripheral wall of the nozzle covering sleeve (102) is provided with a second positioning port (102e) that cooperates with the first positioning port in a circumferential limiting manner.

14. The jetting structure according to claim 13, characterized in that: The first positioning port is opened on the outer peripheral wall of the air inlet side end of the nozzle body (101), and the second positioning port (102e) is opened on the inner peripheral wall of the air inlet side end of the nozzle covering sleeve (102).

15. The jetting structure according to claim 13, characterized in that: The first positioning port is provided with an air intake groove (101e), one end of the air intake groove (101e) is connected to the air intake pipe group (104), and the other end of the air intake groove (101e) is connected to the air intake end of the circumferential air passage.

16. The jetting structure according to claim 1, characterized in that: The diameter of the air inlet end of the circumferential air passage is greater than the diameter of the air outlet end.

17. The jetting structure according to claim 1, characterized in that: The spray head is also provided with an axial air passage; the air inlet end of the axial air passage is connected to the second air inlet pipe (104b) of the air inlet pipe group (104), and the air outlet end of the axial air passage is provided with a central spray hole group (101b).

18. The jetting structure according to claim 2, characterized in that: The outer peripheral wall of the nozzle covering sleeve (102) is provided with a sealing ring installation groove.

19. The jetting structure according to claim 1, characterized in that: Also includes: A fixing block (105); the jet head can be mounted on the medium window (103) through the fixing block (105).

20. An etching machine, characterized in that: include: The jet structure according to any one of claims 1 to 19.

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