Dust removal re-detection device and dust removal apparatus

Abstract

The present application relates to a dust removal re-detection device and a dust removal apparatus. The dust removal re-detection device comprises: a dust removal module, comprising a dust removal assembly and a dust removal driving assembly, the dust removal assembly being provided at a driving end of the dust removal driving assembly, and the dust removal driving assembly being used for driving the dust removal assembly to move to the position of a photosensitive product to be subjected to dust removal on a carrying tray of a dust removal station, so as to perform dust removal on said photosensitive product on the carrying tray; and a re-detection module, comprising a detection assembly and a detection driving assembly, the detection assembly being provided at a driving end of the detection driving assembly, the detection driving assembly being used for driving the detection assembly to move to the position of a photosensitive product which has undergone the dust removal on the carrying tray of the dust removal station, the detection assembly being provided with an electric connector, and by means of the electric connector, the detection assembly being electrically connected to the photosensitive product which has undergone the dust removal on the carrying tray, and controlling same to undergo imaging.

Description

Dust removal re-inspection device and dust removal equipment Technical Field

[0001] The present application relates to the field of chip detection technology, and in particular to a dust removal and re-inspection device and dust removal equipment. Background Art

[0002] During the packaging and production process of electronic products in the imaging field (such as mobile phones, cameras, car cameras, and surveillance cameras), it is necessary to detect and remove surface dust from CMOS (Complementary Metal-Oxide-Semiconductor) or CCD (Charge-coupled Device) chips.

[0003] After testing, chips requiring dust removal must be cleaned based on the test results. However, traditional dust removal equipment can only perform simple dust removal operations, resulting in poor dust removal results. To improve dust removal quality, one approach is to retest products after dust removal and re-clean those that fail the retest. However, traditional product retesting equipment typically uses CCD cameras to identify dust, which has poor recognition performance and is prone to misidentification or omission.

[0004] Summary of the Invention

[0005] Based on this, it is necessary to provide a dust removal re-inspection device and dust removal equipment that improve the above defects, in order to address the problems of poor dust removal effect and easy misjudgment or omission in re-testing of dust removal equipment in the prior art.

[0006] A dust removal re-inspection device, comprising:

[0007] a dust removal module, comprising a dust removal assembly and a dust removal drive assembly, wherein the dust removal assembly is arranged at a driving end of the dust removal drive assembly, and the dust removal drive assembly is used to drive the dust removal assembly to move to the photosensitive product to be dusted on the carrier at the dust removal station, so as to remove dust from the photosensitive product to be dusted on the carrier; and

[0008] The re-inspection module includes a test component and a detection drive component, wherein the test component is arranged at the drive end of the detection drive component, and the detection drive component is used to drive the test component to move to the photosensitive product that has completed dust removal on the carrier plate located at the dust removal station; the test component has an electrical connector, which is used to electrically connect to the photosensitive product that has completed dust removal on the carrier plate through the electrical connector, and control the photosensitive product that has completed dust removal on the carrier plate to perform imaging.

[0009] In one embodiment, the dust removal assembly includes a dust removal drive and a dust removal clamping member, the dust removal drive is installed at the driving end of the dust removal drive assembly, and the dust removal clamping member is installed at the driving end of the dust removal drive and is used to clamp the dust removal rod; the dust removal drive is used to drive the dust removal clamping member to extend or retract, and is also used to drive the dust removal clamping member to rotate.

[0010] In one embodiment, the dust removal module also includes a dust rod cache assembly for storing dust rods, and the dust removal drive assembly is also used to drive the dust removal assembly to move to the dust rod cache assembly, so that the dust removal assembly releases the used dust rods to the dust rod cache assembly and picks up the unused dust rods stored in the dust rod cache assembly.

[0011] In one embodiment, the dust removal rod cache assembly includes a base and a cache disk, the cache disk is arranged on the base, and has a plurality of cache portions arranged at intervals along the circumference of the cache disk, the cache portions are used to cache the dust removal rods; the cache disk can be controlled to rotate around its own axis relative to the base.

[0012] In one embodiment, the re-inspection module also includes a light source assembly installed at the driving end of the dust removal drive assembly, the dust removal drive assembly is used to drive the light source assembly to move to the photosensitive product that has completed dust removal on the carrier plate located at the dust removal station, and the light source assembly is used to illuminate the photosensitive product that has completed dust removal on the carrier plate.

[0013] In one embodiment, the re-inspection module also includes a lens assembly, which is mounted on the dust removal drive assembly or the light source assembly; the lens assembly has a lens, which is located on the light output side of the light source assembly, so that the light emitted by the light source assembly passes through the lens and irradiates the photosensitive product on the carrier that has completed dust removal.

[0014] In one embodiment, the re-inspection module also includes a first visual positioning component, which is arranged at the driving end of the dust removal drive component. The first visual positioning component is used to detect the position of the photosensitive product that has completed dust removal on the carrier plate located at the dust removal station, and the dust removal drive component is used to drive the light source component to move according to the detection result of the first visual positioning component.

[0015] In one embodiment, the dust removal drive assembly includes a first drive module, a second drive module, a third drive module and a first moving seat; the second drive module is mounted on the driving end of the first drive module, the first moving seat is mounted on the driving end of the second drive module, and the third drive module and the dust removal assembly are mounted on the first moving seat;

[0016] The first driving module is used to drive the first moving seat to move along the first direction, the second driving module is used to drive the first moving seat to move along the second direction, the first visual positioning component and the light source component are both installed on the driving end of the third driving module, and the third driving module is used to drive the first visual positioning component and the light source component to move along the third direction, wherein the first direction, the second direction and the third direction intersect with each other.

[0017] In one embodiment, the dust removal drive assembly further includes a rotating module mounted on the first moving seat, the dust removal assembly is mounted on the driving end of the rotating module, and the rotating module is used to drive the dust removal assembly to rotate to adjust the spatial angle of the dust removal assembly.

[0018] In one embodiment, the dust removal module also includes a second visual positioning component, which is installed at the driving end of the detection drive component. The second visual positioning component is used to detect the position of the photosensitive product that has completed dust removal on the carrier plate located at the dust removal station, and the detection drive component is used to drive the test component to move according to the detection result of the second visual positioning component.

[0019] In one embodiment, the detection drive assembly includes a fourth drive module, a fifth drive module, a sixth drive module and a second moving seat; the fifth drive module is installed at the driving end of the fourth drive module, the sixth drive module is installed at the driving end of the fifth drive module, and the second moving seat is installed at the driving end of the sixth drive module. The fourth drive module is used to drive the second moving seat to move along the fourth direction, the fifth drive module is used to drive the second moving seat to move along the fifth direction, and the sixth drive module is used to drive the second moving seat to move along the sixth direction. The test assembly and the second visual positioning assembly are both installed on the second moving seat; wherein, the fourth direction, the fifth direction and the sixth direction intersect with each other.

[0020] In one embodiment, the dust removal re-inspection device further includes a conveying module, which includes a conveying component, a pressing component and a limit plate. The conveying component is used to convey the carrier to the dust removal station, and the dust removal station is located between the pressing component and the limit plate; the pressing component can controllably press the carrier located at the dust removal station onto the limit plate.

[0021] In one embodiment, the conveying assembly includes two second conveying units and a second spacing adjustment mechanism, and the two second conveying units are used to jointly support and convey the carrier;

[0022] The second spacing adjustment mechanism is in transmission connection with at least one of the two second conveying units to drive the two second conveying units to move closer to or farther from each other.

[0023] In one embodiment, one of the pressing assembly and the carrier has a positioning pin, and the other has a positioning hole;

[0024] When the carrier plate located at the dust removal station is pressed against the limiting plate, the positioning pin is positioned and fitted in the positioning hole.

[0025] In one embodiment, a first position detection member and a second position detection member are sequentially arranged on a path along which the conveying assembly conveys the carrier;

[0026] When the first position detection component detects the carrier, the conveying component controls to reduce the speed of conveying the carrier according to the detection result of the first position detection component; when the second position detection component detects the carrier, the conveying component stops conveying the carrier according to the detection result of the second position detection component.

[0027] A dust removal device, comprising a detection device and a dust removal re-inspection device as described in any of the above embodiments;

[0028] The detection device is used to electrically connect with each photosensitive product on the carrier located at the detection station, and control the imaging of each photosensitive product on the carrier; the dust removal component is used to remove dust from the photosensitive products on the carrier transferred to the dust removal station according to the imaging results.

[0029] The above-mentioned dust removal re-inspection device and dust removal equipment, after the testing of each photosensitive product on the carrier plate of the detection station is completed, the carrier plate is transferred to the dust removal station. Then, the dust removal drive component drives the dust removal component to move to the photosensitive product on the carrier plate that is determined to have dust, so that the dust removal component removes dust from the photosensitive product. After the dust removal is completed, the detection drive component drives the test component to move to the photosensitive product on the carrier plate of the dust removal station that has completed dust removal, so that the test component is electrically connected to the photosensitive product that has completed dust removal, and controls the photosensitive product that has completed dust removal to be imaged. Based on the imaging result, it can be determined whether there is still dust on the photosensitive product that has completed dust removal. If it is determined that there is still dust, the dust removal component is used to remove dust from the photosensitive product again or the photosensitive product is removed in the subsequent process, thereby greatly reducing the misjudgment and missed judgment rate, and preventing photosensitive products with dust from flowing into the subsequent production process. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] FIG1 is a schematic structural diagram of a dust removal re-inspection device according to an embodiment of the present application;

[0031] FIG2 is a schematic diagram of the assembly structure of the dust removal drive component, the dust removal component, and the first visual positioning component in the dust removal re-inspection device shown in FIG1 ;

[0032] FIG3 is a front view of the assembly structure of the dust removal drive assembly, the dust removal assembly, the first visual positioning assembly, and the light source assembly in the dust removal re-inspection device shown in FIG1 ;

[0033] FIG4 is a schematic diagram of the assembly structure of the detection drive component, the detection component, and the visual positioning component in the dust removal re-inspection device shown in FIG1 ;

[0034] FIG5 is a schematic structural diagram of a conveying module in the dust removal and re-inspection device shown in FIG1 ;

[0035] FIG6 is a schematic structural diagram of the dust removal rod buffer assembly in the dust removal re-inspection device shown in FIG1 . DETAILED DESCRIPTION

[0036] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0037] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0039] In this application, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0040] In this application, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0041] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods.

[0042] Referring to Figure 1, one embodiment of the present application provides a dust removal device, comprising a detection device (not shown) and a dust removal and re-inspection device 2. A carrier is loaded with multiple photosensitive products, which pass through the detection device and the dust removal and re-inspection device 2 during circulation. The detection device is provided with a detection station, and the dust removal and re-inspection device 2 is provided with a dust removal station C. When the carrier reaches the detection station of the detection device, the detection device is used to electrically connect to each photosensitive product on the carrier, thereby illuminating each photosensitive product on the carrier to control the imaging of each photosensitive product on the carrier. Since the presence of dust on a photosensitive product affects the photosensitivity of the photosensitive product, thereby affecting the imaging quality of the photosensitive product. Therefore, the presence of dust on the photosensitive product can be determined based on the imaging results of the photosensitive product. When the carrier reaches the dust removal station C of the dust removal and re-inspection device 2, the dust removal and re-inspection device 2 is used to remove dust and re-inspect the photosensitive product on the carrier that is determined to have dust (i.e., the photosensitive product to be dust-removed) based on the imaging results. Optionally, the photosensitive product may be a CMOS chip or a CCD chip.

[0043] Please continue to refer to Figure 1. In the embodiment of the present application, the dust removal and re-inspection device 2 includes a dust removal module (not shown) and a re-inspection module (not shown). The dust removal module includes a dust removal component 21 and a dust removal drive component 22. The dust removal component 21 is arranged at the drive end of the dust removal drive component 22. When the carrier is transferred to the dust removal station C, the dust removal drive component 22 drives the dust removal component 21 to move to the photosensitive product on the carrier that is determined to have dust (i.e., the photosensitive product to be dusted) based on the above-mentioned imaging results, so that the dust removal component 21 removes dust from the photosensitive product on the carrier that is determined to have dust.

[0044] The re-inspection module includes a test assembly 25 and a detection drive assembly 26. The test assembly 25 is mounted on the drive end of the detection drive assembly 26. The detection drive assembly 26 is used to drive the test assembly 25 to the position of the dust-cleaned photosensitive product on the carrier plate at the dust removal station C. The test assembly 25 has an electrical connector 251, which is used to electrically connect to the dust-cleaned photosensitive product on the carrier plate to illuminate the dust-cleaned photosensitive product on the carrier plate, thereby controlling the imaging of the dust-cleaned photosensitive product on the carrier plate. Optionally, the electrical connector 251 can be a probe.

[0045] In actual use of the above-mentioned dust removal and re-inspection device, after the testing of each photosensitive product on the carrier of the detection station is completed, the carrier is transferred to the dust removal station C. Then, the dust removal drive component 22 drives the dust removal component 21 to move to the photosensitive product on the carrier that is determined to have dust, so that the dust removal component 21 removes dust from the photosensitive product. After the dust removal is completed, the detection drive component 26 drives the test component 25 to move to the photosensitive product on the carrier of the dust removal station C that has completed the dust removal, so that the test component 25 is electrically connected to the photosensitive product that has completed the dust removal, and controls the photosensitive product that has completed the dust removal to be imaged. Based on the imaging result, it can be determined whether there is still dust on the photosensitive product that has completed the dust removal. If it is determined that there is still dust, the dust removal component 21 is used to remove dust from the photosensitive product again or the photosensitive product is removed in the subsequent process, thereby greatly reducing the misjudgment and missed judgment rates, and preventing the photosensitive product with dust from flowing into the subsequent production process.

[0046] Specifically, in this embodiment, the dust removal device further includes a control module electrically connected to the detection device, the dust removal module, and the re-inspection module. When the carrier plate is transferred to the inspection station, the detection device is electrically connected to each photosensitive product on the carrier plate, and the control module is configured to control the imaging of each photosensitive product on the carrier plate via the detection device. The control module is further configured to determine whether dust is present on each photosensitive product on the carrier plate based on the imaging results of each photosensitive product, thereby obtaining positional information on the photosensitive product on the carrier plate determined to be dusty.

[0047] When the carrier is transferred to the dust removal station C, the control module controls the dust removal drive component 22 to drive the dust removal component 21 to move to the photosensitive product on the carrier that is determined to have dust based on the position information, and then controls the dust removal component 21 to remove dust from the photosensitive product that is determined to have dust. After the dust removal is completed, the control module controls the detection drive component 26 to drive the detection component 25 to move to the photosensitive product on the carrier that has completed dust removal based on the above position information, so that the detection component 25 is electrically connected to the photosensitive product on the carrier that has completed dust removal, and the control module controls the photosensitive product on the carrier that has completed dust removal to be imaged through the detection component 25. The control module determines whether there is still dust on the photosensitive product that has completed dust removal based on the imaging result of the photosensitive product that has completed dust removal, that is, to re-inspect the photosensitive product that has completed dust removal. Optionally, the control module can be an industrial computer.

[0048] Referring to Figures 1 to 3, in some embodiments, the re-inspection module includes a light source assembly 23 (see Figure 3), which is mounted on the driving end of the dust removal drive assembly 22. The dust removal drive assembly 22 is used to drive the light source assembly 23 to move to the photosensitive product on the carrier plate at the dust removal station C that has completed dust removal. The light source assembly 23 is used to illuminate the photosensitive product on the carrier plate at the dust removal station C that has completed dust removal. In this way, the light source assembly 23 is used to illuminate the photosensitive product on the carrier plate that has completed dust removal, so that the photosensitive product that has completed dust removal can be imaged, which is conducive to improving the accuracy of the re-inspection.

[0049] Specifically in the embodiment, the dust removal station C is located between the light source assembly 23 and the test assembly 25. That is, when the carrier plate flows to the dust removal station C, the carrier plate is located between the light source assembly 23 and the test assembly 25.

[0050] Specifically, in this embodiment, the re-inspection module further includes a first visual positioning component 24. The first visual positioning component 24 and the light source component 23 are both disposed at the drive end of the dust removal drive component 22. The first visual positioning component 24 is configured to detect the position of the dust-removed photosensitive product on the carrier plate at the dust removal station C. The first visual positioning component 24 is electrically connected to a control module, which is configured to control the dust removal drive component 22 to drive the light source component 23 to move based on the detection results of the first visual positioning component 24, so that the light source component 23 can accurately illuminate the dust-removed photosensitive product on the carrier plate at the dust removal station C. Optionally, the first visual positioning component 24 may employ a positioning camera.

[0051] Please refer to Figure 4. Specifically in the embodiment, the dust removal module also includes a second visual positioning component 27. The test component 25 and the second visual positioning component 27 are both installed on the driving end of the detection drive component 26. The second visual positioning component 27 is used to detect the position of the photosensitive product that has completed dust removal on the carrier plate located at the dust removal station C. The second visual positioning component 27 is electrically connected to the control module, and the control module is used to control the detection drive component 26 to drive the test component 25 to move according to the detection result of the second visual positioning component 27, so that the test component 25 can accurately reach the photosensitive product that has completed dust removal on the carrier plate, and ensure that the electrical connector 251 on the test component 25 can be accurately plugged into the photosensitive product, so that the control module can control the photosensitive product to perform imaging through the test component 25. Optionally, the second visual positioning component 27 can use a positioning camera.

[0052] In this manner, after the carrier plate transfers to dust removal station C, the control module, based on the imaging results, controls the dust removal drive assembly 22 to drive the dust removal assembly 21 to the location of the photosensitive product on the carrier plate determined to have dust. The dust removal assembly 21 then removes dust from the photosensitive product determined to have dust. Under the guidance of the first visual positioning assembly 24, the dust removal drive assembly 22 drives the light source assembly 23 to move to the location of the dust-removed photosensitive product on the carrier plate, causing the light source assembly 23 to illuminate the dust-removed photosensitive product. Then, under the guidance of the second visual positioning assembly 27, the detection drive assembly 26 drives the test assembly 25 until the test assembly 25 reaches the dust-removed photosensitive product and the electrical connector 251 on the test assembly 25 is connected to the dust-removed photosensitive product. The control module then controls the test assembly 25 to image the dust-removed photosensitive product. Based on the imaging results, the control module determines whether dust is still present on the dust-removed photosensitive product.

[0053] Referring to Figures 1 to 3, specifically in the embodiment, the dust removal drive assembly 22 includes a first drive module 221, a second drive module 222, a third drive module 223, and a first moving base 224. The second drive module 222 is mounted on the drive end of the first drive module 221, the first moving base 224 is mounted on the drive end of the second drive module 222, and the third drive module 223 and the dust removal assembly 21 are mounted on the first moving base 224. The first drive module 221 is used to drive the first moving base 224 to move in a first direction, and the second drive module 222 is used to drive the first moving base 224 to move in a second direction. The first visual positioning assembly 24 and the light source assembly 23 are both mounted on the drive end of the third drive module 223. The third drive module 223 is used to drive the first visual positioning assembly 24 and the light source assembly 23 to move in a third direction. The first direction, the second direction, and the third direction intersect with each other. Preferably, the first direction, the second direction, and the third direction are perpendicular to each other.

[0054] Furthermore, the dust removal drive assembly 22 further includes a rotating module 225 mounted on the first moving base 224, and the dust removal assembly 21 is mounted on the driving end of the rotating module 225. The rotating module 225 is used to drive the dust removal assembly 21 to rotate, thereby adjusting the spatial angle of the dust removal assembly 21, ensuring that the dust removal assembly 21 can accurately remove dust from the photosensitive product determined to have dust.

[0055] Specifically, the dust removal assembly 21 includes a dust removal driver 210 and a dust removal clamping member 213. The dust removal driver 210 is mounted on the driving end of the rotating module 225. The dust removal clamping member 213 is mounted on the driving end of the dust removal driver 210 and is used to clamp the dust removal rod B. The dust removal driver 210 is used to drive the dust removal clamping member 213 to extend or retract, so that the dust removal rod B on the dust removal clamping member 213 can remove dust from the corresponding photosensitive product.

[0056] Furthermore, the dust removal drive 210 is also used to drive the dust removal clamp 213 to rotate, thereby causing the dust removal rod B, which is clamped by the dust removal clamp 213, to rotate about its own axis. Thus, each time the dust removal rod B completes a dust removal operation, the dust removal drive 210 drives the dust removal rod B to rotate a certain angle (e.g., 15°) so that the surface of the dust removal rod B that contacts the photosensitive product is dust-free during the next dust removal operation. This prevents the dust removal rod B from contacting the photosensitive product again with dusty surfaces. It is understood that after the dust removal rod B on the dust removal clamp 213 has rotated 360° about its own axis, it needs to be replaced with a new one.

[0057] Specifically in the embodiment, the re-inspection module also includes a lens assembly (not shown), which is mounted on the driving end of the third drive module 223 of the dust removal drive assembly 22 or on the light source assembly 23. The lens assembly has a lens, which is located on the light output side of the light source assembly 23, so that the light emitted by the light source assembly 23 passes through the lens, and the lens focuses the light and accurately illuminates the dust-removed photosensitive product. In this way, the light source assembly 23 emits light to the lens, and the lens focuses the light and then accurately illuminates the dust-removed photosensitive product, thereby ensuring the consistency of the light irradiated on the photosensitive product, which in turn helps to reduce the rate of false positives and missed positives.

[0058] Specifically in the embodiment, the detection drive assembly 26 includes a fourth drive module 261, a fifth drive module 262, a sixth drive module 263 and a second moving base 264. The fifth drive module 262 is installed at the driving end of the fourth drive module 261, the sixth drive module 263 is installed at the driving end of the fifth drive module 262, and the second moving base 264 is installed at the driving end of the sixth drive module 263. The fourth drive module 261 is used to drive the second moving base 264 to move along the fourth direction, the fifth drive module 262 is used to drive the second moving base 264 to move along the fifth direction, and the sixth drive module 263 is used to drive the second moving base 264 to move along the sixth direction. The test assembly 25 and the second visual positioning assembly 27 are both installed on the second moving base 264 to move with the second moving base 264. Among them, the fourth direction, the fifth direction and the sixth direction intersect with each other. Preferably, the fourth direction, the fifth direction and the sixth direction are perpendicular to each other.

[0059] Referring to Figures 1 and 5 , in the embodiment of the present application, the dust removal and re-inspection device 2 further includes a conveying module, which includes a conveying assembly 20. After the detection device completes the inspection, the carrier is conveyed to the dust removal and re-inspection device 2. The conveying assembly 20 is used to receive the carrier delivered by the detection device and convey it through the dust removal station C.

[0060] Specifically, in this embodiment, the conveying module further includes a pressing assembly 28 and a limiting plate 29 arranged relative to each other. The dust removal station C is located between the pressing assembly 28 and the limiting plate 29. In other words, a carrier arriving at the dust removal station C is positioned between the pressing assembly 28 and the limiting plate 29. The pressing assembly 28 can controllably press the carrier at the dust removal station C against the limiting plate 29, thereby securing the carrier and facilitating dust removal and re-inspection of the photosensitive products on the carrier.

[0061] Specifically, the clamping assembly 28 includes a clamping driver 281 and a clamping seat 282. The clamping seat 282 is mounted on the driving end of the clamping driver 281. The clamping driver 281 is used to drive the clamping seat 282 toward or away from the stop plate 29. Thus, when the carrier plate is transferred to the dust removal station C, the clamping driver 281 drives the clamping seat 282 toward the stop plate 29 until the clamping seat 282 presses the carrier plate against the stop plate 29.

[0062] Furthermore, a positioning pin 283 is provided on the pressing seat 282 of the pressing assembly 28, and a positioning hole is provided on the carrier. When the pressing seat 282 of the pressing assembly 28 presses the carrier against the limiting plate 29, the positioning pin 283 is positioned and engaged in the positioning hole, thereby achieving precise positioning of the carrier by the positioning pin 283 and the positioning hole.

[0063] It is understandable that in other embodiments, the positioning pin 283 may also be provided on the carrier, and the positioning hole may be opened on the pressing seat 282 of the pressing assembly 28, as long as the positioning of the carrier can be achieved, and no limitation is made here.

[0064] In some embodiments, the conveyor assembly 20 includes a conveyor unit 201, which is used to support and convey the carrier. Furthermore, the conveyor unit 201 includes a mounting plate 203 and multiple conveyor wheels (not shown). The mounting plate 203 is mounted on a frame, and multiple conveyor wheels are arranged on the mounting plate 203 at intervals along the conveying direction of the carrier. Each conveyor wheel can rotate in a controlled manner to drive the carrier supported on the conveyor wheel to be transported downstream. In other words, the carrier is supported on the conveyor wheels, and the rotation of the conveyor wheels drives the carrier to move between the conveyor wheels, thereby achieving the conveyance of the carrier.

[0065] Specifically, in this embodiment, the conveyor assembly 20 includes two conveyor units 201 arranged opposite each other. The conveyor wheels of the two conveyor units 201 jointly support and convey the carrier. Thus, one end of the carrier is supported on the conveyor wheel of one conveyor unit 201, and the other end of the carrier is supported on the conveyor wheel of the other conveyor unit 201. This ensures more stable and reliable support for the carrier during transportation, preventing the carrier from shifting or falling.

[0066] It should be noted that in other embodiments, each conveyor unit 201 has a conveyor belt mounted on each conveyor wheel. Rotation of the conveyor belt drives the conveyor belt forward in a sequential manner. The carrier tray is supported on the conveyor belt. In other words, the carrier tray is indirectly supported on the conveyor wheel via the conveyor belt. When the conveyor wheels rotate, driving the conveyor belt forward in a sequential manner, the carrier tray is driven downstream. Furthermore, a motor can be used to drive one of the conveyor wheels to rotate. This rotation of the conveyor wheel can drive the other conveyor wheels to rotate via the conveyor belt.

[0067] Furthermore, the conveyor assembly 20 also includes a spacing adjustment mechanism 202. This spacing adjustment mechanism 202 is in driving connection with the mounting plate 203 of at least one of the two conveyor units 201 to drive the mounting plates 203 of the two conveyor units 201 toward or away from each other. This spacing adjustment mechanism 202 allows the spacing between the two conveyor units 201 to be adjusted, thereby accommodating the transport of carriers of varying sizes and improving the compatibility of the device.

[0068] Optionally, the spacing adjustment mechanism 202 may adopt a linear drive module for driving the mounting plate 203 of one conveying unit 201 to move closer to or away from the mounting plate 203 of another conveying unit 201 , thereby adjusting the spacing between the two conveying units 201 .

[0069] In an embodiment of the present application, a first position detection component and a second position detection component are sequentially arranged on the path of the conveying component 20 for conveying the carrier. When the first position detection component detects the carrier, it indicates that the carrier is entering the dust removal station C, and at this time, the first position detection component sends a first in-position signal to the control module. The control module controls the conveying component 20 to reduce the speed of conveying the carrier according to the first in-position signal. When the second position detection component detects the carrier, it indicates that the carrier has arrived at the dust removal station C, and at this time, the second position detection component sends a second in-position signal to the control module. The control module controls the conveying component 20 to stop conveying the carrier according to the second in-position signal, so that the carrier stays at the dust removal station C. In this way, it is ensured that the carrier can accurately reach and stay at the dust removal station C, thereby improving the position accuracy of the carrier at the dust removal station C.

[0070] 1 and 6 , in an embodiment of the present application, the dust removal module further includes a dust removal bar cache assembly 30 for storing dust removal bars B. The dust removal drive assembly 22 is further configured to drive the dust removal assembly 21 to move to the dust removal bar cache assembly 30 , so that the dust removal assembly 21 releases used dust removal bars B to the dust removal bar cache assembly 30 and picks up unused dust removal bars B stored in the dust removal bar cache assembly 30 .

[0071] Specifically in the embodiment, the dust rod cache assembly 30 includes a base 301 and a cache disk 302. The cache disk 302 is arranged on the base 301 and has a plurality of cache sections 303 arranged at intervals along the circumference of the cache disk 302, and the cache section 303 is used to cache the dust rod. The cache disk 302 can be controlled to rotate around its own axis relative to the base 301. In this way, when the dust removal assembly 21 moves to the dust removal rod cache assembly 30, the cache disk 302 is controlled to rotate around its own axis to an empty cache section 303 (i.e., a cache section 303 in which the dust rod B is not stored) toward the dust removal assembly 21, so that the dust removal assembly 21 releases the used dust rod B onto the empty cache section 303. Then, the cache disk 302 is controlled to rotate around its own axis to the cache section 303 in which the unused dust rod B is stored toward the dust removal assembly 21, so that the dust removal assembly 21 picks up the unused dust rod B on the cache section 303. Optionally, the rotation of the cache disk 302 can be driven by a driving member such as a motor. Optionally, the cache portion 303 can be a card slot, and the card slot is used to accommodate the dust removal rod B.

[0072] Optionally, the number of cache trays 302 can be set to two, wherein the cache portion 303 on one cache tray 302 is used to receive used dust removal rods B released by the dust removal assembly 21, and the cache portion 303 on the other cache tray 302 is used to provide unused dust removal rods B to the dust removal assembly 21. Of course, the two cache trays 302 are not limited to the above-mentioned usage method, as long as they can receive used dust removal rods B released by the dust removal assembly 21 and provide unused dust removal rods B to the dust removal assembly 21, and there is no limitation here.

[0073] Specifically in the embodiment, the dust removal rod cache assembly 30 also includes an initial visual positioning mechanism 305 electrically connected to the control module. The initial visual positioning mechanism 305 is used to detect the position of the dust removal rod B on the dust removal assembly 21. In this way, after the dust removal rod B is replaced in the dust removal assembly 21, the initial visual positioning mechanism 305 detects the position of the dust removal rod B on the dust removal assembly 21. The control module controls the dust removal assembly 21 to move to the photosensitive product to be dusted based on the detection result of the initial visual positioning mechanism 305. Optionally, the initial visual positioning mechanism 305 can use a positioning camera.

[0074] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0075] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, and these modifications and improvements fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A dust removal re-inspection device, characterized in that: include: A dust removal module comprises a dust removal component (21) and a dust removal drive component (22), wherein the dust removal component (21) is arranged at a drive end of the dust removal drive component (22), and the dust removal drive component (22) is used to drive the dust removal component (21) to move to a photosensitive product to be dusted on a carrier plate located at a dust removal station (C), so as to remove dust from the photosensitive product to be dusted on the carrier plate; and The re-inspection module comprises a test component (25) and a detection drive component (26), wherein the test component (25) is arranged at the drive end of the detection drive component (26), and the detection drive component (26) is used to drive the test component (25) to move to the photosensitive product on the carrier plate that has been dusted and located at the dust removal station (C); the test component (25) has an electrical connector (251) for electrically connecting to the photosensitive product on the carrier plate that has been dusted and controlled to perform imaging on the photosensitive product on the carrier plate that has been dusted and located at the dust removal station (C); and 2. The dust removal re-inspection device according to claim 1, characterized in that: The dust removal assembly (21) comprises a dust removal drive member (210) and a dust removal clamping member (213); the dust removal drive member (210) is mounted on the driving end of the dust removal drive member (22); the dust removal clamping member (213) is mounted on the driving end of the dust removal drive member (210) and is used to clamp the dust removal rod (B); the dust removal drive member (210) is used to drive the dust removal clamping member (213) to extend or retract, and is also used to drive the dust removal clamping member (213) to rotate.

3. The dust removal re-inspection device according to claim 2, characterized in that: The dust removal module also includes a dust removal rod cache assembly (30) for storing dust removal rods (B), and the dust removal drive assembly (22) is also used to drive the dust removal assembly (21) to move to the dust removal rod cache assembly (30), so that the dust removal assembly (21) releases the used dust removal rods (B) to the dust removal rod cache assembly (30) and picks up the unused dust removal rods (B) stored in the dust removal rod cache assembly (30).

4. The dust removal re-inspection device according to claim 3, characterized in that: The dust removal rod cache assembly (30) comprises a base (301) and a cache disk (302), wherein the cache disk (302) is arranged on the base (301) and has a plurality of cache portions (303) arranged at intervals along the circumference of the cache disk (302), wherein the cache portions (303) are used to cache the dust removal rods (B); the cache disk (302) can be controlled to rotate around its own axis relative to the base (301).

5. The dust removal re-inspection device according to claim 1, characterized in that: The re-inspection module also includes a light source assembly (23) installed at the driving end of the dust removal drive assembly (22), the dust removal drive assembly (22) is used to drive the light source assembly (23) to move to the photosensitive product on the carrier plate that has completed dust removal and is located at the dust removal station (C), and the light source assembly (23) is used to illuminate the photosensitive product on the carrier plate that has completed dust removal.

6. The dust removal re-inspection device according to claim 5, characterized in that: The re-inspection module also includes a lens assembly, which is mounted on the dust removal drive assembly (22) or the light source assembly (23); the lens assembly has a lens, which is located on the light output side of the light source assembly (23) so that the light emitted by the light source assembly (23) passes through the lens and irradiates the dust-removed photosensitive product on the carrier.

7. The dust removal re-inspection device according to claim 5, characterized in that: The re-inspection module also includes a first visual positioning component (24), which is arranged at the driving end of the dust removal drive component (22), and the first visual positioning component (24) is used to detect the position of the photosensitive product that has completed dust removal on the carrier plate located at the dust removal station (C), and the dust removal drive component (22) is used to drive the light source component (23) to move according to the detection result of the first visual positioning component (24).

8. The dust removal re-inspection device according to claim 7, characterized in that: The dust removal drive assembly (22) comprises a first drive module (221), a second drive module (222), a third drive module (223) and a first moving seat (224); the second drive module (222) is mounted on the driving end of the first drive module (221), the first moving seat (224) is mounted on the driving end of the second drive module (222), and the third drive module (223) and the dust removal assembly (21) are mounted on the first moving seat (224); The first driving module (221) is used to drive the first moving seat (224) to move along a first direction, the second driving module (222) is used to drive the first moving seat (224) to move along a second direction, the first visual positioning component (24) and the light source component (23) are both installed on the driving end of the third driving module (223), and the third driving module (223) is used to drive the first visual positioning component (24) and the light source component (23) to move along a third direction, wherein the first direction, the second direction and the third direction intersect each other.

9. The dust removal re-inspection device according to claim 8, characterized in that: The dust removal drive assembly (22) further comprises a rotating module (225) mounted on the first moving seat (224); the dust removal assembly (21) is mounted on the driving end of the rotating module (225); the rotating module (225) is used to drive the dust removal assembly (21) to rotate so as to adjust the spatial angle of the dust removal assembly (21).

10. The dust removal re-inspection device according to claim 1, characterized in that: The dust removal module also includes a second visual positioning component (27), which is installed at the driving end of the detection drive component (26), and the second visual positioning component (27) is used to detect the position of the photosensitive product that has completed dust removal on the carrier plate located at the dust removal station (C), and the detection drive component (26) is used to drive the test component (25) to move according to the detection result of the second visual positioning component (27).

11. The dust removal re-inspection device according to claim 10, characterized in that: The detection drive component (26) comprises a fourth drive module (261), a fifth drive module (262), a sixth drive module (263) and a second moving seat (264); the fifth drive module (262) is mounted on the driving end of the fourth drive module (261), the sixth drive module (263) is mounted on the driving end of the fifth drive module (262), the second moving seat (264) is mounted on the driving end of the sixth drive module (263), the fourth drive module (261) is used to drive the second moving seat (264) to move along a fourth direction, the fifth drive module (262) is used to drive the second moving seat (264) to move along a fifth direction, the sixth drive module (263) is used to drive the second moving seat (264) to move along a sixth direction, and the test component (25) and the second visual positioning component (27) are both mounted on the second moving seat (264); wherein the fourth direction, the fifth direction and the sixth direction intersect each other.

12. The dust removal re-inspection device according to claim 1, characterized in that: The dust removal re-inspection device (2) also includes a conveying module, which includes a conveying component (20), a clamping component (28) and a limit plate (29). The conveying component (20) is used to convey the carrier to the dust removal station (C), and the dust removal station (C) is located between the clamping component (28) and the limit plate (29); the clamping component (28) can controllably clamp the carrier located at the dust removal station (C) onto the limit plate (29).

13. The dust removal re-inspection device according to claim 12, characterized in that: The conveying assembly (20) comprises two second conveying units (201) and a second spacing adjustment mechanism (202), and the two second conveying units (201) are used to jointly support and convey the carrier plate; The second spacing adjustment mechanism (202) is drivingly connected to at least one of the two second conveying units (201) to drive the two second conveying units (201) to move closer to or farther from each other.

14. The dust removal re-inspection device according to claim 12, characterized in that: One of the clamping assembly (28) and the carrier plate has a positioning pin (283), and the other has a positioning hole; When the carrier plate located at the dust removal station (C) is pressed against the limiting plate (29), the positioning pin (283) is positioned and fitted in the positioning hole.

15. The dust removal re-inspection device according to claim 12, characterized in that: A first position detection component and a second position detection component are sequentially arranged on a path for the conveying component (20) to convey the carrier; When the first position detection component detects the carrier, the conveying component (20) controls to reduce the speed of conveying the carrier according to the detection result of the first position detection component; when the second position detection component detects the carrier, the conveying component (20) stops conveying the carrier according to the detection result of the second position detection component.

16. A dust removal device, characterized in that: It comprises a detection device and a dust removal re-inspection device (2) as claimed in any one of claims 1 to 15; The detection device is used to electrically connect each photosensitive product on the carrier plate located at the detection station and control each photosensitive product on the carrier plate to perform imaging; the dust removal component (21) is used to remove dust from the photosensitive product on the carrier plate according to the imaging result.

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