Linear motor

Abstract

This linear motor comprises: a stator having a plurality of magnetic force generation parts; a movable element having a plurality of wound coils; a heat transfer member having a heat collection part arranged between adjacent coils and having a shape bent along a circumferential direction of the coil, and a heat radiation part continuous from the heat collection part and projecting in a direction away from the coil; a duct surrounding the heat radiation part; a blower for blowing gas into the duct; and a filter provided at an inflow port of gas to the duct.

Description

Linear motor

[0001] The present invention relates to a linear motor including a stator, a mover, and a heat transfer member.

[0002] The following patent document describes a technology in which, in a linear motor having a stator, a mover, and a heat transfer member, the heat from the mover is transferred to a heat dissipation section by the heat transfer member, and the heat transferred to the heat dissipation section is dissipated.

[0003] International Publication No. 2015 / 104807

[0004] The object is to transfer the heat of the mover to a heat dissipation section by a heat transfer member and to properly dissipate the heat transferred to the heat dissipation section.

[0005] In order to solve the above problems, this specification discloses a linear motor comprising: a stator having a plurality of magnetic force generating portions; a movable portion having a plurality of wound coils; a heat transfer member disposed between adjacent coils and having a heat collection portion curved along the circumferential direction of the coils; and a heat dissipation portion that is continuous with the heat collection portion and protrudes in a direction away from the coils; a duct that surrounds the heat dissipation portion; a blower that blows gas into the duct; and a filter provided at the gas inlet into the duct.

[0006] In the present disclosure, the heat dissipation unit is surrounded by a duct, and a blower blows gas into the duct. Furthermore, a filter is provided at the gas inlet to the duct. This prevents foreign matter such as dust and dirt from entering the duct, ensuring operation of the blower and enabling the heat transferred to the heat dissipation unit to be properly dissipated.

[0007] 7 is a perspective view showing an electronic component mounting device. FIG. 8 is a perspective view showing a moving device provided in the electronic component mounting device. FIG. 9 is a plan view of the inside of a shaft motor provided in the moving device. FIG. 10 is a cross-sectional view taken along line AA in FIG. 3. FIG. 11 is a perspective view of the inside of the shaft motor. FIG. 12 is a cross-sectional view taken along line BB in FIG. 3. FIG. 13 is a perspective view of the shaft motor. FIG. 14 is a cross-sectional view taken along line CC in FIG. 7. FIG. 15 is a cross-sectional view taken along line DD in FIG. 16. FIG. 17 is an enlarged perspective view of a duct of the shaft motor. FIG. 18 is an enlarged perspective view of a duct of the shaft motor. FIG. 19 is an enlarged view of a portion where a filter is attached to a duct of the shaft motor. FIG. 19 is an enlarged view of a portion where a filter is attached to a duct of the shaft motor. FIG. 19 is an enlarged view of a portion where a filter is attached to a duct of the shaft motor. FIG. 19 is a cross-sectional view of a duct of a shaft motor of a modified example.

[0008] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings as modes for carrying out the present invention.

[0009] 1 shows an electronic component placement apparatus 10. The electronic component placement apparatus 10 has one system base 12 and two placement machines 16 arranged side by side on the system base 12. In the following description, the direction in which the placement machines 16 are lined up will be referred to as the X-axis direction, and the horizontal direction perpendicular to that direction will be referred to as the Y-axis direction.

[0010] Each placement machine 16 mainly comprises a placement machine main body 20, a transport device 22, a supply device 24, a placement head 26, and a placement head moving device (hereinafter sometimes abbreviated as "moving device") 28. The placement machine main body 20 is composed of a frame 30 and a beam 32 suspended from the frame 30.

[0011] The transport device 22 includes two conveyor devices 40, 42. The two conveyor devices 40, 42 are arranged on the frame 30 so as to be parallel to each other and extend in the X-axis direction. Each of the two conveyor devices 40, 42 transports a circuit board supported by the respective conveyor device 40, 42 in the X-axis direction by an electromagnetic motor (not shown). The circuit board is fixedly held at a predetermined position by a board holding device (not shown).

[0012] The supply device 24 is a feeder type supply device and is disposed at the front end of the frame 30. The supply device 24 has a tape feeder 50. The tape feeder 50 accommodates taped components in a wound state. The taped components are electronic components that have been taped. The tape feeder 50 then feeds the taped components using a feeder (not shown). As a result, the feeder type supply device 24 feeds the taped components to supply electronic components at a feed position.

[0013] The placement head 26 places electronic components on the circuit board. A suction nozzle 60 is provided on the bottom surface of the placement head 26. The suction nozzle 60 is connected to a positive / negative pressure supply device (not shown) via negative pressure air and positive pressure air passages. The suction nozzle 60 sucks and holds electronic components by negative pressure and releases the held electronic components by positive pressure. The placement head 26 also has a nozzle lifting device (not shown) that raises and lowers the suction nozzle 60. The nozzle lifting device allows the placement head 26 to change the vertical position of the electronic component it is holding.

[0014] As shown in FIG. 2 , the moving device 28 includes a Y-axis slide mechanism 70 and an X-axis slide mechanism 72. The Y-axis slide mechanism 70 has a Y-axis slider 76 held by the beam 32 so as to be movable in the Y-axis direction. The Y-axis slider 76 is moved to any position in the Y-axis direction by driving a shaft motor 78. The X-axis slide mechanism 72 also has an X-axis slider 80 attached to the side of the Y-axis slider 76 so as to be movable in the X-axis direction. The X-axis slider 80 is moved to any position in the X-axis direction by driving an electromagnetic motor (not shown). The mounting head 26 is attached to the X-axis slider 80. With this structure, the mounting head 26 can be moved to any position on the frame 30 by the moving device 28.

[0015] The shaft motor 78 of the movement device 28 is a cylindrical linear motor, and as shown in FIG. 3 , it is composed of a shaft-shaped stator 100 and a mover 102 movably attached to the stator 100. Note that FIG. 3 is a top view of FIG. 2 , illustrating the internal structure of the shaft motor 78. As shown in FIG. 2 , the shaft-shaped stator 100 is disposed on the beam 32 so as to extend in the Y-axis direction. As shown in FIG. 4 , which is a cross-sectional view of line AA in FIG. 3 , the stator 100 includes a cylindrical pipe 110 and a plurality of cylindrical permanent magnets 112 housed inside the pipe 110. The pipe 110 is made of a non-magnetic material (e.g., stainless steel) that allows the magnetic flux of each permanent magnet 112 to pass through. The permanent magnets 112 are arranged in a straight line within the pipe 110 so that the south poles and north poles of adjacent permanent magnets 112 face each other across a spacer (not shown). The spacer sandwiched between adjacent permanent magnets 112 has a flat cylindrical shape and is made of a magnetic material such as iron, and functions as a yoke.

[0016] As shown in FIGS. 3 to 5 , the mover 102 includes a bobbin 120, multiple coils 122, and a cooling member 124. The bobbin 120 is cylindrical and made of a non-magnetic material such as resin, and the stator 100 is inserted therein. The multiple coils 122 are wound around the outer circumferential surface of the bobbin 120 and are provided at predetermined intervals in the axial direction of the bobbin 120. In other words, the multiple coils 122 are wound around the outside of the stator 100 and are provided in a row in the axial direction of the stator 100. As shown in FIG. 6 , which is a cross-sectional view of line BB in FIG. 3 , gaps 122 a are formed between adjacent coils 122 to allow the winding start or end wire of the coil 122 to exit the coil 122. Furthermore, as shown in FIG. 3 , terminal members 126 are attached to both ends of the bobbin 120, and the side surfaces of the coils 122 at both ends are in contact with the terminal members 126.

[0017] The cooling member 124 is composed of a heat transfer member 130 and a group of heat dissipation fins 132, and is made of a metal with high thermal conductivity, such as aluminum or copper. The heat transfer member 130 is disposed between adjacent coils 122 in the axial direction of the stator 100. The heat transfer member 130 is a hollow heat pipe filled with a working fluid and a mesh-like wick. As shown in FIG. 4 , the heat transfer member 130 is composed of a heat collection portion 136 that contacts approximately half the circumference of the end face of the coil 122 in the Y direction, and a heat dissipation portion 138 that protrudes from one end of the heat collection portion 136 in a direction away from the center of the coil 122. The heat collection portion 136 is arc-shaped with a width smaller than the width of the end face of the coil 122 in the Y direction, is flattened in the radial direction of the coil 122, and contacts the end face of the coil 122. The heat dissipation portion 138 extends generally horizontally from the upper end of the heat collection portion 136. It is preferable that the cooling member 124 be made of a non-magnetic material so as not to cause any adverse magnetic effects.

[0018] During the manufacture of the mover 102, after the heat collecting portion 136 is disposed between adjacent coils 122, a load is applied to the coils 122 at both ends in a direction that moves the coils 122 toward each other, thereby bringing the coils 122 into close contact with the heat collecting portion 136. Then, with the coils 122 and the heat collecting portion 136 in close contact with each other, a thermosetting resin is filled into the gaps between the coils 122 and between the coils 122 and the heat collecting portion 136, and is thermally cured. This improves the thermal conductivity from the coils 122 to the heat collecting portion 136, and firmly fixes each coil 122 to the bobbin 120.

[0019] A heat dissipation fin group 132 is attached to a heat dissipation portion 138 extending in a direction away from the coil 122. The shaft motor 78 is provided with two heat dissipation fin groups 132 a and 132 b, which are arranged side by side in the Y direction with a gap 140 between them.

[0020] 4, a yoke 146 made of a magnetic material such as an electromagnetic steel plate is attached so as to cover the outer circumferential surface of the coil 122. This yoke 146 changes the direction of the magnetic field lines generated by the permanent magnet 112 to a direction perpendicular to the direction of the current flowing through the coil 122, thereby increasing the thrust acting on the coil 122. Note that the yoke 146 may be omitted.

[0021] As shown in FIG. 7 , the shaft motor 78 also includes a duct 150 that surrounds the heat dissipation fin group 132. The duct 150 is generally rectangular and extends in the Y direction. As shown in FIG. 8 , a cross-sectional view taken along line CC in FIG. 7 , two heat dissipation fin groups 132a and 132b are housed within the duct 150, arranged side by side in the Y direction. A wall 152 is formed within the duct 150 between the heat dissipation fin group 132a and the heat dissipation fin group 132b. The wall 152 separates the heat dissipation fin group 132a from the heat dissipation fin group 132b, but does not extend to the bottom of the duct 150. A wall 154 is also formed within the duct 150, covering the lower portion of the heat dissipation fin group 132b. The wall 154 extends from the bottom of the wall 152 downward from the heat dissipation fin group 132b, thereby defining the heat dissipation fin group 132b. With this structure, the interior of duct 150 is divided into a first chamber 156 that houses heat dissipation fin group 132a and a second chamber 158 that houses heat dissipation fin group 132b. First chamber 156 is made up of an accommodation space 160 that houses heat dissipation fin group 132a and a clearance space 162 below wall 154.

[0022] Duct 150 is open at both ends, and the opening at the end of duct 150 where heat dissipation fin group 132a is arranged communicates with accommodation space 160 of first chamber 156. An inlet fan 170 is arranged in this opening. Inlet fan 170 rotates in a direction that causes air to flow into accommodation space 160 of first chamber 156, and operation of inlet fan 170 causes air to flow into accommodation space 160 of first chamber 156. Therefore, the opening where inlet fan 170 is arranged functions as an air inlet 171.

[0023] Meanwhile, the end of the duct 150 on the side where the heat dissipation fin group 132b is disposed has an opening communicating with the gap 162 of the first chamber 156 and an opening communicating with the second chamber 158. A first outlet fan 172 is disposed in the opening communicating with the gap 162 of the first chamber 156, and a second outlet fan 174 is disposed in the opening communicating with the second chamber 158. The first outlet fan 172 rotates in a direction that causes air to flow out of the gap 162 of the first chamber 156, and operation of the first outlet fan 172 causes air to flow out of the gap 162 of the first chamber 156. Therefore, the opening where the first outlet fan 172 is disposed functions as an air outlet port 176. The second outlet fan 174 rotates in a direction that causes air to flow out of the second chamber 158, and operation of the second outlet fan 174 causes air to flow out of the second chamber 158. Therefore, the opening where the second outflow fan 174 is disposed functions as an air outlet 178 .

[0024] In addition to the openings at both ends, duct 150 also has an opening on the side of duct 150 that communicates with second chamber 158. Therefore, when air flows out of second chamber 158 due to operation of second outflow fan 174, the air flows into second chamber 158 from the opening on the side of duct 150, and this opening functions as air inlet 180.

[0025] With this structure, air flows along two routes inside duct 150. Specifically, when inlet fan 170 and first outlet fan 172 are activated, air flows through duct 150 along a first route indicated by arrow 186, passing through inlet 171, storage space 160, clearance space 162, and outlet 176. On the other hand, when second outlet fan 174 is activated, air flows through duct 150 along a second route indicated by arrow 188, passing through inlet 180, second chamber 158, and outlet 178.

[0026] A filter 190 is disposed at the inlet 180 through which air flows in when the second outlet fan 174 is activated. As shown in FIG. 7 , the filter 190 is composed of a base 192 and a nonwoven fabric 196. The base 192 is a generally rectangular plate, and three generally square through-holes 198 are formed in the base 192 and aligned in the direction of extension of the base 192. The nonwoven fabric 196 is fixed to the upper surface of the base 192 so as to cover the three through-holes 198. As shown in FIG. 9 , which is a cross-sectional view taken along line DD in FIG. 7 , a pair of slide grooves 200 are formed at the inlet 180 that opens into the second chamber 158. The pair of slide grooves 200 are formed inside a pair of opposing side walls 202 of the duct 150, extending in the Y direction while facing each other. The pair of slide grooves 200 extend to the outlet 178 of the duct 150. Furthermore, the distance between the bottom surfaces of one of the pair of slide grooves 200 and the other is slightly longer than the width dimension of the base 192 of the filter 190. Therefore, a pair of side edges of the base 192 can be inserted into the pair of slide grooves 200. Then, as shown in FIGS. 9 and 10 , an operator inserts the pair of side edges of the base 192 into the pair of slide grooves 200 while holding one end of the base 192 and pushes the base 192 in the Y direction, thereby attaching the filter 190 to the duct 150 while blocking the inlet 180. Meanwhile, an operator grasps one end of the filter 190 attached to the duct 150 and pulls the base 192 out in the Y direction, thereby removing the filter 190 from the duct 150. In this way, the operator can easily attach or detach the filter 190 to or from the duct 150 simply by sliding the filter 190 in the Y direction.

[0027] As shown in FIG. 8 , a filter 210 is also provided at the inlet 171, through which air flows in due to the operation of the inlet fan 170 and the first outlet fan 172. As shown in FIG. 11 , the filter 210 includes a base 212 and a nonwoven fabric 216. The base 212 is a plate-shaped member formed of a flexible material such as resin. The base 212 is composed of a square base body 218 slightly smaller than the inner dimensions of the inlet 171, an upper convex portion 220 protruding upward from the center of the upper edge of the base body 218, and a lower convex portion 222 protruding downward from the center of the lower edge of the base body 218. Four through holes 224 are formed in the center of the base body 218 at four equally spaced positions. The nonwoven fabric 216 is also square and slightly larger than the inner dimensions of the inlet 171, and is fixed to the base body 218 so as to cover the four through holes 224. The filter 210 is attached to the duct 150 by utilizing the upper protrusion 220 and the lower protrusion 222 of the base 212 so as to close the inlet 171 .

[0028] 11 and 12 , an elongated hole 232 extending in the X direction is formed in the upper surface 230 of the duct 150 near the inlet 171. The length of the elongated hole 232 in the X direction is slightly longer than the X direction dimension of the upper protrusion 220 of the base 212. Also, as shown in FIGS. 11 and 13 , a notch 242 is formed in the lower surface 240 of the duct 150 near the inlet 171. The notch 242 is composed of an opening 244 that opens to the inlet 171 and a hooking portion 246 that continues from the opening 244 and is cut toward the inside of the duct 150. The length of the hooking portion 246 in the X direction is longer than the length of the opening 244 in the X direction. Furthermore, the portion of the downward protrusion 222 of the base 212 that continues to the base main body 218 is narrowed to form a narrow width portion 250. The length of the narrow portion 250 in the X direction is slightly longer than the length of the opening 244 of the notch 242 in the X direction, and slightly shorter than the length of the hook portion 246 of the notch 242 in the X direction.

[0029] When the filter 210 having such a structure is attached to the duct 150, the worker grasps the downward protrusion 222 of the base 212 and inserts the upper protrusion 220 of the base 212 into the elongated hole 232 from below the top surface 230 of the duct 150, as shown in FIG. 11 . Next, while twisting the grasped downward protrusion 222, the worker inserts one end of the narrow portion 250 of the downward protrusion 222 in the X direction into the hook portion 246 through the opening 244 of the notch 242, as shown in FIG. 14 . The worker then presses the grasped downward protrusion 222 downward against the underside 240 of the duct 150. At this time, the narrow portion 250 of the downward protrusion 222 bends, and the entire narrow portion 250 fits inside the hook portion 246 of the notch 242, as shown in FIG. 15 . As a result, the narrow width portion 250 is hooked inside the hook portion 246 of the notch portion 242 , and the filter 210 is attached to the duct 150 in a state where the filter 210 closes the inlet 171 .

[0030] On the other hand, when removing the filter 210 from the duct 150, the worker grasps and twists the downward convex portion 222 of the base 212, thereby pulling one end of the narrow portion 250 of the downward convex portion 222 out of the hook portion 246 through the opening 244, as shown in Fig. 14 . Then, the worker pulls the grasped downward convex portion 222 toward themselves along the Y direction, thereby removing the filter 210 from the duct 150. In this way, the worker can easily attach or detach the filter 210 to or from the duct 150 by simply grasping and twisting the downward convex portion 222 of the base 212 to insert or remove it into or from the cutout portion 242.

[0031] In the shaft motor 78, the mover 102 has a plurality of coils 122 arranged in the order of U-phase, V-phase, W-phase, U-phase, V-phase, W-phase, etc. When AC currents, each shifted in phase by 120° in electrical angle, are passed through the coils 122 of each phase, a thrust is generated in the mover 102 due to the interaction between the magnetic force of the permanent magnet 112 and the magnetic force of the coils 122, causing the mover 102 to move relative to the stator 100. At this time, the coils 122 generate heat, and the heat generated in the coils 122 is transferred to the heat dissipation fin groups 132 a, b by the heat transfer member 130. The heat dissipation fin group 132 a is housed in the first chamber 156 of the duct 150, and air flows in the first chamber 156 due to the operation of the inlet fan 170 and the first outlet fan 172. The heat dissipation fin group 132b is housed in a second chamber 158 of the duct 150, and air flows through the second chamber 158 by the operation of a second outflow fan 174.

[0032] This allows the heat dissipation fin groups 132a and 132b to be effectively cooled, which in turn allows heat generation from the coil 122 to be effectively suppressed. By effectively suppressing heat generation from the coil 122 in this manner, the shaft motor 78 can be made smaller and have a higher thrust. Furthermore, the interior of the duct 150 is divided into a first chamber 156 and a second chamber 158, and air flows along two paths within the duct 150. The heat dissipation fin group 132a is disposed in the first chamber 156, and the heat dissipation fin group 132b is disposed in the second chamber 158. This reduces the volume of the space to be cooled, allowing the heat dissipation fin group 132 disposed in that space to be cooled more effectively. Furthermore, the cooling path of the heat dissipation fin group 132 is shortened, allowing the heat dissipation fin group 132 to be cooled more effectively. This further allows the shaft motor 78 to be made smaller and have a higher thrust.

[0033] In the above embodiment, the shaft motor 78 is an example of a linear motor. The stator 100 is an example of a stator. The mover 102 is an example of a mover. The permanent magnet 112 is an example of a magnetic force generating unit. The coil 122 is an example of a coil. The heat transfer member 130 is an example of a heat transfer member. The heat collecting unit 136 is an example of a heat collecting unit. The heat dissipating unit 138 is an example of a heat dissipating unit. The duct 150 is an example of a duct. The inlet fan 170 is an example of a blower. The inlet 171 is an example of an inlet. The first outlet fan 172 is an example of a blower. The second outlet fan 174 is an example of a blower. The inlet 180 is an example of an inlet. The filter 190 is an example of a filter. The filter 210 is an example of a filter. The slide groove 200 is an example of a slide groove. The upper convex portion 220 is an example of a convex portion. The lower convex portion 222 is an example of a protrusion. The elongated hole 232 is an example of a recess. The notch portion 242 is an example of a notch portion.

[0034] As described above, the present embodiment has the following advantages.

[0035] The shaft motor 78 includes a stator 100 having a plurality of permanent magnets 112, a mover 102 having a plurality of coils 122, and a heat transfer member 130 having a heat collection portion 136 disposed between adjacent coils 122 and curved along the circumferential direction of the coils 122, and a heat dissipation portion 138 continuing from the heat collection portion 136 and projecting in a direction away from the coils 122. The shaft motor 78 further includes a duct 150 surrounding the heat dissipation portion, an inlet fan 170, a first outlet fan 172, and a second outlet fan 174 that blow air into the duct 150, and filters 190 and 210 disposed at the air inlets 171 and 180. Therefore, the filters 190 and 210 can prevent foreign matter such as dust and dirt from entering the inside of the duct 150 that cools the heat dissipation portion 138. This ensures the operation of the inlet fan 170, the first outlet fan 172, and the second outlet fan 174, making it possible to properly cool the heat dissipation section 138, and by effectively suppressing heat generation from the coil 122, it is possible to make the shaft motor 78 smaller and with higher thrust.

[0036] Furthermore, a filter 190 is disposed at the air inlet 180 formed on the side of the duct 150, and the filter 190 can prevent foreign matter such as dust and dirt from entering the second chamber 158 of the duct 150. This ensures operation of the second outflow fan 174 and makes it possible to appropriately cool the heat dissipation section 138 where the heat dissipation fin group 132b is disposed, and effectively suppresses heat generation from the coil 122, thereby enabling the shaft motor 78 to be made smaller and have a higher thrust.

[0037] Furthermore, a slide groove 200 is formed in the inlet 180 along the direction in which the duct 150 extends, i.e., the Y direction. The filter 190 is attached to or detached from the duct 150 by inserting the edge of the base 192 of the filter 190 into the slide groove 200 and then sliding the filter 190 in the Y direction. This allows the worker to attach or detach the filter 190 to or from the duct 150 simply by sliding the filter 190 in the Y direction, making the work of attaching or detaching the filter 190 easy and requiring fewer steps. Furthermore, because the mover 102 moves along the direction in which the stator 100 extends, i.e., the Y direction, there is no space in the Y direction of the mover 102 that is free of any installed objects. Therefore, when the worker slides the filter 190 in the Y direction to attach or detach the filter 190, the worker can attach or detach the filter 190 without having to consider installed objects. This makes it even easier for the worker to attach or detach the filter 190. Furthermore, by disposing the filter 190 above the duct 150, foreign matter such as dust and dirt adhering to the filter 190 can be prevented from falling onto the circuit board when the shaft motor 78 is driven.

[0038] Furthermore, a filter 210 is disposed at the air inlet 171 formed on the end face of the duct 150, and the filter 210 can prevent foreign matter such as dust and dirt from entering the first chamber 156 of the duct 150. This ensures operation of the inlet fan 170 and the first outlet fan 172, making it possible to appropriately cool the heat dissipation section 138 where the heat dissipation fin group 132a is disposed, and by effectively suppressing heat generation from the coil 122, it becomes possible to make the shaft motor 78 smaller in size and with higher thrust.

[0039] Furthermore, a notch 242 is formed at the lower end of the air inlet 171, and a downward convex portion 222 protruding from the lower edge of the base 212 is formed on the base 212 of the filter 210. The filter 210 is attached to the duct 150 by an operator inserting the downward convex portion 222 into the notch 242 while twisting it, and the filter 210 is removed from the duct 150 by an operator removing the downward convex portion 222 from the notch 242 while twisting it. This allows the operator to attach and detach the filter 210 to and from the duct 150 simply by inserting and removing the downward convex portion 222 into and from the notch 242 while twisting it, making the operator easy to attach and detach the filter 210 and reducing the number of steps required. Furthermore, as described above, the Y direction of the mover 102 is free of any objects. Therefore, when the worker twists the downward convex portion 222 to attach or detach the filter 210, the worker can attach or detach the filter 210 without having to consider any installed objects. This makes it even easier for the worker to attach or detach the filter 210.

[0040] Furthermore, an elongated hole 232 is formed at the upper end of the air inlet 171, and an upper protrusion 220 protruding from the upper edge of the base 212 is formed on the base 212 of the filter 210. The filter 210 is attached to the duct 150 by an operator inserting the upper protrusion 220 into the elongated hole 232, and the filter 210 is removed from the duct 150 by an operator removing the upper protrusion 220 from the elongated hole 232. This allows the operator to attach and detach the filter 210 to and from the duct 150 simply by inserting and removing the upper protrusion 220 into and from the elongated hole 232, making the installation and removal of the filter 210 easy and requiring fewer steps. Furthermore, as described above, the Y direction of the mover 102 is free of any objects. Therefore, when inserting or removing the upper protrusion 220 into or from the elongated hole 232 when attaching or detaching the filter 210, the worker can attach or detach the filter 210 without having to consider any installed objects. This makes it even easier for the worker to attach or detach the filter 210.

[0041] The present invention is not limited to the above-described embodiment, and various modifications and improvements can be made based on the knowledge of those skilled in the art. Specifically, for example, while the above-described embodiment illustrates air flowing along two paths within the duct 150, air may flow along three or more paths. On the other hand, air may flow through the duct 150 along a single path rather than multiple paths. That is, as shown in FIG. 16 , the interior of the duct 150 does not need to be partitioned, and no walls are formed within the duct 150. In this case, if the interior of the duct 150 is not partitioned, only the opening opposite the inlet 171 of the duct 150 serves as the outlet 260, and an outlet fan 262 is disposed at the outlet 260. Furthermore, the inlet 180 is not formed on the side of the duct 150, and a filter 190 that blocks the inlet 180 is not disposed. In the duct 150 having such a structure, air flows inside the duct 150 along the path indicated by the arrow 266, cooling the heat dissipation fin groups 132a and 132b.

[0042] In the above embodiment, the heat dissipation fin group 132 is attached to the heat dissipation portion 138 to cool the heat dissipation portion 138, but a heat dissipation mechanism other than the heat dissipation fin group may be attached. On the other hand, the heat dissipation portion 138 may not be attached with a heat dissipation mechanism, and the heat of the coil 122 may be dissipated by the heat dissipation portion 138 alone. In such a case, the heat dissipation portion 138 is surrounded by the duct 150, and the heat dissipation portion 138 is cooled by air.

[0043] In the above embodiment, the inlet 171 of the duct 150 has an elongated hole 232 that functions as a recess, and the base 212 of the filter 210 has an upper protrusion 220 that functions as a protrusion. Alternatively, the inlet 171 of the duct 150 may have a protrusion, and the base 212 of the filter 210 may have a recess.

[0044] Furthermore, in the above embodiment, air is blown into the inside of the duct 150 by the inlet fan 170, the first outlet fan 172, and the second outlet fan 174, but a gas other than air may be blown into the inside of the duct 150 by the inlet fan 170, the first outlet fan 172, and the second outlet fan 174. For example, by blowing nitrogen obtained by vaporizing liquid nitrogen into the inside of the duct 150, the heat dissipation fin group 132 can be effectively cooled.

[0045] In addition, in the above embodiment, the inlet fan 170, the first outlet fan 172, and the second outlet fan 174 are used as blowers for blowing air into the inside of the duct 150, but various other blowers such as a blower device can also be used.

[0046] Furthermore, in the above embodiment, the shaft motor 78, that is, a shaft-type linear motor, is used, but a T-type linear motor, F-type linear motor, or the like other than the shaft type may also be used.

[0047] In the above embodiment, the shaft motor 78 is used as a linear motor for moving the mounting head 26 of the electronic component mounting device 10, but it may also be used as a linear motor for moving a circuit board. Furthermore, the shaft motor 78 may also be used in various types of work machines, machine tools, etc. other than the electronic component mounting device 10.

[0048] 78: Shaft motor (linear motor) 100: Stator 102: Movable element 112: Permanent magnet (magnetic force generating part) 122: Coil 130: Heat transfer member 136: Heat collecting part 138: Heat dissipation part 150: Duct 170: Inlet fan (blower) 171: Inlet port 172: First outlet fan (blower) 174: Second outlet fan (blower) 180: Inlet port 190: Filter 200: Slide groove 210: Filter 220: Upper convex part (convex part) 222: Lower convex part (protrusion) 232: Slot (recess) 242: Notch

Claims

1. A linear motor comprising: a stator having a plurality of magnetic force generating portions; a movable portion having a plurality of wound coils; a heat transfer member disposed between adjacent coils and having a heat collection portion curved along the circumferential direction of the coils and a heat dissipation portion continuing from the heat collection portion and protruding in a direction away from the coils; a duct surrounding the heat dissipation portion; a blower that blows gas into the inside of the duct; and a filter provided at the gas inlet into the duct.

2. A linear motor according to claim 1, further comprising a first filter provided at a first gas inlet formed on a side surface of the duct.

3. A linear motor as described in claim 2, wherein a slide groove is formed at the inlet for the first gas along the direction in which the duct extends, and the first filter is attached to and detached from the duct by inserting the edge of the first filter into the slide groove and sliding the first filter.

4. A linear motor according to any one of claims 1 to 3, further comprising a second filter provided at a second gas inlet formed at an end face of the duct.

5. A linear motor as described in claim 4, wherein a notch is formed at the inlet for the second gas, and the second filter is attached to the duct by inserting a protrusion protruding from the edge of the second filter into the notch while twisting it, and the second filter is removed from the duct by removing the protrusion from the notch while twisting it.

6. A linear motor as described in claim 5, wherein one of a convex portion and a concave portion is formed on the side opposite the notch of the second gas inlet, and the other of the convex portion and the concave portion is formed on the side opposite the protrusion of the second filter, and the second filter is attached to the duct by inserting the convex portion into the concave portion, and the second filter is removed from the duct by removing the convex portion from the concave portion.

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