Real-time solution temperature control system and method

Abstract

A real-time solution temperature control system, and a method. The system comprises: a solution supply module (100), configured to supply solutions having different temperatures to a solution mixing module (200); a solution mixing module (200), configured to receive and evenly mix solutions having different temperatures supplied by the solution supply module (100); a temperature measurement module (300), configured to measure the temperature of the solution after even mixing by the solution mixing module (200); and a control module (400), configured to, on the basis of the temperature of the uniformly mixed solution measured by the temperature measurement module (300), adjust the flow rates of the solutions having different temperatures supplied to the solution mixing module (200) by the solution supply module (100), so that the temperature of the uniformly mixed solution in the solution mixing module (200) reaches a target temperature. Using an online solution mixing mode to control, in real time, the flow rates of supplied solutions that constitute components of a solution, achieves the purpose of adjusting the temperature of the solution in real time, such that temperature control is more accurate, thereby effectively improving process effectiveness and process flexibility.

Description

Solution temperature real-time control system and method Technical Field

[0001] The present application relates to the field of semiconductor processing technology, and in particular to a system and method for real-time temperature control of a solution. Background Art

[0002] In wet processes, such as wafer cleaning, or process development, it is often necessary to change the temperature of the cleaning solution to meet different process requirements or R&D testing needs. The existing technology for controlling the temperature of the cleaning solution during the process and the existing defects are as follows:

[0003] 1. Mixing method of cleaning solution mixing tank:

[0004] a) Process: Mix the cleaning solution in a mixing tank and heat or cool it to the target temperature before supplying it to the process chamber;

[0005] b) Workmanship defects:

[0006] 1) Cost and floor space: A liquid supply system can only provide cleaning solutions of one temperature at a time. If customers require cleaning solutions of multiple temperatures for the same machine, multiple cleaning solution supply systems must be provided, increasing machine costs and increasing the floor space required to operate the machine.

[0007] 2) Inflexible temperature switching: Changing the cleaning solution temperature requires manual liquid replacement or changing the temperature setting conditions. The heater or cooling device heats or cools the solution. After a long period of heating or cooling, the cleaning solution can reach the required temperature. The switching time is long, reducing the machine's production capacity. Moreover, the switching often requires manual operation, which is not suitable for automation.

[0008] 3) Poor temperature control accuracy: The temperature of the cleaning solution to the process chamber is affected by the season, pipeline length and pipeline position, and the temperature accuracy is poor.

[0009] 2. Online mixing method:

[0010] a) Process: Existing online liquid mixing methods, such as high-temperature SC1, only control the hot water temperature. For ammonia and hydrogen peroxide, which account for a relatively small proportion, room-temperature solutions are used directly. Changing the cleaning solution temperature requires adjusting the hot water temperature.

[0011] b) Workmanship defects:

[0012] 1) Cost and floor space: A liquid supply system can only provide one cleaning solution temperature at a time. If the customer requires the same machine to have multiple cleaning solution temperatures, multiple cleaning solution supply systems must be provided, increasing the machine cost and the floor space required to add additional liquid supply systems.

[0013] 2) Inflexible temperature switching: Changing the temperature requires changing the temperature setting conditions and controlling the output power of the hot water heater. The process can only be carried out when the high-temperature hot water reaches the operating temperature. The switching time is long, which reduces the machine's production capacity.

[0014] 3) Poor temperature control accuracy: The temperature of the chemical solution to the process chamber is affected by the season, pipeline length and pipeline position, and the temperature accuracy is poor.

[0015] As semiconductor manufacturing processes become increasingly sophisticated and process nodes shrink, wet cleaning places increasingly stringent demands on cleaning solution temperature control. This necessitates the development of more precise temperature control methods that are unaffected by seasonal variations and the varying lengths and locations of chamber piping. Consequently, a real-time solution temperature control system and method are needed to increase process flexibility, reduce temperature control time, and address a wider range of application scenarios.

[0016] Summary of the Invention

[0017] In order to better cope with the more refined temperature control of chemical solutions in semiconductor manufacturing processes, increase process accuracy and improve process flexibility, the present invention proposes a real-time solution temperature control system and method.

[0018] In a first aspect, the present application proposes a real-time solution temperature control system, comprising:

[0019] a liquid supply module, configured to supply solutions of different temperatures to the liquid mixing module;

[0020] a liquid mixing module, configured to receive the solutions of different temperatures supplied by the liquid supply module and mix them uniformly;

[0021] A temperature detection module is configured to detect the temperature of the solution after being evenly mixed by the liquid mixing module;

[0022] The control module is configured to adjust the flow rate of solutions of different temperatures delivered by the liquid supply module to the liquid mixing module according to the temperature of the mixed solution measured by the temperature detection module, so that the temperature of the mixed solution in the liquid mixing module reaches the target temperature.

[0023] According to a specific implementation of the embodiment of the present application, the liquid supply module includes: a liquid storage unit and a delivery unit; the liquid storage unit is connected to the liquid mixing module through the delivery unit;

[0024] The liquid storage unit comprises:

[0025] a room temperature deionized water storage unit configured to store room temperature deionized water supplied to the liquid mixing module;

[0026] a high-temperature deionized water storage unit configured to store high-temperature deionized water supplied to the liquid mixing module;

[0027] The chemical liquid storage unit is configured to store the chemical liquid to be supplied to the liquid mixing module.

[0028] According to a specific implementation of an embodiment of the present application, the liquid storage unit includes at least one chemical liquid storage unit. When the number of chemical liquid storage units is greater than 1, the chemical liquids stored in each of the chemical liquid storage units are different.

[0029] According to a specific implementation of the embodiment of the present application, the control module is pre-installed with relationship data of different processes corresponding to different temperatures, as well as a database of volume ratios of various components of the corresponding solutions at different temperatures;

[0030] The control module is further configured to:

[0031] Determine the target temperature of the mixed solution;

[0032] Controlling the flow rate of solutions of different temperatures delivered from the liquid supply module to the liquid mixing module according to the volume ratio data of the components of the solution corresponding to the target temperature;

[0033] Obtain the temperature detection results of the temperature detection module in real time;

[0034] When the temperature detection result is different from the target temperature for a preset period of time, the supply temperature and flow rate of the chemical liquid storage unit to the mixing module are controlled to remain unchanged, and the required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water are calculated in real time according to the temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing module to make the temperature of the evenly mixed solution in the mixing module reach the target temperature.

[0035] According to a specific implementation of the embodiment of the present application, the control module calculates the required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water in real time according to the temperature detection result, including:

[0036] The required flow rate change ΔL of room temperature deionized water is calculated using the following equations: D1 and the required flow rate change of high temperature deionized water ΔL D2 : ΔL D1 +ΔL D2 =0 Formula 1

[0037] Wherein, Formula 1 is obtained based on the assumption that the sum of the flow rate change of room temperature deionized water supplied from the room temperature deionized water storage unit to the mixing module and the flow rate change of high temperature deionized water supplied from the high temperature deionized water storage unit to the mixing module is 0, under the conditions that the total liquid supply flow rate remains unchanged and the liquid supply temperature and flow rate from the chemical liquid storage unit to the mixing module remain unchanged; Formula 2 is obtained based on the law of conservation of heat;

[0038] Wherein, the liquid storage unit includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where,

[0039] c is the specific heat capacity, in joules / kg °C;

[0040] m is mass in kilograms;

[0041] Δt is the temperature increase or decrease in degrees Celsius;

[0042] ρ is the density in kg / dm3;

[0043] L is the flow rate in liters / minute;

[0044] t is the unit time in minutes.

[0045] According to a specific implementation of the embodiment of the present application, the control module is configured as follows:

[0046] Determine the target temperature of the mixed solution;

[0047] Obtain the temperature detection results of the temperature detection module in real time;

[0048] When the temperature detection result is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the larger flow storage unit to the mixing liquid module are fixed unchanged; the flow rate change of other liquid storage units to the mixing liquid module is adjusted in real time according to the temperature detection result, so that the temperature of the uniformly mixed solution in the mixing liquid module reaches the target temperature, among which the larger flow storage unit is the liquid storage unit in the liquid supply module that supplies the largest liquid flow rate to the mixing liquid module.

[0049] According to a specific implementation of an embodiment of the present application, when the chemical liquid storage unit includes two liquid supply pipelines, the control module is further configured to control the liquid supply temperature and flow rate of the liquid storage unit with a larger flow rate to the liquid mixing module to remain unchanged; the control module adjusts the flow rate change of the liquid supply from the other liquid storage units to the liquid mixing module in real time based on the temperature detection result, including:

[0050] The following equations consisting of formula 3, formula 4, formula 5, formula 6 and formula 7 are used to calculate the flow change of chemical liquid 1 ΔL1, the flow change of chemical liquid 2 ΔL2 and the flow change of room temperature deionized water ΔL D1 : ΔQ1+ΔQ D1 +ΔQ D2 =0 Formula 5 (L1+ΔL1) / (L D1 +L D2 +ΔL D1 )=r1 Formula 6 (L2+ΔL2) / (L D1 +L D2 +ΔL D2 )=r2 Formula 7

[0051] Wherein, Equations 3 and 4 are the volume ratios of the two chemical liquids included in the chemical liquid storage unit; Equation 5 is obtained based on the law of conservation of heat; Equations 6 and 7 are the volume ratios of the two chemical liquids included in the storage unit under the condition that the volume ratio of the chemical liquids remains unchanged after the flow rate changes;

[0052] Among them, r1 and r2 are the volume ratios of the two chemical liquids in the set solution, L1 and L2 are the flow rates of the two chemical liquids, in liters / minute; ΔL1 is the flow rate change of the chemical liquid whose flow rate needs to be changed, in liters / minute; L D1 and L D2 is the flow rate of room temperature deionized water and high temperature deionized water, in liters per minute; ΔL D1 and ΔL D2 are the flow rate changes of room temperature deionized water and high temperature deionized water, respectively, in liters / minute; ΔQ1 is the heat change of the chemical liquid that needs to change the flow rate, in joules; ΔQ D1 is the heat change of deionized water at room temperature, in joules; ΔQ D2 is the heat change of high-temperature deionized water, in joules.

[0053] In a second aspect, the present application proposes a real-time solution temperature control system, comprising:

[0054] a liquid supply module, configured to supply solutions of different temperatures to the liquid mixing module;

[0055] a liquid mixing module, configured to receive the solutions of different temperatures supplied by the liquid supply module and mix them uniformly;

[0056] The temperature detection module includes a first temperature detection unit configured to detect the temperature of each component of the solution before the solution is evenly mixed and generate a first temperature detection result;

[0057] The control module is configured to determine the target temperature of the mixed solution; according to the first temperature detection result, adjust the flow rate of the solution of different temperatures delivered by the liquid supply module to the mixing module so that the temperature of the mixed solution in the mixing module reaches the target temperature.

[0058] According to a specific implementation of the embodiment of the present application, the liquid supply module includes:

[0059] a room temperature deionized water storage unit configured to store room temperature deionized water supplied to the liquid mixing module;

[0060] a high-temperature deionized water storage unit configured to store high-temperature deionized water supplied to the liquid mixing module;

[0061] The chemical liquid storage unit is configured to store the chemical liquid to be supplied to the liquid mixing module.

[0062] According to a specific implementation of the embodiment of the present application, the liquid supply module includes at least one chemical liquid storage unit. When the number of chemical liquid storage units is greater than 1, the chemical liquid stored in each chemical liquid storage unit is different.

[0063] According to a specific implementation of the embodiment of the present application, the control module adjusts the flow rate of the solution of different temperatures delivered by the liquid supply module to the liquid mixing module according to the first temperature detection result, including:

[0064] The total liquid supply flow rate is fixed unchanged, the liquid supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are fixed unchanged, the required flow rate of room temperature deionized water and the required flow rate of high-temperature deionized water are calculated in real time according to the first temperature detection result, and the room temperature deionized water and high-temperature deionized water of corresponding flow rates are delivered to the mixing liquid module to make the temperature of the uniformly mixed solution in the mixing liquid module reach the target temperature.

[0065] According to a specific implementation of the embodiment of the present application, the control module calculates the flow rate required for room temperature deionized water and the flow rate required for high temperature deionized water in real time according to the first temperature detection result, including:

[0066] The flow rate L required for room temperature deionized water is calculated using the following equations consisting of equations 8 and 2: D1 and the flow rate L required for high temperature deionized water D2 : LD =L D1 +L D2 Style 8

[0067] Wherein, the total amount of room temperature deionized water and high temperature deionized water supplied to the mixing module is L under the condition that the total flow rate of the liquid supply remains unchanged and the temperature and flow rate of the liquid supply from the chemical liquid storage unit to the mixing module remain unchanged. D The second formula is obtained according to the law of conservation of heat;

[0068] Among them, L D1 Flow rate required for room temperature deionized water; L D2 The flow rate required for high-temperature deionized water; the liquid supply module includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where,

[0069] c is the specific heat capacity, in joules / kg °C;

[0070] m is mass in kilograms;

[0071] Δt is the temperature increase or decrease in degrees Celsius;

[0072] ρ is the density in kg / dm3;

[0073] L is the flow rate in liters / minute;

[0074] t is the unit time in minutes.

[0075] According to a specific implementation of the embodiment of the present application, the temperature detection module further includes a second temperature detection unit configured to detect the temperature of the solution after being uniformly mixed by the liquid mixing module, and generate a second temperature detection result;

[0076] The control module is further configured to:

[0077] Acquire a second temperature detection result of the second temperature detection unit in real time;

[0078] When the second temperature detection result is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the chemical liquid storage unit to the mixing module are controlled to remain unchanged, and the required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water are calculated in real time according to the second temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing module to make the temperature of the uniformly mixed solution in the mixing module reach the target temperature.

[0079] In a third aspect, the present application proposes a method for real-time temperature control of a solution, comprising the following steps:

[0080] Using the liquid supply module to supply solutions of different temperatures to the liquid mixing module;

[0081] Solutions of different temperatures are mixed evenly in the liquid mixing module, and the temperature of the mixed solution is detected in real time by the temperature detection module and fed back to the control module;

[0082] The control module adjusts the flow rate of solutions of different temperatures delivered by the liquid supply module to the liquid mixing module according to the temperature of the mixed solution measured by the temperature detection module, so that the temperature of the mixed solution in the liquid mixing module reaches the target temperature.

[0083] According to a specific implementation of the embodiment of the present application, the solution includes at least two of: chemical liquid, room temperature deionized water, and high temperature deionized water.

[0084] According to a specific implementation of the embodiment of the present application, when the solution includes a chemical liquid, the component of the chemical liquid is greater than or equal to one.

[0085] According to a specific implementation of the embodiment of the present application, the method further includes:

[0086] Preset the relationship data of different processes corresponding to different temperatures, as well as the volume ratio data of each component of the solution at different temperatures in the control module;

[0087] The control module determines the target temperature of the mixed solution according to the process, and controls the mixing of solutions at different temperatures according to the volume ratio data of the components of the solution corresponding to the target temperature;

[0088] The temperature detection module obtains the actual temperature of the mixed solution in real time. When it is detected that the actual temperature is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the fixed chemical liquid storage unit to the mixing module remain unchanged. The required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water are calculated in real time according to the actual temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing module to make the temperature of the mixed solution in the mixing module reach the target temperature.

[0089] According to a specific implementation of the embodiment of the present application, the step of calculating the required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water in real time according to the actual temperature detection result includes:

[0090] The required flow rate change ΔL of room temperature deionized water is calculated using the following equations: D1 and the required flow rate change of high temperature deionized water ΔL D2 : ΔL D1 +ΔL D2 =0 Formula 1

[0091] Wherein, Formula 1 is obtained based on the assumption that the sum of the flow rate change of room temperature deionized water supplied from the room temperature deionized water storage unit to the liquid mixing module and the flow rate change of high temperature deionized water supplied from the high temperature deionized water storage unit to the liquid mixing module is 0, under the conditions that the total liquid supply flow rate remains unchanged and the liquid supply temperature and flow rate from the chemical liquid storage unit to the liquid mixing module remain unchanged; Formula 2 is obtained based on the law of conservation of heat;

[0092] Wherein, the liquid supply module includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where,

[0093] c is the specific heat capacity, in joules / kg °C;

[0094] m is mass in kilograms;

[0095] Δt is the temperature increase or decrease in degrees Celsius;

[0096] ρ is the density in kg / dm3;

[0097] L is the flow rate in liters / minute;

[0098] t is the unit time in minutes.

[0099] According to a specific implementation of the embodiment of the present application, the method further includes:

[0100] The control module determines the target temperature of the solution according to the process and obtains the temperature detection result of the temperature detection module in real time; when the temperature detection result is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the larger flow storage unit to the mixing liquid module are fixed unchanged; according to the temperature detection result, the flow rate change of other liquid storage units to the mixing liquid module is adjusted in real time to make the temperature of the uniformly mixed solution in the mixing liquid module reach the target temperature, wherein the larger flow storage unit is the liquid storage unit in the liquid supply module that supplies the largest liquid flow rate to the mixing liquid module.

[0101] According to a specific implementation of the embodiment of the present application, when the number of the chemical liquid storage units is two, the control module is further configured to control the temperature and flow rate of the liquid supplied from the liquid storage unit with a larger flow rate to the liquid mixing module to remain constant; and the step of the control module adjusting the flow rate change of the liquid supplied from the other liquid storage units to the liquid mixing module in real time according to the temperature detection result includes:

[0102] The following equations consisting of formula 3, formula 4, formula 5, formula 6 and formula 7 are used to calculate the flow change of chemical liquid 1 ΔL1, the flow change of chemical liquid 2 ΔL2 and the flow change of room temperature deionized water ΔL D1 : ΔQ1+ΔQ D1 +ΔQ D2 =0 Formula 5 (L1+ΔL1) / (L D1 +L D2 +ΔL D1 )=r1 Formula 6 (L2+ΔL2) / (L D1 +L D2 +ΔL D2 )=r2 Formula 7

[0103] Wherein, Equations 3 and 4 are the volume ratios of the two chemical liquids supplied by the two liquid supply pipelines included in the chemical liquid storage unit; Equation 5 is obtained based on the law of conservation of heat; Equations 6 and 7 are the volume ratios of the two chemical liquids supplied by the two liquid supply pipelines included in the chemical liquid storage unit under the condition that the volume ratio of the chemical liquids remains unchanged after the flow rate changes;

[0104] Among them, r1 and r2 are the volume ratios of the two chemical liquids in the set solution, L1 and L2 are the flow rates of the two chemical liquids, in liters / minute; ΔL1 is the flow rate change of the chemical liquid whose flow rate needs to be changed, in liters / minute; L D1 and L D2 is the flow rate of room temperature deionized water and high temperature deionized water, in liters per minute; ΔL D1 and ΔL D2are the flow rate changes of room temperature deionized water and high temperature deionized water, respectively, in liters / minute; ΔQ1 is the heat change of the chemical liquid that needs to change the flow rate, in joules; ΔQ D1 ΔQ is the heat change of deionized water at room temperature, unit: Joule; D2 It is the heat change of high-temperature deionized water, unit: Joule.

[0105] In a fourth aspect, the present application proposes a method for real-time temperature control of a solution, comprising the following steps:

[0106] The control module obtains the target temperature of the mixed solution;

[0107] Using the liquid supply module to supply solutions of different temperatures to the liquid mixing module;

[0108] Solutions of different temperatures are mixed evenly in the liquid mixing module, and the first temperature detection unit is used to detect the supply temperature of each component of the solution in the liquid mixing module in real time to generate a first temperature detection result, and the first temperature detection result is fed back to the control module;

[0109] The control module adjusts the flow rate of the solutions of different temperatures delivered by the liquid supply module to the liquid mixing module according to the first temperature detection result, so that the temperature of the evenly mixed solution in the liquid mixing module reaches the target temperature.

[0110] According to a specific implementation of the embodiment of the present application, the solution includes at least two of: chemical liquid, room temperature deionized water, and high temperature deionized water.

[0111] According to a specific implementation of the embodiment of the present application, when the solution includes a chemical liquid, the component of the chemical liquid is greater than or equal to one.

[0112] According to a specific implementation of the embodiment of the present application, adjusting the flow rate of the solution of different temperatures delivered by the liquid supply module to the liquid mixing module according to the first temperature detection result includes:

[0113] The total liquid supply flow rate is fixed unchanged, the liquid supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are fixed unchanged, the required flow rate of room temperature deionized water and the required flow rate of high-temperature deionized water are calculated in real time according to the first temperature detection result, and the room temperature deionized water and high-temperature deionized water of corresponding flow rates are delivered to the mixing liquid module to make the temperature of the uniformly mixed solution in the mixing liquid module reach the target temperature.

[0114] According to a specific implementation of the embodiment of the present application, the flow rate required for room temperature deionized water and the flow rate required for high temperature deionized water are calculated in real time according to the first temperature detection result, including:

[0115] The flow rate L required for room temperature deionized water is calculated using the following equations consisting of equations 8 and 2: D1 and the flow rate L required for high temperature deionized water D2 : L D =L D1 +L D2 Style 8

[0116] Wherein, the total amount of liquid supplied by the room temperature deionized water storage unit to the mixing module and the amount of liquid supplied by the high temperature deionized water storage unit to the mixing module is L under the condition that the total liquid supply flow rate remains unchanged and the liquid supply temperature and flow rate of the chemical liquid storage unit to the mixing module remain unchanged. D The second formula is obtained according to the law of conservation of heat;

[0117] Among them, L D1 Flow rate required for room temperature deionized water; L D2 The flow rate required for high-temperature deionized water; the liquid supply module includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where,

[0118] c is the specific heat capacity, in joules / kg °C;

[0119] m is mass in kilograms;

[0120] Δt is the temperature increase or decrease in degrees Celsius;

[0121] ρ is the density in kg / dm3;

[0122] L is the flow rate in liters / minute;

[0123] t is the unit time in minutes.

[0124] According to a specific implementation of the embodiment of the present application, the method further includes:

[0125] Detecting the temperature of the solution after the solution is evenly mixed by the liquid mixing module using the second temperature detection unit to generate a second temperature detection result;

[0126] The control module obtains the temperature detection result of the second temperature detection unit in real time;

[0127] When the second temperature detection result is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the chemical liquid storage unit to the mixing module are controlled to remain unchanged, and the required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water are calculated in real time according to the second temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing module to make the temperature of the uniformly mixed solution in the mixing module reach the target temperature.

[0128] The solution temperature real-time control system and method of the present invention achieves the purpose of adjusting the temperature of the mixed solution in real time by controlling the flow rate of each component of the liquid supply in real time through online mixing. At the same time, when the machine requires a mixed solution configuration with multiple temperatures, only one solution supply system can be used, which reduces the cost of the machine and reduces the floor space of the machine; secondly, the temperature of the mixed solution is flexibly controlled by online control of the flow rate of each component of the mixed solution. There is no need to wait for the temperature switch, and each process chamber can be temperature-controlled separately to improve the utilization rate of the machine; in addition, the temperature control is more accurate, avoiding the difference in the temperature of the mixed solution in different process chambers caused by factors such as ambient temperature or pipeline length, effectively improving the process effect, increasing the flexibility of the process, saving the time of temperature control, and being able to meet more usage scenarios. Other features and advantages of the present invention will be explained in the subsequent description, and part of them will become obvious from the description, or be understood by implementing the present invention. The purpose and other advantages of the present invention can be achieved and obtained through the structures indicated in the description, claims and drawings.

[0129] Summary of the Figures

[0130] The features and properties of the present invention are further described by the following examples and accompanying drawings.

[0131] FIG1 shows a schematic structural diagram of a system for real-time temperature control of a solution according to an embodiment of the present invention;

[0132] FIG2 shows a schematic structural diagram of a liquid supply module of a real-time solution temperature control system according to an embodiment of the present invention when the liquid supply module is a multi-component solution;

[0133] FIG3 shows a schematic structural diagram of a system for real-time temperature control of a solution when there are two types of chemical liquids according to an embodiment of the present invention;

[0134] FIG4 shows a schematic structural diagram of a system for real-time temperature control of a solution according to another embodiment of the present invention;

[0135] FIG5 shows a schematic structural diagram of a liquid supply module of a real-time solution temperature control system according to another embodiment of the present invention when the liquid supply module is a multi-component solution;

[0136] FIG6 shows a schematic flow chart of a method for real-time temperature control of a solution according to an embodiment of the present invention; and

[0137] FIG7 shows a schematic flow chart of a method for real-time temperature control of a solution according to another embodiment of the present invention.

[0138] Preferred embodiment of this application

[0139] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0140] During wafer cleaning or process development, the temperature of the cleaning solution often needs to be changed to meet different process requirements or R&D and testing needs. To address the high cost, inflexible temperature switching, and poor temperature control accuracy of existing cleaning solution mixing tank and online mixing methods, the inventors have developed a real-time solution temperature control system and method to achieve more refined solution temperature control, improve process accuracy, and enhance process flexibility in semiconductor manufacturing.

[0141] Next, a system and method for real-time temperature control of a solution provided by the present invention are described in detail.

[0142] Please refer to Figure 1, which shows a schematic diagram of the structure of a real-time solution temperature control system according to an embodiment of the present invention. As shown in Figure 1, the real-time solution temperature control system includes a liquid supply module 100, a liquid mixing module 200, a temperature detection module 300, and a control module 400. Among them, the liquid supply module 100 is configured to supply cleaning solutions of different temperatures to the liquid mixing module 200; the liquid supply module 100 includes a liquid storage unit 101 and a conveying unit 102, and the liquid storage unit 101 is connected to the liquid mixing module 200 through the conveying unit 102; the liquid mixing module 200 is configured to receive the cleaning solutions of different temperatures supplied by the liquid supply module 100 and mix them evenly, and then convey them to the cleaning chamber of the cleaning device through the infusion unit 500 to perform the cleaning process; the temperature detection module 300 is configured to detect the temperature of the cleaning solution after uniform mixing in the liquid mixing module 200, and is generally selected to be set on the liquid mixing module 200; the control module 400 is configured to adjust the flow rate of cleaning solutions of different temperatures supplied by the liquid supply module 100 to the liquid mixing module 200 according to the temperature of the cleaning solution after uniform mixing measured by the temperature detection module 300, so that the temperature of the uniformly mixed cleaning solution in the liquid mixing module 200 reaches the target temperature. The present invention monitors the temperature of the cleaning solution in real time and adjusts the flow rate of cleaning solutions of different temperatures in real time, thereby achieving the purpose of more refined control of the temperature of the cleaning solution after uniform mixing in the semiconductor manufacturing process, improving the accuracy of the process and increasing the flexibility of the process.

[0143] Furthermore, during the actual process, the mixing module 200 can select a mixing valve as the mixing space for cleaning solutions of different temperatures, or can select a mixing box as the mixing space for cleaning solutions of different temperatures. The specific selection can be made based on actual needs. In the embodiment of the present invention, there is no restriction on the spatial structure of the mixing module 200. Any structure that can evenly mix the cleaning solutions falls within the scope of protection of the present invention. It is worth noting that when the mixing module 200 is selected as a mixing valve, considering the small size of the mixing valve, it is inconvenient to install the temperature detection module 300. Therefore, the temperature detection module 300 can be installed on the infusion unit 500 to detect the temperature of the mixed cleaning solutions of different temperatures.

[0144] Furthermore, the control module 400 includes a control unit 401 and a flow regulating unit 402. The flow regulating unit 402 is arranged on the conveying unit 102 and is used to control the liquid flow flowing through the conveying unit 102. The control unit 401 receives the cleaning solution temperature sent by the temperature detection module 300 and controls the flow regulating unit 402 to adjust the flow rate of cleaning solutions of various temperatures supplied by the liquid supply module 100 to the mixing module 200.

[0145] Please continue to refer to Figure 1. When designing a wafer cleaning device, a liquid storage box or liquid storage tank is generally selected as the liquid storage unit 101 of the liquid supply module 100; the delivery unit 102 is generally selected as an infusion pipeline; the temperature detection module 300 is generally selected as a temperature detector; the control unit 401 of the control module 400 is generally the control system of the cleaning device; and the flow regulating unit 402 of the control module 400 is generally selected as a flow regulating valve. During the process, cleaning solutions of different temperatures are transported to the mixing module 200 through the liquid storage unit 101 via the transport unit 102. After the cleaning solutions of different temperatures are evenly mixed in the mixing module 200, they are transported to the wafers in the cleaning chamber through the infusion unit 500 to perform a cleaning process on the wafers. The temperature detection module 300 measures the temperature of the cleaning solution in the mixing module 200 and sends the measured data to the control unit 401 of the control module 400. The control unit 401 controls the flow regulation unit 402 to adjust the flow rate of cleaning solutions of different temperatures supplied by the liquid supply module 100 to the mixing module 200 according to the received data, so that the temperature of the evenly mixed cleaning solution in the mixing module 200 is adjusted to reach the target temperature.

[0146] The liquid supply module 100 determines the number of liquid storage units 101 and delivery units 102 based on the components of the cleaning solution in the liquid mixing module 200. Each liquid storage unit 101 is connected to the liquid mixing module 200 via a delivery unit 102 to deliver a cleaning solution of a component to the liquid mixing module 200. It should be understood that in this embodiment, cleaning solutions with the same chemical composition at different temperatures are considered different components; cleaning solutions with different chemical compositions at the same temperature are also considered different components. For example, when the cleaning solution includes room temperature deionized water and high temperature deionized water, even if the two have the same chemical composition, they are still considered to have different cleaning solutions and, by default, require two liquid storage units 101 to store them separately. When the cleaning solution includes hydrogen peroxide and room temperature deionized water, even if the two have the same temperature, they are also considered to have different components and, by default, require two liquid storage units 101 to store them separately. For example, please refer to Figure 2, which shows a structural schematic diagram of the liquid supply module of the real-time solution temperature control system according to an embodiment of the present invention supplying cleaning solutions of different temperatures. When the cleaning solution contains three components (room temperature deionized water, high temperature deionized water, and chemical liquid), as shown in Figure 2, the liquid supply module 100 in the embodiment of the present invention includes: a room temperature deionized water storage unit 101a, configured to store room temperature deionized water supplied to the mixing liquid module 200; a high temperature deionized water storage unit 101b, configured to store high temperature deionized water supplied to the mixing liquid module 200; and a chemical liquid storage unit 101c, configured to store chemical liquid supplied to the mixing liquid module 200.

[0147] Please continue to refer to Figure 2. In order to facilitate the precise control of the temperature of the cleaning solution in the mixing module 200, the relationship data corresponding to different temperatures for different processes and the volume ratio data of the components of the cleaning solution at different temperatures can be collected, and the data can be processed to generate a database stored in the control unit 401 of the control module 400. When a cleaning process is required for the wafers in the cleaning chamber, the control module 400 can first determine the target temperature of the cleaning solution after uniform mixing based on the process to be implemented; control the flow rate of the components of the cleaning solution delivered by the liquid supply module 100 to the mixing module 200 according to the volume ratio data of the components of the cleaning solution corresponding to the target temperature; and at the same time, the control unit 401 obtains in real time the temperature detection result of the temperature detection module 300 for the uniformly mixed cleaning solution. When the temperature detection result remains different from the target temperature for a predetermined period of time, the temperature and flow rate of the liquid supplied from the chemical liquid storage unit 101c to the liquid mixing module 200 are controlled to remain constant. The required flow rate changes of the room temperature deionized water and the high temperature deionized water are calculated in real time based on the temperature detection result, and the corresponding flow rates of the room temperature deionized water and the high temperature deionized water are delivered to the liquid mixing module 200 to ensure that the temperature of the uniformly mixed cleaning solution in the liquid mixing module 200 reaches the target temperature. Considering that the properties of the chemical liquid may change due to temperature, and to facilitate precise control of the temperature of the cleaning solution, in this embodiment, the temperature and flow rate of the liquid supplied from the chemical liquid storage unit 101c to the liquid mixing module 200 are controlled to remain constant, while the flow rates of the liquid supplied from the room temperature deionized water storage unit 101a and the high temperature deionized water storage unit 101b to the liquid mixing module 200 are adjusted. In this embodiment, the chemical liquid storage unit 101c supplies chemical liquid, the room temperature deionized water storage unit 101a supplies room temperature deionized water, and the high temperature deionized water storage unit 101b supplies high temperature deionized water. The temperature of the exemplary high temperature deionized water can be 35 degrees Celsius, 50 degrees Celsius, 60 degrees Celsius, 65 degrees Celsius, or 70 degrees Celsius, and can also be set to other temperatures higher than room temperature. The specific setting can be made according to the process requirements.

[0148] Depending on the process requirements, the type of chemical liquid can be one or more. It should be understood that the type of chemical liquid here is understood in the same way as the above-mentioned components, and will not be elaborated here. When the type of chemical liquid is greater than one, different chemical liquids need to be provided with different chemical liquid storage units, and each chemical liquid storage unit is respectively configured with a conveying unit. Therefore, the storage unit includes at least one chemical liquid storage unit. When the number of chemical liquid storage units is greater than 1, the types of chemical liquids stored in each chemical liquid storage unit are different, and the chemical liquids stored in different chemical liquid storage units are respectively transported to the mixing module via the conveying units connected thereto. Exemplarily, when the cleaning solution is SC1, its components are room temperature deionized water, high temperature deionized water, ammonia water and hydrogen peroxide. The SC1 cleaning solution contains two types of chemical liquids, namely ammonia water and hydrogen peroxide. When the cleaning solution is SC2, its components are room temperature deionized water, high temperature deionized water, hydrochloric acid and hydrogen peroxide. The SC2 cleaning solution also contains two chemical liquids: hydrochloric acid and hydrogen peroxide. Please refer to Figure 3, which illustrates a real-time solution temperature control system for an embodiment of the present invention using two chemical liquids. As shown in Figure 3, the chemical liquid storage unit includes chemical liquid storage unit 101c and chemical liquid storage unit 101d, which are used to supply ammonia, hydrogen peroxide, or hydrochloric acid and hydrogen peroxide, respectively.

[0149] The control module 400 calculates the required flow change ΔL of the room temperature deionized water in real time according to the temperature detection result of the temperature detection module 300. D1 and the required flow rate change of high temperature deionized water ΔL D2 include:

[0150] The required flow rate change ΔL of room temperature deionized water is calculated using the following equations: D1 and the required flow rate change of high temperature deionized water ΔL D2 : ΔL D1 +ΔL D2 =0 Formula 1

[0151] Where, ΔL D1 is the required flow rate change of room temperature deionized water; ΔL D2 is the required flow change of high temperature deionized water.

[0152] Wherein, Formula 1 is obtained based on the assumption that the sum of the flow rate change of room temperature deionized water supplied from the room temperature deionized water storage unit to the liquid mixing module and the flow rate change of high temperature deionized water supplied from the high temperature deionized water storage unit to the liquid mixing module is 0, under the conditions that the total liquid supply flow rate remains unchanged and the liquid supply temperature and flow rate from the chemical liquid storage unit to the liquid mixing module remain unchanged; Formula 2 is obtained based on the law of conservation of heat;

[0153] The liquid storage unit 101 includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where,

[0154] c is the specific heat capacity, unit: joule / kg℃;

[0155] m is mass, unit: kilogram;

[0156] Δt is the temperature increase (or decrease), unit: Celsius;

[0157] ρ is density, unit: kg / cubic decimeter;

[0158] L is the flow rate in liters / minute;

[0159] t is the unit time, unit: minute.

[0160] In this embodiment, n is equal to 2. The information of the components of the cleaning solution supplied by the known liquid supply module is as follows (the flow rates of the different components are calculated based on the required chemical liquid volume ratio and the total flow rate):

[0161] Chemical liquid 1: supply temperature T1, density ρ1, specific heat capacity C1, flow rate L1;

[0162] Chemical liquid 2: supply temperature T2, density ρ2, specific heat capacity C2, flow rate L2;

[0163] Room temperature deionized water: temperature T D1 , density ρ D1 , specific heat capacity C D , the flow rate is L D1 , let the required flow change be ΔL D1 ;

[0164] High temperature deionized water: temperature T D1 , density ρ D2 , specific heat capacity C D , the flow rate is L D2 , let the required flow change be ΔL D2 ;

[0165] The target temperature after mixing is T;

[0166] Then, the mass of different components and their changes in unit time t are:

[0167] The mass of chemical solution 1: m1 = L1*t*ρ1;

[0168] The mass of chemical solution 2: m2 = L2*t*ρ2;

[0169] Mass of room temperature deionized water: m D1 =L D1 *t*ρ D1 ;

[0170] Mass of high temperature deionized water: m D2 =L D2 *t*ρ D2 ;

[0171] Mass change of room temperature deionized water: Δm D1 =ΔL D1 *t*ρ D1

[0172] Mass change of high-temperature deionized water: Δm D2 =ΔL D2 *t*ρ D2

[0173] The mixed liquid is measured from the actual temperature T S In the process of changing to the target temperature T, the heat change is:

[0174] 1. Chemical solution 1: ΔQ1=c1*m1*(TT s );

[0175] 2. Chemical solution 2: ΔQ2=c2*m2*(TT s );

[0176] 3. Room temperature deionized water: ΔQ D1 =c D *m D1 *(TT S )+c D *m D1 *(TT D1 );

[0177] 4. High temperature deionized water: ΔQ D2 =c D *m D2 *(TT S )+c D *m D2 *(TT D2 );

[0178] Ignoring the tiny dilution heat, according to the law of conservation of heat, we can obtain the following equations 1 and 2:

[0179] ΔL D1 =c1*L1*ρ1*(TT S )+c2*L2*ρ2*(TT S )+c D *L D1 *ρ D1 * (TT S )+c D *L D2 *ρ D2 *(TT S ) / (c D *ρ D2 *(TT D2 )-c D *ρ D1 *(TT D1 ))

[0180] ΔL D2 =-(c1*L1*ρ1*(TT S )+c2*L2*ρ2*(TT S )+c D *L D1 *ρ D1 *(TT S )+c D *L D2 *ρ D2 *(TT S )) / (c D *ρ D2 *(TT D2 )-c D *ρ D1 *(TT D1 ))

[0181] It should be noted that the calculation in this embodiment is an approximate process, specifically including: ignoring the effect of the change in specific heat capacity of water at different temperatures; ignoring the effect of dilution heat and trace chemical reaction heat.

[0182] Unlike the above calculation method, when the total liquid supply flow rate is variable, in order to ensure the cleaning effect of the cleaning solution, the volume ratio of the various components of the cleaning solution must remain unchanged. In this case, the control module 400 is configured to: determine the target temperature of the cleaning solution. In an embodiment of the present invention, the control module 400 can select the target temperature of the cleaning solution based on the data in the pre-stored database to be implemented, or a method in which the staff manually enters the target temperature data is selected. This is not limited in this embodiment; at the same time, the temperature detection result of the evenly mixed cleaning solution is obtained in real time by the temperature detection module 300; when the temperature detection result is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the larger flow storage unit to the mixing module are fixed unchanged; based on the temperature detection result, the flow rate change of the other liquid storage units to the mixing module is adjusted in real time so that the temperature of the evenly mixed cleaning solution in the mixing module reaches the target temperature, wherein the larger flow storage unit is the liquid storage unit in the liquid supply module that supplies the largest flow rate to the mixing module. For example, referring to FIG. 2 , in an embodiment of the present invention, the flow rate of high-temperature deionized water supplied by the high-temperature deionized water storage unit 101b to the mixing module is greater than the flow rate of the room-temperature deionized water storage unit 101a and the chemical liquid storage unit 101c supplied to the mixing module. The temperature and flow rate of the liquid supplied by the high-temperature deionized water storage unit 101b to the mixing module are fixed, and the flow rates of the room-temperature deionized water storage unit 101a and the chemical liquid storage unit 101c supplied to the mixing module are adjusted to adjust the temperature of the mixed cleaning solution to the target temperature. It is worth noting that this method is suitable for situations where the temperature accuracy required is high and the measured temperature of the mixed solution is not much different from the target temperature.

[0183] When the number of chemical liquid storage units is greater than 1, the chemical liquid components stored in each chemical liquid storage unit are different. For example, please refer to Figure 3. When the storage unit includes 2 chemical liquid storage units, the chemical liquid storage unit 101c stores chemical liquid 1 supplied to the mixing module; the chemical liquid storage unit 101d stores chemical liquid 2 supplied to the mixing module. The control module 400 fixes the liquid supply temperature and flow rate of the larger flow storage unit, i.e., the high-temperature deionized water storage unit 101b, to the mixing module; the control module 400 adjusts the flow rate change of the other storage units to the mixing module in real time according to the temperature detection results. For example, in this example, the adjustment of the flow rate change of the room temperature deionized water storage unit 101a, the chemical liquid storage unit 101c, and the chemical liquid storage unit 101d includes:

[0184] The following equations consisting of formula 3, formula 4, formula 5, formula 6 and formula 7 are used to calculate the flow change of chemical liquid 1 ΔL1, the flow change of chemical liquid 2 ΔL2 and the flow change of room temperature deionized water ΔL D1 : ΔQ1+ΔQ D1 +ΔQ D2 =0 Formula 5 (L1+ΔL1) / (L D1 +L D2 +ΔL D1 )=r1 Formula 6 (L2+ΔL2) / (L D1 +L D2 +ΔL D2 )=r2 Formula 7

[0185] Wherein, Equations 3 and 4 are the volume ratios of the two chemical liquids included in the chemical liquid storage unit; Equation 5 is obtained based on the law of conservation of heat; Equations 6 and 7 are the volume ratios of the two chemical liquids included in the storage unit under the condition that the volume ratio of the chemical liquids remains unchanged after the flow rate changes;

[0186] Among them, r1 and r2 are the volume ratios of the two chemical liquids in the set cleaning solution, L1 and L2 are the flow rates of the two chemical liquids, respectively, in liters / minute; ΔL1 is the flow rate change of the chemical liquid that needs to change the flow rate, in liters / minute; L D1 and L D2 is the flow rate of room temperature deionized water and high temperature deionized water, in liters per minute; ΔL D1 and ΔL D2 are the flow rate changes of room temperature deionized water and high temperature deionized water, respectively, in liters / minute; ΔQ1 is the heat change of the chemical liquid that needs to change the flow rate, in joules; ΔQ D1 ΔQ is the heat change of deionized water at room temperature, unit: Joule; D2 It is the heat change of high-temperature deionized water, unit: Joule.

[0187] The information of each component of the cleaning solution supplied by the liquid supply module is the same as above, and is calculated by combining the equations consisting of equations 3, 4, 5, 6 and 7 to obtain:

[0188] Change in flow rate of deionized water at room temperature ΔL D1 =[c1*L1*ρ1*(T-T1)+c2*L2*ρ2*(T-T2)-c1*L1*ρ1*(TT s )-c2*L2*ρ2*(TT s )-c D *L D1 *ρ D1 *(TT S )-c D *L D2 *ρ D2 *(TT S )-(LD1 +L D2 )*c1*L1*ρ1*(T-T1) / (L D1 +L D2 )-(L D1 +L D2 )*c2*L2*ρ2*(T-T2) / (L D1 +L D2 )] / [c1*L1*ρ1*(T-T1) / (L D1 +L D2 )+c2*L2*ρ2*(T-T2) / (L D1 +L D2 )+c D *ρ D1 *(TT D1 )]

[0189] Chemical liquid flow rate change ΔL1=(L D1 +L D2 +ΔL D1 )*L1 / (L D1 +L D2 )-L1)*L1; Substitute the above formula to obtain ΔL D1 That is, ΔL1 is obtained;

[0190] Chemical liquid 2 flow rate change ΔL2=(L D1 +L D2 +ΔL D1 )*L2 / (L D1 +L D2 )-L2)*L1; Substitute the above formula to obtain ΔL D1 That is ΔL2.

[0191] In another embodiment, please refer to FIG4 , which shows a schematic diagram of the structure of a real-time solution temperature control system according to another embodiment of the present invention. As shown in FIG4 , a first temperature detection unit 301 is provided on the delivery unit 102 of the liquid supply module 100 to detect the supply temperature of each component of the cleaning solution and generate a first temperature detection result. The control module 400 is configured to determine the target temperature of the cleaning solution after uniform mixing; based on the first temperature detection result, the flow rate of the cleaning solution of different temperatures delivered by the liquid supply module 100 to the liquid mixing module 200 is adjusted so that the temperature of the uniformly mixed cleaning solution in the liquid mixing module 200 reaches the target temperature.

[0192] Specifically, the control module 400 first determines the target temperature of the cleaning solution after uniform mixing. In an embodiment of the present invention, the control module 400 can select the process to be implemented based on data pre-stored in a database to determine the target temperature of the cleaning solution, or it can choose to manually input the target temperature data by a staff member, which is not limited in this embodiment. The control module 400 also obtains the temperature of each component of the cleaning solution before mixing in real time, as detected by the first temperature detection unit 301. Then, based on the first temperature detection result of the first temperature detection unit 301, a calculation is performed, fixing the total liquid supply flow rate, fixing the liquid supply temperature and flow rate of the chemical liquid storage unit to the mixing module, and calculating the required flow rate of room temperature deionized water and the required flow rate of high temperature deionized water in real time based on the first temperature detection result. The corresponding flow rates of room temperature deionized water and high temperature deionized water are then delivered to the mixing module 200, so that the temperature of the uniformly mixed cleaning solution in the mixing module 200 reaches the target temperature.

[0193] For example, referring to FIG. 5 , when the liquid storage unit 101 includes: a room temperature deionized water storage unit 101 a , a high temperature deionized water storage unit 101 b , and a chemical liquid storage unit 101 c , the control module 400 calculates the required flow rates of room temperature deionized water and high temperature deionized water in real time based on the first temperature detection result, including:

[0194] Based on the fact that the total flow rate of liquid supply remains unchanged, and the temperature and flow rate of liquid supply from the chemical liquid storage unit to the liquid mixing module remain unchanged, the total amount of liquid supply of room temperature deionized water and high temperature deionized water is L D : Then use the following equation 8 and the above equation 2 to calculate the flow rate L required for room temperature deionized water D1 and the flow rate L required for high temperature deionized water D2 : L D =L D1 +L D2 Style 8

[0195] The information of each component of the cleaning solution supplied by the liquid supply module 200 is the same as described above, then,

[0196] Flow rate required for room temperature deionized water L D1 =(c D *L D *ρ D2 *(T D2 -T)-c1*L1*ρ1*(T-T1)-c2*L2*ρ2*(T-T2)) / (c D *ρ D2 *(T D2 -T)+c D *ρ D1 *(TT D1 ))

[0197] Required flow rate of high temperature deionized water L D2 =(c1*L1*ρ1*(T-T1)+c2*L2*ρ2*(T-T2)+c D *L D *ρ D1 *(TT D1 )) / (c D *ρ D2 *(T D2 -T)+c D *ρ D1 *(TT D1 ))

[0198] The control system of the present application also includes: a second temperature detection unit 302 provided on the liquid mixing module 200 is configured to detect the temperature of the cleaning solution after the liquid mixing module 200 is evenly mixed, and generate a second temperature detection result; when the second temperature detection result is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the fixed chemical liquid storage unit 101c to the liquid mixing module remain unchanged, and the required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water are calculated in real time according to the second temperature detection result, and the room temperature deionized water and high temperature deionized water of the corresponding flow rate are delivered to the liquid mixing module 200, so that the temperature of the evenly mixed cleaning solution in the liquid mixing module 200 reaches the target temperature. The specific calculation process is as follows: Combine formula 1 and formula 2 to calculate the required flow rate change ΔL of room temperature deionized water D1 and the required flow rate change of high temperature deionized water ΔL D2 On the basis of setting the second temperature detection unit 302 on the liquid mixing module 200, the first temperature detection unit 301 is also set on the delivery unit 102 to simultaneously detect the temperature of the input solution and the temperature of the mixed solution. The combined monitoring of the two temperatures can further ensure the accuracy of solution flow control.

[0199] The present invention also provides a control method that matches the above-mentioned solution temperature real-time control system. Please refer to Figure 6, which shows a flow chart of the real-time solution temperature control method according to an embodiment of the present invention. As shown in Figure 6, the method includes the following steps:

[0200] Step S200: supplying cleaning solutions of different temperatures to the liquid mixing module using the liquid supply module;

[0201] Step S300: Cleaning solutions of different temperatures are mixed evenly in a liquid mixing module, and the temperature of the mixed cleaning solution is detected in real time by a temperature detection module and fed back to the control module;

[0202] Step S400: The control module adjusts the flow rate of the cleaning solutions of different temperatures supplied by the liquid supply module to the liquid mixing module according to the temperature of the evenly mixed cleaning solution measured by the temperature detection module, so that the temperature of the evenly mixed cleaning solution in the liquid mixing module reaches the target temperature.

[0203] Furthermore, the cleaning solution includes at least two of: chemical solution, room temperature deionized water, and high temperature deionized water.

[0204] Furthermore, when the cleaning solution includes a chemical solution, the chemical solution may have more than or equal to one component.

[0205] Furthermore, before supplying cleaning solutions of different temperatures to the liquid mixing module using the liquid supply module, the method further includes:

[0206] Step S100: Preset the relationship data of different processes corresponding to different temperatures, and the volume ratio data of the components of the cleaning solution corresponding to different temperatures in the control module.

[0207] In the specific process, the control module first determines the target temperature of the cleaning solution according to the process, and then controls the cleaning solutions of different temperatures to be transported to the mixing module for uniform mixing according to the volume ratio data of the components of the cleaning solution corresponding to the target temperature;

[0208] The temperature detection module obtains the actual temperature of the evenly mixed cleaning solution in real time. When it is detected that the actual temperature is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the fixed chemical liquid storage unit to the mixing module remain unchanged. The required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water are calculated in real time according to the temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing module to make the temperature of the evenly mixed cleaning solution in the mixing module reach the target temperature.

[0209] Furthermore, the step of calculating the required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water in real time according to the temperature detection result includes:

[0210] The required flow rate change ΔL of room temperature deionized water is calculated using the equations consisting of equations 1 and 2. D1 and the required flow rate change of high temperature deionized water ΔL D2 .

[0211] In another embodiment, the method further comprises:

[0212] The control module determines the target temperature of the cleaning solution according to the process and obtains the temperature detection result of the temperature detection module in real time; when the temperature detection result is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the larger flow storage unit to the mixing liquid module are fixed unchanged; according to the temperature detection result, the flow rate change of other liquid storage units to the mixing liquid module is adjusted in real time to make the temperature of the uniformly mixed cleaning solution in the mixing liquid module reach the target temperature, wherein the larger flow storage unit is the liquid storage unit in the liquid supply module that supplies the largest liquid flow rate to the mixing liquid module.

[0213] Furthermore, when the number of chemical liquid storage units is two, the control module is further configured to control the temperature and flow rate of the liquid supplied from the liquid storage unit with a larger flow rate to the liquid mixing module to remain constant; and the step of the control module adjusting the flow rate change of the liquid supplied from the other liquid storage units to the liquid mixing module in real time according to the temperature detection result includes:

[0214] The equations consisting of Equation 3, Equation 4, Equation 5, Equation 6 and Equation 7 are used to calculate the flow change of chemical liquid 1, Equation 2, and Equation 3, Equation 4, Equation 5, Equation 6 and Equation 7. D1 .

[0215] The present invention also provides another control method that matches the above-mentioned solution temperature real-time control system. Please refer to Figure 7, which shows a flow chart of a method for real-time solution temperature control according to another embodiment of the present invention. As shown in Figure 7, the method includes the following steps:

[0216] Step S1100: The control module obtains the target temperature of the cleaning solution. The control module can select the target temperature of the cleaning solution based on the data in the pre-stored database and the process to be implemented, or the staff can manually input the target temperature data, which is not limited in this embodiment.

[0217] Step S1200: supplying cleaning solutions of different temperatures to the liquid mixing module using the liquid supply module;

[0218] Step S1300: Cleaning solutions of different temperatures are uniformly mixed in the liquid mixing module. A first temperature detection unit provided on a delivery unit connecting the liquid supply module and the liquid mixing module detects the supply temperature of each component of the cleaning solution in real time, generates a first temperature detection result, and feeds the first temperature detection result back to the control module.

[0219] Step S1400: The control module adjusts the flow rate of the cleaning solutions of different temperatures supplied from the liquid supply module to the liquid mixing module according to the first temperature detection result, so that the temperature of the evenly mixed cleaning solution in the liquid mixing module reaches the target temperature.

[0220] Furthermore, the cleaning solution includes at least two of: chemical solution, room temperature deionized water, and high temperature deionized water.

[0221] Furthermore, when the cleaning solution includes a chemical solution, the chemical solution may have more than or equal to one component.

[0222] Furthermore, adjusting the flow rate of the cleaning solution of different temperatures delivered by the liquid supply module to the liquid mixing module according to the first temperature detection result includes:

[0223] The total liquid supply flow rate is fixed unchanged, the liquid supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are fixed unchanged, the required flow rate of room temperature deionized water and the required flow rate of high-temperature deionized water are calculated in real time according to the first temperature detection result, and the room temperature deionized water and high-temperature deionized water of corresponding flow rates are delivered to the mixing liquid module to make the temperature of the evenly mixed cleaning solution in the mixing liquid module reach the target temperature.

[0224] Furthermore, the flow rate required for room temperature deionized water and the flow rate required for high temperature deionized water are calculated in real time according to the first temperature detection result, including:

[0225] The flow rate L required for room temperature deionized water is calculated using the equations consisting of Equation 8 and Equation 2. D1 and the flow rate L required for high temperature deionized water D2 .

[0226] Furthermore, a second temperature detection unit provided on the liquid mixing module is used to detect the temperature of the cleaning solution after the liquid mixing module has been evenly mixed, thereby generating a second temperature detection result;

[0227] The control module obtains the second temperature detection result of the second temperature detection unit in real time;

[0228] When the second temperature detection result is different from the target temperature for a preset period of time, the temperature and flow rate of the liquid supply from the chemical liquid storage unit to the mixing module are controlled to remain unchanged. The required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water are calculated in real time according to the second temperature detection result, and the corresponding flow rates of room temperature deionized water and high temperature deionized water are delivered to the mixing module to make the temperature of the mixed cleaning solution in the mixing module reach the target temperature. The specific calculation process is as follows: Use formula 1 and formula 2 to calculate the required flow rate change of room temperature deionized water ΔL D1 and the required flow rate change of high temperature deionized water ΔL D2 .

[0229] The present invention is a temperature control method for online liquid mixing, which is applicable to chemical liquids that can be mixed online. The temperature control range of the chemical liquid is between the temperature of high-temperature deionized water and room temperature deionized water. At the same time, it should be understood that the real-time solution temperature control method provided by the present invention is not only applicable to semiconductor cleaning processes, but also to other wet processes in the field of semiconductor processing technology. In fact, as long as solutions of different temperatures need to be mixed to the target temperature, and the target temperature is between the temperature ranges of the various components of the solution, the control system and control method of the present invention are applicable. Exemplarily, finished acid can also be applied in this way to achieve the effect of automatic temperature control. For example, a certain finished acid needs to control the liquid temperature between room temperature and temperature T A The finished acid can be divided into two parts for liquid supply, one part of the liquid is controlled at room temperature, and the other part of the liquid is controlled at T A Temperature, the temperature of the mixed solution can be flexibly controlled between room temperature and T by controlling the flow rate of the two parts of the solution A between.

[0230] It should be understood that the calculation process used in the present invention to control the flow rates of the various components of the cleaning solution uses approximations, ignoring the effects of variations in the specific heat capacity of water at different temperatures, as well as the effects of heat of dilution and trace amounts of chemical reaction heat. These effects may be taken into account if demand is high.

[0231] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A real-time temperature control system for a solution, characterized in that: include: A liquid supply module, configured to supply solutions of different temperatures to the liquid mixing module; A liquid mixing module is configured to receive the solutions of different temperatures supplied by the liquid supply module and mix them evenly; A temperature detection module is configured to detect the temperature of the solution after being evenly mixed by the liquid mixing module; The control module is configured to adjust the flow rate of solutions of different temperatures delivered by the liquid supply module to the liquid mixing module according to the temperature of the mixed solution measured by the temperature detection module, so that the temperature of the mixed solution in the liquid mixing module reaches the target temperature.

2. The control system according to claim 1, characterized in that: The liquid supply module comprises: a liquid storage unit and a conveying unit; the liquid storage unit is connected with the liquid mixing module through the conveying unit; The liquid storage unit comprises: A room temperature deionized water storage unit is configured to store room temperature deionized water supplied to the liquid mixing module; A high-temperature deionized water storage unit is configured to store high-temperature deionized water supplied to the liquid mixing module; The chemical liquid storage unit is configured to store the chemical liquid supplied to the liquid mixing module.

3. The control system according to claim 2, characterized in that: The liquid storage unit includes at least one chemical liquid storage unit. When the number of the chemical liquid storage units is greater than 1, the types of chemical liquids stored in each of the chemical liquid storage units are different.

4. The control system according to claim 3, characterized in that: The control module is pre-installed with relational data of different processes corresponding to different temperatures, and a database of volume ratios of various components of the corresponding solutions at different temperatures; The control module is further configured to: Determine the target temperature of the mixed solution; Controlling the flow rate of solutions of different temperatures delivered by the liquid supply module to the liquid mixing module according to the volume ratio data of each component of the solution corresponding to the target temperature; Obtain the temperature detection results of the temperature detection module in real time; When the temperature detection result is different from the target temperature for a preset period of time, the supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are controlled to remain unchanged, and the required flow rate changes of room temperature deionized water and high temperature deionized water are calculated in real time according to the temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are transported to the mixing liquid module to make the temperature of the evenly mixed solution in the mixing liquid module reach the target temperature.

5. The control system according to claim 4, characterized in that: The control module calculates the required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water in real time according to the temperature detection result, including: The required flow rate change ΔL of room temperature deionized water is calculated using the following equations: D1 and the required flow change of high temperature deionized water ΔL D2 : ΔL D1 +ΔL D2 =0 Equation 1 Wherein, Formula 1 is obtained based on the condition that the total liquid supply flow rate remains unchanged and the liquid supply temperature and flow rate of the chemical liquid storage unit to the liquid mixing module remain unchanged, the sum of the flow rate change of the room temperature deionized water storage unit supplying the room temperature deionized water to the liquid mixing module and the flow rate change of the high temperature deionized water storage unit supplying the high temperature deionized water to the liquid mixing module is 0; Formula 2 is obtained based on the law of conservation of heat; Wherein, the liquid storage unit includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where: c is the specific heat capacity, in joules / kg °C; m is mass in kilograms; Δt is the temperature increase or decrease in degrees Celsius; ρ is the density in kg / dm3; L is the flow rate in liters per minute; t is the unit time in minutes.

6. The control system according to claim 3, characterized in that: The control module is configured to: Determine the target temperature of the solution after mixing; Obtain the temperature detection results of the temperature detection module in real time; When the temperature detection result is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the large flow storage unit to the liquid mixing module remain unchanged; According to the temperature detection result, the flow rate change of other liquid storage units supplying liquid to the mixing liquid module is adjusted in real time to make the temperature of the evenly mixed solution in the mixing liquid module reach the target temperature, among which the larger flow liquid storage unit is the liquid storage unit in the liquid supply module with the largest liquid flow rate supplying liquid to the mixing liquid module.

7. The control system according to claim 6, characterized in that: When the chemical liquid storage unit includes two liquid supply pipelines, the control module is further configured to control the liquid supply temperature and flow rate of the larger flow storage unit to the liquid mixing module to remain constant; The control module adjusts the flow rate change of other liquid storage units supplying liquid to the liquid mixing module in real time according to the temperature detection result, including: The following equations consisting of equations 3, 4, 5, 6 and 7 are used to calculate the flow change of chemical liquid 1 ΔL1, the flow change of chemical liquid 2 ΔL2 and the flow change of room temperature deionized water supplied to the mixing module ΔL D1 : ΔQ1+ΔQ D1 +ΔQ D2 =0 Formula 5 (L1+ΔL1) / (L D1 +L D2 +ΔL D1 )=r1 Formula 6 (L2+ΔL2) / (L D1 +L D2 +ΔL D2 )=r2 Formula 7 Wherein, Formula 3 and Formula 4 are the volume ratios of the two chemical liquids included in the chemical liquid storage unit; Formula 5 is obtained according to the law of conservation of heat; Formula 6 and Formula 7 are the volume ratios of the two chemical liquids included in the storage unit under the condition that the volume ratio of the chemical liquids remains unchanged after the flow rate changes; Where r1 and r2 are the volume ratios of the two chemical solutions in the set solution, L1 and L2 are the flow rates of the two chemical solutions, in liters per minute; ΔL1 is the flow rate change of the chemical solution whose flow rate needs to be changed, in liters per minute; L D1 and L D2 ΔL is the flow rate of room temperature deionized water and high temperature deionized water, in liters per minute; D1 and ΔL D2 are the flow rate changes of room temperature deionized water and high temperature deionized water, respectively, in liters / minute; ΔQ1 is the heat change of the chemical liquid that needs to change the flow rate, in joules; ΔQ D1 Room temperature The heat change of deionized water, in joules; ΔQ D2 It is the heat change of high temperature deionized water, in joules.

8. A real-time temperature control system for a solution, characterized in that: include: A liquid supply module, configured to supply solutions of different temperatures to the liquid mixing module; A liquid mixing module is configured to receive the solutions of different temperatures supplied by the liquid supply module and mix them evenly; The temperature detection module includes a first temperature detection unit configured to detect the temperature of each component of the solution before the solution is evenly mixed and generate a first temperature detection result; A control module configured to determine a target temperature of the mixed solution; According to the first temperature detection result, the flow rate of the solutions with different temperatures delivered by the liquid supply module to the liquid mixing module is adjusted so that the temperature of the evenly mixed solution in the liquid mixing module reaches the target temperature.

9. The control system according to claim 8, characterized in that: The liquid supply module comprises: A room temperature deionized water storage unit is configured to store room temperature deionized water supplied to the liquid mixing module; A high-temperature deionized water storage unit is configured to store high-temperature deionized water supplied to the liquid mixing module; The chemical liquid storage unit is configured to store the chemical liquid supplied to the liquid mixing module.

10. The control system according to claim 9, characterized in that: The liquid supply module includes at least one chemical liquid storage unit. When the number of the chemical liquid storage units is greater than 1, the chemical liquids stored in each of the chemical liquid storage units are different.

11. The control system according to claim 10, characterized in that: The control module adjusts the flow rate of the solution with different temperatures delivered by the liquid supply module to the liquid mixing module according to the first temperature detection result, including: The total liquid supply flow rate is fixed unchanged, the liquid supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are fixed unchanged, the required flow rate of room temperature deionized water and the required flow rate of high temperature deionized water are calculated in real time according to the first temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing liquid module, so that the temperature of the evenly mixed solution in the mixing liquid module reaches the target temperature.

12. The control system according to claim 11, characterized in that: The control module calculates the flow rate required for room temperature deionized water and the flow rate required for high temperature deionized water in real time according to the first temperature detection result, including: The required flow rate L of room temperature deionized water is calculated using the following equations consisting of equations 8 and 2: D1 and the required flow rate L of high temperature deionized water D2 : L D =L D1 +L D2 Formula 8 Wherein, the total amount of room temperature deionized water and high temperature deionized water supplied to the mixing module is L under the condition that the total flow rate of the liquid supply remains unchanged, and the temperature and flow rate of the liquid supply from the chemical liquid storage unit to the mixing module remain unchanged. D The formula 2 is obtained according to the law of conservation of heat; Among them, L D1 Flow rate required for room temperature deionized water; L D2 The flow rate required for high-temperature deionized water; the liquid supply module includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where: c is the specific heat capacity, in joules / kg °C; m is mass in kilograms; Δt is the temperature increase or decrease in degrees Celsius; ρ is the density in kg / dm3; L is the flow rate in liters per minute; t is the unit time in minutes.

13. The control system according to claim 10, characterized in that: The temperature detection module further includes a second temperature detection unit configured to detect the temperature of the solution after the solution is evenly mixed by the liquid mixing module, and generate a second temperature detection result; The control module is further configured to: Acquire a second temperature detection result of a second temperature detection unit in real time; When the second temperature detection result is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the chemical liquid storage unit to the liquid mixing module are controlled to remain unchanged, and the room temperature is calculated in real time according to the second temperature detection result. The required flow rate change of ionized water and the required flow rate change of high-temperature deionized water are determined, and the room temperature deionized water and high-temperature deionized water with corresponding flow rates are delivered to the mixing module so that the temperature of the mixed solution in the mixing module reaches the target temperature.

14. A method for real-time temperature control of a solution, characterized in that: The steps include: Using the liquid supply module to supply solutions of different temperatures to the liquid mixing module; Solutions of different temperatures are mixed evenly in the liquid mixing module, and the temperature of the mixed solution is detected in real time by the temperature detection module and fed back to the control module; The control module adjusts the flow rate of solutions of different temperatures delivered by the liquid supply module to the liquid mixing module according to the temperature of the evenly mixed solution measured by the temperature detection module, so that the temperature of the evenly mixed solution in the liquid mixing module reaches the target temperature.

15. The control method according to claim 14, characterized in that: The solution includes at least two of: chemical solution, room temperature deionized water, and high temperature deionized water.

16. The control method according to claim 15, characterized in that: When the solution includes a chemical liquid, the component of the chemical liquid is greater than or equal to one.

17. The control method according to claim 16, characterized in that: Also includes: Preset the relationship data of different processes corresponding to different temperatures, and the volume ratio data of each component of the solution corresponding to different temperatures in the control module; The control module determines the target temperature of the mixed solution according to the process, and controls the mixing of solutions at different temperatures according to the volume ratio data of the components of the solution corresponding to the target temperature; The temperature detection module obtains the actual temperature of the mixed solution in real time. When it is detected that the actual temperature is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the fixed chemical liquid storage unit to the mixing module remain unchanged. The required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water are calculated in real time according to the actual temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are transported to the mixing module, so that the temperature of the mixed solution in the mixing module reaches the target temperature.

18. The control method according to claim 17, characterized in that: The step of calculating the required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water in real time according to the actual temperature detection result comprises: The required flow rate change ΔL of room temperature deionized water is calculated using the following equations: D1 and the required flow change of high temperature deionized water ΔL D2 : ΔL D1 +ΔL D2 = 0 Equation 1 Wherein, Formula 1 is obtained based on the condition that the total liquid supply flow rate remains unchanged and the liquid supply temperature and flow rate of the chemical liquid storage unit to the liquid mixing module remain unchanged, the sum of the flow rate change of the room temperature deionized water supplied by the room temperature deionized water storage unit to the liquid mixing module and the flow rate change of the high temperature deionized water supplied by the high temperature deionized water storage unit to the liquid mixing module is 0; Formula 2 is obtained based on the law of conservation of heat; Wherein, the liquid supply module includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where: c is the specific heat capacity, in joules / kg °C; m is mass in kilograms; Δt is the temperature increase or decrease in degrees Celsius; ρ is the density in kg / dm3; L is the flow rate in liters per minute; t is the unit time in minutes.

19. The control method according to claim 16, characterized in that: The method further comprises: The control module determines the target temperature of the solution according to the process, and obtains the temperature detection result of the temperature detection module in real time; when the temperature detection result is different from the target temperature for a preset period of time, the temperature and flow rate of the liquid supply from the larger flow storage unit to the liquid mixing module are fixed unchanged; the flow rate change of the liquid supply from other liquid storage units to the liquid mixing module is adjusted in real time according to the temperature detection result, so that the temperature of the uniformly mixed solution in the liquid mixing module reaches the target temperature, and the temperature of the mixed solution in the liquid mixing module reaches the target temperature. In the embodiment, the larger flow rate liquid storage unit is the liquid storage unit in the liquid supply module that supplies the largest liquid flow rate to the liquid mixing module.

20. The control method according to claim 19, characterized in that: When the number of the chemical liquid storage units is 2, the control module is further configured to control the liquid supply temperature and flow rate of the larger flow storage unit to the liquid mixing module to remain constant; The step of the control module adjusting the flow rate change of other liquid storage units supplying liquid to the liquid mixing module in real time according to the temperature detection result includes: The following equations consisting of equations 3, 4, 5, 6 and 7 are used to calculate the flow change of chemical liquid 1 ΔL1, the flow change of chemical liquid 2 ΔL2 and the flow change of room temperature deionized water ΔL D1 : ΔQ1+ΔQ D1 +ΔQ D2 =0 Formula 5 (L1+ΔL1) / (L D1 +L D2 +ΔL D1 )=r1 Formula 6 (L2+ΔL2) / (L D1 +L D2 +ΔL D2 )=r2 Formula 7 Wherein, Formula 3 and Formula 4 are the volume ratios of the two chemical liquids supplied by the two liquid supply pipelines included in the chemical liquid storage unit; Formula 5 is obtained according to the law of conservation of heat; Formula 6 and Formula 7 are the volume ratios of the two chemical liquids supplied by the two liquid supply pipelines included in the chemical liquid storage unit under the condition that the volume ratio of the chemical liquids remains unchanged after the flow rate changes; Where r1 and r2 are the volume ratios of the two chemical solutions in the set solution, L1 and L2 are the flow rates of the two chemical solutions, in liters per minute; ΔL1 is the flow rate change of the chemical solution whose flow rate needs to be changed, in liters per minute; L D1 and L D2 ΔL is the flow rate of room temperature deionized water and high temperature deionized water, in liters per minute; D1 and ΔL D2 are the flow rate changes of room temperature deionized water and high temperature deionized water, respectively, in liters / minute; ΔQ1 is the heat change of the chemical liquid that needs to change the flow rate, in joules; ΔQ D1 ΔQ is the heat change of deionized water at room temperature, unit: Joule; D2 It is the heat change of high temperature deionized water, unit: Joule.

21. A method for real-time temperature control of a solution, characterized in that: The steps include: The control module obtains the target temperature of the mixed solution; Using the liquid supply module to supply solutions of different temperatures to the liquid mixing module; Solutions of different temperatures are mixed evenly in the liquid mixing module, and the first temperature detection unit of the temperature detection module is used to detect the liquid supply temperature of each component of the solution in the liquid mixing module in real time, generate a first temperature detection result, and feed the first temperature detection result back to the control module; The control module adjusts the flow rate of the solutions with different temperatures delivered by the liquid supply module to the liquid mixing module according to the first temperature detection result, so that the temperature of the evenly mixed solution in the liquid mixing module reaches the target temperature.

22. The control method according to claim 21, characterized in that: The solution includes at least two of: chemical liquid, room temperature deionized water, and high temperature deionized water.

23. The control method according to claim 22, characterized in that: When the solution includes a chemical liquid, the component of the chemical liquid is greater than or equal to one.

24. The control method according to claim 21, characterized in that: According to the first temperature detection result, adjusting the flow rate of the solution with different temperatures delivered by the liquid supply module to the liquid mixing module comprises: The total liquid supply flow rate is fixed unchanged, the liquid supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are fixed unchanged, the required flow rate of room temperature deionized water and the required flow rate of high temperature deionized water are calculated in real time according to the first temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing liquid module, so that the temperature of the evenly mixed solution in the mixing liquid module reaches the target temperature.

25. The control method according to claim 24, characterized in that: The flow rate required for room temperature deionized water and the flow rate required for high temperature deionized water are calculated in real time according to the first temperature detection result, including: The required flow rate L of room temperature deionized water is calculated using the following equations consisting of equations 8 and 2: D1 and the required flow rate L of high temperature deionized water D2 : L D =L D1 +L D2 Formula 8 Wherein, Formula 8 is based on the fact that the total flow rate of the liquid supply remains unchanged and the liquid supply temperature from the chemical liquid storage unit to the liquid mixing module is Under the condition of constant flow rate, the total amount of liquid supplied from the room temperature deionized water storage unit to the liquid mixing module and the total amount of liquid supplied from the high temperature deionized water storage unit to the liquid mixing module is obtained by L_D; Formula 2 is obtained according to the law of conservation of heat; Among them, L D1 Flow rate required for room temperature deionized water; L D2 The flow rate required for high-temperature deionized water; the liquid supply module includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where: c is the specific heat capacity, in joules / kg °C; m is mass in kilograms; Δt is the temperature increase or decrease in degrees Celsius; ρ is the density in kg / dm3; L is the flow rate in liters per minute; t is the unit time in minutes.

26. The control method according to claim 23, characterized in that: Also includes: Using the second temperature detection unit of the temperature detection module to detect the temperature of the solution after being mixed evenly by the liquid mixing module, to generate a second temperature detection result; The control module obtains the temperature detection result of the second temperature detection unit in real time; When the second temperature detection result is different from the target temperature for a preset period of time, the supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are controlled to remain unchanged, and the required flow rate changes of room temperature deionized water and high temperature deionized water are calculated in real time according to the second temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing liquid module, so that the temperature of the evenly mixed solution in the mixing liquid module reaches the target temperature.

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