All-round measurement apparatus and method for probe

Abstract

The present invention relates to the technical field of semiconductor testing, and more specifically relates to an all-round measurement apparatus and method for a probe. The apparatus comprises a 3D scanning device, a probe suction structure, a carrier, a probe gripping structure and several measurement cameras, wherein the carrier is used for placing a probe needing to be measured; the 3D scanning device is used for carrying out morphological scanning on the probe; the probe suction structure is used for suctioning the probe and adjusting the position of the probe after the scanning is completed, so that the probe points in a specific direction; the probe gripping structure is used for gripping the probe from the probe suction structure and moving the probe to a measurement position; and the several measurement cameras are installed in several functional areas corresponding to the measurement position so as to carry out identification, measurement and determination on the probe in different measurement directions, thus obtaining all-round morphological and dimensional data of the probe. The present invention can carry out all-round measurement on the whole probe and the probe tip, can visually determine the all-round dimensions and flatness of the probe, and thus effectively screens out probes that are suitable for a probe card.

Description

A probe omnidirectional measurement device and method Technical Field

[0001] The present invention relates to the field of semiconductor testing technology, and more particularly to a probe omnidirectional measurement device and method. Background Art

[0002] Semiconductor testing is a critical step in the semiconductor design, production, packaging, and testing process, and its importance cannot be underestimated. Probes, as core components in semiconductor testing, are widely used in chip design verification, wafer testing, and finished product testing. Issues such as probe structural rationality, dimensional error control, and needle deflection directly impact the testing and verification results of semiconductor chip products. Therefore, produced probes must undergo rigorous testing and control to ensure their accuracy and effectiveness.

[0003] Current technology requires both dimensional and tip measurements of produced probes. Dimensional measurements must be performed with the probe flat or sideways, while tip measurements require the probe to be held upright, measuring and assessing the tip at the micrometer level. Vision systems are used to capture the reflective area to assist in inspecting the tip's size and cutting consistency.

[0004] However, existing measurement methods can only measure the dimensions of a flat probe using a camera. They cannot determine angular errors in the front and rear beams and tail of the probe, nor can they determine if the tip and tail are parallel. Furthermore, warping of the probe itself cannot be accurately measured. Warping can cause excessive deviation in the probe tip position within the probe card, preventing proper conduction and test functionality, rendering the entire probe card inoperable.

[0005] Furthermore, warping can cause probes to overlap, creating short circuits and severely impacting the test performance of the probe card. The probe tips also cannot be effectively inspected and identified, leading to a large number of substandard probes in subsequent work.

[0006] Problems with the needle tip can prevent the probe from penetrating properly, preventing the probe card from properly testing even if the needle tip is positioned correctly. Additionally, a large height difference in the needle tip can cause the probe to be positioned incorrectly on the probe card, also preventing testing.

[0007] These issues led to a significant amount of time wasted on the probe screening process, resulting in a significant amount of defective parts in subsequent production runs. This led to low overall production efficiency and the inability to meet production plans.

[0008] Summary of the Invention

[0009] The purpose of the present invention is to provide a probe omnidirectional measurement device and method to solve the problem that the prior art cannot effectively detect and identify the probe.

[0010] To achieve the above objectives, the present invention provides a probe omnidirectional measurement device, including a 3D scanning device, a probe suction structure, a carrier, a probe clamping structure, and several measurement cameras:

[0011] The carrier plate is used to place the probes required for measurement;

[0012] The 3D scanning device is used to perform morphological scanning on the probe, measure and judge the flatness of the probe on the measurement plane, and obtain the preliminary morphological trend of the probe;

[0013] The probe suction structure is used to suck the probe after scanning is completed and adjust the probe position so that the probe points to a specific direction;

[0014] The probe clamping structure is used to clamp the probe from the probe suction structure and move it to the measurement position;

[0015] The plurality of measuring cameras are installed in a plurality of functional areas corresponding to the measuring positions, and identify, measure and judge the probe in multiple spatial dimensions from different measuring directions, and finally obtain all-round shape and size data of the probe.

[0016] In one embodiment, the 3D scanning device, the suction probe structure and the carrier are installed in a scanning station area.

[0017] In one embodiment, the gripping probe structure and the plurality of measuring cameras are installed in a camera recognition station area.

[0018] In one embodiment, the scanning format of the 3D scanning device is 1 mm×1 mm to 6 mm×6 mm;

[0019] The scanning accuracy of the 3D scanning device is within 2 microns.

[0020] In one embodiment, the suction probe structure includes a suction nozzle, a mechanical swing arm, a suction probe camera, a rotating axis, and a first base:

[0021] The suction nozzle is installed at one end of the mechanical swing arm and is used to suck the probe;

[0022] The rotating shaft is mounted on the other end of the mechanical swing arm;

[0023] The mechanical swing arm is mounted on the first base and rotates around the rotation axis to adjust the direction of the nozzle and the probe;

[0024] The suction probe camera is installed on the first base, located on one side of the mechanical swing arm, and measures the relative positions of the suction nozzle and the probe.

[0025] In one embodiment, the diameter of the nozzle is smaller than the width of the probe.

[0026] In one embodiment, the device further comprises a plurality of motion shafts for providing axial movement:

[0027] The carrier plate is mounted on the motion shaft and moves axially.

[0028] In one embodiment, the clamping probe structure includes a clamping claw, a clamping probe camera and a second base:

[0029] The clamping claw is installed at the bottom of the second base and is used to clamp the probe;

[0030] The clamping probe camera is installed on the side of the second base to measure the relative positions of the clamping claw and the probe.

[0031] In one embodiment, the plurality of measuring cameras include a first measuring camera, a second measuring camera, and a third measuring camera:

[0032] The first measuring camera is fixed above the measuring position, and the measuring direction is vertical, and is used to determine whether the probe is tilted or deflected in the vertical direction;

[0033] The second measuring camera is fixed on one side of the probe, and the measuring direction is horizontal, and is used to determine whether the probe is tilted or deflected on one side of the horizontal direction;

[0034] The third measuring camera is fixed on the other side of the probe, perpendicular to the measuring direction of the first and second measuring cameras, and the measuring direction is horizontal and longitudinal, and is used to determine whether the probe is tilted or deflected on one side of the horizontal and longitudinal direction.

[0035] In one embodiment, the first measurement camera is used to determine whether the probe beam is bent, and to perform fixed-point measurement and screening on the probe tip.

[0036] In one embodiment, the magnification of the measurement camera is 10-40 times, which is determined according to different probe tip parameters.

[0037] In order to achieve the above object, the present invention provides a probe omnidirectional measurement method, comprising the following steps:

[0038] Step S1, scanning stage, using 3D scanning equipment to scan the probe's shape, measure and judge the flatness of the probe on the measurement plane, and obtain the preliminary shape trend of the probe;

[0039] In step S2, the camera recognition phase, a plurality of measurement cameras installed in the functional area corresponding to the measurement position are used to identify, measure and judge the probe in multiple spatial dimensions from different measurement directions to obtain the full range of shape and size data of the probe.

[0040] In one embodiment, the step S1 further includes: after the scanning is completed, keeping the probe in a vertical state and moving it to a measurement position.

[0041] In one embodiment, the step S2 further includes:

[0042] Three measurement cameras are set in the corresponding functional areas of the measurement position to identify, measure and judge different surfaces of the probe in three-dimensional space from three different measurement directions.

[0043] In one embodiment, the step S2 further includes:

[0044] Fix the first measuring camera above the measuring position, with the measuring direction being the vertical direction, and measure and determine whether the probe is tilted or deflected in the vertical direction;

[0045] The second measuring camera is fixed on one side of the probe, with the measuring direction being horizontal, to measure and determine whether the probe is tilted or deflected on the horizontal side;

[0046] The third measuring camera is fixed on the other side of the probe, perpendicular to the measuring direction of the first and second measuring cameras, and the measuring direction is horizontal and longitudinal. The measurement determines whether the probe is tilted or deflected on one side of the horizontal and longitudinal direction.

[0047] In one embodiment, the step S2 further includes:

[0048] The first measuring camera is used to perform fixed-point measurement and screening on the tip of the probe.

[0049] In one embodiment, the step S2 further includes:

[0050] The selection of the measurement camera is determined according to different probe tip parameters.

[0051] The present invention provides a probe omnidirectional measurement device and method, which can perform omnidirectional measurement of the entire probe and the needle tip, thereby intuitively judging the omnidirectional size and flatness of the probe, effectively screening probes suitable for probe cards, reducing work costs and improving the work efficiency of the overall process. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] The above and other features, properties and advantages of the present invention will become more apparent through the following description in conjunction with the accompanying drawings and embodiments, in which like reference numerals represent like features throughout, wherein:

[0053] FIG1 shows a schematic diagram of the placement of probes in all areas of an omnidirectional measurement device according to an embodiment of the present invention;

[0054] FIG2 illustrates a partial schematic diagram of a probe omnidirectional measurement device in a scanning station area according to an embodiment of the present invention;

[0055] FIG3 illustrates a partial schematic diagram of a probe omnidirectional measurement device in a camera recognition station area according to an embodiment of the present invention;

[0056] FIG4 discloses a flow chart of a probe omnidirectional measurement method according to an embodiment of the present invention.

[0057] The meanings of the reference numerals in the figures are as follows:

[0058] 1. 3D scanning equipment;

[0059] 2. Absorption probe structure;

[0060] 21 nozzle;

[0061] 22 mechanical swing arms;

[0062] 23 suction probe camera;

[0063] 24 rotation axis;

[0064] 25 first base;

[0065] 3 carrier plate;

[0066] 4 motion axes;

[0067] 5. Clamping probe structure;

[0068] 51 grippers;

[0069] 52 clamping probe camera;

[0070] 53 second base;

[0071] 61 first measurement camera;

[0072] 62 second measuring camera;

[0073] 63 third measurement camera;

[0074] 7. Measure location. DETAILED DESCRIPTION

[0075] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the invention and are not intended to limit the invention.

[0076] The present invention aims to solve the problem of being unable to accurately detect a probe, especially the detection of the warping of the probe itself and the needle tip.

[0077] FIG1 shows a schematic diagram of the full-area placement of a probe omnidirectional measurement device according to an embodiment of the present invention. As shown in FIG1 , the present invention proposes a probe omnidirectional measurement device, including a 3D scanning device 1, a probe suction structure 2, a carrier 3, a plurality of motion axes 4, a probe clamping structure 5, and a plurality of measurement cameras:

[0078] In this embodiment, the groups of measuring cameras include a first measuring camera 61 , a second measuring camera 62 , and a third measuring camera 63 .

[0079] The 3D scanning device 1, the suction probe structure 2, the carrier plate 3, and the plurality of motion axes 4 are installed in the scanning station area;

[0080] The 3D scanning device 1 is used to perform morphological scanning on the probe, measure and judge the flatness of the probe on the measurement plane, and obtain the preliminary morphological trend of the probe;

[0081] The probe suction structure 2 is used to suck the probe after scanning is completed and adjust the probe position so that the probe points to a specific direction;

[0082] The carrier plate 3 is mounted on the motion shaft 4 and is used to place the probe to be measured;

[0083] The measuring plane of the probe and the plane on which the probe is placed on the carrier plate 3 should be parallel to each other;

[0084] There are several moving shafts 4 for providing axial movement.

[0085] The clamping probe structure 5 and the first measuring camera 61, the second measuring camera 62, and the third measuring camera 63 are installed in the camera recognition station area:

[0086] The clamping probe structure 5 is used to clamp the probe from the suction probe structure 2 and move it to a preset measurement position;

[0087] In the functional area corresponding to the measurement position, a first measurement camera 61, a second measurement camera 62 and a third measurement camera 63 are installed;

[0088] The first measuring camera 61 , the second measuring camera 62 and the third measuring camera 63 have different measuring directions, and can identify, measure and judge the probe in multiple spatial dimensions from multiple measuring directions, and finally obtain all-round shape and size data of the probe.

[0089] The probes that can be measured in the present invention include both probes in a general sense and new probes with complex spatial morphological configurations.

[0090] Generally, the number of measurement cameras is three, but additional cameras can be added as needed. For probes with complex morphologies, the number of cameras can be increased to obtain measurement data from more directions. For conventional probes, increasing the number of measurement cameras is not necessary.

[0091] Figure 2 reveals a partial schematic diagram of the probe omnidirectional measurement device in the scanning station area according to an embodiment of the present invention, such as the probe omnidirectional measurement device shown in Figures 1 and 2, wherein the 3D scanning device 1 is fixed in the scanning station area, and a motion axis 4 is installed underneath to move the carrier 3 on which the probe is placed.

[0092] When choosing a 3D scanning device, not only its accuracy but also its efficiency should be considered. Therefore, there are very high requirements for the scanning method and format of the 3D scanning device. According to actual needs, the 3D scanning device 1 needs to have the following characteristics:

[0093] Scanning format ranges from 1mm×1mm to 6mm×6mm;

[0094] Ability to measure probes in batches;

[0095] The scanning accuracy is within 2 microns.

[0096] The suction probe structure 2 includes a suction nozzle 21, a mechanical swing arm 22, a suction probe camera 23, a rotating shaft 24 and a first base 25;

[0097] A suction nozzle 21 is mounted at one end of a mechanical swing arm 22 and is used to suck the probe;

[0098] The probe is stably fixed in position by the adsorption action of the nozzle 21;

[0099] The rotating shaft 24 is mounted on the other end of the mechanical swing arm 22;

[0100] The mechanical swing arm 22 is mounted on the first base 25 and can rotate around the rotation axis 24 to adjust the direction of the nozzle 21 and thus the direction of the probe;

[0101] The suction probe camera 23 is mounted on the first base 25 and located on one side of the mechanical swing arm 22 to measure the relative position of the suction nozzle 21 and the probe;

[0102] In some embodiments, the measurement direction of the suction probe camera 23 is the Z-axis direction.

[0103] In this embodiment, the nozzle 21 may be a customized structure with a diameter smaller than the width of the probe, such as a diameter of 0.15-0.4 mm.

[0104] The motion shafts 4 are structurally designed to move linearly and can move freely in parallel directions. There are several of them to provide axial movement.

[0105] The motion axis 4 may include a first motion axis and a second motion axis, and the carrier plate 3 may be connected via a driving device, which may drive the carrier plate 3 to perform linear axial motion along the first motion axis and the second motion axis.

[0106] FIG3 discloses a partial schematic diagram of a probe omnidirectional measurement device in a camera recognition station area according to an embodiment of the present invention. As shown in FIG1 and FIG3 , the clamping probe structure 5 includes a clamping claw 51, a clamping probe camera 52, and a second base 53:

[0107] The clamping jaw 51 is mounted on the bottom of the second base 53 and is used to clamp the probe;

[0108] The clamping probe camera 52 is installed on the side of the second base to measure the relative positions of the clamping claw 51 and the probe.

[0109] The clamping jaws 51 and the clamping probe camera 52 are fixed on the same motion axis. In some embodiments, the measuring direction of the clamping probe camera 52 is the Z-axis direction.

[0110] The first measuring camera 61 , the second measuring camera 62 and the third measuring camera 63 are fixed in sequence at different functional areas of the measuring position 7 to cooperate with each other to complete the all-round measurement of the probe.

[0111] In this embodiment, the first measuring camera 61 , the second measuring camera 62 and the third measuring camera 63 respectively measure and judge the probe from three mutually perpendicular measuring directions.

[0112] As shown in Figures 1 to 3, the XYZ axis three-dimensional coordinate system is set as the measurement direction coordinate system, the Z axis is the vertical direction, the Y axis is the moving direction of the motion axis (horizontal longitudinal direction), and the X axis is perpendicular to the Y axis and the Z axis (horizontal transverse direction).

[0113] After being sucked and adjusted by the sucking probe structure 2 , the probe points to a specific vertical direction, and then is moved to the measurement position by the clamping probe structure 5 , with the tip of the probe facing the measurement direction of the first measurement camera 61 .

[0114] The first measurement camera 61 is fixed above the probe, and its measurement direction is the vertical direction, i.e., the negative direction of the Z axis. It is used to determine whether the probe is tilted or deflected in the vertical direction (obvious non-parallelism of straight lines), whether the probe beam is bent, and can perform fixed-point measurement and screening of the probe tip;

[0115] The second measuring camera 62 is fixed on one side of the probe, and its measuring direction is the positive direction of the X axis (horizontally), and is used to determine whether the probe is tilted or deflected on one side of the X axis.

[0116] The third measuring camera 63 is fixed on the other side of the probe, perpendicular to the measuring direction of the second measuring camera 62, that is, the measuring direction is the negative direction of the Y axis (horizontal longitudinal direction), and is used to determine whether the probe is tilted or deflected on one side of the Y axis.

[0117] The three cameras work together to ensure that comprehensive 3D measurements of the probe can be completed accurately and without error.

[0118] In some embodiments, the magnifications of the first measurement camera 61 , the second measurement camera 62 , and the third measurement camera 63 are 10-40 times (10X-40X), which are selected and determined according to different probe tip parameters.

[0119] The present invention also proposes a probe omnidirectional measurement method, which can be implemented based on the above-mentioned probe omnidirectional measurement device.

[0120] FIG4 discloses a flow chart of a probe omnidirectional measurement method according to an embodiment of the present invention. As shown in FIG4 , a probe omnidirectional measurement method proposed by the present invention includes the following steps:

[0121] Step S1, scanning stage, using 3D scanning equipment to scan the probe's shape, measure and judge the flatness of the probe on the measurement plane, and obtain the preliminary shape trend of the probe;

[0122] Step S2, camera recognition stage, uses a number of measurement cameras installed in the functional area corresponding to the measurement position to identify, measure and judge the probe in multiple spatial dimensions from different measurement directions to obtain comprehensive shape and size data of the probe.

[0123] It should be understood that within the scope of the present invention, the above-mentioned technical features of the present invention and the technical features specifically described below (such as in the embodiments) can be combined with each other and interrelated to form a preferred technical solution.

[0124] Step S1, scanning stage, using 3D scanning equipment to scan the probe's shape, measure and judge the flatness of the probe on the measurement plane, and obtain the preliminary shape trend of the probe;

[0125] Most existing 3D scanning devices can perform precise scanning on the measurement plane, but cannot achieve measurement and morphological judgment in multiple directions.

[0126] At the same time, due to the diversity of probe types and sizes, when using a camera with the same frame to measure a long needle, there may be a problem that some parts are beyond the visual image, resulting in certain measurement blind spots.

[0127] In this embodiment, in step S1, during the scanning phase, a 3D scanning device is used to perform scanning measurement of the flatness of the probe.

[0128] This step is mainly to cooperate with the measurement camera in the camera recognition stage to measure the probe to ensure the accuracy of the entire measurement process.

[0129] Furthermore, after the scanning is completed, the probe is kept in a vertical state and moved to a measurement position.

[0130] Step S2, camera recognition phase, uses a number of measurement cameras installed in the functional area corresponding to the measurement position to identify, measure and judge the probe in multiple spatial dimensions from different measurement directions to obtain comprehensive shape and size data of the probe;

[0131] More specifically, by installing several measuring cameras in the functional areas corresponding to the measurement positions, the probe is identified, measured and judged in multiple spatial dimensions from different measurement directions, thereby obtaining all-round morphological and dimensional data of the probe.

[0132] In some embodiments, three measurement cameras are set in corresponding functional areas of the measurement position, and three mutually perpendicular three-dimensional coordinate directions are used as measurement directions to identify, measure and judge different surfaces of the probe in three-dimensional space, thereby obtaining all-round shape and size data of the probe;

[0133] Furthermore, the probe tip is measured and screened at a fixed point through a measuring camera to determine whether the tip meets the requirements and whether it is consistent, thereby increasing the stability and reliability of the probe card.

[0134] In this embodiment, the probe tip is measured and screened at a fixed point by a measuring camera fixed above the probe.

[0135] Although the above methods are illustrated and described as a series of acts for simplicity of explanation, it is to be understood and appreciated that these methods are not limited by the order of the acts, as some acts may occur in a different order and / or concurrently with other acts from those illustrated and described herein or not illustrated and described herein but understandable to those skilled in the art according to one or more embodiments.

[0136] The following further describes a probe omnidirectional measurement method proposed by the present invention as shown in FIG4 , in conjunction with the probe omnidirectional measurement device of FIG1 to FIG3 . The probe omnidirectional measurement method proposed by the present invention includes the following steps:

[0137] Step S1, scanning stage, using 3D scanning equipment to scan the probe's shape, measure and judge the flatness of the probe on the measurement plane, and obtain the preliminary shape trend of the probe;

[0138] More specifically, in the probe omnidirectional measurement device shown in Figures 1 and 2 , the probe is placed flat on the carrier plate 3;

[0139] The probe is scanned by a 3D scanning device 1 to obtain the overall height change of the probe and the preliminary shape trend of the probe;

[0140] The software of the 3D scanning device 1 is used to judge and screen the flatness of the probe measurement plane;

[0141] The 3D scanning device has the function of outputting measurement data. After subsequent measurement data integration, the data can be output to trace the problem of the probe, making it easier to trace back and find the cause of the problem.

[0142] After the scanning is completed and the size measurement is correct, the probe is sucked by the suction probe structure 2, and the suction nozzle 21 is leveled by the rotating shaft 24 connected to the mechanical swing arm 22 to keep the probe in a vertical state.

[0143] In this embodiment, the 3D scanning device 1 has a scanning format of 4 mm×4 mm, and can measure probes in batches with a scanning accuracy within 2 microns.

[0144] In this embodiment, the diameter of the nozzle 21 is slightly smaller than the width of the probe. For example, the diameter of the nozzle 21 may be 0.2 mm.

[0145] Step S2, camera recognition phase, uses a number of measurement cameras installed in the functional area corresponding to the measurement position to identify, measure and judge the probe in multiple spatial dimensions from different measurement directions to obtain comprehensive shape and size data of the probe;

[0146] More specifically, in the probe omnidirectional measurement device shown in Figures 1 and 3, the probe on the suction nozzle 21 is clamped by a probe clamping structure 5. When clamping, the probe is sucked by the suction nozzle 21. Before moving the probe, the suction of the suction nozzle 21 needs to be closed to achieve the position movement of the probe.

[0147] The probe clamping structure 5 moves the probe to the measurement position. The first measurement camera 61, the second measurement camera 62 and the third measurement camera 63 used simultaneously at the measurement position 7 identify, measure and judge the probe in three directions, and determine the shape, straightness and position of the probe in various directions in three-dimensional space to confirm that the probe is not tilted or deflected in this direction.

[0148] The first measuring camera 61 is fixed above the probe, and measures from directly above to determine whether the beam is bent and whether the probe is tilted or deflected in the vertical direction;

[0149] The second measuring camera 62 is fixed on one side of the probe and is used to determine whether the probe is tilted or deflected on one side in the X-axis direction;

[0150] The third measurement camera 63 is fixed on the other side of the probe and is used to determine whether the probe is tilted or deflected on one side in the Y-axis direction.

[0151] After all measurements are completed, the warpage and deflection measurements of the probes can be completed to ensure the consistency of the probes on the probe card.

[0152] In addition to ensuring that the needle body does not warp or bend, specific requirements are also placed on the probe tip.

[0153] Furthermore, step S2 further includes performing fixed-point measurement and screening on the needle tip of the probe by using the first measuring camera 61 to obtain a probe with a needle tip that meets the requirements.

[0154] For example, some tips must have a regular circular shape with dimensions of 10 microns x 10 microns, while others must be square with dimensions of 15 microns x 15 microns.

[0155] Therefore, camera selection must be tailored to the specific needs of the probe tip to ensure effective control of the tip. Tip size is an important consideration when choosing a camera model. Larger tips, such as 10X and 20X lenses, can clearly reflect light, while smaller tips require a different lens, such as a 40X lens.

[0156] Therefore, determining the right camera type is crucial for effective probe control.

[0157] This invention proposes an innovative omnidirectional probe measurement device and method. First, a 3D scanning device is used to scan the probe on the measurement plane to obtain its flatness data, revealing the probe's morphological trends. Next, three directional measurement cameras are used to view the probe's position within different planes in 3D space, fully capturing the needle's morphological and dimensional data. Notably, the precise coordination of the 3D scanning device and multiple measurement cameras enables the probe's positioning accuracy to be controlled within 0.01 mm, ensuring high-precision measurements.

[0158] The present invention provides a probe omnidirectional measurement device and method, which have the following beneficial effects:

[0159] 1) Ability to perform full-scale measurement of probes, including warpage, deflection, and dimensions, to ensure probe consistency on the probe card;

[0160] 2) Ability to control and screen probe tips, thereby improving the reliability and stability of the probe card;

[0161] 3) Ensure that the needles flowing to the next process are basically usable, thereby avoiding large quantities of NG (non-conforming products) and discarded materials due to problems with the probe itself, and reducing raw material loss;

[0162] 4) It can quantify the parameters of the needle, provide reliable measurement data and traceable data, facilitate the establishment of a database, provide a front-end basis for the subsequent operation of the probe, and facilitate traceability;

[0163] 5) Optimizing inspection steps and details can save work costs and improve the efficiency of the overall process.

[0164] As used in this application and the claims, unless the context clearly indicates otherwise, the words "a," "an," "an," and / or "the" are not intended to refer to the singular but may include the plural. Generally speaking, the terms "comprises" and "include" only indicate the inclusion of the steps and elements specifically identified, and these steps and elements do not constitute an exclusive list. A method or apparatus may also include other steps or elements.

[0165] In the description of the present invention, it should be noted that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the present invention.

[0166] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Furthermore, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0167] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to direct connections, indirect connections through an intermediate medium, or the internal connection of two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0168] The above embodiments are provided to persons familiar with the art for implementing or using the present invention. Personnel familiar with the art may make various modifications or changes to the above embodiments without departing from the inventive concept of the present invention. Therefore, the scope of protection of the present invention is not limited to the above embodiments, but should be the maximum scope of the innovative features mentioned in the claims.

Claims

1. A probe omnidirectional measuring device, characterized in that: It includes 3D scanning equipment, suction probe structure, carrier, clamping probe structure and several measuring cameras: The carrier plate is used to place the probes required for measurement; The 3D scanning device is used to perform morphological scanning on the probe, measure and judge the flatness of the probe on the measurement plane, and obtain the preliminary morphological trend of the probe; The probe suction structure is used to suck the probe after scanning is completed and adjust the probe position so that the probe points to a specific direction; The probe clamping structure is used to clamp the probe from the probe suction structure and move it to the measurement position; The several measuring cameras are installed in several functional areas corresponding to the measuring positions, and identify, measure and judge the probe in multiple spatial dimensions from different measuring directions, and finally obtain all-round shape and size data of the probe.

2. The probe omnidirectional measuring device according to claim 1, characterized in that: The scanning format of the 3D scanning device is 1mm×1mm to 6mm×6mm; The scanning accuracy of the 3D scanning device is within 2 microns.

3. The probe omnidirectional measuring device according to claim 1, characterized in that: The suction probe structure includes a suction nozzle, a mechanical swing arm, a suction probe camera, a rotating shaft and a first base: The suction nozzle is installed at one end of the mechanical swing arm and is used to suck the probe; The rotating shaft is mounted on the other end of the mechanical swing arm; The mechanical swing arm is mounted on the first base and rotates around the rotation axis to adjust the direction of the nozzle and the probe; The suction probe camera is installed on the first base, located on one side of the mechanical swing arm, and measures the relative positions of the suction nozzle and the probe.

4. The probe omnidirectional measuring device according to claim 3, characterized in that: The diameter of the nozzle is smaller than the width of the probe.

5. The probe omnidirectional measuring device according to claim 1, characterized in that: Also included are several motion axes to provide axial movement: The carrier plate is mounted on the moving shaft for axial movement.

6. The probe omnidirectional measuring device according to claim 1, characterized in that: The clamping probe structure includes a clamping claw, a clamping probe camera and a second base: The clamping claw is installed at the bottom of the second base and is used to clamp the probe; The clamping probe camera is installed on the side of the second base to measure the relative positions of the clamping claw and the probe.

7. The probe omnidirectional measuring device according to claim 1, characterized in that: The plurality of measuring cameras include a first measuring camera, a second measuring camera and a third measuring camera: The first measuring camera is fixed above the measuring position, and the measuring direction is the vertical direction, and is used to determine whether the probe is tilted or deflected in the vertical direction; The second measuring camera is fixed on one side of the probe, and the measuring direction is horizontal, and is used to determine whether the probe is tilted or deflected on one side of the horizontal direction; The third measuring camera is fixed on the other side of the probe, perpendicular to the measuring directions of the first and second measuring cameras, and the measuring direction is horizontal and longitudinal, and is used to determine whether the probe is tilted or deflected on one side of the horizontal and longitudinal direction.

8. The probe omnidirectional measuring device according to claim 7, characterized in that: The first measuring camera is used to determine whether the probe beam is bent, and to perform fixed-point measurement and screening on the probe tip.

9. The probe omnidirectional measuring device according to claim 1, characterized in that: The magnification of the measuring camera is 10-40 times, which is selected and determined according to different probe tip parameters.

10. A probe omnidirectional measurement method, characterized in that: The following steps are involved: Step S1, scanning stage, scanning the shape of the probe by using a 3D scanning device, measuring and judging the flatness of the probe on the measurement plane, and obtaining the preliminary shape trend of the probe; Step S2, camera recognition stage, through a number of measurement cameras installed in the functional area corresponding to the measurement position, the probe is identified, measured and judged in multiple spatial dimensions from different measurement directions to obtain the full range of shape and size data of the probe.

11. The probe omnidirectional measurement method according to claim 10, characterized in that: The step S1 further comprises: after the scanning is completed, the probe is kept in a vertical state and moved to a measuring position.

12. The probe omnidirectional measurement method according to claim 10, characterized in that: The step S2 further comprises: The three measuring cameras are set in the corresponding functional areas of the measuring position to identify, measure and judge the different surfaces of the probe in the three-dimensional space from three different measuring directions.

13. The probe omnidirectional measurement method according to claim 12, characterized in that: The step S2 further comprises: Fixing the first measuring camera above the measuring position, with the measuring direction being the vertical direction, and measuring to determine whether the probe is tilted or deflected in the vertical direction; The second measuring camera is fixed on one side of the probe, with the measuring direction being horizontal, to measure and determine whether the probe is tilted or deflected on one side of the horizontal direction; The third measuring camera is fixed on the other side of the probe, perpendicular to the measuring directions of the first measuring camera and the second measuring camera, and the measuring direction is horizontal and longitudinal, to measure and determine whether the probe is tilted or deflected on one side of the horizontal and longitudinal direction.

14. The probe omnidirectional measurement method according to claim 13, characterized in that: The step S2 further comprises: The first measuring camera is used to perform point measurement and screening on the tip of the probe.

15. The probe omnidirectional measurement method according to claim 13, characterized in that: The step S2 further comprises: The selection of the measuring camera is determined according to different probe tip parameters.

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