Vibration actuator and contact-type input device

Abstract

A vibration actuator according to the present invention includes: an electromagnet formed by laminating a flat annular coil on a plate surface of a plate-shaped magnetic core; a magnetic member having a lower surface facing the coil from above; a spacer disposed on the lower surface at the outside of the coil and separating the magnetic member and the electromagnet in a vertical direction; and an elastic support part disposed outside the coil and connecting the magnetic core and the spacer. As a result of a magnetic force being generated by energization of the coil, one of the magnetic member and the electromagnet is displaced so as to approach the other to vibrate.

Description

Vibration actuator and contact-type input device

[0001] The present invention relates to a vibration actuator and a contact-type input device equipped with the same.

[0002] Conventionally, a configuration has been known in which a vibration actuator is used to impart vibrations to the pads of an operator's fingers that come into contact with a display screen displayed on a touch panel, which is a sensing panel, in order to provide a touch operation sensation (the sensation of operating by touch) (Patent Document 1).

[0003] Patent Document 1 discloses a mobile terminal device in which a vibration actuator is attached to the back surface of a touch panel via a vibration transmission unit. The vibration actuator of this device has a mover disposed within a housing fixed to the vibration transmission unit so that the mover can move back and forth along a guide shaft disposed perpendicular to the touch panel. The vibration actuator applies vibration to the finger pad that touches the touch panel via the vibration transmission unit, although there is a possibility that a collision sound will be generated when the mover hits the housing in response to an operation on the touch panel.

[0004] JP 2015-070729 A

[0005] Incidentally, in the vibration actuator of Patent Document 1, the movable element moves back and forth along a guide shaft arranged perpendicular to the display surface of the touch panel, so the device itself has a length, or thickness, perpendicular to the display surface.

[0006] In this configuration, a space of a certain thickness is required on the back side of the touch panel, which makes the mobile terminal device equipped with the touch panel itself large, making it difficult to make it smaller and thinner. In recent years, as devices have become smaller and thinner, there has been a demand for the vibration actuators themselves to be mounted on the devices to be smaller and thinner.

[0007] An object of the present invention is to provide a vibration actuator and a contact-type input device that are thin and have high output, and that vibrate favorably.

[0008] The vibration actuator of the present invention comprises an electromagnet formed by stacking a flat, annular coil on the plate surface of a plate-shaped magnetic core; a magnetic member having a lower surface facing the coil from above; a spacer arranged on the lower surface outside the coil and separating the magnetic member and the electromagnet in the vertical direction; and an elastic support part arranged outside the coil and connecting the magnetic core and the spacer, and is configured so that either the magnetic member or the electromagnet is displaced and vibrates so as to approach the other due to the magnetic force generated by passing current through the coil.

[0009] The contact-type input device of the present invention employs a configuration in which the vibration actuator having the above-described configuration is disposed on the rear surface of the operation surface and is driven in response to an operation on the operation surface.

[0010] According to the present invention, a thin structure and high output are achieved while vibrating favorably.

[0011] FIG. 1 is an external perspective view of a vibration actuator according to a first embodiment of the present invention. FIG. 2 is a view of the vibration actuator of FIG. 1 with the magnetic yoke removed. FIG. 3 is a sub-assembly view of the same vibration actuator. FIG. 4 is an exploded view of the same vibration actuator. FIG. 5 is a partial cross-sectional view of the same vibration actuator. FIG. 6 is a view showing the operation of the vibration actuator when moving a magnetic body. FIG. 7 is a view showing the operation of the vibration actuator when moving the electromagnet portion. FIG. 8 is a view showing an example of a drive circuit. FIG. 9 is a view showing an example of an operation signal. FIG. 10A is a partial cross-sectional view showing the internal air flow in an excited state. FIG. 10B is a view showing the internal air flow in a de-excited state. FIG. 11A is a view showing the displacement of a movable portion of this embodiment. FIG. 11B is a view showing the displacement of a movable portion with no air vent portion. FIG. 12 is an external perspective view of a vibration actuator according to a second embodiment of the present invention with the magnetic yoke removed. FIG. 13 is a sub-assembly view of the same vibration actuator. FIG. 14 is an exploded view of the same vibration actuator. FIG. 15 is a partial cross-sectional view of the same vibration actuator. FIG. 16 is a diagram showing the operation of the vibration actuator when the magnetic body is moved. FIG. 17 is a diagram showing the operation of the vibration actuator when the electromagnet portion is moved. FIG. 18 is an external perspective view showing a vibration actuator according to embodiment 3 of the present invention with the magnetic yoke removed. FIG. 19 is a sub-assembly view of the vibration actuator. FIG. 20 is an exploded view of the vibration actuator. FIG. 21 is an external perspective view showing a vibration actuator according to embodiment 4 of the present invention with the magnetic yoke removed. FIG. 22 is a sub-assembly view of the vibration actuator. FIG. 23 is an exploded view of the vibration actuator. FIG. 24 is a perspective view of a vibration actuator according to embodiment 5 of the present invention. FIG. 25 is a sub-assembly view of the vibration actuator. FIG. 26 is an exploded view of the vibration actuator. FIG. 27 is a diagram showing a modified example of a vibration actuator according to an embodiment of the present invention. FIG. 28 is an external perspective view of a vibration actuator according to embodiment 6 of the present invention. FIG. 29 is a sub-assembly view of the vibration actuator. FIG. 30 is an exploded view of the vibration actuator.FIG. 31A is a partial cross-sectional view showing the flow of internal air in an excited state. FIG. 31B is a diagram showing the flow of internal air in a non-excited state. FIG. 32 is a sub-assembly diagram of a vibration actuator according to embodiment 7 of the present invention. FIG. 33 is an exploded view of the same vibration actuator. FIG. 34A is a partial cross-sectional view showing the flow of internal air in an excited state. FIG. 34B is a diagram showing the flow of internal air in a non-excited state. FIG. 35 is an external perspective view of a vibration actuator according to embodiment 8 of the present invention. FIG. 36 is a partial cross-sectional view taken along the arrow R-R in FIG. 35. FIG. 37 is a sub-assembly diagram of the same vibration actuator. FIG. 38 is an exploded view of the same vibration actuator. FIG. 39A is a partial cross-sectional view showing the flow of internal air in an excited state. FIG. 39B is a diagram showing the flow of internal air in a non-excited state. A diagram showing an example of a contact-type input device having a vibration actuator. FIG. 41 is an external perspective view of a vibration actuator according to embodiment 9 of the present invention. FIG. 42 is an exploded view of the same vibration actuator. FIG. 43 is a plan view of the same vibration actuator. FIG. 44 is a plan view showing the internal configuration of the vibration actuator. FIG. 45 is a bottom view of the vibration actuator. FIG. 46 is an exploded view showing the main parts of the basic configuration of the vibration actuator. FIG. 47 is a side cross-sectional view showing the wiring of the FPC of the vibration actuator. FIG. 48 is an external perspective view of a first variation of the vibration actuator according to the ninth embodiment of the present invention. FIG. 49 is an external perspective view of a second variation of the vibration actuator according to the ninth embodiment of the present invention. FIG. 50A is an external perspective view of a first variation of the vibration actuator according to the tenth embodiment of the present invention. FIG. 50B is an external perspective view of a second variation of the vibration actuator according to the tenth embodiment of the present invention. FIG. 50C is an external perspective view of a third variation of the vibration actuator according to the tenth embodiment of the present invention. FIGS. 51A and 51B are schematic diagrams showing the flow of internal air during suction and release of suction in the vibration actuator according to the tenth embodiment of the present invention. FIGS. 52A and 52B are schematic diagrams showing the flow of internal air during suction and release of suction in the vibration actuator without an air hole. Fig. 53 is a perspective view of the appearance of a vibration actuator according to embodiment 11 of the present invention, and Fig. 54 is an exploded view of the same vibration actuator.FIG. 55 is an exploded view of a vibration actuator according to embodiment 12 of the present invention. FIG. 56 is an exploded view of a vibration actuator according to embodiment 13 of the present invention. FIG. 57 is an external perspective view of a vibration actuator according to embodiment 14 of the present invention. FIG. 58 is an exploded view of the same vibration actuator. FIG. 59 is a side view showing the mounting structure of the vibration actuator. FIG. 60 is an external perspective view of a vibration actuator according to embodiment 15 of the present invention. FIG. 61 is an exploded view of the same vibration actuator. FIG. 62 is a side cross-sectional view of the same vibration actuator. FIG. 63 is an exploded view of a vibration actuator according to embodiment 16 of the present invention. FIG. 64 is an external perspective view showing the internal configuration of the same vibration actuator. FIG. 65 is an external perspective view of a vibration actuator according to embodiment 17 of the present invention. FIG. 66 is an external perspective view showing the mounting relationship between the coil and core part in the electromagnet part. FIG. 67 is an external perspective view showing the mounting relationship between the coil and core part in the electromagnet part. FIG. 68 is a plan view of a substrate part to which a coil is mounted. FIG. 69 is a view showing an example of the configuration of the substrate part shown in FIG.

[0012] Hereinafter, each embodiment of the present invention will be described in detail with reference to the drawings.

[0013] In each embodiment, a Cartesian coordinate system (X, Y, Z) is used for explanation. The same Cartesian coordinate system (X, Y, Z) is also used in the figures described below. Hereinafter, when a vibration actuator is applied to a contact-type input device (also referred to as a vibration presentation device or an operation input device) that an operator touches to input information, the lengths in the X, Y, and Z directions correspond to the width, depth, and height of the contact-type input device. The positive Z direction is the direction in which vibration feedback is provided to the operator and is referred to as the "flat side" (or "upper side"), and the negative Z direction is the direction in which the operator presses when operating the device and is referred to as the "bottom side" (or "lower side"). The "radial direction" is synonymous with the X and Y directions centered on the central axis along the Z direction in the vibration actuator, and is also referred to as the direction along the plate surface. In addition, for each component constituting the vibration actuator, the surface on the "flat side" (or "upper side") is referred to as the "front side" (or "top surface"), and the surface on the "bottom side" (or "lower side") is referred to as the "back side" (or "lower surface"). When the posture of the vibration actuator or the contact-type input device changes, the interpretation should be changed according to the change in posture.

[0014] (Embodiment 1) <Overall Configuration of Vibration Actuator 10> Fig. 1 is an external perspective view of a vibration actuator 10 according to embodiment 1 of the present invention. Fig. 2 is a view of the vibration actuator 10 of Fig. 1 with the magnetic yoke removed. Fig. 3 is a sub-assembly view of the vibration actuator. Fig. 4 is an exploded view of the vibration actuator 10. Fig. 5 is a partial cross-sectional view of the vibration actuator 10.

[0015] The vibration actuator 10 is used, for example, in a vibration presentation device 500 (see track pad shown in Figure 40) as a contact-type input device having an operating device (see pad main body 510 shown in Figure 40 in this embodiment) as a vibration presentation unit (operation surface) that an operator touches and operates.

[0016] By vibrating the operating device, the vibration actuator 10 can give the operator who touches and operates the operating device a sense of touch (also called a "tactile sensation" or "force sensation") depending on the purpose and usage situation of the operating device.

[0017] The vibration actuator 10 is a thin vibration actuator in the shape of a flat plate or a thin plate, and is arranged on the back side of the operating device in the thickness direction, assuming that the Z direction and the −Z direction are thickness directions, so as to be able to vibrate the operating device.

[0018] The vibration actuator 10 has an electromagnet section 20 including a magnetic core body 32, a magnetic pole section 34, and a flattened circular (annular plate-shaped) coil 50, a magnetic body 70 including a magnetic yoke 80, and an elastic support section 60 connecting the electromagnet section 20 and the magnetic body 70. The electromagnet section 20 and the magnetic body 70 generate a magnetic attraction force when current is applied to the coil 50. The elastic support section 60 supports the electromagnet section 20 and the magnetic body 70 so that one of them is displaceable in the thickness direction so that it approaches the other. In other words, the vibration actuator 10 vibrates when the magnetic body 70 (magnetic yoke 80) or the electromagnet section 20 is displaced so that it approaches the other due to the magnetic force generated when current is applied to the coil 50.

[0019] In the vibration actuator 10, the coil 50 in the electromagnet section 20 is provided on the substrate section 40. The vibration actuator 10 can be connected to a vibration presentation section that receives a pressing operation by a user via either the electromagnet section 20 or the magnetic body 70.

[0020] The vibration actuator 10 vibrates by moving one of the electromagnet part 20 and the magnetic body 70 in the Z direction relative to the other, specifically in the direction of moving towards or away from each other, and this vibration is imparted to the operating device to which the vibration actuator 10 is attached as an operating feel.

[0021] In this way, the vibration actuator 10 is formed in the shape of a flat plate, and one of the electromagnet part 20 and the magnetic body 70 is made to be a movable part, which moves in one direction in the stacking direction (thickness direction) to approach the other, which is a fixed part. In addition, the reaction force of the elastic support part 60 moves both of the adjacent parts in the opposite direction to the other, separating them, and the vibration actuator 10 generates vibration.

[0022] <Electromagnet section 20> The electromagnet section 20 has a core section 30 formed in a thin plate shape and excited so as to be magnetized in the thickness direction (Z direction), a coil 50, and a substrate section 40. The core section 30 is configured by disposing a magnetic pole section 34 on the upper surface of the center of a magnetic core body 32, which is a magnetic plate. That is, the electromagnet section 20 is configured by stacking a flattened, annular coil 50 on the plate surface of the plate-shaped magnetic core body 32. The magnetic core body 32 and the magnetic pole section 34 form a magnetic core.

[0023] The magnetic core body 32 is a flat magnetic body, and its outer edge has a notch 322 that allows a portion of the substrate portion 40 to escape, and a connection fixing portion 324 to which a portion of the elastic support portion 60 is fixed. The outer edge of the magnetic core body 32 is surrounded on the outside by the elastic support portion 60 that is fixed by the connection fixing portion 324.

[0024] The magnetic core body 32 is formed of a magnetic material such as a silicon steel plate or SECC (electrogalvanized steel plate: Steel Electrolytic Cold Commercial).

[0025] The notch 322 and the connection fixing portion 324 in the magnetic core body 32 are formed on adjacent sides of the outer periphery of the rectangular magnetic core body 32. Furthermore, a notch 322 may also be formed on the side of the outer periphery opposite to the side on which the notch 322 is provided. Furthermore, a connection fixing portion 324 is formed on the side opposite to the side on which the connection fixing portion 324 is provided, and this pair of connection fixing portions 324 supports the elastic support member 60 symmetrically with respect to the coil 50.

[0026] The magnetic core body 32 may be fixed as a fixing surface to be fixed to the housing of an object to be mounted (for example, a product). On the other hand, when the magnetic body 70 is fixed and the magnetic core body 32 is made movable, the magnetic core body 32 also functions as a weight.

[0027] The magnetic pole portion 34 is a flat, disk-shaped magnetic body whose radial length is longer than its thickness. The magnetic pole portion 34 is connected to the magnetic core body 32 on the magnetic core body 32 and is surrounded by the coil 50. When the coil 50 is energized, the magnetic pole portion 34 is magnetized together with the magnetic core body 32, and the front and back surfaces become magnetic pole surfaces through which magnetic flux flows in the vertical direction, i.e., the thickness direction.

[0028] The coil 50 is formed in a flat, annular shape with a radial length greater than its thickness. The coil 50 is disposed on the magnetic core body 32 via the substrate portion 40. The coil 50 is disposed so as to surround the magnetic pole portion 34, with the axis of the coil 50 coinciding with the axis of the magnetic pole portion 34. Because the coil 50 is annular and does not have edge portions that are prone to variations, it is a coil with stable characteristics and high manufacturability.

[0029] The coil 50 may be configured in any manner as long as it is thin (flat) and formed in a circular ring shape. For example, the coil 50 may be formed of UEW (polyurethane enameled copper wire). The coil 50 is connected to wiring on the substrate unit 40 by coil windings at both ends. Note that magnetic poles may be disposed radially outside the coil 50, i.e., on the outer periphery of the coil 50, and when the electromagnet unit 20 is to be moved, weights may be disposed on the outer periphery of the coil 50 in the magnetic core body 32. The coil 50 may be a normal winding coil, such as an air-core coil, in which the coil windings (UEW) at both ends extend from the inside of the circular coil body, or may be configured as a so-called alpha winding, in which the coil windings at both ends protrude from the outer periphery of the coil body.

[0030] The substrate 40 supplies power to the coil 50. The substrate 40 is formed in a film shape. The substrate 40 is, for example, a flexible printed circuit (FPC) and is configured by providing a conductive copper foil on a polyimide (Pl) film, and has a low elasticity design to avoid affecting the characteristics of the spring that forms the elastic support portion 60. The substrate 40 has a substrate main body (insulating portion, for example, insulating film) 42 having an opening 43 formed therein, and an extension portion 44 extending from a portion of the outer periphery of the substrate main body 42.

[0031] The substrate 40 has a wiring portion connected to the coil 50. The wiring portion is connected to a land 441 disposed at the tip of the extension 44. The coil 50 is electrically connected to an external device via this land 441. The substrate 40 uses an FPC to integrally configure an insulating portion and a wiring portion, which is a conductive portion, and has the functions of both.

[0032] The substrate body 42 is attached entirely onto the magnetic core body 32 with the magnetic pole portion 34 disposed within the opening 43. The coil 50 is disposed on the substrate body 42 such that the opening 51 of the coil 50 is positioned corresponding to the opening 43. The substrate body 42 is interposed between the magnetic core body 32 and the coil 50, and functions as an insulating film (insulator) that insulates the magnetic core body 32 from the coil 50.

[0033] The extension portion 44 is disposed within the cutout portion 322 and is bent to extend outward within the thickness of the magnetic core body 32. By disposing the extension portion 44 within the cutout portion 322, the thickness of the extension portion 44 can be absorbed by the thickness of the magnetic core body 32, which contributes to making the vibration actuator 10 thinner overall.

[0034] The substrate portion 40 is positioned on the magnetic core body 32 so that the opening 43 is located on the outer periphery of the magnetic pole portion 34 already provided in the magnetic core body 32, and the extension portion 44 is positioned so as to extend below the substrate body 42 through the cutout portion 322.

[0035] The substrate section 40 is a flexible printed circuit (FPC) that has an insulating function and a conductive function (due to the wiring section) to the coil 50, so that it is possible to avoid insulation breakdown, improve the routing of the wiring that supplies power to the coil, and suppress coil disconnection. Furthermore, when connecting using a connector or the like, the connection can be made easily.

[0036] <Elastic support portion 60> The elastic support portion 60 elastically supports the electromagnet portion 20 and the magnetic body 70 by connecting them so that they can move relatively. Specifically, the elastic support portion 60 is disposed outside the coil 50, and connects the magnetic core body 32 and the spacer 90.

[0037] The elastic support portion 60 is a flat frame-shaped body, such as a leaf spring, made of stainless steel or the like, that is elastically deformable. The elastic support portion 60 has a predetermined thickness (thickness in the Z direction) and is arranged in a layered form between the magnetic core body 32 and the magnetic body 70 in the thickness direction (Z direction).

[0038] The elastic support part 60 has an opening 61, is formed in a rectangular frame shape surrounding the magnetic core body 32 and the coil 50, is arranged outside the magnetic core body 32, and is elastically deformed in the thickness direction (Z direction) on the outside. That is, the frame-shaped part of the elastic support part 60 formed by the side parts 62, 64 located on the outside of the magnetic core body 32 can be elastically deformed in the Z direction, and this deformation, specifically, deformation that brings the two closer together, brings the electromagnet part 20 and the magnetic body 70 closer to or farther apart.

[0039] The elastic support member 60 has a yoke-side connecting portion 622 on each of a pair of parallel side portions 62, and these yoke-side connecting portions 622 are joined to the magnetic body 70 by stacking the magnetic body 70 in the Z direction. Specifically, the yoke-side connecting portion 622 of the elastic support member 60 is connected to the spacer joining portion 92 of the spacer 90 of the magnetic body 70. As a result, the elastic support member 60 elastically supports the movable part side at a pair of locations on the opposite sides, thereby providing well-balanced support and allowing stable vibration.

[0040] In addition, the elastic support portion 60 has a core side connection portion 642 on each of the other pair of side portions 64 adjacent to each of the pair of side portions 62, and the core side connection portion 642 is joined to the connection fixing portion 324 of the magnetic core body 32 in a stacked state in the Z direction.

[0041] The yoke side connecting portion 622 and the core side connecting portion 642 are planar bodies that protrude inward from the side portions 62, 64 that constitute the frame portion of the elastic support portion 60. The yoke side connecting portion 622 and the core side connecting portion 642 are connected to the spacer joint portion 92 and the connecting fixing portion 324, respectively, in contact with each other in the Z direction, on the opposing side portions of the elastic support portion 60.

[0042] The yoke-side connecting portion 622 and the core-side connecting portion 642 are arranged at positions rotated 90 degrees from each other in the rectangular frame-shaped elastic support portion 60, and are configured to have the same length and the same width. This eliminates the need to determine the orientation of the elastic support portion 60 during assembly, improving assembly efficiency. Furthermore, because the elastic support portion 60 is a frame-shaped body, the spring length can be increased, ensuring stable assembly. Furthermore, because the elastic support portion 60 has an integrated structure, component precision can be improved.

[0043] The elastic support part 60 is disposed between the rear surface of the magnetic body 70, i.e., the rear surface of the spacer 90, and the surface of the magnetic core body 32. This space, i.e., the thickness of the elastic support part 60, becomes the movable gap DG that defines the minimum distance between the magnetic body 70 and the electromagnet part 20 (the hard stop part gap that restricts the movement of the magnetic body 70, i.e., the maximum movable range of the magnetic body 70).

[0044] Furthermore, the thickness of the elastic support member 60, together with the thickness of the spacer 90 and the thickness of the magnetic pole member 34, determines the magnetic pole distance (air gap G) between the electromagnet member 20 and the magnetic body 70, which determines the vibration characteristics (amplitude) in the vibration actuator 10. Note that each thickness means the "length in the Z direction." Since the elastic support member 60, spacer 90, and magnetic pole member 34 are disposed between the magnetic core body 32, which is a flat plate, and the magnetic yoke 80, the air gap G is set by (thickness of the spacer 90 + thickness of the elastic support member 60 - thickness of the magnetic pole member 34).

[0045] The elastic support portion 60 deforms in a region including the space between the magnetic core body 32 and the magnetic body 70 (specifically, the spacer 90). The elastic support portion 60 supports one of the magnetic body 70 and the electromagnet portion 20 (specifically, the magnetic core body 32) in a balanced state perpendicular to the opposing direction (vibration direction) relative to the other, and is movable from one side to the other so as to approach the other.

[0046] 5, the elastic support parts 60 are located in approximately the same layer as the coil 50 and the magnetic pole parts 34, and therefore the thickness can be made thinner than in a configuration in which the elastic support parts 60 are stacked on the coil 50 and the magnetic pole parts 34, thereby achieving a thinner overall configuration. The elastic support parts 60 are located in a position where they do not interfere with the magnetic core body 32 in which the coil 50 and the magnetic pole parts 34 are located, and they deform and are displaced in the Z direction.

[0047] Furthermore, when the magnetic body 70 is movable relative to the electromagnet portion 20, the elastic support portion 60 has a spring constant K ｓｐ By setting the above, it is possible to determine the displacement amount and natural frequency of the magnetic body 70, and also to adjust the resonance frequency. Furthermore, when the magnetic body 70 is driven (moving), that is, when current is passed through the coil 50, displacement occurs, which creates a mechanical tactile sensation.

[0048] <Magnetic Body 70 > The magnetic body 70 has a magnetic yoke 80 and a spacer 90 disposed on the lower surface of the magnetic yoke 80 .

[0049] <Magnetic yoke (magnetic member) 80> The magnetic yoke 80, together with the spacer 90, is disposed opposite the electromagnet portion 20 and is provided so as to be movable toward the electromagnet portion 20, and the movement causes the vibration actuator to generate vibration. The magnetic yoke 80 has a lower surface 82 that faces the coil 50 from above.

[0050] The magnetic yoke 80 is a flat magnetic body that faces the magnetic pole portion 34 and attracts the magnetic pole portion 34 due to the magnetic attraction force that is generated between the magnetic yoke 80 and the magnetic pole portion 34 when current is applied to the coil 50. The magnetic yoke 80 is also disposed opposite the magnetic core body 32 and attracts the magnetic yoke 80 due to the magnetic attraction force that is generated between the magnetic core body 32 and the outer periphery of the magnetic pole portion 34.

[0051] The magnetic yoke 80 is made of a single plate-shaped magnetic material and has a high degree of flatness. The magnetic yoke 80 may be made of soft magnetic materials such as silicon steel plate, permalloy, ferrite, etc. The magnetic yoke 80 may also be made of electromagnetic stainless steel, sintered material, MIM (metal injection molding) material, laminated steel plate, SECC (electro-galvanized steel plate: Steel Electrolytic Cold Commercial), etc. It is particularly preferable that the magnetic yoke 80 be made of silicon steel plate or SECC.

[0052] When the magnetic core body 32 is fixed to a fixed surface of the housing of a product, the magnetic yoke 80 also functions as a weight on the movable part side.

[0053] As such, the magnetic yoke 80 is a highly flat, plate-shaped body, and can be positioned opposite the entire magnetic pole surface of the magnetic pole portion 34 with an air gap G spaced at equal intervals, improving the precision of the air gap G surface and effectively exerting the magnetic attraction force between it and the electromagnet portion 20.

[0054] Furthermore, when the magnetic yoke 80 is fixed to the housing of a product, the flat surface functions as an attachment surface to the housing, allowing for convenient fixing to the housing. When the magnetic yoke 80 is provided on a movable object or a housing that movably supports a movable object, it is preferable that the vibration presentation unit be attached via a fastening material such as an adhesive, a fastening member, or a sticky material. By changing the shape of the magnetic yoke 80, it is possible to adjust the air flow path through the air vent 100, which will be described later.

[0055] The magnetic yoke 80 has a rectangular shape, for example, formed as a square plate in a plan view. The magnetic yoke 80 is joined to the elastic support member 60 at the center of a pair of opposing sides via spacers 90 (spacer joints 92).

[0056] <Spacer 90> The spacer 90 is intended to ensure an air gap G, which is a movable area for the elastic support portion 60. The spacer 90 is disposed on the lower surface 82 of the magnetic yoke 80 outside the coil 50, and separates the magnetic yoke 80 and the electromagnet portion 20 in the up-down direction. The spacer 90 is attached to the lower surface 82 of the magnetic yoke 80, for example, and is interposed between the magnetic yoke 80 and the elastic support portion 60. The spacer 90 protrudes from the lower surface 82 and has a predetermined width in a direction perpendicular to the up-down direction. The spacer 90 is disposed on the outer periphery of the coil 50 so as to surround the entire periphery of the coil 50.

[0057] The thickness of the spacer 90 separates the magnetic yoke 80 from the magnetic core body 32. The thickness of the spacer 90, together with the elastic support member 60 and the magnetic pole member 34, forms the distance between the magnetic yoke 80 and the coil 50 and the magnetic pole member 34, i.e., the air gap G. This allows the elastic support member 60 to move in the same layer as the magnetic core body 32, increasing the movable range, thereby providing a sufficient movable range for the movable part in the vibration actuator 10 and enabling favorable vibration characteristics to be achieved. Note that this air gap is formed in the same way in each of the embodiments described below (except for embodiment 8).

[0058] The spacer 90 has a shape that avoids the coil 50 when the magnetic yoke 80 is displaced due to deformation of the elastic support portion 60, and is positioned in the area that becomes the magnetic pole surface of the magnetic yoke 80 (the central part of the lower surface 82 facing the magnetic pole portion 34), outside the magnetic pole portion 34 and the coil 50.

[0059] 4, the spacer 90 is formed, for example, in a frame shape corresponding to the outer diameter of the vibration actuator 10, and is formed, for example, in a rectangular frame shape corresponding to the outer shape of the magnetic yoke 80. The spacer 90 is a square frame-shaped body corresponding to the shape of the magnetic yoke 80.

[0060] The spacer 90 has a predetermined thickness that forms part of the deformation region of the elastic support portion 60, and separates the elastic support portion 60 and the magnetic yoke 80 in the thickness direction (Z direction). The spacer 90 also separates the electromagnet portion 20, i.e., the magnetic core body 32, the coil 50, and the magnetic pole portion 34, from the magnetic yoke 80 in the vibration direction (up and down direction, Z direction).

[0061] Although the spacer 90 is made of a non-magnetic material, it may also be made of a magnetic material. The spacer 90 is formed of a high-precision steel plate, such as an austenitic spring stainless steel strip manufactured by cold rolling. The spacer 90 may be made of either a magnetic material or a non-magnetic material, and can form the magnetic circuit of the vibration actuator 10.

[0062] Depending on the design of the spacer 90, the flexibility of the elastic members such as leaf springs used in the elastic support portions 60 can be increased.

[0063] Since the spacer 90 is made of plate material, it is possible to use a plate material having a thickness that makes it easy to set accurate dimensions, thereby improving the accuracy of the air gap G. Furthermore, when the magnetic core body 32 is fixed to a housing and used as a moving part together with the magnetic yoke 80, the spacer 90 also functions as a weight. Using a high specific gravity material for the spacer 90 increases the moving weight, which can increase the generated vibration. Furthermore, when the spacer 90 is used as a weight for the moving part, the natural frequency of the moving part can be set by adjusting its weight.

[0064] <Magnetic Circuit of Vibration Actuator 10> Figures 6 and 7 are diagrams used to explain the operation of the vibration actuator, and each corresponds to the partial cross-sectional view of Figure 5, showing the flow of magnetic flux M. Figure 6 is a diagram showing the operation when the magnetic body 70 is moved in the vibration actuator, showing the operation when the magnetic core body 32 is attached to the fixed surface of the housing. Figure 7 is a diagram showing the operation when the electromagnet part 20 is moved in the vibration actuator, showing the operation when the magnetic yoke 80 is attached to the fixed surface of the housing.

[0065] In the vibration actuator 10, the magnetic core body 32 is fixed as a fixed surface to be fixed to the housing, the electromagnet section 20 is the fixed section, and the magnetic body 70 is the movable section. With the vibration actuator 10 in this immovable state, i.e., in a non-energized state (see FIG. 5), for example, current is passed through the coil 50 to excite the magnetic pole section 34, as shown in FIG. 6. This generates a magnetic field (flow of magnetic flux M) that passes through the magnetic body 70, with the surface (top surface) of the magnetic pole section 34 as an S pole and the joint surface with the magnetic core body 32 as an N pole.

[0066] According to the principle of an electromagnetic solenoid, the magnetic body 70 attracts the surfaces of the magnetic pole portion 34 and the magnetic core body 32, forming the magnetic circuit shown in the figure. Because the magnetic pole portion 34 and the magnetic core body 32 are fixed, the magnetic body 70 moves in the direction of the arrow, i.e., in the direction approaching the core portion 30.

[0067] Next, when the current to the coil 50 is cut off, the magnetic field disappears, the magnetic attraction force of the electromagnet portion 20 disappears, and the biasing force of the elastic support portion 60, which has deformed toward the magnetic core body 32, is released. That is, a reaction force of the spring acting as the elastic support portion 60 is generated, and the reaction force of the elastic support portion 60 moves the magnetic body 70 to its original position. At this time, the reaction force causes the magnetic body 70 to move to a position displaced away from the magnetic pole portion 34 from its stationary position in an immovable state, generating strong vibrations.

[0068] This vibration repeats reciprocating movement in the Z direction while attenuating as the biasing force decays, resulting in free vibration. Alternatively, vibration may be generated by repeatedly energizing and deenergizing the coil 50 to cause the magnetic body 70 to reciprocate in the Z direction. In this way, in the vibration actuator 10, the magnetic body 70, which is supported in a state where it is suspended from the electromagnet section 20 by the elastic support section 60, is mechanically displaced by the magnetic attractive force generated between it and the opposing electromagnet section 20 when current is applied, and then undergoes free vibration.

[0069] Next, the operation of the vibration actuator 10 when the magnetic yoke 80 is fixed to the housing as a fixing surface will be described.

[0070] 7, when the coil 50 is energized, a magnetic field is generated between the electromagnet portion 20 and the magnetic body 70, and the electromagnet portion 20 is attracted to the magnetic body 70 including the magnetic yoke 80. The electromagnet portion 20 moves closer to the magnetic body 70.

[0071] Next, by de-energizing the coil 50, the magnetic field disappears, the magnetic attraction force of the electromagnet portion 20 disappears, and the biasing force of the elastic support portion 60, which has deformed toward the magnetic yoke 80, is released. This generates a reaction force of the elastic support portion 60, and the electromagnet portion 20 moves to its original position, that is, in a direction away from the magnetic body 70. At this time, the reaction force of the elastic support portion 60 causes the electromagnet portion 20 to move further away from the magnetic pole portion 34 than its rest position, generating strong vibrations. This is repeated while being damped, generating vibrations.

[0072] In this way, in the vibration actuator 10, when current is applied to the coil 50, a magnetic attraction force is generated between the core portion 30 of the magnetic core body 32 and the magnetic pole portion 34 and the magnetic yoke 80 facing the core portion 30. Note that the magnetic attraction force is greater in the central portion where the magnetic pole portion 34 is located between the core portion 30 and the magnetic yoke 80 than in the outer periphery.

[0073] This magnetic attraction force causes one of the electromagnet part and the magnetic body 70 to move closer to the other and displace. This movement causes the magnetic body 70 to vibrate due to the elastic force (urging force) generated in the elastic support part 60, giving the user a tactile sensation.

[0074] In this manner, in the vibration actuator 10 , the flat, annular coil 50 and the disk-shaped magnetic pole portion 34 disposed inside the coil 50 are disposed on the flat, plate-shaped magnetic core body 32 .

[0075] The magnetic core body 32, coil 50 and magnetic pole portion 34 are arranged opposite a flat magnetic body 70 having a spacer 90 and a magnetic yoke 80 via a flat elastic support portion 60, and are supported so as to be able to move freely in the approaching and separating directions.

[0076] With this configuration, the elastic support members 60 are arranged on the thin-plate magnetic core body 32 in positions surrounding the coil 50 and magnetic pole portions 34, and the magnetic yoke 80 is arranged in layers on the elastic support members 60 via spacers 90. In other words, the vibration actuator 10 is composed of only the height of the stacked layers of the magnetic core body 32, the layer including the coil 50, magnetic pole portions 34, and elastic support members 60, the layer of spacers 90, and the layer of the magnetic yoke 80 in the thickness direction. In this way, assembly accuracy is determined by the overlapping of parts, making high-precision assembly possible.

[0077] Furthermore, the vibration actuator 10 has a thin plate configuration (a thinner flat plate compared to a configuration in which the coil 50, magnetic pole portion 34, and elastic support portion 60 are stacked), which allows for space saving in placement space.

[0078] Furthermore, in the vibration actuator 10, the movable range of the elastic support member 60 can be secured as a movable gap DG by the thickness of the elastic support member 60. Furthermore, the thickness of the spacer 90, together with the thickness of the elastic support member 60 and the thickness of the magnetic pole member 34, sets the air gap G between the magnetic pole faces where the electromagnet member 20 and the magnetic body 70 attract each other. The air gap G secures the vibration characteristics of the vibration actuator, which is the movable range of the elastic support member 60 that moves the core member 30 of the electromagnet member 20 and the magnetic yoke 80 closer to or farther apart.

[0079] In this way, it is possible to have suitable vibration characteristics without having to provide separate components for forming each of the movable gaps DG and air gaps G, and it is possible to achieve further thinning with a simple configuration, easier assembly, and lower costs.

[0080] Furthermore, because the elastic support member 60 is a leaf spring with a high manufacturing precision in thickness, variations in the gap between the magnetic core body 32 and the spacer 90 are suppressed, resulting in a stable gap, ensuring the movable gap DG and enabling the setting of the gap G. Furthermore, in the vibration actuator 10, the direction of the current flowing circumferentially through the coil 50 may be either rightward or leftward.

[0081] In the vibration actuator 10, the elastic support member 60 elastically supports the electromagnet member 20 and the magnetic body 70 by connecting them so that they can move relatively. That is, it is possible to use a configuration in which one of the magnetic body 70 and the electromagnet member 20 is fixed and the other is movable relative to the other. For example, the vibration actuator 10 can be configured such that a second planar member (a planar member including an electromagnet and a magnetic core) having the electromagnet member 20 is arranged opposite a first planar member corresponding to the magnetic body 70 in a direction perpendicular to the surfaces of both, and the two can move relatively toward and away from each other via the elastic support member 60.

[0082] <Driving Principle of Vibration Actuator 10> The driving principle of the vibration actuator 10 is briefly described below. The vibration actuator 10 can also be driven by generating a resonance phenomenon using pulses based on the following equations of motion and circuit equations. Note that the operation is not resonant driving, but rather expresses the operational feel of a trackpad (see FIG. 40 ) serving as the vibration presentation device 500. For example, the vibration actuator 10 may be driven by inputting a single or multiple current pulses via a control unit (not shown). The vibration actuator 10 may also vibrate the movable part by supplying power from an AC power source to the coil 50 via the control unit, thereby inputting a sine wave or cosine wave voltage to the coil 50. It is preferable that an AC voltage be applied to the vibration actuator 10, and the vibration actuator 10 generates vibrations when a sine wave drive signal is input to the coil 50.

[0083] In the vibration actuator 10, if the electromagnet section 20 is a fixed surface fixed to the housing, and the movable section supported so as to be able to vibrate relative to it is the magnetic body 70, the magnetic body 70 will perform reciprocating motion based on equations (1) and (2). In addition, even if the electromagnet section 20 is the movable section and the magnetic body 70 has a fixed surface that is fixed to the housing, the movable object will be swapped to satisfy similar equations (1) and (2) and perform reciprocating motion.

[0084]

[0085]

[0086] That is, the mass m [kg], the displacement x(t) [m], the thrust constant K ｆ [N / A], current i(t) [A], spring constant K ｓｐ [N / m], damping coefficient D [N / (m / s)], etc. can be changed as appropriate within the range that satisfies formula (1). In addition, voltage e(t) [V], resistance R [Ω], inductance L [H], back electromotive force constant K ｅ [V / (rad / s)] can be changed as appropriate within a range that satisfies formula (2).

[0087] In this way, the vibration in the vibration actuator 10 is generated by the mass m of the magnetic body 70 (or the electromagnet portion 20) and the spring constant K of the metal spring (a leaf spring in this embodiment) serving as the elastic support portion 60. ｓｐ The vibration generated by the vibration actuator 10 can be set and changed by the input voltage (for example, a pulse, sine waveform, or cosine waveform voltage).

[0088] Furthermore, in the vibration actuator 10, the magnetic core body 32 and the elastic support portion 60 are joined together, and the elastic support portion 60 and the magnetic body 70 (or the electromagnet portion 20) are joined together using a fastening member such as an adhesive or welding. Screws may also be used as fastening members.

[0089] <Drive Circuit for Vibration Actuator 10> FIG. 8 shows an example of a drive circuit for the actuator body.

[0090] 8 is included in the control unit, for example. The drive circuit connects a current pulse supply unit (switching element) configured with a MOSFET (metal-oxide-semiconductor field-effect transistor) to an actuator ("Actuator") 10. In addition, the drive circuit has a port 1 ("Port-1") such as a signal generation unit (Signal generation) that applies a voltage pulse, a gate resistor RG, and a gate-source resistor RGS, and is connected to the current pulse supply unit.

[0091] In the control section, port 1 is connected to the gate of a MOSFET via gate resistor RG. The MOSFET is a discharge switch or the like, and is connected to a vibration actuator 10 (shown as [Actuator] in FIG. 8 ) to which voltage is supplied from a power supply section Vin, and a gate-source resistor RGS. An input voltage is shown in FIG. 9 as an example of an actuator drive signal input to the actuator 10.

[0092] When the input of the actuator drive signal is stopped, the vibration actuator 10 releases the biasing force, and the magnetic body 70 (or the electromagnet portion 20) moves in the other direction (the positive Z direction) due to the biasing force. The vibration actuator 10 vibrates the magnetic body 70 (or the electromagnet portion 20) by inputting and stopping the actuator drive signal. The vibration actuator 10 vibrates the magnetic body 70 (or the electromagnet portion 20) without using a magnet.

[0093] In this embodiment, the actuator drive signal corresponds to a drive current pulse (also referred to as a "current pulse") supplied to the coil 50 as a drive current for driving the movable part and the control device. In the vibration actuator 10, when a current pulse is supplied to the coil 50, the magnetic attraction force between the electromagnet section 20 and the magnetic body 70 causes the magnetic body 70 to move in one direction toward the electromagnet section 20, causing mechanical displacement, the supply of current is stopped, and then the magnetic body 70 is allowed to vibrate freely. The vibrations generated thereby are applied to the control device. The elastic support section 60 can control the displacement due to the magnetic attraction force and the free vibration period.

[0094] The actuator drive signal is generated by inputting a signal from a detection unit that detects the operator's operation. The detection unit may be, for example, a pressure sensor that detects the pressure caused by the operator's operation as a pressure signal and converts the pressure signal into an electrical signal for output. The detection unit may also be a capacitance type or a proximity sensor that detects the position of the operator's finger (pressing object) pressing the vibration presentation unit by detecting capacitive coupling between the operator's finger and the detection unit.

[0095] When the vibration actuator 10 is used in a contact-type input device, for example, it is desired that the vibration actuator 10 provide a sharp and suitable tactile sensation and force sensation when an operator touches and operates an operating device and generates vibrations to provide a touch operation feeling. In response to this, the vibration actuator 10 has an air vent 100, which increases the damping of vibration after actuation in order to improve the tactile sensation and force sensation. This reduces the so-called after-vibration vibration (also called "vibration after-vibration"), making the strength and weakness of the tactile sensation clearer and providing a sharp tactile sensation.

[0096] <Internal air flow during operation by air vent section 100> Fig. 10A is a partial cross-sectional view showing the internal air flow in an excited state, and Fig. 10B is a diagram showing the internal air flow in a non-excited state. The non-excited state shown in Fig. 10B is a state in which magnetic body 70 operates due to spring reaction force after excitation, and is a state in which core section 30 and magnetic body 70 move away from each other. Fig. 5 also shows the non-excited state before coil 50 is excited.

[0097] The vibration actuator has an electromagnet section 20 formed by laminating a flattened, annular coil 50 on the plate surface of a plate-shaped magnetic core (magnetic core body 32 of the magnetic core), and a magnetic yoke (magnetic member) 80. The magnetic yoke 80 has a lower surface that faces the coil 50 of the electromagnet section 20 from above.

[0098] Furthermore, a spacer is disposed between the magnetic core body 32 and the magnetic yoke 80 on the outside of the coil 50 to separate the magnetic yoke 80 and the electromagnet part 20 in the vertical direction. In addition, an elastic support part 60 is disposed on the outside of the coil 50 to connect the magnetic core body 32 and the spacer 90 or the magnetic yoke 80 and the spacer 90.

[0099] The magnetic body 70 (magnetic yoke 80) and the electromagnet section 20 (magnetic core body 32) have an air vent section 100 that closes the space between them in the vertical direction and creates an air flow (air flow) in the space along the plate surface when they are close to each other. The air vent section 100 directs the air flow from the outer periphery of the magnetic yoke 80 and the electromagnet section 20 to the outside. The air vent section 100 also directs the air flow from the outer periphery of the magnetic yoke 80 and the electromagnet section 20 to the inside. For example, the air vent section 100 forms an air flow that passes between the spacer 90 and the magnetic yoke 80 or the electromagnet section 20 to remove internal air to the outside or to introduce air from the outside to the inside.

[0100] The air vent section 100 is formed between the magnetic core body 32 and the magnetic body 70 in a closed manner so as to communicate with the outside only at the vent adjustment section 110. When the magnetic core body 32 and the magnetic body 70 move relative to each other, the air vent section 100 creates an air flow along the opposing surfaces of the magnetic core body 32 and the magnetic body 70, drawing air into the vibration actuator from the outside or venting air from the inside (internal space) of the vibration actuator to the outside.

[0101] The air vent section 100 obstructs the air flow along the surface direction (horizontal direction) when air moves inside and outside the vibration actuator, causing pressure fluctuations and applying a load to the area where the electromagnet section 20 and magnetic body 70 that make up the air vent section 100 face each other. This dampens the vibration of the moving magnetic body 70 (magnetic yoke 80), quelling the lingering vibration (vibration reverberation), and providing a crisp tactile sensation with clear differences in strength and weakness.

[0102] 5, the air vent portion 100 is provided between the outer circumferential portion 32a of the magnetic core body 32 and the magnetic body 70. Note that in this description, the vibration actuator 10 will be described as having a configuration in which the magnetic body 70 is a first planar body, and the planar body including the electromagnet portion 20 and the core portion 30 is a second planar body, and the second planar body can move toward and away from the surface of the first planar body in a direction perpendicular to the surface.

[0103] 5 , that is, before the coil is excited to drive the actuator, the air vent portion 100 is formed between the magnetic core body 32 and the magnetic body 70 along their opposing surfaces. In the excited state, that is, when the excited core body 30 attracts the magnetic body 70 (magnetic yoke 80) and brings them close to each other (see FIG. 10A ), the air vent portion 100 forms an air flow that flows along the opposing surfaces of the magnetic core body 32 and the magnetic body 70 and to the outside.

[0104] Furthermore, when the coil 50 changes from an excited state to a non-excited state, the core portion 30 and the magnetic body 70 are separated from each other by the reaction force of the elastic support portion 60, and an air flow is formed from the outside to the inside as shown in Figure 10B.

[0105] The air vent section 100 has a vent section 112 formed between the movable section (spacer 90) on the outside of the magnetic core body 32, a vent adjustment section 110 partitioned between the outer periphery 32a and the end 922 of the spacer 90, and an air flow bending section 114 and an internal passage 116 inside thereof.

[0106] The airflow adjusting portion 110 adjusts the airflow by the gap between the spacer 90 and the outer periphery of the magnetic core body 32 that is adjacent in the vertical direction. Specifically, the airflow adjusting portion 110 has a gap between the opposing surfaces of the end portion 922 of the spacer 90 and the outer periphery 32a of the magnetic core body 32. By adjusting this gap, the airflow adjusting portion 110 adjusts the amount of air that flows from the inside to the outside of the vibration actuator.

[0107] The spacer 90 constitutes a gap adjusting portion 110 together with the outer peripheral portion 32a, and also functions as an obstruction factor to the air flow.

[0108] The air flow bending portion 114 is disposed on the magnetic core body 32, inside the spacer 90, and on the outer circumferential side of the coil 50. The air flow bending portion 114 is an air passage that is continuous with the internal passage 116. The air flow bending portion 114 is formed by the side surface of the spacer 90 and the side surface of the coil 50, and bends the air flow in the air vent portion 100.

[0109] The internal passage 116 is defined between the upper surface of the coil 50 and the upper surface of the magnetic pole piece 34 and the magnetic yoke 80 .

[0110] In the vibration actuator 10, an air vent section 100 is formed in a labyrinth shape on the outer peripheral section 32a of the magnetic core body 32, and is made up of an air vent adjustment section 110 between the magnetic yoke 80, an air flow bending section 114, and an internal passage 116. The labyrinth-shaped gap is an uneven gap along the plate surface of the magnetic core body 32, and is a gap with a stepped bent shape, so that the air flow from the magnetic core body 32 along the plate surface is bent in the vertical direction partway along the way. The labyrinth-shaped air vent section 100 is not linear, but is formed between the magnetic core body 32 and the spacer 90 so as to bend in the vertical direction and extend in a direction perpendicular to the vertical direction.

[0111] The gap dimension between the spacer 90 and the magnetic core body 32 in the gap adjustment portion 110 is smaller than the gap dimension between the magnetic core body 32 and the magnetic yoke 80. Therefore, when the magnetic yoke 80 and the electromagnet 20 approach each other, air flows appropriately from the center to the periphery.

[0112] In the vibration actuator 10, when the coil 50 is energized and excited in the default state (the state shown in FIG. 5 ), which is a non-excited state before excitation, a magnetic attractive force is generated in the electromagnet portion 20. As a result, the magnetic body 70, which is the movable portion, approaches the magnetic core body 32 in the vertical direction, as shown in FIG. 6 . At this time, the air in the internal passage 116 is compressed, passes through the air flow bending portion 114, flows onto the outer periphery 32a of the magnetic core body 32, and moves radially outward from the outer periphery 32a. The air on the side of the escape adjustment portion 110 is exhausted via the escape adjustment portion 110 to the outside of the outer periphery 32a, i.e., from between the surface (fixing surface) to which the magnetic core body 32 is fixed and the spacer 90 (including the space formed by the thickness of the elastic support portion 60) to the outside of the vibration actuator 10.

[0113] The spacer 90 protrudes from the lower surface 82 of the magnetic yoke 80 and has a predetermined width in a direction perpendicular to the up-down direction. The spacer 90 is in close proximity to the outer circumferential portion 32a of the magnetic core body 32 at a surface having the predetermined width. The spacer 90 has a surface that completely surrounds the coil 50 and is included in the loss adjustment portion 110 together with the outer circumferential portion 32a.

[0114] The gap adjusting unit 110 can adjust the length (the length in the vertical direction, which is the vibration direction) between the end 922 of the spacer 90 and the outer periphery 32a when the magnetic yoke 80 of the magnetic body 70 is closest to the electromagnet unit 20 when air is discharged to the outside through the air flow bending portion 114. By making this adjustment, the gap adjusting unit 110 obstructs the flow of air from the inside to the outside. In this way, the gap adjusting unit 110 applies a load to the end 922 and the outer periphery 32a of the spacer 90, thereby damping the vibration of the magnetic body 70, which is a moving part.

[0115] The loss adjustment portion 110 is disposed on the outer periphery 32a of the magnetic core body 32, outside the coil so as to surround the coil 50, over the entire circumference. In other words, the loss adjustment portion 110 is disposed around the entire circumference of the portion where the magnetic pole portion 34 and the magnetic yoke 80 are attracted to each other.

[0116] As a result, when the vibration actuator 10 is in operation, air moves approximately uniformly in the radial direction or the reverse direction from the center of the vibration actuator 10 to the outside in the radial direction. This effectively damps vibrations of the movable part (magnetic body 70) including the magnetic yoke 80, which is a magnetic member relative to the electromagnet part 20, and allows the movable part to move up and down in a balanced manner relative to the electromagnet part 20.

[0117] For example, when the magnetic body 70 approaches the magnetic core body 32 upon excitation, the narrower the gap between the end 922 and the outer periphery 32a, the more the vibration of the magnetic body 70, in other words, the spring force caused by magnetic attraction, can be attenuated. In the gap adjustment portion 110, the gap dimension between the spacer 90 and the outer periphery 32a of the magnetic core body 32 is smaller than the gap dimension between the magnetic pole portion 34 of the magnetic core and the magnetic yoke 80. This allows for effective compression and discharge of air from the outer periphery 32 radially outward.

[0118] When compressed in the vertical direction, the air released from the inside to the outside is obstructed in both directions as it passes between the spacer 90 and the magnetic core body 32, thereby damping the vibration of the moving part. As a result, the release adjuster 110 adjusts the damping of the vibration of the magnetic body 70, suitably suppressing the lingering vibration and providing a suitable tactile sensation with clear differences in strength.

[0119] The air vent 100 allows air to move along the plate surface and circulate between the inside and outside of the vibration actuator 10 via the outer periphery (outer periphery 32a) of the vibration actuator 10. The air vent 100 connects the inner and outer regions that sandwich the space (bleed adjustment portion) between the frame-shaped main body 91 (more specifically, each side of the frame-shaped main body 91) to which the spacer joint 92 of the spacer 90 is continuous and the outer periphery 32a of the magnetic core body 32 in the radial direction.

[0120] The radially inner region is the region between the magnetic core body 32 and the magnetic yoke 80. The radially outer region is formed outside the outer periphery 32a (the region between the lower surface of the frame-shaped body 91 of the spacer 90 and the fixed surface, or the region of the thickness of the elastic support portion 60 between the fixed surface and the spacer 90 (the magnetic body 70 as the movable portion).

[0121] In this state, when the current is stopped, the leaf spring that is the elastic support member 60 generates a reaction force, and the movable member (magnetic body 70) moves in a direction away from the magnetic core body 32. The reaction force of the elastic support member 60 displaces the movable member (magnetic body 70) to a position beyond the default position, as shown in Fig. 10B. At this time, intake air flows from the outside to the inside between the magnetic core body 32 and the spacer of the movable member, and air accumulates in the internal passage 116.

[0122] FIG. 11A is a diagram showing the displacement of the movable part of this embodiment, and FIG. 11B is a diagram showing the displacement of the movable part in a configuration without an air vent part.

[0123] As shown in Figure 11A, in the vibration actuator 10, the displacement of the movable part (magnetic body 70) in a configuration having an air vent part 100 (graph G1) attenuates significantly over time compared to the displacement of the movable part in a configuration without an air vent part 100 (graph G2).

[0124] As a result, the vibration actuator 10 with the air vent section 100 in this embodiment can provide the operator with a tactile sensation that has a sharp ending (vibration) without any lingering vibration sensation, compared to a configuration without the air vent section 100.

[0125] (Embodiment 2) Fig. 12 is an external perspective view showing a vibration actuator according to embodiment 2 of the present invention with the magnetic yoke removed, Fig. 13 is a sub-assembly diagram of the vibration actuator, Fig. 14 is an exploded view of the vibration actuator, and Fig. 15 is a partial cross-sectional view of the vibration actuator.

[0126] The vibration actuator 10A according to the second embodiment is formed by partially modifying or adding to the configuration of the vibration actuator 10 according to the first embodiment, and when the components have the same functions as those described above, the same names and symbols are used and the explanation is omitted. Furthermore, components that have substantially the same functions are explained by the same names and symbols with the letter "A" added to the end.

[0127] As shown in the vibration actuator 10A according to embodiment 2 shown in Figures 12 to 15, in the vibration actuator 10 according to embodiment 1, another magnetic pole portion (external magnetic pole portion 36) may be provided on the magnetic core body 32 outside (radially outside) the coil 50A.

[0128] In addition to the core portion 30A having the magnetic core body 32A and the magnetic pole portion 34A, and the annular plate-shaped coil 50A, the vibration actuator 10A also has an electromagnet portion 20A including the external magnetic pole portion 36, a magnetic body 70 including a magnetic yoke 80 and a spacer 90, and an elastic support portion 60. The elastic support portion 60 supports one of the magnetic body 70 and the electromagnet portion 20A (more specifically, the magnetic core body 32A) in a balanced state perpendicular to the opposing direction (vibration direction) relative to the other, allowing them to move freely from one side to the other so as to approach each other.

[0129] When current is applied to the coil 50A, the electromagnet portion 20A and the magnetic body 70 generate a magnetic attraction force. The elastic support portion 60 supports the electromagnet portion 20A and the magnetic body 70 so that one of them can move closer to the other in the thickness direction.

[0130] The magnetic core body 32A is a rectangular, flat magnetic body similar to the magnetic core body 32, and has connecting and fixing portions 324A provided on a pair of opposing sides that protrude outward in the surface direction. The connecting and fixing portions 324A are joined to the core-side connecting portion 642 of the frame-shaped elastic support portion 60 on the radial outside of the magnetic core body 32A.

[0131] The elastic support portion 60 is disposed at a position surrounding the magnetic core body 32A and deforms in the Z direction.

[0132] The external magnetic pole portion 36 is a flat, annular magnetic body made of the same material as the magnetic pole portion 34A and is arranged to surround the outer periphery of the coil 50A. The external magnetic pole portion 36 is arranged on the magnetic core body 32A so that the coil 50A is sandwiched between the external magnetic pole portion 36 and the magnetic pole portion 34A, and is similarly connected to the magnetic core body 32A. The external magnetic pole portion 36 may be formed integrally with the magnetic core body 32A.

[0133] The coil 50A is provided on the substrate body 42A of the substrate part 40A, which is arranged on the magnetic core body 32A so as to avoid the magnetic pole part 34A and the external magnetic pole part 36 and expose them.

[0134] The substrate portion 40A has a substrate main body 42A formed of an insulating film and an extension portion 44A. The substrate portion 40A is an FPC, and the substrate main body 42A is configured from an annular insulating film disposed between the magnetic pole portion 34A and the outer magnetic pole portion 36. The extension portion 44A extends from a portion of the outer periphery of the substrate main body 42A.

[0135] The substrate part 40A has a substrate body 42A disposed on the magnetic core body 32A, and an extension part 44A extending out along the rear surface of the magnetic core body 32A through a slit 326 formed in the magnetic core body 32A. With this configuration, the extension part 44A does not interfere with the external magnetic pole part 36 on the magnetic core body 32A. Furthermore, since the substrate part 40A is a flexible printed circuit (FPC), it has an insulating function and allows for easy and reliable wiring to the coil.

[0136] According to this configuration, as shown in FIG. 15, the magnetic pole portion 34A and the external magnetic pole portion 36 in the core portion 30A are disposed opposite the magnetic body 70 and are positioned on the magnetic circuit.

[0137] Fig. 16 is a diagram showing the operation of the vibration actuator according to the second embodiment when the magnetic body (magnetic yoke) is moved, and Fig. 17 is a diagram showing the operation of the vibration actuator according to the second embodiment when the electromagnet portion is moved. As shown in Figs. 16 and 17 , when current is applied to the annular plate-shaped coil 50A, the magnetic pole portion 34A and the external magnetic pole portion 36 in the core portion 30A attract each other with a magnetic force (magnetic attraction) relative to the magnetic body 70. In other words, the air gap G with the magnetic body 70 is shortened by the magnetic convex-shaped magnetic pole portion 34A formed within the opening 51 of the annular plate-shaped coil 50A and the external magnetic pole portion 36 arranged on the outer periphery of the coil 50A. This further improves the magnetic circuit and increases the electromagnetic conversion efficiency.

[0138] (Embodiment 3) Fig. 18 is an external perspective view showing a vibration actuator according to embodiment 3 of the present invention with the magnetic yoke removed, Fig. 19 is a sub-assembly diagram of the vibration actuator, and Fig. 20 is an exploded view of the vibration actuator.

[0139] When vibration actuator 10B according to embodiment 3 has the same functions as components in vibration actuator 10 according to embodiment 1, the same names and symbols are used and their explanations are omitted. Components with the same names are basically made of the same materials. Furthermore, components with roughly the same functions are explained by using the same names and symbols with the letter "B" added to the end.

[0140] In the vibration actuator 10 of the first embodiment, the elastic support portion 60 or the spacer 90 may each be made up of a plurality of members.

[0141] In a vibration actuator 10B according to the third embodiment shown in FIGS. 18 to 20, the elastic support portions and spacers in the configuration of the vibration actuator 10 are each made up of a plurality of members.

[0142] The vibration actuator 10B has an electromagnet portion 20, an elastic support portion 60B including divided bodies of a plurality of elastic arm portions 66, 68, a magnetic yoke 80, and a spacer 90B including spacer pieces 96, 98.

[0143] The elastic arm portions 66 and 68 are arranged outside the magnetic core body 32 so as to surround the magnetic core body 32 and be capable of being deformed.

[0144] The elastic arm portions 66, 68 are formed in the same shape and are each a strip-like body bent into a U-shape, joined to the spacer pieces 96, 98 at the center portion 602 and joined to the connecting fixing portion 324 of the magnetic core body 32 at both end portions 604.

[0145] The elastic arm portions 66, 68 are arranged between the magnetic core body 32 and the spacer pieces 96, 98 in the thickness direction (Z direction) of the vibration actuator 10B, and are in a state of being bridged between the magnetic core body 32 and the spacer pieces 96, 98.

[0146] The thickness of the spacer pieces 96, 98 separates the elastic arm portions 66, 68 from the magnetic yoke 80. The thickness of the spacer pieces 96, 98, together with the thickness of the elastic arm portions 66, 68 (elastic support portion 60B) and the thickness of the magnetic pole portion 34, determines the air gap (corresponding to air gap G in FIG. 5, etc.) between the magnetic pole faces where the electromagnet portion 20 and the magnetic body 70B attract each other. The spacer pieces 96, 98 are provided on each of a pair of separated side portions of the magnetic yoke 80.

[0147] Because the elastic arm portions 66, 68 and the spacer pieces 96, 98 are separate bodies, the dimensions of the components themselves can be made smaller than if they were each constructed as a single member, which reduces the manufacturing costs of the elastic support portion 60B and the spacer 90B themselves, thereby realizing the vibration actuator 10B as a low-cost device.

[0148] (Embodiment 4) Fig. 21 is an external perspective view showing a vibration actuator according to embodiment 4 of the present invention with the magnetic yoke removed, Fig. 22 is a sub-assembly diagram of the vibration actuator, and Fig. 23 is an exploded view of the vibration actuator.

[0149] In vibration actuator 10C according to embodiment 4, when components have the same functions as those in vibration actuator 10 according to embodiment 1, the same names and symbols are used and explanations are omitted, and components with the same names are basically made of the same materials. Furthermore, components with approximately the same functions are explained by the same names and symbols with the letter "C" added to the end.

[0150] In the vibration actuator 10 of the first embodiment, when the electromagnet section is to be moved, a weight may be further provided on the electromagnet section 20 .

[0151] A vibration actuator 10C according to the fourth embodiment shown in Figures 21 to 23 has the same configuration as the vibration actuator 10, but has an external weight 38 surrounding the coil 50C on the magnetic core body 32C, radially outward from the coil 50C.

[0152] That is, the vibration actuator 10C has an electromagnet portion 20C, a magnetic body 70, and an elastic support portion 60.

[0153] The core portion 30C of the electromagnet portion 20C is arranged on a magnetic core body 32C, with a magnetic pole portion 34C arranged in a convex shape at the center, and a coil 50C arranged around the magnetic pole portion 34C.

[0154] The coil 50C is arranged in a state insulated from the magnetic core body 32C and the magnetic pole portion 34C via the substrate portion 40C. The substrate portion 40C has a planar substrate body 42C with an opening 43C and an extension portion 44C, which is inserted into a slit 326 in the magnetic core body 32C and extends from the back surface of the magnetic core body 32C. The substrate body 42C is arranged between the magnetic pole portion 34C and the external weight 38, and insulates the core portion 30C from the coil 50C.

[0155] The external weight 38 is formed in the shape of a circular flat plate and is disposed outside the coil 50C.

[0156] The external weight 38 is made of a high-density material such as phosphor bronze, SUS, tungsten, etc. With this configuration, when the coil 50C and the core portion 30C are used as the moving portion, the weight of the moving portion can be increased, and the vibration output can be increased, i.e., a higher output can be achieved.

[0157] (Embodiment 5) Fig. 24 is a perspective view of a vibration actuator according to embodiment 5 of the present invention, Fig. 25 is a sub-assembly diagram of the vibration actuator, and Fig. 26 is an exploded view of the vibration actuator.

[0158] Vibration actuator 10D according to embodiment 5 is formed by partially modifying and adding to the configuration of vibration actuator 10 according to embodiment 1, and has a disk-shaped outer shape. Therefore, when components have the same functions as those described above, they will be given the same names and reference numerals and their explanations will be omitted. Furthermore, components that have substantially the same functions will be explained by using the same names and reference numerals with the letter "D" added to the end.

[0159] 24 to 26, vibration actuator 10D according to embodiment 5 is formed in a disk shape, whereas vibration actuator 10 according to embodiment 1 is in the shape of a rectangular flat plate. It has a disk-shaped electromagnet portion 20D, an annular elastic support portion 60D, and a disk-shaped magnetic body 70D, and elastic support portion 60D supports electromagnet portion 20D and magnetic body 70D so that, when current is applied to coil 50D, one of electromagnet portion 20D and magnetic body 70D moves toward the other and vibrates.

[0160] In the electromagnet section 20D of the vibration actuator 10D, a disk-shaped magnetic pole section 34 is provided protruding from the surface of the center of a disk-shaped magnetic core body 32D, and a coil 50D is arranged around the magnetic pole section 34. Connecting and fixing sections 324D are provided on the outer periphery of the magnetic core body 32D at positions facing each other across the center, and a notch 322D is formed at 90° from the center relative to the connecting and fixing section 324D, in which an extending section 44D of the substrate section 40D is arranged. The notch 322D absorbs the thickness of the extending section 44D, contributing to a thinner overall vibration actuator 10D.

[0161] The core side connecting portion 642D is stacked and joined to the connecting fixing portion 324D, and a frame-shaped elastic supporting portion 60D is disposed so as to surround the magnetic core body 32D.

[0162] The elastic support portion 60D is an annular frame body and has a core side connecting portion 642D that protrudes inward and is arranged opposite to the core side connecting portion 642D, and a yoke side connecting portion 622D that protrudes inward at an equal interval from the core side connecting portion 642D.

[0163] The magnetic body 70D has a disk-shaped magnetic yoke 80D corresponding to the elastic support portion 60D, and a spacer joint portion 92D configured in an annular shape, arranged point-symmetrically about the center, and joined to the yoke side joint portion 622D.

[0164] The spacer joint portion 92D is formed to protrude outward from the outer edge of the annular shape and is connected to the yoke-side connecting portion 622D. As a result, when the elastic support portion 60D is displaced downward, the yoke-side connecting portion 622D is also displaced downward, and further, the spacer joint portion 92D connected to this yoke-side connecting portion 622D is also displaced downward, and the spacer 90D also displaces downward accordingly. As the spacer 90D displaces, the magnetic yoke 80D on the spacer 90D is also displaced downward, and the magnetic body 70D is displaced appropriately.

[0165] The vibration actuator 10D is formed in a disk shape as a whole, so that the shape has fewer edges, which allows for improved precision.

[0166] The magnetic core body 32D and the spacers 90D are joined alternately to the elastic support portion 60D at equal intervals in the circumferential direction in a direction perpendicular to the vibration direction.

[0167] This allows one of the electromagnet portion 20D (more specifically, the magnetic core body 32D) and the magnetic body 70D to be supported in a balanced state perpendicular to the opposing direction (vibration direction) relative to the other, and to be freely movable from one to the other.

[0168] The electromagnet portion 20D and the magnetic body 70D generate a magnetic attraction force when current is applied to the annular coil 50D. The elastic support portion 60D moves and vibrates in the thickness direction so that one of the electromagnet portion 20D and the magnetic body 70D approaches the other.

[0169] The different components in the above embodiments, such as the external magnetic pole portion, the external weight, the plurality of spacers, and the plurality of elastic support portions (elastic arms), may be applied to other embodiments as appropriate.

[0170] Furthermore, in the vibration actuators 10, 10A, 10B, 10C, and 10D of each embodiment, a capacitance detection unit may be provided between the electromagnet unit 20, 20A, 20B, 20C, and 20D and the magnetic body 70, 70B, and 70D. Furthermore, a strain detection sensor having a strain gauge may be provided in the elastic support unit 60, 60D.

[0171] <Modification> Figure 27 is a diagram showing a modification of a vibration actuator according to an embodiment of the present invention. A vibration actuator 10E shown in Figure 27 is provided with a strain detection section (strain detection sensor) 14 and a capacitance detection section (proximity sensor) 16 as a proximity detection section in addition to the vibration actuator 10. Note that when detecting an operating load, the vibration actuator may be configured to have either the strain detection section 14 or the capacitance detection section 16.

[0172] The device has a strain detection unit 14 having a strain gauge. The strain detection unit 14 detects the strain of the elastic support unit 60 that is deformed when the magnetic body 70 serving as the movable part is pressed toward the bottom side of the opening (in the pressing operation direction). The detected strain is output to a control unit or the like, and the coil 50 is energized to attract and move the magnetic yoke 80 so that the amount of movement of the movable part (e.g., the magnetic body 70) corresponds to the strain.

[0173] Furthermore, when the vibration actuator 10E is disposed on the device housing so that an operating load generates strain in the spring that is the elastic support portion 60, it is also possible to detect the operating load.

[0174] Specifically, the distortion detection unit 14 is used to detect the operator's contact operation, that is, the amount of depression of the movable part (for example, the magnetic body 70).

[0175] The vibration period of the movable part (e.g., magnetic body 70) when a drive current pulse is supplied from port 1 (current pulse supply unit) may be adjusted based on the sensor detection result of the strain detection unit 14. In other words, the vibration generated by driving can be adjusted according to the strain detection result.

[0176] The capacitance detection unit 16 is provided on the magnetic core body 32 and detects a change in capacitance in the magnetic core body 32 due to movement of the magnetic body 70. The capacitance detection unit 16 may be provided in any manner as long as it detects the relative distance between the magnetic body 70 (magnetic yoke 80, spacer 90, etc.) and a part of the electromagnet part 20, i.e., the proximity.

[0177] As a result, the movable part detects a pressing operation by the operator, and the vibration actuator generates vibrations corresponding to the operation via the control unit, which are then applied to the operator. In this way, the vibration can be adjusted according to the capacitance detection result, and if the vibration actuator 10E is arranged so that the capacitance changes depending on the operating load, the operating load can also be detected.

[0178] Note that the vibration actuator 10E may be configured by adding a strain detection unit (strain detection sensor) 14 and a capacitance detection unit (proximity sensor) 16 as a proximity detection unit to the configuration of the vibration actuators 10A to 10H instead of the configuration of the vibration actuator 10. The vibration actuators 10A to 10H can achieve the same functions and effects as the vibration actuator 10E. Furthermore, all of the vibration actuators 10A to 10E have an air vent similar to the air vent 100 of the vibration actuator 10, and have the same functions and effects.

[0179] Sixth Embodiment FIG. 28 is an external perspective view of a vibration actuator 10 according to a sixth embodiment of the present invention, FIG. 29 is a sub-assembly diagram of the same vibration actuator, and FIG. 30 is an exploded view of the same vibration actuator.

[0180] Vibration actuator 10F according to embodiment 6 is formed by partially modifying and adding to the configuration of vibration actuator 10 according to embodiment 1. In the following description of vibration actuator 10F, components that are the same as those in vibration actuator 10 will be given the same names and reference numerals, and their description will be omitted. Furthermore, components that have substantially similar functions will be described by the same names and reference numerals with the letter "F" added to the end.

[0181] As shown in vibration actuator 10F according to embodiment 6 shown in Figures 28 to 30, in the configuration of vibration actuator 10, a communication hole 83 may be provided in the magnetic member (magnetic yoke 80) to connect the internal passage with the outside.

[0182] The vibration actuator 10F has a core portion 30 having a magnetic core body 32 and a magnetic pole portion 34, a circular plate-shaped coil 50 surrounding the magnetic pole portion 34, a magnetic body 70F including a magnetic yoke 80F having a communicating hole 83 and a spacer 90, and an elastic support portion 60.

[0183] A magnetic attraction force is generated between the electromagnet part 20 having the core part 30 and the coil 50 and the magnetic body 70F (particularly, the magnetic yoke 80F which is a magnetic member) by energizing the coil 50. The elastic support part 60 supports the electromagnet part 20 and the magnetic body 70 so that one of them can move closer to the other in the thickness direction, and in this case, supports the magnetic yoke 80 as a movable part so that it can move freely relative to the core part 30.

[0184] When the vibration actuator 10F is driven, the communication hole 83 allows internal air to circulate between the inside and outside of the vibration actuator via the outer periphery, thereby obstructing the force that moves the magnetic body 70F and adjusting the amount of movement of the magnetic body 70F.

[0185] Fig. 31A is a partial cross-sectional view showing the flow of internal air in an excited state, and Fig. 31B is a diagram showing the flow of internal air in a non-excited state. Note that the excited state of the vibration actuator shown in Fig. 31A shows the time when thrust is generated, and the non-excited state of the vibration actuator in Fig. 31B shows the time when a spring reaction force is generated, and shows a state in which the magnetic body 70 is separated as far as possible from the magnetic core body 32 due to the reaction force of the elastic support member 60. Also, for convenience, the extension portion 44 of the wiring portion is omitted from Figs. 31A and 31B.

[0186] The communication hole 83 is disposed at a position facing the second planar body when the magnetic body 70F is defined as a first planar body. Specifically, the communication hole 83 is disposed at a position facing the central magnetic pole portion 34 of the magnetic core body 32 in the magnetic body 70F (magnetic yoke 80F and spacer 90).

[0187] The communication hole 83 functions as part of an air vent portion 100F that is formed in the same manner as the air vent portion 100.

[0188] In the vibration actuator 10F, the communication hole 83 is provided so as to communicate after the void portion 112, void adjustment portion 110, air flow bending portion 114, and internal passage 116, which communicate in this order from the outside to the inside of the magnetic core body 32. The void portion 112, void adjustment portion 110, air flow bending portion 114, and internal passage 116 are all included in the air void portion 100F.

[0189] As a result, the air vent 100F is formed so as to communicate with the surface side of the central portion and the outer periphery within the vibration actuator 10F.

[0190] The air vent portion 100F is formed between the magnetic core body 32 and the magnetic body 70F in a closed manner (to form a closed internal space) so that only the air vent adjusting portion 110 communicates with the outside.

[0191] 31A , the air vent 100F closes the space between the magnetic yoke 80F and the electromagnet 20 in the vertical direction, and when they are close to each other, creates an air flow in the space along the plate surface. The air vent 100F directs the air flow from the outer periphery of the magnetic yoke 80F and the electromagnet 20 (the outer periphery 32a of the magnetic core body 32) to the outside.

[0192] The air vent section 100F is formed in a labyrinth shape, similar to the air vent section 100, and releases air to the outside through both the communication hole 83 on the surface side of the central part of the magnetic yoke 80F and the vent adjustment section 110 formed by the outer peripheral part 32a of the magnetic core body 32.

[0193] The air vent portion 100F takes in air from the outside to the inside in the default state in which it is in an unexcited state, or in the unexcited state in which the magnetic yoke 80F shown in Figure 31B is separated from the magnetic core body 32 or separated at the maximum distance.

[0194] The internal air is compressed in the vertical direction by driving, and the resulting air flow passes through the gap between the spacer 90 and the magnetic core body 32 (the gap adjustment portion 110) and through the communication hole 83. When the air passes through the gap adjustment portion 110, the flow is obstructed by the spacer 90 and the magnetic core body 32, causing pressure fluctuations between the opposing surfaces of the electromagnet portion 20 and the magnetic body 70F, thereby damping the vibration of the magnetic body 70F. Furthermore, when the air passes through the communication hole 83, the vibration of the magnetic body 70F is further damped.

[0195] In this way, the air vent portion 100F damps vibrations caused by the reciprocating movement of the magnetic core body 32 and the magnetic body 70F relative to the surface of the magnetic core body 32 in the direction perpendicular to the surface and in the direction of approach and separation.

[0196] It is preferable that the communication holes 83 are arranged symmetrically in a plan view on the vibration actuator 10F or the magnetic yoke 80F.

[0197] The communication hole 83 allows for more detailed adjustment of the damping in addition to the vibration damping provided by the displacement adjustment section 110. This allows the vibration actuator 10F to adjust the amount of damping of the vibration of the magnetic body 70F.

[0198] In this way, the vibration actuator 10F damps the vibration of the moving magnetic body 70 (magnetic yoke 80), and like the other vibration actuators 10, 10A to 10E, it can suppress the lingering vibration (vibration reverberation) that occurs when a contact operation is performed, thereby providing a sharp tactile sensation with clear differences in strength.

[0199] Seventh Embodiment FIG. 32 is a sub-assembly diagram of a vibration actuator according to a seventh embodiment of the present invention, and FIG. 33 is an exploded view of the same vibration actuator.

[0200] Vibration actuator 10G according to embodiment 7 is formed by partially modifying and adding to the configuration of vibration actuator 10 according to embodiment 1. In the following description of vibration actuator 10G, components that are the same as those in vibration actuator 10 are given the same names and symbols and explanations thereof are omitted, and components that include substantially similar functions are described by the same names and symbols with the letter "G" added to the end.

[0201] As shown in the vibration actuator 10G according to embodiment 7 shown in Figures 32 and 33, in the configuration of the vibration actuator 10 according to embodiment 1, a communication hole 39 may be provided in the core portion 30G to connect the internal passage 116 (see Figure 34) with the outside.

[0202] The vibration actuator 10G has the same configuration as the vibration actuator 10, except for the configuration of the electromagnet section 20G. In addition to the coil 50 and the substrate section 40, the electromagnet section 20G has a through hole 39 in a core section 30G that is formed in a thin plate shape and is excited so as to be magnetized in the thickness direction (Z direction).

[0203] In addition to the core portion 30G, the vibration actuator 10G, like the vibration actuator 10, has an electromagnet portion 20G including an annular plate-shaped coil 50 surrounding a magnetic pole portion 34G and a substrate portion 40. The vibration actuator 10G also has a magnetic body 70 including a magnetic yoke 80 and a spacer 90 that are movable relative to the electromagnet portion 20G, and an elastic support portion 60 that movably connects the magnetic body 70 to the electromagnet portion 20G.

[0204] The communication hole 39 of the core portion 30G is formed in the center of the core portion 30G. The core portion 30G has a magnetic core body 32G which is a magnetic plate, and a magnetic pole portion 34G arranged on the upper surface of the magnetic core body 32G.

[0205] A through hole 320 is provided in the center of the magnetic core body 32G, and a through hole 342 that communicates with the through hole 320 is provided in the center of the magnetic pole portion 34G. The through holes 320, 342 form a communication hole 39 in the core portion 30G, and the communication hole 39 communicates with the internal passage 116 (see Figures 34A and 34B) of the vibration actuator 10G. The through holes 320, 342 are formed, for example, as circles of the same diameter.

[0206] A magnetic attraction force is generated between the electromagnet portion 20G having the core portion 30G and the coil 50 and the magnetic body 70 (particularly, the magnetic yoke 80, which is a magnetic member) when current is applied to the coil 50. The elastic support portion 60 supports the electromagnet portion 20G and the magnetic body 70 so that one of them can move closer to the other in the thickness direction. The elastic support portion 60 movably supports the magnetic yoke 80 as a movable portion relative to the core portion 30G, for example.

[0207] The communication holes 39 allow internal air to circulate between the inside and outside of the vibration actuator via the outer periphery when the vibration actuator 10G is driven, thereby adjusting the amount of damping of the vibration that moves the magnetic body 70.

[0208] Fig. 34A is a partial cross-sectional view showing the flow of internal air in an excited state, and Fig. 34B is a diagram showing the flow of internal air in a non-excited state. Note that the excited state in Fig. 34A shows the time when thrust is generated, and the non-excited state of the vibration actuator in Fig. 34B shows the time when a spring reaction force is generated after the coil is excited. Fig. 34B shows the state in which the magnetic body 70 is moved as far away as possible from the magnetic core body 32 by the reaction force of the elastic support member 60. Also, for convenience, the extension portion 44 of the wiring portion is omitted from Figs. 34A and 34B.

[0209] The communication hole 39 is provided in the electromagnet portion 20G, and is disposed in the center of a second planar body that faces the first planar body when the magnetic body 70 is defined as a first planar body. Specifically, the communication hole 39 is provided in the center of the second planar body in the vibration actuator 10 that is rectangular in plan view, and functions as part of the air vent portion 100G that is formed in the same manner as the air vent portion 100.

[0210] In the air vent 100G, the magnetic yoke 80 and the electromagnet part 20G substantially close the space between them in the vertical direction (opening at the outer periphery and through-hole 39 when they are separated), and when they are close together, an air flow is formed in the space in a direction along the plate surface. The air vent 100G directs the air flow from the magnetic yoke 80 and the outer periphery 32 of the electromagnet part 20G to the outside.

[0211] In the vibration actuator 10G, the communication holes 39 are provided in the vent portion 112, the vent adjustment portion 110G, the air flow bending portion 114, and the internal passage 116, which are connected in this order from the outside to the center of the magnetic core body 32G, so as to communicate with the internal passage 116. The air vent portion 100G has the vent portion 112, the vent adjustment portion 110G, the air flow bending portion 114, the internal passage 116, and the communication holes 39.

[0212] As a result, the air vent 100G is formed so as to communicate with the rear surface of the central portion within the vibration actuator 10G and the outer periphery. When the vibration actuator 10G is fixed to a fixing surface of a product or the like, it is preferable to fix it so that the central communication hole 39 of the magnetic core body 32G is not blocked from the outside.

[0213] When the vibration actuator 10G is driven and the magnetic yoke 80 approaches the magnetic core body 32G, the air vent portion 100G releases the internal air to the outside while damping vibrations caused by the relative movement of the magnetic yoke 80 to the magnetic core body 32G, as shown in Fig. 34A. The air vent portion 100G is formed in a labyrinth shape, like the air vent portion 100, and includes labyrinth-shaped gaps.

[0214] The air vent section 100G releases the internal air between the magnetic core body 32G and the magnetic yoke 80 to the outside through both the communication hole 39 on the back side of the center of the magnetic yoke 80 and the air vent adjustment section 110G formed by the outer periphery 32a of the magnetic core body 32G.

[0215] The communication hole 39 can adjust the amount of air discharged in addition to adjusting the flow rate (amount of air discharged) of the air discharged by the air release adjusting portion 110G.

[0216] The air vent portion 100G takes in air from the outside when the magnetic yoke 80 is in a non-excited state in which it is separated from the magnetic core body 32G or separated at the maximum distance as shown in Fig. 34B. Note that the air vent portion 100G takes in air from the outside in the default state, which is a non-excited state before the coil is excited or after movement due to the reaction force of the spring after excitation.

[0217] In vibration actuator 10G, the internal air is compressed in the vertical direction when driven, and passes through the gap between the spacer and magnetic core body 32G (bleed adjustment portion 110G) and through communication hole 39. When the air passes through the bleed adjustment portion 110G, its flow is obstructed by the spacer 90 and magnetic core body 32G, damping the vibration of magnetic body 70, and when the air passes through communication hole 39, it can further dampen the vibration.

[0218] The air vent portion 100G damps vibrations by taking in and discharging internal air as the magnetic core body 32G and the magnetic body 70G move back and forth relative to each other in a direction perpendicular to the surface of the magnetic core body 32G toward and away from each other.

[0219] By damping the vibration in this manner, like the other vibration actuators 10, 10A to 10F, the lingering vibration that occurs when a touch operation is performed, in other words, the lingering vibration, is reduced, and a sharp tactile sensation with a clear difference in strength can be imparted.

[0220] The communication hole 39 can adjust the damping of vibration in more detail in addition to the adjustment of damping of vibration by the release adjustment portion 110G.

[0221] This allows the slippage adjusting section 110G to adjust the amount of attenuation of the biasing force that moves the movable section (magnetic body 70).

[0222] The through holes 342, 320 may have any shape or size as long as they are in communication with each other. It is preferable that the communication holes 39 are arranged symmetrically in the vibration actuator 10G or the magnetic core body 32G when viewed from the bottom. Furthermore, multiple communication holes 39 may be provided in the electromagnet portion 20G.

[0223] Eighth Embodiment Fig. 35 is an external perspective view of a vibration actuator 10H according to an eighth embodiment of the present invention, and Fig. 36 is a partial cross-sectional view taken along the line R-R in Fig. 35. Also, Fig. 37 is a sub-assembly diagram of the same vibration actuator, and Fig. 38 is an exploded view of the same vibration actuator.

[0224] Vibration actuator 10H according to embodiment 8 is formed by partially modifying the configuration of vibration actuator 10 according to embodiment 1. In vibration actuator 10H, components that have the same functions as the components described above are given the same names and reference numerals, and their explanations will be omitted. Note that in this and other embodiments, components with the same names as those in embodiment 1 are basically made of the same materials. Furthermore, components with approximately the same functions will be explained by the same names and reference numerals with the letter "H" added to the end.

[0225] As shown in the vibration actuator 10H according to embodiment 8 shown in Figures 35 to 38, the order of the elastic support member 60 and the spacer 90 stacked on the magnetic core body 32H in the vibration actuator 10 of embodiment 1 is reversed.

[0226] The vibration actuator 10H is constructed by stacking a spacer 90H, an elastic support member 60, and a magnetic yoke 80H in this order on a magnetic core body 32H. The vibration actuator 10H has an air vent 100H (see FIG. 36) inside.

[0227] Specifically, the vibration actuator 10H has an electromagnet portion 20H including a core portion 30H (magnetic core body 32H and magnetic pole portion 34H), a circular plate-shaped coil 50, and a spacer 90H, a magnetic yoke 80H (magnetic body 70H), and an elastic support portion 60.

[0228] The electromagnet portion 20H and the magnetic yoke 80H (magnetic body 70H) generate a magnetic attraction force when current is applied to the coil 50. The elastic support portion 60 supports one of the magnetic yoke 80H and the electromagnet portion 20H in a balanced state perpendicular to the opposing direction (the vibration direction, or thickness direction) relative to the other, allowing it to move freely from one to the other so as to approach the other. In the vibration actuator 10H, for example, the magnetic yoke 80H is fixed to a fixing surface of the product, and a gap a is formed between the magnetic yoke 80H and the magnetic core body 32H.

[0229] The magnetic core body 32H is a rectangular, flat-plate magnetic body having basically the same function as the magnetic core body 32. The magnetic core body 32H has a different shape in plan view from the magnetic core body 32 and is a square plate-like body.

[0230] A magnetic pole portion 34H is disposed in the center of the upper surface of the magnetic core body 32H, and a frame-shaped spacer 90H is disposed so as to surround the electromagnet portion 20H.

[0231] The spacer 90H has a frame-shaped main body 91 formed in a rectangular frame shape (square frame shape) and spacer joint portions 92 that extend outward from the opposing sides of the frame-shaped main body 91.

[0232] The upper surface of the spacer joint portion 92 is fixed to the core-side connecting portion 642 of the elastic support portion 60. The spacer 90H is interposed between the magnetic core body 32H and the elastic support portion 60 at a position perpendicular to the plate surface of the magnetic core body 32H. The spacer 90H separates the magnetic yoke 80H from the electromagnet portion 20H so that the magnetic yoke 80H can be moved up and down.

[0233] The spacer 90H supports the frame-shaped elastic support member 60 outside the spacer 90H in a deformable manner. With this configuration, the spacer 90H has a thickness sufficient to ensure a deformation area for the elastic support member 60 and a movement area for the magnetic yoke 80H that moves via the elastic support member 60.

[0234] The thickness of the spacer 90H, together with the gap between the elastic support portion 60 and the magnetic core body 32H, forms the gap between the magnetic yoke 80 and the coil 50 and the magnetic pole portion 34, i.e., the air gap, which allows the movable range of the magnetic yoke 80H in the vibration actuator 10H to be sufficiently set, thereby providing suitable vibration characteristics.

[0235] The spacer 90H has the advantage of being able to use a plate material with a thickness that allows for easy setting of accurate dimensions, and is made of a non-magnetic material, but may also be made of a magnetic material. The spacer 90H is formed of a high-precision steel plate, for example, an austenitic stainless steel strip for springs manufactured by cold rolling. As with the spacer 90, the spacer 90H can increase the degree of freedom of the elastic members, such as leaf springs, used in the elastic support portion 60 depending on the design of the spacer 90H.

[0236] The spacer 90H may also be formed using a high-specific-gravity material. The spacer 90H is disposed inside the outer periphery of the magnetic core body 32H. The maximum outer dimensions (dimensions in a plan view) of the vibration actuator 10H are determined by the outer dimensions of the magnetic core body 32H.

[0237] The elastic support portion 60 elastically supports the electromagnet portion 20H and the magnetic yoke 80H, which is the magnetic body 70H, by connecting them so that they can move relatively freely. Specifically, the elastic support portion 60 is disposed outside the coil 50, and connects the spacer 90H and the magnetic yoke 80H.

[0238] The elastic support portion 60 has a predetermined thickness (thickness in the Z direction) and is arranged in a layered form between the spacer 90H and the magnetic yoke 80H in the thickness direction (Z direction).

[0239] The elastic support portion 60 is joined to the spacer joint portion 92 at the core side connecting portion 642 , and is arranged so that the frame-shaped main body 91 of the spacer 90H, the coil 50 and the magnetic pole portion 34 are positioned inside the opening 61 .

[0240] The elastic support portion 60 has a pair of yoke-side connecting portions 622 on a pair of side portions 62 adjacent to a pair of opposing side portions 64. The yoke-side connecting portions 622 are connected to the yoke connecting portion 84 of the magnetic yoke 80H. The magnetic yoke 80H is disposed so that its center faces the magnetic pole portion 34H and the coil 50.

[0241] The yoke-side connecting portion 622 positions the magnetic yoke 80H (magnetic body 70H) in a stacked state in the Z direction.

[0242] 36, the elastic support member 60 elastically supports the yoke body 86, which is disposed inside the frame-shaped portion of the elastic support member 60, at a pair of portions (yoke-side connecting portions 622) on opposite sides of the frame-shaped portion. This allows the elastic support member 60 to support the magnetic yoke 80H in a well-balanced manner, allowing it to vibrate stably.

[0243] The yoke side connecting portion 622 and the core side connecting portion 642 are planar members formed to protrude inward from the side portions 62, 64 that constitute the frame portion of the elastic support portion 60. The yoke side connecting portion 622 and the core side connecting portion 642 are connected to the yoke connecting portion 84 and the spacer joint portion 92, respectively, in contact with each other in the Z direction, at the opposing side portions of the elastic support portion 60.

[0244] The yoke-side connecting portion 622 and the core-side connecting portion 642 are arranged at positions rotated 90 degrees from each other in the rectangular frame-shaped elastic support portion 60, and are configured to have the same length and the same width. This eliminates the need to determine the orientation of the elastic support portion 60 during assembly, improving assembly efficiency. Furthermore, because the elastic support portion 60 is a frame-shaped body, the spring length can be increased, ensuring stable assembly. Furthermore, because the elastic support portion 60 has an integrated structure, component precision can be improved.

[0245] The magnetic yoke 80H has the same function as the magnetic yoke 80, and when current is passed through the coil 50, the magnetic attraction force generated between it and the magnetic pole portion 34 causes it to attract the magnetic pole portion 34H in the excited state, and when it is not excited, it moves away from the magnetic pole portion 34H.

[0246] The magnetic yoke 80H is a flat magnetic body that is disposed facing and covering the magnetic pole portion 34H and the coil 50. A lower surface 82 of the magnetic yoke 80H faces the magnetic pole portion 34H and the coil 50 from above.

[0247] The magnetic yoke 80H has a rectangular plate-shaped yoke body 86 that is placed within the frame-shaped portion of the elastic support portion 60, and yoke connection portions 84 that protrude in the Y direction from a pair of parallel sides that are spaced apart in the Y direction of the yoke body 86. The magnetic yoke 80H is fixed in a suspended state on the elastic support portion 60 by joining the pair of yoke connection portions 84 to a pair of yoke side connection portions 622.

[0248] As shown in Fig. 36, the air vent 100H is provided between the electromagnet portion 20H and the magnetic yoke 80H serving as the magnetic body 70H, so as to communicate between the magnetic yoke 80H side and the interior of the vibration actuator 10H. In Fig. 36, the length a indicates the length from the fixed surface to the surface of the magnetic yoke 80H when the vibration actuator 10H attached to the fixed surface is in a non-excited state and the magnetic yoke 80H and electromagnet portion 20H are in their initial positions.

[0249] The air vent portion 100H allows air generated inside to escape to the outside when the magnetic yoke 80H and the electromagnet portion 20H move relative to the surface of the magnetic core body 32H in the direction perpendicular to the surface toward or away from the surface of the magnetic core body 32H.

[0250] Specifically, the air vent section 100H has a vent section 112H, a vent adjustment section 110H, and an air flow bending section 114H and an internal passage 116H inside the vent section 112H. The air vent section 100H is formed in a closed manner between the magnetic core body 32H and the magnetic yoke 80H, with communication with the outside only at the vent adjustment section 110H. Note that the air flow bending section 114H and the internal passage 116H are similar to the air flow bending section 114 and the internal passage 116 described above, and therefore a description thereof will be omitted.

[0251] The void portion 112H is formed between the outer side of the magnetic yoke 80H and the inner side of the elastic support portion 60. When the vibration actuator 10H is attached to a fixed surface, the void portion 112H is disposed on the fixed surface side.

[0252] The gap adjustment portion 110H is defined by the gap between the outer periphery 861 of the magnetic yoke 80H (yoke body 86) and the frame-shaped body 91 of the spacer 90H. Specifically, it is formed by the gap between the opposing surfaces of the outer periphery 861 of the magnetic yoke 80H and the frame-shaped body 91 of the spacer 90H. By adjusting this gap, the gap adjustment portion 110H adjusts the amount of air that is obstructed as it flows from the inside to the outside of the vibration actuator. This makes it possible to adjust the damping of vibrations in the moving part.

[0253] In the vibration actuator 10H, the air vent section 100H is configured as a stepped gap that is bent up and down and is made up of the thickness of the outer circumferential section 861 of the magnetic yoke 80H, the layer on the outer circumferential section 861 where the vent adjustment section 110H is located, the air flow bending section 114H, and the internal passage 116H. When the magnetic yoke 80H is attached to a fixed surface, the air vent section 100H forms a labyrinth-shaped gap together with the fixed surface.

[0254] Fig. 39A is a partial cross-sectional view showing the flow of internal air in an excited state, and Fig. 39B is a diagram showing the flow of internal air in a non-excited state. Note that the excited state of the vibration actuator shown in Fig. 39A shows the time when thrust is generated, and the non-excited state of the vibration actuator in Fig. 39B shows the time when a spring reaction force is generated, and shows a state in which the magnetic body 70H is separated as far as possible from the magnetic core body 32H due to the reaction force of the elastic support part.

[0255] When the vibration actuator 10H is driven and the magnetic yoke 80H approaches the magnetic pole portion 34H or the magnetic core body 32H, the air vent portion 100H releases air to the outside (outer vent portion 112H) via the vent adjustment portion 110H. The vent adjustment portion 110H includes the space between the outer peripheral portion 861 of the magnetic yoke 80H and the frame-shaped body 91 of the spacer 90H.

[0256] The air vent 100H, which is configured as a stepped gap bent up and down, creates an air flow along the surfaces of both the electromagnet 20H and the magnetic body 70H when they are in close proximity, causing pressure fluctuations between the opposing surfaces of the electromagnet 20G and the magnetic body 70H, and applying a load to them. This load not only obstructs the air flow, but also damps vibrations caused by the relative movement between the electromagnet 20G and the magnetic body 70H.

[0257] The air vent 100H obstructs and expels the internal air that is compressed when the air moves inside and outside the vibration actuator 10H, and can contain the lingering vibration (vibration lingering) of the electromagnet part 20H that moves relatively, giving a crisp tactile sensation.

[0258] The air vent section 100H releases the internal air present between the surfaces of the magnetic body 70H, which is the movable part, and the fixed part, to the outside when the core section 30H is in an excited state, i.e., when the excited core section 30H attracts and pulls in the magnetic body 70H, specifically the magnetic yoke 80H.

[0259] Furthermore, in the non-excited state (see FIG. 39B) where the magnetic yoke 80H is separated from the magnetic core body 32H by the maximum distance, the air vent portion 100H takes in air from the outside to the inside.

[0260] In the vibration actuator 10H, air is taken into the interior of the vibration actuator 10H in the default, non-excited state shown in FIG. 36 . In the vibration actuator 10H, when current is applied to the coil 50 in the default state (the state shown in FIG. 36 ) to excite it, a magnetic attraction force is generated in the electromagnet portion 20H. As a result, the magnetic yoke 80H, which is the movable portion, approaches the magnetic core body 32H or the magnetic pole portion 34H, as shown in FIG. 39A . At this time, the air in the internal passage 116H is compressed, passes through the air flow bending portion 114H, and flows toward the outer periphery 861 of the yoke body 86 of the magnetic yoke 80H, and moves radially outward from between the outer periphery 861 and the frame-shaped body 91 of the spacer 90H.

[0261] In other words, the internal air is discharged through the escape adjustment portion 110H to the radial outside of the outer periphery 861, that is, above the spacer 90 and outside the vibration actuator 10H outside the outer periphery 861 (including the space formed by the thickness of the elastic support portion 60).

[0262] The omission adjustment portion 110H adjusts the length (length in the Z direction, which is the vibration direction) between the frame-shaped main body 91 and the outer periphery 861 of the spacer 90H when the magnetic yoke 80H is closest to the core portion 30H when air is discharged to the outside from the air flow bending portion 114H. For example, when the magnetic yoke 80H is excited and approaches the core portion 30H, the narrower the gap between the outer periphery 861 and the frame-shaped main body 91, the more the air is obstructed, causing pressure fluctuations in the omission adjustment portion 110H and significantly damping vibrations on the electromagnet side, including the magnetic core body 32H.

[0263] In this way, in vibration actuator 10H, the internal air that is compressed in the vertical direction when driven passes between spacer 90H and magnetic yoke 80H (loosening adjustment portion 110H). When the internal air passes through loosening adjustment portion 110H, it is obstructed, and the vibration of the magnetic yoke 80H can be damped. By damping the vibration in this way, like the other vibration actuators 10, 10A to 10G, the lingering vibration that occurs when a touch operation is performed, in other words, the lingering vibration, is reduced, and a sharp tactile sensation with a clear difference in strength can be imparted.

[0264] <Vibration presentation device (contact-type input device) 500> Fig. 40 is a plan view showing an example of a vibration presentation device having a vibration actuator. For convenience, in Fig. 40, the planar track pad body that an operator presses with his / her finger is shown as transparent.

[0265] The vibration presentation device 500 is, for example, a track pad serving as a pointing device used in place of a mouse in a notebook computer or the like.

[0266] The trackpad as the vibration presentation device 500 is placed in a rectangular opening provided in the housing of a notebook computer or the like. The trackpad has a plate-shaped pad main body 510 that is traced with a finger for touch operation, a vibration actuator 10 placed on the back surface of the pad main body 510, and a frame part 520 that partitions the opening surrounding the vibration actuator 10.

[0267] The track pad generates vibrations that are felt by the vibration actuator 10 when a touch operation such as tracing or tapping the pad body 510 with a finger is performed. The vibration actuator 10 may be replaced with any of the vibration actuators 10A to 10H.

[0268] The vibration actuator 10 in the track pad has the magnetic body 70 attached to the back surface of the pad body 510, and directly drives the pad body 510 to apply vibration to the operator. Specifically, as shown in Fig. 40 , the back surface of the magnetic core body 32 is fixed as a fixed surface to the bottom 530 of the opening in the housing, the magnetic body 70 is fixed to the back surface of the pad body 510, and the pad body 510 is arranged above the opening to close the opening.

[0269] The pad body 510 is fixed to the magnetic body 70 via a double-sided tape or the like as a fixing material. In the configuration of the vibration presentation device 500, the vibration actuator 10 may be attached so as to indirectly drive the pad body 510 via the magnetic body 70 to impart vibration.

[0270] When a contact operation such as tracing or tapping the pad body 510 with a finger is performed, this operation is detected by a pressure sensor (not shown) (which may be a strain detection sensor (strain detection unit 14) or a proximity sensor 16), and the vibration actuator 10 may be driven based on a signal from this pressure sensor.

[0271] For example, a configuration may be used that uses a vibration actuator 10 having a pressure sensor (or a vibration actuator 10E having a proximity sensor 16 shown in FIG. 27). With this configuration, when an operator operates the pad main body 510, the pad main body 510 is pressed and displaced, which displaces the magnetic body 70, and this displacement is detected by the pressure sensor (or proximity sensor 16, etc.). That is, immediately after the start of operation, an input signal (actuator drive signal) is input to the vibration actuator in response to pressure detection, and the magnetic body 70 moves in the pressing direction (Z direction) and displaces downward. When the magnetic body 70 displaces downward, the reaction force of the elastic support part 60 causes it to move to a position equal to or higher than the operating reference position, which is its initial position. Accordingly, the pad main body also displaces.

[0272] Specifically, in the vibration presentation device 500, when an operator operates the trackpad by contacting the pad body 510 with a pressing object such as the pad of a finger, the vibration actuator 10 is driven to vibrate in response. This vibration provides the operator with a tactile sensation. For example, if the operation is to press a switch, the operator can be given the sensation of pressing the switch.

[0273] Furthermore, since the vibration actuator 10 is disposed on the back surface of the pad body 510, vibrations can be directly applied to provide an excellent tactile sensation. Furthermore, since the vibration actuator 10 is thin and flat, it does not occupy a large amount of space in the vibration presentation device (contact-type input device) 500 in which it is mounted, thereby improving the design of the contact-type input device.

[0274] Note that the vibration actuator 10 may be configured to impart various types of tactile sensations to the track pad corresponding to the displayed image operated by the operator, for example, when an electronic device equipped with a track pad is provided with a display unit such as a liquid crystal display. The vibration actuator 10 may generate vibrations to impart the tactile sensation of a mechanical switch corresponding to the image that is touched and operated. Examples of mechanical switches include tactile switches, alternate switches, momentary switches, toggle switches, slide switches, rotary switches, DIP switches, and rocker switches. Furthermore, for push-type switches, the tactile sensations of switches with different degrees of depression can be imparted.

[0275] In this way, the vibration presentation device 500 of this embodiment realizes a realistic tactile sensation, such as the feel of a switch, by realizing a realistic tactile sensation based on load detection. Of course, the vibration actuators 10A to 10H are driven by the same magnetic circuit (see FIGS. 8 and 9) and driving principle as the vibration actuator 10.

[0276] Furthermore, the vibration actuators in each of the embodiments and modifications include a magnetic body as a magnetic member and an electromagnet. Furthermore, the magnetic bodies 70, 70B, 70D, 70F, 70G, and 70H, as well as the magnetic bodies (magnetic members) described below, may be configured to include a magnetic material. For example, if the magnetic body is a first planar body, it may be configured to be driven in a direction perpendicular to the surface of the second planar body having the electromagnet portion (a direction perpendicular to both surfaces).

[0277] Furthermore, each of the following embodiments is formed by modifying or adding parts of the configuration of the vibration actuator 10 described above, and when the components have the same functions as those described above, they will be given the same names and symbols and will not be described again.

[0278] In the following description, the above-described components may be referred to by other names for convenience. These other names may also be used for the above-described components. Specifically, the configuration in which the coil 50 is disposed on the magnetic pole portion 34 may be referred to as an electromagnet portion, and the plate-shaped elastic portion (elastic support portion) may be referred to as an elastic body, based on their functions. Furthermore, specifically, the plate-shaped magnetic core body 32 of the core portion (magnetic core) may be referred to as a second planar body, a second magnetic body, or more specifically, a base. The spacer 90 may be made of a magnetic body and used as a yoke, or may be integrated with the magnetic yoke to form a magnetic member.

[0279] Regarding the materials of the components in the following embodiments, the coil is highly conductive, for example, made of copper. The core is made of a material with high magnetic permeability (a ferromagnetic material, simply referred to as a magnetic material), preferably made of SECC, silicon steel plate, SUS, or the like. The plate-shaped elastic portion and elastic body are preferably non-magnetic, and SUS, phosphor bronze, resin, rubber, or the like may be used as the non-magnetic material constituting the plate-shaped elastic portion and elastic body. The core portion (magnetic core) and base are preferably made of a material with high magnetic permeability, for example, SECC, silicon steel plate, SUS (ferromagnetic SUS), or the like. The spacer weight portion, weight, and weight plate are made of a material with a high specific gravity, such as phosphor bronze, SUS, or tungsten. Note that the above components may also include the components of embodiments 1 to 8.

[0280] Each of the following vibration actuators has the same basic configuration as vibration actuator 10. Each vibration actuator basically comprises a plate-shaped core portion (magnetic core main body, second planar body), a coil on the magnetic core, an elastic support portion connecting the core portion and the magnetic member, and a magnetic member (first planar body, magnetic yoke) having a lower surface facing the core from above.

[0281] The magnetic member facing the coil from above may be composed of a magnetic yoke alone, or a magnetic yoke and a spacer (magnetic yoke). The magnetic member and the electromagnet unit have an air vent that closes the space between them in the vertical direction and creates an air flow in the space along the plate surface when they are close to each other.

[0282] That is, each of the vibration actuators 10J-10M and 10P-10S described below basically includes a first planar body and a second planar body arranged opposite each other, and an elastic support portion that supports the first planar body and the second planar body so that they can move freely in the opposing direction, i.e., perpendicular to the surfaces. An air vent portion having the same function as the air vent portion described above is provided between the first planar body and the second planar body. The air vent portion includes a vent portion formed between the first planar body (e.g., a magnetic yoke or spacer) on the outside of the second planar body (e.g., a magnetic core body), a vent adjustment portion between the outer periphery of the second planar body and the end (outer periphery) of the first planar body, and an air flow bending portion and an internal passage inside the vent portion. Since each of the vibration actuators 10J-10M and 10P-10S includes an air vent portion, it has the same function as the vibration actuators having the air vent portions 100, 100F, 100G, and 100H described above.

[0283] Furthermore, in each of vibration actuators 10J to 10M and 10P to 10S, the amplitude of vibration of the magnetic member or core portion (first planar body or second planar body) caused by the electromagnet portion in the space formed between the electromagnet portion and the magnetic member or core portion is determined by the spring constant of the elastic support portion. The amplitude of vibration of the magnetic member or core portion in the space formed between the electromagnet portion and the magnetic member or core portion is determined by the thickness of the elastic body.

[0284] Furthermore, in each vibration actuator, when the elastic body (plate-shaped elastic portion) is a rectangular frame-shaped elastic body (frame body) as shown in vibration actuator 10 of the embodiment, the elastic body may support the core portion at one opposite side and be connected to the magnetic yoke at the other opposite side. In other words, the first planar body and the second planar body may be configured to be connected via the elastic support portion at points that are offset by 90°.

[0285] It should be noted that the vibration actuators 10J to 10M and 10P to 10S described below are formed by partially modifying or adding to the configuration of the vibration actuator 10 of embodiment 1. In the following description of vibration actuators 10J to 10M and 10P to 10S, components that are the same as those in vibration actuator 10 will be given the same names and reference numerals, and their description will be omitted. Furthermore, components that have substantially similar functions will be described by the same names, with the same reference numerals suffixed with "J to M, P to S."

[0286] (Embodiment 9) Fig. 41 is an external perspective view of a vibration actuator according to embodiment 9 of the present invention, and Fig. 42 is an exploded view of the same vibration actuator. Also, Fig. 43 is a plan view of the same vibration actuator, Fig. 44 is a plan view showing the internal configuration of the same vibration actuator, Fig. 45 is a bottom view of the same vibration actuator, and Fig. 46 is an exploded view showing the main parts of the basic configuration of the same vibration actuator. Also, Fig. 47 is a side cross-sectional view showing the wiring of the FPC of the same vibration actuator.

[0287] The vibration actuator 10J shown in Figures 41 to 47 differs from the vibration actuator 10 in the configuration of the magnetic core body 32J, substrate portion 40J, elastic support portion 60J, magnetic yoke 80J, and spacer 90J, but is otherwise similar in configuration.

[0288] The magnetic core body 32J, substrate portion 40J, elastic support portion 60J, magnetic yoke 80J, and spacer 90J each have the same basic configuration as the components of the same name in vibration actuator 10, and have the same functions and effects.

[0289] A magnetic attraction force (magnetic force) is generated between the electromagnet portion 20J having the core portion 30J and the coil 50 and the magnetic body 70J (both the magnetic yoke 80J and the spacer 90J are magnetic members, but particularly the magnetic yoke 80J) when current is applied to the coil 50. The magnetic attraction force causes one of the magnetic body (magnetic member) 70J and the core portion 30J having the magnetic pole portion 34 to move closer to the other and vibrate.

[0290] In the vibration actuator 10J shown in Figures 41 to 47, compared to the vibration actuator 10F, the communication hole 11J is provided not in the center of the magnetic yoke 80J, but near a pair of opposite sides of the outer periphery of the magnetic yoke 80J, and outside the electromagnet portion (coil 50).

[0291] In the configuration of the vibration actuator 10J, the communication hole 11J is provided in a magnetic body (magnetic member) 70J that includes a magnetic yoke 80J and a spacer 90J, and connects the internal passage of the vibration actuator 10J with the outside.

[0292] The communication hole 11J is formed by communication between a through hole 830 of the magnetic yoke 80J and a through hole 930 of the spacer 90J, which is a magnetic body.

[0293] As shown in FIG. 44, the communication hole 11J is provided at a position overlapping the yoke side connecting portion 622 of the elastic support portion 60J in a plan view.

[0294] As the vibration actuator 10J is driven, the communication hole 11J exhausts the internal air to the outside via the outer periphery and takes in air from the outside to the inside. At this time, the air inside and outside the vibration actuator 10J flows, inhibiting the biasing force that moves the magnetic body 70J and adjusting the amount of movement of the magnetic body 70J.

[0295] In the vibration actuator 10J, a magnetic core body 32J has plate-shaped extensions 324J that extend outward from the center of a pair of opposite sides of the outer periphery of the rectangular plate.

[0296] The plate-shaped extending portion 324J is provided with a window 350 through which the extending portion 44 of the substrate portion 40J can be inserted to avoid interference with the elastic support portion 60J. The plate-shaped extending portion 324J is provided with a fixing hole 328 for fixing the vibration actuator 10J to the product housing.

[0297] The elastic support portion 60J supports the electromagnet portion 20J and the magnetic body 70J so that one of them is displaceable in the thickness direction and moves closer to the other. Here, the electromagnet portion 20J is formed by attaching the substrate portion 40J and the magnetic pole portion 34 to the magnetic core body 32J. The vibration actuator 10J supports the magnetic body 70J (magnetic yoke 80J and spacer 90J) so that it can move freely relative to the electromagnet portion 20J via the elastic support portion 60J.

[0298] 45 to 47, the elastic support portion 60J has a rectangular frame shape, and as shown in Fig. 45 to Fig. 47, a yoke side connecting portion 622 is formed so as to protrude inward from a pair of opposing side portions 62. A positioning portion (semicircular portion) 65 is formed on the yoke side connecting portion 622.

[0299] The positioning portion 65 positions the magnetic core body 32J inside the elastic support portion 60J, and positions each pair of opposite sides of the elastic support portion 60J so that they can be connected to the magnetic core body 32J and the spacer 90J at positions rotated 90° from each other.

[0300] The positioning portion 65 is formed at a position offset from the communication hole 11J in plan view. As a result, the vibration actuator 10J does not have a through-path that penetrates the vibration actuator itself, maximizing the acting surface when air is compressed and enabling efficient compression to perform air damping in the air vent portion 100J when in motion.

[0301] 46 , in the vibration actuator 10J, the rectangular frame-shaped elastic support member 60J is joined to the spacer joining portion 92J of the spacer 90J at the yoke-side connecting portions 622 of a pair of opposite side portions 62 on the outside of the magnetic core body 32J (indicated by arrow A1). Meanwhile, the core-side connecting portions 642 of the other pair of opposite side portions 64 are joined to the plate-like extending portion 324J of the magnetic core body 32J above the window portion 350 (indicated by arrow A2).

[0302] The window portion 350 communicates with the air vent portion 100J. The extension portion 44 of the substrate portion 40J is inserted into and positioned in the window portion 350. As a result, the window portion 350 is positioned so that the extension portion 44 does not interfere with the core-side connecting portion 642, and a routing path can be secured using the thickness of the magnetic core body 32J.

[0303] In the vibration actuator 10J, the core portion 30J, which is the second planar body, is the fixed portion, the magnetic body 70J, which is the first planar body, is the movable portion, and the coil 50 and the substrate portion 40J are provided on the core portion 30J.

[0304] Here, in order to increase the weight of the movable portion, a part of the core portion 30J and the substrate portion 40J, or the core portion 30J itself and the substrate portion 40J, may be provided on the first planar body, that is, the magnetic body 70J. An example of such a configuration will be described with reference to Figs. 48 and 49.

[0305] Fig. 48 is an external perspective view of a first modified example of a vibration actuator according to the ninth embodiment of the present invention, and Fig. 49 is an external perspective view of a second modified example of a vibration actuator according to the ninth embodiment of the present invention. For convenience, Fig. 48 and Fig. 49 show a perspective view of the magnetic yoke 80K in each figure. In Fig. 48 and Fig. 49, the coil is provided on the back surface of the substrate body 42 of the substrate part 40K so as to face the magnetic core body 32K of the core part 30K.

[0306] For example, as shown in vibration actuator 10K in Figure 48, in the configuration of vibration actuator 10J, a substrate portion 40K configured similarly to substrate portion 40J and a coil 50 (not shown) may be fixed to the magnetic body 70K side, i.e., to a magnetic yoke 80K.

[0307] In the vibration actuator 10K, the substrate portion 40K and the coil (not shown) are fixed to the back surface of the magnetic yoke 80K so as to be positioned inside the spacer 90K. The magnetic pole portion 34 is attached to the magnetic core body 32K so as to be positioned inside the coil (not shown).

[0308] 49, in the configuration of the vibration actuator 10J, a substrate 40K and a core (not shown) configured similarly to the substrate 40J may be fixed to the magnetic body 70K, i.e., to the magnetic yoke 80K. Specifically, in the vibration actuator 10K, the substrate 40K, the coil (not shown), and the magnetic pole portion 34 are fixed to the back surface of the magnetic yoke 80K so as to be positioned inside the spacer 90K. In this way, in the vibration actuator 10K, the weight of the magnetic yoke 80K, which is the magnetic body 70K as the movable portion, can be increased by the weight of the substrate 40K and the core (coil, magnetic pole portion 34).

[0309] 50A is an external perspective view of a first modified example of a vibration actuator according to a tenth embodiment of the present invention, and Fig. 50B is an external perspective view of a second modified example of a vibration actuator according to the tenth embodiment of the present invention. Also, Fig. 50C is an external perspective view of a third modified example of a vibration actuator according to the tenth embodiment of the present invention.

[0310] As shown in vibration actuator 10L in FIGS. 50A to 50C, in vibration actuator 10J, the communication holes (communication holes 11L) in magnetic yoke 80L configured in the same manner as magnetic yoke 80J may be provided in any manner.

[0311] In the vibration actuator 10L shown in Figure 50A, in addition to through holes 830 formed along a pair of opposite sides of the first planar body (magnetic body 70L), a central through hole 832 is provided in the center as a communication hole 11J provided in the first planar body (magnetic body 70L).

[0312] The central through-holes 832 are disposed above and facing the magnetic pole portions 34, and communicate with the internal passage. As with the vibration actuators 100, 100F, 100G, and 100H of the other embodiments, the internal passage is formed between the upper surfaces of the coil 50 and the magnetic pole portions 34 and the magnetic yoke 80. Furthermore, since the vibration actuator 10L has the central through-hole 832, it has the same effects as the vibration actuator 10F shown in Figures 28 to 31, as well as the same effects as the vibration actuator 10J having the through-hole 830.

[0313] 50B , in the first planar body (magnetic body 70L), the communication hole 11L including the through-hole 830 has a plurality of slits 835 arranged radially (diagonally in this case) from the center. The slits 835 are arranged above and facing the core portion 30L (magnetic core body, magnetic pole portion 34) and coil 50, which are the second planar body, and function as part of the air vent provided in the vibration actuator 10L.

[0314] In addition, in the vibration actuator 10L shown in Figure 50C, the first planar body (magnetic body 70L) is provided with a communicating hole 11L having a through hole 830, a plurality of slits 835 arranged radially (here, diagonally), and a central through hole 832.

[0315] The through-hole 830, the central through-hole 832, and the slit 835 constitute the communication hole 11L and are respectively arranged in opposing positions above the core portion 30L, the coil 50, and the magnetic pole portion 34, which are the second planar body. The through-hole 830, the central through-hole 832, and the slit 835 communicate with the air vent portion.

[0316] In this way, one or more through holes such as the through hole 830, central through hole 832, and slit 835 that make up the communication hole 11L are provided in the first planar body (magnetic body 70L), communicate with the air vent portion, and function as part of the air vent portion. Then, by adjusting the opening dimensions, number, position, etc. of these communication holes, it is possible to adjust the amount of air damping inside the vibration actuator 10L when it is in operation.

[0317] In addition, the communication holes (through hole 830, central through hole 832, slit 835) 11L form an air flow path through the through holes, allowing the movable part (e.g., magnetic body 70L) to move accurately in the direction perpendicular to the surface relative to the fixed part (e.g., core part 30L).

[0318] Figures 51A and 51B are schematic diagrams showing the flow of internal air when a vibration actuator according to embodiment 10 of the present invention is driven by the repulsion of the elastic support members when suction is on and when suction is released (power is off). Figures 52A and 52B are schematic diagrams showing the flow of internal air when the same vibration actuator is configured without air holes and is driven by the repulsion of the elastic support members when suction is on and when suction is released (power is off). In Figures 51A, 51B and 52A and 52B, dashed arrows indicate the flow of compressed (exhaust) air, solid arrows indicate the flow of intake air, and the size and number of each arrow indicate the amount of air.

[0319] 51A and 51B show a state in which the vibration actuator 10L is mounted on a track pad of a vibration presentation device 500L. Similar to the track pad shown in Fig. 40, the track pad is placed in a rectangular opening 540 provided in the housing of a notebook computer or the like.

[0320] A plate-shaped pad main body 510 is disposed within the opening 540 so as to be movable in the vertical direction (towards and away from) the bottom 530. A vibration actuator 10L is attached to the rear surface of this pad main body 510.

[0321] In the vibration presentation device 500L of Figure 51A, the vibration actuator 10L shown in Figure 50A is mounted on the track pad in a so-called hanging manner, with the magnetic yoke 80L, i.e., the movable part side, facing downward and the core part 30 fixed to the pad main body 510.

[0322] The vibration actuator 10L shown in Fig. 51A has a central through-hole 832 in the magnetic yoke 80L, so that when driven (when current is applied), the magnetic yoke 80L is attracted and moves upward, performing the intake and exhaust shown in Fig. 51A. Inside, an air flow occurs via the central through-hole 832. For example, an air flow K1 occurs in the opening 540 in the central through-hole 832, and air in the space between the magnetic yoke 80L and the core portion 30L is exhausted and the air in the space therebetween is compressed.

[0323] 51B, the magnetic yoke 80L moves downward due to the repulsive force of the elastic support portion (not shown). At this time, an air flow K1 is generated in the opening 540 through each of the communication holes, including the central through-hole 832, and air is exhausted to the outside through the central through-hole 832 while being drawn into the interior through the horizontal gap.

[0324] In this way, the compression / intake volume decreases within the vibration actuator 10L (air vent section 100), and the exhaust position is stabilized by the air passing through the through-hole 832. Note that by adjusting the position, shape, and size of the communication hole (through-hole 832) that connects the inside and outside of the vibration actuator 10L, it is possible to rectify the air flow so as to correct movement in a straight line when driven in the perpendicular direction.

[0325] In contrast, in a configuration without a communication hole (central through-hole 832), the compression / intake is maximized during the movement shown in Figures 52A and 52B, but damping also acts on the surface of the bottom 530 within the opening 540. Also, due to the structure, the opening 540 is placed in a large space, and there is variation in damping during compression / intake, so the exhaust position may not be stable. Due to these factors, compared to a configuration with a communication hole (through-hole), there may be a decrease in tactile feel even when the damping effect is high.

[0326] These communication holes 11L (including communication holes other than those of this embodiment) may be provided with a valve portion having a valve function for adjusting the communication hole, either separately or by insert molding or the like.

[0327] By providing a valve unit having an openable / closable valve in the communication holes (11J, 11L), it is possible to control the behavior of air compression and exhaust by using it to compress air (during magnetic attraction) or suction (during repulsion of the elastic support unit 60L that occurs after the power is turned off). For example, when the vibration actuator L is used as a pump, the valve is opened during magnetic attraction, and the air is pushed up when the elastic support unit 60 repulses, thereby achieving the pump function.

[0328] Eleventh Embodiment FIG. 53 is an external perspective view of a vibration actuator according to an eleventh embodiment of the present invention, and FIG. 54 is an exploded view of the same vibration actuator.

[0329] In vibration actuators 10F to 10G and 10J to 10L, a communication hole is provided in at least one of the first planar body (magnetic body such as a magnetic yoke) and the second planar body (magnetic core body) to form an air flow path that communicates with the internal passage, but the air flow path may also be formed in other built-in components.

[0330] A vibration actuator 10M shown in FIGS. 53 and 54 has the same structure as the vibration actuator 10J of the ninth embodiment, except that the spacer 90M is changed to form an air flow path.

[0331] The vibration actuator 10M is different from the vibration actuator 10J in the configuration of the spacer 90M, but the other configurations are the same. Therefore, the same components are given the same names and symbols and the description will be omitted.

[0332] In the vibration actuator 10M, a spacer 90M is divided into two, and the layer where the spacer 90M is arranged has an air flow path M5 that communicates with the air vent section 100M and functions during air compression / intake. The air flow path M5 forms part of the air vent section 100M.

[0333] A spacer 90M consisting of two split pieces (901, 902) is arranged inside the elastic support portion 60M and above the plate-shaped magnetic core body 32M of the core portion 30M, with a gap equal to the thickness of the elastic support portion 60M.

[0334] The internal passage (air vent 100M) formed by sandwiching the spacer 90M between the magnetic core body 32M and the magnetic yoke 80M in the perpendicular direction is surrounded on all four sides by the elastic support member 60M. An air flow path M5 is arranged inside the elastic support member 60M, communicating with the space in which the coil 50 is arranged in the horizontal direction. Therefore, the air flow path M5 forms an air vent that connects the internal passage and the space between the elastic support member 60M and the magnetic core body 32M to the outside. The air damping effect can be adjusted via this air vent.

[0335] In the vibration actuator 10M, the air flow path M5 is formed by a spacer 90M obtained by dividing a spacer, but this is not limiting and the air flow path M5 may be formed by double-sided tape connecting the various components, or by an elastic support portion 60M. Furthermore, the air flow path 5M corresponding to a through hole may be formed by at least one of notches and holes formed in multiple locations and communicating with the internal passage.

[0336] 55 is an exploded view of a vibration actuator according to a twelfth embodiment of the present invention, and Fig. 56 is an exploded view of a first modified example of the vibration actuator according to the twelfth embodiment of the present invention. In a vibration actuator 10J or the like, a rectangular frame-shaped elastic support portion 60J is arranged between a plate-shaped core portion 30J, a plate-shaped magnetic yoke 80J, and a spacer 90M (which may be made of a magnetic material) that are arranged to face each other in the direction perpendicular to the surface.

[0337] In the vibration actuator 10J, the elastic support portion 60J is a leaf spring that connects the core portion 30J (second planar body), the magnetic yoke 80J, and the spacer 90M (magnetic body 70J and first planar body) in the direction perpendicular to the surface at each of a pair of adjacent opposite sides, but this is not limited to this.

[0338] For example, as in the vibration actuator 10N shown in FIGS. 55 and 56, the elastic support members 60N, 600N may be formed of a member that is capable of freely contracting and deforming as a spring.

[0339] The vibration actuator 10N in Fig. 55 has multiple elastic deformation portions 661 as the elastic support portion 60N, while the vibration actuator 10N in Fig. 56 has a single elastic support portion 600N. In the vibration actuator 10N, the electromagnet portion 20J is made up of the core portion 30J, substrate portion 40J, and coil 50. A magnetic body (planar body) 70J is attached to this electromagnet portion 20J, i.e., to the surface of the magnetic core body 32J, via the elastic support portions 60N, 600N, so as to be movable in the direction perpendicular to the surface.

[0340] In the vibration actuator 10N of Fig. 55, a plurality of elastic deformation portions 661 are interposed between the magnetic body 70J (magnetic yoke 80J and spacer 90J) which is the first planar body and the magnetic core body 32J, and at each of the four corners. In the vibration actuator 10N of Fig. 56, rectangular frame-shaped elastic deformation portions 600N are interposed between the magnetic body 70J which is the first planar body and the magnetic core body 32J, and are arranged along the outer periphery of each.

[0341] The elastic deformation portion 661 and the elastic support portion 600N are each made of a plate-like material that can contract and deform in the thickness direction, and may be made of, for example, an elastomer, specifically, silicon, rubber, foam, etc. The shape of the elastic support portions 60N (elastic deformation portions 661), 600N may be such that air damping is effectively applied and air flow paths are minimized.

[0342] (Embodiment 14) Fig. 57 is an external perspective view of a vibration actuator according to embodiment 14 of the present invention, Fig. 58 is an exploded view of the same vibration actuator, and Fig. 59 is a side view showing the mounting structure of the vibration actuator.

[0343] As with the vibration actuator 10P shown in Figures 57 and 58, in the configuration of the vibration actuator 10J, the magnetic yoke 80 may be removed and the object to which the vibration actuator 10P is attached may be made of a magnetic material, thereby providing the function of a magnetic yoke.

[0344] The core portion 30J of the vibration actuator 10P shown in Figures 57 and 58 is configured so that a spacer 90J is placed between the magnetic core body 32J and the elastic support portion 60J, and the upper surface of the coil 50 on the substrate portion 40J is positioned lower than the upper surface of the elastic support portion 60J.

[0345] The spacer 90J is fixed to the base end of the outer peripheral plate-like extension 324J on a pair of opposite sides of the outer periphery of the magnetic core body 32J at the lower surfaces of the spacer joints 92 on a pair of opposite sides constituting the rectangular outer periphery. The upper surfaces of the spacer joints 92 are joined to the lower surfaces of the core-side connection portions 642 on a pair of opposite sides (side portions 64) on the outer periphery of the elastic support member 60J. As a result, the elastic support member 60J is positioned outward in the X and Y directions to surround the spacer 90J, and is joined only at the core-side connection portions 624 that protrude inward.

[0346] That is, the vibration actuator 10P has an electromagnet portion having a flattened, annular coil 50 arranged facing below the magnetic member, and a plate surface of a plate-shaped magnetic core body 32J on which the coil 50 is arranged, a spacer arranged on the magnetic core body 32J outside the coil 50 and separating the magnetic core body 32J and the magnetic member in the vertical direction, and an elastic support portion 60J arranged outside the coil 50 and connected to the magnetic member and the spacer.

[0347] When the vibration actuator 10P is mounted on a product, such as a track pad, as shown in Figure 59, the core part 30J is fixed to the product body 530J on the back surface of the magnetic core body 32J by inserting a fastening member into the fixing hole 328 (see Figures 57 and 58).

[0348] The elastic support member 60J is fixed to the magnetic body 510P (see FIG. 59) to be attached by the yoke-side connecting portions 622 of the other pair of opposite side portions 62 (see FIGS. 57 and 58). The magnetic body 510P may be, for example, a part of the touchpad main body, or may be a member that is attached integrally to the touchpad main body.

[0349] 59, when the magnetic body 510P is attracted to the coil portion 50 and the magnetic pole portion 34 by the magnetic attraction force generated by energizing the coil 50, the elastic support portion 60J is deformed and displaced downward outside the spacer 90J in the X and Y directions. When energization is stopped, the magnetic body 510P moves upward due to the repulsion of the elastic support portion 60J, imparting a tactile sensation to the magnetic body 510P. With this configuration, when mounting the vibration actuator 10P, if the movable object is a magnetic body, the thickness of the vibration actuator 510P can be reduced, thereby reducing the installation space in the direction perpendicular to the surface.

[0350] This configuration reduces the number of parts and ensures the weight of the moving part. The spacer 90J may be made of either a magnetic or non-magnetic material. The amount of movement can be adjusted by adjusting the shape and thickness of the spacer 90J and the spring constant of the elastic support part (e.g., a frame-shaped leaf spring) 60J.

[0351] (Embodiment 15) Fig. 60 is an external perspective view of a vibration actuator according to embodiment 15 of the present invention, Fig. 61 is an exploded view of the same vibration actuator, and Fig. 62 is a side cross-sectional view of the same vibration actuator.

[0352] A vibration actuator 10Q shown in FIGS. 60 to 62 is a partially modified version of the vibration actuator 10J, in that the magnetic yoke in the vibration actuator 10J is box-shaped.

[0353] 60 to 62, a vibration actuator 10Q is provided on an electromagnet section 20J with a box-shaped yoke 80Q made of a magnetic material and having a box shape that opens toward the electromagnet section 20J. The box-shaped yoke 80Q is disposed so as to cover the coil 50, and a spacer joint section 92 is joined to the back surface of a top surface section 810 of the box-shaped yoke 80Q. In this way, the box-shaped yoke 80Q is fixed to the spacer 90J.

[0354] The top surface 810 of the box-shaped yoke 80Q has the same shape as the magnetic yoke 80J, and a spacer 90J is housed and fixed inside the box-shaped yoke 80Q. The peripheral wall portion of the box-shaped yoke 80Q that hangs down from the outer periphery of the top surface 810 is positioned outside the elastic support member 60J in the X and Y directions, allowing movement in the direction perpendicular to the surface (downward movement in FIG. 62).

[0355] The outer shape of the box-shaped yoke 80Q is larger than the outer periphery of the elastic support portion 60J, and the lower end of the peripheral wall portion of the box-shaped yoke 80Q is configured to be positioned outside the outer periphery of the elastic support portion 60J and on the elastic support portion 60J, and moves in the Z direction outside the outer periphery of the elastic support portion 60J.

[0356] The box-shaped yoke 80Q may be configured in any manner as long as it covers the elastic support member 60J, the coil 50, and the magnetic pole member 34. The lower end of the peripheral wall of the box-shaped yoke 80Q may be located outside the outer periphery of the elastic support member 60J and may be movable in the Z direction. The outer shape of the box-shaped yoke 80Q may be the same as the outer periphery of the elastic support member 60J. In this configuration, it is desirable that the lower end of the lower peripheral wall of the box-shaped yoke 80J (peripheral wall) be spaced apart from the elastic support member 60J in the Z direction (thickness direction) so as not to come into contact with the elastic support member 80J during operation.

[0357] Furthermore, by changing from a plate-shaped yoke to a box-shaped yoke 80Q, the coil 50 is surrounded by a peripheral wall, allowing for fine adjustment of the air damping between the coil 50 and the core portion 30J within the yoke. Furthermore, it is possible to prevent foreign matter from entering the vibration actuator 10Q. While the vibration actuator 10Q is configured with a box-shaped magnetic yoke 80Q that covers the electromagnet portion 20J, it is also possible to add and fix a separate member around the plate-shaped magnetic yoke 80J to form a box shape that surrounds the coil 50 on all sides in the X and Y directions. Alternatively, a separate member may be arranged to surround the magnetic yoke 80J, providing the same function during operation. These configurations can achieve the same effects as the box-shaped yoke 80Q.

[0358] Sixteenth Embodiment FIG. 63 is an exploded view of a vibration actuator according to a sixteenth embodiment of the present invention, and FIG. 64 is an external perspective view showing the internal configuration of the vibration actuator.

[0359] The vibration actuator 10R shown in FIGS. 63 and 64 differs from the vibration actuator 10J in the configuration of the spacer 90R.

[0360] The vibration actuator 10R has a spacer 90R that is composed of a first spacer 901 and a second spacer 902, with the function of the spacer 90J in the vibration actuator 10J being separated.

[0361] The first spacer 901 is a magnetic material and is disposed on the core portion 30J so as to surround the coil 50, and functions as part of the magnetic circuit of the electromagnet portion 20J together with the magnetic core body 32J and the coil 50. At this time, a gap is formed between the upper surface of the first spacer 901 and the lower surface of the magnetic yoke 80J, which is the first planar body, which defines the range of motion of the magnetic yoke 80J. The first spacer 901 and the second spacer 902 may be made of either a magnetic material or a non-magnetic material, and the materials are not limited.

[0362] The thicknesses of the first spacer 901 and the second spacer 902 may also be any thickness as long as the magnetic yoke 80J and the second planar magnetic core 30J can move relative to each other. The first spacer 901 and the second spacer 902 may be the same thickness. In this case, the thickness of the elastic support member 60J determines the range of movement of the movable member. To improve this range, the gap between the first spacer 901 and the magnetic member 34 and the magnetic yoke 80J is adjusted by changing the thickness of the second spacer 902. For example, to reduce the displacement of the movable member, the spring constant of the elastic support member 60J is increased (note that the thickness remains the same and only the shape is adjusted). To increase the magnetic attraction force of the magnetic core 30J, the thickness of the second spacer 902 is reduced to narrow the gap (note that the thickness of the elastic support member 60J is not reduced to ensure the spring constant). This increases the spring constant and reduces the volume of the second spacer 902, which is added as the weight of the moving part, thereby increasing the natural value (natural frequency) and making it possible to raise the resonance frequency. Also, by changing the second spacer 902 to a material with a higher specific gravity, the natural value can be adjusted.

[0363] The second spacer 902 is interposed between the yoke side connecting portion 622 of the elastic support portion 60J and the magnetic yoke 80J, connecting the two together.

[0364] As a result, the magnetic yoke 80J is disposed on the magnetic core body 32J with a gap of the thickness of the elastic support member 60J plus the thickness of the second spacer 902. Because the first spacer 901 and the second spacer 902 have the same thickness, the magnetic yoke 80J is disposed with a gap of the thickness of the elastic support member 60J from the upper surface of the first spacer 901 disposed on the magnetic core body 32J. The elastic support member 60J displaces within a range equivalent to the thickness of the elastic support member 60J, ensuring a range of motion for the magnetic yoke 80J.

[0365] In the vibration actuator 10R, the function of the spacer 90R is separated, and the second spacer 902 ensures a range of motion between the elastic support member 60J and the magnetic yoke 80J. Meanwhile, the first spacer 901 serves as a magnetic material to reinforce the magnetic circuit of the magnetic core body 32J.

[0366] Furthermore, if the first spacer 901 is made of a non-magnetic material, the first spacer 901 can be attached to the magnetic core body 32J to ensure increased rigidity of the magnetic core body 32J and, in turn, the core portion. In the vibration actuator 10R, the magnetic yoke 80J is used as the moving part, so the weight of the moving part is reduced. In this case, the connection target on the magnetic yoke 80J side can be used as the moving part weight, or the spring constant can be adjusted to adjust the tactile sensation provided by driving the vibration actuator 10R.

[0367] Seventeenth Embodiment Figure 65 is a perspective view of the appearance of a vibration actuator according to a seventeenth embodiment of the present invention. In the configuration of a vibration actuator 10J, the coil and magnetic pole core may have any shape. A vibration actuator 10S shown in Figure 65 differs from vibration actuator 10J in the shapes of a magnetic pole core 34S and a coil 50S.

[0368] The vibration actuator 10S comprises a plate-shaped magnetic core (core portion 30J, also referred to as the second planar body, including the magnetic core main body 32J), an elastic support portion that connects the magnetic core and the magnetic member, and a magnetic member (first planar body, magnetic yoke) having a lower surface that faces the core from above.

[0369] As shown in the vibration actuator 10S, the magnetic pole core 34S and the coil 50S are rectangular in shape. Because the magnetic pole core 34S and the coil 50S are rectangular, positioning is easier and assembly is easier by using corners compared to circular shapes, improving the ease of assembly. Furthermore, because the coil 50S is rectangular, a larger facing area can be secured with the magnetic member (magnetic yoke) or magnetic core that is the object of attraction, thereby realizing a more suitable magnetic circuit. The coil 50S (as well as the coils in all embodiments) may be made of round wire, rectangular wire, or the like.

[0370] 66 , the electromagnet section 20J in the vibration actuator 10J or the like is formed by attaching the magnetic pole section 34 to the magnetic core body 32J, and then attaching the coil 50 to a substrate section 40J, which is an FPC, on the magnetic pole core body 32J. At this time, the substrate section 40J is attached to the magnetic pole core body 32J so that the coil 50 is positioned around the magnetic pole section 34.

[0371] 67, after the magnetic pole portion 34 is attached to the magnetic core body 32J, the substrate portion 40J may be attached to the magnetic pole core body 32J, and then the coil 50 may be attached to the substrate body 42 of the substrate portion 40J. Note that the magnetic pole portion 34 may be attached to the magnetic pole core body 32J after the substrate portion 40J is attached to the magnetic pole core body 32J.

[0372] The height of the coil 50 when assembled in this manner may be either concave or convex with respect to the top surface of the magnetic pole portion 34. This is set based on the contact points of the opposing magnetic yoke (e.g., magnetic yoke 80J) when the movable portion is driven or during reliability tests such as impact endurance tests. For example, possible combinations of contact points include 1) the top surface of the magnetic pole portion 34 and the bottom surface of the magnetic yoke 80J, 2) the opposing surfaces of the coil 50 and the magnetic yoke, and 3) the opposing surfaces of the spacer or weight and the magnetic core body. Furthermore, when the gap between 1) to 3) is greater than the required range of motion, examples of possible contact points include 4) the opposing surfaces of the elastic support portion and the magnetic yoke, and 5) the opposing surfaces of the elastic support portion and the fixed portion.

[0373] (Substrate 40J) FIG. 68 is a plan view of the substrate to which the coil 50 is attached, and FIG. 69 is a diagram showing an example of the configuration of the substrate shown in FIG.

[0374] As shown in FIG. 68, the substrate section (particularly substrate section 40J) in the vibration actuator of this embodiment has the functions of protecting the attached coil 50 and of wiring the coil.

[0375] 69, the substrate portion 40J has a plurality of stacked layers 401 to 404. These layers 401 to 404 form a circular substrate main body 42 and an extension portion 44 extending from the substrate main body 42.

[0376] The substrate portion 40J is formed by overlaying an insulating layer 403 on a wiring layer 401, and attaching adhesive layers 405 and 407 to the front and back surfaces of the annular substrate main body 42 portion of this overlaid layer. The adhesive layers 405 and 407 are formed to correspond to the substrate main body 42 and have an annular shape. The adhesive layers 405 and 407 are formed of, for example, double-sided tape or layers made of adhesive, and are thin. The adhesive layer 406 is used to fix the extension portion 44 to the magnetic core main body or magnetic yoke, etc.

[0377] The wiring layer 401 has a wiring portion formed by plating on a flexible sheet. The wiring portion of the wiring layer 401 is provided with a conductive plate-shaped connection portion 401a made of copper foil or the like that connects to the terminal 501 of the coil 50, and a land 441 that connects to a connection target.

[0378] In this wiring layer 401, a planar heat dissipation portion 402 is provided so as to be located on the back surface of the coil 50 attached via an insulating layer 403. The heat dissipation portion 402 is formed from a material with high thermal conductivity, for example, copper foil.

[0379] The heat dissipation portion 402 is formed to correspond to the coil shape, for example, in an arc shape. Because the heat dissipation portion 402 is formed to correspond to the coil shape, it is possible to reinforce the rigidity of the wiring layer 401 and, in turn, the rigidity of the substrate portion 40J itself. In addition, the heat dissipation portion 402 is provided on the back surface side of the wiring layer so as to be exposed on the magnetic core body 32 side. This allows the heat dissipation portion 402 to come into contact with the magnetic core body 32J and dissipate heat more effectively.

[0380] (Variant example) For example, when one of the magnetic core body and the magnetic yoke is made a movable part between the magnetic core body and the magnetic yoke, the movable area may be appropriately provided via another member such as a spacer, thereby widening the internal passage which is the air vent part.

[0381] The embodiments of the present invention have been described above. Note that the above description is an example of a preferred embodiment of the present invention, and the scope of the present invention is not limited to this. In other words, the description of the configuration of the above device and the shape of each part is one example, and it is clear that various modifications and additions to these examples are possible within the scope of the present invention.

[0382] The disclosures of the specifications, drawings and abstracts contained in Japanese Patent Application No. 2023-184892 filed on October 27, 2023 and Japanese Patent Application No. 2024-096915 filed on June 14, 2024 are incorporated herein by reference in their entirety.

[0383] The vibration actuator and contact-type input device according to the present invention are easy to assemble, have the advantage of being able to be placed in a space-saving manner and vibrate favorably, and are useful for use in, for example, PCBs, track pads, operation panels, etc.

[0384] DESCRIPTION OF SYMBOLS 10, 10A, 10B, 10C, 10D, 10E, 10F, 10G, 10H, 10J, 10K, 10L, 10M, 10N, 10P, 10Q, 10R, 10S Vibration actuator 11J, 11L Communication hole 14 Strain detection section (strain detection sensor) 16 Capacitance detection section (detection section, proximity sensor) 20, 20A, 20B, 20C, 20D, 20G, 20H, 20J Electromagnet section 30, 30A, 30C, 30D, 30G, 30H, 30J, 30M Core section (magnetic core) 32, 32A, 32C, 32D, 32G, 32H, 32J, 32M Magnetic core body 34, 34A, 34C, 34G, 34H Magnetic pole portion (magnetic convex portion) 34S Magnetic pole core 36 External magnetic pole portion (annular convex portion) 38 External weight (weight) 39, 83 Communication hole 40, 40A, 40C, 40D, 40J, 40K Substrate portion 42, 42A, 42C, 42D Substrate body (insulating portion) 43, 43C Opening 44, 44A, 44C, 44D Extension portion 50, 50A, 50C, 50D, 50S Coil 51, 61 Opening 60, 60B, 60D, 60J, 60L, 60M, 60N, 600, 600N Elastic support portion 62, 64 Side portion 65 Positioning portion 66, 68 Elastic arm portion 70, 70B, 70D, 70F, 70G, 70H, 70J, 70K, 70L Magnetic body 80, 80D, 80F, 80H, 80J, 80K, 80L, 80M, 80Q Magnetic yoke (magnetic member) 82 Underside 84 Yoke connection portion 86 Yoke body 90, 90B, 90D, 90H, 90J, 90K, 90M, 90R Spacer 91 Frame-shaped body 92, 92D, 92J Spacer joint portion 96, 98 Spacer piece 100, 100F, 100G, 100H, 100J, 100M Air vent portion 110, 110G, 110H Vent adjustment portion 112, 112H Vent portion 114, 114H Air flow bending portion 116, 116H Internal passage 320, 342 Through hole 322, 322D Notch portion 324, 324A, 324D, 324J Connection fixing portion 326 Slit 328 Fixing hole 350 Window portion 401 Wiring layer 402 Heat dissipation portion 403 Insulating layer 441 Land 500, 500L Vibration presentation device (contact type input device) 510, 510P Pad body520 Frame portion 530, 530J Bottom portion 540 Opening portion 602 Central portion 604 Both end portions 622, 622D Yoke side connecting portion 642, 642D Core side connecting portion 661 Elastically deforming portion 810 Top surface portion 830, 930 Through hole 832 Central through hole 901 First spacer 902 Second spacer

Claims

1. A vibration actuator comprising: an electromagnet formed by stacking a flattened, annular coil on the plate surface of a plate-shaped magnetic core; a magnetic member having a lower surface facing the coil from above; a spacer arranged on the lower surface outside the coil and separating the magnetic member and the electromagnet in the vertical direction; and an elastic support part arranged outside the coil and connecting the magnetic core and the spacer; wherein a magnetic force generated by passing current through the coil causes one of the magnetic member or the electromagnet to displace and vibrate so as to approach the other.

2. The vibration actuator according to claim 1, wherein the magnetic core has a magnetic convex portion surrounded by the coil.

3. A vibration actuator according to claim 1, wherein the magnetic core has a magnetic annular protrusion on the outer periphery of the coil that surrounds the coil.

4. A vibration actuator as described in claim 1, wherein the elastic support portion is a frame-shaped body surrounding the magnetic core, and is connected to the magnetic core at a plurality of core side connection portions protruding inward from equally spaced portions of the frame-shaped body, and is connected to the spacer at other portions equally spaced from the core side connection portions.

5. A vibration actuator according to claim 4, wherein the elastic support portion is a rectangular frame having one opposite side on which the core side connection portion is provided and the other opposite side on which the elastic support portion is connected to the spacer.

6. The vibration actuator according to claim 1, wherein the electromagnet, the magnetic member, the spacer and the elastic support portion are flat plate-shaped.

7. The vibration actuator according to claim 1, wherein the magnetic core, the elastic support portion, the spacer and the magnetic member are arranged in a layered configuration and each is formed in a rectangular shape.

8. The vibration actuator according to claim 1, wherein the spacer is made of a material with a high specific gravity.

9. The vibration actuator according to claim 1, wherein one or both of the elastic support portion and the spacer are composed of a plurality of divided bodies.

10. The vibration actuator according to claim 1, wherein a film-like insulating portion is provided between the coil and the magnetic core.

11. A vibration actuator according to claim 10, wherein the insulating portion has a wiring portion connected to the coil.

12. The vibration actuator according to claim 1, wherein the magnetic core has a weight on the outer periphery side of the coil.

13. The vibration actuator according to claim 1, further comprising a detection unit disposed between the magnetic core and the magnetic body or the spacer for detecting the length between the two.

14. The vibration actuator according to claim 1, wherein the elastic support portion is a leaf spring and has a strain detection portion for detecting strain of the spring.

15. A vibration actuator as described in claim 1, wherein the magnetic member and the electromagnet have an air vent that closes the space between them in the vertical direction and creates an air flow within the space in a direction along the plate surface when they are close to each other.

16. A vibration actuator according to claim 15, wherein the air vent portion directs the air flow from the outer periphery of the magnetic member and the electromagnet to the outside.

17. A vibration actuator according to claim 15, wherein a communication hole that communicates with the outside is provided in either the magnetic member or the central portion of the coil.

18. A vibration actuator according to claim 15, wherein the air vent portion has a vent adjustment portion that adjusts the air flow by a gap between the spacer and the outer periphery of the magnetic core adjacent in the vertical direction.

19. A vibration actuator according to claim 15, wherein the spacer protrudes from the lower surface of the magnetic member and has a predetermined width in a direction perpendicular to the direction of approach.

20. A vibration actuator as set forth in claim 18, wherein the spacer is disposed so as to completely surround the outer periphery of the coil, and together with the outer periphery, constitutes the loss adjustment portion.

21. A vibration actuator as set forth in claim 15, wherein the air vent portion has a shape that bends the air flow along the plate surface in the vertical direction midway.

22. A vibration actuator according to claim 21, wherein a side surface of the spacer and a side surface of the coil form an air flow bending portion that bends the air flow in the air release portion.

23. A vibration actuator according to claim 18, wherein the gap dimension between the spacer and the magnetic core in the gap adjustment portion is smaller than the gap dimension between the magnetic core and the magnetic member.

24. A contact-type input device, comprising a vibration actuator according to any one of claims 1 to 23 disposed on the rear surface of an operation surface and actuated in response to an operation on the operation surface.

25. The contact-type input device according to claim 24, wherein the vibration actuator has either the magnetic core or the magnetic member disposed on the rear side of the operation surface.

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