Power control circuit and control method for power supply, radio-frequency power supply and power supply system

Abstract

The present application relates to a power control circuit and control method for a power supply, a radio-frequency power supply and a power supply system, belongs to the technical field of radio-frequency power supplies, and solves the problem of power control of power supplies. The control circuit comprises a PID module, a first-stage signal control module and a second-stage signal control module; on the basis of collected output current and voltage parameters of a power supply, the PID module performs PID control so as to output control parameters to a signal generation module; on the basis of the control parameters output by the PID module, the first-stage signal control module generates two driving signals of the same frequency and the same or different phases, and outputs same to the second-stage signal control module; the second-stage signal control module is used for separately controlling the two driving signals output by the first-stage signal control module to obtain switching control quantities, outputting same to a full-bridge circuit of the power supply, and turning on and off switching transistors to control the power of the power supply. While controlling the power of power supplies, the present application controls output frequencies and phases.

Description

Power supply power control circuit, control method, radio frequency power supply and power supply system Technical Field

[0001] The present application belongs to the field of radio frequency power supply technology, and specifically relates to a power supply power control circuit, a control method, a radio frequency power supply, and a power supply system. Background Art

[0002] In current RF power supply control circuits, a control core typically performs electrical signal operations such as signal conversion, triggering, and dead-zone (delay) operations to generate control signals for the switching transistors in a phase-shifted full-bridge circuit. This switching generates the desired pulse or power signal. A commonly used chip is the UCC3895 controller. The UCC3895 controller obtains the required control signal voltage and frequency values ​​from the SYNC pin through PID calculations, and performs the aforementioned processing to generate the desired pulse or power signal. This frequency value is twice the frequency of the expected output power signal.

[0003] Therefore, the following essential problems exist in the internal circuit of the UCC3895 chip:

[0004] (1) The input signal frequency needs to be twice the output signal frequency, which makes it difficult to perform fixed frequency control of the output signal of the power supply.

[0005] (2) Because the internal components of the conversion and triggering are susceptible to electromagnetic and temperature factors, the control signals generated after the signal conversion, triggering and dead zone operations are prone to phase delay, which makes the switch control of the full-bridge circuit relatively delayed, and thus causes the generated pulse signal or power signal phase deviation, which is often between 45 degrees and 180 degrees. This causes abnormal power output of the RF power supply, resulting in ignition failure, power imbalance, etc., and makes the process unable to proceed normally.

[0006] (3) In response to process requirements, the RF power supply will adopt different signal following modes depending on whether it is a master or a slave. However, regardless of whether it is a master mode or a slave mode, the lack of the second point will cause the machine to operate incorrectly.

[0007] Summary of the Invention

[0008] In view of the above analysis, this application aims to disclose a power supply control circuit, a control method, a radio frequency power supply and a power supply system, which are used to solve the problems brought about by the UCC3895 chip, realize power supply control while controlling the output frequency and phase.

[0009] One aspect of the present application discloses a power supply control circuit, comprising: a PID module, a first-segment signal control module, and a second-segment signal control module;

[0010] The PID module is used to perform PID control and output control parameters to the signal generation module based on the collected power supply output current and voltage parameters;

[0011] The first-stage signal control module is used to generate two driving signals with the same frequency and the same or different phases according to the control parameters output by the PID module and output them to the second-stage signal control module;

[0012] The second-stage signal control module is used to control the two drive signals output by the first-stage signal control module to obtain the switch control quantity, and output it to the full-bridge circuit of the power supply; the power of the power supply is controlled by controlling the conduction and shutdown of the switch tube.

[0013] Another aspect of the present application further discloses a power supply control method, including: source power control in a host control mode and power supply power control in a slave control mode;

[0014] In the host control mode, according to the collected output current and voltage parameters of the power supply, PID control is performed and the output control parameters are generated to generate two drive signals with the same frequency and the same or different phases. After the drive control is performed, the signals are output to the full-bridge circuit of the power supply to control the signal switching of the switch tube of the full-bridge circuit; thus, the power supply is used as the host power supply to output electric power;

[0015] In the slave control mode, according to the power signal output by the collected host power supply, after phase-locking processing, two driving signals with the same frequency and different phases are generated for drive control and then output to the full-bridge circuit of the power supply respectively to control the signal switching of the full-bridge circuit switch tube; so that this power supply can output electrical power as a slave power supply under the control of the host power supply.

[0016] Another aspect of the present application also discloses a radio frequency power supply, comprising: an ADC circuit, a full-bridge circuit, a transformer and a filter circuit, a VI sensor, and a power supply power control circuit;

[0017] Wherein, the ADC circuit is used to convert the three-phase AC power supply into DC power;

[0018] The full-bridge circuit is used to convert into radio frequency alternating current under the control of the power supply power control circuit;

[0019] The transformer and filter circuit are used to perform voltage conversion and power filtering on the radio frequency alternating current output by the full-bridge circuit to obtain a radio frequency power supply output;

[0020] The VI sensor is used to collect voltage and current parameters output by the radio frequency power supply and output them to the power control circuit;

[0021] The power supply power control circuit uses the power supply power control circuit described above to control the power of the radio frequency power supply.

[0022] Another aspect of the present application also discloses a power supply system, comprising: a master device and a slave device,

[0023] The master device is used to generate a power signal to be processed by the slave device;

[0024] The slave device adopts the RF power supply as described above and operates in the slave control mode; after phase-locking processing based on the received power supply signal to be processed, two drive signals with the same frequency and different phases are generated and output to the second-stage signal control module in the slave device. The second-stage signal control module generates a switch control amount to control the signal switching of the full-bridge circuit switch tube in the slave device, so that the slave device outputs electric power under the control of the master device.

[0025] Another aspect of the present application also discloses a computer device, including: a processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor. When the computer device is running, the processor and the memory communicate through the bus, and when the machine-readable instructions are executed by the processor, the power control method described above is performed.

[0026] Another aspect of the present application further discloses a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the power control method described above is executed.

[0027] This application can achieve the following beneficial effects:

[0028] The power supply power control circuit, control method, radio frequency power supply and power supply system disclosed in the present application realize power supply power control while controlling the output frequency and phase.

[0029] The input signal frequency can be adjusted to twice or N times the output signal frequency without special adjustment, so that the output signal frequency is easier to control.

[0030] The DDS module is used for signal conversion and triggering, so that the signal conversion is not interfered with by the physical circuit. The dead zone circuit is set independently, and the full-bridge control circuit can also be controlled in an orderly manner. Therefore, there will be no abnormal phase deviation of the pulse signal or output power signal.

[0031] When applied to a master-slave architecture, there will be no problem of machine operation errors causing the process to be unable to execute. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The accompanying drawings are only used for the purpose of illustrating specific embodiments and are not to be considered as limiting the present application. Throughout the drawings, the same reference symbols denote the same components.

[0033] FIG1 is a schematic block diagram of a power supply control circuit according to an embodiment of the present invention;

[0034] FIG2 is a schematic diagram showing the connection structure of a phase-shifted full-bridge circuit in an embodiment of the present application;

[0035] FIG3 is a schematic block diagram of a power supply control circuit capable of realizing master and slave functions in an embodiment of the present application;

[0036] FIG4 is a schematic block diagram of the radio frequency power supply principle in an embodiment of the present application;

[0037] FIG5 is a schematic block diagram of the principle of the radio frequency power supply system in an embodiment of the present application;

[0038] FIG6 is a schematic block diagram of a computer device in an embodiment of the present application. DETAILED DESCRIPTION

[0039] The preferred embodiments of the present application are described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the present application and are used together with the embodiments of the present application to illustrate the principles of the present application.

[0040] Example 1

[0041] One embodiment of the present application discloses a power supply control circuit, which is connected to a radio frequency power supply, as shown in FIG1 , and includes: a PID module, a first-segment signal control module, and a second-segment signal control module;

[0042] The PID module is used to perform PID control and output control parameters to the signal generation module based on the collected power supply output current and voltage parameters;

[0043] The first-stage signal control module is used to generate two driving signals with the same frequency and the same or different phases according to the control parameters output by the PID module and output them to the second-stage signal control module;

[0044] The second-stage signal control module is used to control the two drive signals output by the first-stage signal control module to obtain the switch control quantity, and output it to the full-bridge circuit of the power supply; the power of the power supply is controlled by controlling the conduction and shutdown of the switch tube.

[0045] The full-bridge circuit is a phase-shifted full-bridge circuit, which controls the output power of the power supply under the control of the switch control amount.

[0046] Specifically, in the PID module, PID control is performed based on the output current and voltage parameters of the RF power supply collected by the VI sensor. The PID control may adopt a PID power control method used in conventional RF power supplies.

[0047] Specifically, the first segment signal control module in FIG1 includes a DDSO module;

[0048] The input end of the DDSO module is connected to the PID module, and direct digital synthesis is performed in the DDSO module according to the control parameters output by the PID module to generate a first drive signal and a second drive signal, which are output through the first output end and the second output end of the DDSO module respectively;

[0049] The first driving signal and the second driving signal generated by direct digital synthesis have the same signal frequency and the same or different phases.

[0050] The second section signal control module in Figure 1 includes the DDS1 module and the DDS2 module;

[0051] The first output terminal of the DDS0 module is connected to the first input terminal of the DDS1 module to output the first driving signal to the DDS1 module; the DDS1 module performs direct digital synthesis to convert the first driving signal into a first switch control value;

[0052] The second output terminal of the DDS0 module is connected to the first input terminal of the DDS2 module to output the second drive signal to the DDS2 module; the DDS2 module performs direct digital synthesis to convert the second drive signal into a second switch control value;

[0053] The first and second output terminals of the DDS1 module are respectively connected to the control terminals of the two switch tubes of the leading arm of the full-bridge circuit, and the two switch tubes of the leading arm are controlled by the first switch control variable;

[0054] The first and second output terminals of the DDS2 module are respectively connected to the control terminals of the two switch tubes of the lagging arm of the full-bridge circuit, and the two switch tubes of the lagging arm are controlled by the second switch control quantity.

[0055] The leading arm of the phase-shifted full-bridge circuit includes switches S1 and S3, and the lagging arm includes switches S2 and S4. The DDS1 module outputs switching signals for switches S1 and S3 of the phase-shifted full-bridge circuit, and the DDS2 module outputs switching signals for switches S2 and S4 of the phase-shifted full-bridge circuit, thereby achieving phase control of the output power signal.

[0056] Specifically, through the switch switching control of the DDS1 module and the DDS2 module, the phase-shifted full-bridge circuit is continuously switched between the following two states to perform chopping control;

[0057] State 1: S1 / S4 open, S2 / S3 open;

[0058] State 2: S1 / S4 open, S2 / S3 open.

[0059] The preferred phase-shifted full-bridge circuit scheme in this embodiment is shown in Figure 2; in the phase-shifted full-bridge circuit, the two input terminals BUS+ and BUS- of the phase-shifted full-bridge circuit are respectively connected to the positive and negative poles of the BUS DC voltage of the RF power supply; the two output terminals AC1 and AC2 of the phase-shifted full-bridge circuit are connected to the converter to output the chopped AC voltage; the series-connected switching tubes S1 and S3 form the leading arm of the phase-shifted full-bridge circuit, and the gates of the switching tubes S1 and S3 are respectively connected to the first and second output terminals of the DDS1 module; the series-connected switching tubes S2 and S4 form the lagging arm of the phase-shifted full-bridge circuit, and the gates of the switching tubes S2 and S4 are respectively connected to the first and second output terminals of the DDS2 module; the switching tubes S1, S3, S2, and S4 are respectively connected in parallel with protection diodes D1, D3, D2, and D4; the capacitor C1 is connected in parallel with the leading arm, and the capacitor C2 is connected in parallel with the lagging arm; that is, the capacitors C1 and C2 are both connected between the input terminals BUS+ and BUS- and have no connection points with the output terminals AC1 and AC2.

[0060] During switching, the first and second output terminals of the DDS1 module output switching control quantities to the gates of the switching tubes S1 and S3 with different phases, thereby controlling the asynchronous switching of the switching tubes S1 and S3 to be on or off. The first and second output terminals of the DDS2 module output switching control quantities to the gates of the switching tubes S2 and S4 with different phases, thereby controlling the asynchronous switching of the switching tubes S2 and S4 to be on or off. During switching control, the switching tubes S1 and S4 are switched on or off synchronously, and the switching tubes S2 and S3 are switched on or off synchronously. This enables the phase-shifted full-bridge circuit to continuously switch between state one and state two to form an AC voltage output by the chopped wave.

[0061] In another optional solution of this embodiment, based on the circuit composition of FIG2 , the connection relationship between the DDS1 module and the DDS2 module and the switch tube, as well as the form of the output switching signal, can be changed to form a new switching method; specifically:

[0062] The first and second output terminals of the DDS1 module are connected to the gates of the switching tubes S1 and S4, respectively, and the first and second output terminals of the DDS2 module are connected to the gates of the switching tubes S2 and S3, respectively. Under this connection relationship, the switching control quantities output by the first and second output terminals of the DDS1 module to the gates of the switching tubes S1 and S4 have the same phase, controlling the synchronous switching of the on / off state of the switching tubes S1 and S4. The switching control quantities output by the first and second output terminals of the DDS2 module to the gates of the switching tubes S2 and S3 have the same phase, controlling the synchronous switching of the on / off state of the switching tubes S2 and S3. Moreover, during the switching control, the on / off state of the switching tubes S1 and S3 is switched asynchronously, and the on / off state of the switching tubes S2 and S4 is switched asynchronously. This enables the phase-shifted full-bridge circuit to continuously switch between state one and state two to form an AC voltage output by the chopped wave.

[0063] In a specific solution of this embodiment, the power control circuit further includes a phase-locked module CEXDDS;

[0064] The input end of the phase-locked module CEXDDS is used to phase-lock the power signal output by other power supplies serving as the host power supply, and generate two drive signals with the same frequency and different phases to output to the second-stage signal control module. The second-stage signal control module generates a switch control quantity to control the signal switching of the full-bridge circuit switch tube, so that this power supply outputs electrical power as a slave power supply under the control of the host power supply.

[0065] The phase-locked process normalizes the power signal from the power supply host to generate a waveform to be synchronized. After signal synchronization, two drive signals with the same frequency and different phases are generated and output to the second-stage signal control module. The phase difference between the two drive signals is fixed, so that the output power signal follows the input power signal, forming a phase-locked signal with the same phase or a fixed phase difference.

[0066] In order to ensure that the power control circuit can work normally in both the master mode and the slave mode, the DDS1 module further includes a second input terminal, and the DDS2 module further includes a second input terminal;

[0067] The input end of the phase-locked module is connected to the power supply host, the first output end of the phase-locked module is connected to the second input end of the DDS1 module, and the second output end of the phase-locked module is connected to the second input end of the DDS2 module; the first and second output ends of the DDS1 module are respectively connected to the control ends of the two switch tubes of the leading arm of the full-bridge circuit, and the first and second output ends of the DDS2 module are respectively connected to the control ends of the two switch tubes of the lagging arm of the full-bridge circuit; it is used to control the power of the power supply when the power supply is in slave mode.

[0068] In a specific solution of this embodiment, the power supply control circuit also includes a dead zone control circuit; the dead zone control circuit is connected between the second-stage signal control module and the full-bridge circuit, and is used to delay control the switch control amount output by the second-stage signal control module.

[0069] Specifically, the dead zone control circuit includes a first delay circuit DELAYA, a second delay circuit DELAYB, a third delay circuit DELAYC and a fourth delay circuit DELAYD;

[0070] The first and second output ends of the second DDS module are respectively delayed by the first delay circuit DELAYA and the second delay circuit DELAYB, and then output the switch control quantity to the control ends of the two switch tubes of the leading arm of the full-bridge circuit;

[0071] The first and second output ends of the third DDS module are delayed by the third delay circuit DELAYC and the fourth delay circuit DELAYD respectively, and then output the switch control amount to the control ends of the two switch tubes of the lag arm of the full-bridge circuit.

[0072] By setting up a dead-band control circuit (DELAY AD) to perform signal delay operations according to control requirements, the full-bridge control circuit can also be controlled in an orderly manner, thus avoiding the abnormal phase deviation of the pulse signal or output power signal like the UCC3895.

[0073] As shown in FIG3 , it is a schematic diagram of a power supply power control circuit that can realize the functions of a master and a slave.

[0074] In summary, the power supply control circuit disclosed in this embodiment controls the output frequency and phase while achieving power supply control. The input signal frequency can be adjusted to twice or N times the output signal frequency without specific adjustment, making the output signal frequency easier to control. The DDS module is used for signal conversion and triggering, so that the signal conversion is not interfered with by the physical circuit. The dead zone circuit is independently set, and the full-bridge control circuit can also be controlled in an orderly manner. Therefore, there will be no abnormal phase offset of the pulse signal or the output power signal. When the source power control circuit of this embodiment is applied to the master-slave architecture, there will be no problem of the process being unable to be executed due to machine operation errors.

[0075] Example 2

[0076] One embodiment of the present application discloses a power supply control method, including source power control in a host control mode and power supply power control in a slave control mode;

[0077] In the host control mode, according to the collected output current and voltage parameters of the power supply, PID control is performed and the output control parameters are generated to generate two drive signals with the same frequency and the same or different phases. After the drive control is performed, the signals are output to the full-bridge circuit of the power supply to control the signal switching of the switch tube of the full-bridge circuit; thus, the power supply is used as the host power supply to output electric power;

[0078] In the slave control mode, according to the power signal output by the collected host power supply, after phase-locking processing, two driving signals with the same frequency and different phases are generated for drive control and then output to the full-bridge circuit of the power supply respectively to control the signal switching of the full-bridge circuit switch tube; so that this power supply can output electrical power as a slave power supply under the control of the host power supply.

[0079] Specifically, in the host control mode, power supply control specifically includes:

[0080] According to the collected output current and voltage parameters of the power supply, PID control is performed to output control parameters;

[0081] Generate two driving signals with the same frequency and the same or different phases according to the ID control output control parameters;

[0082] The two drive signals are controlled separately to obtain the switch control quantity, which is output to the full-bridge circuit of the power supply;

[0083] The power of the power supply is controlled by controlling the on and off of the switch tube.

[0084] Specifically, in slave control mode, power supply control specifically includes:

[0085] The power signal output by other power supplies as the power host is phase-locked to generate two driving signals with the same frequency and different phases;

[0086] The two drive signals are controlled separately to obtain the switch control quantity, which is output to the full-bridge circuit of the power supply;

[0087] The power of the power supply is controlled by controlling the on and off of the switch tube.

[0088] In the master and slave control modes, a dead zone control step is also included. When performing dead zone control, the dead zone control circuit is set before the control end of the switch tube of the full-bridge circuit, and the switch control quantity is delayed and controlled respectively and then output to the full-bridge circuit to realize dead zone control.

[0089] The power supply control method of this embodiment relies on the power supply control circuit described in the first embodiment. The specific technical details and beneficial effects are the same as those in the first embodiment. Please refer to the specific contents in the first embodiment and will not go into details here.

[0090] Example 3

[0091] One embodiment of the present application discloses a radio frequency power supply, as shown in FIG4 , comprising: an ADC circuit, a full-bridge circuit, a transformer and a filter circuit, a VI sensor, and a power supply power control circuit;

[0092] Wherein, the ADC circuit is used to convert the three-phase AC power supply into DC power;

[0093] The full-bridge circuit is used to convert into radio frequency alternating current under the control of the power supply power control circuit;

[0094] The transformer and filter circuit are used to perform voltage conversion and power filtering on the radio frequency alternating current output by the full-bridge circuit to obtain a radio frequency power supply output;

[0095] The VI sensor is used to collect voltage and current parameters output by the radio frequency power supply and output them to the power control circuit;

[0096] The power supply power control circuit uses the power supply power control circuit as described in the first embodiment to control the power of the radio frequency power supply.

[0097] The specific technical details and beneficial effects of the power control circuit of this embodiment are the same as those in the first embodiment. Please refer to the specific contents of the first embodiment and will not go into details here.

[0098] Example 4

[0099] One embodiment of the present application discloses a radio frequency power supply system, such as a plasma power supply system, as shown in FIG5 , including: a master device and a slave device;

[0100] A master device generates a power signal to be processed;

[0101] The slave device uses the radio frequency power supply described in the third embodiment and operates in the slave control mode;

[0102] The phase-locked module in the slave device performs phase-locked processing on the power supply signal to be processed output by the master device, and generates two driving signals with the same frequency and different phases, which are output to the second-stage signal control module in the slave device. The second-stage signal control module generates a switch control amount to control the signal switching of the full-bridge circuit switch tube in the slave device, so that the slave device outputs electric power under the control of the master device.

[0103] Preferably, the master device may also adopt the radio frequency power supply as described in the third embodiment, so that it operates in a host control mode.

[0104] The specific technical details and beneficial effects of the radio frequency power supply in this embodiment are the same as those in the third embodiment. Please refer to the specific contents of the third embodiment and will not go into details here.

[0105] Example 5

[0106] Based on the same technical concept, an embodiment of the invention further provides a computer device, including a memory and a processor, as shown in FIG6 , wherein the memory stores a computer program, and the processor implements any of the above-mentioned power control methods when executing the computer program.

[0107] The memory includes at least one type of readable storage medium, including a flash memory, a hard disk, a multimedia card, a card-type memory (e.g., SD or DX memory), a magnetic memory, a magnetic disk, an optical disk, etc. In some embodiments, the memory may be an internal storage unit of the RF power system, such as a hard disk. In other embodiments, the memory may also be an external storage device of the plasma power system, such as a plug-in hard disk, a Smart Media Card (SMC), a Secure Digital (SD) card, a flash memory card, etc.

[0108] Furthermore, the memory may include both an internal storage unit of the power supply system and an external storage device. The memory may be used not only to store application software installed in the power supply system and various data, such as power supply program code, but also to temporarily store data that has been output or is about to be output.

[0109] In some embodiments, the processor may be a central processing unit (CPU), a controller, a microcontroller, a microprocessor, or other data processing chip, configured to execute program codes stored in a memory or process data, such as executing a power program.

[0110] It is understandable that the technical solution, specific technical details and beneficial effects provided by this embodiment are the same as those in Example 2. Please refer to the specific contents of Example 2 and will not go into details here.

[0111] A specific embodiment of the present application further provides a computer-readable storage medium having a computer program stored thereon. When executed by a processor, the computer program executes the steps of the power supply power control method described in the above method embodiment. The storage medium may be a volatile or non-volatile computer-readable storage medium.

[0112] The computer program product of the power supply power control method provided in this embodiment includes a computer-readable storage medium storing program code. The instructions included in the program code can be used to execute the steps of the power supply power control method described in the above method embodiment. For details, please refer to the above method embodiment and will not be repeated here.

[0113] The present invention also provides a computer program that, when executed by a processor, implements any of the methods of the aforementioned embodiments. The computer program product can be implemented in hardware, software, or a combination thereof. In one optional embodiment, the computer program product is embodied as a computer storage medium. In another optional embodiment, the computer program product is embodied as a software product, such as a software development kit (SDK).

[0114] It can be understood that the same or similar parts of the above embodiments can be referenced to each other, and the contents not described in detail in some embodiments can refer to the same or similar contents in other embodiments.

[0115] The above is only a preferred specific implementation method of the present application, but the scope of protection of the present application is not limited thereto. Any changes or replacements that can be easily thought of by any technician familiar with this technical field within the technical scope disclosed in this application should be covered by the scope of protection of the present application.

Claims

1. A power supply control circuit, characterized in that: include: PID module, first section signal control module and second section signal control module; The PID module is used to perform PID control and output control parameters to the signal generation module according to the collected power supply output current and voltage parameters; The first-stage signal control module is used to generate two drive signals with the same frequency and the same or different phases according to the control parameters output by the PID module and output them to the second-stage signal control module; The second signal control module is used to control the two drive signals output by the first signal control module respectively to obtain the switch control quantity, and output it to the full-bridge circuit of the power supply; the power of the power supply is controlled by controlling the conduction and closing of the switch tube.

2. The power control circuit according to claim 1, characterized in that: The first section signal control module includes a DDS0 module; The input end of the DDSO module is connected to the PID module, and a first drive signal and a second drive signal are generated by direct digital synthesis in the DDSO module according to the control parameters output by the PID module, and are output through the first output end and the second output end of the DDSO module respectively; The first driving signal and the second driving signal have the same signal frequency and the same or different phases.

3. The power control circuit according to claim 2, characterized in that: The second section signal control module includes a DDS1 module and a DDS2 module; The first output terminal of the DDS0 module is connected to the first input terminal of the DDS1 module to output the first drive signal to the DDS1 module; the DDS1 module performs direct digital synthesis to convert the first drive signal into a first switch control quantity; The second output terminal of the DDS0 module is connected to the first input terminal of the DDS2 module to output the second driving signal to the DDS2 module; The DDS2 module performs direct digital synthesis to convert the second drive signal into a second switch control quantity; The first and second output terminals of the DDS1 module are connected to the two switches of the leading arm of the full-bridge circuit. The control end of the tube is connected to control the two switch tubes of the super fore arm through the first switch control quantity; The first and second output ends of the DDS2 module are respectively connected to the control ends of the two switch tubes of the lagging arm of the full-bridge circuit, and the two switch tubes of the lagging arm are controlled by the second switch control amount.

4. The power supply control circuit according to any one of claims 1 to 3, characterized in that: It also includes a phase-lock module; The input end of the phase-locked module is used to phase-lock the power signal output by other power supplies serving as the host power supply, and generate two drive signals with the same frequency and different phases to output to the second-stage signal control module. The second-stage signal control module generates a switch control amount to control the signal switching of the full-bridge circuit switch tube, so that the power supply outputs electrical power as a slave power supply under the control of the host power supply.

5. The power control circuit according to claim 4, characterized in that: The DDS1 module also includes a second input terminal, and the DDS2 module also includes a second input terminal; The input end of the phase-locked module is connected to the power supply host, the first output end of the phase-locked module is connected to the second input end of the DDS1 module, and the second output end of the phase-locked module is connected to the second input end of the DDS2 module; the first and second output ends of the DDS1 module are respectively connected to the control ends of the two switch tubes of the leading arm of the full-bridge circuit, and the first and second output ends of the DDS2 module are respectively connected to the control ends of the two switch tubes of the lagging arm of the full-bridge circuit; it is used to control the power of the power supply when the power supply is in the slave mode.

6. The power control circuit according to any one of claims 1 to 3 and 5, characterized in that: It also includes a dead zone control circuit; the dead zone control circuit is connected between the second-stage signal control module and the full-bridge circuit, and is used to delay control the switch control amount output by the second-stage signal control module.

7. The power control circuit according to claim 6, characterized in that: The dead zone control circuit comprises a first delay circuit DELAYA, a second delay circuit DELAYB, a third delay circuit DELAYC and a fourth delay circuit DELAYD; The first and second output ends of the second DDS module are respectively delayed by the first delay circuit DELAYA and the second delay circuit DELAYB, and the switch control amount is output to the two leading arms of the full-bridge circuit. The control end of a switch tube; The first and second output ends of the third DDS module are delayed by the third delay circuit DELAYC and the fourth delay circuit DELAYD respectively, and then output the switch control amount to the control ends of the two switch tubes of the lagging arm of the full-bridge circuit.

8. A power supply control method, characterized in that: include: Including source power control in host control mode and power supply power control in slave control mode; Among them, in the host control mode, according to the collected output current and voltage parameters of the power supply, PID control is performed and the output control parameters are generated to generate two drive signals with the same frequency and the same or different phases, and then the drive control is performed and the signals are respectively output to the full-bridge circuit of the power supply to control the signal switching of the switch tube of the full-bridge circuit; so that the power supply can output electric power as the host power supply; In the slave control mode, according to the power signal output by the collected host power supply, after phase-locking processing, two driving signals with the same frequency and different phases are generated for drive control and then output to the full-bridge circuit of the power supply respectively to control the signal switching of the full-bridge circuit switch tube; so that this power supply outputs electrical power as a slave power supply under the control of the host power supply.

9. The power control method according to claim 8, characterized in that: In the host control mode, power control specifically includes: According to the collected output current and voltage parameters of the power supply, PID control is performed to output control parameters; Generate two driving signals with the same frequency and the same or different phases according to the ID control output control parameter; The two driving signals are controlled separately to obtain the switch control quantity, and output to the full-bridge circuit of the power supply; The power of the power supply is controlled by controlling the on and off of the switch tube.

10. The power control method according to claim 8, characterized in that: In slave control mode, power supply control specifically includes: The power signal output by other power supplies as the power host is phase-locked to generate two driving signals with the same frequency and different phases; The two driving signals are controlled separately to obtain the switch control quantity, and output to the full-bridge circuit of the power supply; The power of the power supply is controlled by controlling the on and off of the switch tube.

11. The power control method according to any one of claims 8 to 10, characterized in that: In the master and slave control modes, a dead zone control step is also included; when performing dead zone control, the dead zone control circuit is set before the control end of the switch tube of the full-bridge circuit, and the switch control quantity is delayed and controlled respectively and then output to the full-bridge circuit to realize dead zone control.

12. A radio frequency power supply, characterized in that: include: ADC circuit, full-bridge circuit, transformer and filter circuit, VI sensor and power supply control circuit; Wherein, the ADC circuit is used to convert the three-phase AC power supply into DC power; The full-bridge circuit is used to convert into radio frequency alternating current under the control of the power supply power control circuit; The transformer and filter circuit are used to perform voltage conversion and power filtering on the radio frequency alternating current output by the full-bridge circuit to obtain a radio frequency power supply output; The VI sensor is used to collect the voltage and current parameters of the RF power supply output and output them to the power control circuit; The power supply power control circuit uses the power supply power control circuit as described in any one of claims 1-7 to control the power of the radio frequency power supply.

13. A power supply system, characterized in that: include: Master and slave devices, The master device is used to generate a power signal to be processed by the slave device; The slave device adopts the RF power supply as described in claim 12 and works in a slave control mode; after phase-locking processing based on the received power signal to be processed, two drive signals with the same frequency and different phases are generated and output to the second-stage signal control module in the slave device, and the switch control amount is generated by the second-stage signal control module to control the signal switching of the full-bridge circuit switch tube in the slave device, so that the slave device outputs electric power under the control of the master device.

14. A computer device, characterized in that: include: A processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the computer device is running, the processor and the memory communicate via the bus, and when the machine-readable instructions are executed by the processor, a power control method as described in any one of claims 8 to 11 is executed.

15. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the power control method of any one of claims 8 to 11 is executed.

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