Furnace door driving device and semiconductor heat treatment apparatus

Abstract

A furnace door driving device and a semiconductor heat treatment apparatus. The furnace door driving device comprises a connecting disc (1), a limiting assembly (2), a stop assembly (3) and a driving source (4), wherein the driving source (4) is used for driving the connecting disc (1) to rotate around the axis thereof; the connecting disc (1) is connected to a furnace door (02) and used for driving the furnace door (02) to rotate; the connecting disc (1) is provided with a limiting portion (13) and a stop portion (14); the limiting assembly (2) is used for limiting fitting with the limiting portion (13) when the connecting disc (1) rotates to a preset limiting position, thus making the connecting disc (1) stop rotating in the original rotation direction; and the stop assembly (3) is used for stop fitting with the stop portion (14) when the limiting assembly (2) is in limiting fitting with the limiting portion (13), preventing the connecting disc (1) from rotating in a direction opposite to the original rotation direction. Thus, the furnace door (02) is prevented from rotating in the opposite direction, avoiding vigorous vibration of the connecting disc (1) due to repeated limiting fitting between the connecting disc (1) and the limiting assembly (2), and thereby avoiding damage to the furnace door (02) caused by excessive vibration.

Description

Furnace door drive device and semiconductor heat treatment equipment Technical Field

[0001] The present application belongs to the field of semiconductor process equipment, and specifically relates to a furnace door drive device and a semiconductor heat treatment equipment. Background Art

[0002] The furnace door is a critical component for isolating the chamber of a vertical furnace from its microenvironment. Specifically, its primary function is thermal insulation, preventing heat from the chamber from directly transferring to the microenvironment, thereby protecting the electrical components within the microenvironment. In the prior art, a furnace door drive is typically used to rotate the furnace door, controlling its movement toward and away from the chamber exit.

[0003] Existing furnace door drive devices typically consist of a connecting plate connected to the furnace door and two stops fixed to its sides. When the connecting plate rotates to a specified position, a protrusion on its side strikes the stops, stopping the plate's rotation. However, after the rotation stops, the furnace door bounces repeatedly due to excessive inertia. This leads to excessive vibration on the door surface, potentially cracking the quartz plate that makes up the furnace door body and damaging internal components.

[0004] Summary of the Invention

[0005] The present application at least partially solves the problem that the furnace door of existing semiconductor heat treatment equipment is damaged by excessive vibration when closing, and provides a furnace door driving device and semiconductor heat treatment equipment.

[0006] The embodiment of the present application provides a furnace door driving device for semiconductor heat treatment equipment, which is used to drive the furnace door of the semiconductor heat treatment equipment to rotate; the device comprises: a connecting plate, a limiting assembly, a stopping assembly and a driving source;

[0007] The driving source is connected to the connecting disk and is used to drive the connecting disk to rotate around its own axis;

[0008] The connecting disk is connected to the furnace door and is used to drive the furnace door to rotate; the connecting disk has a limiting portion and a stop portion; the limiting assembly is used to cooperate with the limiting portion when the connecting disk rotates to a preset limiting position, so that the connecting disk stops rotating in the original rotation direction;

[0009] The stop assembly is used to engage with the stop portion when the limiting assembly engages with the limiting portion to prevent the connecting disk from rotating in a direction opposite to the original rotation direction.

[0010] In some embodiments, the original rotation direction is a first rotation direction or a second rotation direction opposite to the first rotation direction;

[0011] The stopper comprises a gear structure;

[0012] The stop assembly is used to abut against the gear structure when the connecting disk rotates along the second rotational direction, and to release the abutment against the gear structure when the connecting disk rotates along the first rotational direction; or, to abut against the gear structure when the connecting disk rotates along the first rotational direction, and to release the abutment against the gear structure when the connecting disk rotates along the second rotational direction.

[0013] In some embodiments, the stop assembly includes a switching assembly and a first stop assembly and a second stop assembly fixed to the periphery of the connection disk; wherein,

[0014] The switching assembly is used to switch the first stop assembly to the stop state and the second stop assembly to the non-stop state when the connecting disk rotates along the first rotation direction; and to switch the second stop assembly to the stop state and the first stop assembly to the non-stop state when the connecting disk rotates along the second rotation direction;

[0015] Among them, the non-stop state is a state away from the gear structure; the stop state is a state in which the connecting disk is in transmission cooperation with the gear structure when the connecting disk rotates along the original rotation direction, and is against the gear structure when the connecting disk rotates in a direction opposite to the original rotation direction.

[0016] In some embodiments, the first stop assembly and the second stop assembly each include: a telescopic structure having a telescopic end that is telescopic;

[0017] The telescopic end remains extended when not subject to external force, so that the corresponding first stop component or the second stop component is in the stop state;

[0018] The switching assembly is used to drive the telescopic end of the second stop assembly to retract to a position away from the connecting disk when the connecting disk rotates along the first rotation direction, so that the second stop assembly switches to the non-stop state; and to drive the telescopic end of the first stop assembly to retract to a position away from the connecting disk when the connecting disk rotates along the second rotation direction, so that the telescopic end of the first stop assembly switches to the non-stop state.

[0019] In some embodiments, the telescopic ends of the first stop assembly and the second stop assembly are respectively located on both sides of the connecting plate;

[0020] The telescopic end of the first stop assembly is capable of extending and retracting along a first linear direction; the first linear direction satisfies that when the connecting disk rotates along the first rotational direction, the gear structure can push the telescopic end to retract, and when the connecting disk rotates along the second rotational direction, the telescopic end can abut against the tooth surface of the corresponding gear tooth in the gear structure;

[0021] The telescopic end of the second stop assembly can be telescopic along a second straight line direction; the second straight line direction satisfies that when the connecting disk rotates along the second rotation direction, the gear structure can push the telescopic end to retract, and when the connecting disk rotates along the first rotation direction, the telescopic end can abut against the corresponding tooth surface in the gear structure.

[0022] In some embodiments, the first stop assembly and the second stop assembly each further include a fixing structure; the two fixing structures are respectively fixed to the periphery of the connecting disk;

[0023] The telescopic structure also includes a matching block, a spring and a spring pin serving as the telescopic end;

[0024] The spring pin of the first stop assembly extends along the first straight line direction; the spring pin of the second stop assembly extends along the second straight line direction; one end of the spring pin is fixedly connected to the matching block, and the other end of the spring pin is slidably connected to the fixed structure;

[0025] The spring is sleeved on the outer periphery of the spring pin, and both ends of the spring are respectively connected to the corresponding fixing structure and the matching block.

[0026] In some embodiments, the matching block has a first surface; the first surface is parallel to the extension direction of the corresponding spring pin and can be abutted against the tooth surface of the adjacent gear tooth.

[0027] In some embodiments, the limiting portion includes a limiting protrusion protruding from the outer peripheral surface of the connecting disk;

[0028] The limiting assembly includes two limiting blocks fixed on the periphery of the connecting disk, and the two limiting blocks are respectively used to block the limiting protrusion from continuing to move when the connecting disk rotates along the first rotation direction and the second rotation direction to the preset limiting position, so as to prevent the connecting disk from continuing to rotate.

[0029] In some embodiments, the switching assembly includes a rotary motor and a cam; wherein a power output end of the rotary motor is connected to the cam to drive the cam to rotate;

[0030] The cam is located between the first stop assembly and the second stop assembly; the cam is used to push one of the two telescopic ends away from the connecting disk to drive the first stop assembly or the second stop assembly to switch to the non-stop state.

[0031] In some embodiments, the furnace door driving device further comprises a fixed disk and a bearing; the fixed disk has a bearing support, and the bearing support is used to be fixedly connected to the inner ring of the bearing;

[0032] The connecting plate includes a first sub-connecting plate and a second sub-connecting plate arranged coaxially; wherein the gear structure is formed on the outer periphery of the first sub-connecting plate; the first sub-connecting plate has a bearing mounting hole, and the bearing mounting hole is used to connect with the outer ring of the bearing;

[0033] The second sub-connecting disk is located on a side of the first sub-connecting disk away from the fixed disk and is fixedly connected to the first sub-connecting disk; the limiting portion is arranged on the outer periphery of the second sub-connecting disk.

[0034] As another technical solution, the present application also provides a semiconductor heat treatment equipment, which includes: a furnace body, a furnace door and a furnace door driving device as described above; the furnace door driving device is used to drive the furnace door to rotate to the film transmission port of the furnace body, or drive the furnace door to rotate away from the film transmission port of the furnace body to control the opening and closing of the film transmission port of the furnace body.

[0035] This application has the following beneficial effects:

[0036] The furnace door drive device provided in the embodiments of the present application primarily utilizes a connecting disc to connect a drive source and a furnace door, so that the connecting disc drives the furnace door to rotate, and a stop assembly and a stopper assembly prevent the connecting disc from rotating. Specifically, the connecting disc includes a stopper portion and a stopper portion. The stopper assembly is configured to engage with the stopper portion when the connecting disc rotates to a preset stopper position, thereby stopping the connecting disc when the connecting disc rotates in the original rotational direction to the preset position, thereby allowing the furnace door to reach the preset position. However, since the kinetic energy of the connecting disc cannot be fully dissipated at the moment of being stopped, the connecting disc rebounds and tends to rotate in the opposite direction. The stopper assembly, when engaged with the stopper portion, prevents the connecting disc from rotating in a direction opposite to the original rotational direction, thereby preventing the furnace door from rotating in the opposite direction. This prevents the connecting disc from vibrating violently due to repeated engagement between the connecting disc and the stopper assembly, thereby preventing damage to the furnace door due to excessive vibration. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] FIG1 is a schematic structural diagram of a furnace door driving device provided in an embodiment of the present application;

[0038] FIG2 is a side view of the furnace door drive device and the furnace door provided in an embodiment of the present application;

[0039] FIG3A is a partial top view of the furnace door driving device according to an embodiment of the present application when rotating along a second rotation direction;

[0040] FIG3B is a partial top view of the furnace door driving device according to an embodiment of the present application when rotating along a first rotation direction;

[0041] FIG4 is a partial top view of the hidden rotating motor of the furnace door drive device provided in an embodiment of the present application;

[0042] FIG5 is a bottom view of the connection disk and the driving source provided in an embodiment of the present application;

[0043] FIG6 is a top view of the furnace door drive device provided in an embodiment of the present application;

[0044] FIG7 is a partial cross-sectional view of a furnace door drive device provided in an embodiment of the present application;

[0045] FIG8 is a simplified structural diagram of a semiconductor heat treatment device provided in an embodiment of the present application;

[0046] FIG9 is another simplified structural diagram of a semiconductor heat treatment apparatus provided in an embodiment of the present application;

[0047] FIG10 is a top view of the furnace door drive device and the furnace door provided in an embodiment of the present application. DETAILED DESCRIPTION

[0048] In order to enable those skilled in the art to better understand the technical solution of the present application, the present application is further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0049] It should be understood that the specific embodiments and drawings described herein are only used to explain the present application, rather than to limit the present application.

[0050] It can be understood that, in the absence of conflict, the various embodiments of the present application and the various features therein can be combined with each other.

[0051] It will be understood that, for the sake of ease of description, the drawings of this application only show the parts related to the embodiments of this application, while the parts not related to the embodiments of this application are not shown in the drawings.

[0052] It is understandable that, in the absence of conflict, the functions and steps marked in the flowcharts and block diagrams of the embodiments of the present application may occur in an order different from that marked in the drawings.

[0053] It is understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present application, and the present application is not limited thereto. Those skilled in the art may make various modifications and improvements without departing from the spirit and substance of the present application, and such modifications and improvements are also considered to be within the scope of protection of the present application.

[0054] Please refer to FIG. 1 . This embodiment provides a furnace door driving device, which includes: a connecting plate 1 , a limiting assembly 2 , a stopping assembly 3 and a driving source 4 .

[0055] As shown in Figure 2, the driving source 4 is connected to the connecting disk 1, and the connecting disk 1 is connected to the furnace door 02 of the semiconductor heat treatment equipment; wherein, the driving source 4 is used to drive the connecting disk 1 to rotate around its own axis, and then drive the furnace door 02 to rotate around the axis of the connecting disk 1 through the connecting disk 1.

[0056] The connecting disk 1 has a limiting portion 13 and a stopper 14. The limiting assembly 2 is fixed in position and is used to engage with the limiting portion 13 when the connecting disk 1 rotates to a preset limiting position, so that the connecting disk 1 stops rotating in the original rotation direction, thereby causing the furnace door 02 to stop rotating after reaching a preset position. Specifically, when the connecting disk 1 rotates in the original rotation direction to the preset limiting position, the connecting disk 1 is stopped by the limiting assembly 2. However, because the kinetic energy of the connecting disk 1 cannot be fully dissipated at the moment of mechanical engagement with the limiting assembly 2, the connecting disk 1 rebounds and tends to rotate in the opposite direction.

[0057] The stop assembly 3 is used to cooperate with the stop portion 13 when the limit assembly 2 is in limit cooperation with the limit portion 13, so as to prevent the connecting disk 1 from rotating in a direction opposite to the original rotation direction, thereby avoiding repeated limit cooperation between the connecting disk 1 and the limit assembly 2, which may cause the connecting disk 1 to vigorous vibration, and thus avoid damage to the furnace door due to excessive vibration.

[0058] In some embodiments, the original rotation direction is a first rotation direction or a second rotation direction opposite to the first rotation direction; correspondingly, the reverse rotation direction is the corresponding second rotation direction or the first rotation direction.

[0059] The aforementioned stopper 14 comprises a gear structure. Specifically, the stopper assembly 3 is configured to abut against the gear structure when the connecting disk 1 rotates in the second rotational direction, thereby preventing the connecting disk 1 from rotating in the reverse direction after being stopped; and to release the abutment against the gear structure when the connecting disk 1 rotates in the first rotational direction. Alternatively, the stopper assembly 3 is configured to abut against the gear structure when the connecting disk 1 rotates in the first rotational direction, and to release the abutment against the gear structure when the connecting disk 1 rotates in the second rotational direction.

[0060] In this way, during the process of the connecting disk 1 rotating along the first rotation direction, when the connecting disk 1 has not reached the preset position, the stop assembly 3 will not abut against the gear structure, thereby not affecting the forward rotation of the connecting disk 1; and when the connecting disk 1 rotates along the first rotation direction to the preset position, the connecting disk 1 will be stopped by the limit assembly 2 and will have a movement tendency to rotate along the second rotation direction. At this time, the stop assembly 3 can abut against the gear structure to prevent the connecting disk 1 from moving along the second rotation direction, thereby preventing the furnace door 02 from rotating in the opposite direction, and avoiding multiple collisions between the connecting disk 1 and the limit assembly 2, thereby avoiding damage to the furnace door 02 due to excessive vibration. Similarly, during the rotation of the connecting disk 1 along the second rotation direction, when the connecting disk 1 has not reached the preset position, the stop assembly 3 will not abut against the gear structure, thereby not affecting the forward rotation of the connecting disk 1; and when the connecting disk 1 rotates along the second rotation direction to the preset position, the stop assembly 3 can abut against the gear structure to prevent the connecting disk 1 from moving along the first rotation direction, thereby preventing the furnace door 02 from rotating in the opposite direction, and avoiding multiple collisions between the connecting disk 1 and the limit assembly 2, thereby avoiding damage to the furnace door 02 due to excessive vibration.

[0061] In some embodiments, as shown in Figures 3A, 3B, and 4, the stop assembly 3 includes a switching assembly 31 and a first stop assembly 32a and a second stop assembly 32b fixed to the circumference of the connecting disk 1. The first stop assembly 32a and the second stop assembly 32b both have a stop state and a non-stop state. Specifically, the non-stop state is a state away from the gear structure to avoid contact with the stop portion 14, thereby preventing interference with the normal rotation of the stop portion 14. The stop state is a state in which the connecting disk 1 rotates in the original rotation direction, i.e., meshes with the gear structure, and counteracts the gear structure when the connecting disk 1 rotates in the direction opposite to the original rotation direction.

[0062] Furthermore, the switching assembly 31 is configured to switch the first stop assembly 32a to a stopped state and the second stop assembly 32b to a non-stop state when the connecting disk 1 rotates in the first rotational direction, so that the first stop assembly 32a is used to prevent the connecting disk 1 from rotating in the second rotational direction, thereby preventing the connecting disk 1 from rotating in the first rotational direction after the rotation of the connecting disk 1 in the first rotational direction is stopped. The switching assembly 31 is also configured to switch the second stop assembly 32b to a stopped state and the first stop assembly 32a to a non-stop state when the connecting disk 1 rotates in the second rotational direction, so that the second stop assembly 32b is used to prevent the connecting disk 1 from rotating in the first rotational direction, thereby preventing the connecting disk 1 from rotating in the second rotational direction after the rotation of the connecting disk 1 in the second rotational direction is stopped.

[0063] In some embodiments, as shown in Figures 3A and 3B , the first and second stopper assemblies 32a and 32b have identical structures but are positioned opposite each other. Specifically, each of the first and second stopper assemblies 32a and 32b includes a telescopic structure having a retractable end 321. When not subject to external force, the end 321 remains extended, placing the corresponding first or second stopper assemblies 32a and 32b in the aforementioned stopped state.

[0064] Moreover, the switching assembly 31 is used to drive the telescopic end 321 of the second stop assembly 32b to retract when the connecting disk 1 rotates along the first rotation direction, so that the telescopic end 321 of the second stop assembly 32b is located away from the connecting disk 1, thereby switching the second stop assembly 32b to a non-stop state; and the switching assembly 31 is also used to drive the telescopic end 321 of the first stop assembly 32a to retract when the connecting disk 1 rotates along the second rotation direction, so that the telescopic end 321 of the first stop assembly 32a is located away from the connecting disk 1, thereby switching the first stop assembly 32a to a non-stop state.

[0065] Specifically, in some embodiments, as shown in Figures 3A and 3B , the telescopic ends 321 of the first stop assembly 32a and the second stop assembly 32b are respectively located on either side of the connecting disk 1, with the first stop assembly 32a located on the side of the connecting disk 1 pointing in the first rotational direction, and the second stop assembly 32b located on the side of the connecting disk 1 pointing in the second rotational direction. Taking the furnace door drive device shown in Figures 3A and 3B as an example, where the first rotational direction is, for example, clockwise and the second rotational direction is, for example, counterclockwise, the first stop assembly 32a is located on the right side of the connecting disk 1, and the second stop assembly 32b is located on the left side of the connecting disk 1.

[0066] The telescopic end 321 of the first stop assembly 32a can be telescopic along a first linear direction; the first linear direction satisfies that when the connecting disk 1 rotates along the first rotation direction, the gear structure can push the telescopic end 321 to retract, so as to avoid interfering with the normal rotation of the connecting disk 1 along the first rotation direction; the first linear direction also satisfies that when the connecting disk 1 rotates along the second rotation direction, the telescopic end 321 can be abutted against the corresponding gear tooth surface in the stop portion 14, and the telescopic end 321 will not retract, so as to prevent the connecting disk 1 from rotating in the opposite direction along the second rotation direction.

[0067] The telescopic end 321 of the second stop assembly 32b can be telescopic along the second linear direction; the second linear direction satisfies that when the connecting disk 1 rotates along the second rotational direction, the stop portion 14 can push the telescopic end 321 to retract, so as to avoid interfering with the normal rotation of the connecting disk 1 along the second rotational direction; the second linear direction also satisfies that when the connecting disk 1 rotates along the first rotational direction, the telescopic end 321 can abut against the corresponding gear tooth surface in the stop portion 14, and the telescopic end 321 will not retract, so as to prevent the connecting disk 1 from reversing along the first rotational direction.

[0068] It should be noted that the "corresponding gear teeth" mentioned above refer to any gear teeth that rotate to a position opposite the telescopic end 321, rather than two designated gear teeth in the gear structure. Specifically, taking the telescopic end 321 of the second stop assembly 32b shown in Figure 3A as an example, the telescopic end 321 has intersecting first and second surfaces 3212 and 3211. The angle between the first and second surfaces 3212 and 3211 is, for example, slightly smaller than the angle between the tooth surfaces of two adjacent gear teeth. When the telescopic end 321 abuts the tooth surface of the corresponding gear tooth in the stop portion 14, the first surface 3212 abuts the tooth surface of the adjacent gear tooth. Preferably, the angle between the first and second surfaces 3212 and 3211 is or is approximately 90°.

[0069] For example, as shown in Figures 3A and 3B, the first straight line direction is, for example, parallel or approximately parallel to the tooth surface of the gear teeth adjacent to the first surface 3212 of the telescopic end 321 of the first stop component 32a, and the second straight line direction is, for example, parallel or approximately parallel to the tooth surface of the gear teeth adjacent to the first surface 3212 of the telescopic end 321 of the second stop component 32b; in this way, when the connecting disk 1 generates a movement trend of reverse rotation or has already occurred reverse rotation, the first surface 3212 of the telescopic end 321 of the first stop component 32a or the second stop component 32b can apply a vertical thrust to the tooth surface of the gear teeth adjacent thereto, thereby achieving a better blocking effect, and it is not easy for the two to slip.

[0070] Exemplarily, when the angle between the first surface 3212 and the second surface 3211 is or is approximately 90°, the first straight line direction is also, for example, perpendicular or approximately perpendicular to the tooth surface of the gear teeth relative to the second surface 3211 of the telescopic end 321 of the first stop component 32a, and the second straight line direction is also, for example, perpendicular or approximately perpendicular to the tooth surface of the gear teeth relative to the second surface 3211 of the telescopic end 321 of the second stop component 32b; in this way, when the connecting disk 1 rotates along the first rotation direction or the second rotation direction and has not rotated to the preset position, the telescopic end 321 of the first stop component 32a or the second stop component 32b can be subjected to a vertical thrust applied to the tooth surface of the gear teeth adjacent to its second surface 3211 to push the telescopic end 321 to retract. At the same time, as the connecting disk 1 rotates, relative sliding will occur between the gear teeth and the telescopic end 321. In other words, the telescopic end 321 will not hinder the rotation of the connecting disk 1.

[0071] In some embodiments, as shown in Figures 3A and 3B, the first stop assembly 32a and the second stop assembly 32b each further include a fixing structure 322. The two fixing structures 322 are respectively fixed to the periphery of the connecting disk 1; specifically, for example, they are fixed to opposite sides of the connecting disk 1. The telescopic structures of the first stop assembly 32a and the second stop assembly 32b each include a mating block serving as the telescopic end 321, a spring 323, and a spring pin 324. One end of the spring pin 324 is fixedly connected to the mating block, and the other end of the spring pin 324 is slidably connected to the fixing structure. The spring 323 is sleeved around the outer periphery of the spring pin 324, and the two ends of the spring 323 are respectively connected to the corresponding fixing structure 322 and mating block (i.e., the telescopic end 321). Among them, the spring pin 324 of the first stop component 32a extends along the first straight line direction so that the matching block (i.e., the telescopic end 321 of the first stop component 32a) can be telescoped along the first straight line direction; the spring pin 324 of the second stop component 32b extends along the second straight line direction so that the matching block (i.e., the telescopic end 321 of the first stop component 32a) can be telescoped along the second straight line direction.

[0072] As will be readily understood, spring pin 324 is a rigid structure. When the connection disk 1 tends to rotate in the opposite direction, the first surface 3212 of the telescopic end 321 abuts against the tooth surface connected thereto. This will cause the spring pin 324 to experience a lateral thrust. However, due to its rigid structure, the spring pin 324 will not deform. Instead, it will exert a force in the opposite direction, opposing the thrust exerted by the tooth surface, thereby preventing the connection disk 1 from rotating in the opposite direction.

[0073] Furthermore, as described above, since the connection disk 1 has a certain speed and its kinetic energy cannot be completely dissipated when it collides with the stop assembly 2, the remaining kinetic energy is transferred to the stop assembly 3 and converted into internal energy in the form of vibration because the stop assembly 3 blocks the reverse movement of the connection disk 1. Since the stop assembly 3 in this embodiment includes an elastic spring 323, the elasticity of the spring 323 can be used to dissipate vibration and prevent damage to other rigid components.

[0074] Specifically, in some embodiments, the mating block has a first surface 3212 that is parallel or substantially parallel to the extension direction of the corresponding spring pin 324 and can abut against the tooth surface of an adjacent gear tooth. In this way, the mating block can apply a perpendicular thrust to the tooth surface of the adjacent gear tooth to prevent the connection disk 1 from rotating in the opposite direction.

[0075] In some embodiments, as shown in FIG4 , the switching assembly 31 includes a rotary motor 311 (shown as a dotted structure in FIG4 ) and a cam 312. The power output end of the rotary motor 311 is connected to the cam 312, which is used to drive the cam 312 to rotate. The cam 312 is located between the first stop assembly 32a and the second stop assembly 32b. The cam 312 is used to push one of the two telescopic ends 321 away from the connecting disk 1, that is, to enter a non-stop state, while the other end is not affected by the pushing force and remains extended and in a stop state. Thus, the rotary motor 311 and the cam 312 can drive the first stop assembly 32a and the second stop assembly 32b to switch between the stop state and the non-stop state.

[0076] In some embodiments, as shown in FIG5 , the connection disk 1 further comprises a connection protrusion 15 protruding from its outer circumference. The drive source 4 comprises a drive motor, the main body of which is fixed relative to the connection disk 1 ; a power output end 41 of the drive motor is hingedly connected to the connection protrusion 15 , and the power output end 41 of the drive motor can extend and retract in a specified direction to drive the connection disk 1 to rotate in the first or second rotational direction.

[0077] In some embodiments, as shown in Figures 2 and 7 , the furnace door drive device further includes a fixed plate 5 and a bearing 6 . As shown in Figure 7 , the fixed plate 5 has a bearing support 51 , which is used to be fixedly connected to the inner ring of the bearing 6 .

[0078] As shown in Figure 7, the connecting disk 1 includes a first sub-connecting disk 11 and a second sub-connecting disk 12, which are coaxially arranged. The gear structure is formed on the outer periphery of the first sub-connecting disk 11. The first sub-connecting disk 11 has a bearing mounting hole, which is, for example, coaxially arranged with the bearing 6 and is used to connect to the outer ring of the bearing 6 to ensure that the central axis of the first sub-connecting disk 11 is fixed and enables the first sub-connecting disk 11 to rotate about its own axis, thereby ensuring that the gear structure can rotate about its own axis. The second sub-connecting disk 12 is located on the side of the first sub-connecting disk 11 away from the fixed disk 5 and is fixedly connected to the first sub-connecting disk 11. The limiting portion 13 is arranged on the outer periphery of the second sub-connecting disk 12, so that the limiting portion 13 and the stop portion 14 are arranged at different levels, thereby preventing interference between the limiting portion 13 and the first stop assembly 32a and the second stop assembly 32b during the rotation of the connecting disk 1. Specifically, the limiting portion 13 includes, for example, a limiting protrusion protruding from the outer periphery of the second sub-connecting disk 12.

[0079] Correspondingly, the stopper assembly 2 for blocking the stopper 13 is disposed on the circumference of the second sub-connection disk 12 to prevent interference with the stopper 14 located on the outer periphery of the first sub-connection disk 11. The connecting protrusion 15 for connecting to the drive motor is also disposed on the circumference of the second sub-connection disk 12 to prevent interference between the power output of the drive motor and the stopper 14, and to prevent interference between the connecting protrusion 15 and the stopper assembly 3.

[0080] In some embodiments, as shown in FIG1 , the limiting assembly 2 includes, for example, two limiting blocks fixed to the periphery of the connecting disk 1 . The two limiting blocks are respectively configured to prevent the limiting portion 13 (e.g., including a limiting protrusion protruding from the outer circumference of the second sub-connecting disk 12 ) from further movement when the connecting disk 1 rotates to a preset limiting position along a first rotational direction and a second rotational direction, thereby preventing the connecting disk 1 from further rotation. Accordingly, the number of preset positions at which the connecting disk 1 stops is also two. Furthermore, these two preset positions can correspond to the open and closed positions of the furnace door 02 , respectively, so that the opening and closing of the furnace door 02 can be controlled by stopping the connecting disk 1 at these two preset positions.

[0081] Exemplarily, the stopper is made of nylon material, for example. The nylon material has good toughness and elasticity to mitigate the impact caused by the collision with the limiting portion 13 .

[0082] In other embodiments, the stopper 14 is not limited to the aforementioned gear structure, and may also be, for example, a plurality of grooves formed on the outer circumference of the connecting disk 1. Accordingly, the stopper assembly 3 may be, for example, a telescopic rod that can be plugged into the grooves. The telescopic rod can be disconnected from the grooves when the connecting disk 1 rotates forward, and can be inserted into the grooves when the forward rotation of the connecting disk 1 is stopped, thereby promptly preventing the connecting disk 1 from rotating in the reverse direction.

[0083] As another technical solution, this embodiment further provides a semiconductor heat treatment apparatus, as shown in FIG8 , comprising: a furnace body 01 , a furnace door 02 , and the furnace door drive device described above. The furnace door drive device is configured to drive furnace door 02 to rotate to a position away from the film transfer opening of furnace body 01 , thereby controlling the opening and closing of furnace body 01 .

[0084] In some embodiments, as shown in FIG9 , the semiconductor heat treatment equipment further includes a microenvironment chamber 03 for accommodating a wafer boat carrying wafers. Furthermore, a wafer boat lifting device is provided inside the microenvironment chamber 03 for driving the wafer boat up and down. The microenvironment chamber 03 is provided below the furnace body 01 and is connectable to the wafer transfer port at the bottom of the furnace body 01. Thus, the furnace door 02 provided at the wafer transfer port can also serve to isolate the furnace body 01 from the microenvironment chamber 03, thereby ensuring the cleanliness of the interior of the furnace body 01. Furthermore, the furnace door 02 can also serve as a heat insulator to prevent a large amount of heat from being transferred from the furnace body 01 to the microenvironment chamber 03, thereby preventing damage to the electrical components inside the microenvironment chamber 03.

[0085] Furthermore, in some embodiments, as shown in FIG10 , furnace door 02 includes a quartz plate 021 and a water-cooling plate 022. Water-cooling plate 022 is connected to the furnace door drive device and has a cooling function. Quartz plate 021 is stacked on the side of water-cooling plate 022 near the inner cavity of furnace body 01 to provide thermal insulation between water-cooling plate 022 and furnace body 01.

[0086] Moreover, since the semiconductor heat treatment equipment proposed in this embodiment adopts the furnace door driving device described above, and it can prevent the furnace door 02 from rotating in the opposite direction when the furnace door 02 rotates to a preset position to avoid the furnace door 02 from vibrating too much, the semiconductor heat treatment equipment proposed in this embodiment can prevent the furnace door 02 from being damaged due to excessive vibration, thereby avoiding the occurrence of problems such as the quartz plate 021 being broken and the internal parts of the water-cooling plate 022 being damaged.

[0087] It is understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present application, and the present application is not limited thereto. Those skilled in the art may make various modifications and improvements without departing from the spirit and substance of the present application, and such modifications and improvements are also considered to be within the scope of protection of the present application.

Claims

1. A furnace door driving device for semiconductor heat treatment equipment, used to drive the furnace door of the semiconductor heat treatment equipment to rotate; characterized in that: include: A connecting plate, a limit assembly, a stop assembly and a driving source; The driving source is connected to the connecting disk and is used to drive the connecting disk to rotate around its own axis; The connecting disk is connected to the furnace door and is used to drive the furnace door to rotate; the connecting disk has a limiting portion and a stopping portion; the limiting assembly is used to cooperate with the limiting portion when the connecting disk rotates to a preset limiting position, so that the connecting disk stops rotating in the original rotation direction; The stop assembly is used to cooperate with the stop portion when the limiting assembly cooperates with the limiting portion to prevent the connecting disk from rotating in a direction opposite to the original rotation direction.

2. The furnace door driving device according to claim 1, characterized in that: The original rotation direction is a first rotation direction or a second rotation direction opposite to the first rotation direction; The stopper comprises a gear structure; The stop assembly is used to abut against the gear structure when the connecting disk rotates along the second rotational direction, and to release the abutment against the gear structure when the connecting disk rotates along the first rotational direction; or, to abut against the gear structure when the connecting disk rotates along the first rotational direction, and to release the abutment against the gear structure when the connecting disk rotates along the second rotational direction.

3. The furnace door driving device according to claim 2, characterized in that: The stop assembly includes a switching assembly and a first stop assembly and a second stop assembly fixed to the periphery of the connecting disk; wherein, The switching assembly is used to switch the first stop assembly to the stop state and the second stop assembly to the non-stop state when the connecting disk rotates along the first rotation direction; when the connecting disk rotates along the second rotation direction, the second stop assembly is switched to the stop state and the first stop assembly is switched to the non-stop state; Among them, the non-stop state is a state away from the gear structure; the stop state is that the connecting disk rotates along the original rotation direction and cooperates with the gear structure, and when the connecting disk rotates in the direction opposite to the original rotation direction, it resists against the gear structure.

4. The furnace door driving device according to claim 3, characterized in that: The first stop assembly and the second stop assembly both include: a telescopic structure; the telescopic structure has a telescopic end that is telescopic; The telescopic end remains extended when not subject to external force, so that the corresponding first stop component or the second stop component is in the stop state; The switching assembly is used to drive the telescopic end of the second stop assembly to retract to a position away from the connecting disk when the connecting disk rotates along the first rotation direction, so that the second stop assembly switches to the non-stop state; and to drive the telescopic end of the first stop assembly to retract to a position away from the connecting disk when the connecting disk rotates along the second rotation direction, so that the telescopic end of the first stop assembly switches to the non-stop state.

5. The furnace door driving device according to claim 4, characterized in that: The telescopic ends of the first stop assembly and the second stop assembly are respectively located on both sides of the connecting plate; The telescopic end of the first stop assembly can be telescopic along a first linear direction; the first linear direction satisfies that when the connecting disk rotates along the first rotation direction, the gear structure can push the telescopic end to retract, and when the connecting disk rotates along the second rotation direction, the telescopic end can abut against the tooth surface of the corresponding gear tooth in the gear structure; The telescopic end of the second stop assembly can be telescopic along a second straight line direction; the second straight line direction satisfies that when the connecting disk rotates along the second rotation direction, the gear structure can push the telescopic end to retract, and when the connecting disk rotates along the first rotation direction, the telescopic end can abut against the corresponding tooth surface in the gear structure.

6. The furnace door driving device according to claim 5, characterized in that: The first stop assembly and the second stop assembly both further include a fixing structure; the two fixing structures are respectively fixed to the periphery of the connecting disk; The telescopic structure also includes a matching block, a spring and a spring pin serving as the telescopic end; The spring pin of the first stop assembly extends along the first linear direction; The spring pin of the second stop assembly extends along the second straight line direction; one end of the spring pin is fixedly connected to the matching block, and the other end of the spring pin is slidably connected to the fixed structure; The spring is sleeved on the outer periphery of the spring pin, and two ends of the spring are respectively connected to the corresponding fixing structure and the matching block.

7. The furnace door driving device according to claim 6, characterized in that: The matching block has a first surface; the first surface is parallel to the extension direction of the corresponding spring pin and can be abutted against the tooth surface of the adjacent gear tooth.

8. The furnace door driving device according to claim 2, characterized in that: The limiting portion includes a limiting protrusion protruding from the outer peripheral surface of the connecting disk; The limiting assembly includes two limiting blocks fixed on the periphery of the connecting disk, and the two limiting blocks are respectively used to block the limiting protrusion from continuing to move when the connecting disk rotates to the preset limiting position along the first rotation direction and the second rotation direction, so as to block the connecting disk from continuing to rotate.

9. The furnace door driving device according to claim 4, characterized in that: The switching assembly includes a rotating motor and a cam; wherein the power output end of the rotating motor is connected to the cam to drive the cam to rotate; The cam is located between the first stop assembly and the second stop assembly; the cam is used to push one of the two telescopic ends away from the connecting disk to drive the first stop assembly or the second stop assembly to switch to the non-stop state.

10. The furnace door driving device according to claim 2, characterized in that: It also includes a fixed disk and a bearing; the fixed disk has a bearing support, and the bearing support is used to be fixedly connected to the inner ring of the bearing; The connection disk comprises a first sub-connection disk and a second sub-connection disk arranged coaxially; wherein the gear structure is formed on the outer periphery of the first sub-connection disk; the first sub-connection disk has a bearing mounting hole, and the bearing mounting hole is used to connect with the outer ring of the bearing; The second sub-connection disk is located on a side of the first sub-connection disk away from the fixed disk and is fixedly connected to the first sub-connection disk; the limiting portion is arranged on the outer periphery of the second sub-connection disk.

11. A semiconductor heat treatment device, characterized in that: include: A furnace body, a furnace door and a furnace door driving device as claimed in any one of claims 1 to 10; The furnace door driving device is used to drive the furnace door to rotate to the film transmission opening of the furnace body, or to drive the furnace door to rotate to a position away from the film transmission opening of the furnace body, so as to control the opening and closing of the film transmission opening of the furnace body.

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