Laminated film and method for producing laminated film

Abstract

This laminated film comprises: a long protective film; a plurality of adhesive layers provided on the protective film; a pressure-sensitive adhesive film provided on the plurality of adhesive layers; and a defective product identification mark provided at a position, on the pressure-sensitive adhesive film, corresponding to a defective adhesive layer that is an adhesive layer which is defective among the plurality of adhesive layers. This method for producing a laminated film comprises: a preparation step for preparing a raw film comprising a long protective film, a plurality of adhesive layers provided on the protective film, and a pressure-sensitive adhesive film provided on the plurality of adhesive layers; an inspection step for inspecting the plurality of adhesive layers of the raw film; and a marking step for imparting a defective product identification mark to a position, on the pressure-sensitive adhesive film, corresponding to the defective adhesive layer that is an adhesive layer determined to be defective in the inspection step.

Description

Laminated film and method for manufacturing laminated film

[0001] The present disclosure relates to a laminate film and a method for manufacturing a laminate film.

[0002] In the manufacture of semiconductor devices, a dicing process is performed in which a semiconductor wafer is diced into multiple semiconductor chips, followed by a bonding process in which the individual semiconductor chips are bonded to a substrate or other workpiece. Patent Document 1 describes a laminated film that integrates a dicing tape used in dicing the semiconductor wafer and a bonding tape used in bonding the semiconductor chips to a substrate or other workpiece. This laminated film is also referred to as a dicing / die-bonding integrated film. Patent Document 1 also describes providing multiple adhesive layers that function as die-bonding tape on a protective film, and providing a pressure-sensitive adhesive film that functions as dicing tape on the multiple adhesive layers.

[0003] Japanese Patent Application Laid-Open No. 2005-191322

[0004] The laminated film described in Patent Document 1 has multiple adhesive layers on a protective film, allowing adhesive layers to be attached to multiple semiconductor wafers using a single laminated film. However, if a defective adhesive layer is formed due to the inclusion of foreign matter in the adhesive layer, this could result in a defective semiconductor device. Patent Document 1 also describes providing markings on the adhesive film to identify the positions of each of the multiple adhesive layers. However, Patent Document 1 does not disclose a technology for preventing the generation of such defective semiconductor devices.

[0005] An object of the present disclosure is to provide a laminate film that can suppress the occurrence of defective semiconductor devices, and a method for manufacturing the laminate film.

[0006] A laminated film according to one aspect of the present disclosure comprises a long protective film, a plurality of adhesive layers provided on the protective film, an adhesive film provided on the plurality of adhesive layers, and a marking for identifying defective products provided on the adhesive film at a position corresponding to a defective adhesive layer, which is an adhesive layer of a defective product among the plurality of adhesive layers.

[0007] In this laminated film, defective product identification markings are provided at positions on the adhesive film corresponding to defective adhesive layers, so that when manufacturing semiconductor devices, the positions of defective adhesive layers can be identified by detecting the defective product identification markings. Therefore, by attaching the adhesive layers excluding the defective adhesive layers to a semiconductor wafer, the occurrence of defective semiconductor devices can be suppressed.

[0008] The adhesive film may be provided on the protective film and the plurality of adhesive layers so as to cover the plurality of adhesive layers, and the defective product identification marking may be provided on the adhesive film. In this laminated film, the adhesive film is provided on the protective film and the plurality of adhesive layers so as to cover the plurality of adhesive layers, and the defective product identification marking is provided on the adhesive film, so that the defective product identification marking can be detected even after the adhesive layer is peeled off from the protective film.

[0009] The adhesive layers may be spaced apart from one another and arranged in the longitudinal direction of the protective film. In this laminated film, the adhesive layers are spaced apart from one another and arranged in the longitudinal direction, so that the adhesive layers can be easily attached to the semiconductor wafer.

[0010] When a pair of adhesive layers adjacent to a defective adhesive layer in the longitudinal direction among the plurality of adhesive layers is a first adhesive layer and a second adhesive layer, the defective product identification marking may be provided in a region from a first virtual line passing through the center between the first adhesive layer and the defective adhesive layer and extending in the width direction perpendicular to the longitudinal direction of the protective film to a second virtual line passing through the center between the second adhesive layer and the defective adhesive layer and extending in the width direction. In this laminate film, the defective product identification marking is provided in a region from the first virtual line passing through the center between the first adhesive layer and the defective adhesive layer and extending in the width direction to the second virtual line passing through the center between the second adhesive layer and the defective adhesive layer and extending in the width direction, so that the position of the defective adhesive layer can be easily identified from the defective product identification marking.

[0011] The defective product identification marking may be provided in a region from the first virtual line to a third virtual line that passes through the center of the defective adhesive layer and extends in the width direction. In this laminate film, the defective product identification marking is provided in a region from the first virtual line that passes through the center between the first adhesive layer and the defective adhesive layer and extends in the width direction perpendicular to the longitudinal direction of the protective film to the third virtual line that passes through the center of the defective adhesive layer and extends in the width direction. Therefore, the location of the defective adhesive layer can be easily identified from the defective product identification marking. In particular, when the laminate film is transported from the first adhesive layer side relative to the second adhesive layer to detect the defective adhesive layer and the defective product identification marking, the difference between the detection timing of the defective adhesive layer and the detection timing of the defective product identification marking can be reduced, making it even easier to identify the location of the defective adhesive layer from the defective product identification marking.

[0012] The defective product identification marking may be provided in a region from the first virtual line to a fourth virtual line that passes through the tip of the defective adhesive layer on the first adhesive layer side and extends in the width direction. In this laminate film, the defective product identification marking is provided in a region from the first virtual line that passes through the center between the first adhesive layer and the defective adhesive layer and extends in the width direction perpendicular to the longitudinal direction of the protective film to the fourth virtual line that passes through the tip of the defective adhesive layer on the first adhesive layer side and extends in the width direction. Therefore, the location of the defective adhesive layer can be easily identified from the defective product identification marking. In particular, when the laminate film is transported from the first adhesive layer side relative to the second adhesive layer to detect the adhesive layer and the defective product identification marking, the difference between the detection timing of the adhesive layer and the detection timing of the defective product identification marking can be reduced, making it even easier to identify the location of the defective adhesive layer from the defective product identification marking.

[0013] The defective product identification marking may be provided in a region opposite the defective adhesive layer of a pair of fifth virtual lines extending in the longitudinal direction and passing through both ends of the defective adhesive layer in the width direction of the protective film, which is perpendicular to the longitudinal direction. In this laminate film, the defective product identification marking is provided in a region opposite the defective adhesive layer of a pair of fifth virtual lines extending in the longitudinal direction and passing through both ends of the defective adhesive layer in the width direction, so that even if the defective product identification marking has thickness, it is possible to prevent the shape of the defective product identification marking from being transferred to the adhesive layer.

[0014] The defective product identification marking may be provided on a non-adhesive layer area excluding the adhesive layers of the pressure-sensitive adhesive film. In this laminated film, the defective product identification marking is provided on the non-adhesive layer area, so that the effect of providing the defective product identification marking on the adhesive layer can be reduced.

[0015] The defective product identification marking may be a filled-in figure. In this laminate film, the defective product identification marking is a filled-in figure, so the defective product identification marking can be easily detected. Moreover, even if identification character information for identifying the adhesive layer is provided on the laminate film, this identification character information and the defective product identification marking can be easily distinguished.

[0016] The area of ​​the defective product identification marking is 50 mm ２ Over 1500mm ２ In this laminated film, the area of ​​the defective product identification marking may be 50 mm or less. ２ Over 1500mm ２ Since the defect identification markings are less than 100%, the defect identification markings can be easily detected.

[0017] The total light transmittance of the defective product identification marking may be 0% or more and 10% or less. In this laminate film, the total light transmittance of the defective product identification marking is 0% or more and 10% or less, so that the defective product identification marking can be easily detected.

[0018] The defective product identification marking may be a code symbol. In this laminate film, since the defective product identification marking is a code symbol, by associating information about the defective adhesive layer with the code symbol, it is possible to obtain information about the defective adhesive layer when the defective product identification marking is detected.

[0019] The defective product identification marking may be an X. In this laminated film, the defective product identification marking is an X, so that the defective product identification marking can be easily detected visually.

[0020] The defective product identification marking may be a slit formed in the laminate film. In this laminate film, the defective product identification marking is a slit formed in the laminate film, so that the defective product identification marking can be easily detected.

[0021] The longitudinal tip of the protective film of the defective product identification marking may be curved. In this laminated film, the longitudinal tip of the defective product identification marking is curved, which can prevent stress from concentrating on the longitudinal tip of the defective product identification marking when the laminated film is pulled in the longitudinal direction. This can prevent the laminated film from breaking starting from the longitudinal tip of the defective product identification marking.

[0022] The length of the slit in the longitudinal direction of the protective film may be 10 mm or more and 100 mm or less. In this laminated film, the length of the slit in the longitudinal direction is 10 mm or more and 100 mm or less, so that the defective product identification marking can be easily detected and breakage when pulled in the longitudinal direction can be suppressed.

[0023] The width of the slit in the width direction perpendicular to the longitudinal direction of the protective film may be 2 mm or more and 40 mm or less. In this laminated film, the width of the slit in the width direction is 2 mm or more and 40 mm or less, so that the defective product identification marking can be easily detected and breakage when pulled in the longitudinal direction can be suppressed.

[0024] The defective product identification marking may be a hole formed in the laminate film. In this laminate film, the defective product identification marking is a hole formed in the laminate film, which makes it possible to easily detect the defective product identification marking while preventing the laminate film from breaking when pulled in the longitudinal direction.

[0025] One defective product identification marking may be provided for one defective adhesive layer. In this laminate film, one defective product identification marking is provided for one defective adhesive layer, so that the number of defective product identification markings can be minimized and contamination of the adhesive layer caused by the defective product identification markings can be suppressed.

[0026] A plurality of defective product identification markings may be provided at different positions on one defective adhesive layer. In this laminate film, a plurality of defective product identification markings are provided at different positions on one defective adhesive layer, which increases the flexibility of the installation of the marking detection unit that detects the defective product identification markings. Furthermore, when semiconductor devices are manufactured in multiple facilities where the installation positions of the marking detection units that detect the defective product identification markings are different, the versatility of the laminate film can be increased by providing the defective product identification markings at positions corresponding to each facility.

[0027] A laminated film manufacturing method according to one aspect of the present disclosure is a laminated film manufacturing method for manufacturing any of the above-mentioned laminated films, and includes a preparation process for preparing an original film having a long protective film, a plurality of adhesive layers provided on the protective film, and a pressure-sensitive adhesive film provided on the plurality of adhesive layers; an inspection process for inspecting the plurality of adhesive layers of the original film; and a marking process for applying a marking for identifying a defective product to a position on the pressure-sensitive adhesive film corresponding to a defective adhesive layer, which is an adhesive layer determined to be defective in the inspection process.

[0028] This method of manufacturing a laminated film inspects the multiple adhesive layers of the original film and applies markings for identifying defective products to positions on the adhesive film corresponding to the defective adhesive layers, thereby making it possible to manufacture a laminated film that can suppress the generation of defective semiconductor devices.

[0029] According to the present disclosure, it is possible to suppress the occurrence of defective semiconductor devices.

[0030] FIG. 1 is a plan view of a laminated film according to an embodiment. FIG. 2 is a schematic cross-sectional view taken along line II-II in FIG. 1. FIG. 3 is a schematic front view showing the laminated film shown in FIG. 1 wound into a roll. FIG. 4 is a plan view showing an example of an area where a defective product identification marking is provided. FIG. 5 is a plan view showing an example of an area where a defective product identification marking is provided. FIG. 6 is a plan view showing an example of an area where a defective product identification marking is provided. FIG. 7 is a plan view showing an example of an area where a defective product identification marking is provided. FIG. 8 is a plan view showing an example of the position of a defective product identification marking. FIG. 9 is a plan view showing an example of the position of a defective product identification marking. FIG. 10 is a plan view showing an example of the position of a defective product identification marking. FIG. 11 is a plan view showing an example of the position of a defective product identification marking. FIGS. 12(a), 12(b), 12(c), and 12(d) are plan views of defective product identification markings for explaining examples of the shapes of the defective product identification markings. 13(a) and 13(b) are plan views of a laminated film for explaining examples of the shape of a slit, which is a marking for identifying a defective product. FIGS. 14(a) and 14(b) are plan views of a laminated film for explaining examples of the shape of a slit, which is a marking for identifying a defective product. FIGS. 15(a) and 15(b) are plan views of a laminated film for explaining examples of the shape of a hole, which is a marking for identifying a defective product. FIGS. 16(a) and 16(b) are plan views of a laminated film for explaining examples of the shape of a hole, which is a marking for identifying a defective product. FIG. 17 is a schematic diagram showing the configuration of an inspection device applied to a manufacturing method of a laminated film according to an embodiment.

[0031] Hereinafter, a laminate film and a method for manufacturing a laminate film according to one aspect of the present disclosure will be described in detail with reference to the drawings. In the following description, the same or corresponding parts will be denoted by the same reference numerals, and duplicated explanations will be omitted.

[0032] In this specification and claims, the term "layer" encompasses not only structures with shapes formed over the entire surface when viewed in a plan view, but also structures with shapes formed only on a portion of the surface. The term "process" includes not only independent processes but also processes that cannot be clearly distinguished from other processes, as long as the intended purpose of the process is achieved. Numerical ranges indicated using "to" indicate ranges that include the numerical values ​​before and after "to" as the minimum and maximum values, respectively. Furthermore, in numerical ranges described in stages in this specification, the upper or lower limit of a certain numerical range may be replaced with the upper or lower limit of the numerical range of another stage.

[0033] [Laminated Film] FIG. 1 is a plan view of a laminated film according to an embodiment. FIG. 2 is a schematic cross-sectional view taken along line II-II in FIG. 1. As shown in FIGS. 1 and 2, the laminated film 1 according to this embodiment is a long film used, for example, in the manufacture of semiconductor devices, for fixing a semiconductor wafer in a dicing process, or for joining a semiconductor chip to a substrate or other member to be joined in a die bonding process. FIG. 3 is a schematic front view showing the laminated film shown in FIG. 1 wound into a roll. As shown in FIG. 3, the laminated film 1 is generally stored in a rolled state, and when used, the required amount is unwound from a roll 9. The roll 9 is the laminated film 1 wound into a roll.

[0034] As shown in FIGS. 1 and 2, the laminated film 1 includes a long protective film 2, a plurality of adhesive layers 3, a long adhesive film 4, and a marking 5 for identifying defective products.

[0035] Each of the multiple adhesive layers 3 (hereinafter simply referred to as "adhesive layer 3") is a portion to be attached to a semiconductor wafer. The multiple adhesive layers 3 are provided on one surface 2a of the protective film 2. The multiple adhesive layers 3 are spaced apart from one another and arranged at regular intervals in the longitudinal direction L of the protective film 2. The longitudinal direction L is also the extending direction of the protective film 2. Of the two directions of the longitudinal direction L, the direction in which the film is unwound from the roll 9 (see FIG. 3) is referred to as the first longitudinal direction L1. The multiple adhesive layers 3 are also arranged at the center of the laminate film 1 in the width direction W, which is perpendicular to the longitudinal direction L, and are spaced apart from one end 1a and the other end 1b of the laminate film 1 in the width direction W. The adhesive layer 3 has a circular shape in a planar view according to the planar shape of the semiconductor wafer to which it is attached. The thickness of the adhesive layer 3 is, for example, 3 μm to 100 μm.

[0036] The adhesive film 4 is formed into an elongated shape extending in the longitudinal direction L, similar to the protective film 2, and is provided on the protective film 2 and the plurality of adhesive layers 3 so as to cover the entire one surface 2a of the protective film 2 and the plurality of adhesive layers 3. The adhesive film 4 has a two-layer structure consisting of an adhesive layer 6 and a base film 7. The adhesive film 4 is arranged so that the adhesive layer 6 faces the protective film 2. The thickness of the adhesive layer 6 is, for example, 1 μm to 100 μm. The thickness of the base film 7 is, for example, 30 μm to 150 μm.

[0037] Identification character information 8 may be printed on the adhesive film 4 to identify the laminate film 1, the adhesive layer 3, or the adhesive film 4. The identification character information 8 is composed of linear characters such as alphabets and numbers.

[0038] The defective product identification marking 5 is a mark for identifying a defective adhesive layer 3A, which is a defective adhesive layer 3 among the plurality of adhesive layers 3. The defective product identification marking 5 is provided at a position on the adhesive film 4 corresponding to the defective adhesive layer 3A. The defective adhesive layer 3A is, for example, an adhesive layer 3 that has been determined to be defective by an inspection device 10 (see FIG. 17 ) that inspects adhesive layers 3. An adhesive layer 3 being defective refers to, for example, a case where foreign matter has been mixed into the adhesive layer 3. One defective product identification marking 5 may be provided on the adhesive film 4 for one defective adhesive layer 3A, or multiple defective product identification markings 5 ​​may be provided for one defective adhesive layer 3A.

[0039] The position corresponding to the defective adhesive layer 3A is a position that has a predetermined positional relationship with the defective adhesive layer 3A. The position that has a predetermined positional relationship with each adhesive layer 3 is a planned marking position (not shown). The planned marking positions corresponding to the defective adhesive layers 3A other than the defective adhesive layer 3A do not have a defective product identification marking 5, and the planned marking positions corresponding to the defective adhesive layer 3A do have a defective product identification marking 5. Therefore, when there are multiple defective adhesive layers 3A in the laminate film 1, the positional relationship between the defective adhesive layer 3A and the defective product identification marking 5 is the same for all of the defective adhesive layers 3A.

[0040] 4 to 7 are plan views showing examples of areas where defective product identification markings are provided. As shown in FIGS. 1 and 4 to 7, a pair of adhesive layers 3 adjacent to a defective adhesive layer 3A in the longitudinal direction L among the plurality of adhesive layers 3 are designated as a first adhesive layer 31 and a second adhesive layer 32. The first adhesive layer 31 is the adhesive layer 3 adjacent to the defective adhesive layer 3A on the first longitudinal direction L1 side, and the second adhesive layer 32 is the adhesive layer 3 adjacent to the defective adhesive layer 3A on the opposite side of the first longitudinal direction L1. A virtual line passing through a center B1 between the first adhesive layer 31 and the defective adhesive layer 3A and extending in the width direction W is designated as a first virtual line A1 (see FIGS. 4 to 6). A virtual line passing through a center B2 between the second adhesive layer 32 and the defective adhesive layer 3A and extending in the width direction W is designated as a second virtual line A2 (see FIG. 4). A virtual line passing through a center B3 of the defective adhesive layer 3A and extending in the width direction W is designated as a third virtual line A3 (see FIG. 5). A virtual line passing through the tip B4 of the defective adhesive layer 3A on the first adhesive layer 31 side and extending in the width direction W is defined as a fourth virtual line A4 (see FIGS. 1 and 6). A pair of virtual lines passing through both ends B5, B5 of the defective adhesive layer 3A in the width direction W and extending in the longitudinal direction L is defined as a fifth virtual line A5, A5 (see FIG. 7).

[0041] The defective product identification marking 5 may be provided, for example, in a first region C1 on the adhesive film 4, which is a region from the first virtual line A1 to the second virtual line A2, as shown in Fig. 4 . Alternatively, the defective product identification marking 5 may be provided in a second region C2 on the adhesive film 4, which is a region from the first virtual line A1 to the third virtual line A3, as shown in Fig. 5 . Alternatively, the defective product identification marking 5 may be provided in a third region C3 on the adhesive film 4, which is a region from the first virtual line A1 to the fourth virtual line A4, as shown in Fig. 6 . Alternatively, the defective product identification marking 5 may be provided in fourth regions C4, C4 on the opposite side of a pair of fifth virtual lines A5, A5 from the defective adhesive layer 3A, as shown in Fig. 7 . Of the fourth regions C4, C4, the fourth region C4 located on one end 1a side is referred to as a fourth region C41, and the fourth region C4 located on the other end 1b side is referred to as a fourth region C42. Of the pair of fifth virtual lines A5, A5, the fifth virtual line A5 located on the one end 1a side is referred to as a fifth virtual line A51, and the fifth virtual line A5 located on the other end 1b side is referred to as a fifth virtual line A52. In this case, the fourth region C41 is the region on the one end 1a side of the fifth virtual line A51, and the fourth region C42 is the region on the other end 1b side of the fifth virtual line A52.

[0042] The defective product identification marking 5 may be provided on the multiple adhesive layers 3 of the adhesive film 4, but it is preferable that it be provided on the non-adhesive layer area D (see Figure 1) excluding the multiple adhesive layers 3 of the adhesive film 4.

[0043] 8 to 11 are plan views showing examples of the positions of the defective product identification markings. The defective product identification marking 5 may be located on the fourth virtual line A4, as shown in FIG. 1 . Alternatively, the defective product identification marking 5 may be located on an end portion of the width direction W that is spaced apart from the end 1a, i.e., near the end 1a, as shown in FIG. 1 . Alternatively, the defective product identification marking 5 may be located on an end portion of the width direction W that is spaced apart from the end 1b, i.e., near the end 1b, as shown in FIG. 8 . Alternatively, the defective product identification marking 5 may be located on an end portion of the width direction W that is spaced apart from the end 1b, i.e., near the end 1b, as shown in FIG. 9 . Alternatively, the defective product identification marking 5 may be located on an end portion of the width direction W that is spaced apart from the end 1b, as shown in FIG. 10 . Alternatively, the defective product identification marking 5 may be located on the identification character information 8, as shown in FIG. 10 .

[0044] When a plurality of defective product identification markings 5 ​​are provided for one defective adhesive layer 3A, the plurality of defective product identification markings 5 ​​are provided at different positions. For example, as shown in Fig. 11, when two defective product identification markings 5 ​​are provided for one defective adhesive layer 3A, one defective product identification marking 5 may be provided near one end 1a and the other defective product identification marking 5 may be provided near the other end 1b.

[0045] The defective product identification marking 5 may have any shape, such as a linear symbol or drawing, a filled-in figure, or a code symbol.

[0046] Examples of linear symbols include alphabets, Greek letters, numbers, X marks, horizontal lines, vertical lines, single diagonal lines, multiple diagonal lines, check marks, circles, stars, spiral marks, single wavy lines, multiple wavy lines, > marks, < marks, ≧ marks, ≦ marks, asterisks, and dots.

[0047] Examples of shapes for the defective product identification marking 5 include circles, polygons, stars, Torx (registered trademark) shapes, jagged circles, crescents, semicircles, flowers, Y-shapes, X-shapes, M-shapes, V-shapes, U-shapes, convex shapes, and concave shapes. Circles include, for example, perfect circles and ellipses. Polygons include triangles, quadrangles, pentagons, hexagons, and the like. Quadrilaterals include squares, rectangles (rectangles), trapezoids, rhombuses, and the like. Triangles include equilateral triangles, isosceles triangles, right-angled triangles, inverted triangles, and the like.

[0048] 12(a), 12(b), 12(c), and 12(d) are plan views of defective product identification markings to explain examples of the shapes of the defective product identification markings. FIG. 12(a) shows an example of a circular defective product identification marking 5. FIGS. 12(b) to 12(d) show examples of polygonal defective product identification markings 5. FIG. 12(b) shows an example of a square defective product identification marking 5. FIG. 12(c) shows an example of a rectangular defective product identification marking 5, and FIG. 12(d) shows an example of a triangular defective product identification marking 5.

[0049] A filled-in figure is not a figure with only its outline, but a figure with the inside of its outline filled in. The defective product identification markings 5 ​​shown in Figures 12(a), 12(b), 12(c), and 12(d) show examples of filled-in figures.

[0050] A code symbol is a symbol (sign) to which various information is associated. Examples of code symbols include one-dimensional barcodes and two-dimensional barcodes. Examples of one-dimensional barcodes include Interleaved 2 of 5 (ITF), which is composed of numbers only, and Code 39, which includes numbers, letters, and symbols. Examples of two-dimensional barcodes include stacked two-dimensional barcodes and matrix two-dimensional codes such as QR Code (registered trademark).

[0051] The defective product identification marking 5 may be printed on the adhesive film 4, may be a sticker attached to the adhesive film 4, may be a slit (notch) formed in the laminated film 1, or may be a hole formed in the laminated film 1.

[0052] When the defective product identifying marking 5 is a sticker attached to the adhesive film 4, the thickness of the sticker is, for example, 20 μm to 200 μm.

[0053] The slit (notch) serving as the defective product identification marking 5 is a notch extending from one end 1a or the other end 1b of the laminate film 1. In other words, the slit (notch) is a notch that opens at one end 1a or the other end 1b of the laminate film 1. When the defective product identification marking 5 is a slit formed in the laminate film 1, the shape of the slit serving as the defective product identification marking 5 may be, for example, a circle, a polygon, a star, a Torx shape, a jagged circle, a crescent shape, a semicircle, a flower shape, an M shape, a V shape, a U shape, a shape with a convex shape, or a shape with a concave shape. Examples of circles include perfect circles and ellipses. Examples of polygons include triangles, quadrangles, pentagons, hexagons, and the like. Examples of quadrangles include squares, rectangles (rectangles), trapezoids, rhombuses, and the like. Examples of triangles include equilateral triangles, isosceles triangles, right-angled triangles, inverted triangles, and the like.

[0054] Figures 13(a), 13(b), 14(a), and 14(b) are plan views of laminated films illustrating examples of the shapes of slits that are defective product identification markings. Figure 13(a) shows an example of a defective product identification marking 5 with a triangular slit. Figure 13(b) shows an example of a defective product identification marking 5 with a square slit. Figure 14(a) shows an example of a defective product identification marking 5 with a U-shaped slit. Figure 14(b) shows an example of a defective product identification marking 5 with a pentagonal slit.

[0055] When the defective product identification marking 5 is a slit formed in the laminate film 1, the tip of the defective product identification marking 5 in the longitudinal direction L may be formed in a curved shape. The defective product identification marking 5 shown in Figure 14(a) shows an example of a slit of the defective product identification marking 5 in which the tip in the longitudinal direction L is formed in a curved shape.

[0056] When the defective product identification marking 5 is a slit formed in the laminate film 1, the length L5 of the slit in the longitudinal direction L may be 10 mm or more and 100 mm or less, preferably 15 mm or more and 80 mm or less, and more preferably 20 mm or more and 50 mm or less. When the length of the slit in the longitudinal direction L is not constant, the length L5 of the slit in the longitudinal direction L is the maximum length of the slit in the longitudinal direction L.

[0057] When the defective product identification marking 5 is a slit formed in the laminate film 1, the width W5 of the slit in the width direction W may be 2 mm or more and 40 mm or less, preferably 5 mm or more and 30 mm or less, and more preferably 10 mm or more and 20 mm or less. When the width of the slit in the width direction W is not constant, the width W5 of the slit in the width direction W is the maximum width of the slit in the width direction W.

[0058] When the defective product identification marking 5 is a hole formed in the laminate film 1, the shape of the hole that is the defective product identification marking 5 may be, for example, a circle, a polygon, a star, a Torx shape, a jagged circle, a crescent shape, a semicircle, a flower shape, an M shape, a V shape, a U shape, a shape with a convex shape, or a shape with a concave shape. Examples of circles include perfect circles and ellipses. Examples of polygons include triangles, quadrangles, pentagons, hexagons, and the like. Examples of quadrilaterals include squares, rectangles (rectangles), trapezoids, rhombuses, and the like. Examples of triangles include equilateral triangles, isosceles triangles, right-angled triangles, inverted triangles, and the like.

[0059] 15(a), 15(b), 16(a), and 16(b) are plan views of laminated films illustrating examples of the shapes of holes that are defective product identification markings. FIG. 15(a) shows an example of a defective product identification marking 5 with a circular hole. FIG. 15(b) shows an example of a defective product identification marking 5 with a triangular hole. FIG. 16(a) shows an example of a defective product identification marking 5 with a square hole. FIG. 16(b) shows an example of a defective product identification marking 5 with a hexagonal slit.

[0060] The area of ​​the defective product identification marking 5 is, for example, 50 mm ２ Over 1500mm ２ Below, 300mm ２ Over 1300mm ２ or less than 600 mm ２ More than 1000mm ２ If the defective product identification marking 5 has a portion that is not filled in, the area of ​​the defective product identification marking 5 is the area of ​​the filled in portion.

[0061] The total light transmittance of the defective product identification marking 5 only needs to be clearly different from the total light transmittance of the dicing-die bonding integrated film, and is, for example, 0% to 10%, 0% to 8%, or 0% to 5%. The total light transmittance of the defective product identification marking 5 is the total light transmittance of the entire defective product identification marking 5. Therefore, if there are any unfilled portions in the defective product identification marking 5, the total light transmittance of the defective product identification marking 5 is the total light transmittance of the entire defective product identification marking 5 including the unfilled portions.

[0062] [Method for Manufacturing Laminated Film] Next, a description will be given of a method for manufacturing the laminated film 1. The method for manufacturing the laminated film according to this embodiment includes a preparation step, an inspection step, and a marking step.

[0063] In the preparation step, an original film 101 (see FIG. 17 ) is prepared, which includes a long protective film 2, a plurality of adhesive layers 3 provided on the protective film 2, and a pressure-sensitive adhesive film 4 provided on the protective film 2 and the plurality of adhesive layers 3 so as to cover the plurality of adhesive layers 3. The original film 101 is a film on which no defective product identification marking 5 is provided in the laminated film 1. In the preparation step, a roll of the original film 101 wound into a roll is prepared as the original film 101.

[0064] In the inspection process, the raw film 101 is unwound from a roll on which it is wound, and the adhesive layers 3 of the raw film 101 are inspected. In the inspection process, it is determined whether the adhesive layers 3 are good or bad.

[0065] In the marking process, a defective product identification marking 5 is applied to the adhesive film 4 at a position corresponding to a defective adhesive layer 3A, which is an adhesive layer 3 determined to be defective in the inspection process. On the other hand, a defective product identification marking 5 is not applied to a position corresponding to an adhesive layer 3 determined to be non-defective in the inspection process. In this way, a laminated film 1 is manufactured in which a defective product identification marking 5 is provided at a position on the adhesive film 4 corresponding to the defective adhesive layer 3A.

[0066] Each of the above steps is performed using, for example, an inspection device 10 shown in Fig. 17. Fig. 17 is a schematic diagram showing the configuration of an inspection device applied to the laminated film manufacturing method according to the embodiment. The inspection device 10 shown in Fig. 17 includes a plurality of conveying rollers 11, an inspection unit 12, and a marking unit 13.

[0067] The conveying rollers 11 convey the original film 101 (laminate film 1) between a payout roller (not shown) and a take-up roller (not shown). A predetermined tension is applied to the original film 101 (laminate film 1) during conveyance by the plurality of conveying rollers 11.

[0068] The inspection unit 12 has, for example, a light-emitting unit that outputs detection light and a light-receiving unit that receives the detection light that has been transmitted through or reflected by the original film 101. The inspection unit 12 then inspects the multiple adhesive layers 3 of the original film 101 by identifying an abnormality when the amount of received light exceeds or falls below a set value.

[0069] The marking application unit 13 has, for example, a base unit and a pressing unit that is arranged on the opposite side of the attachment unit with respect to the transport path of the original film 101 and presses a sticker-like defective product identification marking 5 onto the adhesive film 4 of the original film 101. The marking application unit 13 presses the defective product identification marking 5 at a position on the adhesive film 4 that corresponds to a defective adhesive layer 3A, which is an adhesive layer 3 determined to be defective by the inspection unit 12. On the other hand, the marking application unit 13 does not press the defective product identification marking 5 at a position corresponding to an adhesive layer 3 determined to be non-defective by the inspection unit 12. In this way, the defective product identification marking 5 is attached to a position on the adhesive film 4 that corresponds to the defective adhesive layer 3A. The position on the adhesive film 4 that corresponds to the defective adhesive layer 3A can be identified, for example, from the transport distance of the original film 101 from the inspection position of the inspection unit 12 to the attachment position of the marking application unit 13 and the transport speed of the original film 101.

[0070] As described above, in the laminated film 1 according to this embodiment, the defective product identification marking 5 is provided at a position on the adhesive film 4 corresponding to the defective adhesive layer 3A, so that when manufacturing a semiconductor device, the position of the defective adhesive layer 3A can be identified by detecting the defective product identification marking 5. Therefore, by attaching the adhesive layer 3 excluding this defective adhesive layer 3A to a semiconductor wafer, the occurrence of defective semiconductor devices can be suppressed.

[0071] Furthermore, in this laminated film 1, an adhesive film 4 is provided on the protective film 2 and the multiple adhesive layers 3 so as to cover the multiple adhesive layers 3, and a defective product identification marking 5 is provided on the adhesive film 4, so that the defective product identification marking 5 can be detected even after the adhesive layer 3 is peeled off from the protective film 2.

[0072] Furthermore, in this laminated film 1, the plurality of adhesive layers 3 are arranged in the longitudinal direction L at intervals from one another, so that the adhesive layers 3 can be easily attached to the semiconductor wafer.

[0073] Furthermore, in this laminated film 1, when the defective product identification marking 5 is provided in a first region C1 from a first virtual line A1 that passes through the center B1 between the first adhesive layer 31 and the defective adhesive layer 3A and extends in the width direction W to a second virtual line A2 that passes through the center B2 between the second adhesive layer 32 and the defective adhesive layer 3A and extends in the width direction W, the position of the defective adhesive layer 3A can be easily identified from the defective product identification marking 5.

[0074] Furthermore, in this laminate film 1, when the defective product identification marking 5 is provided in the second region C2 from a first virtual line A1 that passes through a center B1 between the first adhesive layer 31 and the defective adhesive layer 3A and extends in the width direction W to a third virtual line A3 that passes through a center B3 of the defective adhesive layer 3A and extends in the width direction W, the position of the defective adhesive layer 3A can be easily identified from the defective product identification marking 5. In particular, when the laminate film 1 is transported from the first longitudinal direction L1 side and the adhesive layer 3 and the defective product identification marking 5 are detected, the difference between the detection timing of the adhesive layer 3 and the detection timing of the defective product identification marking 5 can be reduced, making it even easier to identify the position of the defective adhesive layer 3A from the defective product identification marking 5.

[0075] Furthermore, in this laminate film 1, when the defective product identification marking 5 is provided in a third region C3 from a first virtual line A1 that passes through a center B1 between the first adhesive layer 31 and the defective adhesive layer 3A and extends in the width direction W to a fourth virtual line A4 that passes through a tip B4 of the defective adhesive layer 3A on the first adhesive layer 31 side and extends in the width direction W, the position of the defective adhesive layer 3A can be easily identified from the defective product identification marking 5. In particular, when the laminate film 1 is transported from the first longitudinal direction L1 side and the adhesive layer 3 and the defective product identification marking 5 are detected, the difference between the detection timing of the adhesive layer 3 and the detection timing of the defective product identification marking 5 can be reduced, making it even easier to identify the position of the defective adhesive layer 3A from the defective product identification marking 5.

[0076] Furthermore, in this laminated film 1, when the defective product identification marking 5 is provided in the fourth region C4, C4 on the opposite side of the defective adhesive layer 3A from a pair of fifth virtual lines A5, A5 that pass through both ends B5, B5 of the defective adhesive layer 3A in the width direction W and extend in the longitudinal direction L, the shape of the defective product identification marking 5 can be prevented from being transferred to the adhesive layer 3 even if the defective product identification marking 5 has thickness.

[0077] Furthermore, in this laminated film 1, when the defective product identification marking 5 is provided on the non-adhesive layer region D, the effect on the adhesive layer caused by providing the defective product identification marking can be reduced.

[0078] However, if the defective product identification markings are linear characters such as letters or numbers, it is difficult to detect the defective product identification markings 5. However, in this laminate film 1, the defective product identification markings 5 ​​are filled-in figures, so the defective product identification markings 5 ​​can be easily detected. Moreover, even if the laminate film 1 is provided with identification character information 8 for identifying the adhesive layer 3, the identification character information 8 and the defective product identification markings 5 ​​can be easily distinguished.

[0079] In addition, in this laminated film 1, the area of ​​the defective product identification marking 5 is 50 mm ２ Over 1500mm ２ Below, 300mm ２ Over 1300mm ２ or less than 600 mm ２ More than 1000mm ２ If the value is equal to or less than the above, the defective product identifying marking 5 can be easily detected.

[0080] Furthermore, in this laminated film 1, the defective product identification marking 5 can be easily detected when the total light transmittance of the defective product identification marking 5 is 0% or more and 10% or less, 0% or more and 8% or less, or 0% or more and 5% or less.

[0081] Furthermore, in this laminated film 1, if the defective product identification marking 5 is a code symbol, by associating the code symbol with information about the defective adhesive layer 3A, etc., it is possible to obtain information about the defective adhesive layer 3A, etc. when the defective product identification marking 5 is detected.

[0082] Furthermore, in this laminated film 1, when the defective product identifying marking 5 is an X mark, the defective product identifying marking 5 can be easily detected visually.

[0083] Furthermore, in this laminated film 1, when the defective product identifying marking 5 is a slit formed in the laminated film 1, the defective product identifying marking 5 can be easily detected.

[0084] Furthermore, in this laminated film 1, when the tip of the defective product identification marking 5 in the longitudinal direction L is formed in a curved shape, it is possible to prevent stress from concentrating on the tip of the defective product identification marking 5 in the longitudinal direction L when the laminated film 1 is pulled in the longitudinal direction L. This makes it possible to prevent the laminated film 1 from breaking starting from the tip of the defective product identification marking 5 in the longitudinal direction L.

[0085] Furthermore, in this laminated film 1, when the length L5 of the slit in the longitudinal direction L is 10 mm or more and 100 mm or less, preferably 15 mm or more and 80 mm or less, and more preferably 20 mm or more and 50 mm or less, the defective product identification marking can be easily detected and breakage when pulled in the longitudinal direction L can be prevented.

[0086] Furthermore, in this laminated film 1, when the width W5 of the slit in the width direction W is 2 mm or more and 40 mm or less, preferably 5 mm or more and 30 mm or less, and more preferably 10 mm or more and 20 mm or less, the defective product identification marking 5 can be easily detected and breakage when pulled in the longitudinal direction L can be prevented.

[0087] Furthermore, in this laminated film 1, when the defective product identification marking 5 is a hole formed in the laminated film 1, the defective product identification marking 5 can be easily detected while preventing it from breaking when pulled in the longitudinal direction L.

[0088] Furthermore, in this laminated film 1, when one defective product identification marking 5 is provided for one defective adhesive layer 3A, the number of defective product identification markings 5 ​​can be minimized, and contamination of the adhesive layer 3 caused by the defective product identification markings 5 ​​can be suppressed.

[0089] Furthermore, in this laminate film 1, when a plurality of defective product identification markings 5 ​​are provided at different positions on one defective adhesive layer 3A, there is a high degree of freedom in installing the marking detection unit that detects the defective product identification markings 5. Furthermore, when semiconductor devices are manufactured in a plurality of facilities where the marking detection units that detect the defective product identification markings 5 ​​are installed at different positions, the versatility of the laminate film 1 can be increased by installing the defective product identification markings 5 ​​at positions corresponding to each facility.

[0090] In the laminated film manufacturing method of this embodiment, multiple adhesive layers 3 of the original film 101 are inspected, and defective product identification markings 5 ​​are applied to positions on the adhesive film 4 corresponding to the defective adhesive layers 3A, thereby making it possible to manufacture a laminated film 1 that can suppress the generation of defective semiconductor devices.

[0091] In the process of using the laminated film according to this embodiment, the adhesive layers 3 and the pressure-sensitive adhesive film 4 are peeled off from the protective film 2 and the defective product identification markings 5 ​​are detected, so that the adhesive layers 3 can be attached to the semiconductor wafer except for the defective adhesive layer 3A provided at the position corresponding to the defective product identification markings 5. This makes it possible to suppress the occurrence of defective semiconductor devices.

[0092] The above describes a laminate film, a method for manufacturing a laminate film, and a method for manufacturing a semiconductor device according to one embodiment of the present disclosure. However, the present disclosure is not limited to the above-described embodiment, and appropriate modifications can be made within the scope of the spirit thereof.

[0093] For example, in the above embodiment, the adhesive film 4 is described as being provided on the protective film 2 and the plurality of adhesive layers 3 so as to cover the entire surface of one surface 2 a of the protective film 2 and the plurality of adhesive layers 3. However, the adhesive film 4 may not cover the entire surface of one surface 2 a of the protective film 2, but may be provided only on the plurality of adhesive layers 3. In this case, the defective product identification marking 5 may be provided on the protective film 2, rather than on the adhesive film 4.

[0094] The gist of the present disclosure is as shown in the following [1] to

[21] . [1] A laminate film comprising a long protective film, a plurality of adhesive layers provided on the protective film, a pressure-sensitive adhesive film provided on the plurality of adhesive layers, and a defective product identification marking provided on the pressure-sensitive adhesive film at a position corresponding to a defective adhesive layer that is an adhesive layer of a defective product among the plurality of adhesive layers. [2] The laminate film according to [1], wherein the pressure-sensitive adhesive film is provided on the protective film and the plurality of adhesive layers so as to cover the plurality of adhesive layers, and the defective product identification marking is provided on the pressure-sensitive adhesive film. [3] The laminate film according to [1] or [2], wherein the plurality of adhesive layers are arranged spaced apart from each other in the longitudinal direction of the protective film. [4] The laminate film according to [3], wherein, when a pair of adhesive layers adjacent to the defective adhesive layer in the longitudinal direction among the plurality of adhesive layers is a first adhesive layer and a second adhesive layer, the defective product identification marking is provided in a region from a first virtual line passing through a center between the first adhesive layer and the defective adhesive layer and extending in a width direction perpendicular to the longitudinal direction of the protective film to a second virtual line passing through a center between the second adhesive layer and the defective adhesive layer and extending in the width direction. [5] The laminate film according to [4], wherein the defective product identification marking is provided in a region from the first virtual line to a third virtual line passing through a center of the defective adhesive layer and extending in the width direction. [6] The laminate film according to [4] or [5], wherein the defective product identification marking is provided in a region from the first virtual line to a fourth virtual line passing through a tip of the defective adhesive layer on the first adhesive layer side and extending in the width direction. [7] The laminate film according to any one of [3] to [6], wherein the defective product identification marking is provided in a region on the opposite side of the defective adhesive layer from a pair of fifth imaginary lines extending in the longitudinal direction and passing through both ends of the defective adhesive layer in the width direction of the protective film, which is perpendicular to the longitudinal direction. [8] The laminate film according to any one of [1] to [7], wherein the defective product identification marking is provided on a non-adhesive layer region excluding the plurality of adhesive layers of the pressure-sensitive adhesive film. [9] The laminate film according to any one of [1] to [8], wherein the defective product identification marking is a filled-in figure.

[10] The area of ​​the defective product identification marking is 50 mm. ２ Over 1500mm ２ The laminate film according to any one of [1] to [9], wherein the defective product identification marking has a total light transmittance of 0% or more and 10% or less.

[12] The laminate film according to any one of [1] to

[11] , wherein the defective product identification marking is a code symbol.

[13] The laminate film according to any one of [1] to

[11] , wherein the defective product identification marking is an X mark.

[14] The laminate film according to any one of [1] to

[11] , wherein the defective product identification marking is a slit formed in the laminate film.

[15] The laminate film according to

[14] , wherein the leading end of the defective product identification marking in the longitudinal direction of the protective film is curved.

[16] The laminate film according to

[14] or

[15] , wherein the length of the slit in the longitudinal direction of the protective film is 10 mm or more and 100 mm or less.

[17] The laminate film according to any one of

[14] to

[16] , wherein the width of the slit in the width direction perpendicular to the longitudinal direction of the protective film is 2 mm to 40 mm.

[18] The laminate film according to any one of [1] to

[11] , wherein the defective product identification marking is a hole formed in the laminate film.

[19] The laminate film according to any one of [1] to

[18] , wherein one defective product identification marking is provided for one defective adhesive layer.

[20] The laminate film according to any one of [1] to

[18] , wherein a plurality of the defective product identification markings are provided at different positions on one defective adhesive layer.

[21] A method for manufacturing a laminated film according to any one of [1] to

[20] , comprising: a preparation step of preparing an original film having a long protective film, a plurality of adhesive layers provided on the protective film, and a pressure-sensitive adhesive film provided on the plurality of adhesive layers; an inspection step of inspecting the plurality of adhesive layers of the original film; and a marking step of applying a marking for identifying a defective product on the pressure-sensitive adhesive film at a position corresponding to a defective adhesive layer, which is an adhesive layer determined to be defective in the inspection step.

[0095] 1...Laminated film, 1a...One end, 1b...Other end, 2...Protective film, 2a...One surface, 3...Adhesive layer, 3A...Failure adhesive layer, 4...Adhesive film, 5...Marking for identifying defective products, 6...Adhesive layer, 7...Base film, 8...Identification character information, 9...Roll, 10...Inspection device, 11...Conveyor roller, 12...Inspection section, 13...Marking section, 31...First adhesive layer, 32...Second adhesive layer, 101...Original film, A1...First virtual line, A 2...second virtual line, A3...third virtual line, A4...fourth virtual line, A5...fifth virtual line, A51...fifth virtual line, A52...fifth virtual line, B1...center, B2...center, B3...center, B4...tip, B5...both ends, C1...th One area, C2...second area, C3...third area, C4...fourth area, C41...fourth area, C42...fourth area, D...non-adhesive layer area, L...longitudinal direction, L1...first longitudinal direction, L5...length, W...width direction, W5...width.

Claims

1. A laminated film comprising: a long protective film; a plurality of adhesive layers provided on the protective film; an adhesive film provided on the plurality of adhesive layers; and a defective product identification marking provided on the adhesive film at a position corresponding to a defective adhesive layer that is a defective adhesive layer among the plurality of adhesive layers.

2. The laminated film according to claim 1, wherein the adhesive film is provided on the protective film and the plurality of adhesive layers so as to cover the plurality of adhesive layers, and the defective product identification marking is provided on the adhesive film.

3. The laminated film according to claim 1, wherein the plurality of adhesive layers are spaced apart from one another and arranged in the longitudinal direction of the protective film.

4. A laminate film as described in claim 3, wherein, when a pair of adhesive layers adjacent to the defective adhesive layer in the longitudinal direction among the plurality of adhesive layers is defined as a first adhesive layer and a second adhesive layer, the defective product identification marking is provided in an area from a first virtual line passing through the center between the first adhesive layer and the defective adhesive layer and extending in a width direction perpendicular to the longitudinal direction of the protective film to a second virtual line passing through the center between the second adhesive layer and the defective adhesive layer and extending in the width direction.

5. The laminated film according to claim 4, wherein the defective product identification marking is provided in the region from the first virtual line to a third virtual line that passes through the center of the defective adhesive layer and extends in the width direction.

6. The laminated film according to claim 4, wherein the defective product identification marking is provided in the region from the first virtual line to a fourth virtual line that passes through the tip of the defective adhesive layer on the first adhesive layer side and extends in the width direction.

7. The laminated film described in claim 3, wherein the defective product identification marking is provided in an area opposite the defective adhesive layer of a pair of fifth virtual lines extending in the longitudinal direction, passing through both ends of the defective adhesive layer in the width direction of the protective film perpendicular to the longitudinal direction.

8. The laminated film according to claim 1, wherein the defective product identification marking is provided on a non-adhesive layer area excluding the multiple adhesive layers of the adhesive film.

9. The laminated film according to claim 1, wherein the defective product identification marking is a filled-in figure.

10. The area of ​​the defective product identification marking is 50 mm ２ More than 1500mm ２ The laminated film according to claim 1 , wherein:

11. The laminate film according to claim 1, wherein the total light transmittance of the defective product identification marking is 0% or more and 10% or less.

12. The laminated film according to claim 1, wherein the defective product identification marking is a code symbol.

13. The laminated film according to claim 1, wherein the defective product identification marking is an X mark.

14. The laminate film according to claim 1, wherein the defective product identification marking is a slit formed in the laminate film.

15. The laminated film according to claim 14, wherein the end of the defective product identification marking in the longitudinal direction of the protective film is formed in a curved shape.

16. The laminated film according to claim 14, wherein the length of the slit in the longitudinal direction of the protective film is 10 mm or more and 100 mm or less.

17. The laminated film according to claim 14, wherein the width of the slit in the width direction perpendicular to the longitudinal direction of the protective film is 2 mm or more and 40 mm or less.

18. The laminate film according to claim 1, wherein the defective product identification marking is a hole formed in the laminate film.

19. The laminated film according to claim 1, wherein one defective product identification marking is provided for one defective adhesive layer.

20. The laminated film according to claim 1, wherein a plurality of the defective product identification markings are provided at different positions for one defective adhesive layer.

21. A method for manufacturing a laminated film for producing the laminated film according to any one of claims 1 to 20, comprising: a preparation step for preparing an original film having a long protective film, a plurality of adhesive layers provided on the protective film, and an adhesive film provided on the plurality of adhesive layers; an inspection step for inspecting the plurality of adhesive layers of the original film; and a marking step for applying a marking for identifying a defective product to a position on the adhesive film corresponding to a defective adhesive layer, which is an adhesive layer determined to be defective in the inspection step.

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