Vertical heat treatment apparatus and conveying device therefor

Abstract

A vertical heat treatment apparatus and a conveying device therefor. The conveying device comprises a device main body, a transmission belt mechanism (400) and a stop mechanism (500). The transmission belt mechanism (400) is used for transmission between a driving member and a driven member of the device main body, the transmission belt mechanism (400) comprising a transmission belt (401). The stop mechanism (500) comprises a stop portion and a fitting assembly, wherein the stop portion is fixedly connected to the driven member, and the fitting assembly comprises a stop member; the fitting assembly abuts against the transmission belt (401), such that the stop member disengages from limiting fit with the stop portion; and when the transmission belt (401) has broken, the fitting assembly detaches from the transmission belt (401), such that the stop member is in limiting fit with the stop portion, thus stopping the rotation of the driven member. The stop process of the conveying device does not require signal detection by a detection device, nor does it need to be realized by means of signal control, thus improving the reliability of the stop process and reducing the cost of the conveying device.

Description

Vertical heat treatment equipment and conveying device Technical Field

[0001] The present application relates to the field of semiconductor manufacturing, and in particular, to a vertical heat treatment device and a conveying device thereof. Background Art

[0002] The boat lift system of a vertical furnace is used to transport the quartz boat carrying silicon wafers into the reactor tube for processing and then remove the wafers and quartz boat from the reactor tube after the processing is complete. The Z-axis drive of the boat lift system primarily consists of guide rails, a ball screw, and a motor drive mechanism. The motor drive mechanism and ball screw are connected by a timing belt to transmit torque. If the timing belt breaks, the connection between the ball screw and the motor drive mechanism is broken. Because the ball screw itself does not have a self-locking function, once disconnected from the motor drive mechanism, the silicon wafers and quartz boat transported by the boat lift system will fall due to gravity, causing damage to the wafers and quartz boat, which can lead to serious production accidents.

[0003] Therefore, how to improve the reliability of the stopping process is a technical problem that those skilled in the art urgently need to solve. Summary of the Invention

[0004] The present application aims to solve at least one of the technical problems existing in the prior art, and proposes a vertical heat treatment equipment and a conveying device thereof, which uses a mechanical mechanism to stop the rotation of the driven part when the transmission belt breaks, thereby improving the reliability of the stopping process and reducing the equipment cost.

[0005] In order to achieve the purpose of this application, a conveying device for a vertical heat treatment equipment is provided, comprising a device body, a transmission belt mechanism and a stop mechanism, wherein:

[0006] The transmission belt mechanism is used for transmission between the driving member and the driven member of the device body, and the transmission belt mechanism includes a transmission belt;

[0007] The stopping mechanism includes a stopping portion and a mating assembly, the stopping portion is fixedly connected to the follower, the mating assembly includes a stopping member, and the mating assembly abuts against the transmission belt to disengage the stopping member from limiting cooperation with the stopping portion. When the transmission belt breaks, the stopping member and the stopping portion are limitedly cooperated to stop the rotation of the follower.

[0008] In some embodiments, the mating component further includes a tensioning component, which presses against the transmission belt to tension the transmission belt. The tensioning component presses against the transmission belt to disengage the stop member from the stop portion.

[0009] In some embodiments, the tensioning assembly includes a connecting plate, a tensioning wheel, and an elastic member, wherein:

[0010] The connecting plate is rotatably connected to the device body; the tensioning wheel is rotatably connected to the connecting plate;

[0011] The elastic member connects the device body and the connecting plate, and is used to drive the tensioning wheel to press against the transmission belt through the connecting plate, and block the connecting plate between the stop member and the stop portion; the elastic member is also used to drive the connecting plate to leave between the stop member and the stop portion when the transmission belt breaks, so that the stop member and the stop portion are limited and matched.

[0012] In some embodiments, the tensioning assembly further includes a mounting shaft, the connecting plate is rotatably connected to the device body via the mounting shaft, the tensioning wheel is located at one end of the connecting plate, and the other end of the connecting plate is used to block between the stop member and the stop portion.

[0013] In some embodiments, the stop member is provided with a stop structure for limiting cooperation with the stop member, the number of the stop structures is multiple and evenly distributed along a preset circle, and the center of the preset circle is located on the axis of the follower.

[0014] In some embodiments, the device body is connected to a mounting seat, the stop member is a stop pin, the stop structure is a stop hole, and the mounting seat is elastically connected to the stop pin so that the stop pin penetrates into the stop hole through elastic force.

[0015] In some embodiments, the transmission belt mechanism further includes a driven wheel, and the stopper is disposed between the driven wheel and the device body.

[0016] In some embodiments, the device body also includes a lifting part and a frame, the driven part is a screw, the screw is arranged in the vertical direction, the lifting part is threadedly engaged with the screw, the frame is used to limit the rotation of the lifting part, and the lifting part is used to support the carrying boat and drive the carrying boat to rise and fall.

[0017] In some embodiments, the mounting seat is provided with a mounting hole, a mounting tube is provided in the mounting hole, the stop member partially penetrates into the mounting tube and is loosely fitted with the mounting tube, and an elastic support member is provided between the bottom of the mounting tube and the stop member.

[0018] In some embodiments, the stopper has a guide head at one end away from the mounting tube, and the diameter of the guide head gradually decreases in a direction away from the mounting tube.

[0019] The present application also provides a vertical heat treatment device, comprising a device body and any one of the above-mentioned conveying devices,

[0020] The conveying device includes a follower and a lifting part driven by the follower, the follower is used to drive the lifting part to move up and down to send the wafer into the device body or transport the wafer out of the device body, and the stopper is used to cooperate with the stopper to limit the rotation of the follower when the transmission belt breaks, so as to prevent the lifting part from falling.

[0021] This application has the following beneficial effects:

[0022] The conveying device of the vertical heat treatment equipment provided in the present application includes a device body, a transmission belt mechanism and a stopping mechanism, wherein the transmission belt mechanism is used for transmission between the driving part and the driven part of the device body, and the transmission belt mechanism includes a transmission belt; the stopping mechanism includes a stopping part and a matching component, the stopping part is fixedly connected to the driven part, and the stopping part has a stopping structure; the matching component includes a stop part, and the matching component is supported by the transmission belt to keep the stop part away from the stopping structure. When the transmission belt breaks, the stop part cooperates with the stopping structure to stop the rotation of the driven part.

[0023] The conveyor uses a drive belt support assembly to keep the stopper away from the stop structure. The support force determines whether the belt has broken. If the drive belt breaks, the support force disappears, causing the stopper to close and engage the stop structure to stop the driven member. The conveyor's stopping process does not require a detection device to detect a signal, nor does it require signal control to achieve stopping. This improves the reliability of the stopping process and reduces the cost of the conveyor.

[0024] The present application also provides a vertical heat treatment equipment including the above-mentioned conveying device, and having the above-mentioned advantages. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The following is a brief introduction to the drawings required for use in the embodiments or descriptions of the prior art in conjunction with the accompanying drawings. Obviously, the drawings described below are only some embodiments of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0026] FIG1 is a transport device provided in a specific embodiment of the present application;

[0027] FIG2 is a bottom view of the conveying device in FIG1 when the transmission belt is not broken;

[0028] FIG3 is a schematic structural diagram of the conveying device in FIG1 when the transmission belt is not broken;

[0029] FIG4 is an enlarged view of point A in FIG3 ;

[0030] FIG5 is a bottom view of the conveyor device in FIG1 when the transmission belt is broken;

[0031] FIG6 is a schematic structural diagram of the conveying device in FIG1 when the transmission belt is broken;

[0032] FIG7 is an enlarged view of point B in FIG6;

[0033] FIG8 is a schematic structural diagram of the tensioning assembly in FIG2 ;

[0034] Figure 9 is a schematic structural diagram of the stopper disc and the driven wheel;

[0035] FIG10 is a schematic structural diagram of a vertical heat treatment device provided in a specific embodiment.

[0036] Wherein, the reference numerals in Figures 1 to 10 are:

[0037] 100. Frame; 101. Mounting plate; 200. Lead screw; 300. Driving motor; 400. Transmission belt mechanism; 401. Transmission belt; 402. Driving pulley; 403. Driven pulley; 500. Stopping mechanism; 510. Stopping disk; 511. Stopping hole; 520. Tensioning assembly; 521. Connecting plate; 522. Tensioning pulley; 523. Mounting shaft; 524. Connecting portion; 525. Tensioning spring; 530. Stopping assembly; 531. Mounting seat; 532. Mounting cylinder; 533. Stopping pin; 600. Lifting portion; 601. Support plate; 700. Guide rail; 800. Carrying boat; 900. Vertical reactor. DETAILED DESCRIPTION

[0038] In order to enable those skilled in the art to better understand the technical solution of the present application, the vertical heat treatment equipment and its conveying device provided by the present application are described in detail below with reference to the accompanying drawings.

[0039] In related technologies, a photoelectric switch can detect whether the timing belt is broken. If so, the brake is activated to tighten the ball screw, preventing the silicon wafer and quartz boat from falling. However, if the photoelectric switch malfunctions during detection, it can lead to misjudgment or failure of the anti-drop function, thus affecting the reliability of the equipment.

[0040] The conveying device of the vertical heat treatment equipment provided by the present application, as shown in Figure 1, includes a device body, a transmission belt mechanism 400 and a stop mechanism 500. Wherein, the device body includes a driver and a driven member, and the driver is connected to the driven member through the transmission belt mechanism 400, thereby driving the driven member to rotate. As shown in Figure 2, the transmission belt mechanism 400 includes a transmission belt 401, a driving wheel 402 and a driven wheel 403, the driving wheel 402 is connected to the driver, and the driven wheel 403 is connected to the driven member. The transmission belt 401 surrounds the outer periphery of the driving wheel 402 and the driven wheel 403, rotates with the driving wheel 402, and drives the driven wheel 403 to rotate, thereby realizing power transmission from the driver to the driven member. During the power transmission process, the transmission belt 401 always remains in a tensioned state, so it has a certain tension so that the transmission belt 401 can support other components. If the transmission belt 401 breaks, the transmission belt 401 loses the ability to support other components. For example, the driving member may be a driving motor 300, and the driven member may be a lead screw 200. Of course, the driving member and the driven member may also be other structures, which are not limited here.

[0041] The stop mechanism 500 comprises a stopper and a mating assembly. The stopper is fixedly connected to the lead screw 200 and rotates with it. The mating assembly includes a stopper. The mating assembly abuts against the transmission belt 401 and, supported by the transmission belt 401, disengages the stopper from the stopper. If the transmission belt 401 breaks, the supporting force disappears, causing the stopper to move toward the stopper. Ultimately, the stopper engages the stopper, stopping the stopper and, in turn, the lead screw 200.

[0042] It is understood that to achieve the limiting engagement between the stopper and the stop portion, the stop portion includes a stop structure. When supported by the transmission belt 401 (that is, when the transmission belt 401 is not broken), the stopper and the stop structure are separated, thereby disengaging the limiting engagement between the stopper and the stop portion. When the transmission belt 401 breaks, the stopper moves toward the stop structure and engages with the stop structure, thereby stopping the rotation of the stop portion and, in turn, the rotation of the lead screw 200.

[0043] In this embodiment, the conveyor device supports the mating assembly via a transmission belt 401, keeping the mating assembly's stopper away from the stop structure. After the transmission belt 401 breaks, the stopper moves toward the stop structure and engages with it, thereby stopping the lead screw 200. In other words, the conveyor device of this embodiment uses a mechanical mechanism to stop the lead screw 200 after the transmission belt 401 breaks, eliminating the need for a photoelectric switch and reducing equipment costs. Furthermore, the stopping process does not require detection signals, avoiding misjudgments or stop failures caused by signal anomalies, thereby improving the reliability of the conveyor device.

[0044] In some embodiments, the transmission belt 401 may be a synchronous belt. The inner circumferential wall of the synchronous belt, the outer circumferential wall of the driving pulley 402, and the outer circumferential wall of the driven pulley 403 all have transmission teeth. The synchronous belt and the driving pulley 402, as well as the synchronous belt and the driven pulley 403, are meshed with each other via the transmission teeth, thereby preventing relative slippage between the synchronous belt, the driving pulley 402, and the driven pulley 403 during transmission, thereby improving the transmission efficiency of the synchronous belt mechanism.

[0045] In some embodiments, the mating assembly further includes a tensioning assembly 520. The tensioning assembly 520 is connected to the device body and is used to abut against the transmission belt 401 to tension the transmission belt 401. The transmission belt 401 also supports the tensioning assembly 520. With the support of the transmission belt 401, the tensioning assembly 520 keeps the stopper away from the stop structure.

[0046] In some embodiments, as shown in FIG4 , the stopper can be a stop pin 533, and the stopper structure can be a stopper hole 511 provided on the stopper portion. The device body also includes a frame 100. The stop pin 533 is movably connected to the frame 100 and can be inserted into the stopper hole 511 and engage with the stopper portion to stop the rotation of the lead screw 200 when the transmission belt 401 breaks. The tensioning assembly 520 is used to prevent the stop pin 533 from entering the stopper hole 511 when the transmission belt 401 is not broken. Of course, the stopper structure can also adopt other structures, such as stopper teeth. A mating assembly can be inserted into the gap between the stopper teeth and abut against the stopper teeth to stop the lead screw 200. For a specific structure, see ratchet. The stop pin 533 cooperates with the stopper hole 511 to achieve stoppage, providing higher stopping reliability. The structural strength around the stopper hole 511 is high, and once the stop pin 533 enters the stopper hole 511, the stopper is completely stopped, eliminating the risk of tooth breakage or disengagement.

[0047] In some embodiments, as shown in FIG2 , the mating assembly further includes a stop assembly 530. As shown in FIG4 , the stop assembly 530 includes an elastic support member (not shown) and a stop pin 533. The elastic support member is used to provide an elastic thrust to the stop pin 533. As shown in FIG5 to FIG7 , when the transmission belt 401 breaks, the elastic thrust provided by the elastic support member can push the stop pin 533 into the stop hole 511, thereby stopping the rotation of the lead screw 200. The stop assembly 530 can reduce the risk of the stop pin 533 getting stuck by pushing the stop pin 533 through the elastic support member, increase the success rate of the stop pin 533 penetrating the stop hole 511, and thus improve the reliability of the stopping process. However, this is not restrictive. In some other embodiments not shown in the figures, the stop portion can also be located below the stop pin 533, and the stop pin 533 can also penetrate the stop hole 511 by gravity. In this case, only the stop pin 533 is installed in the frame 100.

[0048] As shown in Figures 2 to 4, the tensioning assembly 520 can tighten the transmission belt 401. At the same time, the transmission belt 401 provides support to the tensioning assembly 520, allowing the tensioning assembly 520 to partially penetrate between the stop pin 533 and the stop portion, thereby preventing the stop pin 533 from penetrating into the stop hole 511. As shown in Figures 5 to 7, after the transmission belt 401 breaks, the support force disappears, and the position of the tensioning assembly 520 changes, leaving the position blocked between the stop pin 533 and the stop portion. This allows the stop pin 533 to penetrate into the stop hole 511, completing the stopping process.

[0049] In some embodiments, as shown in Figures 2 and 8, the tensioning assembly 520 includes a mounting shaft 523, a connecting plate 521, a tensioning pulley 522, and an elastic member. As shown in Figure 8, the connecting plate 521 is provided with a connecting portion 524, a connecting hole (not shown), and a rotating shaft. The mounting shaft 523 is fixedly connected to the frame 100 and inserted into the connecting hole, thereby rotatably connecting the connecting plate 521 to the frame 100. The tensioning pulley 522 is rotatably connected to the connecting plate 521 via a rotating shaft. The frame 100 is provided with a connecting seat. One end of the elastic member is connected to the connecting seat and the other end is connected to the connecting portion 524, thereby elastically connecting the frame 100 and the connecting plate 521. In the specific embodiment shown in Figure 2, the elastic member is a tensioning spring 525, but this is not restrictive. In other embodiments not shown, the elastic member can also be formed using other structures as needed, such as a rubber band, and is not limited here.

[0050] When the tensioning spring 525 is elastically deformed, it applies a first torque to the connecting plate 521, causing the connecting plate 521 to rotate about the mounting shaft 523, thereby causing the tensioning pulley 522 to fit the transmission belt 401 and tighten the transmission belt 401 as shown in Figures 2 and 3. The transmission belt 401 then applies a second torque to the connecting plate 521 via the tensioning pulley 522. The direction of the second torque is opposite to that of the first torque and they are mutually balanced. At this point, the connecting plate 521 is partially located between the stop pin 533 and the stop portion, capable of blocking the stop pin 533. When the transmission belt 401 breaks, the second torque disappears, and the connecting plate 521, driven by the first torque, leaves the space between the stop pin 533 and the stop portion.

[0051] In some embodiments, the tensioning wheel 522 is located at one end of the connecting plate 521, and the other end of the connecting plate 521 is used to block between the stopper and the stop portion, and the installation shaft 523 is located between the two ends of the connecting plate. Exemplarily, the installation shaft 523 is connected to the middle part of the connecting plate 521, the tensioning wheel 522 is located at one end of the connecting plate 521, and the end of the connecting plate 521 away from the tensioning wheel 522 penetrates between the stop pin 533 and the stop portion. As shown in Figure 8, the connecting plate 521 is strip-shaped, and the tensioning wheel 522 and the part that penetrates the stop pin 533 and the stop portion are respectively located at the two ends of the tensioning wheel 522, which can avoid mutual interference between the transmission belt 401 and the stop pin 533, thereby improving the flexibility of the arrangement of various components. It can also reduce the required size of the connecting plate 521 and reduce the space volume occupied by the conveying device. Of course, this is not restrictive. In some other embodiments not shown in the figures, the positions of the tensioning wheel 522, the stop pin 533 and the mounting shaft 523 can also be arranged in other ways. For example, the mounting shaft 523 can be connected to one end of the connecting plate 521, and the middle part of the connecting plate 521 is used to block the stop pin 533. This is not limited here.

[0052] In some embodiments, as shown in Figures 3 and 4, the stopper assembly 530 further includes a mounting base 531. Mounting base 531 is connected to the frame 100 and is used to mount a stopper pin 533 and an elastic support member. As shown in Figures 2 and 3, mounting base 531 may be L-shaped, with one side serving as a connecting arm connected to the frame 100 and the other side forming a cantilever arm that overhangs the side of the stopper away from the frame 100. The stopper pin 533 is connected to the cantilever arm and aligns with the stopper hole 511. The elastic support member is located on the side of the stopper pin 533 away from the stopper and provides elastic thrust to the stopper pin 533, forcing it into the stopper hole 511. The elastic support member may be a support spring, a rubber block, or a silicone block. The structure of mounting base 531 can be customized as needed and is not limited here. In some embodiments, mounting base 531 is provided with a mounting hole. The mounting hole may be located on the cantilever arm of mounting base 531, aligning with the stopper hole 511. A mounting tube 532 is provided in the mounting hole, and the stop pin 533 partially penetrates the mounting tube 532 and has a clearance fit with the mounting tube 532. An elastic support member is located between the bottom of the mounting tube 532 and the stop pin 533. The elastic support member applies an elastic thrust toward the stop portion to the stop pin 533, enabling it to penetrate the stop hole 511. The stop assembly 530 pushes the stop pin 533 into the stop hole 511 via the elastic support member. This thrust is greater than gravity and is not limited by the relative position of the stop pin 533 and the stop portion. This not only increases the flexibility of the stop pin 533 positioning, but also reduces the risk of stop failure, thereby improving the reliability of the device.

[0053] In some embodiments, there are multiple stop holes 511 evenly distributed along a predetermined circumference, the center of which is located on the axis of the lead screw 200. As shown in Figures 5 and 9, inserting the stop pin 533 into any stop hole 511 achieves stopping. During normal operation, the stop hole 511 rotates around the axis of the lead screw 200, while the stop pin 533 remains fixed in position. During the stopping process, the stop hole 511 must rotate to a position corresponding to the stop pin 533 before the stopping operation is completed. The greater the distance between the stop hole 511 and the stop pin 533, the longer the lag time during the stopping process. Increasing the number of stop holes 511 can effectively shorten the average lag time and improve stopping efficiency. Of course, the number of stop holes 511 cannot be increased indefinitely. Users also need to ensure the structural strength of the area around the stop hole 511 and the stop pin 533 to avoid damage to the stop portion or the stop pin 533, which could lead to stopping failure.

[0054] In some embodiments, the stop hole 511 can be positioned closer to the edge of the stop portion to increase the distance between the stop hole 511 and the axis of the lead screw 200. After the transmission belt 401 breaks, the lead screw 200 rotates under inertia, and its inertial torque can be approximately constant. The greater the distance between the stop hole 511 and the axis of the rod, the smaller the force required for stopping, thereby reducing the structural strength requirements of the stop portion and the stop pin 533.

[0055] In some embodiments, a stopper is positioned between the driven wheel 403 and the frame 100. As shown in Figures 3 and 9, the stopper can be a disc-shaped stopper 510 coaxially positioned with the driven wheel 403. The diameter of the stopper 510 is larger than that of the driven wheel 403, and stopper holes 511 are distributed along the edge of the stopper 510. Placing the stopper 510 between the driven wheel 403 and the frame 100 reduces the space it occupies, thereby reducing the size of the transport device. Of course, the user can also adjust the position of the stopper 510 as needed, and this is not limited here.

[0056] In some embodiments, the stopper plate 510 and the driven pulley 403 can be integrally formed. This integral structure improves structural strength and allows them to share a common set of connectors, which reduces installation steps and improves installation efficiency. Of course, the user can also configure the stopper plate 510 and the driven pulley 403 as separate structures, which is not a limitation here.

[0057] In some embodiments, the end of the stop pin 533 away from the mounting tube 532 has a guide head, and the diameter of the guide head gradually decreases in the direction away from the mounting tube 532. As shown in Figure 7, the guide head is hemispherical, and the guide head can reduce the difficulty of the stop pin 533 penetrating into the stop hole 511. Even if there is a certain deviation between the position of the stop hole 511 and the stop pin 533, the stop pin 533 can still penetrate into the stop hole 511, thereby reducing the possibility of stopping failure, allowing the stop pin 533 to penetrate the stop hole 511 faster, and improving the stopping efficiency. In addition, the hemispherical guide head has a higher structural strength, which can reduce the risk of damage to the guide head during the stopping process. Of course, guide heads with other structures, such as conical, etc., can also be used as needed, which are not limited here.

[0058] In some embodiments, as shown in FIG10 , the transport device drives the carrying boat 800 to rise and fall, and delivers the carrying boat 800 into the vertical reactor 900, or transports the carrying boat 800 out of the vertical reactor 900. Therefore, the lead screw 200 is arranged in the vertical direction. The device body also includes a lifting part 600, which is threadedly engaged with the lead screw 200. The frame 100 is used to rotationally limit the lifting part 600. The lifting part 600 is used to support the carrying boat 800 and drive the carrying boat 800 to rise and fall. As shown in FIG10 , the lifting part 600 has a support plate 601, and the carrying boat 800 can be placed on the support plate 601. As shown in FIG1 , the driving member can be a driving motor 300, and the driving motor 300 drives the lead screw 200 to rotate through the transmission belt mechanism 400, thereby driving the lifting part 600 to rise and fall, thereby completing the transportation of the carrying boat 800. The frame 100 of the transport device includes a guide rail 700 provided with a parallel lead screw 200. The lifting portion 600 is provided with a guide hole. The guide rail 700 is inserted into the guide hole and has a clearance fit. The guide rail 700 acts as a limiter during the movement of the lifting portion 600, preventing the lifting portion 600 from rotating. Of course, in other embodiments, other methods can also be used to limit the rotation of the lifting portion 600, which is not limited here.

[0059] In some embodiments, the lower portion of the frame 100 includes a mounting plate 101, with the drive member, drive belt mechanism 400, and stop mechanism 500 all disposed on the lower surface of the mounting plate 101. As shown in FIG1 , the drive motor 300 is disposed on the upper surface of the mounting plate 101, while the drive belt mechanism 400 and stop mechanism 500 are disposed on the lower surface of the mounting plate 101. This reduces the height of each component, facilitating maintenance and use. Furthermore, the centralized placement of each component further reduces maintenance and use. Of course, the user can also adjust the position of each component as needed, and this is not a limitation here.

[0060] The present application also provides a vertical heat treatment apparatus, comprising an apparatus body and a conveying device according to any of the above-described embodiments. The conveying device comprises a driven member and a lifting portion that cooperates with the driven member to drive the lifting portion upward and downward to deliver wafers into or out of the apparatus body. The stopper cooperates with the stopper to limit rotation of the driven member when the transmission belt breaks, thereby preventing the lifting portion from falling under the action of gravity and thereby preventing damage to the wafers caused by the falling, thereby improving the safety and reliability of the vertical heat treatment apparatus.

[0061] In some embodiments, in the specific embodiment shown in FIG10 , the equipment body is a vertical reactor 900, and the transport device is located below the vertical reactor 900 and is used to transport wafers into or out of the vertical reactor 900. Of course, the equipment body is not limited to the vertical reactor 900.

[0062] It is understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present application, and the present application is not limited thereto. Those skilled in the art may make various modifications and improvements without departing from the spirit and substance of the present application, and such modifications and improvements are also considered to be within the scope of protection of the present application.

Claims

1. A conveying device for vertical heat treatment equipment, characterized in that: It includes a device body, a transmission belt mechanism and a stop mechanism, wherein: The transmission belt mechanism is used for transmission between the driving member and the driven member of the device body, and the transmission belt mechanism includes a transmission belt; The stopping mechanism includes a stopping portion and a matching component, wherein the stopping portion is fixedly connected to the follower, and the matching component includes a stopping member, and the matching component abuts against the transmission belt to disengage the stopping member from limiting the matching with the stopping portion; when the transmission belt breaks, the matching component disengages from the transmission belt, and the stopping member is limitedly matched with the stopping portion to stop the rotation of the follower.

2. The conveying device according to claim 1, characterized in that: The mating assembly further comprises a tensioning assembly, wherein: The tensioning assembly abuts against the transmission belt to tension the transmission belt. The tensioning assembly abuts against the transmission belt to disengage the stopper from limiting cooperation with the stop portion.

3. The conveying device according to claim 2, characterized in that: The tensioning assembly includes a connecting plate, a tensioning wheel and an elastic member, wherein: The connecting plate is rotatably connected to the device body; the tensioning wheel is rotatably connected to the connecting plate; The elastic member connects the device body and the connecting plate, and is used to drive the tensioning wheel to press against the transmission belt through the connecting plate, and block the connecting plate between the stop member and the stop portion; the elastic member is also used to drive the connecting plate to leave between the stop member and the stop portion when the transmission belt breaks, so that the stop member and the stop portion are limited and matched.

4. The conveying device according to claim 3, characterized in that: The tensioning assembly also includes a mounting shaft, and the connecting plate is rotatably connected to the device body through the mounting shaft. The tensioning wheel is located at one end of the connecting plate, and the other end of the connecting plate is used to block between the stop member and the stop portion, and the mounting shaft is located between the two ends of the connecting plate.

5. The conveying device according to claim 1, characterized in that: The stop portion is provided with a stop structure, and the stop structure is used for limiting cooperation with the stop member when the transmission belt breaks.

6. The conveying device according to any one of claims 5, characterized in that: The number of the stopping structures is multiple and they are evenly distributed along a preset circumference, and the center of the preset circumference is located on the axis of the driven member.

7. The conveying device according to claim 5, characterized in that: The device body is connected with a mounting seat, the stop member is a stop pin, the stop structure is a stop hole, and the mounting seat is elastically connected to the stop pin so that the stop pin can penetrate into the stop hole through elastic force.

8. The conveying device according to any one of claims 1 to 7, characterized in that: The transmission belt mechanism further includes a driven wheel, and the stopper is arranged between the driven wheel and the device body.

9. The conveying device according to any one of claims 1 to 7, characterized in that: The device body also includes a lifting part and a frame. The driven part is a lead screw, which is arranged in the vertical direction. The lifting part is threadedly matched with the lead screw. The frame is used to limit the rotation of the lifting part. The lifting part is used to support the carrying boat and drive the carrying boat to rise and fall.

10. The conveying device according to claim 7, characterized in that: The mounting seat is provided with a mounting hole, a mounting tube is provided in the mounting hole, the stopper part penetrates into the mounting tube and is loosely matched with the mounting tube, and an elastic support is provided between the bottom of the mounting tube and the stopper.

11. The conveying device according to claim 10, characterized in that: The end of the stopper away from the mounting tube has a guide head, and the diameter of the guide head gradually decreases in a direction away from the mounting tube.

12. A vertical heat treatment equipment, characterized in that: It comprises an equipment body and a conveying device according to any one of claims 1 to 11, The conveying device includes a follower and a lifting part drivingly cooperated with the follower, the follower is used to drive the lifting part to rise and fall so as to deliver the wafer into the device body or transport the wafer out of the device body, and the stopper is used to cooperate with the stopper to limit the rotation of the follower when the transmission belt breaks, so as to prevent the lifting part from falling.

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