Laser and laser device

Abstract

Provided in the present application are a laser and a laser device. The laser comprises at least two laser light emission modules, at least two compression modules and a spectral beam combining module. Each laser light emission module comprises two light-emitting elements and a polarization beam combiner, and the polarization beam combiner can perform polarization and beam combination on laser light emitted by the two light-emitting elements and then emit same. Each compression module is arranged on a laser light path of a laser light emission module so as to compress the laser light of the laser light emission module in a fast axis direction and a slow axis direction. The spectral beam combining module comprises a dichroic mirror, and the dichroic mirror can perform spectral beam combination on the laser light emitted by the two laser light emission modules and then emit same in a first direction.

Description

Lasers and laser equipment

[0001] This application claims priority to the Chinese patent application filed with the China Patent Office on December 29, 2023, with application number 202323668974.0 and invention name “Laser and Laser Equipment”, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application relates to the field of laser technology, and in particular to a laser and laser equipment. Background Art

[0003] To achieve higher power, lasers can use multiple light-emitting elements to combine individual light spots for laser processing. However, the total spot gap increases linearly with the number of light-emitting elements. The gap position increases the overall spot size and reduces the spot energy density. In addition, the fast-axis light in the laser spot diverges quickly and significantly, while the slow-axis light diverges more slowly and changes less. This often results in the fast-axis light spot being much larger than the slow-axis light spot at the actual transmission distance, resulting in poor uniformity of the combined light spot. Technical issues

[0004] How to provide a laser and laser equipment to improve the energy density and uniformity of the overall light spot. Technical Solutions

[0005] To achieve the above objectives, the present application proposes a laser comprising:

[0006] At least two laser emission modules, each comprising the two light-emitting elements and a polarization beam combiner, the polarization beam combiner being configured to perform polarization beam combining on the lasers emitted by the two light-emitting elements before emitting the lasers;

[0007] At least two compression modules, each of which is disposed on the laser light path of the laser output module to compress the laser light of the laser output module in the fast axis direction and the slow axis direction; and

[0008] A spectral beam combining module includes a dichroic mirror, and the dichroic mirror is used to spectrally combine the lasers emitted by the two laser emitting modules and then emit them along a first direction.

[0009] In one embodiment of the present application, the dichroic mirror has two mirror surfaces arranged back to back, one of which is provided with an antireflection film, and the other is provided with a reflective film;

[0010] The laser light emitted by one of the laser emitting modules may be emitted toward the antireflection film along the first direction, and the laser light emitted by the other laser emitting module may be emitted toward the reflective film along a second direction, wherein the second direction is perpendicular to the first direction.

[0011] In one embodiment of the present application, the two laser emitting modules that perform spectral beam combining through the same dichroic mirror both emit laser light along the second direction, and the spectral beam combining module further includes a first reflector, and the first reflector and the dichroic mirror are arranged along the first direction;

[0012] One of the laser emitting modules is disposed toward the first reflector to reflect the laser light to the anti-reflection film through the first reflector, and the other laser emitting module is disposed toward the reflective film.

[0013] In one embodiment of the present application, the laser emitting modules are arranged in parallel along the first direction and are located on the same side of the spectrum combining module.

[0014] In one embodiment of the present application, among the two laser emission modules that are combined by the same dichroic mirror, one of the laser emission modules and the dichroic mirror are arranged along the first direction and are disposed toward the anti-reflection film, and the other laser emission module and the dichroic mirror are arranged along the second direction and are disposed toward the reflective film.

[0015] In one embodiment of the present application, the two laser emitting modules that perform spectral beam combining through the same dichroic mirror both emit laser light along the first direction. The spectral beam combining module further includes a second reflector, and the second reflector and the dichroic mirror are arranged along the second direction. One of the laser emitting modules is disposed toward the second reflector to reflect the laser light toward the reflective film through the second reflector, and the other laser emitting module is disposed toward the transmissive film.

[0016] In one embodiment of the present application, the laser is provided with at least four laser emission modules, and the spectral beam combining module is provided with at least two dichroic mirrors, each of which is arranged in a stepped manner along the first direction and the second direction. Each dichroic mirror is used to perform spectral beam combining on the lasers emitted by the two laser emission modules, and the distance between the light emitting positions of any two dichroic mirrors along the first direction is greater than the distance along the second direction.

[0017] In one embodiment of the present application, an optical rotator is provided between at least one of the light-emitting elements of the laser emission module and the polarization beam combiner, and the optical rotator can change the polarization direction of the laser light emitted by the light-emitting element.

[0018] In one embodiment of the present application, the polarization beam combiner includes a reflective surface and a translucent surface arranged back to back, and the lasers emitted by the two light-emitting elements can be respectively emitted toward the reflective surface and the translucent surface, and both are emitted from the reflective surface.

[0019] In one embodiment of the present application, one of the light-emitting elements of at least one of the laser emitting modules is disposed toward the light-reflecting surface, and the other light-emitting element is disposed toward the light-transmitting surface.

[0020] In some embodiments, the two light-emitting elements of at least one laser emission module are arranged side by side, and the laser emission module also includes a third reflector, wherein one of the light-emitting elements is arranged toward the reflective surface, and the other light-emitting element is arranged toward the third reflector, so that the emitted laser is reflected to the transparent surface through the third reflector.

[0021] In one embodiment of the present application, the compression module includes a fast-axis collimating lens and a slow-axis collimating lens arranged on the light-emitting side of the light-emitting element, and a fast-axis collimating lens and a slow-axis collimating lens are provided between each light-emitting element and the polarization combiner.

[0022] In one embodiment of the present application, the laser further includes a beam expansion module, and the beam expansion module is disposed on the light-emitting side of the reflector.

[0023] In one embodiment of the present application, the beam expansion module includes:

[0024] a beam expander, the beam expander being arranged on the light-emitting side of the spectral beam combining module; and

[0025] A collimator is provided on the light-emitting side of the beam expander.

[0026] In one embodiment of the present application, at least one of the beam expander and the collimator is movable along an arrangement direction of the beam expander and the collimator to adjust a distance between the beam expander and the collimator.

[0027] The beam expansion module further includes a connecting shaft, which extends along an arrangement direction of the beam expander and the collimator, and at least one of the beam expander and the collimator is translationally movably disposed on the connecting shaft.

[0028] In one embodiment of the present application, one of the beam expander and the collimator is connected to a thread of the connecting shaft.

[0029] In one embodiment of the present application, the beam expansion module includes two connecting shafts, and the beam expander and the collimator are respectively connected to the threads of one of the connecting shafts.

[0030] In one embodiment of the present application, the connecting shaft has two threaded sections arranged along its length, and the thread rotation directions of the two threaded sections are opposite, and the beam expander and the collimator are respectively threadedly connected to one of the threaded sections.

[0031] In one embodiment of the present application, the laser further includes a mounting shell, a mounting cavity is formed in the mounting shell, the mounting shell is provided with a light outlet connected to the mounting cavity, the laser emission module, the compression module and the spectral beam combining module are all arranged in the mounting cavity, and the light outlet is located on the light output side of the spectral beam combining module.

[0032] In one embodiment of the present application, the light emitting element is disposed through a wall of a mounting housing of the laser.

[0033] In one embodiment of the present application, the laser is a semiconductor laser or a solid-state laser.

[0034] The present application also proposes a laser device, which includes the laser as described in any of the aforementioned embodiments. Beneficial effects

[0035] According to the technical solution of the present application, at least two laser output modules can be used in the laser. For a laser output module comprising two light-emitting elements, two laser beams with different polarization directions emitted by the two light-emitting elements can be polarized and combined into a beam of circularly polarized light through a polarization combiner, thereby reducing the number of laser beams, reducing the laser spot size of the laser output module, and improving the power density.

[0036] Furthermore, a compression module is placed in the light output path of each light-emitting element. This module compresses and focuses the laser light emitted by the light-emitting element in both the fast and slow axes, making the divergence angle of the fast axis smaller than that of the slow axis. This arrangement allows the slow axis light to be expanded to a larger beam with the same fast axis size, while reducing the diameter of the beam transmitted from the laser output module to the spectral beam combining module, thereby reducing the overall spot size and increasing the power density of the spot.

[0037] In addition, the spectral beam combining module is equipped with a dichroic mirror, which can spectrally combine the lasers of different wavelengths emitted by the two laser output modules to form a single laser beam. After the laser beams are combined by the dichroic mirror, the gap between the laser spots is very small or even zero, further improving the power density of the laser spot. In other words, after the divergence angle compression collimation, polarization beam combining, and spectral beam combining of multiple laser beams, the present application improves the power density of the laser spot finally emitted by the laser, so that the same effective spot size can be handled by a smaller aperture galvanometer, greatly reducing the load on the electrode and improving the operating speed of the overall processing equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0039] FIG1 is a structural diagram of some embodiments of the laser of the present application;

[0040] FIG2 is a structural diagram of some embodiments of the laser of the present application;

[0041] FIG3 is a structural diagram of some embodiments of the laser of the present application;

[0042] FIG4 is a structural diagram of some embodiments of the laser of the present application;

[0043] FIG5 is a structural diagram of some embodiments of the laser of the present application;

[0044] FIG6 is a structural diagram of some embodiments of the laser of the present application;

[0045] FIG7 is a structural diagram of some embodiments of the laser of the present application;

[0046] FIG8 is a structural diagram of the laser in FIG7 from another perspective;

[0047] FIG9 is a structural diagram of some embodiments of the laser device of the present application.

[0048] Description of the accompanying drawings: 1000: laser device; 100: laser; 10: laser output module; 11: light-emitting element; 13: polarization beam combiner; 131: reflective surface; 132: transparent surface; 15: optical rotation element; 17: third reflector; 30: compression module; 31: fast-axis collimating lens; 33: slow-axis collimating lens; 50: spectral beam combining module; 51: dichroic mirror; 511: antireflection coating; 512: reflective coating; 53: first reflector; 55: second reflector; 70: beam expansion module; 71: beam expander; 73: collimator; 80: connecting shaft; 81: lead screw; 83: lead screw nut; 90: mounting housing; 91: mounting cavity; 93: light outlet;

[0049] The realization of the objectives, functional features and advantages of this application will be further explained in conjunction with embodiments and with reference to the accompanying drawings.

[0050] Implementation Methods of the Application

[0051] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0052] It should be noted that all directional indications in the embodiments of the present application (such as up, down, left, right, front, back, etc.) are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0053] In this application, unless otherwise specified or limited, the terms "connection" and "fixation" should be understood in a broad sense. For example, "fixation" can mean fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. For those skilled in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0054] In addition, the descriptions of "first", "second", etc. in this application are for descriptive purposes only and should not be understood as indicating or implying their relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between the various embodiments can be combined with each other, but this must be based on the fact that they can be implemented by ordinary technicians in this field. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0055] This application proposes a laser 100 .

[0056] 1 to 7 , in some embodiments of the present application, a laser 100 includes at least two laser output modules 10, at least two compression modules 30, and a spectral beam combining module 50. The laser output module 10 includes two light-emitting elements 11 and a polarization beam combiner 13. The polarization beam combiner 13 can combine the laser beams emitted by the two light-emitting elements 11 and then emit them. Each compression module 30 is arranged on the laser optical path of the laser output module 10 to compress the laser beam of the laser output module 10 in the fast axis direction and the slow axis direction. The spectral beam combining module 50 includes a dichroic mirror 51. The dichroic mirror 51 can spectrally combine the laser beams emitted by the two laser output modules 10 and then emit them along a first direction.

[0057] The laser 100 proposed in this application can be a semiconductor laser, such as a blue semiconductor laser, an infrared semiconductor laser, or a solid laser. The laser 100 includes at least two laser emitting modules 10, and the light-emitting element 11 in the laser emitting module 10 can be a light-emitting chip or a light-emitting diode. The laser emitting module 10 includes two light-emitting elements 11 and a polarization beam combiner 13, and the lasers emitted by the two light-emitting elements 11 are combined into a laser beam by the polarization beam combiner 13; the laser emitting module 10 includes two light-emitting elements 11 and a polarization beam combiner 13, and both light-emitting elements 11 emit light toward the polarization beam combiner 13, and the polarization beam combiner 13 combines the two laser beams into one beam and emits it to the reflector. Specifically, the polarization states of the laser beams incident on the polarization beam combiner 13 from the two light-emitting elements 11 are perpendicular to each other, for example, one laser beam is P-polarized and the other is S-polarized. The two laser beams are then combined into one beam by the polarization beam combiner 13 to achieve superposition and complementary light intensities. This doubles the power density of the laser spot while maintaining the same beam quality. The polarization beam combiner 13 can be a thin-film polarizer or a polarizing prism.

[0058] Because the laser light emitted by the light-emitting element 11 has a large divergence angle, unequal divergence angles in the direction perpendicular to the junction plane, i.e., the slow axis direction, and in the direction parallel to the junction plane, i.e., the fast axis direction, and an elliptical far-field spot, a compression module 30 is provided in the laser optical path of each laser output module 10. The compression module 30 can be used to compress and focus the laser light emitted by the laser output module 10 in the fast axis direction and the slow axis direction, so that the divergence angles of the laser beam in the fast axis direction and the slow axis direction are compressed to within a preset range, thereby reducing the diameter of the laser beam of the laser 100 and improving the energy density of the laser beam. In addition, by adjusting the compression ratio of the divergence angle of the laser beam in the fast axis direction and the slow axis direction by the compression module 30, the divergence angle of the fast axis in the laser beam is made smaller than the divergence angle of the slow axis; such a setting reduces the beam expansion of the laser in the fast axis direction, so that when the size of the laser spot in the fast axis direction is determined, the laser 100 of the present application can make the beam expansion in the slow axis direction larger, so that the focused spot can be made small and the axes of the two directions of the spot are basically equal. After the field lens or other focusing lens, the overall focused spot is smaller, the light power density is higher, and the processing efficiency is improved.

[0059] In this embodiment, it is necessary to shape the divergence angles of each laser beam of the laser 100 in the fast axis and slow axis to be consistent. In this case, the same type of light-emitting element 11 can be used for each laser output module 10, so that the same specification of compression module 30 can be used. Of course, different types of light-emitting elements 11 can also be used. According to the divergence angles of the lasers emitted by each laser output module 10 in the fast axis direction and the slow axis direction, and according to the final required divergence angle requirements, a compression module 30 of corresponding specifications can be selected to adjust the laser divergence angle to the required range. In some embodiments, when the same type of light-emitting element 11 is selected, due to the manufacturing error of the light-emitting element 11 or other factors, the laser divergence angles emitted by different light-emitting elements 11 may also be different. In this case, a compression module 30 of corresponding specifications can also be selected based on the actual laser divergence angle emitted by the light-emitting element 11. When the compression module 30 is used to shape the laser emitted by the laser output module 10, the diameter of the laser beam will also be reduced, thereby reducing the size of the laser spot, increasing the optical power density of the laser spot, and improving the laser processing efficiency.

[0060] In the embodiment of the present application, the compression range of the fast-axis and slow-axis divergence angles can be adjusted by adjusting the distance between the compression module 30 and the light-emitting element 11 and the polarization beam combiner 13. Furthermore, the structure of the compression module 30 itself can also be adjusted to adjust the compression range of the fast-axis and slow-axis divergence angles. For example, the compression module 30 can also use at least two cylindrical mirrors that are perpendicular to each other along the optical path, such that the generatrix of the two cylindrical mirrors is perpendicular to the fast-axis direction and the slow-axis direction, respectively. This allows the laser divergence angle to be compressed along the fast-axis direction and the slow-axis direction, respectively. In this case, the compression ratio can be adjusted by adjusting the curvature and focal length of the cylindrical mirrors.

[0061] It should be noted that, in this embodiment, a compression module 30 may be provided after each light-emitting element 11 to compress and focus the laser light emitted by each light-emitting element 11 and then combine it by the polarization beam combiner 13, or the laser light may be combined and then compressed and focused. In addition, in some embodiments, the compression module 30 includes a fast-axis collimating lens 31 and a slow-axis collimating lens 33. A fast-axis collimating lens 31 may be provided between each light-emitting element 11 and the polarization beam combiner 13, and a slow-axis collimating lens 33 may be provided after the polarization beam combiner 13, so that the two laser beams after fast-axis compression are combined by the polarization beam combiner 13 and then slow-axis compression is performed; or a slow-axis collimating lens 33 may be provided between each light-emitting element 11 and the polarization beam combiner 13, and a fast-axis collimating lens 31 may be provided after the polarization beam combiner 13, so that the two laser beams after slow-axis compression are combined by the polarization beam combiner 13 and then fast-axis compression is performed.

[0062] The laser 100 of the present application is also provided with a spectral beam combining module 50, which includes at least one dichroic mirror 51. The dichroic mirror 51 has significantly different spectral reflection or transmission characteristics at two wavelengths (or wavelength bands). That is, it allows light of a specific wavelength or wavelength range to pass through the dichroic mirror 51, while light of other wavelengths cannot pass through the dichroic mirror 51 and will be reflected by the dichroic mirror 51. In this way, the laser beams of different wavelength bands emitted by the two laser output modules 10 can be combined into one beam through the dichroic mirror 51, thereby reducing the gap between the two laser beams or even eliminating the gap between the two laser beams; further reducing the laser spot diameter and improving the spot power density. The dichroic mirror 51 can be a prism structure, or a plane mirror or other structure.

[0063] It can be understood that when three or more laser emitting modules 10 are provided in the laser 100, only one dichroic mirror 51 is provided to combine the lasers emitted by two of the laser emitting modules 10, which can also play a role in reducing the overall spot diameter and improving the spot power density to a certain extent; and more laser emitting modules 10 are paired in pairs and are respectively combined by the dichroic mirror 51. As the number of dichroic mirrors 51 increases and the number of laser beams combined increases, the effect of reducing the overall spot diameter and improving the spot power density is also better.

[0064] Therefore, it can be understood that in the technical solution of the present application, at least two laser output modules 10 can be used in the laser 100. For the laser output module 10 including two light-emitting elements 11, the two laser beams with different polarization directions emitted by the two light-emitting elements 11 can be polarized and combined into a beam of circularly polarized light through the polarization combiner 13, thereby reducing the number of laser beams, reducing the laser spot size of the laser output module 10, and improving the power density.

[0065] Furthermore, a compression module 30 is positioned along the light path of each laser output module 10. This compression module 30 compresses and focuses the laser light emitted by the laser output module 10 in both the fast and slow axis directions, reducing the divergence angle of the fast axis to a smaller angle than the divergence angle of the slow axis. This arrangement allows for a larger beam expansion along the slow axis, while reducing the diameter of the beam transmitted from the laser output module 10 to the spectral beam combining module 50. This reduces the overall spot size and increases the power density of the spot.

[0066] In addition, the spectral beam combining module 50 is provided with a dichroic mirror 51, which can spectrally combine the laser beams of different wavelengths emitted by the two laser output modules 10 to form a single laser beam. The gap between the laser spots after the combination by the dichroic mirror 51 is very small or even non-existent, further improving the power density of the laser spot. In other words, after the divergence angle compression collimation, polarization beam combining, and spectral beam combining of the multiple laser beams, the present application improves the power density of the laser spot finally emitted by the laser 100, so that the same effective spot size can be handled by a smaller aperture galvanometer, greatly reducing the load on the electrode and improving the operating speed of the overall processing equipment.

[0067] Referring to FIG. 1 , in some embodiments of the present application, the dichroic mirror 51 has two mirror surfaces disposed back to back, one of which is provided with an antireflection film 511 and the other is provided with a reflective film 512 ;

[0068] The laser light emitted from one of the laser emitting modules 10 may be emitted toward the antireflection film 511 along the first direction, and the laser light emitted from the other laser emitting module 10 may be emitted toward the reflective film 512 along a second direction perpendicular to the first direction.

[0069] In this embodiment, the dichroic mirror 51 is a plane mirror having two back-to-back surfaces, one of which is provided with an antireflection coating 511, and the other with a reflective coating 512. The antireflection coating 511 can improve the transmittance of light of a specific wavelength. For example, it causes the reflected light from the front and rear surfaces of the coating to interfere with each other, thereby enhancing transmission and reducing the loss of laser light of a specific wavelength that can pass through the dichroic mirror 51, thereby improving light utilization. The reflective coating 512 reflects laser light incident on the dichroic mirror 51 without affecting the transmission of laser light of a specific wavelength. This allows the laser light transmitted from the dichroic mirror 51 to pass through the reflective coating 512 and combine with the laser light reflected from the reflective coating 512. The two laser beams incident on the dichroic mirror 51 can be arranged at approximately perpendicular angles, with the antireflection coating 511 and the reflective coating 512 positioned at approximately 45° to the laser beams. In some embodiments, since the laser light transmitted through the dichroic mirror 51 also undergoes some refraction within the dichroic mirror 51, the orientation of the dichroic mirror 51 can be adjusted by adjusting the refraction angle. In addition, the dichroic mirror 51 can be made of glass, quartz or other materials, which are not limited here.

[0070] It should be noted that in this embodiment, the two laser beams need to be perpendicular to each other so as to be emitted toward the anti-reflection film 511 and the reflective film 512, respectively. In this case, the two laser emitting modules 10 can be arranged in a variety of ways. For example, the light emission directions of the two laser emitting modules 10 can be perpendicular to each other, and they can be arranged toward the anti-reflection film 511 and the reflective film 512, respectively, and the light emission direction of the laser emitting module 10 emitted toward the anti-reflection film 511 is the first direction. A reflector can also be provided to adjust the optical path of the laser emitted by the laser emitting module 10, making the setting position of the laser emitting module 10 more flexible; for example, both laser emitting modules 10 can emit lasers in the second direction, with the first direction being perpendicular to the second direction; one laser emitting module 10 emits lasers toward the reflective film 512, and the laser emitted by the other laser emitting module 10 changes its direction through the reflector, so that the laser is reflected and emitted toward the anti-reflection film 511 along the first direction. Alternatively, both laser emitting modules 10 may emit laser light in a first direction, with the laser light from one laser emitting module 10 being directed directly toward the anti-reflection film 511, while the laser light from the other laser emitting module 10 is redirected by a reflective mirror so that the laser light is reflected and then directed toward the reflective film 512 in a second direction. Of course, multiple reflective mirrors may be provided to redirect the laser light, depending on the position of the laser emitting modules 10. It is sufficient to ensure that the two laser beams ultimately directed toward the dichroic mirror 51 are substantially perpendicular to each other and directed toward the anti-reflection film 511 and the reflective film 512, respectively.

[0071] 1 , 2 , and 6 , in some embodiments of the present application, the two laser emitting modules 10 that perform spectral beam combining through the same dichroic mirror 51 both emit laser light along the second direction. The spectral beam combining module 50 further includes a first reflector 53 , and the first reflector 53 and the dichroic mirror 51 are arranged along the first direction.

[0072] One of the laser emitting modules 10 is disposed toward the first reflector 53 to reflect the laser light to the anti-reflection film 511 through the first reflector 53 , and the other laser emitting module 10 is disposed toward the reflective film 512 .

[0073] In this embodiment, in the two laser output modules 10 that perform spectral beam combining through the same dichroic mirror 51, the laser beams emitted by each laser output module 10 propagate along the second direction. The laser beam emitted by one laser output module 10 is directed directly toward the reflective film 512 of the dichroic mirror 51, while the laser beam emitted by the other laser output module 10 is directed toward the first reflective mirror 53 located on the side of the anti-reflection film 511 of the dichroic mirror 51. The laser beam from the laser output module 10 is reflected by the first reflective mirror 53 toward the anti-reflection film 511, passes through the dichroic mirror 51, and is combined with the other laser beam reflected from the reflective film 512 to form a single laser beam, which then propagates along the first direction. This arrangement allows the two laser output modules 10 to be placed on the same side of the spectral beam combining module 50, increasing the flexibility of the laser output module 10 configuration.

[0074] In addition, it should be noted that, in this embodiment, each laser emission module 10 can be arranged on the same side of the spectrum combining module 50 along the second direction, or can be arranged on both sides of the spectrum combining module 50 as shown in FIG. 2 , which is not limited here.

[0075] 1 , 6 and 7 , in some embodiments of the present application, the laser emission modules 10 are arranged in parallel along the first direction and are located on the same side of the spectrum combining module 50 .

[0076] In this embodiment, the laser emitting modules 10 of the laser 100 and the spectral beam combining module 50 are arranged along the second direction, and the laser emitting modules 10 are located on the same side of the spectral beam combining module 50. This arrangement eliminates the need to install a laser emitting module 10 on the other side of the spectral beam combining module 50, reducing the space occupied on the other side of the spectral beam combining module 50 and reducing the width of the laser 100 in the second direction. In addition, arranging the laser emitting modules 10 side by side along the first direction can also reduce the width of the laser 100 in the second direction. In other words, the technical solution of this embodiment can reduce the volume and occupied space of the laser 100.

[0077] Please refer to Figure 3. In some embodiments of the present application, in the two laser emission modules 10 that are combined by the same dichroic mirror 51, one of the laser emission modules 10 and the dichroic mirror 51 are arranged along the first direction and are disposed toward the anti-reflection film 511; the other laser emission module 10 and the dichroic mirror 51 are arranged along the second direction and are disposed toward the reflective film 512.

[0078] In this embodiment, the dichroic mirror 51 is positioned at approximately 45° to both the first and second directions, so that the emission directions of the two laser emitting modules 10 are perpendicular to each other. One laser emitting module 10 is positioned on the side of the anti-reflection coating 511 of the dichroic mirror 51 along the first direction, thereby directly emitting laser light toward the anti-reflection coating 511 of the dichroic mirror 51. The other laser emitting module 10 is positioned on the side of the reflective coating 512 of the dichroic mirror 51 along the second direction, thereby directly emitting laser light toward the reflective coating 512 of the dichroic mirror 51. Subsequently, the two laser beams are spectrally combined in the dichroic mirror 51, and then emitted from the side of the reflective coating 512 toward the first direction. This arrangement eliminates the need for optical devices such as reflectors in the laser 100 to change the propagation direction of the laser light emitted by the laser emitting module 10, thereby reducing the number of optical devices in the laser 100.

[0079] 4 and 5 , in some embodiments of the present application, the two laser emitting modules 10 that perform spectral beam combining through the same dichroic mirror 51 both emit laser light along the first direction. The spectral beam combining module 50 further includes a second reflector 55 , and the second reflector 55 and the dichroic mirror 51 are arranged along the second direction.

[0080] One of the laser emitting modules 10 is disposed toward the second reflector 55 to reflect the laser light to the reflective film 512 through the second reflector 55 , and the other laser emitting module 10 is disposed toward the reflective enhancement film 511 .

[0081] In this embodiment, in the two laser emitting modules 10 that perform spectral beam combining through the same dichroic mirror 51, the laser beams emitted by each laser emitting module 10 propagate along the first direction. The laser beam emitted by one laser emitting module 10 is directly emitted toward the anti-reflection coating 511 of the dichroic mirror 51, while the laser beam emitted by the other laser emitting module 10 is emitted toward the second reflective mirror 55 located on the side of the reflective coating 512 of the dichroic mirror 51. The laser beam from the laser emitting module 10 is reflected by the second reflective mirror 55 toward the reflective coating 512, and is combined with the other laser beam that has passed through the dichroic mirror 51 into a single laser beam, which is then emitted along the first direction.

[0082] Please refer to Figure 2. In some embodiments of the present application, the laser 100 is provided with at least four laser output modules 10, and the spectral beam combining module 50 is provided with at least two dichroic mirrors 51. Each dichroic mirror 51 is arranged in a stepped manner along the first direction and the second direction. Each dichroic mirror 51 is used to perform spectral beam combining on the lasers emitted by the two laser output modules 10. The distance between the light output positions of any two dichroic mirrors 51 along the first direction is greater than the distance along the second direction.

[0083] In this embodiment, the laser 100 is provided with at least four laser emitting modules 10, and the laser light emitted by each laser emitting module 10 propagates along the second direction. Correspondingly, at least two dichroic mirrors 51 are provided in the spectral beam combining module 50. Each dichroic mirror 51 can be used to perform spectral beam combining on the laser lights emitted by the two laser emitting modules 10. In the two laser emitting modules 10 that perform spectral beam combining through the same dichroic mirror 51, the laser light emitted by one of the laser emitting modules 10 is directly directed toward the reflective film 512 of the dichroic mirror 51, and the laser light emitted by the other laser emitting module 10 is reflected by the first reflective mirror 53 to the anti-reflection film 511.

[0084] The dichroic mirrors 51 are arranged in a stepped manner along the first direction and the second direction, so as to avoid a dichroic mirror 51 being located on the laser emission path of another dichroic mirror 51 and blocking the propagation of the laser beams combined by the other dichroic mirrors 51; and to ensure that the laser beams combined and emitted by each dichroic mirror 51 can all be emitted and utilized, thereby realizing spatial beam combining of various light spots.

[0085] It can be understood that the laser beams emitted from the two laser emitting modules 10 after being beam-combined by the dichroic mirror 51 are approximately located at the reflective position of the reflective film 512 at the light-emitting position of the dichroic mirror 51. The distance between the two laser beams emitted from the two dichroic mirrors 51 after spectral beam combining is defined as L, and the distance between the two laser beams respectively emitted to the reflective film 512 of the two dichroic mirrors 51 is defined as D. By adjusting the position so that the distance between the light-emitting positions of any two dichroic mirrors 51 in the first direction is greater than the distance in the second direction, D can be made greater than L. That is, the position setting of the dichroic mirror 51 reduces the spatial gap between the laser beams after spectral beam combining, reduces the size of the overall light spot, and improves the power density of the light spot.

[0086] In addition, since a compression module 30 is provided on the light output path of each laser output module 10, the compression module 30 can compress and focus the laser light emitted by the laser output module 10 in the fast and slow axis directions, making the divergence angle of the fast axis smaller than the divergence angle of the slow axis. With this arrangement, the slow axis light can be expanded to a larger beam under the same fast axis size, and the diameter of the beam transmitted to the dichroic mirror 51 can be reduced, so that the spatial misalignment between the two dichroic mirrors 51 can be made very small, further reducing the spatial gap between the two laser beams, reducing the overall spot size, and increasing the power density of the spot. Moreover, since the spot gap is very small after spatial beam combining, the same effective spot size can be handled by a smaller aperture galvanometer, greatly reducing the load on the electrode and improving the operating speed of the overall processing equipment.

[0087] 1 and 2 , in some embodiments of the present application, an optical rotator 15 is provided between at least one of the light-emitting elements 11 of the laser emission module 10 and the polarization beam combiner 13 . The optical rotator 15 can change the polarization direction of the laser light emitted by the light-emitting element 11 .

[0088] In the embodiment of the present application, a polarization beam combiner 13 is used in the laser emission module 10 to perform polarization beam combining on two laser beams with different polarization directions. The main principle is that the polarization directions of the two laser beams incident on the polarization beam combiner 13 are perpendicular to each other. However, if the placement of the light-emitting element 11 is adjusted or a reflector is provided, the light-emitting element 11 and the reflector need to have a high positional accuracy, which makes adjustment more difficult and the accuracy is difficult to guarantee. In this embodiment, an optical rotation element 15 can be provided between one of the light-emitting elements 11 and the polarization beam combiner 13; the optical rotation element 15 is an optical element with optical rotation, such as a half-wave plate, an optical rotator, etc., which can change the polarization direction of light so that the polarization direction of the laser light passing through the optical rotation element 15 is constant. An optical rotation element 15 may be provided between any one of the light-emitting elements 11 and the polarization beam combiner 13; or an optical rotation element 15 may be provided between both light-emitting elements 11 and the polarization beam combiner 13. In this case, the optical rotation angles of the two optical rotation elements 15 need to be different, thereby ensuring that the polarization directions of the two laser beams incident on the polarization beam combiner 13 are perpendicular to each other. In such a configuration, there is no need to have high positional accuracy requirements for the light-emitting element 11 and the reflector, etc., thereby avoiding a complicated and time-consuming adjustment process, and improving the convenience of installation and adjustment of structures such as the light-emitting element 11 and the reflector.

[0089] In some embodiments of the present application, the optical rotation element 15 is an optical rotation plate or a half-wave plate.

[0090] In this embodiment, a polarization rotator or a half-wave plate can be used as the polarization element 15. Both the half-wave plate and the polarization rotator have optical activity. The optical axis of the half-wave plate is parallel to the crystal plane, while the optical axis of the polarization rotator is perpendicular to the crystal plane. Both can be used to convert the polarization state of light, thereby adjusting the laser to a desired polarization direction.

[0091] Please refer to Figures 1 to 7. In some embodiments of the present application, the polarization beam combiner 13 includes a reflective surface 131 and a transparent surface 132 arranged back to back. The lasers emitted by the two light-emitting elements 11 can be respectively emitted toward the reflective surface 131 and the transparent surface 132, and both are emitted from the reflective surface 131.

[0092] In this embodiment, the polarization beam combiner 13 has a reflective surface 131 and a translucent surface 132 that are arranged back to back. The two laser beams directed to the polarization beam combiner 13 can be made approximately perpendicular, and the translucent surface 132 and the reflective surface 131 are arranged at approximately a 45° angle to the laser beams, so that the two laser beams are directed toward the translucent surface 132 and the reflective surface 131, respectively. At this time, the two light-emitting elements 11 can be arranged in a variety of ways. For example, the light-emitting directions of the two light-emitting elements 11 can be made perpendicular to each other and directed toward the translucent surface 132 and the reflective surface 131, respectively. A reflector can also be provided to adjust the optical path of the laser light emitted by the light-emitting element 11, so that the setting position of the light-emitting element 11 is more flexible. For example, the two light-emitting elements 11 are made to emit laser light in the same direction, with one light-emitting element 11 emitting laser light toward the reflective surface 131, and the laser light emitted by the other light-emitting element 11 is changed in direction by the reflector so that the laser light is reflected and directed toward the translucent surface 132. Of course, multiple reflectors can also be set according to the position of the light emitting element 11 to change the direction of the laser light. It is only necessary to make the two laser beams that ultimately strike the polarization beam combiner 13 approximately perpendicular to each other and respectively strike the light-transmitting surface 131 and the light-reflecting surface 132 .

[0093] It should be noted that the specific structures of the laser emitting modules 10 in the laser 100 can be different. For example, the light emission directions of the two light-emitting elements 11 of one laser emitting module 10 can be perpendicular to each other, while the light emission directions of the two light-emitting elements 11 of another laser emitting module 10 can be the same, and the propagation direction of at least one laser beam can be changed by at least one reflector. Of course, the structural arrangement of each laser emitting module 10 can also be consistent, which is not limited here.

[0094] 1 to 3 , in some embodiments of the present application, one of the light-emitting elements 11 of at least one laser emitting module 10 is disposed toward the light-reflecting surface 131 , and another light-emitting element 11 is disposed toward the light-transmitting surface 132 .

[0095] In this embodiment, the light emission directions of the two light-emitting elements 11 of at least one laser output module 10 in the laser 100 are perpendicular to each other, and the two light-emitting elements 11 can emit laser light directly toward the polarization beam combiner 13. This configuration eliminates the need for components such as reflectors in the laser output module 10 to adjust the laser light path, thereby reducing the number of optical components in the laser 100.

[0096] Please refer to Figure 6. In some embodiments of the present application, the two light-emitting elements 11 of at least one laser emitting module 10 are arranged side by side, and the laser emitting module 10 further includes a third reflector 17; one of the light-emitting elements 11 faces one of the reflective surface 131 and the light-transmitting surface 132, and the other light-emitting element 11 is arranged toward the third reflector 17, so that the emitted laser is reflected by the third reflector 17 to the other of the reflective surface 131 and the light-transmitting surface 132.

[0097] In this embodiment, the two light-emitting elements 11 of at least one laser emitting module 10 in the laser 100 are configured to emit light in the same direction, and a reflector is used to adjust the optical path of at least one of the laser beams so that the two laser beams are approximately perpendicular to each other and are emitted toward the reflective surface 131 and the translucent surface 132, respectively. Alternatively, the laser beam from one laser emitting module 10 may be emitted directly toward the translucent surface 132, while the laser beam from the other laser emitting module 10 is redirected by a third reflector 17 so that it is reflected and emitted toward the reflective surface 131. Alternatively, the laser beam from one laser emitting module 10 may be emitted directly toward the reflective surface 131, while the laser beam from the other laser emitting module 10 is redirected by a third reflector 17 so that it is reflected and emitted toward the translucent surface 132.

[0098] Of course, multiple reflectors can also be set according to the position of the light emitting element 11 to change the direction of the laser. It is only necessary to make the two laser beams that ultimately strike the polarization beam splitter approximately perpendicular to each other and respectively strike the reflective surface 131 and the transparent surface 132.

[0099] 1 to 7 , in some embodiments of the present application, the compression module 30 includes a fast-axis collimating lens 31 and a slow-axis collimating lens 33 disposed on the light-emitting side of the light-emitting element 11 .

[0100] In this embodiment, the compression module 30 may also include a fast-axis collimating lens 31 and a slow-axis collimating lens 33 arranged along the optical path. The fast-axis collimating lens 31 can be used to compress the divergence angle of the laser in the fast-axis direction and collimate the laser beam. The slow-axis collimating lens 33 can be used to compress the divergence angle of the laser in the slow-axis direction and collimate the laser beam. The fast-axis collimating lens 31 and the slow-axis collimating lens 33 can both be cylindrical lenses, which can be plano-convex cylindrical lenses, plano-concave cylindrical lenses, double-convex cylindrical lenses, double-convex cylindrical lenses, or double-convex cylindrical lenses. Concave cylindrical surface, meniscus cylindrical mirror, cylindrical-intersecting cylindrical mirror and special-shaped cylindrical lens, etc.; and make the busbar of the fast-axis collimating lens 31 perpendicular to the fast-axis direction, make the busbar of the slow-axis collimating lens 33 perpendicular to the slow-axis direction, and make the cylindrical curvature of the slow-axis collimating lens 33 smaller than the cylindrical curvature of the fast-axis collimating lens 31, so that the reduction in the divergence angle of the laser on the slow axis can be smaller than the reduction in the divergence angle on the fast axis, so that the divergence angle of the laser in the slow axis direction can be not less than the divergence angle in the fast axis direction. The fast-axis collimating lens 31 and the slow-axis collimating lens 33 can be arranged so that the fast-axis collimating lens 31 is set on the light-emitting side of the slow-axis collimating lens 33, or the slow-axis collimating lens 33 is set on the light-emitting side of the fast-axis collimating lens 31.

[0101] The same laser output module 10 can use a set of compression modules 30, that is, the fast-axis collimating lens 31 and the slow-axis collimating lens 33 are arranged on the light-emitting side of the polarization beam combiner 13. Alternatively, the two light-emitting elements 11 of the same laser output module 10 can share the fast-axis collimating lens 31 or the slow-axis collimating lens 33; for example, a fast-axis collimating lens 31 is arranged between each light-emitting element 11 and the polarization beam combiner 13, and a slow-axis collimating lens 33 is arranged after the polarization beam combiner 13, so that the two laser beams that have undergone fast-axis compression are combined by the polarization beam combiner 13 and then undergo slow-axis compression; or, a slow-axis collimating lens 33 is arranged between each light-emitting element 11 and the polarization beam combiner 13, and a fast-axis collimating lens 31 is arranged after the polarization beam combiner 13, so that the two laser beams that have undergone slow-axis compression are combined by the polarization beam combiner 13 and then undergo fast-axis compression. Of course, as in the following embodiment, a set of compression modules 30 may be provided between each light emitting element 11 and the polarization beam combiner 13 , which will not be described in detail here.

[0102] Referring to FIG. 1 , in some embodiments of the present application, the fast-axis collimating lens 31 and the slow-axis collimating lens 33 are disposed between each of the light-emitting elements 11 and the polarization beam combiner 13 .

[0103] In this embodiment, a fast-axis collimating lens 31 and a slow-axis collimating lens 33 are provided between each light-emitting element 11 and the polarization beam combiner 13, so that the lasers emitted by the two light-emitting chips can be compressed before being directed to the polarization beam combiner 13, thereby reducing the diameter of the light beam directed to the polarization beam combiner 13, thereby reducing the diameter of the light beam after polarization beam combining, which is beneficial to improving the spot power density.

[0104] 1 to 7 , in some embodiments of the present application, the laser 100 further includes a beam expansion module 70 , which is disposed on the light-emitting side of the spectral beam combining module 50 .

[0105] In this embodiment, the laser 100 includes a beam expansion module 70, which is arranged on the light-emitting side of the reflector to amplify the size of the synthesized laser spot to the desired spot size. During this process, the size of the laser spot in both the fast and slow axis directions increases, and the laser beam can maintain the spot distribution before beam expansion. The increase in spot size can increase the processing area and improve processing efficiency. The beam expansion module 70 can be provided with only a plano-concave lens as the beam expander 71, or it can be provided as a combination of the beam expander 71 and the collimator 73 as in the following embodiment.

[0106] Referring to FIG. 1 to FIG. 7 , in some embodiments of the present application, the beam expansion module 70 includes:

[0107] a beam expander 71 , which is disposed on the light-emitting side of the spectral beam combining module 50 ; and

[0108] The collimator 73 is disposed on the light-emitting side of the beam expander 71 .

[0109] In this embodiment, the beam expansion module 70 includes a beam expander 71 and a collimator 73 arranged in sequence along the light emitting direction; the beam expander 71 can be a plano-concave lens, such as a plano-concave spherical mirror, which can increase the divergence angle of the laser beam to expand the diameter of the laser beam; after the laser beam is expanded, it is emitted to the collimator 73, and the collimator 73 can be a plano-convex lens, such as a plano-convex spherical mirror, which can collimate the laser beam to adjust the coaxiality of the laser beam, improve the directionality of the laser beam, and make the energy of the laser beam passing through the beam expander 71 more concentrated, and can also have a larger power density when the transmission distance is long, thereby improving the processing efficiency.

[0110] In some embodiments of the present application, at least one of the beam expander 71 and the collimator 73 can be moved along the arrangement direction of the beam expander 71 and the collimator 73 to adjust the distance between the beam expander 71 and the collimator 73.

[0111] In the embodiment of the present application, the laser beam synthesized by the spectral beam combining module 50 can be expanded by the beam expansion module 70 composed of the beam expander 71 and the collimator 73, and the expanded laser beam can be roughly collimated. The degree of expansion of the laser beam depends on the distance between the beam expander 71 and the collimator 73. When the distance between the beam expander 71 and the collimator 73 is larger, the transmission distance of the laser beam passing through the beam expander 71 when reaching the collimator 73 is longer, the degree of beam expansion divergence is also greater, the diameter of the collimated laser beam is also larger, and the laser spot becomes larger; conversely, if the distance between the beam expander 71 and the collimator 73 is smaller, the transmission distance of the laser beam when reaching the collimator 73 is smaller, the degree of divergence is smaller, the diameter of the collimated laser beam is also smaller, and the laser spot becomes smaller; therefore, the diameter of the beam can be changed by changing the distance between the beam expander 71 and the collimator 73, thereby changing the size of the spot.

[0112] The collimator 73 may be movable to move closer to or farther from the collimator 73, or the collimator 73 may be movable to move closer to or farther from the collimator 71; or both the collimator 71 and the collimator 73 may be movable, which is not limited here.

[0113] In some embodiments of the present application, the beam expanding module 70 further includes a connecting shaft 80 , which extends along the arrangement direction of the beam expanding mirror 71 and the collimating mirror 73 ; at least one of the beam expanding mirror 71 and the collimating mirror 73 can be translationally arranged on the connecting shaft 80 .

[0114] In this embodiment, the beam expander module 70 further includes at least one connecting shaft 80, which extends along the arrangement direction of the beam expander 71 and the collimator 73, and enables at least one of the beam expander 71 and the collimator 73 to be translationally arranged on the connecting shaft 80, for example, the beam expander 71 is connected to the connecting shaft 80, or the collimator 73 is connected to the connecting shaft 80, or both the beam expander 71 and the collimator 73 are connected to the connecting shaft 80. The beam expander 71 and the collimator 73 can be connected to the connecting shaft 80 by being directly sleeved on the connecting shaft 80, or by being slidably connected to the connecting shaft 80 using other connecting parts, for example, the connecting shaft 80 is set as a screw 81, and the beam expander 71 or the collimator 73 is fixed on the screw nut 83. By setting the connecting shaft 80, the beam expander 71 and the collimator 73 can move closer to and farther away from each other along the connecting shaft 80; that is, the connecting shaft 80 plays a guiding and limiting role, avoiding the beam expander 71 and the collimator 73 from being displaced during movement, which would affect the beam expansion and collimation of the laser.

[0115] In some embodiments, the laser 100 includes a mounting housing 90 , and the connecting shaft 80 can be fixedly connected to the mounting housing 90 .

[0116] In some embodiments of the present application, one of the beam expander 71 and the collimator 73 is threadedly connected to the connecting shaft 80 .

[0117] In some embodiments of the present application, the beam expansion module 70 includes two connecting shafts 80 , and the beam expander 71 and the collimator 73 are respectively connected to the threads of one of the connecting shafts 80 ;

[0118] In some embodiments of the present application, the connecting shaft 80 has two threaded sections arranged along its length, and the thread rotation directions of the two threaded sections are opposite, and the beam expander 71 and the collimator 73 are respectively threadedly connected to one of the threaded sections.

[0119] In this embodiment, at least one of the beam expander 71 and the collimator 73 is connected to the thread of the connecting shaft 80. In this case, the distance between the beam expander 71 and the collimator 73 can be adjusted by rotating the connecting shaft 80. Alternatively, one of the beam expander 71 and the collimator 73 can be connected to the thread of the connecting shaft 80. In this case, the lens connected to the connecting shaft 80 can be translated along the connecting shaft 80 by rotating the connecting shaft 80. Alternatively, two connecting shafts 80 can be provided, with the beam expander 71 and the collimator 73 respectively connected to the thread of one connecting shaft 80. In this case, the lens connected thereto can be translated along the connecting shaft 80 by rotating the corresponding connecting shaft 80. Alternatively, two threaded sections arranged along the length direction of the connecting shaft 80 may be provided, and the thread rotation directions of the two threaded sections are opposite, so that the beam expander 71 and the collimator 73 are respectively threadedly connected to one threaded section. At this time, rotating the connecting shaft 80 can make the beam expander 71 and the collimator 73 move toward or away from each other, thereby adjusting the distance between the beam expander 71 and the collimator 73 and adjusting the size of the light spot after beam expansion and collimation.

[0120] Please refer to Figures 7 and 8. In some embodiments of the present application, the laser 100 also includes a mounting shell 90, a mounting cavity 91 is formed in the mounting shell 90, and the mounting shell 90 is provided with a light outlet 93 connected to the mounting cavity 91. The laser emission module 10, the compression module 30 and the spectral beam combining module 50 are all arranged in the mounting cavity 91, and the light outlet 93 is located on the light output side of the spectral beam combining module 50.

[0121] In this embodiment, the laser 100 further includes a mounting shell 90, in which a mounting cavity 91 is formed, and a light outlet 93 communicating with the mounting cavity 91 is provided on the wall of the mounting shell 90, so that the laser 100 can emit laser light outward. The mounting shell 90 includes a mounting cavity 91, in which the compression module 30 and the spectral beam combining module 50 are both mounted, and the light emitting side of the laser emission module 10 is arranged toward the mounting cavity 91, so as to protect components such as the laser emission module 10, the compression module 30, and the spectral beam combining module 50. Furthermore, the shaping processes of the laser 100, such as spot compression and synthesis, are all completed within the mounting cavity 91, preventing the laser shaping process from being affected by the outside world.

[0122] In some embodiments, the laser 100 includes a beam expander module 70 formed by a combination of a beam expander 71 and a collimator 73, and the distance between the beam expander 71 and the collimator 73 is adjustable. In this case, a plurality of mounting positions arranged along the arrangement direction of the beam expander 71 and the collimator 73 may be provided in the mounting cavity 91. The mounting positions may be used to mount at least one of the beam expander 71 and the collimator 73. The distance between the beam expander 71 and the collimator 73 may be adjusted by adjusting the mounting position of the beam expander 71 and / or the collimator 73.

[0123] In some embodiments, a connecting shaft 80 extending along the arrangement direction of the beam expander 71 and the collimator 73 may be provided, and the connecting shaft 80 is threadedly connected to one of the beam expander 71 and the collimator 73. When the connecting shaft 80 is rotated, one end of the beam expander 71 or the collimator 73 connected to the connecting shaft can be moved to adjust the distance between the beam expander 71 and the collimator 73. Of course, a screw rod 81 may also be provided to avoid directly providing threaded holes on the beam expander 71 and the collimator 73. This distance adjustment method makes the distance adjustment range between the beam expander 71 and the collimator 73 continuous, thereby improving the flexibility of distance adjustment and laser spot size adjustment.

[0124] Referring to FIG. 7 , in some embodiments of the present application, the light emitting element 11 is disposed through the wall of the mounting shell 90 of the laser 100 .

[0125] In this embodiment, the light-emitting element 11 of the laser output module 10 is disposed on the wall of the mounting shell 90 of the laser 100. This configuration can improve the connection strength between the light-emitting element 11 and the mounting shell 90, and limit the light-emitting element 11, so that the light-emitting direction of the light-emitting element 11 remains stable. In some embodiments, the light-emitting element 11 needs to be connected to a power source or other structure. The light-emitting element 11 is disposed on the wall of the mounting shell 90, so that the end of the light-emitting element 11 facing away from the light-emitting side can be used to connect to an external power source or other structure, facilitating the use of the laser 100.

[0126] In the embodiment of the present application, the laser 100 is a semiconductor laser or a solid-state laser. The light-emitting element 11 used in the semiconductor laser and the solid-state laser has the advantages of small size, high output power and high brightness. However, the laser light emitted by it has different divergence angles in the direction perpendicular to the junction plane, i.e., the slow axis direction, and in the direction parallel to the junction plane, i.e., the fast axis direction. Through the structural setting of the laser 100 in the embodiment of the present application, the lasers of multiple light-emitting elements 11 can be superimposed and synthesized, and the diameter of the overall light beam finally emitted by the laser 100 can be reduced, thereby reducing the size of the laser spot; thereby, the optical power density of the laser spot can be increased, and the energy distribution of the spot can be uniform, which can improve the efficiency of laser processing.

[0127] Referring to FIG. 9 , some embodiments of the present application further provide a laser device 1000, comprising a laser 100 as described in any of the aforementioned embodiments. The laser device 1000 provided herein can be, for example, a laser processing device such as a laser engraving device or a laser cutting device, or can be a medical device, a laser radar, a laser printer, a scanner, or other device, without limitation.

[0128] Since the laser device 1000 proposed in this application applies all the technical solutions of all the aforementioned embodiments, it at least has all the beneficial effects brought by all the aforementioned technical solutions, which will not be described one by one here.

[0129] The above description is only a preferred embodiment of the present application and does not limit the patent scope of the present application. All equivalent structural transformations made based on the contents of the present application specification and drawings, or direct / indirect application in other related technical fields, are included in the patent protection scope of the present application.

Claims

1. A laser, comprising: At least two laser output modules, each of the laser output modules including two light-emitting elements and a polarization beam combiner, the polarization beam combiner being configured to perform polarization beam combination on the lasers emitted by the two light-emitting elements and then emit the combined laser; At least two compression modules, each of the compression modules being disposed on the laser optical path of the laser output module to compress the laser of the laser output module in the fast axis direction and the slow axis direction; And A spectral beam combining module, the spectral beam combining module including a dichroic mirror, the dichroic mirror being configured to perform spectral beam combination on the lasers emitted by the two laser output modules and then emit the combined laser along a first direction.

2. The laser according to claim 1, wherein, The dichroic mirror has two mirror surfaces disposed back to back, one of the mirror surfaces being provided with an antireflection film and the other mirror surface being provided with a reflection film; The laser emitted by one of the laser output modules can be directed towards the antireflection film along the first direction, and the laser emitted by one of the laser output modules can be directed towards the reflection film along a second direction, the second direction being perpendicular to the first direction.

3. The laser according to claim 2, wherein, The two laser output modules that perform spectral beam combination through the same dichroic mirror both emit laser along the second direction, and the spectral beam combining module further includes a first reflector, the first reflector and the dichroic mirror being arranged along the first direction; One of the laser output modules is arranged towards the first reflector to reflect the laser to the antireflection film through the first reflector, and the other laser output module is arranged towards the reflection film.

4. The laser according to claim 3, wherein, Each of the laser output modules is arranged side by side along the first direction and is located on the same side of the spectral beam combining module.

5. The laser according to claim 2, wherein, Among the two laser output modules that are combined by the same dichroic mirror, one of the laser output modules is arranged along the first direction with the dichroic mirror and is arranged towards the antireflection film, and the other laser output module is arranged along the second direction with the dichroic mirror and is arranged towards the reflection film.

6. The laser according to claim 2, wherein, The two laser output modules that perform spectral beam combination through the same dichroic mirror both emit laser along the first direction, and the spectral beam combining module further includes a second reflector, the second reflector and the dichroic mirror being arranged along the second direction, one of the laser output modules being arranged towards the second reflector to reflect the laser to the reflection film through the second reflector, and the other laser output module being arranged towards the antireflection film.

7. The laser according to claim 2, wherein, The laser is provided with at least four of the laser output modules, and the spectral beam combining module is provided with at least two of the dichroic mirrors, each of the dichroic mirrors being arranged in a stepped manner along the first direction and the second direction, each of the dichroic mirrors being configured to perform spectral beam combination on the lasers emitted by the two laser output modules, and the distance between the light output positions of any two of the dichroic mirrors along the first direction is greater than the distance along the second direction.

8. The laser according to any one of claims 1 to 7, wherein, A rotator is provided between at least one of the light-emitting elements of the laser output module and the polarization beam combiner, and the rotator can change the polarization direction of the laser emitted by the light-emitting element.

9. The laser according to any one of claims 1 to 8, wherein, The polarization beam combiner includes a reflective surface and a transmissive surface disposed back to back, and the lasers emitted by the two light-emitting elements can be respectively directed towards the reflective surface and the transmissive surface and both exit from the reflective surface.

10. The laser according to claim 9, wherein, One of the light-emitting elements of at least one of the laser output modules is arranged facing the reflective surface, and the other light-emitting element is arranged facing the light-transmitting surface.

11. The laser according to claim 9, wherein, The two light-emitting elements of at least one of the laser output modules are arranged side by side. The laser output module further includes a third reflector. One of the light-emitting elements faces one of the reflective surface and the light-transmitting surface, and the other light-emitting element is arranged facing the third reflector, so that the emitted laser is reflected by the third reflector to the other of the reflective surface and the light-transmitting surface.

12. The laser according to any one of claims 1 to 11, wherein, The compression module includes a fast-axis collimating lens and a slow-axis collimating lens arranged on the light-emitting side of the light-emitting element. A fast-axis collimating lens and a slow-axis collimating lens are provided between each light-emitting element and the polarization beam combiner.

13. The laser according to any one of claims 1 to 12, wherein, The laser further includes an expanding module, and the expanding module is arranged on the light-emitting side of the spectral beam combining module.

14. The laser according to claim 13, wherein, The expanding module includes: an expanding lens, and the expanding lens is arranged on the light-emitting side of the spectral beam combining module; and a collimating lens, and the collimating lens is arranged on the light-emitting side of the expanding lens.

15. The laser according to claim 14, wherein, At least one of the expanding lens and the collimating lens can move along the arrangement direction of the expanding lens and the collimating lens to adjust the distance between the expanding lens and the collimating lens; The expanding module further includes a connecting shaft, and the connecting shaft extends along the arrangement direction of the expanding lens and the collimating lens. At least one of the expanding lens and the collimating lens is movably arranged on the connecting shaft.

16. The laser according to claim 15, wherein, One of the expanding lens and the collimating lens is threadedly connected to the connecting shaft.

17. The laser according to claim 15, wherein, The expanding module includes two connecting shafts, and the expanding lens and the collimating lens are respectively threadedly connected to one of the connecting shafts.

18. The laser according to claim 15, wherein, The connecting shaft has two threaded sections arranged along its length direction, and the thread directions of the two threaded sections are opposite. The expanding lens and the collimating lens are respectively threadedly connected to the threads of one of the threaded sections.

19. The laser according to any one of claims 1 to 18, wherein, The laser further includes a mounting shell. A mounting cavity is formed in the mounting shell. The mounting shell is provided with a light-emitting port communicating with the mounting cavity. The laser output module, the compression module and the spectral beam combining module are all arranged in the mounting cavity, and the light-emitting port is located on the light-emitting side of the spectral beam combining module.

20. The laser according to claim 19, wherein, The light-emitting element penetrates through the shell wall of the mounting shell of the laser.

21. The laser according to claim 19, wherein, The laser is a semiconductor laser or a solid-state laser.

22. A laser device, wherein, The laser device includes the laser according to any one of claims 1 to 20.

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