Parameter detection method, electronic device, and storage medium

Abstract

The present application discloses a parameter detection method, an electronic device, and a storage medium. The method comprises: acquiring a first recipe parameter value in a semiconductor manufacturing process; acquiring a detection rule corresponding to the first recipe parameter value in a configuration file, wherein each detection rule comprises a plurality of target conditions and an operational relationship among the plurality of target conditions; and for each detection rule, on the basis of the plurality of target conditions and the operational relationship in the detection rule, detecting the first recipe parameter value corresponding to the detection rule.

Description

Parameter detection method, electronic device and storage medium Technical Field

[0001] The present application belongs to the field of semiconductor device technology, and specifically relates to a parameter detection method, electronic equipment and storage medium. Background Art

[0002] Semiconductor equipment process chambers achieve process goals by executing process recipes. These recipes may include multiple steps, and each step requires specific recipe parameters, such as the process time, gas flow rate, and chamber pressure. In related technologies, these recipe parameters are typically configured using configuration files.

[0003] In the case where the recipe parameters need to be detected, a separate software program needs to be written to realize the detection of the recipe parameters. Summary of the Invention

[0004] The purpose of the embodiments of the present application is to provide a parameter detection method, an electronic device, and a storage medium, which can detect recipe parameters without writing a software program.

[0005] In order to solve the above technical problems, this application is implemented as follows:

[0006] In a first aspect, an embodiment of the present application provides a parameter detection method, which includes: obtaining a first recipe parameter value in a semiconductor process; obtaining a detection rule corresponding to the first recipe parameter value in a configuration file, each of the detection rules including multiple target conditions and an operational relationship between the multiple target conditions; for each of the detection rules, detecting the first recipe parameter value corresponding to the detection rule according to the multiple target conditions and the operational relationship in the detection rule.

[0007] In the second aspect, an embodiment of the present application provides a parameter detection device, which includes: a first acquisition module for acquiring a first recipe parameter value in a semiconductor process; a second acquisition module for acquiring a detection rule corresponding to the first recipe parameter value in a configuration file, each of the detection rules including multiple target conditions and an operational relationship between the multiple target conditions; a detection module for detecting the first recipe parameter value corresponding to each detection rule according to the multiple target conditions and the operational relationship in the detection rule.

[0008] In a third aspect, an embodiment of the present application provides an electronic device comprising a processor and a memory, wherein the memory stores programs or instructions that can be run on the processor, and when the programs or instructions are executed by the processor, the steps of the method described in the first aspect are implemented.

[0009] In a fourth aspect, an embodiment of the present application provides a readable storage medium, on which a program or instruction is stored. When the program or instruction is executed by a processor, the steps of the method described in the first aspect are implemented.

[0010] In an embodiment of the present application, by obtaining a first recipe parameter value in a semiconductor process; obtaining a detection rule corresponding to the first recipe parameter value in a configuration file, each detection rule includes multiple target conditions and an operational relationship between the multiple target conditions; for each detection rule, the first recipe parameter value corresponding to the detection rule is detected according to the multiple target conditions and the operational relationship in the detection rule, and the recipe parameter value in the semiconductor process can be detected based on the configuration file, without the need to write a software program to implement the detection of the recipe parameters, and accurate detection rules can be implemented based on the configuration file by setting accurate target conditions and operational relationships, thereby improving the accuracy of the setting of relevant recipe parameters, thereby improving the accuracy of the semiconductor equipment process. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments recorded in this application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0012] FIG1 is a flow chart of a parameter detection method provided in an embodiment of the present application.

[0013] FIG2 is a schematic diagram of the structure of a configuration file provided in an embodiment of the present application.

[0014] FIG3 is a flow chart of another parameter detection method provided in an embodiment of the present application.

[0015] FIG4 is a flow chart of another parameter detection method provided in an embodiment of the present application.

[0016] FIG5 is a schematic structural diagram of a parameter detection device provided in an embodiment of the present application.

[0017] FIG6 is a schematic diagram of the hardware structure of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0018] In order to enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the drawings in the embodiments of this application. Obviously, the described embodiments are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of this application.

[0019] To solve the aforementioned technical problems, the embodiments of the present application provide a parameter detection method, device, electronic device, and storage medium.

[0020] FIG1 shows a flow chart of a parameter detection method provided by an embodiment of the present application. The method can be performed by an electronic device, such as a terminal device or a server device. In other words, the method can be performed by software or hardware installed on the terminal device or the server device. The server device includes, but is not limited to, a single server, a server cluster, a cloud server, or a cloud server cluster. As shown in FIG1 , the method may include the following steps.

[0021] S101: Obtain a first recipe parameter value in a semiconductor process.

[0022] Semiconductor equipment's process chambers achieve their process goals by executing process recipes. A process recipe may include multiple steps, requiring specific settings for process-related parameters in each step, such as the current step's process time, gas flow rate, and chamber pressure. This step configures the relevant process recipe parameters in the configuration file based on experience. When the configuration file is saved, the values ​​of these process recipe parameters, known as the first recipe parameter values, are retrieved from the configuration file.

[0023] S102: Obtain a detection rule corresponding to a first recipe parameter value in a configuration file.

[0024] In the present application, only one first formula parameter value may be obtained, or multiple first formula parameter values ​​may be obtained. Each formula parameter value may correspond to one detection rule, or may correspond to multiple detection rules at the same time, which is not specifically limited here.

[0025] Exemplarily, each detection rule may include multiple target conditions and operational relationships between the multiple target conditions.

[0026] The configuration file can be pre-configured by the user. As shown in FIG2 , the configuration file can include multiple detection rules. Each detection rule can include target conditions and detection rule descriptions, each of which includes computational relationships between the target conditions. In this step, when the configuration file is saved, the first recipe parameter value in the configuration file and the detection rules corresponding to the first recipe parameter are obtained. Each detection rule includes multiple target conditions and computational relationships between the target conditions.

[0027] Exemplarily, the target condition may include: a relationship between a first recipe parameter value and a reference value, where the reference value includes a predetermined value or a second recipe parameter value in a semiconductor process. For example, if the recipe parameter setting turns on the N2-1 gas line during the process, the flow rate of the N2-1 gas line may be used as the first recipe parameter value, and the reference value may be a predetermined value, such as 5, and the target condition may include: the flow rate of the N2-1 gas line is greater than 5. For another example, if the recipe parameter setting turns on the N2-1 gas line and the N2-2 gas line during the process, the flow rate of the N2-1 gas line may be used as the first recipe parameter value, and the reference value is the second recipe parameter value, i.e., the flow rate of the N2-2 gas line, and the target condition may include: the flow rate of the N2-1 gas line is greater than the flow rate of the N2-2 gas line.

[0028] The relationship between the first recipe parameter value and the reference value may include but is not limited to: Equal, Unequal, Contain, Greater, GreaterAndE, Less, LessAndE, etc.; the above-mentioned operation (i.e., the operation relationship between multiple target conditions) may include but is not limited to: exponentiation, square root, Add, Sub, Mul, Div, etc.

[0029] The operation relationship can include a variety of mathematical and logical operation relationships. In actual applications, users can set various logical operation relationships between target conditions through configuration files according to semiconductor process preparation requirements.

[0030] S103: For each detection rule, according to multiple target conditions and operation relationships in the detection rule, a first recipe parameter value corresponding to the detection rule is detected.

[0031] If the operation relationship is empty, the first recipe parameter value in the semiconductor process can be tested according to the target condition. For example, if the operation relationship is empty and the target condition is that the flow rate of the N2-1 gas line is greater than 5, the test passes if the flow rate of the N2-1 gas line is greater than 5.

[0032] When the operation relationship is not empty, the operation relationship may be determined first. In one implementation, the operation relationship includes an OR operation or a AND operation.

[0033] If the operation relationship is an OR operation: if one of the multiple target conditions is met, it is determined that the first recipe parameter value test has passed. If none of the multiple target conditions are met, it is determined that the first recipe parameter value test has failed.

[0034] If the operation relationship is a sum operation: if one of the multiple target conditions is not met, it is determined that the first recipe parameter value test has failed. If all of the multiple target conditions are met, it is determined that the first recipe parameter value test has passed.

[0035] In one implementation, determining whether a target condition is satisfied may include:

[0036] Executing a target algorithm on the first recipe parameter value to obtain a calculation result;

[0037] Determine whether the calculation results meet the target conditions;

[0038] If the calculation result satisfies the target condition, it is determined that the target condition is satisfied;

[0039] If the calculation result does not satisfy the target condition, it is determined that the target condition is not satisfied.

[0040] For example, if the first recipe parameter value is the flow rate of N2-1 gas line, and the target algorithm is to subtract the flow rate of N2-1 gas line from the flow rate of N2-2 gas line, if the target algorithm calculates a result of 6 and the target condition is greater than 5, then the target condition is determined to be met based on this calculation result. If the target algorithm calculates a result of 6 and the target condition is greater than 8, then the target condition is determined to be not met based on this calculation result.

[0041] Therefore, the embodiment of the present application can detect the recipe parameter values ​​in the semiconductor process based on the configuration file, without the need to write a software program to implement the detection of the recipe parameters, and can implement complex detection rules based on the configuration file by setting complex target conditions and operation relationships.

[0042] In one implementation, users can configure detection rules in a configuration file. Each detection rule includes a target condition and an operation relationship. As shown in Figure 2, multiple detection rules are added to the configuration file. Each detection rule includes a target condition, an operation relationship, and may also include preconditions. Preconditions and target conditions can each contain multiple conditions.

[0043] Specifically, users can set one or more of the following in the configuration file:

[0044] Prompt information: The prompt information can be a detailed description of the detection rule, that is, the prompt information when the detection fails.

[0045] The detection type contains two configuration values. "or" means that the rule is passed if any target condition is detected, and "and" means that all target conditions must be detected for the rule to be considered passed.

[0046] Preconditions serve as triggering conditions for recipe detection rules. Only when all precondition tests are passed will subsequent target condition tests be performed.

[0047] Target condition determines whether the rule passes the test.

[0048] Name of the recipe parameter name1: the first recipe parameter 1, this item cannot be empty.

[0049] Operation mode: including Add (addition), Sub (subtraction), Mul (multiplication), Div (division). When this item is set to empty, only name1 is detected.

[0050] The name of the recipe parameter name2: the second recipe parameter 2. When this item and the operation (operation relationship) are set to empty, only name1 is detected. If it is not empty, the result after the operation of name1 and name2 is detected.

[0051] Judgment conditions: including Equal, Unequal, Contain, Greater, GreaterAndE, Less, LessAndE, etc.

[0052] value: Predetermined value.

[0053] Therefore, in the embodiment of the present application, the user can set a configuration file and detect the recipe parameter values ​​in the semiconductor process based on the configuration file. There is no need to write a software program to implement the detection of the recipe parameters, and complex detection rules can be implemented based on the configuration file by setting complex target conditions and operation relationships.

[0054] FIG3 illustrates a flow chart of a parameter detection method provided by an embodiment of the present application. This method can be performed by an electronic device, such as a terminal device or a server device. In other words, the method can be performed by software or hardware installed on the terminal device or server device. The server device includes, but is not limited to, a single server, a server cluster, a cloud server, or a cloud server cluster. As shown in FIG3 , the method may include the following steps.

[0055] S301: Obtain a first recipe parameter value and a detection rule corresponding to the first recipe parameter value in a configuration file.

[0056] The implementation process of this step is similar to step S101 in the embodiment shown in FIG1 , and will not be described again here.

[0057] S302: According to the order of the detection rules in the configuration file, determine one of the detection rules that has not been detected as the current rule to be detected.

[0058] As shown in FIG2 , the configuration file may include multiple detection rules. According to the order of the detection rules in the configuration file, the first detection rule among the currently undetected detection rules is determined as the current rule to be detected.

[0059] During specific implementation, the current rule to be detected includes not only multiple target conditions and the operational relationships between the multiple target conditions, but also preconditions corresponding to the first recipe parameter value.

[0060] S303: When the precondition is met, determine the operation relationship corresponding to the current detection rule to be detected.

[0061] This step can use a precondition as a trigger condition for detecting the first recipe parameter value, and the subsequent steps will be executed when the precondition is met. If the first recipe parameter value meets the corresponding precondition, the first recipe parameter value corresponding to the detection rule is detected according to the multiple target conditions and operation relationship in the detection rule. For example, the first recipe parameter value is the temperature value of substrate a, and the precondition corresponding to the first recipe parameter value is that the temperature reaches a predetermined temperature value. The target condition in the first detection rule includes the temperature difference of multiple substrates within a threshold range, and the operation relationship is a sum relationship. If the temperature value of substrate a reaches the predetermined temperature value, it is detected whether the temperature difference between substrate a and substrate b is within the threshold range, and whether the temperature difference between substrate a and substrate c is within the threshold range.

[0062] If the first recipe parameter value does not meet the corresponding precondition, the subsequent steps are not executed. For example, if the temperature value of substrate a does not reach the predetermined temperature value, the temperature difference between substrate a and other substrates is no longer checked to see if it is within the threshold range.

[0063] If the first recipe parameter value does not meet the corresponding precondition, then check whether there is an untested detection rule in the configuration file. If so, a detection rule can be re-determined from the untested detection rules according to the order of the detection rules in the configuration file, which can be called the current rule to be detected. If the first recipe parameter value meets the corresponding precondition, then the first recipe parameter value corresponding to the current rule to be detected is detected according to the multiple target conditions and operation relationships in the current rule to be detected. For example, the first recipe parameter value is the temperature value of substrate a, and the precondition corresponding to the first recipe parameter value is that the temperature reaches the temperature value of the adjacent substrate d. The target condition in the current rule to be detected includes the temperature sum of the adjacent substrates reaching a predetermined temperature sum value. Then, when the temperature value of substrate a reaches the temperature value of the adjacent substrate d, it is determined that the first recipe parameter value meets the corresponding precondition, and then it is determined whether the temperature sum of substrate a and the adjacent substrate d reaches the predetermined temperature sum value.

[0064] If the temperature of substrate a reaches the temperature of adjacent substrate d, the first recipe parameter value is determined to not meet the corresponding precondition, and the determination of whether the temperature sum of substrate a and adjacent substrate d reaches the predetermined temperature sum is not performed. In this case, the configuration file can be checked again to see if there are any unchecked detection rules. If so, a new detection rule can be determined as the current detection rule.

[0065] If the first recipe parameter value does not meet the corresponding precondition and all detection rules in the configuration file have been detected, the detection of the first recipe parameter value is terminated. In addition, the first recipe parameter value can be updated and the updated first recipe parameter value is detected.

[0066] S304: Determine the operation relationship between multiple target conditions in the current rule to be detected.

[0067] In some embodiments, the operational relationship between multiple target conditions in the current rule to be detected can be determined based on the detection type corresponding to the current rule to be detected. There is a corresponding relationship between the detection type and the operational relationship, for example, type 1 corresponds to an and operational relationship. This step can determine the operational relationship between multiple target conditions in the first detection rule based on the detection type corresponding to the first detection rule recorded in the configuration file. For example, the first recipe parameter value is the temperature value of substrate a, and the precondition corresponding to the first recipe parameter value is that the temperature reaches a predetermined temperature value. The target condition in the current rule to be detected includes that the temperature difference of multiple substrates is within a threshold range, and the operational relationship is an and relationship.

[0068] S305: Detecting a first recipe parameter value in the semiconductor process according to the target condition and the computational relationship between the target conditions.

[0069] The implementation process of this step is similar to step S103 of the embodiment shown in FIG1 , and will not be described again here.

[0070] For example, the first recipe parameter value is the temperature of substrate a. The precondition corresponding to the first recipe parameter value is that the temperature reaches a predetermined temperature value. The target condition in the first detection rule includes that the temperature difference between multiple substrates is within a threshold range, and the operation relationship is a sum relationship. If the temperature value of substrate a reaches the predetermined temperature value, the temperature difference between substrates a and b is detected to be within the threshold range, and the temperature difference between substrates a and c is detected to be within the threshold range. If the temperature difference between substrates a and b is within the threshold range, and the temperature difference between substrates a and c is within the threshold range, the detection is determined to have passed.

[0071] Therefore, the embodiments of the present application can trigger the detection of recipe parameter values ​​in the semiconductor process based on the configuration file through preconditions, without the need to write software programs to implement the detection of recipe parameters, and can implement complex detection rules based on the configuration file by setting complex target conditions and operation relationships.

[0072] In an embodiment of the present application, the parameters of the process recipe can be managed through a configuration file, and all process recipe parameters can be configured in the configuration file. Since the configuration file can be modified by the user, the software code can only be modified by the module developer in the development environment, and the function can take effect immediately after the configuration file is modified, while the modified software code needs to be compiled in the development environment and the function can take effect after the release process, so this step is to set the relevant recipe parameters by setting the setting rules for the relevant recipe parameters in the configuration file of the target task, thereby realizing the setting of the relevant recipe parameters, and then according to the detection rules for the relevant recipe parameters stored in the configuration file, that is, after performing relevant operations on these recipe parameters, it is determined whether the results obtained fall within the preset value range, and if the target reference value does not fall within the preset value range, the target parameter value is adjusted to improve the accuracy of the setting of the relevant recipe parameters, thereby improving the accuracy of the semiconductor device process.

[0073] FIG4 illustrates a flow chart of a parameter detection method provided by an embodiment of the present application. This method can be performed by an electronic device, such as a terminal device or a server device. In other words, the method can be performed by software or hardware installed on the terminal device or server device. The server device includes, but is not limited to, a single server, a server cluster, a cloud server, or a cloud server cluster. As shown in FIG4 , the method may include the following steps.

[0074] S401: Select a detection rule in sequence.

[0075] For example, in response to the user clicking the Save Recipe button, this step can enter the recipe rule detection function, sequentially select a detection rule from the target task configuration file, and detect each recipe parameter. As mentioned above, each detection rule contains three parts: "Detection Rule Description", "Preconditions", and "Target Conditions".

[0076] S402: Detect preconditions.

[0077] This step obtains the target parameter value to be tested through the precondition and detects whether the precondition is passed.

[0078] S403: Determine whether the precondition has passed the test.

[0079] After determining that the precondition test has passed (the situation where the precondition test has passed is, for example, that the result of the operation on the parameter value represented by name1 and the parameter value represented by name2 meets the comparison condition set in the condition), this step will enter the subsequent judgment process, that is, execute step S404. If it is determined that the precondition test has not passed, execute step S408.

[0080] S404: Operation relationship: “or” / “and”?

[0081] This step determines whether the operation relationship is "or" / "and".

[0082] S405a: When the operation relationship is "and", check whether the target condition is satisfied.

[0083] If the first recipe parameter value satisfies the corresponding precondition, it is detected whether the target condition is met, and step S406a is executed.

[0084] S405b: When the operation relationship is "or", check whether the target condition is satisfied.

[0085] If the operation relationship is an OR operation and one of the multiple target conditions is satisfied, the first recipe parameter value test in the semiconductor process is determined to have passed. If the operation relationship is an OR operation and none of the multiple target conditions are satisfied, the first recipe parameter value test in the semiconductor process is determined to have failed. That is, the result obtained after the aforementioned preconditions is determined to satisfy the target conditions, and step S406b is executed.

[0086] S406a: All target conditions have been detected and passed.

[0087] If the operation relationship is a sum operation and one of the multiple target conditions is not satisfied, it is determined that the first recipe parameter value in the semiconductor process has failed the test. If the operation relationship is a sum operation and all of the multiple target conditions are satisfied, it is determined that the first recipe parameter value in the semiconductor process has passed the test. In this step, if all target conditions in this detection rule have passed the test, step S407 is executed. If one of the target conditions has not passed the test, the test ends and a prompt message is issued, which is used to prompt the adjustment of the recipe parameter value involved in this detection rule.

[0088] S406b: At least one target condition is detected to be passed.

[0089] In this step, if at least one target condition in the detection rule passes the detection, step S407 is executed. If all target conditions fail to pass the detection, the detection ends and a prompt message is issued. The prompt message is configured through the configuration file.

[0090] S407: All target conditions in a detection rule are detected and passed.

[0091] This step determines whether all target conditions in the detection rule have been detected. If so, the detection ends. If not, step S401 is executed again.

[0092] S408: Determine whether all rules have completed detection.

[0093] This step determines whether all rules have been tested. If not, return to step S401 to reselect the next test rule. If so, the test is completed and the recipe parameters are saved.

[0094] The embodiment of the present application loads a configuration file when the software is started and reads all detection rules for setting recipe parameters. When the user finishes editing the recipe parameters and chooses to save, it will detect whether the parameters comply with the detection rules set in the configuration file. If all the tests are passed, the recipe execution save operation is performed. If any rule detection fails, a prompt message is thrown to the user, thereby realizing the functional logic of complex detection rules for related recipe parameters in the configuration file, dynamically managing recipe detection rules based on the form of an external configuration file, and realizing the functional logic of rule detection of calculation results between recipe parameters in the configuration file, thereby improving the accuracy of the setting of related recipe parameters and improving the accuracy of the semiconductor equipment process.

[0095] FIG5 shows a schematic structural diagram of a parameter detection device provided in an embodiment of the present application. As shown in FIG5 , the device 500 includes: a first acquisition module 510 , a second acquisition module 520 and a detection module 530 .

[0096] The first acquisition module 510 is used to obtain the first recipe parameter value in the semiconductor process; the second acquisition module 520 is used to obtain the detection rules corresponding to the first recipe parameter value in the configuration file, each detection rule includes multiple target conditions and the operation relationship between the multiple target conditions; the detection module 530 is used to detect the first recipe parameter value corresponding to each detection rule according to the multiple target conditions and operation relationship in the detection rule.

[0097] In one implementation, the detection module 530 is used to determine whether the first recipe parameter value meets the corresponding precondition; if the first recipe parameter value meets the corresponding precondition, the first recipe parameter value corresponding to the detection rule is detected according to multiple target conditions and operation relationships in the detection rule; if the first recipe parameter value does not meet the corresponding precondition, whether there is an undetected detection rule in the configuration file is detected; if the first recipe parameter value does not meet the corresponding precondition and all detection rules in the configuration file have been detected, the detection of the first recipe parameter value is ended.

[0098] In one implementation, the target condition includes: a relationship between a first recipe parameter value and a reference value, where the reference value includes a predetermined value or a second recipe parameter value in a semiconductor process.

[0099] In one implementation, the detection module 530 is configured to determine an operation relationship, where the operation relationship includes an OR operation or a AND operation;

[0100] If the operation relationship is an OR operation: if one of the multiple target conditions is met, it is determined that the first recipe parameter value test has passed; if none of the multiple target conditions are met, it is determined that the first recipe parameter value test has failed;

[0101] If the operation relationship is an AND operation: when one of the multiple target conditions is not met, it is determined that the first recipe parameter value detection has failed; when all of the multiple target conditions are met, it is determined that the first recipe parameter value detection has passed.

[0102] In one implementation, the detection module 530 is used to: execute a target algorithm on a first recipe parameter value to obtain a calculation result; determine whether the calculation result satisfies a target condition; if the calculation result satisfies the target condition, determine that the target condition is satisfied; if the calculation result does not satisfy the target condition, determine that the target condition is not satisfied.

[0103] In one implementation, the apparatus 500 further includes a prompt module configured to issue a prompt message if the detection fails.

[0104] The prompt information is configured through the configuration file.

[0105] In one implementation, the apparatus further includes a configuration module configured to configure a detection rule corresponding to the first recipe parameter value in the configuration file. The parameter detection apparatus provided in the embodiments of the present application can execute the parameter detection method provided in at least one of the aforementioned method embodiments and achieve the same technical effects as those of the aforementioned method embodiments, and thus will not be further described herein.

[0106] FIG6 shows a schematic diagram of the hardware structure of an electronic device that implements an embodiment of the present application. Referring to the figure, at the hardware level, the electronic device includes a processor, and optionally, an internal bus, a network interface, and a memory. The memory may include a memory, such as a high-speed random access memory (RAM), and may also include a non-volatile memory (non-volatile memory), such as at least one disk storage device. Of course, the electronic device may also include hardware required for other services.

[0107] The processor, network interface, and memory can be interconnected via an internal bus, such as an Industry Standard Architecture (ISA) bus, a Peripheral Component Interconnect (PCI) bus, or an Extended Industry Standard Architecture (EISA) bus. Buses can be categorized as address buses, data buses, and control buses. For ease of illustration, the diagram uses only one bidirectional arrow, but this does not imply that there is only one bus or only one type of bus.

[0108] The memory is used to store programs. Specifically, the program may include program code, which includes computer operating instructions. The memory may include internal memory and non-volatile memory, and provides instructions and data to the processor.

[0109] The processor reads the corresponding computer program from the non-volatile memory into the internal memory and then runs it, logically forming a device for locating the target user. The processor executes the program stored in the memory and is specifically configured to perform the steps of the parameter detection method provided in at least one of the above-mentioned method embodiments.

[0110] The methods disclosed in the embodiments shown in the flowcharts of the present application can be applied to a processor or implemented by a processor. The processor may be an integrated circuit chip with signal processing capabilities. During implementation, the steps of the above methods can be completed by hardware integrated logic circuits in the processor or by software instructions. The above processors can be general-purpose processors, including central processing units (CPUs), network processors (NPs), etc.; they can also be digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components. The methods, steps, and logic block diagrams disclosed in the embodiments of the present application can be implemented or executed. The general-purpose processor can be a microprocessor or any conventional processor. The steps of the methods disclosed in the embodiments of the present application can be directly implemented as being executed by a hardware decoding processor, or can be executed by a combination of hardware and software modules in the decoding processor. The software module can be located in a storage medium well-known in the art, such as random access memory, flash memory, read-only memory, programmable read-only memory, electrically erasable programmable memory, registers, etc. The storage medium is located in the memory, and the processor reads the information in the memory and, in conjunction with its hardware, completes the steps of the above method.

[0111] The electronic device can also execute the parameter detection method provided by at least one embodiment of the above method embodiments and can achieve the same technical effect as the above method embodiments, which will not be repeated here.

[0112] Of course, in addition to software implementation, the electronic device of this application does not exclude other implementation methods, such as logic devices or a combination of software and hardware, etc. That is to say, the execution subject of the following processing flow is not limited to each logic unit, but can also be hardware or logic devices.

[0113] An embodiment of the present application also proposes a computer-readable storage medium, which stores one or more programs. When the one or more programs are executed by an electronic device including multiple application programs, the electronic device executes the various steps of the parameter detection method provided in at least one embodiment of the above-mentioned method embodiments.

[0114] The computer-readable storage medium includes a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk.

[0115] Furthermore, an embodiment of the present application also provides a computer program product, which includes a computer program stored on a non-transitory computer-readable storage medium, and the computer program includes program instructions. When the program instructions are executed by a computer, the steps of at least one embodiment of the above-mentioned method embodiments are implemented.

[0116] In short, the above are only preferred embodiments of the present application and are not intended to limit the scope of protection of the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application should be included in the scope of protection of the present application.

[0117] The systems, devices, modules, or units described in the above embodiments may be implemented by computer chips or entities, or by products having certain functions. A typical implementation device is a computer. Specifically, the computer may be, for example, a personal computer, a laptop computer, a cellular phone, a camera phone, a smartphone, a personal digital assistant, a media player, a navigation device, an email device, a game console, a tablet computer, a wearable device, or a combination of any of these devices.

[0118] Computer-readable media includes permanent and non-permanent, removable and non-removable media that can be implemented by any method or technology to store information. The information can be computer-readable instructions, data structures, program modules or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, compact disc read-only memory (CD-ROM), digital versatile disc (DVD) or other optical storage, magnetic cassettes, magnetic tape, magnetic disk storage or other magnetic storage devices or any other non-transmission media that can be used to store information that can be accessed by a computing device. As defined herein, computer-readable media does not include transitory computer-readable media (transitory media), such as modulated data signals and carrier waves.

[0119] It should also be noted that the terms "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, commodity, or apparatus that includes a series of elements includes not only those elements but also other elements not explicitly listed, or includes elements inherent to such process, method, commodity, or apparatus. In the absence of further limitations, an element defined by the phrase "comprises a ..." does not exclude the presence of other identical elements in the process, method, commodity, or apparatus that includes the element.

[0120] The various embodiments in this specification are described in a progressive manner. Similar parts between the various embodiments can be referred to in conjunction with each other. Each embodiment focuses on the differences between the other embodiments. In particular, the system embodiments are generally similar to the method embodiments, so the description is relatively simple. For relevant parts, refer to the description of the method embodiments.

Claims

1. A parameter detection method, characterized in that, The method includes: Obtaining a first recipe parameter value in a semiconductor manufacturing process; Obtaining a detection rule corresponding to the first recipe parameter value in a configuration file, each detection rule including a plurality of target conditions and an operation relationship existing between the plurality of target conditions; For each detection rule, detecting the first recipe parameter value corresponding to the detection rule according to the plurality of target conditions and the operation relationship in the detection rule.

2. The method according to claim 1, wherein The detecting the first recipe parameter value corresponding to the detection rule according to the plurality of target conditions and the operation relationship in the detection rule includes: Determining whether the first recipe parameter value meets the corresponding precondition; If the first recipe parameter value meets the corresponding precondition, detecting the first recipe parameter value corresponding to the detection rule according to the plurality of target conditions and the operation relationship in the detection rule; If the first recipe parameter value does not meet the corresponding precondition, detecting whether there is an undetected detection rule in the configuration file; In the case where the first recipe parameter value does not meet the corresponding precondition and all the detection rules in the configuration file have been detected, ending the detection of the first recipe parameter value.

3. The method according to claim 1, wherein The target conditions include: the relationship between the first recipe parameter value and a reference value, and the reference value includes a predetermined value or a second recipe parameter value in a semiconductor manufacturing process.

4. The method according to claim 1, wherein The detecting the first recipe parameter value corresponding to the detection rule according to the plurality of target conditions and the operation relationship in the detection rule includes: Determining the operation relationship, and the operation relationship includes an OR operation or an AND operation; If the operation relationship is an OR operation: when one of the plurality of target conditions is met, determining that the first recipe parameter value passes the detection; when none of the plurality of target conditions is met, determining that the first recipe parameter value fails the detection; If the operation relationship is an AND operation: when one of the plurality of target conditions is not met, determining that the first recipe parameter value fails the detection; when all of the plurality of target conditions are met, determining that the first recipe parameter value passes the detection.

5. The method according to claim 4, wherein Determining whether the target condition is met includes: Performing a target algorithm on the first recipe parameter value to obtain a calculation result; Determining whether the calculation result meets the target condition; If the calculation result meets the target condition, determining that the target condition is met; If the calculation result does not meet the target condition, determining that the target condition is not met.

6. The method according to claim 1, characterized in that After detecting the first recipe parameter value corresponding to the detection rule according to the plurality of target conditions and the operation relationship in the detection rule, it further includes: Sending a prompt message in the case of a failed detection.

7. The method according to claim 6, characterized in that The prompt message is configured through the configuration file.

8. The method according to claim 1, characterized in that, Before obtaining the first recipe parameter value in the semiconductor manufacturing process, it further includes: Setting the detection rule corresponding to the first recipe parameter value in the configuration file.

9. An electronic device, characterized in that, It includes a processor, a memory, and a program or instructions stored on the memory and executable on the processor. When the program or instructions are executed by the processor, the steps of the method according to any one of claims 1-8 are implemented.

10. A readable storage medium, characterized in that, A program or instructions are stored on the readable storage medium. When the program or instructions are executed by a processor, the steps of the method according to any one of claims 1-8 are implemented.

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