Charging system and method for controlling charging system

Abstract

This charging system (100) comprises: a particle adsorption tool (10) that is charged with static electricity and adsorbs particles by means of the charged static electricity; a charging device (20) that charges the particle adsorption tool (10) with the static electricity; and a charging device accommodation container (30) that accommodates the charging device (20) and includes an opening section (32) that is disposed at a position where a hoop (110) that accommodates a substrate (1) is disposed, and that is open to the inside of a substrate conveyance device (200).

Description

Charging system and method for controlling the charging system

[0001] This disclosure relates to a charging system and a method for controlling a charging system.

[0002] Conventionally, jigs that attract particles such as dust in semiconductor manufacturing equipment have been known. JP 11-224895 A discloses a disk-shaped particle removal jig that is electrostatically charged. In JP 11-224895 A, the disk-shaped particle removal jig is held by a hand of a robot arm disposed in a substrate transport device, similar to a wafer. As a result, the particle removal jig comes into contact with the hand, and particles adhering to the hand are attracted to the charged particle removal jig. As a result, particles adhering to the hand are removed from the hand.

[0003] Japanese Patent Application Publication No. 11-224895

[0004] Here, when removing particles using a particle removal jig that is charged with static electricity, as in JP 11-224895 A, it is necessary to charge the particle removal jig in advance. Furthermore, when the robot arm hand and particle removal jig are disposed on a substrate transfer device, as in JP 11-224895 A, it is necessary to temporarily open the interior of the substrate transfer device and manually charge the particle removal jig. However, once the interior of the substrate transfer device is opened, particles such as dust can enter the interior of the substrate transfer device. Therefore, it is desirable to charge the particle removal jig without opening the interior of semiconductor manufacturing equipment such as a substrate transfer device.

[0005] This disclosure has been made to solve the above-mentioned problems, and one object of this disclosure is to provide a charging system and a method for controlling the charging system that can charge a particle attraction jig without opening a substrate transport device.

[0006] A charging system according to a first aspect of this disclosure includes a particle adsorption jig that is charged with static electricity and adsorbs particles using the charged static electricity, a charging device that charges the particle adsorption jig with static electricity, and a charging device storage container that houses the charging device and includes an opening that opens into a substrate transport device and is positioned at a position where a hoop that houses substrates is located.

[0007] As described above, the charging system according to a first aspect of this disclosure includes a charging device that charges a particle adsorption jig with static electricity, and a charging device housing container that houses the charging device and is positioned in a position on the substrate transport device where a hoop that accommodates substrates is located, and that includes an opening that opens into the substrate transport device. Since the charging device housing container includes an opening that opens into the substrate transport device, the internal space of the charging device housing container is connected to the internal space of the substrate transport device. Therefore, the particle adsorption jig can be charged by the charging device in the internal space of the charging device housing container. As a result, the particle adsorption jig can be charged without opening the substrate transport device.

[0008] A control method for a charging system according to a second aspect of this disclosure includes charging a particle attraction jig that attracts particles with static electricity using a charging device housed in a charging device housing container that is positioned at a position where a hoop that houses substrates is located and that includes an opening that opens into a substrate transport device, and attracting particles using the statically charged particle attraction jig.

[0009] A second aspect of the present disclosure provides a method for controlling a charging system, as described above, comprising: charging a particle attracting jig that attracts particles with static electricity using a charging device housed in a charging device housing container that is disposed at a position on a substrate transport device where a hoop for accommodating substrates is located, and that includes an opening that opens into the substrate transport device. Since the charging device housing container includes an opening that opens into the substrate transport device, the internal space of the charging device housing container is connected to the internal space of the substrate transport device. Therefore, the particle attracting jig can be charged by the charging device in the charging device housing container. As a result, a method for controlling a charging system can be provided that allows the particle attracting jig to be charged without opening the substrate transport device.

[0010] According to the substrate transfer system and the method for controlling the substrate transfer system of the present disclosure, the particle attracting jig can be charged without opening the substrate transfer device.

[0011] FIG. 1 is a diagram showing a semiconductor manufacturing apparatus according to a first embodiment. FIG. 2 is a block diagram of a charging system according to the first embodiment. FIG. 3 is a diagram showing a particle adsorption jig according to the first embodiment. FIG. 4 is a cross-sectional view taken along line 1000-1000 in FIG. 3. FIG. 5 is a diagram showing a charging device according to the first embodiment. FIG. 6 is a diagram showing a charging device housed in a charging device housing container according to the first embodiment. FIG. 7 is a cross-sectional view of the charging device housing container according to the first embodiment as seen from the side. FIG. 8 is a diagram showing a state in which the particle adsorption jig is held by a hand. FIG. 9 is a diagram showing a charging device during charging. FIG. 10 is a flow chart of a control method for the charging system according to the first embodiment. FIG. 11 is a diagram showing a state in which the robot arm is moved to bring the particle adsorption jig into contact with the voltage application unit of the power storage unit. FIG. 12 is a diagram showing a state in which particles from an aligner are removed by the particle adsorption jig. FIG. 13 is a diagram showing a state in which the particle adsorption jig is cleaned by a cleaning device. FIG. 14 is a diagram showing a charging device housed in a charging device housing container according to a second embodiment. FIG. 15 is a flow chart of a control method for the charging system according to the second embodiment. FIG. 16 is a diagram showing a charging device housed in a charging device housing container according to a modified example.

[0012] [First embodiment] A first embodiment of the present disclosure that embodies the present disclosure will be described below with reference to the drawings. In this specification, the up-down direction is referred to as the Z direction. The upper side is referred to as the Z1 side, and the lower side is referred to as the Z2 side. The direction perpendicular to the Z direction is referred to as the X direction. One side of the X direction is referred to as the X1 side, and the other side is referred to as the X2 side. The direction perpendicular to the Z direction and the X direction is referred to as the Y direction. One side of the Y direction is referred to as the Y1 side, and the other side is referred to as the Y2 side.

[0013] (Semiconductor Manufacturing Apparatus) First, a semiconductor manufacturing apparatus 500 will be described. As shown in Fig. 1, the semiconductor manufacturing apparatus 500 is an apparatus for processing a substrate 1 made of a semiconductor such as a wafer. The semiconductor manufacturing apparatus 500 includes a substrate transfer apparatus 200 and a substrate processing apparatus 300. The semiconductor manufacturing apparatus 500 is disposed, for example, in a clean room.

[0014] (Substrate Transfer Apparatus) The substrate transfer apparatus 200 will be described. The substrate transfer apparatus 200 is, for example, an EFEM (Equipment Front End Module). The substrate transfer apparatus 200 includes a FOUP 110, a housing 120, a FOUP opener 130, an aligner 140, a robot 150, and a control unit 160 shown in FIG. 2 .

[0015] (FOUP) The FOUP 110 accommodates a plurality of substrates 1 before and after processing. The interior of the FOUP 110 is maintained in a clean state similar to that of a clean room. The FOUP 110 includes a housing 111 and an opening / closing unit 112. The housing 111 has a box shape including an opening 111a that opens into the substrate transfer device 200. The opening / closing unit 112 covers the opening 111a of the housing 111. For example, four FOUPs 110 are arranged.

[0016] (Housing) The housing 120 includes an internal space 121. The internal space 121 is filled with a highly clean ambient gas. The robot 150 is disposed in the internal space 121 of the housing 120. The housing 120 has, for example, a rectangular parallelepiped shape. An opening 122a connected to the internal space 113 of the FOUP 110 is formed in a wall 122 on the Y1 side of the housing 120. The opening 122a allows the substrate 1 to move between the FOUP 110 and the substrate transfer device 200. An opening 123a connected to the internal space 311 of the substrate processing apparatus 300 is formed in a wall 123 on the Y2 side of the housing 120. The opening 123a allows the substrate 1 to move between the substrate processing apparatus 300 and the substrate transfer device 200.

[0017] The FOUP opener 130 will now be described. The FOUP opener 130 is disposed on the Y1 side of the substrate transfer device 200. The FOUP opener 130 includes an opening / closing unit 131 and a FOUP support unit 132. The opening / closing unit 131 is disposed in an opening 122a in the wall 122 on the Y1 side of the housing 120. An opening / closing mechanism (not shown) opens the opening / closing unit 131 of the FOUP opener 130 and the opening / closing unit 112 of the FOUP 110, thereby connecting the internal space 113 of the FOUP 110 with the internal space 121 of the housing 120.

[0018] The aligner 140 will now be described. The substrate 1 is placed on the aligner 140. The aligner 140 rotates the substrate 1 to adjust the orientation of the substrate 1 so that a notch or an orientation flat formed on the substrate 1 faces a predetermined direction. The aligner 140 is disposed in the internal space 121 of the housing 120 of the substrate transfer device 200.

[0019] The robot 150 will now be described. The robot 150 is disposed in the internal space 121 of the housing 120 of the substrate transfer device 200. The robot 150 is, for example, a horizontal articulated type. The robot 150 includes a hand 151 and a robot arm 152. The hand 151 holds the substrate 1. For example, the hand 151 has a Y-shape with a bifurcated tip. The hand 151 is also disposed at the tip of the robot arm 152. The robot arm 152 includes a plurality of link sections.

[0020] The configuration of the control unit 160 will be described. The control unit 160 is a robot controller. As shown in FIG. 2 , the control unit 160 includes a main control unit 161, a servo control unit 162, a drive circuit unit 163, and a storage unit 164. The main control unit 161 and the servo control unit 162 each include, for example, a CPU (Central Processing Unit). The main control unit 161 controls the drive unit 152a of the robot arm 152. The servo control unit 162 controls the power supplied to the drive unit 152a of the robot arm 152 based on a command from the main control unit 161. The drive circuit unit 163 supplies drive power to the drive unit 152a of the robot arm 152. The robot arm 152 includes a plurality of drive units 152a, and a drive circuit unit 163 is provided for each of the drive units 152a of the robot arm 152. Alternatively, one drive circuit unit 163 may be provided in common for each of the drive units 152 a. Each drive unit 152 a includes a servo motor, an encoder, and a reducer. The storage unit 164 stores programs executed by the control unit 160.

[0021] (Substrate Processing Apparatus) The substrate processing apparatus 300 will now be described. As shown in FIG. 1 , the substrate processing apparatus 300 performs processing on a substrate 1. For example, the substrate processing apparatus 300 performs heat treatment, impurity implantation, thin film formation, lithography, cleaning, and planarization on the substrate 1. The substrate processing apparatus 300 is disposed adjacent to the substrate transfer apparatus 200. The substrate processing apparatus 300 includes a housing 310 having an internal space 311. A wall 312 on the Y1 side of the housing 310 of the substrate processing apparatus 300 is shared with a wall 123 on the Y2 side of the housing 120 of the substrate transfer apparatus 200. The internal space 311 of the substrate processing apparatus 300 also includes a substrate placement section 313 on which the substrate 1 is placed.

[0022] (Charging System) The charging system 100 is a system for charging the particle adsorption jig 10. As shown in Fig. 2 , the charging system 100 includes a robot 150, the particle adsorption jig 10, a charging device 20, a charging device container 30, a charging unit 40, a particle detection unit 50, a cleaning device 60, and a control unit 160.

[0023] (Particle Adsorption Jig) The particle adsorption jig 10 will now be described. The particle adsorption jig 10 is held by a hand 151. The particle adsorption jig 10 is charged with static electricity and adsorbs particles by the charged static electricity. As shown in FIG. 3, the particle adsorption jig 10 has, for example, a disk shape and the same diameter as the substrate 1. As shown in FIG. 4, the particle adsorption jig 10 includes, for example, a semiconductor substrate 11, a positive electrode 12, a negative electrode 13, a bias electrode 14, and an interface 15. The positive electrode 12 and the negative electrode 13 are formed by implanting impurities. The positive electrode 12, the bias electrode 14, and the negative electrode 13 are arranged in this order on one surface 11a of the semiconductor substrate 11. The interface 15 is arranged on the other surface 11b of the semiconductor substrate 11. The interface 15 is connected to the positive electrode 12 and the negative electrode 13. 5 applies a voltage to the interface 15. As a result, a voltage is applied to the positive electrode 12 and the negative electrode 13, and one surface 11a of the semiconductor substrate 11 is charged.

[0024] (Charging Device) The charging device 20 will be described. The charging device 20 is a device that charges the particle adsorption jig 10 with static electricity. As shown in FIG. 5 , the charging device 20 includes a housing 21, a voltage application unit 22, a contact detection unit 23, a power storage unit 24 shown in FIG. 6 , and a wireless power supply coil 25 shown in FIG. 6 . The housing 21 has a box shape. The housing 21 is sized so that it can be housed in the charging device housing container 30.

[0025] The voltage application unit 22 contacts the interface 15 of the particle adsorption jig 10 and applies a voltage to the particle adsorption jig 10. For example, the voltage application unit 22 includes a plurality of probes 22a. The plurality of probes 22a protrude from holes 21a in the housing 21 to the outside of the housing 21. When the plurality of probes 22a contact the interface 15 of the particle adsorption jig 10, a voltage is applied to the positive electrode 12 and the negative electrode 13.

[0026] In the first embodiment, the contact detection unit 23 detects information regarding the contact of the voltage application unit 22 with the particle adsorption jig 10. Based on the detection of information regarding the contact of the voltage application unit 22 with the particle adsorption jig 10 by the contact detection unit 23, the charging device 20 starts applying a voltage from the voltage application unit 22 to the particle adsorption jig 10. For example, the contact detection unit 23 is a contact sensor. The contact detection unit 23 is disposed adjacent to the voltage application unit 22. The contact detection unit 23 and the voltage application unit 22 protrude to the same height from the housing 21. For example, the particle adsorption jig 10 held by the hand 151 comes into contact with the voltage application unit 22, and the particle adsorption jig 10 also comes into contact with the contact detection unit 23. In this case, the contact of the particle adsorption jig 10 with the contact detection unit 23 is information regarding the contact of the voltage application unit 22 with the particle adsorption jig 10. Then, when the contact detection unit 23 detects that the particle adsorptive jig 10 has come into contact with the voltage application unit 22, the charging device 20 starts applying a voltage from the voltage application unit 22 to the particle adsorptive jig 10. For example, a switch is disposed between the power storage unit 24 and the voltage application unit 22, and when the contact detection unit 23 detects that the particle adsorptive jig 10 has come into contact with the voltage application unit 22, the switch is turned on. As a result, a voltage is applied from the power storage unit 24 to the particle adsorptive jig 10 via the voltage application unit 22.

[0027] The power storage unit 24 stores power to be supplied to the voltage application unit 22. As shown in Fig. 6, the power storage unit 24 is disposed, for example, outside the housing 21. The wireless power supply coil 25 is a coil for charging the power storage unit 24. The wireless power supply coil 25 is disposed, for example, above the power storage unit 24 and inside the top surface 31 of the charging device housing container 30. The power storage unit 24 and the wireless power supply coil 25 are connected to each other.

[0028] (Charging Device Housing Container) The charging device housing container 30 will be described. In the first embodiment, the charging device housing container 30 houses the charging device 20. As shown in FIG. 8 , the charging device housing container 30 is disposed at a position in the substrate transport device 200 where the FOUP 110 housing the substrate 1 is disposed. The charging device housing container 30 also includes an opening 32 that opens to the substrate transport device 200. Specifically, the charging device 20 is disposed in an internal space 33 of the charging device housing container 30. For example, the charging device 20 is disposed at a relatively high position in the internal space 33. In the first embodiment, the voltage application unit 22 of the charging device 20 faces downward inside the charging device housing container 30. The interior of the charging device housing container 30, like the FOUP 110, is maintained in a clean state similar to that inside a clean room. The charging device housing container 30 also includes a housing 34 and an opening / closing unit 35 shown in FIG. 7. The housing 34 has a box shape that includes an opening 32 that opens to the substrate transport device 200. The opening / closing part 35 covers the opening 32 of the housing 34. As shown in FIG. 8 , the charging device housing container 30 is placed in a FOUP opener 130 in which the FOUP 110 is placed, in the substrate transport device 200. When the opening / closing part 131 of the FOUP opener 130 and the opening / closing part 35 of the charging device housing container 30 are opened, the internal space 33 of the charging device housing container 30 is connected to the internal space 121 of the housing 120. This allows the particle suction jig 10 to move between the charging device housing container 30 and the substrate transport device 200 via the opening 122 a of the housing 120. Furthermore, the particle suction jig 10 can move between the substrate transport device 200 and the substrate processing device 300 via the opening 123 a of the housing 120.

[0029] In the first embodiment, as shown in FIG. 8 , the outer shape of the charging device housing container 30 and the outer shape of the FOUP 110 are the same, and the charging device housing container 30 can house the particle adsorption jig 10. Specifically, the housing 34 of the charging device housing container 30 shown in FIG. 6 and the housing 111 of the FOUP 110 shown in FIG. 1 have the same size. Therefore, the charging device housing container 30 can be placed in the FOUP opener 130 instead of the FOUP 110. Furthermore, the diameter of the particle adsorption jig 10 and the diameter of the substrate 1 are the same. As a result, the particle adsorption jig 10 is housed in the charging device housing container 30 in the same way as the substrate 1 is housed in the FOUP 110. In the first embodiment, as shown in FIG. 6 , the particle adsorption jig 10 is housed in the charging device housing container 30. For example, the particle adsorption jig 10 is supported by a support portion 30 a of the charging device housing container 30. With the particle adsorption jig 10 housed in the charging device housing container 30, the inside of the charging device housing container 30 is kept clean.

[0030] 9 , in the first embodiment, the charging unit 40 is disposed outside the charging device housing container 30 and wirelessly charges the power storage unit 24. Specifically, the charging unit 40 includes a wireless power supply coil 41. Power is supplied to the wireless power supply coil 41 from an external source. The wireless power supply coil 41 is disposed on the upper surface of the top surface 31 of the charging device housing container 30. The power supplied to the wireless power supply coil 41 charges the power storage unit 24 via the wireless power supply coil 25 of the power storage unit 24.

[0031] (Particle Detector) In the first embodiment, the particle detector 50 detects the degree of particle adsorption by the particle adsorption jig 10 during a series of movements of the robot arm 152. The series of movements of the robot arm 152 will be described later. The particle detector 50 includes at least one of a charge amount detector 51 that detects the amount of charge on the particle adsorption jig 10 and an imaging unit 52 that images particles adsorbed to the particle adsorption jig 10. The charge amount detector 51 is, for example, a surface electrometer. The surface electrometer measures the amount of static electricity by utilizing the electrostatic induction phenomenon in which charged objects are attracted to each other when brought close to a conductor. The surface electrometer measures the amount of static electricity without contacting the particle adsorption jig 10. The particle detector 50 is also disposed in the charging device container 30. That is, the charging device container 30 can accommodate both the particle adsorption jig 10 and the particle detector 50. Furthermore, for example, the imaging unit 52 is a high-resolution camera capable of capturing images of particles.

[0032] In the first embodiment, the cleaning device 60 cleans the particle adsorption jig 10. As shown in Fig. 1 , the cleaning device 60 is disposed, for example, in an internal space 311 of a substrate processing apparatus 300. The substrate processing apparatus 300 is, for example, a spin dryer. The spin dryer rotates the particle adsorption jig 10 to remove particles adsorbed to the particle adsorption jig 10 by centrifugal force.

[0033] (Operation of the Substrate Transfer System) Next, a particle removal operation performed by the substrate transfer device 200 inside the semiconductor manufacturing apparatus 500 will be described. The operation of the substrate transfer device 200 is controlled by the control unit 160. As shown in FIG. 9 , the power storage unit 24 of the charging device 20 is wirelessly charged in advance by the charging unit 40. Specifically, the particle adsorption jig 10 is manually placed in the charging device container 30 beforehand. The wireless power supply coil 41 of the charging unit 40, which is located outside the charging device container 30, charges the power storage unit 24 via the wireless power supply coil 25 located inside the charging device container 30. That is, the power storage unit 24 is charged while the particle adsorption jig 10 is placed in the charging device container 30 and the interior of the charging device container 30 is clean. When the particle removal operation is performed, the semiconductor manufacturing apparatus 500 is not processing the substrate 1. 8, a charging device housing container 30 is disposed in the hoop opener 130 instead of the hoop 110. One charging device housing container 30 may be disposed in the hoop opener 130, or multiple charging device housing containers 30 may be disposed in the hoop opener 130. An example in which one charging device housing container 30 is disposed in the hoop opener 130 will be described below.

[0034] As shown in Figure 10, in step S1, the control unit 160 operates an opening / closing mechanism (not shown) to open the opening / closing portion 131 of the FOUP opener 130 and the opening / closing portion 35 of the charging device storage container 30, thereby connecting the internal space 33 of the charging device storage container 30 with the internal space 121 of the housing 120 of the substrate transport device 200.

[0035] 8 , in the first embodiment, the control unit 160 executes a process of causing the hand 151 of the robot arm 152 to hold the particle adsorption jig 10, which has been previously housed in the charging device housing container 30, in step S2. Specifically, the control unit 160 causes the hand 151 to enter the internal space 33 of the charging device housing container 30 through the opening 122 a of the housing 120 of the substrate transport device 200.

[0036] 11 , in step S3, in the first embodiment, the control unit 160 moves the robot arm 152 and brings the particle adsorption jig 10 held by the hand 151 into contact with the voltage application unit 22, thereby charging the particle adsorption jig 10. Specifically, the control unit 160 moves the robot arm 152 and moves the particle adsorption jig 10 held by the hand 151 upward to bring it into contact with the voltage application unit 22, thereby charging the particle adsorption jig 10. At this time, the particle adsorption jig 10 comes into contact with both the voltage application unit 22 and the contact detection unit 23. This causes the charging device 20 to start applying a voltage from the voltage application unit 22 to the particle adsorption jig 10. Note that the application of voltage from the voltage application unit 22 is controlled by the charging device 20, not the control unit 160.

[0037] In step S4, in the first embodiment, the control unit 160 performs a process of charging the particle attracting jig 10, and then moves the robot arm 152 to perform a process of attracting particles in at least one of the interior of the substrate transport device 200 and the interior of the substrate processing apparatus 300 with the particle attracting jig 10 held by the hand 151. Specifically, the particle attracting jig 10 housed in the charging device housing container 30 is moved to the substrate transport device 200 or the substrate processing apparatus 300 through the openings 122a and 123a of the housing 120 of the substrate transport device 200. Then, as shown in FIG. 12 , particles attached to a portion of the aligner 140 arranged in the internal space 121 of the substrate transport device 200 on which the substrate 1 is placed, a substrate placement portion 313 on which the substrate 1 is placed in the internal space 311 of the substrate processing apparatus 300, and the like are attracted by the particle attracting jig 10.

[0038] In step S5, in the first embodiment, the control unit 160 causes the particle detection unit 50 to detect the degree of particle adsorption by the particle adsorption jig 10. Specifically, the control unit 160 temporarily moves the particle adsorption jig 10 into the charging device housing container 30. Then, the control unit 160 causes the particle detection unit 50 to detect the amount of particles adsorbed by the particle adsorption jig 10.

[0039] Then, in step S6, the control unit 160 determines whether or not the particle attracting jig 10 can further attract particles. If the particle detection unit 50 is the imaging unit 52, the control unit 160 uses a technique such as image processing to detect the amount of attracted particles from the image of the particle attracting jig 10 captured by the imaging unit 52. If the amount of attracted particles is equal to or less than a predetermined particle amount threshold, the control unit 160 determines that the particle attracting jig 10 can further attract particles, and the process returns to step S4. If the amount of attracted particles is greater than the predetermined particle amount threshold, the control unit 160 determines that the particle attracting jig 10 cannot further attract particles, and the process proceeds to step S7. If the particle detection unit 50 is the charge amount detection unit 51, the charge amount detection unit 51 detects the charge amount of the particle attracting jig 10. If the charge amount of the particle attracting jig 10 detected by the charge amount detection unit 51 is greater than a predetermined charge amount threshold, the control unit 160 determines that the particle attracting jig 10 is capable of further attracting particles, and the process returns to step S4. On the other hand, if the charge amount of the particle attracting jig 10 detected by the charge amount detection unit 51 is equal to or less than the predetermined charge amount threshold, the control unit 160 determines that the particle attracting jig 10 is not capable of further attracting particles, and the process proceeds to step S7. In this way, during the series of operations in which particle attraction is repeatedly performed in step S4, the particle detection unit 50 detects the degree of particle attraction.

[0040] 13 , in step S7, in the first embodiment, the control unit 160 executes a process of causing the particle adsorption jig 10 to adsorb particles, and then executes a process of moving the particle adsorption jig 10 to the cleaning device 60 using the robot arm 152. The cleaning device 60 executes a process of cleaning the particle adsorption jig 10 that has been moved.

[0041] Then, in step S8, the control unit 160 causes the charging device 20 to charge static electricity on the particle attracting jig 10, as in step S3. Then, in step S9, the control unit 160 executes a process of attracting particles in the same target region as in step S4 to confirm whether particle attraction has been completed in the target region for particle attraction in at least one of the interior of the substrate transfer device 200 and the interior of the substrate processing apparatus 300. In step S9, as in step S4, the control unit 160 performs an attraction operation of moving the particle attracting jig 10 in the target region when attracting particles. For example, as in step S4, the control unit 160 transports the particle attracting jig 10 held by the hand 151 to the substrate placement unit 313 of the substrate processing apparatus 300, which is the target region for particle attraction, and places the particle attracting jig 10 on the substrate placement unit 313 to perform the attraction operation.

[0042] Then, in step S10, the control unit 160 detects the degree of particle adsorption by the particle adsorption jig 10 using the particle detection unit 50, as in step S5. Then, in step S11, it determines whether particle adsorption in the target area is sufficient. For example, if the particle detection unit 50 is the imaging unit 52, the control unit 160 detects the amount of adsorbed particles from the image of the particle adsorption jig 10 captured by the imaging unit 52, as in step S6. Then, if the amount of adsorbed particles is greater than a predetermined particle amount threshold, the control unit 160 determines that particle adsorption is insufficient, and returns to step S4. On the other hand, if the amount of adsorbed particles is equal to or less than the predetermined particle amount threshold, the control unit 160 determines that particle adsorption is sufficient. If it is determined that particle adsorption is sufficient, the particle removal operation inside the semiconductor manufacturing apparatus 500 by the substrate transport device 200 is terminated.

[0043] The predetermined particle amount threshold in step S11 may be a value of a magnitude different from that in step S6.

[0044] In step S11, the determination of whether particle adsorption in the target area is sufficient may be performed based on the detection result of the charge amount detection unit 51. In this case, the charge amount detection unit 51 detects the charge amount of the particle adsorption jig 10. If the charge amount of the particle adsorption jig 10 detected by the charge amount detection unit 51 is equal to or less than a predetermined charge amount threshold, the control unit 160 determines that the charge amount has decreased due to particle adsorption in the same target area, and determines that a particle has been detected. In this case, the control unit 160 determines that particle adsorption is insufficient, and returns to step S4. On the other hand, if the charge amount of the particle adsorption jig 10 detected by the charge amount detection unit 51 is greater than the predetermined charge amount threshold, the control unit 160 determines that no further particle adsorption is occurring and that particle adsorption is sufficient, and terminates the control process.

[0045] Furthermore, if multiple target areas for particle adsorption are arranged, it is possible to perform the processes from step S8 to step S11 for each of the multiple target areas, thereby confirming whether particle adsorption has been completed for each of the multiple target areas.

[0046] Effect of First Embodiment The charging system 100 includes a charging device 20 that charges the particle adsorption jig 10 with static electricity, and a charging device housing container 30 that houses the charging device 20 and is disposed at a position on the substrate transport device 200 where the FOUP 110 that houses the substrates 1 is disposed. The charging device housing container 30 includes an opening 32 that opens into the substrate transport device 200. As a result, the charging device housing container 30 includes the opening 32 that opens into the substrate transport device 200, so that an internal space 33 of the charging device housing container 30 is connected to an internal space 121 of the substrate transport device 200. Therefore, the particle adsorption jig 10 can be charged by the charging device 20 in the internal space 33 of the charging device housing container 30. As a result, the particle adsorption jig 10 can be charged without opening the substrate transport device 200.

[0047] The external shape of the charging device storage container 30 is the same as the external shape of the FOUP 110, and the charging device storage container 30 is capable of storing the particle adsorption jig 10. As a result, since the external shape of the charging device storage container 30 is the same as the external shape of the FOUP 110, the charging device storage container 30 storing the particle adsorption jig 10 can be easily placed at the position on the substrate transport device 200 where the FOUP 110 is placed.

[0048] The charging device 20 includes a power storage unit 24 that stores power and is disposed outside the charging device housing container 30, and the charging system 100 includes a charging unit 40 that wirelessly charges the power storage unit 24. This allows the power storage unit 24 to be wirelessly charged from outside the charging device housing container 30 without opening the charging device housing container 30, thereby preventing dust and other particles from entering the interior of the charging device housing container 30.

[0049] The charging device 20 includes a voltage application unit 22 that contacts the particle attraction jig 10 and applies a voltage to the particle attraction jig 10. The charging system 100 includes a robot arm 152, a hand 151 attached to the robot arm 152 and holding the particle attraction jig 10, and a control unit 160 that executes the following processes: holding the particle attraction jig 10 with the hand 151 of the robot arm 152; and moving the robot arm 152 and bringing the particle attraction jig 10 held by the hand 151 into contact with the voltage application unit 22 to charge the particle attraction jig 10. This allows the particle attraction jig 10 to be charged by the operation of the robot arm 152 without manual intervention, thereby reducing the amount of work required by an operator.

[0050] The charging device 20 includes a contact detection unit 23 that detects information regarding the contact of the voltage application unit 22 with the particle adsorptive jig 10. Based on the information regarding the contact of the voltage application unit 22 with the particle adsorptive jig 10 detected by the contact detection unit 23, the charging device 20 starts applying a voltage from the voltage application unit 22 to the particle adsorptive jig 10. This eliminates the need for the control unit 160 to control the application of voltage from the voltage application unit 22 to the particle adsorptive jig 10, thereby reducing the control burden on the control unit 160.

[0051] The voltage application unit 22 is disposed facing downward inside the charging device container 30, and the control unit 160 executes a process of moving the robot arm 152 to move the particle adsorption jig 10 held by the hand 151 upward and bring it into contact with the voltage application unit 22, thereby charging the particle adsorption jig 10. In this way, the particle adsorption jig 10 can be easily charged simply by moving the particle adsorption jig 10 upward with the robot arm 152.

[0052] The particle attracting jig 10 is accommodated in advance in the charging device housing container 30, and the control unit 160 moves the robot arm 152, causes the hand 151 to hold the particle attracting jig 10 accommodated in advance in the charging device housing container 30, and then executes a process of bringing the particle attracting jig 10 held by the hand 151 into contact with the voltage application unit 22. This eliminates the need to move the particle attracting jig 10 into the charging device housing container 30 where the charging device 20 is accommodated, thereby simplifying the operation of the robot arm 152.

[0053] The control unit 160 brings the particle attracting jig 10 held by the hand 151 into contact with the voltage application unit 22 to charge the particle attracting jig 10, and then moves the robot arm 152 to cause the particle attracting jig 10 held by the hand 151 to attract particles in at least one of the interior of the substrate transport device 200 and the interior of the substrate processing device 300. This allows the sufficiently charged particle attracting jig 10 to attract particles.

[0054] The charging system 100 includes a particle detection unit 50 that detects the degree of particle adsorption by the particle adsorption jig 10 during a series of operations of the robot arm 152. As a result, the control unit 160 determines whether or not the particle adsorption jig 10 can adsorb additional particles based on the detection results of the particle detection unit 50, thereby preventing the particle adsorption operation from continuing in a state in which the particle adsorption jig 10 is unable to adsorb particles.

[0055] The particle detection unit 50 includes at least one of a charge amount detection unit 51 that detects the charge amount of the particle adsorption jig 10 and an imaging unit 52 that images particles adsorbed to the particle adsorption jig 10. When the charge amount detection unit 51 detects that the charge amount of the particle adsorption jig 10 is relatively large, the control unit 160 can determine that the particle adsorption jig 10 is capable of adsorbing further particles. Furthermore, when the control unit 160 detects that the number of particles adhering to the particle adsorption jig 10 is relatively small based on the image of the particle adsorption jig 10 captured by the imaging unit 52, the control unit 160 can determine that the particle adsorption jig 10 is capable of adsorbing further particles.

[0056] The particle detection unit 50 is disposed in the charging device container 30. This makes it possible to prevent the charging system 100 from becoming larger than when the detection of the degree of particle adsorption and the charging of the particle adsorption jig 10 are performed in separate locations.

[0057] The charging system 100 includes a cleaning device 60 that cleans the particle adsorption jig 10. After the control unit 160 executes a process of adsorbing particles using the particle adsorption jig 10, it executes a process of moving the particle adsorption jig 10 to the cleaning device 60 using the robot arm 152, and the cleaning device 60 executes a process of cleaning the moved particle adsorption jig 10. As a result, the particle adsorption jig 10 with particles attached thereto is cleaned, and the cleaned particle adsorption jig 10 can be charged and used the next time particles are adsorbed. This eliminates the need to provide multiple particle adsorption jigs 10.

[0058] Second Embodiment A charging device container 630 according to a second embodiment of the present disclosure will be described.

[0059] In the second embodiment, as shown in FIG. 14 , a plurality of particle adsorption jigs 10 are previously accommodated in the charging device container 630. The control unit 160 then performs a process of adsorbing particles in at least one of the interior of the substrate transport device 200 and the interior of the substrate processing apparatus 300 while sequentially replacing the plurality of particle adsorption jigs 10. Specifically, a plurality of support portions 631 that support the particle adsorption jigs 10 are arranged inside the charging device container 630. The plurality of particle adsorption jigs 10 are arranged on the support portions 631. Then, for example, as shown in FIG. 15 , if the control unit 160 determines in step S6 that the particle adsorption jig 10 is unable to further adsorb particles, the control unit 160 determines in step S20 whether to continue particle adsorption. If particle adsorption is to be continued, the control unit 160 proceeds to step S21, where it performs a process of replacing the particle adsorption jig 10 it is holding with a new particle adsorption jig 10. Thereafter, the operations from steps S3 to S6 shown in Fig. 15 are repeated. If the answer is no in step S20, the control unit 160 ends the particle removal operation.

[0060] Effect of Second Embodiment A plurality of particle adsorption jigs 10 are stored in advance in the charging device storage container 630, and the control unit 160 executes a process of adsorbing particles in at least one of the interior of the substrate transport device 200 and the interior of the substrate processing device 300 while sequentially replacing the plurality of particle adsorption jigs 10. This allows particles to be adsorbed while sequentially replacing the plurality of particle adsorption jigs 10 even when there is no cleaning device 60 for cleaning the particle adsorption jigs 10.

[0061] [Modifications] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present disclosure is defined by the claims, not by the description of the above-mentioned embodiments, and includes all modifications (modifications) within the meaning and scope of the claims.

[0062] In the first and second embodiments described above, an example has been shown in which the outer shape of the charging device housing container 30 and the outer shape of the hoop 110 are the same, but the present disclosure is not limited to this. For example, as long as the charging device housing container 30 can be placed on the substrate transport device 200, the outer shape of the charging device housing container 30 and the outer shape of the hoop 110 may be different.

[0063] In the first and second embodiments, the particle adsorption jig 10 is accommodated in the charging device housing container 30, but the present disclosure is not limited to this. For example, the particle adsorption jig 10 may be disposed in the substrate transport device 200 or the substrate processing device 300 without being accommodated in the charging device housing container 30.

[0064] In the first and second embodiments, examples have been described in which the charging device 20 is charged wirelessly, but the present disclosure is not limited to this. For example, the charging device 20 may be manually connected to a commercial power source to be charged. After charging, the charging device 20 may be housed in the charging device housing container 30.

[0065] In the first and second embodiments, the particle adsorption jig 10 is moved to the charging device 20 by the robot arm 152 and charged, but the present disclosure is not limited to this. For example, a lift that also lifts the particle adsorption jig 10 may be disposed in the charging device housing container 30, and the particle adsorption jig 10 lifted by the lift may be charged by the charging device 20.

[0066] In the first and second embodiments, the voltage application unit 22 of the charging device 20 is disposed facing downward, but the present disclosure is not limited to this. For example, the voltage application unit 22 of the charging device 20 may be disposed facing upward.

[0067] In the first and second embodiments described above, an example has been shown in which the particle detection unit 50 is provided in the charging system 100, but the present disclosure is not limited to this. For example, the particle detection unit 50 does not have to be provided in the charging system 100. In this case, for example, once a series of particle adsorption operations by the particle adsorption jig 10 has been completed once, the particle adsorption operation ends.

[0068] In the first and second embodiments, the particle detection unit 50 is disposed in the charging device housing container 30, but the present disclosure is not limited to this. For example, the particle detection unit 50 may be disposed in the substrate transport device 200 or the substrate processing device 300, other than the charging device housing container 30.

[0069] In the first and second embodiments, the cleaning device 60 is disposed in the substrate processing apparatus 300, but the present disclosure is not limited to this. For example, the cleaning device 60 may be disposed in the substrate transfer device 200.

[0070] In the first and second embodiments, an example has been described in which the charging device 20 starts applying a voltage from the voltage application unit 22 to the particle adsorption jig 10 based on the information detected by the contact detection unit 23 that the particle adsorption jig 10 has come into contact with the voltage application unit 22. However, the present disclosure is not limited to this. For example, the control unit 160 may control the voltage application unit 22 to start applying a voltage to the particle adsorption jig 10 based on the information detected by the contact detection unit 23 that the particle adsorption jig 10 has come into contact with the voltage application unit 22.

[0071] In the first embodiment, the particle removal operation is terminated after the particle adsorption jig 10 is cleaned by the cleaning device 60, but the present disclosure is not limited to this. For example, after the particle adsorption jig 10 is cleaned by the cleaning device 60, the particle adsorption jig 10 may be charged again by the charging device 20, and the particle removal operation may be resumed.

[0072] In the second embodiment, an example has been described in which a plurality of particle adsorption jigs 10 and a voltage application unit 22 that charges one particle adsorption jig 10 are disposed inside the charging device container 630. However, the present disclosure is not limited to this. In the present disclosure, as shown in FIG. 16 , a voltage application unit 632 that simultaneously applies a voltage to a plurality of particle adsorption jigs 10 may be disposed inside the charging device container 630. For example, a voltage application unit 63 is disposed on each of a plurality of support units 631. The particle adsorption jigs 10 are disposed between the voltage application units 632 and are charged by the voltage application unit 632. This allows a plurality of particle adsorption jigs 10 to be simultaneously charged, thereby reducing the time required to charge a plurality of particle adsorption jigs 10.

[0073] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general-purpose processors, special-purpose processors, integrated circuits, ASICs (Application Specific Integrated Circuits), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. A processor is considered a processing circuit or circuit because it includes transistors and other circuitry. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. Where the hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or processor.

[0074] Aspects It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0075] (Aspect 1) A charging system comprising: a particle adsorption jig that is charged with static electricity and adsorbs particles using the charged static electricity; a charging device that charges the particle adsorption jig with static electricity; and a charging device storage container that houses the charging device and includes an opening that opens into a substrate transport device and is positioned at a position where a hoop that houses substrates is located.

[0076] (Aspect 2) The charging system according to aspect 1, wherein the charging device housing container and the hoop have the same outer shape, and the charging device housing container is capable of housing the particle adsorption jig.

[0077] (Aspect 3) The charging system according to aspect 1 or aspect 2, wherein the charging device includes a power storage unit that stores power, and the charging system further includes a charging unit that is disposed outside the charging device housing container and wirelessly charges the power storage unit.

[0078] (Aspect 4) The charging system according to any one of Aspects 1 to 3, wherein the charging device includes a voltage application unit that contacts the particle adsorption jig and applies a voltage to the particle adsorption jig, and the charging system includes: a robot arm; a hand attached to the robot arm and holding the particle adsorption jig; and a control unit that executes the following processes: holding the particle adsorption jig with the hand of the robot arm; and moving the robot arm and bringing the particle adsorption jig held by the hand into contact with the voltage application unit, thereby charging the particle adsorption jig.

[0079] (Aspect 5) The charging system according to Aspect 4, wherein the charging device includes a contact detection unit that detects information relating to the voltage application unit having come into contact with the particle adsorption jig, and the charging device starts applying voltage from the voltage application unit to the particle adsorption jig based on the information relating to the voltage application unit having come into contact with the particle adsorption jig being detected by the contact detection unit.

[0080] (Aspect 6) The charging system according to aspect 4 or aspect 5, wherein the voltage application unit is arranged facing downward inside the charging device container, and the control unit moves the robot arm, moves the particle adsorption jig held by the hand upward, and brings it into contact with the voltage application unit, thereby performing a process of charging the particle adsorption jig.

[0081] (Aspect 7) The charging system according to any one of Aspects 4 to 6, wherein the particle adsorption jig is stored in advance in the charging device storage container, and the control unit moves the robot arm, causes the hand to hold the particle adsorption jig stored in advance in the charging device storage container, and then executes a process of bringing the particle adsorption jig held by the hand into contact with the voltage application unit.

[0082] (Aspect 8) The control unit performs a process of charging the particle adsorption jig by contacting the particle adsorption jig held by the hand with the voltage application unit, and then moves the robot arm to perform a process of adsorbing particles from at least one of the inside of the substrate transport device and the inside of the substrate processing device using the particle adsorption jig held by the hand in the charging system described in Aspect 7.

[0083] (Aspect 9) The charging system according to aspect 8, further comprising a particle detection unit that detects the degree of particle adsorption by the particle adsorption jig during a series of operations of the robot arm.

[0084] (Aspect 10) The charging system according to Aspect 9, wherein the particle detection unit includes at least one of a charge amount detection unit that detects a charge amount of the particle adsorption jig and an imaging unit that images particles adsorbed to the particle adsorption jig.

[0085] (Aspect 11) The charging system according to aspect 9 or aspect 10, wherein the particle detection unit is disposed in the charging device housing container.

[0086] (Aspect 12) The charging system according to any one of Aspects 8 to 11, further comprising a cleaning device that cleans the particle adsorption jig, wherein the control unit performs a process of adsorbing particles using the particle adsorption jig, and then performs a process of moving the particle adsorption jig to the cleaning device using the robot arm, and the cleaning device performs a process of cleaning the moved particle adsorption jig.

[0087] (Aspect 13) A charging system described in any one of Aspects 4 to 12, wherein a plurality of particle adsorption jigs are pre-stored in the charging device storage container, and the control unit performs a process of adsorbing particles from at least one of the interior of the substrate transport device and the interior of the substrate processing device while sequentially replacing the plurality of particle adsorption jigs.

[0088] (Aspect 14) The charging system according to any one of Aspects 1 to 3, wherein the charging device includes a voltage application unit that contacts the particle adsorption jig and applies a voltage to the particle adsorption jig, the charging device container pre-stores a plurality of the particle adsorption jigs, and the voltage application unit simultaneously applies a voltage to the plurality of particle adsorption jigs.

[0089] (Aspect 15) A method for controlling a charging system, comprising: charging a particle adsorption jig that adsorbs particles with static electricity using a charging device housed in a charging device housing container that is placed at a position where a hoop that accommodates substrates is placed and that includes an opening that opens into a substrate transport device; and adsorbing particles using the statically charged particle adsorption jig.

Claims

1. A charging system comprising: a particle adsorption jig that is charged with static electricity and adsorbs particles by the charged static electricity; a charging device that charges the particle adsorption jig with static electricity; and a charging device housing container that houses the charging device and includes an opening that is disposed at a position where a hoop for housing a substrate is disposed and opens into a substrate transfer device.

2. The charging system according to claim 1, wherein an outer shape of the charging device housing container is the same as an outer shape of the hoop, and the charging device housing container can house the particle adsorption jig.

3. The charging system according to claim 1, wherein the charging device includes a power storage unit in which power is stored, and is provided with a charging unit that is disposed outside the charging device housing container and wirelessly charges the power storage unit.

4. The charging system according to claim 1, wherein the charging device includes a voltage application unit that contacts the particle adsorption jig and applies a voltage to the particle adsorption jig, a robot arm, a hand attached to the robot arm and holding the particle adsorption jig, a process of holding the particle adsorption jig by the hand of the robot arm, and a process of moving the robot arm and bringing the particle adsorption jig held by the hand into contact with the voltage application unit to charge the particle adsorption jig, and includes a control unit that executes the processes.

5. The charging system according to claim 4, wherein the charging device includes a contact detection unit that detects information regarding contact of the voltage application unit with the particle adsorption jig, and based on the information regarding contact of the voltage application unit with the particle adsorption jig being detected by the contact detection unit, the charging device starts applying a voltage from the voltage application unit to the particle adsorption jig.

6. The charging system according to claim 4, wherein the voltage application unit is disposed facing downward inside the charging device housing container, and the control unit executes a process of moving the robot arm and moving the particle adsorption jig held by the hand upward to bring it into contact with the voltage application unit to charge the particle adsorption jig.

7. The particle adsorption jig is pre-accommodated in the charging device accommodation container, and the control unit moves the robot arm to hold the particle adsorption jig pre-accommodated in the charging device accommodation container by the hand, and then the control unit executes a process of bringing the particle adsorption jig held by the hand into contact with the voltage application unit. The charging system according to claim 4.

8. After the control unit executes a process of bringing the particle adsorption jig held by the hand into contact with the voltage application unit to charge the particle adsorption jig, the control unit moves the robot arm, and the particle adsorption jig held by the hand adsorbs at least one of the particles inside the substrate transfer device and the substrate processing device. The charging system according to claim 7.

9. The charging system according to claim 8, further comprising a particle detection unit that detects the degree of particle adsorption by the particle adsorption jig during a series of operations of the robot arm.

10. The particle detection unit includes at least one of a charge amount detection unit that detects the charge amount of the particle adsorption jig and an imaging unit that images the particles adsorbed on the particle adsorption jig. The charging system according to claim 9.

11. The particle detection unit is disposed in the charging device accommodation container. The charging system according to claim 9.

12. The charging system according to claim 8, further comprising a cleaning device that cleans the particle adsorption jig. After the control unit executes a process of adsorbing particles by the particle adsorption jig, the control unit executes a process of moving the particle adsorption jig to the cleaning device by the robot arm, and the cleaning device executes a process of cleaning the moved particle adsorption jig.

13. A plurality of the particle adsorption jigs are pre-accommodated in the charging device accommodation container, and the control unit executes a process of adsorbing at least one of the particles inside the substrate transfer device and the substrate processing device while sequentially exchanging the plurality of particle adsorption jigs. The charging system according to claim 4.

14. The charging device includes a voltage application unit that contacts the particle adsorption jig and applies a voltage to the particle adsorption jig. A plurality of the particle adsorption jigs are pre-stored in the charging device housing container. The voltage application unit applies a voltage to the plurality of particle adsorption jigs simultaneously. The charging system according to claim 1.

15. A method for controlling a charging system, comprising: charging static electricity to a particle adsorption jig that adsorbs particles by a charging device housed in a charging device housing container including an opening that is disposed at a position where a hoop for housing a substrate is disposed and that opens into a substrate transfer device; and adsorbing particles by the particle adsorption jig charged with static electricity.

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