Test connector

Abstract

This test connector is disposed between a test device and a device under test. The connector may comprise: a conductive housing including a plurality of conductive parts corresponding to a plurality of terminals of the device under test, respectively, a plurality of through holes accommodating the plurality of conductive parts, respectively, and a first shielding part surrounding the plurality of through holes from the outside; a plurality of first insulating parts extending between the plurality of conductive parts and the first shielding part; and a ball guide part disposed on the conductive housing. The ball guide part may comprise: a second shielding part disposed on the first shielding part and surrounding the plurality of terminals to shield the plurality of terminals while the device under test is being tested; and a second insulating part coming into contact with the second shielding part and surrounding the plurality of terminals while the device under test is being tested.

Description

Inspection connector

[0001] The present disclosure relates to a test connector disposed between a test device and a test device and used for testing the test device.

[0002] To test devices under test (DUTs), such as semiconductor devices, connectors are used between the test apparatus and the DUT. These connectors electrically connect the DUTs to the test apparatus. As an example of such connectors, a conductive rubber sheet capable of elastically deforming in response to pressure applied by the DUT is known in the art.

[0003] The conductive rubber sheet has a plurality of conductive portions and an insulating portion that insulates the plurality of conductive portions from each other. A plurality of metal particles are electrically conductively assembled in a vertical direction to form each conductive portion. Each conductive portion transmits a signal between the inspection device and the device under test. The insulating portion is made of an elastic insulating material and maintains the conductive portions in a vertical direction. While the device under test is being inspected, a pressure is applied to the conductive portion via the device under test, and the conductive portion elastically deforms in response to the pressure.

[0004] While the device under test is being tested, the device under test may be positioned on a test connector. Each conductive portion of the test connector may be electrically connected to a plurality of terminals of the device under test by contacting the plurality of terminals of the device under test. While the device under test is being tested, signal interference or loss may occur at the plurality of terminals. For example, while the device under test is being tested, signal interference may occur due to electromagnetic waves transmitted between the plurality of terminals. For another example, while the device under test is being tested, some signals may be emitted from the plurality of terminals, resulting in signal loss.

[0005] One embodiment of the present disclosure provides a test connector including a structure capable of reducing interference or loss of signals caused to a plurality of terminals while a test device is being tested.

[0006] According to one embodiment of the present disclosure, a test connector is a test connector disposed between a test apparatus and a device to be tested, and used for testing the device to be tested, and may include a conductive housing including a plurality of conductive portions extending in a vertical direction, corresponding to each of a plurality of terminals of the device to be tested, a plurality of through holes extending in the vertical direction to receive each of the plurality of conductive portions, and a first shielding portion that surrounds the plurality of through holes from the outside, a plurality of first insulating portions extending in the vertical direction between the plurality of conductive portions and the first shielding portion, and a ball guide portion disposed on the conductive housing. The ball guide portion may include a second shielding portion disposed on the first shielding portion so as to be electrically connected to the first shielding portion and surrounding the plurality of terminals to shield the plurality of terminals while the device to be tested is tested, and a second insulating portion that contacts the second shielding portion and surrounds the plurality of terminals so as to separate the plurality of terminals from the second shielding portion while the device to be tested is tested.

[0007] In one embodiment, the ball guide portion may include a plurality of guide holes formed inside the second insulating portion and arranged on each of the plurality of conductive portions to accommodate the plurality of terminals while the device under test is being tested.

[0008] In one embodiment, the cross-sectional area of ​​each of the plurality of guide holes may decrease toward each of the plurality of conductive portions in the vertical direction.

[0009] In one embodiment, the width of each of the plurality of conductive portions may be less than or equal to the width of each of the plurality of guide holes.

[0010] In one embodiment, the plurality of conductive members may protrude outside the plurality of through holes by having a length longer than the length of the plurality of through holes.

[0011] In one embodiment, the plurality of through holes may include a first through hole, a second through hole, and a third through hole that are spaced apart from each other, and the plurality of conductive portions may include a power conductive portion disposed within the first through hole, a signal conductive portion disposed within the second through hole, and a ground conductive portion disposed within the third through hole, electrically disconnected from the power conductive portion and the signal conductive portion, and electrically connected to the conductive housing by contacting the conductive housing.

[0012] In one embodiment, the second shielding portion may surround each of the plurality of terminals positioned on each of the power conductive portion, the signal conductive portion, and the ground conductive portion.

[0013] In one embodiment, the ball guide portion may be attached to the conductive housing.

[0014] In one embodiment, the first shielding member may be formed integrally with the conductive housing.

[0015] In one embodiment, the ball guide portion may further include a cover portion that covers the upper surface of the first shield portion and the upper surface of the second insulating portion.

[0016] In one embodiment, the upper surface of each of the plurality of conductive portions may be exposed toward the device under test by being spaced apart from the second insulating portion.

[0017] In one embodiment, the second insulating portion may be formed of polyimide.

[0018] In one embodiment, the second insulating member may be formed of silicone having elasticity.

[0019] According to one embodiment of the present disclosure, a test connector is a test connector disposed between a test apparatus and a device to be tested and used for testing the device to be tested, the test connector comprising: an insulating housing; a plurality of conductive portions corresponding to each of a plurality of terminals of the device to be tested and extending in the insulating housing in a vertical direction; a plurality of shield portions disposed in the insulating housing, each of the plurality of conductive portions surrounding the outer side thereof; a plurality of first insulating portions extending in the vertical direction between the plurality of conductive portions and the plurality of shield portions to fill a space between the plurality of shield portions and the plurality of conductive portions; and a ball guide portion disposed on the insulating housing, wherein the ball guide portion is disposed on each of the plurality of shield portions so as to be electrically connected to the plurality of shield portions and surrounds the plurality of terminals to shield the plurality of terminals while the device to be tested is tested; and a second shield portion that contacts the second shield portion and surrounds the plurality of terminals so as to separate the second shield portion from the plurality of terminals while the device to be tested is tested. May include insulation.

[0020] In one embodiment, the ball guide portion may further include a plurality of guide holes formed inside the second insulating portion and arranged on each of the plurality of conductive portions to accommodate the plurality of terminals while the device under test is being tested.

[0021] In one embodiment, the connector may further include a plurality of frames that support the plurality of conductive members by surrounding the plurality of conductive members.

[0022] According to one embodiment of the present disclosure, a second shielding portion electrically connected to a first shielding portion of a conductive housing that surrounds a plurality of conductive portions from the outside can surround a plurality of terminals of a device under test while the device under test is being tested. Since the second shielding portion surrounds the plurality of terminals, signal interference or loss caused to the plurality of terminals of the device under test while the device under test is being tested can be reduced.

[0023] According to one embodiment of the present disclosure, a second shielding portion electrically connected to a plurality of shielding portions that externally surround a plurality of conductive portions within an insulating housing can surround a plurality of terminals of a device under test while the device under test is being tested. Since the second shielding portion surrounds the plurality of terminals, signal interference or loss caused to the plurality of terminals of the device under test while the device under test is being tested can be reduced.

[0024] FIG. 1 schematically illustrates an example in which a connector according to one embodiment of the present disclosure is used.

[0025] FIG. 2 is a cross-sectional view illustrating an example of a state of a connector while inspecting a device to be inspected according to one embodiment of the present disclosure.

[0026] FIG. 3 is a cross-sectional view illustrating a second example of a connector according to one embodiment of the present disclosure.

[0027] FIG. 4 is a cross-sectional view illustrating a third example of a connector according to one embodiment of the present disclosure.

[0028] FIG. 5 is a cross-sectional view illustrating a fourth example of a connector according to one embodiment of the present disclosure.

[0029] FIG. 6 is a cross-sectional view illustrating a fifth example of a connector according to one embodiment of the present disclosure.

[0030] FIG. 7 is a cross-sectional view illustrating a sixth example of a connector according to one embodiment of the present disclosure.

[0031] FIG. 8 is a cross-sectional view illustrating a seventh example of a connector according to one embodiment of the present disclosure.

[0032] The embodiments of this disclosure are provided for the purpose of illustrating the technical concepts of this disclosure. The scope of rights under this disclosure is not limited to the embodiments presented below or the specific descriptions of these embodiments.

[0033] All technical and scientific terms used in this disclosure, unless otherwise defined, have the meanings commonly understood by those of ordinary skill in the art to which this disclosure pertains. All terms used in this disclosure have been selected for the purpose of more clearly explaining this disclosure and are not intended to limit the scope of rights under this disclosure.

[0034] Expressions such as “including,” “comprising,” and “having” used in this disclosure should be understood as open-ended terms that imply the possibility of including other embodiments, unless otherwise stated in the phrase or sentence in which the expression is included.

[0035] The singular forms described in this disclosure may include plural meanings unless otherwise stated, and the same applies to the singular forms described in the claims.

[0036] The expressions 'first', 'second', etc. used in this disclosure are used to distinguish between multiple components, and do not limit the order or importance of the components.

[0037] In this disclosure, when it is said that a component is 'connected' or 'coupled' to another component, it should be understood that said component can be directly connected or coupled to said other component, or can be connected or coupled via a new other component.

[0038] The directional term "upward" used in this disclosure refers to the direction in which the connector is positioned relative to the inspection device, and the directional term "downward" refers to the direction opposite to upward. It should be understood that the directional term "upward / downward" used in this disclosure includes both upward and downward directions, but does not refer to a specific direction among the upward and downward directions.

[0039] Embodiments are described with reference to examples illustrated in the accompanying drawings. In the accompanying drawings, identical or corresponding components are assigned the same reference numerals. Furthermore, in the description of the embodiments below, redundant descriptions of identical or corresponding components may be omitted. However, omission of a description of a component does not imply that such component is not included in any embodiment.

[0040] The embodiments described below and examples illustrated in the attached drawings relate to a test connector (hereinafter simply referred to as a connector) used for testing a device under test. The connector of the embodiments may be placed between a test apparatus and the device under test during the test of the device under test, and may be used for testing the device under test. For example, the connector of the embodiments may be used for the final test of a semiconductor device in a post-process during the manufacturing process of the semiconductor device. However, examples of tests to which the connector of the embodiments is applied are not limited to the tests described above.

[0041] FIG. 1 is a schematic diagram illustrating an example of a connector used according to one embodiment of the present disclosure, and FIG. 2 is a cross-sectional diagram illustrating an example of a state of a connector according to one embodiment of the present disclosure while inspecting a device to be inspected.

[0042] Referring to FIGS. 1 and 2, a connector (10) according to one embodiment is a sheet-shaped structure and is disposed between a test apparatus (20) and a device to be tested (30). For example, the connector (10) can be positioned on the test apparatus (20) by a test socket (40). The test socket (40) can be removably mounted on the test apparatus (20). The test socket (40) accommodates a device to be tested (30) transported to the test apparatus (20) manually or by a transport device therein and aligns the device to be tested (30) with respect to the connector (10). When testing the device to be tested (30), the connector (10) contacts the test apparatus (20) and the device to be tested (30) in a vertical direction (VD), and electrically connects the test apparatus (20) and the device to be tested (30) to each other. For example, a connector (10) may be placed between a test device (30) and a test apparatus (20) for high-frequency RF testing of the test device (30).

[0043] The device to be tested (30) may be a semiconductor device that is packaged in a hexahedral shape using a resin material, including a semiconductor IC chip and a plurality of terminals. For example, the device to be tested (30) may be a semiconductor device used in a mobile communication device, but is not limited thereto. The device to be tested (30) may include a plurality of terminals (31, 32, 33) on its lower side. The plurality of terminals (31, 32, 33) may include a power terminal (31), a signal terminal (32), and a ground terminal (33). However, the present invention is not limited thereto. For example, the plurality of terminals (31, 32, 33) may include only a signal terminal (32).

[0044] The inspection device (20) can inspect various operating characteristics of the device to be inspected (30). The inspection device (20) can have a board on which inspection is performed, and the board can be provided with an inspection circuit (not shown) for inspecting the device to be inspected. The inspection circuit can include a plurality of other terminals each corresponding to a plurality of terminals (31, 32, 33) of the device to be inspected (30) via a connector (10). For example, the power terminal (31) of the device to be inspected (30) can be electrically connected to one of the other terminals of the inspection device (20), the signal terminal (32) can be electrically connected to another of the other terminals of the inspection device (20), and the ground terminal (33) can be electrically connected to another of the other terminals of the inspection device (20). While the device to be inspected (30) is being inspected, the connector (10) can electrically connect a plurality of terminals (31, 32, 33) of the device to be inspected (30) and a plurality of other terminals of the inspection apparatus along the vertical direction (VD). By electrically connecting the device to be inspected (30) and the inspection apparatus (20) along the vertical direction (VD) by the connector (10), inspection of the device to be inspected (30) can be performed.

[0045] The connector (10) may include a conductive housing (100), a plurality of conductive parts (200), a plurality of first insulating parts (300), and a ball guide part (400).

[0046] The conductive housing (100) can provide the overall frame (or body) of the connector (10). The conductive housing (100) can accommodate components of the connector (10). For example, a plurality of conductive portions (200), a plurality of first insulating portions (300), and a ball guide portion (400) can be supported by the conductive housing (100). The conductive housing (100) can be formed of a conductive material. For example, the conductive material forming the conductive housing (100) can be, but is not limited to, aluminum or stainless steel. The conductive housing (100) can provide electrical grounding of the connector (10). The conductive housing (100) can include a plurality of through holes (110) and a first shield portion (120).

[0047] A plurality of through holes (110) may penetrate the conductive housing (100). For example, the plurality of through holes (110) may extend along the vertical direction (VD) within the conductive housing (100) to penetrate the conductive housing (100). For example, the plurality of through holes (110) may be formed by perforating the conductive housing (100). The plurality of through holes (110) may be spaced apart from each other. For example, the plurality of through holes (110) may be spaced apart from each other along the horizontal direction (HD) intersecting the vertical direction (VD). The plurality of through holes (110) may include a first through hole (111), a second through hole (112), and a third through hole (113). The first through hole (111), the second through hole (112), and the third through hole (113) may be separated from each other. Each of the first through hole (111), the second through hole (112), and the third through hole (113) can accommodate a plurality of conductive parts (200).

[0048] The first shield (120) can provide electrical grounding. The first shield (120) can be formed by at least a portion of the conductive housing (100). For example, the first shield (120) can represent a portion of the conductive housing (100) that surrounds the plurality of through holes (110). As another example, the first shield (120) can represent the entire conductive housing (100). The first shield (120) can surround the plurality of through holes (110) of the conductive housing (100) from the outside. In other words, the plurality of through holes (110) can be formed within the first shield (120).

[0049] A plurality of conductive portions (200) can form an electrical connection path between the inspection apparatus (20) and the device under test (30) along the vertical direction (VD). The plurality of conductive portions (200) can correspond to (or be aligned with) each of the plurality of terminals (31, 32, 33) of the device under test (30). For example, the number of the plurality of conductive portions (200) can be equal to the number of the plurality of through holes (110). For example, the planar arrangement of the plurality of conductive portions (200) can be variously changed depending on the arrangement of the plurality of terminals (31, 32, 33) of the device under test (30). For example, the plurality of conductive portions (200) can be arranged in a single matrix form or in the form of one or more pairs of matrices within the conductive housing (100). For example, the plurality of conductive parts (200) may include a power conductive part (210) corresponding to the power terminal (31), a signal conductive part (220) corresponding to the signal terminal (32), and a ground conductive part (230) corresponding to the ground terminal (33). The plurality of conductive parts (200) may be inserted into the conductive housing (100). For example, the power conductive part (210) may be accommodated in the first through hole (111), the signal conductive part (220) may be accommodated in the second through hole (112), and the ground conductive part (230) may be accommodated in the third through hole (113). The power conductive part (210) may provide a path for power supplied from the inspection apparatus (20) to the inspection device (30) by contacting the power terminal (31) while the inspection device (30) is being inspected. The signal conducting portion (220) can provide a path for a signal transmitted from the testing apparatus (20) to the testing apparatus (30) or from the testing apparatus (30) to the testing apparatus (20) by contacting the signal terminal (32) while the testing apparatus (30) is being tested. The ground conducting portion (230) can provide grounding by contacting the ground terminal (33).The ground conductive portion (230) can be electrically connected to the conductive housing (100) by contacting the first shield portion (120) of the conductive housing (100). For example, the length of the third through hole (113) is smaller than the lengths of each of the first through hole (111) and the second through hole (112), and the ground conductive portion (230) can be in contact with the first shield portion (120) within the third through hole (113). The length of one component can represent a distance in the vertical direction (VD), and can be utilized substantially identically below unless otherwise stated. The ground conductive portion (230) can be electrically disconnected from the power conductive portion (210) and the signal conductive portion (220).

[0050] When inspecting the device to be inspected (30), a pressing force (PF) may be applied to the connector (10) via the device to be inspected (30) by a mechanical device or manually. By the pressing force (PF), a plurality of terminals (31, 32, 33) of the device to be inspected and a plurality of conductive portions (200) may be brought into contact in the vertical direction (VD). The plurality of conductive portions (200) may be deformable by the pressing force (PF) when inspecting the device to be inspected (30). For example, the plurality of conductive portions (200) may be compressed in the vertical direction (VD) by the pressing force (PF). When the pressing force (PF) is removed from the connector (10), the shape of the plurality of conductive portions (200) may be restored. The plurality of conductive portions (200) may have a length longer than the length of the plurality of through holes (110), for example, so as to be deformable along the vertical direction (VD). For example, the plurality of conductive portions (200) may have a length longer than the plurality of through holes (110), thereby protruding outward from the plurality of through holes (110) toward the inspection device (20). Meanwhile, the length of each of the plurality of conductive portions (200) may be the same, but is not limited thereto.

[0051] A plurality of conductive parts (200) can be formed of a plurality of conductive particles (201) and an insulating material (202).

[0052] A plurality of conductive particles (201) may be arranged in a form in which they are wrapped (or surrounded) by an insulating material (202). The insulating material (202) may fill the space between the plurality of conductive particles (201) to form a plurality of conductive portions (200) together with the plurality of conductive particles (201). Specific examples of the plurality of conductive particles (201) may include particles made of a metal exhibiting magnetism such as nickel, iron, or cobalt, particles made of an alloy thereof, particles containing these metals, or particles obtained by plating the surface of these particles with a conductive metal that is difficult to oxidize, such as gold, silver, palladium, or rhodium, as a core particle. Meanwhile, it is not necessary to use a core of a plurality of conductive particles (201) that is necessarily magnetic, and particles made of inorganic materials such as non-magnetic metal particles, glass, and carbon, or particles made of polymers such as polystyrene and polystyrene crosslinked with divinylbenzene, and at least one of elastic fibers, glass fibers, and short fibers that is manufactured into a certain length or less through a pulverization process and used as a core particle, and it is of course possible to use a core particle whose surface is plated with a conductive magnetic material such as nickel or gold, or a core particle coated on both sides with a conductive magnetic material and a conductive metal that is difficult to oxidize.

[0053] The insulating material (202) can be formed of an elastic insulating material having insulating properties. The elastic insulating material is preferably an insulating polymer material having a crosslinked structure. Various curable polymer material forming materials that can be used to obtain the crosslinked polymer material can be used, and specific examples thereof include conjugated diene rubbers such as polybutadiene rubber, natural rubber, polyisoprene rubber, styrene-butadiene copolymer rubber, and acrylonitrile-butadiene copolymer rubber and hydrogenated products thereof, block copolymer rubbers such as styrene-butadiene-diene block copolymer rubber and styrene-isoprene block copolymer and hydrogenated products thereof, chloroprene, urethane rubber, polyester rubber, epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer rubber, and ethylene-propylene-diene copolymer rubber. Among these, it may be preferable to use silicone rubber from the viewpoint of moldability and electrical properties.

[0054] A plurality of first insulating portions (300) can support a plurality of conductive portions (200). The plurality of first insulating portions (300) can surround the plurality of conductive portions (200) from the outside. For example, the plurality of first insulating portions (300) can be arranged within the plurality of through holes (110) so as to form a coaxial structure in which the central axis of each of the plurality of conductive portions (200) and the central axis of each of the plurality of through holes (110) are aligned with each other. The plurality of first insulating portions (300) can extend in the vertical direction (VD) between the plurality of conductive portions (200) and the first shielding portion (120). The plurality of first insulating portions (300) can fill a space between the plurality of conductive portions (200) and the first shielding portion (120).

[0055] The plurality of first insulating portions (300) may be formed of an insulating material (202). For example, after a liquid material for forming the plurality of first insulating portions (300) is cured to form a plurality of cylindrical first insulating portions (300), holes for accommodating the plurality of conductive portions (200) may be formed in the plurality of first insulating portions (300) along the vertical direction (VD) by a laser. After the holes for accommodating the plurality of conductive portions (200) are formed, the plurality of conductive portions (200) may be inserted into the holes. For another example, the plurality of first insulating portions (300) and the plurality of conductive portions (200) may be formed integrally. After a liquid molding material containing a mixture of a plurality of conductive particles (201) and an insulating material (202) is injected into a mold, the plurality of conductive particles (201) can be aligned along the vertical direction (VD) through a magnetic field. After the plurality of conductive particles (201) are aligned, as the liquid molding material hardens, a plurality of conductive portions (200) and a plurality of first insulating portions (300) can be formed.

[0056] The ball guide part (400) may be disposed on the conductive housing (100). For example, the ball guide part (400) may be disposed on one side of the conductive housing (100) facing the device to be tested (30). The ball guide part (400) may guide the contact of a plurality of terminals (31, 32, 33) of the device to be tested (30) when the device to be tested (30) is tested. For example, the ball guide part (400) may be manufactured separately and then attached to the conductive housing (100) using an adhesive member, but is not limited thereto. The ball guide part (400) may include a second shielding part (410), a second insulating part (420), a plurality of guide holes (430), and a cover part (440).

[0057] The second shielding portion (410) may be electrically connected to the first shielding portion (120). For example, the second shielding portion (410) may be placed on the first shielding portion (120) and thus may come into contact with the first shielding portion (120). The second shielding portion (410) may be formed of a conductive material. For example, the second shielding portion (410) may be formed of a plurality of conductive particles (201) and an insulating material (202), similar to the plurality of conductive portions (200), but is not limited thereto. For another example, the second shielding portion (410) may be formed of the same material as the conductive housing (100). The second shielding portion (410) may be electrically connected to the first shielding portion (120) and thus may provide grounding. The second shielding portion (410) can surround (or enclose) the plurality of terminals (31, 32, 33) of the device under test (30) located on each of the power conductive portion (210), the signal conductive portion (220), and the ground conductive portion (230) while the device under test (30) is being tested. While the device under test (30) is being tested, the plurality of terminals (31, 32, 33) of the device under test (30) can be accommodated inside the second shielding portion (410). As the second shielding portion (310) surrounds the plurality of terminals (31, 32, 33) of the device under test (30) while the device under test (30) is being tested, the plurality of terminals (31, 32, 33) can be shielded. Accordingly, the influence of electromagnetic waves transmitted between the plurality of terminals (31, 32, 33) can be reduced by the second shielding unit (410). The electromagnetic waves transmitted to the outside of the plurality of terminals (31, 32, 33) can be shielded by the second shielding unit (410). Since the plurality of terminals (31, 32, 33) are shielded by the second shielding unit (410), the inspection of the device under test (30) can be performed smoothly.

[0058] The second insulating portion (420) can separate the plurality of terminals (31, 32, 33) from the second shielding portion (410) while the device under test (30) is being tested. The second insulating portion (420) can electrically isolate the plurality of terminals (31, 32, 33) from the second shielding portion (410). The second insulating portion (420) may be formed of an insulating material (202), but is not limited thereto. For example, the second insulating portion (420) may be formed of a different material from the plurality of first insulating portions (300). For example, when one of the power terminal (31) and the signal terminal (32) comes into contact with the second shielding portion (410), a short circuit may occur. The second insulating portion (420) can prevent a short circuit by physically separating the plurality of terminals (31, 32, 33) from the second shielding portion (410). The second insulating portion (420) may have a through hole formed on the inside and may be in contact with the second shielding portion (410) on the outside. For example, the second insulating portion (420) may be in contact with the inner surface of the second shielding portion (410). For example, while the device under test (30) is being tested, the second insulating portion (420) may be positioned closer to each of the plurality of terminals (31, 32, 33) than the second shielding portion (410). In other words, while the test device (30) is being tested, the distance between the second insulating portion (420) and each of the plurality of terminals (31, 32, 33) may be smaller than the distance between the second shielding portion (410) and each of the plurality of terminals (31, 32, 33).

[0059] A plurality of guide holes (430) may be arranged on each of the plurality of conductive portions (200). The plurality of guide holes (430) may accommodate a plurality of terminals (31, 32, 33) while the device under test (30) is being tested. The plurality of guide holes (430) may be through holes of the second insulating portion (420). The plurality of guide holes (430) may have a shape for guiding contact between the plurality of terminals (31, 32, 33) and the plurality of conductive portions (200). For example, the cross-sectional area of ​​each of the plurality of guide holes (430) may decrease toward each of the plurality of conductive portions (200) in the vertical direction (VD). In other words, the plurality of guide holes (430) may have a tapered shape. Since the plurality of guide holes (430) have a tapered shape, the through-holes of the second insulating portion (420) facing (or surrounding) the plurality of terminals (31, 32, 33) while the device under test (30) is being tested can be inclined with respect to the vertical direction (VD). Meanwhile, the second insulating portion (420) can be spaced apart from the plurality of conductive portions (200). In other words, the second insulating portion (420) can be spaced apart from the upper surface of the plurality of conductive portions (200) facing the device under test (30), and the diameter of the lower end of the through-hole of the second insulating portion can be larger than the diameter of the upper end of the plurality of conductive portions (200). For example, the width of each of the plurality of conductive portions (200) can be less than or equal to the width of each of the plurality of guide holes (430). Since the width of each of the plurality of conductive parts (200) is less than or equal to the width of each of the plurality of guide holes (430), the upper surface of each of the plurality of conductive parts (200) can be exposed toward the test device (30) between the second insulating parts (420).

[0060] The cover portion (440) may be placed on the second shield portion (410) and the second insulating portion (420). For example, the cover portion (440) may cover the upper surface of the second shield portion (410) facing the device to be tested (30) and the upper surface of the second insulating portion (420). The hardness of the cover portion (440) may be different from the hardness of the second insulating portion (420). The cover portion (440) may be formed of a different material from the second insulating portion (420). For example, the cover portion (440) may be formed of polyimide, but is not limited thereto.

[0061] When the ball guide part (400) is manufactured, while the sheet for forming the cover part (440) and the sheet for forming the second insulating part (420) are bonded together, holes for accommodating the second shield part (410) can be formed on the bottom surface of the sheet for forming the cover part (440) and the bottom surface of the sheet for forming the second insulating part (420). After the holes for accommodating the second shield part (410) are formed, a liquid material for forming the second shield part (410) can be injected into the holes through the bottom surfaces. For example, the liquid material can include a plurality of conductive particles (201) and an insulating material (202). After the liquid material is injected into the holes, a plurality of conductive particles (201) are aligned along the vertical direction (VD) by a magnetic field, and the liquid material is hardened, thereby forming a second shielding portion (410) and a second insulating portion (420). The second shielding portion (410) may be formed, for example, by a portion of the insulating material (202) filling the space between the plurality of conductive particles (201). The second insulating portion (420) may be formed by a portion of the insulating material (202) excluding a portion of the insulating material (202) forming the second shielding portion (410), and a sheet for forming the second insulating portion (420). After the second shielding portion (410) is formed, a sheet for forming the cover portion (440) and a sheet for forming the second insulating portion (420) are perforated by a laser, thereby forming a plurality of guide holes (430), and the manufacturing of the ball guide portion (400) can be completed. The completed ball guide portion (400) can be attached to the housing (100) using an adhesive material.

[0062] Meanwhile, although it has been described that the second insulating portion (420) and the plurality of first insulating portions (300) are formed of substantially the same material, it is not limited thereto. For example, the hardness of the second insulating portion (420) may be lower than the hardness of the plurality of first insulating portions (300). When the hardness of the second insulating portion (420) is lower than the hardness of the plurality of first insulating portions (300), the repulsive force transmitted from the second insulating portion (420) to the device under test (30) when the pressing force (PF) is applied may be reduced.

[0063] FIG. 3 is a cross-sectional view illustrating a second example of a connector according to one embodiment of the present disclosure.

[0064] The connector (10) of FIG. 3 may be a connector (10) in which the material forming the second insulating portion (420) of the ball guide portion (400) in the connector (10) of FIG. 1 and FIG. 2 is changed and the cover portion (440) is omitted, so a duplicate description will be omitted.

[0065] Referring to FIG. 3, the hardness of the second insulating portion (420) may be higher than the hardness of the plurality of first insulating portions (300). For example, the second insulating portion (420) may be formed of polyimide. The second insulating portion (420) may cover the inner surfaces of the second shielding portions (410) facing each other and the upper surface of the first shielding portion.

[0066] When the ball guide portion (400) is manufactured, holes for accommodating the second shield portion (410) may be formed on the bottom surface of a sheet (e.g., a polyimide sheet) for forming the second insulating portion (420). After the holes for accommodating the second shield portion (410) are formed, a liquid material for forming the second shield portion (410) may be injected into the holes. For example, the liquid material may include a plurality of conductive particles (201) and an insulating material (202). After the liquid material is injected into the holes, the plurality of conductive particles (201) may be aligned along the vertical direction (VD) by a magnetic field, and the liquid material may be hardened to form the second shield portion (410). After the second shielding portion (410) is formed, a sheet for forming the second insulating portion (420) is perforated by a laser, thereby forming a plurality of guide holes (430), and the manufacturing of the ball guide portion (400) can be completed. The completed ball guide portion (400) can be attached to the conductive housing (100) using an adhesive material.

[0067] FIG. 4 is a cross-sectional view illustrating a third example of a connector according to one embodiment of the present disclosure.

[0068] The connector (10) of FIG. 4 may be a connector (10) in which the cover part (440) of the ball guide part (400) of the connector (10) of FIG. 2 is omitted, so a duplicate description will be omitted.

[0069] Referring to FIG. 4, the second insulating portion (420) may be formed of an insulating material (e.g., the insulating material (202) of FIG. 2). The second insulating portion (420) may only surround the inner surfaces of the second shielding portion (410) that face each other. The upper surface of the second shielding portion (410) may be exposed toward the device under test (e.g., the device under test (30) of FIG. 1).

[0070] When the ball guide part (400) is manufactured, a solution containing a mixture of a plurality of conductive particles (201) and an insulating material (202) may be injected into a mold. After the solution is injected into the mold, a magnetic field may be applied so that the plurality of conductive particles (201) may be aligned in the vertical direction (VD). After the plurality of conductive particles (201) are aligned in the vertical direction (VD), the solution may be cured, thereby forming a second shielding part (410) and a second insulating part (420) in a sheet-shaped member. By perforating the sheet-shaped member with a laser, a plurality of guide holes (430) may be formed, and the manufacturing of the ball guide part (400) may be completed. The manufactured ball guide part (400) may be attached to the housing (100) using an adhesive material.

[0071] FIG. 5 is a cross-sectional view illustrating a fourth example of a connector according to one embodiment of the present disclosure.

[0072] The connector (10) of FIG. 5 may be a connector (10) in which the second insulating portion (420) of the ball guide portion (400) and the cover portion (440) of the connector (10) of FIG. 2 are omitted, so redundant descriptions thereof will be omitted.

[0073] Referring to Fig. 5, a plurality of guide holes (430) can be formed inside the second shielding portion (410). When the ball guide portion (400) is manufactured, a sheet for forming the second shielding portion (410) is perforated with a laser, thereby forming a plurality of guide holes (430), and manufacturing of the ball guide portion (400) can be completed.

[0074] FIG. 6 is a cross-sectional view illustrating a fifth example of a connector according to one embodiment of the present disclosure.

[0075] The connector (10) of FIG. 6 may be a connector (10) in which the cover part (440) of the ball guide part (400) of the connector (10) of FIG. 2 is omitted and the second shield part (410) and the first shield part (120) are formed integrally, so a duplicate description will be omitted.

[0076] Referring to FIG. 6, the second shielding portion (410) of the ball guide portion (400) may be formed integrally with the first shielding portion (120) of the conductive housing (100). For example, a part of the conductive housing (100) surrounding the plurality of conductive portions (200) may form the first shielding portion (120), and another part of the conductive housing (100) may form the second shielding portion (410). For example, the first shielding portion (120) and the second shielding portion (410) may be separated by a boundary between the upper surfaces of each of the plurality of conductive portions (200).

[0077] The second insulating portion (420) may be formed integrally with a plurality of first insulating portions (300). For example, the plurality of first insulating portions (300) may be separated from the second insulating portion (420) by the upper surface of each of the plurality of conductive portions (200).

[0078] FIG. 7 is a cross-sectional view illustrating a sixth example of a connector according to one embodiment of the present disclosure.

[0079] The connector (10) of FIG. 7 may be a connector (10) in which the cover portion (440) of the ball guide portion (400) and the conductive housing (100) of the connector (10) of FIG. 2 are omitted, and an insulating housing (500) and a plurality of shielding portions (600) are included, so a duplicate description will be omitted.

[0080] Referring to FIG. 7, the connector (101) may include an insulating housing (500) and a plurality of shielding portions (600).

[0081] The insulating housing (500) may be formed of an insulating material. For example, the insulating housing (500) may be formed of an insulating material (e.g., the insulating material (202) of FIG. 2). The insulating housing (500) may provide an overall frame (or body) of the connector (10). The insulating housing (500) may accommodate components of the connector (10). For example, a plurality of conductive portions (200), a plurality of first insulating portions (300), a ball guide portion (400), and a plurality of shielding portions (600) may be supported by the insulating housing (500).

[0082] A plurality of conductive parts (200) may be arranged within an insulating housing (500). For example, the plurality of conductive parts (200) may be inserted within the insulating housing (500). The plurality of conductive parts (200) may extend within the insulating housing (500) along a vertical direction (VD). For example, the plurality of conductive parts (200) may be arranged to be spaced apart from each other along a horizontal direction (HD) within the insulating housing (500).

[0083] A plurality of first insulating portions (300) can shield a plurality of conductive portions (200) within an insulating housing (500). A plurality of first insulating portions (300) can surround a plurality of conductive portions (200) from the outside within the insulating housing (500). A plurality of first insulating portions (300) can fill a space between a plurality of shielding portions (600) and a plurality of conductive portions (200).

[0084] The ball guide part (400) may be placed on the insulating housing (500). For example, the ball guide part (400) may be placed on the upper surface of the insulating housing (500). The ball guide part (400) may be formed separately and then attached to the insulating housing (500), but is not limited thereto. For example, the ball guide part (400) may be formed integrally with the insulating housing (500).

[0085] The plurality of shielding portions (600) can shield the plurality of conductive portions (200). For example, the plurality of shielding portions (600) can reduce interference or loss of signals generated between the plurality of conductive portions (200). The plurality of shielding portions (600) can extend in the vertical direction (VD) within the insulating housing (500). The plurality of shielding portions (600) can be spaced apart from each other within the insulating housing (500) along the horizontal direction (HD). The plurality of shielding portions (600) can surround the plurality of conductive portions (200) from the outside. The plurality of shielding portions (600) can surround the plurality of first insulating portions (300) from the outside. The plurality of shielding portions (600) can be formed of substantially the same material as the plurality of conductive portions (200). For example, the plurality of shielding portions (600) can be formed by a plurality of conductive particles (e.g., a plurality of conductive particles (201) of FIG. 2) and an insulating material (e.g., an insulating material (202) of FIG. 2).

[0086] The second shielding portion (410) of the ball guide portion (400) can be electrically connected to a plurality of shielding portions (600). The second shielding portion (410) can be electrically connected to a plurality of shielding portions (600). For example, the second shielding portion (410) can be placed on the plurality of shielding portions (600) and thus can come into contact with the plurality of shielding portions (600). The second shielding portion (410) can be formed of a conductive material. For example, the second shielding portion (410) can be formed of a plurality of conductive particles (201) and an insulating material (202), similar to the plurality of conductive portions (200), but is not limited thereto. The second shielding portion (410) can be electrically connected to the plurality of shielding portions (600) and thereby provide grounding. The second shielding member (410) can surround (or enclose) a plurality of terminals (e.g., a plurality of terminals (31, 32, 33) of FIGS. 1 and 2) of the test device (30) positioned on each of the plurality of conductive portions (200) while the test device (30) is being tested.

[0087] When a connector (10) is manufactured, a solution containing a mixture of a plurality of conductive particles (201) and an insulating material (202) may be injected into a mold. After the solution is injected into the mold, a magnetic field may be applied so that the plurality of conductive particles (201) may be aligned in a vertical direction (VD). After the plurality of conductive particles (201) are aligned in the vertical direction (VD), the solution may be cured, thereby forming a plurality of conductive portions (200), a plurality of first insulating portions (300), a plurality of shielding portions (600), and an insulating housing (500). After the insulating housing (500) is formed, a ball guide portion (400) may be separately attached to the upper surface of the insulating housing (500), thereby completing the manufacture of the connector (10). However, the present invention is not limited thereto. For example, the ball guide portion (400) may be formed integrally with the insulating housing (500) through the above-described process.

[0088] FIG. 8 is a cross-sectional view illustrating a seventh example of a connector according to one embodiment of the present disclosure.

[0089] The connector (10) of Fig. 8 may be a connector (10) in which a cover portion (440) of a ball guide portion (400) and a plurality of frames (700) are added to the connector (10) of Fig. 7, so a duplicate description is omitted.

[0090] Referring to FIG. 8, a plurality of frames (700) may be arranged within an insulating housing (500). The plurality of frames (700) may support a plurality of conductive portions (200) and a plurality of shield portions (600) within the insulating housing (500). For example, the plurality of frames (700) may maintain the positions of the plurality of conductive portions (200) and the plurality of shield portions (600) in the vertical direction (VD) such that the plurality of conductive portions (200) and the plurality of shield portions (600) are aligned along the vertical direction (VD) while the insulating housing (500) is formed. For example, the plurality of frames (700) may surround each of the plurality of conductive portions (200) and the plurality of shield portions (600) from the outside.

[0091] While the technical concept of the present disclosure has been described above with reference to certain embodiments and examples illustrated in the accompanying drawings, it should be understood that various substitutions, modifications, and variations may be made without departing from the technical concept and scope of the present disclosure, which would be understood by those skilled in the art to which the present disclosure pertains. Furthermore, such substitutions, modifications, and variations should be considered to fall within the scope of the appended claims.

Claims

1. A test connector placed between the test device and the test device. A plurality of conductive parts each corresponding to a plurality of terminals of the above-mentioned inspection device and extending in the vertical direction; A conductive housing including a plurality of through holes extending in the vertical direction to accommodate each of the plurality of conductive portions, and a first shielding portion surrounding the plurality of through holes from the outside; A plurality of first insulating portions extending in the vertical direction between the plurality of conductive portions and the first shielding portion; and A ball guide part disposed on the above-mentioned challenging housing; The above ball guide part, A second shielding portion arranged on the first shielding portion so as to be electrically connected to the first shielding portion and surrounding the plurality of terminals to shield the plurality of terminals while the device under test is being tested; and A second insulating member that surrounds the plurality of terminals and comes into contact with the second shielding member so that the plurality of terminals and the second shielding member are separated while the test device is being tested; Connector.

2. In paragraph 1, The above ball guide part, A plurality of guide holes formed inside the second insulating portion and arranged on each of the plurality of conductive portions to accommodate the plurality of terminals while the device under test is being tested; Connector.

3. In paragraph 2, The cross-sectional area of ​​each of the above plurality of guide holes is As you move towards each of the plurality of conductive parts along the above vertical direction, it decreases. Connector.

4. In paragraph 2, The width of each of the above multiple challenge sections is: Each of the plurality of guide holes is less than or equal to the width of the Connector.

5. In paragraph 1, The above multiple challenges are: By having a length longer than the length of the plurality of through holes, protruding outward from the plurality of through holes, Connector.

6. In paragraph 1, The above multiple through holes are, comprising a first through hole, a second through hole, and a third through hole which are spaced apart from each other; The above multiple challenges are: A power conductive member positioned within the first through hole; A signal conductive portion arranged within the second through hole; and A ground conductive portion disposed within the third through hole, electrically disconnected from the power conductive portion and the signal conductive portion, and electrically connected to the conductive housing by contacting the conductive housing; Connector.

7. In paragraph 6, The above second shielding part is, Surrounding each of the plurality of terminals positioned on the power conductive portion, the signal conductive portion, and the ground conductive portion, respectively; Connector.

8. In paragraph 1, The above ball guide part, Attached to the above challenging housing, Connector.

9. In paragraph 1, The above first shielding part is, Formed integrally with the above challenging housing, Connector.

10. In paragraph 1, The above ball guide part, Further comprising a cover part covering the upper surface of the second shield part and the upper surface of the second insulation part; Connector.

11. In paragraph 1, The upper surface of each of the above multiple challenge parts is, By being separated from the second insulating portion, it is exposed toward the test device. Connector.

12. In paragraph 1, The above second insulating part, Formed from polyimide, Connector.

13. In paragraph 1, The above second insulating part, Formed from silicone with elasticity, Connector.

14. A test connector placed between the test device and the test device. Insulating housing; A plurality of conductive parts each corresponding to a plurality of terminals of the above-described inspection device and extending in the insulating housing in the vertical direction; A plurality of shielding members each surrounding the plurality of conductive members from the outside and arranged within the insulating housing; A plurality of first insulating portions extending in the vertical direction between the plurality of conductive portions and the plurality of shielding portions to fill the space between the plurality of shielding portions and the plurality of conductive portions; and A ball guide part disposed on the insulating housing; The above ball guide part, A second shielding member is disposed on each of the plurality of shielding members so as to be electrically connected to the plurality of shielding members, and surrounds the plurality of terminals to shield the plurality of terminals while the device under test is being tested; and A second insulating member that surrounds the plurality of terminals and comes into contact with the second shielding member so that the plurality of terminals and the second shielding member are separated while the test device is being tested; Connector.

15. In paragraph 14, The above ball guide part, A plurality of guide holes formed inside the second insulating portion and arranged on each of the plurality of conductive portions to accommodate the plurality of terminals while the device under test is being tested; Connector.

16. In paragraph 14, A plurality of frames supporting the plurality of conductive parts by surrounding the plurality of conductive parts; further comprising; Connector.

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