Electrically conductive pin and method for manufacturing electrically conductive pin

Abstract

The present invention provides: a method for manufacturing an electrically conductive pin provided in an inspection apparatus for inspecting electrical characteristics of an object to be inspected, the method comprising a preparation step of preparing a tubular member with a hollow hole formed from one end up to at least a partial length thereof, a deformation step of narrowing the hollow hole corresponding to one end area of the tubular member, thereby forming a deformation part, and a first contact part formation step of processing the deformation part so as to form a first contact part in contact with the object to be inspected, and thus processing time and manufacturing costs can be reduced; and the electrically conductive pin having improved durability with a reduced number of constituent parts.

Description

Electrically conductive pin and method for manufacturing the electrically conductive pin

[0001] The present invention relates to an electrically conductive pin and a method for manufacturing an electrically conductive pin, which have improved durability and are easy to manufacture, and a method for manufacturing an electrically conductive pin.

[0002] An electrically conductive pin refers to a pin that can be used in a testing device, such as a probe card or test socket, that comes into contact with the test object and tests it. Here, the electrically conductive pin plays a role in transmitting electrical signals between the test object and the testing device.

[0003] Testing of semiconductor devices is performed by providing electrical signals by contacting a test socket or probe card having a number of electrically conductive pins on a semiconductor package or semiconductor wafer or other object to be inspected.

[0004] In this regard, prior art document No. 10-2202826 discloses a "plunger and a probe pin using the same." The prior art document describes a probe pin comprised of four parts: two plungers, a barrel, and an elastic member. The two plungers move up and down within the barrel via the elastic member, thereby examining the electrical characteristics of the test object.

[0005] However, the probe pins have the problem of increasing manufacturing costs and increasing process time due to the large number of parts involved in the assembly. To address these issues, efforts are being made to reduce the number of parts and improve physical and electrical properties.

[0006] [Prior Art Literature]

[0007] [Patent Document]

[0008] (Patent Document 1) Patent Publication No. 10-2202826

[0009] In order to solve the above-described problems, the present invention aims to provide an electrically conductive pin with improved durability while reducing the number of component parts.

[0010] In addition, the present invention aims to provide a method for manufacturing an electrically conductive pin that can reduce manufacturing costs by shortening the process time.

[0011] In order to achieve the above-described object, a method for manufacturing an electrically conductive pin according to an embodiment of the present invention may include a preparation step of preparing a tubular member in which a hollow is formed from one end to at least a portion of a length; a deformation step of forming a deformation part by narrowing the hollow corresponding to the one end region of the tubular member; and a first contact part forming step of forming a first contact part that comes into contact with the inspection object by processing the deformation part.

[0012] In addition, the method for manufacturing an electrically conductive pin according to an embodiment of the present invention may further include a first plunger forming step of forming an outer shape of a first plunger by processing the tubular member.

[0013] Additionally, in an embodiment of the present invention, the preparation step may be to form the hollow by drilling at least a portion of the depth from the one end.

[0014] Additionally, in an embodiment of the present invention, in the deformation step, the deformation portion may include an inclined hollow formed such that the cross-sectional area gradually decreases from the cross-sectional area of ​​the hollow.

[0015] Additionally, in an embodiment of the present invention, the deformable portion may further include a small hollow portion formed with a cross-sectional area smaller than the cross-sectional area of ​​the hollow portion.

[0016] Additionally, in an embodiment of the present invention, the first contact portion forming step may be to form a plurality of cutting edges in the first contact portion by cutting the deformable portion.

[0017] Additionally, in an embodiment of the present invention, the first plunger forming step may include a step of processing the outer surface of the side wall of the tubular member to reduce the thickness of the side wall.

[0018] In addition, in an embodiment of the present invention, the first plunger forming step may include a step of forming a first-first processing hole in the deformable portion that is longitudinally connected to the hollow portion.

[0019] Additionally, in an embodiment of the present invention, the first plunger forming step may include a step of forming a first-second processing hole communicating with the hollow portion on a side surface of the tubular member.

[0020] Meanwhile, a method for manufacturing an electrically conductive pin according to an embodiment of the present invention may include a preparation step of preparing a tubular member having a hollow formed therein through which a first plunger moves; a deformation step of forming a deformation portion by narrowing the hollow corresponding to one end region of the tubular member; and a second contact portion forming step of forming a second contact portion that comes into contact with the inspection device by processing the deformation portion.

[0021] In addition, the method for manufacturing an electrically conductive pin according to an embodiment of the present invention may further include a second plunger forming step of forming an outer shape of a second plunger by processing the tubular member.

[0022] Additionally, in an embodiment of the present invention, in the deformation step, the deformation portion may include an inclined hollow formed such that the cross-sectional area gradually decreases from the cross-sectional area of ​​the hollow.

[0023] Additionally, in an embodiment of the present invention, the second plunger forming step may include a step of processing the outer surface of the side wall of the tubular member to reduce the thickness of the side wall.

[0024] In addition, in an embodiment of the present invention, the second plunger forming step may include a step of forming a second-first processing hole communicating with the hollow in the longitudinal direction in the deformable portion or a second-second processing hole communicating with the hollow in the side surface of the tubular member.

[0025] Meanwhile, an electrically conductive pin according to an embodiment of the present invention is an electrically conductive pin provided in an inspection device for inspecting electrical characteristics of an object to be inspected, comprising: a first plunger provided with a hollow portion and a first contact portion and contacting the object to be inspected; a second plunger at least a portion of which moves along the hollow portion and contacts the inspection device; and an elastic portion provided in the hollow portion and supported by the first contact portion and connecting the first plunger and the second plunger; wherein at least a portion of the first contact portion may have a thickness greater than a thickness of a side wall of the first plunger.

[0026] Meanwhile, an electrically conductive pin according to an embodiment of the present invention is an electrically conductive pin provided in an inspection device for inspecting electrical characteristics of an object to be inspected, comprising: a first plunger that contacts the object to be inspected; a second plunger that is provided with a hollow portion and a second contact portion and contacts the inspection device; and an elastic portion that accommodates the first plunger therein and connects the first plunger and the second plunger; and at least a portion of the second contact portion may have a thickness greater than a thickness of a side wall of the second plunger.

[0027] The present invention can provide an effect of suppressing damage to a plunger that comes into contact with an inspection device and an inspection object.

[0028] In addition, the present invention can manufacture a plunger with sturdiness while shortening the process time and suppressing scratches on the exterior.

[0029] FIG. 1 is a drawing showing an electrically conductive pin according to an embodiment of the present invention.

[0030] FIG. 2 is a flowchart showing a method for manufacturing an electrically conductive pin according to an embodiment of the present invention.

[0031] FIGS. 3A to 3C are drawings showing a method for manufacturing an electrically conductive pin according to an embodiment of the present invention.

[0032] Figures 4a and 4b are drawings showing the preparation steps in an embodiment of the present invention.

[0033] Figure 5 is a drawing showing a deformed part after a deformation step in an embodiment of the present invention.

[0034] FIGS. 6A to 6D are drawings showing cross-sections of the first plunger after the first plunger forming step in an embodiment of the present invention.

[0035] FIGS. 7A to 7D are drawings showing the end of the first plunger after the first plunger forming step in an embodiment of the present invention.

[0036] FIG. 8 is a drawing showing an electrically conductive pin according to an embodiment of the present invention.

[0037] FIG. 9 is a flowchart showing a method for manufacturing an electrically conductive pin according to an embodiment of the present invention.

[0038] FIGS. 10A to 10D are drawings showing cross-sections of a second plunger after the second plunger forming step in an embodiment of the present invention.

[0039] Those skilled in the art will be able to develop various devices that embody the principles of the invention and fall within the scope and spirit of the invention, even if not explicitly described or illustrated in this specification. Furthermore, all conditional terms and embodiments listed herein are expressly intended, in principle, to facilitate understanding of the invention's concept and should be understood as being in no way limiting to the specifically listed embodiments and conditions.

[0040] The above-described objects, features and advantages will become more apparent through the following detailed description of the invention in conjunction with the accompanying drawings, so that those skilled in the art will be able to easily implement the technical idea of ​​the invention.

[0041] The embodiments described herein will be described with reference to cross-sectional and / or perspective views, which are ideal illustrations of the present invention. The dimensions of components depicted in these drawings may be exaggerated for the purpose of effectively explaining the technical content. The form of the illustrations may be altered due to manufacturing techniques and / or tolerances.

[0042] When describing various embodiments, components that perform the same function will be given the same names and reference numbers for convenience even if the embodiments are different. In addition, the expression "at least one of A, B, and C" means that it is composed of one, two, or three of A, B, and C. In addition, a cross-section or cross-sectional area may mean a cross-section perpendicular to the longitudinal direction unless otherwise specified. In addition, the longitudinal direction may mean the direction of elongation and compression of the elastic part. Furthermore, for convenience, the configuration and operation already described in other embodiments will be omitted.

[0043] Below, an electrically conductive pin (10) according to an embodiment of the present invention will be described.

[0044] FIG. 1 is a drawing showing an electrically conductive pin (10) according to an embodiment of the present invention.

[0045] Referring to FIG. 1, an electrically conductive pin (10) according to an embodiment of the present invention may include a first plunger (100) provided with a hollow portion (110) and a first contact portion (120) and contacting an object to be inspected, a second plunger (200) at least a portion of which moves along the hollow portion (110) and contacts an inspection device, and an elastic portion (300) provided in the hollow portion (110) and supported by the first contact portion (120) and connecting the first plunger (100) and the second plunger (200).

[0046] The first plunger (100) can contact a test object (not shown) and exchange electrical signals with the test object. The first plunger (100) may have a hollow space (110) therein.

[0047] The first plunger (100) may include a first contact portion (120) that comes into contact with the test object at one end, a first body portion (130) that extends from the first contact portion (120) and has a hollow portion (110) connected thereto, and a separation prevention portion (140) that extends from the first body portion (130) at the other end to prevent separation of the second plunger (200).

[0048] The first contact portion (120) can be in direct contact with the test object and may have a plurality of tip portions (132).

[0049] The first body part (130) may have a hollow portion (110) and may accommodate an elastic portion (300) through the hollow portion (110). The first body part (130) may provide a space through which at least a portion of the second plunger (200) may move in the longitudinal direction.

[0050] The first body part (130) may include a fixing part (131). The fixing part (131) may be a step formed to protrude radially along the periphery of the first body part (130), and the first body part (130) may be supported on the inspection device by the fixing part (131).

[0051] The detachment prevention portion (140) can prevent detachment of the second plunger (200) by contacting a portion of the second plunger (200) in the area where the hollow (110) of the first body portion (130) narrows. Specifically, the detachment prevention portion (140) can prevent detachment of the second plunger (200) by forming a narrowed hollow (110) or an inner surface and contacting the outer surface of the second plunger (200).

[0052] The first plunger (100) may be provided in a closed state such that a portion of one end thereof may be opened in the longitudinal direction, but the elastic member (300) may be supported without being detached. The first plunger (100) may be provided with a first-first machining hole (105) in which a portion of one end thereof is opened in the longitudinal direction, and the cross-sectional size of the first-first machining hole (105) is smaller than the diameter of the entire elastic member (300) (compared to the diameter of a single strand to be wound), so that detachment of the elastic member (300) through one end of the first plunger (100) can be prevented.

[0053] The first plunger (100) may be provided so that the other end is open and at least a portion of the second plunger (200) is exposed in the longitudinal direction.

[0054] The second plunger (200) can contact the inspection device (not shown) and exchange electric signals with the inspection device.

[0055] The second plunger (200) may include a second contact portion (220) that comes into contact with the inspection device and a second body portion (230) that extends from the second contact portion (220) and has a larger cross-sectional area than the second contact portion (220). The second body portion (230) may include an inclined section (231) whose cross-sectional area decreases at one end.

[0056] The second contact portion (220) can be in direct contact with the inspection device and may include a contact section (221) with a reduced cross-sectional area at one end.

[0057] The second body part (230) can support the elastic part (300). The second body part (230) is provided in the hollow part (110) of the first body part (130) and can move in the longitudinal direction in the hollow part (110) according to the compression and extension of the elastic part (300).

[0058] The second plunger (200) can be prevented from being separated from the first plunger (100) by the separation prevention part (140) of the first plunger (100). The movement of the second plunger (200) is suppressed when the inclined section (231) provided in the second body part (230) of the second plunger (200) and the separation prevention part (140) of the first plunger (100) come into contact, thereby preventing separation. Here, separation may mean a state in which the second plunger (200) and the first plunger (100) are completely separated from each other.

[0059] The electrically conductive pin (10) provided in the inspection device can be compressed in the longitudinal direction by pressure when it comes into contact with the inspection object. By the compression of the elastic part (300) supported by the first contact part (120) of the first plunger (100) and the second body part (230) of the second plunger (200), the first plunger (100) and the second plunger (200) can move relative to each other in the longitudinal direction, thereby compressing the electrically conductive pin (10). Conversely, when the electrically conductive pin (10) is released from contact with the inspection object, the first plunger (100) and the second plunger (200) can move relative to each other in the longitudinal direction, thereby causing the electrically conductive pin (10) to extend again.

[0060] Additional configurations of the electrically conductive pin (10) according to an embodiment of the present invention are described together with a method for manufacturing the electrically conductive pin (10).

[0061] Hereinafter, a method for manufacturing an electrically conductive pin (10) according to an embodiment of the present invention will be described.

[0062] FIG. 2 is a flowchart illustrating a method for manufacturing an electrically conductive pin according to an embodiment of the present invention. FIGS. 3A to 3C are diagrams illustrating a method for manufacturing an electrically conductive pin (10) according to an embodiment of the present invention. FIGS. 4A and 4B are diagrams illustrating a preparation step (S110) in an embodiment of the present invention. FIG. 5 is a diagram illustrating a deformation part (102) after a deformation step (S120) in an embodiment of the present invention. FIGS. 6A to 6D are diagrams illustrating a cross-section of a first plunger (100) after a step of forming the first plunger (100) in an embodiment of the present invention. FIGS. 7A to 7D are diagrams illustrating an end portion of a first plunger (100) after a step of forming the first plunger (100) in an embodiment of the present invention.

[0063] Referring to FIGS. 2 and 3a to 3c, a method for manufacturing an electrically conductive pin (10) according to an embodiment of the present invention may include a preparation step (S110) of preparing a tubular member (101) in which a hollow (110) is formed from one end to at least a portion of a length; a deformation step (S120) of forming a deformation part (102) by narrowing the hollow (110) corresponding to one end area of ​​the tubular member (101); and a first contact part forming step (S130) of forming a first contact part (120) that comes into contact with an object to be inspected by processing the deformation part (102); and may further include a first plunger forming step (S140) of forming an outer shape by processing the tubular member (101).

[0064] First, a preparation step (S110) can be performed.

[0065] Referring to FIGS. 2 and 3a, the tubular member (101) may have a hollow space (110) formed longitudinally therein. The hollow space (110) is not limited to being formed throughout the entire tubular member (101) along the longitudinal direction, and may be formed from one end to a certain depth along the longitudinal direction of the tubular member (101).

[0066] Referring to FIGS. 4a and 4b, the tubular member (101) can be prepared by machining a cylindrical member (101') from one end to at least a portion of the depth. At this time, the tubular member (101) can be provided with a hollow (110) through drilling while the cylindrical member (101') is held by the holding portion (30).

[0067] Next, a transformation step (S120) can be performed.

[0068] Referring to FIGS. 2, 3b, and 5, a deformation portion (102) may be formed in one end region of the tubular member (101). The deformation portion (102) may be a region where a portion of the tubular member (101) is plastically deformed by being bent into a shape in which the hollow (110) narrows. The deformation portion (102) may be deformed into a shape in which one end region of the tubular member (101) is bent in the direction of the cylindrical axis (or central axis) so that the annular ends of the tubular member (101) face each other. The annular ends may contact each other to close the hollow (110) (see FIG. 3b), or may not contact each other to close only a portion of the hollow (110) to form a small hollow (112) to be described later (see FIG. 5).

[0069] The tubular member (101) can be deformed by being rotated by the gripping portion (30) while the deformation means (not shown) is in contact with the outer surface of the side wall (104) of one end region. At this time, the formation of the deformation portion (102) can be performed by the herashibori method, but is not limited thereto. After being processed, the deformation portion (102) can become the first contact portion (120).

[0070] Referring still to FIG. 5, the deformation portion (102) may include an inclined hollow (111). The inclined hollow (111) may refer to a section in which the hollow (110) is narrowed by the deformation portion (102) formed in one end region of the tubular member (101). Specifically, the inclined hollow (111) may be formed such that the cross-sectional area (cross-sectional area) of the hollow (110) of the tubular member (101) gradually decreases. The inclined hollow (111) may be formed inside the first plunger (100) to support the elastic member (300). Here, the cross-section of the hollow (110) refers to a virtual cross-section formed by the hollow when the tubular member (101) is cut perpendicular to the longitudinal direction.

[0071] The deformation portion (102) may include a small hollow portion (112). The small hollow portion (112) may refer to a section extending from the inclined hollow portion (111) by the deformation portion (102) formed in one end region of the tubular member (101). Specifically, the small hollow portion (112) may be formed to have a cross-sectional area smaller than the cross-sectional area of ​​the hollow portion (110) of the tubular member (101). The small hollow portion (112) may be communicated with the outside of the first plunger (100) so that a plating material may be introduced into the inside of the first plunger (100). Various examples of the small hollow portion (112) will be described later.

[0072] Next, the first contact portion forming step (S130) can be performed.

[0073] Referring to FIGS. 2, 3c, 6a, and 7a, the first contact portion (120) can be formed by processing a deformation portion (102). The first contact portion (120) can include a plurality of tip portions (132). The deformation portion (102), which is formed by deforming one end region of the tubular member (101), can be cut and provided on the tubular member (101) as a plurality of tip portions (132).

[0074] The first contact portion (120) may include a plurality of tip portions (132) for contacting the inspection object. The first contact portion (120) may form a contact point with the inspection object (or bump) through the plurality of tip portions (132) to transmit a signal between the inspection device and the inspection object.

[0075] The first contact portion (120) may be provided in a form in which a portion of the deformation portion (102) is cut off. The first contact portion (120) may be formed by cutting the outer surface of the deformation portion (102) in an inclined manner in the direction of the cylindrical axis. The outer portion of the deformation portion (102) that is not cut off forms a plurality of tip portions (132), and the inclined hollow portion (111) that is not cut off in the deformation portion (102) may form the inner surface of the side wall (104) that supports the elastic portion (300).

[0076] Next, the first plunger forming step (S140) can be performed.

[0077] The first plunger forming step (S140) may include at least one of a step of processing the outer surface of the side wall (104) of the tubular member (101) to reduce the thickness of the side wall (104), a step of forming a first-first processing hole (105) in the deformation portion (102) that is in communication with the hollow (110) in the longitudinal direction, and a step of forming a first-second processing hole (106) in the side wall (104) of the tubular member (101) that is in communication with the hollow (110).

[0078] Referring to FIG. 3c, FIG. 6a and FIG. 7a, in the step of processing the outer surface of the side wall (104) of the tubular member (101) to reduce the thickness of the side wall (104), the first plunger (100) can be processed to form an outer shape.

[0079] The tubular member (101) can be cut by being rotated by the gripper (30) while the cutting means (not shown) is in contact with it. The outer surface of the side wall (104) of the tubular member (101) can be cut to reduce the thickness of the side wall (104), thereby forming the outer shape of the first plunger (100). The first body portion (130) of the first plunger (100) can maintain the same outer diameter except for the fixing portion (131), and can maintain the same thickness of the side wall (104).

[0080] The side wall (104) of the tubular member (101) can be cut to a first thickness (d2). A portion of the side wall (104) of the tubular member (101) can be cut to a thickness thicker than the first thickness (d2) or left unprocessed to become a fixed portion (131).

[0081] A part of the side wall (104) of the tubular member (101) may be cut or unprocessed to become a fixed portion (131), and the remainder of the side wall (104) may be cut to a first thickness (d2) thinner than the fixed portion (131) to become a first body portion (130) excluding the fixed portion (131).

[0082] Referring to FIGS. 6b and 7b, in the step of forming a first-first processing hole (105) that is longitudinally connected to the hollow (110) in the deformation portion (102), the deformation portion (102) or the first contact portion (120) of the first plunger (100) may be processed to form the first-first processing hole (105).

[0083] The first-first machining hole (105) may be formed to penetrate longitudinally from the end of the first plunger (100). The first-first machining hole (105) may provide a passage through which a plating material for plating the inner surface of the side wall (104) forming the hollow (110) of the first body portion (130) or the first plunger (100) is introduced. When viewed from the end of the first plunger (100), the first-first machining hole (105) may be formed in a '+' shape or an 'x' shape. The first-first machining hole (105) may be formed by cutting the deformation portion (102) while the cutting means moves in a '+' shape or an 'x' shape.

[0084] A plurality of cutting edges (132) may be repeatedly provided along the circumferential direction, and a plurality of recessed portions (133) formed between the plurality of cutting edges (132) may also be repeatedly provided in the circumferential direction. At this time, each recessed portion (133) may be provided in the radial direction. The plurality of recessed portions (133) may be formed in the shape of a '+' or an 'x'. The first-first processing hole (105) may be formed by a cutting means cutting a deformed portion (102) in the radial direction along each of the recessed portions (133).

[0085] Referring to FIGS. 6c and 7c, in the step of forming a first-first processing hole (105) that is longitudinally connected to the hollow (110) in the deformation portion (102), the deformation portion (102) or the first contact portion (120) of the first plunger (100) can be processed to form the first-first processing hole (105).

[0086] The first-first machining hole (105) may be formed to penetrate longitudinally from the end of the first plunger (100). The first-first machining hole (105) may provide a passage through which a plating material for plating the inner surface of the side wall (104) forming the hollow (110) of the first body portion (130) or the first plunger (100) is introduced. When viewed from the end of the first plunger (100), the first-first machining hole (105) may be formed in an 'o' shape. The first-first machining hole (105) may be formed by cutting the deformed portion (102) into an 'o' shape by rotation of the drill.

[0087] Referring to FIGS. 6d and 7d, in the step of forming the first-second processing hole (106) communicating with the hollow (110) in the side wall (104) of the tubular member (101), the tubular member (101) or the first body portion (130) of the first plunger (100) may be processed to form the first-second processing hole (106).

[0088] The first-second machining hole (106) may be formed to penetrate in the direction of the cylindrical axis (or central axis) in the side wall (104) of the first plunger (100). The first-second machining hole (106) may provide a passage through which a plating material for plating the inner surface of the side wall (104) forming the hollow (110) of the first body portion (130) or the first plunger (100) is introduced. When viewed from the side wall (104) of the first plunger (100), the first-second machining hole (106) may be formed in an 'o' shape. The first-second machining hole (106) may be formed by cutting the tubular member (101) or the first body portion (130) in an 'o' shape by rotation of the drill.

[0089] Next, a separation prevention portion forming step may be performed to form a separation prevention portion (140) by narrowing the hollow (110) corresponding to the other end area of ​​the tubular member (101). The separation prevention portion (140) may be performed in a state where the elastic portion (300) and the second plunger (200) are positioned in the hollow (110) of the first plunger (100). Accordingly, the second plunger (200) may be prevented from being separated from the first plunger (100) by the second body portion (230) coming into contact with the separation prevention portion (140), and the elastic portion (300) may be supported by the first plunger (100) and the second plunger (200) and may be positioned in the hollow (110) of the second plunger (200).

[0090] The first contact portion forming step (S130) and the first plunger forming step (S140) can be performed sequentially. That is, since both forming the first contact portion (120) by machining the deformation portion (102) and forming the outer shape of the first plunger (100) by machining the tubular member (101) are performed through a cutting process, they can be performed simultaneously or at different times by the same or different cutting means.

[0091] Meanwhile, since the deformation step (S120) and the first contact portion forming step (S130) are performed in one end region of the tubular member (101), the gripping part (30) can grip the tubular member (101) in a direction in which one end region of the tubular member (101) is exposed. The first plunger forming step (S140) can be performed in one end region exposed by the gripping part (30) and a part of the first body part (130).

[0092] Next, since the first plunger forming step (S140) is also performed in the other end region of the tubular member (101), the gripping part (30) can grip the tubular member (101) in a direction in which the other end region of the tubular member (101) is exposed. The first plunger forming step (S140) can be performed in the other end region newly exposed by the gripping part (30) and the remaining region of the first body part (130).

[0093] As a comparative example, when the outer shape of the first plunger (100) is formed first and then a hollow (110) is formed in the first plunger (100) later, scratches may occur on the outer shape of the first plunger (100) due to the gripping force of the gripping portion (30).

[0094] In contrast, the method for manufacturing an electrically conductive pin (10) according to an embodiment of the present invention first forms a first contact portion (120) in a tubular member (101) having a hollow portion (110) and then forms a first plunger (100) by cutting the outer surface of the side wall (104) of the tubular member (101). Therefore, the outer surface of the first plunger (100) can be prevented from being damaged by the grip portion during the process of forming the hollow portion (110).

[0095] Even if a scratch occurs by using a tubular member (101) with a hollow (110) or by forming a hollow (110) in a tubular member (101') without a hollow (110), the scratch can be removed later because the outer surface of the side wall (104) of the tubular member (101) is cut.

[0096] In addition, the electrically conductive pin (10) according to the embodiment of the present invention may have a thickness (d1) of the first contact portion (120) greater than the thickness (d2) of the side wall (104) of the first plunger (100) in at least a portion of the first contact portion (120).

[0097] Specifically, the first contact portion (120) may include a section in which the thickness (d1) gradually increases from the side wall (104) of the first plunger (100) to the tip portion (132). In addition, the first contact portion (120) may include a section in which the thickness (d1) gradually decreases from the tip portion (132) of the first plunger (100) toward the central axis. In addition, the thickness (d1) of the first contact portion (120) in the region where the first contact portion (120) supports the elastic portion (300) may be thicker than the thickness (d2) of the side wall (104) of the first plunger (100).

[0098] Since the tubular member (101) having a thick side wall (104) is plastically deformed to form a deformed portion (102) and a first contact portion (120), and the thick side wall (104) is cut to form a thin side wall (104), the thickness (d1) of at least a portion of the first contact portion (120) may be greater than the thickness (d2) of the side wall (104) of the first plunger (100). Here, the thickness (d1) of the first contact portion (120) may mean the thickness in the direction perpendicular to the inner surface forming the hollow (110) or the inclined hollow (111).

[0099] According to an embodiment of the present invention, the electrically conductive pin (10) can implement a narrow pitch of a plurality of electrically conductive pins (10) provided in an inspection device by configuring the side wall (104) of the first plunger (100) to be relatively thin, and by configuring the thickness (d1) of the first contact portion (120) to be relatively thick, deformation and breakage due to a force received by the elastic portion (300) and the inspection object can be prevented.

[0100] Below, an electrically conductive pin (10) according to another embodiment of the present invention will be described.

[0101] Fig. 8 is a drawing showing an electrically conductive pin (10) according to an embodiment of the present invention.

[0102] Referring to FIG. 8, an electrically conductive pin (10) according to an embodiment of the present invention may include a first plunger (600) that contacts an inspection object, a second plunger (700) that is provided with a hollow portion (710) and a second contact portion (720) that contacts an inspection device, and an elastic portion (800) that accommodates the first plunger (600) therein and connects the first plunger (600) and the second plunger (700).

[0103] The first plunger (600) may include a first contact portion (620) that contacts the test object at one end, a first body portion (630) that extends from the first contact portion (620), and a first body end portion (631) that extends from the first body portion (630) at the other end to prevent the first plunger (600) from being detached. The first body end portion (631) may include an inclined section (632) whose cross-sectional area increases toward the end.

[0104] The first contact portion (620) may be in direct contact with the test object and may include a plurality of tip portions (not shown). Alternatively, the first contact portion (620) may include a contact section (621) with a reduced cross-sectional area at one end.

[0105] The first contact portion (620) may include a first fixing portion (633). The first fixing portion (633) may be a step formed to protrude radially along the periphery of the first contact portion, and the first contact portion (620) may be supported on the inspection device by the first fixing portion (633). The first fixing portion (633) may support the elastic portion (800) in the longitudinal direction.

[0106] The first body portion (630) is formed thinner than the first contact portion (620) and can accommodate the elastic portion (800) externally. At least a portion of the first body portion (630) can move longitudinally along the hollow portion (710) of the second plunger (700).

[0107] The second plunger (700) can contact the inspection device and exchange electrical signals with the inspection device. The second plunger (700) may have a hollow space (710) therein.

[0108] The second plunger (700) may include a second contact portion (720) that comes into contact with the inspection device at one end, a second body portion (730) that extends from the second contact portion (720), and a separation prevention portion (740) that protrudes from the inner surface of the second body portion (730) to prevent separation of the first plunger (600).

[0109] The second contact portion (720) can be in direct contact with the inspection device and may include a contact section (721) with a reduced cross-sectional area at one end.

[0110] The second body part (730) may have a hollow portion (710). The second body part (730) may provide a space in which at least a portion of the first plunger (600) can move in the longitudinal direction.

[0111] The second body part (730) may include a second fixing part (731). The second fixing part (731) may be a step formed to protrude radially along the periphery of the second body part (730), and the second body part (730) may be supported by the inspection device by the second fixing part (731). The second fixing part may support the elastic part (800) in the longitudinal direction.

[0112] The anti-separation portion (740) can prevent the first plunger (600) from separating by contacting a portion of the first plunger (600) in the area where the hollow (710) in the second body portion (730) narrows. Specifically, the anti-separation portion (740) can prevent the first plunger (600) from separating by forming the narrowed hollow (710) or the inner surface and contacting the outer surface of the first plunger (600).

[0113] The second plunger (700) may have one end part that is open longitudinally or may be entirely closed. The second plunger (700) may be provided such that the other end is open so that at least a portion of the first plunger (600) is exposed longitudinally.

[0114] The first body end portion (631) is provided in the hollow portion (710) of the second body portion (730) and can move longitudinally in the hollow portion (710) according to the compression and extension of the elastic portion (800).

[0115] The first plunger (600) can be prevented from being separated from the second plunger (700) by the separation prevention part (740) of the second plunger (700). When the inclined section (632) provided at the first body end (631) of the first plunger (600) and the separation prevention part (740) of the second plunger (700) come into contact, the movement of the first plunger (600) is suppressed, thereby preventing separation.

[0116] When the electrically conductive pin (10) provided in the inspection device comes into contact with the inspection object, it can be compressed in the longitudinal direction by pressure. By the compression of the elastic part (800) supported by the first fixing part (633) of the first plunger (600) and the second fixing part (731) of the second plunger (700), the first plunger (600) and the second plunger (700) can move relative to each other in the longitudinal direction, thereby compressing the electrically conductive pin (10). Conversely, when the electrically conductive pin (10) is released from contact with the inspection object, the first plunger (600) and the second plunger (700) can move relative to each other in the longitudinal direction, thereby causing the electrically conductive pin (10) to extend again.

[0117] Hereinafter, a method for manufacturing an electrically conductive pin (10) according to another embodiment of the present invention will be described. Except for the parts mentioned in this embodiment, the method can be performed in the same or similar manner as the above-described embodiment.

[0118] Fig. 9 is a flowchart illustrating a method for manufacturing an electrically conductive pin (10) according to an embodiment of the present invention. Figs. 10a to 10d are drawings illustrating a cross-section of a second plunger (700) after the second plunger forming step (S240) in an embodiment of the present invention.

[0119] Referring to FIGS. 8, 9, and 10a, a method for manufacturing an electrically conductive pin (10) according to an embodiment of the present invention may include a preparation step (S210) of preparing a tubular member (701) in which a hollow (710) through which a first plunger (600) moves is formed; a deformation step (S220) of forming a deformation portion (702) by narrowing the hollow (710) corresponding to one end region of the tubular member (701); and a second contact portion forming step (S230) of forming a second contact portion (720) that contacts an inspection device by processing the deformation portion (702), and may further include a second plunger forming step (S240) of forming an outer shape of the second plunger (700) by processing the tubular member (701).

[0120] First, a preparation step (S210) and a deformation step (S220) may be performed. The preparation step (S210) and the deformation step (S220) may be performed in the same manner as described above. Here, the deformation portion (702) may refer to the second contact portion (720) before processing.

[0121] The deformation portion (702) may include an inclined hollow (711) and a small hollow (705). The inclined hollow (711) may be formed inside the second plunger (700). The small hollow (705) may be communicated with the outside of the second plunger (700) so that a plating material may be introduced into the inside of the second plunger (700). Various examples of the small hollow (705) will be described later.

[0122] Next, a second contact portion forming step (S230) can be performed.

[0123] The second contact portion (720) can be formed by processing the deformation portion (702). The deformation portion (702), which is formed by deforming one end region of the tubular member (701), can be cut to become the second contact portion (720).

[0124] The second contact portion (720) may be provided in a form in which a portion of the deformation portion (702) is cut off. The second contact portion (720) may be formed by cutting the outer surface of the deformation portion (702). The second contact portion (720) may be formed so that its thickness increases toward the central axis.

[0125] Next, a second plunger forming step (S240) can be performed.

[0126] The second plunger forming step (S240) may include at least one of a step of processing the outer surface of the side wall (704) of the tubular member (701) to reduce the thickness of the side wall (704), a step of forming a second-first processing hole (705) in the deformation portion (702) that is longitudinally connected to the hollow (710), and a step of forming a second-second processing hole (706) in the side wall (704) of the tubular member (701) that is longitudinally connected to the hollow (710).

[0127] Referring to FIG. 10a, in the step of processing the outer surface of the side wall (704) of the tubular member (701) to reduce the thickness of the side wall (704), the second plunger (700) can be processed to form an outer shape.

[0128] The tubular member (701) can be cut by being rotated by the gripper (30) while the cutting means is in contact. The outer surface of the side wall (704) is cut to reduce the thickness of the side wall (704), thereby forming the outer shape of the second plunger (700). The second body portion (730) of the second plunger (700) can maintain the same outer diameter except for the second fixing portion (731) and the separation prevention portion (740), and can maintain the same thickness of the side wall (704).

[0129] The side wall (704) of the tubular member (701) can be cut to a second thickness (d4). A portion of the side wall (704) of the tubular member (701) can be cut to a thickness greater than the second thickness (d4) or left unprocessed to become a second fixed portion (731).

[0130] A part of the side wall (704) of the tubular member (701) may be cut or unprocessed to form a second fixing portion (731), and the remainder of the side wall (704) may be cut to a second thickness (d4) thinner than the second fixing portion (731) to form a second body portion (730) excluding the second fixing portion (731) and the anti-separation portion (740). The anti-separation portion (740) may be formed by recessing a part of the second body portion (730) in the direction of the central axis by cocking.

[0131] Referring to FIG. 10b, in the step of forming a second-first processing hole (705) that is longitudinally connected to the hollow (710) in the deformation portion (702), the deformation portion (702) or the second contact portion (720) of the second plunger (700) may be processed to form the second-first processing hole (705).

[0132] The second-first machining hole (705) may be formed to penetrate longitudinally from the end of the second plunger (700). The second-first machining hole (705) may provide a passage through which a plating material for plating the inner surface of the side wall (704) forming the hollow (710) of the second body portion (730) or the second plunger (700) is introduced. When viewed from the end of the second plunger (700), the second-first machining hole (705) may be formed in an 'o' shape. The second-first machining hole (705) may be formed by cutting the deformed portion (702) into an 'o' shape by rotation of the drill. The small hollow formed by the second-first machining hole (705) may maintain the same cross-sectional area as it goes toward the end.

[0133] Referring to FIG. 10c, a second-first processing hole (705) can be formed in the deformation step (S220).

[0134] The second-first machining hole (705) may be formed to penetrate longitudinally from the end of the second plunger (700). The second-first machining hole (705) may provide a passage through which a plating material for plating the inner surface of the side wall (704) forming the hollow (710) of the second body portion (730) or the second plunger (700) flows. The second-first machining hole (705) may have any shape. The second-first machining hole (705) may be formed by maintaining the annular ends of the penetrating member in an opposing but non-contact state during the process of forming the deformable portion (702). The small hollow formed by the second-first machining hole (705) may have a cross-sectional area that decreases toward the end.

[0135] Referring to FIG. 10d, in the step of forming a second-second processing hole (706) communicating with a hollow (710) in the side wall (704) of the tubular member (701), the tubular member (701) or the second body portion (730) of the second plunger (700) may be processed to form the second-second processing hole (706).

[0136] The second-second machining hole (706) may be formed to penetrate the side wall (704) of the second plunger (700) in the direction of the central axis. The second-second machining hole (706) may provide a passage through which a plating material for plating the inner surface of the side wall (704) forming the hollow (710) of the second body portion (730) or the second plunger (700) is introduced. When viewed from the side wall (704) of the second plunger (700), the second-second machining hole (706) may be formed in an 'o' shape. The second-second machining hole (706) may be formed by cutting the tubular member (701) or the second body portion (730) in an 'o' shape by rotation of the drill.

[0137] Continuing, a step of forming a separation prevention portion (740) may be performed by narrowing the hollow (710) of a portion of the tubular member (701). The separation prevention portion (740) may be performed while the first plunger (600) is positioned in the hollow (710) of the second plunger (700). As a result, the first plunger (600) may be prevented from being separated from the second plunger (700) by having the first body end (631) contact the separation prevention portion (740).

[0138] The second contact portion forming step (S230) and the second plunger forming step (S240) can be performed sequentially. Since both forming the second contact portion (720) by machining the deformed portion (702) and forming the outer shape of the second plunger (700) by machining the tubular member (701) are performed through a cutting process, they can be performed simultaneously or at different times by the same or different cutting means.

[0139] Meanwhile, since the deformation step (S220) and the second contact portion forming step (S230) are performed in one end region of the tubular member (701), the gripping part (30) can grip the tubular member (701) in a direction in which one end region of the tubular member (701) is exposed. The second plunger forming step (S240) can be performed in one end region exposed by the gripping part (30) and a part of the second body part (730).

[0140] Next, since the second plunger forming step (S240) is also performed in the other end region of the tubular member (701), the gripping part (30) can grip the tubular member (701) in a direction in which the other end region of the tubular member (701) is exposed. The second plunger forming step (S240) can be performed in the other end region newly exposed by the gripping part (30) and the remaining region of the second body part (730).

[0141] As a comparative example, when the outer shape of the second plunger (700) is formed first and a hollow (710) is formed later in the second plunger (700), scratches may occur on the outer shape of the second plunger (700) due to the gripping force of the gripping portion (30).

[0142] In contrast, the method for manufacturing an electrically conductive pin (10) according to an embodiment of the present invention first forms a second contact portion (720) in a tubular member (701) having a hollow (710) and then forms a second plunger (700) by cutting the outer surface of the side wall (704) of the tubular member (701). Therefore, the outer surface of the second plunger (700) can be prevented from being damaged by the grip portion during the process of forming the hollow (710).

[0143] Even if a scratch occurs by using a tubular member (701) having a hollow (710) or by forming a hollow (710) in a tubular member (701, 101') without a hollow (710), the scratch can be removed later because the outer surface of the side wall (704) of the tubular member (701) is cut.

[0144] In addition, the electrically conductive pin (10) according to the embodiment of the present invention may have a thickness (d3) of the second contact portion (720) greater than the thickness (d4) of the side wall (704) of the second plunger (700) in at least a portion of the second contact portion (720).

[0145] Specifically, the second contact portion (720) may include a section in which the thickness (d3) gradually increases in the direction of the central axis from the side wall (704) of the second plunger (700). The section in which the thickness gradually increases may be the contact section (721) described above.

[0146] Since the tubular member (701) having a thick side wall (704) is plastically deformed to form a deformed portion (702) and a second contact portion (720), and the thick side wall (704) is cut to form a thin side wall (704), the thickness (d3) of at least a portion of the second contact portion (720) may be greater than the thickness (d4) of the side wall (704) of the second plunger (700). Here, the thickness (d3) of the second contact portion (720) may mean the thickness in the direction perpendicular to the inner surface forming the hollow (710) or the inclined hollow (711).

[0147] According to an embodiment of the present invention, the electrically conductive pin (10) can be configured to have a relatively thin side wall (704) of the second plunger (700), thereby enabling a narrow pitch of a plurality of electrically conductive pins (10) provided in the inspection device, and can be prevented from being deformed or damaged by a force applied to the inspection object by configuring the thickness (d3) of the second contact tip to be relatively thick.

[0148] As described above, the present invention has been described with reference to preferred embodiments thereof, but it will be apparent to those skilled in the art that various modifications or variations may be made to the present invention without departing from the spirit and scope of the present invention as set forth in the following claims.

[0149] [Explanation of symbols]

[0150] 10: Electrically conductive pin

[0151] 30: The phage department

[0152] 100, 600: 1st plunger

[0153] 101, 701: Tubular member

[0154] 102, 702: Transformation section

[0155] 104, 704: Side wall

[0156] 105: 1-1 processing hole

[0157] 106: 1st-2nd processing hole

[0158] 110, 710: Hollow

[0159] 111, 711: Slant hollow

[0160] 112: Small hollow

[0161] 120, 620: First contact

[0162] 130, 630: First body part

[0163] 131: Fixed part

[0164] 132: Cutting edge

[0165] 133: Depression

[0166] 140, 740: Anti-detachment section

[0167] 200, 700: 2nd plunger

[0168] 220, 720: Second contact

[0169] 230, 730: Second body part

[0170] 231: Inclined section

[0171] 300, 800: Elasticity

[0172] 621: Contact area

[0173] 631: First body end

[0174] 632: Inclined section

[0175] 633: First Fixed Government

[0176] 705: 2-1 processing hole

[0177] 706: 2nd-2nd processing hole

[0178] 732: Contact area

[0179] 731: Second Fixed Government

Claims

1. A method for manufacturing an electrically conductive pin provided in a testing device for testing the electrical characteristics of a test object, A preparatory step of providing a tubular member in which a hollow space is formed at least for a portion of its length at one end; A deformation step of forming a deformation section by narrowing a hollow corresponding to the one end region of the tubular member; and A method for manufacturing an electrically conductive pin, comprising: a first contact part forming step of forming a first contact part that contacts the test object by processing the above-described deformation part; 2. In paragraph 1, A method for manufacturing an electrically conductive pin, further comprising a first plunger forming step of forming an outer shape of a first plunger by processing the tubular member.

3. In paragraph 1, The above preparation steps are, A method for manufacturing an electrically conductive pin, comprising drilling at least to a certain depth in the above-described section to form the hollow portion.

4. In paragraph 1, In the above transformation step, The above deformation part is, A method for manufacturing an electrically conductive pin, comprising: forming an inclined hollow section whose cross-sectional area gradually decreases from the cross-sectional area of ​​the hollow section.

5. In paragraph 4, The above deformation part is, A method for manufacturing an electrically conductive pin, comprising further including a small hollow portion having a cross-sectional area smaller than the cross-sectional area of ​​the hollow portion.

6. In paragraph 1, The above first contact part forming step is, A method for manufacturing an electrically conductive pin, comprising cutting the above-described deformed portion to form a plurality of cutting-edge portions in the first contact portion.

7. In paragraph 2, The above first plunger forming step is, A method for manufacturing an electrically conductive pin, comprising: a step of processing an outer surface of a side wall of the tubular member to reduce the thickness of the side wall.

8. In paragraph 2, The above first plunger forming step is, A method for manufacturing an electrically conductive pin, comprising: a step of forming a first-first processing hole in the deformed portion and communicating with the hollow portion in the longitudinal direction.

9. In paragraph 2, The above first plunger forming step is, A method for manufacturing an electrically conductive pin, comprising: forming first and second processing holes communicating with the hollow portion on a side surface of the tubular member.

10. A method for manufacturing an electrically conductive pin provided in a testing device for testing the electrical characteristics of a test object, A preparatory step of providing a tubular member having a hollow cavity through which the first plunger moves; A deformation step of forming a deformation section by narrowing a hollow portion corresponding to one end area of ​​the tubular member; and A method for manufacturing an electrically conductive pin, comprising: a second contact part forming step of forming a second contact part that contacts the inspection device by processing the above-described deformation part.

11. In paragraph 10, A method for manufacturing an electrically conductive pin, further comprising a second plunger forming step of forming an outer shape of a second plunger by processing the tubular member.

12. In paragraph 10, In the above transformation step, The above deformation part is, A method for manufacturing an electrically conductive pin, comprising: forming an inclined hollow section whose cross-sectional area gradually decreases from the cross-sectional area of ​​the hollow section.

13. In paragraph 11, The above second plunger forming step is, A method for manufacturing an electrically conductive pin, comprising: a step of processing an outer surface of a side wall of the tubular member to reduce the thickness of the side wall.

14. In paragraph 11, The above second plunger forming step is, A method for manufacturing an electrically conductive pin, comprising: a step of forming a second-first processing hole in the deformation section that is longitudinally connected to the hollow portion or a second-second processing hole in the side surface of the tubular member that is longitudinally connected to the hollow portion; 15. In the electrically conductive pin provided in the testing device for testing the electrical characteristics of the test object, A first plunger having a hollow body and a first contact portion and contacting the test object; a second plunger, at least a portion of which moves along said hollow and contacts said inspection device; and An elastic member is provided in the above hollow space and supported by the first contact member, and connects the first plunger and the second plunger; An electrically conductive pin, wherein at least a portion of the first contact portion has a thickness greater than the thickness of the side wall of the first plunger.

16. In the electrically conductive pin provided in the testing device for testing the electrical characteristics of the test object, A first plunger in contact with the above test material; A second plunger having a hollow and a second contact portion and contacting the inspection device; and An elastic member that accommodates the first plunger therein and connects the first plunger and the second plunger; An electrically conductive pin, wherein at least a portion of the second contact portion has a thickness greater than the thickness of the side wall of the second plunger.

Images