Detection mechanism and coating device

Abstract

The present application relates to the technical field of wafer preparation, and in particular to a detection mechanism and a coating device. The detection mechanism disclosed in the present application comprises a support, a camera, and a light shielding plate; the support is provided with a first obround hole and second obround holes; the camera is connected to the support, the camera is provided with first bolt holes matching the second obround holes, and the camera comprises an operation portion; and the light shielding plate is rotatably connected to the camera, and the light shielding plate is provided with an exposure hole through which at least part of the operation portion is exposed.

Description

Detection mechanism and coating device

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to Chinese patent application No. 202420344015.9, filed on February 23, 2024, entitled “Detection mechanism and coating device,” the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present application belongs to the field of wafer preparation technology, and in particular relates to a detection mechanism and a coating device. Background Art

[0004] In the process of coating wafers, there is a step of identifying the positioning points on the wafer and placing the clamping robot arm and the positioning points in the preset position before coating the wafer.

[0005] However, when the positioning point is offset, the reference point on the wafer will be blocked by the metal film during coating, causing the wafer to fail to align in the subsequent yellow light process due to the inability to identify the reference point, causing the production line to stop and affecting product yield.

[0006] Summary of the Invention

[0007] The embodiments of the present application provide a detection mechanism to improve product yield.

[0008] The first aspect of the present application provides a detection mechanism, including a bracket, a camera and a light shielding plate, wherein the bracket is provided with a first waist-shaped hole and a second waist-shaped hole; the camera is connected to the bracket, and the camera is provided with a first bolt hole matching the second waist-shaped hole, and the camera includes an operating part; the light shielding plate is rotatably connected to the camera, and the light shielding plate is provided with an exposure hole, and at least part of the operating part is exposed from the exposure hole.

[0009] According to any of the aforementioned embodiments of the present application, an arc-shaped hole is further provided on the light shielding plate, and the camera further includes a connecting portion, at least a portion of which is located in the arc-shaped hole and can slide along an extension track of the arc-shaped hole.

[0010] According to any of the aforementioned embodiments of the present application, a plurality of arc-shaped holes are arranged around the exposure hole, and a plurality of connecting portions are arranged in a one-to-one correspondence with the arc-shaped holes.

[0011] According to any of the aforementioned embodiments of the present application, the camera includes a first surface facing the light shielding plate, the operating portion is arranged on the first surface, and the connecting portion is protruded from the first surface.

[0012] According to any of the aforementioned embodiments of the present application, the camera further includes a second surface facing away from the light shielding plate, and the lens of the camera is disposed on the second surface.

[0013] According to any of the aforementioned embodiments of the present application, the bracket includes a first frame and a second frame, the second frame connects the camera and the first frame, the first waist-shaped hole is located in the first frame, and the second waist-shaped hole is located in the second frame.

[0014] According to any of the aforementioned embodiments of the present application, one of the first frame and the second frame is provided with a third waist-shaped hole, and the other is provided with a second bolt hole matching the third waist-shaped hole.

[0015] According to any of the aforementioned embodiments of the present application, the second frame includes a first plate and a second plate connected to each other, the first plate is connected to the first frame, the second plate is connected to the camera, and the first plate is perpendicular to the second plate.

[0016] According to any of the aforementioned embodiments of the present application, it also includes a microprocessor, which is communicatively connected to the camera.

[0017] A second embodiment of the present application provides a coating device, including the above-mentioned detection mechanism, the coating device also includes a cooling chamber, and the detection mechanism is installed in the cooling chamber.

[0018] The inspection mechanism of an embodiment of the present application includes a bracket, a camera, and a light shield. The bracket is provided with a first waist-shaped hole and a second waist-shaped hole. The camera is connected to the bracket and provided with a bolt hole that matches the second waist-shaped hole. The camera includes an operating unit. The light shield is rotatably connected to the camera and provided with an exposure hole in the light shield, through which at least a portion of the operating unit is exposed. This application improves product yield by providing a camera to photograph wafers and comparing the distance between the gripping robot arm and the positioning points on the wafer using the photographs to identify whether the positioning points have shifted. By providing the first and second waist-shaped holes in the bracket and the first bolt hole that matches the second waist-shaped hole in the camera, the position of the bracket and the camera relative to the bracket can be adjusted. The light shield improves the camera's imaging quality, and the light shield is rotatably connected to the camera, allowing the light shield to be adjusted according to actual needs, further improving the camera's imaging quality. By providing the exposure hole in the light shield to expose the operating unit, the light shield does not interfere with the operator's ability to set camera parameters. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0020] FIG1 is a schematic structural diagram of a detection mechanism and a base in some embodiments of the present application;

[0021] FIG2 is a schematic structural diagram of an exemplary detection mechanism;

[0022] FIG3 is a schematic diagram showing a top view of a partial structure of an exemplary wafer and a clamping robot arm;

[0023] FIG4 is a schematic diagram showing a partial structure of an exemplary camera and a bracket;

[0024] FIG5 shows a schematic diagram of the layout of an exemplary coating device.

[0025] Figure numerals: 10, detection mechanism; 20, base; 30, clamping robot; 40, wafer; 41, positioning point; 50, coating device; 51, cooling chamber; 52, loading and unloading chamber; 53, orientation chamber; 54, transition chamber; 55, metal sputtering chamber; 100, bracket; 110, first waist-shaped hole; 120, second waist-shaped hole; 130, first frame; 140, second frame; 141, first plate; 142, second plate; 150, third waist-shaped hole; 160, second bolt hole; 200, camera; 220, operating part; 230, connecting part; 240, first surface; 250, lens; 300, sunshade; 310, exposure hole; 320, arc hole. DETAILED DESCRIPTION

[0026] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present application, rather than to limit the present application. For those skilled in the art, the present application can be implemented without the need for some of these specific details. The following description of the embodiments is merely to provide a better understanding of the present application by illustrating the examples of the present application.

[0027] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or device. In the absence of further limitations, the elements defined by the phrase "comprising..." do not exclude the presence of other identical elements in the process, method, article, or device comprising the elements.

[0028] The applicant found that in the related art, when the positioning point position is offset, the reference point on the wafer will be blocked by the metal film during coating, causing the wafer to fail to align in the subsequent yellow light process due to the inability to identify the reference point, causing the production line to stop and affecting product yield.

[0029] In view of the above problems, the applicant proposed a detection mechanism, including a bracket, a camera and a light shielding plate, the bracket is provided with a first waist-shaped hole and a second waist-shaped hole; the camera is connected to the bracket, the camera is provided with a first bolt hole matching the second waist-shaped hole, and the camera includes an operating part; the light shielding plate is rotatably connected to the camera, the light shielding plate is provided with an exposure hole, and at least part of the operating part is exposed from the exposure hole.

[0030] In the detection mechanism provided by the present application, a camera is set to shoot the wafer, and the distance between the clamping robot arm and the positioning point on the wafer is compared through photos to identify whether the positioning point has shifted, thereby improving the yield of the product. By setting a first waist-shaped hole and a second waist-shaped hole on the bracket, and setting a first bolt hole matching the second waist-shaped hole on the camera, the position of the bracket can be adjusted, and the position of the camera relative to the bracket can also be adjusted. By setting a light shielding plate, the shooting effect of the camera is improved, and the light shielding plate is rotatably connected to the camera, so that the light shielding plate can be adjusted according to actual needs, further improving the shooting effect of the camera. By setting an exposure hole on the light shielding plate to expose the operating part, the light shielding plate does not hinder the operator from setting the parameters of the camera.

[0031] In order to better understand the present application, the detection mechanism and coating device of the present application are described in detail below with reference to the accompanying drawings. In the accompanying drawings, for the convenience of drawing, the dimensions in the drawings are not necessarily proportional to the actual dimensions.

[0032] Please refer to Figures 1 to 3, Figure 1 is a structural schematic diagram of the detection mechanism and base of some embodiments of the present application; Figure 2 is a structural schematic diagram of an example detection mechanism; Figure 3 is a top view partial structural schematic diagram of an example wafer and a clamping robot arm.

[0033] As shown in Figures 1 to 3, an embodiment of the present application provides a detection mechanism 10, comprising a bracket 100, a camera 200, and a light shielding plate 300. The bracket 100 is provided with a first waist-shaped hole 110 and a second waist-shaped hole 120. The camera 200 is connected to the bracket 100 and is provided with a first bolt hole (not shown) that matches the second waist-shaped hole 120. The camera 200 also includes an operating portion 220. The light shielding plate 300 is rotatably connected to the camera 200 and is provided with an exposure hole 310, through which at least a portion of the operating portion 220 is exposed.

[0034] Optionally, the detection mechanism 10 is mounted on the base 20, which is provided with a bolt hole (not shown) that matches the first waist-shaped hole 110. A bolt passing through the first waist-shaped hole 110 and then extending into the bolt hole secures the bracket 100 to the base 20. Adjusting the position of the bolt within the first waist-shaped hole 110 adjusts the position of the bracket 100 relative to the base 20.

[0035] Optionally, the operating portion 220 is used to adjust parameters of the camera 200 . When the light shielding plate 300 rotates relative to the camera 200 , at least a portion of the operating portion 220 is exposed from the exposure hole 310 .

[0036] Optionally, when the gripping robot 30 and wafer 40 are synchronously moved to a specific position, the camera 200 takes photos of the gripping robot 30 and the positioning point 41 on the wafer 40. When the gripping robot 30 and wafer 40 are in a preset position, the distance between the gripping robot 30 and the positioning point 41 should be within a preset value range. If the distance between the gripping robot 30 and the positioning point 41 is not within the preset value range, it can be determined that the positioning point 41 has shifted, and the defective material can then be removed from the production line or the production line can be stopped for inspection.

[0037] Optionally, the sign photographed by the camera 200 can be identified by the naked eye, and the operator can judge whether the positioning point 41 has shifted based on the photo without directly inspecting the wafer 40, thereby improving production efficiency.

[0038] Optionally, the detection mechanism 10 further includes a microprocessor (not shown), which is communicatively connected to the camera 200. The microprocessor can be a mobile terminal, an integrated circuit chip, or the like. The photos taken by the camera 200 are transmitted to the microprocessor, which performs image recognition on the photos, i.e., compares whether the distance between the positioning point 41 in the photo and the clamping robot 30 is within a preset range. When the microprocessor determines that the positioning point 41 has shifted, a signal can be sent through other human-computer interaction modules to alert the operator. Among them, the human-computer interaction module includes at least one of a buzzer, a flash, and a wireless transmitter. Recognizing photos through a microprocessor can further improve the determination rate, thereby improving production efficiency and saving labor costs.

[0039] The detection mechanism 10 provided in the embodiment of the present application includes a bracket 100, a camera 200 and a light shielding plate 300. The bracket 100 is provided with a first waist-shaped hole 110 and a second waist-shaped hole 120. The camera 200 is connected to the bracket 100. The camera 200 is provided with a first bolt hole that matches the second waist-shaped hole 120. The camera 200 includes an operating part 220. The light shielding plate 300 is rotatably connected to the camera 200. The light shielding plate 300 is provided with an exposure hole 310, and at least part of the operating part 220 is exposed from the exposure hole 310. The present application sets a camera 200 to photograph the wafer 40, and compares the distance between the clamping robot 30 and the positioning point 41 on the wafer 40 through the photo to identify whether the positioning point 41 has shifted, thereby improving the yield of the product. By providing a first waist-shaped hole 110 and a second waist-shaped hole 120 on the bracket 100, and providing a first bolt hole on the camera 200 that matches the second waist-shaped hole 120, the position of the bracket 100 can be adjusted, and the position of the camera 200 relative to the bracket 100 can also be adjusted. The provision of a light shielding plate 300 improves the photographic quality of the camera 200. The light shielding plate 300 is rotatably connected to the camera 200, allowing the light shielding plate 300 to be adjusted according to actual needs, further improving the photographic quality of the camera 200. By providing an exposure hole 310 on the light shielding plate 300 to expose the operating unit 220, the light shielding plate 300 does not hinder the operator from setting the parameters of the camera 200.

[0040] In some optional embodiments, the shading plate 300 is further provided with an arc-shaped hole 320 , and the camera 200 further includes a connecting portion 230 , at least a portion of the connecting portion 230 is located in the arc-shaped hole 320 and can slide along an extension track of the arc-shaped hole 320 .

[0041] Optionally, the connecting portion 230 is secured with a nut after passing through the arcuate hole 320, thereby ensuring that the light shielding plate 300 and the camera are inseparable and that the light shielding plate 300 can rotate relative to the camera 200. The exposure hole 310 is circular in shape, and the arcuate hole 320 extends along an arc whose center is coaxial with the center of the exposure hole 310. This ensures that when the connecting portion 230 slides within the arcuate hole 320, the relative position of the exposure hole 310 and the operating portion 220 remains unchanged. The sliding of the connecting portion 230 within the arcuate hole 320 can also be understood as the connection portion 230 being fixed in position, and the arcuate hole 320 sliding relative to the connecting portion 230, i.e., the light shielding plate 300 rotates relative to the camera 200.

[0042] Optionally, a plurality of arc-shaped holes 320 are arranged around the exposure hole 310 , and a plurality of connection portions 230 are arranged in a one-to-one correspondence with the arc-shaped holes 320 .

[0043] In the detection mechanism 10 provided in the embodiment of the present application, an arc-shaped hole 320 is provided on the light shielding plate 300, and a connecting portion 230 that cooperates with the arc-shaped hole 320 is provided on the camera 200, so that the light shielding plate 300 can be rotatably connected to the camera 200. By arranging multiple arc-shaped holes 320 around the exposure hole 310, when the light shielding plate 300 rotates relative to the camera 200, the relative position of the exposure hole 310 and the operating portion 220 remains unchanged, and the operating portion 220 is exposed through the exposure hole 310, so that the light shielding plate 300 does not hinder the operator from setting the parameters of the camera 200.

[0044] In some optional embodiments, the camera 200 includes a first surface 240 facing the light shielding plate 300 , the operating portion 220 is disposed on the first surface 240 , and the connecting portion 230 is protruding from the first surface 240 .

[0045] Optionally, the camera 200 further includes a second surface (not shown) facing away from the sunshade 300, and the lens 250 of the camera 200 is disposed on the second surface. The first surface 240 can be understood as the back side of the camera 200, and the second surface can be understood as the front side of the camera 200, i.e., the lens 250 is located on the side facing away from the sunshade 300.

[0046] Please refer to FIG. 2 and FIG. 4 , FIG. 4 shows a partial structural diagram of an exemplary camera and a bracket.

[0047] As shown in Figures 2 and 4, in some optional embodiments, the bracket 100 includes a first frame body 130 and a second frame body 140, the second frame body 140 connects the camera 200 and the first frame body 130, the first waist-shaped hole 110 is located in the first frame body 130, and the second waist-shaped hole 120 is located in the second frame body 140.

[0048] Optionally, a third waist-shaped hole 150 is provided on one of the first frame 130 and the second frame 140 , and a second bolt hole 160 matching the third waist-shaped hole 150 is provided on the other frame.

[0049] Optionally, the second frame 140 includes a first plate 141 and a second plate 142 connected to each other, the first plate 141 is connected to the first frame 130 , the second plate 142 is connected to the camera 200 , and the first plate 141 and the second plate 142 are perpendicular to each other.

[0050] Optionally, the first plate 141 is perpendicular to the vertical direction, the second plate 142 is perpendicular to the horizontal direction, and the first surface 240 and the second surface are spaced apart in the vertical direction. This allows the orthographic projections of the lens 250 of the camera 200 and the first frame 130 to not overlap in the vertical direction, thereby minimizing the impact of the first frame 130 on the camera 200's field of view.

[0051] Please refer to FIG5 , which shows a schematic layout diagram of an exemplary coating device.

[0052] As shown in Figure 5, the embodiment of the second aspect of the present application provides a coating device 50, including the detection mechanism 10 as in any of the above embodiments. The coating device 50 also includes a cooling chamber 51, and the detection mechanism 10 is installed in the cooling chamber 51. Since the coating device 50 provided by the embodiment of the second aspect of the present application includes the detection mechanism 10 of any of the above embodiments of the first aspect, the coating device 50 provided by the embodiment of the second aspect of the present application has the beneficial effects of the detection mechanism 10 of any of the above embodiments of the first aspect, which will not be repeated here.

[0053] Optionally, the coating device 50 also includes a material loading and unloading chamber 52, an orientation chamber 53, a transition chamber 54 and a metal sputtering chamber 55. The wafer 40 enters the coating device 50 from the material loading and unloading chamber 52, and then the wafer 40 is transported to the orientation chamber 53. After identifying the positioning point 41, the clamping robot 30 clamps the wafer 40. Thereafter, the clamping robot 30 and the wafer 40 pass through the transition chamber 54 to enter the metal sputtering chamber 55 for coating. After that, the clamping robot 30 and the wafer 40 are cooled in the cooling chamber 51, and then the wafer 40 is transported out of the coating device 50 through the material loading and unloading chamber 52 and transported to the next process. During this process, the detection mechanism 10 is installed in the cooling chamber 51, and the clamping robot 30 and the wafer 40 are photographed and identified by the detection mechanism 10 when they are cooling in the cooling chamber 51 to prevent defective materials from flowing into the next process.

[0054] The above description is only a specific embodiment of the present application. Those skilled in the art will clearly understand that for the convenience and brevity of description, the specific working processes of the systems, modules and units described above can refer to the corresponding processes in the aforementioned method embodiments, and will not be repeated here. It should be understood that the scope of protection of the present application is not limited thereto. Any person skilled in the art can easily think of various equivalent modifications or replacements within the technical scope disclosed in the present application, and these modifications or replacements should be included in the scope of protection of the present application.

Claims

1. A detection mechanism, comprising: A bracket, wherein the bracket is provided with a first waist-shaped hole and a second waist-shaped hole; a camera connected to the bracket, the camera being provided with a first bolt hole matching the second waist-shaped hole, and the camera including an operating portion; A light shielding plate is rotatably connected to the camera, and an exposure hole is provided on the light shielding plate, through which at least a portion of the operating portion is exposed.

2. The detection mechanism according to claim 1, wherein: The light shield is further provided with an arc-shaped hole, and the camera further comprises a connecting portion, at least a portion of which is located in the arc-shaped hole and can slide along an extension track of the arc-shaped hole.

3. The detection mechanism according to claim 2, wherein: The plurality of arc-shaped holes are arranged around the exposure hole, and the plurality of connecting portions are arranged in one-to-one correspondence with the arc-shaped holes.

4. The detection mechanism according to claim 2, wherein: The camera includes a first surface facing the light shielding plate, the operating portion is arranged on the first surface, and the connecting portion is protrudingly arranged on the first surface.

5. The detection mechanism according to claim 4, wherein: The camera further includes a second surface facing away from the light shielding plate, and the lens of the camera is arranged on the second surface.

6. The detection mechanism according to claim 1, wherein: The bracket includes a first frame and a second frame, the second frame connects the camera and the first frame, the first waist-shaped hole is located in the first frame, and the second waist-shaped hole is located in the second frame.

7. The detection mechanism according to claim 6, wherein: A third waist-shaped hole is provided on one of the first frame and the second frame, and a second bolt hole matching the third waist-shaped hole is provided on the other frame.

8. The detection mechanism according to claim 6, wherein: The second frame includes a first plate and a second plate connected to each other, the first plate is connected to the first frame, the second plate is connected to the camera, and the first plate is perpendicular to the second plate.

9. The detection mechanism according to claim 1, wherein: Also included is a microprocessor communicatively coupled to the camera.

10. A film coating device comprising the detection mechanism according to any one of claims 1 to 9, wherein: The coating device further includes a cooling chamber, and the detection mechanism is installed in the cooling chamber.

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