Vacuum chamber

Abstract

A vacuum chamber, comprising a chamber body (1) and a chamber cover (2), the chamber cover (2) covering the chamber body (1). The vacuum chamber further comprises at least one first vacuum-breaking mechanism (3) and / or at least one second vacuum-breaking mechanism (4). The first vacuum-breaking mechanism (3) is disposed on the chamber cover (2), the first vacuum-breaking mechanism (3) is in communication with a first air inlet (21) on the chamber cover (2), and the first vacuum-breaking mechanism (3) comprises a first air intake plate (31) and a second air intake plate (32). A plurality of first air inlet holes (311) spaced apart on the first air intake plate (31) and a plurality of second air inlet holes (321) spaced apart on the second air intake plate (32) are staggeredly arranged in the horizontal direction. The second vacuum-breaking mechanism (4) is disposed on an inner side of a bottom wall of the chamber body (1), the second vacuum-breaking mechanism (4) is in communication with a second air inlet (15) on the chamber body (1), and the second vacuum-breaking mechanism (4) comprises a third air intake plate (41) and a fourth air intake plate (42). A plurality of third air inlet holes (411) spaced apart on the third air intake plate (41) and a plurality of fourth air inlet holes (421) spaced apart on the fourth air intake plate (42) are staggeredly arranged in the horizontal direction.

Description

Vacuum chamber

[0001] This application claims priority to the Chinese patent application filed with the China Patent Office on March 8, 2024 with application number 202410265760.9, and claims priority to the Chinese patent application filed with the China Patent Office on March 8, 2024 with application number 202420448868.7. The entire contents of the above applications are incorporated by reference into this application. Technical Field

[0002] The present application relates to the field of vacuum coating technology, for example, to a vacuum cavity. Background Art

[0003] When vacuum coating equipment coats products such as silicon wafers and glass substrates within a chamber, the chamber needs to provide a vacuum environment for the products. In related art, the products to be coated need to be transferred in and out of the chamber through a loading chamber and an unloading chamber. Therefore, the loading chamber and the unloading chamber need to cyclically switch between a vacuum environment and a standard atmospheric environment to allow the products to be transferred in and out of the loading chamber. For example, before the products to be coated enter the vacuum coating equipment, the loading chamber must be vacuum-broken to convert the vacuum environment within the loading chamber to a standard atmospheric environment, facilitating the transfer of the products to the loading chamber. The loading chamber is then vacuum-pumped, and the products to be coated are transferred to the process chamber for the coating process. Furthermore, after the products have completed the coating process and are transferred out of the vacuum coating equipment through the unloading chamber, the unloading chamber must be vacuum-broken to convert the vacuum environment within the unloading chamber to a standard atmospheric environment, facilitating the transfer of the coated products out of the chamber. The unloading chamber is then vacuum-pumped again, and this cycle is repeated to achieve continuous production. However, when the vacuum is broken in the cavity by the vacuum breaking mechanism, the loading cavity and the unloading cavity are very sensitive to the flow of air in a vacuum environment. If the flow rate or impact force of the airflow is large, it is easy to cause the internal dust to be raised, contaminating the product and the carrier board carrying the product. In particular, when the vacuum is broken in the unloading cavity, the airflow directly contacts the carrier board and the product surface, which can easily cause air hole marks on the surface of the product or even cause product fragments, affecting production quality.

[0004] With the development of technology, there is a related technology that sets a diversion component to divert the incoming airflow, but multiple diversion channels need to be set on the diversion component, which makes the structure of the diversion component more complicated and greatly increases the difficulty of processing and production.

[0005] Summary of the Invention

[0006] The present application provides a vacuum cavity, which can reduce the flow rate of the airflow and the impact of the airflow on the interior of the vacuum cavity when the vacuum is broken, and has a simple structure and is easy to process and produce.

[0007] The present application provides a vacuum chamber, comprising:

[0008] Cavity body;

[0009] A cavity cover, the cavity cover is arranged on the cavity body, and a first air inlet is opened on the cavity cover;

[0010] At least one first vacuum breaking mechanism is disposed on the chamber cover, the first vacuum breaking mechanism is in communication with the first air inlet, the first vacuum breaking mechanism includes a first air inlet plate and a second air inlet plate, a plurality of first air inlet holes are spaced apart on the first air inlet plate, a plurality of second air inlet holes are spaced apart on the second air inlet plate, and the plurality of second air inlet holes are staggered with the plurality of first air inlet holes in a horizontal direction;

[0011] and / or,

[0012] A second air inlet is provided on the cavity body, and the vacuum cavity also includes at least one second vacuum breaking mechanism, which is arranged on the inner side of the bottom wall of the cavity body, and is connected to the second air inlet. The second vacuum breaking mechanism includes a third air inlet plate and a fourth air inlet plate, and a plurality of third air inlet holes are spaced apart on the third air inlet plate, and a plurality of fourth air inlet holes are spaced apart on the fourth air inlet plate, and the plurality of third air inlet holes and the plurality of fourth air inlet holes are staggered along the horizontal direction.

[0013] In some embodiments, the first vacuum breaking mechanism further comprises:

[0014] A first mounting plate, the first mounting plate is arranged on the cavity cover, the first air intake plate and the second air intake plate are both connected to the first mounting plate, and the first air intake plate, the first mounting plate and the cavity cover are jointly arranged to form a first air intake space, the first air intake plate, the second air intake plate and the first mounting plate are jointly arranged to form a second air intake space, and the first air inlet, the first air intake space and the second air intake space are connected in sequence.

[0015] In some embodiments, the second vacuum breaking mechanism further comprises:

[0016] The second mounting plate is arranged on the bottom wall, the third air intake plate and the fourth air intake plate are both connected to the second mounting plate, and the third air intake plate, the second mounting plate and the bottom wall are jointly enclosed to form a third air intake space, the third air intake plate, the fourth air intake plate and the second mounting plate are jointly enclosed to form a fourth air intake space, and the second air inlet, the third air intake space and the fourth air intake space are connected in sequence.

[0017] In some embodiments, the second vacuum breaking mechanism also includes a second mounting enclosure, an air intake channel and a vacuum breaking back plate, one end of the air intake channel is connected to the second air inlet, and the other end is connected to the vacuum breaking back plate, the third air intake plate, the fourth air intake plate and the vacuum breaking back plate are all connected to the second mounting enclosure, and the third air intake plate, the second mounting enclosure and the vacuum breaking back plate are jointly arranged to form a third air intake space, the third air intake plate, the fourth air intake plate and the second mounting enclosure are jointly arranged to form a fourth air intake space, and the second air inlet, the air intake channel, the third air intake space and the fourth air intake space are connected in sequence.

[0018] In some embodiments, an exhaust port is provided on the bottom wall, the vacuum chamber includes a plurality of second vacuum breaking mechanisms arranged at intervals, a first exhaust channel is formed between two adjacent second vacuum breaking mechanisms, and the first exhaust channel is connected to the exhaust port.

[0019] In some embodiments, the vacuum chamber includes four second vacuum breaking mechanisms arranged at intervals, a cross-shaped first vacuum breaking channel is formed between the four second vacuum breaking mechanisms, and a second vacuum breaking channel connected to the first vacuum channel is formed between the outer wall of the second vacuum breaking mechanism and the side wall of the chamber body, and the central intersection area of ​​the first vacuum breaking channel is opposite to the vacuum port located at the center of the bottom wall.

[0020] In some embodiments, the height of the first cross-shaped air extraction channel is 30 mm to 200 mm.

[0021] In some embodiments, the first vacuum breaking mechanism further includes a first locking connector configured to detachably connect the first air intake plate and the second air intake plate to the first mounting enclosure.

[0022] In some embodiments, the first mounting panel and the second air intake panel are integrally formed.

[0023] In some embodiments, the second vacuum breaking mechanism further includes a second locking connector configured to detachably connect the third air intake plate and the fourth air intake plate to the second mounting enclosure.

[0024] In some embodiments, the second mounting panel and the fourth air intake plate are integrally formed.

[0025] In some embodiments, the first vacuum breaking mechanism further includes a first supporting connection member, wherein the first supporting connection member is supported and connected between the first air intake plate and the second air intake plate;

[0026] and / or,

[0027] The second vacuum breaking mechanism further includes a second supporting connection member, which is supported and connected between the third air intake plate and the fourth air intake plate.

[0028] In some embodiments, the first air inlet hole and the third air inlet hole are straight holes or trumpet holes; the second air inlet hole and the fourth air inlet hole are straight holes or trumpet holes.

[0029] In some embodiments, the first air inlet hole and the third air inlet hole are circular holes, and the second air inlet hole and the fourth air inlet hole are elongated holes.

[0030] In some embodiments, the number of the first vacuum breaking mechanism is one, and the number of the second vacuum breaking mechanism is four.

[0031] In some embodiments, the number of the first vacuum breaking mechanisms is four, and the number of the second vacuum breaking mechanisms is four. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] FIG1 is a cross-sectional view of the structure of a vacuum chamber provided in Example 1 of the present application;

[0033] FIG2 is a bottom view of the first vacuum breaking mechanism provided in Example 1 of the present application;

[0034] FIG3 is a cross-sectional view of the structure of the first vacuum breaking mechanism provided in Example 1 of the present application;

[0035] FIG4 is an exploded view of the structure of the first vacuum breaking mechanism provided in Example 1 of the present application;

[0036] FIG5 is a cross-sectional view of the structure of the second vacuum breaking mechanism provided in Example 1 of the present application;

[0037] FIG6 is a top view of the cavity body provided in Example 1 of the present application;

[0038] FIG7 is a bottom view of the cavity cover provided in Example 1 of the present application;

[0039] FIG8 is a cross-sectional view of the structure of the vacuum chamber provided in Example 2 of the present application;

[0040] FIG9 is a cross-sectional view of the structure of the vacuum chamber provided in Example 2 of the present application;

[0041] FIG10 is a cross-sectional view of the structure of the second vacuum breaking mechanism provided in Example 2 of the present application;

[0042] FIG11 is a cross-sectional view of the structure of the first vacuum breaking mechanism provided in Example 3 of the present application;

[0043] FIG12 is a cross-sectional view of the structure of the second vacuum breaking mechanism provided in Example 3 of the present application.

[0044] In the picture:

[0045] 1. Cavity body; 11. Air extraction port; 12. First air extraction channel; 13. Bottom wall; 14. Side wall; 15. Second air inlet; 16. Second air extraction channel;

[0046] 2. Cavity cover; 21. First air inlet;

[0047] 3. First vacuum breaking mechanism; 31. First air inlet plate; 311. First air inlet hole; 32. Second air inlet plate; 321. Second air inlet hole; 33. First mounting panel; 34. First locking connector; 35. First supporting connector; 36. First air inlet space; 37. Second air inlet space;

[0048] 4. Second vacuum breaking mechanism; 41. Third air inlet plate; 411. Third air inlet hole; 42. Fourth air inlet plate; 421. Fourth air inlet hole; 43. Second mounting panel; 44. Air inlet channel; 45. Vacuum breaking back plate; 46. Third air inlet space; 47. Fourth air inlet space; 48. Second locking connector; 49. Second supporting connector;

[0049] 5. Air extraction mechanism. DETAILED DESCRIPTION

[0050] In the description of this application, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and can refer to internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0051] In this application, unless otherwise expressly provided, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Furthermore, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above and obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below and obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0052] In the description of this embodiment, terms such as "upper," "lower," "left," and "right" are used to refer to positions or locations based on those shown in the accompanying drawings. These terms are intended solely to facilitate description and simplify operation, and are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0053] Example 1

[0054] When the vacuum coating equipment coats silicon wafers, glass substrates and other products in the cavity, the cavity needs to provide a vacuum environment for the products. After the vacuum coating equipment completes coating the products, the cavity needs to be broken to convert the vacuum environment in the cavity into a standard atmospheric environment, so that the coated products can be transported out of the cavity, and the next product to be coated can be transported into the cavity to achieve continuous production. In the related art, when the vacuum is broken in the cavity by the vacuum breaking mechanism, in the vacuum environment, the carrier plate in the cavity and the products carried by the carrier plate are very sensitive to the flow of air. When the flow rate or impact force of the air flow is large, it is easy to cause air hole marks on the surface of the carrier plate and the product, or even cause product fragments, affecting production quality. With the development of technology, there is a diversion component in the related art to divert the incoming airflow, but multiple diversion channels need to be set on the diversion component, which makes the structure of the diversion component relatively complex, greatly increasing the difficulty of processing and production.

[0055] As shown in Figures 1 to 5, this embodiment provides a vacuum cavity, which is a loading cavity or an unloading cavity. The vacuum cavity includes a cavity body 1, a cavity cover 2, at least one first vacuum breaking mechanism 3 and at least one second vacuum breaking mechanism 4, wherein the cavity cover 2 is provided on the cavity body 1, a first air inlet 21 is provided on the cavity cover 2, the first vacuum breaking mechanism 3 is provided on the cavity cover 2, the first vacuum breaking mechanism 3 is connected to the first air inlet 21, the first vacuum breaking mechanism 3 includes a first air inlet plate 31 and a second air inlet plate 32, a plurality of first air inlet holes 311 are spaced apart on the first air inlet plate 31, a plurality of second air inlet holes 321 are spaced apart on the second air inlet plate 32, and a plurality of second air inlet holes 321 are spaced apart on the second air inlet plate 32. The hole 321 and the multiple first air inlet holes 311 are staggered in the horizontal direction, a second air inlet 15 is provided on the cavity body 1, and the second vacuum breaking mechanism 4 is arranged on the inner side of the bottom wall 13 of the cavity body 1. The second vacuum breaking mechanism 4 is connected to the second air inlet 15. The second vacuum breaking mechanism 4 includes a third air inlet plate 41 and a fourth air inlet plate 42. A plurality of third air inlet holes 411 are spaced apart on the third air inlet plate 41, and a plurality of fourth air inlet holes 421 are spaced apart on the fourth air inlet plate 42. The multiple third air inlet holes 411 and the multiple fourth air inlet holes 421 are staggered in the horizontal direction.

[0056] The vacuum cavity provided in this embodiment, when the vacuum cavity is broken by the first vacuum breaking mechanism 3, the airflow enters the first vacuum breaking mechanism 3 through the first air inlet 21 on the cavity cover 2, and first passes through the first air inlet holes 311 on the first air inlet plate 31 in the first vacuum breaking mechanism 3. The airflow coming out of the first air inlet holes 311 will be blocked by the second air inlet plate 32 and then enter the cavity body 1 through the second air inlet holes 321 on the second air inlet plate 32. The above process forces the airflow to be deflected laterally, effectively reducing the flow rate of the airflow and the impact of the airflow on the inside of the vacuum cavity, thereby reducing the influence of the upper airflow on the carrier plate and products in the vacuum cavity, and ensuring production quality. When the vacuum chamber is broken by the second vacuum breaking mechanism 4, the airflow enters the second vacuum breaking mechanism 4 through the second air inlet 15 on the chamber body 1. In the second vacuum breaking mechanism 4, it first passes through the third air inlet holes 411 on the third air inlet plate 41. The airflow coming out of the third air inlet holes 411 will be blocked by the fourth air inlet plate 42 and then enter the chamber body 1 through the fourth air inlet holes 421 on the fourth air inlet plate 42. The above process forces the airflow to flow laterally, effectively reducing the flow rate of the airflow and the impact of the airflow on the interior of the vacuum chamber, thereby reducing the impact of the lower airflow on the carrier plate and products in the vacuum chamber, and ensuring production quality. In addition, the structural design of the above-mentioned first vacuum breaking mechanism 3 and the second vacuum breaking mechanism 4 only needs to ensure that the air inlet holes on the two air inlet plates in the first vacuum breaking mechanism 3 are staggered in the horizontal direction and the air inlet holes on the two air inlet plates in the second vacuum breaking mechanism 4 are staggered in the horizontal direction, which makes the structure simple and also convenient for processing and production.

[0057] In this embodiment, a second air inlet 15 is provided on the bottom wall 13 of the cavity body 1, and the first vacuum breaking mechanism 3 and the second vacuum breaking mechanism 4 are arranged at intervals in the vertical direction. The first vacuum breaking mechanism 3 and the second vacuum breaking mechanism 4 respectively perform vacuum breaking operations from the top and bottom of the vacuum cavity, effectively improving the vacuum breaking efficiency of the vacuum cavity. In other embodiments, the first vacuum breaking mechanism 3 can be provided only on the cavity cover 2 to perform vacuum breaking operations on the vacuum cavity, or the second vacuum breaking mechanism 4 can be provided only on the inner side of the bottom wall 13 to perform vacuum breaking operations on the vacuum cavity. In addition, after the vacuum breaking operation of the vacuum cavity is completed, when it is necessary to convert the atmospheric environment inside the vacuum cavity into a vacuum environment, it can be done by closing the valve of the air inlet pipe connecting the first air inlet 21 and the second air inlet 15.

[0058] In this embodiment, the first air intake plate 31 and the second air intake plate 32 are arranged at intervals in the up-down direction (i.e., the vertical direction), and the first air intake plate 31 is located above the second air intake plate 32. In addition, in this embodiment, the third air intake plate 41 and the fourth air intake plate 42 are also arranged at intervals in the up-down direction (i.e., the vertical direction), and the fourth air intake plate 42 is located above the third air intake plate 41.

[0059] In this embodiment, as shown in Figures 2 and 4 , the first air inlet 311 is a circular hole, and the second air inlet 321 is an elongated hole. By designing the first air inlet 311 as a circular hole and the second air inlet 321 as an elongated hole, the second air inlet plate 32 improves the blocking effect of the airflow from the first air inlet 311, ensuring that the airflow discharged through the second air inlet 321 is laterally deflected and the flow rate of the air discharged through each second air inlet 321 is more uniform. Optionally, in this embodiment, both the first air inlet plate 31 and the second air inlet plate 32 are rectangular plates. Presetly, the first side of the first air inlet plate 31 extends in the first side direction, the second side of the first air inlet plate 31 extends in the second side direction, and the first and second sides are perpendicular to each other. The second air inlet holes 321 extend along the first side direction, and multiple second air inlet holes 321 are spaced apart along the second side direction. Multiple first air inlet holes 311 are arranged in an array on the first air inlet plate 31. The multiple first air inlet holes 311 spaced apart along the first side direction form a first air inlet hole group. Each second air inlet hole 321 is positioned directly opposite the area between two adjacent first air inlet hole groups, thereby ensuring the first vacuum breaking mechanism 3 effectively blocks and weakens airflow. Optionally, in this embodiment, the width of the second air inlet holes 321 along the second side direction is 1 mm to 40 mm, and the spacing between two adjacent second air inlet holes 321 is 1 mm to 40 mm. Optionally, in this embodiment, the first air inlet hole 311 and the second air inlet hole 321 are both straight holes, that is, the first air inlet hole 311 and the second air inlet hole 321 have the same diameter along their through-going direction. In this embodiment, the diameter of the first air inlet hole 311 is 1 mm to 15 mm. In other embodiments, the first air inlet hole 311 and the second air inlet hole 321 may also be in the form of trumpet holes.

[0060] In this embodiment, the second vacuum breaker mechanism 4 is similar in structure to the first vacuum breaker mechanism 3 and is symmetrically arranged. For a detailed breakdown, see the first vacuum breaker mechanism 3. The third air inlet 411 is a circular hole, while the fourth air inlet 421 is an elongated hole. This improves the blocking effect of the fourth air inlet plate 42 on the airflow exiting the third air inlet 411, ensuring that the airflow discharged through the fourth air inlet 421 is laterally deflected and the flow rate of the air discharged through each fourth air inlet 421 is more uniform. Optionally, in this embodiment, the third air inlet plate 41 and the fourth air inlet plate 42 are both rectangular plates. Presetly, the first side of the fourth air inlet plate 42 extends in the direction of the third side, the second side of the fourth air inlet plate 42 extends in the direction of the fourth side, and the first side and the second side are perpendicular to each other. The fourth air inlet holes 421 extend along the third side, and a plurality of fourth air inlet holes 421 are spaced apart along the fourth side. A plurality of third air inlet holes 411 are arranged in an array on the third air inlet plate 41. The plurality of third air inlet holes 411 spaced apart along the third side form a second air inlet hole group. Each fourth air inlet hole 421 is positioned directly opposite the area between two adjacent second air inlet hole groups, thereby ensuring that the second vacuum breaker 4 has the effect of blocking and weakening airflow. Optionally, in this embodiment, the width of the fourth air inlet holes 421 along the fourth side is 1 mm to 40 mm, and the spacing between two adjacent fourth air inlet holes 421 is 1 mm to 40 mm. Optionally, in this embodiment, the third air inlet hole 411 and the fourth air inlet hole 421 are both straight holes, i.e., the third air inlet hole 411 and the fourth air inlet hole 421 have the same diameter along their through-going direction. In this embodiment, the diameter of the third air inlet hole 411 is 1 mm to 15 mm. In other embodiments, the third air inlet hole 411 and the fourth air inlet hole 421 may also be in the form of a trumpet hole.

[0061] As shown in Figures 1 and 3, the first vacuum breaking mechanism 3 also includes a first mounting plate 33, which is arranged on the chamber cover 2. The first air intake plate 31 and the second air intake plate 32 are both connected to the first mounting plate 33, and the first air intake plate 31, the first mounting plate 33 and the chamber cover 2 are jointly arranged to form a first air intake space 36, and the first air intake plate 31, the second air intake plate 32 and the first mounting plate 33 are jointly arranged to form a second air intake space 37, and the first air inlet 21, the first air intake space 36 and the second air intake space 37 are connected in sequence. When the vacuum chamber is broken by the first vacuum breaking mechanism 3, the airflow entering through the first air inlet 21 on the chamber cover 2 first enters the first air inlet space 36, and after the airflow is initially decelerated and weakened, it enters the second air inlet space 37 through the first air inlet holes 311 on the first air inlet plate 31. After being blocked by the second air inlet plate 32, the airflow is further weakened, and then enters the interior of the vacuum chamber through the second air inlet holes 321 on the second air inlet plate 32, further reducing the flow rate of the airflow and the impact of the airflow on the interior of the vacuum chamber.

[0062] Optionally, in this embodiment, the vertical gap between the first air intake plate 31 and the cavity cover 2 is 1 mm to 15 mm. Exemplarily, the vertical gap between the first air intake plate 31 and the cavity cover 2 can be 1 mm, 3 mm, 5 mm, 7 mm, 8 mm, 10 mm, 12 mm, 14 mm, or 15 mm. Furthermore, the vertical gap between the second air intake plate 32 and the first air intake plate 31 is 1 mm to 15 mm. Exemplarily, the vertical gap between the second air intake plate 32 and the first air intake plate 31 can be 1 mm, 3 mm, 5 mm, 7 mm, 8 mm, 10 mm, 12 mm, 14 mm, or 15 mm.

[0063] Optionally, the first mounting panel 33 and the second air intake plate 32 may be integrally formed, thereby facilitating the production and processing of the entire first vacuum breaker mechanism 3. Alternatively, in other embodiments, the first mounting panel 33 and the second air intake plate 32 may also be two components that are detachably connected.

[0064] Optionally, as shown in Figure 3, the first vacuum breaker mechanism 3 further includes a first locking connector 34, which is configured to detachably connect the first and second air inlet plates 31, 32 to the first mounting panel 33. In some embodiments, the first locking connector 34 may be a bolt that passes through the first mounting panel 33 and then is threadedly connected to the first air inlet plate 31. Bolts offer the advantages of reliable connection and low cost. In other embodiments, the first locking connector 34 may also be a screw or other connector.

[0065] In this embodiment, as shown in Figures 1 and 5, the second vacuum breaking mechanism 4 also includes a second mounting plate 43, the second mounting plate 43 is arranged on the bottom wall 13, the third air intake plate 41 and the fourth air intake plate 42 are both connected to the second mounting plate 43, and the third air intake plate 41, the second mounting plate 43 and the bottom wall 13 are jointly enclosed to form a third air intake space 46, the third air intake plate 41, the fourth air intake plate 42 and the second mounting plate 43 are jointly enclosed to form a fourth air intake space 47, and the second air inlet 15, the third air intake space 46 and the fourth air intake space 47 are connected in sequence. When the vacuum chamber is broken by the second vacuum breaking mechanism 4, the airflow entering through the second air inlet 15 on the bottom wall 13 first enters the third air inlet space 46, and after the airflow is initially decelerated and weakened, it enters the fourth air inlet space 47 through the third air inlet holes 411 on the third air inlet plate 41. After being blocked by the fourth air inlet plate 42, the airflow is further weakened, and then enters the interior of the vacuum chamber through the fourth air inlet hole 421 on the fourth air inlet plate 42, further reducing the flow rate of the airflow and the impact of the airflow on the interior of the vacuum chamber.

[0066] Optionally, in this embodiment, the gap between the third air intake plate 41 and the fourth air intake plate 42 in the vertical direction is 1 mm to 15 mm. For example, the gap between the third air intake plate 41 and the fourth air intake plate 42 in the vertical direction can be 1 mm, 3 mm, 5 mm, 7 mm, 8 mm, 10 mm, 12 mm, 14 mm, or 15 mm.

[0067] Optionally, the second mounting panel 43 and the fourth air intake plate 42 may be integrally formed, thereby facilitating the production and processing of the entire second vacuum breaker mechanism 4. Alternatively, in other embodiments, the second mounting panel 43 and the fourth air intake plate 42 may also be two components that are detachably connected.

[0068] Optionally, as shown in Figure 5 , the second vacuum breaker mechanism 4 further includes a second locking connector 48 , which is configured to detachably connect the third and fourth air inlet plates 41 and 42 to the second mounting panel 43 . In some embodiments, the second locking connector 48 may be a bolt that passes through the second mounting panel 43 and then is threadedly connected to the third air inlet plate 41 . Bolts offer the advantages of reliable connection and low cost. In other embodiments, the second locking connector 48 may also be a screw or other connector.

[0069] In addition, as shown in FIG1 , the vacuum chamber provided in this embodiment further includes an exhaust mechanism 5 , which can extract gas from the interior of the chamber body 1 , thereby converting the vacuum chamber from a standard atmospheric environment to a vacuum environment. The exhaust mechanism 5 can have the specific structure of an exhaust mechanism in related art.

[0070] Optionally, an air extraction port 11 is formed on the bottom wall 13, and the air extraction mechanism 5 is connected to the air extraction port 11. The vacuum chamber includes a plurality of second vacuum breaking mechanisms 4 arranged at intervals, and a first air extraction channel 12 is formed between two adjacent second vacuum breaking mechanisms 4. The first air extraction channel 12 is connected to the air extraction port 11. When gas is extracted from the interior of the chamber body 1 by the air extraction mechanism 5, the gas inside the chamber body 1 is collected at the air extraction port 11 through the first air extraction channel 12 formed between the two adjacent second vacuum breaking mechanisms 4, and then extracted by the air extraction mechanism 5. As a result, the gas and dust inside the chamber body 1 can be quickly collected at the air extraction port 11, thereby improving the gas extraction speed.

[0071] Optionally, in this embodiment, as shown in FIG6 , the vacuum chamber includes four second vacuum breaker mechanisms 4 arranged at intervals. A cross-shaped first exhaust channel 12 is formed between the four second vacuum breaker mechanisms 4. Furthermore, a second exhaust channel 16 communicating with the first exhaust channel 12 is formed between the outer peripheral walls of the second vacuum breaker mechanisms 4 and the sidewalls 14 of the chamber body 1. The central intersection of the first exhaust channels 12 directly faces the exhaust port 11 located at the center of the bottom wall 13. When the interior of the chamber body 1 is evacuated by the exhaust mechanism 5, the airflow within the chamber body 1 drives dust downward from the second exhaust channels 16 surrounding the chamber body 1 and into the first exhaust channel 12. The dust then rapidly converges toward the center of the cross-shaped first exhaust channel 12 and is ultimately discharged through the exhaust port 11. This prevents the chaotic flow of dust and airflow within the chamber body 1, effectively improving the extraction efficiency and effectiveness of the airflow and dust, and preventing dust from contaminating the chamber body 1.

[0072] Optionally, the height of the cross-shaped first exhaust channel 12 is 30 mm to 200 mm. Optionally, the height of the cross-shaped first exhaust channel 12 can be 30 mm, 35 mm, 40 mm, 45 mm, 50 mm, 60 mm, 70 mm, 80 mm, 90 mm, 100 mm, 150 mm or 200 mm. The above setting of the values ​​can ensure that the cavity body 1 is quickly evacuated to a vacuum state, thereby improving the exhaust speed.

[0073] Optionally, in this embodiment, as shown in FIG7 , there are four first vacuum breaking mechanisms 3 , which are arranged in a rectangular shape. Optionally, in other embodiments, there may be only one first vacuum breaking mechanism 3 . In this case, there may be multiple first air inlets 21 on the chamber cover 2 , all of which are connected to the first vacuum breaking mechanism 3 .

[0074] Example 2

[0075] The vacuum chamber provided in this embodiment is substantially the same as that in the first embodiment. The difference between the vacuum chamber provided in this embodiment and the first embodiment is that:

[0076] As shown in Figures 8 to 10, the second vacuum breaking mechanism 4 also includes a second mounting enclosure 43, an air intake channel 44 and a vacuum breaking back plate 45, wherein one end of the air intake channel 44 is connected to the second air inlet 15, and the other end is connected to the vacuum breaking back plate 45, the third air intake plate 41, the fourth air intake plate 42 and the vacuum breaking back plate 45 are all connected to the second mounting enclosure 43, and the third air intake plate 41, the second mounting enclosure 43 and the vacuum breaking back plate 45 are jointly enclosed to form a third air intake space 46, the third air intake plate 41, the fourth air intake plate 42 and the second mounting enclosure 43 are jointly enclosed to form a fourth air intake space 47, and the second air inlet 15, the air intake channel 44, the third air intake space 46 and the fourth air intake space 47 are connected in sequence. When the vacuum chamber is broken by the second vacuum breaking mechanism 4, the airflow entering through the second air inlet 15 on the bottom wall 13 first enters the third air inlet space 46 through the air inlet channel 44, and then enters the fourth air inlet space 47 through the third air inlet holes 411 on the third air inlet plate 41 after preliminary deceleration and weakening of the airflow. After being blocked by the fourth air inlet plate 42, the airflow is further weakened, and then enters the interior of the vacuum chamber through the fourth air inlet hole 421 on the fourth air inlet plate 42, further reducing the flow rate of the airflow and the impact of the airflow on the interior of the vacuum chamber.

[0077] In this embodiment, as shown in FIG. 8 , the second vacuum breaking mechanisms 4 are arranged at intervals, and a first air extraction channel 12 is formed between adjacent second vacuum breaking mechanisms 4 .

[0078] Alternatively, in this embodiment, as shown in FIG9 , the second vacuum breaking mechanisms 4 can be directly connected, without forming the first exhaust channel 12 between the multiple second vacuum breaking mechanisms 4. Their arrangement is the same as that of the multiple first vacuum breaking mechanisms 3 located on the chamber cover 2. Alternatively, in this embodiment, a single second vacuum breaking mechanism 4 can be directly used.

[0079] Optionally, in this embodiment, as shown in Figure 10, the second mounting panel 43 and the fourth air intake plate 42 are integrally formed parts, the third air intake plate 41 and the second mounting panel 43 are detachably connected by a second locking connector 48, and the vacuum breaking back plate 45 and the second mounting panel 43 are also detachably connected by a second locking connector 48.

[0080] Example 3

[0081] The vacuum chamber provided in this embodiment is substantially the same as that in the first embodiment. The difference between the vacuum chamber provided in this embodiment and the first embodiment is that:

[0082] As shown in Figure 11, the first vacuum breaking mechanism 3 further includes a first supporting connector 35, which is supported and connected between the first air inlet plate 31 and the second air inlet plate 32. Optionally, the second air inlet plate 32 is composed of a plurality of spaced-apart splicing plates, with the gap between two adjacent splicing plates forming the second air inlet holes 321. A first supporting connector 35 is provided between each splicing plate and the first air inlet plate 31, and the first supporting connector 35 can be a support stud.

[0083] Similarly, as shown in Figure 12, the second vacuum breaking mechanism 4 further includes a second supporting connector 49, which is supported and connected between the third air inlet plate 41 and the fourth air inlet plate 42. Optionally, the fourth air inlet plate 42 is composed of a plurality of spaced-apart splicing plates, with the gap between two adjacent splicing plates forming the fourth air inlet hole 421. A second supporting connector 49 is provided between each splicing plate and the third air inlet plate 41, and the second supporting connector 49 can be a support stud.

Claims

1. A vacuum chamber, comprising: Cavity body (1); A cavity cover (2), the cavity cover (2) being arranged on the cavity body (1), and a first air inlet (21) being provided on the cavity cover (2); The vacuum chamber further includes at least one of the following: At least one first vacuum breaking mechanism (3) is provided on the chamber cover (2), the first vacuum breaking mechanism (3) is in communication with the first air inlet (21), the first vacuum breaking mechanism (3) comprises a first air inlet plate (31) and a second air inlet plate (32), a plurality of first air inlet holes (311) are spaced apart on the first air inlet plate (31), a plurality of second air inlet holes (321) are spaced apart on the second air inlet plate (32), and the plurality of second air inlet holes (321) and the plurality of first air inlet holes (311) are staggered in a horizontal direction; Or, at least one second vacuum breaking mechanism (4), the second vacuum breaking mechanism (4) is arranged on the inner side of the bottom wall (13) of the cavity body (1), the second vacuum breaking mechanism (4) is connected to the second air inlet (15) opened on the cavity body (1), the second vacuum breaking mechanism (4) includes a third air inlet plate (41) and a fourth air inlet plate (42), the third air inlet plate (41) is provided with a plurality of third air inlet holes (411) at intervals, the fourth air inlet plate (42) is provided with a plurality of fourth air inlet holes (421) at intervals, and the plurality of third air inlet holes (411) and the plurality of fourth air inlet holes (421) are staggeredly arranged along the horizontal direction.

2. The vacuum chamber according to claim 1, wherein: The first vacuum breaking mechanism (3) further comprises: A first mounting plate (33), wherein the first mounting plate (33) is arranged on the cavity cover (2), the first air intake plate (31) and the second air intake plate (32) are both connected to the first mounting plate (33), and the first air intake plate (31), the first mounting plate (33) and the cavity cover (2) are jointly enclosed to form a first air intake space (36), the first air intake plate (31), the second air intake plate (32) and the first mounting plate (33) are jointly enclosed to form a second air intake space (37), and the first air inlet (21), the first air intake space (36) and the second air intake space (37) are sequentially connected.

3. The vacuum chamber according to claim 1, wherein: The second vacuum breaking mechanism (4) further comprises: A second mounting panel (43), the second mounting panel (43) is arranged on the bottom wall (13), the third air intake plate (41) and the fourth air intake plate (42) are both connected to the second mounting panel (43), and the third air intake plate (41), the second mounting panel (43) and the bottom wall (13) are jointly arranged to form a third air intake space (46), the third air intake plate (41), the fourth air intake plate (42) and the bottom wall (13) The air intake plate (42) and the second mounting enclosure (43) are jointly arranged to form a fourth air intake space (47); the second air intake port (15), the third air intake space (46) and the fourth air intake space (47) are sequentially connected.

4. The vacuum chamber according to claim 1, wherein: The second vacuum breaking mechanism (4) further includes a second mounting enclosure (43), an air intake channel (44) and a vacuum breaking back plate (45), wherein a first end of the air intake channel (44) is connected to the second air inlet (15), and a second end of the air intake channel (44) is connected to the vacuum breaking back plate (45), the third air intake plate (41), the fourth air intake plate (42) and the vacuum breaking back plate (45) are all connected to the second mounting enclosure (43), and the third air intake plate (41), the second mounting enclosure (43) and the vacuum breaking back plate (45) are jointly enclosed to form a third air intake space (46), the third air intake plate (41), the fourth air intake plate (42) and the second mounting enclosure (43) are jointly enclosed to form a fourth air intake space (47), and the second air inlet (15), the air intake channel (44), the third air intake space (46) and the fourth air intake space (47) are sequentially connected.

5. The vacuum chamber according to claim 3 or 4, wherein: An air extraction port (11) is provided on the bottom wall (13); the vacuum chamber comprises a plurality of second vacuum breaking mechanisms (4) arranged at intervals; a first air extraction channel (12) is formed between two adjacent second vacuum breaking mechanisms (4); and the first air extraction channel (12) is communicated with the air extraction port (11).

6. The vacuum chamber according to claim 5, further comprising: Four second vacuum breaking mechanisms (4) are arranged at intervals, and a cross-shaped first air pumping channel (12) is formed between the four second vacuum breaking mechanisms (4). A second air pumping channel (16) connected to the first air pumping channel (12) is formed between the outer peripheral wall of the second vacuum breaking mechanism (4) and the side wall (14) of the cavity body (1). The central intersection area of ​​the first air pumping channel (12) is opposite to the air pumping port (11) located at the center of the bottom wall (13).

7. The vacuum chamber according to claim 6, wherein: The height of the first cross-shaped air extraction channel (12) is 30 mm to 200 mm.

8. The vacuum chamber according to claim 2, wherein: The first vacuum breaking mechanism (3) further comprises a first locking connector (34), wherein the first locking connector (34) is configured to detachably connect the first air intake plate (31) and the second air intake plate (32) to the first mounting enclosure (33).

9. The vacuum chamber according to claim 2, wherein: The first mounting panel (33) and the second air intake panel (32) are integrally formed parts.

10. The vacuum chamber according to claim 3 or 4, wherein: The second vacuum breaking mechanism (4) further comprises a second locking connector (48), and the second locking connector (48) is configured to detachably connect the third air intake plate (41) and the fourth air intake plate (42) to the second mounting enclosure (43).

11. The vacuum chamber according to claim 3 or 4, wherein: The second mounting panel (43) and the fourth air intake plate (42) are integrally formed parts.

12. The vacuum chamber according to claim 1, wherein: The first vacuum breaking mechanism (3) further comprises a first supporting connection member (35), wherein the first supporting connection member (35) is supported and connected between the first air intake plate (31) and the second air intake plate (32).

13. The vacuum chamber according to claim 1 or 12, wherein: The second vacuum breaking mechanism (4) further includes a second supporting connection member (49), and the second supporting connection member (49) is supported and connected between the third air intake plate (41) and the fourth air intake plate (42).

14. The vacuum chamber according to any one of claims 1 to 4, wherein: The first air inlet hole (311) and the third air inlet hole (411) are straight holes or trumpet holes; the second air inlet hole (321) and the fourth air inlet hole (421) are straight holes or trumpet holes.

15. The vacuum chamber according to any one of claims 1 to 4, wherein: The first air inlet hole (311) and the third air inlet hole (411) are circular holes, and the second air inlet hole (321) and the fourth air inlet hole (421) are elongated holes.

16. The vacuum chamber according to any one of claims 1 to 4, wherein: The number of the first vacuum breaking mechanisms (3) is one, and the number of the second vacuum breaking mechanisms (4) is four; or the number of the first vacuum breaking mechanisms (3) is four, and the number of the second vacuum breaking mechanisms (4) is four.

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