Dust removal device

Abstract

Provided are a dust removal device and an adhesive tape renewal method with which it is possible to accurately detect an end part of an adhesive tape to be renewed.　A dust removal device 10 comprises a tape end part detection mechanism 80. The tape end part detection mechanism 80 includes: a holding frame 84; an end part detection sensor 88 for detecting an end part of an outermost adhesive tape T1; a motor 85; an end part detection roller 87 for applying driving force from the motor 85; and a lifting cylinder 82 for bringing the end part detection roller 87 into and out of contact with the outermost adhesive tape T1. When it is determined that the current timing is the renewal timing for the outermost adhesive tape T1, a control unit 90 operates the lifting cylinder 82 to press the end part detection roller 87 against the outermost adhesive tape T1, operates the motor 85 in the pressed state to rotate an adhesive tape roll T1R via the end part detection roller 87, and detects the end part of the outermost adhesive tape T1 using the end part detection sensor 88 in the rotated state.

Description

Dust removal equipment

[0001] The present invention relates to a dust removal device for removing dust adhering to a workpiece and a method for renewing adhesive tape.

[0002] Dust removal devices are used to remove dust adhering to various workpieces such as printed circuit boards, semiconductor substrates, etc. This dust removal device is equipped with an adhesive roll that contacts the workpiece and an adhesive tape roll that contacts the adhesive roll, and the dust adhering to the adhesive roll is transferred to the adhesive tape.

[0003] However, when an operator manually peels off adhesive tape, there is a risk that dust from the operator may get in and adhere to the workpiece. For this reason, for example, Patent Document 1 discloses a dust removal device (10) including a take-up cartridge (100) that stores an adhesive tape roll (T1R). In this dust removal device (10), a peeling tape (T2) wound around a peeling roller (222) is pressed against the outermost adhesive tape (T1) of the adhesive tape roll (T1R) by the biasing force of a spring member (232).

[0004] Japanese Patent Application Laid-Open No. 2022-015968

[0005] Incidentally, Patent Document 1 discloses a setting method for the dust removal device (10), such as holding the peeling tape roll (T2R) (holding step) and attaching the leading end side of the peeling tape (T2) to the take-up tube 200 (attaching step). However, Patent Document 1 does not disclose anything about how to accurately detect the end (step) of the outermost adhesive tape (T1).

[0006] Furthermore, Patent Document 1 does not disclose, including the mechanism, how each part of the peeling tape (T2) is specifically driven and controlled relative to the adhesive tape (T1) to be renewed (peeled off).

[0007] The present invention has been made in view of the above circumstances, and has an object to provide a dust removal device and an adhesive tape renewal method that are capable of accurately detecting the end of an adhesive tape to be renewed, and preferably, capable of successfully peeling the adhesive tape to be renewed from the adhesive tape roll.

[0008] [1] In order to solve the above-mentioned problems, according to a first aspect of the present invention, there is provided a dust removal device for removing dust from a workpiece, the dust removal device comprising: a dust removal roller for adsorbing dust adhering to a surface of the workpiece; an adhesive tape holder for transferring the dust adhering to the dust removal roller and for holding an adhesive tape roll around which an adhesive tape having slits at predetermined intervals is wound; a tape end detection mechanism for detecting an end of the outermost adhesive tape on the adhesive tape roll; and a control unit for controlling the operation of the tape end detection mechanism, the tape end detection mechanism comprising: a holding frame; an end detection sensor attached to the holding frame for detecting an end of the outermost adhesive tape on the adhesive tape roll; the control unit, when determining that it is time to update the outermost adhesive tape, activates the roller lifting cylinder to press the end detection roller against the outermost adhesive tape, and while in this pressed state, activates the detection motor to rotate the adhesive tape roll via the end detection roller, and while in this rotating state the end detection sensor detects the end of the outermost adhesive tape.

[0009] [2] According to another aspect of the present invention, in the above-mentioned invention [1], the detection motor may be a stepping motor.

[0010] [3] Furthermore, another aspect of the present invention is a take-up cartridge including, in the invention of [2] above, a take-up tube that takes up used adhesive tape, a peeling tape holding tube that holds a peeling tape roll around which a peeling tape for peeling the outermost adhesive tape from the adhesive tape roll is wound, and a peeling roller that presses the peeling tape pulled out from the peeling tape roll against the adhesive tape roll, a take-up motor that provides a driving force to rotate the take-up tube, and a cartridge elevating mechanism that raises and lowers the take-up cartridge, wherein when the end detection sensor detects an end of the outermost adhesive tape, the control unit positions the end at a standby position a predetermined distance from the end and then stops driving the detection motor, After the peeling tape has stopped, the cartridge lifting mechanism is operated to press the peeling tape against the outermost adhesive tape via the peeling roller, and after the peeling tape has been pressed, the roller lifting cylinder is operated to move the end detection roller that is pressed against the outermost adhesive tape in a direction away from the adhesive tape, and after this movement, the take-up motor is driven to rotate the adhesive tape roll to an excess position where the peeling tape pressed against the peeling roller exceeds the end of the outermost adhesive tape, and after the peeling tape has passed the excess position, the take-up motor is continued to operate while the cartridge lifting mechanism is operated to move the take-up cartridge towards a position where it is separated from the adhesive tape roll, thereby performing a renewal operation to peel off the adhesive tape.

[0011] [4] Furthermore, another aspect of the present invention is that in the invention [3] above, when the peeling tape is pressed against the outermost adhesive tape by operation of the cartridge lifting mechanism and the outermost adhesive tape is peeled off from the adhesive tape roll, the invention further comprises a peeling start detection sensor that detects the leading edge of the feeding of the adhesive tape, and a peeling end detection sensor that detects the end in the feeding direction of the adhesive tape that is being fed together with the peeling tape towards the take-up tube, and when the take-up cartridge is being moved towards a position where it is separated from the adhesive tape roll, the control unit may determine that a normal peeling operation is being performed and control the take-up motor to continue driving, and stop rotation of the take-up motor after the peeling end detection sensor detects the trailing end of the feeding of the adhesive tape.

[0012] [5] Furthermore, another aspect of the present invention is that in the above-mentioned inventions [3] or [4], when the dust removal roller, adhesive tape holder, and tape end detection mechanism constitute one clean unit, a plurality of clean units may be provided, and the control unit may control the renewal operation of any one of the plurality of clean units to be performed at a different timing relative to the renewal operations of the other clean units.

[0013] [6] Furthermore, in order to solve the above-mentioned problems, according to a second aspect of the present invention, there is provided a method for renewing adhesive tape to which dust transferred from a dust removal roller that adsorbs dust on the surface of a workpiece is transferred and which is wound with gaps at predetermined intervals, wherein the end of the outermost adhesive tape is detected by a tape end detection mechanism, and this tape end detection mechanism comprises a holding frame, an end detection sensor attached to the holding frame and for detecting the end of the outermost adhesive tape in an adhesive tape roll around which the adhesive tape is wound, a detection motor attached to the holding frame, and a tape end detection mechanism rotatably held by the holding frame and given a driving force from the detection motor, and which detects the outermost adhesive tape end. The adhesive tape renewal method includes an end detection roller that rotates while in contact with the end of the adhesive tape, and a roller lifting cylinder that moves the end detection roller toward and away from the outermost adhesive tape, and when the time to renew the outermost adhesive tape arrives, the method comprises the following steps: a roller pressing step of operating the roller lifting cylinder to press the end detection roller against the outermost adhesive tape; a rotation step of operating a detection motor while the end detection roller is pressed against the outermost adhesive tape, to rotate the adhesive tape roll around which the adhesive tape is wound via the end detection roller; and a detection step of using an end detection sensor to detect the end of the outermost adhesive tape while the adhesive tape roll is rotating.

[0014] According to the present invention, it is possible to provide a dust removal device and an adhesive tape renewal method that are capable of accurately detecting the end of an adhesive tape to be renewed.

[0015] 1 is a side view transparently showing a partial configuration of a dust remover according to a first embodiment of the present invention. FIG. 2 is a diagram showing a schematic configuration of the dust remover shown in FIG. 1. FIG. 3 is a perspective view showing the configuration of a take-up cartridge housed in the dust remover shown in FIG. 1 and an upper cartridge lifting mechanism that lifts and lowers the take-up cartridge. FIG. 4 is a perspective view showing a tape end detection mechanism and an adhesive tape roll provided in the dust remover shown in FIG. 1. FIG. 5 is a perspective view showing the configuration of the take-up cartridge shown in FIG. 3, as seen from the opening side. FIG. 6 is a cross-sectional view showing the configuration of the take-up cartridge shown in FIG. 3. FIG. 6 is a perspective view showing a state in which the rear cover panel and the take-up presser mechanism of the take-up cartridge shown in FIG. 3 are cut away. FIG. 7 is a perspective view showing the configuration of a take-up tube of the take-up cartridge shown in FIG. 3. FIG. 7 is a diagram for explaining the operation when updating adhesive tape in the dust remover shown in FIG. 1, where (A) shows step S01, (B) shows step S02, and (C) shows steps S03 and S04. Fig. 2 is a diagram for explaining the operation when the adhesive tape is renewed in the dust removing apparatus shown in Fig. 1, where (A) is a diagram showing steps S05 and S06, (B) is a diagram showing step S07, and (C) is a diagram showing step S08. Fig. 3 is a diagram for explaining the operation when the adhesive tape is renewed in the dust removing apparatus shown in Fig. 1, where (A) is a diagram showing step S09, (B) is a diagram showing step S10, and (C) is a diagram showing step S11. Fig. 4 is a diagram schematically showing the configuration of the main part of a dust removing apparatus according to a second embodiment of the present invention.

[0016] First Embodiment Hereinafter, a dust remover 10 according to a first embodiment of the present invention and a method for renewing adhesive tape in the dust remover 10 will be described with reference to the drawings.

[0017] <Overall Configuration of Dust Removal Apparatus 10> Fig. 1 is a side view showing in a transparent manner the configuration of a portion of the dust removal apparatus 10 according to a first embodiment of the present invention. Fig. 2 is a diagram showing a schematic configuration of the dust removal apparatus 10. The dust removal apparatus 10 according to this embodiment is an apparatus for removing dust adhering to the surface of a workpiece W. Examples of the workpiece W include a printed circuit board on which electronic components are mounted, a substrate such as a liquid crystal panel, or a sheet-like member that is a raw material for a substrate, but the workpiece W may also be a flat member other than these.

[0018] The dust removal device 10 of this embodiment removes dust adhering to the surface of the workpiece W while transporting the workpiece W, for example, from left to right in Fig. 1. However, conversely, dust adhering to the surface of the workpiece W may also be removed while transporting the workpiece W from right to left in Fig. 1. The dust removal device 10 mainly includes a housing 20, a transport mechanism 25, a clean unit 30, a take-up motor 60, an upper cartridge lifting mechanism 70T, a lower cartridge lifting mechanism 70B, a tape end detection mechanism 80, a peeling start detection sensor S1, a peeling end detection sensor S2, a control unit 90, and a take-up cartridge 100 stored in a take-up cartridge storage unit 21.

[0019] <Housing 20> The housing 20 is configured by combining structural members such as metal supports, and by attaching outer walls between the supports as necessary. The housing 20 supports various components such as the transfer mechanism 25, the clean unit 30, and the control unit 90.

[0020] The casing 20 is also provided with a take-up cartridge storage section 21. The take-up cartridge storage section 21 is a section that stores the take-up cartridge 100. As shown in FIG. 1 , the take-up cartridge storage sections 21 are provided above and below the workpiece W in the casing 20. Specifically, the take-up cartridge storage section 21 located above the workpiece W is provided above the tape unit 50 in the casing 20. The take-up cartridge storage section 21 located below the workpiece W is provided below the tape unit 50 in the casing 20.

[0021] <Transport mechanism 25> The transport mechanism 25 is a part that applies a driving force to transport the workpiece W. The transport mechanism 25 includes a motor 26 that is schematically shown in Fig. 1, a transmission mechanism (not shown) that transmits the driving force from the motor 26, and transport rollers 27 that transport the workpiece W transported from the outside by transmitting the driving force from the transmission mechanism.

[0022] The motor 26 is a part that is rotationally driven by commands from the control unit 90. In this embodiment, the transmission mechanism includes a magnetic coupling unit, a magnetic gear, and a gear train. However, the transmission mechanism is not limited to these, and a wheel-type gear or a belt may be used instead of the magnetic coupling unit or magnetic gear.

[0023] 2, a plurality of transport rollers 27 are provided, but the motor 26 may apply a driving force to any of the transport rollers 27. The motor 26 may also transmit a driving force to the dust removal roller 41.

[0024] <Clean Unit 30> The clean unit 30 is a part for removing dust from the workpiece W, and its main components are a dust removal roll unit 40, a tape unit 50, and a tape end detection mechanism 80 (described later). The dust removal roll unit 40 has multiple dust removal rollers 41. In the configuration shown in FIG. 2, the dust removal rollers 41 are arranged symmetrically in the vertical direction (Z direction) across the workpiece W. This allows dust removal from both the upper and lower surfaces of the workpiece W by the dust removal rollers 41. In the configuration shown in FIGS. 1 and 2, two dust removal rollers 41 are arranged on each of the upper and lower surfaces of the workpiece W. However, one dust removal roller 41 may be arranged on each of the upper and lower surfaces of the workpiece W, or three or more dust removal rollers 41 may be arranged.

[0025] As shown in FIG. 2, the dust removal roller 41 has a rotating shaft 41a and an adhesive rubber layer 41b. The adhesive rubber layer 41b is provided on the outer side of the rotating shaft 41a over a predetermined length in the axial direction. The adhesive rubber layer 41b is made of an adhesive rubber capable of adsorbing dust. An adsorption layer (not shown) is provided on the surface of the adhesive rubber layer 41b, and the adsorption layer is made of a material with excellent dust adsorption properties, such as silicone rubber. A conductive layer, such as nitrile rubber or carbon rubber, may be provided below the adsorption layer.

[0026] The tape unit 50 also includes an adhesive tape holder 51. The adhesive tape holder 51 rotatably holds both ends of the adhesive tape roll T1R. The adhesive tape holder 51 can be raised and lowered in the vertical direction by a tape lift cylinder 52. Note that an air cylinder, for example, is used as the tape lift cylinder 52, and by driving this tape lift cylinder 52, the adhesive tape roll T1R can be moved toward and away from the dust removal roller 41. Note that the tape lift cylinder 52 can also move the dust removal roller 41 toward the workpiece W via the adhesive tape T1.

[0027] The adhesive tape holder 51 may simply hold the adhesive tape roll T1R (i.e., the adhesive tape roll T1R may be rotated following the feeding of the workpiece W). However, a configuration may also be adopted in which a driving force for rotating the adhesive tape roll T1R is applied by a driving source such as a driving motor. Also, instead of a driving motor for driving the adhesive tape roll T1R, a configuration may also be adopted in which a dust removal roller 41, which can maintain a constant diameter, is rotated by the driving motor.

[0028] Here, the surface of the adhesive tape T1 is an adhesive surface. The adhesive surface is capable of retaining dust adsorbed to the dust removal roller 41 described above. Therefore, the adhesive force of the adhesive surface of the adhesive tape T1 to the dust is greater than the adhesive force of the dust removal roller 41 to the dust. This allows the dust to be efficiently transferred from the dust removal roller 41 to the adhesive surface of the adhesive tape T1. Note that the sheet-like adhesive tape T1 has slits that enable it to be separated into sheets, and the adhesive tape T1 is wound into a roll to form an adhesive tape roll T1R. Therefore, by pulling out the adhesive tape T1 from the adhesive tape roll T1R and then cutting it along the slits, the contaminated adhesive tape T1 can be easily replaced with a clean adhesive tape T1.

[0029] The cuts in the adhesive tape T1 are not parallel to the axial direction but are inclined. Therefore, in the adhesive tape roll T1R, the end (step) of the adhesive tape T1 located at the outermost periphery is also inclined with respect to the axial direction. However, the cuts in the adhesive tape T1 may be parallel to the axial direction.

[0030] <Winding motor 60> The winding motor 60 is a motor for applying a driving force to the winding tube 200, which will be described later. A connecting member (not shown) is connected to the rotating shaft of this winding motor 60. This connecting member is inserted into the insertion hole 121d and fits into the connecting recess 202a of the joint cover 202, making it possible to transmit the driving force of the winding motor 60 to the winding tube 200.

[0031] <Upper cartridge lifting mechanism 70T and lower cartridge lifting mechanism 70B> Figure 3 is a perspective view showing the configuration of the take-up cartridge 100 and the upper cartridge lifting mechanism 70T that lifts and lowers the take-up cartridge 100. The upper cartridge lifting mechanism 70T is a part that moves the take-up cartridge 100, which is positioned above the upper adhesive tape roll T1R, in the up and down direction, and is disposed at a predetermined position in the housing 20. The upper cartridge lifting mechanism 70T includes a lifting cylinder 71 and a connecting plate 72. The lifting cylinder 71 corresponds to the cartridge lifting cylinder.

[0032] The lift cylinder 71 is an actuator that drives a piston (reference numeral omitted) by air introduced into the cylinder (reference numeral omitted). A connecting plate 72 is attached to the upper end of the piston of the lift cylinder 71. The connecting plate 72 is a member that connects the take-up cartridge 100 and the lift cylinder 71 in order to raise and lower the take-up cartridge 100. In this embodiment, the connecting plate 72 is connected to the flange portion 130c of the take-up cartridge 100. This allows the connecting plate 72 to be positioned lower than the upper end of the take-up cartridge 100, thereby reducing the upward protrusion dimension of the upper cartridge lifting mechanism 70T.

[0033] The lower cartridge lifting mechanism 70B is a part that moves the take-up cartridge 100, which is located below the lower adhesive tape roll T1R, in the up and down direction, and is disposed at a predetermined location in the housing 20. The lower cartridge lifting mechanism 70B includes a lifting cylinder 71 and a connecting plate 72, but since the configuration of these is the same as that of the upper cartridge lifting mechanism 70T described above, drawings and descriptions showing the detailed configuration will be omitted.

[0034] The upper cartridge lifting mechanism 70T and the lower cartridge lifting mechanism 70B correspond to the cartridge lifting mechanism.

[0035] In addition, in this embodiment, the connecting plate 72 of the lower cartridge lifting mechanism 70B is connected to the flange portion 130c of the take-up cartridge 100. This allows the connecting plate 72 to be positioned higher than the upper end of the take-up cartridge 100, thereby reducing the downward protrusion dimension of the lower cartridge lifting mechanism 70B.

[0036] <Tape end detection mechanism 80> Next, the tape end detection mechanism 80 will be described. Fig. 4 is a perspective view showing the tape end detection mechanism 80 and the adhesive tape roll T1R. Note that Fig. 4 shows only a portion of the adhesive tape roll T1R. As shown in Fig. 4, the dust removal device 10 of this embodiment is equipped with a tape end detection mechanism 80. This tape end detection mechanism 80 includes a fixed plate 81, a lifting cylinder 82, a connecting plate 83, a holding frame 84, a motor 85, a drive shaft 86, an end detection roller 87, and an end detection sensor 88.

[0037] The fixed plate 81 is a member for attaching the tape end detection mechanism 80 to a predetermined position on the housing 20. Similarly to the above-described lift cylinder 71, the lift cylinder 82 is an actuator that drives a piston (reference number omitted) by air introduced into a cylinder (reference number omitted). The lift cylinder 82 corresponds to the roller lift cylinder.

[0038] A connecting plate 83 is attached to the protruding end of the piston of this lifting cylinder 82. The connecting plate 83 is a member for connecting the holding frame 84 and the lifting cylinder 82 in order to raise and lower the tape end detection mechanism 80.

[0039] The holding frame 84 is a frame member for holding the motor 85, drive shaft 86, end detection roller 87, and end detection sensor 88. That is, the motor 85 and end detection sensor 88 are attached to the holding frame 84 via mounting brackets (reference numerals omitted). The holding frame 84 also supports the other end of the drive shaft 86 via a support member (reference numerals omitted). The support member is provided with a hole through which the drive shaft 86 is inserted, and a bearing is disposed in this hole.

[0040] The motor 85 is a motor that provides a driving force to rotate the edge detection roller 87, and in this embodiment, a stepping motor is used. Therefore, the number of rotations of the edge detection roller 87 can be accurately controlled according to the number of input pulses. Furthermore, because the motor 85 is a stepping motor, the edge detection roller 87 can be held in a stopped state by its self-holding force when stopped in an energized state. This makes it possible to prevent positional deviation due to rotation of the adhesive tape roll T1R when the edge detection roller 87 is in contact with the outermost adhesive tape T1. The motor 85 corresponds to a detection motor.

[0041] The drive shaft 86 is connected to the output shaft of the motor 85, and is a shaft on whose end an end detection roller 87 is attached. The end detection roller 87 is a roller member that comes into contact with the outermost peripheral adhesive tape T1. This contact enables the end detection roller 87 to apply a driving force that rotates the adhesive tape roll T1R when the motor 85 is driven. This contact also enables the end detection roller 87 to maintain a position where the adhesive tape roll T1R does not rotate, due to its self-holding force when the motor 85 is stopped.

[0042] The edge detection sensor 88 is a sensor for detecting the edge of the outermost adhesive tape T1. For example, a light-emitting / receiving optical sensor is used as the edge detection sensor 88. By emitting and receiving light, the edge detection sensor 88 measures the distance to the outermost adhesive tape T1. That is, when the edge detection sensor 88 passes over the edge (step) between the edge of the outermost adhesive tape T1 and the adhesive tape T1 further inward while the adhesive tape roll T1R is rotating due to the drive of the motor 85, the detected distance fluctuates. From this fluctuation in distance, it can be detected whether the edge detection sensor 88 has passed over the edge of the outermost adhesive tape T1.

[0043] In the tape end detection mechanism 80 as described above, the drive shaft 86, end detection roller 87, end detection sensor 88, etc. are supported by the holding frame 84. Therefore, when the end detection roller 87 moves up and down to follow the irregularities present in the outermost adhesive tape T1, the end detection sensor 88 also moves up and down at the same time. Therefore, detection errors can be reduced compared to when the end detection sensor 88 is attached separately to the end detection roller 87.

[0044] <Regarding the peeling start detection sensor S1 and the peeling end detection sensor S2> Next, the peeling start detection sensor S1 and the peeling end detection sensor S2 will be described. The peeling start detection sensor S1 is a sensor for detecting the leading edge of the feeding of the adhesive tape T1 when the peeling tape T2 is pressed against the outermost adhesive tape T1 by driving the upper cartridge lifting mechanism 70T and the lower cartridge lifting mechanism 70B, and the outermost adhesive tape T1 is peeled off from the adhesive tape roll T1R.

[0045] The peel start detection sensor S1 is attached to a predetermined portion of the housing 20 between the take-up cartridge 100 and the adhesive tape roll T1R via a mounting bracket (reference numeral omitted). Like the end detection sensor 88, the peel start detection sensor S1 also uses, for example, an optical sensor of the light emitting and receiving type.

[0046] When the peeling tape T2 is pressed against the outermost adhesive tape T1, the outermost adhesive tape T1 is peeled off from the adhesive tape roll T1R. Then, when the peeled adhesive tape T1 is fed together with the peeling tape T2 toward the take-up tube 200 described below, the leading edge of the adhesive tape T1 passes the detection position of the peeling start detection sensor S1. At that time, the peeling start detection sensor S1 is able to detect that the adhesive tape T1 has been peeled off from the adhesive tape roll T1R.

[0047] The peeling end detection sensor S2 is a sensor for detecting the end in the feeding direction of the adhesive tape T1 being fed together with the peeling tape T2 towards the take-up tube 200. The peeling end detection sensor S2 is attached via a mounting bracket (reference numeral omitted) to a predetermined position on the housing 20 above the peeling start detection sensor S1.

[0048] In this embodiment, this predetermined portion is a portion facing the slit in the outer wall panel 130 of the take-up cartridge 100. Similarly to the end detection sensor 88, the peeling completion detection sensor S2 also uses, for example, a light emitting and receiving optical sensor. Therefore, light can be emitted and received from the peeling completion detection sensor S2 via the slit in the outer wall panel 130, so that it is possible to detect inside the take-up cartridge 100 whether or not the adhesive tape T1 has been wound onto the take-up tube 200.

[0049] In addition, the dust removal device 10 of this embodiment is also provided with an empty detection sensor S3 for detecting whether the adhesive tape roll T1R is empty (whether or not the adhesive tape T1 remains) (see Figure 9, etc.).

[0050] <Regarding the control unit 90> The control unit 90 can control the driving of the motor 26, the take-up motor 60, or the motor 85 based on detection signals from each detection sensor or based on a predetermined control program. Furthermore, when a predetermined movement timing arrives, the control unit 90 activates the upper cartridge lifting mechanism 70T and / or the lower cartridge lifting mechanism 70B to press the peeling tape T2 against the outermost adhesive tape T1, or lift the peeling tape T2 from the pressed state, thereby peeling the outermost adhesive tape T1 from the adhesive tape roll T1R. Furthermore, when a predetermined movement timing arrives, the control unit 90 activates the tape lifting cylinder 52 to press the adhesive tape T1 against the workpiece W or to retract the adhesive tape T1 from the workpiece W.

[0051] <Regarding the take-up cartridge 100> Fig. 5 is a perspective view showing the configuration of the take-up cartridge 100, as seen from the opening 160 side. Fig. 6 is a cross-sectional view showing the configuration of the take-up cartridge 100. Note that Figs. 5 and 6 show the take-up cartridge 100 in a state where the take-up cartridge 100 has been removed from the take-up cartridge storage section 21.

[0052] As shown in Figures 3, 5 and 6, the take-up cartridge 100 has as its main components a housing 110, a take-up tube 200, a peel-tape holding tube 210, an application mechanism 220, and a take-up hold-down mechanism 240.

[0053] The housing 110 is a member that supports the entire take-up cartridge 100, and also stores the adhesive tape T1 taken up by the take-up tube 200, and the peeling tape T2 held by the peeling tape holding tube 210. Therefore, the housing 110 isolates the adhesive tape T1 taken up by the take-up tube 200 from the outside, thereby preventing dust from accidentally falling off the adhesive tape T1 and scattering into the external environment. The housing 110 also prevents dust from adhering to the peeling tape T2.

[0054] The housing 110 has as its main components a side plate member 120 , an outer wall panel 130 , a front cover panel 140 , and a rear cover panel 150 .

[0055] The side plate members 120 are members disposed on both ends in the longitudinal direction (Y direction) of the take-up cartridge 100. The side plate members 120 are formed from a material that has excellent impact resistance, a small coefficient of friction, and excellent self-lubricating properties, such as POM (polyacetal resin), but the side plate members 120 may be formed from a material other than POM (such as fluororesin) as long as it has these properties.

[0056] The side plate member 120 has a winding shaft support portion 121, a peeling shaft support portion 122, and an adhering shaft support portion 123. The winding shaft support portion 121 is a portion for supporting the end of the winding tube 200 and corresponds to the second shaft support portion. This winding shaft support portion 121 is a groove-like portion formed by recessing a thick portion (a portion that is thicker than other portions) of the side plate member 120 into a substantially U-shape. Therefore, one end of the winding shaft support portion 121 is open, and the end of the winding tube 200 can be inserted through this opening.

[0057] This winding shaft support part 121 is provided with a retaining projection (not shown) that protrudes from the inner wall of the approximately U-shaped groove toward the inside of the approximately U-shaped groove, preventing the end of the winding tube 200 from coming off. Note that it is preferable that a bearing or the like is disposed in the winding shaft support part 121 so that the rotational resistance of the winding tube 200 can be reduced.

[0058] 5, the side plate member 120 is provided with an insertion hole 121d that penetrates the side plate member 120. A connecting member of the winding motor 60 can be inserted into this insertion hole 121d. This allows the driving force of the winding motor 60 to be transmitted to the winding tube 200 via the connecting member inserted into the insertion hole 121d.

[0059] The peeling shaft support portion 122 is a portion for supporting the end of the peeling tape holding tube 210. This peeling shaft support portion 122 is also a groove-like portion formed by recessing a thick portion 124 (a portion that is thicker than other portions) of the side plate member 120 into a substantially U-shape. Therefore, one end of the peeling shaft support portion 122 is also open, and the end of the peeling tape holding tube 210 can be inserted through this opening.

[0060] This peeling shaft support part 122 is provided with a stopper projection (not shown) that protrudes from the inner wall of the approximately U-shaped groove toward the inside of the approximately U-shaped groove, preventing the end of the peeling tape holding tube 210 from coming off. Note that the peeling shaft support part 122 does not have an insertion hole corresponding to the above-mentioned insertion hole 121d, but an insertion hole may be provided.

[0061] The side plate member 120 is also provided with a bonding shaft support portion 123. The bonding shaft support portion 123 is a portion that supports a peeling support shaft 221 of the bonding mechanism 220, but supports the peeling support shaft 221 in an unrotatable state rather than allowing it to rotate freely.

[0062] The attachment shaft support portion 123 is a groove-like portion formed by recessing a thick portion of the side plate member 120 into a substantially U-shape, and one end of the attachment shaft support portion 123 is open. However, unlike the winding shaft support portion 121 and the peeling shaft support portion 122, no protruding portion corresponding to a retaining protrusion is provided. Furthermore, the groove width of the attachment shaft support portion 123 is set smaller than the groove widths of the winding shaft support portion 121 and the peeling shaft support portion 122 described above, but the groove width of the attachment shaft support portion 123 may be approximately the same as the groove widths of the winding shaft support portion 121 and the peeling shaft support portion 122.

[0063] A pressing mechanism 230 (described later) of the joining mechanism 220 is disposed on this joining shaft support portion 123. Specifically, the joining shaft support portion 123 is provided with a sliding groove 123a and a shaft hole 123b. A spring member 232 constituting the pressing mechanism 230 is disposed in the sliding groove 123a, and one end of the spring member 232 can be received at the bottom of the sliding groove 123a. A spring shaft 231 is inserted through the shaft hole 123b in a freely slidable state, and the spring shaft 231 protrudes into the sliding groove 123a, but a head 231a of the spring shaft 231 is received on the wall surface on the opposite side to the sliding groove 123a.

[0064] The side plate member 120 is also provided with a handle 125. The handle 125 is an elongated hole-shaped portion into which an operator can insert his or her fingers, and is provided so as to penetrate the side plate member 120.

[0065] 3, 5, and 6, the exterior wall panel 130 constituting the housing 110 is a member formed by bending a metal plate, and both longitudinal ends of the exterior wall panel 130 are fixed to the side plate members 120. The exterior wall panel 130 is bent to have a top surface portion 130a, a side surface portion 130b, and a flange portion 130c. The top surface portion 130a is a wall surface located on the opposite side of the housing 110 from an opening, which will be described later. The side surface portion 130b is a wall surface bent at approximately 90 degrees from the top surface portion 130a.

[0066] The flange portion 130c is bent at approximately 90 degrees from the side portion 130b so as to be approximately parallel to the top portion 130a, but its width is smaller than that of the top portion 130a and the side portion 130b. Due to the bending, the flange portion 130c protrudes forward in the conveying direction beyond the side portion 130b. The presence of the side portion 130b and the flange portion 130c creates a recess in the housing 110 that allows the operator to easily insert their hand through the handle 125.

[0067] Furthermore, the flange portion 130c is connected to the connecting plate 72 of the upper cartridge lifting mechanism 70T or the connecting plate 72 of the lower cartridge lifting mechanism 70B. This connection makes it possible to lift and lower the take-up cartridge 100 in the up and down direction when the upper cartridge lifting mechanism 70T or the lower cartridge lifting mechanism 70B is operated.

[0068] The front cover panel 140 (corresponding to the cover member) is a panel-like member rotatably attached to the flange portion 130c via a plurality of hinges H1. That is, the front cover panel 140 is an openable and closable cover-like member located on the front side (X1 side) of the housing 110. The front cover panel 140 is attached to the side plate member 120 via a lock member R1 so that it can be locked in a closed state.

[0069] 3 and 5, the front cover panel 140 has a side surface 140a and a guide slope 140b. The side surface 140a is a wall surface that is parallel to but not flush with the above-mentioned side surface 130b. The guide slope 140b is a wall surface that slopes gradually toward the workpiece W from the front side (X1 side) to the rear side (X2 side) in the conveying direction (X direction) of the workpiece W, but is arranged so as not to protrude below (to the Z2 side) a peeling roller 222 described below.

[0070] 7 is a perspective view showing a cutaway state of the rear cover panel 150 and the take-up hold-down mechanism 240. As shown in FIG. 5, the rear cover panel 150 (corresponding to a cover member) is a panel-like member rotatably attached to the rear side (X2 side) of the upper surface portion 130a of the outer wall panel 130 via a plurality of hinges H2. That is, the rear cover panel 150 is an openable and closable cover-like member located on the rear side (X2 side) of the housing 110. The rear cover panel 150 is also attached to the side plate member 120 via a locking member R2 so as to be lockable in a closed state.

[0071] Like the front cover panel 140, the rear cover panel 150 also has a side surface 150a shown in Figures 3, 5, and 7, which is perpendicular to the top surface 130a. The rear cover panel 150 also has a steeply inclined surface 150b. The steeply inclined surface 150b is a wall surface that forms a larger angle with respect to the horizontal direction than the guide inclined surface 140b. The presence of the steeply inclined surface 150b makes it possible to distinguish between the front and rear of the take-up cartridge 100 in the transport direction (X direction) and reduces the dimension (width) of the take-up cartridge 100 along the transport direction (X direction).

[0072] A roll support member 241 is attached to the side surface 150a of the rear lid panel 150. The roll support member 241 is a component of the take-up presser mechanism 240, which will be described later, and is a member that supports a presser roller 242. Similar to the front lid panel 140, the rear lid panel 150 is also attached to the side plate member 120 via a lock member R2 so that it can be locked in a closed state.

[0073] An opening 160 is provided between the end of the guide slope 140b of the front cover panel 140 and the end of the rear cover panel 150. The opening 160 is an opening portion through which a peeling roller 222 (described later) and the peeling tape T2 wound around the peeling roller 222 protrude from the housing 110, and is also an opening portion through which the adhesive tape T1 is stored in the housing 110.

[0074] <Regarding the Winding Tube 200> Next, the winding tube 200 will be described. Fig. 8 is a perspective view showing the configuration of the winding tube 200. The winding tube 200 is a cylindrical member for winding up the above-mentioned adhesive tape T1 and the peeling tape T2 described below, and is rotatably supported by the bearing portion 121c of the winding shaft support portion 121 described above. The winding tube 200 includes a pipe-shaped portion 201, which is made of a resin such as vinyl chloride resin. However, the pipe-shaped portion 201 may also be made of a metal such as an aluminum-based metal.

[0075] 8, joint covers 202 are attached to both ends of the pipe-shaped portion 201. The joint covers 202 are lid-like members attached to transmit the driving force from the drive motor to the winding tube 200, and are engaged with the pipe-shaped portion 201 so as to rotate integrally therewith.

[0076] The joint cover 202 is provided with a connecting recess 202a and a guide protrusion 202b. The connecting recess 202a is a recessed or hole-shaped portion into which the connecting member of the winding motor 60 described above is inserted. In the configuration shown in Fig. 8, two connecting recesses 202a are provided, but three or more connecting recesses 202a may be provided.

[0077] Furthermore, guide protrusion 202b is a protruding member located between adjacent connecting recesses 202a, and is formed in a shape with a slope, such as a triangular pyramid. Therefore, when the connecting member of winding motor 60 passes through insertion hole 121d and advances toward connecting recess 202a, if it advances to a position offset from connecting recess 202a in the rotational direction and collides with guide protrusion 202b, either the connecting member or winding tube 200 will rotate as the connecting member advances. Therefore, it is possible to insert the connecting member into connecting recess 202a without providing a sensor to prevent positional deviation.

[0078] 6, the peeling tape holding tube 210 is a portion that holds the peeling tape roll T2R, which is the peeling tape T2 wound in a roll shape. The material of this peeling tape holding tube 210 is the same as that of the pipe-shaped portion 201 of the take-up tube 200 described above.

[0079] The joining mechanism 220 is a mechanism for elastically pressing the peeling tape T2 fed from the peeling tape holding tube 210 against the adhesive tape roll T1R. The joining mechanism 220 includes a peeling support shaft 221, a peeling roller 222, and a pressing mechanism 230. The peeling support shaft 221 is an elongated member that moves centrifugally along the longitudinal direction (Y direction) of the take-up cartridge 100, but is non-rotatable. Threaded holes (not shown) are formed on both ends of the peeling support shaft 221 for threading in the threads of a spring shaft 231 (described later).

[0080] The peeling roller 222 is a roller rotatably provided on the peeling support shaft 221 via a bearing B1. The peeling roller 222 is a roller for peeling the outermost adhesive tape T1 of the adhesive tape roll T1R from the adhesive tape roll T1R by pressing the peeling tape T2 against the adhesive tape roll T1R while the peeling tape T2 is wound around it. Since the peeling rollers 222 have a width corresponding to the width of the peeling tape T2, a plurality of peeling rollers 222 (three in the configuration shown in FIG. 5 ) are arranged along the longitudinal direction of the peeling support shaft 221. The peeling rollers 222 are provided so as to protrude from the opening 160 when pressed by the pressing mechanism 230.

[0081] Further, a pressing mechanism 230 is provided on each of the pair of side plate members 120. This pressing mechanism 230 has a spring shaft 231 and a spring member 232. The spring shaft 231 is a shaft-shaped member that is inserted into the above-mentioned shaft hole 123b, and in the configuration shown in Fig. 6, a screw thread (reference number omitted) is formed on the tip side of the spring shaft 231. Therefore, by screwing the tip side of the spring shaft 231 into the screw hole of the removal support shaft 221, the spring shaft 231 and the removal support shaft 221 are configured to move integrally.

[0082] A spring member 232 is provided on the outer periphery of the spring shaft 231, and this spring member 232 is disposed inside the sliding groove 123a. The spring member 232 is, for example, a coil spring, and one end of the spring member 232 is received on the bottom of the sliding groove 123a, and the other end is received on the peeling support shaft 221. When the head 231a of the spring shaft 231 is received on the wall surface opposite to the sliding groove 123a, the spring member 232 exerts a biasing force on both the bottom of the sliding groove 123a and the peeling support shaft 221. Therefore, when the peeling roller 222 is pressed strongly against the adhesive tape roll T1R, the spring member 232 contracts in response to the pressing force, thereby allowing the peeling roller 222 to move toward the inside of the housing 110. Therefore, the peeling roller 222 can follow the outer peripheral surface of the peeling tape roll T2R well while exerting a biasing force on the outer peripheral surface of the peeling tape roll T2R.

[0083] Next, the roll hold-down mechanism 240 will be described. As shown in Figures 6 and 7, the roll hold-down mechanism 240 is attached to the rear cover panel 150. This roll hold-down mechanism 240 has a roll support member 241, a press roller 242, and a biasing spring 243. The roll support member 241 is fixed to the side surface portion 150a with, for example, screws, and is made of resin or metal. If the roll support member 241 is made of resin, it may be made of a resin such as POM (polyacetal resin), which has excellent impact resistance, a small coefficient of friction, and excellent self-lubricating properties, similar to the side plate member 120.

[0084] The roll support member 241 is provided with a shaft support slit 241a, a spring mounting shaft 241b, and a spring locking portion 241c. The shaft support slit 241a is a groove portion into which the shaft portion (reference numeral omitted) of the pressure roller 242 is inserted and which allows the pressure roller 242 to rotate. The shaft support slit 241a is formed, for example, in the shape of an arc, with the center of the arc located on the side closer to the side surface portion 150a. Moreover, the take-up tube 200 is provided adjacent to the upper side (Z1 side) of the end of the shaft support slit 241a. Therefore, the pressure roller 242 can move closer to or away from the take-up tube 200 by moving along the shaft support slit 241a.

[0085] The spring mounting shaft 241b is a shaft portion for attaching the wound portion of the biasing spring 243 (described later) to the roll support member 241. The spring locking portion 241c is a portion for locking the other end side of the biasing spring 243 (described later), and is provided in a convex shape to make it easier to lock the other end.

[0086] The pressure roller 242 is provided at its end with a shaft portion (reference numeral omitted) and a roller portion 242a. The shaft portion has a smaller diameter than the roller portion 242a, and this shaft portion is inserted into the shaft support slit 241a. The roller portion 242a is a roller that prevents the adhesive tape T1 from expanding toward the outer diameter when the adhesive tape T1 is wound onto the winding tube 200 together with the peeling tape T2.

[0087] A biasing spring 243 is provided to apply a biasing force to the pressure roller 242 to prevent the adhesive tape T1 from expanding radially outward as described above. The biasing spring 243 is, for example, a torsion spring, and one end of the biasing spring 243 is engaged with the shaft portion. The other end of the biasing spring 243 is engaged with the spring engaging portion 241c described above. The biasing spring 243 biases the pressure roller 242 toward the take-up tube 200. Therefore, when the rear cover panel 150 is closed, the pressure roller 242 is biased toward the take-up tube 200.

[0088] In the dust removal device 10 configured as described above, the take-up cartridge 100 is removable from the take-up cartridge storage section 21 of the housing section 20. This makes it easy to set up the removed take-up cartridge 100.

[0089] <Regarding Operation of Dust Remover 10 When Renewing Adhesive Tape T1> The operation of the dust remover 10 configured as above when renewing the adhesive tape T1 will be described. This operation will be described with reference to Figs. 9 to 11 .

[0090] 9A, while the workpiece W is being dust-removed, the control unit 90 drives the motor 26 to feed the workpiece W to the dust-removal roller 41 via the transport mechanism 25. At this time, the control unit 90 operates the tape lifting cylinder 52 so as to press the adhesive tape roll T1R against the dust-removal roller 41 (step S01).

[0091] In this state, dust removal from the workpiece W continues for a predetermined time, and if it is determined that the outermost adhesive tape T1 has become soiled and it is time to peel it off (renew it), the control unit 90 activates the tape lifting cylinder 52 to move the adhesive tape roll T1R away from the dust removal roller 41, as shown in Figure 9 (B) (step S02).

[0092] In this state, the control unit 90 continues driving the motor 26 to continue removing dust from the workpiece W using the dust removal roller 41. This is because it is thought that no particular problem will arise if dust is not transferred from the dust removal roller 41 to the adhesive tape T1 for a relatively short period of time. However, the control unit 90 may stop driving the motor 26 so as not to remove dust from the workpiece W.

[0093] 9(C), the control unit 90 activates the lifting cylinder 82 of the tape end detection mechanism 80 to press the end detection roller 87 against the outermost adhesive tape T1 (step S03; corresponding to the roller pressing step). After this pressing operation, the control unit 90 activates the motor 85 (step S04; corresponding to the rotation step). At this time, the end detection sensor 88 detects a step in the outermost adhesive tape T1 (corresponding to the detection step).

[0094] 10A, when the end detection sensor 88 detects a step, the control unit 90 drives the motor 85 a further predetermined number of pulses, and then stops the motor 85 in an energized state (step S05). That is, the motor 85 applies a driving force to rotate the adhesive tape roll T1R via the end detection roller 87, and then the motor 85 stops, causing the adhesive tape roll T1R to stop without rotating. This stopping position is not a position where the adhesive tape roll T1R is approaching a step that is inclined with respect to the axial direction, but a position a predetermined distance away from the diagonal step.

[0095] In this embodiment, the motor 85 is a stepping motor. Therefore, when the motor 85 stops while being energized, the rotation of the adhesive tape roll T1R is prevented, and the position can be maintained.

[0096] Next, the control unit 90 activates the lifting cylinder 71 to move the take-up cartridge 100 toward the adhesive tape roll T1R. Then, the peeling tape T2 is pressed against the outermost adhesive tape T1 via the peeling roller 222 (step S06).

[0097] 10(B), the control unit 90 activates the lifting cylinder 82 to move the end detection roller 87, which is pressed against the outermost adhesive tape T1, in a direction away from the adhesive tape T1 (step S07). Therefore, the state in which the position is held by the motor 85 is released, and thereafter the end detection roller 87 follows the rotation of the peeling roller 222 driven by the take-up motor 60.

[0098] 10(C), the control unit 90 rotates the take-up motor 60 by a predetermined distance, rotating the adhesive tape roll T1R to an excess position where the peeling tape T2 pressed against the peeling roller 222 exceeds the step of the outermost adhesive tape T1 (step S08).

[0099] Here, the adhesive strength of the peeling tape T2 is set to be stronger than the adhesive strength of the adhesive tape T1 in the adhesive tape roll T1R. Therefore, when the peeling tape T2 reaches the step in the outermost adhesive tape T1 and climbs over the step, the outermost adhesive tape T1 can be peeled off from the climbed-over position as a starting point. Therefore, after the climbing-over (i.e., after reaching the step), by further driving the take-up motor 60 to an excess position where the outermost adhesive tape T1 completely clears the step, the adhesive strength of the peeling tape T2 causes the outermost adhesive tape T1 to start being peeled off from the adhesive tape roll T1R.

[0100] In the present embodiment, a plurality of peeling rollers 222 (three in the configuration shown in FIG. 5 ) are arranged along the longitudinal direction of the peeling support shaft 221. Therefore, the adhesive tape roll T1R is rotated until all of the peeling tapes T2 pressed by the three peeling rollers 222 clear the step of the outermost adhesive tape T1.

[0101] 11(A), the control unit 90, while continuing to operate the take-up motor 60, operates the lifting cylinder 71 to move the take-up cartridge 100 toward a position away from the adhesive tape roll T1R (i.e., the original position) (step S09). Then, the outermost adhesive tape T1 adhering to the peeling tape T2 is peeled off from the adhesive tape roll T1R as the peeling tape T2 moves and is taken up onto the take-up tube 200.

[0102] As described above, when the adhesive tape T1 peeled off from the adhesive tape roll T1R heads toward the take-up tube 200, the leading edge of the adhesive tape T1 is detected by the peeling start detection sensor S1. At this time, the control unit 90 determines that the peeling operation has been performed normally, and controls the lifting cylinder 71 and the take-up motor 60 to continue operating. If the take-up cartridge 100 has already returned to its original position away from the adhesive tape roll T1R and the lifting cylinder 71 has stopped, the control unit 90 controls the take-up motor 60 to continue operating while maintaining the lifting cylinder 71 stopped.

[0103] Next, the control unit 90 determines whether or not the peeling completion detection sensor S2 has detected the trailing end of the adhesive tape T1 being peeled and fed to the take-up tube 200. Then, as shown in Figure 11 (B), when it is determined that the peeling completion detection sensor S2 has detected the trailing end of the adhesive tape T1, this means that the peeling operation of the adhesive tape T1 is approaching completion. At this time, the control unit 90 stops the rotation of the take-up motor 60 after this detection (step S10). At this time, because a slit for dividing (cutting) the adhesive tape T1 into sheets is present in the adhesive tape roll T1R, the adhesive tape T1 to be renewed is in a state of being separated from the adhesive tape roll T1R.

[0104] After the above-described adhesive tape T1 renewal work is completed, the control unit 90 determines whether or not adhesive tape T1 remains on the adhesive tape roll T1R using the empty detection sensor S3, as shown in FIG. 11 (C) (step S11).

[0105] If the control unit 90 determines in this determination that the adhesive tape T1 remains on the adhesive tape roll T1R, it becomes possible to perform the dust removal operation on the workpiece W by again pressing the adhesive tape T1 against the dust removal roller 41. In this case, the control unit 90 performs the operation of pressing the adhesive tape roll T1R against the dust removal roller 41 as described in step S01, and further drives the motor 26 to send the workpiece W to the dust removal roller 41 via the conveying mechanism 25 (see FIG. 9A). Thereby, dust removal from the workpiece W is performed.

[0106] Second Embodiment A dust remover 10B according to a second embodiment of the present invention will now be described with reference to the drawings. Fig. 12 is a diagram schematically illustrating the configuration of a main part of a dust remover 10B according to the second embodiment of the present invention.

[0107] 12, three parts are provided for removing dust from the clean unit 30, the take-up cartridge 100, etc. In other words, the workpiece W is configured to be dust-removed by three clean units 30, which further improves the performance of removing dust from the workpiece W.

[0108] That is, the dust removal device 10B includes a clean unit 30 having a dust removal roll unit 40 and a tape unit 50, a tape end detection mechanism 80, and other associated components such as an upper cartridge lifting mechanism 70T and a lower cartridge lifting mechanism 70B (not shown).

[0109] In the dust removal device 10B configured in this manner, when it is determined that the time has come to update (peel off) the outermost adhesive tape T1, the outermost adhesive tape T1 in a particular clean unit 30 can be updated (peel off).

[0110] For example, of the three clean units 30 shown in FIG. 12 , the outermost adhesive tape T1 of the clean unit 30 located upstream in the transport direction of the workpiece W is renewed (peeled off). After this renewal is completed, the outermost adhesive tape T1 of the downstream clean unit 30 (for example, the next upstream clean unit 30) is renewed. Furthermore, after this renewal is completed, the outermost adhesive tape T1 of the most downstream clean unit 30 is renewed. Note that the order in which the outermost adhesive tape T1 of the clean units 30 is renewed may be set in any order. Furthermore, the outermost adhesive tape T1 of both the upper clean unit 30 and the lower clean unit 30 may be renewed simultaneously, or the outermost adhesive tape T1 of one of the upper clean unit 30 and the lower clean unit 30 may be renewed.

[0111] In this way, instead of updating (peeling off) the adhesive tape T1 on the outermost periphery of all the clean units 30 at once, by updating the adhesive tape T1 on the outermost periphery of one of the clean units 30, it is possible to continue removing dust from the workpieces W in the clean units 30 other than the clean unit 30 being updated. Therefore, it is no longer necessary to stop the line for removing dust from the workpieces W in order to update the adhesive tape T1 on the outermost periphery, and it is possible to increase the number of workpieces W that can be removed dust per hour.

[0112] <Regarding Effects> The dust removal devices 10, 10B according to the first and second embodiments as described above comprise a dust removal roller 41 that adsorbs dust adhering to the surface of the workpiece W, an adhesive tape holder 51 that transfers the dust adhering to the dust removal roller 41 and holds an adhesive tape roll T1R on which is wound adhesive tape T1 having slits at predetermined intervals, a tape end detection mechanism 80 that detects the end of the outermost adhesive tape T1 on the adhesive tape roll T1R, and a control unit 90 that controls the operation of the tape end detection mechanism 80.

[0113] The tape end detection mechanism 80 includes a holding frame 84, an end detection sensor 88 attached to the holding frame 84 and detecting the end of the outermost adhesive tape T1 in the adhesive tape roll T1R, a motor 85 (detection motor) attached to the holding frame 84, an end detection roller 87 rotatably held on the holding frame 84, given driving force from the motor 85 (detection motor), and rotating in contact with the end of the outermost adhesive tape T1 during detection, and a lifting cylinder 82 (roller lifting cylinder) that moves the end detection roller 87 toward and away from the outermost adhesive tape T1.

[0114] In addition, when the control unit 90 determines that it is time to update the outermost adhesive tape T1, it activates the lifting cylinder 82 (roller lifting cylinder) to press the end detection roller 87 against the outermost adhesive tape T1, and while in this pressed state, it activates the motor 85 (detection motor) to rotate the adhesive tape roll T1R via the end detection roller 87, and while in this rotating state, the end detection sensor 88 detects the end of the outermost adhesive tape T1.

[0115] In this configuration, the motor 85 (detection motor), the edge detection roller 87, the edge detection sensor 88, etc. are supported by the same holding frame 84. Therefore, when the edge detection roller 87 moves up and down to follow the irregularities present in the outermost adhesive tape T1, the edge detection sensor 88 also moves up and down at the same time. Therefore, the irregularity state of the outermost adhesive tape T1 can be detected with higher accuracy compared to when the edge detection sensor 88 is attached separately to the edge detection roller 87. This allows the edge (step) of the adhesive tape T1 to be renewed to be detected with higher accuracy.

[0116] Furthermore, in each embodiment of the present invention, a stepping motor can be used as the motor 85 (detection motor). In this way, when a stepping motor is used as the motor 85 (detection motor), the self-holding force when the motor is stopped in an energized state makes it possible to maintain the stopped state of the edge detection roller 87. This makes it possible to prevent the detected edge (step) of the outermost adhesive tape T1 from shifting position, which would cause problems when updating the adhesive tape T1 later.

[0117] In addition, in each embodiment of the present invention, the dust removal device 10, 10B comprises a take-up cartridge 100 which includes a take-up tube 200 that takes up used adhesive tape T1, a peeling tape holding tube 210 that holds a peeling tape roll T2R wound with peeling tape T2 for peeling the outermost adhesive tape T1 from the adhesive tape roll T1R, and a peeling roller 222 that presses the peeling tape T2 pulled out from the peeling tape roll T2R against the adhesive tape roll T1R, a take-up motor 60 that provides driving force to rotate the take-up tube 200, and a cartridge lifting mechanism (upper cartridge lifting mechanism 70T and / or lower cartridge lifting mechanism 70B) that raises and lowers the take-up cartridge 100.

[0118] Then, when the end detection sensor 88 detects the end (step) of the outermost adhesive tape T1, the control unit 90 positions the end at a standby position a predetermined distance from the end (step) and then stops driving the motor 85 (detection motor) (step S05), and after stopping the motor 85 (detection motor), activates the cartridge lifting mechanism (upper cartridge lifting mechanism 70T and / or lower cartridge lifting mechanism 70B) to press the peeling tape T2 against the outermost adhesive tape T1 via the peeling roller 222 (step S06). Then, after the peeling tape T2 has been pressed against the outermost adhesive tape T1, the control unit 90 activates the lifting cylinder 82 (roller lifting cylinder) to move the end detection roller 87, which is pressed against the outermost adhesive tape T1, in a direction away from the adhesive tape T1 (step S07). After this movement, the take-up motor 60 is driven to rotate the adhesive tape roll T1R to an excess position where the peeling tape T2 pressed against the peeling roller 222 exceeds the end of the outermost adhesive tape T1 (step S08). After the excess position is exceeded, the take-up motor 60 continues to operate, and the cartridge lifting mechanism (upper cartridge lifting mechanism 70T and / or lower cartridge lifting mechanism 70B) is operated to move the take-up cartridge 100 toward a position away from the adhesive tape roll T1R, thereby performing a renewal operation to peel off the adhesive tape T1 (step S09).

[0119] In this way, when the end (step) of the outermost adhesive tape T1 is detected by the end detection sensor 88, the end is positioned at a standby position a predetermined distance away from the end (step) and then the driving of the motor 85 (detection motor) is stopped, thereby preventing the end (step) of the adhesive tape T1 from shifting position.

[0120] Furthermore, in this stopped state, the cartridge lifting mechanism (upper cartridge lifting mechanism 70T and / or lower cartridge lifting mechanism 70B) is operated to press the peeling tape T2 against the outermost adhesive tape T1 via the peeling roller 222, thereby allowing the peeling tape T2 to be pressed against the desired position on the outermost adhesive tape T1 without misalignment.

[0121] Thereafter, the lifting cylinder 82 (roller lifting cylinder) is operated to move the end detection roller 87, which is pressed against the outermost adhesive tape T1, in a direction away from the adhesive tape T1. At this time, as described above, the peeling tape T2 is pressed against the desired position on the outermost adhesive tape T1, so by moving the end detection roller 87 away from the adhesive tape T1, the subsequent operation of peeling off the outermost adhesive tape T1 can be performed smoothly. In addition, the operation of rotating the adhesive tape roll T1R can be handed over from the motor 85 (detection motor) to the take-up motor 60.

[0122] After this, the winding motor 60 is driven to rotate the adhesive tape roll T1R to an excess position where the peeling tape T2 pressed against the peeling roller 222 exceeds the end of the outermost adhesive tape T1, thereby starting to peel the outermost adhesive tape T1 to be updated from the adhesive tape roll T1R.

[0123] Then, after the excess position is exceeded, the take-up motor 60 continues to operate while the cartridge lifting mechanism (upper cartridge lifting mechanism 70T and / or lower cartridge lifting mechanism 70B) is operated to move the take-up cartridge 100 toward a position away from the adhesive tape roll T1R, thereby ensuring the renewal operation of peeling off the adhesive tape T1.

[0124] In addition, in each embodiment of the present invention, when the peeling tape T2 is pressed against the outermost adhesive tape T1 by operation of the cartridge lifting mechanism (upper cartridge lifting mechanism 70T and / or lower cartridge lifting mechanism 70B) and the outermost adhesive tape T1 is peeled off from the adhesive tape roll T1R, a peeling start detection sensor S1 is provided which detects the leading end of the feeding of the adhesive tape T1, and a peeling end detection sensor S2 which detects the end in the feeding direction of the adhesive tape T1 being fed together with the peeling tape T2 towards the take-up tube 200.

[0125] Then, when the control unit 90 is moving the take-up cartridge 100 toward a position away from the adhesive tape roll T1R and the leading end of the adhesive tape T1 in the feeding direction is detected by the peeling start detection sensor S1, it determines that a normal peeling operation is being performed and continues driving the take-up motor 60. Furthermore, after the peeling end detection sensor S2 detects the trailing end of the feeding of the adhesive tape T1, it stops the rotation of the take-up motor 60.

[0126] When controlled in this manner, peeling of the adhesive tape T1 to be renewed can be reliably detected by detection by the peeling start detection sensor S1. Furthermore, the peeling end detection sensor S2 detects the trailing end of the feeding of the adhesive tape T1 to be renewed, so that the end of the renewal work of the adhesive tape T1 can be detected, and therefore the take-up motor 60 can be stopped from rotating.

[0127] Furthermore, in the dust removal apparatus 10B according to the second embodiment, when the dust removal roller 41, the adhesive tape holder 51, and the tape end detection mechanism 80 constitute one clean unit 30, a plurality of clean units 30 are provided. The control unit 90 controls the update operation of any one of the plurality of clean units 30 so that the update operation of the other clean units 30 is performed at a different timing.

[0128] In this configuration, the workpiece W is cleaned of dust by a plurality of clean units 30, so that the performance of removing dust from the workpiece W can be further improved.

[0129] Furthermore, instead of updating (peeling off) the adhesive tape T1 on the outermost periphery of all the clean units 30, by updating the adhesive tape T1 on the outermost periphery of one of the clean units 30, it is possible to continue removing dust from the workpieces W in the clean units 30 other than the clean unit 30 being updated. Therefore, it is no longer necessary to stop the line for removing dust from the workpieces W in order to update the adhesive tape T1 on the outermost periphery, and it is possible to increase the number of workpieces W that can be removed dust per hour.

[0130] <Modifications> Although the embodiments of the present invention have been described above, the present invention can be modified in various other ways, which will be described below.

[0131] In the second embodiment described above, a configuration is described in which three parts are provided for removing dust from the clean unit 30, the take-up cartridge 100, etc. However, the number of parts for removing dust is not limited to three, and may be two, or four or more.

[0132] 10...dust removal device, 20...casing, 21...take-up cartridge storage section, 25...conveying mechanism, 26...motor, 27...conveying roller, 30...clean unit, 40...dust removal roll unit, 41...dust removal roller, 41a...rotating shaft, 41b...adhesive rubber layer, 50...tape unit, 51...adhesive tape holder, 52...tape lifting cylinder, 60...take-up motor, 70T...upper cartridge lifting mechanism, 70B...lower cartridge lifting mechanism, 71...lifting cylinder, 72...connecting plate, 80...tape end detection mechanism, 81...fixing plate, 82...lifting cylinder da, 83...connecting plate, 84...holding frame, 85...motor, 86...drive shaft, 87...end detection roller, 88...end detection sensor, 90...control unit, 100...winding cartridge, 110...housing, 120...side plate member, 121...winding shaft support portion, 121a...removal prevention protrusion (corresponding to second removal prevention protrusion), 121b...insertion guide portion, 121c...bearing portion (corresponding to second bearing portion), 121d...insertion hole, 122...shaft support portion, 122a...removal prevention protrusion (corresponding to first removal prevention protrusion), 122b...insertion guide portion, 122c...bearing portion (corresponding to first bearing portion), 123...attaching shaft Support portion, 123a...sliding groove, 123b...axial hole, 124...thick portion, 125...handle, 130...exterior wall panel, 130a...upper surface portion, 130b...side surface portion, 130c...flange portion, 140...front cover panel (corresponding to cover member), 140a...side surface portion, 140b...guide slope portion, 150...rear cover panel (corresponding to cover member), 150a...side surface portion, 150b...steep slope portion, 160...opening, 200...winding tube, 201...pipe-shaped portion, 202...joint cover, 202a...connecting recess, 202b...guide protrusion, 210...tape holding tube, 220...sticking mechanism, 221...support Shaft, 221a...screw hole, 221b...adhesion roll shaft, 222...peeling roller, 230...pressure mechanism, 231...spring shaft, 231a...head, 232...spring member, 240...winding hold-down mechanism, 241...roll support member, 241a...shaft support slit, 241b...spring mounting shaft, 241c...spring locking portion, 242...pressure roller, 242a...roller portion, 243...biasing spring, B1...bearing, H1, H2...hinge, R1, R2...locking member, T1...adhesive tape, T1R...adhesive tape roll, T2...tape for, T2R...tape roll for, W...work

Claims

1. A dust removal device for removing dust from a workpiece, comprising: a dust removal roller that adsorbs dust adhering to the surface of the workpiece; an adhesive tape holder that transfers the dust adhering to the dust removal roller and holds an adhesive tape roll on which adhesive tape having slits at predetermined intervals is wound; a tape end detection mechanism that detects the end of the adhesive tape at the outermost periphery of the adhesive tape roll; and a control unit that controls the operation of the tape end detection mechanism, wherein the tape end detection mechanism comprises: a holding frame; an end detection sensor attached to the holding frame that detects the end of the adhesive tape at the outermost periphery of the adhesive tape roll; a detection motor attached to the holding frame; an end detection roller that is rotatably held by the holding frame, is given a driving force from the detection motor, and rotates in contact with the end of the adhesive tape at the outermost periphery during detection; and a roller lifting cylinder that moves the end detection roller toward and away from the adhesive tape at the outermost periphery, and wherein the control unit when it is determined that it is time to update the outermost adhesive tape, the roller lifting cylinder is operated to press the end detection roller against the outermost adhesive tape, the detection motor is operated in this pressed state to rotate the adhesive tape roll via the end detection roller, and the end detection sensor detects the end of the outermost adhesive tape in this rotating state.

2. A dust remover according to claim 1, characterized in that the detection motor is a stepping motor.

3. A dust removal device according to claim 2, comprising a take-up cartridge including a take-up tube for taking up the used adhesive tape, a peeling tape holding tube for holding a peeling tape roll wound with peeling tape for peeling the outermost adhesive tape from the adhesive tape roll, and a peeling roller for pressing the peeling tape pulled out from the peeling tape roll against the adhesive tape roll, a take-up motor for providing a driving force for rotating the take-up tube, and a cartridge lifting mechanism for raising and lowering the take-up cartridge, wherein when the end of the outermost adhesive tape is detected by the end detection sensor, the control unit stops driving the detection motor after positioning the end at a standby position a predetermined distance from the end, and after stopping the detection motor, operates the cartridge lifting mechanism to press the peeling tape against the outermost adhesive tape via the peeling roller, a dust removal device comprising: after pressing the peeling tape against the adhesive tape, actuating the roller lifting cylinder to move the end detection roller, which is pressed against the outermost adhesive tape, in a direction away from the adhesive tape; after this movement, driving the take-up motor to rotate the adhesive tape roll to an excess position where the peeling tape pressed against the peeling roller goes beyond the end of the outermost adhesive tape; and after the peeling tape has passed the excess position, continuing to operate the take-up motor, actuating the cartridge lifting mechanism to move the take-up cartridge toward a position away from the adhesive tape roll, thereby performing a renewal operation to peel off the adhesive tape.

4. A dust removal device according to claim 3, comprising: a peeling start detection sensor that detects the leading edge of the adhesive tape when the peeling tape is pressed against the outermost adhesive tape and the outermost adhesive tape is peeled off from the adhesive tape roll by operation of the cartridge lifting mechanism; and a peeling end detection sensor that detects the end of the feeding direction of the adhesive tape being fed together with the peeling tape towards the take-up tube, wherein the control unit determines that a normal peeling operation is being performed when the peeling start detection sensor detects the leading edge of the adhesive tape in the feeding direction while the take-up cartridge is being moved towards a position away from the adhesive tape roll, and controls the take-up motor to continue driving, and stops rotation of the take-up motor after the peeling end detection sensor detects the trailing end of the feeding of the adhesive tape.

5. A dust removal device according to claim 3 or 4, wherein when the dust removal roller, the adhesive tape holder, and the tape end detection mechanism constitute one clean unit, a plurality of clean units are provided, and the control unit controls the renewal operation of any one of the plurality of clean units to be performed at a different timing than the renewal operation of the other clean units.

6. An adhesive tape renewal method for renewing adhesive tape onto which dust transferred from a dust removal roller that adsorbs dust on the surface of a workpiece has been transferred and which is wound with gaps at predetermined intervals, the end of the outermost adhesive tape being detected by a tape end detection mechanism, the tape end detection mechanism comprising: a holding frame; an end detection sensor attached to the holding frame and for detecting the end of the outermost adhesive tape on an adhesive tape roll around which the adhesive tape is wound; a detection motor attached to the holding frame; an end detection roller rotatably held by the holding frame, given a driving force from the detection motor, and which rotates in contact with the end of the outermost adhesive tape during detection; and a roller lifting cylinder for moving the end detection roller toward and away from the outermost adhesive tape; and when it is time to renew the outermost adhesive tape, a roller pressing step of operating the roller lifting cylinder to press the end detection roller against the outermost adhesive tape; a rotation step of operating the detection motor to rotate an adhesive tape roll around which the adhesive tape is wound via the end detection roller while the outermost periphery of the end detection roller is pressed against the adhesive tape; and a detection step of using the end detection sensor to detect the end of the outermost periphery of the adhesive tape while the adhesive tape roll is rotating.

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