Substrate inspection system, inspection apparatus and inspection method

Abstract

Provided are an elongated substrate inspection system, inspection apparatus and inspection method, which are capable of smoothly and precisely inspecting a substrate provided in a roll form or a sheet form having an at least predetermined length and flexibility. The substrate inspection system of the present invention comprises: one or more inspection units for inspecting a transferred substrate; one or more substrate fixing units for fixing the substrate; and a control unit for controlling operations of the one or more inspection units and substrate fixing units, wherein at least one selected from among the one or more inspection units includes: one or more X-axis movement parts capable of moving in the X-axis direction perpendicular to the transfer direction of the substrate; and an inspection device positioned to face the surface of the substrate, each inspection device of the one or more inspection units including a camera provision unit, and each of the camera provision units including a camera provision end formed to extend from a side surface of a corresponding inspection device, and one or more cameras provided on the camera provision end.

Description

Inspection system, inspection device and inspection method of the device

[0001] The present invention relates to an inspection system, an inspection device, and an inspection method for a substrate, and more specifically, to an inspection system, an inspection device, and an inspection method for a long-length substrate that can smoothly and precisely perform inspection on a substrate provided in a roll or sheet form and having a certain length and flexibility.

[0002] There are various types of substrates available in roll or sheet form (hereinafter referred to as long-length substrates), including FPCBs, films, metal foils, and fabrics. These long-length substrates have in common that they are flexible, have a consistent width, and are very thin relative to their width.

[0003] Long-length materials with the above characteristics are processed or inspected using a roll-to-roll, roll-to-sheet, or sheet-to-sheet system. This depends on the storage method of the long-length materials. Roll means that the long-length materials are rolled into a roll shape, and sheet means that the long-length materials are cut into units of a certain length and stacked.

[0004] Accordingly, the roll-to-roll system is a system that unwinds long materials wound in a roll form, processes and inspects them, and then rewinds them into a roll form, while the roll-to-sheet system unwinds long materials wound in a roll form, processes and inspects them, and then cuts them into a certain length using a separate cutting means, and finally stores them in a sheet form.

[0005] These long-length substrate processing systems are typically categorized by the method of moving and storing the ends, and the configuration for processing and inspecting the surface of the substrate can be commonly used.

[0006] Long-length test systems, such as the one described above, can be configured in various ways depending on the type and characteristics of the test subject. However, a common characteristic is that, due to the nature of the long-length test subject being transported, displacement or displacement (hereinafter referred to as "disturbance") of the test subject frequently occurs. Therefore, when conducting a test of a test subject, it becomes crucial that the test subject be properly positioned within the test device.

[0007] To address the aforementioned issues, conventional long-length substrate processing systems have developed additional components that correct the position of the substrate itself, using rolls or suction devices, thereby eliminating the disturbance and properly positioning the substrate itself. However, these disturbance compensation devices, due to their inherent nature of applying external force to the substrate itself, can cause damage or deterioration of the substrate itself, thereby degrading its quality. Furthermore, these systems are uneconomical, as they require different disturbance compensation devices depending on the characteristics of the substrate.

[0008] The present invention provides a long-length substrate inspection system and inspection method that can be used in the long-length substrate processing system described above, and the purpose of the present invention is to provide a long-length substrate inspection system that can accurately detect and align the surface of the substrate to perform inspection, and a method for inspecting the substrate using the same.

[0009] In order to achieve the above object of the present invention, the present invention provides a substrate inspection system, comprising: at least one inspection unit for inspecting a transported substrate; at least one substrate fixing unit for fixing the substrate; and a control unit for controlling the operation of at least one inspection unit and the substrate fixing unit, wherein at least one selected from the at least one inspection unit each includes at least one X-axis moving unit that can move in the X-axis direction perpendicular to the transport direction of the substrate; and an inspection device positioned to view a surface of the substrate, wherein each of the inspection devices of the at least one inspection unit includes a camera installation unit, and the camera installation units each include a camera installation stage extended to a side surface of the corresponding inspection device; and at least one camera installed on each camera installation stage.

[0010] In the above, the inspection unit is configured as a pair so as to be positioned above and below the substrate, and the inspection unit positioned at the upper end of the substrate includes a Z-axis moving unit that can move in the Z-axis direction that is perpendicular to the surface of the substrate; and one or more X-axis moving units that can move in the X-axis direction that is perpendicular to the transport direction of the substrate, and the inspection unit positioned at the lower end of the substrate includes one or more X-axis moving units that can move in the X-axis direction that is perpendicular to the transport direction of the substrate.

[0011] In the above, at least one of the selected inspection units includes at least one Y-axis moving unit that can move in the Y-axis direction parallel to the moving direction of the substrate.

[0012] In the above, the camera installation unit is a rail that can move a camera installed in the Y-axis direction parallel to the moving direction of the device, and the camera can be moved in the Y-axis direction along the rail formed on each camera installation unit.

[0013] In the above, the camera includes an installation section connecting part connected to the camera installation section; a camera support body; and a camera unit capable of taking pictures, and a camera rotation axis is further included in the part where the camera support body and the camera unit are connected, so that the camera unit can rotate and move around the camera support body as a central axis.

[0014] In the above, each of the one or more inspection devices includes: an inspection device body; one or more individual combination pallets each installed on a surface of the inspection device body; and an inspection device that is detachably installed in a one-to-one correspondence with each of the individual combination pallets.

[0015] In the above, the inspection device further includes one or more fine control units, and the fine control units are installed one or more on the body surface of the inspection device, and correspond one-to-one with one or more individual combination pallets, and the individual combination pallets are respectively installed on the fine control units, and the fine control units each preferably include a pallet X-axis transport device that moves the individual combination pallet in the X-axis direction; a pallet Y-axis transport device that moves the individual combination pallet in the Y-axis direction; and a pallet rotation device that rotates the individual combination pallet.

[0016] In the above, the individual combined pallets include a pallet body; one or more inspection coupling portions formed on a side of the pallet body; and one or more inspection coupling devices installed on each of the inspection coupling portions, wherein the inspection device includes a material inspection device that performs an inspection on a material; one or more pallet coupling portions formed on a side of the material inspection device; and one or more pallet coupling devices installed on each of the pallet coupling portions, and it is preferable that the one or more inspection coupling devices and the pallet coupling device are detachably coupled to each other.

[0017] In the above, the inspection device further includes a fixed plate; and a body microcontroller installed between the fixed plate and the inspection device body to connect the fixed plate and the inspection device body, and it is preferable that the body microcontroller includes a body X-axis transfer device for moving the inspection device body in the X-axis direction; a body Y-axis transfer device for moving the inspection device body in the Y-axis direction; and a body rotation device for rotating the inspection device body.

[0018] In the above, it is preferable that each of the at least one substrate fixing portion includes a pressing portion for fixing the substrate, and the pressing portion includes: a pressing portion body; a fixing body that contacts the substrate and presses the substrate; and a pressing portion connecting body that is installed in the pressing portion body so as to be able to move up and down, and at an end of which the fixing body is installed.

[0019] In the above, it is preferable that the end of the fixture be curved and the outer surface be treated with one selected from rubber, sponge, and resin materials.

[0020] In the above, each of the at least one substrate fixing portions further includes a contact portion, wherein the contact portion includes a contact portion body; and a contact portion that comes into contact with the substrate, and it is preferable that the outer surface of the contact portion is treated with any one selected from rubber, sponge, and resin materials.

[0021] And, as a material inspection method using the long-length material inspection system of the present invention, the present invention provides a material inspection method, which comprises a material information input and inspection unit setting step (S1) in which information about the material is input to the control unit and one or more inspection units are set; a material transport step (S2) in which the material is transported; an inspection unit position alignment step (S3) in which the one or more inspection units are respectively moved in one or more directions selected from the X-axis, the Y-axis, and the Z-axis and aligned and positioned on the material; a material fixing step (S4) in which the material is fixed according to the operation of the material fixing unit; a material inspection step (S5) in which the material is inspected by one selected from the one or more inspection units; and a material removal step (S6) in which the material is released from the fixed state according to the operation of the material fixing unit and the material is transported and removed.

[0022] In addition, as a substrate inspection method using the long-length substrate inspection system of the present invention,

[0023] Information about the substrate is input into the control unit, and a substrate information input and inspection unit setting step (S1) for setting the pair of inspection units; a substrate transport step (S2) for transporting the substrate; an inspection unit position alignment step (S3) for moving the pair of inspection units in at least one direction selected from the X-axis, the Y-axis, and the Z-axis to be aligned and positioned on the substrate; a substrate fixing step (S4) for fixing the substrate according to the operation of the substrate fixing unit; a substrate inspection step (S5) for inspecting the substrate by any one selected from the pair of inspection units; and a substrate removal step (S6) for releasing the fixation state of the substrate according to the operation of the substrate fixing unit and transporting and removing the substrate is performed, whereby an inspection of the substrate is performed, and the substrate information input and inspection unit setting step (S1) comprises: a substrate information input step (S11) for inputting substrate information into the control unit; a first inspection unit status confirmation step (S12) for checking the status of the first inspection unit inspection device at the upper side by using at least one camera of the second inspection unit at the lower side among the pair of inspection units; A method for inspecting a material is provided, comprising: a second inspection unit status confirmation step (S13) in which at least one camera of the first inspection unit at the top among the pair of inspection units checks the status of the inspection device of the second inspection unit at the bottom; and a step (S16) in which, if there is an abnormality in any one of the pair of inspection units during the steps (S12, S13), the control unit notifies that there is an abnormality in the corresponding inspection unit.

[0024] In the above, the inspection unit position alignment step (S3) preferably includes a step of confirming the transferred material (S31); a step of identifying the current position and state of the material (S32); and a step of notifying the material of departure through the control unit (S35) if the disturbance of the material in the step (S32) exceeds the preset correction range, and a step of moving at least one of the inspection units in at least one direction selected from the X-axis and the Y-axis and aligning the inspection unit on the material in the step (S32) is performed at least once (S33, S34).

[0025] In the above, it is preferable that one of the steps (S33, S34) in which the inspection unit is aligned on the substrate further includes a step of fixing the substrate through the substrate fixing unit.

[0026] In the above, it is preferable that the steps (S33, S34) in which the inspection unit is aligned on the substrate further include at least one fine adjustment step for the corresponding inspection device of the moving inspection unit.

[0027] In the above, the substrate inspection system may further include one or more vision inspection devices.

[0028] In the above, it is preferable that one or more vision inspection devices are positioned so that the shooting angle is perpendicular to one of the upper or lower surfaces of the substrate, and the position is displaced in response to the movement of the substrate to maintain the vertical shooting angle.

[0029] In the above, the substrate inspection system may further include a cutting section.

[0030] According to the present invention, since the inspection device for inspecting the substrate can be attached and detached, not only can customized inspection of the substrate be possible, but also a defective inspection device can be easily replaced, facilitating maintenance, and since the inspection device can be accurately positioned on the inspection surface of the substrate in response to even a slight change in the position of the substrate, the inspection quality can be improved.

[0031] Figure 1 is a schematic structural diagram of the inspection system of the present invention.

[0032] Figure 2 is a perspective structural diagram of the inspection unit of the present invention.

[0033] Figure 3 is a structural diagram of the camera of the present invention.

[0034] Figure 4 is a structural diagram of the inspection device of the present invention.

[0035] Figure 5 is a structural diagram of the substrate fixing unit of the present invention.

[0036] Figures 6 and 7 are structural diagrams of the device fixing unit operation of the present invention.

[0037] Figures 8, 9 and 11 are flowcharts of the operation of the present invention.

[0038] Figures 10, 12, 14 and 15 are movement operation drawings of an inspection device according to the operation of the present invention.

[0039] Figure 13 is a drawing of a camera movement operation according to the operation of the present invention.

[0040] Figure 16 is a structural diagram of a second example of the inspection system of the present invention.

[0041] Figure 17 is a structural diagram of the operation of the vision inspection device of the present invention.

[0042] Figure 18 is a second example operation flow chart of the inspection system of the present invention.

[0043] Figure 19 is a structural diagram of a third example of the inspection system of the present invention.

[0044] The present invention is described in more detail below with reference to preferred embodiments and the accompanying drawings. The following description is intended to aid understanding and practice of the present invention and is not intended to limit the scope of the invention. Those skilled in the art will appreciate that various modifications, variations, or alterations may be made within the scope of the invention as set forth in the claims below.

[0045] FIG. 1 is a schematic structural diagram of a long-length substrate processing / inspection process including the inspection system (10) of the present invention. Hereinafter, components included in the inspection system (10) of the present invention will be schematically described through FIG. 1.

[0046] Before the explanation, as mentioned above, the long-length substrate processing / inspection process is largely divided into roll-to-roll, roll-to-sheet, and sheet-to-sheet processes, and FIG. 1 schematically illustrates the roll-to-roll process as an example. This is an exemplary description, and the system (10) of the present invention can also be used in other processes in which long-length substrates are introduced and removed.

[0047] What is shown in Fig. 1 is a typical roll-to-roll system, which includes an unwinder section (20) for introducing a long material (M), and a rewinder section (30) for collecting the material (M) that has passed through the inspection system (10) of the present invention. The unwinder section (20) includes one or more typical components, such as an unwinder (20) on which a typical material (M) is wound, a conveying roller for conveying and tension control, and a dancer roller, and the rewinder section (30) includes one or more typical components, such as a rewinder (30) for rewinding the conveyed material (M), and a conveying roller for conveying and tension control, and a dancer roller.

[0048] In the conventional roll-to-roll system as described above, the inspection system (10) of the present invention includes one or more inspection units (100, 200) for conducting an inspection on a transported material (M), one or more material fixing units (300) for fixing the material (M), and a control unit (400) for controlling the operation of the one or more inspection units (100, 200) and the material fixing units (200).

[0049] Fig. 2 is a perspective structural diagram of the inspection unit (100, 200) of the present invention. Hereinafter, the configuration of the inspection unit (100, 200) of the present invention will be described with reference to Fig. 2.

[0050] Before the explanation, it should be noted that one of the inspection units (100, 200) of the present invention, for example, the first inspection unit (100) at the top, is a device that actually performs an inspection on the material (M) being introduced, and the second inspection unit (200) at the bottom may be a conventional support. Accordingly, the device that actually performs an inspection on the material (M) is at least one in the inspection system of the present invention.

[0051] Alternatively, both devices may be capable of performing inspections on the substrate (M). This will be explained in detail in the description of the configuration below.

[0052] In addition, although the inspection units (100, 200) are configured as a pair in FIG. 2, they may be configured as just one, and thus, one or more inspection units (100, 200) may be included in the system (10) of the present invention.

[0053] Referring to FIG. 2, one or more inspection units (100, 200) of the present invention will be described. First, one of the one or more inspection units, for example, the first inspection unit (100), includes a Z-axis moving unit (110) that can move in the Z-axis direction (the direction perpendicular to the substrate surface).

[0054] And, one or more inspection units (100, 200) of the present invention each include an X-axis moving unit (120, 220) that can move in the X-axis direction (a direction perpendicular to the moving direction of the substrate), and also includes an inspection device (140, 240) that performs an inspection on the substrate (M).

[0055] At this time, one (140) of the above inspection devices (140, 240) may be a device that actually performs an inspection on the substrate (M), and the other (240) may be the conventional support described above. With the above configuration, a system is created that inspects the surface of the substrate (M) facing one (140) of the above inspection devices.

[0056] Alternatively, the above inspection devices (140, 240) may be configured as devices that perform inspections on the substrate (M), and this configuration becomes a system that inspects both the upper and lower sides of the substrate (M).

[0057] The above Z-axis moving unit (110) is configured to move the inspection device (140) in the Z-axis direction, and the X-axis moving unit (120) is configured to move the inspection device (140) in the X-axis direction.

[0058] Here, as illustrated in FIG. 2, the inspection units (100, 200) of the present invention are positioned above and below the substrate (M). If a Z-axis moving unit (110) is installed in one of the inspection units (100), the Z-axis moving unit (110) may be omitted from the remaining second inspection unit (200). In this case, the second inspection unit (200) is fixed without moving in the Z-axis direction, and can only move in the X-axis direction.

[0059] And the X-axis moving unit (120) includes one or more X-axis moving devices (122), and may further include an X-axis moving unit body (121). The X-axis moving device (122) is a device that substantially moves the inspection device (140) in the X-axis direction as described above, and may be configured and used as a conventional device that can linearly move the inspection device (140), such as a conventional actuator, motor, or linear gear.

[0060] Here, the moving body (121) is a body configuration for connecting the one or more X-axis transfer devices (122) and the Z-axis transfer device (110). If the Z-axis transfer device (110) is omitted, the X-axis transfer device body (121) may also be omitted, so that the one or more X-axis transfer devices (122, 222) may be directly connected to the inspection device (140, 240).

[0061] Or, even if the Z-axis moving part (110) is omitted, as shown in the second inspection part (200) of FIG. 2, the second inspection part moving part body (221) is included, and while the second inspection part moving part body (221) is fixed to an external wall or device, one or more second inspection part X-axis moving devices (222) can be installed on the second inspection part moving part body (221).

[0062] And, the Z-axis moving part (110) connected to the X-axis moving part body (121) can also be configured and used as a conventional device capable of linearly moving the inspection device (140), such as a conventional actuator, motor, or linear gear, just like the X-axis moving device (122).

[0063] In addition, a Y-axis moving unit (150) that can additionally move the inspection device (140, 240) in the Y-axis direction (parallel to the material movement direction) may be added between the X-axis moving unit (120, 220) and the inspection device (140, 240). The Y-axis moving unit (150) may also be configured and used as a conventional device that can linearly move the inspection device (140), such as a conventional actuator, motor, or linear gear.

[0064] And the Y-axis moving unit (150) may be included only in one of the inspection units (100, 200) of the present invention, for example, only in the first inspection unit (100) at the top as shown in FIG. 2, and may not be included in the remaining second inspection unit (200). In this case, the inspection device (140) connected to the Y-axis moving unit (150) can actively perform Y-axis movement, and the inspection device (240) not connected to the Y-axis moving unit can determine its own position through relative movement according to the Y-axis movement of the facing inspection device (140).

[0065] Alternatively, the Y-axis movement unit (150) may be included in both the inspection units (100, 200). This can be freely determined according to the manufacturer's needs.

[0066] Additionally, a camera installation part (130, 230) is installed on the side of the above inspection device (140, 240).

[0067] The above camera installation unit (130, 230) includes a camera installation section (131, 231) that extends to the side of the inspection device (140, 240), and one or more cameras (132, 232) that are installed on the camera installation section (131, 231).

[0068] The first inspection camera (132), which is one of the above cameras (132, 232), is illustrated in FIG. 3. Hereinafter, the structure of the camera (132, 232) will be described with reference to FIG. 3.

[0069] Before the explanation, the following will describe one (132) of the above cameras (132, 232), and the configuration of the other (232) may be the same.

[0070] As shown in FIG. 3, the camera (132) includes an installation unit connecting part (1321) connected to the installation unit (131) so that it can be installed on the first inspection unit camera installation unit (131).

[0071] And the above-mentioned installation connection part (1321) is installed in connection with a camera support body (1322), and a camera part (1323) capable of taking pictures is installed at the end of the camera support body (1322). The camera part (1323) is installed by including one or more conventional optical / vision cameras capable of taking pictures in the infrared, visible light, ultraviolet range, etc.

[0072] In addition, a camera rotation axis (1324) is further installed at the part where the camera support body (1322) and the camera unit (1323) are connected, so that the camera unit (1323) can rotate and move around the camera support body (1322) as the central axis.

[0073] Although it is preferable that the camera (132, 232) be configured as described above, the camera (132, 232) may also be an inspection vision camera used in a typical roll-to-roll system.

[0074] The installation direction of the above cameras (132, 232) is such that they can photograph the surface of the facing inspection device (140, 240). Accordingly, the first inspection unit camera (132) can photograph the facing second inspection unit inspection device (240), and the second inspection unit camera (232) is installed so as to photograph the facing first inspection unit inspection device (140).

[0075] In addition, the above cameras (132, 232) may be installed in multiple numbers to take pictures of the inspection device (140, 240), and may also be installed so as to be movable on the camera installation stage (131, 231). For example, if the installation stage (131) of the camera (132, 232) is configured with a conventional rail, etc., and the installation stage connecting part (1321) is installed so as to be slidable in the Y-axis direction on the rail-shaped installation stage (131) including a conventional motor, etc., the camera (132) may be able to take pictures while moving in the Y-axis direction along the installation stage (131).

[0076] If the camera (132, 232) is installed so as to be movable in the Y-axis direction as described above, it is preferable that the Y-axis moving unit (150) be omitted. Conversely, if the Y-axis moving unit (150) is included in the present invention, it is preferable that the camera (132, 232) be installed in a fixed manner. This is because the Y-axis movement of the camera (132, 232) is necessary for filming the inspection device (140, 240), and there is no need to necessarily have two moving means.

[0077] Fig. 4 is a perspective structural diagram of the inspection device (140) of the present invention. Hereinafter, the configuration and operation of the inspection device (140) of the present invention will be described with reference to Fig. 4.

[0078] Before the explanation, each of the inspection units (100, 200) of the present invention includes one inspection device (140, 240), and the inspection device (140) illustrated in FIG. 3 is an example structural diagram of one of them, and the remaining inspection devices (240) may be a typical stand. Alternatively, if the remaining inspection devices (240) may also be inspection devices that perform inspections on a substrate (M), they may be configured in the same manner as the inspection device (140) of the first inspection unit (100) to be described below, and therefore, the description of the configuration of the remaining inspection devices (240) will be omitted.

[0079] As illustrated in FIG. 4, the inspection device (140) of the present invention first includes an inspection device body (141) that is coupled with the X-axis transport device (122) and can be transported in the X-axis direction and on which a camera installation unit (130) can be installed laterally.

[0080] And the above inspection device (140) includes at least one individual combination pallet (143) that can be installed in combination with the inspection device body (141), and also includes at least one inspection device (144) that can be installed on the individual combination pallet (143) and can perform actual inspection on the material (M).

[0081] Here, the inspection device body (141) can be divided into one or more sections (1410; 1410a, 1410b, 1410c) as illustrated in Fig. 4. The individual combination pallets (143) are each installed in the section (1410) divided as described above, and thus, a plurality of individual combination pallets (143) can be installed on the inspection device body (141).

[0082] In addition, the individual combination pallet (143) may be fixedly installed on the inspection device body (141), but in order to precisely control the individual combination pallet (143) and the inspection device (144) coupled thereto, the inspection device (140) of the present invention may further include one or more pallet fine control units (142).

[0083] The above pallet fine control unit (142) is installed between the inspection device body (141) and the individual combination pallets (143). Specifically, the pallet fine control unit (142) is installed on each section (1410) of the inspection device body (141), and the individual combination pallets (143) are installed on the pallet fine control unit (142), so that the individual combination pallets (143) can be moved by the pallet fine control unit (142).

[0084] The above-described pallet fine control unit (142) includes a pallet X-axis transport device (1421) that can move the individual combination pallet (143) in the X-axis direction, a pallet Y-axis transport device (1422) that can move the individual combination pallet (143) in the Y-axis direction, and a pallet rotation device (1423) that can rotate the individual combination pallet (143).

[0085] The above-described pallet X-axis transport device and Y-axis transport device (1421, 1422) are configured through a combination of conventional devices capable of linearly moving the connected individual combined pallets (143), such as linear actuators, motors, linear gears, etc., and the pallet rotation device (1423) is also configured with conventional devices capable of rotating the individual combined pallets (143), such as rotation motors, so a detailed description thereof is omitted.

[0086] In addition, each component (1421, 1422, 1423) of the above-mentioned pallet fine control unit (142) may be individually installed on the inspection device body (141), or may be installed in a manner of being interlocked and connected to each other. This can be selected by the manufacturer during manufacturing, and a description thereof will be omitted. In addition, the above-mentioned pallet fine control unit (142) may further include additional components, such as linear rails or bearings, to prevent the components (1421, 1422, 143) from interfering with each other's movements during operation. Since this can also be done using conventional, well-known methods, a description thereof will be omitted.

[0087] And the above individual combination pallet (143) includes a pallet body (1431) that is a body that is combined with the inspection device body (141) or the pallet fine control unit (142), and one or more inspection device combination units (1432) may be additionally formed on the side of the pallet body (1431).

[0088] In addition, the above inspection device (144) includes a material inspection device (1441) that performs an inspection on the material (M), and one or more pallet coupling parts (1442) may be additionally formed on the side of the material inspection device (1441).

[0089] It is preferable that the inspection device (144) be detachably coupled to the individual combination pallet (143) as described above. Accordingly, at least one inspection device coupling device (1433) is installed in each inspection device coupling portion (1432), and at least one pallet coupling device (1443) is installed in each pallet coupling portion (1442), so that the inspection device coupling device (1433) and the pallet coupling device (1443) are detachably coupled to each other, thereby allowing the inspection device (1444) to be installed on the individual combination pallet (143).

[0090] The above-mentioned inspection device coupling part (1432) and inspection device coupling device (1433), and the pallet coupling part (1442) and pallet coupling device (1443) may use a conventional detachable coupling means such as a spring or hydraulic fixing device, or a conventional means such as a bolt coupling may be used.

[0091] In addition, by allowing the inspection device (144) to be detachably attached to the individual combination palette (143) in this way, the inspection device (144) can be replaced and installed according to the type of substrate and the pattern of the circuit within the substrate, thereby increasing the versatility of the inspection device of the present invention. In addition, a defective inspection device (144) can be easily removed, making maintenance very simple and easy.

[0092] Additionally, the inspection device (140) of the present invention may be installed with a fixing plate (145) further included in the lower part of the inspection device body (141).

[0093] When the above fixed plate (145) is further included in the inspection device (140) of the present invention, the X-axis moving part (120) or the Y-axis moving part (150) is fixedly installed on the fixed plate (145), so that the fixed plate (145) moves along the X-axis or Y-axis along the moving part (120, 150).

[0094] And, a body fine control unit (146) is installed on the fixed plate (145), and the body fine control unit (146) is connected and installed at the bottom of the inspection device body (141), so that the entire inspection device body (141) can be finely controlled based on the fixed plate (145).

[0095] The above body fine control unit (146) also includes a body X-axis transfer device (1461) that can move the inspection device body (141) in the X-axis direction, a body Y-axis transfer device (1462) that can move the inspection device body (141) in the Y-axis direction, and a body rotation device (1463) that can rotate the inspection device body (141).

[0096] The above-described body X-axis transfer device and Y-axis transfer device (1461, 1462) are configured through a combination of conventional devices capable of linear movement, such as linear actuators, motors, linear gears, etc., and the body rotation device (1463) is also configured with conventional devices, such as rotation motors, etc., so a detailed description thereof is omitted.

[0097] Figure 5 is a structural diagram of the substrate fixing unit (300) of the present invention. Hereinafter, the components of the substrate fixing unit (300) of the present invention will be described through Figure 5.

[0098] As illustrated in FIG. 5, the substrate fixing unit (300) of the present invention includes a pressing unit (310) for fixing the substrate (M), and may further include a contact unit (320) for more firmly fixing the substrate (M) by being in close contact with the pressing unit (310).

[0099] The above pressing part (310) includes a pressing part body (311), a fixing body (313) that contacts the base material (M) and presses the base material (M), and a pressing part connecting body (312) that is installed in the body (311) so as to be able to move up and down, and the fixing body (313) is installed at an end to enable the fixing body (313) to move up and down in the Z-axis direction.

[0100] The body (311) and the pressing member connecting member (312) as described above can be configured using conventional means that can implement a lifting motion through a configuration such as a conventional linear actuator, so a detailed description thereof is omitted.

[0101] In addition, it is preferable that the end (314) of the fixture (313) that comes into contact with the substrate (M) is curved and has its outer surface treated with a relatively soft and pliable rubber, flexible resin material, or sponge material, in order to prevent damage to the substrate (M).

[0102] Accordingly, the fixed body (313) and the end (314) may be provided in the form of a bar with a curved end (314) as shown in FIG. 5, but may also be provided in the form of a roll.

[0103] In addition, the above-mentioned contact portion (220) includes a contact portion (321) in which the bottom surface of the substrate (M) comes into contact with the contact portion body (322) and the upper part of the contact portion body (322). It is also preferable that the outer surface of the contact portion (321) be treated with a relatively soft and pliable rubber or sponge material.

[0104] Fig. 6 is a diagram showing the operation structure of the pressing part (310) and the contact part (320), and Fig. 7 is a diagram showing the overall operation structure of the material fixing part (300; 300a, 300b). Hereinafter, the operation of the material fixing part (300; 300a, 300b) will be described with reference to Figs. 6 and 7.

[0105] As illustrated in FIG. 7, the above-described fixing unit (300) is included in the system of the present invention at least once, but is preferably configured as a pair (300a, 300b) and positioned in front and behind the inspection unit (100, 200) of the present invention.

[0106] A of FIG. 6 and FIG. 7 shows that the substrate fixing unit (300), or more precisely, the pressing unit (310; 310a, 310b) of the substrate fixing unit (300), is not operating. At this time, the substrate (M) is not fixed and can be moved in the Y-axis direction. In order to smoothly transport the substrate (M), the substrate (M) is spaced apart from the inspection device (240) of the second inspection unit (200) at the bottom by a certain distance (r1), and the end (314) of the pressing unit (310) and the substrate (M) are also spaced apart by a certain distance (r3). In addition, the substrate (M) is spaced apart from the inspection device (140) of the first inspection unit at the top by a certain distance (r4).

[0107] Accordingly, in state A of FIGS. 6 and 7, since there is no means of applying pressure to the substrate (M), it can be freely moved by an external force.

[0108] At this time, it is preferable that the above-mentioned contact portion (320) be positioned lower in the Z-axis direction than the second inspection unit inspection device (240), and therefore, a Z-axis distance difference of a certain distance (r2) occurs between the second inspection unit inspection device (240) and the contact portion (321) of the contact portion (320). Accordingly, the distance between the above-mentioned contact portion (320) and the substrate (M) becomes r1+r2.

[0109] In the above state, when the pressing part (310) operates so that the contact part (314) comes down to the contact part (321) of the adhesion part (320) (r1+r2+r3), the substrate (M) is fixed by being pressed by the pressing pressure of the fixing body (313) (B of FIGS. 6 and 7). At this time, since the adhesion part (320) is lower than the second inspection unit inspection device (240), the substrate (M) receives additional pressing pressure due to its own tension not only from the pressing pressure of the fixing body (313) but also from the distance (r2) generated between the adhesion part (320) of the substrate (M) and the inspection device (240), so that the substrate (M) can be fixed by being pressed more closely between the inspection devices (240).

[0110] Accordingly, as shown in B of FIGS. 6 and 7, by pressing both ends of the substrate (M) according to the operation of the pressing part (310; 310a, 310b), the substrate (M) can be firmly fixed on the second inspection part inspection device (240) without fear of detachment due to vibration, etc.

[0111] In the above situation, as shown in C of FIG. 7, when the connected first inspection unit inspection device (140) descends and comes into contact with the upper end of the substrate (M), the gap (ㄱ4) may also disappear so that the substrate (M) may completely come into contact with the inspection unit (100, 200).

[0112] And the release of the fixation for the above description (M) can be done by operating in reverse order from state C of Fig. 4 to state A.

[0113]

[0114] Figure 8 is an operation flow chart of the inspection system (10) of the present invention. Hereinafter, the operation flow chart of the inspection system (10) of the present invention will be described with reference to Figure 8.

[0115] As described above, the inspection system (10) of the present invention includes a control unit (400), and the control unit (400) is connected to the remaining components (100 to 300) to operate the inspection system (10) of the present invention by a pre-installed operation program, and may also operate other components of the roll-to-roll system for the operation of the inspection system (10), for example, one or more components for transporting a material.

[0116] First, the step of inputting information about the device (M) into the control unit (400) and setting the inspection unit (S1) is performed.

[0117] In the above step (S1), not only the type of the substrate (M), but also the unique properties and physical data of the substrate, and the characteristics to be inspected within the substrate are input. For example, if the substrate (M) is an FPCB with a printed circuit, and the substrate inspector (1441) within the inspection unit (100) is a BBT inspector for conducting a continuity test, the information input to the control unit (400) will include information for conducting the BBT test.

[0118] And the material transfer step (S2) in which the above material (M) is transferred is performed. In the above step (S2), the material (M) to be inspected is introduced into the inspection area.

[0119] And, the inspection unit position alignment step (S3) is performed in which the positions of each inspection unit (100, 200) are aligned. In the step (S3), the inspection units (100, 200) are positioned and aligned according to the shape of the substrate (M).

[0120] And, a material fixing step (S4) in which the material (M) is fixed by the operation of the material fixing unit (300) is performed, a material inspection step (S5) in which the material is inspected by the inspection unit (100, 200) is performed, and after the step (S5), the material (M) is released from the fixed state by the operation of the material fixing unit (300), and a material removal step (S6) in which the material is transported is performed, so that the system (10) of the present invention can perform an inspection on the material (M).

[0121] At this time, when the above-mentioned material removal step (S6) is performed, if the above-mentioned material (M) is a continuous long material, the area of ​​the next material (M) to be inspected is introduced into the inspection unit (100, 200), so it can be seen that the above-mentioned material transfer step (S2) is performed simultaneously with the performance of the above-mentioned material removal step (S6).

[0122] Below, each of the above steps (S1 to S6) is described in more detail through the attached drawings.

[0123] Figure 9 is a specific flowchart of the above-mentioned step of entering the information and setting the inspection section (S1). Hereinafter, the above-mentioned step (S1) will be described in detail with reference to Figure 9.

[0124] First, the description information input step (S11) is performed to input description information (M).

[0125] In the above step (S11), the input of the substrate information (M) can be input by the user through a typical input / output interface included in the control unit (400), and can also be input by being detected / identified / calculated through another typical component in a substrate transport system such as a roll-to-roll system including the system (10) of the present invention. The input through the typical input / output interface as described above, or the detection / identification / calculation through typical components, can be performed using typical well-known configurations and methods, and therefore, a description thereof will be omitted.

[0126] And a step (S12, S13) of checking the status of the inspection device (140, 240) in the inspection unit (100, 200) is performed.

[0127] At this time, the step (S12) of checking the status of the inspection device (140) of the first inspection unit and the step (S13) of checking the status of the inspection device (240) of the second inspection unit can be performed simultaneously. Hereinafter, the step (S12, S13) being performed simultaneously will be described as an example.

[0128]

[0129] Fig. 10 is a surface structure diagram of the above-described inspection paper (1441). Hereinafter, an embodiment of the above steps (S12, S13) will be described with reference to Fig. 7.

[0130] The purpose of the above steps (S12, S13) is to check the status of the inspection device (140, 240), and as described above, the inspection device (140, 240) is photographed by a camera (132, 232) including a normal vision camera facing each other, so that the camera (132, 232) can check the status of the inspection device (140, 240) facing each other.

[0131] For example, when inspecting the equipment inspector (1441) included in the first inspection unit inspection device (140), the subject of the photographing will be the second inspection unit camera (232).

[0132] And since the second inspection unit camera (232) can move in the X-axis and Y-axis (AX, AY), it can photograph the entire equipment inspection device (1441).

[0133] For example, if the above-described equipment inspector (1441) is a BBT inspection device, a plurality of BBT inspection probe pins (P) will be arranged on the equipment inspector (1441), and the status of the pins (P) inside the equipment inspector (1441) must be photographed to inspect whether there are any defective pins. At this time, the second inspection unit camera (232) photographs the surface of the equipment inspector (1441) and, when inspecting the pins (P), even if the entire equipment inspector (1441) is not photographed at once, a plurality of photographs can be taken while moving in the X-axis direction (AX) and the Y-axis direction (AY), and by combining the photographed photographs, the entire surface of the equipment inspector (1441) can be photographed, and thus, all pins (P) can be inspected.

[0134] At this time, the X-axis direction for the camera (232) can be achieved by the connected X-axis moving unit (220), and the Y-axis direction movement of the camera (232) can be achieved by moving the inspection unit (240) together with the linked camera (232) if the Y-axis moving unit is configured, and if the camera (232) is configured to be able to move in the Y-axis on the camera installation unit (231), the camera (232) can actively perform Y-axis direction movement (AY) to take pictures.

[0135] Alternatively, the above camera (232) may be configured with two or more vision cameras and installed at regular intervals on the camera installation unit (231), so that the entire equipment inspection device (1441) can be photographed only by moving the X-axis (AX).

[0136] The inspection unit (140, 240) can be inspected in the same manner as above, and the steps (S12, S13) can be performed.

[0137] As a result of the inspection performed according to the above steps (S12, S13), if there is no abnormality in both inspection units (140, 240), a step (S14, S15) of notifying that there is no abnormality in the inspection results for each inspection unit (140, 240) is performed, and then the process proceeds to the above-mentioned material transfer step (S2).

[0138] And, as a result of the inspection performed according to the above steps (S12, S13), if there is an abnormality in one or more of the two inspection units (140, 150), a step (S16) of notifying that there is an abnormality in the corresponding inspection unit is performed and the process is terminated.

[0139] At this time, the notification in the above step (S16) may be implemented through a means that the user can recognize through the control unit (400), or the user may be notified through a conventional terminal or the like that is connected to the control unit (400) in a wired or wireless manner.

[0140] And as a result of the inspection performed according to the above steps (S12, S13), if both inspection units (140, 150) are found to be free of abnormalities, a step (S14, S15) is performed to notify the control unit (400) that there are no abnormalities in both inspection units, and then the process proceeds to the next step (S2).

[0141]

[0142] Fig. 11 is a specific flowchart of the inspection unit position alignment step (S3) of the present invention. Hereinafter, the specific steps of the inspection unit position alignment step (S3) of the present invention will be described with reference to Fig. 8.

[0143] First, since the material (M) has been transferred through the previous step (S2), a step (S31) is performed to confirm this. Since the movement amount of the material to be transferred, etc. has been set in the above setting step (S1), it is checked whether the material (M) has been transferred by the set movement amount. If it needs to be moved more or has been moved too much, the step (S2) can be returned to the above step and the material can be moved to match.

[0144] And the step (S32) of determining the current location and status of the equipment (M) is carried out.

[0145] In the above step (S32), the position and state of the above-mentioned device (M) can be achieved through the camera (132, 232). At this time, it is determined whether there is any disturbance (hereinafter referred to as disturbance) such as distortion or displacement of the device (M). If there is any disturbance, it is checked whether it is within the allowable range that can be corrected through the operation of the above-mentioned inspection unit (100, 200). If it exceeds the allowable range, the above-mentioned control unit (400) performs the step (S35) of notifying the user of the displacement of the device and terminates the step.

[0146] And if there is a disturbance but within the allowable range, first, a step (S33) of moving one of the inspection units, for example, the second inspection unit (200), is performed to align the second inspection unit (200) on the substrate (M), and then a step (S34) of moving the remaining first inspection unit (100) is performed to align the first inspection unit (100) on the substrate (M), thereby aligning the inspection units (200, 300) on the substrate (M). Then, the process can proceed to the next step (S4).

[0147]

[0148] Fig. 12 is a structural diagram showing the movement form of each inspection device (140, 240) according to the implementation of the above steps (S32 to S34), and Fig. 13 is a structural diagram showing the form in which the camera (132, 232) obtains the movement amount of the inspection unit (100, 200). Hereinafter, the above steps (S32 to S34) will be described in more detail through Figs. 12 and 13.

[0149] First, a method for calculating the movement amount of each inspection device (140, 240) and the inspection unit (100, 200) linked thereto will be described through FIG. 13.

[0150] In the above step (S32), the camera (132, 232) included in each inspection unit (100, 200) can take pictures of the substrate (M), and at this time, there is one or more markers (Pa) displayed at specific locations on the substrate (M). The markers (Pa) are marks uniquely displayed on the substrate (M) and serve as alignment criteria for the inspection units (100, 200).

[0151] Alternatively, the marker (Pa) may be any pattern or shape recorded or printed on the substrate (M), even if it is not uniquely displayed on the substrate (M).

[0152] When the above camera (132, 232) is fixed at a specific position of the inspection unit (100, 200), for example, when the camera (132) of the first inspection unit (100) takes a picture at an unaligned current position (132'), the marker (Pa) will be taken as being located at a corner distance rather than the exact center, and the control unit (400) that transmits the captured image of the unaligned camera (132') can calculate the X-axis movement amount (dx) and the Y-axis movement amount (dy) for the inspection unit (100).

[0153] And when the camera (132) of the inspection unit (100) is fixed, if the X-axis movement unit (110) is moved by the calculated X-axis movement amount (dx) and the Y-axis movement unit (150) is moved by the calculated Y-axis movement amount (dy), the marker (Pa) will be captured at the exact center of the image captured by the camera (132) of the inspection unit (100), and thus it can be confirmed that the inspection unit (100) and the inspection device (140) linked thereto are aligned in the correct position on the substrate (M). Since the alignment of the inspection device (240) of the second inspection unit (200) can also be performed in the same manner as the alignment method of the first inspection unit (100) described above, a description thereof will be omitted.

[0154] And, the above Y-axis moving part (150) may not be configured, and only the camera (132, 232) may be configured to be able to move in the Y-axis direction. In this case, the control part (400) operates the transport device within the system to move the material (M) by the calculated Y-axis movement amount (dy) to achieve alignment.

[0155] And referring to FIG. 12, after the step of determining the location of the substrate (S32), if there is no disturbance or if there is disturbance but it is within the allowable range, a step (S33) is performed in which one of the inspection units (100, 200), for example, the second inspection unit (200), is first moved to align the inspection device (240) of the second inspection unit, and then a step (S34) is performed in which the first inspection unit (100) is moved to align the inspection device (140) of the first inspection unit, so that the first and second inspection devices (140, 240) are aligned on the substrate (M) after the step (S34).

[0156] And after the second inspection unit inspection device (240) is aligned through the step (S33), it is preferable that a step of operating one or more of the material fixing units (300) is first performed before the step (S34) is performed, so that the material (300) is fixed on the aligned second inspection unit inspection device (240) as described above, and the step (S34) is performed in that state.

[0157]

[0158] FIGS. 14 and 15 are structural diagrams of a fine adjustment form according to a fine adjustment device configuration that can be included in the inspection device (140, 240) of the present invention. Hereinafter, the fine adjustment of the inspection device (140, 240) of the present invention will be described with reference to FIGS. 14 and 15.

[0159] In aligning each inspection device (140, 240) in the above steps (S33, S34), one or more fine adjustment steps may be further included for each of the inspection devices (140, 240). For example, in the above step (S33), one or more fine adjustment steps may be further included for the second inspection unit inspection device (240), and in the above step (S34), one or more fine adjustment steps may be further included for the first inspection unit inspection device (140).

[0160] Figure 14 illustrates a fine adjustment form for the entire inspection device (140, 240). Fine adjustment for the entire inspection device (140, 240) can be performed through the body fine control unit (146).

[0161] Therefore, the fine adjustment illustrated in Fig. 14 is, to be precise, a fine adjustment of the inspection device body (141) in the inspection device (140, 240). The body of the second inspection device, not illustrated, is also the same as the body (141) of the first inspection device.

[0162] The body fine adjustment amount (X-axis direction movement amount mx, Y-axis direction movement amount my, rotation amount mt) for Fig. 14 is also calculated by the control unit (400) based on the image captured by the facing camera (132, 232). The calculation method can be the same as the calculation method through Fig. 10. In addition, the inspection device body (141) is aligned by the operation of each component (1461, 1462, 1463) in the fine control unit (146), so that the inspection devices (140, 240) that were ultimately misaligned can be aligned (140', 240').

[0163] FIG. 15 is an alignment for an individual inspection device (1441), and based on the images captured by the facing cameras (132, 232), the control unit (400) can calculate the inspection device fine adjustment amount (X-axis direction movement amount nx, Y-axis direction movement amount ny, rotation amount nt) in the same manner as calculated through FIG. 10. The alignment by the individual inspection device (1441) can be moved by the pallet fine control unit (142) installed to be able to move the individual inspection device (1441), and accordingly, the individual inspection device (1441) can be moved and aligned through fine adjustment for the area it is in charge of with respect to the substrate (M), so that it can be positioned in the exact inspection area (Ma) on the substrate (M).

[0164] This is because even if the above-mentioned material (M) is not disturbed, it is slightly stretched, condensed, or distorted due to environmental changes such as the tension it is receiving, temperature, and humidity, or slight thickness differences in the material (M), and the system (10) of the present invention can perform optimal inspection regardless of the state of the material (M) through the micro-movement control of the individual inspection device (1441).

[0165] Fig. 16 is a schematic structural diagram of a second example of the system (10) of the present invention. Hereinafter, the second example configuration of the system (10) of the present invention will be described through Fig. 16.

[0166] As illustrated in FIG. 16, the system (10) of the present invention may further include one or more vision inspection devices (500) in addition to the above-described configurations (100 to 400).

[0167] Since the above vision inspection device (500) can use a typical vision inspection device and camera configuration for FPCB that can perform vision inspection on FPCB through a visible image, a description of the configuration and mechanical operation of the vision inspection device (500) is omitted.

[0168] And the vision inspection device (500) can be located at the front or rear of the inspection unit (100, 200), or can be configured as a pair (500a, 500b) to be located at both the front and rear. The vision inspection device (500a) located at the front can perform a vision inspection on a material (M) before being introduced into the inspection unit (100, 200), and the vision inspection device (500b) located at the rear can perform a vision inspection on a material (M) that has undergone a BBT inspection and is being taken out through the inspection unit (100, 200). If the above vision inspection device (500) is configured as only one, it is preferable that the vision inspection device (400) be located at the rear (500b) of the inspection unit (100, 200) to easily achieve the purpose of the present invention, and more preferably, the vision inspection devices (500) are configured as a pair (500a, 500b) and are located at both the front and rear.

[0169] In addition, the vision inspection device (500) may further include components (500c, 500d) for inspecting the bottom of the substrate (M) as well as components (500a, 500b) for inspecting the top of the substrate (M). Since the substrate (M) may be a double-sided FPCB, it is preferable that vision inspection for the bottom of the substrate (M) is also performed, and the bottom vision inspection device (500c, 500d) may be located at the front or back of the inspection unit (100, 200), or may be located at both the front and back.

[0170] One or more vision inspection devices (500) as described above are connected to the control unit (400) in a wired or wireless manner and controlled.

[0171] Fig. 17 is a diagram illustrating the operation structure of the vision inspection device (500). Hereinafter, the operation of the vision inspection device (500) of the present invention will be described through Fig. 17.

[0172] As described above, the vision inspection device (500) is configured at least once, and can be positioned in front and behind the inspection unit (100, 200) with respect to the substrate (M), and can also be positioned on the upper or lower surface of the substrate (M) to perform vision inspection. As an example of this, FIG. 17 illustrates an example in which the vision inspection device (500) is positioned behind the inspection unit (100, 200) and behind the substrate fixing unit (300b) at the rear, and is configured (500b, 500d) to inspect both the upper and lower surfaces. Since the operation form of the vision inspection device (500) to be described as an example below requires that all vision inspection devices (500) operate in the same manner, the explanation of the remaining positions will be omitted.

[0173] The most important thing in inspecting the substrate (M) of the vision inspection device (500; 500b, 500d) of the present invention is that the vision inspection device (500; 500b, 500d) maintains a certain distance between the substrates (M) and that the angle (A) at which the camera of the device photographs the substrate (M) is perpendicular to the substrate (M).

[0174] The reason why the shooting angle (A) at which the vision inspection device (500) looks at the inspection surface of the substrate (M) must be maintained vertically as described above is to maintain more accurate vision inspection quality. The control unit (400) must determine whether the inspection surface of the substrate (M) photographed by the vision inspection device (500) is defective or not. However, since the substrate (M) is an FPCB on which a large number of fine circuits are printed, if the shooting angle (A) is wrong, the device (500) may obtain a distorted image, and the control unit (400) may make an incorrect judgment in determining whether the substrate (M) is defective or not. Therefore, it is preferable to maintain the shooting angle (A) vertical.

[0175] However, the above-mentioned substrate (M) may be angle-displaced as needed. For example, in a long-length substrate transport system including the inspection system (10) of the present invention (particularly when the long-length substrate transport system is a roll-to-roll system), when a tension control unit (tension control roller; CR) installed for reasons such as tension control of the substrate (M) is used in addition to a transport unit (transport roller; MR) for transport, the position of the tension control unit (CR) may be displaced (CR→CR') for reasons such as tension control of the substrate (M).

[0176] A of Fig. 17 is a state in which the substrate (M) is not displaced, and therefore, the vision inspection device (500; 500b, 500d) also has no problem in photographing the substrate (M) at a vertical angle (A).

[0177] However, when the position is displaced (CR→CR') due to the operation of the tension control unit (CR), the substrate (M) is also displaced (M→M') according to the displacement (CR→CR') of the tension control unit. When the substrate is displaced (M→M'), the vision inspection device (500b, 500d) cannot maintain the vertical angle (A).

[0178] Therefore, as in B of FIG. 17, in response to the displacement (M→M') of the above-described device, it is preferable that the vision inspection device (500b, 500d) also further include a lifting and lowering configuration such as a conventional linear motor actuator, linear gear, or rail, so as to be able to displace the position (500b→500b', 500d→500d') so that the shooting angle (A) is maintained in a vertical state.

[0179] As described above, the configuration for performing the raising and lowering of the vision inspection device (500) and adjusting the angle of the body can be implemented using a conventional actuator, gear, rail, or other mechanical device and an electronic device, so a description of the position displacement configuration and operation of the vision inspection device (500) is omitted.

[0180] It is desirable not only to maintain the shooting angle (A) at which the vision inspection device (500) looks at the substrate (M) vertically, but also to maintain a certain distance between the shooting lens of the vision inspection device (500) and the substrate (M). This is to enable the control unit (400) to receive the same image regardless of the displacement of the substrate (M) by the vision inspection device (500).

[0181] Of course, the above vision inspection device (500) can obtain an image with a different shooting angle (A) and interval depending on the displacement of the substrate (M) without displacement, and the control unit (400) can also correct the changed angle (A) and interval programmatically or software-wise to determine whether the substrate (M) is defective.

[0182] Fig. 18 is an operation flow chart of the second exemplary inspection system (10). Hereinafter, the second exemplary operation flow of the inspection system (10) of the present invention will be described with reference to Fig. 6.

[0183] The second example inspection system (10) operates in the same manner as the operation sequence (S1 to S6) of the inspection system (10) of the present invention described above, but a vision inspection step (Sa, Sb) using one or more additional vision inspection devices (500) is added.

[0184] In the above vision inspection step (Sa, Sb), the vision inspection step (Sa) for the incoming material is performed after the material transfer step (S2) in which the material is transferred, and the inspection unit position alignment step (S3) is performed after the incoming material vision inspection step (Sa) is performed.

[0185] Additionally, the vision inspection step (Sb) for the exported materials is performed after the materials export step (S6).

[0186] And, if a product defect such as a breakdown or damage is found in the vision inspection result (M) at any one of the above vision inspection steps (Sa, Sb), all steps are terminated and the control unit (400) notifies the vision inspection result and product defect for the device (M).

[0187] Fig. 19 is a schematic structural diagram of a third exemplary inspection system (10) of the present invention. Hereinafter, the configuration of the third exemplary inspection system (10) of the present invention will be described through Fig. 19.

[0188] As described above, the inspection system of the present invention can be applied not only to a roll-to-roll system but also to a roll-to-sheet system. For this purpose, as illustrated in FIG. 19, the inspection system (10) of the present invention may further include a cutting unit (600) for cutting a continuous substrate (M) that is rolled and then unrolled into a roll shape to make a sheet substrate (S).

[0189] Since the above cutting unit (600) can be a conventional cutting unit including one or more cutting blades (610) as a typical material cutting unit, a description of the configuration will be omitted. In addition, the cutting unit (600) can be connected to the control unit (400) by wire or wirelessly and cut the material according to the operation command of the control unit (400).

[0190] And the storage unit for storing the cut sheet (S) includes one or more loading units (41), so that one or more cut sheets (S) can be stored.

Claims

1. As a material inspection system, One or more inspection stations for conducting inspections on the materials being transported; One or more substrate fixing units for fixing the substrate; And includes a control unit for controlling the operation of one or more inspection units and equipment fixing units, Each of the above one or more inspection units selected is: At least one X-axis moving unit capable of moving in the X-axis direction perpendicular to the transport direction of the substrate; and an inspection device positioned to face the surface of the substrate, Each of the inspection devices of the above one or more inspection units includes a camera installation unit, A substrate inspection system, characterized in that the above camera installation units each include a camera installation section extending to a side of the inspection device; and one or more cameras installed on each camera installation section.

2. In paragraph 1, The above inspection section is configured as a pair so that it can be positioned above and below the substrate, The inspection unit located at the top of the above-mentioned device is a Z-axis moving unit that can move in the Z-axis direction perpendicular to the surface of the device; And it includes one or more X-axis moving parts that can move in the X-axis direction perpendicular to the transport direction of the substrate, A substrate inspection system, characterized in that the inspection unit located at the bottom of the substrate includes one or more X-axis moving units that can move in the X-axis direction perpendicular to the transport direction of the substrate.

3. In paragraph 1, A substrate inspection system, characterized in that at least one of the above-mentioned one or more inspection units includes at least one Y-axis moving unit that can move in the Y-axis direction parallel to the direction of movement of the substrate.

4. In paragraph 1, A material inspection system, characterized in that the above camera installation unit is a rail capable of moving a camera installed in the Y-axis direction parallel to the direction of movement of the material, and the camera can be moved in the Y-axis direction along the rail formed on each camera installation unit.

5. In paragraph 1, A device inspection system characterized in that the camera includes an installation section connecting part connected to the camera installation section; a camera support body; and a camera section capable of taking pictures, wherein a camera rotation axis is further included in a section connecting the camera support body and the camera section, such that the camera section can rotate and move around the camera support body as a central axis.

6. In paragraph 1, Each of the above one or more inspection devices, Inspection device body; One or more individual coupling pallets each installed on a surface of the body of the inspection device; And a substrate inspection system characterized in that it includes an inspection device that is detachably installed and corresponds one-to-one to each of the individual combination palettes.

7. In paragraph 6, The above inspection device further includes one or more microcontrollers, The above fine control unit is installed at least once on the surface of the body of the inspection device, and also corresponds one-to-one with one or more individual combination pallets, and the individual combination pallets are each installed on the fine control unit. The above fine control unit comprises: a pallet X-axis transport device for moving the individual combined pallets in the X-axis direction; A pallet Y-axis transport device that moves the above individual combined pallets in the Y-axis direction; And a substrate inspection system characterized by including a pallet rotation device that rotates the individual combined pallets.

8. In paragraph 6, The above individual combination pallets include a pallet body; one or more inspection coupling portions formed on the side of the pallet body; and one or more inspection coupling devices installed on each of the inspection coupling portions. The inspection device comprises a material inspection device that performs inspection on the material; one or more pallet coupling units formed on the side of the material inspection device; and one or more pallet coupling devices installed on each of the pallet coupling units. A substrate inspection system, characterized in that one or more inspection coupling devices and a pallet coupling device are detachably coupled to each other.

9. In paragraph 6, The above inspection device further includes a fixed plate; and a body microcontroller installed between the fixed plate and the inspection device body to connect the fixed plate and the inspection device body. The above body fine control unit is a body X-axis transport device that moves the inspection device body in the X-axis direction; A body Y-axis moving device that moves the body of the above inspection device in the Y-axis direction; And a substrate inspection system characterized by including a body rotation device that rotates the inspection device body.

10. In paragraph 1, Each of the above one or more substrate fixing parts includes a pressing part for fixing the substrate, A substrate inspection system characterized in that the pressing part includes a pressing part body; a fixing body that contacts the substrate and presses the substrate; and a pressing part connecting body that is installed in the pressing part body so as to be able to rise and fall, and at an end of which the fixing body is installed.

11. In paragraph 10, A substrate inspection system characterized in that the end of the above-mentioned fixture is curved and the outer surface is treated with one selected from rubber, sponge, and resin materials.

12. In paragraph 10, Each of the above one or more fixed parts further includes a sealing part, The above-mentioned contact portion includes a contact portion body; and a contact portion that comes into contact with the substrate, A substrate inspection system, characterized in that the contact portion has an outer surface treated with any one selected from rubber, sponge, and resin materials.

13. A method for inspecting a material using the long-length inspection system of Article 1, A step (S1) of entering information about the substrate and setting the inspection unit, in which information about the substrate is entered into the control unit and one or more inspection units are set; The material transfer step (S2) where the material is transferred; An inspection unit position alignment step (S3) in which the one or more inspection units are aligned and positioned on the substrate by moving in one or more directions selected from the X-axis, Y-axis, and Z-axis; A substrate fixing step (S4) in which the substrate is fixed according to the operation of the above-mentioned substrate fixing unit; A material inspection step (S5) in which the material is inspected by one selected from among the above one or more inspection units; And, a method for inspecting a substrate, characterized in that the substrate is released from its fixed state according to the operation of the substrate fixing unit, and a substrate removal step (S6) is performed in which the substrate is transported and removed, thereby conducting an inspection of the substrate.

14. A method for inspecting a material using the long-length inspection system of Article 2, Information about the equipment is input to the control unit, and the equipment information input and inspection unit setting step (S1) of setting the pair of inspection units is performed; The material transfer step (S2) where the material is transferred; An inspection unit position alignment step (S3) in which the pair of inspection units are aligned and positioned on the substrate by moving in at least one direction selected from among the X-axis, Y-axis, and Z-axis; A substrate fixing step (S4) in which the substrate is fixed according to the operation of the above-mentioned substrate fixing unit; A material inspection step (S5) in which the material is inspected by one of the above pair of inspection units; And according to the operation of the above-mentioned equipment fixing unit, the equipment fixing state is released, and the equipment removal step (S6) is performed in which the equipment is transported and removed, and an inspection of the equipment is performed. The above information input and inspection section setting step (S1) is A step (S11) of inputting information in which information is input to the control unit; A first inspection unit status confirmation step (S12) in which one or more cameras of the second inspection unit at the bottom among the above pair of inspection units check the status of the first inspection unit inspection device at the top; A second inspection unit status confirmation step (S13) in which one or more cameras of the first inspection unit at the top among the above pair of inspection units check the status of the second inspection unit inspection device at the bottom; And, a method for inspecting a substrate, characterized in that it includes a step (S16) in which the control unit notifies that there is an abnormality in one of the pair of inspection units among the steps (S12, S13).

15. In either of paragraphs 13 or 14, The above inspection unit position alignment step (S3) is a step of checking the transferred materials (S31); Step of identifying the current location and status of the device (S32); And if the disturbance of the device in the above step (S32) exceeds the input correction range, a step (S35) of notifying the device of departure through the control unit is performed. A method for inspecting a substrate, characterized in that the step (S32) includes a step in which at least one of the inspection sections is moved in at least one direction selected from among the X-axis and the Y-axis and aligned on the substrate if there is no disturbance in the substrate or if there is disturbance but within the allowable range, and the step is performed at least once (S33, S34).

16. In paragraph 15, A method for inspecting a substrate, characterized in that any one of the steps (S33, S34) in which the inspection unit is aligned on the substrate further includes a step of fixing the substrate through the substrate fixing unit.

17. In paragraph 15, A method for inspecting a substrate, characterized in that each of the steps (S33, S34) in which the inspection unit is aligned on the substrate further includes one or more fine adjustment steps for the corresponding inspection device of the moving inspection unit.

18. In paragraph 1, A substrate inspection system, characterized in that the substrate inspection system further includes one or more vision inspection devices.

19. In paragraph 18, The above one or more vision inspection devices are positioned so that the shooting angle is perpendicular to one of the upper or lower surfaces of the above-mentioned substrate, A substrate inspection system characterized in that it maintains a vertical shooting angle by displacing the position in response to the movement of the above substrate.

20. In paragraph 1, A substrate inspection system, characterized in that the above substrate inspection system further includes a cutting section.

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