Plasma generating device and plasma catalyst device for removing harmful gases and greenhouse gases including same

Abstract

The present invention relates to a plasma generating device having a plasma generating module, the plasma generating module comprising: a substrate structure including a flexible substrate, a dielectric layer formed on one surface of the flexible substrate, and an electrode layer formed on the dielectric layer; and a catalyst structure including a porous carrier layer and a catalyst coated on at least a portion of the porous carrier layer, wherein the plasma module may be wound in a roll shape.

Description

Plasma generating device and plasma catalyst device for removing harmful gases and greenhouse gases including the same

[0001] The present invention relates to a plasma generating device and a plasma catalyst device including the same, and more particularly, to a plasma generating device for removing harmful gases and greenhouse gases and a plasma catalyst device including the same.

[0002] The present invention relates to a project number 1711196878, project number PNK9410, carried out with the support of the Korea Institute of Materials Science and Technology with funding from the Ministry of Science and ICT, and a project number 1711188410, project number PNCC880, carried out with the support of the National Research Foundation of Korea with funding from the Ministry of Science and ICT.

[0003] Generally, odors, volatile organic compounds (VOCs), perfluorinated compounds (PFCs, CFCs), chlorine and cyanide compounds, dioxins, NOx, SOx, etc. emitted from industrial sites or daily life are not only very dangerous to the human body, but can also pollute the global environment and destroy the ecosystem, so emission regulations are being strengthened around the world.

[0004] To treat such hazardous gases, incineration, catalysis, adsorption, or biological treatment methods are being used, but there are problems in effectively removing them due to high treatment costs or low treatment efficiency.

[0005] Furthermore, the market for reducing greenhouse gas emissions is growing rapidly due to accelerating global warming. Demand is rapidly increasing not only for carbon dioxide, a major greenhouse gas, but also for reducing emissions of nitrogen oxides and methane, a gas with a high global warming potential.

[0006] Catalytic technologies are a prime example of technologies that can be used to reduce these harmful and greenhouse gases. However, few technologies have yet reached the practical stage for methane greenhouse gas reduction. This is because the high gas-catalyst temperature required to induce the reaction between the harmful and greenhouse gases and the catalyst hinders the methane reduction effect relative to the energy input.

[0007] Plasma technology is being developed to promote reactions between hazardous and greenhouse gases and catalysts. Using electrical energy to transform hazardous and greenhouse gases into plasma, gases in a stable (or ground state) state can be excited. These excited gases have a lower threshold energy for reaction with the catalyst, enabling reactions between hazardous and greenhouse gases and the catalyst at relatively lower temperatures compared to conventional catalytic methods.

[0008] In particular, methane requires excitation at close range to the catalyst, as its excited state persists for a short time. Therefore, there is a high demand for technologies that generate plasma directly on the surface of a catalyst-attached carrier. However, monolithic carriers, which are widely used in the existing gas treatment industry due to their ease of catalyst attachment and high specific surface area, have been unsuitable as structures for plasma generation.

[0009] The present invention was conceived to address the aforementioned needs, and its purpose is to provide a plasma catalyst device for removing hazardous gases and greenhouse gases, which ensures both ease of plasma generation and ease of use as a catalyst carrier, and a plasma generating device applied thereto. However, these tasks are exemplary and the scope of the present invention is not limited thereby.

[0010] According to one embodiment of the present invention, a plasma generation device is provided. The plasma generation device is a plasma generation device having a plasma generation module, wherein the plasma generation module includes: a substrate structure including a flexible substrate, a dielectric layer formed on one surface of the flexible substrate, and an electrode layer formed on the dielectric layer; and a catalyst structure including a porous carrier layer and a catalyst coated on at least a portion of the porous carrier layer; and the plasma module may be wound in a roll shape.

[0011] According to an embodiment of the present invention, the electrode layer may have an electrode structure formed to generate surface plasma.

[0012] According to an embodiment of the present invention, the thickness of the porous carrier layer may be 0.5 mm to 20 mm.

[0013] According to an embodiment of the present invention, the dielectric layer may include at least one of alumina, zirconia, diatomaceous earth, and silica.

[0014] According to an embodiment of the present invention, the porous carrier layer may include a porous metal foam.

[0015] According to an embodiment of the present invention, the porous metal foam may include one or more of nickel, iron, chromium, and aluminum.

[0016] According to an embodiment of the present invention, the catalyst may include a metal organic framework (MOF) or a gas decomposition catalyst.

[0017] According to an embodiment of the present invention, the gas decomposition catalyst may include palladium (Pd) or platinum (Pt) nanoparticles.

[0018] According to an embodiment of the present invention, the electrode layer can be formed by screen printing.

[0019] According to an embodiment of the present invention, the catalyst structure may include a monolithic catalyst structure formed by coating the catalyst on the inner surface of the porous carrier layer.

[0020] According to one embodiment of the present invention, a gas treatment device is provided. The gas treatment device may include: a gas supply unit installed in front of the plasma generation device and supplying gas containing a harmful gas or a greenhouse gas; a gas storage unit installed in the rear of the plasma generation device and storing gas from which the harmful gas or the greenhouse gas has been removed; and a control unit that analyzes the components of the gas stored in the gas storage unit to determine whether the harmful gas or the greenhouse gas remains in the treated gas, and controls a processing step of the gas stored in the gas storage unit based on the determination result.

[0021] According to an embodiment of the present invention, when the control unit determines that the gas stored in the gas storage unit contains a certain level or more of the harmful gas or greenhouse gas, the gas stored in the gas storage unit can be controlled to be sent to the gas supply unit and passed through the plasma generating device again.

[0022] According to one embodiment of the present invention, which is achieved as described above, by providing a plasma generating device for inducing a reaction between a harmful gas and a greenhouse gas and a catalyst, it is possible to simultaneously induce a synergistic effect of plasma and catalyst not only on methane but also on various gases (carbon dioxide, nitric acid (NOx), etc.). Of course, the scope of the present invention is not limited by such effects.

[0023] FIG. 1 and FIG. 2 are drawings schematically illustrating the structure of a plasma generating device according to one embodiment of the present invention.

[0024] Figures 3 to 5 are process flow diagrams illustrating a method for manufacturing a plasma generating device according to one embodiment of the present invention.

[0025] FIG. 6 is a drawing schematically illustrating the structure of a gas processing device according to one embodiment of the present invention.

[0026] Figures 7a to 7c are photographs showing a plasma generation device and plasma generation according to an experimental example of the present invention.

[0027] Hereinafter, various preferred embodiments of the present invention will be described in detail with reference to the attached drawings.

[0028] Embodiments of the present invention are provided to more fully explain the present invention to those skilled in the art. The following embodiments may be modified in various other forms, and the scope of the present invention is not limited to the following embodiments. Rather, these embodiments are provided to more faithfully and completely convey the spirit of the present invention to those skilled in the art. Hereinafter, embodiments of the present invention will be described with reference to drawings schematically illustrating ideal embodiments of the present invention.

[0029] FIG. 1 and FIG. 2 are drawings schematically illustrating the structure of a plasma generating device according to one embodiment of the present invention.

[0030] Referring to FIGS. 1 and 2, a plasma generating device (1300) according to one embodiment of the present invention includes a plasma generating module (100). The plasma generating module (100) may be wound in a roll shape. The cross-section is depicted as circular in the drawing. However, the circular cross-section is merely an example and is not limited thereto. The cross-section of the plasma generating module (100) may include a form wound in various shapes, such as a square or a pentagon, for example.

[0031] The plasma generation module (100) includes a substrate structure (10) and a catalyst structure (20) formed on the substrate structure (10). As shown in FIG. 2, the plasma generation module (100) configured in a laminated form of the substrate structure (10) and the catalyst structure (20) can be wound in a form as shown in FIG. 1.

[0032] According to FIG. 2, the substrate structure (10) has a surface electrode structure capable of generating plasma. Furthermore, the substrate structure (10) includes a flexible substrate (12), a dielectric layer (14) formed on the flexible substrate (12), and an electrode layer (16) formed on the dielectric layer (14).

[0033] The flexible substrate (12) may be a substrate made of a polymer material such as polyimide (PI), polyethylene terephthalate (PET), etc.

[0034] The dielectric layer (14) may include, for example, one or more of alumina, zirconia, diatomaceous earth, and silica. The dielectric layer (14) may effectively form a dielectric surface plasma without obstructing the flow of fluid. The dielectric layer (14) may be coated on the flexible substrate (12) by plasma spray coating, aerosol coating, or the like.

[0035] The thickness of the dielectric layer (14) can be controlled by the voltage value of the power applied to generate plasma. For example, the thickness of the dielectric layer (14) can be configured to be 1 μm to 1000 μm to prevent insulation breakdown of the electrode layer (16) described later.

[0036] The electrode layer (16) may be configured in a grid-like or woven fabric form. When a high voltage is applied to the electrode layer (16) by a high voltage power source, an atmospheric pressure low-temperature plasma is generated at the point where the electrode layer (16) and the dielectric layer (14) come into contact. In the present invention, in order to use a large-area discharge in the form of an electric discharge, the dielectric barrier discharge method described above may be most suitable.

[0037] The electrode layer (16) can be formed on the dielectric layer (14) using a screen printing method. The area of ​​the electrode layer (16) can be adjusted to an appropriate size and shape considering the formed area of ​​the dielectric layer (14). For example, the overall shape of the electrode layer (16) can be a square frame, but the shape of the frame can be changed to various shapes depending on the applied configurations.

[0038] The catalyst structure (20) is formed on the substrate structure (10). The substrate structure (10) and the catalyst structure (20) may be physically separated. However, this is not limited to the present invention, and the catalyst structure (20) may be fixed on the electrode layer (16) of the substrate structure (10).

[0039] The catalyst structure (20) may include a porous carrier layer (22) and a catalyst (24) coated on at least a portion of the porous carrier layer (22). The porous carrier layer (22) includes a porous metal foam. The catalyst material may be coated in a form that fills at least one surface of the porous metal foam or a portion of the pores provided in the porous metal foam. Alternatively, the catalyst may be in the form of an integral monolithic catalyst in which the catalyst (24) is coated on the inner surface of the porous metal foam.

[0040] The porous metal foam may include, for example, one or more of nickel, iron, chromium, and aluminum. The catalyst material may include, for example, a metal organic framework (MOF) or a gas decomposition catalyst. The gas decomposition catalyst may include palladium (Pd) or platinum (Pt) nanoparticles.

[0041] In the plasma generation module (100), the plasma generation area is affected depending on the thickness of the porous carrier layer (22). Since the plasma generation module (100) is manufactured by stacking a substrate structure (10) and a porous carrier layer (22) and winding them, as the thickness of the porous carrier layer (22) increases, the proportion of greenhouse gases passing through the path passing through the plasma discharge area may gradually decrease.

[0042] Considering these influences, the thickness of the porous carrier layer (22) can be controlled to 0.5 mm to 20 mm. If the thickness of the porous carrier layer (22) is less than 0.5 mm, the decomposition and adsorption effects of the introduced gas are reduced. On the other hand, if the thickness of the porous carrier layer (22) exceeds 20 mm, the amount of harmful gases or greenhouse gases passing through the plasma region generated in each layer may be reduced, making it difficult to perform effective plasma treatment. In addition, as a result, the gap between the electrode layers (16) also increases, making it difficult to generate plasma.

[0043] Figures 3 to 5 are process flow diagrams illustrating a method for manufacturing a plasma generating device according to one embodiment of the present invention.

[0044] Referring to FIGS. 3 to 5, the manufacturing method (S100) of the plasma generating device of the present invention can be performed in the following order.

[0045] It includes a step of forming a substrate structure (S110), a step of forming a catalyst structure (S120), and a step of forming a plasma generation module by stacking the substrate structure and the catalyst structure and then winding them (S130).

[0046] The step (S110) of forming a substrate structure can be performed in the following manner.

[0047] Step (S111) for preparing a flexible substrate is performed. The flexible substrate can be made of various polymers or flexible ceramics. Furthermore, any insulating material can be used. For example, a polymer material formed over a large area capable of generating surface plasma can be used. Any flexible material that can be rolled into a roll can also be used.

[0048] A step (S112) of forming a dielectric layer on a prepared flexible substrate is performed. The dielectric layer can be formed on the flexible substrate by coating a ceramic material such as alumina. The coating method can use plasma spray coating, aerosol coating, etc.

[0049] Thereafter, a step (S113) of forming an electrode layer on the dielectric layer is performed. The electrode layer can be formed on the dielectric layer in a grid-like shape or a woven fabric shape using a screen printing method to manufacture a substrate structure.

[0050] The step of forming a catalyst structure (S120) can be performed in the following manner.

[0051] A step (S121) of forming a porous carrier layer is performed. The porous carrier layer may use a porous metal foam containing at least one of nickel, iron, chromium, and aluminum. A step (S122) of coating a catalyst on a portion of the porous metal foam is performed. The catalyst may be a gas decomposition catalyst containing a metal-organic framework (MOF) or palladium (Pd) or platinum (Pt) nanoparticles.

[0052] Finally, a step (S130) of forming a plasma generation module is performed. After stacking and arranging a catalyst structure on the aforementioned substrate structure, the same can be wound to form a plasma generation module.

[0053] Below, a gas processing device using the plasma generating device of the present invention will be described.

[0054] FIG. 6 is a drawing schematically illustrating the structure of a gas processing device according to one embodiment of the present invention.

[0055] Referring to FIG. 6, the gas treatment device (1000) includes the plasma generation device (1300) described above with reference to FIGS. 1 and 2. In addition, the device includes a gas supply unit (1200) installed in front of the plasma generation device (1300) to supply gas containing a harmful gas or a greenhouse gas, a gas storage unit (1400) installed in the rear of the plasma generation device (1300) to store gas from which the harmful gas or the greenhouse gas has been removed, and a control unit (1600) that analyzes the components of the gas stored in the gas storage unit (1400) to determine whether the harmful gas or the greenhouse gas remains in the treated gas and performs a function of controlling the gas treatment device (1000) as a whole based on the determination result. For example, a step of processing the gas stored in the gas storage unit (1400) can be controlled based on the determination result. In addition, it further includes an inlet (1100) for introducing gas into the gas treatment device (1000) and an outlet (1500) for discharging gases that have undergone gas treatment.

[0056] The gas treatment device (1000) of the present invention can be used by being connected to an air conditioning duct of a large LNG ship or an environmental pollutant emission facility.

[0057] One end of the gas supply unit (1200) may be connected to the outlet of the air conditioning duct. Gas containing the harmful gas or greenhouse gas may be introduced into the gas treatment device (1000) through the inlet (1100) from the air conditioning duct. The harmful gas or greenhouse gas introduced into the gas treatment device (1000) may be supplied to the plasma generation device (1300) by the gas supply unit (1200). The harmful gas or greenhouse gas supplied to the plasma generation device (1300) may be decomposed by plasma treatment generated in the plasma generation device (1300). In addition, a portion of the harmful gas or greenhouse gas may be adsorbed or removed by the porous carrier layer provided in the plasma generation device (1300). The gas from which the above harmful gases or greenhouse gases have been removed can be stored in a gas storage unit (1400) connected to the rear end of the plasma generating device (1300) or discharged to the outside through an exhaust port (1500).

[0058] The gas treatment device (1000) includes a control unit (1600) that can analyze gas and control the device to determine whether the harmful gas or greenhouse gas decomposed and removed in the plasma generation device (1300) has been efficiently treated.

[0059] The control unit (1600) analyzes the gas stored in the gas storage unit (1400) and performs the function of controlling the gas treatment device (1000) as a whole based on the results. For example, if it is determined that the gas stored in the gas storage unit (1400) contains a certain level or more of the harmful gas or greenhouse gas, the gas stored in the gas storage unit (1400) is not discharged to the outside, but is returned to the gas supply unit (1200). The control unit (1600) controls the gas returned to the gas supply unit (1200) to pass through the plasma generation device (1300) again. By repeatedly performing this series of processes, the control unit (1600) controls the gas contained in the gas storage unit (1400) to be stored or discharged to the outside when the content of the harmful gas or greenhouse gas falls below a certain standard.

[0060] Below, experimental examples of the present invention are described.

[0061] Figures 7a to 7c are photographs showing a plasma generation device and plasma generation according to an experimental example of the present invention.

[0062] Referring to FIGS. 7a to 7c, an alumina dielectric layer was formed on a polyimide substrate, and an electrode mesh in a rectangular lattice shape was formed on the alumina dielectric layer as illustrated in FIG. 7a. Thereafter, as illustrated in FIG. 7b, a nickel metal foam coated with a commercial catalyst was placed on the electrode mesh and then wound into a roll shape to manufacture a plasma generation module. Here, a commercial catalyst was coated on the inner surface of the nickel metal foam to form an integrated monolithic catalyst structure. Thereafter, when a high voltage was applied to the electrode, it was confirmed that plasma was appropriately generated, as illustrated in FIG. 7c.

[0063] As described above, a plasma generating device according to one embodiment of the present invention is applied with a plasma-resistant and heat-resistant coating so that it can operate at high temperatures of about 400°C to 600°C. For example, an alumina-based ceramic coating is applied to a substrate made of a flexible polymer material. Thereafter, a catalyst having a methane decomposition or capture function, or a MOF material, is coated on the surface of a porous carrier, and since surface plasma is generated in a form that surrounds the porous carrier, plasma can be uniformly generated throughout the entire path.

[0064] While the present invention has been described with reference to the embodiments illustrated in the drawings, these are merely exemplary, and those skilled in the art will appreciate that various modifications and equivalent alternative embodiments are possible. Therefore, the true scope of technical protection of the present invention should be determined by the technical spirit of the appended claims.

Claims

1. A plasma generating device having a plasma generating module, The above plasma generation module, A substrate structure including a flexible substrate, a dielectric layer formed on one surface of the flexible substrate, and an electrode layer formed on the dielectric layer; and A catalyst structure comprising a porous carrier layer and a catalyst coated on at least a portion of the porous carrier layer; The above plasma module is wound in the shape of a roll. Plasma generator.

2. In paragraph 1, The above electrode layer has an electrode structure formed to generate surface plasma. Plasma generator.

3. In paragraph 1, The thickness of the porous carrier layer is 0.5 mm to 20 mm, Plasma generator.

4. In paragraph 1, The dielectric layer comprises at least one of alumina, zirconia, diatomaceous earth and silica. Plasma generator.

5. In paragraph 1, The above porous carrier layer comprises a porous metal foam, Plasma generator.

6. In paragraph 5, The above porous metal foam comprises at least one of nickel, iron, chromium and aluminum. Plasma generator.

7. In paragraph 1, The above catalyst comprises a metal organic framework (MOF) or a gas decomposition catalyst. Plasma generator.

8. In paragraph 7, The above gas decomposition catalyst comprises palladium (Pd) or platinum (Pt) nanoparticles. Plasma generator.

9. In paragraph 1, The above electrode layer is formed by screen printing. Plasma generator.

10. In paragraph 1, The above catalyst structure includes a monolithic catalyst structure formed by coating the catalyst on the inner surface of the porous carrier layer. Plasma generator.

11. A plasma generating device according to any one of claims 1 to 10; A gas supply unit installed at the front end of the plasma generating device and supplying gas containing harmful gases or greenhouse gases; A gas storage unit installed at the rear end of the plasma generating device to store gas from which the harmful gas or greenhouse gas has been removed; and A control unit that analyzes the components of the gas stored in the gas storage unit to determine whether the harmful gas or greenhouse gas remains in the treated gas, and controls the processing step of the gas stored in the gas storage unit based on the determination result; Gas treatment unit.

12. In paragraph 11, In the above control unit, If it is determined that the gas stored in the gas storage unit contains a certain level or more of the harmful gas or greenhouse gas, the gas stored in the gas storage unit is controlled to be sent to the gas supply unit and passed through the plasma generating device again. Gas treatment unit.

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