Positioning device

Abstract

The purpose of the present invention is to provide a positioning device capable of detecting, at an arbitrary target position, a positioning error of an object to be positioned caused by a change in the attitude angle of a stage. Specifically, the present invention is a positioning device comprising: a base; a stage that is supported by the base and, where an arbitrarily determined movement direction is an X direction, has a planar surface including the X direction and a Y direction orthogonal to the X direction used as a mounting surface, and is moved to an arbitrary position in the X direction; and an X-direction target position detection unit that measures an X-direction target position that is the position of the stage in the X direction relative to the base, and said positioning device places, in an arbitrary position in the X direction, an object to be positioned that is mounted on the mounting surface of the stage. The positioning device comprises at least one of a Z-axis rotation detection unit that detects rotation around the Z-axis, a Y-axis rotation detection unit for detecting rotation around the Y-axis, and an X-axis rotation detection unit that detects rotation around the X-axis.

Description

Positioning device

[0001] The present invention relates to a positioning device for positioning an object.

[0002] Manufacturing equipment such as semiconductor manufacturing equipment and inkjet coating equipment includes a stage on which a substrate or the like is placed, a bonder device that connects IC chips to the substrate or the like, and a processing device such as a coating device that applies ink or the like. The manufacturing equipment is configured so that the stage or the processing device can be moved to any position by a positioning device that positions the processing device relative to the substrate or the like on the stage. The positioning device includes an actuator that moves the stage or the processing device, respectively, and a control device that controls the actuator. The actuator also includes a measuring device that measures the position of the stage or the processing device. The positioning device moves the stage or the processing device to a target position based on a measurement signal from the measuring device.

[0003] Such a positioning device is required to have high positioning accuracy of several micrometers or less. However, in a positioning device, deviations in the positioning position of the tool point from the target position occur due to factors such as the accuracy of actuator control and the offset between the object to be positioned (tool point) and the measuring device. Therefore, positioning devices that suppress deviations between the target position and the positioning position of the tool point are known.

[0004] The stage device described in Patent Document 1 includes a laser interferometer as a first position detection device, an absolute scale detector as a second position detection device, and a linear scale as a third position detection device. The stage device detects its position using the linear scale and the laser interferometer. The linear scale is disposed below the stage. The laser interferometer is disposed on the upper surface of the stage. Furthermore, the stage device detects the position of the stage using the absolute scale detector within a range in which the position of the stage can be detected by the laser interferometer or the linear scale. The stage device configured in this manner corrects the error between the detection value of the linear scale and the detection value of the laser interferometer using the detected value of the absolute scale.

[0005] JP 2015-162396 A

[0006] The stage device described in Patent Document 1 corrects errors based on the detection value of an absolute scale detector capable of detecting position at a predetermined position. Therefore, the stage device uses the detection value of the absolute scale detector, assuming that the same error occurs throughout the entire movable range of the stage. However, in the stage device, the attitude angle of the stage may change due to pitching, yawing, and rolling within the moving range of the stage due to the influence of factors such as the machining accuracy of parts such as the base supporting the stage and the accuracy of the linear guide. Therefore, when the stage device is positioned at an arbitrary target position, changes in the attitude angle of the stage may cause an error between the position of the object to be positioned and the target position.

[0007] An object of the present invention is to provide a positioning apparatus that can detect a positioning error of an object to be positioned due to a change in the attitude angle of a stage at an arbitrary target position.

[0008] The present inventors have studied the configuration of a positioning device that can detect positioning errors of a positioning target object due to changes in the attitude angle of a stage at an arbitrary target position. As a result of extensive research, the present inventors have come up with the following configuration.

[0009] A positioning device according to an embodiment of the present invention includes a base, a stage supported by the base, an X-direction being an arbitrarily determined movement direction, a mounting surface being a plane including the X-direction and a Y-direction orthogonal to the X-direction, and being movable to an arbitrary position in the X-direction, and an X-direction target position detector that measures an X-direction target position, which is the position of the stage relative to the base, and positions an object to be positioned mounted on the mounting surface of the stage to an arbitrary position in the X-direction. The positioning device includes at least one of a Z-axis rotation detector that detects rotation of the stage about a Z-axis extending in a Z-direction orthogonal to both the X-direction and the Y-direction, a Y-axis rotation detector that detects rotation of the stage about a Y-axis extending in the Y-direction, and an X-axis rotation detector that detects rotation of the stage about an X-axis extending in the X-direction.

[0010] The Z-axis rotation detection unit includes a Z-axis rotation scale supported on the base and for measuring the position of the stage in the X and Y directions, a first Z-axis rotation head supported on the stage and detecting graduations on the Z-axis rotation scale indicating the position in the X direction and graduations on the Z-axis rotation scale indicating the position in the Y direction, and a second Z-axis rotation head supported on the stage so that its position in at least one of the X and Y directions differs from that of the first Z-axis rotation head and detecting graduations on the Z-axis rotation scale indicating the position in the X direction and graduations on the Z-axis rotation scale indicating the position in the Y direction. The first Z-axis rotation head outputs a position in the X direction around the first Z axis and a position in the Y direction around the first Z axis. The second Z-axis rotation head outputs a position in the X direction around the second Z axis and a position in the Y direction around the second Z axis.

[0011] The Y-axis rotation detection unit includes a Y-axis rotation scale supported on the base and for measuring the position of the stage in the X and Z directions, a first Y-axis rotation head supported on the stage and detecting graduations on the Y-axis rotation scale indicating the position in the X direction and graduations on the Y-axis rotation scale indicating the position in the Z direction, and a second Y-axis rotation head supported on the stage so that its position in at least one of the X and Z directions differs from that of the first Y-axis rotation head and detecting graduations on the Y-axis rotation scale indicating the position in the X direction and graduations on the Y-axis rotation scale indicating the position in the Z direction. The first Y-axis rotation head outputs a position in the X direction around the first Y axis and a position in the Z direction around the first Y axis. The second Y-axis rotation head outputs a position in the X direction around the second Y axis and a position in the Z direction around the second Y axis.

[0012] The X-axis rotation detection unit includes a first X-axis rotation scale supported on the base for measuring the position of the stage in the X direction and the Z direction, a first X-axis rotation head supported on the stage for detecting graduations indicating the position in the X direction and graduations indicating the position in the Z direction of the first X-axis rotation scale, a second X-axis rotation scale supported on the base so that its position in the Y direction is different from that of the first X-axis rotation scale for measuring the position of the stage in the X direction and the Z direction, and a second Z-axis rotation head supported on the stage for detecting graduations indicating the position in the X direction and graduations indicating the position in the Z direction of the second X-axis rotation scale. The first X-axis rotation head outputs the position in the X direction around the first X-axis and the position in the Z direction around the first X-axis. The second X-axis rotation head outputs the position in the X direction around the second X-axis and the position in the Z direction around the second X-axis.

[0013] In the above-described configuration, the Z-axis rotation sensor includes a first Z-axis rotation head and a second Z-axis rotation head disposed at two separate positions on the stage, and a Z-axis rotation scale disposed at the base. The Z-axis rotation sensor detects two separate X-axis or Y-axis positions on the stage within the movable range of the stage. The two X-axis or Y-axis positions at a predetermined distance on the stage can be used to calculate the amount of rotation (yawing) around the Z-axis, which extends in the Z-direction perpendicular to the X- and Y-directions of the stage. In this manner, the Z-axis rotation sensor outputs position information for calculating a change in the attitude angle of the stage around the Z-axis. Similarly, the Y-axis rotation sensor outputs position information for calculating a change in the attitude angle of the stage around the Y-axis, which extends in the Y-direction perpendicular to the X- and Z-directions of the stage, within the movable range of the stage. Similarly, the X-axis rotation detector outputs position information for calculating a change in attitude angle (rolling) around the X-axis, which extends in the X direction perpendicular to the Y and Z directions of the stage, within the movable range of the stage. This makes it possible to detect a positioning error of the object to be positioned due to a change in attitude angle of the stage at any target position.

[0014] From another viewpoint, it is preferable that the positioning device of the present invention includes the following configuration. The positioning device further includes another positioning device. The X direction, which is the movement direction of the other positioning device, is defined as the Y direction, and the Y direction of the other positioning device is defined as the X direction. The Y direction, which is the movement direction of the other positioning device, is oriented toward the Y direction of the positioning device, and the X direction of the other positioning device is oriented toward the X direction of the positioning device, and a base of the other positioning device is mounted on a stage of the positioning device.

[0015] In the above-described configuration, the positioning device further includes another positioning device whose stage movement direction is oriented in the Y direction. The other positioning device is mounted on the stage of the positioning device that moves in the X direction. Therefore, the stage of the other positioning device is configured to be movable in the X and Y directions. Similarly to the positioning device, the other positioning device outputs position information for calculating a change in the attitude angle of the stage about the Z axis, position information for calculating a change in the attitude angle of the stage about the Y axis, and position information for calculating a change in the attitude angle of the stage about the X axis. This makes it possible to detect, at any target position, a positioning error of the object to be positioned due to a change in the attitude angle of the stage of the other positioning device.

[0016] From another perspective, it is preferable that the positioning device of the present invention includes the following configuration. The positioning device includes a control unit that controls the position of the stage in the X direction, and an output unit that outputs the position of the stage in the X direction. The control unit acquires the target X direction position of the stage from the target X direction position detection unit. When the control unit includes the Z-axis rotation detection unit, the control unit acquires the X direction position around the first Z axis and the Y direction position around the first Z axis detected by the first Z axis rotation head, and the X direction position around the second Z axis and the Y direction position around the second Z axis detected by the second Z axis rotation head. The control unit calculates an X direction correction amount, a Y direction correction amount, and a Z direction correction amount for the reference point at the target X direction position, based on the distance from the stage to the reference point of the object to be positioned, the X direction position around the first Z axis and the X direction position around the second Z axis, or the Y direction position around the first Z axis and the Y direction position around the second Z axis. The output unit outputs the calculated X direction correction amount, the Y direction correction amount, and the Z direction correction amount.

[0017] When the control unit has the Y-axis detection unit, it acquires the X-direction position around the first Y-axis and the Z-direction position around the first Y-axis detected by the first Y-axis head and the X-direction position around the second Y-axis and the Z-direction position around the second Y-axis detected by the second Y-axis head. The control unit calculates an X-direction correction amount, a Z-direction correction amount, and a Y-axis correction amount for the reference point at the X-direction target position, based on the distance from the stage to the reference point of the object to be positioned, the X-direction position around the first Y-axis and the X-direction position around the second Y-axis, or the first Y-axis Z-direction position around the Y-axis and the Z-direction position around the second Y-axis. The output unit outputs the calculated X-direction correction amount, Z-direction correction amount, and Y-axis correction amount.

[0018] When the control unit has the X-axis detection unit, it acquires the X-direction position around the first X-axis and the Z-direction position around the first X-axis detected by the first X-axis head, and the X-direction position around the second X-axis and the Z-direction position around the second X-axis detected by the second X-axis head. The control unit calculates a Z-direction correction amount and a correction amount around the X-axis for the reference point at the X-direction target position based on the distance from the stage to the reference point of the object to be positioned, the Z-direction position around the first X-axis, and the Z-direction position around the second X-axis. The control unit calculates an X-direction correction amount and a correction amount around the Z-axis for the stage at the X-direction target position based on the X-direction position around the first X-axis and the X-direction position around the second X-axis. The output unit outputs at least one of the calculated X-direction correction amount, the Z-direction correction amount, the Y-axis correction amount, and the Z-axis correction amount.

[0019] In the above configuration, if the control unit of the positioning device has a Z-axis rotation detection unit, it calculates an X-direction correction amount, a Y-direction correction amount, and a Z-axis correction amount for correcting a positioning error caused by rotation around the Z-axis, in addition to the X- and Y-direction positioning errors of the reference point of the positioning target at the X-direction target position. Similarly, if the control unit of the positioning device has a Y-axis rotation detection unit, it calculates an X-direction correction amount, a Z-direction correction amount, and a Y-axis correction amount at the X-direction target position for correcting a positioning error caused by rotation around the Y-axis, in addition to the X-direction and Z-direction positioning errors of the reference point of the positioning target at the X-direction target position. Similarly, if the control unit of the positioning device has an X-axis rotation detection unit, it calculates a Y-direction correction amount, a Z-direction correction amount, and an X-axis correction amount at the X-direction target position for correcting a positioning error caused by rotation around the X-axis, in addition to the Y-direction and Z-direction positioning errors of the reference point of the positioning target at the X-direction target position. This makes it possible to detect a positioning error of the positioning target due to a change in the attitude angle of the stage at an arbitrary target position.

[0020] From another viewpoint, it is preferable that the positioning device of the present invention includes the following configuration. The positioning device further includes an imaging device mounted on a mounting surface of the stage. The control unit includes an image processing unit that processes an image captured by the imaging device. Upon acquiring the image, the control unit corrects the image using the image processing unit based on the calculated correction amounts from among the X-direction correction amount, the Y-direction correction amount, the Z-direction correction amount, the Z-axis correction amount, the Y-axis correction amount, and the X-axis correction amount.

[0021] In the above configuration, an image captured by an imaging device mounted on the stage of the positioning device is affected by at least one of positioning errors in the X, Y, and Z directions relative to the target X-direction position of the stage, and the amount of rotation about the Z-axis, the amount of rotation about the Y-axis, and the amount of rotation about the X-axis. The image processing unit of the positioning device corrects the image based on the correction amount calculated by the control unit from among the X-direction correction amount, the Y-direction correction amount, the Z-direction correction amount, the Z-axis correction amount, the Y-axis correction amount, and the X-axis correction amount. Therefore, correction of the image based on the correction amount does not generate positioning errors due to movement of the imaging device or errors due to changes in attitude angle, compared to correcting the imaging position by moving the imaging device. This makes it possible to detect positioning errors of the object to be positioned due to changes in the attitude angle of the stage at any target position and correct the image.

[0022] From another viewpoint, it is preferable that the positioning device of the present invention includes the following configuration: the positioning device has a Z-axis rotation stage supported by the stage and rotating about the Z-axis line, and the control unit controls the Z-axis rotation stage based on the calculated Z-axis correction amount.

[0023] In the above configuration, the positioning device outputs position information from the Z-axis detection unit for calculating a change in attitude angle about the Z-axis (yawing). The control unit of the positioning device corrects the rotation of the Z-axis rotation stage about the Z-axis based on an X-direction correction amount, a Y-direction correction amount, and a Z-axis correction amount that correct positioning errors in the X and Y directions relative to an X-direction target position caused by rotation about the Z-axis. This makes it possible to detect, at any target position, a positioning error of the object to be positioned due to a change in the stage attitude angle.

[0024] The terminology used herein is for the purpose of defining particular embodiments only and is not intended to limit the invention.

[0025] As used herein, the use of "including," "comprising," or "having" and variations thereof identify the presence of stated features, steps, operations, elements, components, and / or equivalents thereof, but may include one or more of the steps, operations, elements, components, and / or groups thereof.

[0026] As used herein, the terms "attached," "connected," "coupled," and / or their equivalents are used broadly to encompass both "direct and indirect" attachments, connections, and couplings. Furthermore, "connected" and "coupled" are not limited to physical or mechanical connections or couplings, but can also include direct or indirect electrical connections or couplings.

[0027] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.

[0028] [Object to be positioned] In this specification, the object to be positioned refers to a member that is positioned by a moving unit. The object to be positioned includes, for example, a substrate, an element, a component, a calibration substrate, a camera, an end effector, etc. The object to be positioned also includes a moving unit that moves a stage, another positioning device, an imaging device such as an alignment camera, an end effector, etc.

[0029] [X-Direction Movement Unit] In this specification, the X-direction movement unit refers to a movement device including an actuator that moves a positioning target object in order to position the positioning target object at a target position. The X-direction movement unit includes, for example, an XY-direction movement unit that moves the positioning target object in the X and Y directions, a Z-direction movement unit that moves the positioning target object in the Z direction, and a θ-direction movement unit that rotates around an arbitrary axis. The X-direction movement unit includes an electric actuator such as an electric motor or a linear motor, a guide device, a scale, etc.

[0030] According to one embodiment of the present invention, a positioning device includes a base, a stage supported by the base, an arbitrarily determined movement direction being an X direction, a mounting surface being a plane including the X direction and a Y direction orthogonal to the X direction, and the stage being movable to an arbitrary position in the X direction, and an X-direction target position detector supported by the base and measuring an X-direction target position, which is the position of the stage in the X direction relative to the base, and the positioning device positions an object to be positioned mounted on the mounting surface of the stage to an arbitrary position in the X direction, and is capable of detecting a positioning error of the object to be positioned due to a change in attitude angle of the stage at the arbitrary target position.

[0031] FIG. 1 is a side view of a positioning device according to a first embodiment of the present invention, as viewed in the X direction. FIG. 2 is a plan view of the positioning device according to the first embodiment of the present invention, as viewed in the Z direction. FIG. 3 is a block diagram showing the transmission of position control signals and position information during correction amount calculation control of the positioning device according to the first embodiment of the present invention. FIG. 4 is a plan view of a stage in the positioning device according to the first embodiment of the present invention, showing changes in the attitude angle of the stage. FIG. 4 is a plan view of a stage in a positioning device according to a modification of the first embodiment of the present invention, showing changes in the attitude angle of the stage. FIG. 6 is a side view of a positioning device according to a second embodiment of the present invention, as viewed in the Y direction. FIG. 7 is a block diagram showing the transmission of position control signals and position information during correction amount calculation control of the positioning device according to the second embodiment of the present invention. FIG. 8 is a side view of a stage in the Y direction, showing changes in the attitude angle of the stage in the positioning device according to the second embodiment of the present invention. FIG. 9 is a side view of a positioning device according to a third embodiment of the present invention, as viewed in the X direction. FIG. 10 is a block diagram showing the transmission of position control signals and position information during correction amount calculation control of the positioning device according to the third embodiment of the present invention. FIG. 11 is a side view of a stage in the X direction, showing changes in the attitude angle of the stage in the positioning device according to the third embodiment of the present invention. FIG. 12 is a side view of a positioning device according to a fourth embodiment of the present invention, as viewed in the X direction. Fig. 13 is a block diagram showing the transmission of position control signals and position information in image processing control of a positioning device according to embodiment 5 of the present invention. Fig. 14 is a schematic diagram showing the state of image processing in image processing control according to embodiment 5 of the present invention.

[0032] The positioning device according to the present invention will be described below with reference to the drawings. In each drawing, the same parts are designated by the same reference numerals, and the description of those parts will not be repeated. The dimensions of the components in each drawing do not faithfully represent the actual dimensions of the components or the dimensional ratios of the components. In the following description of the embodiments of the present invention, the X and Y directions are assumed to be directions on a horizontal plane. The Y direction is a direction perpendicular to the X direction. The Z direction is a direction perpendicular to the X and Y directions. In this embodiment, the Z direction is defined as the vertical direction. However, this definition of the directions is not intended to limit the orientation of the positioning device in each embodiment during use.

[0033] [Embodiment 1] <Configuration of Positioning Apparatus 1> A positioning apparatus 1 according to Embodiment 1 of the present invention will be described with reference to Figures 1 to 3. Figure 1 is a side view of the positioning apparatus 1 according to Embodiment 1 of the present invention, as viewed in the X direction. Figure 2 is a plan view of the positioning apparatus 1, as viewed in the Z direction. Figure 3 is a block diagram showing the transmission of position control signals and position information in the correction amount calculation control S1 of the positioning apparatus 1. In the following embodiments, it is assumed that the ambient temperature, which is the temperature around the positioning apparatus when it is operated, is constant.

[0034] As shown in Figures 1 and 2, a positioning device 1 positions a reference point Gp of a positioning target G. The positioning device 1 is provided in a manufacturing device such as a semiconductor manufacturing device (not shown). The positioning device 1 has a base 2, an X-direction moving unit 3, a stage 4, an X-direction target position detecting unit 5, a Z-axis rotation detecting unit 6, and a control unit 11 (see Figure 3). The positioning target G is mounted on the stage 4. The reference point Gp is ​​located at a distance Lg from the center of the stage 4.

[0035] The base 2 supports the X-direction moving unit 3. The base 2 is, for example, a plate-shaped steel material. The base 2 is provided in a manufacturing device (not shown) or the like.

[0036] The X-direction moving unit 3 is a device that guides an object to be positioned to any position in the X direction. The X-direction moving unit 3 is a linear motor that moves linearly in one direction. The X-direction moving unit is composed of a fixed unit 3a that includes a stator, coils, guides, etc., and a moving unit 3b that has a magnet, etc. The moving unit 3b is supported by a linear guide (not shown) of the fixed unit 3a. The fixed unit 3a is fixed to the base 2 with the extension direction of the linear guide facing the X direction. Therefore, the moving unit 3b can be moved to any position in the X direction. The moving unit 3b is moved to any position in the X direction by a driver (not shown).

[0037] The object to be positioned is mounted on the stage 4. The stage 4 is moved in the X direction by the X-direction moving unit 3. The stage 4 is a flat plate-like member having sufficient rigidity. The stage 4 is fixed to the moving unit 3b. Therefore, the stage 4 is configured to be movable to any position in the X direction. The object to be positioned G is mounted on the stage 4.

[0038] The X-direction target position detection unit 5 detects the position of the stage 4 in the X direction. The X-direction target position detection unit 5 is, for example, an optical linear scale. The X-direction target position detection unit 5 has an X-direction reference scale 5a with graduations engraved on it, and an X-direction reference head 5b that detects the graduations on the X-direction reference scale 5a. The X-direction reference scale 5a is fixed to the base 2 so that the graduations are engraved in the X direction. The X-direction reference head 5b is fixed to the stage 4 in a state where it can detect the graduations on the X-direction reference scale 5a. The X-direction reference head 5b detects the position of the stage 4 in the X direction with respect to the origin. The X-direction target position detection unit 5 detects whether the stage 4 is positioned at the X-direction target position Ptx.

[0039] The Z-axis rotation detection unit 6 detects the X-axis and Y-axis positions of two locations on the stage 4. The Z-axis rotation detection unit 6 is, for example, an optical linear scale. The Z-axis rotation detection unit 6 has a first Z-axis rotation scale 7, a second Z-axis rotation scale 8, a first Z-axis rotation head 9, and a second Z-axis rotation head 10.

[0040] The first Z-axis scale 7 and the second Z-axis scale 8 have major graduations that indicate positions in a major measurement direction and minor graduations that indicate positions in a minor measurement direction perpendicular to the major measurement direction. The first Z-axis scale 7 and the second Z-axis scale 8 are fixed to the plane of the base 2 with the major measurement direction facing the X direction. That is, the first Z-axis scale 7 and the second Z-axis scale 8 indicate positions in the X direction with the major graduations and positions in the Y direction with the minor graduations. The first Z-axis scale 7 and the second Z-axis scale 8 are arranged with a predetermined interval L1 in the Y direction. Furthermore, the first Z-axis scale 7 and the second Z-axis scale 8 are arranged at different positions in the Y direction and Z direction relative to the X-direction reference scale 5a.

[0041] The first Z-axis head 9 detects the major and minor graduations of the first Z-axis scale 7. That is, the first Z-axis head 9 detects the major graduations that indicate the position in the X direction and the minor graduations that indicate the position in the Y direction on the first Z-axis scale 7. The first Z-axis head 9 is fixed to the stage 4 in a state in which it can detect the major and minor graduations of the first Z-axis scale 7. With the origin on the first Z-axis scale 7 as the reference, the first Z-axis head 9 outputs a first Z-axis X-direction position Pzx1 when it detects a major graduation of the first Z-axis scale 7, and outputs a first Z-axis Y-direction position Pzy1 when it detects a minor graduation.

[0042] The second Z-axis head 10 detects the major and minor graduations of the second Z-axis scale 8. That is, the second Z-axis head 10 detects the major graduations that indicate the position in the X direction and the minor graduations that indicate the position in the Y direction on the second Z-axis scale 8. The second Z-axis head 10 is fixed to the stage 4 in a state in which it can detect the major and minor graduations of the second Z-axis scale 8. With the origin of the second Z-axis scale 8 as the reference, the second Z-axis head 10 outputs a second Z-axis X-direction position Pzx2 when it detects a major graduation of the second Z-axis scale 8, and outputs a second Z-axis Y-direction position Pzy2 when it detects a minor graduation.

[0043] As shown in Fig. 3, the control unit 11 controls the X-direction moving unit 3. The control unit 11 also calculates a correction amount based on position information acquired from the Z-axis rotation detection unit 6. The control unit 11 essentially comprises a processor such as a CPU, a ROM, a RAM, a HDD, etc., connected via a bus. Alternatively, the control unit 11 may be configured as a one-chip LSI, etc. The control unit 11 stores various programs and data for controlling the operations of the X-direction moving unit 3, the X-direction target position detection unit 5, and the Z-axis rotation detection unit 6.

[0044] The control unit 11 is configured to be able to transmit a position control signal S for positioning the stage 4 at an X-direction target position Ptx to the X-direction movement unit 3. The position control signal S includes an X-direction position control signal Sx for the X-direction target position Ptx and a Y-direction position control signal Sy for the Y-direction target position Pty (in this embodiment, the Y-direction target position Pty is set to zero).

[0045] The control unit 11 is electrically connected to a driver that drives the linear motor (see FIG. 1) that constitutes the X-direction movement unit 3 and to the X-direction reference head 5b of the X-direction target position detection unit 5. The control unit 11 can send an X-direction position control signal Sx to the driver of the X-direction movement unit 3. The control unit 11 can acquire the X-direction position of the stage 4 from the X-direction target position detection unit 5. The control unit 11 moves the stage 4 in the X direction until the X-direction target position detection unit 5 detects the X-direction target position Ptx.

[0046] The control unit 11 is electrically connected to the first Z-axis rotation head 9 and the second Z-axis rotation head 10 of the Z-axis rotation detection unit 6. The control unit 11 can acquire a first Z-axis X-direction position Pzx1 and a first Z-axis Y-direction position Pzy1 from the first Z-axis rotation head 9. The control unit 11 can also acquire a second Z-axis X-direction position Pzx2 and a second Z-axis Y-direction position Pzy2 from the second Z-axis rotation head 10.

[0047] The control unit 11 can calculate an X-direction correction amount Azx, a Y-direction correction amount Azy, and a Z-axis correction amount Azθ for the reference point Gp from the acquired X-direction position around the first Z-axis Pzx1 and X-direction position around the second Z-axis Pzx2, or the acquired Y-direction position around the first Z-axis Pzy1 and Y-direction position around the second Z-axis Pzy2. The X-direction correction amount Azx and the Y-direction correction amount Azy are correction amounts for positioning the object to be positioned at the X-direction target position Ptx and the Y-direction target position Pty. The Z-axis correction amount Azθ is a correction amount for canceling out a change in the attitude angle of the reference point Gp around the Z-axis.

[0048] The output unit 12 outputs the values ​​calculated by the control unit 11 to an external control device or the like. The output unit 12 outputs the calculated values ​​as an electric signal converted into an image, text data, data in a predetermined format, or the like. The output unit 12 can acquire the X-direction correction amount Azx, Y-direction correction amount Azy, and Z-axis rotation correction amount Azθ of the stage 4 calculated by the control unit 11, and output them to an external control device or the like.

[0049] <Correction Amount Calculation Control> Next, the correction amount calculation control S1 will be described with reference to Figures 3 and 4. Figure 4 is a plan view of the stage in the positioning device 1, showing changes in the attitude angle of the stage. As shown in Figures 3 and 4, the control unit 11 executes correction amount calculation control S1, which calculates the correction amount of the reference point Gp of the object to be positioned G relative to the X-direction target position Ptx from the position information acquired from the Z-axis rotation detection unit 6. It is assumed that when the X-direction reference head 5b detects the origin, the first Z-axis rotation head 9 and the second Z-axis rotation head 10 also detect the origin.

[0050] In the correction amount calculation control S1, the control unit 11 outputs an X-direction position control signal Sx to the X-direction moving unit 3 so as to position the stage 4 (see FIG. 1 ) at the X-direction target position Ptx based on the value detected by the X-direction target position detection unit 5. The X-direction moving unit 3 moves the stage 4 toward the X-direction target position Ptx based on the X-direction position control signal Sx. At this time, the stage 4 experiences a change in attitude angle (yawing) about the Z-axis extending in the Z direction due to errors in the X and Y directions of the linear guides that guide the moving unit 3b of the X-direction moving unit 3. In other words, the reference point Gp is ​​not located at the X-direction target position Ptx or the Y-direction target position Pty due to the influence of the change in attitude angle.

[0051] The control unit 11 acquires the X-direction position Pzx1 around the first Z-axis and the Y-direction position Pzy1 around the first Z-axis detected by the first Z-axis head 9. The control unit 11 also acquires the X-direction position Pzx2 around the second Z-axis and the Y-direction position Pzy2 around the second Z-axis detected by the second Z-axis head 10.

[0052] The control unit 11 calculates the correction amount Azθ about the Z axis of the reference point Gp using equation (1) based on the X-direction position Pzx1 about the first Z axis, the X-direction position Pzx2 about the second Z axis, and the distance L1 between the first Z-axis head 9 and the second Z-axis head 10.

[0053] Azθ=arctan((Pzx1-Pzx2) / L1)...(1)

[0054] The control unit 11 calculates the X-direction correction amount Azx of the reference point Gp based on the first X-direction position around the Z-axis Pzx1, the second X-direction position around the Z-axis Pzx2, and the X-direction target position Ptx using equation (2). In other words, the control unit 11 calculates the average value of the deviations of the first X-direction position around the Z-axis Pzx1 and the second X-direction position around the Z-axis Pzx2 from the X-direction target position Ptx as the X-direction correction amount Azx.

[0055] Azx=((Pzx1-Ptx)+(Pzx2-Ptx)) / 2...(2)

[0056] The control unit 11 calculates the Y-direction correction amount Azy of the reference point Gp based on the first Y-direction position around the Z-axis Pzy1, the X-direction position around the second Z-axis Pzy2, and the Y-direction target position Pty (not shown) using equation (3). In other words, the control unit 11 calculates the Y-direction correction amount Azy as the average value of the deviation amounts of the first Y-direction position around the Z-axis Pzy1 and the second Y-direction position around the Z-axis Pzy2 from the Y-direction target position Pty (Pty = 0).

[0057] Azy=((Pzy1-Pty)+(Pzy2-Pty)) / 2...(3)

[0058] The control unit 11 transmits the calculated X-direction correction amount Azx, Y-direction correction amount Azy, and Z-axis correction amount Azθ to the output unit. The output unit 12 outputs the X-direction correction amount Azx, Y-direction correction amount Azy, and Z-axis correction amount Azθ of the reference point Gp calculated by the control unit to an external control device, etc. The control unit 11 ends the correction amount calculation control S1.

[0059] 3 and 5, a positioning apparatus 1A which is a modification of the first embodiment of the positioning apparatus according to the present invention will be described below. Fig. 5 is a plan view of the stage in the positioning apparatus 1A, showing changes in the attitude angle of the stage.

[0060] 3 and 5, the Z-axis rotation detection unit 6A detects the X-axis and Y-axis positions of two mutually separated locations on the stage 4. The Z-axis rotation detection unit 6 is, for example, an optical linear scale. The Z-axis rotation detection unit 6 has a first Z-axis rotation scale 7, a first Z-axis rotation head 9, and a second Z-axis rotation head 10.

[0061] The first Z-axis rotation scale 7 has a main scale that indicates a position in a main measurement direction and a sub-scale that indicates a position in a sub-measurement direction perpendicular to the main measurement direction. The first Z-axis rotation scale 7 is fixed to the flat surface of the base 2 with the main measurement direction facing the X-direction. The first Z-axis rotation scale 7 is arranged at different positions in the Y and Z directions with respect to the X-direction reference scale 5a.

[0062] The first Z-axis head 9 detects the major and minor graduations of the first Z-axis scale 7. The first Z-axis head 9 is fixed to the stage 4 in a state in which it can detect the major and minor graduations of the first Z-axis scale 7. The first Z-axis head uses the origin on the first Z-axis scale 7 as a reference point and outputs a position Pzx1 in the X direction around the first Z-axis when it detects a major graduation of the first Z-axis scale 7, and outputs a position Pzy1 in the Y direction around the first Z-axis when it detects a minor graduation.

[0063] The second Z-axis head 10 detects the major and minor graduations of the first Z-axis scale 7. The second Z-axis head 10 is fixed to the stage 4 in a state in which it can detect the major and minor graduations of the first Z-axis scale 7. The second Z-axis head 10 is disposed at a distance L2 in the X direction from the first Z-axis head 9. The second Z-axis head 10 uses the origin of the first Z-axis scale 7 as a reference point to output a second Z-axis X-direction position Pzx2 when it detects a major graduation of the first Z-axis scale 7, and outputs a second Z-axis Y-direction position Pzy2 when it detects a minor graduation.

[0064] 3 and 5, the control unit 11 executes correction amount calculation control S1 to calculate the correction amount of the reference point Gp relative to the X-direction target position Ptx from the position information acquired from the Z-axis rotation detection unit 6 A. Note that when the X-direction reference head 5 b detects the origin, the first Z-axis rotation head 9 and the second Z-axis rotation head 10 are also assumed to detect the origin.

[0065] The control unit 11 calculates the correction amount Azθ around the Z axis of the reference point Gp using equation (4) based on the first Y-direction position Pzy1 around the Z axis, the second Y-direction position Pzy2 around the Z axis, and the distance L2 between the first Z-axis head 9 and the second Z-axis head 10.

[0066] Azθ=arctan((Pzy1-Pzy2) / L2)...(4)

[0067] In this way, the Z-axis rotation detectors 6, 6A detect the X-direction position Pzx1 around the first Z-axis, the Y-direction position Pzy1 around the first Z-axis, and the X-direction position Pzx2 around the second Z-axis, and the Y-direction position Pzy2 around the second Z-axis, using the first Z-axis rotation head 9 and the second Z-axis rotation head 10, which are arranged apart from each other on the stage 4, within the movable range of the stage 4. The control unit 11 calculates, based on the distance between the first Z-axis rotation head 9 and the second Z-axis rotation head 10 and the position information acquired from the Z-axis rotation detectors 6, 6A, the X-direction correction amount Azx, the Y-direction correction amount Azy, and the Z-axis rotation correction amount Azθ of the reference point Gp, which take into account changes in the attitude angle due to rotation around the Z-axis, in addition to the positioning errors in the X and Y directions relative to the X-direction target position Ptx. This makes it possible to detect the positioning error due to changes in the attitude angle of the reference point Gp at any X-direction target position Ptx.

[0068] [Embodiment 2] A positioning device 1B, which is a second embodiment of the positioning device according to the present invention, will be described below with reference to Figures 6 and 7. Figure 6 is a side view of the positioning device 1B as viewed in the Y direction. Figure 7 is a block diagram showing the transmission of position control signals and position information in the correction amount calculation control S2 of the positioning device 1B. The positioning device 1B has a base 2, an X-direction moving unit 3, a stage 4, an X-direction target position detection unit 5 (see Figure 7), a Y-axis rotation detection unit 13, and a control unit 11.

[0069] 6 , the Y-axis rotation detector 13 detects the X-axis and Z-axis positions of two mutually separated locations on the stage 4. The Y-axis rotation detector 13 is, for example, an optical linear scale. The Y-axis rotation detector 13 has a first Y-axis rotation scale 14, a first Y-axis rotation head 15, and a second Y-axis rotation head 16.

[0070] The first Y-axis scale 14 has a major scale that indicates a position in a major measurement direction and a minor scale that indicates a position in a minor measurement direction perpendicular to the major measurement direction. The first Y-axis scale 14 is fixed to the side surface of the base 2 with the major measurement direction facing the X direction and the minor measurement direction facing the Z direction. That is, the first Y-axis scale 14 indicates a position in the X direction with the major scale and a position in the Z direction with the minor scale. The first Y-axis scale 14 is arranged at different positions in the Y direction and the Z direction relative to the X-direction reference scale 5a (see FIG. 2).

[0071] The first Y-axis head 16 detects a major scale indicating a position in the X direction and a minor scale indicating a position in the Z direction on the first Y-axis scale 14. The first Y-axis head 15 is fixed to the stage 4 in a state in which it can detect the major scale and minor scale of the first Y-axis scale 14. The first Y-axis head 15 uses the origin on the first Y-axis scale 14 as a reference and outputs a first Y-axis X-direction position Pyx1 when it detects a major scale of the first Y-axis scale 14, and outputs a first Y-axis Z-direction position Pyz1 when it detects a minor scale.

[0072] The second Y-axis head 16 detects a major scale indicating a position in the X direction and a minor scale indicating a position in the Z direction on the first Y-axis scale 14. The second Y-axis head 16 is fixed to the stage 4 in a state in which it can detect the major scale and minor scale of the first Y-axis scale 14. The second Y-axis head 16 uses the origin of the first Y-axis scale 14 as a reference and outputs a second Y-axis X-direction position Pyx2 when it detects a major scale of the first Y-axis scale 14, and outputs a second Y-axis Z-direction position Pyz2 when it detects a minor scale.

[0073] 7, the control unit 11 calculates the correction amount based on the position information acquired from the Y-axis rotation detection unit 13. The control unit 11 stores various programs and data for controlling the operation of the Y-axis rotation detection unit 13.

[0074] The control unit 11 is electrically connected to the first Y-axis rotation head 15 and the second Y-axis rotation head 16 of the Y-axis rotation detection unit 13. The control unit 11 can acquire a first Y-axis X-direction position Pyx1 and a first Y-axis Z-direction position Pyz1 from the first Y-axis rotation head 16. The control unit 11 can also acquire a second Y-axis X-direction position Pyx2 and a second Y-axis Z-direction position Pyz2 from the second Y-axis rotation head 16.

[0075] The control unit 11 can calculate an X-direction correction amount Ayx, a Z-direction correction amount Ayz, and a Y-axis correction amount Ayθ for the stage 4 from the acquired first Y-axis X-direction position Pyx1 and second Y-axis X-direction position Pyx2, or the acquired first Y-axis Z-direction position Pyz1 and second Y-axis Z-direction position Pyz2. The X-direction correction amount Ayx and Z-direction correction amount Ayz are correction amounts for positioning the reference point Gp at the X-direction target position Ptx and Z-direction target position Ptz (in this embodiment, the Z-direction target position Ptz is set to zero). The Y-axis correction amount Ayθ is a correction amount for canceling out a change in the attitude angle of the reference point Gp about the Y-axis.

[0076] The output unit 12 can acquire the X-direction correction amount Ayx, the Z-direction correction amount Ayz, and the Y-axis correction amount Ayθ of the stage 4 calculated by the control unit 11, and output them to an external control device or the like.

[0077] <Correction Amount Calculation Control> The correction amount calculation control S2 in the positioning apparatus 1B will be described using Figures 7 and 8. Figure 8 is a side view of the stage in the Y direction showing changes in the attitude angle of the stage in the positioning apparatus 1B. The control unit 11 executes the correction amount calculation control S2 to calculate the correction amount of the reference point Gp relative to the X-direction target position Ptx from the position information acquired from the Y-axis rotation detection unit 13. It is assumed that when the X-direction reference head 5b detects the origin, the first Y-axis rotation head 15 and the second Y-axis rotation head 16 also detect the origin.

[0078] 7 and 8, in the correction amount calculation control S2, the control unit 11 outputs an X-direction position control signal Sx to the X-direction moving unit 3 so as to align the position of the reference point Gp with the X-direction target position Ptx, based on the value detected by the X-direction target position detection unit 5. At this time, a change (pitching) in the attitude angle of the stage 4 about the Y-axis extending in the Y direction occurs due to errors in the X and Z directions of the linear guides that guide the moving unit 3b of the X-direction moving unit 3. In other words, the reference point Gp is ​​not located at the X-direction target position Ptx due to the influence of the change in attitude angle.

[0079] The control unit 11 acquires the X-direction position Pyx1 around the first Y-axis and the Z-direction position Pyz1 around the first Y-axis detected by the first Y-axis head 15. The control unit 11 also acquires the X-direction position Pyx2 around the second Y-axis and the Z-direction position Pyz2 around the second Y-axis detected by the second Y-axis head 16.

[0080] The control unit 11 calculates the correction amount Ayθ for the stage 4 around the Y axis using equation (5) based on the Z-direction position Pyz1 around the first Y axis, the Z-direction position Pyz2 around the second Y axis, and the distance L3 between the first Y-axis head 15 and the second Y-axis head 16.

[0081] Ayθ=arctan((Pyz1-Pyz2) / L3)...(5)

[0082] The control unit 11 calculates the X-direction correction amount Ayx of the reference point Gp located at a position a distance Lg from the center of the stage 4, using equation (6) based on the correction amount Ayθ around the Y-axis, the first X-direction position Pyx1 around the Y-axis, the second X-direction position Pyx2 around the Y-axis, and the X-direction target position Ptx. In other words, the control unit 11 calculates the average value of the deviation amounts of the first X-direction position Pyx1 around the Y-axis and the second X-direction position Pyx2 around the Y-axis relative to the X-direction target position Ptx, and the deviation amount due to rotation around the Y-axis, as the X-direction correction amount Ayx.

[0083] Ayx=((Pyx1-Ptx)+(Pyx2-Ptx)) / 2+Lg×SinAyθ...(6)

[0084] The control unit 11 calculates the Z-direction correction amount Ayz of the reference point Gp based on the first Z-direction position Pyz1 around the Y-axis and the second Z-direction position Pyz2 around the Y-axis using equation (7). That is, the control unit 11 calculates the average value of the first Z-direction position Pyz1 around the Y-axis and the second Z-direction position Pyz2 around the Y-axis as the Z-direction correction amount Ayz.

[0085] Ayz=(Pyz1+Pyz2) / 2...(7)

[0086] The control unit 11 transmits the calculated X-direction correction amount Ayx, Z-direction correction amount Ayz, and Y-axis correction amount Ayθ to the output unit. The output unit 12 outputs the X-direction correction amount Ayx, Z-direction correction amount Ayz, and Y-axis correction amount Ayθ of the reference point Gp calculated by the control unit 11 to an external control device, etc. The control unit 11 then ends the correction amount calculation control S2.

[0087] The Y-axis rotation detector 13 may be configured such that the first Y-axis rotation head 15 and the second Y-axis rotation head 16 are arranged side by side in the Z direction.

[0088] The control unit 11 calculates the X-direction correction amount Ayx and the Y-axis correction amount Ayθ based on the distance L3 between the first Y-axis head 15 and the second Y-axis head 16, the first X-direction position Pyx1 around the Y-axis acquired from the first Y-axis head 15, and the second X-direction position Pyx2 around the Y-axis acquired from the second Y-axis head 16. The control unit 11 also calculates the Z-direction correction amount Ayz based on the first Z-direction position Pyz1 around the Y-axis acquired from the first Y-axis head 15 and the second Z-direction position Pyz2 around the Y-axis acquired from the second Y-axis head 16.

[0089] In this way, the control unit 11 calculates the X-direction correction amount Ayx, the Z-direction correction amount Ayz, and the Y-axis rotation correction amount Ayθ for the reference point Gp, which take into account the change in attitude angle due to rotation about the Y-axis, in addition to the positioning errors in the X and Y directions relative to the X-direction target position Ptx, based on the interval L3 between the first Y-axis rotation head 15 and the second Y-axis rotation head 16, the distance Lg from the center of the stage 4 to the reference point Gp, and the position information acquired from the Y-axis rotation detection unit 13. This makes it possible to detect the positioning error of the reference point Gp due to the change in attitude angle of the stage 4 at any X-direction target position Ptx.

[0090] [Embodiment 3] A positioning device 1C, which is a third embodiment of the positioning device according to the present invention, will be described below with reference to Figures 9 and 10. Figure 9 is a side view of the positioning device 1C as viewed in the X direction. Figure 10 is a block diagram showing the transmission of position control signals and position information in the correction amount calculation control of the positioning device 1C. The positioning device 1C has a base 2, an X-direction moving unit 3, a stage 4, an X-direction target position detecting unit 5, an X-axis rotation detecting unit 17, and a control unit 11.

[0091] 9 , the X-axis rotation detector 17 detects the X-axis and Z-axis positions of two separate locations on the stage 4. The X-axis rotation detector 17 is, for example, an optical linear scale. The X-axis rotation detector 17 has a first X-axis rotation scale 18, a second X-axis rotation scale 19, a first X-axis rotation head 20, and a second X-axis rotation head 21.

[0092] The first X-axis scale 18 is fixed to one side surface of the base 2 in the Y direction, with its main measurement direction facing the X direction and its secondary measurement direction facing the Z direction. That is, the first X-axis scale 18 indicates the position in the X direction with its main scale and the position in the Z direction with its secondary scale.

[0093] The second X-axis scale 19 is fixed to the other side surface of the base 2 in the Y direction, with its main measurement direction facing the X direction and its secondary measurement direction facing the Z direction. That is, the second X-axis scale 19 indicates the position in the X direction with its main graduations and the position in the Z direction with its secondary graduations. The first X-axis scale 18 and the second X-axis scale 19 are arranged at different positions in the Z direction with respect to the X-direction reference scale 5a.

[0094] The first X-axis head 20 detects a major scale indicating a position in the X direction and a minor scale indicating a position in the Z direction on the first X-axis scale 18. The first X-axis head 20 is fixed to the stage 4 in a state in which it can detect the major scale and minor scale of the first X-axis scale 18. The first X-axis head 20 uses the origin on the first X-axis scale 18 as a reference and outputs a first X-axis X-direction position Pxx1 when it detects a major scale of the first X-axis scale 18, and outputs a first X-axis Z-direction position Pxz1 when it detects a minor scale.

[0095] The second X-axis head 21 detects a major scale indicating a position in the X direction and a minor scale indicating a position in the Z direction on the second X-axis scale 19. The second X-axis head 21 is fixed to the stage 4 in a state in which it can detect the major scale and minor scale of the second X-axis scale 19. The second X-axis head 21 uses the origin of the second X-axis scale 19 as a reference and outputs a second X-axis X-direction position Pxx2 when it detects a major scale of the second X-axis scale 19, and outputs a second X-axis Z-direction position Pxz2 when it detects a minor scale.

[0096] 10 , the control unit 11 calculates the correction amount based on the position information acquired from the X-axis rotation detection unit 17. The control unit 11 stores various programs and data for controlling the operation of the X-axis rotation detection unit 17.

[0097] The control unit 11 is electrically connected to the first X-axis rotation head 20 and the second X-axis rotation head 21. The control unit 11 can acquire the X-direction position Pxx1 around the first X-axis and the Z-direction position Pxz1 around the first X-axis from the first X-axis rotation head 20. The control unit 11 can also acquire the X-direction position Pxx2 around the second X-axis and the Z-direction position Pxz2 around the second X-axis from the second X-axis rotation head 21.

[0098] The control unit 11 can calculate an X-direction correction amount Axx, a Z-direction correction amount Axz, and an X-axis about correction amount Axθ of the reference point Gp from the acquired first X-axis X-direction position Pxx1 and second X-axis X-direction position Pxx2, or the acquired first X-axis Z-direction position Pxz1 and second X-axis Z-direction position Pxz2. The X-direction correction amount Axx and Z-direction correction amount Axz are correction amounts for positioning the reference point Gp at the X-direction target position Ptx and Z-direction target position Ptz (in this embodiment, the Z-direction target position Ptz is set to zero). The X-axis about correction amount Axθ is a correction amount for canceling out a change in the attitude angle of the reference point Gp about the X-axis.

[0099] The output unit 12 can acquire the X-direction correction amount Axx, the Z-direction correction amount Axz, and the Y-axis about correction amount Axθ of the reference point Gp calculated by the control unit 11, and output them to an external control device or the like.

[0100] <Correction Amount Calculation Control> The correction amount calculation control S3 in the positioning apparatus 1C will be described using Figures 10 and 11. Figure 11 is a side view of the stage in the X direction showing changes in the attitude angle of the stage in the positioning apparatus 1C. The control unit 11 executes the correction amount calculation control S3, which calculates the correction amount of the reference point Gp relative to the X-direction target position Ptx from the position information acquired from the Y-axis rotation detection unit 13. It is assumed that when the X-direction reference head 5b detects the origin, the first Y-axis rotation head 20 and the second Y-axis rotation head 21 also detect the origin.

[0101] 10 and 11 , in the correction amount calculation control S3, the control unit 11 outputs an X-direction position control signal Sx to the X-direction moving unit 3 so as to align the position of the reference point Gp with the X-direction target position Ptx, based on the value detected by the X-direction target position detection unit 5. At this time, a change in the attitude angle (rolling) of the stage 4 about the X-axis extending in the X direction occurs due to errors in the X and Z directions of the linear guides that guide the moving unit 3b of the X-direction moving unit 3. In other words, the reference point Gp is ​​not located at the X-direction target position Ptx or the Y-direction target position Pty due to the influence of the change in attitude angle.

[0102] The control unit 11 acquires the X-direction position Pxx1 around the first X-axis and the Z-direction position Pxz1 around the first X-axis detected by the first X-axis head 20. The control unit 11 also acquires the X-direction position Pxx2 around the second X-axis and the Z-direction position Pxz2 around the second X-axis detected by the second X-axis head 21.

[0103] The control unit 11 calculates the correction amount Axθ around the X-axis of the stage 4 using equation (8) based on the first Z-direction position Pxz1 around the X-axis, the second Z-direction position Pxz2 around the X-axis, and the distance L4 between the first X-axis head 20 and the second X-axis head 21.

[0104] Axθ=arctan((Pxz1-Pxz2) / L4)...(8)

[0105] The control unit 11 calculates the X-direction correction amount Axx of the stage 4 using equation (9) based on the X-direction position Pxx1 around the first X-axis, the X-direction position Pxx2 around the second X-axis, and the X-direction target position Ptx. In other words, the control unit 11 calculates the average value of the deviations of the X-direction position Pxx1 around the first X-axis and the X-direction position Pxx2 around the second X-axis from the X-direction target position Ptx as the X-direction correction amount Axx.

[0106] Axx=((Pxx1-Ptx)+(Pxx2-Ptx)) / 2...(9)

[0107] The control unit 11 calculates the Y-direction correction amount Axy of the reference point Gp using equation (10) based on the correction amount Axθ about the X-axis and the distance Lg from the center of the stage 4 to the reference point Gp. In other words, the control unit 11 calculates the amount of deviation due to rotation about the X-axis as the Y-direction correction amount Axy.

[0108] Axy=Lg×Sin(Axθ)...(10)

[0109] The control unit 11 calculates the Z-direction correction amount Axz of the stage 4 based on the first Z-direction position around the X-axis Pxz1 and the second Z-direction position around the X-axis Pxz2 using equation (11). In other words, the control unit 11 calculates the average value of the first Z-direction position around the X-axis Pxz1 and the second Z-direction position around the X-axis Pxz2 as the Z-direction correction amount Axz.

[0110] Axz=(Pxz1+Pxz2) / 2...(11)

[0111] The control unit 11 calculates the correction amount Azθ about the Z axis of the reference point Gp using equation (12) based on the X-direction position Pxx1 about the first X-axis, the X-direction position Pxx2 about the second X-axis, and the distance L4 between the first X-axis head 20 and the second X-axis head 21.

[0112] Azθ=arctan((Pxx1-Pxx2) / L4)...(12)

[0113] The control unit 11 transmits the calculated X-direction correction amount Axx, Y-direction correction amount Axy, Z-direction correction amount Axz, Z-axis correction amount Azθ, and X-axis correction amount Axθ to the output unit. The output unit 12 outputs the acquired X-direction correction amount Axx, Y-direction correction amount Axy, Z-direction correction amount Axz, Z-axis correction amount Azθ, and X-axis correction amount Axθ to an external control device, etc. The control unit 11 ends the correction amount calculation control S3.

[0114] In this way, the control unit 11 calculates the X-direction correction amount Axx, the Y-direction correction amount Axy, the Z-direction correction amount Axz, the Z-axis correction amount Azθ, and the X-axis correction amount Axθ, which take into account not only the positioning errors in the X and Y directions for the X-direction target position Ptx and the Y-direction target position Pty, but also the changes in the attitude angle due to rotation about the Y-axis and the changes in the attitude angle due to rotation about the Z-axis, based on the distance L4 between the first X-axis rotation head 20 and the second X-axis rotation head 21 and the position information acquired from the X-axis rotation detection unit 17. This allows the positioning device 1C to detect the positioning error due to changes in the attitude angle of the stage 4 at any X-direction target position Ptx and Y-direction target position Pty.

[0115] [Fourth Embodiment] A positioning device 1D, which is a fourth embodiment of the positioning device according to the present invention, will be described below with reference to Fig. 12. Fig. 12 is a side view of the positioning device 1D as seen in the X direction.

[0116] The positioning device 1D has a first positioning device 1α which is a positioning device 1, and a second positioning device 1β which is another positioning device 1. In the positioning device 1D, the second positioning device 1β is mounted on a stage 4 of the first positioning device 1α. A positioning target G is mounted on the stage 4 of the second positioning device 1β. In this embodiment, the positioning target is an imaging device 22.

[0117] The base 2 of the first positioning device 1α is provided on a manufacturing device (not shown). The base 2 is fixed to the upper end of the manufacturing device (not shown) with the mounting surface, which is the surface with the largest area, facing downward in the Z direction. In other words, the stage 4 of the first positioning device 1α is placed with the mounting surface facing downward in the Z direction.

[0118] The base 2 of the second positioning device 1β is fixed to the stage 4 of the first positioning device 1α. Therefore, the stage 4 of the second positioning device 1β is disposed with its mounting surface facing downward in the Z direction. The second positioning device 1β is disposed so that the X direction, which is the movement direction of the stage 4, is perpendicular to the movement direction of the stage 4 of the first positioning device 1α. In other words, the stage 4 of the second positioning device 1β is disposed so that it moves in the Y direction of the first positioning device 1α. In the positioning device 1D configured in this manner, the X direction of the second positioning device 1β is defined as the Y direction, and the Y direction of the second positioning device 1β is defined as the X direction, thereby aligning the direction of the second positioning device 1β with the direction of the first positioning device 1α.

[0119] The control unit 11 (see FIG. 3) of the first positioning device 1α and the control unit 11 of the second positioning device 1β are configured as the same control unit 11. Therefore, the positioning device 1D is configured so that the control unit 11 controls the first positioning device 1α and the second positioning device 1β.

[0120] In the above-described configuration, the positioning device 1D includes a first positioning device 1α that positions the positioning target G in the X direction and a second positioning device 1β that positions the positioning target G in the Y direction. The second positioning device 1β is mounted on a stage 4 of the first positioning device 1α that moves in the X direction. Therefore, the positioning target G mounted on the stage 4 of the second positioning device 1β can be positioned at any position in the X and Y directions. Furthermore, the first positioning device 1α and the second positioning device 1β output position information for calculating errors in the X and Y directions of each stage 4, and position information for calculating a change in attitude angle about the Z axis. This allows the positioning device 1D to detect a positioning error of the positioning target at any X-direction target position Ptx and Y-direction target position Pty (not shown).

[0121] [Embodiment 5] A positioning device 1E, which is embodiment 5 of the positioning device according to the present invention, will be described below with reference to Figures 13 and 14. Figure 13 is a block diagram showing the transmission of position control signals and position information in the image processing control of the positioning device 1E. Figure 14 is a schematic diagram showing the state of image processing in image processing control S4.

[0122] 13 and 14 , the imaging device 22 is, for example, an alignment camera. The imaging device 22 is mounted on the stage 4 of the positioning device 1E (positioning device 1) (see FIGS. 1 and 2 ). The imaging device 22 captures images of alignment marks, wiring patterns, etc. on the substrate. The imaging device 22 transmits the captured image V to the control unit 11.

[0123] The control unit 11 controls the imaging device 22. The control unit 11 is electrically connected to the imaging device 22. The control unit 11 has a data program and the like for controlling the imaging device 22. The control unit 11 is configured to be able to transmit a control signal to the imaging device 22. The control unit 11 is configured to be able to acquire an image V captured by the imaging device 22. The control unit 11 has an image processing unit 23.

[0124] The image processing unit 23 corrects the position, angle, distortion, color tone, brightness, etc. of the image V. The image processing unit 23 is configured to be able to acquire the image V. The image processing unit 23 has programs, data, etc. for processing the image V. The image processing unit 23 is configured to be able to transmit the corrected image V to the output unit 12.

[0125] <Image Processing Control> The control unit 11 starts image processing control S4 when acquiring the image V from the imaging device 22. Note that in the positioning device 1E, the control unit 11 calculates the X-direction correction amount Azx, the Y-direction correction amount Azy, and the Z-axis rotation correction amount Azθ based on the position information acquired from the Z-axis rotation detection unit 6 through the correction amount calculation control S1.

[0126] The control unit 11 transmits the calculated X-direction correction amount Azx, Y-direction correction amount Azy, and Z-axis correction amount Azθ, as well as the acquired image V, to the image processing unit 23. The image processing unit 23 acquires the image V (see the upper diagram in FIG. 14 ). The image processing unit 23 rotates the image V based on the Z-axis correction amount Azθ (see the middle diagram in FIG. 14 ). Furthermore, the image processing unit 23 moves the rotated image V based on the X-direction correction amount Azx and the Y-direction correction amount Azy (see the lower diagram in FIG. 14 ).

[0127] The image V captured by the imaging device 22 mounted on the stage 4 of the positioning apparatus 1E is affected by positioning errors in the X and Y directions and the amount of rotation about the Z axis relative to the X-direction target position Ptx of the stage 4. The image processing unit 23 of the positioning apparatus 1E corrects the image V based on the X-direction correction amount Azx, the Y-direction correction amount Azy, and the Z-axis correction amount Azθ calculated by the control unit 11. Therefore, correction of the image V based on the correction amounts does not generate positioning errors due to the movement accuracy of the moving device or errors due to changes in the attitude angle, compared to when the imaging position and attitude are corrected by moving the imaging device 22 using a moving device. As a result, at any target position, it is possible to detect positioning errors of the imaging device 22 due to changes in the attitude angle of the stage 4 and correct the image V, thereby obtaining an image equivalent to the image captured at the target position.

[0128] [Other Embodiments] In each of the above-described embodiments, the positioning devices 1, 1A, 1B, 1C, 1D, and 1E detect the movement position of the stage 4 using the X-direction target position detection unit 5, which is an optical linear scale. However, the X-direction target position detection unit may be any device that can measure the position of the stage.

[0129] Furthermore, in the above-described first embodiment, the positioning devices 1, 1A, and 1E detect position information of the stage 4 using the Z-axis rotation detectors 6 and 6A. In the second embodiment, the positioning device 1B detects position information of the stage 4 using the Y-axis rotation detector 13. In the third embodiment, the positioning device 1C detects position information of the stage 4 using the X-axis rotation detector 17. In the fourth embodiment, the positioning device 1D detects position information of the stage 4 using two Z-axis rotation detectors 6. However, it is sufficient for the positioning device to have at least one of the Z-axis rotation detector, Y-axis rotation detector, and X-axis rotation detector 17. If the positioning device has multiple detectors, it may be configured to calculate the amount of correction for the stage based on the position information detected by each detector.

[0130] In each of the above-described embodiments, the positioning apparatuses 1, 1A, 1B, 1C, 1D, and 1E position the imaging device 22 as the object to be positioned. However, the object to be positioned by the positioning apparatus may be a processing device such as a bonding head.

[0131] Furthermore, in embodiments 1, 2, 3, and 4, the positioning devices 1, 1A, 1B, 1C, and 1D are configured to be capable of positioning in the X direction or in the X and Y directions. However, the positioning devices may further include a Z-axis rotation stage that rotates about the Z axis. The Z-axis rotation stage is configured to be capable of positioning around the Z axis. The Z-axis rotation stage is provided in a positioning device that has a Z-axis rotation detector.

[0132] The Z-axis rotation stage is mounted on a mounting surface of the stage of the positioning device. An object to be positioned is mounted on the Z-axis rotation stage. The Z-axis rotation stage rotates the object to be positioned around the Z axis based on a Z-axis correction amount Azθ calculated by a control unit.

[0133] In the above configuration, the positioning device outputs position information from the Z-axis rotation detector for calculating a change in attitude angle about the Z-axis (yawing). The control unit corrects the rotation of the Z-axis rotation stage about the Z-axis based on an X-direction correction amount, a Y-direction correction amount, and a Z-axis correction amount that correct positioning errors in the X and Y directions relative to an X-direction target position caused by rotation about the Z-axis. This makes it possible to detect, at any target position, a positioning error of the object to be positioned due to a change in the stage attitude angle.

[0134] Furthermore, in the fourth embodiment, the positioning device 1D is configured to be able to move the positioning target G in the X and Y directions by the first positioning device 1α and the second positioning device 1β. However, the positioning device may also have a positioning device that moves the stage in the Z-axis direction.

[0135] In addition, in each of the above-described embodiments, the Z-axis rotation detector 6, the Y-axis rotation detector 13, and the X-axis rotation detector 17 each have an optical linear scale composed of a single head and scale that can detect positions in the X and Y directions, or positions in the X and Z directions. However, the Z-axis rotation detector, the Y-axis rotation detector, and the X-axis rotation detector may each be configured by combining linear scales that can detect positions in only one direction.

[0136] In each of the above-described embodiments, the X-direction moving unit 3 generates a driving force by a linear motor. However, the X-direction moving device may be any device as long as it has an actuator capable of controlling its position.

[0137] In all of the above-described embodiments, the positioning devices 1, 1A, 1B, 1C, 1D, and 1E perform positioning at a constant environmental temperature. However, the positioning devices may have correction formulas or correction tables that correspond to various environmental temperatures in which the object to be positioned is moved. The positioning devices can update the reference calibration value with higher accuracy by taking into account the influence of the environmental temperature.

[0138] In all the above-described embodiments, the X-direction moving unit 3 of the positioning devices 1, 1A, 1B, 1C, 1D, and 1E moves the object to be positioned by a linear motor, which is an electric actuator. However, the X-direction moving device and the Y-direction moving device may be composed of an electric actuator such as a servo motor and a linear motion device such as a ball screw.

[0139] In all the above-described embodiments, the Z-axis rotation detector 6, the Y-axis rotation detector 13, and the X-axis rotation detector 17 each have an optical linear scale. However, the Z-axis rotation detector, the Y-axis rotation detector, and the X-axis rotation detector may each be a magnetic linear scale or an optical or magnetic rotary encoder, as long as they can measure the position of the mover.

[0140] In the above-described embodiment, the control unit 11 calculates the amount of correction for each direction based on equations (1) to (12) using the position information detected by the Z-axis rotation detection unit 6, the Y-axis rotation detection unit 13, and the X-axis rotation detection unit 17. However, the calculation of the amount of correction for each direction does not have to be based on equations (1) to (12). The calculation may be performed using an equation or method other than equations (1) to (12).

[0141] Although the embodiments of the present invention have been described above, the above-described embodiments are merely examples for carrying out the present invention. Therefore, the present invention is not limited to the above-described embodiments, and it is possible to appropriately modify the above-described embodiments within the scope of the spirit of the present invention.

[0142] 1, 1A, 1B, 1C, 1D, 1E Positioning device 1α First positioning device 1β Second positioning device 2 Base 3 X-direction moving section 4 Stage 5 X-direction target position detecting section 5a X-direction reference scale 5b X-direction reference head 6 Z-axis rotation detecting section 7 First Z-axis rotation scale 8 Second Z-axis rotation scale 9 First Z-axis rotation head 10 Second Z-axis rotation head 11 Control section 12 Output section 13 Y-axis rotation detecting section 14 First Y-axis rotation scale 15 First Y-axis rotation head 16 Second Y-axis rotation head 17 X-axis rotation detecting section 18 First X-axis rotation scale 19 Second X-axis rotation scale 20 First X-axis rotation head 21 Second X-axis rotation head 22 Imaging device 23 Image processing section Pzx1 First Z-axis rotation X-direction position Pzy1 Y-direction position around the first Z-axis Pzx2 X-direction position around the second Z-axis Pzy2 Y-direction position around the second Z-axis Pyx1 X-direction position around the first Y-axis Pyz1 Z-direction position around the first Y-axis Pyx2 X-direction position around the second Y-axis Pyz2 Z-direction position around the second Y-axis Pxx1 X-direction position around the first X-axis Pxz1 Z-direction position around the first X-axis Pxx2 X-direction position around the second X-axis Pxz2 Z-direction position around the second X-axis Sx X-direction position control signal Ptx X-direction target position Pty Y-direction target position Ptz Z-direction target position V Image G Positioning target object Gp Reference point Azx, Ayx, Axx X-direction correction amount Azy, Axz Y-direction correction amount Axz, Ayz Z-direction correction amount Azθ Z-axis correction amount Ayθ Correction amount around Y axis Axθ Correction amount around X axis S1, S2, S3 Correction amount calculation control S4 Image processing control

Claims

1. A positioning device comprising: a base; a stage supported on the base, with an arbitrarily determined movement direction as the X direction, a mounting surface that is a plane including the X direction and the Y direction orthogonal to the X direction, and movable to an arbitrary position in the X direction; and an X-direction target position detection unit that measures the X-direction target position, which is the X-direction position of the stage relative to the base, and which positions an object to be positioned mounted on the mounting surface of the stage to an arbitrary position in the X direction, the positioning device comprising at least one of: a Z-axis detection unit that detects rotation of the stage about a Z-axis extending in the Z direction orthogonal to both the X direction and the Y direction; a Y-axis detection unit that detects rotation of the stage about a Y-axis extending in the Y direction; and an X-axis detection unit that detects rotation of the stage about the X-axis extending in the X direction, the Z-axis detection unit comprising: a Z-axis scale supported on the base, and for measuring the positions of the stage in the X direction and the Y direction; the first Z-axis head is supported by the stage and detects graduations on the Z-axis scale that indicate the position in the X direction and graduations on the Z-axis scale that indicate the position in the Y direction; and a second Z-axis head is supported by the stage so that its position in at least one of the X direction and the Y direction differs from that of the first Z-axis head and detects the graduations on the Z-axis scale that indicate the position in the X direction and graduations on the Z-axis scale that indicate the position in the Y direction, wherein the first Z-axis head outputs the X-direction position around the first Z-axis and the Y-direction position around the first Z-axis, and the second Z-axis head outputs the X-direction position around the second Z-axis and the Y-direction position around the second Z-axis, and the Y-axis detection unit comprises: a Y-axis scale supported by the base and for measuring the positions of the stage in the X direction and the Z direction; and a first Y-axis head supported by the stage and detects the graduations on the Y-axis scale that indicate the position in the X direction and graduations on the Y-axis scale that indicate the position in the Z direction.and a second Y-axis head supported by the stage so that its position in at least one of the X direction and the Z direction is different from that of the first Y-axis head, and detects a scale indicating a position in the X direction and a scale indicating a position in the Z direction of the Y-axis scale, wherein the first Y-axis head outputs an X-direction position around the first Y-axis and a Z-direction position around the first Y-axis, and the second Y-axis head outputs an X-direction position around the second Y-axis and a Z-direction position around the second Y-axis, and the X-axis detection unit comprises: a first X-axis scale supported by the base and for measuring the positions of the stage in the X direction and the Z direction; a first X-axis head supported by the stage and for detecting a scale on the first X-axis scale indicating the position in the X direction and a scale indicating a position in the Z direction; and a second X-axis scale supported by the base so that its position in the Y direction is different from that of the first X-axis scale, and for measuring the positions of the stage in the X direction and the Z direction. a second Z-axis head supported by the stage and detecting graduations on the second X-axis scale that indicate the position in the X direction and the position in the Z direction, wherein the first X-axis head outputs a position in the X direction around the first X-axis and a position in the Z direction around the first X-axis, and the second X-axis head outputs a position in the X direction around the second X-axis and a position in the Z direction around the second X-axis.

2. A positioning device according to claim 1, further comprising another positioning device, wherein the X direction, which is the movement direction of the other positioning device, is defined as the Y direction, and the Y direction of the other positioning device is defined as the X direction, the Y direction, which is the movement direction of the other positioning device, is oriented toward the Y direction of the positioning device, the X direction of the other positioning device is oriented toward the X direction of the positioning device, and the base of the other positioning device is mounted on the stage of the positioning device.

3. A positioning device according to claim 1 or 2, comprising: a control unit for controlling the position of the stage in the X direction; and an output unit for outputting the position of the stage in the X direction, wherein the control unit: acquires the target X direction position of the stage from the target X direction position detection unit; and, if the device has the Z-axis detection unit, acquires the X direction position around the first Z axis and the Y direction position around the first Z axis detected by the first head around the Z axis, and the X direction position around the second Z axis and the Y direction position around the second Z axis detected by the second head around the Z axis, and calculates an X direction correction amount, a Y direction correction amount, and a Z direction correction amount of the stage for the reference point at the target X direction position, based on the distance from the stage to the reference point of the object to be positioned, the X direction position around the first Z axis and the X direction position around the second Z axis, or the Y direction position around the first Z axis and the Y direction position around the second Z axis, and the output unit: outputs the calculated X direction correction amount, Y direction correction amount, and Z direction correction amount; and, if the device has the Y-axis detection unit, acquires the first X-direction position around the Y-axis and the Z-direction position around the first Y-axis detected by the first Y-axis head, and the second X-direction position around the Y-axis and the Z-direction position around the Y-axis detected by the second Y-axis head; calculates an X-direction correction amount, a Z-direction correction amount, and a Y-axis correction amount for the reference point at the X-direction target position based on the distance from the stage to the reference point of the object to be positioned, the first X-direction position around the Y-axis and the X-direction position around the second Y-axis, or the first Z-direction position around the Y-axis and the Z-direction position around the second Y-axis; the output unit outputs the calculated X-direction correction amount, Z-direction correction amount, and Y-axis correction amount; when the X-axis detection unit is included, acquires the first X-direction position around the X-axis and the Z-direction position around the first X-axis head detected, and the second X-direction position around the X-axis and the Z-direction position around the second X-axis detected by the second X-axis head; calculating a Y-direction correction amount, a Z-direction correction amount, and a correction amount about the X-axis of the reference point at the X-direction target position based on the distance from the stage to the reference point of the object to be positioned, the Z-direction position about the first X-axis, and the Z-direction position about the second X-axis;a positioning device that calculates an X-direction correction amount and a Z-axis correction amount of the reference point at the X-direction target position based on a distance from the stage to a reference point of the object to be positioned, the X-direction position about the first X-axis, and the X-direction position about the second X-axis, and the output unit outputs at least one of the calculated X-direction correction amount, the Z-direction correction amount, the Y-axis correction amount, and the Z-axis correction amount.

4. A positioning device according to claim 3, further comprising an imaging device mounted on the mounting surface of the stage, wherein the control unit has an image processing unit that processes an image captured by the imaging device, and when the image is acquired, the image processing unit corrects the image based on the calculated correction amount from among the X-direction correction amount, the Y-direction correction amount, the Z-direction correction amount, the Z-axis correction amount, the Y-axis correction amount, and the X-axis correction amount.

5. A positioning device according to claim 3, further comprising a Z-axis rotation stage supported by the stage and rotating around the Z-axis line as the center of rotation, and the control unit controls the Z-axis rotation stage based on the calculated amount of correction about the Z-axis.

Images