Test device

Abstract

A test device, used for chip strength test, and comprising a pressing head assembly (100) and a supporting assembly (300) which are stacked. The pressing head assembly (100) is used for applying pressure to a chip, and the supporting assembly (300) is used for supporting the chip. The pressing head assembly (100) comprises first pressing heads (10) used for pressing a chip, and a first adjustment device (20) connected to the first pressing heads (10); the two first pressing heads (10) are spaced apart from each other; and the first adjustment device (20) is used for adjusting the relative distance between the two first pressing heads (10). The two first pressing heads (10) with the adjustable distance can adapt to various chips, and the first pressing heads (10) do not need to be frequently changed, saving the cost, and improving the measurement accuracy.

Description

Test device

[0001] The present application is based on and claims priority to Chinese Patent Application No. 202410427287.X, filed on April 10, 2024, the entire contents of which are hereby incorporated by reference into the present application. TECHNICAL FIELD

[0002] The present application relates to the field of chip packaging structure, and in particular to a test device. BACKGROUND

[0003] In the chip packaging process, chip fracture strength testing is used. The upper pressure head continuously applies force downward to press the chip until the chip breaks, thereby obtaining the pressure that the chip can withstand. In related technologies, the same upper pressure head may not be able to adapt to different chip sizes, and different test chips require frequent replacement of pressure heads.

[0004] Any prior art mentioned in the specification does not mean that it is recognized or suggested that the prior art constitutes part of the common general knowledge in any jurisdiction, or can be reasonably expected to be understood, considered relevant and / or combined with other prior art by those skilled in the art. SUMMARY

[0005] One of the purposes of the present application is to provide a test device to solve the technical problem of frequent replacement of test pressure heads in the prior art.

[0006] To achieve one of the above purposes, an embodiment of the present application provides a test device, comprising: a pressure head assembly and a support assembly stacked, the pressure head assembly is used to apply pressure to the chip, and the support assembly is used to support the chip; the pressure head assembly comprises a first pressure head used to press the chip and a first adjusting device connected to the first pressure head; two first pressure heads are arranged at intervals, and the first adjusting device is used to adjust the relative distance between the two first pressure heads.

[0007] As a further improvement of an embodiment of the present application, the first pressure head comprises a first horizontal wall connected to the first adjusting device, a first vertical wall arranged from a side surface of the first horizontal wall close to the chip, and an arc-shaped pressing surface for pressing the chip at an end of the first vertical wall away from the first horizontal wall.

[0008] As a further improvement of an embodiment of the present application, the direction in which the two first vertical walls are arranged at intervals is a first direction, and each first vertical wall extends in a second direction, the first direction and the second direction are horizontal directions, the second direction is perpendicular to the first direction; the two first vertical walls are parallel to each other.

[0009] As a further improvement of the embodiment of the present application, the first adjusting device simultaneously drives the two first pressing heads to move in the first direction.

[0010] As a further improvement of the embodiment of the present application, the first adjusting device comprises a first mounting plate having a first sliding groove extending in the first direction, and two first sliding blocks symmetrically arranged in the first sliding groove, and the two first sliding blocks are respectively fixedly connected to the two first pressing heads.

[0011] As a further improvement of the embodiment of the present application, the first adjusting device comprises a screw rod arranged in the second direction, a driving block sleeved on the screw rod and threadedly matched with the screw rod, and two connecting rods arranged on both sides of the driving block in the first direction, and each connecting rod movably connects the driving block and the first sliding block; the first direction and the second direction are horizontal directions, and the first direction is perpendicular to the second direction.

[0012] As a further improvement of the embodiment of the present application, the screw rod is arranged at a middle position of the first mounting plate in the first direction, and the first adjusting device is symmetrically arranged about the central axis of the screw rod.

[0013] As a further improvement of the embodiment of the present application, the first mounting plate has a reference surface extending in the first direction, and the reference surface is provided with a scale mark.

[0014] As a further improvement of the embodiment of the present application, the screw rod has an operation end matched with the reference surface, and the first adjusting device comprises an adjusting knob arranged on the operation end.

[0015] As a further improvement of the embodiment of the present application, the first adjusting device comprises a second mounting plate fixedly connected to the first mounting plate, and the screw rod, the driving block and the connecting rod are arranged between the first mounting plate and the second mounting plate.

[0016] As a further improvement of the embodiment of the present application, the second adjusting device is connected to the first adjusting device, and the second adjusting device is used to drive the first adjusting device to move, so as to simultaneously drive the two first pressing heads to move in the same direction relative to the chip.

[0017] As a further improvement of the embodiment of the present application, the second adjusting device comprises a rectangular frame fixedly connected to the first adjusting device, and a first adjusting member matched with the rectangular frame to drive the rectangular frame to move in the first direction, and the direction in which the two first pressing heads are arranged at intervals is the first direction.

[0018] As a further improvement of the embodiment of the present application, the rectangular frame is made of flexible material, and the rectangular frame comprises deformation grooves arranged at four corners.

[0019] As a further improvement of the embodiment of the present application, the extension direction of each deformation groove is the diagonal direction of the rectangular frame.

[0020] As a further improvement of the embodiment of the present application, the support assembly comprises support blocks, and third adjusting devices for adjusting the positions of the support blocks, the third adjusting devices comprising a fixed plate, second adjusting members arranged on the fixed plate, sliding plates arranged in cooperation with the second adjusting members, and sliding rods arranged in the second direction; the fixed plate comprises a base plate and two vertical plates arranged on both sides of the base plate along the first direction; the base plate and the vertical plates form an accommodation space, and the sliding rods and the sliding plates are arranged in the accommodation space; the second adjusting members are adjusting screws, the threaded portions of the second adjusting members pass through the vertical plates into the accommodation space, and the ends of the second adjusting members abut against the sliding plates; the two sliding plates are connected to the two support blocks respectively, each sliding rod extends along the first direction, and both ends of each sliding rod along the first direction are fixed to the fixed plate, and an elastic member is arranged between the two sliding plates.

[0021] Compared with the prior art, the present application provides a testing device for chip strength, the pressure head assembly comprises two first pressure heads arranged at intervals, the first adjusting device can adjust the distance between the two pressure heads, so that various chips can be adapted, the first pressure heads do not need to be frequently replaced, cost is saved, and the accuracy of measurement is improved.

[0022] The terms "comprise" and variations of the term, such as "comprises" and "comprising," will be understood to imply the inclusion of a stated step or element or group of steps or elements but not the exclusion of any other step or element or group of steps or elements that can be insubstantially non-essential to the subject matter. BRIEF DESCRIPTION OF DRAWINGS

[0023] Fig. 1 is a perspective view of a testing device according to an embodiment of the present application.

[0024] Fig. 2 is a front view of the testing device according to an embodiment of the present application.

[0025] Fig. 3 is a perspective view of a pressure head assembly according to an embodiment of the present application.

[0026] Fig. 4 is a perspective view of the pressure head assembly according to an embodiment of the present application from another angle.

[0027] Fig. 5 is a schematic view of the pressure head assembly according to an embodiment of the present application with the first pressure head removed.

[0028] Fig. 6 is a schematic view of the pressure head assembly with the first pressure head and the first mounting plate removed in accordance with an embodiment of the present application.

[0029] Fig. 7 is a top view of the first adjustment device in accordance with an embodiment of the present application.

[0030] Fig. 8 is a top view of the second adjustment device in accordance with an embodiment of the present application.

[0031] Fig. 9 is a sectional view of the second adjustment device in accordance with an embodiment of the present application.

[0032] Fig. 10 is a perspective view of the support assembly in accordance with an embodiment of the present application.

[0033] Fig. 11 is a top view of the support assembly in accordance with an embodiment of the present application.

[0034] Fig. 12 is a sectional view of the support assembly in accordance with an embodiment of the present application.

[0035] Fig. 13 is an exploded schematic view of the partial structure of the support assembly in accordance with an embodiment of the present application. DETAILED DESCRIPTION

[0036] The present application will be described in detail below with reference to specific embodiments illustrated in the attached drawings. However, these embodiments are not intended to limit the present application, and any structural, methodological, or functional changes made by those skilled in the art based on these embodiments are included in the scope of the present application.

[0037] It should be noted that the term "comprising" or any other variant is intended to cover non-exclusive inclusion, so that a process, method, article, or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or inherent to such a process, method, article, or device. In addition, the terms "first", "second", "third", "fourth", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance.

[0038] The term "connected", "connected to", or any other variant is intended to cover various relative positions of the connection relationship, so that it includes direct connection or indirect connection. Among them, the direct connection can be formed by the air path pipeline, the indirect connection can be the connection relationship formed by devices such as valves, sensors, etc., can be the connection relationship formed by air path components such as brake control units, or can be the connection relationship formed by any other medium such as air.

[0039] Please refer to Fig. 1, which is a structural schematic diagram of a testing device 1000 provided by an embodiment of the present application, used for strength testing of a chip, comprising a pressure head assembly 100 and a support assembly 300 arranged in a stacking manner along a height direction, the pressure head assembly 100 being used to apply pressure to the chip, and the support assembly 300 being used to support the chip. In a specific application, the chip is placed on the support assembly 300, the pressure head assembly 100 continuously presses against and applies force to the chip until the chip is broken, and the pressure value at the time of breaking is obtained.

[0040] In a simulation test, the corresponding calibration block 200 is first placed on the support assembly 300, and after the positions of the support assembly 300 and the pressure head assembly 100 are adjusted, the calibration block 200 is removed and the chip is placed.

[0041] As shown in Fig. 2, the pressure head assembly 100 comprises a first pressure head 10 used to press the chip, and a first adjusting device 20 connected to the first pressure head 10. The two first pressure heads 10 are arranged in a spaced manner, and the first adjusting device 20 is used to adjust the relative distance between the two first pressure heads 10. In this way, the two first pressure heads 10 can adapt to chips of different sizes without the need to frequently replace the first pressure heads 10. The arrangement direction of the two first pressure heads 10 is a first direction, and each first pressure head 10 extends in a second direction. The first direction and the second direction are horizontal directions, and the first direction is perpendicular to the second direction.

[0042] The first pressure head 10 comprises a first horizontal wall 11 connected to the first adjusting device 20, and a first vertical wall 12 arranged on the side surface of the first horizontal wall 11 close to the chip. The first horizontal wall 11 and the first vertical wall 12 are perpendicular to each other. The end of the first vertical wall 12 away from the first horizontal wall 11 has an arc-shaped pressing surface 120 used to press the chip, which is relatively planar pressing, and the arc-shaped pressing surface 120 applies force more concentratedly.

[0043] As shown in Figs. 2-3, the two first horizontal walls 11 are arranged in a spaced manner and are attached to a first mounting plate 21 connected to the first adjusting device 20, and the two first vertical walls 12 are arranged in a spaced manner. Each first vertical wall 12 extends in the second direction, and the two first vertical walls 12 are parallel to each other, which is beneficial to symmetrically and stably press against the chip and obtain more accurate pressure values at the time of breaking.

[0044] The first adjusting device 20 simultaneously drives the two first pressure heads 10 to move towards each other or away from each other in the first direction, in other words, the two first pressure heads 10 move closer to or farther away from each other in the first direction to adjust the distance between them. The first adjusting device 20 drives the first pressure heads 10 to move towards each other or away from each other by driving the two first horizontal walls 11 to move towards each other or away from each other.

[0045] Referring to FIGS. 3-7, the first adjusting device 20 includes a first mounting plate 21 arranged horizontally, the first mounting plate 21 having a first sliding groove 210 extending along a first direction, the first adjusting device 20 including two first sliding blocks 22 symmetrically arranged in the first sliding groove 210, and the two first sliding blocks 22 being respectively fixedly connected to the two first pressing heads 10.

[0046] In one embodiment, the first horizontal wall 11 is provided with a mounting groove 111 near a surface of the first mounting plate 21, the mounting groove 111 being located at a middle position of the first horizontal wall 11 along a second direction, each first sliding block 22 being fixed to the mounting groove 111 by a fastener, or the first sliding block 22 being fixedly connected to the first horizontal wall 11 by other buckle fixing structures, such as dovetail groove structures. In this way, the two first sliding blocks 22 slide in the first sliding groove 210, stably driving the two first pressing heads 10 to move towards or away from each other.

[0047] The first mounting plate 21 has an auxiliary sliding groove 211 extending along the first direction, the auxiliary sliding groove 211 being symmetrically arranged on both sides of the first sliding groove 210 along the second direction, the pressing head assembly 100 being provided with a slide column 112 at a position corresponding to the auxiliary sliding groove 211 on the first horizontal wall 11, the slide column 112 being fixed to both ends of the first horizontal wall 11 along the second direction, and the slide column 112 being slidably connected to the auxiliary sliding groove 211. In this way, the middle position of the first pressing head 10 is slidably connected by the first sliding block 22, and both ends of the first pressing head 10 can also slide along the auxiliary sliding groove 211, which is beneficial to the balanced and stable sliding of the first pressing head 10 as a whole.

[0048] The first adjusting device 20 includes a screw rod 23 extending along the second direction, a driving block 24 sleeved on the screw rod 23 and threadedly matched with the screw rod 23, two connecting rods 25 arranged on both sides of the driving block 24 along the first direction, and each connecting rod 25 movably connecting the driving block 24 and the first sliding block 22. In this way, the two connecting rods 25 respectively drive the two first sliding blocks 22 to move, so as to drive the first pressing head 10 to move.

[0049] In actual adjustment, when the screw rod 23 rotates under the action of external force, the driving block 24 is driven to move linearly in the second direction, and the connecting rods 25 on both sides of the driving block 24 start to move. The first end 251 of the connecting rod 25 is rotationally connected to the driving block 24 and moves in the second direction, and the second end 252 of the connecting rod 25 is rotationally connected to the first sliding block 22 and moves in the first direction under the limitation of the first sliding groove 210. The driving block 24 can drive the two connecting rods 25 to move synchronously, so that the second ends 252 of the two connecting rods move towards or away from the screw rod 23 at the same time, realizing the synchronous movement of the two first sliding blocks 22 towards or away from each other, in other words, the two first sliding blocks 22 can realize symmetrical movement.

[0050] Further, the screw rod 23 is arranged at the middle position of the first mounting plate 21 in the first direction, and the first adjusting device 20 is arranged symmetrically about the central axis of the screw rod 23. The first adjusting device 20 is arranged symmetrically in the first direction, so that the two first pressing heads 10 realize symmetrical movement in the first direction. In this way, after the distance is adjusted, the force exerted by the first pressing heads 10 on the chip is also symmetrical. The screw rod 23 is further located at the middle position of the first mounting plate 21, and the two driving blocks 24 are respectively located on the two symmetric sides of the first mounting plate 21, the two connecting rods 25 are respectively located on the two symmetric sides of the first mounting plate 21, and the two first sliding blocks 22 are also respectively located on the two symmetric sides of the first mounting plate 21.

[0051] The first mounting plate 21 has a reference surface 212 extending in the first direction, and the reference surface 212 is provided with a scale mark. In this way, the operator can refer to it when adjusting.

[0052] The screw rod 23 has an operation end matched with the reference surface 212, and the first adjusting device 20 includes an adjusting knob 26 arranged on the operation end. The adjusting knob 26 is manually rotated to drive the screw rod 23 to rotate, realizing the adjusting function of the first adjusting device 20, and the scale mark can be directly referred to for adjustment.

[0053] Specifically, the adjusting knob 26 is arranged at the middle position of the first mounting plate 21 in the first direction, corresponding to the zero scale of the scale mark, and the scale values of the scale mark gradually increase towards both sides in the first direction. When the distance between the two first pressing heads 10 needs to be adjusted to 2 cm, the adjusting knob 26 is rotated so that the two first pressing heads 10 move to the positions corresponding to the 1 cm scale, respectively. In this way, the two first pressing heads 10 can ensure accuracy, so that the distance between the two first pressing heads 10 is adjusted with higher accuracy.

[0054] The first adjusting device 20 comprises a second mounting plate 27 fixedly connected with the first mounting plate 21, and the screw rod 23, the driving block 24 and the connecting rod 25 are installed between the first mounting plate 21 and the second mounting plate 27.

[0055] Specifically, as shown in FIGS. 6-7, a positioning structure is arranged between the first mounting plate 21 and the second mounting plate 27, which comprises a first positioning column 213 arranged on the first mounting plate 21 and a second positioning groove 271 arranged on the second mounting plate 27 and matched with the first positioning column 213. Alternatively, the positioning structure comprises a first positioning groove arranged on the first mounting plate 21 and a second positioning column arranged on the second mounting plate 27 and matched with the first positioning groove. The positioning structure is located at the corresponding corner of the first mounting plate 21 and the second mounting plate 27.

[0056] The first mounting plate 21 is recessed to form a first receiving groove 214 near the upper surface of the second mounting plate 27 to install the screw rod 23, the driving block 24 and the connecting rod 25, and the first receiving groove 214 is communicated with the first sliding groove 210. It can be understood that the first sliding groove 210 penetrates the first mounting plate 21 upward and downward so that the first sliding block 22 can extend downward and be connected with the first pressing head 10, and the first receiving groove 214 does not need to penetrate downward, but only needs to provide a receiving space.

[0057] Correspondingly, the second mounting plate 27 is recessed to form a second receiving groove 272 near the lower surface of the first mounting plate 21 to receive the screw rod 23, the driving block 24 and the connecting rod 25. The second receiving groove 272 also does not need to penetrate upward.

[0058] In this way, the first mounting plate 21 and the second mounting plate 27 can be fixedly attached, and the screw rod 23, the driving block 24 and the connecting rod 25 can be received therebetween, which plays a shielding role, reasonably utilizes the structure and reduces the occupied space.

[0059] In other embodiments, only the first receiving groove 214 can be arranged to completely receive the screw rod 23, the driving block 24 and the connecting rod 25, but the first mounting plate 21 needs to have a relatively thick thickness to provide a deeper first receiving groove 214. In more embodiments, only the second receiving groove 272 can be arranged to completely receive the screw rod 23, the driving block 24 and the connecting rod 25, but the second mounting plate 27 needs to have a relatively thick thickness to provide a deeper second receiving groove 272.

[0060] The pressing head assembly 100 further comprises a second adjusting device 30 connected to the first adjusting device 20, and the second adjusting device 30 is used to drive the first adjusting device 20 to move, so as to simultaneously drive the two first pressing heads 10 to move in the same direction relative to the chip.

[0061] As shown in FIGS. 8-9, the second adjusting device 30 includes a rectangular frame 31 fixedly connected to the first adjusting device 20, and a first adjusting member 32 cooperating with the rectangular frame 31 to drive the rectangular frame 31 to move in the first direction.

[0062] The first adjusting device 20 includes a connecting block 273 fixedly connected to the rectangular frame 31, and a threaded portion of the first adjusting member 32 penetrating the connecting block 273 in the first direction and connected to the rectangular frame 31.

[0063] Specifically, the upper surface of the second mounting plate 27 is provided with the connecting block 273, which is integrally formed with the second mounting plate 27 or fixedly connected by fasteners or buckling structures. Each connecting block 273 extends in the second direction, and the two connecting blocks 273 are respectively located on the two sides of the second mounting plate 27 in the first direction.

[0064] The rectangular frame 31 is located between the two connecting blocks 273, and the rectangular frame 31 includes a first side 311, a second side 312, a third side 313 and a fourth side 314 connected in sequence. The first side 311 and the third side 313 are oppositely arranged in the first direction, and the second side 312 and the fourth side 314 are oppositely arranged in the second direction.

[0065] The first side 311 and the third side 313 close to the connecting block 273 are fixedly connected to the connecting block 273, so that the rectangular frame 310 can drive the connecting block 273 to move, thereby driving the second mounting plate 27 to move and the first adjusting device 20 to move, achieving the function of fine-tuning the first pressure head 10.

[0066] Different from the first adjusting device 20, the second adjusting device 30 drives the first adjusting device 20 to move as a whole, thereby driving the first pressure head 10 to move as a whole. In other words, when the second adjusting device 30 acts, the first pressure head 10 moves in the same direction, i.e., simultaneously moves left in the first direction or simultaneously moves right in the first direction, to adjust the horizontal center alignment of the first pressure head 10 relative to the chip.

[0067] The first adjusting member 32 penetrates the connecting block 273 in the first direction and is connected to the rectangular frame 31. More specifically, the first adjusting member 32 is a adjusting screw, the threaded portion of the first adjusting member 32 cooperates with the rectangular frame 31, and when the first adjusting member 32 rotates, it can be converted into the linear motion of the rectangular frame 31 in the first direction, so as to realize the linear motion of the connecting block 273 in the first direction.

[0068] Specifically, the two first connecting blocks 273 are respectively provided with first adjusting members 32, in other words, the first edge 311 and the third edge 313 of the rectangular frame body 31 are both provided with first adjusting members 32, so as to realize the adjustment in the left and right directions in the first direction. Each connecting block 273 is provided with two first adjusting members 32, which are symmetrically arranged in the first direction and the second direction.

[0069] The rectangular frame body 31 is made of flexible material, and the rectangular frame body 31 comprises deformation grooves 310 arranged at four corners, so that the rectangular frame body 31 can be elastically deformed. Specifically, when the first adjusting member 32 at the corresponding position of the first edge 311 is adjusted, the first adjusting member 32 is tightened to drive the first edge 311 to move towards the third edge 313. The first edge 311 can be elastically deformed towards the third edge 313 first, and then drive the whole rectangular frame body 31 to move to the right, which is beneficial to improve the service life of the rectangular frame body 31.

[0070] The extension direction of each deformation groove 310 is the diagonal direction of the corresponding position of the rectangular frame body 31, in other words, the connecting line of the four deformation grooves 310 is exactly the two intersecting diagonal lines of the rectangular frame body 31, which is beneficial to the elastic deformation of the first edge 311 and the third edge 313.

[0071] The pressure head assembly 100 comprises a pressing block 60 arranged in the rectangular frame body 31, the pressing block 60 is arranged at intervals with the first edge 311 and the third edge 313 on both sides in the first direction, and the pressing block 40 is fixedly connected with the second edge 312 and the fourth edge 314 at both ends in the second direction. In this way, the first edge 311 and the third edge 313 have deformation fine adjustment space in the first direction.

[0072] In actual use, the first adjusting member 32 at the corresponding position of the first edge 311 or the third edge 313 is adjusted as needed. When the first adjusting member 32 at the first edge 311 is adjusted, the first adjusting member 32 is rotated. Since the head of the first adjusting member 32 abuts against the connecting block 273, it cannot move towards the rectangular frame body 31, so it is converted into the movement of the first edge 311 of the rectangular frame body 31 away from the first adjusting member 32. The first edge 311 has a force moving towards the third edge 313, which drives the whole rectangular frame body 31 to move to the right, drives the connecting block 273 to move to the right, and thus drives the two first pressure heads 10 to fine adjust to the right at the same time.

[0073] In this way, the pressure head assembly 100 can adjust the relative distance between the two first pressure heads 10 through the first adjusting device 20 to adapt to different chips or different application scenarios; and can also fine adjust the two first pressure heads 10 to the right or to the left at the same time through the second adjusting device 30, so as to realize the horizontal center alignment with the measured chip and improve the measurement accuracy.

[0074] Referring to FIGS. 10-13, the testing device 1000 further includes a support assembly 300 for placing the chip. The support assembly 300 includes support blocks 40 and third adjusting devices 50 for adjusting the positions of the support blocks 40. In some embodiments, the support blocks 40 have substantially the same structure as the first pressing head 10, which will not be described again here, except that the first horizontal wall of the support blocks 40 has a larger size than the first horizontal wall of the first pressing head 10. In other embodiments, the support blocks 40 can have the same structure as the first pressing head 10.

[0075] The support blocks 40 and the first pressing head 10 are oppositely placed to clamp the chip therebetween for force measurement. The two support blocks 40 are spaced apart along the first direction, and the third adjusting devices 50 are used to adjust the positions of the two support blocks 40, respectively. The chip is in two-point contact with the support blocks 40, and the chip is also in two-point contact with the first pressing head 10, so that the chip is broken when a certain critical pressure value is reached, and the pressure value at the time of breaking is measured.

[0076] The third adjusting devices 50 include a fixed plate 51, second adjusting members 52 arranged on the fixed plate 51, and sliding plates 53 arranged in cooperation with the second adjusting members 52. The two sliding plates 53 are connected to the two support blocks 40, respectively, to drive the two support blocks 40 to move.

[0077] The third adjusting devices 50 include sliding rods 54 spaced apart along the second direction, each sliding rod 54 extending along the first direction, and both ends of each sliding rod 54 along the first direction being fixed to the fixed plate 51, so that the sliding rods 54 provide stable sliding tracks. Both ends of each sliding plate 53 along the second direction pass through the two sliding rods 54, respectively, to move along the first direction along the sliding rods 54, which is beneficial to balanced sliding.

[0078] Specifically, the fixed plate 51 includes a base plate 511 and two vertical plates 512 located on both sides of the base plate 511 along the first direction. The base plate 511 is a horizontal plate, and the vertical plates 512 are perpendicular to the base plate 511. The base plate 511 and the vertical plates 512 can be integrally formed or fixedly connected by fasteners or buckle structures. The base plate 511 and the vertical plates 512 surround to form a receiving space 510. The sliding rods 54 and the sliding plates 53 are located in the receiving space 510.

[0079] The second adjusting members 52 are adjusting screws. The threaded portions of the second adjusting members 52 pass through the vertical plates 512 into the receiving space 510, and the ends of the second adjusting members 52 abut against the sliding plates 53 to push the sliding plates 53 to move. Each adjusting member 52 is located at a middle position between the two sliding rods 54, and the two second adjusting members 52 are arranged on both sides of the fixed plate 51 along the first direction, respectively.

[0080] The elastic member 55 is sleeved on the middle position of the sliding rod 54 in the first direction, and the two sides of the elastic member 55 abut against the two sliding plates 53 respectively. In other words, the sliding rod 54 passes through the sliding plate 53, and the two sides of the sliding plate 53 in the first direction are respectively provided with the elastic member 55 and the second adjusting member 52, so as to realize the left or right movement in the first direction.

[0081] Thus, when the second adjusting member 52 on the right is adjusted, the second adjusting member 52 pushes the sliding plate 53 to the left, the sliding plate 53 slides to the left along the sliding rod 54, and the support block 40 on the right is driven to move to the left, the support block 40 on the right abuts against the elastic member 55, and the elastic member 55 is compressed to the left. It can be understood that although the elastic member 55 is compressed to the left, since the other end abuts against the sliding plate 53 on the left, and the sliding plate 53 on the left abuts against the second adjusting member 52 on the left, the sliding plate 53 on the left is not linked, that is, when the sliding plate 53 on the right is adjusted, the sliding plate 53 on the left is not affected.

[0082] When the second adjusting member 52 moves to the right, it cannot push the sliding plate 53, but the compressed elastic member 55 needs to recover to its original shape, and can push the sliding plate 53 to the right to provide the force for the movement of the sliding plate 53 to the right. It can be understood that when the second adjusting member 52 moves to the right, the elastic member 55 releases the elastic force to push the sliding plate 53 to the right, and the sliding plate 53 on the left and the second adjusting member 52 on the left are not affected.

[0083] It can be understood that the adjusting principle of the second adjusting member 52 on the left is completely consistent with that on the right, only the direction is opposite. When the second adjusting member 52 on the left and the sliding plate 53 on the left are adjusted, the second adjusting member 52 on the right and the sliding plate 53 on the right are not affected.

[0084] Therefore, although the third adjusting device 50 is symmetrically arranged and can be used for simultaneous adjustment on both sides, it is not necessary to adjust symmetrically. The two second adjusting members 52 and the two sliding plates 53 do not have a specific linkage relationship. The third adjusting device 50 is used to separately adjust the positions of the two support blocks 40 respectively, so as to adapt to different chips to adjust the relative distance between the two support blocks 40, or to move the two support blocks 40 in the same direction for horizontal centering alignment with the chips.

[0085] The test device 1000 of the present application is used in actual use, a suitable calibration block 200 is selected according to a chip, the calibration block 200 is placed on the support assembly 300, two first grooves are correspondingly arranged on the upper surface of the calibration block 200 and used for reference to adjust the positions of the two first pressure heads 10, two second grooves are correspondingly arranged on the lower surface of the calibration block 200 and used for reference to adjust the positions of the two support blocks 40, when the two first pressure heads 10 are matched and aligned with the first grooves and the two support blocks 40 are matched and aligned with the second grooves, it is indicated that the support assembly 200 and the pressure head assembly 100 are adjusted to be located at a suitable measurement position.

[0086] Specifically, the third adjusting device 50 is adjusted first, the two second adjusting members 52 are respectively operated, and the distance between the two support blocks 40 is adjusted to a predetermined width; then the first adjusting device 20 is adjusted, the scale mark is referred to, and the adjusting knob 26 is operated; finally, the second adjusting device 40 can be finely adjusted, and the two first pressure heads 10 are horizontally centered and aligned.

[0087] The present application has the beneficial effects that the pressure head assembly 100 comprises the first adjusting device 20, which is used to adjust the relative distance between the two first pressure heads 10, so as to adapt to different chips, correspond to different chips, set different intervals of the first pressure heads 10, do not need to frequently replace the first pressure heads 10, save the cost, and improve the measurement accuracy; the first adjusting device 20 is symmetrical adjustment, the adjusting knob 26 is operated, and the two first pressure heads 10 are simultaneously moved towards or away from each other; the second adjusting device 30 drives the first adjusting device 20 to move as a whole, so as to drive the two first pressure heads to move in the same direction, adjust the two first pressure heads to be horizontally centered and aligned with the chip, improve the measurement accuracy; the rectangular frame body 31 is made of flexible material, and four deformation grooves 310 are arranged at opposite corners, so as to improve the service life of the second adjusting device 30.

[0088] Any technical solution provided in the foregoing can be formed, and details are not described herein.

[0089] It should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the specification is described in this way only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand.

[0090] The series of detailed descriptions listed above are only specific descriptions of the feasible embodiments of the present application, and they are not used to limit the protection scope of the present application, and equivalent embodiments or changes made without departing from the spirit of the present application should be included in the protection scope of the present application.

Claims

1. A testing device for chip strength testing, characterized in that: include: A stacked pressure head assembly and a support assembly, wherein the pressure head assembly is used to apply pressure to the chip, and the support assembly is used to support the chip; The press head assembly includes a first press head for pressing a chip and a first adjusting device connected to the first press head; the two first press heads are arranged at intervals, and the first adjusting device is used to adjust the relative distance between the two first press heads.

2. The testing device according to claim 1, wherein: The first pressing head includes a first horizontal wall connected to the first adjusting device and a first vertical wall arranged on a side surface of the first horizontal wall close to the chip. The end of the first vertical wall away from the first horizontal wall has an arc-shaped pressing surface for pressing the chip.

3. The testing device according to claim 2, characterized in that The direction in which the two first vertical walls are spaced apart is a first direction, each first vertical wall extends along a second direction, the first direction and the second direction are horizontal directions, and the second direction is perpendicular to the first direction; the two first vertical walls are parallel to each other.

4. The testing device according to claim 1, wherein: The first adjusting device simultaneously drives the two first pressing heads to move toward each other or move away from each other along a first direction, and the direction in which the two first pressing heads are arranged at intervals is the first direction.

5. The testing device according to claim 4, characterized in that: The first adjusting device includes a first mounting plate having a first sliding groove extending along a first direction. The first adjusting device includes two first sliding blocks symmetrically arranged in the first sliding groove. The two first sliding blocks are respectively fixedly connected to the two first pressure heads.

6. The testing device according to claim 5, characterized in that: The first adjusting device includes a screw rod arranged along the second direction, a driving block sleeved on the screw rod and engaged with the screw rod thread, and two connecting rods arranged on both sides of the driving block along the first direction, each of the connecting rods movably connecting the driving block and the first sliding block; the first direction and the second direction are horizontal directions, and the first direction is perpendicular to the second direction.

7. The testing device according to claim 6, characterized in that The screw rod is arranged at a middle position of the first mounting plate along a first direction, and the first adjusting device is symmetrically arranged about a central axis of the screw rod.

8. The testing device according to claim 6, characterized in that The first mounting plate has a reference surface extending along a first direction, and a scale mark is provided on the reference surface.

9. The testing device according to claim 8, characterized in that: The spiral rod has an operating end that is arranged to cooperate with the reference surface, and the first adjusting device includes an adjusting knob arranged on the operating end.

10. The testing device according to claim 6, characterized in that: The first adjusting device includes a second mounting plate fixedly connected to the first mounting plate, and the screw rod, the driving block, and the connecting rod are installed between the first mounting plate and the second mounting plate.

11. The testing device according to claim 1, characterized in that: It comprises a second adjusting device connected to the first adjusting device, wherein the second adjusting device is used to drive the first adjusting device to move, thereby simultaneously driving the two first pressure heads to move in the same direction.

12. The testing device according to claim 11, characterized in that: The second adjusting device includes a rectangular frame fixedly connected to the first adjusting device, and a first adjusting member cooperating with the rectangular frame to drive the rectangular frame to move along a first direction. The direction in which the two first pressing heads are arranged at intervals is the first direction.

13. The testing device according to claim 12, characterized in that: The rectangular frame is made of a flexible material and includes deformation grooves arranged at four diagonal corners.

14. The testing device according to claim 13, characterized in that: The extending direction of each deformation groove is the diagonal direction of the corresponding rectangular frame.

15. The testing device according to claim 1, wherein: The support assembly includes a support block and a third adjusting device for adjusting the position of the support block, the third adjusting device including a fixed plate, a second adjusting member arranged on the fixed plate, a sliding plate arranged in cooperation with the second adjusting member, and a sliding rod arranged at intervals along the second direction; the fixed plate includes a base plate and two vertical plates located on both sides of the base plate along the first direction; the base plate and the vertical plates are arranged to form a receiving space, and the sliding rod and the sliding plate are located in the receiving space; the second adjusting member is an adjusting screw, the threaded portion of the second adjusting member passes through the vertical plate into the receiving space, and the end of the second adjusting member abuts against the sliding plate; the two sliding plates are respectively connected to the two support blocks, each sliding rod extends along the first direction, and both ends of each sliding rod along the first direction are fixed to the fixed plate, and an elastic member is arranged between the two sliding plates.

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