Light source apparatus and laser processing device

Abstract

The present application discloses a light source apparatus and a laser processing device. The light source apparatus comprises a laser module, a guide module, a correction module, and a convergence module. The laser module is used to generate M first laser beams, and M first light spots corresponding to the M first laser beams are sequentially arranged at intervals in a slow-axis direction of the first light spots. The guide module is disposed on the optical paths of the M first laser beams and used to generate M second laser beams, and M second light spots corresponding to the M second laser beams are sequentially spaced apart in a fast-axis direction of the second light spots. The correction module is disposed on the optical paths of the M second laser beams and used to extend the lengths of the second light spots in a slow-axis direction of the second light spots. The convergence module is disposed on the optical paths of the M second laser beams corrected by the correction module, and is used to generate specified laser light. By means of providing the guide module and the correction module, the size of a converged light spot corresponding to the specified laser light can be reduced, thereby increasing the optical power density of the specified laser light, and accordingly improving the processing efficiency of a laser processing device.

Description

Light source device and laser processing apparatus

[0001] Cross Reference to Related Applications

[0002] The present application claims priority to the Chinese patent application No. 202410463255.5, filed on April 16, 2024, entitled “Light source device and laser processing apparatus”, the content of which is incorporated herein by reference in its entirety. TECHNICAL FIELD

[0003] The present application relates to the field of optical imaging technology, and more particularly, to a light source device and a laser processing apparatus. BACKGROUND

[0004] In the existing fiber-coupled semiconductor laser (FCSL), in order to facilitate the assembly and debugging of multiple laser chips, multiple laser chips are usually packaged on the same substrate.

[0005] In order to reduce the packaging size of the laser, researchers usually adopt an array packaging method in which multiple laser chips are arranged in a line. Specifically, multiple laser chips are arranged at intervals along the slow axis direction of the laser chip, that is, multiple light spots formed by multiple laser chips are arranged in a line along the slow axis direction.

[0006] However, the light spot length of the laser generated by the above-mentioned laser chip becomes smaller and the divergence angle becomes larger in the slow axis direction after collimation processing by the collimation lens. After the subsequent laser converges through the condensing lens, the converging light spot formed at the focal point of the condensing lens has a larger light spot length and a smaller divergence angle in the slow axis direction, which further leads to a smaller light power density of the laser at the focal point, and thus the processing efficiency of the laser processing apparatus configured with the laser is weakened. SUMMARY

[0007] The present application provides a light source device and a laser processing apparatus.

[0008] According to a first aspect of the present application, the embodiments of the present application provide a light source device, which comprises a laser module, a guiding module, a correction module and a converging module. The laser module is configured to generate M first lasers. M first spots corresponding to the M first lasers are arranged along a slow axis direction of the first spots in sequence and at intervals. M is a positive integer greater than 1. The guiding module is arranged on an optical path of the M first lasers and is configured to guide the M first lasers to generate M second lasers. M second spots corresponding to the M second lasers are arranged along a fast axis direction of the second spots in sequence and at intervals. M is a positive integer greater than 1. The correction module is arranged on an optical path of the M second lasers and is configured to correct the M second lasers to expand a length of the second spots in the slow axis direction of the second spots. The converging module is arranged on an optical path of the M second lasers after being corrected by the correction module and is configured to converge the M second lasers after being corrected to generate a specified laser.

[0009] According to a second aspect of the present application, the embodiments of the present application further provide a laser processing device, which comprises the light source device and an optical fiber. The light source device is configured to generate the specified laser. The optical fiber has a coupling-in end and a coupling-out end. The coupling-in end is arranged at a focal point of the converging module. After the specified laser is coupled into the optical fiber through the coupling-in end, the specified laser is coupled out through the coupling-out end.

[0010] The present application provides a light source device and a laser processing device. The light source device can comprise a laser module, a guiding module, a correction module and a converging module. The guiding module can transform M first spots arranged along a slow axis direction of the first spots in sequence and at intervals into M second spots arranged along a fast axis direction of the second spots in sequence and at intervals. The correction module can expand a length of the second spots in the slow axis direction of the second spots. According to the principle of constant optical etendue, the length of the second spots in the slow axis direction is expanded, and the divergence angle of the second spots in the slow axis direction is reduced.

[0011] After the M second lasers are converged by the converging module, the divergence angle of the converged spot in the slow axis direction at the focal point of the converging module is increased and the length of the converged spot in the slow axis direction is reduced, so that the overall spot size of the converged spot is reduced. The light power density of the specified laser at the focal point is improved, and the processing efficiency of the laser processing device provided with the light source device is improved. BRIEF DESCRIPTION OF DRAWINGS

[0012] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative effort.

[0013] FIG. 1 is a structural schematic diagram of a light source device according to an embodiment of the present application.

[0014] FIG. 2 is a structural schematic diagram of a laser module in the light source device shown in FIG. 1.

[0015] FIG. 3 is a structural schematic diagram of a fast-axis compression component in the laser module shown in FIG. 2.

[0016] FIG. 4 is a schematic diagram of an arrangement of first light spots in the light source device shown in FIG. 1.

[0017] FIG. 5 is another structural schematic diagram of the fast-axis compression component in the laser module shown in FIG. 2.

[0018] FIG. 6 is another structural schematic diagram of the laser module in the light source device shown in FIG. 1.

[0019] FIG. 7 is a schematic diagram of a polarization combining component in the laser module shown in FIG. 6.

[0020] FIG. 8 is a schematic diagram of an arrangement of light spots in the light source device shown in FIG. 1.

[0021] FIG. 9 is a structural schematic diagram of a guiding unit in the light source device shown in FIG. 1.

[0022] FIG. 10 is another structural schematic diagram of the guiding unit in the light source device shown in FIG. 1.

[0023] FIG. 11 is another structural schematic diagram of a light source device according to an embodiment of the present application.

[0024] FIG. 12 is a structural schematic diagram of a combining component in the light source device shown in FIG. 11.

[0025] FIG. 13 is a schematic diagram of an arrangement of light spots in the light source device shown in FIG. 11.

[0026] FIG. 14 is a structural schematic diagram of a correction module in the light source device shown in FIG. 1.

[0027] FIG. 15 is another structural schematic diagram of the correction module in the light source device shown in FIG. 14.

[0028] FIG. 16 is a structural schematic diagram of a laser processing device according to an embodiment of the present application. DETAILED DESCRIPTION

[0029] In order to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0030] The present embodiment provides a light source device 100 for generating a specified laser. The light source device 100 can be applied to a laser processing device and used as a laser generator in the laser processing device. Specifically, the laser processing device can be a laser engraver, a laser cutter, etc.

[0031] Referring to FIG. 1, the light source device 100 can include a laser module 10, a guiding module 30, a correction module 50, and a converging module 70. The laser module 10 is configured to generate M first lasers L1, and M first spots S1 corresponding to the M first lasers L1 are arranged along a slow axis direction X1 of the first spot S1 in sequence and at intervals. M is a positive integer greater than 1. For example, M can be equal to 2, 3, 4, 5, etc. Specifically, the first spot S1 in the present application is substantially elliptical, and the slow axis direction X1 of the first spot S1 is the direction of the minor axis of the ellipse corresponding to the first spot S1.

[0032] The guiding module 30 is disposed on an optical path of the M first lasers L1 and configured to guide the M first lasers L1 to generate M second lasers L2. M second spots S2 corresponding to the M second lasers L2 are arranged along a fast axis direction Y2 of the second spot S2 in sequence and at intervals, where M is a positive integer greater than 1 and M is less than or equal to M. For example, M can be equal to 2, 3, 4, 5, etc. Specifically, the second spot S2 in the present application is substantially elliptical, and the fast axis direction Y2 of the second spot S2 is the direction of the major axis of the ellipse corresponding to the second spot S2.

[0033] The "guiding the first laser L1" herein can be understood as an optical operation of translating the optical axis of the first laser L1, reflecting the first laser L1, etc. Therefore, by guiding the M first lasers L1, the guiding module 30 in the present embodiment can transform the M first spots S1 arranged along the slow axis direction X1 of the first spot S1 in sequence and at intervals into the M second spots S2 arranged along the fast axis direction Y2 of the second spot S2 in sequence and at intervals.

[0034] The correction module 50 is arranged on the optical path of the M-path second laser L2, and is configured to correct the M-path second laser L2 to expand the length of the second spot S2 in the slow axis direction X2 of the second spot S2. Specifically, the slow axis direction X2 of the second spot S2 is the direction of the minor axis of the ellipse corresponding to the second spot S2. That is, the slow axis direction X2 of the second spot S2 is perpendicular to the fast axis direction Y2 of the second spot S2. According to the principle of constant etendue, the divergence angle of the second spot S2 in the slow axis direction X2 is reduced when the spot length of the second spot S2 in the slow axis direction X2 is increased after the correction of the correction module 50.

[0035] The converging module 70 is arranged on the optical path of the M-path second laser L2 after the correction of the correction module 50, and is configured to converge the M-path second laser L2 after the correction to generate the specified laser LD. Due to the beam expansion of the correction module 50 and the convergence of the converging module 70, the converging spot of the specified laser LD formed at the focal point of the converging module 70 has a larger divergence angle and a smaller spot length in the slow axis direction X2 of the second spot S2, so that the overall spot size of the converging spot is reduced, the optical power density of the specified laser LD at the focal point is increased, and the processing efficiency of the laser processing equipment provided with the light source device 100 is improved.

[0036] The specific implementation of each module in the light source device 100 will be described below.

[0037] In the present embodiment, the laser module 10 is configured to generate the M-path first laser L1. Referring to FIG. 2, in some possible embodiments, the laser module 10 can include a substrate 120 and M first laser chips 140 encapsulated on the substrate 120. Specifically, the substrate 120 can be a substrate dedicated to laser chips, and the first laser chips 140 can be edge-emitting laser chips (EEL).

[0038] In some possible embodiments, the M first laser chips 140 can be mounted on the substrate 120 by using a surface mount device (SMD) process to improve the integration of the laser module 10 and facilitate the installation and optical path debugging of the laser module 10. In addition, the substrate 120 can have good heat dissipation performance for the first laser chips 140 to ensure the working efficiency of the laser module 10. In other possible embodiments, the M first laser chips 140 can also be fixed on the substrate 120 by using a transistor outline (TO) packaging method, which is not limited in the present embodiment.

[0039] In the embodiment shown in FIG. 2, the M first laser chips 140 can be sequentially and spacedly arranged along the slow axis direction X1 of the first light spot S1 on the substrate 120, and each first laser chip 140 is configured to generate a first laser L1, so that the M first light spots S1 corresponding to the M first lasers L1 are sequentially and spacedly arranged along the slow axis direction X1 of the first light spot S1. Specifically, in the embodiment shown in FIG. 2, M is equal to four, and the four first laser chips 140 can be arranged equidistantly in a substantially "I" shape on the substrate 120, that is, the four first laser chips 140 are arranged in a 1*4 array.

[0040] In the embodiment shown in FIG. 2, the laser module 10 can further include M collimating lenses 160, which are arranged one by one on the optical path of the M first lasers L1, and are configured to collimate the first lasers L1 so that the first lasers L1 are incident on the directing module 30 as parallel light. Specifically, the M collimating lenses 160 can be arranged on the surface of the substrate 120. For example, the M collimating lenses 160 can be attached to the surface of the substrate 120, or embedded in the surface of the substrate 120, so as to improve the overall integration of the laser module 10, and also enable the M first lasers L1 to exit from the laser module 10 as parallel light.

[0041] Referring to FIG. 3, the laser module 10 can further include a fast axis compression assembly 170 arranged on the optical path of the M first lasers L1 exiting via the M collimating lenses 160, and configured to reduce the length of the first light spot S1 in the fast axis direction Y1 of the first light spot S1. Specifically, the "fast axis direction Y1 of the first light spot S1" is the direction of the major axis of the ellipse corresponding to the first light spot S1. That is, the fast axis direction Y1 of the first light spot S1 is perpendicular to the slow axis direction X1 of the first light spot S1.

[0042] It should be noted that the shape and area of the first light spot S1 and the second light spot S2 are substantially the same. Due to the compression of the fast axis compression assembly 170, the length of the first light spot S1 in the fast axis direction Y1 of the first light spot S1 is reduced, so that the length of the second light spot S2 in the fast axis direction Y2 of the second light spot S2 is also reduced, and the total length of the M second light spots S2 in the fast axis direction Y2 of the second light spot S2 is reduced. Therefore, the hardware size of the subsequent correction module 50 and the converging module 70 can be reduced, and the hardware cost of the light source device 100 can be reduced.

[0043] Referring to FIG. 4, FIG. 4 is a schematic diagram of arrangement of the first light spots S1 according to the embodiment, where M is 4. Specifically, part (a1) of FIG. 4 is a schematic diagram of arrangement of the M first light spots S1 emitted via the M collimating lenses 160; part (a2) of FIG. 4 is a schematic diagram of arrangement of the M first light spots S1 emitted via the fast-axis compression assembly 170.

[0044] Referring again to FIG. 3, in some possible embodiments, the fast-axis compression assembly 170 can include a second meniscus cylindrical lens 180 disposed on the optical path of the M first lasers L1 emitted via the M collimating lenses 160, which can be used to reduce the length of the first light spots S1 in the fast-axis direction Y1 of the first light spots S1, where the extension direction of the second meniscus cylindrical lens 180 is parallel to the slow-axis direction X1 of the first light spots S1. Specifically, the second meniscus cylindrical lens 180 has a second concave surface 1810 and a second convex surface 1830 opposite to each other, the first lasers L1 are incident via the second convex surface 1830 and emitted via the second concave surface 1810. That is, the second convex surface 1830 is disposed toward the M collimating lenses 160, and the second concave surface 1810 is disposed toward the guide module 30. Specifically, the second convex surface 1830 can be a convex cylindrical surface, and the second concave surface 1810 can be a concave cylindrical surface.

[0045] Since the second meniscus cylindrical lens 180 is in a strip shape, only one second meniscus cylindrical lens 180 needs to be disposed on the optical path of the M first lasers L1 to compress the M first light spots S1, thereby saving the hardware cost of the laser module 10.

[0046] Referring to FIG. 5, in other possible embodiments, the fast-axis compression assembly 170 can include a positive cylindrical mirror 1720 and a negative cylindrical mirror 1740, which are sequentially disposed on the optical path of the M first lasers L1 emitted via the M collimating lenses 160. Wherein the M first lasers L1 are incident into the positive cylindrical mirror 1720 via the convex cylindrical surface of the positive cylindrical mirror 1720, and are emitted via the concave cylindrical surface of the negative cylindrical mirror 1740 after propagating to the negative cylindrical mirror 1740. That is, the convex cylindrical surface of the positive cylindrical mirror 1720 is disposed toward the M collimating lenses 160, and the concave cylindrical surface of the negative cylindrical mirror 1740 is disposed toward the guide module 30.

[0047] Specifically, the positive cylindrical mirror 1720 can be a cylindrical lens with a positive optical power, and the negative cylindrical mirror 1740 can be a cylindrical lens with a negative optical power, the positive cylindrical mirror 1720 and the negative cylindrical mirror 1740 are respectively in a strip shape, and the extension directions of the positive cylindrical mirror 1720 and the negative cylindrical mirror 1740 are respectively parallel to the slow-axis direction X1 of the first light spots S1, and the embodiment does not limit the specific structure of the positive cylindrical mirror 1720 and the negative cylindrical mirror 1740.

[0048] It can be found that the positive cylindrical lens 1720 and the negative cylindrical lens 1740 in the embodiment shown in FIG. 5 can replace the second meniscus cylindrical lens 180 in the embodiment shown in FIG. 3, thereby reducing the processing difficulty and hardware cost of the fast-axis compression assembly 170. Of course, the second meniscus cylindrical lens 180 in the embodiment shown in FIG. 3 can also replace the positive cylindrical lens 1720 and the negative cylindrical lens 1740 in the embodiment shown in FIG. 5, so that the fast-axis compression assembly 170 only needs to be provided with one optical device, thereby reducing the debugging difficulty of the optical path, and also making the overall optical path structure of the laser module 10 more compact, so as to realize the miniaturization design of the light source device 100.

[0049] Please refer to FIG. 6 and FIG. 7, in some other possible embodiments, the laser module 10 can include a substrate 120 and 2*M second laser chips 130 encapsulated on the substrate 120. Specifically, the substrate 120 can be a substrate dedicated to laser chips, and the second laser chips 130 can be edge-emitting laser chips (EEL). In some possible embodiments, the 2*M second laser chips 130 can be encapsulated on the substrate 120 by using the SMD process or the TO process, so as to improve the integration of the laser module 10 and facilitate the installation and optical path debugging of the laser module 10.

[0050] In the embodiment shown in FIG. 6, the 2*M second laser chips 130 are divided into two rows, and the two rows of second laser chips 130 are arranged on the substrate 120 along the fast-axis direction Y1 of the first light spot S1. The number of second laser chips 130 in each row is M, and the M second laser chips 130 are arranged on the substrate 120 along the slow-axis direction X1 of the first light spot S1 in sequence, and each second laser chip 130 is used to generate a fifth laser L5. Specifically, in the embodiment shown in FIG. 6, M is equal to four, and the eight second laser chips are arranged in two rows and four columns, that is, the eight first laser chips 140 are arranged in a 2*4 array.

[0051] In the embodiment shown in FIG. 6, the laser module 10 can further include 2*M collimating lenses 160, which are arranged on the optical path of the 2*M fifth lasers L5 in one-to-one correspondence, and are used to collimate the fifth lasers L5, so that the fifth lasers L5 are emitted in the form of parallel light. Specifically, the 2*M collimating lenses 160 can be arranged on the surface of the substrate 120. For example, the 2*M collimating lenses 160 can be attached to the surface of the substrate 120, or embedded in the surface of the substrate 120, so as to improve the overall integration of the laser module 10, and also make the 2*M fifth lasers L5 be emitted from the laser module 10 in the form of parallel light.

[0052] Referring to FIG. 7, the polarization light combination assembly 150 is arranged on the light path of the 2*M fifth lasers L5, and is used to perform polarization light combination on the two fifth lasers L5 generated by each column of the second laser chips 130, respectively, to generate M first lasers L1. That is, the polarization light combination assembly 150 is used to perform polarization light combination on the 2*M fifth lasers L5 to generate M first lasers L1, and the two fifth lasers L5 in each column are combined into one first laser L1. The light path structure of combining two fifth lasers L5 into one first laser L1 in the embodiment can improve the optical power density of the first laser L1, so as to improve the processing efficiency of the laser processing equipment.

[0053] As an implementation manner, the two fifth lasers L5 in each column can be light rays of the same linear polarization state (for example, P light). The polarization light combination assembly 150 can include a half-to-one wave plate 1510, a polarization light combination plate 1530, and a reflecting plate 1550, wherein the half-to-one wave plate 1510 is arranged on the light path of one of the fifth lasers L5, and is used to convert the linear polarization state of the fifth laser L5, for example, to convert P light into S light. At this time, the two fifth lasers L5 become one P light and the other S light. The reflecting plate 1550 is used to reflect one of the light rays, for example, the reflecting plate 1550 is arranged on the light path of the S light, and is used to reflect the S light towards the side of the P light. The polarization light combination plate 1530 is arranged on the light paths of the P light and the reflected S light, and is used to reflect the P light and transmit the S light to combine into one first laser L1; or the polarization light combination plate 1530 can also be used to transmit the P light and reflect the S light to combine into one first laser L1.

[0054] Specifically, the researchers can adjust the specific implementation manner of the polarization light combination assembly 150 according to the actual application scene of the light source device 100, for example, the researchers can adjust the specific placement positions of the polarization light combination plate 1530 and the reflecting plate 1550 and adjust the transmission and reflection characteristics of the polarization light combination plate 1530 according to the emission direction and emission position of the first laser L1, and the like. The specific implementation manner of the polarization light combination assembly 150 is not limited in the embodiment.

[0055] In the embodiment shown in FIG. 7, the laser module 10 can further include a second meniscus cylindrical lens 180 disposed on the optical path of the M-path first laser L1 out of the polarization light combination assembly 150, the extension direction of the second meniscus cylindrical lens 180 being parallel to the slow axis direction X1 of the first light spot S1. Specifically, the second meniscus cylindrical lens 180 has a second concave surface 1810 and a second convex surface 1830 facing away from each other, the first laser L1 being incident via the second convex surface 1830 and being emitted via the second concave surface 1810. That is, the second convex surface 1830 is disposed towards the polarization light combination assembly 150, and the second concave surface 1810 is disposed towards the guide module 30. The second meniscus cylindrical lens 180 can be used to reduce the length of the first light spot S1 in the fast axis direction Y1 of the first light spot S1, so as to reduce the hardware size of the subsequent correction module 50 and the converging module 70, and reduce the hardware cost of the light source device 100.

[0056] Of course, in some other possible embodiments, the second meniscus cylindrical lens 180 in FIG. 7 can be replaced by the positive cylindrical mirror 1720 and the negative cylindrical mirror 1740 in the embodiment shown in FIG. 5, which are sequentially disposed on the optical path of the M-path first laser L1 out of the polarization light combination assembly 150.

[0057] In the present embodiment, the guide module 30 is disposed on the optical path of the M-path first laser L1, and is used to guide the M-path first laser L1 to generate the M-path second laser L2. Referring again to FIG. 1, the guide module 30 can include a guide unit 320 and a reflection unit 340, the guide unit 320 being disposed on the optical path of the M-path first laser L1 and being used to translate the M-path first laser L1 along the fast axis direction Y1 of the first light spot S1 to generate the M-path third laser L3. Wherein, the projections of the M third light spots S3 along the slow axis direction X1 of the first light spot S1 do not coincide with each other.

[0058] It is not difficult to understand here that "translating the first laser L1" means translating the optical axis of the first laser L1, therefore, the third laser L3 emitted after translation is parallel to the first laser L1, and the shape and area of the first light spot S1 and the third light spot S3 are substantially the same. In addition, since the M first light spots S1 are sequentially and spaced arranged along the slow axis direction X1 of the first light spot S1, the projections of the M third light spots S3 obtained by translating the M first light spots S1 along the fast axis direction Y1 of the first light spot S1 do not coincide with each other. That is, the projections of the M third light spots S3 along the slow axis direction X1 and the fast axis direction Y1 in the present application do not coincide with each other.

[0059] Please refer to FIG. 8, which is a schematic diagram of the arrangement of the first light spot S1, the second light spot S2 and the third light spot S3 in the light source device 100 corresponding to FIG. 1. In FIG. 8, M is equal to 4, and (a) of FIG. 8 is a schematic diagram of the arrangement of the first light spot S1; (b) of FIG. 8 is a schematic diagram of the arrangement of the third light spot S3; (c) of FIG. 8 is a schematic diagram of the arrangement of the second light spot S2; and (d) of FIG. 8 is a schematic diagram of the arrangement of the second light spot S2 after being expanded by the correction module 50. As can be seen from FIG. 8, the guiding module 30 in the embodiment shown in FIG. 1 is used to translate the M first light spots S1 in the fast axis direction Y1 of the first light spot S1, so that the M third light spots S3 are arranged at intervals in both the slow axis direction X1 and the fast axis direction Y1 of the first light spot S1.

[0060] In some possible embodiments, the M first light spots S1 shown in (a) of FIG. 8 can be light spots compressed by the fast axis compression assembly 170, i.e., corresponding to (a2) of FIG. 4. Since the fast axis compression assembly 170 reduces the length of the first light spot S1 in the fast axis direction Y1 of the first light spot S1, the translation distance of the first light spot S1 in the fast axis direction Y1 of the first light spot S1 under the action of the guiding module 30 can be shortened, and the hardware implementation difficulty of the guiding module 30 is further reduced, and the hardware cost of the guiding module 30 is reduced.

[0061] Please refer to FIG. 9. In some possible embodiments, the guiding unit 320 can include M-1 plate light-transmitting members 3210, which are arranged one by one on the optical paths of the M-1 first lasers L1, i.e., there is one first laser L1 without a plate light-transmitting member 3210 arranged thereon, and the first laser L1 does not undergo translation, thereby saving the hardware cost of the guiding unit 320. Specifically, the plate light-transmitting member 3210 is used to translate the corresponding first laser L1 in the fast axis direction Y1 of the first light spot S1 to generate a corresponding third laser L3. The first laser L1 without a plate light-transmitting member 3210 arranged thereon can be directly regarded as a third laser L3. Of course, the number of plate light-transmitting members 3210 can also be M, and the M plate light-transmitting members 3210 are arranged one by one on the optical paths of the M first lasers L1.

[0062] In the embodiment shown in FIG. 9, the included angle between the light-incident surface 3212 of the plate light-transmitting member 3210 and the specified plane P is a specified included angle A1, at least part of the specified included angles A1 are different from each other, and the specified included angle A1 is not 0. Here, the specified plane P is parallel to the fast-axis direction Y1 of the first light spot S1 and parallel to the slow-axis direction X1 of the first light spot S1. Since at least part of the specified included angles A1 are different from each other, that is, the inclination degrees of at least part of the plate light-transmitting members 3210 relative to the specified plane P are different from each other in this embodiment, the offset amounts of the plate light-transmitting members 3210 to the first laser light L1 in the fast-axis direction Y1 are different from each other.

[0063] Here, "at least part of the specified included angles A1 are different from each other" can mean that the M-1 specified included angles A1 corresponding to the M-1 plate light-transmitting members 3210 are all different from each other. Alternatively, the specified included angles A1 corresponding to part of the M-1 plate light-transmitting members 3210 can be different from each other, and the specified included angles A1 corresponding to the other part of the M-1 plate light-transmitting members 3210 can be the same. Specifically, among the M-1 plate light-transmitting members 3210, there can be two plate light-transmitting members 3210 arranged in an axial symmetry, and in this case, the specified included angles A1 corresponding to the two plate light-transmitting members 3210 are the same, but one of the two plate light-transmitting members 3210 is used to offset the corresponding first laser light L1 in the positive direction of the fast-axis direction Y1, and the other plate light-transmitting member 3210 is used to offset the corresponding first laser light L1 in the negative direction of the fast-axis direction Y1. Specifically, the M-1 plate light-transmitting members 3210 can be M-1 plate glasses of the same size, and the intersection line formed by the light-incident surface 3212 of each plate light-transmitting member 3210 and the specified plane P is parallel to the slow-axis direction X1.

[0064] Referring to FIG. 10, in some other possible embodiments, the guide unit 320 can include M-1 rhombic prisms 3230, and the M-1 rhombic prisms 3230 are arranged one-to-one on the optical paths of the M-1 first laser lights L1, that is, there is one first laser light L1 without a rhombic prism 3230 arranged thereon, and this first laser light L1 does not undergo translation, thereby saving the hardware cost of the guide unit 320. Specifically, the rhombic prism 3230 is used to translate the corresponding first laser light L1 in the fast-axis direction Y1 of the first light spot S1 to generate a corresponding third laser light L3. The first laser light L1 without a rhombic prism 3230 arranged thereon can be directly regarded as the third laser light L3. Of course, the number of the rhombic prisms 3230 can also be M, and the M rhombic prisms 3230 are arranged one-to-one on the optical paths of the M first laser lights L1.

[0065] In the embodiment shown in FIG. 10, the rhombic prism 3230 can include a first reflecting surface 3232, an incident surface 3234 and a second reflecting surface 3236 which are adjacently arranged. The incident surface 3234 is perpendicular to the incident direction of the first laser L1, and the first reflecting surface 3232 is parallel to the second reflecting surface 3236. The first laser L1 is incident into the rhombic prism 3230 via the incident surface 3234, and then is emitted after sequentially passing through the first reflecting surface 3232 and the second reflecting surface 3236. Since the distance between the first reflecting surface 3232 and the second reflecting surface 3236 in the fast axis direction Y1 of the first spot S1 is a specified distance D1, at least part of the specified distance D1 is different, so that the rhombic prism 3230 has different amounts of offsetting the first laser L1 in the fast axis direction Y1.

[0066] Here, the "at least part of the specified distance D1 is different" can mean that the M-1 specified distances D1 corresponding to the M-1 rhombic prisms 3230 are all different. Alternatively, the specified distances D1 corresponding to part of the M-1 rhombic prisms 3230 can be different, and the specified distances D1 corresponding to another part of the M-1 rhombic prisms 3230 can be the same. Specifically, among the M-1 rhombic prisms 3230, there can be two rhombic prisms 3230 which are arranged in an axial symmetry, and the specified distances D1 corresponding to the two rhombic prisms 3230 are the same. However, one of the two rhombic prisms 3230 is used to offset the corresponding first laser L1 in the positive direction of the fast axis direction Y1, and the other of the two rhombic prisms 3230 is used to offset the corresponding first laser L1 in the negative direction of the fast axis direction Y1. Specifically, the intersection line between the first reflecting surface 3232 and the incident surface 3234 of each rhombic prism 3230 is parallel to the slow axis direction X1.

[0067] In yet some possible embodiments, the guiding unit 320 can simultaneously include the obliquely arranged flat plate light-transmissive member 3210 and the rhombic prism 3230, and the total number of the flat plate light-transmissive member 3210 and the rhombic prism 3230 is M-1, and the flat plate light-transmissive member 3210 and the rhombic prism 3230 are arranged in one-to-one correspondence on the optical paths of the M-1 first lasers L1. Specifically, the developers can adjust the specific implementation of the guiding unit 320 according to actual needs, and the present embodiment does not limit this.

[0068] Referring again to FIG. 1, the reflecting unit 340 is arranged on the optical path of the M third lasers L3, and is used to reflect the M third lasers L3 to generate the M second lasers L2. Specifically, the reflecting unit 340 can include M reflecting members 3410 which are arranged in one-to-one correspondence on the optical path of the M third lasers L3, and each of the M reflecting members 3410 is used to reflect a corresponding one of the M third lasers L3 to generate a corresponding one of the M second lasers L2. The reflecting member 3410 can be a mirror, or a glass plate with a total reflection film attached thereto.

[0069] Specifically, the distance H between the M reflective elements 3410 and the specified plane P is equal. The specified plane P is parallel to the fast axis direction Y1 of the first spot S1 and parallel to the slow axis direction X1 of the first spot S1. The "distance H" here can be the distance between the geometric center of the spot at the reflective element 3410 and the specified plane P. Since the spot is approximately elliptical, the geometric center can be the center of the ellipse. Therefore, the M third lasers L3 in the embodiment can be reflected by the reflection unit 340 at the same height, so that the M second lasers L2 generated can be parallel to each other and at the same height, so that the M second spots S2 formed subsequently can be arranged in a "one" shape along the fast axis direction Y2 of the second spot S2.

[0070] Referring to FIG. 11, in other possible embodiments, the laser module 10 is also configured to generate N fourth lasers L4, N being a positive integer greater than or equal to 1 (for example, N equals 1, 2, 3, etc.). As an implementation, the laser module 10 can further include N third laser chips (not shown in the figure), each of which is configured to generate a corresponding fourth laser L4.

[0071] In the embodiment, the N fourth spots S4 corresponding to the N fourth lasers L4 and the M first spots S1 are arranged in sequence along the slow axis direction X1 of the first spot S1. Specifically, the N fourth spots S4 and the M first spots S1 can be arranged alternately. That is, the N third laser chips and the M first laser chips 140 are arranged alternately along the slow axis direction X1 of the first spot S1 on the substrate 120. In the embodiment shown in FIG. 11, M equals N equals 2.

[0072] It should be noted here that the first laser chip 140 and the third laser chip are only named for subsequent convenience in introducing the optical path. In the actual laser module 10, the first laser chip 140 and the third laser chip can be the same laser chip. Similarly, the first laser L1 and the fourth laser L4 can be two laser beams with the same properties. For example, in the embodiment shown in FIG. 2, two of the first laser chips 140 can be regarded as third laser chips.

[0073] In the embodiment, the M first lasers L1 include first sub-lasers L11, and the N fourth lasers L4 include second sub-lasers L12. The polarization state of the first sub-laser L11 and the second sub-laser L12 is a first linear polarization state, which can be a P polarization state or an S polarization state. Specifically, the guide unit 320 can include a guide 3201, and the reflection unit 340 can include a reflective element 3410.

[0074] The guide 3201 is disposed on the optical path of the first sub-laser L11 and the second sub-laser L12, and is used for translating the first sub-laser L11 along the fast-axis direction Y1 of the first spot S1 to generate a third sub-laser L41, and translating the second sub-laser L12 along the fast-axis direction Y1 of the first spot S1 to generate a fourth sub-laser L42. The projections of the two sub-spots S5 (S51 and S52 in FIG. 13) corresponding to the third sub-laser L41 and the fourth sub-laser L42 along the slow-axis direction X1 of the first spot S1 coincide with each other. The "third sub-laser L41" here can correspond to the third laser L3 in FIG. 1.

[0075] Specifically, the guide 3201 can be a tilted plate light-transmitting member 3210 as shown in FIG. 9, which is disposed on the optical path of the first sub-laser L11 and the second sub-laser L12. The guide 3201 can be a rhomboid prism 3230 as shown in FIG. 10, which is disposed on the optical path of the first sub-laser L11 and the second sub-laser L12. Specifically, the descriptions about the tilted plate light-transmitting member 3210 and the rhomboid prism 3230 can be referred to the descriptions in the above embodiments, which will not be repeated here. Since the guide 3201 is disposed on the optical path of the first sub-laser L11 and the second sub-laser L12, it can translate the two spots corresponding to the first sub-laser L11 and the second sub-laser L12 by the same distance along the fast-axis direction Y1 of the first spot S1 to form two sub-spots S5. The reflector 3410 is disposed on the optical path of the third sub-laser L41, and is used for reflecting the third sub-laser L41 towards the side of the fourth sub-laser L42. Specifically, the descriptions about the reflector 3410 can be referred to the descriptions in the above embodiments, which will not be repeated here.

[0076] In the embodiment shown in FIG. 11, the guide module 30 can further include a light-combining assembly 360, which is disposed on the optical path of the fourth sub-laser L42 and the third sub-laser L41 reflected by the reflector 3410, and is used for combining the third sub-laser L41 and the fourth sub-laser L42 to generate one second laser L2. The light path structure of combining one third sub-laser L41 and one fourth sub-laser L42 to generate one second laser L2 in the embodiment can improve the optical power density of the second laser L2, so as to improve the processing efficiency of the laser processing device.

[0077] In some possible embodiments, the light combining component 360 can include a half-wave plate 3610 and a polarization light combining piece 3650. As shown in FIG. 11, the half-wave plate 3610 can be disposed on an optical path of the third sub-laser L41, and the half-wave plate 3610 is configured to convert a polarization state of the third sub-laser L41 into a second linear polarization state, which is orthogonal to a first linear polarization state. Specifically, in a case where the first linear polarization state is a P polarization state, the second linear polarization state can be an S polarization state; in a case where the first linear polarization state is an S polarization state, the second linear polarization state can be a P polarization state.

[0078] As an implementation, the half-wave plate 3610 can be disposed on an optical path of the third sub-laser L41 between the guide 3201 and the reflector 3410. As another implementation, the half-wave plate 3610 can also be disposed on an optical path of the third sub-laser L41 reflected by the reflector 3410.

[0079] The polarization light combining piece 3650 is disposed on an optical path of the fourth sub-laser L42 and the third sub-laser L41 reflected by the reflector 3630, and is configured to reflect light rays of the first linear polarization state and transmit light rays of the second linear polarization state, so as to achieve polarization light combination of the third sub-laser L41 and the fourth sub-laser L42, and form one second laser L2. Specifically, the polarization light combining piece 3650 can be a polarization light combining piece of trans-P and reflect-S, or a polarization light combining piece of trans-S and reflect-P. In the embodiment shown in FIG. 11, in a case where the polarization states of the first sub-laser L11 and the second sub-laser L12 are both P polarization states, the polarization light combining piece 3650 is a polarization light combining piece of trans-S and reflect-P; conversely, in a case where the polarization states of the first sub-laser L11 and the second sub-laser L12 are both S polarization states, the polarization light combining piece 3650 is a polarization light combining piece of trans-P and reflect-S.

[0080] Referring to FIG. 12, in some possible embodiments, the light combination assembly 360 can include a half-wave plate 3610 and a polarization light combination piece 3650. The half-wave plate 3610 is arranged on an optical path of the fourth sub-laser L42, and is configured to convert a polarization state of the fourth sub-laser L42 into a second linear polarization state, which is orthogonal to a first linear polarization state. The polarization light combination piece 3650 is arranged on an optical path of the fourth sub-laser L42 and the third sub-laser L41 reflected by the reflector 3630, and is configured to reflect light in the second linear polarization state and transmit light in the first linear polarization state, so as to realize polarization light combination of the third sub-laser L41 and the fourth sub-laser L42, and form one second laser L2. In the embodiment shown in FIG. 12, when the polarization states of the first sub-laser L11 and the second sub-laser L12 are both P polarization states, the polarization light combination piece 3650 is a polarization light combination piece with P transmission and S reflection; conversely, when the polarization states of the first sub-laser L11 and the second sub-laser L12 are both S polarization states, the polarization light combination piece 3650 is a polarization light combination piece with S transmission and P reflection.

[0081] In some possible embodiments, M can be equal to N, and the M first lasers L1 and the N fourth lasers L4 are divided into M first laser groups, and each first laser group includes one first sub-laser L11 and one second sub-laser L12. Specifically, in FIG. 11, M is 2, and the number of first laser groups is two.

[0082] The number of the guides 3201 can be M-1, and the M-1 guides 3401 are arranged one by one on optical paths of M-1 first laser groups, and are configured to generate M-1 second laser groups, each of which includes one third sub-laser L41 and one fourth sub-laser L42. That is, there is one first laser group without the guide 3201, and the two lasers in the first laser group do not undergo translation, thereby saving the hardware cost of the guide unit 320. The first laser group without the guide 3201 can be directly regarded as a second laser group. Of course, the number of the guides 3201 can be M, and the M guides 3401 are arranged one by one on optical paths of M first laser groups.

[0083] Specifically, projections of M-1 sub-light spots S51 corresponding to the M-1 third sub-lasers L41 along a slow-axis direction X1 of the first light spot S1 do not coincide, and projections of M-1 sub-light spots S52 corresponding to the M-1 fourth sub-lasers L42 along the slow-axis direction X1 of the first light spot S1 do not coincide.

[0084] Referring to FIG. 13, FIG. 13 is a schematic diagram of the arrangement of the first light spot S1, the second light spot S2, the fourth light spot S4 and the sub light spot S5 (including S51 and S52) in the light source device 100 corresponding to FIG. 11. In the embodiment, M and N are equal to 2, and (a) of FIG. 11 is a schematic diagram of the arrangement of the first light spot S1 and the fourth light spot S4; (b) is a schematic diagram of the arrangement of the sub light spot S5; (c) is a schematic diagram of the arrangement of the second light spot S2; and (d) is a schematic diagram of the arrangement of the second light spot S2 after being expanded by the correction module 50. It can be found that, in the embodiment shown in FIG. 11, the guide module 30 transforms M first light spots S1 and N fourth light spots S4 into M second light spots S2. Compared with the embodiment shown in FIG. 1, the total length of the M second light spots S2 in the long axis direction is reduced to half of that in FIG. 1, so as to reduce the hardware size of the subsequent correction module 50 and the convergence module 70, and reduce the hardware cost of the light source device 100.

[0085] In the embodiment shown in FIG. 11, the number of the light combination assemblies 360 is M, and the M light combination assemblies 360 are arranged one by one on the light path where the fourth sub laser L42 and the third sub laser L41 reflected by the reflecting element 3410 are located, and are used for combining the third sub laser L41 and the fourth sub laser L42 to generate M second lasers L2.

[0086] In some possible embodiments, M can be equal to 2, and N can be equal to 1. In this case, one of the first lasers L1 can be regarded as the first sub laser L11, one of the fourth lasers L4 can be regarded as the second sub laser L12, and the remaining first laser L1 can be directly reflected to generate two second light spots S2.

[0087] In the embodiment, the correction module 50 is arranged on the light path where the M second lasers L2 are located, and is used for expanding the length of the second light spot S2 in the slow axis direction X2 of the second light spot S2. Referring to FIG. 14, the correction module 50 can include a negative cylindrical lens 520 and a positive cylindrical lens 540, and the negative cylindrical lens 520 and the positive cylindrical lens 540 are arranged in sequence on the light path where the M second lasers L2 are located. The extension direction of the negative cylindrical lens 520 is parallel to the fast axis direction Y2 of the second light spot S2, and the negative cylindrical lens 520 is used for expanding the length of the second light spot S2 in the slow axis direction X2 of the second light spot S2. The positive cylindrical lens 540 is used for collimating the second laser L2 in the slow axis direction X2 of the second light spot S2, so as to reduce the diffusion angle of the second laser L2 in the slow axis direction X2.

[0088] Please refer to FIG. 15, the correction module 50 can include a first meniscus cylindrical lens 560, the extension direction of the first meniscus cylindrical lens 560 is parallel to the fast axis direction Y2 of the second light spot S2. The first meniscus cylindrical lens 560 has a first concave surface 5610 and a first convex surface 5630 opposite to each other, the M-way second laser L2 is incident via the first concave surface 5610 and is emitted via the first convex surface 5630. That is, the first concave surface 5610 is arranged towards the guiding module 30, and the first convex surface is arranged towards the converging module 70. The first meniscus cylindrical lens 560 in the embodiment can not only expand the length of the second light spot S2 in the slow axis direction X2 of the second light spot S2, but also can collimate the second laser L2 in the slow axis direction X2 of the second light spot S2. Therefore, the first meniscus cylindrical lens 560 can be equivalent to the negative cylindrical lens 520 and the positive cylindrical lens 540 in the embodiment shown in FIG. 14, thereby reducing the debugging difficulty of the optical path and making the overall optical path more compact.

[0089] Specifically, please refer to FIG. 8 and FIG. 13 again, after being corrected via the correction module 50, the length of the second light spot S2 in the slow axis direction X2 of the second light spot S2 is a first length H1, and the total length of the M second light spots S2 in the fast axis direction Y2 of the second light spot S2 is a second length H2. The ratio of the first length H1 to the second length H2 is greater than or equal to 0.95 and less than or equal to 1. That is, the length of the overall light spot corresponding to the M second light spots S2 in the fast axis direction Y2 is approximately equal to the length in the slow axis direction X2, so that the converging light spot formed after the M-way second laser L2 is corrected and then converges via the converging module 70 can be approximately a circular light spot, so as to reduce the energy loss of the specified laser LD when being coupled into the optical fiber.

[0090] In the embodiment, the converging module 70 is arranged on the optical path of the M-way second laser L2 after being corrected via the correction module 50, and is used for converging the M-way second laser L2 after being corrected to generate the specified laser LD. Specifically, the converging module 70 can include one or more converging lenses 720, and the specific implementation of the converging module 70 is not limited in the embodiment.

[0091] The embodiment of the application provides a laser processing equipment 200 configured with the light source device 100, which can be a laser engraver, a laser cutter, etc. Please refer to FIG. 16, the laser processing equipment 200 can include the light source device 100 and an optical fiber 210 in the above, wherein the light source device 100 is used for generating the specified laser LD, and the specific implementation of the light source device 100 can refer to the related description in the above embodiment, which will not be repeated here.

[0092] The optical fiber 210 has a coupling-in end 2120 and a coupling-out end 2140, wherein the coupling-in end 2120 is arranged at the focal point of the converging module 70 in the light source device 100, and the designated laser LD is coupled into the optical fiber 210 via the coupling-in end 2120 and then coupled out via the coupling-out end 2140. The coupling-out end 2140 can be arranged at the light outlet of the laser processing equipment 200 to emit the designated laser LD to the outside. Specifically, the optical fiber 210 can be a quartz optical fiber, a full-plastic optical fiber, or the like, and the present embodiment does not make specific limitations thereto.

[0093] The present embodiment provides a light source device 100 and a laser processing equipment 200 provided with the light source device 100. The light source device 100 can include a laser module 10, a guiding module 30, a correcting module 50, and a converging module 70. The laser module 10 is configured to generate M first lasers L1, and M first spots S1 corresponding to the M first lasers L1 are arranged along a slow axis direction X1 of the first spot S1 in sequence and at intervals. M is a positive integer greater than 1. The guiding module 30 is arranged on an optical path of the M first lasers L1 and is configured to guide the M first lasers L1 to generate M second lasers L2. M second spots S2 corresponding to the M second lasers L2 are arranged along a fast axis direction Y2 of the second spot S2 in sequence and at intervals. M is a positive integer greater than 1. The correcting module 50 is arranged on an optical path of the M second lasers L2 and is configured to correct the M second lasers L2 to expand a length of the second spot S2 in a slow axis direction X2 of the second spot S2. According to the principle of constant etendue, when the length of the second spot S2 in the slow axis direction X2 is expanded after being corrected by the correcting module 50, the divergence angle in the slow axis direction X2 will be reduced.

[0094] The converging module 70 is arranged on an optical path of the M second lasers L2 after being corrected by the correcting module 50 and is configured to converge the M second lasers L2 to generate a designated laser LD. Due to the beam expansion of the correcting module 50 and the convergence of the converging module 70, the converging spot of the designated laser LD formed at the focal point of the converging module 70 has a larger divergence angle and a smaller spot length in the slow axis direction X2 of the second spot S2, so that the overall spot size of the converging spot is reduced, the optical power density of the designated laser LD at the focal point is improved, and the processing efficiency of the laser processing equipment provided with the light source device 100 is improved.

[0095] In this specification, certain terms are used to refer to particular units. As one of ordinary skill in the art will understand, different manufacturers can refer to a certain component by different names and / or different numbering schemes. Reference to a certain term in this specification is not intended to limit the component to which the term refers to particular units, but is intended to cover all components with equivalent functionality. As used in the specification and in the claims, the phrase "comprises" and variations thereof, such as "comprising" and "comprises," means "including but not limited to," and is intended to cover a non-exclusive inclusion. "Consisting essentially of" means including the elements listed after the term, and any other elements that do not materially affect the basic and novel characteristics of the composition or method. "Consisting of" means including the elements listed after the term, and no other elements.

[0096] In the description of the present application, the terms "upper", "lower", "front", "rear", "left", "right", "inner", and "outer" indicate the orientation or positional relationship shown in the drawings, and are used only to facilitate the description of the present application to simplify the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0097] In the present application, unless specifically defined or limited otherwise, the terms "mounting", "connected", "connection", "fixed", and the like should be interpreted broadly. For example, it can be fixed connection, or detachable connection, or integral connection; it can be mechanical connection, or electrical connection; it can be direct connection, or indirect connection through an intermediate medium, or internal communication of two elements, or it can be only surface contact. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0098] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms is not necessarily for the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine the different embodiments or examples described in the present specification and the features of the different embodiments or examples without contradiction.

[0099] In addition, the terms "first", "second", etc. are used only for the purpose of description, and should not be understood as indicating or implying relative importance or implying the number of the technical features indicated. Therefore, the features defined as "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0100] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and are not limited thereto; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art will understand that the technical solutions described in the foregoing embodiments can still be modified, or some technical features can be replaced by equivalents; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A light source apparatus, characterized by comprising: The application relates to a laser module. The laser module comprises: a laser module for generating M first lasers; M first light spots corresponding to the M first lasers are arranged along a slow axis direction of the first light spots in sequence and at intervals; a guiding module arranged on an optical path of the M first lasers, for guiding the M first lasers to generate M second lasers; M second light spots corresponding to the M second lasers are arranged along a fast axis direction of the second light spots in sequence and at intervals, and M is a positive integer greater than 1; a correction module arranged on an optical path of the M second lasers, for correcting the M second lasers to expand the length of the second light spots in the slow axis direction of the second light spots; and 2. The light source apparatus according to claim 1, wherein a converging module arranged on an optical path of the M second lasers after correction by the correction module, for converging the M second lasers after correction to generate specified lasers. The guiding module comprises a guiding unit and a reflecting unit, the guiding unit is arranged on the optical path of the M first lasers, for translating the M first lasers along the fast axis direction of the first light spots to generate M third lasers; the projections of the M third light spots along the slow axis direction of the first light spots do not coincide with each other; 3. The light source apparatus according to claim 2, wherein the reflecting unit is arranged on an optical path of the M third lasers, for reflecting the M third lasers to generate the M second lasers. The reflecting unit comprises M reflecting elements, the M reflecting elements are arranged on the optical path of the M third lasers one by one, for reflecting the corresponding third lasers respectively; 4. The light source apparatus according to claim 2, wherein the distances between the M reflecting elements and a specified plane are equal, the specified plane is parallel to the fast axis direction of the first light spots and parallel to the slow axis direction of the first light spots. The guiding unit comprises M-1 flat light-transmitting elements, the M-1 flat light-transmitting elements are arranged on the optical path of M-1 first lasers one by one; 5. The light source apparatus according to claim 2, wherein the included angle between the light-incident surface of the flat light-transmitting element and a specified plane is a specified included angle, at least part of the specified included angles are different from each other, and the specified included angle is not 0; the specified plane is parallel to the fast axis direction of the first light spots and parallel to the slow axis direction of the first light spots. The guiding unit comprises M-1 rhombic prisms, the M-1 rhombic prisms are arranged on the optical path of M-1 first lasers one by one; 6. The light source apparatus according to claim 2, wherein the rhombic prism comprises a first reflecting surface, an incident surface and a second reflecting surface which are adjacent to each other, the incident surface is perpendicular to the incident direction of the first laser; the distance between the first reflecting surface and the second reflecting surface in the fast axis direction of the first light spots is a specified distance, and at least part of the specified distances are different from each other. The laser module is also used for generating N fourth lasers; N fourth light spots corresponding to the N fourth lasers are arranged along the slow axis direction of the first light spots in sequence and at intervals with the M first light spots; wherein, the M first lasers comprise first sub-lasers, the N fourth lasers comprise second sub-lasers, and N is a positive integer greater than or equal to 1. The guiding unit comprises a guide provided on an optical path of the first sub-laser and the second sub-laser, for translating the first sub-laser along a fast-axis direction of the first spot to generate a third sub-laser, and translating the second sub-laser along the fast-axis direction of the first spot to generate a fourth sub-laser; projections of two sub-spots corresponding to the third sub-laser and the fourth sub-laser along a slow-axis direction of the first spot coincide with each other; The reflecting unit comprises a reflecting element provided on an optical path of the third sub-laser, for reflecting the third sub-laser towards a side of the fourth sub-laser; The guiding module further comprises a light combining assembly provided on an optical path of the fourth sub-laser and the third sub-laser reflected by the reflecting element, for combining the third sub-laser and the fourth sub-laser to generate one of the second lasers.

7. The light source apparatus according to claim 6, wherein The polarization states of the first sub-laser and the second sub-laser are both first linear polarization states, and the light combining assembly comprises a half-wave plate and a polarization combining element; The half-wave plate is provided on an optical path of the third sub-laser, and is configured to convert the polarization state of the third sub-laser into a second linear polarization state orthogonal to the first linear polarization state; the polarization combining element is provided on an optical path of the fourth sub-laser and the third sub-laser reflected by the reflecting element, and is configured to reflect light rays of the first linear polarization state and transmit light rays of the second linear polarization state; or The half-wave plate is provided on an optical path of the fourth sub-laser, and is configured to convert the polarization state of the fourth sub-laser into a second linear polarization state orthogonal to the first linear polarization state; the polarization combining element is provided on an optical path of the fourth sub-laser and the third sub-laser reflected by the reflecting element, and is configured to reflect light rays of the second linear polarization state and transmit light rays of the first linear polarization state.

8. The light source apparatus according to claim 6, wherein The M is equal to the N, and M first lasers and N fourth lasers are divided into M first laser groups, each first laser group comprising one first sub-laser and one second sub-laser; M-1 guides are provided on an optical path of the M-1 first laser groups, for generating M-1 second laser groups, each second laser group comprising one third sub-laser and one fourth sub-laser; wherein projections of M-1 sub-spots corresponding to the M-1 third sub-lasers along a slow-axis direction of the first spot do not coincide with each other, and projections of M-1 sub-spots corresponding to the M-1 fourth sub-lasers along the slow-axis direction of the first spot do not coincide with each other.

9. The light source apparatus according to any one of claims 1 to 8, wherein The correction module comprises a negative cylindrical lens and a positive cylindrical lens, the negative cylindrical lens and the positive cylindrical lens are provided on an optical path of the M second lasers in sequence, the negative cylindrical lens is configured to expand a length of the second spot in a slow-axis direction of the second spot; and the positive cylindrical lens is configured to collimate the second laser in the slow-axis direction of the second spot; or The correction module comprises a first meniscus cylindrical lens having a first concave surface and a first convex surface opposite to each other, and the second laser beams enter via the first concave surface and exit via the first convex surface.

10. The light source apparatus according to any one of claims 1 to 8, wherein After being corrected by the correction module, the length of the second spot in the slow axis direction of the second spot is a first length, and the total length of the M second spots in the fast axis direction of the second spot is a second length. The ratio of the first length to the second length is greater than or equal to 0.95 and less than or equal to 1.

11. The light source apparatus according to any one of claims 1 to 8, wherein The laser module comprises a substrate and M first laser chips. The M first laser chips are sequentially and spacedly arranged on the substrate along the slow axis direction of the first spot, and each first laser chip is configured to generate a first laser beam.

12. The light source apparatus according to claim 11, wherein The laser module further comprises M collimating lenses, which are arranged on the optical path of the M first laser beams one by one, and are configured to collimate the first laser beams.

13. The light source apparatus of claim 12, wherein The laser module further comprises a second meniscus cylindrical lens arranged on the optical path of the M first laser beams emitted via the M collimating lenses. The second meniscus cylindrical lens has a second concave surface and a second convex surface opposite to each other, and the first laser beams enter via the second convex surface and exit via the second concave surface, so as to reduce the length of the first spot in the fast axis direction of the first spot.

14. The light source apparatus according to any one of claims 1 to 8, wherein The laser module comprises a substrate, 2*M second laser chips and a polarization light combination assembly; each second laser chip is configured to generate a fifth laser beam. The 2*M second laser chips are divided into two rows, and the two rows of second laser chips are spacedly arranged on the substrate along the fast axis direction of the first spot; the number of second laser chips in each row is M, and the M second laser chips are sequentially and spacedly arranged on the substrate along the slow axis direction of the first spot. The 2*M second laser chips are divided into M columns, and the polarization light combination assembly is arranged on the optical path of the 2*M fifth laser beams, and is configured to polarize and combine two fifth laser beams generated by each column of second laser chips to generate M first laser beams.

15. A laser processing apparatus characterized by comprising: The light source device as claimed in any one of claims 1 to 14, wherein the light source device is configured to generate a specified laser beam; and An optical fiber having an input end and an output end, wherein the input end is arranged at the focal point of the converging module, and the specified laser beam is coupled into the optical fiber via the input end and then coupled out via the output end. ​ ​

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