Ion guide device and mass spectrometer

Abstract

A technical solution of the present disclosure provides an ion guide device including a first electrode group and a second electrode group. On a cross section perpendicular to an ion optical axis, n first planar electrodes of the first electrode group and n second planar electrodes of the second electrode group are arranged alternately with one another in a circular shape, Each of the first planar electrodes and each of the second planar electrodes are applied with different direct current potentials, in an extension direction of the ion optical axis, respective cross-sectional sizes or distances from the ion optical axis of the first planar electrode and the second planar electrode are changed in opposite ways so as to form a direct current potential gradient in the extension direction of the ion optical axis. In particular, at least one side surface of the first planar electrode and / or the second planar electrode, which is different from an end surface in a length direction, is a positioning plane, and the positioning plane is used for determining a position where the first planar electrode and / or the second planar electrode are made or assembled.

Description

ION GUIDE DEVICE AND MASS SPECTROMETER

[0001] The present disclosure relates to a technical field of mass analysis, in particular to an ion guide device and a mass spectrometer.

[0002] With the development of mass spectrometry analysis technology, the prior art proposes a tandem mass spectrometry technology, which can combine various advantages such as high-speed analysis, high sensitivity, high resolution, and high accuracy, and has higher sensitivity and qualitative and quantitative analysis capabilities. The collision cell is a core component of the tandem mass spectrometer, the parent ion generates fragment ions after a collision reaction in the collision cell, and information of the fragment ions can be obtained after mass analysis to infer structural information of the parent ion and to perform qualitative and quantitative analysis of the ions.

[0003] With the research on the collision cell in the prior art, since a gas pressure in a collision reaction cell is high (generally mtorr level) and the ions lose kinetic energy of flying forward in a large number of collisions, it takes a long time to completely pass through, and some ions will even stay in the collision reaction cell for a long time. If the above problem occurs, ions from a previous analysis will interfere with a next analysis, resulting in interference, which also limits the number of MS / MS channels that can be performed per second by the tandem mass spectrometer to some extent.

[0004] In addition to the collision reaction cell, other fragmentation or dissociation units, such as electron correlated dissociation (electron capture dissociation ECD, electron transfer dissociation ETD, electron activated dissociation EAD, etc.), reaction activated correlated dissociation (hydrogen activated dissociation HAD, oxygen activated dissociation OAD, ozone induced dissociation OzID, etc.), need to introduce neutral or charged particles into the reaction cell to react with parent ions, and transport the product ions to the next stage in time for mass analysis. In these cases, it is also necessary to prevent ions from staying in the reaction cell for a long time. Preferably, the residence time of the parent ion can be flexibly controlled to control and optimize the extent of the reaction.

[0005] The most direct and effective method to solve the above problems is to introduce an axial electric field in the collision cell or reaction cell to drive and control ions, in which the axial electric field is usually a direct current field generated by a fixed direct current gradient, but may also be a traveling wave electric field generated by a variable direct current field, or even a radio frequency field generated by a radio frequency gradient, etc. For example, Patent US5847386 proposes a linear acceleration (LINAC) technology, which discloses various technical solutions capable of generating an axial field in an ion optical device (such as a collision cell), including technical means such as an inclined electrode rod, a segmented electrode, and an auxiliary electrode.

[0006] Patent US5847386 discloses two structures of ion guide devices, one is that, as shown in FIG. 11 of the patent, an axial DC gradient is generated by adjusting potentials on one pair of rod electrodes of a radio frequency quadrupole and changing its distance from a radial center along an axial direction. A problem with the first type of the ion guide device is that the quadrupole electrode group generates a DC quadrupole field in a radial direction, thus significantly reducing the mass range of the ions that can pass through the quadrupole. The second type of the ion guide device as shown in FIG. 33 of the patent is that a plurality of auxiliary electrodes are applied around the radio frequency quadrupole, a direct current potential different from that of the quadrupole is applied to the auxiliary electrodes, and its distance from the radial center changes along the axial direction, thereby generating an axial direct current gradient. On the one hand, the second type of the ion guide device increases the complexity of the device, and on the other hand, since a position of the auxiliary electrode from the ion optical axis is not linear with the generated axial gradient, the shape of the auxiliary electrode needs to be a curve calculated accurately to generate a uniform axial gradient.

[0007] Patent US6163032 discloses an ion guide device that uses eight truncated conical rod electrodes and generates an axial gradient by cross-arranging the eight electrodes. The truncated conical electrodes of the ion guide device in Patent US6163032 are difficult to be accurately processed, and also difficult to be stably assembled and positioned in the radial direction, so it is difficult to accurately control the axial field distribution.

[0008] In addition, there are many other techniques for generating an axial gradient, for example, in US7067802B2, an axial gradient is generated using a spiral resistance coating on a multipole rod; in US7675031B2, an axial gradient is generated by applying a direct current voltage to a PCB auxiliary electrode with a golden finger structure; in US7868289B2, an axial gradient is generated by changing a field radius of a multipole rod along an axis and using the different penetration degrees of an electric field of an outer sleeve to an internal field; in US9123516B2, an axial gradient is generated by applying different direct currents between segmented electrodes of different lengths to each other; in US10032617B2, an axial gradient is generated by using a semi-transparent structure and using an auxiliary electrode to generate a penetration electric field. These techniques can solve the problem of ion residence in the collision reaction cell, and have been partially applied in the industry. However, most technologies or devices are relatively complex in structure.

[0009] Therefore, an improved technical solution is required to solve at least part of the above problems of the existing ion guide device.

[0010] US5847386US6163032US7067802B2US7675031B2US7868289B2US9123516B2US10032617B2

[0011] In view of the above problems in the prior art, the technical solution of the present disclosure provides an ion guide device and a mass spectrometer, which can solve at least part of the problems of the ion guide device in the prior art.

[0012] One aspect of the present disclosure provides an ion guide device including a first electrode group and a second electrode group. The first electrode group includes n first planar electrodes arranged in a multipole shape, the second electrode group includes n second planar electrodes arranged in a multipole shape, the first electrode group and the second electrode group are coaxially disposed with the same ion optical axis, and length directions of the first planar electrodes and the second planar electrodes are along an extension direction of the ion optical axis, in which on a cross section perpendicular to the ion optical axis, the n first planar electrodes and the n second planar electrodes are arranged alternately with one another in a circular shape. Each of the first planar electrodes and each of the second planar electrodes are applied with different direct current potentials, in the extension direction of the ion optical axis, respective cross-sectional sizes or distances from the ion optical axis of the first planar electrode and the second planar electrode are changed in opposite ways so as to form a direct current potential gradient in the extension direction of the ion optical axis. In particular, at least one side surface of the first planar electrode and / or the second planar electrode, which is different from an end surface in the length direction, is a positioning plane, and the positioning plane is used for determining a position where the first planar electrode and / or the second planar electrode are made or assembled.

[0013] In accordance with this technical solution, first, since the planar electrode can be accurately made into a desired shape by wire cutting or the like, an axial electric field distribution in the ion guide device can be accurately controlled. Second, a surface of the planar electrode is flat, the assembly and positioning of the electrode groups can be completed more conveniently by using the flat side surface of the planar electrode as the positioning plane, and the assembly accuracy is also higher. Finally, the planar electrode group is closer to a shape of an original quadrupole electrode group than that of a truncated conical electrode group, so that a distortion of the radio frequency field in the ion guide device along the axial direction is lower, and a wider ion mass range can be obtained.

[0014] As an optional technical solution, the positioning plane is an inner edge surface close to the ion optical axis, an outer edge surface away from the ion optical axis, or one side surface or two opposite side surfaces between the inner edge surface and the outer edge surface.

[0015] In accordance with this technical solution, by using the flat side surface of the planar electrode for positioning, the assembly position of each electrode can be more accurately positioned, which facilitates the precise application of a specific rated axial direct current electric field and radio frequency field in the ion guide device, thereby reducing the distortion effect on the radio frequency field in the ion guide device.

[0016] As an optional technical solution, each of cross sections of the first planar electrode and the second planar electrode perpendicular to the ion optical axis is rectangular.

[0017] In accordance with this technical solution, the first planar electrode and the second planar electrode with a rectangular cross section are used, and only four side surfaces need to be processed during processing, which can reduce the number of electrode surfaces to be processed, and is more conducive to positioning during assembly of the electrode groups, thereby improving the accuracy of assembly of the electrode groups.

[0018] As an optional technical solution, a distance between an inner edge surface of the first planar electrode and the ion optical axis gradually decreases in the extension direction of the ion optical axis, and a distance between an inner edge surface of the second planar electrode and the ion optical axis gradually increases in the extension direction of the ion optical axis.

[0019] In accordance with this technical solution, since the first planar electrode and the second planar electrode are applied with different direct current potentials, in the extension direction of the ion optical axis, firstly, at a position where the ion optical axis is close to an entrance, the inner edge surface of the second planar electrode is closer to the ion optical axis, and the inner edge surface of the first planar electrode is farther from the ion optical axis, and the direct current potential at this position is mainly determined by the direct current potential of the second planar electrode. At a position in the middle of the ion optical axis, the lengths of the first planar electrode and the second planar electrode from the ion optical axis are equal, and the direct current potential at this position is jointly determined by the direct current potentials of the first planar electrode and the second planar electrode. Further, at a position where the ion optical axis is close to an exit, the inner edge surface of the first planar electrode is closer to the ion optical axis, and the inner edge surface of the second planar electrode is farther from the ion optical axis, and the direct current potential at this position is mainly determined by the direct current potential of the first planar electrode. In the above manner, the ion guide device can form a direct current electric field with gradually changing potential in the extension direction of the ion optical axis, thereby accelerating the ions moving along the ion optical axis.

[0020] As an optional technical solution, the first planar electrode and the second planar electrode are wedge electrodes having varying thickness, the thickness of the first planar electrode gradually decreases in the extension direction of the ion optical axis, and the thickness of the second planar electrode gradually increases in the extension direction of the ion optical axis.

[0021] In accordance with this technical solution, since the first planar electrode and the second planar electrode are applied with different direct current potentials, in the extension direction of the ion optical axis, firstly, at the position where the ion optical axis is close to an entrance, the thickness of the first planar electrode is the largest, and the thickness of the second planar electrode is the smallest, and the direct current potential at this position is mainly determined by the direct current potential of the first planar electrode. At the position in the middle of the ion optical axis, the thicknesses of the first planar electrode and the second planar electrode are equal, and the direct current potential at this position is jointly determined by the direct current potentials of the first planar electrode and the second planar electrode. Further, at the position where the ion optical axis is close to the exit, the thickness of the first planar electrode is the smallest, and the thickness of the second planar electrode is the largest, and the direct current potential at this position is mainly determined by the direct current potential of the second planar electrode. In the above manner, the ion guide device can form a direct current electric field with gradually changing potential in the extension direction of the ion optical axis, thereby accelerating the ions moving along the ion optical axis.

[0022] As an optional technical solution, an inner edge surface and an outer edge surface of each of the first planar electrode and the second planar electrode are both flat surfaces, and the n first planar electrodes and the n second planar electrodes constitute n electrode pairs, and in one of the electrode pairs, the first planar electrode and the second planar electrode are arranged adjacently in such a manner that the inner edge surfaces are coplanar and the outer edge surfaces are coplanar.

[0023] In accordance with this technical solution, on the basis that the thicknesses of the planar electrodes are gradually changed, the first planar electrode and the second planar electrode are arranged in pairs and arranged in a coplanar manner, and each pair of the planar electrodes has one planar electrode with a gradually increasing thickness and one planar electrode with a gradually decreasing thickness, that is, the thickness of each electrode pair can be basically kept unchanged in the extension direction of the ion optical axis, thereby enabling further reducing the distortion of the radio frequency field caused by the thickness variation of the electrode, and improving the ion mass range of the ions that can pass through the ion guide device. Moreover, such a manner that the adjacent electrodes are arranged in pairs and arranged in a coplanar manner can also facilitate positioning during assembly, thereby reducing positioning components required for determining a mounting plane.

[0024] As an optional technical solution, the inner edge surface and the outer edge surface of each of the first planar electrode and the second planar electrode are both flat surfaces, and four first planar electrodes and four second planar electrodes are divided into two groups and disposed on two opposite planes, and each of the planes is provided with two first planar electrodes and two second planar electrodes.

[0025] As an optional technical solution, in the extension direction of the ion optical axis, a total cross-sectional area of the first planar electrode and the second planar electrode constituting one electrode pair does not change.

[0026] In accordance with this technical solution, by making the thickness variation of the first planar electrode and the second planar electrode opposite to each other, the total cross-sectional area of the electrode pair constituted of the first planar electrode and the second planar electrode can be kept unchanged, so that the ion guide device composed of four electrode pairs is similar to the conventional quadrupole electrode group, which minimizes an influence of the shape changes of the electrodes on the radio frequency field in the ion guide device and further improves the ion mass range of the ion guide device.

[0027] As an optional technical solution, one or more of the n first planar electrodes have a cross-sectional size or a distance from the ion optical axis different from those of the other first planar electrodes, or one or more of the n second planar electrodes have a cross-sectional size or a distance from the ion optical axis different from those of the other second planar electrodes so as to drive an ion to move away from the ion optical axis.

[0028] In accordance with this technical solution, by changing the cross-sectional sizes of one or more planar electrodes or the distances from the ion optical axis, a direct current field deviating from the ion optical axis can be formed, thereby driving the ions to move away from the ion optical axis, and realizing off-axis guidance of the ions.

[0029] As an optional technical solution, a direct current potential of at least one of the second planar electrodes is made lower than those of the other second planar electrodes, or a direct current potential of at least one of the first planar electrodes is made higher than those of the other first planar electrodes so as to drive an ion to move away from the ion optical axis.

[0030] In accordance with this technical solution, by changing the direct current potentials of one or more planar electrodes, a direct current field offset from the ion optical axis can be formed, thereby driving the ions to move away from the ion optical axis, and realizing off-axis guidance of the ions.

[0031] As an optional technical solution, an inner edge surface of the first planar electrode and / or the second planar electrode is a curved surface.

[0032] In accordance with this technical solution, the length of the inner edge surface of the first planar electrode and / or the second planar electrode from the ion optical axis can be better controlled, the influence of an edge effect of the inner edge surface on the direct current electric field at the ion optical axis can be reduced, and the accuracy of the direct current electric field at the ion optical axis can be further improved.

[0033] As an optional technical solution, the first planar electrode and the second planar electrode are planar electrodes having the same shape and size.

[0034] In accordance with this technical solution, using the planar electrodes having the same shape and size makes it easier to batch processing and accurate assembly of the electrode groups. In some embodiments, the first planar electrode can be used as the second planar electrode as long as ends of the first planar electrode are interchanged, and therefore the ion guide device can be assembled and formed only by manufacturing the same planar electrode, thereby reducing the manufacturing cost.

[0035] As an optional technical solution, n >= 4.

[0036] As an optional technical solution, n = 4.

[0037] As an optional technical solution, the ion guide device further comprises a mounting plate, in which the first planar electrode and / or the second planar electrode are assembled on the mounting plate using the positioning plane, or the positioning plane is determined based on a surface of the mounting plate to print and form the first planar electrode and / or the second planar electrode.

[0038] In accordance with this technical solution, the mounting position of the electrode group can be more accurately positioned by the mounting plate, and the accuracy of assembly of the planar electrodes can be improved; moreover, the planar electrode can be formed by direct printing on the surface of the mounting plate, such as a printed circuit board, which is simple and quick in manufacturing and assembly processes, and is beneficial to large-scale generalization and application.

[0039] Another aspect of the present disclosure further provides a mass spectrometer having the ion guide device according to any one or a combination of the above technical solutions.

[0040] As an optional technical solution, gas that collides or reacts with ions to fragment, dissociate, or excite the ions is introduced into the ion guide device.

[0041] As an optional technical solution, one or more particles of electrons, photons, reagent ions, or metastable atoms are introduced into the ion guide device, reacting with ions in the ion guide device to produce secondary ions.

[0042] FIG. 1 is a schematic structural diagram of a cross section of an ion guide device in accordance with a first embodiment of the present disclosure that is perpendicular to an ion optical axis.FIG. 2 is a schematic structural diagram of a longitudinal section of the ion guide device in accordance with the first embodiment of the present disclosure that passes through the ion optical axis.FIG. 3 is a schematic structural diagram of a cross section of an ion guide device in accordance with a second embodiment of the present disclosure that is perpendicular to an ion optical axis.FIG. 4 is a perspective view of a planar electrode in accordance with the second embodiment of the present disclosure.FIG. 5 is a schematic structural diagram of a cross section of an ion guide device in accordance with a third embodiment of the present disclosure that is perpendicular to an ion optical axis.FIG. 6 is a perspective view of the ion guide device in accordance with the third embodiment of the present disclosure.FIG. 7 is a schematic structural diagram of a cross section of an ion guide device in accordance with a fourth embodiment of the present disclosure that is perpendicular to an ion optical axis.FIG. 8 illustrates a direct current electric field distribution of the ion guide device in accordance with the fourth embodiment of the present disclosure.FIG. 9 is a schematic structural diagram of a cross section of an ion guide device in accordance with a fifth embodiment of the present disclosure that is perpendicular to an ion optical axis.FIG. 10 is a schematic structural diagram of a cross section of an ion guide device in accordance with a sixth embodiment of the present disclosure that is perpendicular to an ion optical axis.FIG. 11 is a schematic structural diagram of a cross section of an ion guide device in accordance with a seventh embodiment of the present disclosure that is perpendicular to an ion optical axis.FIG. 12 is a schematic structural diagram of a cross section of an ion guide device in accordance with an eighth embodiment of the present disclosure that is perpendicular to an ion optical axis.

[0043] The technical solution in the embodiment of the present disclosure will be clearly and completely described below with reference to the accompanying drawings in the embodiment of the present disclosure, and obviously, the described embodiment is merely a part of embodiments of the present disclosure, and are not all embodiments. Based on the embodiments of the present disclosure, all other embodiments obtained by those skilled in the art without creative efforts shall fall within the scope of the present disclosure.

[0044] It should be noted that, in the description of the present disclosure, terms indicating positional relationships such as "axial", "radial", "end surface", "side surface", "inner edge surface", "outer edge surface", and the like are based on the direction or positional relationship shown in the drawings, which is merely intended to facilitate those skilled in the art to more clearly understand the present disclosure, and does not indicate or imply that a device or component must have a specific orientation and be constructed and operated in a specific orientation, and therefore the terms cannot be understood as a limitation on the present disclosure. The "axial" refers to an ion optical axis of an ion guide device (generally a central axis of the ion guide device), and the "radial" refers to a direction orthogonal to the ion optical axis, and does not specifically mean that the device or object is in a "horizontal" or "vertical" direction; the "end surface" refers to an end surface of a planar electrode in the "axial" direction, that is, the surface at two ends perpendicular to the "axial" direction; and the "side surface" refers to a surface intersecting the "end surface", and is not limited to a direction orthogonal to the "axial" direction. The "inner edge surface" refers to a surface of the planar electrode facing the ion optical axis; the "outer edge surface" refers to a surface of the planar electrode away from the ion optical axis.

[0045] First EmbodimentAn embodiment of the present disclosure provides an ion guide device, FIG. 1 is a schematic structural diagram of a cross section of the ion guide device in accordance with the embodiment of the present disclosure that is perpendicular to an ion optical axis. FIG. 2 is a schematic structural diagram of a longitudinal section of the ion guide device in accordance with the embodiment of the present disclosure that passes through the ion optical axis. As illustrated in FIG. 1, the ion guide device in accordance with this embodiment of the present disclosure includes a first electrode group 100 composed of n first planar electrodes 11, and a second electrode group 200 composed of n second planar electrodes 21.

[0046] A positive direction of a Z axis in FIG. 2 is an extension direction of an ion optical axis 41, the first electrode group 100 and the second electrode group 200 of the ion guide device in accordance with this embodiment of the present disclosure are coaxially arranged with the Z axis shown in the drawings as a central axis, and length directions of the first planar electrode 11 and the second planar electrode 21 are along the extension direction of the ion optical axis 41 (i.e., the positive direction of the Z axis), and as illustrated in FIG. 1, in an cross section of the ion guide device perpendicular to the extension direction of the ion optical axis 41, the first planar electrode 11 and the second planar electrode 21 are arranged alternately with one another around the same ion optical axis 41.

[0047] Specifically, FIG. 1 illustrates a case where the ion guide device includes eight planar electrodes (respectively, a planar electrode 1, a planar electrode 2, a planar electrode 3, a planar electrode 4, a planar electrode 5, a planar electrode 5, a planar electrode 7, and a planar electrode 8), that is, n = 4, including four first planar electrodes and four second planar electrodes, a total of eight planar electrodes, but the present disclosure is not limited to this. The ion guide device obtained by simply replacing the value of n, for example, the ion guide device composed of the first planar electrode 11 and the second planar electrode 21 with n >= 4, or n <= 4, also falls within the protection scope of the present disclosure. In the ion guide device illustrated in FIG. 1, each of the planar electrode 2, the planar electrode 4, the planar electrode 6 and the planar electrode 8 is the first planar electrode 11; and each of the planar electrode 1, the planar electrode 3, the planar electrode 5 and the planar electrode 7 is the second planar electrode 21.

[0048] It should be noted that FIG. 1 and FIG. 2 illustrate the case where the eight planar electrodes are uniformly arranged in a circumferential direction of the ion optical axis, but those skilled in the art can understand that the present disclosure does not limit the surrounding manner of the planar electrodes, and the planar electrodes are distributed around the ion optical axis in any reasonable manner, as long as the central axes of the finally formed first electrode group 100 and second electrode group 200 both coincide with the same ion optical axis 41. For example, in other embodiments of the present disclosure, the first planar electrode 11 and the second planar electrode 21 are paired in such a manner that inner edge surfaces 31 are coplanar and outer edge surfaces 32 are coplanar, and the combined electrode pair (not illustrated in FIGS. 1 and 2) is uniformly disposed around the ion optical axis 41 as a whole, which also falls within the protection scope of the present disclosure.

[0049] In this embodiment, the first planar electrode 11 of the first electrode group 100 and the second planar electrode 21 of the second electrode group 200 are applied with different direct current potentials, for example, a direct current voltage V1 and a radio frequency voltage RF1 may be applied to the first planar electrode 11, and a direct current voltage V2 and a radio frequency voltage RF2 may be applied to the second planar electrode 21, where V1 < V2. Further, the first planar electrode 11 and the second planar electrode 21 are arranged to be inclined toward the inner edge surface of the ion optical axis 41, specifically, distances from the ion optical axis 41 of the inner edge surfaces of the first planar electrode 11 and the second planar electrode 21 are changed in opposite ways in the extension direction of the ion optical axis 41.

[0050] For example, a distance between the inner edge surface 31 of the first planar electrode 11 and the ion optical axis 41 gradually decreases in the extension direction of the ion optical axis 41, in other words, the inner edge surface 31 of the first planar electrode 11 gets closer to the ion optical axis 41 in the extension direction of the ion optical axis 41, and FIG. 1 and FIG. 2 illustrate the embodiment in which a width of the first planar electrode 11 (a length in y-axis direction in FIG. 2) gets wider when the outer edge surface 32 of the first planar electrode 11 is a positioning plane and the distance from the ion optical axis 41 is kept constant.

[0051] A distance between the inner edge surface 31 of the second planar electrode 21 and the ion optical axis 41 gradually increases in the extension direction of the ion optical axis 41, in other words, the inner edge surface 31 of the second planar electrode 21 gets farther away from the ion optical axis 41 in the extension direction of the ion optical axis 41, and FIG. 1 and FIG. 2 illustrate the embodiment in which a width of the second planar electrode 21 (a length in y-axis direction in the drawings) gets narrower when the outer edge surface 32 of the second planar electrode 21 is a positioning plane and the distance from the ion optical axis 41 is kept constant.

[0052] In this embodiment, FIG. 1(a) is a cross-sectional view at a position where the ion optical axis is close to an entrance, and at this position, the width of the first planar electrode 11 is the smallest, and the width of the second planar electrode 21 is the largest, that is, the distance between the inner edge surface 31 of the first planar electrode 11 and the ion optical axis 41 is the longest, and the distance between the inner edge surface 31 of the second planar electrode 21 and the ion optical axis 41 is the shortest, and the direct current potential at this position is mainly determined by the direct current potential V2 of the second planar electrode 21. At a position in the middle of the ion optical axis 41, in this embodiment, an example of a case where the first planar electrode 11 and the second planar electrode 21 are planar electrodes having the same shape but with their directions exchanged left and right will be described, and at a position of the center of the ion optical axis 41, the widths of the first planar electrode 11 and the second planar electrode 21 are equal, and the direct current potential the ion optical axis 41 here is jointly determined by the direct current potential V1 of the first planar electrode 11 and the direct current potential V2 of the second planar electrode 21. Further, at a position of the ion optical axis 41 close to an exit (referring to FIG. 1(b)), at this position, the width of the first planar electrode 11 is the largest, the width of the second planar electrode 21 is the smallest, that is, the distance between the inner edge surface 31 of the first planar electrode 11 and the ion optical axis 41 is the shortest, the distance between the inner edge surface 31 of the second planar electrode 21 and the ion optical axis 41 is the longest, and the direct current potential of the position of the ion optical axis 41 close to the exit is mainly determined by the direct current potential V1 of the first planar electrode 11, and in the above manner, the ion guide device in accordance with this embodiment can form a direct current electric field with a potential which gradually changes in the extension direction of the ion optical axis 41.

[0053] In this embodiment, the first planar electrode 11 and the second planar electrode 21 are planar electrodes having the same shape and size. The first planar electrode 11 can be used as the second planar electrode 21 as long as ends of the first planar electrode 11 are interchanged, and therefore the ion guide device can be assembled and formed only by manufacturing the same planar electrode, which can significantly reduce the manufacturing cost.

[0054] In this embodiment, the planar electrode unit is used, and on the one hand, the end surface and the side surface of the planar electrode are easier to process, and high accurate processing can be achieved by a simple wire cutting process. On the other hand, at least one side surface of the first planar electrode 11 and / or the second planar electrode 21 can be used as a positioning plane, and the positioning plane is the inner edge surface 31 close to the ion optical axis 41, the outer edge surface 32 away from the ion optical axis 41, or one side surface or two opposite side surfaces between the inner edge surface 31 and the outer edge surface 32. In this embodiment, the positioning plane is specifically the outer edge surface 32, or one side surface or two opposite side surfaces between the inner edge surface 31 and the outer edge surface 32. By fixing the side surface of the first planar electrode 11 and / or the second planar electrode 21, the assembly position of the electrode group can be quickly positioned, thereby achieving higher assembling accuracy.

[0055] Preferably, each of cross sections of the first planar electrode 11 and the second planar electrode 21 perpendicular to the ion optical axis is rectangular, and the first planar electrode 11 and the second planar electrode 21 with a rectangular cross section are used, and only four side surfaces need to be processed during processing, which can reduce the number of electrode surfaces to be processed, and is more conducive to positioning during assembly of the electrode groups, thereby improving the accuracy of assembly of the electrode groups.

[0056] In this embodiment, the side surface of each of the first planar electrode 11 and the second planar electrode 21 may be a curved surface or a flat surface, which is not limited herein. In this embodiment, the inner edge surface 31 of the first planar electrode 11 and / or the second planar electrode 21 is a curved surface. In this embodiment, the ion guide device may further include a mounting plate (not shown in the drawings), and the first planar electrode 11 and / or the second planar electrode 21 are assembled on the mounting plate using the positioning plane. In some embodiments, the planar electrode may also be manufactured based on a printing manner, and the positioning plane is determined based on a surface of the mounting plate, so as to print and form the first planar electrode 11 and / or the second planar electrode 21, the mounting position of the electrode group can be more accurately positioned by the mounting plate, and the accuracy of assembly of the planar electrodes can be improved; moreover, the planar electrode can be formed by direct printing on the surface of the mounting plate, which is simple and quick in manufacturing and assembly processes, and is beneficial to large-scale generalization and application.

[0057] Second EmbodimentFIG. 3 is a schematic structural diagram of a cross section of an ion guide device in accordance with an embodiment of the present disclosure that is perpendicular to an ion optical axis 41. FIG. 4 is a perspective view of a planar electrode in accordance with the embodiment of the present disclosure.

[0058] Referring to FIG. 3 and FIG. 4, an arrangement of electrodes of the ion guide device in this embodiment is the same as that in the first embodiment, and will not be repeated here. In particular, in the embodiment of the present disclosure, a cross-sectional size of each of the first planar electrode 11 and the second planar electrode 21 gradually changes along the extension direction of the ion optical axis 41. FIG. 3 and FIG. 4 illustrate a case where the cross-sectional areas of the first planar electrode 11 and the second planar electrode 21 are changed in a manner of changing the thickness (the length of the planar electrode in the x-axis direction in FIG. 4), but the present disclosure is not limited to this, and the first planar electrode 11 and the second planar electrode 21 are arranged in other ways such that the cross-sectional size gradually decreases or gradually increases, for example, a square cone is formed in a manner that the side surface of the planar electrode gradually decreases inward, or the outer edge surface 32 gradually decreases in a manner of approaching the inner edge surface 31, which all falls within the protection scope of the present disclosure, and only the case where the thickness gradually decreases shown in the drawings is taken as an example for illustration.

[0059] Preferably, the first planar electrode 11 and the second planar electrode 21 are wedge electrodes having gradually decreasing or gradually increasing thickness, and taking the planar electrode 1 as an example, the thickness of the planar electrode 1 is larger at the position of the ion optical axis 41 close to the entrance, and gradually decreases along the extension direction of the ion optical axis 41 until the thickness is the smallest at the exit of the optical axis 41.

[0060] In this embodiment, the planar electrode 1, each of the planar electrode 3, the planar electrode 5, and the planar electrode 7 is the first planar electrode 11, and each of the planar electrode 2, the planar electrode 4, the planar electrode 6, and the planar electrode 8 is the second planar electrode 21. Generally, in the case where the direct current potential applied to the first planar electrode 11 is V1, the direct current potential applied to the second planar electrode 21 is V2, and V1 > V2, in order to obtain a linear direct current potential gradient, in this embodiment, the thickness of the first planar electrode 11 can be gradually decreased in the extension direction of the ion optical axis 41, and the thickness of the second planar electrode 21 can be gradually increased in the extension direction of the ion optical axis 41.

[0061] For example, the thickness of the first planar electrode 11 (the planar electrode 1, the planar electrode 3, the planar electrode 5, and the planar electrode 7) gradually decreases in the extension direction of the ion optical axis 41, in other words, as illustrated in FIG. 3(a), at the position of the ion optical axis 41 close to the entrance, the thickness of the first planar electrode 11 is the largest, in this case, a proportion of the cross section of the first planar electrode 11 on an overall cross section of the ion guide device is relatively large, as illustrated in FIG. 3(b), at the position of the ion optical axis 41 close to the exit, the thickness of the first planar electrode 11 is the smallest, in this case, the proportion of the cross section of the first planar electrode 11 on the overall cross section of the ion guide device is relatively small.

[0062] The thickness of the second planar electrode 21 (the planar electrode 2, the planar electrode 4, the planar electrode 6, and the planar electrode 8) gradually increases in the extension direction of the ion optical axis 41, in other words, as illustrated in FIG. 3(a), at the position of the ion optical axis 41 close to the entrance, the thickness of the second planar electrode 21 is the smallest, in this case, a proportion of the cross section of the second planar electrode 21 on the overall cross section of the ion guide device is relatively small, as illustrated in FIG. 3(b), at the position of the ion optical axis 41 close to the exit, the thickness of the second planar electrode 21 is the largest, in this case, the proportion of the cross section of the second planar electrode 21 on the overall cross section of the ion guide device is relatively large.

[0063] In this embodiment, at the entrance position of the ion optical axis 41, since the cross-sectional area / width of the first planar electrode 11 is large, the direct current potential at this position is mainly determined by the direct current potential V1 of the first planar electrode 11. At the position in the middle of the ion optical axis 41, the widths of the first planar electrode 11 and the second planar electrode 21 are substantially equal, and the direct current potential of the ion optical axis 41 at this position is jointly determined by the direct current potential V1 of the first planar electrode 11 and the direct current potential V2 of the second planar electrode 21. Further, at the position of the ion optical axis 41 close to the exit, since the cross-sectional area / width of the second planar electrode 21 is large, the direct current potential at the position of the ion optical axis 41 close to the exit is mainly determined by the direct current potential V2 of the second planar electrode 21. In the above manner, the ion guide device in accordance with this embodiment of the present disclosure can form a direct current electric field with gradually changing potential in the extension direction of the ion optical axis 41.

[0064] Similar to the first embodiment, the planar electrode unit having varying thickness is used, each of the outer edge surface 32 and the inner edge surface 31 is a flat surface, and one side surface or two opposite side surfaces between the inner edge surface 31 and the outer edge surface 32 may also be a flat surface. Compared with a truncated conical electrode rod, high accurate processing can be achieved by a simple wire cutting process, and at least one side surface of the first planar electrode 11 and / or the second planar electrode 21 can be used as the positioning plane to achieve higher assembly accuracy, and ultimately obtain a more accurate direct current electric field gradient at the ion optical axis 41.

[0065] Third EmbodimentFIG. 5 is a schematic structural diagram of a cross section of an ion guide device in accordance with a third embodiment of the present disclosure that is perpendicular to an ion optical axis 41. FIG. 6 is a perspective view of the ion guide device in accordance with the third embodiment of the present disclosure.

[0066] In combination with FIG. 5 and FIG. 6, this embodiment is an embodiment obtained by further improvement based on the second embodiment, and the thickness variation of the first planar electrode 11 and the second planar electrode 21 in this embodiment may be the same as that in the second embodiment, which will not be repeated here.

[0067] Different from the second embodiment, in this embodiment, the first planar electrode 11 and the second planar electrode 21 are not uniformly arranged around the ion optical axis 41, but the first planar electrode 11 and the second planar electrode 21 are paired to form an electrode pair 51, and in each electrode pair 51, the inner edge surfaces 31 of the first planar electrode 11 and the second planar electrode 21 are coplanar and the outer edge surfaces 32 thereof are coplanar. Specifically, each electrode pair 51 as a whole is arranged in such a manner that a plurality of electrode pairs 51 are arranged uniformly around the ion optical axis 41. In this way, each electrode pair 51 has a second planar electrode 21 with a gradually increasing thickness and a first planar electrode 11 with a gradually decreasing thickness, for example, in FIG. 5, the thickness of the planar electrode 1 of one electrode pair 51 gradually increases, and the thickness of the planar electrode 2 gradually decreases, so that the variation of the thickness of each electrode pair 51 in the extension direction of the ion optical axis 41 is less, thereby reducing the radio frequency field distortion caused by the thickness variation of the electrode.

[0068] It should be noted that, FIG. 5 and FIG. 6 illustrate a preferred number of electrode pairs 51, but do not limit the number of electrode pairs of the present disclosure, in the ion guide device composed of four electrode pairs, the four first planar electrodes 11 and the four second planar electrodes 21 can be divided into four groups, which are respectively arranged in the up, down, left and right directions of the ion optical axis 41, so that the shape of the assembled ion guide device can be closer to the conventional quadrupole electrode group structure, an influence of the shape changes of the electrodes on the radio frequency field in the ion guide device can be further reduced, and the ion guide device can obtain a wider ion mass range.

[0069] Further preferably, in the extension direction of the ion optical axis 41, by making the thickness of the first planar electrode 11 and the thickness of the second planar electrode 21 to be changed in opposite ways, a total cross-sectional area of the first planar electrode 11 and the second planar electrode 21 constituting one electrode pair 51 can be kept unchanged. FIG. 8 is a direct current potential change diagram in the extension direction (i.e., axial direction) of the ion optical axis in the ion guide device in the third embodiment of the present disclosure. As illustrated in FIG. 8, the shape of the electrode group of the ion guide device composed of four electrode pairs 51 in accordance with this embodiment is basically the same as the shape of the conventional quadrupole electrode group, so that a linear uniform direct current electric field gradient can be formed without affecting the radio frequency field in the ion guide device, thereby increasing the ion movement speed and ion analysis efficiency in the ion guide device.

[0070] Therefore, the ion guide device composed of four electrode pairs 51 is similar to a conventional quadrupole, which minimizes the influence of the shape changes of the electrodes on the radio frequency field in the ion guide device and further improves the ion mass range of the ion guide device.

[0071] Fourth EmbodimentFIG. 7 is a schematic structural diagram of a cross section of an ion guide device in accordance with a fourth embodiment of the present disclosure that is perpendicular to an ion optical axis 41. This embodiment is an example obtained by further improvement based on the second embodiment or the third embodiment.

[0072] As illustrated in FIG. 7, in the fourth embodiment of the present disclosure, the ion guide device has four first planar electrodes 11 and four second planar electrodes 21, in which the first planar electrode 11 and the second planar electrode 21 are paired with each other, and every two electrode pairs 51 serve as one group. Different from the third embodiment, in this embodiment, the first planar electrodes 11 and the second planar electrodes 21 are divided into two groups and disposed on two opposite planes, and each of the planes is provided with two first planar electrodes 11 and two second planar electrodes 21.

[0073] Specifically, the planar electrode 1 and the planar electrode 2 form an electrode pair 51, the planar electrode 3 and the planar electrode 4 form an electrode pair 51, the planar electrode 5 and the planar electrode 6 form an electrode pair 51, the planar electrode 7 and the planar electrode 8 form an electrode pair 51, the electrode pair 51 formed by the planar electrode 1 and the planar electrode 2 and the electrode pair 51 formed by the planar electrode 3 and the planar electrode 4 form a group of electrodes, the electrode pair 51 formed by the planar electrode 5 and the planar electrode 6 and the electrode pair 51 formed by the planar electrode 7 and the planar electrode 8 form a group of electrodes, and the two groups of electrodes are provided opposite vertically to each other (opposite vertically to each other here is described with reference to the accompanying drawings, and is not intended to limit the orientation in the present disclosure).

[0074] Preferably, each of the planar electrode 1, the planar electrode 3, the planar electrode 5, and the planar electrode 7 is used as the first planar electrode 11 to which the direct current potential V1 can be applied. Each of the planar electrode 2, the planar electrode 4, the planar electrode 6, and the planar electrode 8 is used as the second planar electrode 21 to which the direct current potential V2 can be applied.

[0075] Fifth EmbodimentFIG. 9 is a schematic structural diagram of a cross section of an ion guide device in accordance with a fourth embodiment of the present disclosure that is perpendicular to an ion optical axis. As illustrated in FIG. 9, similar to the first embodiment, in this embodiment, in the extension direction of the ion optical axis 41, the distance between the inner edge surface 31 of the first planar electrode 11 (the planar electrode 2, the planar electrode 4, the planar electrode 6, and the planar electrode 8) and the ion optical axis 41 gradually decreases. The distance between the inner edge surface 31 of the second planar electrode 21 (the planar electrode 1, the planar electrode 3, the planar electrode 5, and the planar electrode 7) and the ion optical axis 41 gradually increases, and the specific electrode structure and ion acceleration principle will not be repeated here.

[0076] In this embodiment, preferably, every two of the four first planar electrodes 11 and the four second planar electrodes 21 constitute an electrode pair 51, and the four electrode pairs 51 are respectively arranged at four orthogonal orientations of up, down, left, and right of the ion optical axis 41, so that a structure similar to the quadrupole electrode group can be formed, since only the inner edge surfaces 31 of the first planar electrode 11 and the second planar electrode 21 are changed and the outer edge surfaces 32 can remain flush, the outer surface of the formed ion guide device has four orthogonal planes which can be used as positioning planes cooperatively, which is more convenient to realize accurate assembly and positioning of the electrode groups.

[0077] Sixth EmbodimentFIG. 10 is a schematic structural diagram of a cross section of an ion guide device in accordance with a sixth embodiment of the present disclosure that is perpendicular to an ion optical axis. As illustrated in FIG. 10, in this embodiment, lines of the inner edge surface 31 of the first planar electrode 11 (the planar electrode 2, the planar electrode 4, the planar electrode 6, and the planar electrode 8) and the inner edge surface 31 of the second planar electrode 21 (the planar electrode 1, the planar electrode 3, the planar electrode 5 and the planar electrode 7) on the cross section are on a same inclined line.

[0078] Preferably, every two of the four first planar electrodes 11 and the four second planar electrodes 21 constitute an electrode pair 51, and the four electrode pairs 51 are respectively arranged at four orthogonal orientations of up, down, left, and right of the ion optical axis 41, so that a structure similar to the quadrupole electrode group can be formed.

[0079] Specifically, taking the planar electrode 1 and the planar electrode 2 as an example, at the entrance position of the ion optical axis 41, the length of the left end of the inner edge surface 31 of the planar electrode 1 from the ion optical axis 41 is smaller, the length of the right end of the inner edge surface 31 of the planar electrode 2 from the ion optical axis 41 is larger, and the length of the inner edge surface 31 from the ion optical axis 41 gradually increases from the left end of the planar electrode 1 to the right end of the planar electrode 2. With the extension of the ion optical axis 41, the lengths of the inner edge surface 31 of the planar electrodes 1 and the inner edge surface 31 of the planar electrodes 2 from the ion optical axis 41 tend to be consistent. Finally, at the exit position of the ion optical axis 41, the length of the left end of the inner edge surface 31 of the planar electrode 2 from the ion optical axis 41 is smaller, the length of the right end of the inner edge surface 31 of the planar electrode 1 from the ion optical axis 41 is larger, and the length of the inner edge surface 31 from the ion optical axis 41 gradually decreases from the left end of the planar electrode 1 to the right end of the planar electrode 2.

[0080] In this embodiment, since only the inner edge surfaces 31 of the first planar electrode 11 and the second planar electrode 21 are changed and the outer edge surfaces 32 can remain flush, the outer surface of the formed ion guide device has a plurality of orthogonal planes which can be used as positioning planes, which is more convenient for assembly and positioning of the electrode groups. Moreover, the inner edge surfaces 31 of the first planar electrode 11 and the second planar electrode 21 are formed as continuous inclined planes, so that an edge effect of the electrodes can be further avoided, and the influence on the distribution of the radio frequency electric field can be reduced.

[0081] Seventh EmbodimentFIG. 11 is a schematic structural diagram of a cross section of an ion guide device in accordance with a seventh embodiment of the present disclosure that is perpendicular to an ion optical axis. As illustrated in FIG. 11, similar to the second embodiment, in the extension direction of the ion optical axis 41, the cross-sectional area of the first planar electrode 11 (the planar electrode 1, the planar electrode 3, the planar electrode 5, and the planar electrode 7) gradually decreases. The cross-sectional area of the second planar electrode 21 (the planar electrode 2, the planar electrode 4, the planar electrode 6, and the planar electrode 8) gradually increases, and the specific electrode structure and ion acceleration principle will not be repeated here.

[0082] In this embodiment, the cross-sectional size (such as thickness) of one or more of the n first planar electrodes 11 or one or more of the n second planar electrodes 21 is changed in a way different from those of the other first planar electrodes 11 or second planar electrodes 21. FIG. 11 illustrates that the planar electrode 4 and the planar electrode 6 in the second planar electrode 21 are arranged in such a way that an increase rate of the thickness is higher than that of the planar electrode 2 and the planar electrode 8, so that the ion movement path can be shifted from the ion optical axis 41 toward a direction close to the planar electrode 4 and the planar electrode 6. When the increase rates of the thicknesses of the planar electrode 4 and the planar electrode 6 are the same, the deviation direction of the ions is the negative direction along the y-axis in the drawings.

[0083] In some other embodiments, the movement path of the ions may also be shifted towards a direction close to the planar electrode 5 by changing a decrease rate of the thickness of the first planar electrode 11 (for example, the decrease rate of the thickness of the planar electrode 5 in FIG. 11 is less than a decrease rate of the thickness of each of the planar electrode 1, the planar electrode 3 and the planar electrode 7).

[0084] In some other embodiments, based on the ion guide device in the first embodiment, the movement path of the ions may also be deviated from the ion optical axis by increasing or decreasing a change rate of the distance between the inner edge surface 31 of one or more of the n first planar electrodes 11 or the n second planar electrodes 21 and the ion optical axis 41, thereby realizing off-axis guidance of the ions.

[0085] Eighth EmbodimentFIG. 12 is a schematic structural diagram of a cross section of an ion guide device in accordance with a fourth embodiment of the present disclosure that is perpendicular to an ion optical axis. As illustrated in FIG. 12, similar to the first embodiment or the second embodiment, in this embodiment, the distance between the inner edge surface 31 of the first planar electrode 11 and the ion optical axis 41 gradually increases or the thickness gradually increases; the distance between the inner edge surface 31 of the second planar electrode 21 and the ion optical axis 41 gradually decreases or the thickness gradually decreases, so as to realize the accelerated guidance of ions, and the specific electrode structure will not be repeated here.

[0086] In this embodiment, preferably, the direct current potential of at least one of the second planar electrodes 21 is made lower than those of the other second planar electrodes 21, or the direct current potential of at least one of the first planar electrodes 11 is made higher than those of the other first planar electrodes 11, FIG. 12 illustrates that the direct current potential of the planar electrode 4 or the planar electrode 6 is decreased by applying a bias voltage - V to the planar electrode 4 and the planar electrode 6, or a direct current field deviating from the ion optical axis 41 can be formed by increasing the direct current potential of the planar electrode 5 (for example, a bias voltage + V is added to the planar electrode 5), thereby driving the ion to move away from the ion optical axis 41 and realizing off-axis guidance of the ions.

[0087] According to practical application scenarios, the substance detection instrument applied by the ion guide device of the present disclosure may include or be replaced with various mass spectrometers, ion mobility spectrometers, electrochemical analyzers, etc.

[0088] Preferably, gas that collides or reacts with ions to fragment, dissociate, or excite the ions may be introduced into the ion guide device. For example, an activated hydrogen atom can be introduced for hydrogen activated dissociation (HAD), or an oxygen atom for oxygen activated dissociation (OAD), or ozone gas for ozone induced dissociation (OzID), or for other excitation, fragmentation, dissociation, etc.

[0089] Preferably, particles such as electrons, photons, reagent ions, or metastable atoms may be introduced into the ion guide device, reacting with ions in the ion guide device to produce secondary ions. For example, electrons may be introduced for electron capture dissociation (ECD) or electron activated dissociation (EAD), or reagent ions may be introduced for electron transfer dissociation (ETD), or photons may be introduced for photon dissociation, etc.

[0090] The technical solutions of the present disclosure have been described with reference to the accompanying drawings, but it is easily understood by those skilled in the art that the protection scope of the present disclosure is obviously not limited to these specific embodiments. Those skilled in the art can make equivalent changes or substitutions to related technical features without departing from the principle of the present disclosure, and the technical solutions after these changes or substitutions shall fall within the protection scope of the present disclosure.

[0091] planar electrode 1,2,3,4,5,6,7,8, first electrode group 100, first planar electrode 11, second electrode group 200, second planar electrode 21, inner edge surface 31, outer edge surface 32, ion optical axis 41, and electrode pair 51.

Claims

1. An ion guide device, comprising: a first electrode group including n first planar electrodes arranged in a multipole shape; and a second electrode group including n second planar electrodes arranged in a multipole shape, the first electrode group and the second electrode group being coaxially disposed with the same ion optical axis, and length directions of the first planar electrodes and the second planar electrodes being along an extension direction of the ion optical axis, wherein on a cross section perpendicular to the ion optical axis, the n first planar electrodes and the n second planar electrodes are arranged alternately with one another in a circular shape, each of the first planar electrodes and each of the second planar electrodes are applied with different direct current potentials, in the extension direction of the ion optical axis, respective cross-sectional sizes or distances from the ion optical axis of the first planar electrode and the second planar electrode are changed in opposite ways so as to form a direct current potential gradient in the extension direction of the ion optical axis, and at least one side surface of the first planar electrode and / or the second planar electrode, which is different from an end surface in the length direction, is a positioning plane, and the positioning plane is used for determining a position where the first planar electrode and / or the second planar electrode are made or assembled.

2. The ion guide device according to claim 1, wherein the positioning plane is an inner edge surface close to the ion optical axis, an outer edge surface away from the ion optical axis, or one side surface or two opposite side surfaces between the inner edge surface and the outer edge surface.

3. The ion guide device according to claim 1, wherein each of cross sections of the first planar electrode and the second planar electrode perpendicular to the ion optical axis is rectangular.

4. The ion guide device according to claim 3, wherein a distance between an inner edge surface of the first planar electrode and the ion optical axis gradually decreases in the extension direction of the ion optical axis, and a distance between an inner edge surface of the second planar electrode and the ion optical axis gradually increases in the extension direction of the ion optical axis.

5. The ion guide device according to claim 3, wherein the first planar electrode and the second planar electrode are wedge electrodes having varying thickness, the thickness of the first planar electrode gradually decreases in the extension direction of the ion optical axis, and the thickness of the second planar electrode gradually increases in the extension direction of the ion optical axis.

6. The ion guide device according to claim 5, wherein an inner edge surface and an outer edge surface of each of the first planar electrode and the second planar electrode are both flat surfaces, and the n first planar electrodes and the n second planar electrodes constitute n electrode pairs, and in one of the electrode pairs, the first planar electrode and the second planar electrode are arranged adjacently in such a manner that the inner edge surfaces are coplanar and the outer edge surfaces are coplanar.

7. The ion guide device according to claim 6, wherein the inner edge surface and the outer edge surface of each of the first planar electrode and the second planar electrode are both flat surfaces, and four first planar electrodes and four second planar electrodes are divided into two groups and disposed on two opposite planes, and each of the planes is provided with two first planar electrodes and two second planar electrodes.

8. The ion guide device according to claim 6, wherein in the extension direction of the ion optical axis, a total cross-sectional area of the first planar electrode and the second planar electrode constituting one electrode pair does not change.

9. The ion guide device according to claim 5, wherein one or more of the n first planar electrodes have a cross-sectional size or a distance from the ion optical axis different from those of the other first planar electrodes, or one or more of the n second planar electrodes have a cross-sectional size or a distance from the ion optical axis different from those of the other second planar electrodes so as to drive an ion to move away from the ion optical axis.

10. The ion guide device according to claim 5, wherein a direct current potential of at least one of the second planar electrodes is made lower than those of the other second planar electrodes, or a direct current potential of at least one of the first planar electrodes is made higher than those of the other first planar electrodes so as to drive an ion to move away from the ion optical axis.

11. The ion guide device according to claim 1, wherein an inner edge surface of the first planar electrode and / or the second planar electrode is a curved surface.

12. The ion guide device according to claim 1 or 11, wherein the first planar electrode and the second planar electrode are planar electrodes having the same shape and size.

13. The ion guide device according to claim 1, wherein n = 4.

14. The ion guide device according to claim 1, further comprising: a mounting plate, wherein the first planar electrode and / or the second planar electrode are assembled on the mounting plate using the positioning plane, or the positioning plane is determined based on a surface of the mounting plate to print and form the first planar electrode and / or the second planar electrode.

15. A mass spectrometer, comprising: the ion guide device according to any one of claims 1 to 14.

16. The mass spectrometer according to claim 15, wherein gas that collides or reacts with ions to fragment, dissociate, or excite the ions is introduced into the ion guide device.

17. The mass spectrometer according to claim 15, wherein one or more particles of electrons, photons, reagent ions, or metastable atoms are introduced into the ion guide device, reacting with ions in the ion guide device to produce secondary ions.

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