Electrical connection device, GND terminal contact member, and housing member

Abstract

An electrical connection device (1) according to the present invention comprises: a GND connection terminal member (2) that contacts and electrically connects to a ground terminal (81) of a test object (8); and a housing member (30) that accommodates the test object (8) on one side, that accommodates and holds the GND connection terminal member (2) from another side, and that enables contact between the ground terminal (81) of the test object (8) and the GND connection terminal member (2) via an opening (31), wherein the housing member (30) has a fitted part (33), the GND connection terminal member (2) has a fitting part (23) that fits with the fitted part (33) of the housing member (30) after a body part of the GND connection terminal member (2) is inserted into the opening (31) of the housing member (30) from said other side of the housing member (30), and the fitting part (23) has a deformable stopper part (232) that fits with the fitted part (33) by deforming.

Description

Electrical connection device, GND terminal contact member, and housing member

[0001] The present invention relates to an electrical connecting device, a GND terminal contact member, and a housing member, and is applicable to an electrical connecting device such as a test socket used for electrical testing of a device under test, for example.

[0002] Conventionally, in the manufacturing process of a semiconductor device, electrical characteristics of the packaged semiconductor device are inspected through tests called package tests, final tests, etc.

[0003] In such testing, a test socket is used that detachably holds a semiconductor integrated circuit under test and electrically connects electrical contacts to the electrode terminals of the held semiconductor device. The semiconductor device mounted in the test socket is electrically connected to a testing device (tester) via this electrical connection device, and its electrical characteristics are tested.

[0004] Patent Document 1 discloses a compliant grounding block for a test system for testing integrated circuit devices, the compliant grounding block comprising a plurality of electrically conductive blades arranged in a substantially parallel relationship and an elastomer for holding the electrically conductive blades.

[0005] Special Publication No. 2023-545037

[0006] Incidentally, in conventional inspection sockets, when the inspection socket is removed from the inspection socket mounting board for maintenance work or the like, in order to prevent the GND connection terminal member from falling off, an elastomer is generally press-fitted into the housing of the GND connection terminal member as a member for fixing it in place or for preventing it from falling off, or a film is inserted by utilizing the elastic deformation of the film.

[0007] However, even if an elastomer or film is used, the holding force is not sufficient, and the GND connection terminal member may come off.

[0008] Furthermore, when setting the elastomer or film, the worker must use tweezers or the like, which requires excellent skill on the part of the worker and places a heavy burden on the worker, and there is also the problem that the tweezers or the like may damage or scratch the component during the work.

[0009] In view of the above-mentioned problems, the present invention aims to provide an inspection socket, a GND terminal contact member, and a housing member that can hold the GND connection terminal member that is housed in the housing with a simple operation and prevent it from falling off.

[0010] In order to solve such problems, the first invention provides an electrical connection device that electrically connects a test device and a test apparatus, the electrical connection device comprising: a GND connection terminal member that electrically contacts the ground terminal of the test device and connects it to ground; and a housing member that houses the test device on one side (the side that contacts the test device) and houses the GND connection terminal member from the other side (the side of the test socket mounting board) so that the ground terminal of the test device can come into contact with the GND connection terminal member through an opening, the housing member having a mating portion on the periphery of the opening, the GND connection terminal member having a plate-shaped main body portion whose upper and lower surfaces form contact portions, flange portions that protrude outward from the side of the main body portion, and a mating portion that mates with the mating portion of the housing member from the other side of the housing after the GND connection terminal member is inserted into the opening of the housing member, and the mating portion has a deformation stopper portion that deforms to fit into the mating portion.

[0011] The second invention is a GND connection terminal member that is placed in a housing member from one side of the housing member that contains a test object having a ground terminal on the other side, and that electrically contacts the ground terminal of the test object to establish a ground connection, wherein the housing has a plurality of mating portions around the periphery of the opening, and the GND connection terminal member has a plate-shaped main body portion whose upper and lower surfaces form contact portions, a flange portion that protrudes outward from the side of the main body portion, and a mating portion that mates with the mating portion of the housing member after the GND connection terminal member is inserted into the opening of the housing member from the other side of the housing member, and the mating portion has a deformation stopper portion that mates with the mating portion by deformation.

[0012] The third aspect of the present invention is a housing member that stores a GND connection terminal member that is in electrical contact with the ground terminal of a test subject when testing the test subject having a ground terminal, the GND connection terminal member having a plate-shaped main body portion whose upper and lower surfaces form contact portions, a flange portion that protrudes outward from the side of the main body portion, and an engaging portion, and the housing member stores the test subject on one side and the GND connection terminal member on the other side, allowing contact between the ground terminal of the test subject and the GND connection terminal member through an opening, and is characterized in that it has an engaging portion provided on the periphery of the opening that engages with the engaging portion of the GND connection terminal member after the GND connection terminal member is inserted into the opening from the other side.

[0013] According to the present invention, the GND connection terminal member housed in the housing can be prevented from falling off with a simple operation.

[0014] 10B is a perspective view showing the overall configuration of an electrical connecting device according to an embodiment; FIG. 10C is a cross-sectional view taken along the arrows A-A in FIG. 1; FIG. 10D is a plan view showing the configuration of an electrical connecting device according to an embodiment; FIG. 10E is a cross-sectional view taken along the arrows C-C in FIG. 10B; FIG. 10F is a cross-sectional view taken along the arrows C-C in FIG. 10C; FIG. 10G is a cross-sectional view taken along the arrows C-C in FIG. 10B; FIG. 10H is a cross-sectional view taken along the arrows C-C in FIG. 10H; FIG. 10I is a cross-sectional view taken along the arrows C-C in FIG. 10I ... 1 is an explanatory diagram showing a state in which a resist is applied to a test socket mounting substrate in an embodiment; FIG. 2 is an explanatory diagram explaining the distance between a GND terminal contact member and an electrical contact in an embodiment; FIG. 3 is an explanatory diagram explaining a manner in which a fitted portion of a housing member and a fitting portion of a GND terminal contact member are fitted together in a modified embodiment; FIG. 4 is an explanatory diagram explaining a manner in which a fitted portion of a housing member and a fitting portion of a GND terminal contact member are fitted together in a modified embodiment; FIG. 5 is an explanatory diagram explaining a manner in which a fitted portion of a housing member and a fitting portion of a GND terminal contact member are fitted together in a modified embodiment; FIG. 6 is an explanatory diagram explaining a structure of a GND terminal contact member in a modified embodiment; FIG. 7 is an explanatory diagram explaining a structure of a GND terminal contact member in a modified embodiment; FIG. 8 is an explanatory diagram explaining a structure of a GND terminal contact member in a modified embodiment; FIG. 9 is an explanatory diagram explaining a structure of a GND terminal contact member in a modified embodiment; FIG. 10 is an explanatory diagram explaining a structure of a GND terminal contact member in a modified embodiment; FIG. 11 is an explanatory diagram explaining a structure of a GND terminal contact member in a modified embodiment; FIG. 12 is an explanatory diagram explaining a structure of a GND terminal contact member in a modified embodiment; FIG. 13 is an explanatory diagram explaining a structure of a GND terminal contact member in a modified embodiment; FIG. 14 is an explanatory diagram explaining a disengagement structure of a GND terminal contact member in a conventional test socket; 10A and 10B are explanatory diagrams illustrating a detachment structure of a GND terminal contact member in a conventional inspection socket (part 2);1 is an explanatory diagram (part 3) illustrating a release structure of a GND terminal contact member in a conventional inspection socket; 2 is an explanatory diagram (part 1) illustrating a problem with a release structure of a GND terminal contact member in a conventional inspection socket; 3 is an explanatory diagram (part 3) illustrating a problem with a release structure of a GND terminal contact member in a conventional inspection socket; 4 is an explanatory diagram (part 5) illustrating a problem with a release structure of a GND terminal contact member in a conventional inspection socket; 6 is an explanatory diagram (part 6) illustrating a problem with a release structure of a GND terminal contact member in a conventional inspection socket; 7 is an explanatory diagram (part 7) illustrating a problem with a release structure of a GND terminal contact member in a conventional inspection socket.

[0015] (A) Main Embodiments Hereinafter, embodiments of an electrical connecting device, a GND terminal contact member, and a housing member according to the present invention will be described in detail with reference to the drawings.

[0016] In the following description, the term "electrical connection device" refers to a device that electrically connects a test device (tester) and a device under test when testing the electrical characteristics of the device under test, and includes, for example, a test socket, etc. In this embodiment, the device under test has a ground terminal.

[0017] The "GND terminal contact member" is a member that electrically contacts the ground terminal of the device under test to establish a ground connection, and is also called a GND block or a ground block.

[0018] The "housing member" houses the GND terminal contact member.

[0019] (A-1) Overview FIGS. 23 to 25 are explanatory diagrams illustrating the structure of a GND terminal contact member in a conventional inspection socket.

[0020] 23(A) and 23(B), the first conventional example has an opening in the center of a housing member 3000, into which a GND terminal contact member 2000 is inserted. An elastomer 4000 is provided on the other surface (e.g., the bottom surface) of the GND terminal contact member 2000 as a fixing member to prevent the GND terminal contact member 2000 from coming off. The arrow in Fig. 23(B) indicates the direction in which the GND terminal contact member 2000 comes off.

[0021] In the second conventional example, as illustrated in Figures 24(A) and 24(B), a GND terminal contact member 2000 is inserted into an opening in a housing member 3000. At this time, the GND terminal contact member 2000 is provided sandwiching an elastically deformable film 5000. The arrow in Figure 24(B) indicates the direction in which the GND terminal contact member 2000 is removed.

[0022] 25(A) and 25(B), the third conventional example is a case where the GND terminal contact member 2000 is held by the elastic deformation of the film 5000 in Fig. 24, and the film 5000 and the GND terminal contact member 2000 are fixed together with an adhesive 6000. The arrow in Fig. 25(B) indicates the direction in which the GND terminal contact member 2000 comes off.

[0023] However, in the first conventional example, as shown in FIG. 26(A), the elastomer 4000 is simply pressed in, so the holding force of the GND terminal contact member 2000 is insufficient, and there is a problem that, for example, when air is blown or maintenance work is performed, if a force is applied in the direction of the arrow in FIG. 26(B), the GND terminal contact member 2000 will come off.

[0024] In the second conventional example, as shown in Fig. 27(A), a film 5000 is sandwiched between the GND terminal contact member 2000 and the housing member 3000 to prevent the GND terminal contact member 2000 from coming off. However, as shown in Fig. 27(B), when a force acts in the direction in which the GND terminal contact member 2000 comes off, the GND terminal contact member 2000 becomes more likely to come off, and when a force exceeding a certain level is applied, as shown in Fig. 27(C), the film 5000 may come off the housing member 3000, causing the GND terminal contact member 2000 to come off.

[0025] In the case of the second conventional example, when setting the film 5000, the worker must bend the film 5000 with tweezers 9000 as shown in Figures 28(A) and 28(B) . This requires skilled techniques, and in some cases, may result in damage or scratches to the components.

[0026] In the third conventional example, depending on the type of adhesive 6000, it may be vulnerable to impact, and as shown in Fig. 29(A), continued use may cause the adhesive 6000 between the GND terminal contact member 2000 and the housing member 3000 to break. Furthermore, since the film 5000 is interposed, the adhesive 6000 will not break immediately even if an impact is applied, but as shown in Fig. 29(B) and Fig. 29(C), if a force exceeding a certain level is applied, the film 5000 may also break, causing the GND terminal contact member 2000 to come off.

[0027] In the third conventional example, the GND terminal contact member 2000 must be in contact with the contact surface on the test socket mounting board during bonding, as shown in Fig. 30(A). However, as shown in Fig. 30(B), the GND terminal contact member 2000 may be accidentally bonded and fixed in a state separated from the contact surface of the board, which poses a risk of poor conductivity, requiring labor hours for continuity testing and redoing the work. Bonding requires skilled techniques, but even an experienced worker cannot completely avoid this risk.

[0028] Furthermore, in the third conventional example, as shown in FIG. 31 , when a resist Ir is provided on the inspection socket mounting substrate and the GND terminal contact member 2000 is provided on the inspection socket mounting substrate having a step, even if the GND terminal contact member 2000 is properly adhered, there is a problem in that the GND terminal contact member 2000 is adhered and fixed in a state separated from the contact surface of the inspection socket mounting substrate due to the step.

[0029] Furthermore, adhesives require time to dry. This waiting time for drying is necessary even during normal assembly or rework, which can affect product delivery dates. Furthermore, when adhesives are used, organic solvents are used, so work preparations such as special equipment like a drafter, protective gear, and chemicals are required.

[0030] In the first to third conventional examples, as shown in FIG. 32, during inspection, the outermost position GND of the GND terminal contact member 2000 ＯＵＴ and the tip position PIN of the external terminal contact 12 ｔｉｐ The closer the distance, the better the electrical characteristics.

[0031] However, in the case of the conventional housing method of the GND terminal contact member 2000, the elastomer 4000 that holds the GND terminal contact member 2000 from the other surface (for example, the bottom surface) of the housing member 3000 is provided, so there are limitations on how the GND terminal contact member 2000 can be installed. ＯＵＴ and the tip position PIN of the external terminal contact 12 ｔｉｐ It is difficult to reduce the distance between

[0032] Therefore, this embodiment describes a GND terminal contact member, housing member, and inspection socket that can hold the GND terminal contact member housed in the inspection socket with a simple operation and can strengthen the holding force to prevent it from coming loose.

[0033] (A-2) Configuration of the Embodiment (A-2-1) Test Subject FIGS. 4A and 4B are diagrams showing examples of the rear surface configuration of a semiconductor device as a test subject.

[0034] For example, the device under test 8 is a semiconductor device packaged in the shape of a thin plate having a substantially square or rectangular shape in plan view. The size of the device under test 8 is not particularly limited, but may be, for example, a package length and width of about 3 mm or less, and a package body height (thickness) of about 1 mm or less.

[0035] The device under test 8 shown in Figures 4(A) and 4(B) is a surface-mounted leadless package, and is provided with a ground terminal 81 (hereinafter also referred to as a "GND terminal" or "earth terminal"), which is a large pad-shaped electrode terminal for ground (GND), in the center of the back surface of the device under test 8, and is provided with a plurality of external terminals 82, which are small pad-shaped electrode terminals with various functions such as for signal input / output, power supply, and ground, around the GND terminal 81.

[0036] The GND terminal 81 has a planar contact surface that is larger in area than the external terminal 82. The GND terminal 81 may be, for example, a die pad exposed on the back surface of the IC package, and may also serve as a heat dissipation function. A package equipped with a large GND terminal 81 is suitable for semiconductor devices that place importance on ground characteristics, such as semiconductor devices for communication.

[0037] The external terminal 82 has a planar contact surface with a smaller area than the GND terminal 81. A plurality of external terminals 82 are arranged in a row at predetermined intervals along the edge of the back surface of the device under test 8 as a semiconductor device. For example, as shown in FIG. 4A, some device under test 8 has a plurality of external terminals 82 on each of two opposing edges of the four edges of the back surface. Alternatively, as shown in FIG. 4B, some device under test 8 has a plurality of external terminals 82 on each of all four edges of the back surface.

[0038] Figures 4(A) and 4(B) illustrate an example in which the multiple external terminals 82 have contact surfaces exposed on the bottom surface of the test subject 8, but the contact surfaces may also be exposed in an L-shape from the side to the bottom surface of the test subject 8.

[0039] The rear surface configuration of the inspection object 8 is not limited to the configurations shown in FIGS.

[0040] (A-2-2) Configuration of the Electrical Connecting Device Fig. 1 is a perspective view showing the overall configuration of the electrical connecting device according to the embodiment. Fig. 2 is a cross-sectional view taken along the line A-A in Fig. 1. Fig. 3 is a plan view showing the configuration of the electrical connecting device according to the embodiment.

[0041] In FIG. 1, the electrical connection device 1 has a housing member 60 that houses the device under test 8 and is fixed to a test socket mounting board, and a cover 61 that fixes the device under test 8 housed in the housing member 60 and is provided so as to be able to be opened and closed freely relative to the housing member 60.

[0042] The electrical connecting device 1 is used, for example, when conducting an electrical test on a device under test 8 such as an IC package. For example, the electrical connecting device 1 is connected to a testing device (tester) that transmits and receives signals required for testing, and is used as a test IC socket or testing socket used in an electrical test (for example, a package test, a final test, etc.) of the device under test 8.

[0043] 1 to 3, a housing member 60 of the electrical connecting device 1 is provided with a plurality of external terminal contactors 12 that come into contact with external terminals 82 of a device under test 8. The device under test 8 is attached to an opening 14 in the center of the housing member 60, and the cover 61 is closed, thereby pushing the device under test 8 in and bringing the external terminals 82 of the device under test 8 into electrical contact with the tip ends 121 of the external terminal contactors 12. The housing member 60 of the electrical connecting device 1 is then mounted on a test socket mounting board 10, and the lower ends of the external terminal contactors 12 come into electrical contact with the first wiring pattern 11 on the test socket mounting board 10. In this state, the electrical characteristics of the device under test 8 are tested.

[0044] The inspection socket mounting board 10 is, for example, a wiring board made of an electrically insulating material. A wiring pattern made of a conductive metal material is formed on the surface of the inspection socket mounting board 10 by, for example, printed wiring technology. A housing member 60 is fixed onto the surface of the inspection socket mounting board 10 on which the wiring pattern has been formed.

[0045] The wiring pattern has a plurality of first wiring patterns 11 that contact the plurality of external terminal contacts 12 respectively, and a second wiring pattern 16 that contacts the GND terminal contact member 2 .

[0046] 3, the first wiring patterns 11 are a plurality of strip-shaped patterns formed at positions corresponding to the positions of the external terminal contactors 12 that electrically contact the external terminals 82 of the device under test 8. The first wiring patterns 11 extend to the outside of the housing member 60 and are connected to a wiring pattern that is connected to the testing device. The example of FIG. 3 illustrates a case where three first wiring patterns 11 are arranged at predetermined intervals from each side of the base 60.

[0047] As shown in Fig. 3, the second wiring pattern 16 is a pattern formed at a position corresponding to the position of the GND terminal contact member 2 that electrically contacts the GND terminal 81 of the device under test 8. For example, the second wiring pattern 16 has a substantially rectangular shaped portion according to the outer size of the GND terminal contact member 2, and is formed so as to be able to contact the lower surface of the GND terminal contact member 2 over a wide area. The second wiring pattern 16 is connected to a wiring pattern that is connected to the GND side. The example of Fig. 3 illustrates a case in which one second wiring pattern 16 extends to the outside from one side of the housing member 60.

[0048] An opening 14, which is a rectangular recessed opening, is provided in the center of the housing member 60 to accommodate the device under test 8. As shown in Fig. 2, recesses 17 are provided around the periphery of the opening 14 to accommodate a plurality of external terminal contacts 12. In addition, a hole 18 is provided in the bottom surface of the opening 14 to accommodate the GND terminal contact member 2.

[0049] The opening 14 has a rectangular tapered surface 14a whose diameter decreases from the top to the bottom to facilitate the attachment of the device under test 8. The bottom of the opening 14 is surrounded by walls perpendicular to the test socket mounting board 10 to ensure secure attachment of the device under test 8, and the size of the opening surrounded by the perpendicular walls is slightly larger than the size of the device under test 8.

[0050] The external terminal contacts 12 are made of a conductive material such as metal, and are plate-like members formed in a substantially U-shape, as shown in Fig. 2. The external terminal contacts 12 are also called electrical contacts or probes.

[0051] When the external terminal contactor 12 is assembled to the electrical connection device 1, when the tip 121 of the external terminal contactor 12 is pressed downward, the outer surface of the external terminal contactor 12 can be brought into close contact with the first wiring pattern 11.

[0052] The GND terminal contact member 2 is a member that makes contact with the GND terminal 81 on the back surface of the device under test 8 housed in the electrical connecting device 1 to establish an electrical ground connection. The GND terminal contact member 2 is a member formed of a conductive metal or the like. The upper portion of the GND terminal contact member 2 makes contact with the GND terminal 81 of the device under test 8, and the lower portion makes contact with the second wiring pattern 16 of the test socket mounting board 10.

[0053] (A-2-3) Structure of the GND Terminal Contact Member 2 Next, the structure of the GND terminal contact member 2 and the method of housing the GND terminal contact member 2 in the housing member 30 will be described in detail with reference to the drawings.

[0054] An opening 31 provided in the center of the housing member 30 is a portion for accommodating the GND terminal contact member 2 .

[0055] Fig. 5 is a diagram showing the configuration of the GND terminal contact member 2 of the embodiment when viewed from above (the side that contacts the device under test), Fig. 6 is a diagram showing the configuration of the GND terminal contact member 2 of the embodiment when viewed from below (the side of the test socket mounting substrate), and Fig. 7 is a cross-sectional view taken along the line B-B in Fig. 5.

[0056] FIG. 8 is a diagram showing the configuration of the housing member 30 that houses the GND terminal contact member 2 of the embodiment when viewed from above (the side that contacts the device under test), and FIG. 9 is a diagram showing the housing member 30 when viewed from below (the side on which the test socket is attached).

[0057] As shown in FIGS. 5 to 7, the GND terminal contact member 2 is a plate-like member made of a conductive material such as metal, and is formed in a substantially rectangular shape in a plan view.

[0058] The GND terminal contact member 2 has a main body 22 that is a substantially rectangular plate in plan view, and a flange 21 that protrudes outward from the side surface of the main body 22 .

[0059] One surface (e.g., the top surface) of the main body 22 of the GND terminal contact member 2 is the surface that comes into contact with the GND terminal 81 of the device under test 8, and the surface shape of the main body 22 may be a shape that corresponds to the surface shape of the GND terminal 81 that it comes into contact with. For example, in this example, since the surface shape of the GND terminal 81 of the device under test 8 is approximately rectangular, the surface shape of the main body 22 is also approximately rectangular.

[0060] The flange portion 21 of the GND terminal contact member 2 is a portion that supports the GND terminal contact member 2 itself when the GND terminal contact member 2 is attached to the housing member 30. The flange portion 21 is provided with mating portions 23 near the boundary with the main body portion 22, which mating portions 23 are provided with mating portions 33 of the housing member 30. In this example, one mating portion 23 is provided at the boundary between each of two opposing sides of the four sides of the main body portion 22, for a total of two mating portions 23.

[0061] In Figure 5, when viewed in a plane, the fitting portion 23 has a U-shaped cutout portion 233 formed on the surface of the flange portion 21 near the boundary with the main body portion 22, and a first stopper portion 231 is provided that remains due to the formation of the cutout portion 233.

[0062] In FIG. 6 , when the fitting portion 23 is viewed from the bottom (the side of the test socket mounting substrate), a non-through hole is provided from the other surface (e.g., the bottom surface) of the main body portion 22, and a thin second stopper portion 232 is formed at the end of the main body portion 22.

[0063] As will be described later, the second stopper portion 232 is a plate-shaped cantilever member that can be deformed by a jig 9 or the like. After deformation, the second stopper portion 232 can strengthen the fit by coming into contact with the third stopper portion 334 of the housing member 30. The second stopper portion 232 is also called a "deformed stopper portion."

[0064] The first stopper portion 231 is a member that can limit the degree of deformation (i.e., the position after deformation) of the deformable second stopper portion 232. Therefore, the first stopper portion 231 is also called a "deformation amount limiting portion."

[0065] Next, we will explain the structure of the housing member 30. As will be described later, the GND terminal contact member 2 is inserted from the other surface (the side of the inspection socket mounting board) (e.g., the bottom surface) of the housing member 30, and the fitting portion 23 of the GND terminal contact member 2 fits into the fitted portion 33 of the housing member 30, thereby attaching the GND terminal contact member 2 to the housing member 30.

[0066] As shown in FIGS. 8 and 9, the housing member 30 is made of an insulating material such as synthetic resin, and has an opening 31 into which the GND terminal contact member 2 is inserted from the other surface side (the side of the inspection socket mounting board) and which receives the main body portion 22 of the GND terminal contact member 2.

[0067] The shape of the opening 31 can be made to correspond to the shape of the main body 22 (i.e., the shape of the GND terminal 81 of the device under test 8). In this example, since the shape of the main body 22 in a plan view (i.e., the shape of the GND terminal 81 in a plan view) is approximately rectangular, the opening 31 is also approximately rectangular.

[0068] The housing member 30 also has a mated portion 33 that mates with the mating portion 23 of the GND terminal contact member 2 .

[0069] The fitted portions 33 are provided at positions corresponding to the positions of the fitting portions 23 of the GND terminal contact member 2. In this example, the GND terminal contact member 2 is provided with two fitting portions 23, so the housing member 30 has two fitted portions 33, and the positions of each fitted portion 33 are provided at positions corresponding to the fitting portions 23.

[0070] 8, the mating portion 33 has a U-shaped hole 331 at the edge of the opening 31 of the housing member 30 in a plan view, at a position corresponding to the position of the mating portion 23 of the GND terminal contact member 2.

[0071] 9, in a bottom view, the other surface (the side facing the test socket mounting board) (e.g., the lower surface) of the housing member 30 has a generally rectangular recessed countersunk portion 34 that expands from the edge of the opening 31 toward the outside of the housing member 30. For example, when the GND terminal contact member 2 is inserted into the other surface (the side facing the test socket mounting board) of the housing member 30, the flange portion 21 of the GND terminal contact member 2 is accommodated in the countersunk portion 34. This makes the other surface (the side facing the test socket mounting board) of the housing member 30 flush.

[0072] 9, the fitted portion 33 has two L-shaped hook portions 332 provided at a distance from each other and facing each other on the edge of a U-shaped hole portion 331. When the two hook portions 332 are provided at a distance from each other, a space 333 is formed.

[0073] The space 333 between the two hook portions 332 is the portion into which the first stopper portion 231 of the fitting portion 23 of the GND terminal contact member 2 is inserted when the GND terminal contact member 2 is inserted from the other surface (the inspection socket mounting substrate side) (e.g., the bottom surface) of the housing member 30.

[0074] That is, the first stopper portion 231 of the fitting portion 23 is inserted into the space 333 of the fitted portion 33, and at the same time, the two hook portions 332 of the fitted portion 33 are inserted into the notches 233 around the first stopper portion 231 of the fitting portion 23. As a result, the fitting portion 23 and the fitted portion 33 are fitted together, and the GND terminal contact member 2 is attached to the housing portion 30.

[0075] 9, the mating portion 33 includes a third stopper portion 334 as a stopper on the housing portion 30 side. The third stopper portion 334 comes into contact with the deformed second stopper portion 232 of the mating portion 23 to prevent the GND terminal contact member 2 from coming off.

[0076] The third stopper portion 334 is provided on the fitting portion 23 and supports the second stopper portion 232 after deformation. Therefore, the third stopper portion 334 is also called a "stopper support portion."

[0077] (A-3) Operation of the Embodiment Next, a housing method for the GND terminal contact member 2 of the embodiment will be described with reference to the drawings.

[0078] Fig. 10 is an explanatory diagram illustrating a housing method for the GND terminal contact member 2 of the embodiment. Fig. 11 and Fig. 12 are cross-sectional views taken along the line CC in Fig. 10(B), each illustrating a method for fitting the GND terminal contact member 2 into the housing.

[0079] As shown in Figures 10(A) and 11(A), the main body 22 of the GND terminal contact member 2 is inserted into the opening 31 of the housing member 30 from the other surface (the inspection socket mounting board side) (e.g., the bottom surface) of the housing member 30.

[0080] 10(B), the main body 22 of the GND terminal contact member 2 is firmly fitted into the opening 31 of the housing member 30, one surface (the side into which the device under test is inserted) (e.g., the top surface) of the flange 21 of the GND terminal contact member 2 fits into the countersunk portion 34 of the housing member 30, and the outermost periphery 25 of the GND terminal contact member 2 fits into the other surface (the side facing the test socket mounting board) of the housing member 30. At this time, one surface (e.g., one surface) of the main body 22 is positioned slightly higher than the position of one surface (e.g., the top surface) of the housing member 30, and the other surface (e.g., the bottom surface) of the GND terminal contact member 2 is approximately flush with the other surface (e.g., the bottom surface) of the housing member 30.

[0081] 10(C) and 11(B), when the main body 22 is inserted into the opening 31, the two hook portions 332 of the fitted portion 33 of the housing member 30 are inserted into the notches 233 of the fitting portion 23 of the GND terminal contact member 2. Note that Fig. 10(C) is a cross-sectional view taken along the arrow CC in Fig. 10(B).

[0082] Next, in the above-described state, in order to prevent the GND terminal contact member 2 from falling off from the housing member 30, as shown in Figure 12, the second stopper portion 232 of the fitting portion 23 of the GND terminal contact member 2 is deformed outward, so that the first stopper portion 231 and the second stopper portion 232 of the fitting portion 23 come into contact with each other.

[0083] At this time, the second stopper portion 232 deformed outward is positioned inside the third stopper portion 334 of the housing member 30, thereby preventing the GND terminal contact member 2 from falling off.

[0084] Here, various methods can be applied to deform the second stopper portion 232 outward, but for example, a jig 9 is inserted from the notch 233 on the other surface (e.g., the bottom surface) of the fitting portion 23 of the GND terminal contact member 2, and the second stopper portion 232 is pressed in and deformed. In this way, by using the jig 9 to deform the second stopper portion 232, the worker can easily perform the work of preventing it from falling off.

[0085] Furthermore, the second stopper portion 232 is deformed outward until it contacts the first stopper portion 231. This allows the second stopper portion 232 to be deformed at a predetermined angle, reliably preventing the GND terminal contact member 2 from falling off. Furthermore, the worker can push the second stopper portion 232 in until he or she feels contact, allowing any worker to perform the work reliably and stably.

[0086] Furthermore, to ensure contact between the deformed second stopper portion 232 and the first stopper portion 231, the tip portion 2311 of the first stopper portion 231 is inclined or tapered so that its thickness decreases toward the tip. For example, in this example, the tip portion 2311 is inclined from one surface (e.g., the upper surface) of the flange portion 21 to the other surface (e.g., the lower surface) of the GND terminal contact member 2, with respect to one surface (e.g., the upper surface) of the flange portion 21. Furthermore, for example, to ensure contact with the tip portion 2311 of the first stopper portion 231, the tip portion 2321 of the second stopper portion 232 may also be inclined to face each other.

[0087] Furthermore, the first stopper portion 231 and the second stopper portion 232 come into contact with each other, thereby allowing the current that flows during the inspection to be conducted.

[0088] The jig 9 may be an existing jig such as tweezers or a pin vise, or may be a dedicated jig. The jig 9 may be inserted manually or by a manufacturing machine including a robot.

[0089] In this way, the fall-off prevention structure by the second stopper portion 232 and the first stopper portion 231, which is formed by deforming the second stopper portion 232, utilizes physical interference between the housing member 30 and the GND terminal contact member 2, and can improve the fall-off prevention force compared to the conventional case. As a result, the second stopper portion 232 cannot be removed unless it is returned to its original shape or destroyed.

[0090] The GND terminal contact member 2 must be replaced when it reaches the end of its life, but this can be achieved by destroying the fall-off prevention structure. Generally, the GND terminal contact member 2 is removed only when it reaches the end of its life, so it is considered that there is no problem even if it is destroyed.

[0091] FIG. 13 is an explanatory diagram showing a state in which the GND terminal contact member 2 according to the embodiment is housed in a housing.

[0092] As shown in FIG. 13, it is assumed that the deformed second stopper portion 232 comes into contact with the first stopper portion 231, and the GND terminal contact member 2 is housed.

[0093] Here, the position of the contact surface between the main body 22 and the GND terminal 81 of the device under test 8 is referred to as the "device contact surface H Ｄ In the housing state, the main body 22 of the GND terminal contact member 2 slightly protrudes from the opening 31, and the position of one surface (for example, the upper surface) of the housing member 30 and the device contact surface H Ｄ The difference (height difference) between the positions is "C1".

[0094] Furthermore, when the GND terminal contact member 2 is housed, the flange portion 21 of the GND terminal contact member 2 fits into the countersink 34, but the flange portion 21 does not contact the surface of the countersink 34, and there is a slight gap between the flange portion 21 and the countersink 34. The length of this gap (length in the height (Z-axis) direction) is referred to as "clearance C2."

[0095] Furthermore, when the GND terminal contact member 2 is housed, there is also a gap between the deformed second stopper portion 232 and the two hook portions 332 of the housing member 30, and the length of this gap (length in the height (Z-axis) direction) is referred to as "clearance C3."

[0096] Conventionally, during testing, the GND terminal contact member may rattle relative to the second wiring pattern 16 on the test socket mounting board 10, causing the GND terminal contact member to float relative to the second wiring pattern 16, which has been an issue with the contactability of the GND terminal contact member. In other words, this has sometimes caused problems with poor conduction.

[0097] In contrast to this, according to this embodiment, the contact properties of the GND terminal contact member are improved as follows.

[0098] As shown in FIG. 13, during testing, the device under test 8 is pressed downward (from the device under test 8 toward the test socket mounting board 10), and a load is applied downward.

[0099] However, when the GND terminal contact portion 2 is housed, there is a clearance (gap) between the GND terminal contact member 2 and the housing member 30, so even if a downward load is applied during inspection, elasticity is generated in an amount equal to the clearance, so even if there is rattle on the other surface (e.g., the bottom surface) of the GND terminal contact member 2, the contact of the GND terminal contact member 2 with the second wiring pattern 16 can be improved.

[0100] In other words, since the contact between the GND terminal contact member 2 and the second wiring pattern 16 on the inspection socket mounting board 10 is good, the conductivity of the electrical signal during inspection is good, and the accuracy of the continuity inspection of the test object 8 is good.

[0101] Furthermore, conventionally, when a resist (insulating member) Ir is present on the inspection socket mounting substrate 10 as shown in FIG. 14A, a gap (space) C4 is generated between the second wiring pattern 16 on the inspection socket mounting substrate 10 and the GND terminal contact member by the thickness of the resist Ir, causing a contact problem.

[0102] However, according to this embodiment, as shown in FIG. 14(B), the GND terminal contact member 2 has clearances (gaps) C2 and C3 with respect to the housing member 30, and elasticity is generated, so that even if a resist Ir exists on the inspection socket mounting board 10, the gap C4 can be absorbed and good contact can be achieved.

[0103] Figure 15(A) is an explanatory diagram illustrating the distance between a conventional GND terminal contact member 2000 and an external terminal contactor 12, and Figure 15(B) is an explanatory diagram illustrating the distance between the GND terminal contact member 2 of the embodiment and an external terminal contactor 12.

[0104] In FIG. 15A, a conventional GND terminal contact member 2000 is housed in a housing member 3000. The position GND of the outermost periphery 25 of the GND terminal contact member 2000 is ＯＵＴ and the tip position PIN of the external terminal contact 12 ｔｉｐ The distance between them is set to "N0".

[0105] During inspection, the position GND of the outermost portion 25 of the GND terminal contact member 2000 ＯＵＴ and the tip position PIN of the external terminal contact 12 ｔｉｐ The closer the distance, the better the electrical characteristics, for example, the better the frequency characteristics.

[0106] However, in the case of the conventional housing method for the GND terminal contact member 2000, the elastomer 4000 is provided on the other surface (for example, the bottom surface) of the housing member 3000 to fix the GND terminal contact member 2000. As described above, since a space is required to provide the elastomer 4000, there are limitations on how the GND terminal contact member 2000 can be installed, and the position GND of the outermost periphery 25 of the GND terminal contact member 2000 is limited. ＯＵＴ and the tip position PIN of the external terminal contact 12 ｔｉｐIt was difficult to reduce the distance between

[0107] In contrast, in this embodiment, as shown in Figure 15 (B), the GND terminal contact member 2 is inserted from the other side of the housing member 30, and the flange portion 21 of the GND terminal contact member 2 fits into the countersink 34, so the elastomer 4000 is not required and there is no need to reserve space for the elastomer 4000.

[0108] Therefore, the position GND of the outermost periphery 25 of the GND terminal contact member 2 ＯＵＴ The position GND of the outermost periphery of the GND terminal contact member can be brought closer to the external terminal contactor 12 side than before. ＯＵＴ and the tip position PIN of the external terminal contact 12 ｔｉｐ The distance between the

[0109] That is, the position GND of the outermost periphery 25 of the GND terminal contact member 2 ＯＵＴ and the tip position PIN of the external terminal contact 12 ｔｉｐ As a result, the electrical characteristics during testing are superior to those of the prior art, and the accuracy of testing the electrical characteristics of the device under test 8 can be improved.

[0110] In other words, by providing the fitting portion 23 and the fitted portion 33 inside the outermost periphery 25 of the GND terminal contact member 2, the position GND of the outermost periphery 25 ＯＵＴ and the tip position PIN of the external terminal contact 12 ｔｉｐ Since the distance between the first and second electrodes can be reduced, the frequency characteristics can be improved.

[0111] In addition, the position of the fitting (i.e., the position of the fitting portion 23 and the fitted portion 33) is not limited to the position described in the embodiment, as long as it is inside the outermost periphery 25, and the number of fittings (i.e., the number of fitting portions 23 and fitted portions 33) is not limited to two, but may be three or more.

[0112] (A-4) Effects of the embodiment As described above, according to this embodiment, the GND terminal contact member to be housed in the inspection socket can be held with a simple operation, and the holding force to prevent it from falling off can be strengthened.

[0113] (B) Other Embodiments Although various modified embodiments have been mentioned in the above-described embodiment, the present invention can also be applied to the following modified embodiments.

[0114] (B-1) FIG. 16 is an explanatory diagram (part 1) for explaining how the fitted portion 33 of the housing member 30 and the fitting portion 23 of the GND terminal contact member 2 are fitted together in the modified embodiment.

[0115] In the above-described embodiment, the second stopper portion 232 is provided in a cantilever shape from one surface (e.g., the top surface) of the GND terminal contact member 2, and an example is given of the case where the second stopper portion 232 extending from the top is deformed outward (see Figure 11).

[0116] In contrast, in the example of Figure 16, the second stopper portion 232A is provided in a cantilever shape from the other surface (e.g., the bottom surface) of the GND terminal contact member 2, and the second stopper portion 232A extending from the bottom is deformed outward, and the second stopper portion 232A approaches the third stopper portion 334A on the housing member 30 side.

[0117] As in the example of FIG. 16, the position where the second stopper portion 232 is disposed may be either above or below the GND terminal contact member 2 .

[0118] Although the case where the second stopper portion 232 is deformed outward is illustrated as an example, the direction of deformation is not limited.

[0119] (B-2) FIG. 17 is an explanatory diagram (part 2) for explaining how the fitted portion 33 of the housing member 30 and the fitting portion 23 of the GND terminal contact member 2 are fitted together in the modified embodiment.

[0120] In the above-described embodiment, the third stopper portion 334 on the housing member 30 side is stepped, and the deformed second stopper portion 232 comes into contact with or approaches the third stopper portion 334 to prevent the GND terminal contact member 2 from coming off (see Figure 11).

[0121] In contrast, in the example of Figure 17, the mating portion 33B is recessed on the inner wall surface of the opening 31 of the housing member 30, and a convex third stopper portion 334B is provided within the mating portion 33B of the recess, and further, the mating portion 23B is also recessed on the side surface of the main body portion 22 of the GND terminal contact member 2, and a second stopper portion 232B is provided as a deformation protrusion extending in a cantilever-like manner from one end of the opening entrance of the mating portion 23B of the recess toward the other end.

[0122] The example shows a case in which the inner wall surface of the opening 31 of the housing member 30 and the side surface of the main body 22 of the GND terminal contact member 2 are aligned, the mating portion 23B and the mated portion 33B are aligned, the second stopper portion 232B, which is a deformation protrusion within the mating portion 23B, is deformed outward, and the second stopper portion 232B comes into contact (locks) with the third stopper portion 334B. In this example, as in the embodiment, the GND terminal contact member 2 can be prevented from falling off.

[0123] (B-3) FIG. 18 is an explanatory diagram (part 3) for explaining how the fitted portion 33 of the housing member 30 and the fitting portion 23 of the GND terminal contact member 2 are fitted together in the modified embodiment.

[0124] In the above-described embodiment, an example is given of a case in which an approximately rectangular GND terminal contact member 2 has mating portions 23 (two in total) on each of the opposing sides, and the second stopper portions 232 of each mating portion 23 are deformed to fit into the corresponding mating portions 33 of the housing member 30.

[0125] In contrast, the examples in Figures 18(A) to 18(D) illustrate a case in which, of the second stopper portions 232 of the two fitting portions 23, only one second stopper portion 232 is deformed, and the other second stopper portion 232C is not deformed.

[0126] 18A, for example, of the second stopper portions 232 of the two fitting portions 23, the second stopper portion 232C of one fitting portion 23C is a protrusion extending outward. The second stopper portion 232 of the other fitting portion 23 is the same as that described in the above embodiment.

[0127] When inserting the GND terminal contact member 2 into the housing member 30, as shown in Figure 18 (B), the second stopper portion 232C is hooked onto the third stopper portion 334 of the mating portion 33C, and then, as shown in Figure 18 (C), the second stopper portion 232 of the other mating portion 23 is aligned with the corresponding mating portion 33, and the second stopper portion 232 is deformed to fit as shown in Figure 18 (D).

[0128] As in this example, it is not limited to deforming all of the second stopper portions 232 of the multiple fitting portions 23, but the GND terminal contact member 2 can also be prevented from falling off by deforming any one of the multiple second stopper portions 232.

[0129] (B-4) FIG. 19 is an explanatory diagram (part 4) for explaining how the fitted portion 33 of the housing member 30 and the fitting portion 23 of the GND terminal contact member 2 are fitted together in the modified embodiment.

[0130] In the examples of Figures 19(A) and 19(B), the GND terminal contact member 2 is inserted into the housing member 30, and then the housing member 30 is slid in the S direction, thereby engaging the engaging portion 23 and the engaged portion 33.

[0131] In this example, the GND terminal contact member 2 can be prevented from falling off by sliding the mating portion 23 and the mated portion 33 together, but a locking mechanism portion 36D is provided to further prevent the GND terminal contact member 2 from falling off.

[0132] By deforming the locking mechanism portion 36D, the movement of the installed GND terminal contact member 2 is prevented, thereby preventing the GND terminal contact member 2 from returning to its original position and making it more firmly prevented from falling off.

[0133] (B-5) FIGS. 20 to 22 are diagrams showing the structure of the GND terminal contact member 2 of a modified embodiment.

[0134] Here, as described above, if an engaging portion (i.e., the position of the engaging portion 23 and the engaged portion 33) is provided inside the outermost periphery 25 of the GND terminal contact member 2, it can also be applied to the conventional anti-detachment structure of the GND terminal contact member.

[0135] 20 shows an example of a fall-off prevention structure in which the GND terminal contact member 2 is fixed with an elastomer 4000. Even in this example, if a fitting portion is provided inside the outermost periphery 25 of the GND terminal contact member 2, the elastomer 4000 may be press-fitted from the other surface (e.g., the bottom surface) of the housing member 30 to prevent the GND terminal contact member 2 from falling off.

[0136] 21 shows an example of a structure for preventing the GND terminal contact member 2 from coming off using an elastically deformable film 5000. Even in this example, if a fitting portion is provided inside the outermost periphery 25 of the GND terminal contact member 2, the elastically deformable film 5000 may be attached to the GND terminal contact member 2 to fix the GND terminal contact member 2 and prevent the GND terminal contact member 2 from coming off.

[0137] 22 shows an example of a fall-off prevention structure in which the GND terminal contact member 2 is fixed with a film 5000 and an adhesive 6000. Even in this example, if a fitting portion is provided inside the outermost periphery 25 of the GND terminal contact member 2, the film 5000 and the adhesive 6000 may be used to prevent the GND terminal contact member 2 from falling off from the other surface (e.g., the bottom surface) of the housing member 30.

[0138] 1: Electrical connecting device, 9: Jig, 10: Test socket mounting board, 11: First wiring pattern, 14: Opening, 14a: Rectangular tapered surface, 16: Second wiring pattern, 17: Recess, 18: Hole, 30: Housing member, 31: Opening, 33 (33B, 33C): Fitted portion, 34: Counterbore, 36D: Locking mechanism, 41: First pressing portion, 60: Base, 61: Cover, 12: External terminal contact, 121: Tip portion, 122: Arc-shaped portion, 123: Support portion, 2: GND terminal contact member, 21: flange portion, 22: main body portion, 23 (23B, 23C): fitting portion, 25: outermost periphery, 231 and 231A: first stopper portion, 232 (232A, 232B, 232C): second stopper portion, 233: hole notch portion, 2000: GND terminal contact member, 2311: tip portion of first stopper portion, 2321: tip portion of second stopper portion, 30: housing member, 331: hole portion, 332: hook portion, 333: space, 334 (3334A, 3334B): third stopper portion, 8...Test object, 81: GND terminal, 81: ground terminal, 82: external terminal, 3000: housing member, 4000: elastomer, 5000: film, 6000: adhesive, 9000: tweezers.

Claims

An electrical connection device that electrically connects a device under test having a ground terminal to an inspection device, a GND terminal contact member that electrically contacts the ground terminal of the device under test to connect to ground; a housing member that accommodates the device under test on one side and accommodates and holds the GND terminal contact member from the other side, allowing contact between the ground terminal of the device under test and the GND terminal contact member through an opening; Equipped with the housing member has a fitted portion on the periphery of the opening, The GND terminal contact member is a plate-shaped main body having contact portions on both sides; a flange portion protruding outward from a side surface of the main body portion; a fitting portion that fits into the fitted portion of the housing member after the main body portion of the GND terminal contact member is inserted into the opening of the housing member from the other side of the housing member; and The fitting portion has a deformation stopper portion that fits into the fitted portion by deformation. An electrical connecting device characterized by:

2. The electrical connecting device according to claim 1, wherein the fitted portion of the housing member has a stopper support portion that supports the deformation stopper portion after the fitting portion is deformed. 　 the fitting portion has a notch provided near the boundary between the main body portion and the flange portion, the deformation stopper portion of the fitting portion is a cantilever-shaped member extending vertically on the side surface of the main body portion at the notch portion, The fitting portion has a pair of hook portions spaced apart from each other on the periphery of the opening, the stopper support portions of the fitted portion are convex portions provided on the pair of hook portions, respectively, facing each other; When housing the housing, the pair of hook portions of the fitted portion fit into the notches of the fitting portion, and the deformation stopper portion, which is a cantilever-shaped member, is deformed and placed inside the stopper support portion, which is an opposing convex portion.

3. The electrical connecting device according to claim 2.

2. The electrical connecting device according to claim 1, wherein the fitting portion has a deformation limiting portion for limiting the position of the deformation stopper portion after deformation. 　 the fitting portion has a notch provided near the boundary between the main body portion and the flange portion, The deformation limiting portion of the fitting portion is formed by extending an end of the plate-shaped main body portion toward the notch portion.

5. The electrical connecting device according to claim 4. 　 A housing member containing a device under test having a ground terminal on one side is connected from the other side. The test piece is housed in the housing member and electrically contacts the ground terminal of the device under test. In the GND terminal contact member for ground connection, the housing member has a fitted portion on the periphery of the opening, The GND terminal contact member is A plate-shaped flange portion; The GND terminal contact member is a main body portion formed to be thicker than the plate-like flange portion and conforming to the shape of the opening; a fitting portion that fits into the fitted portion of the housing member after the main body portion of the GND terminal contact member is inserted into the opening of the housing member from the other side of the housing member; and The fitting portion has a deformation stopper portion that deforms to strengthen the fitting with the fitted portion. A GND terminal contact member characterized by: A housing member for accommodating a GND terminal contact member that electrically contacts the ground terminal of a device under test when testing the device under test, the housing member comprising: The GND terminal contact member has a plate-shaped flange portion, a main body portion formed to be thicker than the plate thickness of the flange portion and corresponding to the shape of the opening, and a fitting portion, The housing member is The device under test is accommodated on one side, and the GND terminal contact member is accommodated on the other side, and the ground terminal of the device under test and the GND terminal contact member can be brought into contact with each other through an opening, The GND terminal contact member has a mating portion provided on the periphery of the opening, which is mated with the mating portion of the GND terminal contact member after the contact portion of the GND terminal contact member is inserted into the opening from the other side. A housing member characterized by:

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