Distribution structure, system of cooling channel element and distribution structure, and arrangement of power modules

Abstract

The invention relates to a distribution structure (86) for a heat sink element for cooling an electric power module (10), wherein the heat sink element (1) comprises - a main part having a first end face (S1) which, in the installed state, faces a surface to be cooled, and having a second end face (S2) opposite the first end face (S1), and - cooling channels (30, 30') which are embedded in the main part between the first end face (S1) and the second end face (S2), wherein: the cooling channels (30, 30') each have a supply portion (31), a redirecting portion (32), and a discharge portion (33); in order to form a general flow profile in the respective cooling channel (30, 30'), the cooling channels (30, 30') are designed to conduct a cooling medium in the supply portion (31) towards the first end face (S1), to transfer it, in the redirecting portion (32), to the discharge portion (33), and to conduct it in the discharge portion (33) towards the second end face (S2); and the heat sink element (1) and the distribution structure (86) extend along a plane parallel to the main extension plane (HSE) and, in an assembled state, are arranged one above the other along a stacking direction (S) perpendicular to the main extension direction (HSE).

Description

[0001] Distribution structure, system consisting of cooling channel element and distribution structure, and arrangement of power modules

[0002] The present invention relates to a distribution structure, a system of cooling channel element and distribution structure, and an arrangement of power modules.

[0003] Power modules are well-established technologies and offer the possibility of providing circuits or electrical connections between electronic or electrical components via corresponding connection pads and conductor tracks. Using ceramic as the insulating element on which the individual metal sections of a component's metallization are mounted has proven particularly advantageous. Such ceramics exhibit comparatively high insulating strength and are especially temperature-resistant. With the increasing demands placed on such power modules and the associated heat generation, ever greater challenges are also being placed on the corresponding cooling systems, which are designed to ensure efficient heat dissipation.

[0004] A classic approach to providing a heat sink element is to attach a cooling structure with cooling fins to the backside metallization of a metal-ceramic substrate. A cooling medium, particularly a coolant, is guided through this arrangement of cooling fins to ensure adequate heat dissipation. It is essential to implement this attachment via the backside metallization, as this metallization is crucial for bonding the metal layer to the ceramic element. Otherwise, especially with a one-sided bond of the metal layer to the ceramic element, the differing coefficients of thermal expansion and the associated thermomechanical stresses during temperature changes, such as cooling after bonding, would cause the metal-ceramic substrate to deflect.

[0005] As a further development of this comparatively simple fin structure, the application of DE 10 2013 109 246 B4 proposes that a large number of microchannels are embedded in a heat sink structure for the area-based cooling of a power module. Essentially loop-shaped paths of the cooling channels guide the cooling medium as close as possible to the area to be cooled in the power module and simultaneously guide it away from the corresponding cooling area.

[0006] In particular, loop-shaped cooling channels are provided as microchannels, which are identical in design and arranged parallel to each other. This advantageously makes it possible to direct the cooling medium precisely and precisely to the surface to be cooled, and in particular to ensure the most homogeneous cooling possible on the cooling side of the heat sink element.

[0007] The present invention aims to supply the cooling channels of a heat sink with a distribution structure that further improves the cooling efficiency of the heat sink.

[0008] The present invention solves this problem with a distribution structure according to claim 1, a system according to claim 9, and an arrangement according to claim 10. The further description, the figures, and the dependent claims contain further non-limiting embodiments of the invention.

[0009] According to a first aspect of the present invention, a distribution structure for a heat sink element for cooling an electrical power module is provided, wherein the heat sink element

[0010] - a basic body with a first end face which, in the installed state, faces a surface to be cooled, and with a second end face opposite the first end face and

[0011] - Cooling channels embedded in the base body between the first end face and the second end face, wherein the cooling channels each have a supply section, a deflection section and a discharge section, wherein the cooling channels are designed to form a general flow pattern in the respective cooling channel, in order to convey a cooling medium in the supply section towards the first end face, in the deflection section transfer it to the discharge section and in the discharge section convey it towards the second end face, wherein the cooling element and the distribution structure extend along a plane parallel to the main extension plane and are arranged one above the other in a composite state along a stacking direction perpendicular to the main extension plane, wherein the distribution structure is designed to guide the cooling medium along a distribution flow direction,wherein the distribution structure has a first deflection element and a second deflection element arranged one behind the other in a direction parallel to the distribution flow direction, wherein the first deflection element and the second deflection element are each designed and intended to direct the cooling medium into the supply section of the respective cooling channel in the assembled state, which are preferably arranged one behind the other in a direction parallel to the distribution flow direction.

[0012] In contrast to the prior art approach, a first and a second deflection element supply the supply sections, which are arranged one after the other along a path parallel to the distribution flow direction, with cooling medium. This represents a departure from the commonly used single ramp-shaped deflection device, which is employed in the prior art to supply a multitude of cooling channels in order to ensure a comparable pressure level for the supply sections arranged in series. Instead, this approach uses diverting elements connected in series, and these are specifically designed so that the pressure level for the supply sections arranged in series does not change significantly or is controlled or manipulated in a targeted manner.Essentially, this means, in particular, that the pressure at the inlet of each feed section does not deviate by more than 15%, preferably more than 10%, and most preferably not more than 5% from the arithmetic mean of the pressures at the corresponding feed sections. It has been shown that even multiple deflection elements are capable of ensuring homogeneous pressure conditions when the cooling channels, especially their feed sections, are arranged one after the other along the distribution flow direction. In particular, it has been found that the pressure loss can be kept as low as possible by this arrangement, which has a beneficial effect on the pumps required to transport the cooling medium through the distribution structure and the heat sink element.

[0013] In particular, the distribution structure is provided to have at least one supply channel that supplies several supply sections, for example, of a set of cooling channels, with the cooling medium. A set of cooling channels comprises, for example, cooling channels that run parallel to each other, are arranged one behind the other along a series direction, and are preferably accessible to the flow along with the distribution structure. In particular, the supply sections of the set of cooling channels are then arranged along the series direction, which runs parallel to the main extension plane and parallel to the distribution flow direction. The supply channel preferably runs parallel to this series direction, and in particular, it is provided that the supply channel supplies the supply sections of two sets of cooling channels, which in turn are arranged adjacent to each other.The adjacent arrangement of the cooling channel sets ensures a two-dimensional arrangement of the cooling channels below the first end face along a plane parallel to the main extension plane, thus enabling the finest, most precise, and, in particular, most homogeneous cooling of the power module. The supply channel, which runs parallel to the series direction of the cooling channel set, defines the direction of the distribution flow, which runs parallel to the main extension plane and, in particular, parallel to the series direction.In particular, two sets of cooling channels, each arranged along the row direction or a direction parallel to the row direction, are arranged, in particular in a mirror image (to a plane perpendicular to the main extension plane and parallel to the distribution flow direction), so that the supply sections of the cooling channels of the adjacent sets of channels are supplied by the common supply channel.

[0014] The distribution structure preferably comprises several supply and discharge channels arranged side by side along the main plane of extension, preferably extending parallel to the direction of the series. The first deflection element and the second deflection element are integrated into a supply channel that provides the supply sections of the cooling channels of one set of cooling channels or of two sets of cooling channels. It is preferably provided that at least one supply section is supplied with the cooling medium through the first deflection element, preferably more than four, more preferably more than eight, and most preferably more than ten supply sections. The distribution structure is preferably made of plastic. For example, it is an injection-molded part or a device manufactured using a 3D printing process.

[0015] It is also conceivable that the cooling channels are supplied by a feed channel in such a way that the feed channel supplies the cooling channels serially, i.e., one after the other, with the cooling medium. Furthermore, it is preferably provided that the first deflection element and the second deflection element are part of a set of deflection elements with more than 5 deflection elements, preferably more than 10 deflection elements, and particularly preferably more than 15 deflection elements.

[0016] Preferably, the first deflection element and / or the second deflection element each have a non-even deflection surface. The deflection surface is the surface of the deflection element that faces the feed section(s) of the heat sink element in the assembled state. In particular, the deflection surface is the surface along which the cooling medium is guided until it finally reaches the feed section.

[0017] In contrast to deflection elements known from the prior art, this design specifically incorporates a curvature designed to generate targeted turbulence at the transition between the distribution structure and the supply section of the cooling channels in the heat sink element. By selecting an appropriate curvature and / or inclination, it is possible to control the degree of turbulence before the cooling medium enters the supply section. This has proven advantageous for pressure conditions and, in particular, for the homogeneity of the supply to the individual cooling channels. Preferably, the inclinations and / or curvatures for the first and second deflection elements differ, or the curvatures of all deflection elements are essentially the same.

[0018] The deflection surface can be non-planar and have a square, cubic, parabolic, or other shape. For example, it can also be spherical or elliptical. Preferably, the deflection element itself is ramp-shaped. In particular, the deflection surface is aligned with and / or flush with the inner wall of the feed section, ensuring a smooth transition between the feed section and the area upstream of the deflection surface when connected.

[0019] Preferably, the first deflection element and / or the second deflection element is designed and intended to supply a set of cooling channels arranged one after the other in a direction parallel to the distribution flow direction. Preferably, the extent of the first deflection element and / or the second deflection element, dimensioned perpendicular to the main extension plane, increases in a direction parallel to the distribution flow direction, and in particular increases continuously. Preferably, the deflection surface is not stepped but continuous.

[0020] For example, it is provided that the first deflection element and / or second deflection element is designed in a wedge shape, in particular curved wedge shape, so that targeted turbulence can be generated by this type of first deflection element and second deflection element, which has proven to be advantageous for supplying the cooling element with the cooling medium.

[0021] Preferably, the first and second deflection elements are arranged at different heights and / or differ, for example, in size. This makes it particularly advantageous to make an ideal or optimized adjustment, depending on the position of the deflection element along the distribution flow direction, in order to influence the supply of the cooling medium to the respective supply sections of the successively arranged supply sections.

[0022] It is also conceivable that, for example, further deflection elements are provided that divert the cooling medium, at least partially, in a direction leading away from the feed section. In particular, it is intended that the deflection elements redistribute the cooling medium within the feed section and, for example, create turbulence there. Preferably, the first and / or the second deflection element is permeable to the cooling medium. For example, the first and second deflection elements are designed to be porous, allowing the cooling medium to pass through them. This is particularly conceivable in cases where the first and / or second deflection element extends over the entire height of the distribution structure or the feed channel, especially along a direction perpendicular to the main plane of extension.In such cases, the porosity or the targeted inclusion of cutouts or free areas can ensure that a cooling medium with a cold liquid is supplied to the second or subsequent deflection element. It is also conceivable that the first and / or the second deflection element has free areas through which a suitable cooling medium can pass and be directed towards the second deflection element instead of into the feed section.

[0023] Preferably, the first deflection element and the second deflection element are arranged along the supply flow direction such that the flow cross-section formed between the first deflection element and the second deflection element remains essentially constant. This also proves to be particularly advantageous for supplying the cooling medium to the supply sections in the heat sink element.

[0024] In particular, it is intended that the distribution structure is made of plastic and / or the heat sink element is made of ceramic and / or metal. Preferably, the distribution structure and the heat sink element are made of different materials.

[0025] It is particularly preferred that the supply channel be bounded by side walls in a plane parallel to the main extension plane (HSE). These side walls are arranged opposite each other and preferably run at an angle to one another. In particular, the side walls are inclined such that the distance between the side walls decreases along the supply flow direction, i.e., the width of the supply channel tapers along the supply flow direction. This ensures that sufficient pressure is present at the downstream end of the supply channel, in particular a pressure sufficient to effectively introduce the cooling medium into the downstream cooling channels. For this purpose, the cooling medium is directed upwards in a direction perpendicular to the main extension plane. It is particularly preferred that the supply channel be closed at the downstream end with a termination side.This creates a kind of dead end into which the liquid is forced, so that it can preferably only escape upwards. For this purpose, it is particularly preferred that the distribution structure has a functional wall in which a free area is embedded, over which the cooling medium is guided to be supplied to the respective feed sections. Such a functional wall has the particular advantage that a deflection area can be incorporated into this end face, especially on the side facing the heat sink element, to properly return the cooling medium to the heat sink element when it returns from the discharge section of the cooling channel to the distribution structure. This advantageously allows the cooling medium to be supplied to the heat sink multiple times.

[0026] Another object of the present invention is a system comprising a heat sink element and a distribution structure according to the present invention, wherein the distribution structure is preferably arranged directly on the second side of the heat sink element. All features described for the distribution structure apply analogously to the system comprising the heat sink element and the distribution structure, and vice versa.

[0027] A further object of the present invention is an arrangement of power modules, wherein the power modules are associated with a system according to the invention consisting of a heat sink element and a distribution structure, wherein, in particular, the distribution structures for the cooling medium are arranged relative to one another and connected to supply lines such that the cooling medium can flow through the distribution structures in parallel. All advantages and properties described for the system and the distribution structure can be transferred analogously to the arrangement of power modules and vice versa. In particular, it is advantageous to control the arranged power modules in parallel, so that it is possible to supply each power module with separate, fresh cooling medium that has not already been used by a distribution structure or a cooling structure in the preceding power module.However, the parallel arrangement proves to be particularly advantageous for reducing pressure loss, since the pump used for supply is only required to pump the cooling medium through one distribution structure and not through three distribution structures arranged one behind the other and connected in series.

[0028] Further advantages and features will become apparent from the following description of preferred embodiments of the invention with reference to the accompanying figures. Individual features of the individual embodiments can be combined with one another within the scope of the invention.

[0029] Figure 1 shows a schematic representation of a power module with a heat sink element for an exemplary embodiment of the present invention.

[0030] Fig. 2: Schematic representation of a power module with a sectional view of a heat sink element for a second exemplary embodiment of the present invention,

[0031] Fig. 3 schematic representation of a power module with sectional view of a heat sink element for a third exemplary embodiment of the present invention,

[0032] Fig. 4 schematic representation of a section for a heat sink element for a power module for a fourth exemplary embodiment of the present invention,

[0033] Figs. 5a to 5c schematic representation of a section for a heat sink element for a power module for a fifth exemplary embodiment of the present invention,

[0034] Fig. 6 schematic representation of a section for a heat sink element for a power module for a sixth exemplary embodiment of the present invention

[0035] Fig. 7 schematic representation of a system consisting of a heat sink element and

[0036] Distribution structure according to a first exemplary embodiment of the present invention in perspective view (top) and section view (bottom)

[0037] Fig. 8 schematic representation of a system consisting of a heat sink element and

[0038] Distribution structure according to a second exemplary embodiment of the present invention

[0039] Fig. 9 schematic representation of an arrangement of power modules according to one aspect of the present invention and Fig. 10 schematic representation of a system consisting of a heat sink element and

[0040] Distribution structure according to a third exemplary embodiment of the present invention

[0041] Fig. 11 schematic representation of an arrangement of several distribution structures according to a further preferred embodiment

[0042] Figure 12 shows detailed views of a distribution structure from Fig. 11 with a heat sink element and

[0043] Fig. 13 shows a further detailed view of the distribution structure from Figures 11 and 12.

[0044] Figure 1 shows a power module 10 for a preferred embodiment of the present invention. Such a power module 10 comprises a component metallization 20, a ceramic element 25, and a heat sink element 1. The component metallization 20 is preferably a structured metal layer in which conductive traces and / or electronic connections are formed by the structuring. This makes it possible to use the component metallization 20 for circuits or circuit systems. For this purpose, for example, electrical components or wire bonds are connected to the connection surfaces and / or conductive traces of the component metallization 20. The structuring (not shown) provides electrical insulation between the individual metal sections in the component metallization 20.For this purpose, the structuring extends to a ceramic element 25, which serves as an insulating element for the insulation between the metal sections, which in turn are attached to the ceramic element 25.

[0045] The main task of the heat sink element 1 is to ensure that the heat generated during the operation of the power module 10 is effectively dissipated at the component metallization 25 in order to prevent damage to the power module 1 and, in particular, to avoid compromising or reducing its performance. In the power modules 1 described here, especially with the material chosen for the insulating element, it has proven to be a common approach to bond a metal layer, which is bonded to the ceramic element 25 to form the component metallization 20, together with a backside metallization on the ceramic element 25 opposite the component metallization 20.This serves the purpose of counteracting thermomechanical stresses on the front face of the ceramic element 25, which arise due to the different coefficients of thermal expansion of the ceramic and the metal and would lead to deflection without back-side metallization. Without appropriate compensation, the differing coefficients of thermal expansion, especially during temperature changes in the bonding process, would cause deflection of the metal-ceramic substrate. Such compensation is therefore ideally achieved when the metal layer bonded to the component side is essentially symmetrical to the back-side metallization, i.e., comparable or identical, particularly with regard to its dimensions, i.e., thickness and extent. In this way, essentially mutually compensating thermomechanical stresses act on the ceramic element 25 on opposite sides.

[0046] In current technology, it is common practice to subsequently attach a cooler to the corresponding backside metallization to ensure adequate cooling performance for the power module 10. This is typically done on the customer's side and is separate from the manufacturing process of the metal-ceramic substrate. This not only results in an undesirable additional work step but can also affect the maximum possible efficiency and cooling performance of a heat sink element 1 and thus the overall performance of the power module 10, especially if optimal optimization is not achieved.

[0047] Preferably, the heat sink element 1 is directly connected to the ceramic element 25. In particular, it has been found that it is possible to connect a heat sink element 1 to the ceramic element 25 without causing deflections that would render the power module 1 unusable or reduce its power efficiency. Specifically, the component metallization 20, the ceramic element 25, and the heat sink element 25 each extend along a plane parallel to the main extension plane HSE and are stacked one above the other in a stacking direction S perpendicular to the main extension plane HSE. The ceramic element 25 is positioned between the component metallization 20 and the heat sink element 1.The component metallization 20 has a first thickness D1 dimensioned in the stacking direction S, and the heat sink element 1 has a second thickness D2 dimensioned in the stacking direction S. The ceramic element 25 has a third thickness D3 dimensioned in the stacking direction S. In the embodiment shown in Figure 1, the heat sink element 1 has a second thickness D2 that is greater than the first thickness D1 of the component metallization 20. Such a dimensioning of the heat sink element 1 and the component metallization 20 would normally lead to considerable deflection due to the significantly higher material accumulation on the back side of the ceramic element 25, especially if the heat sink element 1 with the second thickness D2 is directly and immediately connected to the back side of the ceramic element 25.It has now surprisingly been found that it is possible to design the heat sink element 1 such that the deflection of the power module 10 is more than five times smaller, preferably more than eight times smaller, and particularly preferably more than ten times smaller than the deflection of a reference power module with dimensions corresponding to those of the power module 10, wherein the reference power module is designed with a solid heat sink element 1. For example, to reduce the deflection of the power module 10 compared to a reference power module of the same dimensions, it is provided that a plurality of cooling channels 30, 30, in particular microchannel cooling channels, embedded in the heat sink element 1, ensure that a corresponding reduction in the deflection of the power module 10 is achieved.

[0048] In particular, it has been found, for example, that this method reduces deflection and also allows for a direct connection of the heat sink element 1 to the back of the ceramic element 25. For this purpose, it is particularly preferred, for example, that the component metallization 20 has a first mass and the heat sink element 1 has a second mass, wherein the second mass deviates from the first mass by less than 160%, preferably less than 120%, and most preferably less than 80%. In other words, despite the significant differences between the first thickness D1 and the second thickness D2, it is proposed that the heat sink element 1 be designed such that the mass distribution on the front and back of the ceramic element 25 are thermomechanically comparable, for example, by incorporating a sufficiently large number of cooling channels into the heat sink element 1.By additional geometric distributions of the respective mass, it is also advantageously possible to create corresponding leverage effects, which are likewise beneficial in compensating for any deflection. The person skilled in the art will draw upon relevant empirical data and / or simulations that result in a corresponding mass distribution within the heat sink element 1, which in turn reduces the deflection of the power module 10. An exemplary design of the heat sink element 1 can be seen in part in Figures 5b and 5c. It is evident that further material distributions are conceivable and should therefore also be included here.As a departure from the usual approach, it is proposed that the heat sink element 1 be directly and immediately bonded to the ceramic element 25, preferably in a joint bonding process with the metal layer provided for the component metallization 20, by designing and shaping the mass distribution on the back side of the ceramic element 25 for the heat sink element 1 accordingly to reduce deflection. It is also preferably provided that a first extension A1 of the component metallization 20, dimensioned substantially parallel to the main extension plane HSE, is in a ratio to a second extension A2 of the heat sink element 1, also extending parallel to the main extension plane HSE. Preferably, the ratio of the first extension A1 to the second extension A2 assumes a value between 0.9 and 1, more preferably between 0.95 and 1, and most preferably between 0.98 and 1.In particular, the manufactured metal-ceramic substrate or power module 10 is initially a large card, from which individual metal-ceramic substrates or power modules 10 are then produced by separation, preferably along a predetermined separation point, which was created, for example, with an ultrashort pulse laser. The large card is characterized in particular by the fact that it already has an attached heat sink element.

[0049] Figure 2 shows a power module 10 for an exemplary embodiment. In particular, Figure 2 illustrates an exemplary arrangement of possible cooling channels 30, 30'. Specifically, Figure 2 shows two different possible types of cooling channels 30, 30' with two different general flow patterns. In principle, it is preferred that the cooling channels 30, 30' in a power module 10 are of the same type, and in particular only of a single type. To illustrate different types of cooling channels 30, these are simplified and shown in the common heat sink element 1 of Figure 2. The heat sink element 1 preferably has a first end face S1 and a second end face S2. The first end face S1 and the second end face S2 are opposite each other along the stacking direction S in the power module 10, and the first end face S1 faces the ceramic element 25 and thus the surface to be cooled.The cooling channel 30, 30' is embedded or integrated into the base body of the heat sink element 1 and is arranged between the first end face S1 and the second end face S2. In the embodiment shown in Figure 2, the heat sink element 1 has an inlet opening 41 on the second end face S2, as well as an outlet opening 42, which is also preferably arranged in the second end face S2. A cooling medium, in particular a fluid cooling medium, is introduced into the cooling channel 30, 30' via the inlet opening 41, while the medium used for cooling leaves the heat sink element 1 via the outlet opening 42. The cooling channel 30 preferably has a feed section 31, a deflection section 32, and a discharge section 33. The feed section 31 guides the cooling medium along a flow direction SR to a deflection section 32.The feed section 31 directs the cooling medium in particular towards the first end face S1 of the cooling element 1. The deflection section 32 in turn directs the cooling medium along a flow direction SR to the discharge section 33 and the discharge section 33 preferably directs the cooling medium to the second opening 42, i.e. in particular towards the second end face S2.

[0050] Furthermore, it is preferably provided that the deflection section 32 runs essentially parallel to the first end face S1 of the heat sink element 1 in sections, in order to ensure the most even cooling possible. In other words, the actual cooling effect, or a large contribution to the cooling effect, originates from the deflection section 32, which is preferably arranged as close as possible to the ceramic element 25. Preferably, the distance A3 between the deflection section 33 and the ceramic element 25, measured in the stacking direction S, is less than 250 pm, more preferably less than 150 pm, and most preferably less than 100 pm. The successive flow directions SR in the feed section 31, deflection section 32, and discharge section 33 preferably define a general flow pattern in the cooling channel 30, 30'.

[0051] In the embodiment shown on the left, the general flow pattern is essentially U-shaped, while in the embodiment of a cooling channel 30, 30' shown on the right, an essentially V-shaped pattern is depicted. Here, the flow direction SR in the inlet section 31 is inclined or angled relative to a flow direction SR in the outlet section 33, with the angle between the flow directions SR in the inlet section 31 and outlet section 33 preferably being between 0° and 90°, more preferably between 0° and 60°, and most preferably between 0° and 45°. In particular, it has been found to be advantageous to control, and especially to increase, the flow velocity in the deflection area 32. For this purpose, it is particularly preferred that the flow cross-sections are adapted accordingly along the flow path during the flow.It has been found to be particularly advantageous that a first flow cross-section Q1, dimensioned perpendicular to the flow direction SR, in the feed section 31 is larger than a second flow cross-section Q2, dimensioned perpendicular to the flow direction SR, in the deflection section 32. In the embodiment of the cooling channel 30 shown on the left in Figure 2, the respective flow cross-sections are oriented perpendicular to each other due to the general flow pattern. Preferably, the first flow cross-section Q1 is located in the region of the first opening 41. Furthermore, it is preferably provided that a third flow cross-section Q3 of the discharge section 33, dimensioned perpendicular to the flow direction SR, is formed, particularly in the region of the second opening 42.It has proven particularly advantageous, especially for pressure drops along the flow path, if the ratio of the second flow cross-section Q2 to the first flow cross-section Q1 is less than 0.5, preferably less than 0.4, and most preferably less than 0.3. The flow cross-section is defined in particular as the area bounded by the respective channel walls associated with the cooling channel 30, 30'. It is also conceivable that the first flow cross-section Q1 decreases in the direction of the deflection section 32, in particular gradually and / or continuously, and / or that the third flow cross-section Q3 increases in the direction of the second opening 42, in particular continuously and / or gradually.

[0052] Furthermore, it is preferably provided that the third flow cross-section Q3 is larger than the second flow cross-section Q2 and / or substantially corresponds to the first flow cross-section Q1. Correspondence, to those skilled in the art, means in particular that the deviation between the first flow cross-section Q1 and the third flow cross-section Q3 is not greater than 10%, preferably not greater than 5%, and most preferably not greater than 2.5% of the mean value of the first flow cross-section Q1 and the third flow cross-section Q3. In particular, those skilled in the art also understand a flow cross-section to be an area, so that the length of the cross-section shown here in Figure 2 represents only a part of the flow cross-section to be considered. Figure 3 shows a power module 10 for a third exemplary embodiment of the present invention.In particular, the power module 10 shown here is characterized by a heat sink element 1 in which the cooling channel 30, 30' is designed such that a cross-flow section 50 is formed. The cross-flow section 50 is arranged between the second end face S2 and the deflection section 32 and connects the supply section 31 with the discharge section 33, specifically upstream of the deflection section 32, i.e., before a portion of the cooling medium reaches the deflection section 32. As a result, a portion of the cooling medium is deflected and discharged into the discharge section 33 before reaching the deflection section 32. Surprisingly, it has been found that this increases the overall cooling efficiency of a power module 10. In particular, it has been found that this improves the thermal resistance of the heat sink element 1.Furthermore, the power module of Figure 3 is characterized in that the heat sink element 1 is flush with the ceramic element 25 at its outer circumference, preferably completely. This is also a preferred embodiment for the embodiments shown in the other figures.

[0053] Figure 4 shows an arrangement of a first layer 60 and a second layer 70, which are arranged one above the other along a stacking direction S to form part of a cooling channel structure in the heat sink element 1. In particular, it is provided that the first layer 60 and / or the second layer 70 have web elements 61, 71. These web elements 61, 71 preferably connect adjacent surface sections 62, 72, wherein the surface sections 62, 72 of the superimposed first layer 60 and second layer 70 are particularly preferably arranged congruently, especially to form a post section 67 in the heat sink element 1. Such post sections 67 prove to be particularly advantageous because they additionally serve to stabilize the heat sink element 1, especially along a direction parallel to the stacking direction S.In the embodiment shown in Figure 4, the surface sections 62, 72 are essentially square. It is also conceivable that a circular or elliptical geometry is chosen and / or a rectangular and / or a polygonal cross-sectional shape. Furthermore, it is preferred that the web elements 61, 71 connecting the surface sections 62 do not run in a straight line. In the embodiment shown in Figure 4, the web element 61, 71 is angled, in particular forming an angle between 80° and 140°, preferably between 90° and 120°, and most preferably between 90° and 100°. In other words, the web element 61, 71 comprises two sub-segments that run at an angle to each other. Alternatively, it is conceivable that a curved profile is provided for the web element 61, 71 as a non-straight line.

[0054] Figure 4 shows a top view of a first layer 60 and a second layer 70 arranged one above the other along the stacking direction S. By appropriately dimensioning or designing the first layer 60 and second layer 70, or by appropriately aligning them, the web elements 71 can be oriented in opposite directions. In particular, they are designed such that, in a top view, the web elements 61, 71 form an opening bounded by the web elements 61 of the first layer 60 and the web elements 61, 71 of the second layer 70 in a viewing direction parallel to the stacking direction S. This opening forms the transverse flow section 50. In the embodiment shown in Figure 4, this opening is particularly diamond-shaped.It is also conceivable that other geometries, in particular polygonal, elliptical or circular geometries, are designed here.

[0055] The term web element 61, 71 refers in particular to such interconnected subsections extending along a plane parallel to the main extension plane, in a position that has a preferred extension direction along which the web elements 61, 71 have an extent several times, preferably at least five times, greater than a web width B measured perpendicular to the preferred extension direction. The surface sections 62, 72 either have no preferred extension direction or, at most, have extensions along the preferred extension direction that do not exceed five times the web width B.

[0056] In particular, in the embodiment shown in Figure 4, the surface sections 62, 72 are arranged in a checkerboard pattern relative to each other, and the respective surface sections 62, 72 are connected to the adjacent surface sections 62, 72 on all sides, i.e., on all four possible sides, via the web elements 61, 71. Preferably, the first layer 60 and / or the second layer 70 are designed in a grid-like configuration.

[0057] Figures 5a to 5c illustrate another possible design for a heat sink element 1 according to an exemplary embodiment. In particular, Figure 5a shows a top view of a first layer 60 and a second layer 70 arranged one above the other along the stacking direction S. In principle, it is conceivable that the first layer 60 and the second layer 70 – this applies to the embodiment shown in Figure 4 and the embodiment shown in Figures 5a to 5c – are arranged alternately multiple times above one another. Alternatively, it is conceivable that a first number of first layers 60 are arranged one above the other and a second number of second layers 70 are arranged one above the other, which in turn are arranged one above the other. In other words, a first number of first layers 60 is arranged over a second number of second layers 70. This makes it possible to define the corresponding position of a cross-sectional flow section 50.The number of cross-flow sections 50 is to be determined. The first number of first layers 60 need not correspond to the second number of second layers 70. It is particularly preferred that a heat sink element 1 is constructed from at least a plurality, preferably at least five, particularly preferably at least eight, and particularly preferably at least ten individual layers, wherein the plurality of individual layers particularly preferably comprises only the first layer 60 and the second layer 70 to form the feed section 31 and the discharge section 33. The deflection section is preferably formed by a third layer 80 and / or a fourth layer (not shown) or a plurality of third layers 80 and / or fourth layers.The first layer 60, the second layer 70, the third layer 80 and / or the fourth layer differ, for example, with regard to the orientation of the web elements 61, 71 and / or the number of web elements 61, 72 and / or the size of the web elements 61, 71 and / or with regard to the arrangement, size and / or number of the surface sections 62, 72. The alternating arrangement thus creates an uneven inner surface of the cooling channel, which promotes turbulence in the cooling medium.

[0058] Figure 5b shows a first perspective view of the stack consisting of the first layer 60 and the second layer 70. The post section 67, which preferably extends from the first end face S1 to the second end face S2, and in particular extends continuously, is also clearly visible. Furthermore, it can be seen that several superimposed cross-flow sections 50 are formed by the superimposed web elements 61, 71. Figure 5c shows another perspective view of the heat sink element 1. In particular, the embodiment shown in Figures 5a to 5c differs from that shown in Figure 4 in that surface sections 62, 72 are provided which are free of connection to an adjacent surface section 62, 72 in at least one direction.Preferably, surface sections 62, 72 are connected to adjacent surface sections 62, 72 along a first direction via web elements 61, 71, and are not connected to adjacent surface sections 62, 72 along a second direction, wherein the first and second directions lie in a plane parallel to the main extension plane HSE and are arranged at an angle to each other, in particular at right angles to each other. This advantageously defines, and in particular enlarges, the flow cross-section Q1 and / or the third flow cross-section Q3, in order to generate a correspondingly larger first flow cross-section Q1 or third flow cross-section Q3 compared to the second flow cross-section Q2 in the deflection section 32.It is particularly preferred if, by appropriately stacking the individual layers, feed sections 31 and discharge sections 33 are realized, wherein the deflection sections 32 are designed such that, for example, in the case of two adjacent cooling channels 30, 30', the discharge sections 33 are arranged side by side. In other words, two discharge sections 33 of two adjacent cooling channels 30, 30' lie between two feed sections 31 of the adjacent cooling channels. This particularly simplifies the discharge of the cooling medium via a corresponding 30, 30' distribution structure, since both discharge sections 33 can share a common outlet in the distribution structure. For example, it is also conceivable that the first layer 60 and the second layer 70 are identical in construction and are stacked and joined at a twist relative to each other, preferably rotated by 180°.It is also conceivable that the first layer 60 and the second layer 70 are offset from each other in a direction parallel to the main extension plane HSE, preferably by a distance which assumes a value between 0.01 mm and 0.5 mm, preferably between 0.01 mm and 0.25 mm and particularly preferably between 0.01 and 0.15 mm.

[0059] Figure 6 shows another possible design for a heat sink element 1 according to an exemplary embodiment. In this embodiment, only first layers 60 are stacked on top of each other to form the inlet section 31 and the outlet section 33. The web elements 61 are straight and connect the checkerboard-like arranged surface sections 62. This results in rectangular recesses that define a first and third flow cross-section in the inlet section 31 and the outlet section 33, respectively. Such a design proves to be particularly advantageous because it is relatively easy to implement. In the embodiment shown in Figure 6, several third layers 80 are arranged on top of each other to define a deflection section 32 with their superimposed recesses.The essentially identical third layers 80 are arranged one above the other in such a way that their recesses are aligned. This results in essentially smooth inner surfaces in the deflection area 32. It is advantageous if the third layers 80 are offset from one another and / or a fourth layer (not shown) is provided to create a profile on the inner surface in the deflection section 32, or in the transition from the feed section 31 to the deflection section 32, and / or in the transition from the deflection section 32 to the discharge section 33. This creates a targeted turbulence in the area that is particularly important for heat transfer.Preferably, the third layer 80 differs from the first layer 60 and / or second layer 70 in that at least one web element 61, which connects adjacent surface sections 62, is omitted compared to the first layer 60 and / or second layer 70, in particular to realize a larger recess that forms the deflection section 32.

[0060] Figure 7 schematically shows a system consisting of a power module 10 and a distribution structure 86. In particular, the power module 10 comprises one of the heat sink elements 1, as illustrated by way of example in Figures 1-6. Such heat sink elements 1 have several cooling channels 30, 30', each with a feed section 31, a deflection section 32, and a discharge section 33. Specifically, it is provided that the cooling channels 30, 30' of a set of cooling elements 30, 30' are arranged along a row, i.e., along a row direction, and preferably several sets of these cooling channels 30, 30' arranged along a common row direction are arranged side by side. This results in a two-dimensional arrangement of the cooling channels 30, 30' below a cooling surface formed at the first end face S1.Preferably, the distribution structure 86 has a supply channel 81 that supplies at least one set, preferably two adjacent sets, of cooling channels 30, 30' with the cooling medium. In particular, the supply channel 81 runs substantially parallel to the series direction of the cooling channels 30, 30' of the set of cooling channels. Preferably, the cooling channels 30, 30' of the two adjacent sets of cooling channels 30, 30' are oriented in a mirror-image fashion to each other, so that one supply channel 81 can supply the adjacent supply sections 31 of the cooling channels 30, 30' of the different sets of cooling channels 30, 30'. The cooling medium flowing through the respective channels 30, 30' of the sets of cooling channels 30, 30' is deflected into a discharge channel after passing through the supply sections 31, deflection sections 32, and discharge sections 33.discharged into discharge channels which are arranged in the main extension plane HSE parallel and adjacent to the supply channel 81.

[0061] In the section plane shown in Figure 7, this plane runs along a feed channel 81, so that in this schematic representation, two cooling channels 30, 30' of a set of cooling channels 30, 30' are shown in the cooling element 1. In other words, the section plane runs essentially perpendicular to the skin extension plane HSE and parallel to the row direction along which the cooling channels 30, 30' are arranged one after the other in the set of cooling channels 30, 30'. In the sectional view shown in Figure 7, the section plane runs, in particular, at the level of the respective feed sections 31, so that deflection section 32 and discharge section 33 do not lie in this section plane, but rather the cooling channel 30, 30' or the respective cooling channels 30 run in a direction that is oblique to the selected section plane, in particular perpendicular to it.

[0062] While it was common practice in conventional engineering to supply the cooling medium to the successively arranged supply sections 31 of the individual cooling channels 30, 30', for example by means of a ramp extending essentially over the entire supply channel 81, it is preferred that a first deflection element 2 and a second deflection element 2' are arranged successively along a distribution flow direction VS. Preferably, the first deflection element 2 and / or second deflection element 2' supply several, preferably more than eight, particularly preferably more than 12, and particularly preferably more than 16, supply sections 30 with the cooling medium. The distribution flow direction VS preferably runs along a direction parallel to the main extension plane HSE.The first deflection element 2 and / or second deflection element 2' are preferably configured such that the cooling medium, which is conveyed along the distribution flow direction VS, is deflected in a direction towards the second end face S2 of the heat sink element 1, in particular towards the feed section 31. The first deflection element 2 and / or second deflection element 2' thus ensure that the cooling medium is deflected into the feed section 31. Preferably, the distribution structure 86 and the heat sink element 1 are joined and / or configured such that a deflection surface 3 in the area of ​​the interface between the heat sink element 1 and the distribution structure 86 is flush with an inner wall of the feed section 31 and / or is at least aligned with it, in particular along a direction running obliquely or, more preferably, perpendicularly to the main extension plane HSE.

[0063] Furthermore, it has proven advantageous if the first deflection element 2 and / or second deflection element 2' is wedge-shaped and / or curved. In particular, it is advantageous if the deflection surface 3 facing the feed section 31 is curved or non-linear. For example, it can be square, cubic, or partially circular. It has been found that this makes it advantageous to selectively generate turbulence in the area of ​​the transition from distribution structure 86 to the feed section, whereby the turbulence has a positive effect on the flow into the cooling channels 30, 30', especially for the homogeneity of the inflow along the distribution flow direction VS for the various feed sections 31 of the cooling channels 30, 30' of the set of cooling channels 30, 30'.In particular, it is provided that, viewed in the distribution flow direction VE, the extent of the deflecting element 2, 2', dimensioned perpendicular to the main extension plane HSE, increases. An extent dimensioned perpendicular to the distribution flow direction VS and parallel to the main extension plane HSE preferably remains substantially constant or, in particular, decreases. The feed channel 81 is further preferably bounded by two side walls. The side walls, in particular, define a volume in which the first deflecting element 2 and the second deflecting element 2' are arranged. In particular, the distribution structure 86 comprises several feed channels 81 and discharge channels, which are separated from one another by the side walls and, in particular, are arranged alternately side by side.

[0064] In the embodiment shown in Figure 7, the ceramic element 25 projects in a direction parallel to the main extension plane HSE relative to the distribution structure 86 and the heat sink element 1. It is also conceivable that the heat sink element 1, distribution structure 86, and ceramic element 25 are flush with each other and / or at least partially interlock.

[0065] Figure 8 shows a comparable setup for a power module 10 with a heat sink element 1 and a distribution structure 86. The embodiment shown in Figure 8 differs substantially from that shown in Figure 7 because the first deflection element 2 and the second deflection element 2' differ from each other. In particular, they differ in size and / or position, so that in the exemplary embodiment shown, the second deflection element 2' can, for example, accommodate a lower-lying portion of the distribution flow in the feed channel 81. It is also conceivable that the second deflection element 2' and / or the first deflection element 2 is composed of several partial deflection elements arranged one behind the other, so that partial deflection already takes place before the actual feeding into the feed section 31.It is also conceivable to introduce vortex elements in a targeted manner, i.e., elements that specifically generate vortices before the coolant makes the transition from distribution structure 86 to feed section 31.

[0066] Figure 9 illustrates an arrangement of power modules 10 – in the depicted embodiment, three power modules 10. In particular, each of these power modules 10 comprises a heat sink element 1 and a distribution structure 86, as shown, for example, in Figures 7 and 8. Specifically, contrary to the usual practice in the prior art, the three power modules 10 are supplied with the cooling medium in parallel. In other words, the respective distribution structures 86, which are assigned to the corresponding power modules 10, are connected to lines in such a way that the distribution structures 86 can be circulated through in parallel. This reduces the required pumping power for pumping the cooling medium through the distribution structure 86.

[0067] Figure 10 shows a combination of distribution structure 86 and heat sink element 1 according to another embodiment of the present invention, wherein, in the assembled state, distribution structure 86 and heat sink element 1 form a multiple loop. The section plane shown here runs along the path of a cooling channel or several cooling channels 30, 30' arranged one behind the other. The section plane thus passes, in particular, through the feed section 31, deflection section 32, and discharge section 33. The cooling medium is fed into and extracted from the heat sink element 1 multiple times, particularly by the distribution structure 86, resulting in a meandering flow in which the path of the cooling medium alternates between the heat sink element 1 and the distribution structure 86. In particular, the cooling medium exiting the discharge section 33 is introduced into the feed section 31 of another cooling channel 30, 30' located downstream.Preferably, this combination of distribution structure 86 and heat sink element 1 is used in the embodiment shown in Figure 10. The walls shown in the exemplary embodiment, which run perpendicular to the section plane, form the first deflection element 2 and the second deflection element 2'. Figure 11 shows an example of a distribution structure 86 according to a further preferred embodiment of the present invention. In particular, this figure shows the three distribution structures 86, which in the embodiment shown in Figure 10 are arranged below the respective power modules 10 and their heat sink elements 1.The distribution structures 86 shown here are not limited to use with the three power modules from Figure 10, but can also be used independently of the arrangement of the power modules 86, either for a single power module 10 or for cooling other electrical components on their own. In particular, the distribution structure 86 can be used with the items from the preceding figures. Specifically, the distribution structure 86 comprises a first deflection element 2 and a second deflection element 2', which are not shown or visible in Figure 11. The distribution structure 86 shown here can also be used for a single heat sink element 1 with a power module 10. The distribution structure 86 is characterized in particular by the fact that its side walls 75, which define the feed channel 81, areThe side walls 75 are bounded laterally in a direction parallel to the main extension plane HSE and are aligned with each other in such a way that they approach each other in a direction parallel to the supply flow direction VS. In other words, the supply channel 81 tapers along the supply flow direction VS, in particular by a decrease in the distance between the side walls 75. Specifically, the side walls 75 are designed to be straight and, in particular, inclined in a direction that defines the general direction of the supply flow VD. It is also conceivable that these side walls 81 are bent or at least curved. In particular, this results in a substantially trapezoidal or V-shaped configuration of the supply channel 81 in a plane parallel to the main extension plane HSE. Specifically, the supply channel 81 is arranged in such a way as to...It is designed such that it forms a dead end for the further flow of the cooling medium along a flow parallel to the supply flow direction VS at its downstream end, so that the liquid is forced upwards out of the plane of the image to enter the cooling channels 30, 30'. There the cooling medium is deflected and redirected back into the distribution structure 86.

[0068] Furthermore, it is preferably provided that the arrangement of power modules 1 is equipped with a piping system, whereby the supply channels 81 and discharge channels 82 are in fluid communication with an inlet flow ES and / or an outlet flow AS. The inlet flow ES is particularly intended to introduce the cooling medium into the respective distribution structures 86 via preferably several guide elements 76, especially as already described in the context of Figure 10. In particular, it is provided that several guide elements 76 are provided for a distribution structure 86, which differ in particular in their size and / or position and are specifically intended to introduce the cooling medium into the respective supply channels 81 and thus at least support or promote the parallel flow through the distribution structures 86.In particular, the cooling medium is deflected here, especially by an angle greater than 60° and particularly preferably approximately 90°. Here too, the surfaces provided for guiding the cooling medium are curved, so that the cooling medium is introduced into the respective supply channel 81 via the curved surfaces.

[0069] Preferably, the side walls 75 of the supply channel 81 are inclined at an angle between 0° and 90°, particularly preferably between 20° and 70°, and most preferably between 45° and 70°, to a general direction of the supply flow VS. The supply flow direction VS is, in particular, the direction of the flow that is formed directly below the heat sink element 1.

[0070] Preferably, it is further provided that adjacent distribution structures 86 are connected to each other via a coupling element 78 in the arrangement of distribution structures 86. For example, the distribution structures 86 are each connected to the coupling element 78 via a positive-locking and / or friction-locking and / or material-locking connection, preferably detachable. In the illustrated example, this is a plug-in system in which complementary recesses and projections interlock. These are formed, for example, in the corresponding corner positions on the distribution structure 86 and / or the coupling element 78. This allows for easy assembly and replacement, in particular without damaging or destroying other distribution structures 86 or coupling elements 78.

[0071] It has proven particularly advantageous to taper the size or width of the feed channel 81 in the direction of the supply flow VS, especially because this ensures that the pressure at the end of the feed channel 81 for the downstream feed sections 31 in the cooling channels 30, 30' is the same as that found further upstream in the same feed channel 81. This ensures the most homogeneous pressure distribution possible at the feed sections 31 along the feed channel 81. This also guarantees correspondingly homogeneous cooling on the cooling side of the power module 10.

[0072] Figure 12 shows various views of a distribution structure 86 from Figure 11 together with the corresponding heat sink element 1 in three different perspectives. The top view shows a top view (such that the heat sink element 1 is arranged behind the distribution structure 86). The middle view shows a side view, and the bottom view is a perspective view. In particular, the distribution structure 86 is provided with a functional wall 72 on its side facing the heat sink element 1 in the installed state. Preferably, the functional wall 72 has a free area 73, which can, for example, be designed as a rectangular cutout or window. Other geometric shapes for the free area 73 are also conceivable.In particular, it is provided that the area of ​​the free space 73 is smaller than the area allocated to the feed channel 81 in a plane parallel to the main extension plane HSE, namely the feed channel 81 which is formed below this free space 73.

[0073] The cooling medium is distributed to the individual cooling channels 30, 30' via the free space 73 in the functional wall 72, in particular to the respective supply sections 31 of two adjacent sets of cooling channels 30, 30', which, in the assembled state, are located above the free space 73, which in turn is located above the supply channel 81. A corresponding free space 73 is also provided in the functional wall 72 above the discharge channel 83. Preferably, at least smaller additional free spaces 73' are also provided, in which only one set of cooling channels 30, 30' is supplied with the cooling medium, in particular at the edge of the power module 10 or the heat sink element 1.

[0074] Figure 13 shows a side view of the heat sink element 1 and the distribution structure 86, specifically in an interface area between the two connected components. Preferably, the distribution structure 86 is designed such that it also has a deflection area 74 on its upper surface. This deflection area 74 is configured in particular such that the cooling medium returning from the heat sink element 1 is deflected by the deflection area 74 back into a further feed section 31 of an adjacent cooling channel 30, 30' of the heat sink element 1. A corresponding recess serves, for example, as the deflection area 74 and is formed, in particular, on the functional wall 72 of the distribution structure 86, especially as a groove-shaped structure. In the figure, the arrows without reference numerals indicate the direction followed by the flow of the cooling medium.The deflection areas 74 make it advantageously possible to realize a meandering course through distribution structure 86 and cooling element 1 for the cooling medium, in which the cooling medium changes several times or at least once between cooling structure element 1 and distribution structure 86.

[0075] List of reference symbols:

[0076] 1 heat sink element

[0077] 2 first deflection element

[0078] 2' second deflection element

[0079] 3 Deflection area

[0080] 10 Power module

[0081] 20 Component metallization

[0082] 25 ceramic elements

[0083] 30, 30' Cooling channel

[0084] 31 Feed section

[0085] 32 Deflection section

[0086] 33 Discharge section

[0087] 41 Entrance

[0088] 42 Exit opening

[0089] 50 Crossflow section

[0090] 60 first layer

[0091] 61,71 Bridge element

[0092] 62.72 area section

[0093] 67 Post section

[0094] 70 second layer

[0095] 72 Functional wall

[0096] 73 outdoor area

[0097] 73' additional open area

[0098] 74 Deflection area 75 Side wall

[0099] 76 Guide element

[0100] 78 coupling element

[0101] 80 third layer

[0102] 81 Feed channel

[0103] 82 Drainage channel

[0104] 86 Distribution structure

[0105] D1 first thickness

[0106] D2 second thickness

[0107] D3 third thickness

[0108] A1 first extension

[0109] A2 second extension

[0110] A3 spacing

[0111] B Bridge width

[0112] S Stacking direction

[0113] S1 first front

[0114] S2 second front

[0115] Q1 first flow cross-section

[0116] Q2 second flow cross-section

[0117] Q3 third flow cross-section

[0118] SR Flow direction

[0119] VS Distribution flow direction

[0120] HSE Main Extension Level

Claims

Claims 1. Distribution structure (86) for a heat sink element (1) for cooling an electrical power module (10), wherein the heat sink element (1) - a basic body with a first end face (S1) which, in the installed state, faces a surface to be cooled, and with a second end face (S2) opposite the first end face (S1) and - Cooling channels (30, 30') embedded in the base body between the first end face (S1) and the second end face (S2), wherein the cooling channels (30, 30') each have a supply section (31), a deflection section (32) and a discharge section (33), wherein the cooling channels (30, 30') are each designed to convey a cooling medium in the supply section (31) towards the first end face (S1), in the deflection section (32) to the discharge section (33) and in the discharge section (33) towards the second end face (S2), wherein the cooling element (1) and the distribution structure (86) extend along a plane parallel to the main extension plane (HSE) and in a composite state along a plane perpendicular to the main extension plane (HSE) stacking direction (S) are arranged one above the other,wherein the distribution structure (86) is designed to guide the cooling medium along a distribution flow direction (VS), wherein the distribution structure (86) has a first deflection element (2) and a second deflection element (2') arranged one after the other in a direction parallel to a distribution flow direction (VS), wherein the first deflection element (2) and the second deflection element (2') are each designed and intended to direct the cooling medium in the assembled state into the supply section (31) of the respective cooling channel (30, 30'), which are preferably arranged one after the other in the assembled state in a direction parallel to the distribution flow direction (VS).

2. Distribution structure (86) according to claim 1, wherein the first deflection element (2) and / or the second deflection element (2') each has a non-even deflection surface (3).

3. Distribution structure (86) according to one of the preceding claims, wherein the first deflection element (2) and / or the second deflection element (2') is designed and intended to supply several cooling channels (30, 30') arranged one behind the other in a direction parallel to the distribution flow direction (VS).

4. Distribution structure (86) according to one of the preceding claims, wherein the extent of the first deflection element (2) and / or the second deflection element (2') measured perpendicular to the main extension plane (HSE) increases in a direction parallel to the distribution flow direction (VS), in particular continuously.

5. Distribution structure (86) according to one of the preceding claims, wherein the first deflection element (2) and the second deflection element (2') are arranged at different heights from each other.

6. Distribution structure according to one of the preceding claims, wherein the first deflection element (2) and / or the second deflection element (2') is permeable to the cooling medium.

7. Distribution structure (86) according to one of the preceding claims, wherein the first deflection element (2) and the second deflection element (2') are arranged in the distribution structure (86) such that a flow cross-section formed between the first deflection element (2) and the second deflection element (2') remains essentially constant.

8. Distribution structure (86) according to one of the preceding claims, wherein the distribution structure (86) has a feed channel (81) which is bounded by side walls (75), wherein the side walls (75) are arranged such that the feed channel (81) tapers in a direction parallel to the supply flow direction (VS).

9. System (100) comprising heat sink element (1) and distribution structure (86) according to one of the preceding claims, wherein preferably the distribution structure (86) is arranged directly on the second side (S2) of the heat sink element (1).

10. Arrangement of power modules (10), wherein the power modules (10) are associated with a system (100) of a heat sink element (1) and distribution structure (9) according to claim 9, wherein in particular the distribution structures (9) for the cooling medium are arranged to each other and connected to supply lines in such a way that the distribution structures (9) can be permeated by the cooling medium in parallel.

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