Charged particle beam device and sample holder

Abstract

A charged particle beam device according to the present invention includes a side-entry type sample stage 5 and a sample holder 10 that can be inserted into and removed from the side-entry type sample stage 5. The sample holder 10 has a cylindrical shank portion 101 and a sample cartridge 100 which is detachably connected to the shank portion 101 and on which a sample 11 is mounted. The side-entry type sample stage 5 has a cartridge support portion 15 that supports a sample cartridge 100. The sample cartridge 10 is directly supported on the side-entry type sample stage 5 by the cartridge support portion 15.

Description

Charged particle beam device and sample holder

[0001] The present disclosure relates to a charged particle beam device and a sample holder.

[0002] Charged particle beam devices such as transmission electron microscopes (TEMs) with side-entry sample stages have been known for some time. In such charged particle beam devices, an electron beam is irradiated onto a sample on a sample holder mounted on the side-entry sample stage, and the electrons that pass through the sample are detected by a detector and imaged for observation, thereby observing the sample.

[0003] Charged particle beam devices with side-entry sample stages have limitations when handling a large number of samples. In particular, in transmission electron microscopes (TEMs), the space around the pole piece is limited, making it impractical to exchange extremely small sample pieces inside the charged particle beam. Furthermore, when handling a large number of sample holders by loading rod-shaped sample holders of approximately 300 mm into a magazine, the capacity of the chamber for storing the samples in a vacuum becomes too large, making it impractical.

[0004] For this reason, a technique has been adopted in which samples are loaded onto relatively small, detachable cartridges and the cartridges are replaced. In the apparatus of Patent Document 1, a magazine containing a large number of thin cartridges is connected to the vacuum inside the microscope body, and cartridges are attached and detached within a sample exchange chamber. Patent Document 2 discloses a system in which a portion corresponding to the tip of the holder has a detachable structure, allowing for rapid sample replacement. Patent Document 3 discloses a detachable structure that includes a key and a channel (keyhole) used to engage the load lock and the gripper.

[0005] JP 2015-88237 A JP 2002-365182 A JP 2010-108936 A

[0006] The detachable structures of Patent Documents 1 to 3 have low rigidity when the cartridge, sample holder, and sample stage are connected, which causes a problem of image disturbance in the observed image of the sample due to vibrations during high-resolution observation.

[0007] A brief summary of a representative embodiment of the present invention will be given below.

[0008] In one embodiment, the charged particle beam device includes a side-entry sample stage and a sample holder that can be inserted into and removed from the side-entry sample stage. The sample holder has a cylindrical shank and a sample cartridge that is detachably connected to the shank and on which a sample is loaded. The side-entry sample stage has a cartridge support that supports the sample cartridge. The sample cartridge is directly supported on the side-entry sample stage by the cartridge support.

[0009] In one embodiment, the sample holder includes a sample cartridge for carrying and transporting a sample to be observed with a charged particle beam device, and a shank portion for coupling with the sample cartridge. The sample holder is capable of rotating around a rotation axis along the direction in which the shank portion extends and moving along the rotation axis. The sample cartridge and the shank portion are coupled together by inserting a portion of the sample cartridge into the cylindrical shank portion. A support structure for supporting the inserted sample cartridge is provided on the inner periphery of the shank portion. The sample cartridge and the shank portion have a key structure in which a key engages with a key groove. The key groove has a first groove along the direction in which the sample holder moves, a second groove communicating with the first groove and along the direction in which the sample holder rotates, and a third groove communicating with the second groove and accommodating the engaged key, and the third groove has a tapered surface. The shank portion rotates around the rotation axis relative to the sample cartridge and moves along the rotation axis, thereby enabling engagement and disengagement between the key and the key groove.

[0010] According to one embodiment, the rigidity of the side-entry type specimen stage when supporting the specimen holder can be increased, thereby reducing the influence of vibrations on the observation image during high-resolution observation.

[0011] FIG. 1 is a diagram schematically showing the configuration of a charged particle beam device of an embodiment; FIG. 2 is a diagram schematically showing the configuration of a side entry type sample stage; FIG. 3 is a diagram schematically showing the configuration of a side entry type sample stage; FIG. 4 is a partial cross-sectional view schematically showing the configuration of a portion of a sample holder; FIG. 5 is a cross-sectional view schematically showing the configuration of a sample cartridge; FIG. 6 is a cross-sectional view schematically showing the configuration of a sample cartridge; FIG. 7 is a diagram schematically showing a key structure; FIG. 8 is a diagram schematically showing another example of a key structure; FIG. 9 is a cross-sectional view schematically showing electrical functions mounted on a sample cartridge and electrical connection between a sample cartridge and a shank portion; FIG. 10 is a diagram schematically showing an example of a specific structure of a terminal; FIG. 11 is a diagram schematically showing another example of a specific structure of a terminal; FIG. 12 is a diagram schematically showing a cartridge transport mechanism; FIG. 13 is a diagram schematically showing a cartridge transport mechanism.

[0012] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In the drawings, the same parts are generally designated by the same reference numerals, and repeated explanations will be omitted. In the drawings, the representation of components may not represent their actual positions, sizes, shapes, ranges, etc., in order to facilitate understanding of the invention.

[0013]

[0023] <Embodiments> [Overall Schematic Configuration] A charged particle beam device and a sample holder used in a charged particle beam device according to embodiments of the present disclosure will be described below with reference to the drawings. In the present embodiments, the charged particle beam device is, as an example, an electron beam microscope, in particular a transmission electron microscope (TEM).

[0014] 1 is a diagram schematically illustrating the configuration of the main parts of a charged particle beam device 1 according to an embodiment. As shown in FIG. 1, the charged particle beam device 1 includes a side-entry sample stage 5, a sample holder 10, a main controller 57, and a cartridge transport mechanism 300. Note that the charged particle beam device 1 does not necessarily have to include the cartridge transport mechanism 300.

[0015] In the charged particle beam device 1, a sample 11 to be observed is placed on a sample holder 10 that is removably inserted into a side-entry sample stage 5. The side-entry sample stage 5 is controlled by a stage controller 53 that receives commands from a main control device 57.

[0016] The main control device 57 and the stage controller 53 are processors, or controllers, devices, computers, systems, etc., that are configured with such processors. The computer executes processing according to a program read into memory using resources such as memory and communication interfaces as appropriate through the processor. This realizes predetermined functions, processing units, etc. The processor is configured with semiconductor devices such as a CPU or GPU. The processor is configured with devices or circuits that are capable of performing predetermined calculations. Processing is not limited to software program processing, and can also be implemented using dedicated circuits. The dedicated circuits can be FPGAs, ASICs, CPLDs, etc.

[0017] The main control device 57 controls the operation of each component of the charged particle beam device 1. The stage controller 53 controls the operation of the side entry type sample stage 5 and the cartridge transport mechanism 300 in response to commands from the main control device 57.

[0018] The sample 11 is irradiated with the electron beam 2 generated by the electron gun 50. In this case, the electron beam 2 generated by the electron gun 50 is converged by the electron lens 54 and irradiated onto the sample 11.

[0019] The electrons transmitted through the sample 11 are converted into an electric signal by the detector 55 and output to the main controller 57. The main controller 57 performs image processing on the electric signal output from the detector 55 to generate (imaging) an observation image. This makes it possible to observe the sample 11 on the observation image.

[0020] In the following description, the z-axis is set to the direction along the traveling direction of the electron beam 2, the x-axis is set to the direction perpendicular to the z-axis, and the y-axis is set to the direction perpendicular to the x-axis and z-axis. [Side-Entry Sample Stage 5]

[0021] The side-entry sample stage 5 supports a sample holder 10 that carries a sample 11 attached to a mesh. In this case, the sample 11 has been thinned to the order of several tens of nanometers using, for example, a focused ion beam (FIB) device. The mesh is made of, for example, metal and has a diameter of about 3 mm.

[0022] 2 and 3 are diagrams showing the structure of the side-entry type specimen stage 5. FIG. 4 is a partial cross-sectional view showing a part of the specimen holder 10.

[0023] 2 and 3, the side-entry type sample stage 5 includes a sample holder outer cylinder 14, a cartridge support part 15, and a drive mechanism 51. A sample holder 10 is inserted into the side-entry type sample stage 5 so as to be insertable and removable.

[0024] [Sample holder outer cylinder 14] The sample holder outer cylinder 14 is a hollow cylinder centered on the axis Ax. A cartridge support part 15 (described later) and the sample holder 10 are provided inside the sample holder outer cylinder 14. The sample holder 10 is provided so as to be insertable into and removable from the sample holder outer cylinder 14 and the cartridge support part 15.

[0025] When the drive mechanism 51 (described later) is not driving the actuator, the x-axis and the axis Ax are parallel, and the y-axis and the z-axis are perpendicular to the axis Ax. Figures 2 and 3 show a state in which the drive mechanism 51 is not driving the actuator. The x-axis, y-axis, and z-axis directions in the following description refer to the directions along the x-axis, y-axis, and z-axis, respectively, when the drive mechanism 51 is not driving the actuator, unless otherwise specified.

[0026] A spherical fulcrum 13 is formed at the end of one side (hereinafter referred to as the x-axis + side) of the sample holder outer cylinder 14 in the x-axis direction. The spherical fulcrum 13 is formed into a spherical shape with an inner diameter that decreases toward the x-axis + side of the sample holder outer cylinder 14. The sample holder outer cylinder 14 can be driven by a driving mechanism 51 (described later) around the center C of the spherical fulcrum 13. Specifically, the sample holder outer cylinder 14 can be driven by the driving mechanism 51 in the A1-A2 directions shown in FIG. 2 and the A3-A4 directions shown in FIG. 3. Driving the sample holder outer cylinder 14 in the A1-A4 directions is sometimes referred to as oscillating drive. The sample holder outer cylinder 14 can also be driven by the driving mechanism 51 to rotate around the axis Ax.

[0027] An opening is formed at the end of the spherical fulcrum 13 on the positive x-axis side. A part of the sample holder 10 housed inside the sample holder outer cylinder 14 protrudes through this opening toward the positive x-axis side from the sample holder outer cylinder 14. The end of the sample holder outer cylinder 14 on the negative x-axis side is open.

[0028] The microscope body 4 is provided on the positive x-axis side of the sample holder outer cylinder 14. The microscope body 4 is fastened to a vibration-isolated stand 56 (see FIG. 1). A spherical support 12 is fixed to the microscope body 4. A spherical fulcrum 13 is in contact with this spherical support 12.

[0029] A sample chamber 3 is formed inside the microscope body 4, and a part of the sample holder 10 protruding from the sample holder outer cylinder 14 toward the +x-axis side is introduced into the sample chamber 3. The sample chamber 3 is vacuum-sealed by a sample holder O-ring 16 provided in a cartridge support part 15, which will be described later, and a sample holder outer cylinder O-ring 17 provided in the sample holder outer cylinder 14. The sample chamber 3 is vacuum-sealed by a vacuum pump. －５ The chamber is evacuated to a vacuum of about Pa.

[0030] [Cartridge support part 15] The cartridge support part 15 is cylindrical and extends along the x-axis direction. The sample holder 10, which will be described later, is inserted into the cartridge support part 15 so as to be removably inserted. Specifically, the end of the cartridge support part 15 on the negative x-axis side is open. The sample holder 10 is inserted into and removed from the cartridge support part 15 through this opening.

[0031] As described above, the cartridge support part 15 is provided inside the sample holder outer cylinder 14. A sample holder outer cylinder O-ring 17 is provided between the outer peripheral wall surface of the cartridge support part 15 and the inner peripheral wall surface of the sample holder outer cylinder 14. This provides a vacuum seal between the cartridge support part 15 and the sample holder outer cylinder 14. The cartridge support part 15 is also supported by the sample holder outer cylinder 14 via the sample holder outer cylinder O-ring 17.

[0032] As described above, the sample chamber 3 provided on the positive x-axis side of the sample holder outer cylinder 14 is evacuated. Therefore, the positive x-axis side of the sample holder outer cylinder O-ring 17 is also maintained at a vacuum. In addition, because the negative x-axis side of the sample holder outer cylinder 14 is open, the negative x-axis side of the sample holder outer cylinder O-ring 17 is at atmospheric pressure. Therefore, a force on the positive x-axis side is always acting on the cartridge support part 15 due to atmospheric pressure.

[0033] The cartridge support part 15 is movable in the x-axis direction inside the sample holder outer cylinder 14 by, for example, a bellows or the like. As shown in Figure 4, a taper mechanism 19 is provided near the end of the cartridge support part 15 on the +x-axis side. In the taper mechanism 19, the inner diameter of the cartridge support part 15 becomes smaller as it approaches the +x-axis side. Note that the taper mechanism 19 is not limited to being provided near the end of the cartridge support part 15 on the +x-axis side. The taper mechanism 19 may also be provided midway along the cartridge support part 15 extending along the x-axis direction.

[0034] An opening is formed at the end of the cartridge support part 15 on the +x-axis side. A part of the sample holder 10 housed inside the cartridge support part 15 protrudes through this opening on the +x-axis side and is introduced into the sample chamber 3 through the opening on the +x-axis side of the sample holder outer cylinder 14.

[0035] A first support member 215 and a second support member 217 are provided on the inner peripheral wall surface of the cartridge support portion 15. The first support member 215 and the second support member 217 may be, for example, mechanical members such as bearings or linear guides, or elastic members such as O-rings.

[0036] The first support member 215 is provided on the negative x-axis side of the position where the taper mechanism 19 is formed. The first support member 215 is a support member that supports the sample cartridge 100 of the sample holder 10, which will be described later. The second support member 217 is provided on the negative x-axis side of the first support member 215. The second support member 217 is a support member that supports the shank portion 101 of the sample holder 10, which will be described later.

[0037] As described above, the sample holder O-ring 16 is provided inside the cartridge support part 15. The sample holder O-ring 16 vacuum-seals the cartridge support part 15 and the shank part 101 of the sample holder 10, which will be described later.

[0038] [Drive Mechanism 51] The operation of the drive mechanism 51 is controlled by a stage controller 53 in response to commands from a main control device 57. As shown in Figures 2 and 3, the drive mechanism 51 has an x ​​drive mechanism 40, a y drive mechanism 30, a z drive mechanism 35, and a rotation drive mechanism 20.

[0039] [[x-driving mechanism 40]] The x-driving mechanism 40 has an actuator part 40A and a contact part 40B. The actuator part 40A is provided at the end of the sample holder outer cylinder 14 on the negative x-axis side. The actuator part 40A has, for example, a rod-shaped member, and is driven to move forward and backward in the x-axis direction under the control of the stage controller 53. The contact part 40B is a plate-shaped member provided at the end of the cartridge support part 15 on the negative x-axis side.

[0040] As described above, atmospheric pressure acts on the cartridge support part 15 toward the sample chamber 3 (positive x-axis side). Therefore, the end of the actuator part 40A on the negative x-axis side abuts against the abutment part 40B. When the actuator part 40A is driven toward the negative x-axis side under the control of the stage controller 53, the abutment part 40B that abuts against the actuator part 40A moves toward the negative x-axis side. As the abutment part 40B moves, the cartridge support part 15 on which the abutment part 40B is provided also moves toward the negative x-axis side against the atmospheric pressure. When the actuator part 40A is driven toward the positive x-axis side under the control of the stage controller 53, the cartridge support part 15 moves toward the positive x-axis side due to the atmospheric pressure.

[0041] This allows the x-drive mechanism 40 to drive the cartridge support part 15 back and forth along the x-axis. As a result, the position in the x-axis direction of the sample holder 10 (described later) housed in the cartridge support part 15 can be adjusted. In other words, it becomes possible to finely adjust the position in the x-axis direction of the sample 11 introduced into the sample chamber 3.

[0042] [[y drive mechanism 30]] The y drive mechanism 30 is attached to the rotation drive mechanism 20. The y drive mechanism 30 has an actuator part 30A and a compression spring 31. The actuator part 30A has, for example, a rod-shaped member extending along the y-axis direction. The tip of the actuator part 30A abuts against the outer peripheral wall surface of the sample holder outer cylinder 14. The actuator part 30A is driven to move back and forth in the y-axis direction under the control of the stage controller 53.

[0043] The compression spring 31 is provided on the outer peripheral wall surface of the sample holder outer cylinder 14 at a position facing the actuator section 30A. The compression spring 31 biases the sample holder outer cylinder 14 and the cartridge support section 15 housed therein toward the actuator section 30A in the y-axis direction. Therefore, when the actuator section 30A is not driven, the sample holder outer cylinder 14 and the cartridge support section 15 do not oscillate in the directions A1 and A2 about the center C as an axis, and remain stationary.

[0044] When the actuator unit 30A is controlled by the stage controller 53 to be driven toward the negative y-axis side, the sample holder outer cylinder 14 is driven against the biasing force of the compression spring 31. That is, the sample holder outer cylinder 14 is driven to oscillate in the A1 direction around the center C as an axis. When the actuator unit 30A is controlled by the stage controller 53 to be driven toward the positive y-axis side, the sample holder outer cylinder 14 is driven by the biasing force of the compression spring 31. That is, the sample holder outer cylinder 14 is driven to oscillate in the A2 direction around the center C as an axis.

[0045] This allows the y-drive mechanism 30 to swing the cartridge support 15 in the sample holder outer cylinder 14 along the A1 and A2 directions. As a result, the position of the sample holder 10 (described later) housed in the cartridge support 15 in the y-axis direction can be adjusted. In other words, it becomes possible to finely adjust the position of the sample 11 introduced into the sample chamber 3 in the y-axis direction. [[z-drive mechanism 35]]

[0046] The z-drive mechanism 35 is attached to the rotation drive mechanism 20. The z-drive mechanism 35 has an actuator part 35A and a compression spring 36. The actuator part 35A has, for example, a rod-shaped member extending along the z-axis direction. The tip of the actuator part 35A abuts against the outer peripheral wall surface of the sample holder outer cylinder 14. The actuator part 35A is driven to move back and forth in the z-axis direction under the control of the stage controller 53.

[0047] The compression spring 36 is provided on the outer peripheral wall surface of the sample holder outer cylinder 14 at a position facing the actuator part 35A. The compression spring 36 biases the sample holder outer cylinder 14 and the cartridge support part 15 housed therein toward the actuator part 35A in the z-axis direction. Therefore, when the actuator part 35A is not driven, the sample holder outer cylinder 14 and the cartridge support part 15 do not oscillate in the directions A3 and A4 about the center C as an axis, and remain stationary.

[0048] When the actuator unit 35A is controlled by the stage controller 53 to be driven toward the + side of the z axis, the sample holder outer cylinder 14 is driven against the biasing force of the compression spring 36. That is, the sample holder outer cylinder 14 is driven to oscillate in the A3 direction around the center C as an axis. When the actuator unit 35A is controlled by the stage controller 53 to be driven toward the - side of the z axis, the sample holder outer cylinder 14 is driven by the biasing force of the compression spring 36. That is, the sample holder outer cylinder 14 is driven to oscillate in the A4 direction around the center C as an axis.

[0049] This allows the z-drive mechanism 35 to swing the cartridge support part 15 in the sample holder outer cylinder 14 along the A3 and A4 directions. As a result, the position in the z-axis direction of the sample holder 10 (described later) housed in the cartridge support part 15 can be adjusted. In other words, it becomes possible to finely adjust the position in the z-axis direction of the sample 11 introduced into the sample chamber 3.

[0050] [Rotational drive mechanism 20] The rotational drive mechanism 20 is provided along the outer peripheral wall surface of the sample holder outer cylinder 14. The rotational drive mechanism 20 is, for example, a motor, and is controlled by the stage controller 53 to drive rotation. The sample holder outer cylinder 14 is driven to rotate about the axis Ax by the rotational drive force of the rotational drive mechanism 20. As a result, the rotational drive mechanism 20 can drive the cartridge support part 15 in the sample holder outer cylinder 14 to rotate about the axis Ax. As a result, the sample holder 10 (described later) housed in the cartridge support part 15 can be rotated about the axis Ax. In other words, it is possible to tilt the sample 11 introduced into the sample chamber 3 with respect to the electron beam 2.

[0051] [Sample Holder 10] As described above, the sample holder 10 is removably inserted into the cartridge support portion 15 provided in the sample holder outer cylinder 14. When the sample holder 10 is inserted into or removed from the cartridge support portion 15, it can be moved along the x-axis direction and rotated about the axis Ax by a cartridge transport mechanism 300 (described later). The x-axis direction may also be referred to as the movement direction of the sample holder 10.

[0052] When the sample holder 10 is housed in the cartridge support portion 15, it can be driven to oscillate and rotate together with the sample holder outer cylinder 14 driven by the drive mechanism 51. The sample holder 10 has a sample cartridge 100 and a shank portion 101.

[0053] [Sample Cartridge 100] A sample 11 to be observed by the charged particle beam device 1 is mounted near the tip of the sample cartridge 100, i.e., near the end on the +x-axis side. The sample cartridge 100 is moved by a cartridge transport mechanism 300, which will be described later, to transport the mounted sample 11. The sample cartridge 100 is configured to be detachable from a shank portion 101, as will be described in detail later.

[0054] 5A and 5B are cross-sectional views schematically showing the configuration of the sample cartridge 100. Fig. 5A shows a cross section in the zx plane, and Fig. 5B shows a cross section in the xy plane.

[0055] The sample cartridge 100 is composed of a drive mechanism 100A and a coupling mechanism 100B. The drive mechanism 100A tilts the sample 11 attached to the sample cartridge 100 about a β-axis 205 that intersects (is perpendicular to) the axis Ax. In other words, the drive mechanism 100A is an operating structure that performs an operation on the sample 11. The coupling mechanism 100B couples the sample cartridge 100 to a shank portion 101, which will be described later.

[0056] [Driving mechanism 100A] The driving mechanism 100A has a sample stage 201, a sample stage tilting shaft 202, a lever mechanism 203, and a push rod 210. The sample 11 is mounted on the sample stage 201. The sample stage 201 is provided at the end of the sample cartridge 100 on the +x-axis side. The sample stage tilting shaft 202 supports the sample stage 201 relative to a frame 204 so that the sample stage 201 can rotate around a β-axis 205.

[0057] The lever mechanism 203 is connected to the sample stage 201 via a rotation shaft 206. The end of the lever mechanism 203 on the negative x-axis side is connected to a push rod 210. The push rod 210 extends along the axis Ax. A linear force along the axis Ax is transmitted to the push rod 210 by a linear motion rod 103 (see FIG. 4) provided in a shank portion 101 (see FIG. 4), which will be described later. In other words, the driving mechanism 100A, which is an operating structure, is mechanically connected to the linear motion rod 103, which is a device that operates the driving mechanism 100A, through the inside of the shank portion.

[0058] When the push rod 210 receives a linear force from the linear motion rod 103 toward the + side of the x-axis, the sample stage 201 rotates around the rotation axis 206 relative to the lever mechanism 203. In this case, the sample stage 201 rotates in the A5 direction shown in Fig. 5A relative to the lever mechanism 203. As a result, the sample stage 201 rotates in the A6 direction around the sample stage tilt axis 202, i.e., the β-axis 205.

[0059] When the push rod 210 receives a linear force from the linear motion rod 103 toward the negative x-axis side, the sample stage 201 rotates around the rotation axis 206 relative to the lever mechanism 203. In this case, the sample stage 201 rotates in the A7 direction shown in Fig. 5A relative to the lever mechanism 203. As a result, the sample stage 201 rotates in the A8 direction around the sample stage tilt axis 202, i.e., the β-axis 205.

[0060] As described above, the push rod 210 receives the linear force from the linear motion rod 103, and the sample stage 201 tilts around the β axis 205. In other words, the sample 11 can be tilted around the β axis 205.

[0061] 4, 5A, and 5B, the coupling mechanism 100B has a lock pin 211, a guide structure 212, an elastic member 213, and a receiving structure 216. The guide structure 212 is provided on the negative x-axis side of the frame 204. The guide structure 212 is formed in a tapered shape with an outer diameter that increases toward the negative x-axis side. When the sample holder 10 is accommodated in the cartridge support part 15, the guide structure 212 abuts against the tapered mechanism 19 of the cartridge support part 15.

[0062] The receiving structure 216 is provided at the x-axis negative end of the guide structure 212 and is connected to the guide structure 212. The receiving structure 216 is cylindrical and has an outer diameter that is the same as or approximately the same as the outer diameter of the x-axis negative end of the guide structure 212. Note that the receiving structure 216 is not limited to being cylindrical, and may be part of a discontinuous cylinder with a notch or the like provided in part of the outer peripheral wall surface of the cylinder.

[0063] When the sample holder 10 is accommodated in the cartridge support part 15, the outer peripheral wall surface of the receiving structure 216 comes into contact with a first support member 215 provided on the cartridge support part 15. As a result, the sample cartridge 100 is supported on the cartridge support part 15 by the first support member 215.

[0064] A through hole along the axis Ax is formed inside the guide structure 212. The above-mentioned push rod 210 is housed inside this through hole and the cylindrical receiving structure 216 so as to be movable along the axis Ax.

[0065] A cylindrical lock pin support portion 211A extending along the axis Ax is provided on the surface on the negative side of the x-axis of the receiving structure 216. The lock pin 211 is provided on the outer peripheral wall surface of the lock pin support portion 211A. The lock pin 211 is a rod-shaped member extending outward in the radial direction of the lock pin support portion 211A. The lock pin 211 is a key that constitutes the key structure 220 together with the key groove 104 of the shank portion 101, which will be described later.

[0066] The elastic member 213 is, for example, a pressure spring, and is provided inside the lock pin support portion 211A. One end (the positive x-axis end) of the elastic member 213 abuts against the negative x-axis end face 216A of the receiving structure 216. When the sample cartridge 100 and the shank portion 101 are coupled, the other end (the negative x-axis end) of the elastic member 213 abuts against the internal structure of the shank portion 101. In other words, the elastic member 213 is disposed at a position where the sample cartridge 100 and the shank portion 101 are coupled. When the sample cartridge 100 and the shank portion 101 are coupled, the elastic member 213 biases the sample cartridge 100 toward the positive x-axis side and biases the shank portion 101 toward the negative x-axis side. The coupling of the sample cartridge 100 and the shank portion 101 will be described in detail below.

[0067] [Shank portion 101] The shank portion 101 is cylindrical and extends along the axis Ax. The inner diameter of the shank portion 101 is larger than the outer diameter of the lock pin support portion 211A. When the shank portion 101 and the sample cartridge 100 are coupled together, the lock pin support portion 211A is positioned inside the shank portion 101. In other words, a portion of the sample cartridge 100 is inserted into the shank portion 101, and the shank portion 101 and the sample cartridge 100 are coupled together.

[0068] When the sample holder 10 is housed in the cartridge support part 15, the outer peripheral wall surface of the shank part 101 comes into contact with the second support member 217 provided on the cartridge support part 15. As a result, the shank part 101 is supported on the cartridge support part 15 by the second support member 217.

[0069] The above-mentioned sample holder O-ring 16 is provided between the outer peripheral wall surface of the shank portion 101 and the inner peripheral wall surface of the cartridge support portion 15. Because the sample chamber 3 provided on the +x-axis side of the cartridge support portion 15 is evacuated, the +x-axis side of the sample holder O-ring 16 is also maintained at a vacuum. Furthermore, because the -x-axis side of the cartridge support portion 15 is open, the -x-axis side of the sample holder O-ring 16 is at atmospheric pressure. Therefore, a force on the +x-axis side is constantly acting on the shank portion 101 housed in the cartridge support portion 15 due to atmospheric pressure equivalent to the diameter of the sample holder O-ring 16. Therefore, the guide structure 212 of the above-mentioned sample cartridge 100 is pressed against the taper mechanism 19. As a result, the sample cartridge 100 is supported with high rigidity by the cartridge support portion 15, i.e., the side-entry sample stage 5, via the taper mechanism 19.

[0070] The shank portion 101 has a linear motion rod 103, a key groove 104, and a support structure 214. The linear motion rod 103 is a member extending along the axis Ax. The linear motion rod 103 is provided inside the shank portion 101 so as to be movable along the axis Ax. As described above, the linear motion rod 103 is a device that moves along the axis Ax to operate the drive mechanism 100A that rotates (tilts) the sample stage 201 about the β-axis 205.

[0071] The support structure 214 is, for example, an elastic member such as an O-ring, or a mechanical member such as a bearing or linear guide. The support structure 214 is provided on the inner periphery of the shank portion 101, i.e., on the inner peripheral wall surface of the shank portion 101. When the shank portion 101 and the sample cartridge 100 are coupled, the support structure 214 abuts against the outer peripheral wall surface of the lock pin support portion 211A of the sample cartridge 100. This allows the support structure 214 to support the sample cartridge 100 inserted into the shank portion 101. Supporting the sample cartridge 100 by the support structure 214 can increase the rigidity when the sample cartridge 100 and the shank portion 101 are coupled. Note that the support structure 214 may be part of a structure formed on the shank portion 101.

[0072] The key groove 104 is formed near the end of the shank portion 101 on the positive side of the x-axis. The key groove 104 constitutes a key structure 220 together with the lock pin 211 described above.

[0073] 6A is a diagram illustrating the key structure 220, and schematically shows the state in which the sample cartridge 100 is coupled to the shank portion 101. As shown in FIG. 6A, the key groove 104 is composed of a first groove portion 104A, a second groove portion 104B, and a third groove portion 104C.

[0074] The first groove 104A extends from the end of the shank 101 on the positive x-axis side toward the negative x-axis side. That is, the first groove 104A extends along the direction of movement of the sample holder 10.

[0075] The second groove 104B communicates with the end of the first groove 104A on the negative x-axis side and extends along the rotation direction around the axis Ax of the sample holder 10. The third groove 104C communicates with the end of the second groove 104B on the positive y-axis side and extends toward the positive x-axis side. In other words, the third groove 104C extends along the movement direction of the sample holder 10. However, the end of the third groove 104C on the positive x-axis side is located closer to the negative x-axis than the end of the shank 101 on the positive x-axis side.

[0076] The width of the key groove 104 is greater than the diameter of the lock pin 211. That is, the lengths of the first groove 104A and the third groove 104C in the y-axis direction and the length of the second groove 104B in the x-axis direction are greater than the diameter of the lock pin 211. This allows the lock pin 211 to move along the key groove 104 when the sample cartridge 100 and the shank portion 101 are coupled and uncoupled. [Coupling of the sample cartridge 100 and the shank portion 101]

[0077] The coupling between the sample cartridge 100 and the shank portion 101 is achieved by the shank portion 101 moving along the movement direction relative to the sample cartridge 100 and rotating about the axis Ax as the rotation axis. Specifically, when the shank portion 101 moves toward the +x-axis side relative to the sample cartridge 100, the lock pin 211 is guided into the key groove 104. As the shank portion 101 moves, the lock pin 211 is guided by the first groove portion 104A and moves toward the -x-axis side relative to the shank portion 101. Then, when the lock pin 211 reaches the end of the first groove portion 104A on the -x-axis side, the shank portion 101 rotates about the axis Ax, and the lock pin 211 moves relative to the shank portion 101 along the extending direction of the second groove portion 104B.

[0078] Thereafter, when the lock pin 211 reaches the end of the second groove 104B, the lock pin 211 moves toward the +x-axis side along the third groove 104C due to the biasing force of the elastic member 213. When the lock pin 211 contacts the end of the third groove 104C on the +x-axis side, the lock pin 211 is accommodated in the key groove 104. Because the sample cartridge 100 is biased toward the +x-axis side by the elastic member 213, the lock pin 211 accommodated in the key groove 104 remains in contact with the end of the third groove 104C on the +x-axis side. This engages the lock pin 211, which is a key, with the key groove 104, connecting the sample cartridge 100 and the shank portion 101.

[0079] To release the connection between the sample cartridge 100 and the shank portion 101, the reverse of the above operation is performed. That is, as the sample cartridge 100 and the shank portion 101 approach each other against the biasing force of the elastic member 213, the lock pin 211 moves to the end of the third groove portion 104C on the negative x-axis side. Then, as the shank portion 101 rotates around the axis Ax in the opposite direction to that during connection, the lock pin 211 moves to the end of the second groove portion 104B on the negative y-axis side. Thereafter, the lock pin 211 moves along the first groove portion 104A toward the positive x-axis side relative to the shank portion 101, thereby releasing the connection between the sample cartridge 100 and the shank portion 101.

[0080] The shape of the key groove 104 is not limited to the shape shown in FIG. 6A. For example, as shown in FIG. 6B, a tapered surface 105 may be formed at the end of the third groove 104C on the positive x-axis side. This allows the lock pin 211 to contact the tapered surface 105 on the positive y-axis side and the negative y-axis side. As a result, the shank portion 101 is restricted from rotating around the axis Ax relative to the sample cartridge 100. In other words, the coupling angle between the lock pin 211 and the key groove 104, and more specifically, the coupling angle between the sample cartridge 100 and the shank portion 101, can be uniquely determined.

[0081] 6B shows a case where tapered surfaces 105 are formed on two opposing surfaces of third groove 104C in the y-axis direction, but this is not limiting. As long as the coupling angle between sample cartridge 100 and shank 101 can be uniquely determined, tapered surface 105 may be formed on only one of the two opposing surfaces of third groove 104C.

[0082] 7A is a cross-sectional view schematically showing the electrical functions installed in the sample cartridge 100 and the electrical connection between the sample cartridge 100 and the shank portion 101. The sample cartridge 100 has functional components 400, electrical wiring 401, and terminals 404.

[0083] The functional component 400 is, for example, a small vacuum gauge, a heater, an element for applying voltage or pressure, or a MEMS chip equipped with any of these. In other words, the functional component 400 is an operating structure that performs an operation on the sample 11. The terminal 404 is electrically connected to the functional component 400 by an electrical wiring 401.

[0084] The shank portion 101 has an electrical wiring 402, a hermetic seal connector 403, and a terminal 405. The electrical wiring 402 and the terminal 405 are provided inside the shank portion 101. When the sample cartridge 100 and the shank portion 101 are coupled as described above, the terminal 404 and the terminal 405 are electrically connected. Note that the sample cartridge 100 and the shank portion 101 are coupled in a state where some portions are appropriately insulated.

[0085] The electrical wiring 402 electrically connects the terminal 405 and the hermetic seal connector 403. The electrical wiring 401, 402 may be provided in one system or in multiple systems.

[0086] The hermetic seal connector 403 is provided via a seal member at the x-axis minus end of the shank portion 101. Therefore, the electrical wiring 402 provided inside the shank portion 101 is connected to the atmosphere side via the hermetic seal connector 403. Specifically, the electrical wiring 402 is electrically connected to a power unit 406 and the like provided outside the sample holder 10.

[0087] The power unit 406 is a processor, or a controller, device, computer, system, etc., that is configured with the processor, etc. Based on commands from the main control device 57, the power unit 406 outputs electrical signals to the functional component 400 to instruct heating, voltage application, stress application, etc. Note that the functions using the above electrical signals may be automatically controlled by software.

[0088] With the above configuration, when the sample cartridge 100 and the shank portion 101 are connected, the functional part 400, which is the operating mechanism, is electrically connected to the power part 406 that operates the functional part 400 through the inside of the shank portion 101.

[0089] 7B is a diagram schematically illustrating an example of the specific structure of terminals 404, 405. Terminals 404, 405 contact each other using a ball-plunger contact method. Specifically, terminal 405 has a ball 407, a spring 408, a conductor 409, and a holder 410. Ball 407, spring 408, and conductor 409 are housed in holder 410.

[0090] The ball 407 is made of a conductive material and is rotatably housed within the holder 410. The ball 407 protrudes toward the +x-axis side beyond the holder 410. Therefore, when the sample cartridge 100 and the shank portion 101 are coupled, the ball 407 comes into contact with the terminal 404.

[0091] Spring 408 is disposed between the end of holder 410 on the negative x-axis side and ball 407. Spring 408 biases ball 407 toward the positive x-axis side. Conductor 409 is connected directly to ball 407 or indirectly to ball 407 via spring 408. A portion of conductor 409 protrudes from holder 410 on the negative x-axis side and is connected to electrical wiring 402.

[0092] When the sample cartridge 100 and the shank portion 101 are coupled, the ball 407 rotates within the holder 410. This reduces the effect on the terminals 404, 405 of the rotational movement that occurs when the sample cartridge 100 and the shank portion 101 are coupled, thereby reducing damage to the terminals 404, 405.

[0093] The spring 408 suppresses the effect on the terminals 404, 405 of the linear movement that occurs when the sample cartridge 100 and the shank portion 101 are coupled, thereby preventing damage to the terminals 404, 405. Furthermore, because the ball 407 is biased toward the positive x-axis side by the spring 408, the terminals 404, 405 can be reliably brought into contact with each other.

[0094] 7C is a diagram schematically illustrating another example of the specific structure of terminals 404, 405. Terminal 405 is a leaf spring. In this case, terminal 405 may be made of a material with good spring characteristics, such as beryllium copper. Note that the end of terminal 405 on the positive x-axis side, i.e., contact portion 405A with terminal 404, may be a curved surface.

[0095] 7B , the terminals 404 are prevented from being damaged by rotational and linear movements of the terminals 404, 405 when the sample cartridge 100 and the shank 101 are coupled.

[0096] The configurations of the terminals 404 and 405 shown in FIGS. 7B and 7C may be interchanged, and it is preferable that the structure be determined based on spatial constraints.

[0097] 8A and 8B are schematic diagrams showing the cartridge transport mechanism 300. Fig. 8A shows the state before the sample holder 10 is inserted into the side-entry type sample stage 5. Fig. 8B shows the state after the sample holder 10 has been inserted into the side-entry type sample stage 5.

[0098] The cartridge transport mechanism 300 is connected to the side-entry type sample stage 5 coaxially with the sample cartridge 100 and the shank portion 101. The cartridge transport mechanism 300 has a transport rod 301, a transport drive unit 302, a transport chamber 303, a cassette mechanism unit 310, and a cassette unit 311.

[0099] The transfer chamber 303 is composed of a first transfer chamber 303A and a second transfer chamber 303B. The first transfer chamber 303A extends along the x-axis direction and houses a transfer rod 301 and a transfer drive unit 302 inside. The transfer rod 301 can be driven linearly along the x-axis and rotated about the axis Ax by the transfer drive unit 302. The end of the transfer rod 301 on the positive x-axis side has a structure that allows it to be attached to and detached from the end of the shank portion 101 on the negative x-axis side.

[0100] The linear and rotational driving of the transport drive unit 302 causes the shank 101 attached to the transport rod 301 to move along the movement direction and rotate about the axis Ax relative to the sample cartridge 100. This causes the key structure 220 to be coupled and released as described above. In other words, the sample cartridge 100 and the shank 101 are coupled and released automatically without human intervention.

[0101] The second transfer chamber 303B is provided on the negative x-axis side of the side-entry sample stage 5 in the x-axis direction, and extends along the y-axis direction. The second transfer chamber 303B communicates with the first transfer chamber 303A at the end on the positive y-axis side.

[0102] The cassette unit 311 is housed in the cassette chamber 312 and is movable along the y-axis direction. At least one sample cartridge 100 is loaded into the cassette unit 311. The cassette mechanism 310 moves the cassette unit 311 in the A9 direction along the y-axis. That is, the cassette mechanism 310 moves the cassette unit 311 in the second transport chamber 303B onto the passage path of the transport rod 301 in the first transport chamber 303A. The cassette mechanism 310 also moves the cassette unit 311 in the first transport chamber 303A out of the passage path of the transport rod 301, i.e., into the second transport chamber 303B.

[0103] Next, the insertion operation of inserting the sample cartridge 100 into the side entry type sample stage 5 and the removal operation of removing the sample cartridge 100 from the side entry type sample stage 5 will be described.

[0104] [Insertion Operation] When the insertion operation is performed, the cartridge transport mechanism 300 is set to its initial state. In the initial state, the transport rod 301 is connected to the shank portion 101. The sample cartridge 100 is loaded into the cassette portion 311. The cassette portion 311 is located within the first transport chamber 303A, and the sample cartridge 100 loaded into the cassette portion 311 is located coaxially with the transport rod 301 (i.e., on the axis Ax).

[0105] In the above initial state, the transport drive unit 302 moves the transport rod 301 in a linear motion toward the positive x-axis side, i.e., toward the side-entry sample stage 5. As the transport rod 301 moves in a linear motion toward the positive x-axis side, the end of the shank 101 on the positive x-axis side is introduced into the end of the sample cartridge 100 on the negative x-axis side.

[0106] When the sample cartridge 100 and the shank 101 are in a specific positional relationship in the x-axis direction, the transport rod 301 is rotated around the axis Ax by the transport drive unit 302. Note that, when in the specific positional relationship, the lock pin 211 provided on the sample cartridge 100 reaches the negative x-axis end of the first groove 104A of the key groove 104 formed in the shank 101.

[0107] As the transport rod 301 rotates, the shank 101 also rotates about the axis Ax, and the lock pin 211 reaches the end of the second groove 104B of the key groove 104 on the +y side of the y-axis. When the transport drive unit 302 then moves the transport rod 301 linearly toward the -x side, the lock pin 211 is accommodated in the third groove 104C of the key groove 104, and the sample cartridge 100 and the shank 101 are coupled together. Then, as the transport rod 301 moves linearly toward the -x side, the sample cartridge 100 is pulled out of the cassette unit 311.

[0108] The sample cartridge 100, which has been pulled out of the cassette unit 311, moves to a specific retracted position in conjunction with the linear movement of the transport rod 301. The specific retracted position is a position where the sample cartridge 100 does not overlap with the movement path of the cassette unit 311 along the y axis. Specifically, it is a position on the negative x-axis side of the second transport chamber 303B. The cassette mechanism unit 310 is then driven to move the cassette unit 311 to the positive y-axis side, and it is retracted from the movement path of the transport rod 301. This makes it possible to insert (transport) the sample cartridge 100 into the side-entry sample stage 5.

[0109] When the cassette part 311 is accommodated in the second transport chamber 303B, the transport drive part 302 linearly moves the transport rod 301 toward the + side of the x-axis. As the transport rod 301 linearly moves, the sample cartridge 100 coupled with the shank part 101 is inserted into the cartridge support part 15 of the side-entry sample stage 5. The guide structure 212 of the sample cartridge 100 then comes into contact with the taper mechanism 19 provided on the cartridge support part 15. At this time, the sample 11 attached near the tip of the sample cartridge 100 is accommodated in the sample chamber 3.

[0110] It should be noted that an airlock, gate valve, or the like may be provided for the purpose of providing a sample exchange chamber when the sample cartridge 100 is inserted. In this case, it is desirable that the opening and closing operations of the airlock or gate valve be performed by the linear and rotational driving of the transport drive unit 302. That is, the same configuration as the airlock valve generally provided in a transmission electron microscope may be used. Specifically, the internal mechanism rotates in response to the rotation of the inserted sample holder 10, and the rotational force of the sample holder 10 is converted into the opening and closing motion of the valve by two or more gears combined perpendicularly. This allows the airlock or gate valve to be opened and closed by the transport drive unit 302 alone.

[0111] Furthermore, when the transport drive unit 302 is used to drive a mechanism other than the above-described attachment and detachment of the sample cartridge 100 and the shank portion 101, it is necessary that the operation does not release the connection between the sample cartridge 100 and the shank portion 101. For example, a mechanism is provided that grips only the shank portion 101 when the transport drive unit 302 is driven, leaving the sample cartridge 100 in a free state where no forces other than the coupling force from the shank portion 101 act on the sample cartridge 100. Then, by having the transport drive unit 302 perform rotation or other drive operations while only the shank portion 101 is gripped, it is possible to prevent the connection between the sample cartridge 100 and the shank portion 101 from being affected.

[0112] After the sample cartridge 100 has been introduced to the innermost part of the side-entry sample stage 5, that is, after the guide structure 212 and the taper mechanism 19 come into contact, the transport rod 301 is disconnected from the shank 101. Note that the disconnection of the transport rod 301 from the shank 101 must be structured so as not to release the connection between the sample cartridge 100 and the shank 101. For example, the attachment and detachment of the transport rod 301 from the shank 101 must be achieved by providing a separate mechanism, such as a chuck mechanism and a chuck mechanism portion.

[0113] When the transport rod 301 is detached, the receiving structure 216 of the sample cartridge 100 abuts against the first support member 215, and the outer wall surface of the shank portion 101 abuts against the second support member 217. In other words, when the sample holder 10 is inserted into the side-entry sample stage 5, the sample cartridge 100 is supported by the first support member 215, and the shank portion 101 is supported by the second support member 217.

[0114] The first support member 215 and the second support member 217 are provided inside the cartridge support part 15. The cartridge support part 15 is attached to the inside of the sample holder outer cylinder 14, i.e., to the side-entry type sample stage 5. For this reason, it can be said that the sample cartridge 100 is directly supported on the side-entry type sample stage 5 by the cartridge support part 15.

[0115] The above-mentioned sample holder O-ring 16 is provided between the shank 101 of the sample cartridge 100 and the cartridge support 15. The sample chamber 3 is evacuated. Therefore, the shank 101, which has been detached from the transport rod 301, is drawn toward the sample chamber 3 on the positive x-axis side by atmospheric pressure, and the guide structure 212 is pressed against the taper mechanism 19. The above-mentioned elastic member 213 also biases the sample cartridge 100 toward the positive x-axis side, i.e., toward the taper mechanism 19 of the cartridge support 15. This increases the restraining force of the sample cartridge 100 and shank 101 on the side-entry sample stage 5 in the axial and radial directions of the sample cartridge 100. This allows the sample cartridge 100 to be directly supported by the cartridge support 15.

[0116] Thereafter, the transport driver 302 moves the transport rod 301 linearly toward the negative x-axis side to the predetermined standby position. Figure 8B shows the state after the above series of insertion operations has been completed. In this state, the sample 11 is observed.

[0117] [Removal Operation] The removal operation is performed after the observation of the sample 11. The transport drive unit 302 linearly moves the transport rod 301, which is located at a predetermined standby position, toward the +x-axis side. The transport rod 301 is then connected to the shank portion 101. Thereafter, the transport drive unit 302 linearly moves the transport rod 301 toward the -x-axis side, thereby removing the sample cartridge 100 to the outside of the side-entry sample stage 5.

[0118] As with the insertion operation, if a sample exchange chamber is provided, it is desirable that valve operation, etc., be performed by driving the transport drive unit 302. At this time, as with the insertion operation, it is necessary that the operation does not release the connection between the sample cartridge 100 and the shank portion 101.

[0119] The transport drive unit 302 drives the transport rod 301 to move the sample cartridge 100 to the specific retracted position described above. Thereafter, the cassette mechanism unit 310 moves the cassette unit 311 toward the + side of the y-axis, and positions the cassette unit 311 on the movement path of the transport rod 301 within the first transport chamber 303A.

[0120] The transport drive unit 302 linearly moves the transport rod 301 toward the +x-axis side, introducing the sample cartridge 100 into the cassette unit 311. The transport drive unit 302 then drives the transport rod 301 to rotate, and then linearly moves it toward the -x-axis side. During this rotational drive, the transport rod 301 rotates in the opposite direction to the rotational direction when the sample cartridge 100 and shank portion 101 were coupled together during the insertion operation. This releases the coupling between the sample cartridge 100 and shank portion 101, and the sample cartridge 100 and shank portion 101 are separated.

[0121] In the removal operation, as in the insertion operation, the connection between the sample cartridge 100 and the shank portion 101 and the attachment and detachment between the transport rod 301 and the shank portion 101 require a structure that prevents unintended attachment and detachment due to the linear and rotational drive of each other. In other words, as described above, the attachment and detachment of the transport rod 301 and the shank portion 101 must be achieved by providing a separate mechanism, such as a chuck mechanism and a chuck mechanism portion.

[0122] Thereafter, the transport drive unit 302 linearly moves the transport rod 301 toward the negative side of the x-axis, returning the shank 101 from which the sample cartridge 100 has been separated to its initial position. In addition, the cassette mechanism unit 310 moves the cassette unit 311 toward the negative side of the y-axis, returning the sample cartridge 100, which has been separated from the shank 101, into the second transport chamber 303B.

[0123] The structure and operation of the transport drive unit 302 and cassette mechanism unit 310 of the cartridge transport mechanism 300 described above can be substituted by human power. That is, the charged particle beam device 1 does not need to include the cartridge transport mechanism 300. If the cartridge transport mechanism 300 is not provided, the transport rod 301 is unnecessary, and therefore the mechanism for attaching and detaching the transport rod 301 and the shank 101 is also unnecessary. Furthermore, if the cassette unit 311 is omitted, the sample cartridge 100 is loaded into the side-entry sample stage 5 by a manual loading method, as in a normal transmission electron microscope.

[0124] According to the embodiment described above, at least one of the following advantageous effects can be obtained: (1) The sample holder 10, which can be inserted into and removed from the side-entry sample stage 5 provided in the charged particle beam device 1, has a cylindrical shank portion 101 and a sample cartridge 100 that is detachably connected to the shank portion 101 and on which a sample 11 is loaded. The sample cartridge 100 is directly supported on the side-entry sample stage 5 by a cartridge support portion 15 provided on the side-entry sample stage 5.

[0125] This increases the support rigidity of the cartridge-type sample holder 10 for automatically transporting the sample 11. As a result, noise caused by vibrations and the like can be reduced in the observed image during high-resolution observation.

[0126] Furthermore, the joint between the sample cartridge 100 and the shank 101 can be designed to be independent of and separate from the sample stage 201 on which the sample 11 is placed. This allows the sample stage 201 located in the pole piece gap to be made smaller and simpler when observing the sample 11, allowing the tilt angle of the sample 11 to be increased.

[0127] Furthermore, since the sample cartridge 100 can be introduced into the sample chamber 3 from the side entry sample stage 5, there is no need to provide a port for introducing the sample cartridge 100 separately from the side entry sample stage 5. This reduces the restrictions on mounting a detector, an analyzer, etc. near the sample 11.

[0128] (2) The cartridge support section 15 is provided with a first support member 215 that supports the sample cartridge 100 and a second support member 217 that supports the shank portion 101. As a result, when the sample holder 10 is inserted into the side-entry sample stage 5, the sample cartridge 100 is supported by the first support member 215, and the shank portion 101 is supported by the second support member 217. As a result, the support rigidity of the sample holder 10 within the cartridge support section 15 is increased, making it possible to generate highly accurate observation images.

[0129] (3) The sample cartridge 100 has a receiving structure 216 that is a cylinder or a portion of a cylinder, and a guide structure 212 that connects to the receiving structure 216. When the sample holder 10 is inserted into the side-entry sample stage 5, the receiving structure 216 comes into contact with the first support member 215. This increases the support rigidity of the cartridge support section 15 for the sample cartridge 100.

[0130] (4) The sample cartridge 100 has a driving mechanism 100A and a functional component 400, which are operating structures that operate the sample 11. The driving mechanism 100A and the functional component 400 are mechanically or electrically connected to a linear-acting rod 103 and a power unit 406, which are devices that operate the operating structure, through the inside of the shank 101. This allows the mechanical structure, wiring, etc. to be arranged inside the cylindrical shank 101, contributing to the miniaturization of the device.

[0131] (5) In the sample holder 10, a portion of the sample cartridge 100 is inserted into the cylindrical shank portion 101, thereby coupling the sample cartridge 100 and the shank portion 101. A support structure 214 for supporting the inserted sample cartridge 100 is provided on the inner periphery of the shank portion 101. The sample cartridge 100 and the shank portion 101 have a key structure 220 in which a lock pin 211, which is a key, engages with a key groove 104. The key groove 104 has a third groove portion 104C in which the engaged lock pin 211 is housed, and a tapered surface 105 is formed in the third groove portion 104C. This restricts rotation of the shank portion 101 around the axis Ax relative to the sample cartridge 100. In other words, the coupling angle between the lock pin 211 and the key groove 104, and more specifically, the coupling angle between the sample cartridge 100 and the shank portion 101, can be uniquely determined.

[0132] Additionally, a support structure 214 for supporting the inserted sample cartridge 100 is provided on the inner periphery of the shank 101. This increases the rigidity of the sample cartridge 100 and the shank 101 when they are coupled together.

[0133] (6) An elastic member 213 is disposed at the position where the sample cartridge 100 and the shank 101 are coupled. When the sample cartridge 100 and the shank 101 are coupled and the sample cartridge 100 abuts against the cartridge support 15, the elastic member 213 urges the sample cartridge 100 toward the tapered mechanism 19 of the cartridge support 15. This prevents the sample cartridge 100 and the shank 101 from unintentionally falling off, and increases the restraining force of the sample holder 10 on the side-entry sample stage 5 in the axial and radial directions of the sample cartridge 100. In other words, it is possible to prevent changes in the positional relationship between the coupled sample cartridge and the shank 101.

[0134] Although the embodiments of the present disclosure have been specifically described above, they are not limited to the above-described embodiments and can be modified in various ways without departing from the spirit of the present disclosure. Except for essential components, components can be added, deleted, or replaced in each embodiment. Unless otherwise specified, each component may be singular or plural. A combination of each embodiment is also possible.

[0135] DESCRIPTION OF SYMBOLS 1 Charged particle beam device, 5 Side entry type sample stage, 10 Sample holder, 11 Sample, 15 Cartridge support portion, 19 Taper mechanism, 57 Main control device, 100 Sample cartridge, 100A Drive mechanism, 100B Coupling mechanism, 101 Shank portion, 103 Linear motion rod, 104 Key groove, 104A First groove portion, 104B Second groove portion, 104C Third groove portion, 105 Tapered surface, 210 Push rod, 211 Lock pin, 212 Guide structure, 213 Elastic member, 214 Support structure, 215 First support member, 216 Receiving structure, 217 Second support member, 220 Key structure, 400 Functional part, 406 Power unit, Ax Axis

Claims

1. A charged particle beam device comprising a side-entry type sample stage and a sample holder that can be inserted into and removed from the side-entry type sample stage, wherein the sample holder has a cylindrical shank portion and a sample cartridge that is detachably connected to the shank portion and on which a sample is loaded, the side-entry type sample stage has a cartridge support portion that supports the sample cartridge, and the sample cartridge is supported directly on the side-entry type sample stage by the cartridge support portion.

2. A charged particle beam device as described in claim 1, wherein the cartridge support section is provided with a first support member that supports the sample cartridge and a second support member that supports the shank portion, and when the sample holder is inserted into the side entry type sample stage, the sample cartridge is supported by the first support member and the shank portion is supported by the second support member.

3. A charged particle beam device according to claim 2, wherein the sample cartridge has a receiving structure that is a cylinder or part of a cylinder, and a guide structure that is connected to the receiving structure, and when the sample holder is inserted into the side entry type sample stage, the receiving structure comes into contact with the first support member, and the sample cartridge is supported by the cartridge support part.

4. A charged particle beam device according to claim 3, wherein the sample cartridge has an operating structure that performs an operation on the sample, and the operating structure is mechanically or electrically connected to a device that operates the operating structure through the inside of the shank portion.

5. A sample holder having a sample cartridge for carrying and transporting a sample to be observed with a charged particle beam device, and a shank portion for coupling with the sample cartridge, wherein the sample holder is capable of rotating around a rotation axis along the direction in which the shank portion extends and moving along the rotation axis, wherein the sample cartridge and the shank portion are coupled together by inserting a part of the sample cartridge into the cylindrical shank portion, wherein a support structure for supporting the inserted sample cartridge is provided on the inner periphery of the shank portion, and the sample cartridge and the shank portion have a key structure in which a key engages with a key groove, and the key groove has a first groove portion along the direction in which the sample holder moves, a second groove portion that communicates with the first groove portion and that corresponds to the direction in which the sample holder rotates, and a third groove portion that communicates with the second groove portion and that accommodates the engaged key, and wherein the third groove portion is provided with a tapered surface, A sample holder in which the shank portion rotates around the rotation axis relative to the sample cartridge and moves along the rotation axis, thereby enabling engagement and disengagement between the key and the key groove.

6. A sample holder as described in claim 5, wherein the sample cartridge is supported by abutting against a cartridge support part of the charged particle beam device, and has an elastic member arranged at a position where the sample cartridge and the shank part are joined, and when the sample cartridge and the shank part are joined and the sample cartridge abuts against the cartridge support part, the elastic member urges the sample cartridge towards the cartridge support part.

Images