Substrate storage container

Abstract

This substrate storage container comprises a front retainer having a plurality of substrate pressing parts. Each of the substrate pressing parts includes an arm section and a holding section. The holding section forms a V-shaped holding groove by an upper first inclined surface inclined with respect to a substrate surface and a lower second inclined surface inclined with respect to the substrate surface on the opposite side from the first inclined surface. In two of the substrate pressing parts adjacent to each other in the vertical direction, the first inclined surface of the lower one of the substrate pressing parts and the second inclined surface of the upper one of the substrate pressing parts do not overlap in the front view, and the lowermost end of the second inclined surface of the upper one of the substrate pressing parts is positioned lower than the uppermost end of the first inclined surface of the lower one of the substrate pressing parts. The amount of protrusion of the first inclined surface toward the back surface of the body of the container is smaller than the amount of protrusion of the second inclined surface toward the back surface of the body of the container.

Description

Substrate storage container

[0001] FIELD The present disclosure relates to substrate containers.

[0002] The substrate storage container comprises a container body capable of storing substrates and a lid body that closes the opening of the container body, and a front retainer having multiple stages of substrate holding portions in the vertical direction, allowing multiple substrates (e.g., 25 substrates) to be held and stored in an airtight state.

[0003] The substrate holder has a holding portion that contacts and holds the substrate, and an arm portion that absorbs shocks and vibrations that occur during transportation of the substrate storage container (see, for example, Patent Document 1).

[0004] In the substrate holder 140 of Prior Art 1, a gap is provided between the holding portions of two adjacent stages of the substrate holder in the vertical direction so that each stage functions independently (see FIG. 6A). However, when the substrate is held in place as the lid is closed, the substrate may be bent or displaced, causing the substrate to become pinched (pushed into) this gap (see FIG. 6B). Even if the substrate is held by the holder, vibrations during transportation or shocks such as being dropped may cause the substrate to come off the holder and become pinched in the gap.

[0005] In order to solve these problems, for example, in the substrate holding portions 240 and 340 described in Patent Document 2 (Prior Art 2) and Patent Document 3 (Prior Art 3), the holding portions of two adjacent steps in the vertical direction are arranged in a staggered pattern when viewed from the front, thereby providing a gap that is not parallel to the substrate surface (step direction) (FIGS. 7A and 8A).

[0006] JP 2002-353301 A International Publication No. 2021 / 234808 International Publication No. 2018 / 185894

[0007] However, in such a holding section, the lower end of the upper holding section is located lower than the upper end of the lower holding section, so the substrate may come into contact with both the upper and lower holding sections. As a result, for example, a substrate that should be held by the lower holding section may slide (misalign) to the upper section and be held by the upper holding section, interfering with the upper substrate (see FIG. 7B ). A substrate that should be held by the lower (or upper) holding section may be caught between the lower end and the upper end of the upper holding section, preventing it from sliding to the lower (or upper) section (see FIG. 8B ).

[0008] The present disclosure provides a substrate storage container that improves the reliability with which a substrate is held by a holder.

[0009] (1) A substrate storage container according to one aspect of the present disclosure includes a container body capable of storing multiple substrates in multiple vertical tiers, a lid body closing a front opening of the container body, a front retainer provided on the lid body, and a support structure provided on the left, right, or rear side of the container body, for holding the substrates between the container body and the front retainer when the opening is closed by the lid body. The front retainer has a base attached to the lid body and a plurality of substrate holders arranged in a vertical direction, each of the plurality of substrate holders supporting a substrate. Each of the plurality of substrate holders includes an elastically deformable arm extending from the base and a holding portion provided on the arm portion for contacting and pressing the substrate. The holding portion has a first upper inclined surface inclined relative to a substrate surface of the substrate and a second lower inclined surface inclined opposite the first inclined surface relative to the substrate surface, the first inclined surface and the second inclined surface forming a V-shaped holding groove. In two of the plurality of substrate holders that are adjacent in the vertical direction, the first inclined surface of the lower tier and the second inclined surface of the upper tier do not overlap in a front view, and the bottom end of the second inclined surface of the upper tier is located below the top end of the first inclined surface of the lower tier. The amount of protrusion of the first inclined surface toward the back surface of the container body is smaller than the amount of protrusion of the second inclined surface toward the back surface of the container body.

[0010] (2) In the substrate storage container of (1) above, the inclination angle of the first inclined surface with respect to the substrate surface may be larger than the inclination angle of the second inclined surface with respect to the substrate surface.

[0011] (3) In the substrate storage container of (1) or (2) above, the position of the second inclined surface at which the protrusion amount is greatest may be closer to the center of the substrate in the left-right direction than the position of the first inclined surface at which the protrusion amount is greatest.

[0012] (4) In any one of the substrate storage containers (1) to (3) above, the holding portion may be a first holding portion, and each of the plurality of substrate holders may further include a second holding portion provided at a position symmetrical to the left and right of the arm portion relative to the first holding portion.

[0013] According to the present disclosure, it is possible to provide a substrate storage container that improves the reliability with which substrates are held by holding parts.

[0014] FIG. 1 is an exploded perspective view showing a substrate storage container according to an embodiment. FIG. 2 is a perspective view showing the back surface of a lid according to an embodiment. FIG. 3 is a perspective view showing a front retainer according to an embodiment. FIG. 4A is a front view showing a substrate holding portion according to an embodiment. FIG. 4B is a cross-sectional view taken along line A-A showing the substrate holding portion according to an embodiment. FIG. 5A is a cross-sectional view showing a state before substrates are held in a substrate storage container according to an embodiment. FIG. 5B is a cross-sectional view showing a state after substrates are held in a substrate storage container according to an embodiment. FIG. 6A is a front view showing a substrate holding portion of Prior Art 1. FIG. 6B is a cross-sectional view taken along line B-B in FIG. 6A. FIG. 7A is a front view showing a substrate holding portion of Prior Art 2. FIG. 7B is a cross-sectional view taken along line C-C in FIG. 7A. FIG. 8A is a front view showing a substrate holding portion of Prior Art 3. FIG. 8B is a cross-sectional view taken along line D-D in FIG. 8A.

[0015] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In the embodiments of the present disclosure, the same components are denoted by the same reference numerals throughout.

[0016] Fig. 1 is an exploded perspective view showing a substrate storage container 1 according to one embodiment. As shown in Fig. 1, the substrate storage container 1 includes a container body 10 for storing substrates, a lid 20 for closing an opening 11 of the container body 10, and an annular sealing member 30 provided between the container body 10 and the lid 20.

[0017] The container body 10 is a box-shaped body into which multiple substrates can be inserted, and is a front-open type with a frame-shaped opening 11 formed on the front. The opening 11 is formed in a bent shape with a step so that it widens outward, and the surface of the step is formed on the inner peripheral edge of the front of the opening 11 as a sealing surface 12 with which the sealing member 30 comes into contact.

[0018] Support bodies 13 are arranged on both the left and right side surfaces inside the container body 10 as support structures. These support bodies 13 function to place (temporarily place) and position the substrate until the opening of the opening 11 of the container body 10 is closed with the lid 20. More specifically, multiple grooves are formed in the support body 13 in the height direction, forming so-called grooved teeth. The substrate is placed on the grooved teeth at two locations on the left and right at the same height. The material of the support body 13 may be the same as that of the container body 10, but may also be a different material to improve cleanability and slidability.

[0019] A rear retainer 17 is additionally disposed as a support structure on a back surface 16 located at the rear inside the container body 10. When the opening of the opening 11 of the container body 10 is closed by the lid 20, the rear retainer 17 pairs with a front retainer 40 (described later) to sandwich and hold the substrate. The support body 13 and rear retainer 17 may be integrally provided in the container body 10 by insert molding or the like. The support body 13 and rear retainer 17 may also be separate members from the container body 10 and provided in the container body 10 by fitting or the like.

[0020] A mounting portion 14 for a robotic flange is provided in the center of the ceiling of the container body 10. A robotic flange is detachably attached to the mounting portion 14. The substrate storage container 1 is gripped by the robotic flange by a transport robot in a factory and transported to a processing device for each process of processing the substrates.

[0021] Furthermore, attachment portions 15 for manual handles are provided in the center of the outer surfaces of both the left and right sides of the container body 10. Manual handles to be gripped by an operator are detachably attached to the left and right attachment portions 15, respectively.

[0022] For example, an air inlet valve and an exhaust valve may be provided on the bottom surface of the container body 10. Each of the air inlet valve and the exhaust valve has a filter for filtering gas and also functions as a check valve. An inert gas such as nitrogen gas or dry air is supplied from the air inlet valve to the inside of the substrate storage container 1, which is closed by the lid 20 and in a sealed state, and is discharged from the exhaust valve as needed, thereby replacing the gas inside the substrate storage container 1 and maintaining an airtight state. The number and positions of the air inlet valves and exhaust valves are arbitrary.

[0023] Next, a description will be given of the lid 20. Fig. 2 is a perspective view showing the back surface of the lid 20 according to one embodiment.

[0024] The lid 20 is attached to the front of the opening 11 of the container body 10 and has a generally rectangular shape. The lid 20 has a locking mechanism (not shown) and is locked by fitting a locking claw into a locking hole formed in the container body 10. As shown in Figure 2, an elastic front retainer 40 is provided in the center of the lid 20 to hold the front peripheral edge of the substrate horizontally.

[0025] The front retainer 40 is made of a material that is easy to clean and has good sliding properties because it is a part that comes into direct contact with the substrate, similar to the grooved teeth of the support body 13 and the rear retainer 17. The front retainer 40 may be detachably attached to the lid body 20 by a fitting engagement or the like, or may be integrally molded by insert molding.

[0026] An attachment groove for attaching the seal member 30 is formed on the back surface of the lid body 20. More specifically, a ring-shaped projection smaller than the step of the opening 11 is formed on the back surface of the lid body 20, thereby forming an annular attachment groove with a generally U-shaped cross section. This projection fits deeper than the step of the opening 11 when the lid body 20 is attached to the container body 10.

[0027] Examples of materials for the container body 10 and the lid 20 include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyetheretherketone, and liquid crystal polymer. The thermoplastic resins may further contain, as appropriate, conductive agents such as conductive carbon or conductive polymers, various antistatic agents, and ultraviolet absorbers.

[0028] When the lid 20 is attached to the container body 10, the sealing member 30 adheres closely to the sealing surface 12 and the lid 20 to ensure the airtightness of the substrate storage container 1. The sealing member 30 reduces the intrusion of dust, moisture, and the like from the outside into the substrate storage container 1, and also reduces the leakage of gas and liquid from the inside of the substrate storage container 1 to the outside.

[0029] The sealing member 30 has an annular shape corresponding to the front shape of the lid 20 (and the shape of the opening 11 of the container body 10) (see FIG. 2). The annular sealing member 30 may be substantially circular, elliptical, or oval in shape before being attached to the lid 20.

[0030] If the seal member 30 is loose when fitted into the mounting groove, variations in the sealing area of ​​the seal lip will occur. For this reason, the inner periphery of the frame of the seal member 30 is formed to be slightly (approximately 1% to 5%) smaller than the annular circumferential surface located deep within the mounting groove.

[0031] The seal member 30 is molded using an elastic material such as a thermoplastic elastomer, such as a polyester-based elastomer, a polyolefin-based elastomer, a fluorine-based elastomer, or a urethane-based elastomer, or a fluororubber, an ethylene propylene rubber, or a silicone-based rubber. To improve adhesion, these materials may be selectively added with a predetermined amount of fillers, such as carbon, glass fiber, mica, talc, silica, or calcium carbonate, or resins, such as polyethylene, polyamide, polyacetal, fluorine-based resin, or silicone resin. To impart conductivity and antistatic properties, carbon fiber, metal oxides, or various antistatic agents may be appropriately added. The hardness of the seal member 30 may be 40 to 90 degrees Shore A, or 60 to 90 degrees Shore A.

[0032] The substrate storage container 1 stores substrates having a diameter of, for example, 300 mm or 450 mm. The type of substrate stored in the substrate storage container 1 is not particularly limited, and may be, for example, a silicon wafer, a quartz wafer, or a gallium arsenide wafer.

[0033] Here, the front retainer 40 will be described. Fig. 3 is a perspective view showing the front retainer 40 according to one embodiment. Fig. 4A and Fig. 4B are views showing the board retainer 42 according to one embodiment, with Fig. 4A being a front view and Fig. 4B being a cross-sectional view taken along line A-A in Fig. 4A.

[0034] As shown in FIG. 3, the front retainer 40 has a base 41 attached to the cover 20 and a plurality of board holders 42 (stages) arranged in the vertical direction.

[0035] The base 41 has a generally rectangular plate shape. The base 41 is attached to the lid 20 by engaging or locking the locking portions 411 on both sides of the base 41 with fixing means formed in the recess of the lid 20 (see FIG. 2). At this time, the base 41 is attached slightly spaced from the bottom surface of the recess of the lid 20 by a plurality of protrusions 412 formed on the surface opposite to the surface from which the board pressing portion 42 extends.

[0036] Each board retainer 42 supports a board. Each board retainer 42 includes an arm 421 that extends from one surface of the pair of left and right bases 41 and is bridged to connect them. In the front retainer 40 of this embodiment, 25 board retainers 42 are bridged across the left and right bases 41.

[0037] The arm portion 421 is elastically deformable as a whole in the front-rear direction (closing direction) connecting the rear surface 16 of the container body 10 and the lid body 20 .

[0038] The arm portion 421 includes a holding portion 422 that contacts and presses against the substrate. In this embodiment, the arm portion 421 includes a pair of holding portions 422 (first holding portion, second holding portion) that are arranged at symmetrical positions on the left and right of the arm portion 421. A portion of the arm portion 421 that is located between the pair of left and right holding portions 422, 422 is curved or bent in a direction away from the back surface 16.

[0039] The holding portion 422 has a beak-like shape with open upper and lower jaws, and a holding groove formed on the inside. More specifically, the holding portion 422 has an upper first inclined surface 422a that is inclined relative to the substrate surface (or horizontal plane) held by the holding portion 422, and a lower second inclined surface 422b that is inclined on the opposite side of the substrate surface from the first inclined surface 422a, and the first inclined surface 422a and the second inclined surface 422b form a holding groove that is approximately V-shaped in side view (see FIG. 4B ). The substrate surface is the surface of the substrate and is a plane that intersects with the up-down direction.

[0040] The holder 422 of each stage is formed so that the inclination angle θ1 of the first inclined surface 422a with respect to the substrate surface is larger than the inclination angle θ2 of the second inclined surface 422b with respect to the substrate surface. The inclination angle θ1 is the angle between the substrate surface and the first inclined surface 422a. The inclination angle θ2 is the angle between the substrate surface and the second inclined surface 422b. Note that the inclination angle θ1 may be, for example, approximately 55 degrees or more and 75 degrees or less, and the inclination angle θ2 may be, for example, approximately 30 degrees or more and 50 degrees or less.

[0041] Because the inclination angle θ1 is greater than the inclination angle θ2, even if the vertical distance (height) from the center to the top end of the holding portion 422 (the holding groove) and the vertical distance (height) from the center to the bottom end of the holding portion 422 (the holding groove) are the same, the protrusion amount H1 of the first inclined surface 422a is smaller than the protrusion amount H2 of the second inclined surface 422b. The center of the holding groove of the holding portion 422 is the boundary between the first inclined surface 422a and the second inclined surface 422b. The protrusion amount H1 is the length of the first inclined surface 422a from the center of the holding groove of the holding portion 422 toward the back surface 16 of the container body 10 (or in the front-to-rear direction). The protrusion amount H2 is the length of the second inclined surface 422b from the center of the holding groove of the holding portion 422 toward the back surface 16 of the container body 10 (or in the front-to-rear direction).

[0042] For example, if the pitch of each step of the substrate holding portion 42 is 10 mm and the vertical height of the substrate holding portion 42 is 12 mm, the protrusion amount H1 will be approximately 1.6 mm or more and 4.2 mm or less, and the protrusion amount H2 will be approximately 5.0 mm or more and 10.4 mm or less.

[0043] The position of the second inclined surface 422b where the amount of protrusion is greatest is closer to the center of the board in the left-right direction (located more inward in the width direction) than the position of the first inclined surface 422a where the amount of protrusion is greatest. Therefore, the holding portion 422 has a Z (S) shape when viewed from the front (see FIG. 4A). The pair of left and right holding portions 422 are symmetrical. Each of the first inclined surface 422a and the second inclined surface 422b has a substantially triangular or trapezoidal shape.

[0044] With this configuration, in two vertically adjacent stages of the board holders 42, 42, the first inclined surface 422a of the lower stage and the second inclined surface 422b of the upper stage do not overlap in a front view, and the bottom end of the second inclined surface 422b of the upper stage is positioned below the top end of the first inclined surface 422a of the lower stage (see FIG. 4A). That is, the bottom end of (the second inclined surface 422b of) the upper stage holding portion 422 is positioned below the top end of (the first inclined surface 422a of) the lower stage holding portion 422 (see FIG. 4B).

[0045] Finally, we will explain how substrates are held in the substrate storing container 1. Fig. 5A is a cross-sectional view showing a state before substrates are held in the substrate storing container 1 according to one embodiment, and Fig. 5B is a cross-sectional view showing a state after substrates are held in the substrate storing container 1 according to one embodiment. Note that in Figs. 5A and 5B, the support body 13 in parentheses shown on the right side is a support structure in the case of a substrate storing container 1 as a modified form that does not have a rear retainer 17.

[0046] Immediately before the lid 20 is closed, the substrate is supported by the support 13 of the container body 10 and is spaced apart from the substrate pressing portion 42 (and the holding portion 422) as shown in FIG. 5A.

[0047] Thereafter, as the lid 20 is pressed toward the rear surface 16 of the container body 10, which is the closing direction, the peripheral edge of the substrate facing the lid 20 comes into contact with the moving substrate pressing portion 42, as shown in Fig. 5B, and moves to the back of the V-shaped holding groove while sliding on the second inclined surface 422b. At this time, the peripheral edge of the substrate facing the rear surface 16 comes into contact with the rear retainer 17 and moves to a predetermined height.

[0048] In this way, the substrate is separated (floated) from the support body 13 and is held between the holding portion 422 of the substrate pressing portion 42 and the rear retainer 17 .

[0049] 6A and 6B are diagrams showing the board holder 140 of prior art 1, with Fig. 6A being a front view and Fig. 6B being a cross-sectional view taken along line B-B in Fig. 6A. Figs. 7A and 7B are diagrams showing the board holder 240 of prior art 2, with Fig. 7A being a front view and Fig. 7B being a cross-sectional view taken along line C-C in Fig. 7A. Figs. 8A and 8B are diagrams showing the board holder 340 of prior art 3, with Fig. 8A being a front view and Fig. 8B being a cross-sectional view taken along line D-D in Fig. 8A.

[0050] As described above, the substrate storage container 1 includes a container body 10 capable of storing multiple substrates in multiple vertical tiers, a lid 20 that closes an opening on the front of the container body 10, and a front retainer 40 that is attached to the lid 20 and holds the substrates when the opening is closed by the lid 20. The front retainer 40 has a base 41 that is attached to the lid 20 and multiple substrate holders 42 arranged in the vertical direction. Each substrate holder 42 supports a substrate. Each substrate holder 42 includes an elastically deformable arm 421 that extends from the base 41 and a holding portion 422 that is attached to the arm 421 and contacts and presses the substrate. The holding portion 422 forms a V-shaped holding groove with an upper first inclined surface 422a that is inclined relative to the substrate surface and a lower second inclined surface 422b that is inclined in the opposite direction to the first inclined surface 422a relative to the substrate surface. In two vertically adjacent substrate holders 42, 42, the lower first inclined surface 422a and the upper second inclined surface 422b do not overlap in a front view, and the bottom end of the upper second inclined surface 422b is located lower than the top end of the lower first inclined surface 422a. The amount H1 of protrusion of the first inclined surface 422a toward the back surface 16 of the container body 10 is smaller than the amount H2 of protrusion of the second inclined surface 422b toward the back surface 16 of the container body 10.

[0051] As a result, the second inclined surface 422b of the upper holding portion 422 protrudes more toward the rear surface 16 than the first inclined surface 422a of the lower holding portion 422, so that when a substrate is being held, the possibility of the substrate being mistakenly held by a holding portion 422 adjacent to the upper or lower holding portion 422 of the stage at which it is intended to be held is reduced. As in prior arts 1 to 3, the possibility of the substrate being caught between or in the gap between the holding portions 422, 422 of two vertically adjacent substrate pressers 42 is reduced.

[0052] In the front retainer 40 of the embodiment, the inclination angle θ1 of the first inclined surface 422a relative to the board surface (horizontal plane) is larger than the inclination angle θ2 of the second inclined surface 422b relative to the board surface (horizontal plane). This increases the likelihood that the board will slide along the first inclined surface 422a, which has a larger inclination angle θ1, when an external force, such as an impact during a drop, acts on the board. This reduces the likelihood that the board will interfere with the grooved teeth support 13 (rear retainer 17) and the board placed on the lower tier. For the board holders 42 on each tier except the top tier, another board holder 42 (holding portion 422) exists on the upper tier, so the underside of the holding portion 422 prevents the board from moving. Therefore, the board will not move up to the upper holding portion 422, reducing the likelihood of the board falling off.

[0053] In the front retainer 40 of the embodiment, the position of the second inclined surface 422b with the greatest protrusion is closer to the center of the board in the left-right direction (located more inward in the width direction) than the position of the first inclined surface 422a with the greatest protrusion. This allows the holding portion 422 to hold the circular board at a position closer to the center of the board in the left-right direction. Therefore, the protrusion amount of the holding portion 422 can be reduced compared to when the position of the second inclined surface 422b with the greatest protrusion is farther away from the center of the board in the left-right direction than the position of the first inclined surface 422a with the greatest protrusion, thereby reducing the amount of resin material (amount of resin).

[0054] In the front retainer 40 of this embodiment, the substrate pressing portion 42 includes a pair of holding portions 422 provided at symmetrical positions on the left and right of the arm portion 421. This allows a circular (disk-shaped) substrate to be held between the front retainer 40 and the rear retainer 17 while being centered near the center line of the container body 10.

[0055] Although the embodiments of the present disclosure have been described in detail above, the present disclosure is not limited to the above-described embodiments, and various modifications and changes are possible within the scope of the gist of the present disclosure described in the claims.

[0056] (Variation) In the above embodiment, all of the board holders 42 on each level have the same holding portion 422. However, only in the holding portion 422 of the board holder 42 holding the top board, the inclination angle θ1 of the first inclined surface 422a relative to the board surface (horizontal plane) may be equal to or smaller than the inclination angle θ2 of the second inclined surface 422b relative to the board surface (horizontal plane). As a result, even though the top board holder 42 does not have a board holder 42 (holding portion 422) above it, when an external force, such as an impact during a drop, acts on the underside of the holding portion 422, the board is less likely to slide along the first inclined surface 422a than the boards on the other levels. Therefore, even in this case, the board on the top level can be less likely to fall off (detach). The inclination angle θ2 of the second inclined surface 422b on the top level is basically the same as, but may be different from, the inclination angles θ2 of the other levels.

[0057] In the above embodiment, the rear retainer 17 is disposed as a support structure on the rear surface 16 of the container body 10, but the portions of the supports 13 on the left and right sides near the rear surface 16 may be formed in a shape that functions as a support structure without disposing the rear retainer 17. In this case, the substrate is held between the holding portion 422 of the substrate pressing portion 42 and the pocket end near the rear surface 16 of the support 13.

[0058] DESCRIPTION OF SYMBOLS 1 Substrate storage container 10 Container body 11 Opening 12 Sealing surface 13 Support body (support structure) 14 Mounting portion 15 Mounting portion 16 Rear surface 17 Rear retainer (support structure) 20 Lid 30 Sealing member 40 Front retainer 41 Base 411 Latched portion 412 Protrusion 42 Substrate holding portion 421 Arm portion 422 Holding portion (first holding portion, second holding portion) 422a First inclined surface 422b Second inclined surface 140, 240, 340 Substrate holding portion H1, H2 Protrusion amount θ1, θ2 Inclination angle

Claims

1. A container body capable of storing multiple substrates in multiple vertical tiers; a lid body for closing an opening on the front of the container body; a front retainer attached to the lid body; and a support structure attached to the left or right side or rear of the container body for holding the substrates between the front retainer and the lid body when the opening is closed by the lid body, wherein the front retainer has: a base attached to the lid body; and a plurality of substrate holders arranged in a vertical direction, each of the plurality of substrate holders supporting a substrate, each of the plurality of substrate holders including: an arm portion extending from the base and capable of elastic deformation; and a holding portion attached to the arm portion for contacting and pressing the substrate, wherein the holding portion has a first inclined upper surface inclined relative to the substrate surface of the substrate; and a second inclined lower surface inclined in the opposite direction to the first inclined surface relative to the substrate surface, wherein the first inclined surface and the second inclined surface form a V-shaped holding groove, A substrate storage container, wherein, between two adjacent substrate holding portions among the plurality of substrate holding portions in the vertical direction, the first inclined surface of the lower tier and the second inclined surface of the upper tier do not overlap when viewed from the front, and the bottom end of the second inclined surface of the upper tier is located lower than the top end of the first inclined surface of the lower tier, and the amount of protrusion of the first inclined surface toward the back surface of the container body is smaller than the amount of protrusion of the second inclined surface toward the back surface of the container body.

2. The substrate storage container according to claim 1, wherein the inclination angle of the first inclined surface relative to the substrate surface is greater than the inclination angle of the second inclined surface relative to the substrate surface.

3. A substrate storage container according to claim 1 or 2, wherein the position of the second inclined surface at which the amount of protrusion is greatest is closer to the center of the substrate in the left-right direction than the position of the first inclined surface at which the amount of protrusion is greatest.

4. A substrate storage container as described in claim 1 or 2, wherein the holding portion is a first holding portion, and each of the plurality of substrate pressing portions further includes a second holding portion provided at a position symmetrical to the arm portion with respect to the first holding portion.

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