Piezoelectric driving structure and piezoelectric driving device

Abstract

A piezoelectric driving structure (100). The piezoelectric driving structure (100) comprises a plurality of metal layers (10) and a plurality of piezoelectric layers (20), wherein the plurality of piezoelectric layers (20) and the plurality of metal layers (10) are arranged in a stacked manner, with one piezoelectric layer (20) being arranged between two metal layers (10); when two connected metal layers (10) are energized and have different voltages, the corresponding piezoelectric layer (20) is configured to deform; and the plurality of piezoelectric layers (20) comprise a first deformable piezoelectric layer (21) and a second deformable piezoelectric layer (22), the first deformable piezoelectric layer (21) can be configured to be stretched, and the second deformable piezoelectric layer (22) can be configured to be compressed.

Description

Piezoelectric driving structure and piezoelectric driving device

[0001] Priority information

[0002] The present application claims priority to and the benefit of the filing date of Chinese Patent Application No. 202410813223.3, filed on June 21, 2024, in the State Intellectual Property Office of China, and incorporates by reference the entire disclosure thereof. TECHNICAL FIELD

[0003] The present application relates to the technical field of piezoelectric driving, and more particularly, to a piezoelectric driving structure and a piezoelectric driving device. BACKGROUND

[0004] Micro-electro-mechanical system (MEMS) micro-mirrors are widely used in optical scanning mirrors, automotive head-up displays (HUDs), laser radars, and the like. Common driving methods for micro-mirrors mainly include electrostatic, piezoelectric, electromagnetic, and electrothermal methods. Piezoelectric driving controls the deflection of a mirror surface through the electrostrictive effect. In related technologies, a piezoelectric driving module can provide a small driving force and a limited deflection angle. SUMMARY

[0005] The present application provides a piezoelectric driving structure and a piezoelectric driving device.

[0006] The present application provides a piezoelectric driving structure, which includes a plurality of metal layers and a plurality of piezoelectric layers. The plurality of piezoelectric layers and the plurality of metal layers are stacked and arranged. One piezoelectric layer is arranged between two metal layers. When the two connected metal layers are powered and the voltages are different, the piezoelectric layer is used to deform. The plurality of piezoelectric layers includes a first deformation piezoelectric layer and a second deformation piezoelectric layer. The first deformation piezoelectric layer can be used to stretch, and the second deformation piezoelectric layer can be used to compress.

[0007] In this way, by arranging a plurality of piezoelectric layers in the piezoelectric driving structure, and controlling one piezoelectric layer to be arranged between two metal layers, when the two adjacent metal layers are powered, the first deformation piezoelectric layer stretches and deforms, and the second deformation piezoelectric layer compresses and deforms. The piezoelectric driving structure can drive the connected target driving module to deflect by superimposing the stretching force and the compressing force, amplify the electrostrictive effect, so that the piezoelectric driving structure can form a larger driving force, and further improve the deflection angle.

[0008] In some embodiments, all the first deformation piezoelectric layers form a first module through the metal layers, and all the second deformation piezoelectric layers form a second module through the metal layers. The first module and the second module are stacked and arranged.

[0009] Thus, by forming a first module by the first deformation piezoelectric layer and the metal layer that occurs tensile deformation, forming a second module by the second deformation piezoelectric layer and the metal layer that occurs compressive deformation, and stacking the first module and the second module, the compressive force and the tensile force generated during deformation can be superimposed to form a driving force, thereby increasing the driving force of the piezoelectric driving structure.

[0010] In some embodiments, the polarization direction of the first deformation piezoelectric layer and the polarization direction of the second deformation piezoelectric layer are the same, and the electric field direction formed by the two metal layers connected to the first deformation piezoelectric layer is different from the electric field direction formed by the two metal layers connected to the second deformation piezoelectric layer.

[0011] Thus, by setting the polarization direction of the first deformation piezoelectric layer and the polarization direction of the second deformation piezoelectric layer to be the same, and setting the electric field direction formed by the two metal layers connected to the first deformation piezoelectric layer and the electric field direction formed by the two metal layers connected to the second deformation piezoelectric layer to be different, the deformation types generated by the first deformation piezoelectric layer and the second deformation piezoelectric layer can be made different.

[0012] In some embodiments, the polarization direction of the first deformation piezoelectric layer and the polarization direction of the second deformation piezoelectric layer are different, and the electric field direction formed by the two metal layers connected to the first deformation piezoelectric layer is the same as the electric field direction formed by the two metal layers connected to the second deformation piezoelectric layer.

[0013] Thus, by setting the polarization direction of the first deformation piezoelectric layer and the polarization direction of the second deformation piezoelectric layer to be the same, and setting the electric field direction formed by the two metal layers connected to the first deformation piezoelectric layer and the electric field direction formed by the two metal layers connected to the second deformation piezoelectric layer to be different, the deformation types generated by the first deformation piezoelectric layer and the second deformation piezoelectric layer can be made different.

[0014] In some embodiments, two adjacent piezoelectric layers are connected to the same metal layer, the two adjacent piezoelectric layers include a first piezoelectric layer and a second piezoelectric layer, the metal layer commonly connected to the first piezoelectric layer and the second piezoelectric layer is a first metal layer, the other metal layer connected to the first piezoelectric layer is a second metal layer, and the voltage of the second metal layer is different from the voltage of the first metal layer; the other metal layer connected to the second piezoelectric layer is a third metal layer, and the voltage of the third metal layer is different from the voltage of the first metal layer.

[0015] Thus, two adjacent piezoelectric layers can be connected to the same metal layer to reduce the number of metal layers and simplify the structure, and the voltage of the other metal layer connected to the first piezoelectric layer and the voltage of the other metal layer connected to the second piezoelectric layer are both different from the voltage of the first metal layer commonly connected to the first piezoelectric layer and the second piezoelectric layer, so that the first piezoelectric layer and the second piezoelectric layer can deform.

[0016] In some embodiments, the metal layers connected to the two adjacent piezoelectric layers are different, the two adjacent piezoelectric layers include a first piezoelectric layer and a second piezoelectric layer, the metal layer connected to the first piezoelectric layer is a fourth metal layer on the side close to the second piezoelectric layer, the metal layer connected to the second piezoelectric layer is a fifth metal layer on the side close to the first piezoelectric layer, and an insulating layer is arranged between the fourth metal layer and the fifth metal layer.

[0017] In this way, by controlling the two metal layers connected to the two adjacent piezoelectric layers respectively, different polarization treatments can be performed on the two piezoelectric layers, so that the mechanical deflection angle error caused by thermal effects, fatigue aging, etc. can be accurately compensated.

[0018] In some embodiments, the piezoelectric driving structure further includes a plurality of pads, an insulating layer and a substrate, the insulating layer is arranged on the substrate, the pads are arranged on the side of the insulating layer away from the substrate, and the different metal layers are arranged in the insulating layer with a spacing therebetween and are connected to the pads through vias.

[0019] In this way, the different metal layers are arranged in the insulating layer with a spacing therebetween, so that the different metal layers are insulated from each other, and the metal layers are connected to the pads through vias, so that voltages can be provided to the different metal layers respectively.

[0020] In some embodiments, the piezoelectric driving structure further includes a plurality of pads, an insulating layer and a substrate, the insulating layer is arranged on the substrate, the pads are arranged on the side of the insulating layer away from the substrate, and the different metal layers are arranged in the insulating layer with a spacing therebetween, and the metal layers with the same voltage are connected to each other through vias, wherein one of the metal layers is connected to the pads through a via, and the metal layers with the same voltage are connected to the same pad.

[0021] In this way, by connecting the metal layers with the same voltage to each other through vias and connecting one of the metal layers to the pads through a via, the metal layers with the same voltage only need to be supplied with power through one pad area interface, which simplifies the manufacturing process and improves the packaging reliability.

[0022] In some embodiments, the metal layers include an upper metal layer, a middle metal layer and a lower metal layer, the piezoelectric layers include an upper piezoelectric layer and a lower piezoelectric layer, the upper metal layer, the upper piezoelectric layer, the middle metal layer, the lower piezoelectric layer and the lower metal layer are arranged in sequence, the upper piezoelectric layer is the first deformation piezoelectric layer, and the lower piezoelectric layer is the second deformation piezoelectric layer; or, the upper piezoelectric layer is the second deformation piezoelectric layer, and the lower piezoelectric layer is the first deformation piezoelectric layer.

[0023] Thus, the double-layer piezoelectric layer is arranged, and each of the double-layer piezoelectric layers is reversely deformed, so that the driving force of the piezoelectric driving structure can be greatly increased, and the mechanical deflection angle of the target driving module can be greatly increased. By changing the polarity of the three-layer metal electrode, different deformations of the double-layer piezoelectric layer are generated, the electrostrictive effect is amplified, the mechanical deflection angle of the target driving module is improved, and the system energy consumption is reduced.

[0024] The piezoelectric driving device provided by the embodiments of the present application includes a driving substrate, a target driving module, and a plurality of piezoelectric driving modules. The structure of the piezoelectric driving module is the piezoelectric driving structure of any one of the above embodiments. One end of each of the piezoelectric driving modules is connected to the driving substrate, and the other end of each of the piezoelectric driving modules is connected to the opposite ends of the target driving module, respectively. When the piezoelectric layer is deformed, the piezoelectric driving module can be used to drive the target driving module to deflect.

[0025] Thus, a plurality of piezoelectric layers are arranged in the piezoelectric driving structure, and one piezoelectric layer is arranged between two metal layers. When the two adjacent metal layers are electrified, the first deformed piezoelectric layer is stretched, and the second deformed piezoelectric layer is compressed. The piezoelectric driving structure can drive the connected target driving module to deflect by superimposing the stretching force and the compression force, amplify the electrostrictive effect, so that the piezoelectric driving structure can form a larger driving force, and further improve the deflection angle.

[0026] In some embodiments, the target driving module includes opposite first and second ends, and the plurality of piezoelectric driving modules are connected to the first or second end, respectively. When the target driving module is driven to deflect each time, the piezoelectric driving modules connected to the first end and the piezoelectric driving modules connected to the second end generate driving forces in different directions.

[0027] Thus, by controlling the piezoelectric driving modules connected to the opposite ends of the target driving module to generate driving forces in different directions, the target driving module can be driven to rotate, and the multi-layer piezoelectric layer structure can make the piezoelectric driving module generate a larger driving force, and can reduce stray vibration.

[0028] In some embodiments, the target driving module includes opposite first and second ends, and the plurality of piezoelectric driving modules are arranged at the first and second ends, respectively. When the target driving module is driven to deflect each time, the piezoelectric driving modules connected to the first end and the piezoelectric driving modules connected to the second end have the same voltage of the same layer of the metal layer, and the polarization directions of the same layer of the piezoelectric layer are opposite.

[0029] Thus, by connecting the piezoelectric driving module at the first end and the piezoelectric driving module at the second end to the same layer of metal layer with the same voltage each time the target driving module deflects, the pad design can be simplified; and the polarization directions of the same layer of piezoelectric layer are opposite, the deformation directions of the same layer of piezoelectric layer at both ends of the target driving module are opposite, and the driving force directions of the target driving module are opposite.

[0030] In some embodiments, the piezoelectric driving device further comprises a plurality of flexible connecting rods, the structure of the flexible connecting rod is the same as that of the piezoelectric driving module, the rigidity of the flexible connecting rod is less than that of the piezoelectric driving module, and the piezoelectric driving module is connected to the target driving module through the flexible connecting rod, so that when the piezoelectric layer deforms, the piezoelectric driving module can drive the target driving module through the flexible connecting rod.

[0031] Thus, by setting the flexible connecting rod with rigidity less than that of the piezoelectric driving module to connect the target driving module, the flexible connecting rod can generate larger deformation, so that the piezoelectric driving module can drive the target driving module to deflect through the flexible connecting rod.

[0032] Additional aspects and advantages of the application will be set forth in part in the description which follows, and in part will become apparent to those skilled in the art upon examination of the following or can be learned by practice of the application. BRIEF DESCRIPTION OF DRAWINGS

[0033] The above and / or additional aspects and advantages of the application will become apparent and be readily appreciated from the description of implementations, including the accompanying drawings, in which:

[0034] FIG. 1 is a schematic diagram of a piezoelectric driving structure according to some embodiments of the application;

[0035] FIG. 2 is a schematic diagram of a piezoelectric driving structure according to some embodiments of the application;

[0036] FIG. 3 is a schematic diagram of a piezoelectric driving structure according to some embodiments of the application;

[0037] FIG. 4 is a schematic diagram of a piezoelectric driving structure according to some embodiments of the application;

[0038] FIG. 5 is a schematic diagram of a piezoelectric driving structure according to some embodiments of the application;

[0039] FIG. 6 is a schematic diagram of a piezoelectric driving structure according to some embodiments of the application;

[0040] FIG. 7 is a schematic diagram of a metal layer, a substrate, an insulating layer, and a pad according to some embodiments of the application;

[0041] FIG. 8 is a schematic diagram of a metal layer, a substrate, an insulating layer, and a pad according to some embodiments of the application;

[0042] FIG. 9 is a schematic diagram of a metal layer, a substrate, an insulating layer, and a pad according to some embodiments of the present application;

[0043] FIG. 10 is a schematic diagram of a metal layer, a substrate, an insulating layer, and a pad according to some embodiments of the present application;

[0044] FIG. 11 is a schematic diagram of a piezoelectric driving device according to some embodiments of the present application;

[0045] FIG. 12 is a schematic diagram of a piezoelectric driving device according to some embodiments of the present application;

[0046] FIG. 13 is a schematic diagram of a piezoelectric driving device according to some embodiments of the present application. DETAILED DESCRIPTION

[0047] Embodiments of the present application are described in detail below with reference to the attached drawing figures, wherein the same or like designations indicate the same or like elements or elements having the same or similar functionality throughout the attached drawing figures. The embodiments described below are exemplary and are not intended to be limiting of the present application, unless otherwise explicitly indicated herein.

[0048] Micro-electro-mechanical system (MEMS) micro-mirrors are widely used in optical scanning mirrors, automotive head-up displays (HUD), laser radars, and the like. Common driving methods of micro-mirrors mainly include electrostatic, piezoelectric, electromagnetic, and electrothermal methods. The electromagnetic and electrothermal micro-mirrors have a large volume and a relatively complex preparation process, and are difficult to be compatible with CMOS technology. The piezoelectric driving controls the deflection of the mirror surface through the electrostrictive effect. In related technologies, the piezoelectric driving module can provide a small driving force and the deflection angle of the driving mirror is limited.

[0049] Referring to FIG. 1, a piezoelectric driving structure 100 is provided according to an embodiment of the present application. The piezoelectric driving structure 100 includes a plurality of metal layers 10 and a plurality of piezoelectric layers 20. The plurality of piezoelectric layers 20 and the plurality of metal layers 10 are stacked and arranged. One piezoelectric layer 20 is arranged between two metal layers 10. When the two connected metal layers 10 are powered and the voltages are different, the piezoelectric layer 20 is used to deform. The plurality of piezoelectric layers 20 includes a first deformation piezoelectric layer 21 and a second deformation piezoelectric layer 22. The first deformation piezoelectric layer 21 is used to stretch, and the second deformation piezoelectric layer 22 is used to compress.

[0050] Specifically, the piezoelectric driving structure 100 includes a plurality of piezoelectric layers 20 and a plurality of metal layers 10, each piezoelectric layer 20 is arranged between and connected to two metal layers 10, and one metal layer 10 is connected to one electrode interface to be powered through the electrode interface. When the two connected metal layers 10 are powered and the voltages are different, an electric field with a direction is formed between the two metal layers 10 (the direction of the electric field formed between the two metal layers 10 can be shown by the arrow between the electrode interfaces connected by the metal layer 10), the dielectric of the piezoelectric layer 20 is polarized, and the electrostriction effect is generated, so that the piezoelectric layer 20 is stretched or compressed. The material of the metal layer 10 can be a metal or an alloy such as Cu, Al, Au, MoTi, TiW, Ta, W, etc., which can be a single layer of metal or a multi-layer metal combination structure, and the thickness of the metal layer 10 can be tens of nanometers to hundreds of nanometers; the material of the piezoelectric layer 20 can be lead zirconate titanate (PZT), barium titanate (BaTiO3), potassium sodium niobate (KNN), polymer piezoelectric material (such as PVDF), etc., and the thickness of the piezoelectric layer 20 can be hundreds of nanometers to tens of microns. The piezoelectric layer 20 has a polarization direction, and the relationship between the polarization direction of the piezoelectric layer 20 (as shown by the arrow direction in the piezoelectric layer 20 in FIG. 1), the electric field direction (as shown by the arrow direction between the electrode interfaces A, B, C in FIG. 1) and the type of deformation of the piezoelectric layer 20 is determined according to the material of the piezoelectric layer 20. When the polarization direction and the electric field direction formed by the two connected metal layers 10 are the same, the piezoelectric layer 20 is stretched or compressed; when the polarization direction and the electric field direction formed by the two connected metal layers 10 are different, the piezoelectric layer 20 is compressed or stretched. The piezoelectric layer 20 includes a first deformation piezoelectric layer 21 and a second deformation piezoelectric layer 22, and when the voltage of the two connected metal layers 10 is different so that an electric field exists, the first deformation piezoelectric layer 21 is used to stretch, and the second deformation piezoelectric layer 22 is used to compress. In the piezoelectric driving structure 100, half of the piezoelectric layers 20 can be first deformation piezoelectric layers 21, and the other half of the piezoelectric layers 20 can be second deformation piezoelectric layers 22.

[0051] In this way, by arranging a plurality of piezoelectric layers 20 in the piezoelectric driving structure 100, and controlling one piezoelectric layer 20 to be arranged between two metal layers 10, when the two adjacent metal layers 10 are powered, the first deformation piezoelectric layer 21 is stretched and the second deformation piezoelectric layer 22 is compressed, so that the piezoelectric driving structure 100 can drive the connected target driving module 300 to deflect by superimposing the stretching force and the compression force, and amplify the electrostriction effect, so that the piezoelectric driving structure 100 can form a larger driving force and further improve the deflection angle.

[0052] Referring to Fig. 2, in some embodiments, all the first deformation piezoelectric layers 21 form a first module 211 through the metal layers 10, and all the second deformation piezoelectric layers 22 form a second module 221 through the metal layers 10. The first module 211 and the second module 221 are stacked.

[0053] Specifically, all the first deformation piezoelectric layers 21 form a first module 211 through the metal layers 10, and all the second deformation piezoelectric layers 22 form a second module 221 through the metal layers 10. In the first module 211, all the piezoelectric layers 20 are the first deformation piezoelectric layers 21, and each piezoelectric layer 20 is arranged between two metal layers 10. In the second module 221, all the piezoelectric layers 20 are the second deformation piezoelectric layers 22, and each piezoelectric layer 20 is arranged between two metal layers 10. The number of piezoelectric layers 20 in the first module 211 and the number of piezoelectric layers 20 in the second module 221 can be the same or different. The first module 211 and the second module 221 are stacked. When all the metal layers 10 are energized, the piezoelectric layers 20 in the first module 211 are used to generate tensile deformation, and the piezoelectric layers 20 in the second module 221 are used to generate compressive deformation. The tensile force generated by the tensile deformation and the compressive force generated by the compressive deformation are superimposed on each other to generate a driving force. The driving force drives the target driving module 300 connected to the piezoelectric driving structure 100 to deflect, thereby increasing the driving force of the piezoelectric driving structure 100.

[0054] In this way, by forming a first module 211 through the metal layers 10 for all the first deformation piezoelectric layers 21 that generate tensile deformation, and forming a second module 221 through the metal layers 10 for all the second deformation piezoelectric layers 22 that generate compressive deformation, and stacking the first module 211 and the second module 221, the compressive force and the tensile force generated during deformation can be superimposed to form a driving force, thereby increasing the driving force of the piezoelectric driving structure 100.

[0055] Referring to Fig. 1, in some embodiments, the polarization direction of the first deformation piezoelectric layer 21 is the same as the polarization direction of the second deformation piezoelectric layer 22, and the direction of the electric field formed by the two metal layers 10 connected to the first deformation piezoelectric layer 21 is different from the direction of the electric field formed by the two metal layers 10 connected to the second deformation piezoelectric layer 22.

[0056] Specifically, when the materials used in the piezoelectric layer 20 of the piezoelectric driving structure 100 are the same, if the polarization directions of the first deformation piezoelectric layer 21 and the second deformation piezoelectric layer 22 are the same, the deformation types of the first deformation piezoelectric layer 21 and the second deformation piezoelectric layer 22 are determined according to the directions of the electric fields generated by the two metal layers 10 connected thereto, so as to make the deformations of the first deformation piezoelectric layer 21 and the second deformation piezoelectric layer 22 different, the directions of the electric fields generated by the two metal layers 10 connected to the first deformation piezoelectric layer 21 and the second deformation piezoelectric layer 22 are controlled to be different.

[0057] In one embodiment, referring to FIG. 3, the piezoelectric driving structure 100 comprises the second metal layer 12, the first piezoelectric layer 23, the first metal layer 11, the second piezoelectric layer 24 and the third metal layer 13 arranged in sequence, the electrode interfaces connected to the second metal layer 12 and the electrode interfaces connected to the third metal layer 13 are both positive, and the electrode interfaces connected to the first metal layer 11 are negative, i.e., the directions of the electric fields formed by the second metal layer 12 and the first metal layer 11 are different from the directions of the electric fields formed by the third metal layer 13 and the first metal layer 11, the direction of the electric field formed by the first metal layer 11 and the second metal layer 12 is downward, and the direction of the electric field formed by the first metal layer 11 and the third metal layer 13 is upward. The polarization directions of the first piezoelectric layer 23 and the second piezoelectric layer 24 are both downward, so that the first piezoelectric layer 23 is the first deformation piezoelectric layer 21 and generates tensile deformation, and the second piezoelectric layer 24 is the second deformation piezoelectric layer 22 and generates compressive deformation.

[0058] In this way, by setting the polarization directions of the first deformation piezoelectric layer 21 and the second deformation piezoelectric layer 22 the same and the directions of the electric fields formed by the two metal layers 10 connected to the first deformation piezoelectric layer 21 and the second deformation piezoelectric layer 22 different, the deformation types of the first deformation piezoelectric layer 21 and the second deformation piezoelectric layer 22 can be made different.

[0059] Referring to FIG. 4, in some embodiments, the polarization directions of the first deformation piezoelectric layer 21 and the second deformation piezoelectric layer 22 are different, and the directions of the electric fields formed by the two metal layers 10 connected to the first deformation piezoelectric layer 21 and the second deformation piezoelectric layer 22 are the same.

[0060] Specifically, when the materials used in the piezoelectric layers 20 of the piezoelectric driving structure 100 are the same, if the polarization directions of the first deformation piezoelectric layer 21 and the second deformation piezoelectric layer 22 are different, the deformation types of the first deformation piezoelectric layer 21 and the second deformation piezoelectric layer 22 are determined according to the electric field directions generated by the two metal layers 10 connected thereto, so as to make the deformations of the first deformation piezoelectric layer 21 and the second deformation piezoelectric layer 22 the same, the electric field directions generated by the two metal layers 10 connected to the first deformation piezoelectric layer 21 and the electric field directions formed by the two metal layers 10 connected to the second deformation piezoelectric layer 22 are different.

[0061] In one embodiment, referring to FIG. 4, the polarization direction of the first deformation piezoelectric layer 21 is upward, the polarization direction of the second deformation piezoelectric layer 22 is downward, the electric field directions generated by the two metal layers 10 connected to the first deformation piezoelectric layer 21 and the electric field directions formed by the two metal layers 10 connected to the second deformation piezoelectric layer 22 are downward, so as to make the first deformation piezoelectric layer 21 generate tensile deformation and the second deformation piezoelectric layer 22 generate compressive deformation.

[0062] In this way, by setting the polarization direction of the first deformation piezoelectric layer 21 and the polarization direction of the second deformation piezoelectric layer 22 the same and the electric field directions formed by the two metal layers 10 connected to the first deformation piezoelectric layer 21 and the electric field directions formed by the two metal layers 10 connected to the second deformation piezoelectric layer 22 different, the deformation types generated by the first deformation piezoelectric layer 21 and the second deformation piezoelectric layer 22 can be made different.

[0063] Referring to FIG. 3, in some embodiments, the two adjacent piezoelectric layers 20 are connected to the same metal layer 10, the two adjacent piezoelectric layers 20 include a first piezoelectric layer 23 and a second piezoelectric layer 24, the metal layer 10 connected to the first piezoelectric layer 23 and the second piezoelectric layer 24 is the first metal layer 11, the other metal layer 10 connected to the first piezoelectric layer 23 is the second metal layer 12, the voltage of the second metal layer 12 is different from that of the first metal layer 11; the other metal layer 10 connected to the second piezoelectric layer 24 is the third metal layer 13, the voltage of the third metal layer 13 is different from that of the first metal layer 11.

[0064] Specifically, the two adjacent piezoelectric layers 20 can be connected to the same metal layer 10, that is, the number of the metal layers 10 connected to the two adjacent piezoelectric layers 20 is three, which are respectively arranged on one side of the first piezoelectric layer 23, between the first piezoelectric layer 23 and the second piezoelectric layer 24, and on one side of the second piezoelectric layer 24. Since the first piezoelectric layer 23 and the second piezoelectric layer 24 are connected to the first metal layer 11 arranged between the first piezoelectric layer 23 and the second piezoelectric layer 24, in order to make the first piezoelectric layer 23 and the second piezoelectric layer 24 deform, the voltage of the second metal layer 12 connected to the first piezoelectric layer 23 is different from that of the first metal layer 11, and the voltage of the third metal layer 13 connected to the second piezoelectric layer 24 is different from that of the first metal layer 11.

[0065] In this way, the two adjacent piezoelectric layers 20 can be connected to the same metal layer 10 to reduce the number of metal layers 10 and simplify the structure, and the voltage of the other metal layer 10 connected to the first piezoelectric layer 23 and the voltage of the other metal layer 10 connected to the second piezoelectric layer 24 are different from the voltage of the common first metal layer 11, so that the first piezoelectric layer 23 and the second piezoelectric layer 24 can deform.

[0066] Referring to FIGS. 5 and 6, in some embodiments, the metal layers 10 connected by the two adjacent piezoelectric layers 20 are different, the two adjacent piezoelectric layers 20 include a first piezoelectric layer 23 and a second piezoelectric layer 24, on the side close to the second piezoelectric layer 24, the metal layer 10 connected by the first piezoelectric layer 23 is the fourth metal layer 14, and on the side close to the first piezoelectric layer 23, the metal layer 10 connected by the second piezoelectric layer 24 is the fifth metal layer 15, and the fourth metal layer 14 and the fifth metal layer 15 are provided with an insulating layer 30.

[0067] Specifically, the two adjacent piezoelectric layers 20 are connected to different metal layers 10, that is, the number of metal layers 10 connected by the two adjacent piezoelectric layers 20 is four, and since the two piezoelectric layers 20 are adjacent, the two metal layers 10 between the two piezoelectric layers 20 are adjacent, in order to avoid conduction between the two metal layers 10, the fourth metal layer 14 and the fifth metal layer 15 between the two piezoelectric layers 20 are provided with an insulating layer 30, so that the voltages of the fourth metal layer 14 and the fifth metal layer 15 can be different, that is, the fourth metal layer 14 and the fifth metal layer 15 can be different electrodes, so that the deformation states of the two adjacent piezoelectric layers 20 can be controlled respectively, which is beneficial to accurately compensate the mechanical deflection angle error caused by thermal effects, fatigue aging and the like, and the electrodes connected by the metal layers 10 connected by the two piezoelectric layers 20 can be used for electrical signal compensation to correct the driving force or the mechanical deflection angle.

[0068] In this way, by controlling the voltages of the two metal layers 10 connected by the two adjacent piezoelectric layers 20 respectively, the two piezoelectric layers 20 can be subjected to different polarization processing, so that the mechanical deflection angle error caused by thermal effects, fatigue aging and the like can be accurately compensated.

[0069] Referring to FIGS. 7 and 8, in some embodiments, the piezoelectric driving structure 100 further includes a plurality of pads 40, an insulating layer 30 and a substrate 50, the insulating layer 30 is arranged on the substrate 50, the pads 40 are arranged on the side of the insulating layer 30 away from the substrate 50, and different metal layers 10 are arranged in the insulating layer 30 and connected to the pads 40 through through holes 60.

[0070] Specifically, the piezoelectric driving structure 100 further comprises a pad area, the insulating layer 30 can comprise multiple layers, the multiple layers of the insulating layer 30 are stacked on the substrate 50, and different metal layers 10 can be arranged in different layers of the insulating layer 30, so that the different metal layers 10 are isolated from each other, and the voltages of the different metal layers 10 do not affect each other. The pad area is arranged on the side of the insulating layer 30 away from the substrate 50, a plurality of pads 40 are arranged in the pad area, a through hole 60 is etched for each metal layer 10, and the metal layer 10 is connected to the pad 40 on the surface of the insulating layer 30 through the through hole 60. The pad area comprises a plurality of signal access ports, which can be used to input different voltages to the pads 40 to provide different voltages to the different metal layers 10.

[0071] In one embodiment, referring to FIGS. 6 and 8, the piezoelectric driving structure 100 comprises two piezoelectric layers 20, and the metal layers 10 connected by the two piezoelectric layers 20 are not the same. The two piezoelectric layers 20 comprise a first piezoelectric layer 23 and a second piezoelectric layer 24, the first piezoelectric layer 23 connects the first upper metal layer 16 and the first lower metal layer 17, and the second piezoelectric layer 24 connects the second upper metal layer 18 and the second lower metal layer 19. The first upper metal layer 16 is arranged in the first insulating layer 31, the first lower metal layer 17 and the second upper metal layer 18 are arranged in the second insulating layer 32 and are spaced apart from each other, the second lower metal layer 19 is arranged in the third insulating layer 33, and the first upper metal layer 16, the second lower metal layer 19, the second upper metal layer 18 and the second lower metal layer 19 are respectively connected to different pads 40 through the through holes 60.

[0072] In this way, the different metal layers 10 are arranged in the insulating layer 30 and are spaced apart from each other, so that the different metal layers 10 are insulated from each other, and the metal layers 10 are connected to the pads 40 through the through holes 60, so that different voltages can be provided to the different metal layers 10.

[0073] Referring to FIGS. 9 and 10, in some embodiments, the piezoelectric driving structure 100 further comprises a plurality of pads 40, an insulating layer 30 and a substrate 50, the insulating layer 30 is arranged on the substrate 50, the pads 40 are arranged on the side of the insulating layer 30 away from the substrate 50, different metal layers 10 are arranged in the insulating layer 30 and are spaced apart from each other, the metal layers 10 with the same voltage are connected to each other through the through holes 60 when powered on, and one of the metal layers 10 is connected to the pad 40 through the through hole 60, and the metal layers 10 with the same voltage are connected to the same pad 40 when powered on.

[0074] Specifically, since there are metal layers 10 with the same voltage, the voltage signals provided to the metal layers 10 with the same voltage can be the same signal, and thus the metal layers 10 with the same voltage can be connected to each other through the via holes 60 in the insulating layer 30, so that the metal layers 10 with the same voltage are conductive to each other, and one of the metal layers 10 is connected to the pad 40 through the via hole 60, so that when power is supplied, the metal layers 10 with the same voltage are commonly connected to the same pad area interface through the via hole 60, so that only the same pad area interface needs to be powered, and the multiple metal layers 10 can be powered at the same time through the pad 40, which simplifies the manufacturing process and improves the packaging reliability.

[0075] In one embodiment, referring to FIGS. 6 and 10, the piezoelectric driving structure 100 includes two piezoelectric layers 20, and the metal layers 10 connected by the two piezoelectric layers 20 are not the same. The two piezoelectric layers 20 include a first piezoelectric layer 23 and a second piezoelectric layer 24, the first piezoelectric layer 23 is connected to the first upper metal layer 16 and the first lower metal layer 17, and the second piezoelectric layer 24 is connected to the second upper metal layer 18 and the second lower metal layer 19. When power is supplied, the first upper metal layer 16 and the second lower metal layer 19 have the same voltage, the first upper metal layer 16 is arranged in the first insulating layer 31, the first lower metal layer 17 and the second upper metal layer 18 are arranged in the second insulating layer 32 and are spaced apart from each other, the second lower metal layer 19 is arranged in the third insulating layer 33, the first upper metal layer 16 is connected to the second lower metal layer 19 through the via hole 60, the second lower metal layer 19 is connected to the pad 40 through the via hole 60, and the second lower metal layer 19 and the second upper metal layer 18 are connected to different pads 40 through the via hole 60, respectively.

[0076] In this way, by connecting the metal layers 10 with the same voltage to each other through the via holes 60, and connecting one of the metal layers 10 to the pad 40 through the via hole 60, the metal layers 10 with the same voltage only need to be powered through one pad area interface, which simplifies the manufacturing process and improves the packaging reliability.

[0077] Referring to FIG. 4, in some embodiments, the metal layers 10 include a first metal layer 11, a second metal layer 12, and a third metal layer 13, and the piezoelectric layers 20 include a first piezoelectric layer 23 and a second piezoelectric layer 24, the second metal layer 12, the first piezoelectric layer 23, the first metal layer 11, the second piezoelectric layer 24, and the third metal layer 13 are arranged in sequence, the first piezoelectric layer 23 is a first deformation piezoelectric layer 21, and the second piezoelectric layer 24 is a second deformation piezoelectric layer 22; or, the first piezoelectric layer 23 is a second deformation piezoelectric layer 22, and the second piezoelectric layer 24 is a first deformation piezoelectric layer 21.

[0078] Specifically, the piezoelectric driving structure 100 includes two piezoelectric layers 20 and three piezoelectric layers 20, the second metal layer 12, the first piezoelectric layer 23, the first metal layer 11, the second piezoelectric layer 24 and the third metal layer 13 are sequentially stacked and arranged to form the piezoelectric driving structure 100. If the materials of the first piezoelectric layer 23 and the second piezoelectric layer 24 are the same, and the polarization directions are the same, the electrical properties of the second metal layer 12 and the third metal layer 13 are opposite to the electrical properties of the first metal layer 11. When the electrodes connected by the three metal layers 10 have current conduction, the first piezoelectric layer 23 and the second piezoelectric layer 24 generate deformation in opposite directions due to the electrostriction effect. For example, the first piezoelectric layer 23 is the first deformation piezoelectric layer 21, and the second piezoelectric layer 24 is the second deformation piezoelectric layer 22, that is, when the three metal layers 10 are powered, the first piezoelectric layer 23 is stretched, and the second piezoelectric layer 24 is compressed; or, the first piezoelectric layer 23 is the second deformation piezoelectric layer 22, and the second piezoelectric layer 24 is the first deformation piezoelectric layer 21, that is, when the three metal layers 10 are powered, the first piezoelectric layer 23 is compressed, and the second piezoelectric layer 24 is stretched.

[0079] In this way, the double-layer piezoelectric layer 20 is provided, and the double-layer piezoelectric layer 20 deforms in opposite directions, which can greatly increase the driving force of the piezoelectric driving structure 100 and greatly increase the mechanical deflection angle of the target driving module 300. By changing the polarity of the three metal electrodes, different deformations of the double-layer piezoelectric layer 20 can be controlled, the electrostriction effect can be amplified, the mechanical deflection angle of the target driving module 300 can be improved, and the system energy consumption can be reduced.

[0080] Please refer to FIG. 11, the piezoelectric driving device 1000 provided by the embodiment of the application includes a driving substrate 500, a target driving module 300 and a plurality of piezoelectric driving modules 200, the structure of the piezoelectric driving module 200 is the piezoelectric driving structure 100 of any of the above embodiments, one end of the plurality of piezoelectric driving modules 200 is connected to the driving substrate 500, the other end of the plurality of piezoelectric driving modules 200 is respectively connected to the opposite ends of the target driving module 300, and the piezoelectric driving module 200 can be used to drive the target driving module 300 to deflect when the piezoelectric layer 20 deforms.

[0081] Specifically, the piezoelectric driving device 1000 can be a piezoelectric micro-mirror, the target driving module 300 can be a mirror surface of the micro-mirror, the piezoelectric driving device 1000 includes a driving substrate 500, the driving substrate 500 is a hollow ring, one end of each piezoelectric driving module 200 is connected to the driving substrate 500, the other end of the piezoelectric driving module 200 is connected to the target driving module 300, and the piezoelectric driving module 200 and the target driving module 300 are arranged in the hollow area of the driving substrate 500. The two ends of the target driving module 300 are connected to a plurality of piezoelectric driving modules 200, the number of piezoelectric driving modules 200 can be 2, 4, 6, etc., and are evenly distributed at the two ends of the target driving module 300 to ensure that when the target driving module 300 is driven to deflect, the deflection in two different directions is relatively balanced. When the metal layer 10 of the piezoelectric driving module 200 is energized, the piezoelectric layer 20 deforms, and the piezoelectric driving module 200 drives the target driving module 300 to deflect around the L axis. Since the piezoelectric driving module 200 includes a plurality of piezoelectric layers 20, and the piezoelectric layer 20 includes a first deformation piezoelectric layer 21 and a second deformation piezoelectric layer 22 capable of deforming differently, the deformation force of the piezoelectric layer 20 can be superimposed on the target driving module 300, increasing the driving force of the piezoelectric driving module 200; at the same time, the multi-layer piezoelectric layer 20 structure can make the piezoelectric driving module 200 generate a larger driving force, which can reduce the stray vibration generated by the piezoelectric driving module 200 directly connected to the substrate 50. Since the piezoelectric driving modules A to D are all arranged in the x direction of the target driving module 300, the y direction space is saved, the chip area is saved, the single chip area is compressed, the chip production efficiency can be improved, and the back-end packaging volume is reduced.

[0082] In this way, by arranging a plurality of piezoelectric layers 20 in the piezoelectric driving structure 100, and controlling one piezoelectric layer 20 to be arranged between two metal layers 10, when the two adjacent metal layers 10 are energized, the first deformation piezoelectric layer 21 deforms by stretching, and the second deformation piezoelectric layer 22 deforms by compression, so that the piezoelectric driving structure 100 can drive the connected target driving module 300 to deflect by superimposing the stretching force and the compression force, and amplify the electrostriction effect, so that the piezoelectric driving structure 100 can form a larger driving force, and further improve the deflection angle.

[0083] Please refer to FIG. 12, in some embodiments, the target driving module 300 includes opposite first and second ends, a plurality of piezoelectric driving modules 200 are connected to the first end or the second end respectively, and the piezoelectric driving modules 200 connected to the first end and the piezoelectric driving modules 200 connected to the second end produce driving forces in different directions on the target driving module 300 when the target driving module 300 is driven to deflect each time.

[0084] Specifically, the first end and the second end can be two ends of the target driving module 300 opposite in the length direction, and the plurality of piezoelectric driving modules 200 are connected to the first end or the second end respectively. When the target driving module 300 deflects each time, the piezoelectric driving module 200 connected to the first end and the piezoelectric driving module 200 connected to the second end generate driving forces in different directions on the target driving module 300. For example, the piezoelectric driving module 200 connected to the first end generates a driving force in the Z direction upward on the target driving module 300, and the piezoelectric driving module 200 connected to the first end generates a driving force in the Z direction downward on the target driving module 300, so as to drive the target driving module 300 to rotate.

[0085] In one embodiment, referring to FIG. 12, the polarization directions of the piezoelectric layers 20 of the piezoelectric driving modules 200 at the two ends of the target driving module 300 are the same, and the directions of the electric fields formed by the same two metal layers 10 at the two ends of the target driving module 300 are different (for example, the direction of the electric field between the metal layer 10 connected to the electrode interface E and the metal layer 10 connected to the electrode interface F is upward, and the direction of the electric field between the metal layer 10 connected to the electrode interface E and the metal layer 10 connected to the electrode interface F is also downward), so that the directions of the forces generated by the piezoelectric driving modules 200 connected to the two ends are different. The piezoelectric driving module 200 connected to the first end generates a downward driving force, and the piezoelectric driving module 200 connected to the second end generates an upward driving force, or the piezoelectric driving module 200 connected to the first end generates an upward driving force, and the piezoelectric driving module 200 connected to the second end generates a downward driving force.

[0086] In this way, by controlling the directions of the driving forces generated by the piezoelectric driving modules 200 connected to the target driving module 300 including the opposite two ends to be different, the target driving module 300 can be driven to rotate, and the multi-layer piezoelectric layer 20 structure can make the piezoelectric driving module 200 generate a larger driving force, and can reduce stray vibration.

[0087] Referring to FIG. 13, in some embodiments, the target driving module 300 includes opposite first and second ends, and the plurality of piezoelectric driving modules 200 are arranged at the first and second ends respectively. When the target driving module 300 deflects each time, the piezoelectric driving module 200 connected to the first end and the piezoelectric driving module 200 connected to the second end have the same voltage of the same metal layer 10, and the polarization directions of the same piezoelectric layer 20 are opposite.

[0088] Specifically, the piezoelectric driving modules 200 are arranged at two opposite ends of the target driving module 300 in the X direction. If the voltages of the metal layers 10 of the same layer of the piezoelectric driving modules 200 connected to the two ends are different, the pad 40 structure needs to be designed for the two ends respectively, and the packaging volume is large. The voltages of the metal layers 10 of the same layer of the piezoelectric driving module 200 connected to the first end and the piezoelectric driving module 200 connected to the second end are the same, so that the pad 40 structure does not need to be designed for the piezoelectric driving modules 200 at the two ends of the target driving module 300 respectively, the metal layers 10 of the same layer can be connected by plane wiring, and a through hole 60 structure is shared by a pad interface, thereby reducing the packaging volume, increasing the chip utilization rate, and effectively reducing the cost. The voltages of the piezoelectric layers 20 of the same layer at the two ends of the target driving module 300 are the same, the polarization directions of the piezoelectric layers 20 of the same layer are opposite, the materials of each piezoelectric layer 20 are the same, so that the directions of the deformations of the piezoelectric layers 20 at the two ends of the target driving module 300 are opposite, thereby driving the target driving module 300 to deflect.

[0089] In one embodiment, referring to FIG. 13, the polarization directions of the piezoelectric layers 20 of the piezoelectric driving modules 200 at the two ends of the target driving module 300 are different, and the directions of the electric fields formed by the metal layers 10 of the same two layers at the two ends of the target driving module 300 are the same (for example, the direction of the electric field between the metal layer 10 connected to the electrode interface E and the metal layer 10 connected to the electrode interface F is downward, and the direction of the electric field between the metal layer 10 connected to the electrode interface E and the metal layer 10 connected to the electrode interface F is also downward), so that the directions of the forces generated by the piezoelectric driving modules 200 connected to the two ends are different. The piezoelectric driving module 200 connected to the first end generates a downward driving force, and the piezoelectric driving module 200 connected to the second end generates an upward driving force, or the piezoelectric driving module 200 connected to the first end generates an upward driving force, and the piezoelectric driving module 200 connected to the second end generates a downward driving force.

[0090] In this way, by connecting the piezoelectric driving module 200 connected to the first end and the piezoelectric driving module 200 connected to the second end, the voltages of the metal layers 10 of the same layer are the same, the pad 40 design can be simplified; and the polarization directions of the piezoelectric layers 20 of the same layer are opposite, the directions of the deformations of the piezoelectric layers 20 of the same layer at the two ends of the target driving module 300 are opposite, and the directions of the driving forces of the target driving module 300 are opposite.

[0091] In some embodiments, the piezoelectric driving device 1000 further comprises a plurality of flexible connecting rods 400, the structure of the flexible connecting rods 400 is the same as that of the piezoelectric driving module 200, the rigidity of the flexible connecting rods 400 is smaller than that of the piezoelectric driving module, and the piezoelectric driving module 200 is connected to the target driving module 300 through the flexible connecting rods 400, so that when the piezoelectric layer 20 deforms, the piezoelectric driving module 200 can drive the target driving module 300 through the flexible connecting rods 400.

[0092] Specifically, the structure of the flexible connecting rod 400 is also the piezoelectric driving structure 100 composed of a plurality of piezoelectric layers 20 and a plurality of metal layers 10, each piezoelectric layer 20 is arranged between and connected to two metal layers 10, and the piezoelectric layer 20 can produce tensile or compressive deformation when the connected metal layer 10 conducts electricity. The width of the flexible connecting rod 400 is smaller than the width of the piezoelectric driving module 200, so that the rigidity of the flexible connecting rod 400 is smaller than that of the piezoelectric driving module 200, so that when the connected metal layer 10 is powered, the piezoelectric layer 20 of the flexible connecting rod 400 produces larger deformation, which can drive the target driving module 300 to deflect. And the structure of the flexible connecting rod 400 is the same as that of the piezoelectric driving module 200, so that the control of the flexible connecting rod 400 and the piezoelectric driving module 200 is the same, and the control logic is simplified.

[0093] In this way, by connecting the target driving module 300 with the flexible connecting rod 400 whose rigidity is smaller than that of the piezoelectric driving module 200, the flexible connecting rod 400 can produce larger deformation, so that the piezoelectric driving module 200 can drive the target driving module 300 to deflect through the flexible connecting rod 400.

[0094] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the exemplary description of the above terms is not necessarily directed to the same embodiment or example. In addition, those skilled in the art can combine and combine the different embodiments or examples described in the present specification and the features of the different embodiments or examples without contradiction.

[0095] In addition, the term "connection" should be understood broadly, for example, it can include fixed connection, or detachable connection, or integral connection; it can include direct connection, or indirect connection through intermediate medium, or it can include the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0096] Furthermore, the terms "first", "second", etc. are used herein only to describe one implementation, and do not imply either the importance or a sequential or chronological order of "one" feature with respect to another. The use of these terms is to distinguish one implementation from another. Thus, a feature defined with "first" can implicitly or explicitly include at least one of the feature defined with "second". The meaning of "a plurality" is at least two, for example, two, three, etc., unless expressly specified otherwise.

[0097] Any process or method descriptions or blocks in flow charts described herein and elsewhere can represent modules, segments, or portions of code which include one or more executable instructions for implementing specific logical functions or steps in the process. Alternate implementations are included within the scope of the preferred embodiments of the present application in which additional functionality can be added or where orders of functions can be modified as appropriate.

[0098] Although the embodiments of the present application have been shown and described above, it is to be understood that the above-described embodiments are merely exemplary, and are not to be taken as limiting the present application. Accordingly, various modifications, changes, substitutions, and alterations to the above-described embodiments can be made without departing from the scope of the present application.

Claims

1. A piezoelectric drive structure (100), wherein The piezoelectric driving structure (100) comprises: a plurality of metal layers (10); a plurality of piezoelectric layers (20), the plurality of piezoelectric layers (20) and the plurality of metal layers (10) are arranged in stacks, one piezoelectric layer (20) is arranged between two metal layers (10), when the two connected metal layers (10) are powered and the voltages are different, the piezoelectric layer (20) is used for deformation, the plurality of piezoelectric layers (20) comprises a first deformation piezoelectric layer (21) and a second deformation piezoelectric layer (22), the first deformation piezoelectric layer (21) can be used for stretching, and the second deformation piezoelectric layer (22) can be used for compression.

2. The piezoelectric drive structure (100) according to claim 1, wherein All the first deformation piezoelectric layers (21) form a first module (211) through the metal layers (10), all the second deformation piezoelectric layers (22) form a second module (222) through the metal layers (10), and the first module (211) and the second module (222) are arranged in stacks.

3. The piezoelectric drive structure (100) according to claim 1 or 2, wherein The polarization direction of the first deformation piezoelectric layer (21) is the same as that of the second deformation piezoelectric layer (22), and the electric field direction formed by the two metal layers (10) connected with the first deformation piezoelectric layer (21) is different from that formed by the two metal layers (10) connected with the second deformation piezoelectric layer (22).

4. The piezoelectric drive structure (100) according to claim 1 or 2, wherein The polarization direction of the first deformation piezoelectric layer (21) is different from that of the second deformation piezoelectric layer (22), and the electric field direction formed by the two metal layers (10) connected with the first deformation piezoelectric layer (21) is the same as that formed by the two metal layers (10) connected with the second deformation piezoelectric layer (22).

5. The piezoelectric drive structure (100) according to any one of claims 1 to 3, wherein The two adjacent piezoelectric layers (20) are connected with the same metal layer (10), the two adjacent piezoelectric layers (20) comprise a first piezoelectric layer (23) and a second piezoelectric layer (24), the metal layer (10) commonly connected with the first piezoelectric layer (23) and the second piezoelectric layer (24) is a first metal layer (11), the other metal layer (10) connected with the first piezoelectric layer (23) is a second metal layer (12), and the voltages of the second metal layer (12) and the first metal layer (11) are different; the other metal layer (10) connected with the second piezoelectric layer (24) is a third metal layer (13), and the voltages of the third metal layer (13) and the first metal layer (11) are different.

6. The piezoelectric drive structure (100) according to any one of claims 1 to 3, 5, wherein The metal layers (10) connected with the two adjacent piezoelectric layers (20) are different, the two adjacent piezoelectric layers (20) comprise a first piezoelectric layer (23) and a second piezoelectric layer (24), on the side close to the second piezoelectric layer (24), the metal layer (10) connected with the first piezoelectric layer (23) is a fourth metal layer (14); on the side close to the first piezoelectric layer (23), the metal layer (10) connected with the second piezoelectric layer (24) is a fifth metal layer (15), and an insulating layer (30) is arranged between the fourth metal layer (14) and the fifth metal layer (15).

7. The piezoelectric drive structure (100) according to any one of claims 1 to 5, wherein The piezoelectric driving structure (100) further comprises a plurality of pads (40), an insulating layer (30) and a substrate (50), the insulating layer (30) is arranged on the substrate (50), the pads (40) are arranged on the side of the insulating layer (30) away from the substrate (50), and different metal layers (10) are arranged in the insulating layer (30) and are connected to the pads (40) through vias (60).

8. The piezoelectric drive structure (100) according to any one of claims 1 to 3, 5 or 6, wherein The piezoelectric driving structure (100) further comprises a plurality of pads (40), an insulating layer (30) and a substrate (50), the insulating layer (30) is arranged on the substrate (50), the pads (40) are arranged on the side of the insulating layer (30) away from the substrate (50), and different metal layers (10) are arranged in the insulating layer (30) and are connected to the pads (40) through vias (60).

9. The piezoelectric drive structure (100) according to claim 1 or 4, wherein The metal layer (10) comprises a first metal layer (11), a second metal layer (12) and a third metal layer (13), the piezoelectric layer (20) comprises a first piezoelectric layer (23) and a second piezoelectric layer (24), the second metal layer (12), the first piezoelectric layer (23), the first metal layer (11), the second piezoelectric layer (24) and the third metal layer (13) are sequentially stacked and arranged, the first piezoelectric layer (23) is the first deformation piezoelectric layer (21), and the second piezoelectric layer (24) is the second deformation piezoelectric layer (22); or, the first piezoelectric layer (23) is the second deformation piezoelectric layer (22), and the second piezoelectric layer (24) is the first deformation piezoelectric layer (21).

10. A piezoelectric drive device (1000), wherein The piezoelectric driving device (1000) comprises: a driving substrate (500); a target driving module (300); a plurality of piezoelectric driving modules (200), the structure of the piezoelectric driving module (200) is the piezoelectric driving structure (100) of any one of claims 1-9, one end of the plurality of piezoelectric driving modules (200) is connected to the driving substrate (500), and the other end of the plurality of piezoelectric driving modules (200) is respectively connected to opposite ends of the target driving module (300), and the piezoelectric driving module (200) can be used to drive the target driving module (300) to deflect when the piezoelectric layer (20) deforms.

11. The piezoelectric drive device (1000) according to claim 10, wherein The target driving module (300) comprises opposite first and second ends, and the plurality of piezoelectric driving modules (200) are respectively connected to the first end or the second end, and the piezoelectric driving modules (200) connected to the first end and the piezoelectric driving modules (200) connected to the second end produce driving forces in different directions on the target driving module (300) when the target driving module (300) is driven to deflect each time.

12. The piezoelectric drive device (1000) according to claim 10, wherein The target driving module (300) comprises opposite first and second ends, and a plurality of piezoelectric driving modules (200) are arranged at the first and second ends respectively, and the voltage of the same layer of metal layer (10) of the piezoelectric driving module (200) connected to the first end and the piezoelectric driving module (200) connected to the second end is the same, and the polarization direction of the same layer of piezoelectric layer (20) is opposite.

13. The piezoelectric drive device (1000) according to any one of claims 10 to 12, wherein The piezoelectric driving device (1000) further comprises: A plurality of flexible connecting rods (400), the structure of the flexible connecting rod (400) is the same as that of the piezoelectric driving module (200), the rigidity of the flexible connecting rod (400) is less than that of the piezoelectric driving module (200), and the piezoelectric driving module (200) is connected to the target driving module (300) through the flexible connecting rod (400), so that when the piezoelectric layer (20) deforms, the piezoelectric driving module (200) can drive the target driving module (300) through the flexible connecting rod (400).

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