Component separation device, and liquid recovery apparatus and method

Abstract

The present application relates to the field of semiconductor manufacturing, and specifically to a component separation device, and a liquid recovery apparatus and method. The component separation device comprises a heater, a distillation chamber, a condenser, a light component collection tank and a heavy component collection tank. The heater is configured to heat a waste liquid, such that the waste liquid is heated to evaporate, light components therein volatilize onto a surface of the condenser and flow into the light component collection tank after condensation, heavy components therein flow into the heavy component collection tank from a surface of the heater, and a distance between the condenser and the heater is greater than an average molecular motion path L1 of the heavy components and less than an average molecular motion path L2 of the light components. The waste liquid is heated to evaporate, such that the heavy components and the light components in the waste liquid are effectively separated, thereby effectively recycling the waste liquid.

Description

Component separation device, liquid recovery apparatus and method TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor manufacturing, in particular to a component separation device, a liquid recovery apparatus and a method. BACKGROUND

[0002] With the shrinking of semiconductor process nodes and the development of semiconductor process technology, traditional tank cleaning has been gradually replaced by single wafer cleaning. Compared with traditional tank process, the use of concentrated acid and alkali process in single wafer cleaning machine greatly increases the amount of chemical used. In order to improve the utilization rate of cleaning chemicals, the recovery of cleaning chemicals is an effective means to improve the utilization rate of cleaning chemicals.

[0003] SPM chemical is often used as a treatment liquid for post-lithography de-gluing cleaning process. SPM chemical is mixed by high-temperature H2SO4 and H2O2 in the liquid supply pipeline, and then supplied to the wafer surface for de-gluing cleaning process. If the SPM chemical is recovered and returned to the H2SO4 supply tank, it will cause the concentration of H2SO4 to decrease rapidly. Using diluted H2SO4 to mix SPM will cause the temperature of the mixed liquid to decrease and be unstable. At the same time, SPM chemical itself has a high temperature and H2O2 concentration, and direct recovery into the H2SO4 supply tank will cause the liquid in the H2SO4 supply tank to contain a large amount of bubbles, which will affect the heating, flow monitoring, concentration monitoring and temperature monitoring in the entire liquid supply system.

[0004] Currently, the method commonly used for SPM chemical recovery is to directly recover SPM chemical in the process, and to supplement pure sulfuric acid to the H2SO4 supply tank on this basis. Finally, the H2SO4 concentration in the H2SO4 supply tank will reach a relatively stable concentration, achieving liquid supply balance. In the above recovery method, the SPM chemical recovery capacity is about 50%, which can reduce the use of sulfuric acid in single wafer cleaning process to a certain extent. However, the current SPM chemical recovery method can only be used when the H2SO4 content is much higher than H2O2. When H2O2:H2SO4 reaches 1:4 or even 1:2, the SPM chemical in the process is usually not recovered. SUMMARY

[0005] In view of the above problems, the purpose of the present application is to provide a component separation device, a liquid recovery apparatus and a method, which can effectively recover and utilize waste liquid by reducing the content of light components in waste liquid and improving the concentration of heavy components recovered.

[0006] To achieve the above purpose, the present application provides the following technical solutions:

[0007] A component separation device comprises a heater, a distillation cavity, a condenser, a light component collection tank, a heavy component collection tank, the condenser is arranged on the inner surface of the side wall of the distillation cavity or inside the distillation cavity, and the heater is arranged on the inner surface of the side wall of the distillation cavity or inside the distillation cavity; the heater is used for heating the waste liquid flowing through the surface thereof so that the waste liquid is heated and evaporated, and the light component in the waste liquid volatilizes to the surface of the condenser and flows into the light component collection tank after being condensed, and the heavy component flows into the heavy component collection tank from the surface of the heater; the distance between the condenser and the heater is greater than the average molecular movement distance L1 of the heavy component and less than the average molecular movement distance L2 of the light component.

[0008] The application also provides a liquid recovery device comprising a separation module, wherein the separation module comprises the gas-liquid separation device.

[0009] The application also provides a liquid recovery method applied to the liquid recovery device, comprising the following steps:

[0010] Step S01, starting the operation module;

[0011] Step S02, detecting whether the heavy component concentration in the waste liquid discharged from the operation module reaches a preset value or the temperature of the waste liquid reaches a set value, if yes, proceeding to step S031, and if no, proceeding to step S032;

[0012] Step S031, starting the recovery mode of the recovery module, controlling the opening of the collection and discharge three-way valve, and proceeding to step S04;

[0013] Step S032, starting the discharge mode of the recovery module, controlling the opening of the collection and discharge three-way valve to discharge the liquid;

[0014] Step S04, the waste liquid enters the separation module;

[0015] Step S05, detecting whether the heavy component concentration in the heavy component recovery tank meets the standard, if yes, proceeding to step S06, and if no, the solution in the heavy component recovery tank reenters the separation module, and the step S04 is repeated;

[0016] Step S06, the solution in the heavy component recovery tank enters the liquid supply module;

[0017] Step S07, detecting whether the heavy component concentration in the liquid supply tank reaches a set value, if yes, proceeding to step S08, and if no, injecting a heavy component solution with a higher concentration into the liquid supply tank, and then proceeding to step S08;

[0018] Step S08, supplying the liquid from the liquid supply tank to the operation module.

[0019] Compared with the prior art, the application has at least the following beneficial effects:

[0020] The component separation device provided by the present application can evaporate the waste liquid under heating, and the light components volatilized can be condensed in the condenser to form a light component solution. The light component collection tank is used to receive the light component solution, and the heavy component collection tank is used to receive the heavy component solution, so as to effectively separate the heavy components and the light components in the waste liquid, thereby realizing effective recycling of the waste liquid.

[0021] SUMMARY

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0023] Fig. 1a is a schematic diagram of a component separation device and a gas-liquid separation device.

[0024] Fig. 1b is a schematic diagram of another component separation device and a gas-liquid separation device.

[0025] Fig. 2 is a schematic diagram of the principle of molecular distillation.

[0026] Fig. 3a is a schematic diagram of a component separation device in embodiment one.

[0027] Fig. 3b is a perspective view of a partial structure in Fig. 3a.

[0028] Fig. 4a is a perspective view of a partial structure of a component separation device in embodiment two.

[0029] Fig. 4b is a schematic diagram of a component separation device in embodiment two.

[0030] Fig. 4c is a schematic diagram of the internal structure of a cold plate in embodiment two.

[0031] Fig. 4d is a schematic diagram of the internal structure of a hot plate in embodiment two.

[0032] Fig. 5a is a schematic diagram of a component separation device in embodiment three.

[0033] Fig. 5b is a perspective view of a partial structure in Fig. 5a.

[0034] Fig. 6 is a schematic diagram of a liquid recovery device in embodiment four.

[0035] Fig. 7 is a flowchart of a liquid recovery method in embodiment five.

[0036] Preferred embodiments of the present application

[0037] The following detailed description together with the accompanying drawings will provide a fuller understanding of the application. Although the application is described in conjunction with the preferred embodiments, it will be understood that the application is not limited to the preferred embodiments. On the contrary, the application covers all alternatives, modifications, and equivalents falling within the scope of the application. In addition, while the application is described in conjunction with the preferred embodiments, it will be understood that they are not intended to limit the application to these embodiments. On the contrary, the application covers all alternatives, modifications, and equivalents falling within the scope of the application. Various specific details are described in the following description in order to provide a thorough understanding of the application. The application can, however, be practiced without some or all of these details. Moreover, well known methods, structures, and components have not been described in detail so as not to unnecessarily obscure the application. Also, the description is made with reference to the accompanying drawings in which:

[0038] It should be noted that in this specification, similar reference numbers and characters in the drawings represent similar items, and thus once an item is defined in one drawing, it need not be further defined and explained in subsequent drawings.

[0039] The technical solutions of the present application will be described clearly and completely below in conjunction with the drawings. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of the present application.

[0040] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0041] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral connection; it can be mechanical connection, or electrical connection; it can be direct connection, or indirect connection through an intermediate medium, or internal communication of two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0042] In order to make the purpose, technical scheme and advantages of the present application clearer, the embodiments of the present application will be further described in detail below with reference to the drawings.

[0043] Referring to FIG. 1a, the component separation device 7 according to the embodiments of the present application specifically comprises a heater 704, a distillation cavity 717 and a condenser 703. The heater 704 and the condenser 703 are both arranged in the distillation cavity 717, the heater 704 is attached to the inner surface of the side wall of the distillation cavity 717, the heater 704 is in a cylindrical structure, and the condenser 703 is located in the heater 704.

[0044] Continuously referring to FIG. 1a, the component separation device 7 further comprises a first liquid inlet pipeline 701, a light component collection tank 707, a heavy component collection tank 708 and a pressure detector 709. The first liquid inlet pipeline 701 and the heavy component collection tank 708 are both arranged on the wall of the distillation cavity 717. The heavy component collection tank 708 is used for receiving the waste liquid after distillation. The first liquid inlet pipeline 701 is in a whole annular structure, and the liquid outlet of the first liquid inlet pipeline 701 is arranged in the distillation cavity 717. The light component collection tank 707 is arranged at the bottom of the distillation cavity 717 and abuts against the condenser 703. The pressure detector 709 is used for detecting the pressure in the distillation cavity 717.

[0045] In an optional embodiment, the component separation device 7 further comprises a flow guide groove 711, which is arranged on the inner wall of the distillation cavity 717 and one end of the flow guide groove 711 is close to the inner surface of the heater 704. The waste liquid enters the distillation cavity 717 from the first liquid inlet pipeline 701, the flow guide groove 711 makes the waste liquid more easily reach the inner surface of the heater 704, the waste liquid flows downward along the inner surface of the heater 704, the heater 704 comprises a constant temperature heating assembly, the waste liquid is heated during the process of flowing downward along the inner surface of the heater 704, the light component in the waste liquid volatilizes and moves to the surface of the condenser 703 to condense and flow downward to the light component collection tank 707, and the waste liquid after distillation flows downward along the inner surface of the heater 704 and enters the heavy component collection tank 708. Thus, the separation process of the light component and the heavy component is completed. Optionally, the above separation process is carried out in a negative pressure environment, compared with a normal pressure environment, the light component is more easily volatilized in the negative pressure environment.

[0046] The working principle of the component separation device will be introduced in combination with FIG. 2 and the formula (1) of the average molecular motion distance.

[0047] L- the average molecular motion distance;

[0048] K- the Boltzmann constant;

[0049] d- the effective diameter of the molecule;

[0050] T- the space temperature where the molecule moves;

[0051] The space pressure where the P-molecules move.

[0052] The molecular effective diameter d of the heavy component 大 The molecular effective diameter d of the light component 小 Correspondingly, the average molecular movement distance L is different. By controlling the above parameters and the distance between the heater 704 and the condenser 703, the effective separation of the heavy component and the light component in the waste liquid 715 can be achieved.

[0053] The relative volatility formula (2) of the light component and the heavy component is as follows:

[0054] Wherein, ɑ 12 The volatility of the light component relative to the heavy component;

[0055] ɑ 21 The volatility of the heavy component relative to the light component;

[0056] M1-the mass fraction of the light component;

[0057] M2-the mass fraction of the heavy component;

[0058] P1-the saturated vapor pressure of the light component;

[0059] P2-the saturated vapor pressure of the heavy component.

[0060] From the above formula (2), the volatility of the light component relative to the heavy component ɑ 12 And the volatility of the heavy component relative to the light component ɑ 21 Both depend on the saturated vapor pressure of the light component and the heavy component and the relative molecular mass of the two. Under the same molecular distillation conditions, the volatility of the heavy component relative to the light component is lower.

[0061] The separation of the light component and the heavy component depends on the relative volatility ɑ and the average molecular movement distance L. During distillation, the molecules of the light component and part of the heavy component on the surface of the waste liquid volatilize, but the average molecular movement distance L2 of the light component is longer than the average molecular movement distance L1 of the heavy component. The distance between the condenser 703 and the heater 704 is greater than the average molecular movement distance L1 of the heavy component and less than the average molecular movement distance L2 of the light component. The light component volatilizes to the surface of the condenser 703, so that the light component and the heavy component are effectively separated.

[0062] Specifically, taking SPM liquid as an example, the SPM liquid includes H2SO4, H2O and H2O2, and the SPM liquid is used in a glue removal and cleaning process. In the process, part of the H2O2 in the SPM liquid reacts with the H2SO4 to generate persulfuric acid, and the other part of the H2O2 decomposes to generate water and oxygen, and the amount of residual H2O2 is very small and can be ignored. Therefore, the waste liquid of the SPM mainly includes H2SO4 and H2O, the light component in the waste liquid includes H2O, and the heavy component includes H2SO4.

[0063] The effective diameter d of the H2O molecule is 0.29 nm. 小 The effective diameter d of the H2SO4 molecule is 0.43 nm. 大 The space pressure P for controlling the movement of the molecules is 0-100 Pa, that is, the negative pressure is maintained in the distillation cavity 717, the space temperature T is 100-150℃, and the distance between the condenser 703 and the heater 704 is 2-20 mm. According to the formula (1) of the average movement distance of the molecules, the average movement distance L2 of the H2O molecule is 2.2 times of the average movement distance L1 of the H2SO4 molecule. According to the formula (2) of the relative volatility of the light component and the heavy component, the volatility a of the H2SO4 relative to the H2O is lower than the volatility a of the H2O relative to the H2SO4. 21 12 .

[0064] In combination with FIGS. 1a and 2, the inner surface temperature of the heater 704 is maintained at 50-150℃, the surface temperature of the condenser 703 is maintained at 20-50℃, and the distance between the heater 704 and the condenser 703 is controlled so that enough H2O molecules move to the condenser 703, and then flow downward to the light component collection tank 707 after condensation, and the H2SO4 solution flows along the surface of the heater 704 to the heavy component collection tank 708. By controlling the above parameters and the distance between the heater 704 and the condenser 703, the effective separation of H2SO4 and H2O can be realized. It should be noted that part of the H2SO4 molecules on the surface of the waste liquid volatilize, part of the volatilized H2SO4 molecules fall due to gravity, and the other part of the volatilized H2SO4 molecules can volatilize to the condenser 703 due to the violent movement between the molecules, and the volatilized H2SO4 solution accounts for a very small proportion in the waste liquid.

[0065] Under the condition that the negative pressure is maintained in the distillation cavity 717, the inner surface temperature of the heater 704 is maintained at 50-150℃, and the surface temperature of the condenser 703 is maintained at 20-50℃, the effective separation of the heavy component and the light component can be realized. Under the condition of normal pressure, the boiling point of sulfuric acid is 338℃, and the boiling point of water is 100℃. If the distillation cavity 717 is maintained at normal pressure or positive pressure, the inner surface temperature of the heater 704 needs to be further increased on the basis of the existing temperature, and the surface temperature of the condenser 703 needs to be further reduced on the basis of the existing temperature, so as to consume more energy. ​

[0066] The component separation device 7 further comprises an air extraction pipe 706, which is arranged on the wall of the distillation cavity 717. The air extraction port of the air extraction pipe 706 is arranged inside the distillation cavity 717. The air extraction pipe 706 is connected with an external second exhaust pump 9 (shown in FIG. 6). When the second exhaust pump 9 is turned on, the distillation cavity 717 is air extracted through the air extraction pipe 706, so as to control the pressure inside the distillation cavity 717 and keep the pressure inside the distillation cavity 717 at 0-100 Pa.

[0067] If the liquid film on the heater 704 is too thick, the H2O molecules in the waste liquid cannot be effectively evaporated. In an optional embodiment, the component separation device 7 further comprises a wiper 705, a wiper shaft 702 and a wiper driving device 714. In an embodiment, the wiper driving device 714 can be a motor. The wiper shaft 702 is connected with the wiper driving device 714. The wiper 705 is arranged on the wiper shaft 702 and is arranged between the heater 704 and the condenser 703. The wiper 705 is kept at a preset distance from the heater 704.

[0068] The wiper shaft 702 is driven to rotate by the wiper driving device 714, and the wiper 705 moves in a circular motion with the wiper shaft 702 to scrape off part of the waste liquid on the heater 704, so as to keep the liquid film on the heater 704 at a relatively uniform and stable thickness, thereby enabling the H2O molecules to be more effectively evaporated. The scraped waste liquid falls into the heavy component collection tank 708.

[0069] In an optional embodiment, the heater 704 is attached to the outer surface of the side wall of the distillation cavity 717, the waste liquid flows downward along the inner surface of the side wall of the distillation cavity 717, the heater 704 heats the waste liquid flowing along the inner surface of the side wall of the distillation cavity 717, the light components in the waste liquid volatilize and move to the surface of the condenser 703 to condense and flow downward into the light component collection tank 707, and the waste liquid after distillation flows downward along the inner surface of the side wall of the heater 704 into the heavy component collection tank 708. Further, the wiper 705 is arranged between the heater 704 and the condenser 703, and the wiper 705 moves to scrape off part of the waste liquid on the inner surface of the side wall of the distillation cavity 717.

[0070] Referring to FIG. 1b, in other optional ways, the heater 704 is arranged inside the distillation cavity 717, and the condenser 703 is attached to the inner surface of the side wall of the distillation cavity 717. The heater 704 has a cylindrical structure and is located inside the condenser 703. The light component collection tank 707 is arranged on the side wall of the distillation cavity 717 and is used to receive the light component solution. The heavy component collection tank 708 is arranged at the bottom of the distillation cavity 717 and abuts against the heater 704, and is used to receive the heavy component solution.

[0071] Embodiment One

[0072] Referring to FIG. 3a and FIG. 3b, the main difference between the component separation device according to the embodiment of the present application and the component separation device shown in FIG. 1a is the structure of the condenser 703.

[0073] Referring to FIG. 3b, the condenser 703 comprises at least two cold plates 7031, and the component separation device 7 comprises a cold plate rotating shaft 710, and all the cold plates 7031 are uniformly arranged on the outer periphery of the cold plate rotating shaft 710. The cold plate rotating shaft 710 is a hollow structure. An air extraction pipeline 706 is arranged at the bottom of the distillation cavity 717 and is connected to an external air extraction device. Specifically, the air extraction pipeline 706 is connected to an external second exhaust pump 9 (shown in FIG. 6). In order to make the internal layout of the distillation cavity 717 reasonable, one end of the air extraction pipeline 706 is arranged in the cold plate rotating shaft 710. In FIG. 3a, the heater 704 is attached to the inner surface of the side wall of the distillation cavity 717. In other ways, the heater can also be attached to the outer surface of the side wall of the distillation cavity 717.

[0074] The cold plates 7031 and the cold plate rotating shaft 710 are arranged in the distillation cavity 717. During the process, the cold plate rotating shaft 710 is driven to rotate, and the cold plates 7031 rotate with the cold plate rotating shaft 710. The waste liquid enters the component separation device 7 through the first liquid inlet pipeline 701, and flows downward along the surface of the heater 704 and is evaporated by heat during the downward flow, and the H2O molecules move to the surface of the cold plates 7031 to condense and flow downward to the light component collection tank 707, and the distilled waste liquid flows downward along the surface of the heater 704 and enters the heavy component collection tank 708. The plurality of cold plates 7031 are designed in a blade type, which expands the condensation area of the light component and improves the efficiency of recovery of the heavy component solution.

[0075] The component separation device 7 further comprises a light component switch valve 712 and a heavy component switch valve 713 arranged at the bottom of the distillation cavity 717, the light component switch valve 712 is connected to the light component collection tank 707 to discharge the solution in the light component collection tank 707, and the heavy component switch valve 713 is connected to the heavy component collection tank 708 to discharge the solution in the heavy component collection tank 708.

[0076] The wiper 705 is connected to a wiper driving device 714 outside the distillation cavity 717 through the wiper rotating shaft 702. During the process, the wiper driving device 714 drives the wiper 705 to rotate, and the wiper 705 moves in a circular motion, which can scrape part of the waste liquid on the heater 704, keep the liquid film on the heater 704 at a relatively uniform and stable thickness, and make the H2O molecules in the SPM waste liquid evaporate more effectively.

[0077] Embodiment two

[0078] Referring to FIG. 4a to FIG. 4d, the main difference between the component separation device according to the embodiment of the present application and the component separation device shown in FIG. 1a is the structure and layout of the condenser 703 and the heater 704.

[0079] Referring to FIG. 4a, the condenser 703 includes at least two cold plates 7031, and the heater 704 includes at least two hot plates 7041. The cold plates 7031 and the hot plates 7041 are arranged alternately, and a wiper 705 is arranged between the cold plates 7031 and the hot plates 7041. During the process, the wiper 705 moves linearly and reciprocally between the cold plates 7031 and the hot plates 7041.

[0080] Continuing to refer to FIG. 4b, the component separation device 7 includes a heavy component collection tank 708, a light component collection tank 707, a suction line 706, a plurality of flow guide grooves 711, a plurality of first liquid inlet lines 701, a plurality of wipers 705, a driver, and a wiper driving shaft 716 corresponding to the wipers 705. The wiper driving shaft 716 is connected to the driver. The first liquid inlet line 701 is arranged on a distillation cavity 717 and communicates with the flow guide groove 711. The lower end of the flow guide groove 711 is close to the upper end of the side surface of the hot plate 7041, so that the waste liquid is more easily to reach the side surface of the hot plate 7041.

[0081] The distillation cavity 717 is kept under negative pressure by suction through the suction line 706. As shown in FIG. 4a and FIG. 4b, the heavy component collection tank 708 is abutted to the lower end of the side surface of the hot plate 7041 for receiving the heavy component solution, and the light component collection tank 707 is abutted to the lower end of the side surface of the cold plate 7031 for receiving the light component solution. Both sides of the cold plate 7031 located in the distillation cavity 717 and having a spacing from the inner surface of the side wall of the distillation cavity 717 can be used for condensing the light component, and both sides of the hot plate 7041 located in the distillation cavity 717 and having a spacing from the inner surface of the side wall of the distillation cavity 717 can be used for heating the waste liquid.

[0082] The waste liquid enters the distillation cavity 717 through the first liquid inlet line 701, and then flows to the side surface of the hot plate 7041 through the flow guide groove 711. After being heated, the light component in the waste liquid volatilizes to the side surface of the corresponding cold plate 7031 and condenses. In this process, the side surface of the hot plate 7041 through which the waste liquid flows is opposite to the side surface of the cold plate 7031 on which the light component condenses. The condensed light component solution flows into the light component collection tank 707, and the heavy component solution flows into the heavy component collection tank 708. During the process, the driver drives the wiper 705 to move linearly and reciprocally through the wiper driving shaft 716, so as to scrape off part of the waste liquid on the heater 704, and keep the waste liquid on the heater 704 at a relatively uniform and stable thickness, so that the light component in the waste liquid can be more effectively volatilized.

[0083] Referring to Fig. 4c, the cold plate 7031 is internally provided with annular cold water pipes 70311, which are as evenly distributed as possible inside the cold plate 7031, so that the temperature of the whole cold plate 7031 is uniform. Referring to Fig. 4d, the hot plate 7041 is internally provided with annular heating wires 70411, which are as evenly distributed as possible inside the hot plate 7041, and the hot plate 7041 maintains a constant temperature, so that the temperature of the whole hot plate 7041 is uniform and constant.

[0084] The component separation device of the embodiment improves the efficiency of light component distillation by using multiple cold plates and hot plates, and expanding the evaporation area by double-side evaporation of the hot plates and expanding the condensation area by double-side condensation of the cold plates.

[0085] Embodiment Three

[0086] Referring to Figs. 5a and 5b, the main difference between the component separation device of the embodiment and the component separation device shown in Fig. 1a is the structure and layout of the heater 704 and the condenser 703.

[0087] The heater 704 comprises a first heating unit 7042 and a second heating unit 7043, both of which are in the form of hollow cylinders, and the first heating unit 7042 is located inside the second heating unit 7043. The condenser 703 comprises at least two cold plates 7031, all of which are arranged around the outer periphery of the first heating unit 7042, and the second heating unit 7043 is arranged around the outer periphery of the cold plates 7031.

[0088] A film scraper 705 is arranged between the cold plate 7031 and the first heating unit 7042, and between the cold plate 7031 and the second heating unit 7043, and during the process, the film scrapers 705 between the cold plate 7031 and the first heating unit 7042 and between the cold plate 7031 and the second heating unit 7043 rotate.

[0089] An air extraction pipe 706 is arranged at the bottom of the distillation cavity 717 and is connected to an external air extraction device. In order to make the internal layout of the distillation cavity 717 reasonable, one end of the air extraction pipe 706 is arranged inside the first heating unit 7042.

[0090] The component separation device 7 further comprises a plurality of heavy component collection tanks 708 and a plurality of light component collection tanks 707. The first heating unit 7042 and the second heating unit 7043 are respectively abutted by the heavy component collection tanks 708, and the two sides of the cold plate 7031 are respectively abutted by the light component collection tanks 707. The heavy component collection tanks 708 are used to receive heavy component solutions, and the light component collection tanks 707 are abutted on the cold plate 7031 to receive light component solutions.

[0091] To improve the condensation efficiency, the condenser 703 comprises six cold plates 7031, one end of the cold plate 7031 is away from the central axis of the first heating unit 7042 relative to the other end, as shown in FIG. 5b. In this embodiment, the cold plate 7031 is a rectangular plate structure, and the two ends of the cold plate 7031 are two parallel edges. One edge of the cold plate 7031 is away from the central axis of the first heating unit 7042 relative to the other edge, that is, the cold plate 7031 is arranged in a non-forward direction towards the first heating unit 7042. More cold plates 7031 can be arranged on the outer periphery of the first heating unit 7042 to increase the condensation area of the light components. Of course, the number of cold plates 7031 is not limited to six, and different numbers of cold plates 7031 can be arranged according to process requirements. Optionally, the shape of the cold plate 7031 is not limited to a rectangle, and the cold plate 7031 can be a triangular, square, or other plate structure.

[0092] It should be noted that the structure of the component separation device 7 is not limited to the above-mentioned several embodiments. For example, the heater 704 is attached to the outer surface of the side wall of the distillation cavity 717, and the condenser 703 is arranged in the distillation cavity 717, or the condenser 703 is attached to the outer surface of the side wall of the distillation cavity 717, and the heater 704 is arranged in the distillation cavity 717. The above-mentioned application is only used as an example and does not constitute a limitation on the present application. Certain features, structures or characteristics in one or more embodiments of the present application can be properly combined, equivalently modified, etc. Such modifications, improvements, and corrections still belong to the spirit and scope of the exemplary embodiments of the present application.

[0093] Embodiment four

[0094] The embodiment of the present application provides a liquid recovery device. Referring to FIG. 6, the liquid recovery device comprises a working module, a recovery module, a separation module and a liquid supply module connected in sequence. The processing liquid becomes waste liquid after working in the working module, and is then discharged or recovered through the recovery module. If the waste liquid needs to be recovered, the waste liquid flows from the recovery module to the separation module, and the waste liquid is separated in the separation module to separate a heavy component solution and a light component solution. The heavy component solution flows into the liquid supply module, and the liquid supply module supplies liquid according to the demand of the working module.

[0095] The working module comprises a working unit 1 and a first pipeline 27. The first pipeline 27 is used to mix the heavy component solution of the liquid supply module with other solutions outside and then transmit the mixed solution into the working unit 1.

[0096] The recovery module comprises a second pipeline 2, a first measuring meter 3 and a collection and discharge three-way valve 4 connected in sequence. The recovery module further comprises a third pipeline 5 and a fourth pipeline 31. One end of the second pipeline 2 is connected to the working unit 1. The third pipeline 5 is connected to one of the outlets of the collection and discharge three-way valve 4. The fourth pipeline 31 is connected to the other outlet of the collection and discharge three-way valve 4.

[0097] The separation module comprises, in sequence, the gas-liquid separation device 6, the component separation device 7 in the above embodiment, the heavy component recovery tank 11, the second measuring meter 12, the delivery pump 13, the heavy component recovery liquid three-way valve 28 and the sixth pipeline 30. One end of the sixth pipeline 30 is connected with one outlet of the heavy component recovery liquid three-way valve 28, and the other end of the sixth pipeline 30 is connected with the component separation device 7. One end of the fourth pipeline 31 is connected with the gas-liquid separation device 6.

[0098] The separation module further comprises the first exhaust pump 8, the second exhaust pump 9 and the fifth pipeline 10. The fifth pipeline 10 comprises two branches. One branch of the fifth pipeline 10 is connected with the gas-liquid separation device 6, and the first exhaust pump 8 is arranged on the one branch of the fifth pipeline 10 connected with the gas-liquid separation device 6, for controlling the pressure in the gas-liquid separation tank 602. The component separation device 7 is connected with the other branch of the fifth pipeline 10, and the second exhaust pump 9 is arranged on the other branch of the fifth pipeline 10 connected with the component separation device 7, for controlling the pressure in the component separation device 7. The exhaust gas generated in the gas-liquid separation device 6 and the component separation device 7 is discharged to the outside of the equipment through the fifth pipeline 10.

[0099] The liquid supply module comprises, in sequence, the seventh pipeline 29, the first filter 14, the liquid supply tank 15, the second pump 16, the second filter 17, the heater 18, the third measuring meter 19 and the eighth pipeline 20. The seventh pipeline 29 is connected with the other outlet of the heavy component recovery liquid three-way valve 28. One end of the eighth pipeline 20 is connected with the liquid supply tank 15. The first filter 14 is used for filtering the particles in the solution supplied from the heavy component recovery tank 11 to the liquid supply tank 15. The second filter 17 is used for filtering the particles in the solution flowing from the liquid supply tank 15 to the eighth pipeline 20.

[0100] The liquid supply module further comprises the ninth pipeline 21, the first switch valve 22, the tenth pipeline 23, the second switch valve 24, the third switch valve 25 and the eleventh pipeline 26. The ninth pipeline 21 is connected with the liquid supply tank 15, and the first switch valve 22 is arranged on the ninth pipeline 21. The second switch valve 24 is arranged on the tenth pipeline 23. One end of the eleventh pipeline 26 is connected with the first pipeline 27, and the other end of the eleventh pipeline 26 is connected with an external liquid supply part, and the third switch valve 25 is arranged on the eleventh pipeline 26.

[0101] The other end of the eighth pipeline 20 comprises two branches, one of which is connected with the liquid supply tank 15, and the other of which is connected with one end of the tenth pipeline 23, and the other end of the tenth pipeline 23 is connected with the first pipeline 27. When the second pump 16 is turned on, the recovery liquid of the liquid supply module can be self-circulated between the liquid supply tank 15 and the eighth pipeline 20.

[0102] For example, the waste liquid after SPM process is recovered, the second switch valve 24 is opened, the recovered H2SO4 solution is introduced into the tenth pipeline 23 from the liquid supply tank 15 through the eighth pipeline 20, and then introduced into the first pipeline 27, the third switch valve 25 is opened, H2O2 is introduced into the first pipeline 27 through the eleventh pipeline 26, the H2SO4 solution and H2O2 are mixed in the first pipeline 27, and the mixed SPM processing liquid is introduced into the operation unit 1 to process the substrate placed in the operation unit 1. The waste liquid discharged from the operation unit 1 reaches the collection and discharge three-way valve 4 through the second pipeline 2.

[0103] During the operation of the recovery module, when the H2SO4 concentration reaches the preset value or the temperature of the waste liquid reaches the set value, the collection and discharge three-way valve 4 opens the recovery mode, and the waste liquid enters the fourth pipeline 31 to start the exhaust and concentration operation. The first measuring meter 3 can be a temperature measuring meter or a concentration measuring meter, or an integrated unit of a temperature measuring meter and a concentration measuring meter, and is used to measure the H2SO4 concentration or the temperature of the waste liquid. When the H2SO4 concentration or the temperature of the waste liquid is lower than the set value, the collection and discharge three-way valve 4 opens the discharge mode, and the waste liquid enters the third pipeline 5 without recovery.

[0104] When the collection and discharge three-way valve 4 opens the recovery mode, the waste liquid enters the gas-liquid separation device 6 through the fourth pipeline 31. Referring again to FIG. 1a, the gas-liquid separation device 6 includes a second liquid inlet pipeline 601, a gas-liquid separation tank 602, a waste gas exhaust pipeline 603, a fourth switch valve 604, and a pressure detector 605. The second liquid inlet pipeline 601 and the waste gas exhaust pipeline 603 are both arranged at the top of the gas-liquid separation tank 602, the fourth pipeline 31 is connected to the inlet end of the second liquid inlet pipeline 601, the outlet end of the second liquid inlet pipeline 601 and one end of the waste gas exhaust pipeline 603 are communicated with the gas-liquid separation tank 602, and the other end of the waste gas exhaust pipeline 603 is connected to the fifth pipeline 10. The pressure detector 605 is used to monitor the pressure in the gas-liquid separation tank 602. The first liquid inlet pipeline 701 is connected to the gas-liquid separation tank 602, and the fourth switch valve 604 is arranged on the first liquid inlet pipeline 701.

[0105] In the gas-liquid separation device 6, the waste liquid enters the gas-liquid separation tank 602 through the second liquid inlet pipeline 601, the gas-liquid separation tank 602 always maintains a negative pressure state, the preset pressure is 0.01-1 atm, and a small amount of H2O2 is also included in the waste liquid after the SPM process, which can decompose the residual H2O2 in the waste liquid as much as possible under the negative pressure condition, and the H2O2 decomposes to generate oxygen and water molecules. In addition, the gas-liquid separation tank 602 maintains a negative pressure state, which can release the gas accumulated in the waste liquid, such as water vapor, which includes oxygen and water molecules.

[0106] The first exhaust pump 8 is opened, and the decomposed oxygen and water vapor released from the waste liquid enter the fifth pipeline 10 through the exhaust pipeline 603, so that the pressure in the gas-liquid separation tank 602 is maintained within a preset pressure range. The gas-liquid separation tank 602 is provided with a liquid level sensor for detecting the liquid level position in the gas-liquid separation tank 602. When the liquid level is higher than the preset liquid level value, and the pressure detector 605 detects that the pressure in the gas-liquid separation tank 602 reaches the set pressure, the fourth switch valve 604 is opened. When the fourth switch valve 604 is opened, the waste liquid in the gas-liquid separation tank 602 flows into the distillation cavity 717 through the first liquid inlet pipeline 701.

[0107] The waste liquid is subjected to primary gas-liquid separation in the gas-liquid separation device 6, and the waste liquid subjected to primary gas-liquid separation enters the component separation device 7 through the first liquid inlet pipeline 701. Referring again to FIG. 1a, the waste liquid flows downward along the heater 704, which has a constant temperature heating device inside to maintain the surface temperature of the heater 704 within 50-150°C. During the downward flow of the waste liquid along the surface of the heater 704, the water molecules are evaporated by heat and move to the condenser 703 to be condensed downward. The surface temperature of the condenser 703 is maintained at 20-50°C during the process.

[0108] The exhaust pipeline 706 is connected to the fifth pipeline 10, and the second exhaust pump 9 is arranged on another branch of the fifth pipeline 10. When the second exhaust pump 9 is opened, the distillation cavity 717 is exhausted through the exhaust pipeline 706 and discharged to the outside of the equipment through the fifth pipeline 10, so as to control the pressure in the distillation cavity 717 and maintain the pressure in the distillation cavity 717 at 0-100 Pa. The pressure detector 709 detects the pressure in the component separation device 7.

[0109] The heavy component collection tank 708 is connected to the heavy component recovery tank 11. The distilled waste liquid flows downward along the heater 704 into the heavy component collection tank 708 and then flows into the heavy component recovery tank 11. The distilled H2O molecules flow downward along the surface of the condenser 703 into the light component collection tank 707. During this process, the distance between the heater 704 and the condenser 703 needs to be controlled so that enough H2O molecules move to the condenser 703.

[0110] The second measuring meter 12 is used to detect whether the concentration of the heavy component in the heavy component recovery tank 11 meets the standard. If the concentration of the heavy component in the heavy component recovery tank 11 does not reach the set value, the delivery pump 13 is opened, and the heavy component recovery liquid three-way valve 28 is opened. The solution in the heavy component recovery tank 11 is returned to the component separation device 7 through the sixth pipeline 30 for concentration. If the concentration of the heavy component meets the set standard, the delivery pump 13 is opened, and the heavy component recovery liquid three-way valve 28 is opened. The solution in the heavy component recovery tank 11 enters the liquid supply tank 15 through the seventh pipeline 29 and the first filter 14.

[0111] The third measuring meter 19 monitors the concentration of the solution in the liquid supply tank 15. When the concentration of the heavy component (the concentration of the H2SO4 solution) in the liquid supply tank 15 is lower than a set value, the first switch valve 22 is opened, and the ninth pipeline 21 injects a higher concentration of H2SO4 solution into the liquid supply tank 15 to increase the concentration of the H2SO4 solution in the liquid supply tank 15. When the concentration of the heavy component in the liquid supply tank 15 reaches the set value, the recovered liquid reaches the tenth pipeline 23 through the eighth pipeline 20.

[0112] The second pump 16 is used to circulate the solution in the liquid supply tank 15 between the liquid supply tank 15 and the eighth pipeline 20. The heater 18 heats the solution on the eighth pipeline 20. When the temperature of the solution in the liquid supply tank 15 reaches a predetermined value, the second switch valve 24 is opened, and the solution in the liquid supply tank 15 is filtered through the second filter 17 and then enters the tenth pipeline 23 through the eighth pipeline 20. When the temperature of the solution in the liquid supply tank 15 does not reach the predetermined value, the solution in the liquid supply tank 15 continues to circulate between the liquid supply tank 15 and the eighth pipeline 20, and the heater 18 continues to heat the solution.

[0113] In an optional embodiment, a fifth switch valve is added between the component separation device 7 and the heavy component recovery tank 11. When the fifth switch valve is opened, the solution in the heavy component collection tank 708 flows into the heavy component recovery tank 11, achieving isobaric drainage. When the fifth switch valve is closed, the heavy component recovery tank 11 returns to normal pressure, and the solution in the heavy component recovery tank 11 is drained into the sixth pipeline 30 or the seventh pipeline 29.

[0114] Embodiment Five

[0115] The embodiments of the present application provide a liquid recovery method, which is applied to the liquid recovery device in the above-mentioned embodiment four.

[0116] FIG. 7 is a flowchart of a liquid recovery method according to an embodiment of the present application, which includes the following steps:

[0117] In step S01, the operation module starts to work.

[0118] In step S02, it is detected whether the concentration of the heavy component in the waste liquid drained from the operation module reaches a preset value or the temperature of the waste liquid reaches a set value. If yes, step S031 is performed, and if no, step S032 is performed.

[0119] In step S031, the recovery module starts the recovery mode, controls the collection-drainage three-way valve to be opened, and then step S04 is performed.

[0120] In step S032, the recovery module starts the drainage mode, controls the collection-drainage three-way valve to be opened, and then performs the drainage.

[0121] In step S04, the waste liquid enters the separation module.

[0122] Step S05, detecting whether the concentration of the heavy component in the heavy component recovery tank meets the standard, if yes, proceeding to step S06, if no, the solution in the heavy component recovery tank re-enters the separation module, and repeating step S04;

[0123] Step S06, the solution in the heavy component recovery tank enters the liquid supply module;

[0124] Step S07, detecting whether the concentration of the heavy component in the liquid supply tank reaches the set value, if yes, proceeding to step S08, if no, the ninth pipeline injects a solution of the heavy component with a higher concentration into the liquid supply tank, and then proceeding to step S08;

[0125] Step S08, supplying liquid from the liquid supply tank to the operation module.

[0126] The present application does not require the concentration of the heavy component in the treatment liquid and the ratio between the heavy component and the light component. The light component is volatilized after the waste liquid is heated and evaporated, and then condensed, so as to separate the heavy component and the light component in the waste liquid. The waste liquid after distillation is concentrated to a solution of the heavy component with a certain concentration, which is used for liquid supplement of the operation module. Compared with the existing liquid recovery process, the liquid recovery equipment and method of the present application can be applied to recover SPM treatment liquid with a lower H2SO4 concentration.

[0127] The above embodiments only exemplarily illustrate the principles and effects of the present application, and are not used to limit the present application. Any person skilled in the art can modify or change the above embodiments without departing from the spirit and scope of the present application. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought of the present application should be covered by the claims of the present application.

Claims

1. A component separation device, characterized in that, It includes a heater, a distillation chamber, a condenser, a light component collection tank and a heavy component collection tank, wherein the condenser is disposed on the inner surface of the side wall of the distillation chamber or inside the distillation chamber, and the heater is disposed inside the distillation chamber or on the inner surface of the side wall of the distillation chamber; The heater is used to heat the waste liquid flowing over its surface, causing the waste liquid to evaporate. The light components therein volatilize to the surface of the condenser and condense before flowing into the light component collection tank. The heavy components therein flow from the surface of the heater into the heavy component collection tank. The distance between the condenser and the heater is greater than the average molecular motion path L1 of the heavy components and less than the average molecular motion path L2 of the light components.

2. The component separation device according to claim 1, characterized in that, It also includes a scraper, which is movably disposed between the heater and the condenser, and is used to scrape off a portion of the waste liquid on the heater.

3. The component separation device according to claim 1, characterized in that, The pressure inside the distillation chamber is lower than atmospheric pressure.

4. The component separation device according to claim 1, characterized in that, It also includes a cold plate shaft. The condenser includes at least two cold plates. The cold plate shaft is disposed inside the distillation chamber. The at least two cold plates are disposed on the outer periphery of the cold plate shaft and rotate with the cold plate shaft.

5. The component separation device according to claim 1, characterized in that, It also includes a first liquid inlet pipe, the outlet of which is located inside the distillation chamber to allow waste liquid to flow into the distillation chamber; A flow guide groove is also provided on the inner wall of the distillation chamber. The first liquid inlet pipe is connected to the flow guide groove. One end of the flow guide groove is close to the heater. The flow guide groove is used to guide the waste liquid flowing in from the first liquid inlet pipe to the surface of the heater.

6. The component separation device according to claim 1, characterized in that, The condenser includes at least two cold plates, and the heater includes at least two hot plates, with the cold plates and the hot plates arranged alternately.

7. The component separation device according to claim 1, characterized in that, The heater includes a first heating unit and a second heating unit disposed around the outer periphery of the first heating unit. Both the first heating unit and the second heating unit are hollow cylindrical structures. The condenser includes at least two cold plates disposed between the first heating unit and the second heating unit.

8. The component separation device according to claim 7, characterized in that, A film scraper is provided between the cold plate and the first heating unit, and between the cold plate and the second heating unit.

9. The component separation device according to claim 7, characterized in that, One end of the cold plate is farther away from the central axis of the first heating unit than the other end.

10. A liquid recovery device, characterized in that, It includes a separation module, which includes the component separation device as described in any one of claims 1-9.

11. The liquid recovery device according to claim 10, characterized in that, The separation module also includes a gas-liquid separation device; The gas-liquid separation device includes a second inlet pipe, a gas-liquid separation tank, a waste gas extraction pipe, a pressure detector, and a fourth switch valve. The pressure in the gas-liquid separation tank is configured to be lower than atmospheric pressure. The pressure detector is used to monitor the pressure in the gas-liquid separation tank. The outlet end of the second inlet pipe is located in the gas-liquid separation tank to allow waste liquid to flow into the gas-liquid separation tank. The component separation device includes a first liquid inlet pipe, which is connected to the gas-liquid separation tank. The fourth switch valve is disposed on the first liquid inlet pipe. The first liquid inlet pipe is used to allow the waste liquid in the gas-liquid separation device to flow into the distillation chamber. One end of the exhaust gas extraction pipeline is connected to the gas-liquid separation tank, and is used to discharge the gas in the gas-liquid separation tank to the outside of the gas-liquid separation device.

12. The liquid recovery device according to claim 11, characterized in that, The separation module also includes a heavy component recovery tank, a second measuring instrument, a heavy component recovery liquid three-way valve, and a sixth pipeline connected in sequence, the sixth pipeline being connected to the component separation device; The heavy component recovery tank is connected to the heavy component collection tank and is used to receive the heavy component solution. The second measuring instrument is used to detect whether the concentration of the heavy component solution in the heavy component recovery tank meets the standard. The three-way valve for the recovery liquid of the heavy component is configured to open when the concentration of the heavy component solution in the heavy component recovery tank does not meet the preset value, so that the solution enters the sixth pipeline and flows back into the component separation device through the sixth pipeline.

13. The liquid recovery device according to claim 12, characterized in that, It also includes an operation module and a recycling module; The recovery module includes a third pipeline, a fourth pipeline, and a second pipeline, a first measuring instrument, and a collection and drainage three-way valve connected in sequence. The operation module includes an operation unit, one end of the second pipeline is connected to the operation unit, and one end of the fourth pipeline is connected to the gas-liquid separation device. The first measuring instrument is used to monitor the concentration of heavy components or the temperature of waste liquid in the second pipeline. The collection and drainage three-way valve is configured to: be controlled in the drainage mode of the recovery module to allow waste liquid to enter the third pipeline, and be controlled in the recovery mode of the recovery module to allow waste liquid to enter the fourth pipeline.

14. The liquid recovery device according to claim 13, characterized in that, It also includes a liquid supply module, which includes a seventh pipeline, a liquid supply tank, a second pump, a heater, a third measuring instrument, an eighth pipeline, and a tenth pipeline connected in sequence. The seventh pipeline is connected to one outlet of the three-way valve of the heavy component recovery liquid. The third measuring instrument is used to monitor the solution concentration in the liquid supply tank. The heater is used to heat the solution on the eighth pipeline. One end of the eighth pipeline is connected to the liquid supply tank, and the other end of the eighth pipeline includes two branches, one of which is connected to the liquid supply tank and the other branch is connected to the tenth pipeline. The three-way valve for the recovery of heavy components is configured to open when the concentration of the heavy component solution in the recovery tank meets a preset value, so that the solution enters the seventh pipeline.

15. The liquid recovery device according to claim 11, characterized in that, The separation module also includes a first exhaust pump, a second exhaust pump, and a fifth pipeline. The fifth pipeline includes two branches, one of which is connected to the exhaust gas extraction pipeline. The first exhaust pump is located on the branch of the fifth pipeline connected to the exhaust gas extraction pipeline. Another branch of the fifth pipeline is connected to the component separation device, and the second exhaust pump is installed on the branch of the fifth pipeline connected to the component separation device; The fifth pipeline is used to discharge the waste gas generated by the component separation device and the gas-liquid separation device outside the liquid recovery equipment.

16. A liquid recovery method, applied to the liquid recovery equipment of claim 14, characterized in that, Includes the following steps: Step S01: The task module begins operation; Step S02: Detect whether the concentration of heavy components in the waste liquid discharged from the working module reaches the preset value or whether the temperature of the waste liquid reaches the set value. If yes, proceed to step S031; otherwise, proceed to step S032. Step S031: The recycling module starts the recycling mode and controls the opening of the collection and drainage three-way valve to proceed to step S04. Step S032: The recovery module starts the drainage mode and controls the collection and drainage three-way valve to open for drainage. Step S04: The waste liquid enters the separation module; Step S05: Check whether the concentration of heavy components in the heavy component recovery tank meets the standard. If yes, proceed to step S06. If no, the solution in the heavy component recovery tank re-enters the separation module and repeat step S04. Step S06: The solution in the recombinant component recovery tank enters the liquid supply module; Step S07: Check whether the concentration of the heavy component in the supply tank has reached the set value. If yes, proceed to step S08. If no, inject a higher concentration of heavy component solution into the supply tank and then proceed to step S08. Step S08: Supply liquid from the liquid supply tank to the operation module.

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